JP2012021964A - Angular velocity sensor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an angular velocity sensor device using Coriolis force with which the detection accuracy of angle speed can be enhanced.SOLUTION: In an angular velocity sensor device having an oscillating sensor element 1, a pedestal 7 for supporting the sensor element 1 so that it can oscillate, and an IC 2 for mounting the pedestal 7 on a top surface and controlling the sensor element 1 in a package 3, at least four corners of the mounting surface of a bottom plate 16 forming the pedestal 7 are provided with recesses 19 and the residual part 20 is connected with the top surface of the IC.

Description

  The present invention relates to an angular velocity sensor device using Coriolis force.

  The angular velocity sensor device has a structure in which a sensor element 1 for detecting an angular velocity and a control IC 2 are housed in a package 3 as shown in FIG. The basic vibration and the detection vibration are the same, such as when the basic vibration is applied in the axial direction and the angular velocity is applied around the detection axis (Z-axis), the Coriolis force acts on the sensor element 1 to excite the vibration in the Y-axis direction. A structure that is in the plane (in the XY plane) has been studied.

  Then, as shown in FIG. 2, such a vibration type sensor element 1 includes a drive arm 5 that is folded in a bilaterally symmetrical manner with respect to the vibration center 4 and performs basic vibrations symmetrically in the X-axis direction. The drive arm 5 detects and vibrates in the Y-axis direction by the application of the surrounding angular velocity, converts the mechanical displacement caused by the detected vibration into an electrical signal and outputs it, and the sensor element 1 supports the drive arm 5 so that it can vibrate. Since it is necessary, the support arm 6 is led out from the vibration center 4 of the drive arm 5, and the support arm 6 is mounted on the IC 2 via the base 7.

  As prior art document information related to the invention of this application, for example, Patent Document 1 is known.

JP 2010-91364 A

  With the recent reduction in size and thickness of electronic components, components such as the package 3, the base 7, the IC 2, and the sensor element 1 are also reduced in strength in such angular velocity sensor devices. In particular, the influence of external stress due to deformation of the mother board on which the angular velocity sensor device is mounted becomes large. In particular, the torsional stress acting in the diagonal direction of the sensor element 1 is a direction in which the basic vibration direction of the drive arm 5 is shifted in the Y-axis direction. Therefore, the detection accuracy of the angular velocity sensor element 1 that detects the Coriolis force with respect to the fundamental vibration is deteriorated.

  Therefore, an object of the present invention is to solve such problems and suppress deterioration in detection accuracy of the angular velocity sensor device.

  In order to achieve this object, the present invention includes a vibration type sensor element, a pedestal that supports the sensor element so as to vibrate, and an IC that mounts the pedestal on the top surface and controls the sensor element in the package. In the angular velocity sensor device, concave portions are formed in at least four corners of the mounting surface of the bottom plate forming the base, and the remaining portion is connected to the top surface of the IC.

  With this structure, the present invention can suppress deterioration in detection accuracy of the angular velocity sensor device.

1 is an exploded perspective view of an angular velocity sensor device according to Embodiment 1 of the present invention. Top view of sensor elements constituting the same angular velocity sensor device Schematic diagram showing the operating principle of the electrodes provided in the sensor element Schematic diagram showing the basic vibration state of the sensor element Schematic diagram showing the detection vibration state of the sensor element Top side perspective view of pedestal supporting the sensor element Bottom perspective view of the pedestal The lower surface side perspective view of the base in other embodiment The lower surface side perspective view of the base in other embodiment The lower surface side perspective view of the base in other embodiment The lower surface side perspective view of the base in other embodiment The exploded perspective view of the angular velocity sensor apparatus in Embodiment 2 of this invention Top view of angular velocity sensor element in the same angular velocity sensor device The perspective view which looked at the base in the same angular velocity sensor device from the back side

(Embodiment 1)
Hereinafter, the first aspect of the present invention will be described with reference to the first embodiment.

  FIG. 1 shows an angular velocity sensor device, the basic structure of which is a vibration type sensor element 1 for detecting angular velocity inside a package 3 having one end made of ceramics, and a drive signal to this sensor element 1. An IC 2 including a drive control circuit to be applied and a detection circuit for processing a detection signal output from the sensor element 1 is disposed, and the opening of the package 3 is sealed with an upper lid 8. The sensor element 1 is mounted on the top surface of the IC 2 via the pedestal 7 to secure a vibration space for the sensor element 1.

  Further, as shown in FIG. 2, the sensor element 1 has the support arm 6 as a symmetry axis and symmetrically arranges the weight parts 9, and each weight part 9 is connected to the support arm 6 by a pair of meandering drive arms 5. It has a bellows type structure, and a drive electrode 10 and a detection electrode 11 described later are provided on the upper surface of the drive arm 5. In order to secure the vibration balance of the sensor element 1, the pair of drive arms 5 connected to each weight portion 9 has a symmetric structure with the X axis passing through the vibration center 4 as the symmetric axis. The supporting arm 6 to be supported is also divided by the vibration center 4 portion in order to increase the amplitude of the detected vibration, and the divided portion is connected so that the pair of drive arms 5 straddle.

  Further, as shown in FIG. 3, the electrode structure of the drive electrode 10 and the detection electrode 11 includes an upper electrode 12 made of Au, a lower electrode 13 made of Pt, and a piezoelectric layer 14 made of PZT disposed therebetween. When a positive voltage is applied to the upper electrode 12 with the lower electrode 13 connected to the ground, a compressive force acts in the electrode stacking direction, and this compressive force generates stress in the direction in which the electrode pattern extends. On the contrary, when a negative voltage is applied, a tensile force acts on the electrode, and a stress is generated in a direction in which the electrode pattern contracts due to the tensile force. On the contrary, the electrode is bent to receive a compressive stress to generate a negative voltage, and the electrode extends to receive a tensile stress to generate a positive voltage.

  In detecting the angular velocity using the vibration type sensor element 1, a driving signal is applied from the IC 2 to the driving electrode 10 so that the driving arm 5 is centered on the tip of the support arm 6 as shown in FIG. 4 is caused to vibrate fundamentally in the X-axis direction, and in this vibration state, an angular velocity is applied around the detection axis in the Z-axis direction orthogonal to the vibration plane (XY plane), so that the drive arm 5 has Y as shown in FIG. A detection vibration in the axial direction is generated, and this detection vibration is converted into an electric signal by the detection electrode 11 and output to the IC 2. The monitor electrode 15 provided at the vibration center 4 portion of the drive arm 5 is an electrode for detecting the vibration state of the basic vibration of the drive arm 5 and feeding back to the generation of the drive signal in the IC 2.

  As shown in FIG. 6, the pedestal 7 that supports the sensor element 1 is provided with a side wall 17 on the opposite side surface portion in the Y-axis direction with respect to the bottom plate 16 on which the sensor element 1 is mounted, and the X-axis direction. The connection side 18 extending in the X-axis direction provided at the tip of the support arm 6 of the sensor element 1 shown in FIG. 2 is connected and fixed to the top surface of the side wall 17 and the support arm 6 and the drive. The drive arm 5 can be vibrated by supporting the arm 5 hollowly.

  Moreover, as shown in FIG. 7, it has the structure which provided the recessed part 19 in the lower surface side of the base 7, ie, the four corners of the mounting surface with respect to the top | upper surface of IC2, and this structure suppresses the deterioration of the detection accuracy of an angular velocity sensor apparatus. Is possible.

  That is, in such an angular velocity sensor device, as the components are reduced in size and height as described above, each component such as the sensor element 1, the pedestal 7, the IC 2, and the package 3 has been made thinner. The strength of the component parts is reduced, and the influence of external stress due to deformation of the mother board on which the angular velocity sensor device is mounted is increased. In particular, the torsional stress acting in the diagonal direction of the sensor element 1 is Y Since it works so as to shift in the axial direction, the detection accuracy of the angular velocity sensor element 1 that detects the Coriolis force with respect to the fundamental vibration is deteriorated.

  However, by providing the recesses 19 at the four corners of the pedestal 7, a gap is created in this portion when the pedestal 7 is mounted on the IC 2, and transmission of torsional stress acting in the diagonal direction of the pedestal 7 from the IC 2 can be alleviated. As a result, it is possible to suppress deterioration in detection accuracy of the angular velocity sensor element 1. Further, the transmission of the fundamental vibration of the sensor element 1 to the IC 2 side is diverged from the thinned concave portion 19 to the internal space of the package 3, and noise detection by self-excitation of the angular velocity sensor device accompanying the fundamental vibration is performed. Can also be suppressed.

  In this embodiment, the recesses 19 are provided at the four corners of the pedestal 7 and the shape of the remaining portion 20 serving as a connection portion with the IC 2 is formed in a cross shape in order to improve mounting stability at the time of connection with the IC 2. Since the torsional stress applied to the pedestal 7 can be reduced, the shape of the remaining portion 20 is not particularly shown, but the desired effect can be obtained if at least the concave portion 19 such as a vertical I shape or a horizontal I shape includes four corners. Obtainable.

  Further, as shown in FIG. 8, the width of the branch portion 20b extending from the intersection portion 20a in the cross-shaped remaining portion 20 is narrower than that of the intersection portion 20a, so that the connection to the IC 2 is performed at the wide intersection portion 20a and the branch portion. The stability can be ensured with 20b, the area of more concave portions 19 can be secured, and the transmission of torsional stress acting in the diagonal direction of the base 7 from the IC 2 can be further relaxed. Note that, from the viewpoint of increasing the area of the recess 19, similar effects can be obtained even if a groove 20 c is provided between the intersection 20 a and the branch 20 b as shown in FIG. 9.

  Further, the concave portion 19 does not necessarily have a bottomed shape with respect to the bottom plate 16 and may have a structure in which the concave portion 19 penetrates the bottom plate 16 as shown in FIGS.

(Embodiment 2)
Hereinafter, the invention according to the sixth and seventh aspects of the present invention will be described with reference to the second embodiment.

  12 is an exploded perspective view of the angular velocity sensor device according to Embodiment 2 of the present invention, FIG. 13 is a top view of the angular velocity sensor element in the angular velocity sensor device, and FIG. 14 is a perspective view of the pedestal in the angular velocity detection device viewed from the back side. is there.

  12 to 14, reference numeral 21 denotes a biaxial detection angular velocity sensor element. Reference numeral 22 denotes a first fixed portion made of Si. On the upper surface of the first fixed portion 22, a pair of drive electrode lands 22a, one Y-direction detection electrode land 23, four Z-direction detection electrode lands 24, and a GND electrode Lands 25 and monitor electrode lands 26 are provided. Reference numeral 27 denotes a first Y-axis detecting vibrating body made of Si. The first Y-axis detecting vibrating body 27 has one end connected to one end of the first fixing portion 22 and a Y-axis detecting piezoelectric electrode 28 on the upper surface. The Y-axis detection piezoelectric electrode 28 includes a common GND electrode made of an alloy thin film of Pt and Ti, and a piezoelectric layer made of a PZT thin film provided on the upper surface of the common GND electrode. Reference numeral 31 denotes a second Y-axis detection vibrating body made of Si. The second Y-axis detection vibration body 31 has one end connected to the other end of the first fixing portion 22 and a Y-axis detection piezoelectric electrode on the upper surface. 28 is provided. Reference numeral 32 denotes a torsion extending portion, and the torsion extending portion 32 connects the other end of the first Y axis detection vibrating body 27 and the other end of the second Y axis detection vibrating body 31. Reference numeral 33 denotes a first drive vibrating body. The first drive vibrating body 33 extends in a direction perpendicular to the torsion extending portion 32 and has a pair of drive piezoelectric electrodes 33a on the upper surface. The piezoelectric electrode 33a includes a common GND electrode made of an alloy thin film of Pt and Ti, and a piezoelectric layer made of a PZT thin film provided on the upper surface of the common GND electrode. Reference numeral 34 denotes a first Z-axis detection vibrating body. The first Z-axis detection vibration body 34 is perpendicular to the extending direction of the first drive vibration body 33 at the other end of the first drive vibration body 33. In addition to extending in the direction, the center is bent into an L shape. A Z-axis detection piezoelectric electrode 35 is provided on the upper surface of the first Z-axis detection vibrating body 34. The Z-axis detection piezoelectric electrode 35 includes a common GND electrode made of an alloy thin film of Pt and Ti, A piezoelectric layer made of a PZT thin film provided on the upper surface of the common GND electrode. Reference numeral 36 denotes a weight portion. The weight portion 36 is connected to the other end of the first Z-axis detection piezoelectric body 34 and is provided with a pair of hook portions 37. Each of the hook portions 37 is connected to the first portion. 1 Z-axis detection vibrating body 34 is provided on both sides of the other end. Reference numeral 38 denotes a second drive vibrator, and the second drive vibrator 38 extends in parallel to the first drive vibrator 33 in a direction perpendicular to the torsion extending portion 32 and has a pair of drives on the upper surface. A piezoelectric electrode 33a is provided. Reference numeral 39 denotes a second Z-axis detection vibrating body. The second Z-axis detection vibration body 39 is perpendicular to the extending direction of the second drive vibration body 38 at the other end of the second drive vibration body 38. It extends in the direction and in the direction opposite to the first Z-axis detection vibrating body 34, and is substantially bent at the center in an L shape. Reference numeral 40 denotes a weight portion, and the weight portion 40 is connected to the other end of the second Z-axis detection vibrating body 39. Reference numeral 41 denotes a second fixed portion made of Si. On the upper surface of the second fixed portion 41, a pair of drive electrode lands 42, one Y-direction detection electrode land 43, four Z-direction detection electrode lands 44, and a GND electrode A land 45 and a monitor electrode land 46 are provided. Reference numeral 47 denotes a third Y-axis detection vibrating body made of Si. The third Y-axis detection vibration body 47 has one end connected to one end of the second fixing portion 41 and a Y-axis detection piezoelectric electrode 28 on the upper surface. Is provided. Reference numeral 51 denotes a fourth Y-axis detection vibrating body made of Si. The fourth Y-axis detection vibration body 51 has one end connected to the other end of the second fixing portion 41 and a Y-axis detection piezoelectric electrode on the upper surface. 28 is provided. The other end of the third Y-axis detection vibrating body 47 and the other end of the fourth Y-axis detection vibrating body 51 are connected to the torsion extending portion 32. Reference numeral 52 denotes a third drive vibration member, and the third drive vibration member 52 extends from the torsion extending portion 32 in a direction opposite to the second drive vibration member 38 and perpendicular to the torsion extension portion 32. A pair of driving piezoelectric electrodes 33a are provided on the upper surface. The driving piezoelectric electrode 33a is composed of a common GND electrode made of an alloy thin film of Pt and Ti, and a piezoelectric layer made of a PZT thin film provided on the upper surface of the common GND electrode. Reference numeral 54 denotes a third Z-axis detection vibrating body. The third Z-axis detection vibration body 54 is perpendicular to the extending direction of the third drive vibration body 52 at the other end of the third drive vibration body 52. In addition to extending in the direction, the center is bent into an L shape. A Z-axis detection piezoelectric electrode 35 is provided on the upper surface of the third Z-axis detection vibrating body 54. Reference numeral 56 denotes a weight part, and the weight part 56 is connected to the other end of the third Z-axis detection vibrating body 54. Reference numeral 58 denotes a fourth drive vibration body. The fourth drive vibration body 58 extends in parallel to the third drive vibration body 52 in the direction perpendicular to the torsion extending portion 32 and has a pair of driving surfaces on the upper surface. A piezoelectric electrode 33a is provided. 59 is a fourth Z-axis detection vibrating body, and this fourth Z-axis detection vibration body 59 is perpendicular to the extending direction of the fourth drive vibration body 58 at the other end of the fourth drive vibration body 58. It extends in the direction and in the direction opposite to the third Z-axis detection vibrating body 54, and is substantially bent at the center in an L shape. A Z-axis detection piezoelectric electrode 35 is provided on the upper surface of the fourth Z-axis detection vibrating body 59. Reference numeral 60 denotes a weight part, and the weight part 60 is connected to the other end of the fourth Z-axis detection vibrating body 59. On the upper surface of the first drive vibrator 33, the second drive vibrator 38, the third drive vibrator 52, the fourth drive vibrator 58 and the vicinity of the connection portion between the torsion extension portion 32, , Each is provided with a monitor piezoelectric electrode 61. The drive electrode land 22a in the first fixed portion 22 is electrically connected to the drive piezoelectric electrode 33a in the first drive vibration body 33 and the second drive vibration body 38 by the wiring pattern 62, and The Y-direction detection electrode land 23 is electrically connected to the Y-axis detection piezoelectric electrode 28 in the first Y-axis detection vibration body 27 and the second Y-axis detection vibration body 31 by the wiring pattern 62. Further, the Z-direction detection electrode land 24 in the first fixed portion 22 is electrically connected to the Z-axis detection piezoelectric electrode 35 and the wiring pattern 62 in the first Z-axis detection vibration body 34 and the second Z-axis detection vibration body 39. The monitor electrode land 26 is electrically connected to the monitor piezoelectric electrode 61 and the wiring pattern 62 in the first drive vibrating body 33 and the second drive vibrating body 38. Further, the drive electrode land 42 in the second fixed portion 41 is electrically connected to the drive piezoelectric electrode 33a in the third drive vibration body 52 and the fourth drive vibration body 58 by the wiring pattern 62, and Y The direction detection electrode land 43 is electrically connected to the Y-axis detection piezoelectric electrode 28 in the third Y-axis detection vibrating body 47 and the fourth Y-axis detection vibration body 51 by the wiring pattern 62. Further, the Z-direction detection electrode land 44 in the second fixing portion 41 is electrically connected to the Z-axis detection piezoelectric electrode 35 and the wiring pattern 62 in the third Z-axis detection vibration body 54 and the fourth Z-axis detection vibration body 59. The monitor electrode land 46 is electrically connected to the monitor piezoelectric electrode 61 and the wiring pattern 62 in the third drive vibration body 52 and the fourth drive vibration body 58. Reference numeral 63 denotes a pedestal made of rectangular parallelepiped Si. The pedestal 63 supports the first fixing portion 22 and the second fixing portion 41 of the biaxial detection angular velocity sensor element 21 at both ends in the longitudinal direction. It is provided on the upper surface. Also, on the lower surface of the pedestal 63, the first Y-axis detection vibrating body 27, the second Y-axis detection vibrating body 31, the third Y-axis detection vibrating body 47 and the second Y-axis detection vibrating body 27 in the biaxial detection angular velocity sensor element 21 are provided. 4 is provided with a Y-axis detection adhesive portion 65 at a position facing the Y-axis detection vibrating body 51, and a cross-adhesion portion 66 is provided at substantially the center. The support portion 64, the Y-axis detection adhesion portion 65, and the cross adhesion portion 66 are configured integrally with the pedestal 63.

  The support part 64, the Y-axis detection adhesive part 65, and the cross adhesive part 66 are integrally formed of the same material on the pedestal 63, so that their thermal expansion coefficients are equal to each other. It is possible to prevent the stress from being generated.

  Reference numeral 68 denotes an IC. The IC 68 is provided with the pedestal 63 on the upper surface, and is fixed to the Y-axis detection adhesion portion 65 and the cross adhesion portion 66 on the pedestal 63 by an adhesive (not shown). The IC 68 controls the angular velocity sensor element 21 for biaxial detection. Reference numeral 69 denotes a case. The case 69 accommodates the biaxial detection angular velocity sensor element 21, the pedestal 63, and the IC 68, and a case electrode 71 is provided on the stepped portion 70 on the inner bottom surface. A pair of drive electrode lands 22a, one Y-direction detection electrode land 23, four Z-direction detection electrode lands 24, a GND electrode land 25, a monitor electrode land 26, a pair of drive electrode lands 42, 1 in the angular velocity sensor element 21 for detection. The Y-direction detection electrode lands 43, the four Z-direction detection electrode lands 44, the GND electrode lands 45, and the monitor electrode lands 46 are electrically connected via wire wires 72. Reference numeral 73 denotes an upper lid, and the upper lid 73 closes the upper surface opening of the case 69.

  Next, the operation of the angular velocity sensor device according to Embodiment 2 of the present invention configured as described above will be described.

  By applying an AC voltage to the drive electrode land 22 a in the first fixed portion 22 and the drive electrode land 42 in the second fixed portion 41, the first drive vibrating body 33, the second drive voltage 33 are connected via the wiring pattern 62. In the case of the same direction as the direction of polarization of the drive piezoelectric electrode 33a in the drive vibration body 38, the third drive vibration body 52, and the fourth drive vibration body 58, tensile stress is generated. Compressive stress occurs. Then, the first drive vibrator 33, the second drive vibrator 38, the third drive vibrator 52, and the fourth drive vibrator 58 are driven at the speed V in the X-axis direction according to the phase of the AC voltage. Vibrate. The drive vibration is transmitted through the first Z-axis detection vibrating body 34, the second Z-axis detection vibration body 39, the third Z-axis detection vibration body 54, and the fourth Z-axis detection vibration body 59 via the weight 36, 40, 56, 60, and the weights 36, 40, 56, 60 are driven to vibrate at a speed V in the X-axis direction.

  First, consider a case where an angular velocity around the Z-axis direction is generated in the angular velocity sensor element.

  The weight portions 36, 40, 56, 60 are driven to vibrate in the Y-axis direction by Coriolis force.

  Then, the first drive vibration body 33 in the first Z-axis detection vibration body 34, the second Z-axis detection vibration body 39, the third Z-axis detection vibration body 54, and the fourth Z-axis detection vibration body 59, A portion extending in a perpendicular direction from the second drive vibration body 38, the third drive vibration body 52, and the fourth drive vibration body 58 is driven to vibrate in the Y-axis direction. Then, a charge corresponding to the angular velocity is generated in the Z-axis detection piezoelectric electrode 35. Further, the tips of the first Z-axis detection vibrating body 34, the second Z-axis detection vibrating body 39, the third Z-axis detection vibrating body 54, and the fourth Z-axis detection vibrating body 59 bent into an L shape. The side bends and vibrates in the X-axis direction in accordance with the aforementioned Y-axis direction vibration drive. Therefore, the electric charge generated by this bending vibration is generated by adding to the Z-axis detection piezoelectric electrode 35, and the angular velocity around the Z-axis can be detected.

  Next, consider a case where an angular velocity around the Y-axis direction is generated in the angular velocity sensor element.

  In that case, the weight portions 36, 40, 56, 60 are driven to vibrate in the Z-axis direction by Coriolis force. Then, the first Z-axis detection vibrating body 34, the second Z-axis detection vibrating body 39, the third Z-axis detection vibrating body 54, the fourth Z-axis detection vibrating body 59, and the first drive vibrating body 33. A torsional force is applied to the torsion extending portion 32 via the second drive vibration body 38, the third drive vibration body 52, and the fourth drive vibration body 58, and the first Y-axis detection vibration body 27, The two Y-axis detection vibrating bodies 31, the third Y-axis detection vibrating body 47, and the fourth Y-axis detection vibrating body 51 are driven to vibrate in the Z-axis direction. Electric charges are generated in the Y-axis detection piezoelectric electrode 28, and the angular velocity around the Y-axis can be detected.

  Here, by mounting the angular velocity sensor device on the mating substrate (not shown), two axes are sequentially formed via the case 69, the IC 68, and the pedestal 63 due to the distortion of the mating substrate (not shown). Consider a case where stress is transmitted to the detection angular velocity sensor element 21.

  In the angular velocity sensor device according to the second embodiment of the present invention, since the cross bonding portion 66 is provided on the pedestal 63, the bonding area between the pedestal 63 and the IC 68 is reduced, thereby causing a counterpart substrate (not shown). Since the stress due to the distortion is not transmitted to the entire pedestal 63, the first Y-axis detection vibrating body 27 and the second Y-axis detection in the angular velocity sensor element 21 for two-axis detection are performed via the support portion 64. Stress can be prevented from being transmitted to the vibrating body 31, the third Y-axis detection vibrating body 47, and the fourth Y-axis detection vibrating body 51. As a result, the angular velocity around the Y axis can be accurately detected. It has an effect.

  In addition, since the Y-axis detection adhesive portion 65 is provided on the pedestal 63, the parallelism of the adhesion between the pedestal 63 and the IC 68 is stabilized, whereby the biaxial detection angular velocity sensor element 21 is inclined due to the decrease in the adhesion area. Therefore, the angular velocity can be detected more accurately.

  INDUSTRIAL APPLICABILITY The present invention has an effect of improving the detection accuracy of an angular velocity sensor device, and is particularly useful in an angular velocity sensor used for an electronic apparatus that requires a small and highly sensitive characteristic such as a car navigation system.

1 Sensor element 2 IC
3 Package 4 Center of vibration 5 Drive arm 6 Support arm 7 Base 16 Base plate 17 Side wall 19 Recess 20 Remaining portion 21 Biaxial detection angular velocity sensor element 22, 41 Fixed portion 27, 31, 47, 51 Y-axis detection vibrator 28 Y-axis detection Piezoelectric electrode 32 Twist extension part 33, 38, 52, 58 Drive vibrator 33a Drive piezoelectric electrode 34, 39, 54, 59 Z-axis detection vibrator 36, 40, 56, 60 Weight part 63 Base 64 Support part 65 Y axis Detection bonding part 66 Cross bonding part

Claims (7)

A vibration type sensor element, a pedestal that supports the sensor element so as to vibrate, an IC that mounts the pedestal on the top surface and controls the sensor element, and a package that houses the sensor element, the pedestal, and the IC The sensor element fundamentally vibrates in a symmetric direction from the center of vibration in the X-axis direction of the XYZ coordinate system and detects and vibrates in the Y-axis direction by applying an angular velocity around the Z-axis, and one end vibrates the drive arm. A support arm connected to the center and connected to the pedestal with the other end extending in the Y-axis direction. The pedestal includes a rectangular bottom plate and a pair of side walls provided on opposite sides of the bottom plate. The support arm is connected to the side wall, and recesses are provided in at least four corners on the mounting surface of the bottom plate, and the remaining part is connected to the top surface of the IC. Angular velocity sensor device to. The angular velocity sensor device according to claim 1, wherein the remaining portion has a cross shape. 3. The angular velocity sensor device according to claim 2, wherein a width of a branch portion extending from the intersecting portion toward the outer peripheral end is narrower than a width of the intersecting portion in the cross-shaped remaining portion. The angular velocity sensor device according to claim 2, wherein a groove is provided between an intersection portion of the cross-shaped remaining portion and a branch portion extending from the intersection portion toward the outer peripheral end. The angular velocity sensor device according to claim 1, wherein the recess penetrates the bottom plate. A fixed portion, a Y-axis detection vibrating body having one end connected to the fixed portion and provided with at least one Y-axis detection piezoelectric electrode on the upper surface, and a twist in which the other end and one end of the Y-axis detection vibration body are connected An extension portion, one end connected to the torsion extension portion, a drive vibrator extending in a direction perpendicular to the torsion extension portion and provided with at least one drive piezoelectric electrode on the upper surface, and one end driven A Z-axis detection vibrating body connected to the other end of the vibration body and extending in a direction perpendicular to the extending direction of the drive vibration body, and further provided with at least one Z-axis detection piezoelectric electrode on the upper surface, and the Z-axis An angular velocity sensor element comprising a weight connected to the other end of the detection vibrating body, a pedestal that supports the angular velocity sensor element so as to vibrate, an IC that provides the pedestal on the upper surface and controls the angular velocity sensor element; The angular velocity sensor element And a case for housing the base and IC, the angular velocity sensor device where the structure provided with Y-axis detection contact portion at a position opposed to the Y-axis detection vibrator provided with a cross bonding portion substantially in the center of the pedestal. The angular velocity sensor device according to claim 6, wherein the adhesive portion of the pedestal is integrally provided with the same material as the pedestal.

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