JP2012003929A - Device and method for testing material - Google Patents

Abstract

A material testing apparatus and a material testing method are provided that can easily move a test jig in a state in which a stress applied to a test piece is held out of a sample chamber and perform other material tests.
A base portion 21 placed on a sample stage 5 installed in a sample chamber, a movable portion 22 provided on the base portion 21, and a test piece provided on each of the base portion 21 and the movable portion. In a material testing apparatus provided with a test jig 7 having a fixed part 24 and a drive mechanism for displacing the movable part, the movable part 22 is separated from the drive mechanism, and the test jig 7 is attached with the test piece 6 attached thereto. Transfer to the outside of the sample chamber.
[Selection] Figure 3

Description

  The present invention relates to a material test apparatus and a material test method for performing a material test on a test piece in a sample chamber.

  Scanning electron microscopes (hereinafter referred to as “SEM”) capable of observing tissue changes accompanying deformation of a sample material are known from Patent Document 1, Patent Document 2, and the like. In these methods, a test piece is attached to a tensioning device installed in the SEM, a tensile load is applied, a stress is applied, and the material deformation behavior and strain state of the test piece are observed in the SEM.

  In the above conventional technique, the tension device installed in the SEM has a drive mechanism that applies a tensile load to the test piece in the sample chamber, and observes local changes in the tissue that occur when the test piece is deformed. is doing. That is, in the tension device of Patent Document 1, both ends of the test piece are gripped by the test piece grip, and a tensile load is applied to the test piece by the load cell. In the tension device of Patent Document 2, a tension / compression mechanism that fixes a test piece and pulls a sample, and a drive source that can be electrically driven by being connected to the tension / compression mechanism in a direction orthogonal to or parallel to the tension / compression mechanism. A base is arranged and fixed. The base is removed from the stage in the sample chamber and moved to the preliminary exhaust chamber.

JP 2008-191120 A JP 2008-305679 A

  In the material test using the conventional tension device as described above, when the specimen is subjected to other material tests such as a corrosion test after the structure observation, it is necessary to remove the specimen from the device. It could not be subjected to other material tests while being held. In the tension device of Patent Document 2, the base can be moved to a preliminary exhaust chamber outside the sample chamber. However, it is difficult to perform another material test on the test piece as it is because the base is a large-sized one where the driving source is arranged. is there.

  An object of the present invention is to provide a material testing apparatus and a material testing method that can easily move a test jig in a state in which a stress applied to a test piece is held out of a sample chamber and perform other material tests. .

  In order to solve the above problems, a material testing apparatus according to the present invention includes a base part placed on a sample stage installed in a sample chamber, a movable part provided in the base part, the base part, and the In a material testing apparatus having a test jig having a test piece fixing portion provided in each of the movable portions and a drive mechanism for displacing the movable portion, the movable portion is separated from the drive mechanism and a test piece is attached. In this state, the test jig is transferred into and out of the sample chamber.

  Further, the material testing apparatus of the present invention includes a base unit placed on a sample stage installed in a sample chamber, a pair of movable parts provided on the base part, and a test provided on the pair of movable parts. In a material testing apparatus provided with a test jig having a piece fixing part and a drive mechanism for displacing the pair of movable parts, the test treatment is performed in a state where the movable part is separated from the drive mechanism and a test piece is attached. The tool is transferred to and from the sample chamber.

  Furthermore, the material testing apparatus of the present invention includes a base part placed on a sample stage installed in a sample chamber, a pair of test piece support parts provided at a predetermined interval on the base part, In a material testing apparatus having a test jig having a movable part provided on a base part and a drive mechanism for displacing the movable part, the movable part is separated from the drive mechanism and a test piece is attached. The test jig is transferred into and out of the sample chamber.

  According to the present invention, the test jig is reduced in size, and can easily be moved out of the sample chamber in a state in which the stress applied to the test piece is maintained, and other material tests can be performed.

The schematic diagram of SEM to which the present invention is applied. The figure which shows the shape of the test piece which concerns on Embodiment 1 of this invention, (a) is a parallel part, (b) is a figure which shows the shape of the test piece which formed the constriction part. BRIEF DESCRIPTION OF THE DRAWINGS Structural drawing of the test jig which fixed the test piece which concerns on Embodiment 1 of this invention, (a) is a front view, (b) is a top view, (c) is a side view. The figure which shows the test piece fixing | fixed part using the screw which concerns on Embodiment 1 of this invention, (a) is a front view, (b) is a top view. The figure which shows the other test piece fixing | fixed part using the screw which concerns on Embodiment 1 of this invention, (a) is a front view, (b) is a top view. The figure which shows the test piece fixing | fixed part by the groove | channel which concerns on Embodiment 1 of this invention, (a) is a front view, (b) is a top view. FIG. 4 is a structural diagram of a test jig to which a test piece according to Embodiment 2 of the present invention is fixed, (a) is a front view, and (b) is a top view. FIG. 6 is a structural diagram of a test jig in which a test piece is fixed in another example according to Embodiment 2 of the present invention, (a) is a front view of the test jig provided with a flat plate screw, and (b) is provided with a flat plate screw and a gear. FIG. FIG. 4 is a structural diagram of a test jig to which a test piece according to Embodiment 3 of the present invention is fixed, (a) is a front view, and (b) is a top view. FIG. 6 is a structural diagram of a test jig to which a test piece according to Embodiment 4 of the present invention is fixed, (a) is a front view of a three-point bending test jig, and (b) is a front view of a four-point bending test jig. Figure.

  Hereinafter, a material testing apparatus and a material testing method according to an embodiment of the present invention will be described with reference to the drawings. In each of the embodiments, a material test apparatus and a material test method for an electron microscope for performing a material test on a sample in an SEM and observing the sample will be described. In the second and subsequent embodiments, the description of the points common to the first embodiment will be omitted.

(Embodiment 1)
FIG. 1 is a schematic diagram of an SEM to which the present invention is applied. 2A and 2B are diagrams showing the shape of the test piece, in which FIG. 2A shows the shape of the test piece in which a parallel portion and (b) a constricted portion are formed. FIG. 3 is a structural diagram of the test jig according to the first embodiment of the present invention, where (a) is a front view, (b) is a top view, and (c) is a side view.

  In FIG. 1, the SEM includes a lens barrel 1, an electron gun 2, and a sample chamber 3. The sample chamber 3 has a sample inlet 4, and a test jig 7 on which a test piece 6 is mounted is placed on a sample stage 5 installed inside. A drive mechanism 8 is provided in the sample chamber.

  A test piece 6 as a sample shown in FIG. 2A has a chuck portion 12 having a parallel portion 11 at the center and pin holes 13 at both ends. The center of the test piece 6 shown in FIG.

  In FIG. 3, the test jig 7 includes a base portion 21, a displacement member 22 installed on a notch portion on the base portion 21, and a screw 23 that engages with a screw hole 27 formed in the displacement member 22. Have The displacement member 22 and the screw 23 constitute a movable part. Each of the base portion 21 and the displacement member 22 is provided with a test piece fixing portion 24. A bearing portion 25 is formed on the side surface of the cutout portion at the center of the base portion 21, and the left and right movement of the screw 23 with respect to the base portion 21 is restricted. The displacement member 22 slides on the base portion 21 by a slide portion 26 that is an engaging portion between the grooves. The displacement member 22 is displaced relative to the base portion 21 by rotating the screw 23.

  The screw 23 of the movable part is detachably connected to the drive mechanism 8 provided inside the sample chamber 3. The drive mechanism 8 can control the rotation of the screw 23. Note that the test jig 7 is substantially circular as viewed from above, but may have other shapes. Alternatively, the main body of the drive mechanism 8 may be provided outside the sample chamber 3 so that a part thereof penetrates the wall of the sample chamber 3.

  By providing the slide portions 26 in a plurality of rows, it is difficult for the base portion 21 and the displacement member 22 to be displaced, so that the test can be performed with high accuracy. Further, if the slide part 26 has a simplified structure in one row, jig fabrication can be facilitated. A high-strength material having high corrosion resistance is used for the screw 23 and the bearing portion 25, and a nonmagnetic material having high corrosion resistance is used for the base portion 21 and the test piece fixing portion 24. The non-magnetic material is used to prevent magnetic attraction.

  Outside the sample chamber, the test piece 6 is fixed to the base portion 21 and the displacement member 22 by the test piece fixing portion 24 through the pin hole 13 and attached to the test jig 7. The test jig 7 is transferred into the sample chamber, and the drive mechanism 8 is connected to the screw 23. By rotating the screw 23, the displacement member 22 is displaced, a tensile or compressive load is applied to the test piece 6, and a tensile or compressive stress is applied. Thereby, the local change of the structure | tissue of the material which arose by deformation | transformation becomes possible in-situ observation with SEM.

After the observation is completed, when the test jig 7 is transferred to the outside of the sample chamber of the electron microscope with the test piece 6 attached, the base 21 and the sample stage 5 are unfixed. . The screw 23 of the movable part is separated from the drive mechanism 8. When the test jig 7 is transferred to the outside of the sample chamber of the electron microscope, the test piece 6 may be loaded or may not be loaded. Outside the sample chamber, other material tests such as a corrosion test in seawater are performed. Thereafter, the test jig 7 is again transferred into the sample chamber of the electron microscope, and the test piece 6 is observed.
As the driving mechanism 8, a driving method using a screw has been described. Alternatively, a driving method using a hydraulic pressure or a piezoelectric actuator may be adopted.

  The test jig 7 is smaller than the diameter of the sample inlet 4 and can pass through the sample inlet 4, and can be installed on or smaller than the sample stage 5 and obstructs the working distance WD when observed by SEM. It is configured with a size that does not.

  As described above, in this embodiment, the test piece 6 can be used for other material tests such as a corrosion test in seawater while keeping the stress applied to the material without removing the test piece 6 from the test jig 7 after observation. . Furthermore, the observation of the structure after the other material tests are completed can be performed without removing the test piece 6 from the test jig 7. This makes it possible to conduct other material tests that could not be carried out with an apparatus installed in a conventional SEM.

4A and 4B are diagrams showing a test piece fixing portion using a screw according to the present embodiment, in which FIG. 4A is a front view and FIG. 4B is a top view.
Although the displacement member 22 is not shown in the drawing, a screw hole 31 is formed on the upper surface of the base portion 21 and the displacement member 22, and the test piece 6 is fixed to the pin hole 13 of the test piece 6 through the bolt 32. The piece 6 can be fixed with high accuracy.

FIGS. 5A and 5B are diagrams showing another test piece fixing portion using screws, where FIG. 5A is a front view and FIG. 5B is a top view.
Although the displacement member 22 is not shown, a bolt 33 is implanted on the upper surface of the base 21 and the displacement member 22, and the test piece 6 is fixed with a nut 34 through the bolt 33 in the pin hole 13 of the test piece 6. Yes, similarly, the test piece 6 can be fixed with high accuracy.

6A and 6B are diagrams showing a test piece fixing portion using grooves, where FIG. 6A is a front view and FIG. 6B is a top view.
Although the displacement member 22 is not shown, a groove 35 for fitting the chuck portion 12 of the test piece 6 is formed on the upper surface of the base portion 21 and the displacement member 22, and the test piece 6 is easily and accurately fixed. be able to. In this example, it is not necessary to provide a pin hole in the chuck portion 12 of the test piece 6.

(Embodiment 2)
7A and 7B are structural diagrams of a test jig to which a test piece according to Embodiment 2 of the present invention is fixed. FIG. 7A is a front view and FIG. 7B is a top view.

In FIG. 7, the test jig 7 is engaged with a base portion 21, two displacement members 22 installed on both sides of a central convex portion 28 on the base portion, and screw holes 27 formed in the displacement member 22. Screw 23 to be used. The two displacement members 22 and the screw 23 constitute a pair of movable parts. Each of the two displacement members 22 is provided with a test piece fixing portion 24. The two displacement members 22 slide with respect to the base portion 21 by the slide portion 26. The screw 23 and the screw hole 27 have a structure in which the screw thread is reversed in the left and right displacement members 22, and the two displacement members 22 are separated or approached by the rotation of the screw 23. The screws 23 of the pair of movable parts are detachably connected to the drive mechanism 8.
Thereby, since the test piece 6 is pulled or compressed by the same amount in both directions, the center position of the test piece 6 is not shifted and an efficient test can be performed.

FIG. 8 is a structural diagram of a test jig in another example according to Embodiment 2 of the present invention, (a) is a front view of the test jig provided with a flat plate screw, and (b) is provided with a flat plate screw and a gear. It is a front view of a test jig.
FIG. 8A shows a case where flat screws 42 are formed at the bottom of the two displacement members 22 instead of the screw holes. A screw 23 is disposed in the through hole 41 of the base portion 21 and engaged with a flat plate screw 42 of the displacement member 22. In FIG. 8B, a gear 43 is further provided at the center of the screw 23 and engaged with the drive screw 44.

  The screw 23 or the drive screw 44 of the pair of movable parts is detachably connected to the drive mechanism 8 that rotates the screw 23 or the drive screw 44.

(Embodiment 3)
FIG. 9 is a structural diagram of a test jig to which a test piece according to Embodiment 3 of the present invention is fixed, (a) is a front view, and (b) is a top view.

In the second embodiment, the base portion 21 is provided with a central convex portion 28, and two displacement members 22 are arranged on both sides. In the present embodiment, a pressing tool 53 that extends in a direction perpendicular to the longitudinal direction of the test piece 6 is further arranged on the upper portion of the central convex portion 28. A bolt 54 that engages with the central convex portion 28 passes through the presser 53. The test piece 6 is fixed to the displacement member 22 by the test piece fixing portion 24, and after the structure observation, the presser 53 is pushed by the rotation of the bolt 54 to approach the surface of the test piece 6.
Thereby, it becomes possible to provide a clearance environment when stress corrosion cracking occurs, and an efficient test becomes possible.

(Embodiment 4)
The present embodiment is an example in which a bending load is applied instead of applying a tensile or compressive load to the test piece 6 as in Embodiment 1-3.

FIG. 10 is a structural diagram of a test jig to which a test piece according to Embodiment 3 of the present invention is fixed, (a) is a front view of a test jig for three-point bending, and (b) is for four-point bending. It is a front view of this test jig.
In FIG. 10A, a pair of inverted L-shaped test piece support portions 61 are provided on the base portion 21 of the test jig 7 at a predetermined interval. A support pin 62 is attached to the inside of the opposing horizontal portion of the pair of test piece support portions 61. At the center between the pair of test piece support portions, a displacement member 22 as a movable portion is provided on the base portion 21 so as to be movable up and down. The test piece 6 is sandwiched in the longitudinal direction between the support pin 62 of the pair of test piece support portions 61 and one convex portion formed at the tip of the displacement member 22. By displacing the displacement member 22 upward and pushing the center of the test piece 6 upward, a bending load by three-point bending can be applied to the test piece 6.

The displacement member 22 that is a movable part is connected to the drive mechanism 8 in a separable manner. As the driving mechanism 8, for example, a screw driving method, a hydraulic driving method, or a piezoelectric actuator can be employed.
In this way, it is possible to apply a bending load to the test piece 6 without shifting the observation position and generate a tensile stress on the surface of the test piece.

  FIG. 10B shows another example of the displacement member 22, in which two convex portions are formed at the tip, and the displacement member 22 and the test piece 6 are in contact at two locations. A bending load by four-point bending can be applied.

  DESCRIPTION OF SYMBOLS 1 ... Lens barrel, 2 ... Electron gun, 3 ... Sample chamber, 4 ... Sample entrance, 5 ... Sample stand, 6 ... Test piece, 7 ... Test jig, 8 ... Drive mechanism, 21 ... Base part, 22 ... Displacement Member 23 ... Screw 24 ... Test piece fixing part 25 ... Bearing part 26 ... Slide part 27 ... Screw hole 28 ... Central convex part 42 ... Flat plate screw 53 ... Pressing tool 61 ... Test piece support part .

Claims (9)

A test having a base part placed on a sample stage installed in a sample chamber, a movable part provided in the base part, and a test piece fixing part provided in each of the base part and the movable part In a material testing apparatus provided with a jig and a drive mechanism for displacing the movable part,
A material testing apparatus, wherein the movable part is separated from the driving mechanism, and the test jig is transferred to and from the sample chamber with a test piece attached. A test jig having a base part placed on a sample stage installed in the sample chamber, a pair of movable parts provided in the base part, and a test piece fixing part provided in the pair of movable parts; And a material testing apparatus comprising a drive mechanism for displacing the pair of movable parts,
A material testing apparatus, wherein the movable part is separated from the driving mechanism, and the test jig is transferred to and from the sample chamber with a test piece attached.   The material test apparatus according to claim 1, wherein the test piece fixing portion has a structure in which a screw is fixed to a pin hole provided in a chuck portion of the test piece through a screw.   The material test apparatus according to claim 1, wherein the test piece fixing portion has a structure in which a chuck portion of the test piece is fitted and fixed in a groove formed on an upper surface.   The material testing apparatus according to claim 2, wherein a pressing tool for providing a gap on the surface of the test piece is provided at a central convex portion of the base portion. A base part placed on a sample stage installed in a sample chamber, a pair of test piece support parts provided on the base part at a predetermined interval, and a movable part provided on the base part. In a material testing apparatus comprising a test jig having a driving mechanism for displacing the movable part,
A material testing apparatus, wherein the movable part is separated from the driving mechanism, and the test jig is transferred to and from the sample chamber with a test piece attached.   The material testing apparatus according to claim 6, wherein the tip of the movable part has one or two convex parts, and a bending load is applied to the test piece at three or four points.   A step of attaching a test piece to a test jig in the material testing apparatus according to claim 1, transferring the sample into a sample chamber, a step of applying a load to the test piece and observing the test piece, and attaching the test piece. And a step of transferring the test jig to the outside of the sample chamber in a state.   9. The material testing method according to claim 8, further comprising: performing another material test on the test piece; and transferring the test jig into the sample chamber with the test piece attached thereto. And a step of observing the material.

Images