JP2011257660A - Photoelectric consolidation circuit packaging substrate, photoelectric conversion module, transmission device, and switch module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase the size of a conventional wavelength multiplexer / demultiplexer using a planar arrangement type optical waveguide, it is difficult to achieve high density optical wiring in an optical wiring structure using a wavelength division multiplexing transmission system.
SOLUTION: In an optical wiring based on a wavelength division multiplexing transmission system, a wavelength multiplexer / demultiplexer that can be integrated at a high density is used by using a wavelength multiplexer / demultiplexer using a laminated arrangement directional coupling optical waveguide. An optical wiring structure is provided.
[Selection] Figure 1

Description

  The present invention relates to an opto-electric hybrid circuit mounting substrate that enables large-capacity signal processing in a signal transmission device and signal processing device, and a module and device using the same.

  In recent years, with the dramatic increase in information processing capacity of servers, routers, etc., there has been a limit to the speedup of electrical interconnects, and the introduction of optical interconnect technology is being studied as a countermeasure. With regard to optical interconnect technology, optical circuit packaging technology has become smaller, development of cost reduction technology, and cost reduction of optical devices and components have advanced, and it is approaching practical use.

Interconnects are classified into three types according to the distance to be connected (transmitted) between housings, between cards (backplane), and between chips. In both cases, electrical transmission has been used in the past, but as the transmission speed required for the interconnect increases, optical transmission technology has begun to be introduced between nodes having a long transmission distance. As the speed of electrical transmission increases, the transmission distance decreases and the power consumption increases. For electrical interconnects, the application range of transmission rates has been expanded by the application of low dielectric constant substrates, pre-emphasis, and the addition circuit of equalizers, but even with these technologies, transmission rates equivalent to backplane transmission: 10 Gbps, transmission distance: around 1 m is the limit of electric transmission, and the boundary between electricity and light is visible (Non-patent Document 1).
The transmission capacity of the backplane that connects the boards in the backbone router and large-scale server devices exceeds 1 Tbps around 2008, and is expected to increase in capacity (1.5 times / year) in the future. In 2014, transmission technology exceeding 20 Gbps is required, and the bandwidth limitation of the electric backplane becomes serious. As described above, the introduction of optical transmission technology is expected as a means for resolving the bandwidth bottleneck of the backplane. Since light is incoherent (while electricity is coherent), noise and crosstalk caused by line-to-line interaction do not occur even when the transmission line interval is narrowed. Furthermore, the reflection and loss of light have no frequency dependence and can be controlled easily. As described above, opticalization of a high-frequency transmission line has a possibility of large-capacity transmission as compared with a conventional electric transmission line, and development related to optical wiring technology has been actively performed.

  Up to now, the optical wiring systems that have been developed can be broadly divided into systems that separate optical signal transmitters and receivers and systems that are integrated. The method of separating the transmitter and receiver consists of a transmitter in which the light emitting element and its driving electronic circuit are separately mounted, a receiver in which the light receiving element and the signal amplification electronic circuit are separately mounted, and an optical fiber is connected between them. ing. In the transmitter / receiver integrated system, a light emitting element and a light receiving element, a driving electronic circuit and a signal amplifying electronic circuit are mounted on the same substrate in a laminated structure, and an optical signal is input / output only by an optical fiber or an optical fiber and an optical waveguide This is done with combined optical wiring. Since the transmitter / receiver integrated system can be miniaturized, high-density mounting is possible and it is suitable for large-capacity signal processing. Furthermore, in the transmitter / receiver integrated system, there are a method in which optical input / output is performed using only an optical fiber, and a method in which optical input / output is combined with an optical fiber and an optical waveguide. When an optical wiring that combines an optical fiber and an optical waveguide is used in an integrated transmitter / receiver system, the optical wiring density in the photoelectric conversion part can be increased, which is suitable for large-capacity signal processing.

  In the optical wiring system described so far, a single wavelength signal is transmitted to one optical fiber and one optical waveguide, and so-called parallel signal is used to increase transmission capacity by using multiple transmission paths of optical fiber and optical waveguide. Based on the transmission method. Therefore, in order to realize high-density wiring and increase transmission capacity, integration of transmitter and receiver, mounting of optical elements and electronic circuits on the same substrate, high-density wiring by using optical waveguide, etc. are adopted. (See Patent Document 1). However, as in this method, there is a physical limit to the increase in transmission capacity based on spatial density increase. For example, even if the optical waveguide density of the photoelectric conversion portion can be increased, the number of transmission lines is actually limited by the size of the optical connector (or the thickness of the optical fiber) for connecting the optical fiber and the optical waveguide. . Therefore, a method of further increasing the transmission capacity without increasing the number of optical fibers by adopting a multiplex transmission method that transmits signals of a plurality of wavelengths to one optical fiber can be considered (wavelength multiplex transmission method). . In this method, optical signals having a plurality of wavelengths transmitted through an optical fiber are demultiplexed by a wavelength multiplexing / demultiplexing filter before being input to the photoelectric conversion unit, and conversion from the optical signal to the electrical signal is performed. Further, the signal converted from the electrical signal to the optical signal is multiplexed by the wavelength multiplexing / demultiplexing filter before being input to the optical fiber. As the wavelength multiplexer / demultiplexer used here, a directional coupler type wavelength multiplexer / demultiplexer using an optical waveguide suitable for integration on a substrate (see Non-Patent Document 2), or an array optical waveguide grating type wavelength multiplexer. There exists a duplexer (refer patent document 2).

JP 2009-00325 A Japanese Patent Laid-Open No. 11-266207

Kokura: “Latest Technology for Optical Transceivers for Optical Interconnects”, 0 plus E, p. 140 (2007). Katsuaki Okamoto: “Basics of Optical Waveguide” Chapter 4.2 p.131

  A directional coupler type wavelength multiplexer / demultiplexer using an optical waveguide suitable for integration on a substrate, or an array optical waveguide grating type, as a wavelength multiplexer / demultiplexer used in optical wiring based on wavelength division multiplexing transmission systems A wavelength multiplexer / demultiplexer can be considered. A conventional directional coupler type wavelength multiplexer / demultiplexer performs wavelength multiplexing / demultiplexing basically by utilizing optical mode coupling between optical waveguides arranged in a plane in the horizontal direction. For this reason, as the number of wavelengths to be multiplexed / demultiplexed increases, the number of optical waveguides increases, and thus the area of the multiplexer / demultiplexer increases. On the other hand, the arrayed optical waveguide grating type wavelength multiplexer / demultiplexer has a small increase in size depending on the number of wavelengths to be multiplexed / demultiplexed, but is arranged horizontally in the plane to increase the resolution of the wavelengths to be multiplexed / demultiplexed. Since it is composed of a grating waveguide portion composed of a plurality of optical waveguides and a relatively large slab waveguide necessary for spatially expanding or condensing light, the size is increased. As described above, the wavelength multiplexer / demultiplexer using these conventional planar arrangement type directional coupling optical waveguides is large in size, and it is difficult to achieve high-density wiring in the plane.

  An object of the present invention is to propose an optical wiring structure using a wavelength multiplexer / demultiplexer that can be integrated with high density.

  The present invention uses a wavelength multiplexer / demultiplexer using a laminated arrangement directional coupling optical waveguide in an optical wiring based on a wavelength division multiplexing transmission system.

  According to the present invention, a wavelength division multiplexing optical wiring structure having high density wiring can be provided.

1 is a cross-sectional view of an opto-electric hybrid circuit mounting substrate having a wavelength multiplexer / demultiplexer using a laminated arrangement directional coupling optical waveguide according to Embodiment 1. FIG. 6 is a diagram for explaining a method for producing a laminated arrangement directional coupled optical waveguide according to Example 1. FIG. It is the figure explaining the operation | movement principle (in the case of 2 wavelength multiplexing) of the wavelength multiplexer / demultiplexer which uses the laminated arrangement directional coupling optical waveguide based on Example 1. FIG. It is a perspective view (in the case of 3 wavelength multiplexing) of the wavelength multiplexer / demultiplexer which uses the directional coupling optical waveguide which used the plane arrangement | positioning and lamination | stacking arrangement | positioning together based on Example 2. FIG. FIG. 6 is a cross-sectional view of an optoelectric conversion module including an optical connector including an optical path conversion mirror and an opto-electric hybrid circuit mounting board described in Example 1 according to Example 3. FIG. 6 is a cross-sectional view of an optical / electrical conversion module including an optical connector including a 90-degree bent optical fiber and an opto-electric hybrid circuit mounting board described in Example 1 according to Example 4; It is a perspective view of the transmission apparatus using the wavelength division multiplexing optical transmission system characterized by comprising using the photoelectric conversion module described in Example 3 and 4 based on Example 5. FIG. It is a figure of the switch element using the photoelectric conversion module described in Example 3, 4 based on Example 6. FIG.

As described above, a directional coupler type wavelength multiplexer / demultiplexer using an optical waveguide suitable for integration on a substrate as a wavelength multiplexer / demultiplexer used in an optical wiring based on a wavelength division multiplexing transmission system Alternatively, an arrayed optical waveguide grating type wavelength multiplexer / demultiplexer is conceivable. However, since these conventional wavelength multiplexers / demultiplexers use a structure in which a plurality of optical waveguides are horizontally arranged in the plane, the area becomes large and high-density wiring may be difficult. Therefore, the present invention proposes a wavelength multiplexer / demultiplexer using a laminated arrangement directional coupling optical waveguide as the wavelength multiplexer / demultiplexer. In this wavelength multiplexer / demultiplexer, optical mode coupling between optical waveguides arranged above and below (stacked) is used. In an optical waveguide using an organic material, it is relatively easy to spatially change the distance between the stacked optical waveguides in a direction parallel to the layer. By using a wavelength multiplexer / demultiplexer using this laminated arrangement directional coupling optical waveguide, an optical wiring structure using a high-density wavelength division multiplexing transmission system can be provided.
Examples will be described in detail below.

  In this embodiment, a substrate and a plurality of optical waveguide layers formed on the substrate and formed of a core made of a material having a higher refractive index than the cladding layer and surrounded by the cladding layer are configured. A stacked arrangement directional coupler type wavelength multiplexer / demultiplexer, a mirror provided at the output end of each optical waveguide for optical path conversion in a direction perpendicular to the optical waveguide direction, and an outermost of the plurality of stacked optical waveguide layers. A light emitting device and a light receiving device mounted at positions corresponding to the mirror on the upper surface of the upper layer, and an electric wiring pattern formed on the upper surface of the uppermost layer of the plurality of laminated optical waveguide layers, An example of the opto-electric hybrid circuit mounting board will be described with reference to FIG.

  The opto-electric hybrid circuit mounting board in this embodiment includes a printed circuit board 1 having electrical wiring patterns 10 and 11, an optical waveguide cladding layer 2 made of a low refractive index material, and an optical waveguide made of a high refractive index material. Wavelength combiner 4 disposed on the transmission unit side using a laminated arrangement directional coupling optical waveguide composed of core layer 3 and mirror 8 formed at each optical waveguide end, optical waveguide formed of a low refractive index material Of the optical waveguide core layer 6 made of a high refractive index material and a mirror 9 formed at the end of each optical waveguide. Wavelength demultiplexer 7, electrical connectors 12 and 13, wiring vias 14 and 15 for electrical wiring between laminated substrates, spacer layers 16 and 17 for adjusting the distance between the optical element array and the optical waveguide, and light of wavelength λ1 Luminescent elements that output signals On the array 18, a light emitting element array 19 that outputs an optical signal of wavelength λ2, a light receiving element array 20 that receives an optical signal of wavelength λ1, a light receiving element array 21 that receives an optical signal of wavelength λ2, an interposer layer 22, and an interposer layer Wiring vias 23 for electrically connecting the driving electronic circuit disposed to the light emitting element array disposed below the interposer layer, the signal amplification electronic circuit disposed on the interposer layer, and the light receiving element disposed below the interposer layer Wiring vias 24 for electrically connecting the arrays, electric wiring patterns 25 and 26 formed on the interposer, and driving electronics mounted on the interposer by connecting to the wiring pattern 28 with solder 27, signal amplification The electronic circuit 29 includes an electronic circuit and other signal processing electronic circuits. In this embodiment, a wavelength multiplexer with two wavelengths (λ1, λ2) is used. However, by increasing the number of directional coupling optical waveguides, a wavelength multiplexer with three or more wavelengths can be realized.

  Next, a basic method of manufacturing the wavelength multiplexer / demultiplexer will be described with reference to FIG. First, a cladding layer 31 of an optical waveguide is formed on a substrate 30 using a low refractive index organic material (FIG. 2A). Next, the clad layer 32 of the optical waveguide is further formed using the same low refractive index organic material as that of the clad layer 31, and the resist 33 is patterned (FIG. 2B). Thereafter, the cladding layer 32 is etched into a tapered shape, the resist is removed (FIG. 2C), and the first core layer 34 of the optical waveguide is formed using a high refractive index organic material (FIG. 2D); Hereinafter, the clad layers 31 and 32 are collectively referred to as 33). Further, a clad layer 35 is formed on the first core layer 34 using a low refractive index organic material, and the surface is flattened (FIG. 2E). Finally, the second core layer 36 is formed using a high refractive index organic material, and the cladding layer 37 is formed using a low refractive index organic material.

  The basic operation of the wavelength multiplexer / demultiplexer manufactured by the above method will be described with reference to FIG. Optical signals having wavelengths λ1 and λ2 are input to the optical waveguide 1, which is the upper optical waveguide. Since the optical waveguide 1 and the optical waveguide 2 are designed so that the optical propagation constants of the respective optical waveguides coincide with each other at the wavelength λ2 (FIG. 3B), the optical signal having the wavelength λ2 is coupled to the optical waveguide 2 and propagates. To do. The light propagation distance required for 100% coupling of the signal of wavelength λ 2 from the optical waveguide 1 to the optical waveguide 2 is proportional to the distance between the optical waveguide 1 and the optical waveguide 2. Accordingly, the closer the distance between the optical waveguide 1 and the optical waveguide 2 is, the shorter the propagation distance required for 100% coupling of the optical signal having the wavelength λ 2 to the optical waveguide 2 is achieved. After 100% coupling to the optical waveguide 2, the propagation distance necessary for the optical signal with the wavelength λ2 to return to the optical waveguide 1 is increased by increasing the distance between the optical waveguide 1 and the optical waveguide 2, and the optical signal with the wavelength λ2 Is not returned to the optical waveguide 1 until it is coupled to the optical element. Since the propagation constants of the optical waveguides 1 and 2 at the wavelength λ1 are different, the optical signal of the wavelength λ1 is not coupled to the optical waveguide 2 (FIG. 3B).

  The optical waveguide constituting the wavelength multiplexer / demultiplexer used in the present embodiment may be either a single mode optical waveguide having only a single optical waveguide mode or a multimode optical waveguide having a plurality of optical waveguide modes. The light emitting element may be either a surface light emitting element or an end face light emitting element in which a mirror and a lens capable of emitting light in a direction perpendicular to the element layer structure are integrated, like the surface light emitting element.

  An embodiment of an opto-electric hybrid circuit mounting board in which a wavelength multiplexer / demultiplexer composed of a directional coupling optical waveguide is composed of a laminated optical waveguide and a planar optical waveguide will be described with reference to FIG. . In the first embodiment, the wavelength multiplexer using the laminated arrangement directional coupling optical waveguide in the opto-electric hybrid circuit mounting substrate has been described. In this case, there is a concern that as the number of wavelengths increases, the number of laminated optical waveguides also increases and the number of manufacturing steps increases. In view of this, a wavelength multiplexer / demultiplexer using a planarly arranged optical waveguide in addition to the laminated optical waveguide is proposed. FIG. 4 shows a three-wavelength wavelength multiplexer / demultiplexer using a planar optical waveguide in addition to the laminated optical waveguide. This wavelength multiplexer / demultiplexer includes a clad layer 39 formed on a substrate 38, an optical waveguide 1 comprising a first core layer 40, an optical waveguide 2 comprising a second core layer 41, and an optical waveguide comprising a third core layer 42. It consists of three. Wavelengths λ1, λ2, and λ3 input to the optical waveguide 2 are output from the optical waveguide 1 at a wavelength λ1, a wavelength λ2 from the optical waveguide 2, and a wavelength λ3 from the optical waveguide 3, respectively. When used as a wavelength multiplexer, the reverse process). By using this wavelength multiplexer / demultiplexer for the opto-electric hybrid circuit mounting substrate described in the first embodiment, transmission with a larger number of wavelengths can be performed.

  It is composed of a ribbon optical fiber composed of a plurality of optical fibers, a mirror that changes the optical path in a direction perpendicular to the optical waveguide direction, and a lens array that condenses the optical path converted light on the optical waveguide formed on the substrate. An opto-electricity comprising an optical connector, an opto-electric hybrid circuit mounting board described in Example 1, the light-emitting element driving electronic circuit, and an electronic circuit for amplifying an electric signal from the light-receiving element. An embodiment of the conversion module will be described with reference to FIG. The electrical conversion module includes an opto-electric hybrid circuit mounting substrate described in the first embodiment, a mirror 43 that converts the optical path of the optical signal combined by the wavelength multiplexer / demultiplexer 4 in a direction perpendicular to the optical waveguide direction, and a lens. An optical connector 47 comprising an array 44, a mirror 45 and a ribbon optical fiber 46 comprising a plurality of optical fibers, an optical connector 52 comprising a ribbon optical fiber 51 comprising a plurality of optical fibers and a mirror 50, a lens array 49, a light The optical signal input through the connector 52 is composed of a mirror 48 for optical path conversion necessary for coupling the optical signal to the upper optical waveguide of the wavelength multiplexer / demultiplexer 7. Here, the optical fibers 47 and 51 may be multimode fibers or single mode fibers. Further, the wavelength multiplexer / demultiplexer may be a wavelength multiplexer / demultiplexer using a directional coupling optical waveguide using both the laminated arrangement and the planar arrangement described in the second embodiment.

  An optical connector comprising a ribbon optical fiber composed of a plurality of optical fibers bent at 90 degrees in an optical connector, and a lens array for condensing the optical path-converted light on an optical waveguide formed on the substrate, and an embodiment 1. An embodiment of an opto-electric conversion module comprising the opto-electric hybrid circuit mounting board according to claim 1, the light-emitting element driving electronic circuit, and an electronic circuit for amplifying an electric signal from the light receiving element. This will be described with reference to FIG. The photoelectric conversion module includes an opto-electric hybrid circuit mounting substrate described in the first embodiment and a mirror 53 that converts the optical path of the optical signal combined by the wavelength multiplexer / demultiplexer 4 in a direction perpendicular to the optical waveguide direction. Lens array 54, optical connector 56 including ribbon optical fiber 55 composed of a plurality of optical fibers bent at 90 degrees, optical connector 60 including ribbon optical fiber 59 composed of a plurality of optical fibers bent at 90 degrees, lens array 58, a mirror 57 for optical path conversion necessary for coupling the optical signal input through the optical connector 60 to the optical waveguide above the wavelength multiplexer / demultiplexer 7. Here, the optical fibers 55 and 59 may be multimode fibers or single mode fibers. Further, the wavelength multiplexer / demultiplexer may be a wavelength multiplexer / demultiplexer using a directional coupling optical waveguide using both the laminated arrangement and the planar arrangement described in the second embodiment.

  A line card having a first optical signal processing unit for processing an optical signal input from the outside; and a second optical signal processing unit for processing an optical signal transmitted from the line card via an optical wiring. A transmission device having a switch card, and a backplane composed of optical wiring for optically connecting the line card and the switch card, using the photoelectric conversion module described in the third and fourth embodiments. An embodiment of a transmission apparatus using a wavelength division multiplexing optical transmission system characterized by being configured will be described with reference to FIG. The transmission apparatus includes a plurality of line cards 66, a switch card 73, a backplane optical fiber 68 and a backplane 67 that connect the cards. On the line card 66, the backplane connector 61, the power connector 62, the photoelectric conversion module 63 described in the third and fourth embodiments, the electronic circuit 64, and the interface card 65 are mounted. On the switch card 73, the backplane connector 69, the power connector 70, the photoelectric conversion module 71 described in the third and fourth embodiments, and the electronic circuit 72 are mounted.

  An electronic integrated circuit for spatially switching an electrical signal, the photoelectric conversion module described in Examples 3 and 4 for converting an electrical signal into an optical signal, or converting an optical signal into an electrical signal, and from the photoelectric conversion module An embodiment of a switch module including an optical waveguide for connecting an optical signal to an optical connector, an optical connector for connecting an optical fiber for optical wiring between transmission devices, and a switch module will be described with reference to FIG. The switch element includes an optical fiber 74, an optical connector 75, an optical waveguide 76, the photoelectric conversion module 77 described in the third and fourth embodiments, and a switch LSI 78.

DESCRIPTION OF SYMBOLS 1 ... Printed circuit board 2 ... Cladding layer 3 ... Core layer 4 ... Wavelength multiplexer 5 ... Cladding layer 6 ... Core layer 7 ... Wavelength demultiplexer 8 ... Mirror 9 ... Mirror 10 ... Electric wiring pattern 11 ... Electric wiring pattern 12 ... Electrical connector 13 ... Electric connector 14 ... Wiring via 15 ... Wiring via 16 ... Spacer layer 17 ... Spacer layer 18 ... Light emitting element array 19 ... Light emitting element array 20 ... Light receiving element array 21 ... Light receiving element array 22 ... Interposer layer 23 ... Wiring via 24 ... wiring via 25 ... electric wiring pattern 26 ... electric wiring pattern 27 ... solder bump 28 ... wiring pattern 29 ... electronic circuit 30 ... substrate 31 ... cladding layer 32 ... cladding layer 33 ... resist 34 ... first core layer 35 ... cladding layer 36 ... 2nd core layer 37 ... Cladding layer 38 ... Substrate 39 ... 1st core layer 41 ... 2nd core layer 42 ... 3rd core layer 43 ... Lens 44 ... lens array 45 ... mirror 46 ... ribbon optical fiber 47 ... optical connector 48 ... mirror 49 ... lens array 50 ... mirror 51 ... ribbon optical fiber 52 ... optical connector 53 ... mirror 54 ... lens array 55 ... 90 degree bent ribbon light Fiber 56 ... Optical connector 57 ... Mirror 58 ... Lens array 59 ... 90 degree curved ribbon optical fiber 60 ... Optical connector 61 ... Backplane connector 62 ... Power connector 63 ... Photoelectric conversion module 64 ... Electronic circuit 65 ... Interface card 66 ... Line Card 67 ... Backplane 68 ... Backplane optical fiber 69 ... Backplane connector 70 ... Power connector 71 ... Photoelectric conversion module 72 ... Electronic circuit 73 ... Switch card 74 ... Optical fiber 75 ... Optical connector 76 ... Optical waveguide 77 ... Electrical conversion module 78 ... switch LSI

Claims (8)

A substrate,
A directional coupled optical waveguide composed of a laminated waveguide formed by laminating a plurality of optical waveguide layers surrounded by a cladding layer on the substrate and formed of a core made of a material having a higher refractive index than the cladding layer. A wavelength multiplexer / demultiplexer comprising:
A mirror that changes the optical path in a direction perpendicular to the optical waveguide direction provided at the output end of each optical waveguide;
A plurality of light emitting elements and a plurality of light receiving elements mounted at positions corresponding to the mirror on the upper surface of the uppermost layer of the plurality of laminated optical waveguide layers;
An opto-electric hybrid circuit mounting board comprising: an electric wiring pattern formed on an upper surface of an uppermost layer of the plurality of laminated optical waveguide layers.   2. The opto-electric hybrid circuit mounting board according to claim 1, wherein the directional coupling optical waveguide is constituted by an optical waveguide arranged in a stacking direction or an optical waveguide arranged in a plane direction. .   3. The opto-electric hybrid circuit mounting substrate according to claim 1, wherein the optical waveguide is formed of a single mode optical waveguide capable of propagating only a single optical waveguide mode.   The opto-electric hybrid circuit mounting substrate according to claim 1, wherein the optical waveguide is formed of a multimode optical waveguide capable of propagating a plurality of optical waveguide modes. A ribbon optical fiber composed of a plurality of optical fibers;
A mirror that changes the optical path in a direction perpendicular to the optical waveguide direction;
An optical connector composed of a lens array for condensing the optical path-converted light on an optical waveguide formed on the substrate;
The opto-electric hybrid circuit mounting board according to claim 1,
The light emitting element driving electronic circuit for driving the light emitting element;
A photoelectric conversion module comprising an electronic circuit for amplifying an electric signal from the light receiving element. A ribbon optical fiber composed of a plurality of optical fibers bent at 90 degrees in an optical connector;
An optical connector composed of a lens array for condensing the optical path-converted light on an optical waveguide formed on the substrate;
The opto-electric hybrid circuit mounting board according to claim 1,
The light emitting element driving electronic circuit for driving the light emitting element;
A photoelectric conversion module comprising an electronic circuit for amplifying an electric signal from the light receiving element. A line card equipped with a first optical signal processing unit for processing an optical signal input from the outside;
A switch card having a second optical signal processing unit for processing an optical signal transmitted from the line card via an optical wiring;
A transmission device having a backplane composed of optical wiring that optically connects the line card and the switch card,
A transmission apparatus using a wavelength division multiplexing optical transmission system, comprising the photoelectric conversion module according to claim 5 or the photoelectric conversion module according to claim 6. An electronic integrated circuit for spatially switching electrical signals;
The photoelectric conversion module according to claim 5 or the photoelectric conversion module according to claim 6, which converts an electrical signal into an optical signal or an optical signal into an electrical signal;
An optical waveguide for connecting an optical signal from the photoelectric conversion module to the optical connector;
And an optical connector for connecting an optical fiber for optical wiring between transmission devices.

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