JP2011245444A - Cleaning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cleaning device capable of clearly removing foreign substance such as swarf and cutting chips and oil even in a workpiece such as gear having irregularities and having easy equipment and installation actuated by only a pneumatic air source.SOLUTION: The cleaning device includes a tank 10 storing cleaning liquid and a workpiece holder 46 rotatably provided in a cleaning chamber 40 by supporting a rotary shaft. The workpiece holder is rotated by jetting compressed air against fins 48 provided at the rotary shaft. The cleaning device further includes an object nozzle provided in the cleaning chamber so as to be disposed opposite a workpiece W, a pneumatic actuation liquid supply pump 20 sucking the cleaning liquid to pump it to the object nozzle, and a pneumatic air source supplying the compressed air. The workpiece is rotated by jetting the compressed air from a nozzle for rotary movement for a prescribed period of time, and the pneumatic actuation liquid supply pump is simultaneously actuated to jet the cleaning liquid from the object nozzle for the prescribed period of time. Thereafter, an inflow path of the object nozzle is switched to the pneumatic air source to jet the compressed air for a prescribed period of time.

Description

  TECHNICAL FIELD The present invention relates to a cleaning device that removes foreign matter such as machine oil adhering to machine parts such as gears after processing, electrical oil, electronic parts, etc., and foreign matters such as chips and chips by injecting cleaning liquid and compressed air. It is.

  For example, since oils such as machine oil, foreign matter such as chips and chips adhere to the surface of machine parts such as gears manufactured by cutting, these stains are removed by thoroughly washing before use. It is necessary to keep it. The cleaning apparatus disclosed in the following patent document attempts to wash away oil and the like by putting a large number of machine parts in a basket and immersing them in a cleaning liquid tank.

Japanese Patent No. 3379816 Japanese Patent Application Laid-Open No. 6-299381

However, there is a problem that the oil or the like cannot be sufficiently removed from a workpiece having deep irregularities on the surface, depending on a conventional cleaning apparatus that immerses the basket containing the workpiece in the cleaning liquid. In particular, when the workpiece is a mechanical part such as a gear or a precision part, it has been difficult to cleanly clean even foreign matter such as chips and chips and oil adhering to a fine gap.
Therefore, the present invention is intended to provide a cleaning device that can cleanly clean foreign matter such as chips and chips and oil, even a workpiece such as a gear.
In addition, the present invention is intended to provide a cleaning apparatus that operates only with an air pressure source that is conventionally provided in a factory as a standard and does not require a power source.

For this purpose, the cleaning device of the present invention includes a tank for storing cleaning liquid, a cleaning chamber provided in the upper portion of the tank and communicating with the inside of the tank, and an open / close lid provided for taking a workpiece into and out of the cleaning chamber. A pneumatic cylinder that opens and closes the opening / closing lid, a work holder that is rotatably provided by supporting a rotating shaft in the cleaning chamber, and a jet of compressed air to the fins provided on the rotating shaft A rotary nozzle for rotating the workpiece holder, an objective nozzle provided in the cleaning chamber so as to face the workpiece set on the workpiece holder, and the cleaning liquid by sucking the cleaning liquid from the tank. A pneumatically actuated liquid feed pump that feeds pressure to the objective nozzle and an air pressure source that supplies compressed air. The workpiece is rotated by injecting compressed air from the rotating nozzle for a predetermined time. At the same time, the pneumatically operated liquid supply pump is operated to inject the cleaning liquid from the objective nozzle onto the workpiece for a predetermined time, and then the inflow path of the objective nozzle is switched to the pneumatic pressure source to the workpiece. A cleaning apparatus, wherein compressed air is jetted for a predetermined time.
According to the present invention, in the above-described cleaning apparatus, a rotation-reducing nozzle is provided so that the reverse rotation preventing member is brought into contact with the fin, and compressed air is jetted to the fin in a direction opposite to the rotation nozzle. Compressed air is jetted for a predetermined time, and then the compressed air is jetted from the rotation deceleration nozzle for a predetermined time, thereby reducing the time required to stop the rotation of the work holder.
Further, the present invention provides the above cleaning apparatus, wherein the ejector pump introduces compressed air from the pneumatic pressure source to the throat portion of the ejector pump and at least injects the compressed air from the objective nozzle to the workpiece. An exhaust means for sucking and discharging the air is provided.

  According to the cleaning apparatus of the present invention, foreign matter such as chips and chips and oil can be removed cleanly even with a workpiece such as a gear having deep irregularities on the surface. Moreover, since it operates only with an air pressure source, installation in a general factory equipped with an air pressure source becomes easy.

The front view of the washing | cleaning apparatus which concerns on this invention. The side view of the washing | cleaning apparatus which concerns on this invention. The longitudinal section of the cleaning room of the cleaning device concerning the present invention. FIG. 4 is a cross-sectional view taken along line AA in FIG. 3. FIG. 4 is a cross-sectional view taken along line B-B in FIG. 3. FIG. 3 is a pneumatic circuit diagram of the cleaning device according to the present invention. The flow diagram of compressed air and cleaning fluid of the cleaning device concerning the present invention. The longitudinal cross-sectional view in the tank of the oil-water separator of the washing | cleaning apparatus which concerns on this invention. The longitudinal cross-sectional view of the cyclone separator and oil tank of the oil-water separator of the washing | cleaning apparatus which concerns on this invention. FIG. 10 is a cross-sectional view taken along line CC in FIG. 9.

  Next, embodiments of the present invention will be described with reference to the drawings. 1 and 2, reference numeral 10 denotes a rectangular large-capacity tank provided for storing the cleaning liquid, and 20 denotes a pneumatically operated type provided to suck the cleaning liquid from the tank through the liquid suction pipe 21. A liquid supply pump (here, an air diaphragm pump is optimal), 30 is a control panel provided on the tank for accommodating various pneumatic control devices, and 40 is a rectangular container provided on the tank. A washing chamber 100 is an oil / water separation and recovery machine provided on the tank. The tank 10 is always open to atmospheric pressure because it communicates with the outside air through a vent (not shown). A water level meter 12 displays the water level of the cleaning liquid stored in the tank 10.

  31 is a push button type start valve provided on the left side toward the cleaning chamber 40, 32 is a push button type home position return valve provided on the right side, and 33 is a push button provided on the front surface of the control panel 30. Type emergency stop valve.

  An open / close lid 35 covers the upper opening of the cleaning chamber 40, and the open / close lid 35 is supported so as to be openable / closable with a hinge portion 36 provided on the rear side of the upper opening edge of the cleaning chamber 40 as a fulcrum. Reference numeral 37 denotes a pneumatic cylinder having a base end supported on the tank. An operating shaft of the pneumatic cylinder is pivotally attached to a tip of a lever 39 projecting from the rear side surface of the opening / closing lid 35, and the pneumatic cylinder is attached to the pneumatic cylinder. By operating, the opening / closing lid 35 opens and closes as indicated by the broken line. For this reason, the workpiece W can be taken in and out of the cleaning chamber 40. Reference numeral 38 shown in FIG. 1 indicates an open / close confirmation valve provided on the upper side wall of the cleaning chamber 40 so as to operate by contacting the open / close lid 35 when the open / close lid 35 is closed.

  As shown in FIGS. 3 to 5, the cleaning chamber 40 has a funnel-shaped opening 49 formed below, a support frame 41 fixed inside, and a bearing 42 provided in the center of the support frame. The rotary shaft 43 is supported vertically, and a circular plate 44 is fixed to the upper end portion of the rotary shaft by a nut 47. A plurality of engaging pieces 45 are provided concentrically on the upper surface of the circular plate to constitute a work holder 46. Then, the work piece W is held horizontally by inserting the engagement piece 45 as a work W into the inner diameter of the gear indicated by the broken line. The engagement piece 45 has a stepped outer surface so that it can be inserted into the inner diameters of gears having different inner diameters. The workpiece holder 46 can be detachably fastened to the upper end of the rotating shaft 43 according to the shape and size of the workpiece to be cleaned by removing the nut 47. In addition, a so-called windmill is formed on the lower surface of the circular plate 44 by providing a large number of fins 48 radially about the rotation shaft 43.

  Further, 50 is fixed to the support frame 41, and a rotating nozzle for rotating the work holder 46 in the direction of the arrow by injecting compressed air to the fin 48. Thus, the reverse rotation preventing member is a plate spring fixed to the support frame 41. In addition, a rotation deceleration nozzle 52 is fixed to the support frame 41 so that compressed air is jetted to the fin 48 in the direction opposite to the rotation nozzle 50.

  Further, 53 is a manifold tube provided in the cleaning chamber 40, 54 is a plurality of objective nozzles projecting from the manifold tube, and each objective nozzle is provided to face the outer peripheral surface and the lower surface of the workpiece W. . A manifold pipe 55 is also provided inside the opening / closing lid 34, and a plurality of objective nozzles 56 project from the manifold pipe so as to face the outer peripheral surface and the upper surface of the workpiece W.

  A filter 57 is provided in the opening of the upper wall of the tank 10 facing the cleaning chamber 40, and is arranged so that the funnel-shaped opening 49 of the cleaning chamber 40 faces the opening. For this reason, solid foreign substances are captured by the filter 57 from the drained liquid flowing down from the cleaning chamber 40, and the drained liquid falls into the tank 10. A door plate 58 is provided on the lower front wall surface of the cleaning chamber 40 and opens and closes when the filter 57 is replaced.

  Reference numeral 60 shown in FIG. 2 is an exhaust means including an ejector pump for discharging the air in the cleaning chamber 40 to the outside of the cleaning chamber (upper space in the tank 10). As shown in FIG. 7, the ejector pump introduces compressed air from an air pressure source to the throat portion 63 and is provided with a pipe 61 communicating with the cleaning chamber 40, so that the venturi effect of the air passing through the throat portion 63 The inside of the pipe 61 is set to a negative pressure, whereby the air in the cleaning chamber 40 is sucked through the pipe 61 and the sucked air is discharged to the upper space in the tank 10 through the exhaust pipe 64.

  Next, the pneumatic circuit of this apparatus provided in the control panel 30 will be described with reference to FIG. In the figure, 70 is a pneumatic pressure source (a supply source of compressed air from an air pump) provided as standard in a machine factory or the like, 71 is a compressed air introduction setting valve provided in the pneumatic pressure source, 72 Is a filter, and 73 is an air pressure adjusting valve with a pressure gauge, and the air pressure adjusting valve 73 is set so that the air pressure on the secondary side of the air pressure adjusting valve 73 is 0.5 MPa. The secondary side of the pneumatic pressure adjusting valve 73 is connected to a flow path switching on / off valve 74 for operating the pneumatic cylinder 37 and on-off valves 75 to 79 to be described later. Reference numeral 80 denotes an air pressure adjusting valve with a pressure gauge set so that the air pressure on the secondary side becomes 0.3 MPa. The secondary side of the air pressure adjusting valve 80 is the push button type original position return valve. 32, piped to the push button type emergency stop valve 33 and the relay valve 81. The relay valve 81 is provided on the secondary side of the emergency stop valve 33 and is normally open, and closes when the push button type emergency stop valve 33 is operated. The secondary side of the relay valve 81 is connected to the push button type start valve 31, the open / close confirmation valve 38 and the flow path switching valve 82. The secondary side of the push button type start valve 31 is connected to one pilot port of the flow path switching valve 82.

  A shuttle valve 83 has an outflow port connected to the other pilot port of the flow path switching valve 82. Reference numeral 84 denotes a shuttle valve in which an outflow port is connected to one pilot port of the flow path switching on-off valve 74. The secondary side of the push button type original position return valve 32 is connected to one inflow port of the shuttle valve 83 and one inflow port of the shuttle valve 84. A relay valve 85 is provided on the secondary side of the open / close check valve 38 so as to open and close by the operation of the open / close check valve 38, and one open / close port of the relay valve is one open / close port of the flow path switching valve 82. The other switching port of the relay valve is connected to the pilot port of the switching valve 75 and the inlet of the switching valve 86. The other opening / closing port of the flow path switching valve 82 is connected to the other inflow port of the shuttle valve 84, one pilot port of the flow path switching valve 86, and one pilot port of the flow path switching valve 87.

  6 are all opened by a flow rate adjusting valve, an accumulator filled with air passing through the flow rate adjusting valve, and a pressure of air filled in the accumulator. A pneumatically operated timer composed of an open / close valve. The secondary side of the open / close valve of the pneumatically operated timer 88a is connected to the other pilot port of the flow path switching valve 87, and the secondary side of the open / close valve of the pneumatically operated timer 88b is the flow path switching valve 86. The other side of the open / close valve of the pneumatically operated timer 88c is connected to the other inflow port of the shuttle valve 83. One outlet of the flow path switching valve 86 is connected to the pilot port of the opening / closing valve 77, the flow rate adjusting valve and the opening / closing valve of the pneumatically operated timer 88a, and the inlet of the flow path switching valve 87. . The other outlet of the flow path switching valve 86 is connected to the pilot port of the opening / closing valve 76 and the flow rate adjustment valve and opening / closing valve of the pneumatically operated timer 88c. One outlet of the flow path switching valve 87 is piped to the pilot port of the opening / closing valve 79, and the other outlet of the flow path switching valve 87 is the pilot port of the opening / closing valve 78 and the pneumatically operated timer 88b. It is connected to the flow control valve and the open / close valve.

  As shown in FIGS. 6 and 7, the compressed air connection port A on the secondary side of the open / close valve 75 supplies compressed air to an ejector pump 107 of the oil / water separation and recovery machine 100 described later. The compressed air connection port B on the secondary side of the open / close valve 76 supplies compressed air to the rotation deceleration nozzle 52. The compressed air connection port C on the secondary side of the opening / closing valve 77 supplies compressed air to the rotational movement nozzle 50. The compressed air connection port D on the secondary side of the on-off valve 78 supplies compressed air to the manifold pipe 53 and the manifold pipe 55 via the check valve 91. The compressed air connection port E on the secondary side of the on-off valve 79 is connected to the pneumatically operated liquid supply pump 20, and the pump 20 is operated so that the cleaning liquid sucked from the tank 10 is checked by the check valve 90. Then, it is supplied to the manifold pipe 53 and the manifold pipe 55.

  In the cleaning apparatus configured as described above, by operating the push button type in-situ return valve 32, the compressed air switches the flow path switching on / off valve 74 via the shuttle valve 84, and at the same time the compressed air is shuttled. Since the flow path switching valve 82 is brought into the illustrated state via the valve 83, the compressed air is continuously supplied to the shuttle valve 84, the pneumatic cylinder 37 is contracted, and the opening / closing lid 35 is opened. Therefore, the worker or the robot can set the workpiece W on the workpiece holder 46.

  When the push button type start valve 31 is operated, the flow path switching valve 82 is switched, the flow path switching open / close valve 74 is switched in the opposite direction, and the pneumatic cylinder 37 is extended to close the open / close lid 35. When the opening / closing lid 35 is closed, the opening / closing confirmation valve 38 is opened by the weight of the opening / closing lid 35, the relay valve 85 is opened, the opening / closing valve 75 is opened, and compressed air is supplied from the compressed air connection port A to the ejector pump 107 described later. At the same time, the compressed air is supplied to the opening / closing valve 77 through the flow path switching valve 86 and opens the opening / closing valve 77, so that the compressed air is injected from the rotary nozzle 50 to the fin 48 and the work holder 46 is moved to the arrow. Rotate in the direction of.

  When the relay valve 85 is opened, the compressed air is supplied to the flow rate adjustment valve of the pneumatically operated timer 88a via the flow path switching valve 86, and the pneumatically operated timer 88a is operated. Since it is also supplied to the opening / closing valve 79 via the flow path switching valve 87, the opening / closing valve 79 is opened, compressed air is supplied to the pneumatically operated liquid supply pump 20, and the pump 20 is operated. The cleaning liquid sucked from is pumped to the manifold tubes 53 and 55, and the cleaning liquid is sprayed from the objective nozzles 54 and 56 toward the workpiece W. For this reason, the cleaning liquid sprayed from the objective nozzles 54 and 56 completely strikes the workpiece W, and foreign matters such as oil, chips, chips and the like adhering to the workpiece W are blown off cleanly by the centrifugal force accompanying rotation. It is. Solid foreign matters such as chips and chips in the cleaning liquid discharged from the cleaning chamber 40 are captured by the filter 57, and the oil and the cleaning liquid flow down to the tank 10 and are stored.

  Meanwhile, since the air passing through the flow rate adjusting valve is gradually supplied to the accumulator of the pneumatically operated timer 88a, the air pressure of the accumulator gradually rises and after a certain time (for example, 17 seconds), the timer 88a The opening / closing valve is opened and the flow path switching valve 87 is switched. For this reason, the on-off valve 79 is closed, and air is gradually supplied to the flow rate adjusting valve of the pneumatically operated timer 88b. At the same time, the on-off valve 78 is opened, and the manifold is passed through the check valve 91 from the compressed air connection port D. The compressed air is pumped to the pipes 53 and 55, the compressed air is jetted from the objective nozzles 54 and 56 toward the work W, and the cleaning liquid adhering to the work W is blown off in combination with the centrifugal force accompanying the rotation. At this time, the opening / closing valve 77 is kept open, and the rotational movement of the workpiece W is maintained. Further, since the compressed air from the compressed air connection port D is also pumped to the exhaust means 60 throat portion 63, the air in the cleaning chamber 40 is sucked through the pipe 61 and the sucked air is sucked through the exhaust pipe 64. It is discharged into the inner upper space. By forcibly discharging the air in the cleaning chamber 40 in this way, an increase in atmospheric pressure in the cleaning chamber 40 is suppressed, and compressed air is smoothly injected from the objective nozzles 54 and 56.

  During this time, since the air pressure of the accumulator of the pneumatically operated timer 88b gradually increases, the open / close valve of the timer 88b opens after a certain time (for example, 20 seconds), and the flow path switching valve 86 is switched. . For this reason, the opening / closing valve 77 is closed and the injection of the compressed air from the rotational movement nozzle 50 is stopped, and at the same time, the opening / closing valve 76 is opened, and the compressed air is injected from the rotational deceleration nozzle 52 to the fin 48 before the work is started. Stop the rotation of W. Thus, by ejecting the compressed air from the rotation deceleration nozzle 52 for a predetermined time, the time required for stopping the rotation of the work holder is shortened. Note that the work W does not rotate reversely by providing the reverse rotation preventing member 51.

  Further, when the flow path switching valve 86 is switched, air is gradually supplied to the flow rate adjusting valve of the pneumatically operated timer 88c, and the timer 88c is opened and closed after a certain time (for example, after 3 seconds). When the valve is opened, the compressed air operates the flow path switching valve 82 via the shuttle valve 83. For this reason, the flow path switching valve 82 is in the state shown in the figure, that is, the state before the push button type start valve 31 is operated. For this reason, the injection of compressed air from the rotation deceleration nozzle 52 is stopped, and at the same time, the flow path switching on / off valve 74 is operated to operate the pneumatic cylinder 37 to open the on / off lid 35 and the workpiece W can be taken out. . When the push button type emergency stop valve 33 is operated, the relay valve 81 is closed, so that the above cleaning operation is interrupted at any time.

  Next, an oil / water separation and recovery machine (oil skimmer) 100 provided in the cleaning device will be described. As shown in FIG. 8, a support cylinder 101 is fixed vertically on the upper wall of the tank 10, a liquid absorption pipe 102 made of a hollow pipe is supported in the support cylinder 101, and the lower part of the liquid absorption pipe is connected to the tank. 10 to hang down. A long hole 103 that is long in the vertical direction is formed in a portion of the liquid absorption pipe that hangs down in the tank 10. 104 is a slide tube slidably provided on the outer periphery of the liquid suction tube 102, 105 is a pair of floats fixed to the outer periphery of the slide tube, and pins that are loosely fitted into the long hole 103 in the slide tube 106 is provided. For this reason, the float 105 floats with the cleaning liquid in the tank 10, and the slide tube 104 slides up and down within the range of the long hole 103 as the liquid level rises and falls.

  Reference numeral 107 denotes an ejector pump provided at the upper end of the liquid suction pipe 102. As shown in FIG. 7, the ejector pump is connected to the throat portion 108 so that compressed air is supplied from the compressed air connection port A. When the compressed air is supplied to the throat portion 108, the venturi effect is obtained. As a result, the inside of the liquid suction pipe 102 becomes a negative pressure, so that the cleaning liquid in the tank 10 is sucked. Since the lower end portion of the liquid suction pipe 102 is covered with the slide pipe 104 as shown in FIG. 8, the liquid suction port through which the liquid suction pipe 102 sucks the cleaning liquid moves up and down as the cleaning liquid level rises and falls. To do. For this reason, the upper layer portion of the cleaning liquid (that is, the layer containing a large amount of oil having a low specific gravity) is always sucked into the liquid suction tube 102. The sucked liquid is mixed with the compressed air blown from the throat section 108 to form a mist, and is guided to the cyclone separator 110 through the communication pipe 109.

  As shown in FIGS. 9 and 10, the cyclone separator 110 is provided with a blow pipe 111 at the top of a cylindrical container so as to be connected in a tangential direction, and one end of an exhaust hose 112 is centered on the upper lid of the cylindrical container. The opening is connected, and the other end opening of the exhaust hose 112 is communicated with the upper space in the tank 10. The cylindrical container has a lower half formed in a funnel shape, and an oil tank 113 is provided so as to face the lower opening, and a recovery oil tank 115 is formed so that the oil tank 113 and the weir 114 are adjacent to each other. It is. For this reason, the oil component of the mist that is blown out from the discharge tube 111 through the communication tube 109 adheres to the inner surface of the cyclone separator 110, and the air component is discharged to the upper space in the tank 10 through the exhaust hose 112. Is done. The oil adhering to the inner surface of the cyclone separator 110 flows down to the oil tank 113 by its own weight, and the washing liquid having a high specific gravity sinks in the oil tank, and the light oil overflows the weir 114 and overflows into the recovered oil tank 115.

  Therefore, according to this oil / water separation and recovery machine, the oil such as the machine oil adhering to the workpiece W can be separated from the cleaning liquid and recovered in the recovered oil tank 115 with high purity, and the cleaning liquid in the tank 10 can be recovered from the oil. It can be kept in a clean state with a small amount at all times. In addition, 116 is a movable container arrange | positioned on the table 117 so that the oil component which overflowed further from the collection | recovery oil tank 115 may be received.

  As described above, since the cleaning device and its oil-water separator / recovery device according to the present invention are all controlled by an air sequence system, it can be easily operated only by an air pressure source provided as a standard in a machine factory or the like. Installation is easy because no power supply is required. For this reason, there is no risk of fire or explosion due to an electrical short circuit, and it can be safely operated even if installed in a factory that handles dangerous goods.

W Work
DESCRIPTION OF SYMBOLS 10 Tank 20 Pneumatically operated liquid supply pump 31 Push button type start valve 32 Push button type original position return valve 33 Push button type emergency stop valve 35 Opening and closing lid 37 Pneumatic cylinder 40 Washing chamber 43 Rotating shaft 46 Work holder 48 Fin DESCRIPTION OF SYMBOLS 50 Nozzle for rotation 51 Reverse rotation prevention member 52 Nozzle for rotation deceleration 54, 56 Objective nozzle 57 Filter 60 Exhaust means 63 Throat part 70 Air pressure source 80 Master valve 81-83 Air pressure operation type timer 84, 88, 89 Open / close valve 100 Oil water Separation and recovery machine 102 Absorption pipe 104 Slide pipe 105 Float 107 Ejector pump 108 Throat section 110 Cyclone separator 112 Exhaust hose 113 Oil tank

Claims (3)

  A tank for storing the cleaning liquid, a cleaning chamber provided in the upper part of the tank and communicating with the inside of the tank, an opening / closing lid provided for loading / unloading the workpiece into / from the cleaning chamber, and opening / closing the opening / closing lid A pneumatic cylinder, a workpiece holder rotatably provided by supporting the rotating shaft in the cleaning chamber, and the workpiece holder rotated by injecting compressed air to the fin provided on the rotating shaft. A rotating nozzle to be moved, an objective nozzle provided in the cleaning chamber so as to face the work set on the work holder, and a pneumatic pressure for sucking the cleaning liquid from the tank and pumping the cleaning liquid to the objective nozzle The pneumatic supply pump comprising an actuating liquid supply pump and an air pressure source for supplying compressed air, and simultaneously rotating the work by injecting compressed air from the rotating nozzle for a predetermined time. And the cleaning fluid is sprayed from the objective nozzle to the workpiece for a predetermined time, and then the inflow passage of the objective nozzle is switched to the air pressure source and the compressed air is sprayed to the workpiece for a predetermined time. A cleaning device characterized in that   The anti-reverse member is brought into contact with the fin, and a rotation deceleration nozzle is provided so that the compressed air is jetted in the direction opposite to the rotational movement nozzle, and the compressed air is jetted to the workpiece for a predetermined time. 2. The cleaning apparatus according to claim 1, wherein the time required to stop the rotation of the work holder is reduced by injecting the compressed air from the rotation deceleration nozzle for a predetermined time.   Exhaust means for sucking and discharging the air in the cleaning chamber by the ejector pump while the compressed air is introduced from the air pressure source into the throat portion of the ejector pump and at least the compressed air is injected from the objective nozzle to the workpiece. The cleaning apparatus according to claim 1, wherein the cleaning apparatus is provided.

Images