JP2012088245A - Physical quantity sensor and electronic device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a physical quantity sensor of a small size which has a high Q factor and high detection sensitivity, and an electronic device including such physical quantity sensor.SOLUTION: A physical quantity sensor 1 includes: four vibration portions 51 to 54; four substrate fixed portions 61 to 64 which are located in directions in which each radial direction from a center point O of an assembly including the four vibration portions 51 to 54 forms an angle of 45 degrees with respect to each of an X axis and a Y axis; two-spring mechanisms 711 to 742 which extend, respectively from the substrate fixed portions 61 to 64, to two vibration portions being adjacent to each other around a Z axis; and vibration means 4 which vibrates first vibration portions 51 and 52 in an X direction in phases opposite to each other while vibrating second vibration portions 53 and 54 in a Y direction in phases opposite to each other. Further, the two-spring mechanisms are brought into tuning fork vibration in X and Y planes in response to the vibration of the vibration portions 51 to 54.

Description

  The present invention relates to a physical quantity sensor and an electronic device using the same.

  2. Description of the Related Art In recent years, angular velocity sensors that detect angular velocities are often used for camera shake correction of imaging devices such as digital cameras and attitude control of mobile navigation systems such as vehicles using GPS signals. Further, an angular velocity sensor that can detect angular velocities around three axes orthogonal to each other with one sensor is also known (see, for example, Patent Document 1).

The sensor described in Patent Document 1 includes an annular driving mass, an anchor disposed at the center thereof, an elastic anchor element that connects the driving mass and the anchor, and a substrate 2 on which the anchor is fixed. The angular velocity around each axis is detected in a state where the drive mass is rotationally oscillated.
However, in such a configuration, the vibration of the driving mass is transmitted to the substrate 2 via the elastic anchor element and the anchor, and vibration leakage occurs. When such vibration leakage occurs, the Q value of vibration of the sensor is reduced (that is, energy loss is caused). When the Q value of vibration decreases, a desired vibration amplitude cannot be obtained, and the detection sensitivity of the sensor deteriorates. In addition, in order to obtain a necessary amplitude, a driving device having a high driving capability is required, which increases the size of the sensor.

JP 2007-271611 A

  An object of the present invention is to provide a small physical quantity sensor having a high Q value and high detection sensitivity, and an electronic apparatus including the same.

Such an object is achieved by the present invention described below.
In the physical quantity sensor of the present invention, when two axes orthogonal to each other are a first axis and a second axis, and an axis orthogonal to both the first axis and the second axis is a third axis,
A pair of first mass parts arranged side by side around the third axis and opposed to each other in a direction parallel to the first axis, and a pair of second masses arranged to face each other in a direction parallel to the second axis Four mass parts comprising a mass part;
In a plane including the first axis and the second axis, the radial direction from the center of the assembly of the four mass parts forms a predetermined angle with respect to both the first axis and the second axis. Four fixed parts in the direction,
Two spring mechanisms extending from each of the fixed portions to two adjacent mass portions around the third axis;
The pair of second mass parts is vibrated in a direction parallel to the second axis while the pair of first mass parts are vibrated in mutually opposite phases at a predetermined frequency in a direction parallel to the first axis. Driving means for vibrating in a predetermined opposite phase with each other,
And at least one transducer that is provided in each of the mass parts and converts a displacement amount of a movable part included in each of the mass parts into an electrical signal,
The two spring portions connected to each of the fixed portions vibrate in a tuning fork within the plane according to the predetermined frequency.
Thereby, a small physical quantity sensor having a high Q value and high detection sensitivity can be provided.

In the physical quantity sensor of the present invention, when two axes orthogonal to each other are a first axis and a second axis, and an axis orthogonal to both the first axis and the second axis is a third axis,
A pair of first mass parts arranged side by side around the third axis and opposed to each other in a direction parallel to the first axis, and a pair of second masses arranged to face each other in a direction parallel to the second axis Four mass parts comprising a mass part;
In a plane including the first axis and the second axis, the radial direction from the center of the assembly of the four mass parts forms a predetermined angle with respect to both the first axis and the second axis. Four fixed parts in the direction,
A direction-of-motion conversion means that extends from each of the fixed portions to the two mass portions adjacent to each other around the third axis and converts the direction of motion;
The pair of second mass parts is vibrated in a direction parallel to the second axis while the pair of first mass parts are vibrated in mutually opposite phases at a predetermined frequency in a direction parallel to the first axis. Driving means for vibrating in a predetermined opposite phase with each other,
Each of the mass parts is in the plane and has a rotation axis parallel to the first axis or the second axis and a first movable part capable of rotating around the rotation axis, and in the plane And a second movable part that can be displaced in the direction of the first axis or the second axis, and a transducer,
The transducer has a rotation transducer that converts a displacement amount of the first movable part into an electrical gain signal, and a displacement transducer that converts a displacement amount of the second movable part into an electrical gain signal,
The movement direction converting means vibrates in a tuning fork within the plane according to the predetermined frequency.
Thereby, a small physical quantity sensor having a high Q value and high detection sensitivity can be provided.

In the physical quantity sensor of the present invention, each of the fixed portions has a substrate fixed thereto,
The substrate is preferably composed of a semiconductor substrate, an insulating substrate, or a composite substrate in which a semiconductor layer and an insulating layer are stacked.
This simplifies the device configuration.
In the physical quantity sensor according to the aspect of the invention, each of the four fixed portions may have a radial direction from the center of the assembly of the four mass portions in the plane including the first axis and the second axis. And it is preferable to be located in a direction that makes an angle of 45 degrees with respect to both axes of the second axis.
Thereby, vibration leakage can be prevented or suppressed more effectively.

In the physical quantity sensor according to the aspect of the invention, it is preferable that the four fixed parts are provided at positions that are mirror-symmetric with respect to the first axis and the second axis that intersect with the centers of the four mass parts.
Thereby, vibration leakage can be prevented or suppressed more effectively. Further, the four mass parts can be supported more stably.
In the physical quantity sensor of the present invention, the two spring mechanisms extending from the respective fixed portions are allowed to be deformed in the declination direction around the fixed point, and are restricted from being deformed in the radial direction. preferable.
Thereby, vibration leakage can be prevented or suppressed more effectively.

In the physical quantity sensor of the present invention, it is preferable that the driving means is either electrostatic driving or piezoelectric driving.
Thereby, a 1st mass part and a 2nd mass part can be vibrated efficiently.
In the physical quantity sensor of the present invention, it is preferable that the transducer has a detection capability of any one of an electrostatic type, a piezoelectric type, and a piezoresistive type.
As a result, the physical quantity sensor has an excellent detection capability.

In the physical quantity sensor of the present invention, the transducer has an angular velocity around the first axis, an angular velocity around the second axis, and an angular velocity around a third axis orthogonal to both the first axis and the second axis. It is preferable to detect.
Thereby, it can be used as an angular velocity sensor.
In the physical quantity sensor according to the aspect of the invention, it is preferable that the transducer is electrically canceled with a linear acceleration in a predetermined direction by being paired with another transducer.
Thereby, the detection accuracy of angular velocity improves.

In the physical quantity sensor of the present invention, each of the transducers preferably has a unique resonance frequency.
Thereby, since it can drive in a resonance mode, the detection accuracy of angular velocity improves more.
In the physical quantity sensor according to the aspect of the invention, the two spring mechanisms extending from each of the fixed portions may convert the expansion / contraction motion of the first shaft or the second shaft into a tuning fork vibration centered on the fixed portion. It is preferable that the displacement is limited in the direction of.
Thereby, vibration leakage can be prevented or suppressed more effectively.

In the physical quantity sensor of the present invention, the movement direction conversion means extending from each of the fixed portions may have a tuning fork movement in a plane including the first axis and the second axis of the fixed portion side ends. preferable.
Thereby, vibration leakage can be prevented or suppressed more effectively.
In the physical quantity sensor according to the aspect of the invention, it is preferable that a projected external shape of the aggregate of the pair of first mass parts and the pair of second mass parts is substantially circular.
Thereby, size reduction of an apparatus can be achieved.

In the physical quantity sensor of the present invention, it is preferable that a projected outer shape of the aggregate of the pair of first mass parts and the pair of second mass parts is substantially rectangular.
Thereby, size reduction of an apparatus can be achieved.
In the physical quantity sensor according to the aspect of the invention, it is preferable that the vibration unit is connected to each of the first mass part and the second mass part.
Thereby, size reduction of an apparatus can be achieved.
In the physical quantity sensor according to the aspect of the invention, it is preferable that the transducer is connected to each of the first mass part and the second mass part.
Thereby, size reduction of an apparatus can be achieved.

In the physical quantity sensor of the present invention, when two axes orthogonal to each other are a first axis and a second axis, and an axis orthogonal to both the first axis and the second axis is a third axis,
A pair of first mass parts arranged side by side around the third axis and opposed to each other in a direction parallel to the first axis, and a pair of second masses arranged to face each other in a direction parallel to the second axis Four mass parts comprising a mass part;
When viewed from a plane including the first axis and the second axis, the radial direction from the center of the assembly of the four mass parts is a predetermined angle with respect to both the first axis and the second axis. 4 fixed parts in the direction to make
Two movement direction changing means extending from each of the fixed parts to two adjacent mass parts around the third axis;
The pair of second mass parts is vibrated in a direction parallel to the second axis while the pair of first mass parts are vibrated in mutually opposite phases at a predetermined frequency in a direction parallel to the first axis. Driving means for vibrating in a predetermined opposite phase with each other,
And at least one transducer that is provided in each of the mass parts and converts a displacement amount of a movable part included in each of the mass parts into an electrical signal,
In synchronization with the tuning fork vibration in the plane including the first axis and the second axis, the four mass parts expand and contract with respect to the center of the aggregate. It is characterized by that.
Thereby, a small physical quantity sensor having a high Q value and high detection sensitivity can be provided.
The electronic device of the present invention is characterized by using the physical quantity sensor of the present invention.
Thereby, an electronic device with high reliability can be provided.

1 is a schematic plan view showing a first embodiment of a physical quantity sensor of the present invention. It is a detailed top view of the physical quantity sensor shown in FIG. FIG. 3 is a partially enlarged plan view of the physical quantity sensor shown in FIG. 2. It is a top view for demonstrating the vibration of the beam which the physical quantity sensor shown in FIG. 2 has. It is a top view for demonstrating the structure of the detection means which the physical quantity sensor shown in FIG. 2 has. It is a figure for demonstrating the drive of a physical quantity sensor. It is a figure for demonstrating the drive of a physical quantity sensor. It is a figure for demonstrating the drive of a physical quantity sensor. It is a top view which shows 2nd Embodiment of the physical quantity sensor of this invention. It is a top view which shows 3rd Embodiment of the physical quantity sensor of this invention. It is a top view which shows 4th Embodiment of the physical quantity sensor of this invention. It is a top view which shows 5th Embodiment of the physical quantity sensor of this invention. It is a top view which shows 6th Embodiment of the physical quantity sensor of this invention. It is a top view which shows 7th Embodiment of the physical quantity sensor of this invention. It is a perspective view which shows the structure of an electronic device (notebook type personal computer) provided with the physical quantity sensor of this invention. It is a perspective view which shows the structure of an electronic device (cellular phone) provided with the physical quantity sensor of this invention. It is a perspective view which shows the structure of an electronic device (digital still camera) provided with the physical quantity sensor of this invention.

Hereinafter, a physical quantity sensor of the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.
<First Embodiment>
1 is a schematic plan view showing a first embodiment of a physical quantity sensor of the present invention, FIG. 2 is a detailed plan view of the physical quantity sensor shown in FIG. 1, and FIG. 3 is a partially enlarged view of the physical quantity sensor shown in FIG. FIG. 4 is a plan view for explaining the vibration of the beam possessed by the physical quantity sensor shown in FIG. 2, and FIG. 5 is a plan view for explaining the configuration of the detecting means possessed by the physical quantity sensor shown in FIG. 6, 7 and 8 are diagrams for explaining the driving of the physical quantity sensor, respectively. In each figure, for convenience of explanation, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other. In the following, the direction parallel to the X axis (first axis) is the “X axis direction”, the direction parallel to the Y axis (second axis) is the Y axis direction, and the direction is parallel to the Z axis (third axis). Is referred to as “Z-axis direction”.

1. Physical Quantity Sensor The physical quantity sensor 1 of this embodiment is an angular velocity sensor that can detect an angular velocity around the X axis, an angular velocity around the Y axis, and an angular velocity around the Z axis. According to such an angular velocity sensor, the angular velocities around the three axes can be independently detected by one sensor, so that excellent convenience can be exhibited.

  The physical quantity sensor 1 shown in FIG. 1 is arranged side by side around the Z-axis and is disposed opposite to the pair of first vibrating parts (first mass parts) 51 and 52 arranged opposite to each other in the X-axis direction and the Y-axis direction. From the center O of the assembly of the vibration parts 51 to 54 in a plan view with the Z axis as a normal line, and the four vibration parts 51 to 54 including the pair of second vibration parts (second mass parts) 53 and 54 From four substrate fixing portions (fixing portions) 61, 62, 63, 64 having a predetermined radial angle with respect to both the X-axis and the Y-axis, and the substrate fixing portions 61-64. And two spring mechanisms (motion direction changing means) 711, 712, 721, 722, 731, 732, 741, and 742 extending to two adjacent vibration parts around the Z axis.

Furthermore, the physical quantity sensor 1 vibrates the first vibrating units 51 and 52 in the X axis direction at the first frequency (predetermined frequency) in mutually opposite phases, while causing the second vibrating units 53 and 54 to move in the Y axis direction. It includes vibration means 4 that vibrates in opposite phases at a frequency, and a transducer that is provided in each of the vibration parts 51 to 54 and converts the displacement of the movable part included in the vibration parts 51 to 54 into an electric signal. .
In the physical quantity sensor 1, the spring mechanisms 711 and 712 are configured to vibrate in a tuning fork in the XY plane according to the first frequency (spring mechanisms 721 and 722, spring mechanisms 731 and 732, and spring mechanism 741). , 742).

  According to such a physical quantity sensor 1, since the substrate fixing portion is not provided at the center of the structure as in the prior art (for example, Patent Document 1), the vibration of the vibrating portions 51 to 54 leaks to the substrate. Can be reduced. Therefore, the Q value of vibration can be increased while reducing the size of the apparatus. Thereby, a small physical quantity sensor excellent in detection accuracy can be provided.

Hereinafter, the physical quantity sensor 1 will be described in detail.
As shown in FIG. 2, the physical quantity sensor 1 includes a vibration system structure 3 provided in the XY plane, a substrate 2 that supports the vibration system structure 3, and vibration means 4 that vibrates the vibration system structure 3. And detecting means 9 for detecting the angular velocity applied to the physical quantity sensor 1.
-Vibration system structure-
As shown in FIGS. 2 and 3, the vibration system structure 3 includes a connecting portion 31, a pair of first vibrating portions 51 and 52 that are opposed to each other in the X-axis direction via the connecting portion 31, and a first vibration. First inner spring parts (first spring parts) 81, 82 that connect the parts 51, 52 and the connecting part 31, and a pair of second vibrating parts 53 that are arranged to face each other in the Y-axis direction via the connecting part 31, 54, second inner spring portions (second spring portions) 83, 84 that connect the second vibrating portions 53, 54 and the connecting portion 31, and substrate fixing portions 61, 62 provided around the connecting portion 31, 63, 64, beams 71, 72, 73, 74 connecting the connecting portion 31 and the substrate fixing portions 61, 62, 63, 64, and outer fixing provided outside the vibrating portions 51, 52, 53, 54. Parts 651, 652, 661, 662, 671, 672, 681, 682 and vibrating parts 51, 52, 5 , And a lateral spring portion 851,852,861,862,871,872,881,882 connecting the 54 and outer fixed portion 651,652,661,662,671,672,681,682.

  The vibration system structure 3 of the present embodiment is composed of silicon as a main material, and is formed on a silicon substrate (silicon wafer) with a thin film formation technique (for example, deposition techniques such as an epitaxial growth technique and a chemical vapor deposition technique) and various types. Each part mentioned above is integrally formed by processing into a desired external shape using processing techniques (for example, etching techniques, such as dry etching and wet etching). Alternatively, after bonding the silicon substrate and the glass substrate, only the silicon substrate is processed into a desired outer shape, whereby the above-described portions can be formed.

  By using silicon as the main material of the vibration system structure 3, at least excellent vibration characteristics can be realized and excellent durability can be exhibited. Further, it is possible to apply a fine processing technique used for manufacturing a silicon semiconductor device, and the physical quantity sensor 1 can be downsized. Further, by using silicon as the main material of the vibration system structure 3, the physical quantity sensor 1 can be driven without forming electrodes on the vibration system structure 3, as will be described later. Can be made simpler. Even if the material is other than silicon, for example, a material such as an insulator, the vibration structure 3 can be formed by covering the outer periphery with a metal film.

In addition, the main material of the board | substrate 2 is not limited to a silicon | silicone, For example, a crystal | crystallization and various glass may be sufficient.
In the vibration system structure 3 of the present embodiment, the projected outer shape of the assembly of the vibration parts 51, 52, 53, and 54 is substantially circular in a plan view with the Z-axis direction as a normal line. Thereby, size reduction of the physical quantity sensor 1 can be achieved.

(Annular part)
As shown in FIG. 2 and FIG. 3, the connecting portion 31 has four parts that form a fan shape of approximately 90 degrees, that is, a first part 311, a second part 312, a third part 313, and a fourth part. 314 is configured to be spaced apart and equidistant from each other around the Z axis that intersects the center O.

(First vibration part)
The 1st vibration part 51 has comprised plate shape. The first vibrating part 51 includes a frame part 511 that forms an edge of the first vibrating part 51, and a Z-axis direction displacement part (first movable part, movable part) that is coupled to the frame part 511 via shaft parts 513 and 514. ) 512, a comb-like drive electrode 515, and a Y-axis direction displacement portion (second movable portion, movable portion) 516 coupled to the frame via a spring portion 517.
Similarly, the first vibrating portion 52 is also plate-shaped, and includes a frame portion 521 that constitutes an edge portion of the first vibrating portion 52 and a Z-axis direction displacement portion that is connected to the frame portion 521 via the shaft portions 523 and 524 ( A first movable portion (movable portion) 522, a comb-like drive electrode 525, and a Y-axis direction displacement portion (second movable portion, movable portion) 526 connected to the frame via a spring portion 527. Yes.

Hereinafter, the first vibrating units 51 and 52 will be described in detail. However, since the first vibrating units 51 and 52 have the same configuration, the first vibrating unit 51 will be described below as a representative. The description of the vibration unit 52 is omitted.
The outer shape of the frame portion 511 has a fan shape of approximately 90 degrees in plan view with the Z axis as a normal line. In the frame portion 511, a pair of first openings 511a, a pair of second openings 511b, and a third opening 511c are formed.

A plurality of comb-shaped drive electrodes 515 are arranged in each first opening 511a. Each drive electrode 515 extends in the Y-axis direction and is provided apart from each other in the X-axis direction. The drive electrode 515 constitutes a part of the vibration unit 4.
A Y-axis direction displacement portion 516 is provided inside each second opening 511b. The Y-axis direction displacement portion 516 includes a frame portion 516a and a plurality of detection electrodes 516b provided inside the frame portion 516a. The detection electrodes 516b extend in the X-axis direction and are separated from each other in the Y-axis direction.

  Each Y-axis direction displacement portion 516 is connected to the frame portion 511 by four spring portions 517. Each spring portion 517 has a shape extending in the Y-axis direction while reciprocating in the X-axis direction. By forming each spring part 517 in such a shape, the spring part 517 can be smoothly expanded and contracted in the Y-axis direction, and directions other than the Y-axis direction of the spring part 517 (ie, the X-axis direction and the Z-axis direction). Deformation in the direction) can be effectively prevented or suppressed. Therefore, each Y-axis direction displacement portion 516 can be smoothly displaced in the Y-axis direction with respect to the frame portion 511.

  A Z-axis direction displacement portion 512 is provided inside the third opening 511c. The Z-axis direction displacement portion 512 is connected to the frame portion 511 by shaft portions 513 and 514. The shaft portions 513 and 514 extend in the Y-axis direction and are provided coaxially with each other. Therefore, when a stress in the Z-axis direction is applied to the physical quantity sensor 1, the Z-axis direction displacement portion 512 is displaced around the shaft portions 513 and 514 while twisting and deforming the shaft portions 513 and 514 around the axis.

  The first vibrating unit 51 has been described above. As described above, the first vibrating portion 52 has the same configuration as the first vibrating portion 51 and is symmetric with respect to the Y axis that intersects the center O of the connecting portion 31 in plan view with the Z axis as a normal line. Provided. However, as a requirement of the present invention, as described later, the symmetry of the arrangement of the inner fixing portion and the related spring structure is important, but the shapes of the first vibrating portions 51 and 52 themselves need to be completely symmetric. Absent.

(Second vibration part)
The second vibrating part 53 has a plate shape. The second vibrating portion 53 includes a frame portion 531 that forms an edge of the second vibrating portion 53, and a Z-axis direction displacement portion (third movable portion, which is connected to the frame portion 531 via shaft portions 533 and 534. (Movable part) 532 and an X-axis direction displacement part (fourth movable part, movable part) 536 coupled to the frame via a spring part 537.
Similarly, the second vibrating portion 54 is also plate-shaped, and includes a frame portion 541 that forms an edge of the second vibrating portion 54 and a Z-axis direction displacement portion that is connected to the frame portion 541 via the shaft portions 543 and 544 ( A third movable portion (movable portion) 542 and an X-axis direction displacement portion (fourth movable portion, movable portion) 546 connected to the frame via a spring portion 547 are configured.

Hereinafter, the second vibrating sections 53 and 54 will be described in detail. However, since the second vibrating sections 53 and 54 have the same configuration, the second vibrating section 53 will be described as a representative, The description of the vibration unit 54 is omitted.
The outer shape of the frame portion 531 has a fan shape of approximately 90 degrees in plan view with the Z axis as a normal line. The frame portion 531 has a pair of first openings 531a, a pair of second openings 531b, and a third opening 531c.

A plurality of comb-shaped drive electrodes 535 are arranged in each first opening 531a. Each drive electrode 535 extends in the X-axis direction and is spaced apart from each other in the Y-axis direction. This drive electrode 535 constitutes a part of the vibration means 4.
An X-axis direction displacement portion 536 is provided inside each second opening 531b. The X-axis direction displacement portion 536 includes a frame portion 536a and a plurality of detection electrodes 536b provided inside the frame portion 536a. The detection electrodes 536b extend in the Y-axis direction and are spaced apart from each other in the X-axis direction.

  Each X-axis direction displacement portion 536 is connected to the frame portion 531 by four spring portions 537. Each spring portion 537 has a shape extending in the X-axis direction while reciprocating in the Y-axis direction. By forming each spring part 537 in such a shape, the spring part 537 can be smoothly expanded and contracted in the X-axis direction, and the direction other than the X-axis direction of the spring part 537 (that is, the Y-axis direction and the Z-axis direction). Deformation in the direction) can be effectively prevented or suppressed. Therefore, each X-axis direction displacement portion 536 can be smoothly displaced in the X-axis direction with respect to the frame portion 531.

A Z-axis direction displacement portion 532 is provided inside the third opening 531c. The Z-axis direction displacement portion 532 is connected to the frame portion 531 by shaft portions 533 and 534. The shaft portions 533 and 534 extend in the X-axis direction and are provided coaxially with each other. Therefore, when a stress in the Z-axis direction is applied to the physical quantity sensor 1, the Z-axis direction displacement portion 532 rotates around the shaft portions 533 and 534 while twisting and deforming the shaft portions 533 and 534 around the axis.
The second vibrating unit 53 has been described above. As described above, the second vibrating portion 54 has the same configuration as the second vibrating portion 53 and is symmetrical with respect to the X axis that intersects the center O of the connecting portion 31 in a plan view with the Z axis as a normal line. Provided. However, the shapes of the second vibrating portions 53 and 54 need not be completely symmetric with respect to the X axis, as described above.

(First inner spring part)
The first inner spring part 81 connects the first vibrating part 51 and the first part 311. The first inner spring portion 82 connects the first vibrating portion 52 connecting portion 31 and the second portion 312. Hereinafter, the first inner spring portions 81 and 82 will be described in detail. However, since the first inner spring portions 81 and 82 have the same configuration, the first inner spring portion 81 will be described below as a representative. The description of the first inner spring portion 82 is omitted.

  The first inner spring portion 81 includes a pair of spring portions 811 and 812, and each spring portion 811 and 812 has a shape extending in the X-axis direction while reciprocating in the Y-axis direction. The spring portions 811 and 812 are provided symmetrically with respect to the X axis that intersects the center O in a plan view with the Z axis as a normal line. By making each spring part 811 and 812 into such a shape, the first inner spring part 81 is smoothly expanded and contracted in the X-axis direction while suppressing (regulating) deformation in the Y-axis direction and the Z-axis direction. Can do. Therefore, as will be described later, the first vibrating portion 51 can be vibrated smoothly in the X-axis direction while the first inner spring portion 81 is expanded and contracted in the X-axis direction.

(Second inner spring part)
The second inner spring portion 83 connects the second vibrating portion 53 and the third portion 313. Further, the second inner spring portion 84 connects the second vibrating portion 54 and the fourth portion 314. Hereinafter, the second inner spring portions 83 and 84 will be described in detail. However, since the second inner spring portions 83 and 84 have the same configuration, the second inner spring portion 83 will be described below as a representative. The description of the second inner spring portion 84 is omitted.

  The second inner spring portion 83 includes a pair of spring portions 831 and 832, and each spring portion 831 and 832 has a shape extending in the Y-axis direction while reciprocating in the X-axis direction. The spring portions 831 and 832 are provided symmetrically with respect to the Y axis that intersects the center O in a plan view with the Z axis as a normal line. By configuring each of the spring portions 831 and 832 as described above, the second inner spring portion 83 can be smoothly expanded and contracted in the Y-axis direction while suppressing deformation (regulation) in the X-axis direction and the Z-axis direction. Can do. Therefore, as described later, the second vibrating portion 53 can be smoothly vibrated in the Y-axis direction while the second inner spring portion 83 is expanded and contracted in the Y-axis direction.

(Board fixing part)
The board fixing parts 61, 62, 63, 64 have a function of supporting the connecting part 31. Such substrate fixing parts 61, 62, 63, 64 are provided inside the four vibrating parts 51, 52, 53, 54, respectively. By arranging the substrate fixing portions 61, 62, 63, 64 in this way, the space can be used effectively and the physical quantity sensor 1 can be downsized. Moreover, since the length of the beams 71, 72, 73, 74 can be shortened, the connecting portion 31 can be supported more stably. Furthermore, by arranging the substrate fixing parts 61, 62, 63, 64 in this way, it is possible to serve as a stopper for the first vibrating parts 51, 52 and the second vibrating parts 53, 54.

The substrate fixing portions 61, 62, 63, and 64 are provided at intervals of 90 degrees around the outer periphery of the connecting portion 31 in a plan view with the Z axis as a normal line. Specifically, in a plan view with the Z axis as a normal line, a pair of axes that intersect with the center O of the connecting portion 31 and are inclined by 45 degrees with respect to the X axis and the Y axis are denoted by J1 and J2. In this case, the substrate fixing portions 61 and 63 are located on the axis J2 and are disposed to face each other via the connecting portion 31. In addition, the substrate fixing portions 62 and 64 are located on the axis J1 and are disposed to face each other via the connecting portion 31.
Further, the four substrate fixing portions 61, 62, 63, 64 are provided at positions that are mirror surfaces with respect to both the X axis and the Y axis. Thereby, the connection part 31 can be supported stably.

(Beam)
The beams 71, 72, 73, and 74 are connected to the substrate fixing portions 61, 62, 63, and 64 so that the portions 311, 312, 313, and 314 constituting the connecting portion 31 can be displaced. The fixing parts 61, 62, 63, 64 are connected.
The beam 71 includes a first beam (spring mechanism) 711 that connects the substrate fixing portion 61 and the first portion 311, and a second beam (spring mechanism) 712 that connects the substrate fixing portion 61 and the third portion 313. It consists of and. Each of the first beam 711 and the second beam 712 has a shape extending in the axis J1 direction while reciprocating in a direction parallel to the axis J2. Further, the first beam 711 and the second beam 712 are arranged symmetrically with respect to the axis J2 in a plan view with the Z axis as a normal line. Further, the first beam 711 and the second beam 712 are each allowed to be deformed in the declination direction with the substrate fixing portion 61 as the center, and the deformation in the radial direction is restricted.

  Further, the first beam 711 converts the expansion and contraction motion of the first inner spring portion 81 in the X-axis direction into rotational vibration around the substrate fixing portion 61, and the displacement in other directions is limited. Similarly, the second beam 712 converts the expansion and contraction motion of the second inner spring portion 83 in the Y-axis direction into rotational vibration about the substrate fixing portion 61, and the displacement is restricted in other directions. . Thus, the 1st beam 711, the 1st site | part 311, and the 1st inner side spring part 81 play a role as the moving direction conversion means which converts a moving direction.

  The beam 72 includes a first beam (spring mechanism) 721 that connects the substrate fixing portion 62 and the third portion 313, and a second beam (spring mechanism) 722 that connects the substrate fixing portion 62 and the second portion 312. It consists of and. Each of the first beam 721 and the second beam 722 has a shape extending in the axis J2 direction while reciprocating in a direction parallel to the axis J1. The first beam 721 and the second beam 722 are arranged symmetrically with respect to the axis J1 in a plan view with the Z axis as a normal line. Further, the first beam 721 and the second beam 722 are allowed to be deformed in the declination direction around the substrate fixing portion 62, and the deformation in the radial direction is restricted.

  Further, the first beam 721 converts the expansion and contraction motion of the second inner spring portion 83 in the Y-axis direction into rotational vibration about the substrate fixing portion 62, and the displacement in other directions is limited. Similarly, the second beam 722 converts the expansion and contraction movement of the first inner spring portion 82 in the X-axis direction into rotational vibration about the substrate fixing portion 62, and the displacement is limited in other directions. . Thus, the 1st beam 721, the 3rd site | part 313, and the 2nd inner side spring part 83 play the role as a motion direction conversion means to convert a motion direction.

  The beam 73 includes a first beam (spring mechanism) 731 that connects the substrate fixing portion 63 and the second portion 312, and a second beam (spring mechanism) 732 that connects the substrate fixing portion 63 and the fourth portion 314. It consists of and. The first beam 731 and the second beam 732 each have a shape extending in the axis J1 direction while reciprocating in a direction parallel to the axis J2. The first beam 731 and the second beam 732 are arranged symmetrically with respect to the axis J2 in a plan view with the Z axis as a normal line. Further, the first beam 731 and the second beam 732 are allowed to be deformed in the declination direction with the substrate fixing portion 63 as the center, and the deformation in the radial direction is restricted.

  Further, the first beam 731 converts the expansion and contraction motion of the first inner spring portion 82 in the X-axis direction into rotational vibration around the substrate fixing portion 63, and the displacement is limited in the other direction. Similarly, the second beam 732 converts the expansion and contraction motion of the second inner spring portion 84 in the Y-axis direction into rotational vibration centered on the substrate fixing portion 63 and is limited in displacement in other directions. . In this way, the first beam 731, the second portion 312, and the first inner spring portion 82 serve as a movement direction conversion unit that converts the movement direction.

  The beam 74 includes a first beam (spring mechanism) 741 that connects the substrate fixing portion 64 and the fourth portion 314, and a second beam (spring mechanism) 742 that connects the substrate fixing portion 64 and the first portion 311. It consists of and. Each of the first beam 741 and the second beam 742 has a shape extending in the axis J2 direction while reciprocating in a direction parallel to the axis J1. Further, the first beam 741 and the second beam 742 are disposed symmetrically with respect to the axis J1 in a plan view with the Z axis as a normal line. Further, the first beam 741 and the second beam 742 are allowed to be deformed in the declination direction around the substrate fixing portion 64, and the deformation in the radial direction is restricted.

In addition, the first beam 741 converts the expansion and contraction motion of the second inner spring portion 84 in the Y-axis direction into rotational vibration around the substrate fixing portion 64, and the displacement in other directions is limited. Similarly, the second beam 742 converts the expansion and contraction motion of the first inner spring portion 81 in the X-axis direction into rotational vibration about the substrate fixing portion 64, and the displacement is limited in other directions. . Thus, the 1st beam 741, the 4th site | part 314, and the 2nd inner side spring part 84 play a role as a moving direction conversion means which converts a moving direction.
By configuring the beams 71 to 74 in such a configuration, the connecting portion 31 can be stably supported, and vibrations of the connecting portion 31 as described later can be efficiently absorbed and mitigated.

(Outside fixing part)
The outer fixing portions 651, 652, 661, 662, 671, 672, 681, and 682 are provided outside the four vibrating portions 51, 52, 53, and 54, respectively. The outer fixing portions 651 and 652 are provided corresponding to the first vibrating portion 51 and are separated from each other in the Y-axis direction. Similarly, the outer fixing portions 661 and 662 are provided corresponding to the first vibrating portion 52 and are separated from each other in the Y-axis direction. The outer fixing portions 671 and 672 are provided corresponding to the second vibrating portion 53 and are separated from each other in the X-axis direction. The outer fixing portions 681 and 682 are provided corresponding to the second vibrating portion 54, and are provided apart from each other in the X-axis direction.

(Outer spring part)
Outer spring parts 851, 852, 861, 862, 871, 872, 881, 882 are provided with outer fixing parts 651, 652, 661, 662, 671, 672, 681, 682 and vibrating parts 51, 52, 53, 54. It is connected. Specifically, the outer spring portions 851 and 852 connect the first vibrating portion 51 and the outer fixing portions 651 and 652, and the outer spring portions 861 and 862 are connected to the first vibrating portion 52 and the outer fixing portions 661 and 662, respectively. The outer spring portions 871 and 872 connect the second vibrating portion 53 and the outer fixing portions 671 and 672, and the outer spring portions 881 and 882 are connected to the second vibrating portion 54 and the outer fixing portions 681 and 682, respectively. Are linked.

The outer spring portions 851 and 852 have a shape extending in the X-axis direction while reciprocating in the Y-axis direction. Further, the outer spring portions 851 and 852 are provided symmetrically with respect to the X axis that intersects the center O of the connecting portion 31.
Similarly, the outer spring portions 861 and 862 have a shape extending in the X-axis direction while reciprocating in the Y-axis direction. The outer spring portions 861 and 862 are provided symmetrically with respect to the X axis that intersects the center O of the connecting portion 31.

The outer spring portions 871 and 872 have a shape extending in the Y-axis direction while reciprocating in the X-axis direction. The outer spring portions 871 and 872 are provided symmetrically with respect to the Y axis that intersects the center O of the connecting portion 31.
Similarly, the outer spring portions 881 and 882 have a shape extending in the Y-axis direction while reciprocating in the X-axis direction. The outer spring portions 881 and 882 are provided symmetrically with respect to the Y axis that intersects the center O of the connecting portion 31.

However, it is not an essential condition of the present invention that the outer spring portions 851 and 852, 861 and 862, 871 and 872, 881 and 882 are completely symmetrical with respect to the center O, the X axis, or the Y axis.
The vibration system structure 3 as described above has a specific resonance frequency. Thereby, as will be described later, the vibration system structure 3 can be driven in the resonance mode, and the detection accuracy of the angular velocity can be improved.

-Board-
The substrate 2 supports the vibration system structure 3. As shown in FIG. 2, the substrate 2 has a plate shape and is provided in the XY plane. Then, the substrate fixing portions 61, 62, 63, 64 and the outer fixing portions 651, 652, 661, 662, 671, 672, 681, 682 of the vibration system structure 3 are joined to the upper surface of the substrate 2 to vibrate. The system structure 3 is fixed and supported on the substrate 2.
The bonding method of the substrate 2 and the substrate fixing portions 61, 62, 63, 64 and the outer fixing portions 651, 652, 661, 662, 671, 672, 681, 682 is not particularly limited, and various methods such as direct bonding and anodic bonding are possible. Depending on the constituent materials of the vibration structure 3 and the substrate 2 that may be joined using various joining methods, the joining may be performed using a support member such as an adhesive.

Further, a concave portion is formed on the upper surface of the substrate 2 (the surface on the side facing the vibration system structure 3) as necessary. The concave portion has a function of preventing contact between the substrate 2 and the actually vibrating portion of the vibration system structure 3 (for example, the first vibrating portions 51 and 52 and the second vibrating portions 53 and 54).
As such a substrate 2, for example, a semiconductor substrate such as silicon, an insulating substrate such as glass or quartz, or a composite substrate formed by laminating a semiconductor layer and an insulating layer is processed into a desired outer shape using various processing techniques. It is formed by. Thereby, the structure of the physical quantity sensor 1 becomes simple.

-Vibration means-
The vibration means 4 includes a state in which the vibration parts 51, 52, 53, and 54 are displaced toward the connection part 31 side (inside), and a vibration part 51, 52, 53, 54 on the opposite side (outside) from the connection part 31 It has a function to vibrate the vibration parts 51, 52, 53, 54 at a predetermined frequency (first frequency) so as to repeat the state of being displaced toward.

  Such a vibrating means 4 has a plurality of fixed electrodes 41, 42, 43, 44. Among these, the fixed electrode 41 is provided corresponding to the drive electrode 515 included in the first vibrating portion 51, and the fixed electrode 42 is provided corresponding to the drive electrode 525 included in the first vibrating portion 52. The fixed electrode 43 is provided corresponding to the drive electrode 535 included in the second vibrating portion 53, and the fixed electrode 44 is provided corresponding to the drive electrode 545 included in the second vibrating portion 54.

  Each of the fixed electrodes 41 is composed of a pair of comb-like electrode pieces 411 and 412 arranged to face each other in the X-axis direction via the drive electrode 515 in a plan view with the Z axis as a normal line. Similarly, each fixed electrode 42 has a pair of comb-like electrode pieces 421 and 422 arranged to face each other in the X-axis direction via the drive electrode 525, and each fixed electrode 43 includes the drive electrode 535. And a pair of comb-like electrode pieces 431 and 432 arranged opposite to each other in the Y-axis direction, and each fixed electrode 44 has a comb-teeth shape arranged opposite to each other in the Y-axis direction via the drive electrode 545. The pair of electrode pieces 441 and 442 are provided.

  The vibrating means 4 applies an alternating voltage whose phase is shifted by 180 degrees to each electrode piece 411, 421, 431, 441 and each electrode piece 412, 422, 432, 442 by a power source (not shown). Electrostatic force is generated between them, and the first inner spring portions 81, 82, 83, 84 and the outer spring portions 851, 852, 861, 862 are expanded and contracted, and the vibration portions 51, 52, 53, 54 are mutually inside. Or, it vibrates at a predetermined frequency so as to be displaced outward (ie, in in-phase motion).

The frequency of the alternating voltage is not particularly limited, but is preferably substantially equal to the resonance frequency of the vibration system structure 3. Thereby, since the vibration system structure 3 can be driven in the resonance mode, the detection accuracy of the angular velocity can be improved.
When the vibration parts 51, 52, 53, 54 vibrate as described above, the parts 311, 312, 313, 314 of the coupling part 31 repeat the displacement outward and the displacement inward in synchronization with the vibration. Vibrate. Then, each beam 71, 72, 73, 74 repeats deformation as shown in FIG.

The beam 71 will be specifically described. In the plan view with the Z axis as a normal line, the ends of the first beam 711 and the second beam 712 on the substrate fixing portion 61 side are symmetrical with respect to the axis J1. Rotating motion (tuning fork vibration) in the opposite phase in the XY plane.
Such tuning fork vibration of the beams 71, 72, 73, 74 absorbs or relaxes vibrations of the respective parts 311, 312, 313, 314, and prevents vibration leakage through the substrate fixing parts 61, 62, 63, 64 or Can be suppressed.

As a result, the Q value of vibration of the vibration system structure 3 increases (can prevent or suppress a decrease), and the detection accuracy of the physical quantity sensor 1 improves. Moreover, since the vibration system structure 3 can be vibrated efficiently, the output of the vibration means 4 can be reduced, and as a result, the physical quantity sensor 1 can be downsized.
Further, according to the electrostatic drive as in the present embodiment, the vibration as described above can be caused more smoothly and reliably. Moreover, in this embodiment, since the vibration means 4 is connected inside each vibration part 51,52,53,54, a space can be utilized effectively and size reduction of the physical quantity sensor 1 can be achieved.

-Detection means 9-
As shown in FIG. 5, the detection means 9 includes displacement transducers (transducers) 91, 92, 93, 94 and rotary transducers (transducers) 95, 96, 97, 98. In FIG. 5, for convenience of explanation, illustration of some components of the physical quantity sensor 1 is omitted.

  The displacement transducer 91 includes a Y-axis direction displacement portion 516 provided in the first vibrating portion 51, and a fixed electrode 911 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 911 are provided corresponding to the detection electrodes 516b included in the Y-axis direction displacement portion 516. Each fixed electrode 911 has a pair of electrode pieces 911a and 911b arranged to face each other via the detection electrode 516b, and each of these electrode pieces 911a and 911b is provided extending in the X-axis direction. .

  The displacement transducer 92 includes a Y-axis direction displacement portion 526 provided in the first vibration portion 52 and a fixed electrode 921 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 921 are provided corresponding to the detection electrodes 526b included in the Y-axis direction displacement portion 526. Each fixed electrode 921 has a pair of electrode pieces 921a and 921b arranged to face each other via the detection electrode 526b, and each of these electrode pieces 921a and 921b is provided extending in the X-axis direction. .

  The displacement transducer 93 includes an X-axis direction displacement portion 536 provided in the second vibrating portion 53, and a fixed electrode 931 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 931 are provided corresponding to the detection electrodes 536b included in the X-axis direction displacement portion 536. Each fixed electrode 931 has a pair of electrode pieces 931a and 931b disposed to face each other via the detection electrode 536b, and each electrode piece 931a and 931b is provided to extend in the Y-axis direction. .

  The displacement transducer 94 includes an X-axis direction displacement portion 546 provided in the second vibration portion 54 and a fixed electrode 941 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 941 are provided corresponding to the detection electrodes 546b included in the X-axis direction displacement portion 546. Each fixed electrode 941 has a pair of electrode pieces 941a and 941b arranged to face each other via the detection electrode 546b, and each of these electrode pieces 941a and 941b is provided extending in the Y-axis direction. .

In this embodiment, since these displacement transducers 91, 92, 93, 94 are connected to the inside of the vibration parts 51, 52, 53, 54, the space of the apparatus can be used effectively, and the physical quantity sensor 1 can be downsized. Can be achieved.
The rotary transducer 95 is fixed to the substrate 2 and the Z-axis direction displacement part 512 provided on the first vibration part 51 via the shaft parts 513 and 514, and is separated from the Z-axis direction displacement part 512 in the Z-axis direction. And a fixed electrode 951 arranged opposite to each other.

The rotary transducer 96 is fixed to the substrate 2 with the Z-axis direction displacement portion 522 provided in the first vibrating portion 52 via the shaft portions 523 and 524, and is separated from the Z-axis direction displacement portion 522 in the Z-axis direction. And a fixed electrode 961 arranged opposite to each other.
The rotary transducer 97 is fixed to the substrate 2 with the Z-axis direction displacement portion 532 provided on the second vibrating portion 53 via the shaft portions 533 and 534, and is separated from the Z-axis direction displacement portion 532 in the Z-axis direction. And a fixed electrode 971 arranged opposite to each other.

The rotary transducer 98 is fixed to the substrate 2 with the Z-axis direction displacement portion 542 provided on the second vibrating portion 54 via the shaft portions 543 and 544, and is separated from the Z-axis direction displacement portion 542 in the Z-axis direction. And a fixed electrode 981 disposed opposite to each other.
In this embodiment, since these rotary transducers 95, 96, 97, and 98 are connected to the inside of the vibration units 51, 52, 53, and 54, the space of the apparatus can be effectively used, and the physical quantity sensor 1 can be downsized. Can be achieved.

Hereinafter, a method of detecting the angular velocity by the detecting means 9 will be briefly described with reference to FIGS. 5, 6, and 7, a part of the configuration of the physical quantity sensor 1 is omitted for convenience of explanation.
-Detection of angular velocity around the Z axis-
As shown in FIG. 6, the vibration means 4 causes the physical quantity sensor 1 to perform Z in a state in which the first vibrating portions 51 and 52 are vibrated in the X-axis direction and the second vibrating portions 53 and 54 are vibrated in the Y-axis direction. When an angular velocity ω around the axis is applied, the Coriolis force in the Y-axis direction acts on the first vibrating parts 51 and 52 that vibrate in the X-axis direction, and the second vibrating parts 53 and 54 that vibrate in the Y-axis direction act in the X-axis direction. Coriolis force acts.

  When such a Coriolis force is applied, in the first vibrating section 51, the Y-axis direction displacement section 516 is displaced in the Y-axis direction with respect to the frame section 511, whereby the static force between the detection electrode 516b and the electrode piece 911a. The capacitance and the capacitance between the detection electrode 516b and the electrode piece 911b change, and a difference occurs between these capacitances. Similarly, also in the 1st vibration part 52, the Y-axis direction displacement part 526 displaces to the Y-axis direction with respect to the flame | frame part 521, and, thereby, the electrostatic capacitance between the detection electrode 526b and the electrode piece 921a, and a detection electrode The capacitance between 516b and the electrode piece 921b changes, and a difference occurs between these capacitances.

Further, in the second vibrating portion 53, the X-axis direction displacement portion 536 is displaced in the X-axis direction with respect to the frame portion 531, thereby the capacitance between the detection electrode 536b and the electrode piece 931a and the detection electrode 536b. And the electrostatic capacity between the electrode pieces 931b change, and a difference occurs in these electrostatic capacity. Similarly, also in the second vibrating portion 54, the X-axis direction displacement portion 546 is displaced in the X-axis direction with respect to the frame portion 541, whereby the capacitance between the detection electrode 546b and the electrode piece 941a, and the detection electrode The capacitance between 546b and the electrode piece 941b changes, and a difference is generated between these capacitances.
Then, the detection means 9 detects such a change in electrostatic capacitance that occurs in each of the vibration parts 51, 52, 53, 54, and detects the angular velocity around the Z axis applied to the physical quantity sensor 1 from the detection result. Can do.

-Detection of angular velocity around the X axis-
As shown in the perspective view of FIG. 7, the physical quantity in a state where the first vibrating parts 51 and 52 are vibrated in the X-axis direction and the second vibrating parts 53 and 54 are vibrated in the Y-axis direction by the vibrating means 4. When an angular velocity around the X axis is applied to the sensor 1, a Coriolis force in the Z-axis direction acts on the second vibrating portions 53 and 54 that vibrate in the Y-axis direction.

When such a Coriolis force is applied, in the second vibrating portion 53, the Z-axis direction displacement portion 532 rotates around the shaft portions 533 and 534, whereby the static displacement between the Z-axis direction displacement portion 532 and the fixed electrode 971 is achieved. The capacitance changes. Similarly, in the second vibrating portion 54, the Z-axis direction displacement portion 542 rotates around the shaft portions 543 and 544, whereby the capacitance between the Z-axis direction displacement portion 542 and the fixed electrode 981 changes.
The detecting means 9 can detect such a change in electrostatic capacitance that occurs in the second vibrating sections 53 and 54, and can detect the angular velocity around the X axis applied to the physical quantity sensor 1 from the detection result.

-Detection of angular velocity around the Y axis-
As shown in FIG. 8, the vibration unit 4 causes the first vibration units 51 and 52 to vibrate in the X-axis direction while the second vibration units 53 and 54 vibrate in the Y-axis direction. When an angular velocity around the axis is applied, a Coriolis force in the Z-axis direction acts on the first vibrating portions 51 and 52 that vibrate in the X-axis direction.

  When such a Coriolis force is applied, in the first vibrating portion 51, the Z-axis direction displacement portion 512 rotates around the shaft portions 513 and 514, whereby the static vibration between the Z-axis direction displacement portion 512 and the fixed electrode 951 is obtained. The capacitance changes. Similarly, in the first vibrating portion 52, the Z-axis direction displacement portion 522 rotates around the shaft portions 523 and 524, whereby the capacitance between the Z-axis direction displacement portion 522 and the fixed electrode 961 changes.

Then, the detection means 9 can detect such a change in electrostatic capacitance that occurs in the first vibrating sections 51 and 52, and can detect the angular velocity around the X axis applied to the physical quantity sensor 1 from the detection result.
As described above, according to the physical quantity sensor 1, it is possible to detect angular velocities around all of the X axis, the Y axis, and the Z axis. Therefore, the physical quantity sensor 1 is small and excellent in convenience. In this embodiment, since the electrostatic detection means 9 is used, it is possible to improve the detection accuracy while reducing the size of the apparatus.

  The physical quantity sensor 1 has a function of canceling acceleration (linear acceleration) in the Y-axis direction applied to the physical quantity sensor 1 as a pair of displacement transducers 91 and 92. The displacement transducers 93 and 94 have a function of canceling acceleration in the X-axis direction applied to the physical quantity sensor 1 as a set. The rotary transducers 95, 96, 97, and 98 have a function of canceling acceleration in the Z-axis direction applied to the physical quantity sensor 1.

  Specifically, for example, when acceleration is applied to the physical quantity sensor 1 in the Y-axis direction, the Y-axis direction displacement unit 516 of the first vibration unit 51 and the Y-axis direction displacement unit 526 of the first vibration unit 52 are both Y-axis. Displace to the same direction. Such displacement of the Y-axis direction displacement portions 516 and 526 is different from the displacement when the angular velocity around the Z-axis is applied (that is, the displacement of the Y-axis direction displacement portions 516 and 526 to the opposite sides of the Y-axis direction). ing. Therefore, according to the physical quantity sensor 1, the physical quantity sensor 1 is changed from the capacitance between the detection electrode 516b and the electrode pieces 911a and 911b and the capacitance between the detection electrode 526b and the electrode pieces 921a and 921b. The applied acceleration can be detected, and when this angular velocity is detected, the detected acceleration can be canceled electrically by correction processing or the like. As a result, the detection accuracy of the angular velocity of the physical quantity sensor 1 is further improved. The acceleration in the X-axis direction and the acceleration in the Z-axis direction can be similarly canceled.

<Second Embodiment>
FIG. 9 is a plan view showing a second embodiment of the physical quantity sensor of the present invention. In FIG. 9, for convenience of explanation, illustration of a part of the configuration of the physical quantity sensor is omitted.
The physical quantity sensor of the present embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above except that the projection shape of the vibration system structure is different. In FIG. 9, the same components as those in the first embodiment described above are denoted by the same reference numerals.
In the physical quantity sensor 1 of the present embodiment, the outer shapes of the vibrating parts 51, 52, 53, and 54 each form a trapezoid in a plan view with the Z axis as a normal line. Then, in a plan view with the Z-axis direction as a normal line, the projected external shape of the assembly of the vibrating portions 51, 52, 53, and 54 is substantially rectangular. Thereby, size reduction of the physical quantity sensor 1 can be achieved. Further, for example, when the physical quantity sensor 1 is mounted in the chip, it corresponds to the shape of the chip, so that mounting on the chip becomes simple.

<Third Embodiment>
FIG. 10 is a plan view showing a third embodiment of the physical quantity sensor of the present invention. In FIG. 10, for convenience of explanation, illustration of a part of the configuration of the physical quantity sensor is omitted.
The physical quantity sensor of the present embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above except that the configuration of the vibration means is different. In FIG. 10, the same components as those in the first embodiment described above are denoted by the same reference numerals.
The vibration means 4 of the present embodiment is configured to vibrate the first vibration parts 51 and 52 in the X-axis direction by piezoelectric driving. Hereinafter, the first vibration unit 51 will be described as a representative, and the description of the first vibration unit 52 will be omitted.

The first vibrating portion 51 is provided inside the first opening 511a and is fixed to the substrate 2 and is provided inside the first opening 511a and connects the fixing portion 518a and the frame portion 511. A plurality of connecting portions 518b. Each connecting portion 518b is provided to extend in the Y-axis direction and is spaced from each other in the X-axis direction.
The vibration means 4 has a pair of piezoelectric elements 45 and 46 provided in each connecting portion 518b. The piezoelectric elements 45 and 46 are provided so as to extend in the Y-axis direction and are separated in the X-axis direction.

The piezoelectric elements 45 and 46 are composed of a pair of electrodes opposed to each other in the Z-axis direction and a piezoelectric layer having piezoelectricity interposed between the pair of electrodes, and a voltage is applied between the pair of electrodes. By doing so, it expands or contracts in the Y-axis direction. Therefore, when each piezoelectric element 45 is stretched and each piezoelectric element 46 is contracted, each connecting portion 518b is curved and the end connected to the frame portion 511 is displaced to the connecting portion 31 side. As a result, the first vibrating part 51 is displaced inward. On the contrary, when each piezoelectric element 45 is contracted and each piezoelectric element 46 is expanded, each connecting portion 518b is curved and the end on the side connected to the frame portion 511 is opposite to the connecting portion 31. As a result, the first vibrating part 51 is displaced outward.
In the vibration means 4 having the configuration, each piezoelectric element 45 is expanded and each piezoelectric element 46 is contracted, and each piezoelectric element 45 is contracted and each piezoelectric element 46 is expanded alternately. By applying a voltage to the piezoelectric elements 45 and 46 so as to be repeated, the first vibrating parts 51 and 52 are vibrated in the X-axis direction in opposite phases.

<Fourth embodiment>
FIG. 11 is a plan view showing a fourth embodiment of the physical quantity sensor of the present invention. In FIG. 11, for convenience of explanation, illustration of a part of the configuration of the physical quantity sensor is omitted.
The physical quantity sensor of the present embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

  The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above except that the configuration of the detection means is different. In FIG. 11, the same components as those in the first embodiment described above are denoted by the same reference numerals. In addition, since the configurations of the first vibrating portions 51 and 52 are the same as each other and the configurations of the second vibrating portions 53 and 54 are the same as each other, the following description is representative of the first vibrating portion 51 and the second vibrating portion 53. Thus, the description of the first vibrating portion 52 and the second vibrating portion 54 is omitted.

The first vibrating portion 51 is provided inside the second opening 511b, and has a plate-like Y-axis direction displacement portion 519a that can be displaced in the Y-axis direction with respect to the frame portion 511, a Y-axis direction displacement portion 519a, and a frame portion. And a plurality of spring portions 519b that connect 511 to each other. Each spring part 519b is provided extending in the X-axis direction.
The second vibrating portion 53 is provided inside the second opening 531b, and has a plate-like X-axis direction displacement portion 539a that can be displaced in the X-axis direction with respect to the frame portion 531, the X-axis direction displacement portion 539a, and the frame portion. And a plurality of spring portions 539b that connect 531 to each other. Each spring part 539b is provided extending in the Y-axis direction.

The detecting means 9 has a pair of piezoelectric elements 991 and 992 provided on each spring part 519b of the first vibrating part 51. The piezoelectric elements 991 and 992 extend in the X-axis direction and are spaced apart from each other in the Y-axis direction. In addition, the detection unit 9 includes a pair of piezoelectric elements 993 and 994 provided in each spring part 539 b of the second vibration part 53. The piezoelectric elements 993 and 994 are provided so as to extend in the Y-axis direction and be separated from each other in the X-axis direction.
Each of the piezoelectric elements 991, 992, 993, and 994 includes a pair of electrodes that are arranged to face each other in the Z-axis direction, and a piezoelectric layer having piezoelectricity that is interposed between the pair of electrodes. Such piezoelectric elements 991, 992, 993, and 994 have a property of generating electric charges by deformation, and a larger electric charge is generated as the deformation amount is larger.

Therefore, when an angular velocity around the Z-axis is applied to the physical quantity sensor 1 and the Y-axis direction displacement portion 519a of the first vibrating portion 51 is displaced in the Y-axis direction while bending the spring portion 519b in the Y-axis direction, the piezoelectric element 991 992 generates a charge having a magnitude corresponding to the amount of deformation of the spring portion 519b, and the X-axis direction displacement portion 539a of the second vibrating portion 53 displaces in the X-axis direction while bending the spring portion 539b in the X-axis direction. Then, the piezoelectric elements 993 and 994 generate electric charges having a magnitude corresponding to the deformation amount of the spring portion 539b.
The detection means 9 detects the angular velocity around the Z-axis by detecting the magnitude of the electric charges generated from such piezoelectric elements 991, 992, 993, and 994.

<Fifth Embodiment>
FIG. 12 is a plan view showing a fifth embodiment of the physical quantity sensor of the present invention. In FIG. 12, for convenience of explanation, illustration of a part of the configuration of the physical quantity sensor is omitted.
The physical quantity sensor of the present embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

  The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above except that the configuration of the detection means is different. In FIG. 12, the same reference numerals are given to the same components as those in the first embodiment described above. In addition, since the configurations of the first vibrating portions 51 and 52 are the same as each other and the configurations of the second vibrating portions 53 and 54 are the same as each other, the following description is representative of the first vibrating portion 51 and the second vibrating portion 53. Thus, the description of the first vibrating portion 52 and the second vibrating portion 54 is omitted.

The first vibrating portion 51 is provided inside the second opening 511b, and has a plate-like Y-axis direction displacement portion 519a that can be displaced in the Y-axis direction with respect to the frame portion 511, a Y-axis direction displacement portion 519a, and a frame portion. And a plurality of spring portions 519b that connect 511 to each other. Each spring part 519b is provided extending in the X-axis direction.
The second vibrating portion 53 is provided inside the second opening 531b, and has a plate-like X-axis direction displacement portion 539a that can be displaced in the X-axis direction with respect to the frame portion 531, the X-axis direction displacement portion 539a, and the frame portion. And a plurality of spring portions 539b that connect 531 to each other. Each spring part 539b is provided extending in the Y-axis direction.

  The detection means 9 of this embodiment includes a piezoresistive portion 995 provided in each spring portion 519b of the first vibrating portion 51 and a piezoresistive portion 996 provided in each spring portion 539b of the second vibrating portion 53. is doing. For example, when the vibration system structure 3 is formed using an n-type silicon substrate, the piezoresistive portions 995 and 996 diffuse impurities such as boron at a high concentration, and a p-type silicon layer is formed in the diffusion portion. It can be formed by forming.

The piezoresistive portions 995 and 996 have a property that the resistance value changes due to deformation, and the change amount of the resistance value increases as the deformation amount increases. Therefore, when an angular velocity around the Z-axis is applied to the physical quantity sensor 1 and the Y-axis direction displacement portion 519a of the first vibrating portion 51 is displaced in the Y-axis direction while bending the spring portion 519b in the Y-axis direction, the piezoresistive portion 995 is obtained. Changes to a resistance value corresponding to the amount of deformation of the spring portion 519b, and the X-axis direction displacement portion 539a of the second vibrating portion 53 is displaced in the X-axis direction while bending the spring portion 539b in the X-axis direction. The piezoresistive portion 996 changes to a resistance value having a magnitude corresponding to the amount of deformation of the spring portion 539b.
The detecting means 9 detects the angular velocity around the Z axis by detecting such a change in resistance value of the piezoresistive portions 995 and 996.

<Sixth Embodiment>
FIG. 13 is a plan view showing a sixth embodiment of the physical quantity sensor of the present invention. In FIG. 13, for convenience of explanation, illustration of a part of the configuration of the physical quantity sensor is omitted.
The physical quantity sensor of the present embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above except that the configuration of the detection means is different. In FIG. 13, the same components as those in the first embodiment described above are denoted by the same reference numerals. In addition, since the configuration of the four vibration parts is the same except that the arrangement around the Z axis is different, the first vibration part 51 will be described below as a representative, and the first vibration part 52 and the second vibration part will be described below. The description of the parts 53 and 54 is omitted.
In the first vibrating portion 51, the Y-axis direction displacement portion 516 is provided outside the frame portion 511 and is connected to the frame portion 511 by a plurality of spring portions 517. Such a Y-axis direction displacement portion 516 includes a plate-like base portion 516c and a plurality of detection electrodes 516d protruding from the base portion 516c in the X-axis direction.

  The displacement transducer 91 of the detection means 9 of the present embodiment has a Y-axis direction displacement portion 516 provided in the first vibrating portion 51, and a fixed electrode 911 fixed to the substrate 2 via an anchor. . A plurality of fixed electrodes 911 are provided corresponding to the detection electrodes 516d included in the Y-axis direction displacement portion 516. Each fixed electrode 911 has a pair of electrode pieces 911a and 911b arranged to face each other via the detection electrode 516d, and these electrode pieces 911a and 911b are provided to extend in the X-axis direction. .

<Seventh embodiment>
FIG. 14 is a plan view showing a seventh embodiment of the physical quantity sensor of the present invention. In FIG. 14, for convenience of explanation, illustration of a part of the configuration of the physical quantity sensor is omitted.
The physical quantity sensor of the present embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

  The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above except that the configuration of the detection means is different. In FIG. 14, the same components as those in the first embodiment described above are denoted by the same reference numerals. In addition, since the configuration of the four vibration parts is the same except that the arrangement around the Z axis is different, the first vibration part 51 will be described below as a representative, and the first vibration part 52 and the second vibration part will be described below. The description of the parts 53 and 54 is omitted.

  In the first vibrating portion 51, a Z-axis displacement portion 516A provided outside the frame portion 511 is connected to the frame portion 511 by a pair of connecting springs 517A. In addition, the pair of connection springs 517 </ b> A extend along the radial direction with respect to the center O of the connection portion 31. The Z-axis displacement portion 516A has a plate-like base portion 516Aa and a plurality of detection electrodes 516Ab protruding from the base portion 516Aa in the radial direction with respect to the center O of the connecting portion 31.

  In such a first vibrating part 51, the Z-axis displacement part 516A causes the pair of connecting springs 517A to bend and deform by the Coriolis force in the Y-axis direction when an angular velocity around the Z-axis is applied. Rotate around. According to such a configuration, since the Coriolis force in the Y-axis direction can be changed to the stress around the Z-axis, the amount of displacement of the Z-axis displacement portion 516A can be increased.

The rotation transducer 95 of the detection means 9 of the present embodiment has a Z-axis axis displacement portion 516A provided in the first vibrating portion 51, and a fixed electrode 911 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 911 are provided corresponding to the detection electrodes 516Ab included in the Z-axis displacement portion 516A. Each fixed electrode 911 has a pair of electrode pieces 911a and 911b arranged to face each other via the detection electrode 516Ab.
The resonator element of each embodiment as described above can be applied to various electronic devices, and the obtained electronic device has high reliability.

Here, an electronic device including the physical quantity sensor of the present invention will be described in detail with reference to FIGS.
FIG. 15 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic device including the physical quantity sensor of the present invention is applied.
In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 100. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably.
Such a personal computer 1100 incorporates a physical quantity sensor 1 that functions as angular velocity detection means (gyro sensor).

FIG. 16 is a perspective view illustrating a configuration of a mobile phone (including PHS) to which an electronic device including the physical quantity sensor of the present invention is applied.
In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and the display unit 100 is disposed between the operation buttons 1202 and the earpiece 1204.
Such a cellular phone 1200 incorporates a physical quantity sensor 1 that functions as an angular velocity detection means (gyro sensor).

FIG. 17 is a perspective view illustrating a configuration of a digital still camera to which an electronic device including the physical quantity sensor of the present invention is applied. In this figure, connection with an external device is also simply shown.
Here, an ordinary camera sensitizes a silver halide photographic film with a light image of a subject, whereas a digital still camera 1300 photoelectrically converts a light image of a subject with an imaging device such as a CCD (Charge Coupled Device). An imaging signal (image signal) is generated.

A display unit is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit is a finder that displays an object as an electronic image. Function.
A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302.

When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308.
In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

Such a digital still camera 1300 incorporates a physical quantity sensor 1 that functions as angular velocity detection means (gyro sensor).
In addition to the personal computer (mobile personal computer) shown in FIG. 15, the mobile phone shown in FIG. 16, and the digital still camera shown in FIG. Inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, televisions Telephone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments Type (e.g., vehicle, Sky machine, gauges of a ship), can be applied to a flight simulator or the like.

The physical quantity sensor of the present invention has been described based on the illustrated embodiment. However, the present invention is not limited to this, and the configuration of each part may be replaced with an arbitrary configuration having the same function. Can do.
In addition, any other component may be added to the present invention. Further, the present invention may be a combination of any two or more configurations (features) of the above embodiments.

  DESCRIPTION OF SYMBOLS 1 ... Physical quantity sensor 2 ... Substrate 3 ... Vibration system structure 31 ... Connection part 311 ... 1st part 312 ... 2nd part 313 ... 3rd part 314 ... 4th part 4 ... Vibration means 41 ... Fixed electrode 411, 412 ... Electrode piece 42 ... Fixed electrode 421, 422 ... Electrode piece 43 ... Fixed electrode 431, 432 ... Electrode piece 44 ... Fixed electrode 441, 442 ... Electrode pieces 45, 46 ... Piezoelectric element 51 ... First vibration part 511 ... Frame part 511a ... First opening 511b ... Second opening 511c ... Third opening 512 ... Z-axis direction displacement part 513, 514 ... Shaft part 515 ... Drive electrode 516 ... Y-axis direction displacement part 516a ... Frame part 516b ... Detection electrode 516c ... Base part 516d ... Detection electrode 516A ... Displacement part 516A a ... base 516 Ab ... detection electrode 517 ... spring part 517A ... connection spring 518a ... fixed part 518b ... connection part 519a ... Y-axis direction displacement part 519b ... spring part 52 ... first vibration part 521 ... frame part 522 ... Z-axis direction displacement part 523, 524 ... shaft part 525 ... drive electrode 526 ... Y-axis direction displacement part 526b ... detection electrode 527 ... spring part 53 ... second vibration part 531 Frame portion 531a First opening 531b Second opening 531c Third opening 532 Z-axis direction displacement portion 533, 534 Shaft portion 535 Drive electrode 536 X-axis direction displacement portion 536a ... frame part 536b ... detection electrode 537 ... spring part 539a ... X-axis direction displacement part 539b ... spring part 54 ... second vibration part 541 ... 542 ... Z-axis direction displacement part 543, 544 ... Shaft part 545 ... Drive electrode 546 ... X-axis direction displacement part 546b ... Detection electrode 547 ... Spring part 61, 62, 63, 64 ... Substrate Fixing part 651, 652, 661, 662, 671, 672, 681, 682 ... Outer fixing part 71, 72, 73, 74 ... Beams 711, 721, 731, 741 ... First beam 712, 722, 732, 742 ... 2nd beam 81 ... 1st inside spring part 811, 812 ... Spring part 82 ... 1st inside spring part 83 ... 2nd inside spring part 831, 832 ... Spring part 84 ... 2nd inside Spring part 851, 852, 861, 862, 871, 872, 881, 882 ... Outer spring part 9 ... Detection means 91 ... Displacement transducer 911 ... Fixed electrode 911a, 91 b ... Electrode piece 92 ... Displacement transducer 921 ... Fixed electrode 921a, 921b ... Electrode piece 93 ... Displacement transducer 931 ... Fixed electrode 931a, 931b ... Electrode piece 94 ... Displacement transducer 941 ... Fixed electrode 941a, 941b ... Electrode piece 95 ... Rotating transducer 951 ... Fixed electrode 96 ... Rotating transducer 961 ... Fixed electrode 97 ... Rotating transducer 971 ... Fixed electrode 98 ... Rotating transducer 981 ... · · · Fixed electrode 991, 992, 993, 994 · · · Piezoelectric element 995 and 996 · · · Piezoresistive portion 100 · · · Display portion 1100 · · · Personal computer 1102 · · · Keyboard 1104 · · · Body portion 1106 · · · Display unit 1200 · · · ... Mobile phone 1202 ... Operation buttons 1204 ... Earpiece 1206 ... Mouthpiece 1300 ... Digital still camera 1302 ... Case 1304 ... Light receiving unit 1306 ... Shutter button 1308 ... Memory 1312 ... Video signal output terminal 1314 ... I / O terminal 1430 ... TV monitor 1440 ... Personal computer J1, J2 ... Axis

Claims (19)

When two axes orthogonal to each other are a first axis and a second axis, and an axis orthogonal to both the first axis and the second axis is a third axis,
A pair of first mass parts arranged side by side around the third axis and opposed to each other in a direction parallel to the first axis, and a pair of second masses arranged to face each other in a direction parallel to the second axis Four mass parts comprising a mass part;
In a plane including the first axis and the second axis, the radial direction from the center of the assembly of the four mass parts forms a predetermined angle with respect to both the first axis and the second axis. Four fixed parts in the direction,
Two spring mechanisms extending from each of the fixed portions to two adjacent mass portions around the third axis;
The pair of second mass parts is vibrated in a direction parallel to the second axis while the pair of first mass parts are vibrated in mutually opposite phases at a predetermined frequency in a direction parallel to the first axis. Driving means for vibrating in a predetermined opposite phase with each other,
And at least one transducer that is provided in each of the mass parts and converts a displacement amount of a movable part included in each of the mass parts into an electrical signal,
The physical quantity sensor, wherein the two spring portions connected to each of the fixed portions vibrate in a tuning fork within the plane according to the predetermined frequency. When two axes orthogonal to each other are a first axis and a second axis, and an axis orthogonal to both the first axis and the second axis is a third axis,
A pair of first mass parts arranged side by side around the third axis and opposed to each other in a direction parallel to the first axis, and a pair of second masses arranged to face each other in a direction parallel to the second axis Four mass parts comprising a mass part;
In a plane including the first axis and the second axis, the radial direction from the center of the assembly of the four mass parts forms a predetermined angle with respect to both the first axis and the second axis. Four fixed parts in the direction,
A direction-of-motion conversion means that extends from each of the fixed portions to the two mass portions adjacent to each other around the third axis and converts the direction of motion;
The pair of second mass parts is vibrated in a direction parallel to the second axis while the pair of first mass parts are vibrated in mutually opposite phases at a predetermined frequency in a direction parallel to the first axis. Driving means for vibrating in a predetermined opposite phase with each other,
Each of the mass parts is in the plane and has a rotation axis parallel to the first axis or the second axis and a first movable part capable of rotating around the rotation axis, and in the plane And a second movable part that can be displaced in the direction of the first axis or the second axis, and a transducer,
The transducer has a rotation transducer that converts a displacement amount of the first movable part into an electrical gain signal, and a displacement transducer that converts a displacement amount of the second movable part into an electrical gain signal,
The physical quantity sensor characterized in that the movement direction converting means vibrates in a tuning fork within the plane according to the predetermined frequency. Each of the fixed portions has a fixed substrate;
The physical quantity sensor according to claim 1, wherein the substrate is constituted by a semiconductor substrate, an insulating substrate, or a composite substrate in which a semiconductor layer and an insulating layer are stacked.   Each of the four fixed portions has a radial direction from the center of the assembly of the four mass portions on both the first axis and the second axis in a plane including the first axis and the second axis. 4. The physical quantity sensor according to claim 1, wherein the physical quantity sensor is located in a direction that forms an angle of 45 degrees with respect to the axis.   The said four fixing | fixed part was provided in the mirror-symmetrical position with respect to the said 1st axis | shaft and said 2nd axis | shaft which cross | intersect the center of the said 4 mass part. The physical quantity sensor described.   2. The two spring mechanisms extending from each fixing portion are allowed to be deformed in a declination direction around the fixing point and are restricted from being deformed in a radial direction. The physical quantity sensor described.   The physical quantity sensor according to claim 1, wherein the driving unit is one of electrostatic driving and piezoelectric driving.   The physical quantity sensor according to claim 1, wherein the transducer has a detection capability of any one of an electrostatic type, a piezoelectric type, and a piezoresistive type.   The transducer detects an angular velocity around the first axis, an angular velocity around the second axis, and an angular velocity around a third axis orthogonal to both the first axis and the second axis. The physical quantity sensor according to claim 1.   10. The physical quantity sensor according to claim 1, wherein each of the transducers cancels linear acceleration in a predetermined direction by being paired with each of the other transducers.   The physical quantity sensor according to claim 1, wherein each of the transducers has a specific resonance frequency.   The two spring mechanisms extending from each of the fixed portions convert the expansion and contraction motion of the first shaft or the second shaft into a tuning fork vibration centered on the fixed portion, and displacement is limited in other directions. The physical quantity sensor according to claim 1, wherein the physical quantity sensor is provided.   3. The movement direction converting means extending from each of the fixed portions, the ends on the fixed portion side perform a tuning fork movement in a plane including the first axis and the second axis. The physical quantity sensor described.   14. The physical quantity sensor according to claim 1, wherein a projected outer shape of the aggregate of the pair of first mass parts and the pair of second mass parts is substantially circular.   The physical quantity sensor according to any one of claims 1 to 13, wherein a projected external shape of an assembly of the pair of first mass parts and the pair of second mass parts is substantially rectangular.   The physical quantity sensor according to claim 1, wherein the vibration unit is connected to each of the first mass part and the second mass part.   The physical quantity sensor according to any one of claims 1 to 16, wherein the transducer is connected to each of the first mass part and the second mass part. When two axes orthogonal to each other are a first axis and a second axis, and an axis orthogonal to both the first axis and the second axis is a third axis,
A pair of first mass parts arranged side by side around the third axis and opposed to each other in a direction parallel to the first axis, and a pair of second masses arranged to face each other in a direction parallel to the second axis Four mass parts comprising a mass part;
When viewed from a plane including the first axis and the second axis, the radial direction from the center of the assembly of the four mass parts is a predetermined angle with respect to both the first axis and the second axis. 4 fixed parts in the direction to make
Two movement direction changing means extending from each of the fixed parts to two adjacent mass parts around the third axis;
The pair of second mass parts is vibrated in a direction parallel to the second axis while the pair of first mass parts are vibrated in mutually opposite phases at a predetermined frequency in a direction parallel to the first axis. Driving means for vibrating in a predetermined opposite phase with each other,
And at least one transducer that is provided in each of the mass parts and converts a displacement amount of a movable part included in each of the mass parts into an electrical signal,
In synchronization with the tuning fork vibration in the plane including the first axis and the second axis, the four mass parts expand and contract with respect to the center of the aggregate. A physical quantity sensor characterized by that.   An electronic apparatus using the physical quantity sensor according to any one of claims 1 to 18.

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