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JP2011111381A - Method of forming conductive carbon membrane - Google Patents

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JP2011111381A
JP2011111381A JP2009272241A JP2009272241A JP2011111381A JP 2011111381 A JP2011111381 A JP 2011111381A JP 2009272241 A JP2009272241 A JP 2009272241A JP 2009272241 A JP2009272241 A JP 2009272241A JP 2011111381 A JP2011111381 A JP 2011111381A
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carbon film
stainless steel
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conductive carbon
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JP5638231B2 (en
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Tasohiro Sugie
他曽宏 杉江
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Abstract


【課題】 導電性と耐食性に優れた炭素皮膜をステンレス鋼の表面に形成する方法を提供する。
【解決手段】 ステンレス鋼板に例えば9.0%以上の冷間圧延処理を施し、表層部のオーステナイト組織の一部を応力誘起マルテンサイト組織に変態させ、次いで表面にエッチングなどの前処理を施した後、プラズマCVD法により炭素皮膜を形成する。
【選択図】 図1

PROBLEM TO BE SOLVED: To provide a method for forming a carbon film excellent in conductivity and corrosion resistance on the surface of stainless steel.
A stainless steel sheet is subjected to a cold rolling treatment of, for example, 9.0% or more, a part of the austenite structure of the surface layer is transformed into a stress-induced martensite structure, and then a pretreatment such as etching is performed on the surface. Thereafter, a carbon film is formed by plasma CVD.
[Selection] Figure 1

Description

本発明は、例えば燃料電池のセパレータとして用いられるステンレス板の表面に導電性炭素皮膜を形成する方法に関する。 The present invention relates to a method for forming a conductive carbon film on the surface of a stainless steel plate used as a separator of a fuel cell, for example.

固体高分子型燃料電池は、燃料極と空気極の間に水素イオンを選択的に通す固体高分子を配置し、燃料極と空気極の外側にセパレータを配置してセルとし、このセルを連ねてスタックを構成している。   In a polymer electrolyte fuel cell, a solid polymer that selectively allows hydrogen ions to pass between a fuel electrode and an air electrode is disposed, and a separator is disposed outside the fuel electrode and the air electrode to form a cell. Stack.

それぞれのセパレータの外側には冷却水の通路が形成され、燃料極とセパレータとの間には水素が供給され、空気極とセパレータとの間には空気(酸素)が供給される。   A cooling water passage is formed outside each separator, hydrogen is supplied between the fuel electrode and the separator, and air (oxygen) is supplied between the air electrode and the separator.

上記セパレータは、水素と空気とを分離するとともに集電機能が要求されるため、ステンレス板の表面に導電性膜を形成したものが用いられている。   As the separator, hydrogen and air are separated and a current collecting function is required. Therefore, a separator in which a conductive film is formed on the surface of a stainless steel plate is used.

特許文献1には燃料電池用のセパレータとして、ステンレスを用い、プラズマイオン注入法によって表面にDLC(ダイヤモンドライクカーボン)膜を形成することが記載されている。 Patent Document 1 describes that stainless steel is used as a fuel cell separator and a DLC (diamond-like carbon) film is formed on the surface by plasma ion implantation.

特許文献2には燃料電池用のセパレータとして、ステンレス板の表面に貴金属メッキを施し、この貴金属メッキされた表面にエアロゾルデポジシション法によってカーボンブラック及び樹脂系材料の粒子を吹き付けてカーボン含有皮膜を形成することが記載されている。 In Patent Document 2, as a separator for a fuel cell, a surface of a stainless steel plate is subjected to noble metal plating, and a carbon-containing film is formed by spraying particles of carbon black and a resin-based material on the surface of the noble metal plating by an aerosol deposition method. It is described to form.

特許文献3には燃料電池用のセパレータとして、ステンレス鋼の表面に凹凸面を形成し、この凹凸面にECRスパッタリングによって非晶質炭素膜を形成することが記載され、特許文献4にはプラズマCVDによって非晶質炭素膜を形成することが記載されている。 Patent Document 3 describes that as a separator for a fuel cell, an uneven surface is formed on the surface of stainless steel, and an amorphous carbon film is formed on the uneven surface by ECR sputtering. Patent Document 4 describes plasma CVD. To form an amorphous carbon film.

特許文献5及び特許文献6には、自動車用メカニカルキーの表面摺動性を高めるために、ステンレス鋼からなる母材に冷間加工を施し、冷間加工で生じた加工誘起マルテンサイトを除去した後に、ステンレス鋼表面にDLC(ダイヤモンドライクカーボン)膜、窒化クロム膜などの機能性皮膜を形成することが開示されている。 In Patent Document 5 and Patent Document 6, in order to improve the surface slidability of the mechanical key for automobiles, the base material made of stainless steel is cold-worked to remove the work-induced martensite generated by the cold work. Later, it is disclosed that a functional film such as a DLC (diamond-like carbon) film or a chromium nitride film is formed on a stainless steel surface.

非特許文献1にはプラズマCVDによってセパレータ用ステンレス鋼の表面に炭素膜を形成することが記載されている。 Non-Patent Document 1 describes that a carbon film is formed on the surface of stainless steel for a separator by plasma CVD.

特開2009−037977号公報JP 2009-037977 A 特開2007−311137号公報JP 2007-31137 A 特開2007−165275号公報JP 2007-165275 A 特開2008−004540号公報JP 2008-004540 A 特開2008−031522号公報JP 2008-031522 A 特許第4291342号公報Japanese Patent No. 4291342 セラミックス 43(2008)No.6Ceramics 43 (2008) No. 6

特許文献1、特許文献5及び特許文献6に記載されるDLC(ダイヤモンドライクカーボン)膜は導電性を有さないため、メカニカルキーなどの表面の摺動性を高かめるにはよいが、燃料電池用のセパレータとしては導電性において劣る。 Since the DLC (diamond-like carbon) film described in Patent Document 1, Patent Document 5 and Patent Document 6 does not have conductivity, it is good for enhancing the slidability of the surface of a mechanical key or the like. As a separator for use, the conductivity is inferior.

特許文献2、特許文献3、特許文献4及び非特許文献1に記載されるセパレータはステンレス鋼の表面に導電性の炭素皮膜を形成しているため、導電性の点に関しては良いのであるが、耐食性及び被膜の密着性について問題がある。   The separators described in Patent Document 2, Patent Document 3, Patent Document 4 and Non-Patent Document 1 are formed with a conductive carbon film on the surface of stainless steel. There are problems with corrosion resistance and coating adhesion.

上記課題を解決するため本発明に係る導電性炭素皮膜の形成方法は、ステンレス鋼板に冷間圧延処理を施し、オーステナイト組織の一部を応力誘起マルテンサイト組織に変態させ、次いで表面に前処理を施した後、プラズマCVD法により炭素皮膜を形成するようにした。 In order to solve the above-mentioned problem, the method for forming a conductive carbon film according to the present invention is to subject a stainless steel plate to a cold rolling process, transform a part of the austenite structure into a stress-induced martensite structure, and then pretreat the surface. After the application, a carbon film was formed by plasma CVD.

冷間圧延によって生じる応力誘起マルテンサイト組織はフェライトと同じ結晶構造(bcc)をとり、クロム含有量は少ないため耐食性に劣る。このため特許文献5、6では応力誘起マルテンサイトを除去若しくは少なくなる処理を施している。 The stress-induced martensitic structure produced by cold rolling has the same crystal structure (bcc) as ferrite and has a low chromium content, and therefore is inferior in corrosion resistance. For this reason, in Patent Documents 5 and 6, a process for removing or reducing stress-induced martensite is performed.

しかしながら、本発明者の知見によれば、冷間圧延によって応力誘起マルテンサイト組織が生じても、その後のプラズマCVDによる炭素皮膜形成の過程(700℃程度)で、逆変態によってマルテンサイト組織がオーステナイト組織に戻るとともに、粒界近傍のクロム欠乏領域が減少し、ステンレス素地表面のクロム濃度が高くなることが分かった。 However, according to the knowledge of the present inventor, even if a stress-induced martensitic structure is generated by cold rolling, the martensitic structure is austenite by reverse transformation in the subsequent carbon film formation process (about 700 ° C.) by plasma CVD. As it returned to the structure, it was found that the chromium-deficient region near the grain boundary decreased and the chromium concentration on the stainless steel substrate surface increased.

このクロムと炭素とが結合して炭化物(Cr23)を形成し、この炭化物(Cr23)が炭素皮膜の下地となり、密着性の向上と緻密な被膜の形成に寄与し、更に炭素皮膜の一部に欠陥が生じた場合でも炭化物(Cr23)の存在によって耐食性が維持されると考えられる。 The chromium and carbon combine to form a carbide (Cr 23 C 6 ), and this carbide (Cr 23 C 6 ) serves as a base for the carbon film, contributing to improved adhesion and the formation of a dense film, Even when a defect occurs in a part of the carbon film, it is considered that the corrosion resistance is maintained by the presence of the carbide (Cr 23 C 6 ).

上記の応力誘起マルテンサイト組織への変態が顕著に現れるのは、冷間圧延の加工率(実測加工率)が9.0%以上の場合である。 The transformation into the stress-induced martensite structure appears remarkably when the cold rolling processing rate (actual processing rate) is 9.0% or more.

また、炭素皮膜の密着性を高めるために、皮膜形成の前処理として、プラズマエッチング工程によってある程度表面を粗すことが好ましい。 In order to improve the adhesion of the carbon film, it is preferable to roughen the surface to some extent by a plasma etching process as a pretreatment for film formation.

本発明に係る導電性炭素皮膜の形成方法によれば、ステンレス板の表面に耐食性および密着性に優れた導電性炭素皮膜を簡単且つ短時間で形成することができる。 According to the method for forming a conductive carbon film according to the present invention, a conductive carbon film excellent in corrosion resistance and adhesion can be formed on the surface of a stainless steel plate easily and in a short time.

本発明に係る導電性炭素皮膜の形成方法を適用したステンレス板をセパレータとして用いた燃料電池のセルの斜視図The perspective view of the cell of the fuel cell which used the stainless steel plate to which the formation method of the conductive carbon film concerning the present invention was applied as a separator. 複数のセルを直列に接続した燃料電池(スタック)の斜視図Perspective view of a fuel cell (stack) with multiple cells connected in series (a)は本発明に係る方法によって形成された炭素皮膜の顕微鏡写真(b)は冷間圧延を施さずに形成された炭素皮膜の顕微鏡写真(A) is a photomicrograph of the carbon film formed by the method according to the present invention (b) is a photomicrograph of the carbon film formed without cold rolling. 分極測定の結果を示すグラフGraph showing polarization measurement results 本発明に係る方法によって形成された炭素皮膜のAFM写真AFM photograph of carbon film formed by the method according to the present invention

以下に添付図面を参照して本発明の実施例を説明する。本発明に係る導電性炭素皮膜の形成方法は燃料電池のセパレータに応用できる。
燃料電池のセルは図1に示すように、燃料極1と空気極2の対向面に触媒層1a、2aが形成され、これら触媒層1a、2a間に固体高分子膜3が配置される。
固体高分子膜3としては水素イオンを選択的に透過させる物質、例えばスルホン酸基を有するフッ素ポリマーなどが挙げられる。
Embodiments of the present invention will be described below with reference to the accompanying drawings. The method for forming a conductive carbon film according to the present invention can be applied to a separator of a fuel cell.
As shown in FIG. 1, in the fuel cell, catalyst layers 1a and 2a are formed on opposite surfaces of the fuel electrode 1 and the air electrode 2, and a solid polymer film 3 is disposed between the catalyst layers 1a and 2a.
Examples of the solid polymer membrane 3 include a substance that selectively permeates hydrogen ions, such as a fluoropolymer having a sulfonic acid group.

燃料極1の外側にはセパレータ4が設けられ、このセパレータ4と燃料極1との間に水素の通路5が形成され、またを空気極2の外側にはセパレータ6が設けられ、このセパレータ6と空気極2との間に空気(酸素)の通路7が形成されている。 A separator 4 is provided outside the fuel electrode 1, a hydrogen passage 5 is formed between the separator 4 and the fuel electrode 1, and a separator 6 is provided outside the air electrode 2. An air (oxygen) passage 7 is formed between the air electrode 2 and the air electrode 2.

前記燃料極1とセパレータ4の間に水素を供給し、空気極2とセパレータ6の間に空気(酸素)を供給する。供給された水素は燃料極1の触媒において電子と水素イオンに分かれ、水素イオンは固体高分子3内を通って空気極2に至り、空気極2とセパレータ6の間に供給された酸素と反応して水になり、電子は空気極に流れて電気を発生する。   Hydrogen is supplied between the fuel electrode 1 and the separator 4, and air (oxygen) is supplied between the air electrode 2 and the separator 6. The supplied hydrogen is divided into electrons and hydrogen ions in the catalyst of the fuel electrode 1, and the hydrogen ions pass through the solid polymer 3 to the air electrode 2 and react with oxygen supplied between the air electrode 2 and the separator 6. It becomes water and electrons flow to the air electrode to generate electricity.

前記セルを直列に接続して図2に示すスタックが構成される。このスタックにおいて前記セパレータ4、6は集電板としても機能するように、表面に導電性に優れた炭素膜が形成されている。   The cells are connected in series to form a stack shown in FIG. In this stack, a carbon film having excellent conductivity is formed on the surface so that the separators 4 and 6 also function as current collector plates.

セパレータ4、6の表面に炭素膜を形成するには、ステンレス鋼を冷間圧延した後に、前処理を施し、その後プラズマCVDによって炭素膜を形成する。   In order to form a carbon film on the surfaces of the separators 4 and 6, after cold rolling stainless steel, pretreatment is performed, and then a carbon film is formed by plasma CVD.

ステンレスとしてはSUS304cを用いた。SUS304cの組成割合(質量%)は、C:0.05、Si:0.6、Mn:0.95、P:0.028、S:0.005、Ni:8.07、Cr:18.22、Fe:残部である。 SUS304c was used as the stainless steel. The composition ratio (mass%) of SUS304c is as follows: C: 0.05, Si: 0.6, Mn: 0.95, P: 0.028, S: 0.005, Ni: 8.07, Cr: 18. 22, Fe: the balance.

前処理としては、先ず研磨(♯1000)を行い、アセトン溶液内で超音波洗浄を行い、エタノールで拭いた後、Arガスを用いたプラズマエッチングを行い、表面を処理した。 As pretreatment, first, polishing (# 1000) was performed, ultrasonic cleaning was performed in an acetone solution, and the surface was treated by wiping with ethanol and then plasma etching using Ar gas.

プラズマエッチングの条件は、以下の通りである。
ガス:Ar(25sccm)
圧力:1torr
温度:750℃
印加電力:90W
時間:3minAr(25sccm)
The conditions for plasma etching are as follows.
Gas: Ar (25 sccm)
Pressure: 1 torr
Temperature: 750 ° C
Applied power: 90W
Time: 3minAr (25sccm)

この後、プラズマCVDにて前処理が終了したステンレス板の表面に炭素皮膜を形成した。プラズマCVDの条件は、以下の通りである。
反応ガス:C(10sccm)、Ar(25sccm)
圧力:1torr
析出温度:750℃
印加電力:90W
析出時間:3時間
Thereafter, a carbon film was formed on the surface of the stainless steel plate that had been pretreated by plasma CVD. The conditions for plasma CVD are as follows.
Reaction gas: C 2 H 2 (10 sccm), Ar (25 sccm)
Pressure: 1 torr
Deposition temperature: 750 ° C
Applied power: 90W
Deposition time: 3 hours

以上の方法で作成された炭素皮膜は、図3(a)及び図5に示すように、緻密で粒径の揃った炭素皮膜が形成されていることが分かる。一方、冷間圧延を行わなかったステンレス板表面に形成された炭素被膜は、同図(b)に示すように欠陥が存在していることが分かる。 As shown in FIGS. 3A and 5, the carbon film prepared by the above method is formed as a dense carbon film having a uniform particle size. On the other hand, it can be seen that the carbon film formed on the surface of the stainless steel plate not subjected to cold rolling has defects as shown in FIG.

以下の(表1)は冷間圧延の条件をまとめたもので、No.1は圧延を行わなかった試料である。また図4は(表1)のNo.1〜No.5の試料に対する分極測定の結果を示すグラフ、(表2)は炭素膜形成前後および分極後の接触抵抗の結果を示す。 The following (Table 1) summarizes the conditions for cold rolling. Reference numeral 1 denotes a sample that was not rolled. In addition, FIG. 1-No. 5 is a graph showing the results of polarization measurement on the sample No. 5, and Table 2 shows the results of contact resistance before and after the formation of the carbon film and after polarization.

Figure 2011111381
Figure 2011111381

Figure 2011111381
Figure 2011111381

分極の測定条件は以下の通りである。
対極:白金極
参照極:水銀−硫酸水銀電極
測定条件:室温
分極範囲:−1.0V〜0.6Vvs.Hg/HgSO
走査速度:1mVs−1
電解液:0.5M硫酸を窒素脱気
The measurement conditions for polarization are as follows.
Counter electrode: Platinum electrode Reference electrode: Mercury-mercuric sulfate electrode Measurement conditions: Room temperature polarization range: -1.0 V to 0.6 V vs. Hg / Hg 2 SO 4
Scanning speed: 1 mVs -1
Electrolyte: 0.5M sulfuric acid degassed with nitrogen

以上の図4、(表1)及び(表2)から、本発明に係る方法で形成された炭素被膜は導電性と耐久性に優れることが分かる。 From the above FIG. 4, (Table 1) and (Table 2), it can be seen that the carbon coating formed by the method according to the present invention is excellent in conductivity and durability.

1…燃料極、2…空気極、1a、2a…触媒層、3…固体高分子膜、4、6…セパレータ、5…水素の通路、7…空気(酸素)の通路。 DESCRIPTION OF SYMBOLS 1 ... Fuel electrode, 2 ... Air electrode, 1a, 2a ... Catalyst layer, 3 ... Solid polymer film, 4, 6 ... Separator, 5 ... Hydrogen passage, 7 ... Air (oxygen) passage.

Claims (3)

ステンレス鋼板に冷間圧延処理を施し、オーステナイト組織の一部を応力誘起マルテンサイト組織に変態させ、次いで表面に前処理を施した後、プラズマCVD法により炭素皮膜を形成することを特徴とする導電性炭素皮膜の形成方法。 A stainless steel sheet is subjected to a cold rolling process, a part of the austenite structure is transformed into a stress-induced martensite structure, and then a surface is pretreated, and then a carbon film is formed by plasma CVD. Of forming a conductive carbon film. 請求項1に記載の導電性炭素皮膜の形成方法において、前記冷間圧延処理は9.0%以上の加工率とすることを特徴とする導電性炭素皮膜の形成方法。 The method for forming a conductive carbon film according to claim 1, wherein the cold rolling treatment is performed at a processing rate of 9.0% or more. 請求項1に記載の導電性炭素皮膜の形成方法において、前記前処理にはArガスを用いたプラズマエッチング工程が含まれることを特徴とする導電性炭素皮膜の形成方法。 The method for forming a conductive carbon film according to claim 1, wherein the pretreatment includes a plasma etching step using Ar gas.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013237886A (en) * 2012-05-14 2013-11-28 Toyota Motor Corp Film-forming apparatus and workpiece
JP2021022490A (en) * 2019-07-27 2021-02-18 明夫 林 Structure of hydrogen conduit and manufacturing method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007270350A (en) * 2006-03-07 2007-10-18 Kyushu Univ High strength stainless steel and method for producing high strength stainless steel
JP2008004540A (en) * 2006-05-22 2008-01-10 Toyota Central Res & Dev Lab Inc Amorphous carbon film, method for forming amorphous carbon film, conductive member provided with amorphous carbon film, and separator for fuel cell
JP2008031544A (en) * 2006-07-31 2008-02-14 Tokai Rika Co Ltd Surface treatment method for sliding member, sliding member, mechanical key, and portable device
JP2008031522A (en) * 2006-07-28 2008-02-14 Toyota Central Res & Dev Lab Inc Covering member and manufacturing method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007270350A (en) * 2006-03-07 2007-10-18 Kyushu Univ High strength stainless steel and method for producing high strength stainless steel
JP2008004540A (en) * 2006-05-22 2008-01-10 Toyota Central Res & Dev Lab Inc Amorphous carbon film, method for forming amorphous carbon film, conductive member provided with amorphous carbon film, and separator for fuel cell
JP2008031522A (en) * 2006-07-28 2008-02-14 Toyota Central Res & Dev Lab Inc Covering member and manufacturing method thereof
JP2008031544A (en) * 2006-07-31 2008-02-14 Tokai Rika Co Ltd Surface treatment method for sliding member, sliding member, mechanical key, and portable device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JPN6014011568; 福塚友和他: '種々のステンレス鋼への炭素薄膜被覆と耐食性の関係' 炭素材料学会年会要旨集 Vol.35, 20081128, p.238-239, 炭素材料学会 *
JPN6014011571; 宮野真一他: '炭素薄膜被覆ステンレス鋼の耐食性と表面状態の関係' 炭素材料学会年会要旨集 Vol.36, 20091130, p.198-199, 炭素材料学会 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013237886A (en) * 2012-05-14 2013-11-28 Toyota Motor Corp Film-forming apparatus and workpiece
JP2021022490A (en) * 2019-07-27 2021-02-18 明夫 林 Structure of hydrogen conduit and manufacturing method
JP7250408B2 (en) 2019-07-27 2023-04-03 林 美子 Hydrogen conduit structure and fabrication method

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