JP2012018723A - Method for manufacturing magnetic recording medium and system for manufacturing magnetic recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress adherence of foreign materials to a magnetic recording medium in performing magnetic transfer.SOLUTION: A surface inspection/magnetic transfer device 10 equipped with a magnetic transfer part 14 for magnetically transferring a servo pattern on a magnetic recording medium is disposed in a clean room 300 using a downflow system. In addition, in the clean room 300, a wind velocity of a second fan filter unit (FFU) 310b which is disposed above the magnetic transfer part 14 and supplies a descending current of purified air downward is set faster than a wind velocity of a first FFU 310a or a third FFU 310c or the like which is disposed around the second FFU 310b and supplies a descending current of purified air downward.

Description

  The present invention relates to a magnetic recording medium manufacturing method and a magnetic recording medium manufacturing system.

In a magnetic recording apparatus typified by a hard disk drive or the like, data is written to and read from a rotating magnetic recording medium using a magnetic head.
In this type of magnetic recording apparatus, the magnetic head is positioned in order to move the magnetic head to a target position on the magnetic recording medium and to write and read data at that position. For this reason, positioning data that is read by the magnetic head and used for positioning the magnetic head is recorded on the magnetic recording medium in advance.

  As a prior art described in the publication, it has been proposed to record positioning data and the like on a magnetic recording medium by a so-called magnetic transfer system (see Patent Document 1). In Patent Document 1, a magnetic force is applied in one direction across the pattern forming body and the magnetic recording medium in a state where the magnetic recording medium is superimposed on the pattern forming body on which a pattern corresponding to data to be recorded is formed. Thus, the magnetic transfer of the pattern to the magnetic recording medium is performed. Patent Document 1 describes that a magnetic transfer device that performs magnetic transfer on a magnetic recording medium is disposed in a clean room.

JP 2001-357523 A

By the way, even in a clean room, it is difficult to completely remove foreign matters such as dust, and foreign matters corresponding to the cleanliness level exist in the clean room. For this reason, when a magnetic recording medium is superimposed on a pattern forming body in a clean room, foreign matter may be sandwiched between the two, and the life of the pattern forming body may be reduced as the pattern forming body is damaged. Sometimes it was shortened.
An object of the present invention is to suppress adhesion of foreign matters to a magnetic recording medium when performing magnetic transfer.

  The method for manufacturing a magnetic recording medium of the present invention is such that the wind speed in the first area on the ceiling side of the clean room is higher than the wind speed in the second area around the ceiling and the first area. A process of supplying a downward air flow from the upper side to the lower side in the clean room, and data of a magnetic recording medium for recording magnetic information on the pattern forming surface of the pattern forming body in which the pattern is formed in the clean room and below the first region A step of pressing the surface, and a step of magnetically transferring a pattern formed on the pattern forming body to the magnetic recording medium with respect to the pressed pattern forming body and the magnetic recording medium in the clean room and below the first region. Contains.

In this magnetic recording medium manufacturing method, the step of supplying the downdraft may be characterized in that the wind speed in the first region is twice or more than the wind speed in the second region.
In the step of supplying the descending airflow, the cleanliness of the gas supplied from the first region can be made higher than the cleanliness of the gas supplied from the second region.

  From another point of view, the magnetic recording medium manufacturing method according to the present invention is such that the wind speed in the first area on the ceiling side of the clean room is higher than the wind speed in the second area on the ceiling side and around the first area. A step of supplying a downward airflow from the ceiling to the clean room from the ceiling side to the clean room, and a pair of pattern forming bodies disposed in the clean room and below the first region, each having a pattern formed thereon. Between each pattern forming surface, a step of loading a magnetic recording medium for recording magnetic information in the clean room and below the second area, and a pair of pattern forming bodies in the clean room and below the first area. A magnetic recording medium sandwiched between a pair of pattern forming bodies in a clean room and below the first region. And a step of magnetically transferring a pattern formed on each of the pair of pattern forming bodies to the magnetic recording medium by forming a magnetic field in a direction perpendicular to the pattern forming surface, and in the clean room and below the first region The magnetic recording medium in which the pattern is magnetically transferred between the step of releasing the sandwiching of the magnetic recording medium by the pair of pattern forming bodies and the pair of pattern forming bodies located in the clean room and below the first region And a step of unloading in the clean room and below the second region.

In such a method of manufacturing a magnetic recording medium, in the step of supplying the downdraft, the wind speed in the first region may be twice or more than the wind speed in the second region.
In the step of supplying the descending airflow, the cleanliness of the gas supplied from the first region can be made higher than the cleanliness of the gas supplied from the second region.

  Further, from another point of view, the magnetic recording medium manufacturing system of the present invention is arranged between a pair of pattern forming bodies each having a pattern and a magnetic recording medium that records magnetic information. A pair of sandwiching members arranged to sandwich the recording medium, a pair of magnet members arranged to sandwich the pattern forming body and the magnetic recording medium sandwiched by the pair of sandwiching members, and a pair of pattern formation A first supply unit that is disposed above the body and the pair of pinching members and supplies the cleaned airflow from the upper side to the lower side at the first wind speed, and is disposed around the first supply unit and is cleaned. A second supply unit that supplies the converted airflow from above to below at a second wind speed lower than the first wind speed.

  According to the present invention, adhesion of foreign matter to a magnetic recording medium can be suppressed when performing magnetic transfer.

It is the figure which showed an example of the structure of the magnetic recording / reproducing apparatus provided with the magnetic recording medium with which this Embodiment is applied. It is a figure which shows an example of the cross-sectional structure of a magnetic recording medium. It is a top view of a magnetic recording medium. 3 is a flowchart showing an example of a method for manufacturing a magnetic recording medium in the present embodiment. It is a top view of a surface inspection / magnetic transfer apparatus for performing surface inspection and magnetic transfer. FIG. 6 is a perspective view of the surface inspection / magnetic transfer apparatus as seen from the direction of arrow VI in FIG. 5. It is a figure which shows an example of a structure of the 1st magnet member in a magnetic transfer part, a 2nd magnet member, and mutual positional relationship. It is a figure which shows an example of a structure of the master information recording body used with a magnetic transfer part. It is a figure which shows an example of the cross-sectional structure of the fixed holder and movable holder in a magnetic transfer part. It is a figure which shows an example of the control block in a surface inspection and a magnetic transfer apparatus. It is side part sectional drawing which shows an example of the structure of the clean room which accommodates a surface test | inspection and magnetic transfer apparatus. It is XII-XII sectional drawing of FIG.

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
FIG. 1 is a diagram showing an example of the configuration of a magnetic recording / reproducing apparatus including a magnetic recording medium 1 to which the present embodiment is applied.
This magnetic recording / reproducing apparatus includes a magnetic recording medium 1 that magnetically records data as magnetic information, a rotation drive unit 2 that rotationally drives the magnetic recording medium 1, and data is written to the magnetic recording medium 1 and the magnetic recording medium 1. A magnetic head 3 for reading data recorded on the head, a carriage 4 on which the magnetic head 3 is mounted, a head drive unit 5 for moving the magnetic head 3 relative to the magnetic recording medium 1 via the carriage 4, and an external input A signal processing unit 6 that outputs a recording signal obtained by processing the processed information to the magnetic head 3 and outputs information obtained by processing a reproduction signal from the magnetic head 3 to the outside.
Here, in the present embodiment, the magnetic recording medium 1 has a disk shape, and recording layers for recording data are formed on both sides thereof as will be described later. In the example shown in FIG. 1, a plurality (three in this case) of magnetic recording media 1 are attached to one magnetic recording / reproducing apparatus.

FIG. 2 is a diagram showing an example of a cross-sectional configuration of the magnetic recording medium 1 shown in FIG. In addition, although there are an in-plane recording method and a perpendicular recording method as a data recording method for the magnetic recording medium 1, in this embodiment, the magnetic recording medium 1 used in the perpendicular recording method will be described.
The magnetic recording medium 1 is formed on a substrate 100, an adhesion layer 110 formed on the substrate 100, a soft magnetic underlayer 120 formed on the adhesion layer 110, and a soft magnetic underlayer 120. The orientation control layer 130, the nonmagnetic underlayer 140 formed on the orientation control layer 130, the perpendicular recording layer 150 formed on the nonmagnetic underlayer 140, and the perpendicular recording layer 150 are formed. The protective layer 160 and the lubricating layer 170 formed on the protective layer 160 are provided. In this embodiment, the adhesion layer 110, the soft magnetic underlayer 120, the orientation control layer 130, the nonmagnetic underlayer 140, the perpendicular recording layer 150, the protective layer 160, and the lubricating layer 170 are formed on both surfaces of the substrate 100, respectively. Is to be formed. Thereby, both surfaces of the magnetic recording medium 1 function as data surfaces. In the following description, a laminate substrate in which the adhesive layer 110 to the protective layer 160 are laminated on both surfaces of the substrate 100 as necessary, in other words, a laminate substrate other than the lubrication layer 170 is formed. Sometimes referred to as 180.

  In this embodiment, a non-magnetic material is used as the substrate 100, and a metal substrate made of a metal material such as aluminum or an aluminum alloy may be used. For example, glass, ceramic, silicon, silicon carbide, carbon, etc. You may use the nonmetallic board | substrate which consists of these nonmetallic materials. In addition, it is also possible to use a substrate in which a NiP layer or a NiP alloy layer is formed on the surface of the metal substrate or nonmetal substrate by using, for example, a plating method or a sputtering method.

  Among these, as a glass substrate, normal glass, crystallized glass, etc. can be used, for example, General-purpose soda-lime glass, aluminosilicate glass, etc. can be used as normal glass, for example. In addition, as the crystallized glass, for example, lithium-based crystallized glass can be used. As the ceramic substrate, for example, a general-purpose aluminum oxide, a sintered body mainly composed of aluminum nitride, silicon nitride, or the like, or a fiber reinforced material thereof can be used.

  Further, as described later, when the substrate 100 is in contact with the soft magnetic underlayer 120 containing Co or Fe as a main component, corrosion can proceed due to surface adsorption gas, influence of moisture, diffusion of substrate components, and the like. There is sex. For this reason, it is preferable to provide the adhesion layer 110 between the substrate 100 and the soft magnetic underlayer 120. In addition, as a material of the adhesion layer 110, for example, Cr, Cr alloy, Ti, Ti alloy, or the like can be appropriately selected. The thickness of the adhesion layer 110 is preferably 2 nm (20 mm) or more.

The soft magnetic underlayer 120 is provided in order to reduce noise during recording and reproduction when the perpendicular recording method is employed.
In the present embodiment, the soft magnetic underlayer 120 includes a first soft magnetic layer 121 formed on the adhesion layer 110, a spacer layer 122 formed on the first soft magnetic layer 121, and a spacer layer 122. And a second soft magnetic layer 123 formed thereon. That is, the soft magnetic underlayer 120 has a configuration in which the spacer layer 122 is sandwiched between the first soft magnetic layer 121 and the second soft magnetic layer 123.
Of these, the first soft magnetic layer 121 and the second soft magnetic layer 123 are preferably made of a material containing Fe: Co in the range of 40:60 to 70:30 (atomic ratio). In order to enhance the corrosion resistance, it is preferable to contain any one selected from the group consisting of Ta, Nb, Zr, and Cr in the range of 1 atomic% to 8 atomic%.
As the spacer layer 122, Ru, Re, Cu, or the like can be used. Among these, it is particularly preferable to use Ru.

The orientation control layer 130 is provided in order to refine the crystal grains of the perpendicular recording layer 150 laminated thereon via the nonmagnetic underlayer 140 to improve the recording / reproducing characteristics.
The material constituting the orientation control layer 130 is not particularly limited, but a material having an hcp structure, an fcc structure, or an amorphous structure is preferable. In particular, a Ru-based alloy, a Ni-based alloy, a Co-based alloy, a Pt-based alloy, and a Cu-based alloy are preferable, and those obtained by multilayering these alloys may be used. For example, it is preferable to adopt a multilayer structure of Ni-based alloy and Ru-based alloy, a multilayer structure of Co-based alloy and Ru-based alloy, or a multilayer structure of Pt-based alloy and Ru-based alloy from the substrate 100 side.

The nonmagnetic underlayer 140 is provided in order to suppress disorder of crystal growth in the initial layered portion of the perpendicular recording layer 150 stacked thereon, and to suppress generation of noise during recording and reproduction. However, the nonmagnetic underlayer 140 is not necessarily provided.
In the present embodiment, the nonmagnetic underlayer 140 is preferably made of a material containing an oxide in addition to a metal containing Co as a main component. The Cr content in the nonmagnetic underlayer 140 is preferably 25 atomic% to 50 atomic%. As the oxide in the nonmagnetic underlayer 140, for example, an oxide such as Cr, Si, Ta, Al, Ti, Mg, and Co is preferably used, and among them, TiO ₂ , Cr ₂ O ₃ , SiO _{2 and the} like are particularly preferable. Can be suitably used. The content of the oxide in the nonmagnetic underlayer 140 is 3 mol% or more and 18 mol% or less with respect to the total mol of the magnetic particles, for example, an alloy such as Co, Cr, and Pt calculated as one compound. It is preferable.

  In the present embodiment, the perpendicular recording layer 150 includes a first magnetic layer 151 formed on the nonmagnetic underlayer 140, a first nonmagnetic layer 152 formed on the first magnetic layer 151, and a first A second magnetic layer 153 formed on the nonmagnetic layer 152, a second nonmagnetic layer 154 formed on the second magnetic layer 153, and a third formed on the second nonmagnetic layer 154 And a magnetic layer 155. That is, in the perpendicular recording layer 150, the first nonmagnetic layer 152 is sandwiched between the first magnetic layer 151 and the second magnetic layer 153, and the second nonmagnetic layer 154 is formed between the second magnetic layer 153 and the third magnetic layer 155. It has a sandwiched configuration.

Among these, the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155 reverse the magnetization direction in the thickness direction of the perpendicular recording layer 150 by the magnetic energy supplied from the magnetic head 3, and Provided for storing data by maintaining state.
The first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155 include magnetic particles made of a metal containing Co as a main component and a nonmagnetic oxide, and the magnetic particles are surrounded by an oxide. Those having a mold structure are preferably used.

Here, as the oxide constituting the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155, for example, an oxide such as Cr, Si, Ta, Al, Ti, Mg, Co is used. preferable. Among _{them, TiO 2, Cr 2 O 3} , SiO ₂ or the like can be suitably used. Further, the first magnetic layer 151 which is the lowest layer in the perpendicular recording layer 150 preferably contains a composite oxide composed of two or more kinds of oxides. Among these, in particular, compositions such as Cr ₂ O ₃ —SiO ₂ , Cr ₂ O ₃ —TiO ₂ , Cr ₂ O ₃ —SiO ₂ —TiO ₂ can be suitably used.

In addition, as a material suitable for the magnetic particles constituting the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155, for example, 90 (Co14Cr18Pt) -10 (SiO ₂ ) {Cr content 14 atomic% , Pt content of 18 atomic%, the molar concentration calculated as a single compound of magnetic particles composed of the remaining Co is 90 mol%, the oxide composition composed of SiO ₂ is 10 mol%}, 92 (Co 10 Cr 16 Pt) -8 (SiO ₂ ), other _{94 (Co8Cr14Pt4Nb) -6 (Cr 2} O 3), (CoCrPt) - (Ta 2 O 5), (CoCrPt) - (Cr 2 O 3) - (TiO 2), (CoCrPt) - (Cr 2 O _{3) - (SiO 2),} (CoCrPt) - (Cr 2 O 3) - (SiO 2) - (TiO 2), (CoCrPtMo) - (Ti _{), (CoCrPtW) - (TiO} 2), (CoCrPtB) - (Al 2 O 3), (CoCrPtTaNd) - (MgO), (CoCrPtBCu) - (Y 2 O 3), (CoCrPtRu) - (SiO 2) , etc. Can be mentioned.

Further, the first nonmagnetic layer 152 and the second nonmagnetic layer 154 facilitate the magnetization reversal of the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155 constituting the perpendicular recording layer 150. It is provided to reduce noise by reducing dispersion of magnetization reversal in the entire magnetic particles.
In the present embodiment, it is preferable that the first nonmagnetic layer 152 and the second nonmagnetic layer 154 include, for example, Ru and Co.

  In this example, the magnetic layers constituting the perpendicular recording layer 150 are three layers (the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155). However, the present invention is not limited to this. It is also possible to have a configuration including more than one magnetic layer. In this example, the nonmagnetic layer (the first nonmagnetic layer 152 and the first magnetic layer 152) is interposed between the magnetic layers (the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155) constituting the perpendicular recording layer 150. However, the present invention is not limited to this. For example, two magnetic layers having different compositions may be arranged in an overlapping manner.

The protective layer 160 is provided to suppress corrosion of the perpendicular recording layer 150 and to prevent and protect the surface of the magnetic recording medium 1 from being damaged when the magnetic head 3 comes into contact with the magnetic recording medium 1.
As the protective layer 160, a conventionally known material can be used. For example, a material containing C, SiO ₂ , or ZrO ₂ can be used. The thickness of the protective layer 160 is preferably 1 to 10 nm because the distance between the magnetic head 3 and the magnetic recording medium 1 can be reduced in the magnetic recording / reproducing apparatus shown in FIG.

The lubricating layer 170 is provided to suppress wear of the surfaces of the magnetic head 3 and the magnetic recording medium 1 when the magnetic head 3 comes into contact with the magnetic recording medium 1.
As the lubricating layer 170, a conventionally known material can be used. For example, it is preferable to use a lubricant such as perfluoropolyether, fluorinated alcohol, or fluorinated carboxylic acid. The thickness of the lubrication layer 170 is preferably 1 to 2 nm because the distance between the magnetic head 3 and the magnetic recording medium 1 can be reduced in the magnetic recording / reproducing apparatus shown in FIG.

FIG. 3 is a top view of the magnetic recording medium 1 shown in FIG. FIG. 3 schematically shows a plurality of data areas provided on the surface of the magnetic recording medium 1.
The magnetic recording medium 1 in the present embodiment has a disk shape as described above, and a circular hole penetrating the front and back of the magnetic recording medium 1 is formed at the center thereof. In the following description, the edge of the circular hole in the magnetic recording medium 1 is referred to as an inner end 1a, and the outer peripheral edge in the magnetic recording medium 1 is referred to as an outer end 1b.

  On the surface of the magnetic recording medium 1 shown in FIG. 3, a read / write data storage area A1 for reading and writing data using the magnetic head 3 (see FIG. 1), and a magnetic head for reading and writing data using the magnetic head 3 And a positioning data storage area A2 for storing data used for positioning (referred to as positioning data). In this example, a plurality of positioning data storage areas A <b> 2 are provided radially on the surface of the magnetic recording medium 1. A plurality of tracks T are provided concentrically on the surface of the magnetic recording medium 1. Although not shown, a read / write data storage area A1 and a positioning data storage area A2 are similarly provided on the back surface of the magnetic recording medium 1 shown in FIG. However, the positioning data storage areas A2 provided on the front and back surfaces of the magnetic recording medium 1 may not be aligned on the front and back surfaces.

  In the positioning data storage area A2 of the magnetic recording medium 1, as positioning data, for example, an AGC (Auto Gain Control) pattern used for gain adjustment of a detection signal at the time of reading by the magnetic head 3, a detection used for detection of a servo signal Pattern, address pattern used for detecting cylinder information or sector information of servo track, and moving the magnetic head 3 to the target track T and then making the magnetic head 3 follow the track T Servo patterns including burst patterns (none of which are shown) are stored. The servo pattern is configured by appropriately reversing the magnetization direction in the thickness direction of the perpendicular recording layer 150 provided on the magnetic recording medium 1 in accordance with the positioning data.

  FIG. 4 is a flowchart showing an example of a method for manufacturing the magnetic recording medium 1 in the present embodiment. In the present embodiment, in the manufacturing process of the magnetic recording medium 1, the servo pattern is written in the positioning data storage area A2, and more specifically, a master information recording body 200 (FIG. 8) described later. The servo pattern is magnetically transferred to the magnetic recording medium 1 using the reference

  Prior to the manufacture of the magnetic recording medium 1, a substrate 100 is prepared which is previously formed in a disc shape and has a circular hole penetrating the front and back at the center, and after pre-cleaning, the substrate 100 is polished. (Step 101). The polishing of the substrate 100 in step 101 is desirably performed by, for example, mechanical polishing using diamond slurry.

  The polished substrate 100 has an average surface roughness (Ra) of 1 nm (10 cm) or less, preferably 0.5 nm or less, which is a high flying height of the magnetic head 3 (see FIG. 1). This is preferable because it is suitable for recording density recording. Further, the fine waviness (Wa) on the surface of the substrate 100 after polishing is 0.3 nm or less (more preferably 0.25 nm or less), which is suitable for high recording density recording with the magnetic head 3 flying low. This is preferable. In addition, a surface average roughness (Ra) of at least one of the chamfered portion of the chamfer portion on the end surface of the substrate 100 after polishing and the side surface portion should be 10 nm or less (more preferably 9.5 nm or less). Is preferable for the flight stability of the magnetic head 3. In addition, microwaviness (Wa) can be measured as surface average roughness in a measuring range of 80 μm, for example, using a surface roughness measuring device P-12 (manufactured by KLM-Tencor).

  Next, pre-cleaning is performed on the polished substrate 100 (step 102). It is preferable to perform the pre-cleaning of the substrate 100 in step 102 while immersing the polished substrate 100 in pure water or ultrapure water and applying ultrasonic vibration. The substrate 100 that has been pre-cleaned is preferably quickly dried by a spin method or the like.

  Subsequently, a film forming process in which the adhesion layer 110, the soft magnetic underlayer 120, the orientation control layer 130, the nonmagnetic underlayer 140, the perpendicular recording layer 150, and the protective layer 160 are sequentially stacked on the substrate 100 that has been pre-cleaned. (Step 103). Here, from the viewpoint of improving productivity, the formation of each layer in step 103 is preferably performed, for example, with an in-line film forming apparatus in which a plurality of chambers each having a film forming function are connected in series. Also, from the viewpoint of improving productivity, it is desirable to form each layer formed in the film formation step by a sputtering method. However, from the viewpoint of reducing the thickness of the protective layer 160 while ensuring the strength, it is preferable that the adhesive layer 110 to the perpendicular recording layer 150 are formed by sputtering, while the protective layer 160 is formed by CVD. . In this manner, by performing the film forming process on the substrate 100 that has been subjected to the pre-cleaning, the laminated substrate 180 (see FIG. 2) is obtained.

  Then, post-cleaning is performed on the laminated substrate 180 obtained by the film forming process (step 104). Post-cleaning of the laminated substrate 180 in Step 104 can be performed using hydrogen water. Here, the hydrogen water is water in which high-purity hydrogen gas is dissolved in pure water or ultrapure water, and the water capacity is reduced to increase the cleaning ability.

  The post-cleaning process of the present embodiment is performed for the purpose of removing contaminants on the surface of the laminated substrate 180 that cannot be removed by the wiping process (step 107) and the burnishing process (step 108) described later. These contaminants may be difficult to wash and remove with hydrogen water after the lubricant application step (step 105) described later, the wiping step, and the burnishing step. The reason for this is speculated that if the contaminants are covered with the lubricating layer 170, the water repellency makes it difficult to remove the contaminants, and the contaminants are applied to the surface of the laminated substrate 180 after the wiping process and the burnishing process. It may be difficult to remove. Note that although it is possible to remove powdery substances such as sputter dust to some extent also by a post-cleaning process using hydrogen water, the surface of the multilayer substrate 180 is scrubbed as in the wiping process and the burnishing process, Since the effect of wiping or shaving is low, it is difficult to remove the powdery substance that is firmly attached to the surface of the multilayer substrate 180. Therefore, the post-cleaning step using hydrogen water is preferably used in combination with the wiping step or the burnishing step.

  Next, a lubricant is applied to the laminated substrate 180 that has been post-cleaned (step 105), and the lubricating layer 170 is formed on the laminated substrate 180. Subsequently, the laminated substrate 180 coated with the lubricating layer 170 is baked by heating at about 100 ° C. for several minutes (step 106). Thereby, moisture contained in the lubricating layer 170 is volatilized, and adhesion between the protective layer 160 provided on the outermost surface side of the laminated substrate 180 and the lubricating layer 170 in contact with the protective layer 160 is increased. Thus, the magnetic recording medium 1 is obtained.

  Next, the surface of the baked magnetic recording medium 1 is wiped (step 107). The wiping process is performed in order to wipe off spatter dust and the like adhering to the surface of the magnetic recording medium 1. As described above, this is because the post-cleaning process in step 104 is performed by immersing in hydrogen water, and it is difficult to remove the powdery substance firmly attached to the surface of the magnetic recording medium 1 by itself. Because.

  The wiping step is performed using, for example, a cloth wiping tape, and the surface of the wiping tape is moved on the surface of the magnetic recording medium 1 by a rubber contact roll or pad while the wiping tape is moved relative to the surface of the magnetic recording medium 1. The surface of the magnetic recording medium 1 is lightly wiped by being pressed against the surface. By performing such processing, sputter dust and the like adhering to the surface of the magnetic recording medium 1 are removed. As a result, when the obtained magnetic recording medium 1 is incorporated in the magnetic recording / reproducing apparatus shown in FIG. 1, the flying height of the magnetic head 3 with respect to the magnetic recording medium 1 can be further reduced.

  Here, as the wiping tape used in the wiping step, a wiping tape obtained by slitting a cloth made of ultrafine fibers into a strip shape, a woven or knitted fabric of ultrafine fiber multifilament yarn, or the like is used.

  Moreover, the wiping method of the magnetic recording medium 1 using such a wiping tape is specifically the surface of the wiping tape (on the magnetic layer side of the magnetic recording medium 1 while rotating the magnetic recording medium 1). This is done by pressing the wiping surface. Thereby, the sputter dust etc. on the surface of the magnetic recording medium 1 are wiped off, and the surface is cleaned. Here, the wiping tape is stretched between the supply reel and the take-up reel, is sequentially supplied from the supply reel, and is taken up by the take-up reel. In the middle of running from the supply reel side to the take-up reel side, the wiping tape is pressed against the wiping surface (back surface) by a backing roll such as rubber or felt, and the wiping surface is magnetically recorded. It is pressed against the surface of the medium 1.

Then, the wiping is performed on the surface of the magnetic recording medium 1 (step 108).
The burnishing step is a step of polishing the surface using a polishing tape in order to remove protrusions formed or attached to the surface of the magnetic recording medium 1. By performing such processing, the flying height of the magnetic head 3 with respect to the magnetic recording medium 1 can be further reduced when the obtained magnetic recording medium 1 is incorporated in the magnetic recording / reproducing apparatus shown in FIG. Further, in the magnetic transfer process described later, a gap is generated between the magnetic recording medium 1 and the master information recording body 200, the transfer pattern becomes unclear, and the master information recording body 200 can be prevented from being damaged.

  The burnishing process is performed using a polishing tape or the like coated with alumina abrasive grains, and the surface of the magnetic recording medium 1 is lightened by pressing the polishing tape against the surface of the magnetic recording medium 1 with a rubber contact roll. This is done by polishing. By performing such processing, abnormal protrusions and the like on the surface of the magnetic recording medium 1 are removed.

  As a polishing tape (burnish tape) used in the burnishing process, a tape formed by forming an abrasive layer on a polyester base film is usually used. Then, when this abrasive layer slides in contact with the magnetic layer side surface of the magnetic recording medium 1, minute dust adhering to the surface of the magnetic recording medium 1 is removed and exists on the surface. Abnormal protrusions and the like are polished and removed, and the surface is smoothed. As an abrasive, chromium oxide, α-alumina, silicon carbide, nonmagnetic iron oxide, diamond, γ-alumina, α, γ-alumina, fused alumina, corundum, artificial, having an average particle size of about 0.05 μm to 50 μm Diamond or the like is used.

  Further, the burnishing of the magnetic recording medium 1 using such a polishing tape is specifically performed by rotating the magnetic recording medium 1 and grinding the polishing tape on the surface of the magnetic recording medium 1 on the magnetic layer side. This is done by pressing the grain surface. Thereby, the protrusions on the surface of the magnetic recording medium 1 are removed by polishing and smoothed. Here, the polishing tape is stretched between the supply reel and the take-up reel, is sequentially supplied from the supply reel, and is taken up by the take-up reel. In the course of running from the supply reel side to the take-up reel side, the polishing tape has its surface (back surface) opposite to the abrasive grain surface pressed by a backing roll such as rubber or felt, and the polishing surface of the polishing tape. Is pressed against the surface of the magnetic recording medium 1.

  Next, initial magnetization is performed on the burnished magnetic recording medium 1 (step 109). In this example, since the target is the magnetic recording medium 1 used in the perpendicular recording method, the initial magnetization step is performed by applying an initial DC magnetic field in one direction perpendicular to the surface of the magnetic recording medium 1. The initial DC magnetic field applied at that time can be generated by a permanent magnet or an electromagnet, and is preferably generated by using a NdFeB-based sintered magnet having a more stable and strong magnetic force. Further, it is preferable that the initial magnetization process is performed in a non-contact state between the magnetic recording medium 1 and the magnet in order to maintain the cleanliness of the surface of the magnetic recording medium 1.

  Here, the coercive force Hc of the perpendicular recording layer 150 (the first magnetic layer 151, the second magnetic layer 153, and the third magnetic layer 155) in the magnetic recording medium 1 of the present embodiment is typically 320 kA / m (about 4000 Oe). ) That's it. Therefore, in the initial magnetization process, it is preferable to use a magnet capable of direct current magnetization of each magnetic layer of the perpendicular recording layer 150.

Thereafter, a surface inspection is performed on the magnetic recording medium 1 on which the initial magnetization has been performed (step 110). In the surface inspection step, the presence or absence of dust adhesion or abnormal protrusion on the surface of the magnetic recording medium 1 after the initial magnetization is inspected.
Then, magnetic transfer is performed on the magnetic recording medium 1 whose surface inspection has been completed (step 111), and a positioning data storage area A2 (see FIG. 3) in which the servo pattern is stored in the magnetic recording medium 1 is provided.
The surface inspection process in step 110 and the magnetic transfer process in step 111 are performed as a series of operations, and details thereof will be described later.

  Subsequently, a glide inspection is performed on the magnetic recording medium 1 on which the magnetic transfer has been performed (step 112). In the glide inspection process, the head is actually lifted and inspected for any protrusions on the surface of the magnetic recording medium 1 that has been magnetically transferred. When writing (recording) and reading (reproducing) data on the magnetic recording medium 1 using the magnetic head 3, the flying height (the distance between the magnetic recording medium 1 and the magnetic head 3) or more is increased on the surface of the magnetic recording medium 1. If there is a protrusion having a height, the magnetic head 3 may collide with the protrusion and damage the magnetic head 3 or cause a defect in the magnetic recording medium 1. For this reason, in the glide inspection, the presence or absence of such a high protrusion is inspected.

Next, a certification test is performed on the magnetic recording medium 1 that has passed the glide test (step 113). In the certification inspection step, as in a normal magnetic recording / reproducing apparatus, after a predetermined signal is recorded on the magnetic recording medium 1 by the magnetic head 3, the recorded signal is reproduced, and the obtained reproduced signal is used for magnetic recording. The recording failure of the recording medium 1 is detected, and the quality of the magnetic recording medium 1 such as the electrical characteristics of the magnetic recording medium 1 and the presence or absence of defects is confirmed. Since the servo pattern has already been written on the magnetic recording medium 1 manufactured by the above-described method, it is difficult to perform a certifying test by a conventional method that does not use servo information. For this reason, in the present embodiment, the magnetic head 3 is positioned at a specific location using a servo pattern (positioning data) magnetically transferred to the magnetic recording medium 1, and a test for reading and writing data is performed.
Then, the magnetic recording medium 1 that has passed the certification inspection is shipped as a product.

Now, the surface inspection process in step 110 and the magnetic transfer process in step 111 will be described in more detail.
FIG. 5 is a top view of the surface inspection / magnetic transfer apparatus 10 for performing surface inspection and magnetic transfer. FIG. 6 is a perspective view of the surface inspection / magnetic transfer apparatus 10 as seen from the direction of the arrow VI shown in FIG. In the following description, in FIG. 5, the direction from the left side to the right side in the figure is the X direction, the direction from the lower side to the upper side in the figure is the Y direction, and the direction from the back side to the near side in the figure is the Z direction. I do.

  The surface inspection / magnetic transfer apparatus 10 includes a rectangular base 11 whose long side is in the X direction with respect to the Y direction, and a pre-transfer medium that accommodates the magnetic recording medium 1 subjected to the initial magnetization shown in Step 109. The servo pattern is magnetically applied to the storage unit 12, the surface inspection unit 13 that performs surface inspection shown in Step 110 on the magnetic recording medium 1 taken out from the pre-transfer medium storage unit 12, and the magnetic recording medium 1 subjected to surface inspection. Magnetic transfer unit 14 for transfer, transferred medium storage unit 15 for storing the magnetic recording medium 1 on which servo pattern magnetic transfer has been performed, and magnetic recording medium for which the result of surface inspection by the surface inspection unit 13 has failed 1 and a defective product storage section 16 for storing 1. Further, the surface inspection / magnetic transfer apparatus 10 supplies the magnetic recording medium 1 subjected to the surface inspection to the magnetic transfer unit 14 and magnetically collects the magnetic recording medium 1 subjected to the magnetic transfer from the magnetic transfer unit 14. Between the transfer unit 17 for transferring the recording medium 1, the pre-transfer medium storage unit 12, the surface inspection unit 13, the transferred medium storage unit 15, the defective product storage unit 16, and the transfer unit 17. It further includes a SCARA (Selective Compliance Assembly Robot Arm) robot 18 for giving and receiving. The surface inspection / magnetic transfer apparatus 10 includes a position detection unit 19 used for positioning the magnetic recording medium 1 held by the transfer unit 17 with respect to the magnetic transfer unit 14 and a magnetic recording in which positioning with respect to the magnetic transfer unit 14 is performed. It further includes a vibration detection unit 20 used for vibration detection of the medium 1.

  In the surface inspection / magnetic transfer apparatus 10, a pre-transfer medium storage unit 12, a surface inspection unit 13, a magnetic transfer unit 14, a transferred medium storage unit 15, a defective product storage unit 16, a transfer unit 17, a SCARA robot 18, a position The detection unit 19 and the vibration detection unit 20 are disposed on the upper side of the base 11. On the other hand, the drive systems for the surface inspection unit 13, the magnetic transfer unit 14, the transfer unit 17, the SCARA robot 18, the position detection unit 19, and the vibration detection unit 20 are arranged on the lower side of the base 11. . Further, the surface inspection / magnetic transfer apparatus 10 according to the present embodiment is disposed in a clean room that employs a downflow method. The surface inspection / magnetic transfer apparatus 10 includes a surface inspection / magnetic transfer apparatus 10 from above to below (-Z direction in FIG. 5). ) Air is flowing. The detailed configuration of the clean room will be described later.

  In the following description, the magnetic recording medium 1 before the execution of the magnetic transfer process supplied to the magnetic transfer unit 14 or the defective product storage unit 16 from the pre-transfer medium storage unit 12 via the surface inspection unit 13 is described as “ This is referred to as “media before transfer”. In the following description, the magnetic recording medium 1 that has been supplied from the magnetic transfer unit 14 to the transferred medium storage unit 15 and has been subjected to the magnetic transfer process is referred to as a “transferred medium”.

  The pre-transfer medium storage unit 12 has a storage container 12a that can store a plurality of pre-transfer media in a standing state. The transferred medium storage unit 15 has a storage container 15a that can store a plurality of pre-transferred media in a standing state. The defective product storage unit 16 includes a storage container 16a that can store a plurality of pre-transfer media (defective products) in a standing state. Here, as the storage containers 12a, 15a, and 16a, those having a common structure are used. When the pre-transfer medium is empty in the pre-transfer medium container 12, the transferred medium container 15 is full of the transferred medium, and the defective product container 16 is pre-transfer. When the medium (defective product) is full, each is replaced with a new one.

  The surface inspection unit 13 performs surface inspection on both surfaces of the pre-transfer medium carried from the pre-transfer medium storage unit 12 by the SCARA robot 18. As a surface inspection method in the surface inspection unit 13, for example, a method of scanning both surfaces of a pre-transfer medium using a laser light source (not shown) and detecting the presence or absence of abnormalities (protrusions or the like) on the surface based on the reflected light. It is done.

  The transfer unit 17 is mounted on the base 11 and extends in the X direction. The transfer unit 17 is mounted on the linear guide unit 17a. The transfer unit 17 is mounted on the upper part of the linear guide unit 17a. And a linear motion portion 17b that moves to the center. The linear motion portion 17b includes an arm portion 17c extending in the −X direction, and a supply chuck portion for holding a pre-transfer medium supplied to the magnetic transfer portion 14 extending in the −Y direction from the free end side of the arm portion 17c. 17 d and a recovery chuck portion 17 e that extends in the −Y direction from the arm portion 17 c on the side closer to the linear motion portion 17 b than the supply chuck portion 17 d and holds the post-transfer medium recovered from the magnetic transfer portion 14.

  The SCARA robot 18 includes a base portion 18a mounted on the base 11 and an arm portion 18b attached to the upper portion of the base portion 18a and allowed to move in the horizontal direction (X direction and Y direction). The free end of the arm portion 18b is provided with a slide shaft (not shown) that moves in the vertical direction (Z direction and -Z direction). The slide shaft has a magnetic recording medium 1 (before transfer). A chuck portion (not shown) for holding both the medium and the transferred medium is attached.

  The position detection unit 19 includes, for example, a light source including a laser and a light receiving unit including a CCD (Charge Coupled Device) image sensor. The position detection unit 19 detects the position of the pre-transfer medium held by the supply chuck unit 17 d of the transfer unit 17 in the vicinity of the magnetic transfer unit 14. In the present embodiment, the transfer unit 17 and the position detection unit 19 constitute a positioning unit.

  The vibration detection unit 20 includes, for example, a light source including a laser and a light receiving unit including a CCD image sensor. The vibration detection unit 20 detects the vibration of the pre-transfer medium held by the supply chuck unit 17 d of the transfer unit 17 in the vicinity of the magnetic transfer unit 14.

Next, the magnetic transfer unit 14 will be described.
The magnetic transfer unit 14 is mounted in a fixed state on the base 11, and a fixed holder 30 that holds the master information recording body 200 on which the servo pattern is recorded in a fixed state, and faces the fixed holder 30. The movable holder 40 is disposed so as to be movable in the Y direction and the −Y direction with respect to the base 11 and holds the master information recording body 200 in which the servo pattern is magnetically recorded in advance in a fixed state. With. Note that the master information recording body 200 attached to the fixed holder 30 and the master information recording body 200 attached to the movable holder 40 are arranged in a state of facing each other. In this embodiment, the master information recording body 200 attached to the fixed holder 30 and the master information recording body 200 attached to the movable holder 40 function as a pair of pattern forming bodies.

  A first magnet member 50 including a first magnet 51 is disposed on the back side of the fixed holder 30 that holds the master information recording body 200. The first magnet member 50 includes a first magnet 51 disposed to face the fixed holder 30, a first magnet holding part 52 that holds the first magnet 51, and the back side of the first magnet holding part 52 along the Y direction. And a first magnet support portion 53 extending. The first magnet support portion 53 is supported in a state of being fixed in the Y direction with respect to the base 11, and is supported rotatably in the direction of the arrow in the figure. Thereby, the 1st magnet 51 hold | maintained at the 1st magnet holding | maintenance part 52 rotates with the rotation of the 1st magnet support part 53. As shown in FIG.

  On the other hand, a second magnet member 60 including a second magnet 61 is disposed on the back side of the movable holder 40 holding the master information recording body 200. The second magnet member 60 includes a second magnet 61 disposed to face the movable holder 40, a second magnet holding part 62 that holds the second magnet 61, and the Y direction from the back side of the second magnet holding part 62. And a second magnet support portion 63 that extends. The second magnet support portion 63 is supported so as to be able to advance and retreat in the Y direction and the −Y direction with respect to the base 11, and is supported so as to be rotatable in the arrow direction in the drawing. As a result, the second magnet 61 held by the second magnet holding part 62 advances and retreats as the second magnet support part 63 advances and retreats, and the second magnet holding part 62 changes as the second magnet support part 63 rotates. The second magnet 61 held by the motor rotates.

FIG. 7 is a diagram illustrating an example of the configuration of the first magnet member 50 and the second magnet member 60 in the magnetic transfer unit 14 and the mutual positional relationship between them.
In the first magnet member 50, the first magnet 51 is attached to the first magnet holding portion 52 in a radial direction at a position deviated from the rotation center of the first magnet support portion 53. Further, the first magnet 51 is held by the first magnet holding portion 52 so that the side facing the fixed holder 30 is a magnetic pole of one polarity (for example, N pole).
On the other hand, in the second magnet member 60, the second magnet 61 is attached to the second magnet holding portion 62 in a radial direction at a position deviated from the rotation center of the second magnet support portion 63. The second magnet 61 is held by the second magnet holding unit 62 so that the side facing the movable holder 40 is a magnetic pole of the other polarity (for example, S pole).

  And in this Embodiment, the 1st magnet 51 and the 2nd magnet 61 are arrange | positioned so that the fixed holder 30 and the movable holder 40 may be pinched | interposed. Moreover, the 1st magnet member 50 and the 2nd magnet member 60 are comprised so that it may rotate together, maintaining the state which made the 1st magnet 51 and the 2nd magnet 61 oppose. In the present embodiment, the fixed holder 30 and the movable holder 40 function as a pair of sandwiching members, and the first magnet member 50 and the second magnet member 60 function as a pair of magnet members, respectively.

  FIG. 8 is a diagram illustrating an example of the configuration of the master information recording body 200 used in the magnetic transfer unit 14. Here, FIG. 8A shows a top view of the master information recording body 200, and FIG. 8B shows a sectional view taken along line VIIIB-VIIIB in FIG. 8A.

  The master information recording body 200 as an example of the pattern forming body has a disk shape whose diameter is larger than that of the magnetic recording medium 1. Further, a servo pattern formation region SP in which fine irregularities corresponding to the servo pattern are formed is provided on one surface (corresponding to the pattern formation surface) of the master information recording body 200. In this example, a plurality of servo pattern formation regions SP are provided radially on one surface of the master information recording body 200 except for the central portion and the outer edge portion. When the master information recording body 200 is attached to the fixed holder 30 or the movable holder 40 shown in FIG. 5 and the like, the surfaces provided with the servo pattern formation areas SP face each other in an exposed state.

  In addition, a first through hole 200a and a second through hole 200b penetrating the front and back are provided in the central portion of the master information recording body 200 attached to the fixed holder 30. The first through hole 200a and the second through hole 200b are provided on the inner side (center side) of the servo pattern formation region SP in the master information recording body 200. Note that the first through hole 200 a and the second through hole 200 b are not necessary for the master information recording body 200 attached to the movable holder 40. The reason for this will be described later.

  Next, the structure of the master information recording body 200 will be described. The master information recording body 200 includes a disk-shaped base 201, a master magnetic layer 202 formed on one surface of the base 201, and a master magnetic layer 202. And a master protective layer 203 formed thereon. Here, FIG. 8B shows a cross-sectional configuration of the master information recording body 200 in the servo pattern formation region SP, and a convex portion 204 and a concave portion 205 corresponding to the servo pattern exist in this portion. ing. Of the one surface of the master information recording body 200, an area other than the servo pattern formation area SP is a recess in the servo pattern formation area SP in order to prevent the master information recording body 200 and the magnetic recording medium 1 from being attracted. It is the same height as 205.

  The master information recording body 200 can be manufactured by a known method. For example, the following manufacturing method can be listed. First, an electron beam resist is applied to the surface of a silicon wafer by a spin coat method. After coating, the resist is exposed by irradiating the resist with an electron beam modulated in accordance with the servo pattern using an electron beam exposure apparatus. Thereafter, the resist is developed, unexposed portions are removed, and a resist pattern is formed on the silicon wafer.

  Next, using this resist pattern as a mask, a reactive etching process is performed on the silicon wafer to dig up portions not masked with the resist. After this etching process, the resist remaining on the silicon wafer is removed by washing with a solvent. Thereafter, the silicon wafer is dried to obtain a master for producing the master information recording body 200.

  On this master, a conductive layer made of Ni is formed to a thickness of about 10 nm by sputtering. Thereafter, a Ni layer having a thickness of several μm is formed on the master by electroforming using the master on which the conductive layer is formed as a mother die. Thereafter, the Ni layer is removed from the master, and this Ni layer is washed to obtain the base body 201 having the convex portions on the surface.

Next, a master magnetic layer 202 is formed on the surface of the substrate 201. As the master magnetic layer 202, the same magnetic layer (first magnetic layer 151 and the like) used in the magnetic recording medium 1 can be used. A master protective layer 203 is formed on the master magnetic layer 202 in the same manner as the magnetic recording medium 1. The master protective layer 203 increases the abrasion resistance of the master information recording body 200, that is, the transfer durability of the master information recording body 200, and a hard carbon film having a thickness of about several nm can be used. The master information recording body 200 can be obtained by the above manufacturing process.
The master information recording body 200 thus obtained is repeatedly used for manufacturing (magnetic transfer) of, for example, 100,000 or more magnetic recording media 1.

FIG. 9 is a diagram illustrating an example of a cross-sectional configuration of the fixed holder 30 and the movable holder 40 in the magnetic transfer unit 14. FIG. 9 illustrates a state where the magnetic recording medium 1 is attached to the fixed holder 30.
Among these, the fixed holder 30 penetrates the holding surface of the master information recording body 200 and the facing surface of the first magnet member 50, and the attachment position center of the master information recording body 200 is held on the holding surface of the master information recording body 200. Master information is passed through the two first suction paths 31 provided with openings in the part, the holding surface of the master information recording body 200 and the facing surface of the first magnet member 50, and the holding surface of the master information recording body 200. And two second suction paths 32 having openings provided outside the attachment position of the recording body 200. Further, the fixed holder 30 includes an O-ring 33 attached along the circumferential direction on the holding surface of the master information recording body 200 outside the opening of the second suction path 32. In addition, when the master information recording body 200 is attached to the fixed holder 30 in the two openings of the first suction path 31 on the holding surface of the master information recording body 200 of the fixed holder 30, The first through hole 200a and the second through hole 200b are overlapped.

  On the other hand, the movable holder 40 holds the master information recording body 200 on the surface facing the fixed holder 30, and the recording body holding portion 40a provided with the second magnet member 60 on the back side thereof, And a cylindrical body 40b provided so as to cover the periphery of the recording body holding portion 40a. In addition, the movable holder 40 includes an O-ring 41 that is attached along the circumferential direction to the inner circumferential surface of the cylindrical body 40b and that contacts the outer circumferential surface of the recording body holding portion 40a over the circumferential direction. Here, the recording body holding portion 40a and the cylindrical body 40b constituting the movable holder 40 are attached to the fixed holder 30 so as to be able to advance and retract independently of each other. Further, the end of the cylindrical body 40b on the side facing the fixed holder 30 faces and contacts the O-ring 33 provided on the fixed holder 30 over one circumference. Note that the recording member holding portion 40 a of the movable holder 40 is not provided with a suction path like the fixed holder 30. For this reason, it is not necessary to provide the first through hole 200a and the second through hole 200b in the master information recording body 200 attached to the recording body holding portion 40a.

FIG. 10 is a diagram showing an example of a control block in the surface inspection / magnetic transfer apparatus 10 shown in FIG.
The surface inspection / magnetic transfer apparatus 10 includes a controller 70 for controlling the operation of the entire apparatus. The controller 70 is input with the surface inspection result of the medium before transfer by the surface inspection unit 13, the position detection result of the medium before transfer by the position detection unit 19, and the vibration detection result of the medium before transfer by the vibration detection unit 20. It has become. The controller 70 also includes a surface inspection unit 13, a position detection unit 19, a vibration detection unit 20, a robot drive unit 71 that drives the SCARA robot 18, and a linear motion that drives the linear motion unit 17 b provided in the transfer unit 17. A drive unit 72, a supply chuck drive unit 73 that drives a supply chuck unit 17d provided in the transfer unit 17, a recovery chuck drive unit 74 that drives a recovery chuck unit 17e provided in the transfer unit 17, and the magnetic transfer unit 14. A suction mechanism connected to the first suction path 31 and the second suction path 32 of the fixed holder 30 and the movable holder driving section 75 for driving the movable holder 40 (recording body holding section 40a, cylindrical body 40b). Control signals are respectively transmitted to a suction drive unit 76 for driving the first magnet member 50, a first magnet drive unit 77 for driving the first magnet member 50, and a second magnet drive unit 78 for driving the second magnet member 60. It is adapted to output.

  FIG. 11 is a side sectional view showing an example of the structure of the clean room 300 that houses the surface inspection / magnetic transfer apparatus 10. 12 is a cross-sectional view taken along line XII-XII in FIG. FIG. 11 corresponds to the XI-XI cross section of FIG. In the present embodiment, the surface inspection / magnetic transfer apparatus 10 is arranged in a so-called full down flow type clean room 300.

  The clean room 300 includes a storage chamber 301 for storing the surface inspection / magnetic transfer device 10 therein, a ceiling back chamber 302 provided on the ceiling side of the storage chamber 301, that is, above (in the Z direction), and a lower side of the storage chamber 301 ( The underfloor chamber 303 provided on the −Z direction side) and a connection chamber 304 that spatially connects the ceiling back chamber 302 and the underfloor chamber 303 on the side (X direction side) of the storage chamber 301. Here, the storage chamber 301 and the underfloor chamber 303 are formed in a mesh shape or a lattice shape, and are spatially connected via a floor on which the surface inspection / magnetic transfer apparatus 10 is loaded. The underfloor room 303 and the connection room 304 are directly connected, and the connection room 304 and the ceiling back room 302 are connected via a dry coil 305 having an air blowing function and a drying function.

  A plurality of (18 in this example) fan filter units (hereinafter referred to as FFU) 310 are arranged in a matrix on the lower side of the ceiling back room 302, that is, on the ceiling side of the storage room 301. It is arranged. In the following description, the 18 FFUs 310 are referred to as a first FFU 301a to an 18th FFU 301r, respectively. FIG. 11 shows the first FFU 310a to the sixth FFU 310f arranged side by side in the X direction in the upper part (Z direction) of the surface inspection / magnetic transfer apparatus 10 among these.

  Each of the first FFU 310a to the 18th FFU 310r includes an air filter 311 disposed on the ceiling side and a fan 312 disposed on the top of the air filter 311. Each air filter 311 can be configured by, for example, a HEPA filter (High Efficiency Particulate Air Filter), a ULPA filter (Ultra Low Penetration Air Filter), or the like. The cleanliness of the clean room 300 that houses the surface inspection / magnetic transfer apparatus 10 is preferably about class 1 or class 2 defined in JIS B 9920, for example.

  In the present embodiment, the magnetic transfer unit 14 (more specifically, the fixed holder 30 and the movable holder 40) is disposed below the second FFU 310b among the first FFU 310a to the 18th FFU 310r. In the present embodiment, in the accommodation room 301 of the clean room 300, the attachment site of the second FFU 310b is the first region, and the first FFU 310a, the seventh FFU 310g, the eighth FFU 310h, the ninth FFU 310i, the third FFU 310c, which are arranged around the second FFU 310b. The 15th FFU 310o, the 14th FFU 310n, and the 13th FFU 310m are attached to the second region. In the present embodiment, the second FFU 310b functions as a first supply unit, and the first FFU 310a, the seventh FFU 310g, the eighth FFU 310h, the ninth FFU 310i, the third FFU 310c, the 15th FFU 310o, the 14th FFU 310n, and the 13th FFU 310m arranged around the second FFU 310b. However, it functions as a second supply unit.

  Now, the surface inspection process and the magnetic transfer process performed by the surface inspection / magnetic transfer apparatus 10 will be described with reference to FIGS. The operations described below are controlled by the controller 70. In the initial state, each part constituting the surface inspection / magnetic transfer apparatus 10 is arranged at the position shown in FIG. Further, prior to the magnetic transfer step, the first FFU 310a to the 18th FFU 310r start supplying the downward airflow from the upper side to the lower side (in the −Z direction) (corresponding to the step of supplying the downward airflow) in the storage room 301 of the clean room 300. It is assumed that the descending airflow is continuously supplied during the magnetic transfer process. Furthermore, in the following description, the linear motion portion 17b shown in FIG. 5 (including the arm portion 17c provided on the linear motion portion 17b, and the supply chuck portion 17d and the recovery chuck portion 17e provided on the arm portion 17c). This position is called a standby position.

  As the operation starts, the arm portion 18 b of the SCARA robot 18 chucks and removes the pre-transfer medium stored in the pre-transfer medium storage unit 12, and points the chucked pre-transfer medium toward the surface inspection unit 13. Transport. Subsequently, when the chuck mechanism (not shown) provided in the surface inspection unit 13 holds the transferred pre-transfer medium, the arm unit 18b releases the chuck of the pre-transfer medium and retracts from the surface inspection unit 13. .

  Next, the surface inspection unit 13 performs surface inspection on both sides of the held pre-transfer medium. When the inspection by the surface inspection unit 13 is completed, the arm 18b of the SCARA robot 18 moves to the surface inspection unit 13 side, and after the arm unit 18b chucks the pre-transfer medium held by the surface inspection unit 13, the surface inspection is performed. The part 13 releases the chuck of the pre-transfer medium.

Here, as for the result of the surface inspection, when the controller 70 determines that at least one of the surfaces is unacceptable, the arm unit 18b transfers the chucked pre-transfer medium toward the defective product storage unit 16. After the chuck is released and stored in the defective product storage unit 16, the chuck is retracted from the defective product storage unit 16.
On the other hand, if the controller 70 determines that both surfaces are acceptable as a result of the surface inspection, the arm portion 18b faces the supply chuck portion 17d of the linear motion portion 17b in which the chucked pre-transfer medium is placed at the standby position. Transport toward the position where Then, after the supply chuck portion 17d chucks the pre-transfer medium held by the arm portion 18b, the arm portion 18b releases the chuck of the pre-transfer medium and retracts from a position facing the supply chuck portion 17d.

  Subsequently, the linear motion portion 17b at the standby position starts moving along the −X direction. The linear motion portion 17b moves so that the pre-transfer medium held by the supply chuck portion 17d is sandwiched between the fixed holder 30 and the movable holder 40 in the magnetic transfer portion 14. This period corresponds to the “loading step”.

  During this time, the position detection unit 19 detects whether or not the pre-transfer medium held by the supply chuck unit 17d has reached a position facing the two master information recording bodies 200 provided in the magnetic transfer unit 14. ing. Based on the detection result of this position, when the controller 70 reaches the position where the pre-transfer medium held by the supply chuck unit 17d faces the two master information recording bodies 200 provided in the magnetic transfer unit 14, The drive of the linear motion part 17b is stopped. In the following description, the position of the linear motion portion 17b when the pre-transfer medium held by the supply chuck portion 17d faces the two master information recording bodies 200 is referred to as a supply position.

  The required accuracy for positioning the center of the pre-transfer medium with respect to the center of the master information recording body 200 is sufficient if it is within a range of ± 7.5 μm, more preferably ± 5.0 μm. This is because even if the servo pattern magnetically transferred to the pre-transfer medium is decentered with respect to the center of the pre-transfer medium, the magnetic head 3 follows the track T using the servo pattern after the magnetic transfer. This is because data can be read from and written to the magnetic recording medium 1.

  The vibration detection unit 20 detects the magnitude of vibration of the pre-transfer medium attached to the supply chuck unit 17d of the linear motion unit 17b stopped at the supply position with positioning. Then, the controller 70 determines that the magnitude of the vibration detected by the vibration detection unit 20 is ± 1.0 μm or less in a direction parallel to the data surface of the magnetic recording medium 1, that is, in a plane including the X axis and the Z axis. After that, by starting suction through the first suction path 31, the pre-transfer medium is chucked on the fixed holder 30 side, and one surface of the pre-transfer medium is attached to the master information recording body 200 attached to the fixed holder 30. Make contact. Then, after the pre-transfer medium is chucked on the fixed holder 30 side, the supply chuck portion 17d releases the chuck of the pre-transfer medium. Then, the linear motion portion 17b that has released the holding of the pre-transfer medium moves in the X direction and then stops at the standby position.

  Subsequently, in the magnetic transfer unit 14, the movable holder 40 (the recording body holding unit 40 a and the cylindrical body 40 b) and the second magnet member 60 start moving in a direction approaching the fixed holder 30 side. Along with this, first, the peripheral end surface of the cylindrical body 40 b stops after abutting against the O-ring 33 provided in the fixed holder 30. Further, the recording body holding part 40a and the second magnet member 60 continue to move toward the fixed holder 30 side even after the cylindrical body 40b stops, and the master information recording body 200 provided in the fixed holder 30 The recording medium holding unit 40a of the movable holder 40 is stopped after the pre-transfer medium is sandwiched between the master information recording body 200 and the master information recording body 200. The stop position of the recording body holding unit 40a is determined in advance, and as a result, a preset light load is applied to the two master information recording bodies 200 and one pre-transfer medium. At this time, an O-ring 33 provided on the fixed holder 30 and an O-ring 41 provided on the cylindrical body 40b are used between the fixed holder 30, the recording body holding portion 40a, and the cylindrical body 40b. Thus, a closed space is formed. Subsequently, by starting the suction through the second suction path 32, the gap existing between the two master information recording bodies 200 existing in the closed space and the one pre-transfer medium is evacuated. Due to the differential pressure inside and outside the closed space, the formation surface of each servo pattern formation region SP of the two master information recording bodies 200 and the both surfaces of one pre-transfer medium are brought into close contact with each other. This period corresponds to the “pressing step” and the “pinching step”, respectively.

Next, the first magnet member 50 and the second magnet member 60 have the first magnet support portion 53 and the second magnet support portion 63 as axes, and the two master information recording bodies 200 and one pre-transfer medium. At least one rotation is performed while maintaining the state where the first magnet 51 and the second magnet 61 are opposed to each other.
While the first magnet 51 and the second magnet 61 make one rotation, in the pre-transfer medium sandwiched between the two master information recording bodies 200, the first magnet 51 and the second magnet 61 reverse the initial magnetization process. Are sequentially applied in the circumferential direction. Then, on the side of the pre-transfer medium that is in contact with the master information recording body 200 on the fixed holder 30 side, the magnetization direction of the magnetic layer in the portion facing the recess 205 of the master information recording body 200 is the state after the initial magnetization process. However, the magnetization direction of the magnetic layer at the portion in contact with the convex portion 204 is reversed. Further, on the side of the pre-transfer medium that is in contact with the master information recording body 200 on the movable holder 40 side, the magnetization direction of the magnetic layer at the portion facing the concave portion 205 of the master information recording body 200 is the same as that after the initial magnetization step. Although the state is maintained, the magnetization direction of the magnetic layer at the portion in contact with the convex portion 204 is reversed. In this way, the servo patterns made up of the concave / convex arrangement provided on the master information recording body 200 are transferred onto both surfaces of the pre-transfer medium as servo patterns made up of the magnetization orientation arrays. As a result, the pre-transfer medium is a transferred medium having the servo pattern stored in the positioning data storage area A2. This period corresponds to the “magnetic transfer process”.

  When the magnetic transfer is completed in this way, first, the suction through the second suction path 32 is stopped to make the inside of the closed space atmospheric pressure, and then the movable holder 40 (recording body holding portion 40a, cylindrical body 40b). Then, the second magnet member 60 starts to retract to the original position. As a result, the transferred medium held by the fixed holder 30 is exposed to the outside. This period corresponds to the “step of releasing the pinching”.

  By the way, as described above, the linear motion portion 17b transfers the pre-transfer medium held by the supply chuck portion 17d to the fixed holder 30 side at the supply position, and then returns to the standby position and stops. In the surface inspection / magnetic transfer apparatus 10, the next pre-transfer medium is prepared in parallel with the magnetic transfer performed by the magnetic transfer unit 14 on the previous pre-transfer medium. That is, in parallel with the magnetic transfer to the previous pre-transfer medium, the next pre-transfer medium is taken out from the pre-transfer medium container 12 using the SCARA robot 18, and the next pre-transfer medium is read by the surface inspection unit 13. The inspection and the next pre-transfer medium chuck are performed by the supply chuck portion 17d of the linear motion portion 17b at the standby position. The chuck of the next pre-transfer medium by the supply chuck unit 17d is completed until the magnetic transfer to the previous pre-transfer medium is completed (until the pre-transfer medium becomes a transferred medium). From the viewpoint of sex.

  Then, in the state where the magnetic transfer to the previous pre-transfer medium is completed in the magnetic transfer unit 14 and the chucking of the next pre-transfer medium to the supply chuck unit 17d is completed, the linear motion unit 17b in the standby position is , Start moving along the -X direction. The linear movement portion 17b moves so that the recovery chuck portion 17e holding nothing is sandwiched between the fixed holder 30 and the movable holder 40 in the magnetic transfer portion 14. Thereafter, the linear motion portion 17 b stops when the recovery chuck portion 17 e reaches a position facing the transferred medium vacuum-chucked by the fixed holder 30. At this time, the controller 70 may control the stop position of the linear motion unit 17 b based on the position detection result by the position detection unit 19. In the following description, the position of the linear motion portion 17b when the recovery chuck portion 17e faces the transferred medium held by the fixed holder 30 is referred to as a recovery position.

Next, the recovery chuck unit 17e chucks the transferred medium, and then releases the vacuum chuck of the transferred medium by the fixed holder 30.
Subsequently, the linear motion portion 17b placed in the recovery position starts moving in the X direction while holding the transferred medium in the recovery chuck portion 17e and holding the next pre-transfer medium in the supply chuck portion 17d. . The linear motion portion 17b moves again toward the supply position so that the pre-transfer medium held by the supply chuck portion 17d is sandwiched between the fixed holder 30 and the movable holder 40 in the magnetic transfer portion 14. I will do it.

  During this time, the position detection unit 19 determines whether or not the next pre-transfer medium held by the supply chuck unit 17d has reached a position facing the two master information recording bodies 200 provided in the magnetic transfer unit 14. Detected. Based on the detection result of this position, the controller 70 has reached a position where the next pre-transfer medium held by the supply chuck portion 17d faces the two master information recording bodies 200 provided in the magnetic transfer portion 14. At the time, that is, when the supply position is reached, the driving of the linear motion portion 17b is stopped.

  The vibration detection unit 20 detects the magnitude of vibration of the next pre-transfer medium attached to the supply chuck unit 17d of the linear motion unit 17b that has stopped at the supply position as a result of positioning. The controller 70 then passes through the first suction path 31 after the magnitude of vibration detected by the vibration detection unit 20 becomes ± 1.0 μm or less in the direction parallel to the data surface of the magnetic recording medium 1. By starting the suction, the next pre-transfer medium is vacuum chucked on the fixed holder 30 side, and one surface of the next pre-transfer medium is brought into contact with the master information recording body 200 attached to the fixed holder 30. After the next pre-transfer medium is vacuum chucked on the fixed holder 30 side, the supply chuck portion 17d releases the chuck of the next pre-transfer medium. Thereafter, magnetic transfer of the servo pattern is performed on the next pre-transfer medium through the above-described procedure. On the other hand, the linear motion portion 17b that holds the transferred medium while releasing the holding of the next pre-transfer medium moves in the X direction and then stops at the standby position. This period corresponds to the “unloading process”.

  Next, the arm portion 18b of the SCARA robot 18 moves to a position facing the transferred medium held by the recovery chuck portion 17e of the linear motion portion 17b stopped at the standby position. Subsequently, after the arm portion 18b chucks the transferred medium held by the recovery chuck portion 17e, the recovery chuck portion 17e releases the chuck of the transferred medium. Then, the arm unit 18b transfers the chucked transferred medium toward the transferred medium storage unit 15, releases the chuck and stores it in the transferred medium storage unit 15, and then retracts from the transferred medium storage unit 15. Then, the next pre-transfer medium is taken out.

  Thereafter, by repeating the above-described procedure, the pre-transfer medium is removed, the surface inspection is performed on the pre-transfer medium, the servo pattern is magnetically transferred to the pre-transfer medium, and the transferred medium onto which the servo pattern has been transferred is sequentially collected. To go.

  In the surface inspection process and the magnetic inspection process described above, in the clean room 300, the air in the ceiling back room 302 is cleaned by the plurality of FFUs 310 and supplied to the storage room 301. More specifically, in each FFU 310, a fan 312 provided in each FFU 310 supplies air in the ceiling back chamber 302 to the corresponding air filter 311. Each air filter 311 receives dust or the like from the supplied air. This foreign matter is removed and discharged to the storage chamber 301 side. At this time, an airflow (downward airflow) is generated in the storage chamber 301 from the upper side to the lower side, that is, in the −Z direction. Also, the air supplied to the storage chamber 301 reaches the underfloor chamber 303 through an opening provided on the floor of the storage chamber 301, and then, from the underfloor chamber 303 through the connection chamber 304, the connection chamber 304 and the ceiling back The boundary with the chamber 302 is reached. At this time, the dry coil 305 provided at the boundary between the connection chamber 304 and the ceiling back chamber 302 performs an operation of drawing the air in the connection chamber 304 and sending it out to the ceiling back chamber 302 and also passing the air passing therethrough. Perform the drying operation. Then, the air supplied to the ceiling back room 302 via the dry coil 305 is supplied again toward the storage room 301 by each FFU 310.

  Here, in the present embodiment, among the plurality of FFUs 310 provided in the clean room 300, the wind speed (first flow) of the airflow supplied to the storage chamber 301 by the FFU 310 (in this example, the second FFU 310b) located immediately above the magnetic transfer unit 14 is provided. The FFU 310 (in this example, the first FFU 310a, the third FFU 310c to the 18th FFU 310r) located in a region other than this, that is, other than directly above the magnetic transfer unit 14, is set to 0.6 m / sec. The wind speed of the airflow supplied to 301 (corresponding to the second wind speed) is set to 0.1 to 0.4 m / sec. In this example, when the wind speed of the airflow from the second FFU 310b is F1, and the wind speed of the airflow from the other first FFU 310a and the third FFU 310c to the 18th FFU 310r is F2, it is preferable that at least F1> F2, and F1 is F2. It is more preferably 2 times or more, and most preferably 4 times or more.

  In the present embodiment, the magnetic transfer unit 14 performs magnetic transfer by sandwiching one magnetic recording medium 1 between two master information recording bodies 200. However, if foreign matter such as dust is sandwiched together at that time, servo pattern transfer failure in the magnetic recording medium 1, mechanical damage due to scratching of the master information recording body 200, and life reduction may occur. There are concerns.

  Therefore, in the present embodiment, the wind speed of the cleaned air supplied from directly above the magnetic transfer unit 14 is made higher than the wind speed of the cleaned air supplied from other parts, so that Intrusion of foreign matter such as dust existing in the part to the magnetic transfer portion 14 side is restricted. As a result, it is possible to suppress the occurrence of the above-described problem due to the wraparound of foreign matter.

  In this connection, for example, a high grade (for example, ULPA filter) is used as the air filter 311 in the second FFU 310b, and a low grade (as the air filter 311 in each of the first FFU 310a, the third FFU 310c to the sixth FFU 310f). For example, by using a HEPA filter or a MEPA filter (Middle Efficiency Particulate Air Filter), the cleanliness of the air supplied from above toward the magnetic transfer unit 14 is directed from above to the periphery of the magnetic transfer unit 14. It may be made higher than the cleanliness of the supplied air.

  Further, in the magnetic transfer process described above, when the pre-transfer medium that remains in a largely vibrated state is brought into contact with the master information recording body 200, the contact surface of the master information recording body 200 is damaged by the pre-transfer medium. As a result, the life of the master information recording body 200 (the number of times it can be used for transfer) may be shortened. In particular, in the present embodiment, since the servo pattern is formed on the master information recording body 200 by unevenness, if the unevenness is missing or deformed when contacting the pre-transfer medium, the subsequent magnetic transfer In this case, transfer failure occurs. In contrast, in the present embodiment, after the supplied pre-transfer medium is positioned and stopped with respect to the master information recording body 200 provided in the magnetic transfer unit 14, the vibration of the pre-transfer medium is attenuated. In this state, the master information recording body 200 is brought into contact. Thereby, the mechanical damage of the master information recording body 200 resulting from contact with the medium before transfer and the master information recording body 200 and lifetime reduction can be suppressed.

  Further, in the present embodiment, in the surface inspection / magnetic transfer apparatus 10, the magnetic transfer unit 14 to which the two master information recording bodies 200 are attached is disposed above the base 11, while the magnetic transfer unit 14 is configured. The drive system (movable holder drive unit 75, suction drive unit 76, first magnet drive unit 77, and second magnet drive unit 78) of each part to be operated is below the base 11 (below the two master information recording bodies 200). ). In these drive systems, there is a concern of causing foreign matter such as dust to scatter with rotation or the like. However, even if foreign matter scatters, the foreign matter is below the base 11 due to gravity. It will fall to the opposite side. For this reason, the foreign matter scattered by the drive system of the magnetic transfer unit 14 adheres to the pre-transfer medium, and between the two master information recording bodies 200 and the single pre-transfer medium in the magnetic transfer unit 14. It is possible to suppress the occurrence of a situation of being caught between the two. Therefore, it is possible to suppress a servo pattern transfer failure in the magnetic recording medium 1, mechanical damage due to scratches on the master information recording body 200, and a reduction in lifetime.

  Furthermore, in the present embodiment, in the surface inspection / magnetic transfer apparatus 10, each part (pre-transfer medium storage unit 12, surface inspection unit 13, transfer unit 17, transfer unit 17, and the like) related to the supply of the pre-transfer medium to the magnetic transfer unit 14. The SCARA robot 18 and the like are also arranged above the base 11. As a result, it is easy to avoid a situation in which foreign matter resulting from the drive system of the magnetic transfer unit 14 is supplied to the magnetic transfer unit 14 in a state of being attached to the surface of the pre-transfer medium.

  In the present embodiment, the example in which the surface inspection / magnetic transfer device 10 is arranged in the clean room 300 whose wall surface is made of a plate material or the like has been described. However, the present invention is not limited to this example. The same can be applied to a clean booth or the like constituted by the above.

  Hereinafter, the effects of the present invention will be made clearer by examples. In addition, this invention is not limited to a following example, In the range which does not change the summary, it can change suitably and can implement.

(Example)
In the example, first, a cleaned glass substrate 100 (manufactured by Konica Minolta Co., Ltd., 2.5 inch outer diameter) is accommodated in a film forming chamber of a DC magnetron sputtering apparatus (C-3040 made by Anelva Co., Ltd.) After the inside of the deposition chamber was evacuated to a vacuum degree of 1 × 10 ⁻⁵ Pa, an adhesion layer 110 having a layer thickness of 10 nm was formed on the substrate 100 using a 60Cr-40Ti target. Further, on this adhesion layer 110, a target of 46Fe-46Co-5Zr-3B {Fe content 46 atomic%, Co content 46 atomic%, Zr content 5 atomic%, B content 3 atomic%} is used. A first soft magnetic underlayer 121 having a layer thickness of 34 nm is formed at a substrate temperature of 100 ° C. or less, and a spacer layer 122 made of Ru is formed thereon with a layer thickness of 0.76 nm, and then 46Fe-46Co is further formed. A second soft magnetic underlayer 123 of −5Zr-3B was formed to a thickness of 34 nm, and this was used as the soft magnetic underlayer 120.

  Next, on the soft magnetic underlayer 120, Ni-6W {W content 6 atom%, remaining Ni} target and Ru target were sequentially formed with a layer thickness of 5 nm and 20 nm, respectively. The orientation control layer 130 was obtained.

Subsequently, on the orientation control layer 130, as the perpendicular recording layer 150 of the multilayer structure, Co12Cr16Pt-16TiO ₂ (film thickness _{3nm), Co5Cr22Pt-4SiO 2 -3Cr} 2 O 3 -2TiO 2 ( film thickness 3nm), Ru47. 5Co (film thickness: 0.5 nm) and Co15Cr16Pt6B (film thickness: 3 nm) were stacked.
And the protective layer 160 which consists of carbon with a layer thickness of 2.5 nm was formed into a film by CVD method, and the laminated substrate 180 of the Example was obtained.

  Next, the laminated substrate 180 manufactured by the above-described procedure was cleaned using a flowing water type cleaning apparatus. Specifically, a cleaning tank made of SUS304 having a length of 40 cm, a width of 40 cm, and a depth of 35 cm was used, and an ultrasonic oscillator having a frequency of 950 kHz and an output of 600 W was disposed outside the bottom surface of the cleaning tank. Then, the cleaning liquid in the cleaning tank was caused to flow laterally in a laminar state, and the laminated substrate 180 was cleaned while applying ultrasonic vibration to the cleaning liquid.

  Pure water is used as the cleaning liquid, the water temperature is 23 ± 3 ° C, and the average flow speed of the cleaning liquid flowing in a laminar state in the cleaning tank (flow speed in a state where the object to be cleaned is immersed and ultrasonic vibration is applied) is The flow rate was adjusted to 3 m / min. The cleaning time in this flowing water type cleaning apparatus was 30 seconds, and after cleaning, the laminated substrate 180 was quickly dried with dry air.

  Next, a magnetic recording medium 1 is obtained by forming a lubricating layer 170 made of perfluoropolyether with a thickness of 15 angstroms on the surface of the magnetic recording medium 1 by dipping, and then the magnetic recording medium 1 is heated to 80 ° C. And baked for 1 minute.

  Then, a wiping process was performed on the magnetic recording medium 1. As the wiping tape, a peelable composite fiber having a wire diameter of 2 μm made of nylon resin and polyester resin was used. In the wiping process, the rotational speed of the magnetic recording medium 1 was 300 rpm, the wiping tape feed speed was 10 mm / second, the pressing force when pressing the wiping tape against the magnetic recording medium 1 was 98 mN, and the processing time was 5 seconds.

  Next, burnishing was performed on the magnetic recording medium 1 subjected to the wiping process. The burnish tape used was a polyethylene terephthalate film on which crystal growth type alumina particles having an average particle size of 0.5 μm were fixed with an epoxy resin. In the burnishing, the rotational speed of the magnetic recording medium 1 was 300 rpm, the polishing tape feed speed was 10 mm / second, the pressing force when pressing the polishing tape against the magnetic recording medium 1 was 98 mN, and the processing time was 5 seconds.

  Subsequently, a servo signal or the like was written on the magnetic recording medium 1 by a magnetic transfer process. The surface inspection / magnetic transfer device 10 is installed in a class 1 clean room 300 defined in JIS B 9920. The flow velocity of the downflow at the top of the magnetic transfer section 14 is 2 m / second, and the flow velocity of the downflow at other locations. Was 0.5 m / sec.

  In the magnetic transfer process, initial magnetization was first applied to both data surfaces of the magnetic recording medium 1 while applying a 10 kOe magnetic field penetrating the magnetic recording medium 1 using an NdFeB-based sintered magnet. Then, the master information recording body 200 was brought into close contact with both surfaces of the magnetic recording medium 1 subjected to the initial magnetization with a pressure of 98 mN, and a recording magnetic field was applied from the back surface of the master information recording body 200. The intensity of this recording magnetic field was 4 kOe, and the transfer time was 10 seconds.

Here, a master information recording body 200 having a transfer pattern such as a 271k track / inch servo signal was used. The master information recording body 200 has a track width of 120 nm, a track interval of 60 nm, and a transfer pattern step of 45 nm. In this master information recording body 200, a Ru film having a thickness of 10 nm and a 70 Co— layer having a thickness of 20 nm as a master magnetic layer 202 are formed on a base 201 made of Ni having a convex portion and a concave portion by using a DC sputtering method. and 5Cr-15Pt-10SiO ₂ alloy film, were sequentially laminated and 80Co-5Cr-15Pt alloy film having a thickness of 15 nm, manufactured by thereon to form a CVD carbon film of thickness 20nm as a master protective layer 203 Is done.

The reproduction characteristics such as servo signals of the magnetic recording medium 1 produced by using one set of master information recording bodies 200 by the above method, read / write analyzer (model number: RWA1632; manufactured by GUZIK, USA) and spin stand ( Model number: S1701MP). In this apparatus, a servo signal or the like recorded on the magnetic recording medium 1 is read, and the magnetic head can be positioned using this signal. At this time, a magnetic head using TuMR is used as an evaluation magnetic head, and the S / N ratio at the time of servo signal reading is evaluated. When the S / N ratio is 16.0 dB or less, magnetic transfer is performed. Judged to be bad.
As a result, in the example, 163,000 times of magnetic transfer were possible.

(Comparative example)
In the comparative example, the magnetic recording medium 1 was manufactured and evaluated in the same manner as in the example. In the magnetic transfer process, the flow rate of the downflow at the upper part of the magnetic transfer unit 14 installed in the clean room was set to 0.5 m / second. The flow rate was the same at other points.
As a result, in the comparative example, 52,000 times of magnetic transfer were possible.

DESCRIPTION OF SYMBOLS 1 ... Magnetic recording medium, 10 ... Surface inspection and magnetic transfer apparatus, 11 ... Base, 12 ... Pre-transfer medium accommodating part, 13 ... Surface inspection part, 14 ... Magnetic transfer part, 15 ... Transferred medium accommodating part, 16 ... Defective product storage unit, 17 ... transfer unit, 18 ... SCARA robot, 19 ... position detection unit, 20 ... vibration detection unit, 30 ... fixed holder, 40 ... movable holder, 50 ... first magnet member, 60 ... second Magnet member, 200 ... Master information recording body, 300 ... Clean room, 301 ... Storage room, 302 ... Ceiling back room, 303 ... Under floor room, 304 ... Connection room, 305 ... Dry coil, 310 ... Fan filter unit (FFU) 311 ... Air filter, 312 ... Fan

Claims (7)

From the ceiling side to the clean room from above, the wind speed in the first area on the ceiling side of the clean room is higher than the wind speed in the second area around the ceiling side and the first area. Supplying a descending air flow toward
Pressing the data surface of the magnetic recording medium for recording magnetic information against the pattern forming surface of the pattern forming body on which the pattern is formed in the clean room and below the first region;
A step of magnetically transferring the pattern formed on the pattern forming body to the magnetic recording medium pressed against the pressed pattern forming body and the magnetic recording medium in the clean room and below the first region; A method of manufacturing a magnetic recording medium including:   2. The method of manufacturing a magnetic recording medium according to claim 1, wherein, in the step of supplying the downdraft, the wind speed in the first region is set to be twice or more than the wind speed in the second region.   3. The cleanliness of the gas supplied from the first region is made higher than the cleanliness of the gas supplied from the second region in the step of supplying the descending airflow. Manufacturing method of magnetic recording medium. From the ceiling side to the clean room from above, the wind speed in the first area on the ceiling side of the clean room is higher than the wind speed in the second area around the ceiling side and the first area. Supplying a descending air flow toward
Magnetic information is disposed between the pattern forming surfaces of the pair of pattern forming bodies, which are arranged in the clean room and below the first region, and each has a pattern, from the inside of the clean room and below the second region. Carrying in a magnetic recording medium for recording,
Sandwiching the magnetic recording medium between a pair of the pattern forming bodies in the clean room and below the first region;
A pair of the patterns is formed by forming a magnetic field in a direction perpendicular to the pattern forming surface with respect to the magnetic recording medium sandwiched between the pair of pattern forming bodies in the clean room and below the first region. Magnetically transferring the pattern formed on each of the formed bodies to the magnetic recording medium;
Releasing the sandwich of the magnetic recording medium by a pair of the pattern forming bodies in the clean room and below the first region;
The magnetic recording medium on which the pattern has been magnetically transferred from between a pair of pattern forming bodies located in the clean room and below the first area is carried out in the clean room and below the second area. A method for manufacturing a magnetic recording medium.   5. The method of manufacturing a magnetic recording medium according to claim 4, wherein in the step of supplying the downdraft, the wind speed in the first region is set to be twice or more the wind speed in the second region.   6. The cleanliness of the gas supplied from the first region is made higher than the cleanliness of the gas supplied from the second region in the step of supplying the descending airflow. Manufacturing method of magnetic recording medium. A pair of sandwiching members disposed between a pair of pattern forming bodies each having a pattern formed thereon and a magnetic recording medium disposed between the pair of pattern forming bodies and recording magnetic information;
A pair of magnet members arranged to further sandwich the pattern forming body and the magnetic recording medium sandwiched between a pair of the sandwiching members;
A first supply section that is disposed above the pair of pattern forming bodies and the pair of sandwiching members and supplies the cleaned airflow from the upper side to the lower side at a first wind speed;
A magnetic recording medium including a second supply unit disposed around the first supply unit and configured to supply a purified airflow from above to below at a second wind speed lower than the first wind speed. Manufacturing system.

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