JP2012032184A - Optical probe and spectrometry device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the intrusion of moisture to the inside of an immersion type optical probe.SOLUTION: An optical probe 1 is provided with: a projection side optical fiber 3 arranged in a projection side cylindrical member 13 for propagating the rays of light to be emitted to a liquid sample 23; a projection side lens 5 arranged at the tip end of the projection side cylindrical member 13; a light reflection member 7 for reflecting the rays of light emitted from a projection side optical fiber end face 3a, and transmitted through the lens 5 and the sample 23; a light reception side lens 9 arranged at the tip end of the light reception side cylindrical member 15 to which the rays of light reflected by the light reflection member 7 and transmitted through the sample 23 are made incident; and a light reception side optical fiber 11 arranged in the light reception side cylindrical member 15 for receiving the rays of light transmitted through the lens 9 on an end face 11a. The lens 5 and 9 and the cylindrical members 13 and 15 are made of glass materials. The projection side lens 5 is integrally formed with the projection side cylindrical member 13, and the light reception side lens 9 is integrally formed with the light reception side cylindrical member 15 while fluid tightness is held by deposition or optical contact.

Description

  The present invention relates to an optical probe and a spectroscopic measurement apparatus using the same, and more particularly to an immersion type optical probe and a spectroscopic measurement apparatus using the same.

There is an absorbance measurement method as a method of measuring the component concentration of a liquid sample. In the absorbance measurement method, the concentration of the measurement target substance can be quantitatively analyzed by irradiating the liquid sample with light and measuring the absorbance of the measurement target substance when the light passes through the liquid sample.
When continuously monitoring the component concentration of a liquid sample, an immersion type optical probe using an optical fiber may be used (see, for example, Patent Documents 1 and 2).

FIG. 9 is an enlarged cross-sectional view of the lens periphery of a conventional optical probe. FIG. 10 is a cross-sectional view showing the overall structure of a conventional optical probe.
In the conventional optical probe, the light emitted from the end face 101a of the light projecting side optical fiber 101 is converted into parallel light or condensed light by the lens 103, irradiated to the measurement reflection mirror 105, and reflected by the measurement reflection mirror 105. The light is condensed again by the lens 103 and condensed on the end face 107 a of the light receiving side optical fiber 107.

  The lens 103 is disposed inside the tip of the probe tube 109. A gap between the lens 103 and the probe tube 109 is filled with a sealing member 111. The peripheral portions of the sealing member 111 and the lens 103 are pressed and crimped by a tightening member 113 into a flange provided inside the tip of the probe tube 109. As a result, the sealing effect is maintained.

  When the optical probe is immersed in the liquid sample 115, the tip of the probe cylinder 109 is immersed in the liquid sample 115. A space 117 in which the optical fiber end faces 101a and 107a are disposed is isolated from the liquid sample 115 by the lens 103, the probe tube 109, and the sealing member 111.

  The optical probes disclosed in Patent Documents 1 and 2 do not perform sealing between the lens and the probe cylinder as shown in FIG. In Patent Document 1, the sealing method is not mentioned, and there is only an explanation that “the materials are combined and integrated”. Patent Document 2 describes the use of an adhesive such as low-melting glass as a method for fixing each constituent member. From this, although there is no direct mention about fixation of a lens and a probe cylinder, it can be estimated that the adhesive agent including low melting glass is used.

JP 2006-23200 A JP 2009-250825 A JP 2008-19147 A

  When the optical probe shown in FIGS. 9 and 10 is immersed in a liquid or used in a high humidity atmosphere, when the probe cylinder 109 and the sealing member 111 are poorly adhered, the liquid or water vapor enters the space 117. The liquid or water vapor that has entered the space 117 causes dew condensation on the surface of the lens 103 facing the optical fiber end faces 101a and 107a or on the optical fiber end faces 101a and 107a, thereby hindering optical measurement. It was.

  In the optical probe shown in FIGS. 9 and 10, when the gap between the lens 103 and the probe tube 109 is sealed with an adhesive, the probe tube 109 is often formed of a stainless material, and the lens 103 is formed of a glass material. In many cases, the probe tube 109 and the lens 103 have poor adhesiveness. Even if the sealing property is good at first, the sealing property may be deteriorated after many years of use.

Moreover, low melting glass or an adhesive is mentioned as the sealing agent described in Patent Document 2.
Generally, low-melting glass contains lead. Due to environmental problems, the use is restricted due to lead-free requirements in domestic and overseas markets.
Further, in the example of measuring the physical properties of the cleaning liquid by immersing the optical probe in a cleaning liquid tank in which a cleaning liquid used in the semiconductor processing process is stored, the cleaning liquid is very disliked by metal contamination, ppb (parts per billion) level, ppt (parts per The structure of the optical probe is not allowed to contain lead because it must be controlled to be free from metal contamination at the trillion level.
Low melting point glass not containing lead is also being developed (see, for example, Patent Document 3). However, components other than low-melting-point glass lead not containing lead, such as B, Zn, Na, K, Ba, and Cu, are included, and there is a similar problem of metal contamination.

  Next, regarding adhesives, adhesives can be broadly classified into inorganic adhesives and organic adhesives. The former can be classified as silica-based adhesive, ceramic, cement, solder, and water glass. The above-mentioned low melting glass can also be classified in this. The inorganic adhesive contains various metal elements and has the same metal contamination problem as described above.

  Organic adhesives are classified into acrylic resin-based, urethane resin-based, epoxy resin-based, vinyl chloride resin solvent-based, cyanoacrylate-based, silicone-based, etc., but all have problems with heat resistance. Furthermore, if the organic adhesive is not managed up to the manufacturing process of the organic material constituting the organic adhesive, various metal elements may be contained at the ppb level and the ppt level, and there is a problem of metal contamination similar to the above. .

  The optical probe shown in the optical probe shown in FIGS. 9 and 10 is an example in which one lens 103 is used. However, when independent lenses are arranged on the light projecting side and the light receiving side, respectively, or a compound lens is used. In some cases, a glass plate called a window plate is disposed in front of the lens. Even in these cases, the lens or window plate and the cylindrical member are sealed using a sealing member or an adhesive, so that liquid or water vapor enters the optical probe regardless of the number or shape of the lens. There is a problem with.

  An object of the present invention is to provide an optical probe capable of preventing moisture from entering the optical probe and a spectroscopic measurement apparatus using the optical probe.

  An optical probe according to the present invention is disposed in a light projecting side cylindrical member, and a light projecting side optical fiber for propagating light to be irradiated on the liquid sample, and the light projecting side cylindrical member at a position in contact with the liquid sample. The projection side lens disposed at the front end of the projection side and opposed to the end surface of the projection side optical fiber and the projection side lens are arranged at intervals, and are irradiated from the end surface of the projection side optical fiber and are A light reflecting material for reflecting the light transmitted through the light projecting side lens and the liquid sample, and a liquid reflecting material disposed at the tip of the light receiving side cylindrical member at a position in contact with the liquid sample and reflected by the light reflecting material; A light receiving side lens on which light that has passed through the sample is incident, and a light receiving side optical fiber that is disposed in the light receiving side cylindrical member and receives light transmitted through the light receiving side lens on an end surface. Light side tubular member The light emitting side lens, the light receiving side cylindrical member, and the light receiving side lens are made of a glass material, the light emitting side lens is opposite to the light emitting side cylindrical member, and the light receiving side lens is the light receiving side cylindrical shape. It is integrated with the member while maintaining liquid tightness by welding or optical contact.

In the optical probe of the present invention, the lens is a hemispherical lens, the end surface of the cylindrical member is planarized, and the peripheral edge of the flat surface of the hemispherical lens is joined to the end surface of the cylindrical member. Can be mentioned.
The lens is a ball lens, a spherical lens, or a gradient index rod lens (Selfoc lens), and the end surface of the cylindrical member is processed according to the shape of the peripheral edge of the lens, and the hemispheric lens An example can be given in which the peripheral edge portion of the cylindrical member is joined to the end face of the cylindrical member.

Further, the lens is formed of a transparent crystal material that can be joined to the cylindrical member by optical contact instead of the glass material, and the lens is integrated with the cylindrical member by optical contact. It may be made to be.
Further, the lens and the cylindrical member are formed of a transparent crystal material that can be joined to each other by optical contact instead of the glass material, and the lens is integrated with the cylindrical member by optical contact. You may be made to do.
Here, quartz can be mentioned as a glass material. Examples of the crystal material include sapphire, silicon crystal, germanium crystal, crystal, ruby, and diamond.

  Further, the light projecting optical fiber and the light receiving optical fiber are constituted by one light projecting side / light receiving side optical fiber, and the light projecting side lens and the light receiving side lens are constituted by one light projecting side / light receiving side lens. The light emitting side cylindrical member and the light receiving side cylindrical member may be constituted by one light projecting side / light receiving side cylindrical member.

  A spectroscopic measurement apparatus according to the present invention includes an optical probe according to the present invention, a light source for irradiating light on a light projecting side optical fiber second end surface opposite to the light projecting side optical fiber end surface, and the light receiving side optical fiber end surface. Is a light detection unit for receiving light emitted from the second end surface of the light receiving side optical fiber on the opposite side, and a data processing unit for calculating the concentration of the liquid sample component according to the light intensity signal from the light detection unit, , With.

  In the optical probe of the present invention, the light projecting side lens is integrated with the light projecting side cylindrical member, and the light receiving side lens is integrated with the light receiving side cylindrical member while maintaining liquid tightness by welding or optical contact. Since it did in this way, the penetration | invasion of the water | moisture content in an optical probe can be prevented.

In the optical probe of the present invention, when the end surface of the cylindrical member is processed into a flat surface, a hemispherical lens is provided as a lens, and the peripheral edge of the flat surface of the hemispherical lens is joined to the end surface of the cylindrical member. In this case, the contact area between the cylindrical member and the lens can be increased as compared with the case where a ball lens or a spherical lens is used, and the liquid tightness can be improved.
Further, when a gradient index rod lens is used as the lens, if the peripheral edge of the flat surface of the gradient index rod lens is joined to the end surface of the cylindrical member, a ball lens or Compared with the case of using a spherical lens, the contact area between the cylindrical member and the lens can be increased, and the liquid tightness can be improved.
Further, when a ball lens or a spherical lens is used as the lens, the contact area between the cylindrical member and the lens can be increased if the end surface of the cylindrical member is processed according to the shape of the peripheral edge of the lens. It can be increased and the liquid tightness can be improved.

In addition, even when a transparent crystal material made of a material other than a glass material is used as the lens, the lens and the cylindrical member can be used as long as the transparent crystal material is a material capable of optical contact with the glass material. It can be integrated by optical contact and kept liquid-tight.
Also, if the transparent crystal material can be joined by optical contact, the lens and the cylindrical member are formed of the transparent crystal material, and the lens and the cylindrical member are integrated by the optical contact to make the liquid tight. You can keep it.
Further, when the lens and the cylindrical member are formed of a glass material, there is no gap between the lens and the cylindrical member as long as the lens and the cylindrical member are formed as an integral object, and the liquid is kept liquid-tight. Can do.

  The light projecting optical fiber and the light receiving optical fiber are composed of one light projecting side / light receiving side optical fiber, and the light projecting side lens and the light receiving side lens are composed of one light projecting side / light receiving side lens. If the cylindrical member and the light receiving side cylindrical member are constituted by one light projecting side / light receiving side cylindrical member, the number of parts can be reduced and the optical probe shape can be made thinner.

  Since the spectroscopic measurement apparatus of the present invention is provided with the optical probe of the present invention, it is possible to prevent erroneous measurement due to moisture intrusion into the optical probe.

It is sectional drawing which expands and shows the lens periphery of one Example of an optical probe. It is sectional drawing which shows the whole structure of the Example. It is a side view which shows the whole structure of the Example. It is a figure which shows roughly one Example of a spectrometer. It is sectional drawing which expands and shows the lens periphery of the other Example of an optical probe. It is sectional drawing which expands and shows the lens periphery of the further another Example of an optical probe. It is sectional drawing which expands and shows the lens periphery of the further another Example of an optical probe. It is a figure which shows schematically the other Example of a spectrometer. It is sectional drawing which expands and shows the lens periphery of the conventional optical probe. It is sectional drawing which shows the whole structure of the conventional optical probe.

  FIG. 1 is an enlarged sectional view showing the periphery of a lens according to an embodiment of the optical probe. FIG. 2 is a sectional view showing the entire structure of the embodiment. FIG. 3 is a side view showing the overall structure of the embodiment. The cross section in FIG. 2 corresponds to the position AB in FIG.

  The optical probe 1 includes a light projecting side optical fiber 3, a light projecting side lens 5, a measurement reflecting mirror (light reflecting material) 7, a light receiving side lens 9, a light receiving side optical fiber 11, and a light projecting side glass tube (light projecting side cylindrical member). 13, a light receiving side glass tube (light receiving side cylindrical member) 15, a base substrate 17, and glass tube fixing members 19 and 21.

The end face 3 a of the light projecting side optical fiber 3 is disposed in the light projecting side glass tube 13. The light projecting side lens 5 is disposed on one end surface of the light projecting side glass tube 13. The light projecting side lens 5 is a hemispherical lens made of, for example, quartz. The light emitting side glass tube 13 is also made of quartz. The end surface of the light projection side glass tube 13 is flattened. The peripheral edge of the flat surface of the light projecting side lens 5 is joined to the end surface of the light projecting side glass tube 13 by welding or optical contact. Thereby, the light projection side glass cylinder 13 and the light projection side lens 5 are integrated.
The light emitting side glass tube 13 is attached to the base substrate 17 by glass tube fixing members 19 and 21.

  The measurement reflection mirror 7 is attached to the base substrate 17 at a position where the light irradiated from the light-projecting-side optical fiber end surface 3 a and the light transmitted through the light-projecting-side lens 5 is irradiated. The measurement reflection mirror 7 is arranged at a distance from the light projecting side lens 5.

  The end surface 11 a of the light receiving side optical fiber 11 is disposed in the light receiving side glass tube 15. A light receiving side lens 9 is disposed on one end face of the light receiving side glass tube 15. The light-receiving side lens 9 is a hemispherical lens made of, for example, quartz. The light receiving side glass tube 15 is also made of quartz. The end surface of the light-receiving side glass tube 15 is flattened. The peripheral edge of the flat surface of the light receiving side lens 9 is joined to the end surface of the light receiving side glass tube 15 by welding or optical contact. Thereby, the light reception side glass cylinder 15 and the light reception side lens 9 are integrated.

  The light receiving side glass tube 15 is attached to the base substrate 17 by the glass tube fixing members 19 and 21 so that the light reflected by the measurement reflection mirror 7 passes through the light receiving side lens 9 and enters the light receiving side optical fiber end surface 11a. ing. The light receiving side lens 9 disposed at the tip of the light receiving side glass tube 15 is disposed at a distance from the measurement reflection mirror 7.

  When the optical probe 1 is used, the tip portion of the optical probe 1 is immersed in the liquid sample 23. The tip portion of the optical probe 1 is immersed in the liquid sample 23 to a depth where at least the lenses 5 and 9 are in contact with the liquid sample 23. The liquid sample is often an aqueous solution, and its refractive index is around 1.33 near 20 nm and near a wavelength of 600 nm (nanometers). The refractive index of quartz is around 1.46 near 20 ° C. near a wavelength of 600 nm. Sapphire has a wavelength near 600 nm and near 1.76 near 20 ° C. Optimal lenses for the lenses 5 and 9 are based on the refractive index difference considering the refractive index of the liquid sample 23, the refractive index of the lens material, the wavelength of light used, the temperature of the liquid sample, and the temperature of the optical probe. Use the shape and lens focal length.

  The measurement light incident on the light projecting side optical fiber end surface opposite to the light projecting side optical fiber end surface 3a is emitted from the light projecting side optical fiber end surface 3a. The measurement light is converted into parallel light or condensed light by the light-projecting side lens 5 and irradiated to the measurement reflection mirror 7 through the liquid sample 23. The light reflected by the measurement reflection mirror 7 reaches the light receiving side lens 9 through the liquid sample 23, is condensed by the light receiving side lens 9, and is irradiated on the light receiving side optical fiber end face 11a.

  In this embodiment, the light projecting side lens 5 is integrated with the light projecting side glass tube 13 and the light receiving side lens 9 is integrated with the light receiving side glass tube 15 in a liquid-tight manner by welding or optical contact. Therefore, it is possible to prevent moisture from entering the glass tubes 13 and 15, that is, the optical probe 1.

FIG. 4 is a diagram schematically showing an embodiment of the spectroscopic measurement apparatus.
This spectroscopic measurement apparatus is substantially composed of an optical probe 1, a spectroscopic unit 25, and a data processing unit 27.
First, a specific configuration of the spectroscopic unit 25 will be described.

The spectroscopic unit 25 includes a tungsten lamp 29 serving as a light source, a convex lens 31, a rotating disk 35 including eight interference filters 33, a convex lens 37, a convex lens 39, and a light receiving element (light detection unit) 41. A drive motor 43 for rotating the rotary disk 35 is provided. The light emitted from the tungsten lamp 29 is collected by the convex lens 31 and passes through the interference filter 33. Here, the interference filter 33 held by the rotating disk 35 separates the light into light having a predetermined wavelength within a range of 190 to 2600 nm.
The light dispersed by the interference filter 33 is collected by the convex lens 37 and irradiated on the incident end face 3 b of the light projecting side optical fiber 3. The light projecting side optical fiber 3 is connected to the optical probe 1. The structure and optical path of the optical probe 1 are as described with reference to FIGS.

  The emission end face 11 b of the light-receiving side optical fiber 11 guided from the optical probe 1 is disposed in the spectroscopic unit 25. The light incident on the light receiving side optical fiber end surface 11 a by the optical probe 1 enters the convex lens 39 from the light receiving side optical fiber end surface 11 b, is condensed, and enters the light receiving element 41. The light receiving element 41 converts the incident light into a photocurrent corresponding to the intensity thereof.

  The rotating disk 35 holds eight interference filters 33 at equal angular intervals in the circumferential direction, and is rotationally driven by a driving motor 43 at a predetermined rotational speed, for example, 1200 rpm (revolutions per minute). Each interference filter 33 has predetermined transmission wavelengths different from each other in the range of 190 to 2600 nm depending on the measurement target. Here, when the rotating disk 35 rotates, the interference filters 33 are sequentially inserted into the optical axes of the convex lenses 31 and 37. The light emitted from the tungsten lamp 29 is split by the interference filter 33, and then irradiated to the liquid sample 23 via the light projecting side optical fiber 3 and the light projecting side lens 5 of the optical probe 1. The light that has passed through the liquid sample 23 is reflected by the measurement reflecting mirror 7, passes through the liquid sample 23 again, is collected by the light receiving side lens 9, enters the light receiving side optical fiber 11, passes through the convex lens 39, and is collected. , Is incident on the light receiving element 41. Thereby, an electrical signal corresponding to the absorbance of light of each wavelength is output from the light receiving element 41. The data processing unit 27 calculates the liquid sample component concentration according to the light intensity signal from the light receiving element 41.

  The optical probe 1 shown in FIGS. 1 to 4 includes a light-projecting lens 5 and a light-receiving lens 9 that are hemispherical lenses. The light-projecting lens and the light-receiving lens are ball lenses, spherical lenses, or refractive indexes. It may be a distributed rod lens (selfoc lens). In this case, it is preferable that the end surface of the light projecting side glass tube and the end surface of the light receiving side glass tube are processed according to the shape of the peripheral edge of the lens.

  For example, as shown in FIG. 5, the end surface of the light projection side glass tube 13 matches the shape of the light projection side ball lens 5a, and the end surface of the light reception side glass tube 15 matches the shape of the light reception side ball lens 9a. Is formed. Thereby, the contact area of the light projection side glass cylinder 13 and the light projection side ball lens 5a and the contact area of the light reception side glass cylinder 15 and the light reception side ball lens 9a can be increased, thereby improving the liquid tightness. it can.

In the above embodiment, a glass material is used as the material for the lenses 5, 9, 5a, 9a. However, the material for the light projecting side lens and the light receiving side lens is bonded to the glass tubes 13, 15 by optical contact. A transparent crystal material that can be used, such as sapphire, may be used.
Further, as a material for the lens and the cylindrical member, a transparent crystal material that can be joined by optical contact may be used instead of the glass material. In this case, the light projecting side lens is integrated with the light projecting side cylindrical member, and the light receiving side lens is integrated with the light receiving side cylindrical member by optical contact.

  In the above embodiment, the separately formed lens and the cylindrical member are integrated by welding or optical contact while maintaining liquid tightness. However, as shown in FIG. The side glass cylinder 13 may be configured by an integral body made of a glass material, and the light receiving side lens 9b and the light receiving side glass cylinder 15 may be configured by an integral body made of a glass material. According to this aspect, there is no gap between the light projecting side lens 5b and the light projecting side glass tube 13 and between the light receiving side lens 9b and the light receiving side glass tube 15, and liquid tightness can be maintained.

FIG. 7 is an enlarged cross-sectional view showing the periphery of a lens of still another embodiment of the optical probe.
The optical probe 1 includes a light projecting side / light receiving side optical fiber 45, a light projecting side / light receiving side lens 47, a measurement reflection mirror (light reflecting material) 7, a light projecting side / light receiving side glass tube (light projecting side / light receiving side cylindrical shape). Member) 49, base substrate 17, and glass tube fixing member 21.

An end face 45 a of the optical fiber 45 is disposed in the glass tube 49. A lens 47 is disposed on one end surface of the glass tube 49. The lens 47 is a ball lens made of, for example, quartz. The glass tube 49 is also made of quartz. The end surface of the glass tube 49 is flattened. The peripheral portion of the flat surface of the lens 47 is joined to the end surface of the glass tube 49 by welding or optical contact. Thereby, the glass cylinder 49 and the lens 47 are integrated.
The glass tube 49 is attached to the base substrate 17 by the glass tube fixing member 21.

  The measurement reflection mirror 7 is attached to the base substrate 17 at a position where light irradiated from the optical fiber end face 45 a and transmitted through the lens 47 is irradiated. The measurement reflection mirror 7 is disposed at a distance from the lens 47.

  When the optical probe 1 is used, the tip portion of the optical probe 1 is immersed in the liquid sample 23. The tip portion of the optical probe 1 is immersed in the liquid sample 23 to a depth at least where the lens 47 contacts the liquid sample 23. The measurement light incident on the optical fiber end surface opposite to the optical fiber end surface 45a is radiated from the optical fiber end surface 45a. The measurement light is converted into parallel light or condensed light by the lens 47 and applied to the measurement reflection mirror 7 through the liquid sample 23. The light reflected by the measurement reflection mirror 7 reaches the lens 47 through the liquid sample 23, is collected by the lens 47, and is irradiated onto the optical fiber end face 45a.

In this embodiment, since the lens 47 is integrated with the glass tube 49 while maintaining liquid-tightness by welding or optical contact, it is possible to prevent moisture from entering the glass tube 49, that is, the optical probe 1. .
Furthermore, since the light projecting side and the light receiving side are common as compared with the above embodiment shown in FIG. 1 and the like, the number of parts can be reduced and the optical probe shape can be made thinner.

  The optical probe 1 shown in FIG. 7 includes a light projecting side / light receiving side lens 47 formed of a ball lens. The light projecting side / light receiving side lens 47 is a hemispherical lens, a spherical lens, or a gradient index rod lens ( Selfoc lens). In this case, it is preferable that the end surface of the light projecting side glass tube and the end surface of the light receiving side glass tube are processed according to the shape of the peripheral edge of the lens.

The optical probe 1 shown in FIG. 7 uses a glass material as a material for the light projecting / light receiving side lens 47, but the material for the light projecting / light receiving side lens 47 is optical with respect to the glass tube 49. A transparent crystal material that can be joined by contact, such as sapphire, may be used.
Further, as a material for the light emitting / light receiving side lens 47 and the glass tube 49, a transparent crystal material that can be joined to each other by optical contact may be used instead of the glass material. In this case, the light projecting side / light receiving side lens 47 is integrated with the glass tube 49 by optical contact.

  Further, in the optical probe 1 shown in FIG. 7, a light projecting / light receiving side lens 47 and a glass tube 49, which are separately formed, are integrated with each other while maintaining liquid tightness by welding or optical contact. Similarly to the embodiment shown, the light projecting side / light receiving side lens and the glass tube may be formed of an integral body made of a glass material. According to this aspect, there is no gap between the light projecting side / light receiving side lens and the glass tube, and liquid tightness can be maintained.

FIG. 8 is a diagram schematically showing another embodiment of the spectrometer. The same parts as those in the spectroscopic measurement apparatus shown in FIG.
The spectroscopic measurement apparatus of this embodiment further includes a half mirror 51, convex lenses 53 and 55, and a mirror 57 in the spectroscopic unit 25, as compared with the spectroscopic apparatus shown in FIG. An optical probe 1 shown in FIG. 7 is connected to this spectrometer.

  The half mirror 51 and the convex lens 53 are arranged in that order in the optical path between the convex lens 37 and the optical fiber end face (optical fiber second end face) 45b. The convex lens 55 and the mirror 57 are arranged in that order on the optical path between the half mirror 51 and the convex lens 39. Here, the convex lens 55 and the mirror 57 may not be provided, and the light reflected by the half mirror 51 may be condensed on the light receiving element 41 by the convex lens 39.

  The light emitted from the tungsten lamp 29 passes through the convex lens 31, the interference filter 33, the convex lens 37, the half mirror 51, and the convex lens 53, enters the end surface 45 b of the optical fiber 45, and passes through the optical fiber end surface 45 a and the lens 47 of the optical probe 1. Through this, the liquid sample 23 is irradiated (see also FIG. 7). The light that has passed through the liquid sample 23 is reflected by the measurement light reflecting mirror 7, is again collected through the liquid sample 23 and the lens 47, enters the optical fiber 45 from the optical fiber end face 45 a, passes through the convex lens 53, and is condensed. Then, it is reflected by the half mirror 51, condensed by the convex lens 55, reflected by the mirror 57, condensed by the convex lens 39, and incident on the light receiving element 41. Thereby, an electrical signal corresponding to the absorbance of light of each wavelength is output from the light receiving element 41. The data processing unit 27 calculates the liquid sample component concentration according to the light intensity signal from the light receiving element 41.

  As mentioned above, although the Example of this invention was described, material, a shape, arrangement | positioning, a dimension, etc. are examples, This invention is not limited to these, In the range of this invention described in the claim Various changes can be made.

DESCRIPTION OF SYMBOLS 1 Optical probe 3 Light emission side optical fiber 5, 5a Light emission side lens 7 Measurement reflection mirror (light reflection material)
9, 9a Light receiving side lens 11 Light receiving side optical fiber 13 Light projecting side glass tube (light projecting side cylindrical member)
15 Light-receiving side glass tube (light-receiving side cylindrical member)
23 Liquid sample 27 Data processing unit 29 Light source 41 Light receiving element (light detection unit)
45 Light Emitting and Receiving Optical Fiber 47 Light Emitting and Receiving Lens 49 Light Emitting and Receiving Glass Tube (Light Emitting and Receiving Side Cylindrical Member)

Claims (9)

A light-projecting-side optical fiber disposed in the light-projecting-side cylindrical member for propagating light to be applied to the liquid sample;
A light projecting side lens disposed at the tip of the light projecting side cylindrical member at a position in contact with the liquid sample so as to face the light projecting side optical fiber end surface;
A light reflecting material that is disposed with a distance from the light projecting side lens and that reflects the light that has been irradiated from the end surface of the light projecting side optical fiber and transmitted through the light projecting side lens and the liquid sample;
A light receiving side lens that is disposed at a tip of the light receiving side cylindrical member at a position in contact with the liquid sample, and receives light reflected by the light reflecting material and transmitted through the liquid sample;
A light-receiving-side optical fiber disposed in the light-receiving-side cylindrical member and receiving light transmitted through the light-receiving-side lens on an end surface;
The light emitting side cylindrical member, the light projecting side lens, the light receiving side cylindrical member and the light receiving side lens are made of a glass material,
An optical probe in which the light projecting side lens is integrated with the light projecting side cylindrical member, and the light receiving side lens is integrated with the light receiving side cylindrical member in a liquid-tight manner by welding or optical contact.   2. The optical probe according to claim 1, wherein the lens is a hemispherical lens, an end surface of the cylindrical member is planarized, and a peripheral portion of a flat surface of the hemispherical lens is bonded to the end surface of the cylindrical member. .   The lens is a ball lens or a spherical lens, the end surface of the cylindrical member is processed according to the shape of the peripheral portion of the lens, and the peripheral portion of the hemispherical lens is bonded to the end surface of the cylindrical member. The optical probe according to claim 1.   2. The optical probe according to claim 1, wherein the lens is a gradient index rod lens, an end surface of the cylindrical member is planarized, and a peripheral portion of the lens is bonded to an end surface of the cylindrical member. .   The lens is formed of a transparent crystal material that can be joined to the cylindrical member by an optical contact instead of a glass material, and the lens is integrated with the cylindrical member by an optical contact. The optical probe according to any one of claims 1 to 4.   The lens and the cylindrical member are formed of a transparent crystal material that can be joined to each other by an optical contact instead of a glass material, and the lens is integrated with the cylindrical member by an optical contact. The optical probe according to any one of claims 1 to 4.   The optical probe according to claim 1, wherein the light projecting side lens and the light projecting side cylindrical member, and the light receiving side lens and the light receiving side cylindrical member are formed as an integrated object.   The light projecting optical fiber and the light receiving optical fiber are configured by one light projecting side / light receiving side optical fiber, and the light projecting side lens and the light receiving side lens are configured by one light projecting side / light receiving side lens, The optical probe according to any one of claims 1 to 7, wherein the light projecting side cylindrical member and the light receiving side cylindrical member are configured by one light projecting side / light receiving side cylindrical member. An optical probe according to any one of claims 1 to 8,
A light source for irradiating light to the light projecting side optical fiber second end surface opposite to the light projecting side optical fiber end surface;
A light detection unit for receiving light emitted from the light receiving side optical fiber second end surface opposite to the light receiving side optical fiber end surface;
A spectroscopic measurement apparatus comprising: a data processing unit for calculating a liquid sample component concentration according to a light intensity signal from the light detection unit.

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