JP2012039081A - Laminator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laminator that allows easy laminating by minimizing the generation of foreign matters that inhibit adhesion force between a substrate and a photosensitive film.SOLUTION: A laminator comprises a substrate supply part 10 for supplying a substrate 1 by a vertical driving method, a film supply part 20 for supplying a photosensitive film 2 to be laminated on the substrate 1, and a crimp part 30 for laminating the photosensitive film 2 to the substrate 1. The substrate supply part 10 includes a clamp roller 11 disposed in a vertical direction, a sensor 12 for detecting a transport position of the substrate by the clamp roller, and a guide panel 13 for guiding the substrate 1 to be transported by the clamp roller 11 to the crimp part 30.

Description

  The present invention relates to a laminator.

  On the contrary, the size of the circuit pattern becomes very small when a thick photoresist layer has to be formed by integration of semiconductor elements. Therefore, in the printed circuit board manufacturing process, in order to realize the fine line width of the copper pattern, the lamination process of laminating the photosensitive film used in the circuit forming process on the board is recognized as an important process. Yes.

  A laminator is an apparatus for laminating a photosensitive film on a substrate in the lamination process. In this connection, Patent Document 1 and Patent Document 2 can be cited as examples, and the technical contents thereof can be simplified. The explanation is as follows.

  Patent Documents 1 and 2 are apparatuses for laminating a photosensitive film (described as a dry film) on a substrate using a roll, and are shown in pages 5 to 6 of Patent Document 1 and FIG. As described above, after peeling the cover from the photosensitive film, the photosensitive film is laminated on the upper surface of the substrate by passing between the pair of upper and lower pressure rollers and simultaneously passing the substrate between the pressure rollers. is doing.

  In addition, as shown in FIG. 2, in Patent Document 2, pages 3 to 4 and FIG. 2, a photosensitive film is disposed on and below a substrate supplied in a horizontal manner by a conveyor, and the substrate and the photosensitive film are then supplied. By passing between a pair of pressure rollers, a photosensitive film is laminated on both sides of the substrate.

  However, as can be seen from the description of the text and the drawings in Patent Document 1 and Patent Document 2, since the photosensitive film is laminated on the surface after the substrate is supplied by a conveyor by a horizontal drive system, the photosensitive film and An element that hinders the adhesion force can be generated, which adversely affects the lamination process.

  As an element that hinders the adhesive force between the substrate and the photosensitive film, particles such as chips generated at the time of cutting in the lamination process can be given as an example, and foreign substances represented by such particles can be exemplified. When laminating to match the photosensitive film while remaining on the surface of the substrate, the adhesion between the substrate and the photosensitive film can be reduced.

  That is, the problem of a decrease in the adhesion between the substrate and the photosensitive film due to the occurrence of such foreign matters is closely related to supplying the substrate by a horizontal driving method.

Korean Patent Publication No. 10-2006-0029422A Specification Korean Patent Publication No. 10-2009-0111595A Specification

  Accordingly, the present invention includes Patent Document 1 and Patent Document 2, and is intended to solve the problem of decrease in adhesion between the substrate and the photosensitive film that occurs in the conventional prior art in which the substrate is supplied in a horizontal drive system. It is.

  An object of the present invention is to provide a laminator in which laminating can be easily performed by minimizing the generation of foreign substances that inhibit the adhesion between a substrate and a photosensitive film.

  In order to achieve the above object, the present invention provides a substrate supply unit for supplying a substrate in a vertical drive system; a film supply unit for supplying a photosensitive film to be laminated on the substrate; and laminating a photosensitive film on the substrate. Provided is a laminator including a crimping part.

  The substrate supply angle by the substrate supply unit may be 45 to 90 °.

  The substrate supply unit may include a clamp roller arranged in a vertical direction; a sensor that detects a transfer position of the substrate by the clamp roller; and a guide panel that guides the substrate transferred by the clamp roller to the crimping unit. .

  The sensor may be disposed at the front and rear ends of the clamp roller.

  The film supply unit includes a supply roller for transferring the leading end of the photosensitive film wound up in a roll shape to the adsorption unit; a slide guide for guiding the leading end of the photosensitive film transferred by the supply roller; A peeling guide and a cover roller for peeling and winding the cover from the photosensitive film guided by the slide guide; an adsorption guide for adsorbing the tip of the photosensitive film from which the cover has been peeled; and the photosensitive film A tension roller disposed between the supply roller and the suction guide can be included to adjust the tension.

  The crimping part can be composed of a pair of pressure rollers.

  The adsorption guide may contain a heat ray.

  According to the present invention, by supplying the substrate in a vertical drive system, foreign matter that inhibits the adhesion with the photosensitive film does not remain on the surface of the substrate or is minimized, so that laminating can be easily performed. Has the effect of

  In addition, by allowing the substrate supply angle to be freely set from a minimum of 45 ° to a maximum of 90 ° that can induce the natural fall of foreign matter, the relationship between the lamination process space and other devices can be established. Since the substrate supply unit, the film supply unit, and the pressure bonding unit can be freely arranged based on the judgment, the lamination process can be facilitated.

  On the other hand, the heat guide is built in the adsorption guide, so that the temperature of the photosensitive film is continuously maintained at the initial preheating level to improve the adhesion, thereby improving the defect that the photosensitive film is not attached to the substrate. There is an effect that can.

It is the schematic which shows the Example of the laminator by this invention. It is the schematic which shows the process in which a board | substrate and a photosensitive film are laminated by the laminator by this invention. It is sectional drawing which partially cuts and shows what the heat guide was incorporated in the adsorption guide by this invention.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  The present invention provides a substrate supply unit that is disposed in a lamination process and supplies the substrate 1 in a vertical drive system in order to minimize the generation of foreign matter that inhibits the adhesion between the substrate 1 and the photosensitive film 2. 10. In order to supply the photosensitive film 2 laminated on the substrate 1, a film supply unit 20 disposed in the lamination process and a pressure bonding unit 30 for laminating the substrate 1 and the photosensitive film 2 are included. Is a basic feature of the technical configuration.

  Here, as a foreign substance that inhibits the adhesion between the substrate 1 and the photosensitive film 2, the present invention aims at particles such as chips generated when the photosensitive film 2 is cut in a normal lamination process. It should be interpreted as a comprehensive term including, but not limited to, dust particles that naturally occur in the lamination process.

  Therefore, in the present invention, the meaning of minimizing the occurrence of foreign matters means that the number of foreign matters remaining on the surface of the substrate 1 is minimized, and the photosensitive film 2 and the photosensitive film 2 are added without adding another process such as air injection. Laminating is facilitated by improving the adhesion of the material.

  Further, the substrate 1 can be a copper panel as an example, and a dry film can be used as an example of the photosensitive film 2, but this is merely for use in understanding the present invention. It is only an example.

  On the other hand, the vertical supply of the substrate 1 by the substrate supply unit 10 according to the present invention means that the substrate 1 is supplied in a vertical direction that is a direction intersecting the ground (lateral direction). It is sufficient that the foreign matter remaining on the substrate can be dropped even if it gradually proceeds in the transfer process of the substrate 1.

  More preferably, the substrate 1 is supplied at an angle at which the foreign matter remaining on the surface of the substrate 1 can easily fall naturally, and the minimum supply angle is 45 ° and the maximum supply angle is 90 °. Will be set to.

  Therefore, after calculating the appropriate supply angle of the substrate 1 according to the space or situation of the site where the lamination process proceeds, the substrate supply unit 10, the film supply unit 20, and the pressure bonding unit 30 are arranged and operated. Hereinafter, in the embodiment, a description will be given on the basis of the substrate 1 set at a maximum supply angle of 90 °.

  As shown in FIG. 1, the substrate supply unit 10 according to the present invention includes a clamp roller 11, a sensor 12, and a pair of guide panels 13 disposed so as to face each other in a vertical direction in a lamination process. That is, the clamp rollers 11 are configured as a pair and are arranged in the vertical direction so as to correspond to each other, and the arrangement interval corresponds to the thickness of the substrate 1.

  The sensor 12 is disposed adjacent to the clamp roller 11 so as to detect the position of the substrate 1 transferred in the vertical direction through the clamp roller 11. More preferably, sensors 12 are disposed at the front and rear ends of the clamp roller 11 so as to detect the loading and unloading of the substrate 1, respectively, and the number thereof can be increased for ease of detection of the substrate 1.

  The guide panel 13 is configured in a pair so as to guide the substrate 1 that has passed through the clamp roller 11 to the crimping portion 30, and is disposed between the clamp roller 11 and the crimping portion 30.

  The film supply unit 20 according to the present invention includes a supply roller 21, a slide guide 22, a peeling guide 23, a cover roller 24, a suction guide 25, and a tension roller 26 installed in the vertical direction in the lamination process. That is, the supply roller 21 is arranged and operated at the upper part of the lamination process so as to guide the front end of the photosensitive film 2 unwound from a film roll and supply it in the vertical direction.

  In addition, a slide guide 22 is vertically disposed below the supply roller 21 to guide the front end of the photosensitive film 2, and a peeling guide 23 and a cover roller 24 are disposed so as to match the slide guide 22. Thus, the cover 2a is peeled from the photosensitive film 2.

  Further, the suction guide 25 is disposed adjacent to the upper portion of the crimping portion 30, and the tip of the photosensitive film 2 from which the cover 2 a has been peeled is sucked and supplied to the crimping portion 30. By arranging the tension roller 26 between the suction guide 25 and the supply roller 21 as described above, the tension of the photosensitive film 2 is adjusted, and thus the parallelism is maintained.

  That is, by adjusting the tension of the photosensitive film 2 by the tension roller 26 and maintaining parallelism, the transport safety by the supply roller 21 and the easy cover 2a by the slide guide 22, the peeling guide 23, and the cover roller 24 are facilitated. It can be peeled off.

  More preferably, the side roller 27 is disposed between the film roll 2b and the supply roller 21 so that the photosensitive film 2 can be more easily maintained horizontally by the tension roller 26. Adoption of the side roller 27 is an optional matter.

  The pressure-bonding portion 30 according to the present invention is composed of a normal pressure roller 31, and starts bonding by pressing the substrate 1 supplied vertically and the photosensitive film 2 supplied by the suction guide 25.

  More preferably, the pressure roller 31 is configured as a pair, and the one surface of the substrate 1 that has passed through the guide panel 13 and the one surface of the photosensitive film 2 supplied by the suction guide 25 are pressure-bonded to each other and bonded. Thereby, the improved adhesive force can be expected.

  Here, the laminating process of the substrate 1 and the photosensitive film 2 by the laminator according to the embodiment of the present invention will be described as follows. First, as shown in FIG. 2, the substrate 1 is put in the vertical direction, and the particles such as chips generated during cutting in the lamination process are naturally dropped and separated so as not to remain on the surface of the substrate 1. .

  Further, the substrate 1 is inserted so as to reach the position of the clamp roller 11, and when the substrate 1 reaches the clamp roller 11 and the sensor 12 detects this, the pressure roller 31 is driven and bonded. Will start. At the same time, the leading end of the photosensitive film 2 unwound from the film roll 2b by the supply roller 21 is supplied.

  When the photosensitive film 2 is supplied by the supply roller 21, the slide guide 22 is driven and guided, and the cover 2 a is peeled from the photosensitive film 2 by the peeling guide 23, and then wound by the cover roller 24. Will take. In this process, the horizontal state of the photosensitive film 2 is maintained by the tension roller 26 and the side length roller 27.

  The tip of the photosensitive film 2 transferred through such a peeling process is transferred to the pressure roller 31 while being adsorbed by the adsorption guide 25.

  Accordingly, since the pressure roller 31 is supplied with the substrate 1 and the tip of the photosensitive film 2 at the same time, the laminating is performed by a method in which these are pressure-bonded and bonded to each other. If the rear end of the substrate 1 is detected by the sensor 12 in the laminating process, the supply roller 21 is driven to block further supply of the photosensitive film 2. At the same time, the slide guide 22 returns to the initial position.

  When the laminating of the substrate 1 and the photosensitive film 2 is completed, the pressure roller 31 returns to the initial position and enters a standby state for subsequent laminating, and the laminating with the photosensitive film 2 is performed. The completed substrate 1 is discharged by the conveyor roller 40 and proceeds to a post process such as an exposure process.

  On the other hand, the suction guide 25 according to the present invention is provided with a built-in heat ray 25a as shown in FIG. That is, the photosensitive film 2 is initially preheated and transferred at about 40 to 48 ° C. in order to improve the adhesion with the substrate 1.

  Therefore, by maintaining the temperature of the photosensitive film 2 continuously by the suction guide 25 in which the heat ray 25a is incorporated, it is possible to prevent the adhesiveness from being lowered. It is possible to prevent defects that do not adhere and contribute to an improvement in reliability-related yield.

  The present invention can be applied to a laminator in which laminating is easily performed by minimizing the generation of foreign substances that inhibit the adhesion between the substrate and the photosensitive film.

DESCRIPTION OF SYMBOLS 1 Substrate 2 Photosensitive film 10 Substrate supply part 11 Clamp roller 12 Sensor 13 Guide panel 20 Film supply part 21 Supply roller 22 Slide guide 23 Peeling guide 24 Cover roller 25 Adsorption guide 26 Tension roller 30 Pressure bonding part 31 Pressure roller

Claims (7)

A substrate supply unit for supplying a substrate in a vertical drive system;
A laminator comprising: a film supply unit for supplying a photosensitive film to be laminated to the substrate; and a pressure bonding unit for laminating the photosensitive film to the substrate.   The laminator according to claim 1, wherein a substrate supply angle by the substrate supply unit is 45 to 90 °. The substrate supply unit
Clamp rollers arranged vertically;
The laminator according to claim 1 or 2, further comprising: a sensor that detects a transfer position of the substrate by the clamp roller; and a guide panel that guides the substrate transferred by the clamp roller to the crimping portion.   The laminator according to claim 3, wherein the sensors are disposed at a front end and a rear end of a clamp roller. The film supply unit
A supply roller for transferring the leading end of the photosensitive film wound up in a roll to the suction section;
A slide guide for guiding the front end of the photosensitive film transferred by the supply roller;
A peeling guide and a cover roller for peeling and winding the cover from the photosensitive film guided by the slide guide;
An adsorption guide for adsorbing a front end of the photosensitive film from which the cover has been peeled; and a tension roller disposed between a supply roller and an adsorption guide so as to adjust the tension of the photosensitive film. The laminator according to claim 1 or 2.   The laminator according to claim 1 or 2, wherein the pressure-bonding portion is a pair of pressure rollers.   The laminator according to claim 5, wherein the adsorption guide has a built-in heat ray.

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