JP2012037294A - Ultrasonic measuring method and ultrasonic workpiece diameter measuring device - Google Patents
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Abstract
【課題】簡便な信号処理により高速で高精度に距離および工作物の外径を計測可能とする超音波計測方法及び超音波工作物径測定装置を提供する。
【解決手段】超音波のバースト波の出力を反射波がセンサ３に到達する前に終了する。測定した反射波の離散データに所定値を乗算した離散データとの差が最小となるように参照波の波形を時間軸方向に移動して求めた合成反射波と、バースト波の出力である参照波との位相差と超音波の波長から距離を算出する。さらに、超音波の波長を測定距離の上限と下限の差である距離幅の２倍より大きくし、参照波を所定の波数延長し反射波と重なるようにした基準参照波と反射波の１波長内での位相差から算出する距離と基準距離を加算して距離Ｌを計測する。
【選択図】図１An ultrasonic measurement method and an ultrasonic workpiece diameter measuring apparatus capable of measuring a distance and an outer diameter of a workpiece with high speed and high accuracy by simple signal processing are provided.
The output of an ultrasonic burst wave is terminated before the reflected wave reaches the sensor. A reference that is the output of a burst wave and a combined reflected wave obtained by moving the waveform of the reference wave in the time axis direction so that the difference between the discrete data of the measured reflected wave and the discrete data multiplied by a predetermined value is minimized. The distance is calculated from the phase difference from the wave and the wavelength of the ultrasonic wave. Furthermore, the wavelength of the ultrasonic wave is made larger than twice the distance width, which is the difference between the upper limit and the lower limit of the measurement distance, and the reference wave and the reflected wave have one wavelength that is extended by a predetermined wave number and overlapped with the reflected wave. The distance L is measured by adding the distance calculated from the phase difference and the reference distance.
[Selection] Figure 1
Description
本発明は、超音波測定装置に関するものであり、詳しくは参照波と反射波の位相差を用いて距離を測定する超音波計測方法および工作物の外径を計測する超音波工作物径測定装置に関するものである。 The present invention relates to an ultrasonic measurement device, and more specifically, an ultrasonic measurement method for measuring a distance using a phase difference between a reference wave and a reflected wave, and an ultrasonic workpiece diameter measurement device for measuring the outer diameter of a workpiece. It is about.
工作物の外径の測定方法として、接触式の定寸装置を用いて工作物の外径を測定する方法が一般的であるが、工作物測定面が連続でなく溝がある場合は接触子が溝に落ち込む衝撃による振動が発生し、正確な測定が困難な場合がある。これを解消するため超音波を用いて工作物の厚さを測定する従来技術１（例えば、特許文献１参照）がある。
超音波を用いた距離測定方法の精度向上を目的として参照波のパルス状のチャープ信号のピーク位置と反射波のパルス状のチャープ信号のピーク位置の差をもとに距離を測定する従来技術２（例えば、特許文献２参照）がある。
As a method of measuring the outer diameter of the workpiece, a method of measuring the outer diameter of the workpiece using a contact type sizing device is generally used. However, if the workpiece measuring surface is not continuous but has a groove, a contactor is used. Vibration due to the impact of falling into the groove may occur, making accurate measurement difficult. In order to solve this problem, there is a conventional technique 1 (for example, see Patent Document 1) that measures the thickness of a workpiece using ultrasonic waves.
Conventional technique 2 for measuring the distance based on the difference between the peak position of the pulsed chirp signal of the reference wave and the peak position of the pulsed chirp signal of the reflected wave for the purpose of improving the accuracy of the distance measurement method using ultrasonic waves (See, for example, Patent Document 2).
従来技術１では、１パルスの超音波を出力し工作物の表面からの反射波と工作物底面からの反射波の波形のピーク値を比較することで測定した検出器への到達時間差から工作物の厚さを検出し、複数の検出厚さを平均して工作物の厚さとしている。ピーク値の測定値を平均しているがピーク値測定誤差のばらつきを持ち測定精度が高くない。
従来技術２では、チャープバースト波のパルス信号全体を用いて到達時間差を検出するため従来技術１よりばらつきの小さな高精度な測定が可能であるが、信号処理が複雑で処理時間を要する。
本発明は上記事情に鑑みてなされたものであり、簡便な信号処理により高速で高精度に測定物までの距離および工作物の外径を計測可能とする超音波計測機を提供することを目的とする。
In the prior art 1, the workpiece is obtained from the difference in arrival time to the detector measured by outputting one pulse of ultrasonic wave and comparing the peak values of the reflected wave from the workpiece surface and the reflected wave from the bottom surface of the workpiece. The thickness of the workpiece is detected, and a plurality of detected thicknesses are averaged to obtain the workpiece thickness. Although the measured values of the peak values are averaged, the measurement accuracy is not high due to variations in peak value measurement errors.
In the conventional technique 2, since the arrival time difference is detected using the entire pulse signal of the chirp burst wave, it is possible to perform highly accurate measurement with less variation than in the conventional technique 1, but the signal processing is complicated and requires processing time.
The present invention has been made in view of the above circumstances, and an object thereof is to provide an ultrasonic measuring instrument capable of measuring the distance to a workpiece and the outer diameter of the workpiece with high speed and high accuracy by simple signal processing. And
上記の課題を解決するため、請求項１に係る発明の特徴は、センサから出力された超音波の測定物表面からの反射波を前記センサで受信し、測定物表面の距離を計測する超音波計測方法において、前記超音波をバースト波とし、前記バースト波の出力を前記反射波が前記センサに到達する前に終了し、前記バースト波の出力を測定した参照波離散データをフーリエ変換して求めた連続参照波と前記反射波を測定した反射波離散データをフーリエ変換して求めた連続反射波との位相差と、前記超音波の波長から前記距離を算出することである。 In order to solve the above-mentioned problem, the feature of the invention according to claim 1 is that the ultrasonic wave output from the sensor is received by the sensor and the ultrasonic wave that measures the distance of the surface of the measurement object is received. In the measurement method, the ultrasonic wave is a burst wave, the output of the burst wave is terminated before the reflected wave reaches the sensor, and the reference wave discrete data obtained by measuring the output of the burst wave is obtained by Fourier transform. The distance is calculated from the phase difference between the continuous reference wave and the continuous reflected wave obtained by Fourier transform of the reflected wave discrete data obtained by measuring the reflected wave and the wavelength of the ultrasonic wave.
請求項２に係る発明の特徴は、請求項１に係る発明において、前記連続反射波を合成反射波とし、前記合成反射波を正規化反射波離散データとの差が最小となるように前記連続参照波の波形を時間軸方向に移動して求め、前記正規化反射波離散データが前記反射波離散データに所定値を乗算したデータであり、前記所定値が前記連続参照波の振幅を前記連続反射波の振幅で除した値もしくは前記参照波離散データの振幅を前記反射波離散データの振幅で除した値であることである。 The invention according to claim 2 is characterized in that, in the invention according to claim 1, the continuous reflected wave is a combined reflected wave, and the combined reflected wave is the continuous reflected wave so that a difference from the normalized reflected wave discrete data is minimized. A waveform of a reference wave is obtained by moving in the time axis direction, and the normalized reflected wave discrete data is data obtained by multiplying the reflected wave discrete data by a predetermined value, and the predetermined value determines the amplitude of the continuous reference wave. It is a value obtained by dividing by the amplitude of the reflected wave or a value obtained by dividing the amplitude of the reference wave discrete data by the amplitude of the reflected wave discrete data.
請求項３に係る発明の特徴は、請求項１または請求項２に係る発明において、前記波長が測定距離の上限と下限の差である距離幅より大きく、前記位相差を基準参照波と前記連続反射波の位相差とし、前記基準参照波が前記連続参照波を前記連続反射波の受信開始時刻以降の時刻まで延長した波の前記連続反射波と重なる１波長であることである。 A feature of the invention according to claim 3 is that, in the invention according to claim 1 or 2, the wavelength is larger than a distance width that is a difference between an upper limit and a lower limit of a measurement distance, and the phase difference is set to be equal to the reference reference wave and the continuous wave. The phase difference of the reflected wave is used, and the reference reference wave has one wavelength that overlaps the continuous reflected wave of a wave obtained by extending the continuous reference wave to a time after the reception start time of the continuous reflected wave.
請求項４に係る発明の特徴は、センサから出力された超音波の工作物表面からの反射波を前記センサで受信して工作物の径を計測する超音波式工作物径測定装置において、
波長が測定距離の上限と下限の差である距離幅より大きな前記超音波をバースト波として出力し、前記バースト波の出力を前記反射波が前記センサに到達する前に終了する信号発生装置と、
前記バースト波の出力を参照波とし受信し、前記センサに到達した前記反射波を受信する信号受信装置と
前記工作物表面と前記センサの距離を基準参照波と合成反射波の位相差と前記超音波の波長から算出し、前記基準参照波が連続参照波を連続反射波の受信開始時刻以降の時刻まで延長した波の前記連続反射波と重なる１波長であり、前記連続参照波を前記バースト波の出力を測定した離散データをフーリエ変換して求め、前記連続反射波を前記反射波を測定した離散データをフーリエ変換して求め、前記合成反射波を前記反射波を測定した反射波の離散データに所定値を乗算した正規化反射波離散データとの差が最小となるように前記連続参照波の波形を時間軸方向に移動して求める、距離演算装置と、
前記センサを２個備え、
第１のセンサと第２センサを前記工作物の外周の中心線上に対向して保持するブラケットと、
前記第１のセンサと前記第２センサ間の距離と、前記工作物表面と前記第１のセンサの距離と、前記工作物表面と前記第２センサの距離から工作物径を算出する工作物径演算装置と、
前記工作物径を出力・表示する出力表示装置を備えたことである。
According to a fourth aspect of the present invention, there is provided an ultrasonic workpiece diameter measuring apparatus for measuring a diameter of a workpiece by receiving a reflected wave from a workpiece surface of the ultrasonic wave output from the sensor by the sensor.
A signal generator that outputs the ultrasonic wave having a wavelength larger than a distance width that is a difference between an upper limit and a lower limit of a measurement distance as a burst wave, and ends the output of the burst wave before the reflected wave reaches the sensor;
A signal receiving device that receives the output of the burst wave as a reference wave and receives the reflected wave that has reached the sensor; a distance between the workpiece surface and the sensor; a phase difference between a reference reference wave and a synthesized reflected wave; The standard reference wave is calculated from the wavelength of the sound wave, and the standard reference wave is one wavelength that overlaps the continuous reflected wave of a wave obtained by extending the continuous reference wave to a time after the reception start time of the continuous reflected wave, and the continuous reference wave is the burst wave Discrete data of the reflected wave obtained by Fourier transform of the discrete data obtained by measuring the output of the obtained wave, the Fourier transform of the discrete data obtained by measuring the reflected wave, and the composite reflected wave obtained by measuring the reflected wave. A distance calculation device that obtains the waveform of the continuous reference wave by moving in the time axis direction so that the difference from the normalized reflected wave discrete data multiplied by a predetermined value is minimized;
Two sensors are provided,
A bracket for holding the first sensor and the second sensor oppositely on the center line of the outer periphery of the workpiece;
A workpiece diameter for calculating a workpiece diameter from a distance between the first sensor and the second sensor, a distance between the workpiece surface and the first sensor, and a distance between the workpiece surface and the second sensor. An arithmetic unit;
An output display device for outputting and displaying the workpiece diameter is provided.
請求項１に係る発明によれば、超音波の参照波と反射波との位相差と超音波の波長から距離を算出し、位相は多数の測定データをフーリエ変換して算出された波形から決定されるので、誤差の少ない距離測定が可能である。 According to the first aspect of the present invention, the distance is calculated from the phase difference between the reference wave and the reflected wave of the ultrasonic wave and the wavelength of the ultrasonic wave, and the phase is determined from the waveform calculated by Fourier transforming a large number of measurement data. Therefore, distance measurement with little error is possible.
請求項２に係る発明によれば、参照波の波形を実測データと最も良くフィティングするように時間軸方向に移動させて作成した合成反射波を反射波として使用するので、反射波の測定誤差やノイズの影響が最小となり、誤差の小さな位相差の算出ができるので、正確な距離の測定が可能となる。 According to the second aspect of the present invention, since the combined reflected wave created by moving the waveform of the reference wave in the time axis direction so as to best fit the actual measurement data is used as the reflected wave, the measurement error of the reflected wave Since the influence of noise and noise is minimized and a phase difference with a small error can be calculated, an accurate distance can be measured.
請求項３に係る発明によれば、１波長内の位相差だけを算出し基準距離との和を算出する簡易な操作で距離を正確に算出できるので、簡単な演算装置で高速に測定ができる。このため、高速の測定装置を安価に実現できる。 According to the third aspect of the present invention, since the distance can be accurately calculated by a simple operation of calculating only the phase difference within one wavelength and calculating the sum with the reference distance, it is possible to measure at high speed with a simple arithmetic device. . For this reason, a high-speed measuring device can be realized at low cost.
請求項４に係る発明によれば、工作物表面との機械的接触が無いので、表面に凹凸のある工作物の測定時に従来の接触子を備えた測定装置で発生した接触子の振動による測定誤差が発生しない。
測定誤差やノイズの影響が最小の合成反射波を使用するので誤差の小さな位相差の算出ができ、正確な距離の測定が可能である。また、簡単な演算処理で高速に測定ができるので研削中に変動する工作物の外径を測定できる。
According to the invention of claim 4, since there is no mechanical contact with the workpiece surface, measurement by vibration of the contact generated by a conventional measuring device equipped with a contact when measuring a workpiece with an uneven surface. There is no error.
Since a synthetic reflected wave having the least influence of measurement error and noise is used, a phase difference with a small error can be calculated, and an accurate distance can be measured. In addition, since the measurement can be performed at high speed with simple arithmetic processing, the outer diameter of the workpiece that varies during grinding can be measured.
以下、本発明の超音波計測方法による距離測定方法を図１〜図７を参照しつつ説明する。
図１に示すように、超音波計測装置１は、信号発生装置２と、信号発生装置２の電気信号に基づき超音波を出力し、反射してくる超音波を受信して電気信号に変換するセンサ３と、電気信号を受信する信号受信装置４と、受信した信号を演算してセンサ３と測定物Ｍの距離を算出する距離演算装置５と、算出された距離を表示・出力する出力表示装置６から構成されている。距離演算装置５の機能的構成として、フーリエ変換部５１、合成反射波演算部５２、位相差演算部５３、距離演算部５４を備えている。
Hereinafter, a distance measurement method according to the ultrasonic measurement method of the present invention will be described with reference to FIGS.
As shown in FIG. 1, the ultrasonic measurement device 1 outputs an ultrasonic wave based on the signal generator 2 and the electric signal of the signal generator 2, receives the reflected ultrasonic wave, and converts it into an electric signal. Sensor 3, signal receiving device 4 that receives an electrical signal, distance calculating device 5 that calculates the distance between sensor 3 and measurement object M by calculating the received signal, and output display that displays and outputs the calculated distance The apparatus 6 is comprised. As a functional configuration of the distance calculation device 5, a Fourier transform unit 51, a composite reflected wave calculation unit 52, a phase difference calculation unit 53, and a distance calculation unit 54 are provided.
上記の超音波計測装置１で測定物Ｍとセンサ３間の距離を測定する方法について図１〜図６に基づき以下に説明する。
信号発生装置２は所定の周波数の正弦波の電気信号を所定の時間出力する。その電気信号の一部は分岐し信号受信装置４に参照波として記録される。電気信号に基づきセンサ３は超音波を出力する。超音波は媒体中を進み測定物Ｍの表面で一部が反射してセンサ３に戻って来る。センサ３は受信した超音波を電気信号に変換する。その電気信号は反射波として信号受信装置４に記録される。このとき、超音波は一定の周期と振幅を持ち所定の時間継続するバースト波として出力される、この継続時間は超音波がセンサ３から測定物Ｍの表面までを往復する時間より短い時間に設定される。所定のサンプリング周期の離散データとして時系列に記録された信号を記録したグラフを図２に示す。
A method for measuring the distance between the measuring object M and the sensor 3 using the ultrasonic measurement apparatus 1 will be described below with reference to FIGS.
The signal generator 2 outputs a sine wave electric signal having a predetermined frequency for a predetermined time. A part of the electric signal is branched and recorded in the signal receiving device 4 as a reference wave. Based on the electrical signal, the sensor 3 outputs an ultrasonic wave. The ultrasonic wave travels through the medium and partly reflects off the surface of the measurement object M and returns to the sensor 3. The sensor 3 converts the received ultrasonic wave into an electric signal. The electric signal is recorded in the signal receiving device 4 as a reflected wave. At this time, the ultrasonic wave is output as a burst wave having a predetermined period and amplitude and continuing for a predetermined time. This continuous time is set to a time shorter than the time for the ultrasonic wave to reciprocate from the sensor 3 to the surface of the measurement object M. Is done. FIG. 2 shows a graph in which signals recorded in time series as discrete data having a predetermined sampling period are recorded.
記録された離散データを距離演算装置５内部のフーリエ変換部５１により演算することで図３に示す参照波と反射波の連続波形を得る。その連続参照波の振幅をａ１とし、連続反射波の振幅をａ２としたとき、反射波の離散データをａ１／ａ２倍することで図４に示すような正規化反射波離散データを作成する。次に、連続参照波を正規化反射波離散データに対して相互差が最小でとなる位置へ時間軸方向で移動した波形を合成反射波とする。図５に連続参照波と合成反射波を図示したグラフを示す。
この合成反射波は実際の反射波の離散データから位相情報のみ使用し波形は誤差の小さな連続参照波の波形を用いるため、超音波の伝達中の減衰やノイズによる誤差が小さくなる。このため正確な位相差計算が可能で、結果として正確な距離計測が可能となる。
The recorded discrete data is calculated by the Fourier transform unit 51 in the distance calculation device 5 to obtain a continuous waveform of the reference wave and the reflected wave shown in FIG. When the amplitude of the continuous reference wave is a 1 and the amplitude of the continuous reflected wave is a 2 , normalized reflected wave discrete data as shown in FIG. 4 is obtained by multiplying the discrete data of the reflected wave by a 1 / a 2 . Create Next, a waveform obtained by moving the continuous reference wave in the time axis direction to a position where the mutual difference is minimized with respect to the normalized reflected wave discrete data is defined as a synthesized reflected wave. FIG. 5 shows a graph illustrating a continuous reference wave and a composite reflected wave.
Since this combined reflected wave uses only phase information from discrete data of the actual reflected wave and uses a waveform of a continuous reference wave with a small error, errors due to attenuation during transmission of ultrasonic waves and noise are reduced. Therefore, accurate phase difference calculation is possible, and as a result, accurate distance measurement is possible.
次に、図５の参照波を所定の波数延長し最後の１波長が合成反射波の最初の１波長と重なるようにし、この最後の１波長を基準参照波とする。ここで、所定の波数とは連続反射波の受信開始時刻から連続参照波の受信終了時刻を差し引いた時間を連続参照波の周期で除した値の整数部に１を加算した波数である。図６に、横軸を位相に置き換え２波長延長し太線で表した最後の１波長を基準参照波としたグラフを示す。ここで、波長λは超音波の音速Ｖと発振周期Ｔの積で表されλ＝Ｖ・Ｔとなる。音速Ｖは超音波を伝達する媒体により異なる、たとえば、センサ３と測定物Ｍの間に水を充満して水を媒体とすることは好適である。 Next, the reference wave of FIG. 5 is extended by a predetermined wave number so that the last one wavelength overlaps the first one wavelength of the combined reflected wave, and this last one wavelength is set as a reference reference wave. Here, the predetermined wave number is a wave number obtained by adding 1 to the integer part of a value obtained by dividing the time obtained by subtracting the reception end time of the continuous reference wave from the reception start time of the continuous reflected wave by the period of the continuous reference wave. FIG. 6 is a graph in which the horizontal axis is replaced with a phase and two wavelengths are extended and the last one wavelength indicated by a bold line is a reference reference wave. Here, the wavelength λ is represented by the product of the ultrasonic velocity of sound V and the oscillation period T, and λ = V · T. The speed of sound V differs depending on the medium that transmits the ultrasonic waves. For example, it is preferable to fill the space between the sensor 3 and the measurement object M and use water as the medium.
図６において、参照波の基準参照波までの波数と波長の積は所定の距離を持つ基準距離Ｌ０であり、基準参照波に対する合成反射波の開始位置の差を基準距離Ｌ０に加算することでセンサ３から測定物Ｍの表面までの距離の２倍の値を求めることができる。
ここで、測定距離変動がある範囲以内の値であるならば、測定距離変動の最大値の２倍より超音波の波長を長くしておけば、基準参照波に対する合成反射波の位相差は１波長内となる。このため合成反射波と基準参照波の位相差ΔＦと波長λの積が測定距離変動の１／２に相当する。つまり、測定距離ＬはＬ＝（Ｌ０＋ΔＦ・λ）／２で算出できる。
基準距離Ｌ０をあらかじめ定めておくと演算が容易な１波長内での位相差ΔＦから測定距離Ｌを算出できるので、計測時間が短く高速の距離測定が可能となる。
In FIG. 6, the product of the wave number and the wavelength of the reference wave to the reference reference wave is a reference distance L 0 having a predetermined distance, and the difference in the start position of the combined reflected wave with respect to the reference reference wave is added to the reference distance L 0 . Thus, a value twice the distance from the sensor 3 to the surface of the measurement object M can be obtained.
Here, if the measurement distance variation is within a certain range, the phase difference of the synthesized reflected wave with respect to the reference reference wave is 1 if the ultrasonic wave wavelength is made longer than twice the maximum value of the measurement distance variation. Within wavelength. For this reason, the product of the phase difference ΔF and the wavelength λ of the combined reflected wave and the standard reference wave corresponds to 1/2 of the measurement distance variation. That is, the measurement distance L can be calculated by L = (L 0 + ΔF · λ) / 2.
If the reference distance L 0 is determined in advance, the measurement distance L can be calculated from the phase difference ΔF within one wavelength that is easy to calculate, so that the measurement time is short and high-speed distance measurement is possible.
実際の計測処理工程を図７のフローチャートに基づき説明する。
最初に初期値として超音波の音速Ｖ、バーストパルスの周期Ｔと継続時間ｔ、基準距離Ｌ０、λ＝Ｖ・Ｔを入力して距離演算装置内に記録する。その後以下の処理を行う。信号発生装置２が周期Ｔの正弦波のバーストパルス信号を時間ｔの間出力する（ＳＴＰ１）。信号受信装置４でバーストパルス信号を参照波として離散データで記録する（ＳＴＰ２）。ＳＴＰ２と平行してセンサ３によりバーストパルス信号を超音波に変換し出力する（ＳＴＰ３）。測定物表面からの超音波反射波をセンサ３で電気信号に変換し、信号受信装置４で反射波として離散データで記録する（ＳＴＰ４）。参照波と反射波の離散データをフーリエ変換し連続参照波（振幅ａ１）と連続反射波（振幅ａ２）を算出する（ＳＴＰ５）。反射波離散データの値をａ１／ａ２倍して連続参照波と同倍率の振幅を持つ正規化反射波離散データを作成する（ＳＴＰ６）。連続参照波を時間軸方向に移動して正規化反射波離散データとの差が最小となるようにフィティングする。フィティングした連続参照波を合成反射波とする（ＳＴＰ７）。合成反射波と重なる位置まで連続参照波をあらかじめ定められた所定の波数だけ時間軸方向に延長し、合成反射波と重なる最後の１波長を基準参照波とする（ＳＴＰ８）。基準参照波と合成反射波の重なった部分で基準参照波と合成反射波の位相差ΔＦを算出する（ＳＴＰ９）。センサ３と測定物Ｍの距離ＬをＬ＝（ＬＯ＋ΔＦ・λ）／２で演算する（ＳＴＰ１０）。距離Ｌの値を表示部に表示または出力する（ＳＴＰ１１）。
An actual measurement process will be described with reference to the flowchart of FIG.
First, the ultrasonic velocity V, burst pulse period T and duration t, reference distance L 0 , and λ = V · T are input as initial values and recorded in the distance calculation device. Thereafter, the following processing is performed. The signal generator 2 outputs a sine wave burst pulse signal having a period T for a time t (STP1). The signal receiver 4 records the burst pulse signal as a reference wave as discrete data (STP2). In parallel with STP2, the sensor 3 converts the burst pulse signal into ultrasonic waves and outputs them (STP3). The ultrasonic wave reflected from the surface of the object to be measured is converted into an electrical signal by the sensor 3 and recorded as discrete data by the signal receiving device 4 as discrete data (STP4). The discrete data of the reference wave and the reflected wave are Fourier transformed to calculate a continuous reference wave (amplitude a 1 ) and a continuous reflected wave (amplitude a 2 ) (STP5). The value of the reflected wave discrete data to create a normalized reflected wave discrete data with an amplitude of the continuous reference wave and the ratio a 1 / a 2-fold to (STP6). The continuous reference wave is moved in the time axis direction and fitting is performed so that the difference from the normalized reflected wave discrete data is minimized. The fitted continuous reference wave is defined as a combined reflected wave (STP7). The continuous reference wave is extended in the time axis direction by a predetermined wave number to a position overlapping with the combined reflected wave, and the last one wavelength overlapping with the combined reflected wave is set as a reference reference wave (STP8). A phase difference ΔF between the reference reference wave and the combined reflected wave is calculated at a portion where the reference reference wave and the combined reflected wave overlap (STP9). A sensor 3 the distance L of the measuring object M is calculated by L = (L O + ΔF · λ) / 2 (STP10). The value of the distance L is displayed or output on the display unit (STP11).
本事例では反射波に合成反射波を用いて距離を算出したが、正規化した連続反射波を用いてもよい。 In this example, the distance is calculated using the synthetic reflected wave as the reflected wave, but a normalized continuous reflected wave may be used.
本超音波計測方法を応用した超音波工作物径測定装置について以下に説明する。
図８に示すように、超音波工作物径測定装置６０は、信号発生装置７２の電気信号に基づき超音波を出力し、反射してくる超音波を受信して電気信号に変換するセンサ８ａと８ｂを備えている。センサ８ａと８ｂはブラケット９により工作物Ｗの外周の中心線上に対向して保持され、センサ８ａと工作物Ｗの表面の距離はＬ１でセンサ８ｂと工作物Ｗの表面の距離はＬ２である。センサ８ａと８ｂは切換えスイッチＳを介して制御装置７と交互に接続する。制御装置７は信号発生装置７２と、電気信号を受信する信号受信装置７４と、受信した信号を演算して工作物Ｗの径を算出する工作物径演算装置７５と、算出された工作物径を表示・出力する出力表示装置７６から構成されている。工作物径演算装置７５の機能的構成として、フーリエ変換部７５１、合成反射波演算部７５２、位相差演算部７５３、工作物径演算部７５４を備えている。
An ultrasonic workpiece diameter measuring apparatus to which the ultrasonic measuring method is applied will be described below.
As shown in FIG. 8, the ultrasonic workpiece diameter measuring device 60 outputs a ultrasonic wave based on the electric signal of the signal generating device 72, receives the reflected ultrasonic wave, and converts it into an electric signal. 8b. Sensors 8a and 8b are held against on the center line of the outer circumference of the workpiece W by a bracket 9, a distance of the surface of the workpiece W and sensor 8b distance of the surface of the sensor 8a and the workpiece W is L 1 is L 2 It is. The sensors 8a and 8b are alternately connected to the control device 7 via the changeover switch S. The control device 7 includes a signal generator 72, a signal receiver 74 that receives an electrical signal, a workpiece diameter calculator 75 that calculates the diameter of the workpiece W by calculating the received signal, and the calculated workpiece diameter. It is comprised from the output display apparatus 76 which displays and outputs. As a functional configuration of the workpiece diameter calculation device 75, a Fourier transform unit 751, a composite reflected wave calculation unit 752, a phase difference calculation unit 753, and a workpiece diameter calculation unit 754 are provided.
上記の超音波工作物径測定装置６０で工作物Ｗの径を測定する方法について図９のフローチャートに基づき以下に説明する。
最初に初期値として超音波の音速Ｖ、バーストパルスの周期Ｔと継続時間ｔ、基準距離Ｌ０、λ＝Ｖ・Ｔ、センサ距離Ｋを入力し工作物径演算装置内に記録する。その後以下の処理を行う。スイッチＳをセンサ８ａに接続する（ＳＴＰ１）。信号発生装置２が周期Ｔの正弦波のバーストパルス信号を時間ｔの間出力する（ＳＴＰ２）。信号受信装置４でバーストパルス信号を参照波として離散データで記録する（ＳＴＰ３）。ＳＴＰ３と平行してセンサ３によりバーストパルス信号を超音波に変換し出力する（ＳＴＰ４）。測定物表面からの超音波反射波をセンサ３で電気信号に変換し、信号受信装置４で反射波として離散データで記録する（ＳＴＰ５）。参照波と反射波の離散データをフーリエ変換し連続参照波（振幅ａ１）と連続反射波（振幅ａ２）を算出する（ＳＴＰ６）。反射波離散データの値をａ１／ａ２倍して連続参照波と同倍率の振幅を持つ正規化反射波離散データを作成する（ＳＴＰ７）。連続参照波を時間軸方向に移動して正規化反射波離散データとの差が最小となるようにフィティングする。フィティングした連続参照波を合成反射波とする（ＳＴＰ８）。合成反射波と重なる位置まで連続参照波をあらかじめ定められた所定の波数だけ時間軸方向に延長し、合成反射波と重なる最後の１波長を基準参照波とする（ＳＴＰ９）。基準参照波と合成反射波の重なった部分で基準参照波と合成反射波の位相差ΔＦを算出する（ＳＴＰ１０）。センサ３と測定物Ｍの距離ＬをＬ＝（ＬＯ＋ΔＦ・λ）／２で演算する（ＳＴＰ１１）。スイッチＳがセンサ８ａに接続していればＳＴＰ１３へ移動、そうでなければＳＴＰ１５へ移動（ＳＴＰ１２）。Ｌの値をＬ１に格納する（ＳＴＰ１３）。スイッチＳをセンサ８ｂに接続し、ＳＴＰ３へ移動する（ＳＴＰ１４）。以下ＳＴＰ２〜ＳＴＰ１２を繰り返す。Ｌの値をＬ２に格納する（ＳＴＰ１５）。工作物径ＤをＤ＝Ｌ１＋Ｌ２＋Ｋとして演算する（ＳＴＰ１６）。工作物径Ｄの値を表示部に表示または出力する（ＳＴＰ１７）。
A method for measuring the diameter of the workpiece W by the ultrasonic workpiece diameter measuring apparatus 60 will be described below with reference to the flowchart of FIG.
First, the ultrasonic velocity V, burst pulse period T and duration t, reference distance L 0 , λ = V · T, and sensor distance K are input as initial values and recorded in the workpiece diameter calculator. Thereafter, the following processing is performed. The switch S is connected to the sensor 8a (STP1). The signal generator 2 outputs a sine wave burst pulse signal having a period T for a time t (STP2). The signal receiver 4 records the burst pulse signal as a reference wave as discrete data (STP3). In parallel with STP3, the sensor 3 converts the burst pulse signal into an ultrasonic wave and outputs it (STP4). The ultrasonic wave reflected from the surface of the object to be measured is converted into an electric signal by the sensor 3, and recorded as discrete data by the signal receiving device 4 as discrete data (STP5). The discrete data of the reference wave and the reflected wave are Fourier transformed to calculate a continuous reference wave (amplitude a 1 ) and a continuous reflected wave (amplitude a 2 ) (STP6). The value of the reflected wave discrete data is multiplied by a 1 / a 2 to create normalized reflected wave discrete data having the same magnification as the continuous reference wave (STP7). The continuous reference wave is moved in the time axis direction and fitting is performed so that the difference from the normalized reflected wave discrete data is minimized. The fitted continuous reference wave is defined as a combined reflected wave (STP8). The continuous reference wave is extended in the time axis direction by a predetermined wave number to a position overlapping with the combined reflected wave, and the last one wavelength overlapping with the combined reflected wave is set as a reference reference wave (STP9). A phase difference ΔF between the reference reference wave and the combined reflected wave is calculated at a portion where the reference reference wave and the combined reflected wave overlap (STP10). A sensor 3 the distance L of the measuring object M is calculated by L = (L O + ΔF · λ) / 2 (STP11). If the switch S is connected to the sensor 8a, the process moves to STP13; otherwise, the process moves to STP15 (STP12). It stores the value of L in L 1 (STP13). The switch S is connected to the sensor 8b and moves to STP3 (STP14). Thereafter, STP2 to STP12 are repeated. It stores the value of L in L 2 (STP15). The workpiece diameter D is calculated as D = L 1 + L 2 + K (STP16). The value of the workpiece diameter D is displayed or output on the display unit (STP17).
超音波工作物径測定装置６０は、超音波の伝達中の減衰やノイズによる誤差が小さな合成反射波を用いるため正確な位相差計算が可能で、結果として正確な工作物径測定が可能となる。また、測定距離をあらかじめ定めた基準距離と１波長内での位相差から演算できる距離差の和で算出できるので、演算処理時間が短い。このため、計測時間が短く高速の工作物径測定が可能となる。 Since the ultrasonic workpiece diameter measuring device 60 uses a synthetic reflected wave with small errors due to attenuation and noise during transmission of ultrasonic waves, it is possible to perform accurate phase difference calculation, and as a result, accurate workpiece diameter measurement is possible. . In addition, since the measurement distance can be calculated by the sum of the predetermined reference distance and the distance difference that can be calculated from the phase difference within one wavelength, the calculation processing time is short. For this reason, the measurement time is short and the workpiece diameter can be measured at high speed.
上記の事例では、制御装置を１式備えてセンサ８ａ、８ｂに切換えながら接続して計測処理を実施したが、夫々のセンサに専用の制御装置を備えた構成としてもよい。
センサ部に研削液供給手段を備え研削液を超音波伝達媒体に用いてもよい。
センサを１式のみとして、工作物回転中心とセンサ間の基準距離と、計測したセンサからの工作物表面距離を加算して工作物半径を測定してもよい。
In the case described above, a set of control devices is provided and connected to the sensors 8a and 8b while switching and measurement processing is performed. However, each sensor may have a dedicated control device.
The sensor unit may be provided with a grinding fluid supply means, and the grinding fluid may be used as an ultrasonic transmission medium.
Only one set of sensors may be used, and the workpiece radius may be measured by adding the reference distance between the workpiece rotation center and the sensor and the workpiece surface distance from the measured sensor.
Ｍ：測定物 １：超音波計測装置 ２、７２：信号発生装置 ３、８ａ、８ｂ：センサ ４、７４：信号受信装置 ５、７５：距離演算装置 ６、７６：出力表示装置 Ｗ：工作物 ７：制御装置 ９：ブラケット ６０：超音波工作物径測定装置 M: measurement object 1: ultrasonic measurement device 2, 72: signal generation device 3, 8a, 8b: sensor 4, 74: signal reception device 5, 75: distance calculation device 6, 76: output display device W: workpiece 7 : Control device 9: Bracket 60: Ultrasonic workpiece diameter measuring device
Claims (4)
波長が測定距離の上限と下限の差である距離幅より大きな前記超音波をバースト波として出力し、前記バースト波の出力を前記反射波が前記センサに到達する前に終了する信号発生装置と、
前記バースト波の出力を参照波とし受信し、前記センサに到達した前記反射波を受信する信号受信装置と
前記工作物表面と前記センサの距離を基準参照波と合成反射波の位相差と前記超音波の波長から算出し、前記基準参照波が連続参照波を連続反射波の受信開始時刻以降の時刻まで延長した波の前記連続反射波と重なる１波長であり、前記連続参照波を前記バースト波の出力を測定した離散データをフーリエ変換して求め、前記連続反射波を前記反射波を測定した離散データをフーリエ変換して求め、前記合成反射波を前記反射波を測定した反射波の離散データに所定値を乗算した正規化反射波離散データとの差が最小となるように前記連続参照波の波形を時間軸方向に移動して求める、距離演算装置と、
前記センサを２個備え、
第１のセンサと第２センサを前記工作物の外周の中心線上に対向して保持するブラケットと、
前記第１のセンサと前記第２センサ間の距離と、前記工作物表面と前記第１のセンサの距離と、前記工作物表面と前記第２センサの距離から工作物径を算出する工作物径演算装置と、
前記工作物径を出力・表示する出力表示装置を備えた超音波工作物径測定装置。 In the ultrasonic workpiece diameter measuring device for measuring the diameter of the workpiece by receiving the reflected wave from the workpiece surface of the ultrasonic wave output from the sensor with the sensor,
A signal generator that outputs the ultrasonic wave having a wavelength larger than a distance width that is a difference between an upper limit and a lower limit of a measurement distance as a burst wave, and ends the output of the burst wave before the reflected wave reaches the sensor;
A signal receiving device that receives the output of the burst wave as a reference wave and receives the reflected wave that has reached the sensor; a distance between the workpiece surface and the sensor; a phase difference between a reference reference wave and a synthesized reflected wave; The standard reference wave is calculated from the wavelength of the sound wave, and the standard reference wave is one wavelength that overlaps the continuous reflected wave of a wave obtained by extending the continuous reference wave to a time after the reception start time of the continuous reflected wave, and the continuous reference wave is the burst wave Discrete data of the reflected wave obtained by Fourier-transforming the discrete data obtained by measuring the output, and obtaining the continuous reflected wave by Fourier-transforming the discrete data obtained by measuring the reflected wave. A distance calculation device that obtains the waveform of the continuous reference wave by moving in the time axis direction so that the difference from the normalized reflected wave discrete data multiplied by a predetermined value is minimized;
Two sensors are provided,
A bracket for holding the first sensor and the second sensor oppositely on the center line of the outer periphery of the workpiece;
A workpiece diameter for calculating a workpiece diameter from a distance between the first sensor and the second sensor, a distance between the workpiece surface and the first sensor, and a distance between the workpiece surface and the second sensor. An arithmetic unit;
An ultrasonic workpiece diameter measuring device provided with an output display device for outputting and displaying the workpiece diameter.
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| WO2019056760A1 (en) * | 2017-09-22 | 2019-03-28 | 华为技术有限公司 | Electronic apparatus and acoustic distance measurement method thereof |
| CN108427117A (en) * | 2018-03-13 | 2018-08-21 | 中国地质科学院探矿工艺研究所 | Earth surface crack detector based on ultrasonic ranging principle |
| CN109696680A (en) * | 2018-12-27 | 2019-04-30 | 北京哈工科教机器人科技有限公司 | High-precision ultrasonic ranging device and method based on phase-detection |
| CN110231006A (en) * | 2019-06-10 | 2019-09-13 | 苏州博昇科技有限公司 | Air Coupling ultrasound interferometry |
| WO2020248516A1 (en) * | 2019-06-10 | 2020-12-17 | 苏州博昇科技有限公司 | Air-coupled ultrasonic interferometry method |
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| CN115524708A (en) * | 2021-06-25 | 2022-12-27 | 北京小米移动软件有限公司 | Distance measuring method and device, terminal and storage medium |
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