JP2011258730A - Conveyance apparatus positioning mechanism - Google Patents

Abstract

An object of the present invention is to make it possible to easily move a transfer apparatus during maintenance, to obtain position reproducibility at the time of re-installation, and to eliminate the need for teaching of a transfer robot, and to operate an exposure apparatus and a coater / developer. Reduces downtime.
An apparatus fixing base 210, positioning protrusions 8a, 8b, 8c fixed to the lower surface of the apparatus fixing base 210, positioning protrusion receiving portions 7a corresponding to the positioning protrusions 8a, 8b, 8c, 7b, 7c, a lifting mechanism for moving the device fixing base 210 in the vertical direction, a horizontal movement mechanism for horizontally moving the device fixing base 210, and an operation unit for operating the lifting mechanism. A positioning mechanism is used.
[Selection] Figure 5

Description

  The present invention relates to a semiconductor wafer transfer apparatus.

  In the semiconductor wafer manufacturing process, sample conveyance is automatically performed between various manufacturing apparatuses.

  A sample is accommodated in a FOUP (Front Opening Unified Pod), and is conveyed between apparatuses by OHV (Overhead Hoist Vehicle) and AGV (Automatic Guided Vehicle).

  The manufacturing apparatus is divided into an apparatus main body for processing and inspecting a sample, and a transport apparatus for taking the sample from the FOUP and transporting the sample to a predetermined position on the main body side. Further, in a large-scale apparatus such as an exposure apparatus, a transport apparatus for transporting a sample directly to the exposure apparatus is installed from a host apparatus coater / developer.

  In general, a transport apparatus is equipped with a robot for transporting a sample in a chamber having a clean environment, and the robot transports the sample to a predetermined position of the manufacturing apparatus. Since the sample is automatically transferred between different apparatuses, the sample transfer position in each apparatus is strictly determined.

  In order to increase the number of samples to be processed, semiconductor manufacturers are required to reduce the operation stop time of the apparatus by maintenance in addition to the throughput of the manufacturing apparatus.

  In a clean room, which is a semiconductor manufacturing environment, space is saved, and the exposure device, coater / developer, and transfer device are installed close to each other. Maintenance space is secured by moving the transfer device. For this reason, when the transfer device is reinstalled after maintenance, it is necessary to adjust the position of the transfer device and teach the transfer position to the transfer robot.

  The following patent documents are examples of known techniques related to teaching of the transfer device.

  Patent Document 1 teaches that a load port device mapping reference position is used as a teaching point for teaching work of a substrate transfer robot and determines whether or not a substrate can be taken out based on the teaching point. There is disclosed a method for transporting a substrate characterized in that the origin position of the transport robot is matched, the position data of the load transport device and the substrate transport robot is shared, and the teaching point is corrected.

  In Patent Document 2, before and after the jig held by the holding part is moved in the radial direction, the mark provided at the target position is imaged by the imaging means of the jig, and based on the displacement of the mark on the captured image. Discloses a wafer transfer device that detects the amount of movement of a jig accompanying movement in the radial direction and corrects the position of the robot portion so that the detected amount of movement is less than or equal to a predetermined value. .

Japanese Patent Laid-Open No. 2008-147583 JP 2009-184069 A

  As described above, in order to increase the number of processed samples, it is necessary to shorten the operation stop time of the exposure apparatus and the coater / developer at the time of maintenance, and to operate the apparatus immediately.

  However, in the conventional method in which the transfer device is moved and adjusted by a caster and the level is adjusted by an adjuster bolt or the like, it takes time for adjustment work and, in some cases, installation and removal of the caster. An error from the installation position before moving occurs. For this reason, it is necessary to re-teach the transfer position for the sample transfer robot mounted inside the transfer apparatus and the coater / developer, which causes a long time for maintenance.

  The present invention makes it possible to easily move the transfer apparatus during maintenance, and to obtain position reproducibility at the time of re-installation, eliminating the need for teaching of the transfer robot, and for the exposure apparatus and the coater / developer. The purpose is to reduce downtime.

  The transfer device positioning mechanism of the present invention includes a device fixing base, a positioning protrusion fixed to the lower surface of the device fixing base, a positioning protrusion receiving portion corresponding to the positioning protrusion, and the device fixing base. And a vertical movement mechanism for moving the apparatus fixing base, a horizontal movement mechanism for horizontally moving the apparatus fixing base, and an operation unit for operating the vertical movement mechanism.

  According to the present invention, the transport device can be easily moved during maintenance.

  Further, according to the present invention, the time for teaching the transfer robot becomes unnecessary, and the operation stop time of the exposure apparatus and the coater / developer can be shortened.

It is a perspective view which shows the whole structure of the conveying apparatus of an Example. It is a perspective view which shows the other side of the conveying apparatus of FIG. It is a top view which shows arrangement | positioning of the conveying apparatus of an Example. It is a top view which shows the position of the conveying apparatus in the case of a maintenance. It is a partial side view which shows the positioning mechanism part of the conveying apparatus of an Example. It is a partial side view which shows the positioning mechanism part of the conveying apparatus of another Example. FIG. 6 is a partial side view showing a lifting operation of the transport device of FIG. 5. It is a partial side view which shows the position after raising operation of the conveying apparatus of FIG. It is a partial side view which shows the horizontal movement operation of the conveying apparatus of FIG.

  Hereinafter, a positioning mechanism for a transport device and a transport device using the same according to an embodiment of the present invention will be described.

  The transfer device positioning mechanism includes a device fixing base, a positioning protrusion fixed to the lower surface of the device fixing base, a positioning protrusion receiving portion corresponding to the positioning protrusion, and the device fixing base in the vertical direction. An elevating mechanism for moving the apparatus fixing base, a horizontal moving mechanism for moving the apparatus fixing base horizontally, and an operation unit for operating the elevating mechanism.

  In the positioning mechanism for the transfer device, the elevating mechanism moves in the direction of the rotation axis of the feed screw along with the movable arm having a fulcrum on the device fixing base and rotatable around the fulcrum, and the feed screw. The horizontal movement mechanism includes a wheel provided with an axle on a movable arm, and the axle is installed on the nut.

  In the transfer device positioning mechanism, the wheel can move in the vertical direction as the feed screw rotates, and can move in the horizontal direction with the wheel landing.

  In the transport device positioning mechanism, the number of positioning projections and positioning projection receiving portions is at least three pairs, and two of them allow the horizontal positioning of the device fixing base. .

  In the transport device positioning mechanism, at least one pair of the positioning projections and positioning projection receiving portions other than the two pairs enables positioning of the apparatus fixing base in the vertical direction together with the two pairs.

  In the positioning mechanism for a transfer device, the positioning protrusion receiving portion has a truncated cone shape or a conical shape.

  In the transport device positioning mechanism, the tip of the positioning projection is spherical.

  The transfer device positioning mechanism is fixed in a state where the device fixing base is moved vertically downward, and can be moved in the horizontal direction while the device fixing base is moved vertically upward.

  In the positioning mechanism for the transfer device, the wheel is moved downward by landing the rotation of the feed screw in one direction, and the movable arm is moved around the fulcrum by further rotating the feed screw in the one direction. Rotate to move the device fixing base vertically upward.

  In the positioning mechanism for a transfer device, three or four wheels are installed.

  The transport device includes the transport device positioning mechanism, and the device fixing base forms the bottom.

  Hereinafter, examples will be described, but the present invention is not limited to these examples. Further, the present invention can be applied to an apparatus that requires highly accurate positioning reproducibility other than a wafer transfer apparatus (also simply referred to as a transfer apparatus).

  FIG. 1 is a perspective view illustrating the overall configuration of the transport apparatus according to the embodiment. FIG. 2 is a perspective view showing the opposite side of the transport apparatus of FIG.

  In FIG. 1, the transport apparatus has a configuration including a mini-en main body 101 and a FOUP opener 102.

  As shown in FIG. 2, the transport apparatus has a control unit 103.

  In addition, a positioning base 105 is installed on the floor surface on which the conveying device is fixed, and a positioning pin receiving portion 107 and a positioning pin 106 are installed on the upper surface of the positioning base 105. These are fixed to the floor.

  A handle 104 (ratchet wrench) is installed at the bottom of the transfer device.

  FIG. 3 is a top view illustrating the arrangement of the transfer device according to the embodiment.

  In this figure, the transfer device 1 shows a state used in a semiconductor manufacturing process. The transfer apparatus 1 is disposed between the exposure apparatus 2 and the coater / developer 3, and transfers a sample 4 (wafer or the like) between the exposure apparatus 2 and the coater / developer 3.

  The transport apparatus 1 uses the hand 203 to transport the sample 4 to the sample delivery section 201 provided in the exposure apparatus 2 and the sample delivery section 202 of the coater / developer 3 provided in the transport apparatus 1.

  FIG. 4 shows an arrangement in a state where the transport device is moved during maintenance.

  In this figure, the transport device 1 is moved in the direction of the arrow 204 from the position shown in FIG. Thereby, the maintenance space 5 is ensured.

  FIG. 5 is a partial side view illustrating the positioning mechanism portion of the transport apparatus according to the embodiment.

  In this figure, the positioning mechanism portion of the transport device 1 is provided on a device fixing base 210 that constitutes the bottom of the transport device 1, and includes a positioning base 6, positioning pin receiving portions 7a, 7b, and 7c (positioning base or positioning base). (Projection receiving part), positioning pins 8a, 8b, 8c (positioning projection part), roller 9 (wheel), arm 10 (movable arm), nut 11, feed screw 12 and handle 13 (operation part).

  In order to install the transfer apparatus 1 at a predetermined position on the semiconductor manufacturing line, the positioning base 6 is fixed to the floor 211 at the installation position of the transfer apparatus 1 using an anchor. Three positioning pin receiving portions 7a, 7b, 7c are fixed to the positioning base 6.

  The positioning pins 8a and 8b have a spherical tip, and the positioning pin receiving portions 7a and 7b have a truncated cone shape or a conical recess shape.

  In the state used in the semiconductor manufacturing process, the positioning device 8 is supported by the positioning pins 8a, 8b, and 8c fixed to the transporting device 1 being placed on the positioning pin receiving portions 7a, 7b, and 7c, and positioning is performed at the same time. Has been.

  The positioning pins 8a, 8b, and 8c are fixed after adjusting the pop-out amounts of the positioning pins 8a, 8b, and 8c so that the conveying device 1 satisfies a predetermined height and level when the apparatus is first installed. Thereby, from the next time, adjustment of the height of the conveyance apparatus 1 and adjustment of a horizontal position at the time of installation become unnecessary.

  The roller 9 is installed on the apparatus fixing base 210 via the arm 10 and is rotatable around a shaft 302 (axle). The arm 10 is installed on the apparatus fixing base 210 by a shaft 301 (fulcrum) and can rotate around the shaft 301.

  The shaft 302 is connected to the nut 11. The nut 11 is connected to the feed screw 12 and moves in the horizontal direction as the feed screw 12 rotates. The handle 13 is a member for operating the elevating mechanism, and is attachable to and detachable from the end portion of the feed screw 12. This figure shows a state in which the handle 13 is attached. These are the lifting mechanism and the horizontal movement mechanism.

  FIG. 6 is a partial side view showing a positioning mechanism portion of a transport apparatus according to another embodiment.

  In this figure, positioning pin receiving portions 7 a, 7 b, 7 c are attached to the transport device 1, and positioning pins 8 a, 8 b, 8 c are attached to the positioning base 6. Even with such a configuration, the same operation as in FIG. 5 is possible.

  7 to 9 show an operation procedure of the transport device of FIG.

  FIG. 7 is a partial side view showing the lifting operation of the transport device. FIG. 8 is a partial side view showing the position after the lifting operation of the transport device. FIG. 9 is a partial side view showing the horizontal movement operation of the transport apparatus.

  In the feed screw 12 shown in FIG. 7, the portions corresponding to the left and right nuts 11 are a right screw and a left screw, respectively. For this reason, when the handle 13 is manually turned to rotate the feed screw 12, the left and right nuts 11 move in opposite directions. As the nut 11 moves, the arm 10 and the roller 9 rotate around the rotation axis (the axes 301 and 302) of the arm 10.

  When the handle 13 is further rotated after the roller 9 has landed on the floor, the transport device 1 is supported and raised by the roller 9. By selecting the screw shape (trapezoidal screw, ball screw, etc.) and the nominal diameter of the feed screw 12 according to the mass of the conveying device 1, the handle 13 can be operated with a manually obtained force. For this reason, utilities such as electric power and fluid are not required to operate this mechanism, and operations can be easily performed.

  As shown in FIG. 8, when the positioning pins 8a, 8b, and 8c are lifted from the positioning pin receiving portions 7a, 7b, and 7c, the positioning pins 8a, 8b, and 8c are moved to the positioning pin receiving portions 7a, 7b, and 7c. The conveying device 1 can be moved in the horizontal direction by using the landed roller 9 without being brought into contact with. FIG. 9 shows a state in which the transport device 1 is moved in the horizontal direction.

  When the transport device 1 is reinstalled, the transport device 1 is moved to a position where the positioning pins 8a, 8b, and 8c and the positioning pin receiving portions 7a, 7b, and 7c substantially coincide with each other, and the handle 13 is moved to the opposite side to the raised position. By rotating, the conveying device 1 is lowered. When the conveying device 1 is gradually lowered and the positioning pins 8a, 8b, and 8c come into contact with the positioning pin receiving portions 7a, 7b, and 7c, the conveying device 1 is again supported by the positioning pins 8.

  The positioning pins 8a and 8b have a spherical tip, and the positioning pin receiving portions 7a and 7b have a truncated cone shape or a shape having a conical groove (concave portion). This serves as a guide so that the positioning pins 8a and 8b and the centers of the positioning pin receiving portions 7a and 7b are located at a position where they coincide with each other due to the weight of the transport device 1. Thereby, the installation position before movement can be reproduced.

  1: transport device, 2: exposure device, 3: coater / developer, 4: sample, 5: maintenance space, 6: positioning base, 7a, 7b, 7c: positioning pin receiving portion, 8a, 8b, 8c: positioning pin, 9: roller, 10: arm, 11: nut, 12: feed screw, 13: handle.

Claims (11)

  An apparatus fixing base, a positioning protrusion fixed to the lower surface of the apparatus fixing base, a positioning protrusion receiving part corresponding to the positioning protrusion, and an elevating mechanism for moving the apparatus fixing base in the vertical direction And a horizontal movement mechanism for horizontally moving the apparatus fixing base, and an operation unit for operating the elevating mechanism.   The elevating mechanism includes a movable arm that has a fulcrum on the device fixing base and is rotatable around the fulcrum, a feed screw, and a nut that moves in the rotation axis direction of the feed screw as the feed screw rotates. The operation unit for rotating the feed screw, and the horizontal movement mechanism includes a wheel provided with an axle on the movable arm, and the axle is installed on the nut. The positioning mechanism for a conveyance apparatus as described.   The positioning mechanism for a transfer device according to claim 2, wherein the wheel is movable in the vertical direction along with the rotation of the feed screw, and is movable in the horizontal direction when the wheel is landed.   The number of the positioning protrusions and the positioning protrusion receiving portions is at least three pairs, two of which are capable of positioning the device fixing base in the horizontal direction. The positioning mechanism for a conveyance device according to any one of claims 1 to 3.   The at least one pair of the positioning protrusions and the positioning protrusion receiving portions other than the two pairs enables positioning of the device fixing base in the vertical direction together with the two pairs. 5. The positioning mechanism for a transfer device according to any one of 4 above.   The positioning mechanism for a transfer device according to any one of claims 1 to 5, wherein the positioning protrusion receiving portion has a truncated cone shape or a conical shape.   The positioning mechanism for a transfer device according to any one of claims 1 to 6, wherein the positioning projection has a spherical tip.   8. The apparatus according to claim 1, wherein the apparatus fixing base is fixed in a state in which the apparatus fixing base is moved vertically downward, and is movable in a horizontal direction in a state in which the apparatus fixing base is moved vertically upward. The positioning mechanism for a transport device according to the item.   The wheel is moved downward to land by advancing the rotation of the feed screw in one direction, and the movable arm is rotated around the fulcrum by further advancing the rotation of the feed screw in the one direction. The positioning mechanism for a transfer device according to any one of claims 2 to 8, wherein the device fixing base is moved vertically upward.   The said wheel is provided with three or four, The positioning mechanism for conveyance apparatuses as described in any one of Claims 2-9 characterized by the above-mentioned.   A conveyance device comprising the conveyance device positioning mechanism according to claim 1, wherein the device fixing base constitutes a bottom portion.

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