JP2012088213A

JP2012088213A - Inclination sensor device

Info

Publication number: JP2012088213A
Application number: JP2010236135A
Authority: JP
Inventors: Atsushi Horikawa; 敦堀川
Original assignee: Hirose Electric Co Ltd
Current assignee: Hirose Electric Co Ltd
Priority date: 2010-10-21
Filing date: 2010-10-21
Publication date: 2012-05-10

Abstract

【課題】被検出物の傾斜を簡単な演算により高精度に求めることを可能にし、また、高さ寸法を小さくして傾斜センサ装置の小型化を図る。
【解決手段】傾斜センサ装置のセンサユニット１０の電極収容室１４内に誘電性液体１５と共に電極板２１、２２、…を収容し、各電極板２１、２２、…を、略楕円形の外形を有し、中央部に略楕円形の穴を有する板体を中間部で曲げることにより形成する。これにより、誘電性液体１５の液面１５Ａの傾斜角を「液面傾斜角」とし、各電極板２１、２２、…の各電極部において誘電性液体１５に浸漬した部分の面積を「浸漬部分面積」とすると、被検出物の傾斜角の予定された検出範囲内において、液面傾斜角の単位量変化当たりの浸漬部分面積の変化量を一定にすることができる。これにより、被検出物の傾斜角と電極間のインピーダンスとの関係をリニアにすることができる。
【選択図】図３An object of the present invention is to obtain the inclination of an object to be detected with high accuracy by simple calculation, and to reduce the height of the inclination sensor device by reducing the height dimension.
Are accommodated together with a dielectric liquid 15 in an electrode housing chamber 14 of the sensor unit 10 of the tilt sensor device, and each electrode plate 21 has a substantially elliptical outer shape. It is formed by bending a plate body having a substantially elliptical hole in the center portion at the middle portion. Thereby, the inclination angle of the liquid surface 15A of the dielectric liquid 15 is defined as a “liquid surface inclination angle”, and the area of each electrode portion of each electrode plate 21, 22,. When “area” is defined, the amount of change in the immersion portion area per unit amount change in the liquid surface inclination angle can be made constant within a predetermined detection range of the inclination angle of the detection object. Thereby, the relationship between the inclination angle of the object to be detected and the impedance between the electrodes can be made linear.
[Selection] Figure 3

Description

本発明は、被検出物の傾斜、加速度等を検出することができる傾斜センサ装置に関する。 The present invention relates to a tilt sensor device that can detect tilt, acceleration, and the like of an object to be detected.

特許文献１には、被検出物の加速度を検出することができる加速度センサが記載されている。この加速度センサは、原理的にみて、被検出物の傾斜、加速度等を検出することができる傾斜センサ装置に相当する。 Patent Document 1 describes an acceleration sensor that can detect the acceleration of an object to be detected. In principle, this acceleration sensor corresponds to a tilt sensor device that can detect the tilt, acceleration, and the like of an object to be detected.

特許文献１に記載された傾斜センサ装置は、金属製の密閉容器と、密閉容器内に封入された導電性を有する液体と、四角形の外形を有する短冊状の４枚の電極とを備え、液体が傾斜したとき、各電極と液体との接触面積が変化し、これに伴い、各電極と密閉容器との間の抵抗値が変化し、この抵抗値に基づいて被検出物の傾斜、加速度等を検出する。 The tilt sensor device described in Patent Document 1 includes a metal sealed container, a conductive liquid sealed in the sealed container, and four strip-shaped electrodes having a quadrangular outer shape. When the electrode tilts, the contact area between each electrode and the liquid changes, and accordingly, the resistance value between each electrode and the sealed container changes. Based on this resistance value, the inclination of the object to be detected, acceleration, etc. Is detected.

特開２００１−３２４５１３号公報JP 2001-324513 A

特許文献１に記載された傾斜センサ装置の各電極は外形が四角形の短冊状である。このため、液体の液面の傾斜角を「液面傾斜角」とし、各電極において液体に浸漬している部分の面積を「浸漬部分面積」とすると、当該傾斜センサ装置により検出可能な傾斜角の範囲内において、液面傾斜角の単位変化量当たりの各電極の浸漬部分面積の変化量が一定でない。例えば、図１３に示すように、四角形の外形を有する短冊状の電極１００において、液面傾斜角が水平面に対しておよそ０度に近い当たりで単位量変化したときの浸漬部分面積の変化量Ｒ１１と、液面傾斜角が水平面に対しておよそ４５度に近い当たりで単位量変化したときの浸漬部分面積の変化量Ｒ１２とが異なる。 Each electrode of the tilt sensor device described in Patent Document 1 has a rectangular strip shape. For this reason, assuming that the inclination angle of the liquid surface is “liquid surface inclination angle” and the area of each electrode immersed in the liquid is “immersion part area”, the inclination angle that can be detected by the inclination sensor device In this range, the amount of change in the immersed portion area of each electrode per unit amount of change in the liquid surface inclination angle is not constant. For example, as shown in FIG. 13, in the strip-shaped electrode 100 having a quadrangular outer shape, the change amount R11 of the immersion portion area when the liquid surface inclination angle changes by a unit amount when the liquid surface inclination angle is approximately 0 degrees with respect to the horizontal plane. And the amount R12 of change in the immersion portion when the unit amount changes when the liquid surface inclination angle is about 45 degrees with respect to the horizontal plane.

このため、液面の傾斜角と各電極の浸漬部分面積との関係がリニア（線形）とならない。この結果、液面の傾斜角と被検出物の傾斜角とが等しく、また、各電極の浸漬部分面積と各電極−密閉容器間の抵抗値との関係がリニアであったとしても、被検出物の傾斜角と各電極−密閉容器間の抵抗値との関係がリニアとならない。このため、各電極−密閉容器間の抵抗値に基づいて被検出物の傾斜角を高精度に求めることが困難であり、あるいは、各電極−密閉容器間の抵抗値に基づいて被検出物の傾斜角を求めるに当たり複雑な演算を行わなければならないという問題がある。 For this reason, the relationship between the inclination angle of the liquid level and the area where each electrode is immersed is not linear. As a result, even if the inclination angle of the liquid surface is equal to the inclination angle of the object to be detected, and the relationship between the immersion area of each electrode and the resistance value between each electrode and the sealed container is linear, the object to be detected The relationship between the inclination angle of the object and the resistance value between each electrode and the sealed container is not linear. For this reason, it is difficult to obtain the inclination angle of the detected object with high accuracy based on the resistance value between each electrode and the sealed container, or the detected object based on the resistance value between each electrode and the sealed container. There is a problem that a complicated calculation has to be performed to obtain the tilt angle.

また、特許文献１に記載された傾斜センサ装置は、検出可能な傾斜角の範囲が狭く、また検出可能な傾斜角を拡げると傾斜センサ装置が大型化してしまうという問題がある。すなわち、特許文献１に記載された傾斜センサ装置により検出可能な傾斜角の範囲は、特許文献１の図７を見ると、−６０度〜＋６０度程度であると推測される。つまり、当該傾斜センサ装置における液体の液面の傾斜角が−６０度〜＋６０度の範囲内であると、各電極が部分的に液体に浸漬した状態であるが、液体の液面の傾斜角が−６０度〜＋６０度の範囲を超えると、４本の電極のうち、少なくとも１本の電極が液体に全く浸漬しない状態となってしまう。このように電極が液体に全く浸漬しない状態となると、各電極ー密閉容器間の抵抗値に基づいて被検出物の傾斜角を求めることがより一層困難になる。それゆえ、当該傾斜センサ装置により検出可能な傾斜角の範囲は−６０度〜＋６０度程度であると推測することができ、検出可能な傾斜角の範囲が狭いことがわかる。 In addition, the tilt sensor device described in Patent Document 1 has a problem that the range of the tilt angle that can be detected is narrow, and the tilt sensor device becomes large if the detectable tilt angle is widened. That is, the range of the tilt angle that can be detected by the tilt sensor device described in Patent Document 1 is estimated to be about −60 degrees to +60 degrees when FIG. 7 of Patent Document 1 is viewed. That is, when the tilt angle of the liquid level in the tilt sensor device is within a range of −60 degrees to +60 degrees, each electrode is partially immersed in the liquid, but the tilt angle of the liquid level of the liquid When the angle exceeds the range of −60 degrees to +60 degrees, at least one of the four electrodes is not immersed in the liquid at all. Thus, when the electrode is not immersed in the liquid at all, it becomes even more difficult to obtain the inclination angle of the detection object based on the resistance value between each electrode and the sealed container. Therefore, it can be estimated that the range of tilt angles that can be detected by the tilt sensor device is about −60 degrees to +60 degrees, and it can be seen that the range of tilt angles that can be detected is narrow.

また、特許文献１に記載された傾斜センサ装置において、各電極の上下方向の長さを伸ばせば、検出可能な傾斜角の範囲を拡げることが可能である。しかし、その場合、傾斜センサ装置の高さ寸法が大きくなり、傾斜センサ装置が大型化してしまう。この結果、当該傾斜センサ装置を被検出物に取り付ける場所に制約が生じる等の問題が生じ得る。 Further, in the tilt sensor device described in Patent Document 1, if the length of each electrode in the vertical direction is extended, the range of detectable tilt angles can be expanded. However, in that case, the height of the tilt sensor device becomes large, and the tilt sensor device becomes large. As a result, problems such as restrictions on where the tilt sensor device is attached to the object to be detected may occur.

本発明は例えば上述したような問題に鑑みなされたものであり、本発明の第１の課題は、被検出物の傾斜を簡単な演算により高精度に求めることを可能にする傾斜センサ装置を提供することにある。 The present invention has been made in view of, for example, the above-described problems, and a first object of the present invention is to provide a tilt sensor device that can determine the tilt of an object to be detected with high accuracy by a simple calculation. There is to do.

本発明の第２の課題は、被検出物の傾斜の検出精度を低下させることなく、高さ寸法を小さくして小型化を図ることができる傾斜センサ装置を提供することにある。 A second object of the present invention is to provide an inclination sensor device that can be reduced in size by reducing the height dimension without reducing the detection accuracy of the inclination of the object to be detected.

上記課題を解決するために、本発明の第１の傾斜センサ装置は、被検出物に取り付けられ、前記被検出物の傾斜を検出する傾斜センサ装置であって、電極収容室を有する筐体と、前記電極収容室内に封入され、前記電極収容室の容積の全部を満たさない量の誘電性液体と、前記電極収容室内に設けられ、第１の検出部、第２の検出部、第３の検出部および第４の検出部を形成する検出構造体とを備え、前記検出構造体は、導電材料からなり略楕円形の外形を有すると共に中心部に穴を有する板体の中間部を曲げることにより形成され、前記板体の中間部よりも一側が一側電極部となり、前記板体の中間部よりも他側が他側電極部となった４枚の電極板、すなわち、第１の電極板、第２の電極板、第３の電極板および第４の電極板を備え、前記４枚の電極板は、前記各電極板の一側電極部の一部および他側電極部の一部が前記誘電性液体に浸漬し、前記第１の電極板の他側電極部が前記第２の電極板の一側電極部と所定の隙間を介して対向し、前記第２の電極板の他側電極部が前記第３の電極板の一側電極部と所定の隙間を介して対向し、前記第３の電極板の他側電極部が前記第４の電極板の一側電極部と所定の隙間を介して対向し、前記第４の電極板の他側電極部が前記第１の電極板の一側電極部と所定の隙間を介して対向するように配置され、前記第１の電極板の他側電極部、前記第２の電極板の一側電極部、および前記第１の電極板の他側電極部と前記第２の電極板の一側電極部との間に介在する前記誘電性液体により前記第１の検出部が形成され、前記第２の電極板の他側電極部、前記第３の電極板の一側電極部、および前記第２の電極板の他側電極部と前記第３の電極板の一側電極部との間に介在する前記誘電性液体により前記第２の検出部が形成され、前記第３の電極板の他側電極部、前記第４の電極板の一側電極部、および前記第３の電極板の他側電極部と前記第４の電極板の一側電極部との間に介在する前記誘電性液体により前記第３の検出部が形成され、前記第４の電極板の他側電極部、前記第１の電極板の一側電極部、および前記第４の電極板の他側電極部と前記第１の電極板の一側電極部との間に介在する前記誘電性液体により前記第４の検出部が形成され、
前記誘電性液体の液面の傾斜に応じた前記第１ないし第４の検出部におけるインピーダンスの変化により前記被検出物の傾斜を検出することを特徴とする。 In order to solve the above-described problem, a first tilt sensor device of the present invention is a tilt sensor device that is attached to a detected object and detects the tilt of the detected object, and includes a housing having an electrode storage chamber; A dielectric liquid that is enclosed in the electrode housing chamber and does not fill the entire volume of the electrode housing chamber, and is provided in the electrode housing chamber, and includes a first detector, a second detector, and a third detector A detection structure that forms a detection unit and a fourth detection unit, and the detection structure is formed of a conductive material, has a substantially elliptical outer shape, and bends an intermediate portion of a plate having a hole at the center. The four electrode plates formed on the one side with respect to the intermediate portion of the plate body as one side electrode portion and the other side with respect to the intermediate portion of the plate body as the other side electrode portion, that is, the first electrode plate A second electrode plate, a third electrode plate and a fourth electrode plate, One electrode plate part of each electrode plate and a part of the other electrode part are immersed in the dielectric liquid, and the other electrode part of the first electrode plate is the second electrode part. The other electrode part of the second electrode plate is opposed to the one side electrode part of the third electrode plate via a predetermined gap. The other electrode portion of the third electrode plate is opposed to the one electrode portion of the fourth electrode plate with a predetermined gap, and the other electrode portion of the fourth electrode plate is the first electrode portion. The electrode plate is disposed so as to face one side electrode portion with a predetermined gap, and the other electrode portion of the first electrode plate, the one side electrode portion of the second electrode plate, and the first electrode portion The first detection portion is formed by the dielectric liquid interposed between the other electrode portion of the electrode plate and the one electrode portion of the second electrode plate, and the other electrode of the second electrode plate. Part, one side electrode part of the third electrode plate, and the dielectric liquid interposed between the other side electrode part of the second electrode plate and the one side electrode part of the third electrode plate A second detection unit is formed, the other electrode part of the third electrode plate, the one electrode part of the fourth electrode plate, and the other electrode part of the third electrode plate and the fourth electrode part. The third detection part is formed by the dielectric liquid interposed between the one side electrode part of the electrode plate, the other side electrode part of the fourth electrode plate, and the one side electrode of the first electrode plate And the dielectric liquid interposed between the other electrode part of the fourth electrode plate and the one electrode part of the first electrode plate, the fourth detection part is formed,
The inclination of the object to be detected is detected by a change in impedance in the first to fourth detection units according to the inclination of the liquid level of the dielectric liquid.

本発明の第１の傾斜センサ装置によれば、各電極板を、略楕円形の外形を有すると共に中心部に穴を有する板体の中間部を曲げることにより形成する構成としたから、誘電性液体の液面の傾斜角を「液面傾斜角」とし、各電極板の一側電極部および他側電極のそれぞれにおいて誘電性液体に浸漬している部分の面積を「浸漬部分面積」とすると、各電極板の一側電極部および他側電極部のそれぞれにつき、被検出物の傾斜角の予定された検出範囲内において、液面傾斜角の単位変化量当たりの浸漬部分面積の変化量を一定にすることができる。これにより、各電極板の一側電極部および他側電極部のそれぞれにつき、液面傾斜角と浸漬部分面積との関係がリニアとなる。したがって、誘電性液体の液面の傾斜に応じた第１ないし第４の検出部におけるインピーダンスの変化に基づいて、被検出物の傾斜を容易かつ高精度に検出することが可能になる。 According to the first tilt sensor device of the present invention, each electrode plate is formed by bending an intermediate portion of a plate body having a substantially elliptical outer shape and having a hole in the center portion. The inclination angle of the liquid surface is the “liquid surface inclination angle”, and the area of the part immersed in the dielectric liquid in each of the one side electrode part and the other side electrode of each electrode plate is referred to as the “immersion part area”. For each of the one side electrode part and the other side electrode part of each electrode plate, the amount of change in the immersion portion area per unit change amount of the liquid level inclination angle within the predetermined detection range of the inclination angle of the object to be detected Can be constant. Thereby, the relationship between the liquid surface inclination angle and the immersion portion area is linear for each of the one-side electrode portion and the other-side electrode portion of each electrode plate. Therefore, it is possible to easily and accurately detect the inclination of the detection object based on the change in impedance in the first to fourth detection units according to the inclination of the liquid level of the dielectric liquid.

また、各電極板を、略楕円形の外形を有すると共に中心部に穴を有する板体の中間部を曲げることにより形成する構成としたから、被検出物の傾斜角の検出範囲を大きく設定しても（例えばこの検出範囲を−９０度〜＋９０度に設定しても）、各電極板の高さ寸法を小さくすることができ、傾斜センサ装置の小型化を図ることができる。 In addition, since each electrode plate is formed by bending an intermediate portion of a plate body having a substantially elliptical outer shape and having a hole in the center portion, the detection range of the inclination angle of the object to be detected is set large. However (for example, even if this detection range is set to -90 degrees to +90 degrees), the height dimension of each electrode plate can be reduced, and the inclination sensor device can be downsized.

また、各電極板の板体の中心部に穴を設けることにより、被検出物が傾斜したときの電極収容室内における誘電性液体の動きを良くすることができる。これにより、被検出物の傾斜に応じて誘電性液体の液面を迅速に傾斜させることができ、被検出物の傾斜の検出精度および検出の応答性を向上させることができる。 In addition, by providing a hole in the center of the plate of each electrode plate, the movement of the dielectric liquid in the electrode housing chamber when the object to be detected is inclined can be improved. As a result, the liquid level of the dielectric liquid can be quickly tilted according to the tilt of the object to be detected, and the tilt detection accuracy and detection responsiveness of the object to be detected can be improved.

上記課題を解決するために、本発明の第２の傾斜センサ装置は、被検出物に取り付けられ、前記被検出物の傾斜を検出する傾斜センサ装置であって、電極収容室を有する筐体と、前記電極収容室内に封入され、前記電極収容室の容積の全部を満たさない量の誘電性液体と、前記電極収容室内に設けられ、第１の検出部、第２の検出部、第３の検出部および第４の検出部を形成する検出構造体とを備え、前記検出構造体は、導電材料からなる板体の中間部を曲げることにより形成され、前記板体の中間部よりも一側が一側電極部となり、前記板体の中間部よりも他側が他側電極部となった４枚の電極板、すなわち、第１の電極板、第２の電極板、第３の電極板および第４の電極板を備え、前記４枚の電極板は、前記各電極板の一側電極部の一部および他側電極部の一部が前記誘電性液体に浸漬し、前記第１の電極板の他側電極部が前記第２の電極板の一側電極部と所定の隙間を介して対向し、前記第２の電極板の他側電極部が前記第３の電極板の一側電極部と所定の隙間を介して対向し、前記第３の電極板の他側電極部が前記第４の電極板の一側電極部と所定の隙間を介して対向し、前記第４の電極板の他側電極部が前記第１の電極板の一側電極部と所定の隙間を介して対向するように配置され、前記第１の電極板の他側電極部、前記第２の電極板の一側電極部、および前記第１の電極板の他側電極部と前記第２の電極板の一側電極部との間に介在する前記誘電性液体により前記第１の検出部が形成され、前記第２の電極板の他側電極部、前記第３の電極板の一側電極部、および前記第２の電極板の他側電極部と前記第３の電極板の一側電極部との間に介在する前記誘電性液体により前記第２の検出部が形成され、前記第３の電極板の他側電極部、前記第４の電極板の一側電極部、および前記第３の電極板の他側電極部と前記第４の電極板の一側電極部との間に介在する前記誘電性液体により前記第３の検出部が形成され、前記第４の電極板の他側電極部、前記第１の電極板の一側電極部、および前記第４の電極板の他側電極部と前記第１の電極板の一側電極部との間に介在する前記誘電性液体により前記第４の検出部が形成され、前記誘電性液体の液面の傾斜に応じた前記第１ないし第４の検出部におけるインピーダンスの変化により前記被検出物の傾斜を検出し、前記誘電性液体の液面の傾斜角を「液面傾斜角」とし、前記各電極板の一側電極部および他側電極部のそれぞれにおいて前記誘電性液体に浸漬している部分の面積を「浸漬部分面積」とすると、前記被検出物の傾斜角の予定された検出範囲内において、液面傾斜角の単位変化量当たりの浸漬部分面積の変化量が一定となるように前記各電極板の一側電極部の形状および他側電極部の形状がそれぞれ定められていることを特徴とする。 In order to solve the above-described problem, a second tilt sensor device of the present invention is a tilt sensor device that is attached to a detected object and detects the tilt of the detected object, and includes a housing having an electrode housing chamber; A dielectric liquid that is enclosed in the electrode housing chamber and does not fill the entire volume of the electrode housing chamber, and is provided in the electrode housing chamber, and includes a first detector, a second detector, and a third detector A detection structure that forms a detection unit and a fourth detection unit, and the detection structure is formed by bending an intermediate part of a plate made of a conductive material, and one side of the intermediate part of the plate is Four electrode plates that are one-side electrode portions and the other side is the other-side electrode portion from the intermediate portion of the plate body, that is, a first electrode plate, a second electrode plate, a third electrode plate, and a second electrode plate 4 electrode plates, the four electrode plates being a part of one side electrode portion of each electrode plate And a part of the other electrode part is immersed in the dielectric liquid, the other electrode part of the first electrode plate is opposed to the one electrode part of the second electrode plate with a predetermined gap, The other electrode portion of the second electrode plate faces the one electrode portion of the third electrode plate with a predetermined gap, and the other electrode portion of the third electrode plate is the fourth electrode. The electrode is opposed to one side electrode portion of the plate with a predetermined gap, and the other side electrode portion of the fourth electrode plate is opposed to the one side electrode portion of the first electrode plate with a predetermined gap. The other electrode portion of the first electrode plate, the one electrode portion of the second electrode plate, and the one electrode of the second electrode plate and the other electrode portion of the first electrode plate. The first detection unit is formed by the dielectric liquid interposed between the first electrode unit, the other electrode unit of the second electrode plate, the one electrode unit of the third electrode plate, and the The second detection portion is formed by the dielectric liquid interposed between the other electrode portion of the second electrode plate and the one electrode portion of the third electrode plate. The dielectric liquid interposed between the side electrode part, the one side electrode part of the fourth electrode plate, and the other side electrode part of the third electrode plate and the one side electrode part of the fourth electrode plate The third detection portion is formed by the other electrode portion of the fourth electrode plate, the one electrode portion of the first electrode plate, the other electrode portion of the fourth electrode plate, and the first electrode portion. The fourth detection part is formed by the dielectric liquid interposed between one electrode part of one electrode plate, and the first to fourth detections according to the inclination of the liquid surface of the dielectric liquid. The inclination of the object to be detected is detected by a change in impedance at the section, and the inclination angle of the liquid surface of the dielectric liquid is defined as a “liquid surface inclination angle”. When the area of the part immersed in the dielectric liquid in each of the one side electrode part and the other side electrode part of each electrode plate is defined as “immersion part area”, the inclination angle of the object to be detected is scheduled to be detected. Within the range, the shape of the one-side electrode portion and the shape of the other-side electrode portion of each of the electrode plates are determined so that the amount of change in the immersion portion area per unit change amount of the liquid surface inclination angle is constant. It is characterized by that.

本発明の第２の傾斜センサ装置によれば、各電極板の一側電極部および他側電極部のそれぞれにつき、被検出物の傾斜角の予定された検出範囲内において、液面傾斜角の単位変化量当たりの浸漬部分面積の変化量を一定にすることができる。これにより、各電極板の一側電極部および他側電極部のそれぞれにつき、液面傾斜角と浸漬部分面積との関係がリニアとなる。したがって、誘電性液体の液面の傾斜に応じた第１ないし第４の検出部におけるインピーダンスの変化に基づいて、被検出物の傾斜を容易かつ高精度に検出することが可能になる。 According to the second inclination sensor device of the present invention, the liquid surface inclination angle is within the predetermined detection range of the inclination angle of the detected object for each of the one side electrode portion and the other side electrode portion of each electrode plate. The amount of change of the immersion portion area per unit change amount can be made constant. Thereby, the relationship between the liquid surface inclination angle and the immersion portion area is linear for each of the one-side electrode portion and the other-side electrode portion of each electrode plate. Therefore, it is possible to easily and accurately detect the inclination of the detection object based on the change in impedance in the first to fourth detection units according to the inclination of the liquid level of the dielectric liquid.

上記課題を解決するために、本発明の第３の傾斜センサ装置は、上述した本発明の第２の傾斜センサ装置において、前記各電極板は、略楕円形の外形を有すると共に中心部に穴を有する板体の中間部を曲げることにより形成されていることを特徴とする。 In order to solve the above problems, a third tilt sensor device according to the present invention is the above-described second tilt sensor device according to the present invention, wherein each of the electrode plates has a substantially elliptical outer shape and has a hole in the center. It is formed by bending the intermediate part of the board which has this.

本発明の第３の傾斜センサ装置によれば、各電極板を、略楕円形の外形を有すると共に中心部に穴を有する板体の中間部を曲げることにより形成する構成としたから、被検出物の傾斜角の検出範囲を大きく設定しても（例えばこの検出範囲を−９０度〜＋９０度に設定しても）、各電極板の高さ寸法を小さくすることができ、傾斜センサ装置の小型化を図ることができる。 According to the third inclination sensor device of the present invention, each electrode plate is formed by bending an intermediate portion of a plate body having a substantially elliptical outer shape and having a hole in the center portion. Even if the detection range of the inclination angle of an object is set large (for example, even if this detection range is set to -90 degrees to +90 degrees), the height dimension of each electrode plate can be reduced. Miniaturization can be achieved.

上記課題を解決するために、本発明の第４の傾斜センサ装置は、上述した本発明の第１または第３の傾斜センサ装置において、前記各電極板において、前記板体に形成された前記穴は略楕円形であり、前記板体の外形を形取る楕円の中心と前記穴を形取る楕円の中心とが一致し、前記板体の外形を形取る楕円の短軸の２分の１の長さと前記穴を形取る楕円の短軸の２分の１の長さとの差が、前記板体の外形を形取る楕円の長軸の２分の１の長さと前記穴を形取る楕円の長軸の２分の１の長さとの差よりも大きいことを特徴とする。 In order to solve the above-described problem, the fourth tilt sensor device of the present invention is the above-described first or third tilt sensor device of the present invention, wherein the hole formed in the plate body in each of the electrode plates. Is substantially elliptical, and the center of the ellipse that forms the outer shape of the plate coincides with the center of the ellipse that forms the hole, and is half the minor axis of the ellipse that forms the outer shape of the plate. The difference between the length and the half length of the minor axis of the ellipse that forms the hole is the difference between the length of the ellipse that forms the outer shape of the plate and the length of the ellipse that forms the hole. It is characterized in that it is larger than the difference with the half length of the long axis.

本発明の第４の傾斜センサ装置によれば、各電極板の一側電極部および他側電極部のそれぞれにつき、液面傾斜角と浸漬部分面積との関係をリニアにすることができ、誘電性液体の液面の傾斜に応じた第１ないし第４の検出部におけるインピーダンスの変化に基づいて被検出物の傾斜を容易かつ高精度に検出することが可能になる。また、各電極板の高さ寸法を小さくして傾斜センサ装置の小型化を図ることができる。 According to the fourth tilt sensor device of the present invention, the relationship between the liquid surface tilt angle and the immersion portion area can be made linear for each of the one side electrode portion and the other side electrode portion of each electrode plate. It is possible to easily and accurately detect the inclination of the detection object based on the change in impedance in the first to fourth detection units according to the inclination of the liquid level of the ionic liquid. In addition, the height of each electrode plate can be reduced to reduce the size of the tilt sensor device.

上記課題を解決するために、本発明の第５の傾斜センサ装置は、上述した本発明の第２の傾斜センサ装置において、前記各電極板は、略真円形の外形を有する板体の中間部を曲げることにより形成されていることを特徴とする。 In order to solve the above problems, a fifth tilt sensor device of the present invention is the above-described second tilt sensor device of the present invention, wherein each of the electrode plates has a substantially circular outer shape. It is formed by bending.

本発明の第５の傾斜センサ装置によれば、被検出物の傾斜を容易かつ高精度に検出することが可能になる。また、四角形の外形を有する短冊状の電極を備えた従来の傾斜センサ装置と比較して、各電極板の高さ寸法を小さくして傾斜センサ装置の小型化を図ることができる。 According to the fifth tilt sensor device of the present invention, it is possible to easily and highly accurately detect the tilt of the object to be detected. In addition, the height of each electrode plate can be reduced to reduce the size of the tilt sensor device as compared with a conventional tilt sensor device having a strip-shaped electrode having a rectangular outer shape.

本発明によれば、被検出物の傾斜を簡単な演算により高精度に求めることができる。また、被検出物の傾斜の検出精度を低下させることなく、高さ寸法を小さくして小型化を図ることができる。 According to the present invention, the inclination of the detected object can be obtained with high accuracy by a simple calculation. In addition, the height can be reduced and the size can be reduced without reducing the detection accuracy of the inclination of the object to be detected.

本発明の実施形態による傾斜センサ装置を示すブロック図である。It is a block diagram which shows the inclination sensor apparatus by embodiment of this invention. 本発明の実施形態による傾斜センサ装置におけるセンサユニットを示す平面図である。It is a top view which shows the sensor unit in the inclination sensor apparatus by embodiment of this invention. 図２中の矢示ＩＩＩ−ＩＩＩ方向から見たセンサユニットを示す断面図である。It is sectional drawing which shows the sensor unit seen from the arrow III-III direction in FIG. 本発明の実施形態による傾斜センサ装置のセンサユニットにおける検出構造体を示す平面図である。It is a top view which shows the detection structure in the sensor unit of the inclination sensor apparatus by embodiment of this invention. 本発明の実施形態による傾斜センサ装置の検出構造体における電極板（曲げる前の状態）を示す外観図である。It is an external view which shows the electrode plate (state before bending) in the detection structure of the inclination sensor apparatus by embodiment of this invention. 本発明の実施形態による傾斜センサ装置の検出構造体における電極板（曲げた後の状態）を示す外観図である。It is an external view which shows the electrode plate (state after bending) in the detection structure of the inclination sensor apparatus by embodiment of this invention. 本発明の実施形態による傾斜センサ装置の検出構造体において、４枚の電極板の配置を示す説明図である。It is explanatory drawing which shows arrangement | positioning of four electrode plates in the detection structure of the inclination sensor apparatus by embodiment of this invention. 本発明の実施形態による傾斜センサ装置において、液面の傾斜角の変化と電極板の浸漬部分の面積の変化との関係を示す説明図である。In the inclination sensor apparatus by embodiment of this invention, it is explanatory drawing which shows the relationship between the change of the inclination angle of a liquid level, and the change of the area of the immersion part of an electrode plate. 本発明の実施形態による傾斜センサ装置の電気的構成を示す回路図である。It is a circuit diagram which shows the electric constitution of the inclination sensor apparatus by embodiment of this invention. 本発明の実施形態による傾斜センサ装置における駆動制御ユニットの電気的構成を示すブロック図である。It is a block diagram which shows the electric constitution of the drive control unit in the inclination sensor apparatus by embodiment of this invention. 本発明の実施形態による傾斜センサ装置における測定処理ユニットの電気的構成を示すブロック図である。It is a block diagram which shows the electric constitution of the measurement process unit in the inclination sensor apparatus by embodiment of this invention. 本発明の実施形態による傾斜センサ装置における検出構造体の電極板の形状として採用することが可能なものを示す説明図である。It is explanatory drawing which shows what can be employ | adopted as a shape of the electrode plate of the detection structure in the inclination sensor apparatus by embodiment of this invention. 従来技術による傾斜センサ装置において、液面の傾斜角の変化と電極板の浸漬部分の面積の変化との関係を示す説明図である。In the inclination sensor apparatus by a prior art, it is explanatory drawing which shows the relationship between the change of the inclination angle of a liquid level, and the change of the area of the immersion part of an electrode plate.

以下、本発明の実施の形態について図面を参照しながら説明する。図１は、本発明の実施形態による傾斜センサ装置を示している。図１において、本発明の実施形態による傾斜センサ装置１は、水平面に対する被検出物の傾斜を検出、測定する装置である。傾斜センサ装置１は、水平面に対して平行に伸びる軸Ｘ（図２参照）を基準とする傾斜、および水平面に対して平行に伸び、軸Ｘと直交する軸Ｙ（図２参照）を基準とする傾斜を検出、測定することができる。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a tilt sensor device according to an embodiment of the present invention. In FIG. 1, a tilt sensor device 1 according to an embodiment of the present invention is a device that detects and measures the tilt of an object to be detected with respect to a horizontal plane. The tilt sensor apparatus 1 is based on an axis X (see FIG. 2) that extends parallel to the horizontal plane, and an axis Y (see FIG. 2) that extends parallel to the horizontal plane and is orthogonal to the axis X. The inclination to be detected can be detected and measured.

傾斜センサ装置１は、被検出物に取り付けられ、被検出物の傾斜を検出し、被検出物の傾斜に対応する検出信号を出力するセンサユニット１０と、センサユニット１０と電気的に接続され、センサユニット１０に駆動電圧を供給する駆動制御ユニット５０と、センサユニット１０と電気的に接続され、センサユニット１０から出力される検出信号に基づいて被検出物の傾斜角を測定する測定処理ユニット６０とを備えている。 The inclination sensor device 1 is attached to a detection object, detects the inclination of the detection object, and outputs a detection signal corresponding to the inclination of the detection object, and is electrically connected to the sensor unit 10, A drive control unit 50 that supplies a drive voltage to the sensor unit 10, and a measurement processing unit 60 that is electrically connected to the sensor unit 10 and measures the tilt angle of the detection object based on the detection signal output from the sensor unit 10. And.

図２および図３はセンサユニット１０を示している。図２に示すように、センサユニット１０は筐体としてのハウジング１１を備えている。ハウジング１１は、ハウジング本体１２および基台部１３から構成されている。ハウジング本体１２は、その上部が閉塞された円筒状に形成され、基台部１３は円盤状に形成されている。ハウジング本体１２および基台部１３は、いずれも金属等の導電材料により形成してもよいし、樹脂等の絶縁材料により形成してもよい。図３に示すように、基台部１３はハウジング本体１２の下部に取り付けられ、ハウジング本体１２の下部を閉塞している。ハウジング本体１２の下端面と基台部１３の上面とは相互に密着されており、これにより、ハウジング本体１２内には密閉空間である電極収容室１４が形成されている。 2 and 3 show the sensor unit 10. As shown in FIG. 2, the sensor unit 10 includes a housing 11 as a housing. The housing 11 includes a housing main body 12 and a base part 13. The housing main body 12 is formed in a cylindrical shape whose upper portion is closed, and the base portion 13 is formed in a disk shape. The housing body 12 and the base part 13 may both be formed of a conductive material such as metal, or may be formed of an insulating material such as resin. As shown in FIG. 3, the base part 13 is attached to the lower part of the housing body 12 and closes the lower part of the housing body 12. The lower end surface of the housing body 12 and the upper surface of the base portion 13 are in close contact with each other, whereby an electrode housing chamber 14 that is a sealed space is formed in the housing body 12.

電極収容室１４内には、図３に示すように、誘電性液体１５およびガス１６が封入されている。誘電性液体１５とガス１６とは誘電率が相互に異なる。誘電性液体１５としては、例えばフッ素不活性液体、アルコール等を用いることができる。ガス１６には、例えばアルゴンガス、窒素ガスなどの不活性ガスを用いることが好ましい。誘電性液体１５の量は、電極収容室１４の容積の全部を満たさない量に設定されている。センサユニット１０の姿勢が水平であるときには、誘電性液体１５の液面１５Ａは図３に示すように水平面と一致する。さらに、電極収容室１４内には検出構造体１７が設けられている。 As shown in FIG. 3, a dielectric liquid 15 and a gas 16 are sealed in the electrode storage chamber 14. The dielectric liquid 15 and the gas 16 have different dielectric constants. As the dielectric liquid 15, for example, a fluorine inert liquid, alcohol or the like can be used. As the gas 16, for example, an inert gas such as argon gas or nitrogen gas is preferably used. The amount of the dielectric liquid 15 is set to an amount that does not fill the entire volume of the electrode housing chamber 14. When the posture of the sensor unit 10 is horizontal, the liquid level 15A of the dielectric liquid 15 coincides with the horizontal plane as shown in FIG. Further, a detection structure 17 is provided in the electrode housing chamber 14.

図４は電極収容室１４内に設けられた検出構造体１７を示している。図４に示すように、検出構造体１７は、基板１８と、４枚の電極板２１〜２４とを備えている。基板１８は、絶縁材料により形成され、電極収容室１４の底側に配置され、センサユニット１０の姿勢が水平であるときには誘電性液体１５に完全に浸漬している。各電極板２１〜２４は基板１８の上面に設けられている。また、基板１８の周縁部には、合計１２本のリード電極４１Ａ〜４１Ｄ、４２Ａ〜４２Ｄ、４３Ａ〜４３Ｄおよび４４Ａ〜４４Ｄが設けられており、基板１８の裏面には、プリアンプ回路部４５〜４８が設けられている。 FIG. 4 shows a detection structure 17 provided in the electrode housing chamber 14. As shown in FIG. 4, the detection structure 17 includes a substrate 18 and four electrode plates 21 to 24. The substrate 18 is formed of an insulating material, is disposed on the bottom side of the electrode housing chamber 14, and is completely immersed in the dielectric liquid 15 when the position of the sensor unit 10 is horizontal. Each of the electrode plates 21 to 24 is provided on the upper surface of the substrate 18. In addition, a total of 12 lead electrodes 41A to 41D, 42A to 42D, 43A to 43D, and 44A to 44D are provided on the peripheral portion of the substrate 18, and the preamplifier circuit portions 45 to 48 are provided on the back surface of the substrate 18. Is provided.

図５および図６は電極板２１を示している。電極板２１は後述するように板体の中間部を曲げることにより形成されるが、図５に示す電極板２１は曲げる前の状態であり、図６に示す電極板２１は曲げた後の状態である。図７は４枚の電極板２１〜２４の配置を示し、図８は液面の傾斜角の変化と電極板２１の浸漬部分の面積の変化との関係を模式的に示している。 5 and 6 show the electrode plate 21. The electrode plate 21 is formed by bending an intermediate portion of the plate body as will be described later, but the electrode plate 21 shown in FIG. 5 is in a state before bending, and the electrode plate 21 shown in FIG. 6 is in a state after bending. It is. 7 shows the arrangement of the four electrode plates 21 to 24, and FIG. 8 schematically shows the relationship between the change in the tilt angle of the liquid surface and the change in the area of the immersed portion of the electrode plate 21.

図５において、電極板２１は、金属等の導電材料からなる板体２５から構成されている。板体２５は外形が略楕円形であり、中心部に略楕円形の穴２６が形成されている。また、板体２５の一側端部（図５中右側の端部）および他側端部（図５中左側の端部）には、板体２５と同一の導電材料からなる一対の支持部２７が板体２５と一体的に設けられている。 In FIG. 5, the electrode plate 21 is composed of a plate body 25 made of a conductive material such as metal. The outer shape of the plate body 25 is substantially elliptical, and a substantially elliptical hole 26 is formed at the center. Further, a pair of support portions made of the same conductive material as that of the plate body 25 are provided at one end (the right end in FIG. 5) and the other end (the left end in FIG. 5) of the plate 25. 27 is provided integrally with the plate body 25.

また、電極板２１は、各支持部２７の先端部を図５中の基準線ｒ−ｒに沿うように９０度に曲げ、各支持部２７と板体２５との間を基準線ｓ−ｓに沿うように９０度に曲げ、板体２５の中間部を基準線ｕ−ｕに沿うように９０度に曲げることにより形成される。これらの曲げ加工を行うと、電極板２１の形状は図６に示す形状となる。また、上述した一対の支持部２７は、板体２５の一側端部および他側端部から基板１８に向けて下向きの伸び、曲げられた先端部２７Ａが基板１８の上面に取り付けられる。これにより、電極板２１が基板１８の上面に固定される（図３参照）。 Further, the electrode plate 21 is bent at 90 degrees along the reference line rr in FIG. 5 at the tip of each support part 27, and the reference line ss between each support part 27 and the plate body 25 is bent. It is formed by bending 90 degrees so as to be along, and bending the intermediate portion of the plate body 25 so as to be 90 degrees along the reference line uu. When these bending processes are performed, the shape of the electrode plate 21 becomes the shape shown in FIG. The pair of support portions 27 described above extend downward from the one end and the other end of the plate body 25 toward the substrate 18, and the bent tip portions 27 A are attached to the upper surface of the substrate 18. Thereby, the electrode plate 21 is fixed to the upper surface of the board | substrate 18 (refer FIG. 3).

また、板体２５のうち、中間部（基準線ｕ−ｕ）よりも一側（図５中右側）が一側電極部２１Ａとして機能し、中間部よりも他側（図５中左側）が他側電極部２１Ｂとして機能する。 Further, in the plate body 25, one side (right side in FIG. 5) from the intermediate part (reference line uu) functions as the one-side electrode part 21A, and the other side (left side in FIG. 5) from the intermediate part. It functions as the other side electrode part 21B.

また、電極板２２、２３、２４もそれぞれ電極板２１と同様に構成されている。すなわち、図７に示すように、電極板２２において、板体２５のうち、中間部よりも一側が一側電極部２２Ａとして機能し、中間部よりも他側が他側電極部２２Ｂとして機能する。また、電極板２３において、板体２５のうち、中間部よりも一側が一側電極部２３Ａとして機能し、中間部よりも他側が他側電極部２３Ｂとして機能する。また、電極板２４において、板体２５のうち、中間部よりも一側が一側電極部２４Ａとして機能し、中間部よりも他側が他側電極部２４Ｂとして機能する。 In addition, the electrode plates 22, 23, and 24 are configured similarly to the electrode plate 21. That is, as shown in FIG. 7, in the electrode plate 22, one side of the plate body 25 from the intermediate portion functions as the one-side electrode portion 22 A, and the other side from the intermediate portion functions as the other-side electrode portion 22 B. Further, in the electrode plate 23, one side of the plate body 25 from the intermediate portion functions as the one-side electrode portion 23A, and the other side from the intermediate portion functions as the other-side electrode portion 23B. Further, in the electrode plate 24, one side of the plate body 25 from the intermediate portion functions as the one-side electrode portion 24A, and the other side from the intermediate portion functions as the other-side electrode portion 24B.

電極板２１〜２４は、図３に示すように、基板１８の上面から上方に向けて垂直に立ち上がるように配置されている。また、一側電極部２１Ａ、２２Ａ、２３Ａ、２４Ａの一部および他側電極部２１Ｂ、２２Ｂ、２３Ｂ、２４Ｂの一部が誘電性液体１５に浸漬している。具体的には、センサユニット１０の姿勢が水平であるときには、一側電極部２１Ａ、２２Ａ、２３Ａ、２４Ａおよび他側電極部２１Ｂ、２２Ｂ、２３Ｂ、２４Ｂのそれぞれにおいて、下半分が誘電性液体１５に浸漬し、上半分が誘電性液体１５の液面１５Ａから出ている。 As shown in FIG. 3, the electrode plates 21 to 24 are disposed so as to rise vertically from the upper surface of the substrate 18. In addition, a part of the one-side electrode portions 21A, 22A, 23A, and 24A and a part of the other-side electrode portions 21B, 22B, 23B, and 24B are immersed in the dielectric liquid 15. Specifically, when the orientation of the sensor unit 10 is horizontal, the lower half of each of the one-side electrode portions 21A, 22A, 23A, 24A and the other-side electrode portions 21B, 22B, 23B, 24B is the dielectric liquid 15 The upper half comes out from the liquid surface 15 A of the dielectric liquid 15.

また、電極板２１〜２４は、基板１８上においてそれぞれ相互に離間し、図７に示すように、電極板２１の他側電極部２１Ｂが電極板２２の一側電極部２２Ａと所定の隙間３５を介して対向し、電極板２２の他側電極部２２Ｂが電極板２３の一側電極部２３Ａと所定の隙間３６を介して対向し、電極板２３の他側電極部２３Ｂが電極板２４の一側電極部２４Ａと所定の隙間３７を介して対向し、電極板２４の他側電極部２４Ｂが電極板２１の一側電極部２１Ａと所定の隙間３８を介して対向するように配置されている。 Further, the electrode plates 21 to 24 are separated from each other on the substrate 18, and the other electrode portion 21B of the electrode plate 21 and the one electrode portion 22A of the electrode plate 22 are in a predetermined gap 35 as shown in FIG. The other electrode portion 22B of the electrode plate 22 is opposed to the one electrode portion 23A of the electrode plate 23 via a predetermined gap 36, and the other electrode portion 23B of the electrode plate 23 is It is arranged so as to face the one-side electrode part 24A via a predetermined gap 37, and the other-side electrode part 24B of the electrode plate 24 faces the one-side electrode part 21A of the electrode plate 21 via a predetermined gap 38. Yes.

そして、図７に示すように、電極板２１の他側電極部２１Ｂ、電極板２２の一側電極部２２Ａ、および電極板２１の他側電極部２１Ｂと電極板２２の一側電極部２２Ａとの間に介在する誘電性液体１５により検出部３１が形成され、電極板２２の他側電極部２２Ｂ、電極板２３の一側電極部２３Ａ、および電極板２２の他側電極部２２Ｂと電極板２３の一側電極部２３Ａとの間に介在する誘電性液体１５により検出部３２が形成されている。また、電極板２３の他側電極部２３Ｂ、電極板２４の一側電極部２４Ａ、および電極板２３の他側電極部２３Ｂと電極板２４の一側電極部２４Ａとの間に介在する誘電性液体１５により検出部３３が形成され、電極板２４の他側電極部２４Ｂ、電極板２１の一側電極部２１Ａ、および電極板２４の他側電極部２４Ｂと電極板２１の一側電極部２１Ａとの間に介在する誘電性液体１５により検出部３４が形成されている。 Then, as shown in FIG. 7, the other electrode portion 21 B of the electrode plate 21, the one electrode portion 22 A of the electrode plate 22, the other electrode portion 21 B of the electrode plate 21, and the one electrode portion 22 A of the electrode plate 22 The detection unit 31 is formed by the dielectric liquid 15 interposed between the electrode plate 22, the other electrode portion 22B of the electrode plate 22, the one electrode portion 23A of the electrode plate 23, and the electrode plate 22 and the other electrode portion 22B of the electrode plate 22. The detection part 32 is formed of the dielectric liquid 15 interposed between the one side electrode part 23 A. Further, the other electrode portion 23B of the electrode plate 23, the one electrode portion 24A of the electrode plate 24, and the dielectric interposed between the other electrode portion 23B of the electrode plate 23 and the one electrode portion 24A of the electrode plate 24. The detection part 33 is formed by the liquid 15, the other electrode part 24 B of the electrode plate 24, the one electrode part 21 A of the electrode plate 21, and the other electrode part 24 B of the electrode plate 24 and the one electrode part 21 A of the electrode plate 21. The detection part 34 is formed by the dielectric liquid 15 interposed between the two.

被検出物の傾斜に応じて誘電性液体１５の液面が傾斜すると、液面の傾斜角の変化に対応して一側電極部２１Ａ、２２Ａ、２３Ａ、２４Ａおよび他側電極部２１Ｂ、２２Ｂ、２３Ｂ、２４Ｂのそれぞれにおいて誘電性液体１５に浸漬した部分の面積が変化し、この結果、検出部３１〜３４のそれぞれにおいてインピーダンス（静電容量）が変化する。これらインピーダンスの値に基づいて被検出物の傾斜角が測定処理ユニット６０により測定される。 When the liquid level of the dielectric liquid 15 is tilted according to the tilt of the object to be detected, the one side electrode portions 21A, 22A, 23A, 24A and the other side electrode portions 21B, 22B, The area of the portion immersed in the dielectric liquid 15 in each of 23B and 24B changes, and as a result, the impedance (capacitance) changes in each of the detection units 31 to 34. Based on these impedance values, the inclination angle of the object to be detected is measured by the measurement processing unit 60.

ここで、センサユニット１０は、被検出物の傾斜角と各検出部３１〜３４のインピーダンスとの関係をリニア（線形）にする構成を有している。すなわち、誘電性液体１５の液面１５Ａの傾斜角を「液面傾斜角」とし、各電極板２１〜２４の一側電極部２１Ａ、２２Ａ、２３Ａ、２４Ａおよび他側電極部２１Ｂ、２２Ｂ、２３Ｂ、２４Ｂのそれぞれにおいて誘電性液体１５に浸漬している部分の面積を「浸漬部分面積」とすると、一側電極部２１Ａ、２２Ａ、２３Ａ、２４Ａおよび他側電極部２１Ｂ、２２Ｂ、２３Ｂ、２４Ｂのそれぞれ形状は、被検出物の傾斜角の予定された検出範囲（例えば−９０度〜＋９０度）内において、液面傾斜角の単位変化量当たりの浸漬部分面積の変化量が一定となるという条件を充足するように定められている。 Here, the sensor unit 10 has a configuration in which the relationship between the inclination angle of the detection object and the impedance of each of the detection units 31 to 34 is linear. That is, the inclination angle of the liquid surface 15A of the dielectric liquid 15 is defined as “liquid surface inclination angle”, and the one side electrode portions 21A, 22A, 23A, 24A and the other side electrode portions 21B, 22B, 23B of the respective electrode plates 21-24. 24B, the area of the part immersed in the dielectric liquid 15 is “immersion part area”. The one side electrode parts 21A, 22A, 23A, 24A and the other side electrode parts 21B, 22B, 23B, 24B Each shape has a condition that the amount of change in the immersion portion area per unit change amount of the liquid surface inclination angle is constant within a predetermined detection range (for example, −90 ° to + 90 °) of the inclination angle of the object to be detected. It is stipulated to satisfy.

本実施形態では、各一側電極部２１Ａ、２２Ａ、２３Ａ、２４Ａの形状および各他側電極部２１Ｂ、２２Ｂ、２３Ｂ、２４Ｂの形状がこれらの条件を充足するように定めるために、各電極板２１〜２４の板体２５の形状を具体的に次のように定めている。すなわち、図５に示すように、板体２５は、その外形が略楕円形であり、中心部に略楕円形の穴２６が形成され、板体２５の外形を形取る楕円の中心Ｐと穴２６を形取る楕円の中心Ｑとが一致し、板体２５の外形を形取る楕円の短軸の２分の１の長さと穴２６を形取る楕円の短軸の２分の１の長さとの差Ｄ１が、板体２５の外形を形取る楕円の長軸の２分の１の長さと穴２６を形取る楕円の長軸の２分の１の長さとの差Ｄ２よりも大きい。 In the present embodiment, in order to determine that the shape of each one side electrode portion 21A, 22A, 23A, 24A and the shape of each other side electrode portion 21B, 22B, 23B, 24B satisfy these conditions, each electrode plate Specifically, the shapes of the plate bodies 25 to 24 are determined as follows. That is, as shown in FIG. 5, the outer shape of the plate body 25 is substantially elliptical, and a substantially elliptical hole 26 is formed at the center, and the center P of the ellipse and the hole forming the outer shape of the plate body 25 are formed. The center Q of the ellipse that forms the shape 26, and the half length of the minor axis of the ellipse that forms the outer shape of the plate 25 and the length of the half of the minor axis of the ellipse that forms the hole 26 The difference D1 is larger than the difference D2 between the half length of the major axis of the ellipse that forms the outer shape of the plate 25 and the length of one half of the major axis of the ellipse that forms the hole 26.

また、板体２５の一側端部（図５中右側の端部）においては、支持部２７と板体２５との接続部分が一側方向に突出した形状となっているため、これに対応して穴２６の一側端部も一側方向に伸びるように拡がっている。これにより、図６に示すように曲げ加工が施された後において、板体２５の当該一側端部における液面傾斜角の単位変化量当たりの浸漬部分面積の変化量が、板体２５の他の部分における液面傾斜角の単位変化量当たりの浸漬部分面積の変化量と等しい。板体２５の他側端部（図５中左側の端部）についても同様である。 In addition, at one end portion of the plate body 25 (the right end portion in FIG. 5), the connection portion between the support portion 27 and the plate body 25 has a shape protruding in one side direction, and this is the case. And the one side edge part of the hole 26 is also expanded so that it may extend in one side direction. Thus, after the bending process is performed as shown in FIG. 6, the change amount of the immersion portion area per unit change amount of the liquid surface inclination angle at the one side end portion of the plate body 25 is It is equal to the amount of change in the immersion portion area per unit amount of change in the liquid surface inclination angle in the other portions. The same applies to the other end of the plate 25 (the left end in FIG. 5).

また、被検出物の傾斜角の予定された前記検出範囲内において、液面傾斜角の単位変化量当たりの浸漬部分面積の変化量が一定となるという条件を充足させるために、図３に示すように、センサユニット１０の姿勢が水平であるときに、誘電性液体１５の液面１５Ａが、各電極板２１〜２４の板体２５の長軸と一致するように、電極収容室１４内における各電極板２１〜２４の上下方向における位置および誘電性液体１５の量が定められ、かつ、図７に示すように電極板２１〜２４に囲まれた領域の中心Ｏが図２に示すように電極収容室１４の中心（軸Ｘと軸Ｙとの交点）と一致するように電極収容室１４内における電極板２１〜２４の前後左右方向の位置が定められている。 In order to satisfy the condition that the amount of change in the immersion portion area per unit change amount of the liquid surface inclination angle is constant within the predetermined detection range of the inclination angle of the object to be detected, as shown in FIG. Thus, when the orientation of the sensor unit 10 is horizontal, the liquid surface 15A of the dielectric liquid 15 is in the electrode housing chamber 14 so as to coincide with the long axis of the plate body 25 of each electrode plate 21-24. As shown in FIG. 2, the vertical positions of the electrode plates 21 to 24 and the amount of the dielectric liquid 15 are determined, and the center O of the region surrounded by the electrode plates 21 to 24 as shown in FIG. The positions of the electrode plates 21 to 24 in the front-rear and left-right directions in the electrode storage chamber 14 are determined so as to coincide with the center of the electrode storage chamber 14 (intersection of the axis X and the axis Y).

各電極板２１〜２４の板体２５の形状、各電極板２１〜２４の位置、および誘電性液体１５の量をこのように定めることにより、一側電極部２１Ａ、２２Ａ、２３Ａ、２４Ａおよび他側電極部２１Ｂ、２２Ｂ、２３Ｂ、２４Ｂのそれぞれにおいて、液面傾斜角の単位変化量当たりの浸漬部分面積の変化量が一定となる。例えば、図８に示すように、液面傾斜角が水平面に対しておよそ０度に近い当たりで単位量変化したときの浸漬部分面積の変化量Ｒ１と、液面傾斜角が水平面に対しておよそ４５度に近い当たりで単位量変化したときの浸漬部分面積の変化量Ｒ２とが等しくなる。この結果、被検出物の傾斜角と各検出部３１〜３４のインピーダンスとの関係がリニアになる。 By determining the shape of the plate body 25 of each electrode plate 21 to 24, the position of each electrode plate 21 to 24, and the amount of the dielectric liquid 15 in this way, the one-side electrode portions 21A, 22A, 23A, 24A and others In each of the side electrode portions 21B, 22B, 23B, and 24B, the amount of change in the immersion portion area per unit amount of change in the liquid surface inclination angle is constant. For example, as shown in FIG. 8, the amount R1 of change in the immersion portion area when the liquid surface inclination angle changes by about 0 degree with respect to the horizontal plane and the liquid surface inclination angle is about the horizontal plane. The amount of change R2 of the immersion portion area when the unit amount is changed in the vicinity of 45 degrees is equal. As a result, the relationship between the inclination angle of the detected object and the impedance of each of the detection units 31 to 34 is linear.

図９はセンサユニット１０の電気的構成を示している。図１０は駆動制御ユニット５０の電気的構成を示し、図１１は測定処理ユニット６０の電気的構成を示している。図９において、プリアンプ回路部４５〜４８は、電極板２１〜２４にそれぞれ電気的に接続され、電極板２１〜２４から得られる検出信号をそれぞれ増幅し、増幅した検出信号をリード電極４１Ｃ、４２Ｃ、４３Ｃ、４４Ｃにそれぞれ出力する。 FIG. 9 shows the electrical configuration of the sensor unit 10. FIG. 10 shows the electrical configuration of the drive control unit 50, and FIG. 11 shows the electrical configuration of the measurement processing unit 60. 9, preamplifier circuit units 45 to 48 are electrically connected to the electrode plates 21 to 24, respectively, amplify the detection signals obtained from the electrode plates 21 to 24, and the amplified detection signals to the lead electrodes 41C and 42C. , 43C and 44C, respectively.

また、図１０において、駆動制御ユニット５０は駆動電圧発生回路５１および電圧印加切換スイッチ５２を備えている。駆動電圧発生回路５１は駆動電圧を発生させる回路である。駆動電圧は、例えば交流電圧に、当該交流電圧の振幅の最高値以上の電圧を有する直流のバイアス電圧を加えたものである。電圧印加切換スイッチ５２は、リード電極４１Ｂ、４３Ｂのそれぞれと駆動電圧発生回路５１との間を接続する状態と、リード電極４２Ｂ、４４Ｂのそれぞれと駆動電圧発生回路５１との間を接続する状態とを切り換えるスイッチである。軸Ｙを基準とした傾斜を測定するときには、電圧印加切換スイッチ５２を切り換え、リード電極４１Ｂ、４３Ｂのそれぞれと駆動電圧発生回路５１との間を接続し、駆動電圧発生回路５１からの駆動電圧をリード電極４１Ｂ、４３Ｂにそれぞれ印加する。一方、軸Ｘを基準とした傾斜を測定するときには、電圧印加切換スイッチ５２を切り換え、リード電極４２Ｂ、４４Ｂのそれぞれと駆動電圧発生回路５１との間を接続し、駆動電圧発生回路５１からの駆動電圧をリード電極４２Ｂ、４４Ｂにそれぞれ印加する。 In FIG. 10, the drive control unit 50 includes a drive voltage generation circuit 51 and a voltage application changeover switch 52. The drive voltage generation circuit 51 is a circuit that generates a drive voltage. The drive voltage is, for example, an AC voltage plus a DC bias voltage having a voltage equal to or higher than the maximum amplitude of the AC voltage. The voltage application changeover switch 52 is connected between the lead electrodes 41B and 43B and the drive voltage generation circuit 51, and is connected between the lead electrodes 42B and 44B and the drive voltage generation circuit 51. It is a switch for switching. When measuring the inclination with reference to the axis Y, the voltage application changeover switch 52 is switched to connect the lead electrodes 41B and 43B to the drive voltage generation circuit 51, and the drive voltage from the drive voltage generation circuit 51 is changed. Application is made to the lead electrodes 41B and 43B, respectively. On the other hand, when measuring the inclination with respect to the axis X, the voltage application changeover switch 52 is switched to connect each of the lead electrodes 42B and 44B to the drive voltage generation circuit 51, and drive from the drive voltage generation circuit 51 is performed. A voltage is applied to the lead electrodes 42B and 44B, respectively.

また、図１１において、測定処理ユニット６０は、測定処理回路６１および検出信号出力切換スイッチ６２を備えている。測定処理回路６１は、検出信号に基づいて被検出物の傾斜を測定するための処理を行う回路である。検出信号出力切換スイッチ６２は、リード電極４１Ｃ、４３Ｃのそれぞれと測定処理回路６１との間を接続する状態と、リード電極４２Ｃ、４４Ｃのそれぞれと測定処理回路６１との間を接続する状態とを切り換えるスイッチである。軸Ｙを基準とした傾斜を測定するときには、検出信号出力切換スイッチ６２を切り換え、リード電極４２Ｃ、４４Ｃのそれぞれと測定処理回路６１との間を接続し、測定処理回路６１により、リード電極４２Ｃから出力される検出信号と、リード電極４４Ｃから出力される検出信号との差を取り、この差を、軸Ｙを基準とした傾斜角を示す値として出力端子６３から出力する。軸Ｘを基準とした傾斜を測定するときには、検出信号出力切換スイッチ６２を切り換え、リード電極４１Ｃ、４３Ｃのそれぞれと測定処理回路６１との間を接続し、測定処理回路６１により、リード電極４１Ｃから出力される検出信号と、リード電極４３Ｃから出力される検出信号との差を取り、この差を、軸Ｘを基準とした傾斜角を示す値として出力端子６３から出力する。 In FIG. 11, the measurement processing unit 60 includes a measurement processing circuit 61 and a detection signal output changeover switch 62. The measurement processing circuit 61 is a circuit that performs processing for measuring the inclination of the detected object based on the detection signal. The detection signal output selector switch 62 has a state in which each of the lead electrodes 41C and 43C is connected to the measurement processing circuit 61, and a state in which each of the lead electrodes 42C and 44C is connected to the measurement processing circuit 61. It is a switch to switch. When measuring the tilt with reference to the axis Y, the detection signal output change-over switch 62 is switched to connect each of the lead electrodes 42C and 44C to the measurement processing circuit 61. The measurement processing circuit 61 causes the lead electrode 42C to be connected to the lead electrode 42C. The difference between the output detection signal and the detection signal output from the lead electrode 44C is taken, and this difference is output from the output terminal 63 as a value indicating the tilt angle with respect to the axis Y. When measuring the inclination with respect to the axis X, the detection signal output change-over switch 62 is switched to connect each of the lead electrodes 41C and 43C to the measurement processing circuit 61. The difference between the output detection signal and the detection signal output from the lead electrode 43C is taken, and this difference is output from the output terminal 63 as a value indicating the tilt angle with respect to the axis X.

また、図４中のリード電極４１Ａ、４２Ａ、４３Ａ、４４Ａは図示しない電源回路にそれぞれ接続され、これにより、電源回路からの電源電圧がプリアンプ回路部４５〜４８に印加される。また、リード電極４１Ｄ、４２Ｄ、４３Ｄ、４４Ｄは接地されている。 Also, the lead electrodes 41A, 42A, 43A, and 44A in FIG. 4 are connected to a power supply circuit (not shown), whereby the power supply voltage from the power supply circuit is applied to the preamplifier circuit sections 45 to 48. The lead electrodes 41D, 42D, 43D, and 44D are grounded.

このような構成を有する傾斜センサ装置１は、次のようにして被検出物の傾斜を検出、測定する。まず、傾斜センサ装置１により被検出物の傾斜を測定するために、図３に示すように、ハウジング本体１２が上になり、基台部１３が下になるようにセンサユニット１０を被検出物に取り付ける。さらに、例えば、被検出物の左右方向における傾斜と前後方向における傾斜とを選択的に測定する場合には、軸Ｙが被検出物の左右方向における傾斜の軸と一致し、かつ軸Ｘが被検出物の前後方向における傾斜の軸と一致するように、センサユニット１０を被検出物に取り付ける。 The inclination sensor device 1 having such a configuration detects and measures the inclination of the detected object as follows. First, in order to measure the inclination of the object to be detected by the inclination sensor device 1, as shown in FIG. 3, the sensor unit 10 is set so that the housing body 12 is on the upper side and the base part 13 is on the lower side. Attach to. Further, for example, when selectively measuring the tilt in the left-right direction and the tilt in the front-rear direction of the detected object, the axis Y coincides with the axis of the tilt in the left-right direction of the detected object, and the axis X The sensor unit 10 is attached to the detected object so as to coincide with the axis of inclination in the front-rear direction of the detected object.

続いて、被検出物の左右方向における傾斜を測定するときには、図示しない操作部または制御部から電圧印加切換スイッチ５２に切換制御信号を送り、電圧印加切換スイッチ５２を切り換え、リード電極４１Ｂ、４３Ｂのそれぞれと駆動電圧発生回路５１との間を接続する。さらに、上記操作部または制御部から検出信号出力切換スイッチ６２に切換制御信号を送り、検出信号出力切換スイッチ６２を切り換え、リード電極４２Ｃ、４４Ｃのそれぞれと測定処理回路６１との間を接続する。続いて、駆動電圧発生回路５１により駆動電圧を発生させ、この駆動電圧をリード電極４１Ｂ、４３Ｂにそれぞれ印加する。この駆動電圧は、リード電極４１Ｂ、４３Ｂを介して電極板２１、２３にそれぞれ印加される。これにより、電極板２２、２４からそれぞれ出力された検出信号がプリアンプ４６、４８によりそれぞれ増幅され、増幅された検出信号がリード電極４２Ｃ、４４Ｃを介して測定処理回路６１に出力される。そして、測定処理回路６１により、２つの検出信号の電圧の差が取られ、この差が、被検出物の左右方向における傾斜角を示す値として出力端子６３から出力される。 Subsequently, when measuring the tilt of the object to be detected in the left-right direction, a switching control signal is sent from the operation unit or control unit (not shown) to the voltage application changeover switch 52, the voltage application changeover switch 52 is changed over, and the lead electrodes 41B, 43B are switched. Each is connected to the drive voltage generation circuit 51. Further, a switching control signal is sent from the operation unit or the control unit to the detection signal output changeover switch 62, and the detection signal output changeover switch 62 is switched to connect between each of the lead electrodes 42C and 44C and the measurement processing circuit 61. Subsequently, a drive voltage is generated by the drive voltage generation circuit 51, and this drive voltage is applied to the lead electrodes 41B and 43B, respectively. This drive voltage is applied to the electrode plates 21 and 23 via the lead electrodes 41B and 43B, respectively. Thereby, the detection signals output from the electrode plates 22 and 24 are amplified by the preamplifiers 46 and 48, respectively, and the amplified detection signals are output to the measurement processing circuit 61 via the lead electrodes 42C and 44C. Then, the measurement processing circuit 61 takes the difference between the voltages of the two detection signals, and this difference is output from the output terminal 63 as a value indicating the tilt angle of the detected object in the left-right direction.

一方、被検出物の前後方向の傾斜を測定するときには、上記操作部または制御部から電圧印加切換スイッチ５２に切換制御信号を送り、電圧印加切換スイッチ５２を切り換え、リード電極４２Ｂ、４４Ｂのそれぞれと駆動電圧発生回路５１との間を接続する。さらに、上記操作部または制御部から検出信号出力切換スイッチ６２に切換制御信号を送り、検出信号出力切換スイッチ６２を切り換え、リード電極４１Ｃ、４３Ｃのそれぞれと測定処理回路６１との間を接続する。続いて、駆動電圧発生回路５１により駆動電圧を発生させ、この駆動電圧をリード電極４２Ｂ、４４Ｂにそれぞれ印加する。この駆動電圧は、リード電極４２Ｂ、４４Ｂを介して電極板２２、２４にそれぞれ印加される。これにより、電極板２１、２３からそれぞれ出力された検出信号がプリアンプ４５、４７によりそれぞれ増幅され、増幅された検出信号がリード電極４１Ｃ、４３Ｃを介して測定処理回路６１に出力される。そして、測定処理回路６１により、２つの検出信号の電圧の差が取られ、この差が、被検出物の前後方向における傾斜角を示す値として出力端子６３から出力される。 On the other hand, when measuring the tilt in the front-rear direction of the object to be detected, a switching control signal is sent from the operation unit or the control unit to the voltage application selector switch 52, the voltage application selector switch 52 is switched, and each of the lead electrodes 42B and 44B is switched. The drive voltage generation circuit 51 is connected. Further, a switching control signal is sent from the operation section or the control section to the detection signal output changeover switch 62, and the detection signal output changeover switch 62 is switched to connect between the lead electrodes 41C and 43C and the measurement processing circuit 61. Subsequently, a drive voltage is generated by the drive voltage generation circuit 51, and this drive voltage is applied to the lead electrodes 42B and 44B, respectively. This drive voltage is applied to the electrode plates 22 and 24 via the lead electrodes 42B and 44B, respectively. Thereby, the detection signals output from the electrode plates 21 and 23 are amplified by the preamplifiers 45 and 47, respectively, and the amplified detection signals are output to the measurement processing circuit 61 via the lead electrodes 41C and 43C. Then, the measurement processing circuit 61 calculates the difference between the voltages of the two detection signals, and this difference is output from the output terminal 63 as a value indicating the tilt angle of the detected object in the front-rear direction.

以上説明したとおり、本発明の実施形態による傾斜センサ装置１によれば、センサユニット１０が、被検出物の傾斜角と各検出部３１〜３４のインピーダンスとの関係をリニアにする構成を有しているので、被検出物の傾斜を容易かつ高精度に検出することが可能になる。 As described above, according to the tilt sensor device 1 according to the embodiment of the present invention, the sensor unit 10 has a configuration in which the relationship between the tilt angle of the detected object and the impedance of each of the detection units 31 to 34 is linear. Therefore, it is possible to easily and accurately detect the inclination of the object to be detected.

また、各電極板２１〜２４を、略楕円形の外形を有すると共に中心部に穴２６を有する板体２５の中間部を曲げることにより形成する構成としたから、被検出物の傾斜角の検出範囲を大きく設定しても（例えば本実施形態のように、この検出範囲を−９０度〜＋９０度に設定しても）、各電極板２１〜２４の高さ寸法を小さくすることができ、傾斜センサ装置１の小型化を図ることができる。 In addition, since each electrode plate 21 to 24 is formed by bending an intermediate portion of a plate body 25 having a substantially elliptical outer shape and having a hole 26 in the center portion, the inclination angle of the object to be detected is detected. Even if the range is set large (for example, even if this detection range is set to −90 degrees to +90 degrees as in the present embodiment), the height dimension of each electrode plate 21 to 24 can be reduced, The inclination sensor device 1 can be downsized.

また、各電極板２１〜２４の板体２５の中心部に穴２６を設けることにより、被検出物が傾斜したときの電極収容室１４内における誘電性液体１５の動きを良くすることができる。これにより、被検出物の傾斜に応じて誘電性液体１５の液面１５Ａを迅速に傾斜させることができ、被検出物の傾斜の検出精度および検出の応答性を向上させることができる。 Further, by providing the hole 26 at the center of the plate body 25 of each of the electrode plates 21 to 24, it is possible to improve the movement of the dielectric liquid 15 in the electrode housing chamber 14 when the object to be detected is inclined. Accordingly, the liquid surface 15A of the dielectric liquid 15 can be quickly tilted according to the tilt of the detected object, and the detection accuracy of the tilt of the detected object and the response of detection can be improved.

なお、上述した実施形態では、図６に示すように、各電極板２１〜２４を、略楕円形の外形を有すると共に中心部に略楕円形の穴を有する板体２５の中間部を曲げることにより形成する例をあげたが、本発明はこれに限らない。例えば、図１２（１）に示すように、各電極板を、略真円形の外形を有する板体７１の中間部を曲げることにより形成してもよい。これにより、液面傾斜角の単位変化量当たりの浸漬部分面積の変化量を一定にすることができ、被検出物の傾斜を容易かつ高精度に検出することが可能になる、また、四角形の外形を有する短冊状の電極（図１３参照）を備えた従来の傾斜センサ装置と比較して、各電極板の高さ寸法を小さくして傾斜センサ装置の小型化を図ることができる。 In the above-described embodiment, as shown in FIG. 6, each electrode plate 21 to 24 is bent at an intermediate portion of a plate body 25 having a substantially elliptical outer shape and a substantially elliptical hole at the center. However, the present invention is not limited to this. For example, as shown in FIG. 12 (1), each electrode plate may be formed by bending an intermediate portion of a plate body 71 having a substantially true circular shape. As a result, the amount of change in the immersion portion area per unit amount of change in the liquid surface inclination angle can be made constant, and the inclination of the object to be detected can be detected easily and with high accuracy. Compared to a conventional tilt sensor device having a strip-shaped electrode (see FIG. 13) having an outer shape, the height of each electrode plate can be reduced to reduce the size of the tilt sensor device.

また、図１２（２）に示すように、各電極板を、略真円形の外形を有すると共に中央部に穴を有する板体７２の中間部を曲げることにより形成してもよい。穴を設けることにより、誘電性液体の動きを良くすることができる。 Further, as shown in FIG. 12 (2), each electrode plate may be formed by bending an intermediate portion of a plate body 72 having a substantially true circular outer shape and having a hole in the central portion. By providing the holes, the movement of the dielectric liquid can be improved.

また、図１２（３）、（４）または（５）に示すように、各電極板を、略菱形の外形を有すると共に中央部に穴を有する板体７３、７４または７５の中間部を曲げることにより形成してもよい。また、図１２（６）に示すように、各電極板を、略四角形の外形を有すると共に中央部に穴を有する板体７６の中間部を曲げることにより形成してもよい。各電極板を図１２（３）〜（６）に示すように形成することによっても、液面傾斜角の単位変化量当たりの浸漬部分面積の変化量を一定にすることができる。 Further, as shown in FIG. 12 (3), (4) or (5), each electrode plate is bent at an intermediate portion of plate bodies 73, 74 or 75 having a substantially rhombus outer shape and a hole in the center portion. May be formed. Further, as shown in FIG. 12 (6), each electrode plate may be formed by bending an intermediate portion of a plate body 76 having a substantially rectangular outer shape and having a hole in the central portion. Also by forming each electrode plate as shown in FIGS. 12 (3) to (6), the amount of change in the immersion portion area per unit amount of change in the liquid surface inclination angle can be made constant.

また、上述した実施形態による傾斜センサ装置１は、被検出物の傾斜の測定だけでなく、被検出物の加速度、被検出物の振動、被検出物の揺動等の測定にも適用することができる。 Further, the tilt sensor device 1 according to the above-described embodiment is applied not only to the measurement of the tilt of the detected object but also to the measurement of the acceleration of the detected object, the vibration of the detected object, the swing of the detected object, and the like. Can do.

また、本発明は、請求の範囲および明細書全体から読み取ることのできる発明の要旨または思想に反しない範囲で適宜変更可能であり、そのような変更を伴う傾斜センサ装置もまた本発明の技術思想に含まれる。 Further, the present invention can be appropriately changed without departing from the spirit or idea of the invention which can be read from the claims and the entire specification, and the tilt sensor device accompanying such a change is also a technical idea of the present invention. include.

１傾斜センサ装置
１０センサユニット
１１ハウジング（筐体）
１４電極収容室
１５誘電性液体
１５Ａ液面
１７検出構造体
２１、２２、２３、２４電極板
２１Ａ、２２Ａ、２３Ａ、２４Ａ一側電極部
２１Ｂ、２２Ｂ、２３Ｂ、２４Ｂ他側電極部
２５、７１、７２、７３、７４、７５、７６板体
２６穴
３１、３２、３３、３４検出部
３５、３６、３７、３８間隙
1 Inclination sensor device 10 Sensor unit 11 Housing (housing)
14 Electrode storage chamber 15 Dielectric liquid 15A Liquid level 17 Detection structure 21, 22, 23, 24 Electrode plate 21A, 22A, 23A, 24A One side electrode part 21B, 22B, 23B, 24B Other side electrode part 25, 71, 72, 73, 74, 75, 76 Plate body 26 Hole 31, 32, 33, 34 Detector 35, 36, 37, 38 Gap

Claims

An inclination sensor device that is attached to an object to be detected and detects an inclination of the object to be detected,
A housing having an electrode housing chamber;
An amount of dielectric liquid enclosed in the electrode storage chamber and not filling the entire volume of the electrode storage chamber;
A detection structure provided in the electrode housing chamber and forming a first detection unit, a second detection unit, a third detection unit, and a fourth detection unit;
The detection structure is formed by bending an intermediate portion of a plate body made of a conductive material and having a substantially elliptical outer shape and having a hole at the center, and one side of the intermediate portion of the plate body is a one-side electrode portion The four electrode plates whose other side is the other side electrode portion than the intermediate portion of the plate body, that is, the first electrode plate, the second electrode plate, the third electrode plate, and the fourth electrode plate With
In the four electrode plates, a part of one side electrode part of each electrode plate and a part of the other side electrode part are immersed in the dielectric liquid, and the other side electrode part of the first electrode plate is The second electrode plate is opposed to the one side electrode portion with a predetermined gap, and the other electrode portion of the second electrode plate is opposed to the one side electrode portion of the third electrode plate with a predetermined gap. The other electrode portion of the third electrode plate faces the one electrode portion of the fourth electrode plate with a predetermined gap, and the other electrode portion of the fourth electrode plate faces the first electrode portion. It is arranged so as to face one side electrode part of one electrode plate via a predetermined gap,
The other side electrode portion of the first electrode plate, the one side electrode portion of the second electrode plate, and the other side electrode portion of the first electrode plate and the one side electrode portion of the second electrode plate The first detection portion is formed by the dielectric liquid interposed therebetween, the other electrode portion of the second electrode plate, the one electrode portion of the third electrode plate, and the second electrode plate The second detection part is formed by the dielectric liquid interposed between the other side electrode part and the one side electrode part of the third electrode plate, and the other side electrode part of the third electrode plate, The third electrode by the one side electrode part of the fourth electrode plate and the dielectric liquid interposed between the other side electrode part of the third electrode plate and the one side electrode part of the fourth electrode plate. The other electrode portion of the fourth electrode plate, the one electrode portion of the first electrode plate, and the other electrode portion of the fourth electrode plate and the first electrode portion. Detector of the fourth by the dielectric liquid which is interposed between the one side electrode portion of the electrode plate is formed,
An inclination sensor device that detects an inclination of the object to be detected by a change in impedance in the first to fourth detection units according to the inclination of the liquid level of the dielectric liquid.

An inclination sensor device that is attached to an object to be detected and detects an inclination of the object to be detected,
A housing having an electrode housing chamber;
An amount of dielectric liquid enclosed in the electrode storage chamber and not filling the entire volume of the electrode storage chamber;
A detection structure provided in the electrode housing chamber and forming a first detection unit, a second detection unit, a third detection unit, and a fourth detection unit;
The detection structure is formed by bending an intermediate portion of a plate made of a conductive material. One side of the plate is a one-side electrode portion, and the other side of the plate is the other side. The four electrode plates that became the electrode portion, that is, the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate,
In the four electrode plates, a part of one side electrode part of each electrode plate and a part of the other side electrode part are immersed in the dielectric liquid, and the other side electrode part of the first electrode plate is The second electrode plate is opposed to the one side electrode portion with a predetermined gap, and the other electrode portion of the second electrode plate is opposed to the one side electrode portion of the third electrode plate with a predetermined gap. The other electrode portion of the third electrode plate faces the one electrode portion of the fourth electrode plate with a predetermined gap, and the other electrode portion of the fourth electrode plate faces the first electrode portion. It is arranged so as to face one side electrode part of one electrode plate via a predetermined gap,
The other side electrode portion of the first electrode plate, the one side electrode portion of the second electrode plate, and the other side electrode portion of the first electrode plate and the one side electrode portion of the second electrode plate The first detection portion is formed by the dielectric liquid interposed therebetween, the other electrode portion of the second electrode plate, the one electrode portion of the third electrode plate, and the second electrode plate The second detection part is formed by the dielectric liquid interposed between the other side electrode part and the one side electrode part of the third electrode plate, and the other side electrode part of the third electrode plate, The third electrode by the one side electrode part of the fourth electrode plate and the dielectric liquid interposed between the other side electrode part of the third electrode plate and the one side electrode part of the fourth electrode plate. The other electrode portion of the fourth electrode plate, the one electrode portion of the first electrode plate, and the other electrode portion of the fourth electrode plate and the first electrode portion. Detector of the fourth by the dielectric liquid which is interposed between the one side electrode portion of the electrode plate is formed,
Detecting the inclination of the object to be detected by a change in impedance in the first to fourth detection units according to the inclination of the liquid level of the dielectric liquid;
The inclination angle of the liquid surface of the dielectric liquid is defined as “liquid surface inclination angle”, and the area of the portion immersed in the dielectric liquid in each of the one-side electrode portion and the other-side electrode portion of each electrode plate is “ `` Immersion partial area '' means that the change amount of the immersion partial area per unit change amount of the liquid surface inclination angle is constant within the predetermined detection range of the inclination angle of the object to be detected. A tilt sensor device, wherein the shape of the one-side electrode portion and the shape of the other-side electrode portion are respectively determined.

3. The tilt sensor device according to claim 2, wherein each of the electrode plates is formed by bending an intermediate portion of a plate body having a substantially elliptical outer shape and having a hole in the center portion.

In each of the electrode plates, the hole formed in the plate body is substantially elliptical, and the center of the ellipse that forms the outer shape of the plate body coincides with the center of the ellipse that forms the hole, and the plate body The difference between the length of one half of the minor axis of the ellipse that forms the outer shape of the ellipse and the length of one half of the minor axis of the ellipse that forms the hole is the major axis of the ellipse that forms the outer shape of the plate 4. The inclination sensor device according to claim 1, wherein the inclination sensor device is larger than a difference between a half length of the ellipse and a half length of a major axis of an ellipse forming the hole.

3. The tilt sensor device according to claim 2, wherein each of the electrode plates is formed by bending an intermediate portion of a plate body having a substantially true circular outer shape.