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JP2011111370A - Apparatus and method for manufacturing glass plate - Google Patents

Apparatus and method for manufacturing glass plate Download PDF

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Publication number
JP2011111370A
JP2011111370A JP2009269928A JP2009269928A JP2011111370A JP 2011111370 A JP2011111370 A JP 2011111370A JP 2009269928 A JP2009269928 A JP 2009269928A JP 2009269928 A JP2009269928 A JP 2009269928A JP 2011111370 A JP2011111370 A JP 2011111370A
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drill
glass plate
cutting
hole
diameter
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Ichiro Yamaoka
一郎 山岡
Masayuki Tono
政幸 東野
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Nippon Electric Glass Co Ltd
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Nippon Electric Glass Co Ltd
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  • Drilling And Boring (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To substantially prevent the remaining of fine chips by chipping in an opening of an end face of a glass plate in a step of boring the glass plate and to accurately form a through-hole. <P>SOLUTION: A preceding drill 1 is allowed to penetrate under cutting into a glass plate 3 in the thickness direction from the lower end face side to form a bottomed hole 31, the preceding drill 1 is retreated, and a following drill 2 is allowed to penetrate coaxially with the preceding drill 1 under cutting from the upper end face side of the glass plate 3 to form a through-hole 34 in the glass plate 3. The at least one drill 1 is composed of a body part 11 having a uniform outer diameter along the axial direction, a small diameter part 12 positioned on the drill base end side of the body part 11 and having a smaller outer diameter than the body part 11, and a connection part 13 connecting the body part 11 and the small diameter part 12, and cutting ability is provided to the part from the tip of the drill 1 to at least the body part 11 side of the connection part 13. The drill 1 used in the boring step is configured such that in a state in which the drill 1 is allowed to penetrate to the deepest part, the connection part 13 reaches a thickness-direction inner side of the glass plate 3. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、ガラス板の製造装置とその製造方法に関し、詳しくは、ガラス板の上面側および下面側からそれぞれ別個のドリルを切削を伴って同軸に侵入させることで、ガラス板に貫通孔を形成する技術に関する。   The present invention relates to a glass plate manufacturing apparatus and a manufacturing method therefor, and more specifically, a through hole is formed in a glass plate by allowing separate drills to penetrate from the upper surface side and the lower surface side of the glass plate coaxially with cutting. Related to technology.

周知のように、プラズマディスプレイ(PDP)、フィールドエミッションディスプレイ(FED)、エレクトロルミネッセンスディスプレイ(ELD)などのフラットパネルディスプレイに使用されるガラス基板の中には、パネル内の排気やガス封入に使用することを目的として、貫通孔を形成するものがある。   As is well known, some glass substrates used for flat panel displays such as plasma display (PDP), field emission display (FED), and electroluminescence display (ELD) are used for exhaust and gas filling in the panel. For this purpose, there is one that forms a through hole.

例えばPDPの場合、実効性あるプラズマ放電を生じさせるために、前面板と背面板との間の空間にXeやAr等のガスを封入する必要があり、通常、背面板の周縁部もしくは角部に、空気を排出して上記ガスを充填するための直径数mm程度の貫通孔が1又は複数箇所に形成される。また、FEDの場合も、前面板と背面板との間の空間を高真空にする必要があることから、PDP用のガラス基板と同様、背面板の周縁部もしくは角部に1又は複数の貫通孔が形成される。   For example, in the case of a PDP, it is necessary to enclose a gas such as Xe or Ar in the space between the front plate and the back plate in order to generate an effective plasma discharge. In addition, through holes having a diameter of about several millimeters for discharging air and filling the gas are formed at one or a plurality of locations. Also, in the case of FED, since the space between the front plate and the back plate needs to be high vacuum, one or more penetrations are made in the peripheral portion or corner portion of the back plate in the same manner as the glass substrate for PDP. A hole is formed.

ところで、PDPや一部のFEDの製造工程では、透明電極や蛍光体、リブその他の要素を各ガラス基板上に形成するために焼成等の熱処理工程が設けられている。この熱処理工程において、ガラス基板にカケや微小クラック等の欠陥が存在していると、加熱時もしくは冷却時においてカケや微小クラック等に応力集中を生じる。そして、これら応力集中部位が起点となってガラス基板が破損するという事態を招き得る。この種の破損は背面板の排気孔(貫通孔)を起点として、正確には、貫通孔の内周面やガラス基板の端面に開口した部分(開口部)などに存在するカケや微小クラックなどを起点として発生する傾向にあるため、これらの欠陥部分をできる限り除去して貫通孔およびその周辺の表面性状を良好なものにすることが肝要となる。   By the way, in the manufacturing process of PDP and some FED, in order to form a transparent electrode, fluorescent substance, a rib, and other elements on each glass substrate, heat processing processes, such as baking, are provided. In this heat treatment step, if a defect such as a chip or a micro crack exists in the glass substrate, stress concentration occurs in the chip or the micro crack during heating or cooling. And the situation where a glass substrate breaks starting from these stress concentration parts may be caused. This type of breakage originates from the exhaust holes (through holes) on the back plate, and more precisely, chips or microcracks that exist on the inner peripheral surface of the through holes or on the end surfaces of the glass substrate (openings) Therefore, it is important to remove these defective portions as much as possible to improve the surface properties of the through hole and its periphery.

上記課題を解決するための手段として、例えば下記特許文献1には、ガラス板の下面から下側ドリルを切削を伴ってガラス板の厚み方向中間位置まで侵入させた後にその下側ドリルを後退させ、然る後、ガラス板の上面から上側ドリルを、切削を伴って下側ドリルと同軸に侵入させることにより貫通孔を形成するように構成されたガラス板の製造装置が開示されている。   As means for solving the above problem, for example, in Patent Document 1 below, the lower drill is moved from the lower surface of the glass plate to the middle position in the thickness direction of the glass plate with cutting, and then the lower drill is moved backward. Then, the manufacturing apparatus of the glass plate comprised so that a through-hole may be formed by letting an upper drill penetrate | invade coaxially with a lower drill with cutting from the upper surface of a glass plate is disclosed.

特開2008−137354号公報JP 2008-137354 A

このように、ガラス板に形成された貫通孔の内周面やその開口部には通常カケなどの欠陥が存在するものの、上記特許文献1に記載の製造装置で孔開け加工を行うことで、特に問題となるような大きなカケないし微小クラックの発生を防止することができていた。しかし、最近では、フラットパネルディスプレイ用ガラス基板の大型化が急速に進んだ結果、加工時のみならず取扱い時にもこれまで以上に大きな機械的負荷や熱的負荷が作用し、これにより多大な応力が生じるようになってきた。この種の応力は既述のようにガラス板の不均質な箇所で高くなる(応力集中を生じる)ため、これまでは問題にならなかったサイズの微細なカケ(チッピングとも呼ばれる)であってもそれが貫通孔の開口部周辺に残っていると、ガラス板の破損につながるおそれがある。   Thus, although there is a defect such as a chip ordinarily in the inner peripheral surface of the through-hole formed in the glass plate and its opening, by performing the punching process with the manufacturing apparatus described in Patent Document 1, In particular, it was possible to prevent the occurrence of large cracks or microcracks that would be a problem. Recently, however, the increase in the size of glass substrates for flat panel displays has resulted in greater mechanical and thermal loads than ever during processing as well as during handling. Has come to occur. Since this type of stress increases at non-uniform locations on the glass plate as described above (stress concentration occurs), even if it is a fine chip (also called chipping) of a size that has not been a problem until now. If it remains around the opening of the through hole, the glass plate may be damaged.

ここで、上記特許文献1に記載の製造装置は、ドリルが最終的に貫通孔を形成した際にガラス板の上下一方の端面(ドリルの貫通方向奥側の端面)側の貫通孔の開口部に生じる比較的大きなカケの発生を防止することを目的とするものであり、上記微細なカケの発生防止までを考慮してなされたものではない。また、上記微細なカケはガラス板の上下何れの端面(貫通方向手前側の端面)側の貫通孔の開口部にも生じる可能性があるため、上記特許文献1に開示の製造装置をそのまま使用したのでは、上記微細なカケが貫通孔の開口部又はその周辺に残る事態を効果的に防止することは難しい。   Here, in the manufacturing apparatus described in Patent Document 1, when the drill finally forms the through hole, the opening of the through hole on the upper and lower one end surface (end surface in the drill penetration direction) side of the glass plate The purpose of this is to prevent the generation of relatively large burrs, and is not intended to prevent the occurrence of fine burrs. In addition, since the fine chip may occur in the opening portion of the through hole on the upper or lower end surface (end surface on the front side in the penetrating direction) side of the glass plate, the manufacturing apparatus disclosed in Patent Document 1 is used as it is. As a result, it is difficult to effectively prevent the minute chip from remaining in the opening of the through hole or in the vicinity thereof.

以上の事情に鑑み、本発明では、ガラス板の穿孔工程において、ガラス板端面の開口部にチッピング等の微細なカケが残る事態を可及的に防止して、貫通孔を精度よく形成することを技術的な課題とする。   In view of the above circumstances, in the present invention, in the perforating process of the glass plate, it is possible to prevent as much as possible a situation in which fine chips such as chipping remain in the opening of the end surface of the glass plate, and to accurately form the through hole. Is a technical issue.

前記課題の解決は、本発明に係るガラス板の製造装置により達成される。すなわち、このガラス板の製造装置は、ガラス板の一端面の側から切削を伴い先行ドリルを厚み方向に侵入させて有底孔を形成した後に先行ドリルを後退させ、然る後、ガラス板の他端面の側から切削を伴い後行ドリルを先行ドリルと同軸に侵入させることでガラス板に貫通孔を形成し得るように構成されるガラス板の製造装置において、少なくとも一方のドリルは、軸方向に沿って一定の外径寸法を有する胴部と、胴部のドリル基端側に位置し胴部よりも外径寸法の小さい小径部と、胴部と小径部とをつなぐつなぎ部とを備えると共に、一方のドリルの先端から少なくともつなぎ部の胴部側までの部分に切削能力が付与されており、かつ、一方のドリルを最も奥深くまで侵入させた状態では、つなぎ部の少なくとも一部がガラス板の厚み方向内側にまで達するように構成されている点をもって特徴づけられる。   The solution to the above problem is achieved by the glass plate manufacturing apparatus according to the present invention. That is, this glass plate manufacturing apparatus, with cutting from one end surface side of the glass plate, penetrates the preceding drill in the thickness direction to form a bottomed hole, and then retracts the preceding drill. In a glass plate manufacturing apparatus configured to form a through-hole in a glass plate by allowing a subsequent drill to penetrate coaxially with a preceding drill with cutting from the other end surface side, at least one of the drills has an axial direction A body portion having a constant outer diameter, a small diameter portion located on the drill base end side of the body portion and having a smaller outer diameter than the body portion, and a connecting portion for connecting the body portion and the small diameter portion. In addition, when cutting ability is given to the part from the tip of one drill to at least the body side of the joint, and at least one part of the joint is made of glass, Thickness of board It characterized with that it is configured so as to reach the inside.

この構成は、本発明者らのカケ発生に関する新たな知見に基づき創出されたものである。すなわち、本発明者らは、穿孔作業を終えたドリルが後退する際、正確には前進から後退へとその進退方向を転じる際、ガラス板の後方側の端面(穿孔開始側の端面)に形成される孔(有底孔又は貫通孔)の開口部又はその周辺に上記の微細なカケが発生することを見出した。そして、この知見に基づき、ドリルの胴部と小径部とのつなぎ部を設けると共に、このつなぎ部に研削能力を付与するに至った。よって、上記の製造装置によれば、ドリルが前進から後退に転じる際、最も大径となる胴部はガラス板の厚み方向内側にあるため、ガラス板の穿孔開始側の端面に形成された開口部とドリルとを接触させずに済む。これにより、前進から後退に転じる際の不安定なドリルの駆動力を孔の開口部に伝え難くして、微細なカケの発生を抑制することができる。また、胴部だけでなくつなぎ部にも切削能力を持たせるようにしたので、ドリルが後退を続けてつなぎ部とガラス板端面に形成された孔の開口部とが接触する場合にあっても、この接触部分をつなぎ部で切削することで円滑に除去して、穿孔工程の終了後に上記開口部又はその周辺に微細なカケが残る事態を可及的に防止することができる。もちろん、このドリルは、所定の軸方向寸法にわたって最大径部となる胴部に研削能力を付与したものであるから、例えば後行ドリルに上記形状のドリルを使用する場合、ドリルを引抜く(後退させる)ことで、上記開口部に微細なカケを残さないようにしつつも貫通孔をその全長にわたって精度よく形成することができる。   This configuration has been created based on the inventors' new knowledge regarding the occurrence of cracks. That is, when the drill that has finished the drilling operation is retracted, the present inventors accurately form the end surface on the rear side of the glass plate (end surface on the drilling start side) when turning the forward / backward direction from forward to backward. It has been found that the above-mentioned fine cracks are generated at the opening portion of the hole (bottomed hole or through-hole) to be formed or the periphery thereof. And based on this knowledge, while providing the connection part of the trunk | drum and small diameter part of a drill, it came to provide grinding capability to this connection part. Therefore, according to the above manufacturing apparatus, when the drill turns from advance to retreat, the largest diameter barrel is on the inner side in the thickness direction of the glass plate. It is not necessary to make the part and the drill contact. As a result, it is difficult to transmit the unstable driving force of the drill when moving from forward to backward to the opening of the hole, and generation of fine chipping can be suppressed. In addition, since the cutting ability is given not only to the body part but also to the joint part, even when the drill continues to retreat and the opening part of the hole formed in the end surface of the glass plate comes into contact. The contact portion can be smoothly removed by cutting at the connecting portion, and it is possible to prevent, as much as possible, a situation in which fine debris remains in the opening or its periphery after the end of the drilling step. Of course, since this drill is provided with grinding ability at the body portion which is the maximum diameter portion over a predetermined axial dimension, for example, when the drill having the above shape is used as the subsequent drill, the drill is pulled out (retracted). By doing so, it is possible to accurately form the through hole over the entire length while leaving no fine chipping in the opening.

ここで、つなぎ部は胴部からドリル基端側に向かうにつれて漸次縮径する形状を有するものであってもよい。また、この場合、つなぎ部はテーパ状に縮径する形状を有するものであってもよい。   Here, the connecting portion may have a shape that gradually decreases in diameter from the trunk portion toward the drill base end side. Further, in this case, the connecting portion may have a shape that decreases in a taper shape.

このように、つなぎ部を漸次縮径する形状とすることで、ドリルが後退する際に開口部とつなぎ部とが接触する場合にあっても、ドリル(つなぎ部)から開口部へと伝わる切削力が徐々に増加することになる。これにより、微細なカケ等の欠陥の発生を有効に抑えることができる。また、つなぎ部をテーパ状に縮径する形状とすることで、微細なカケの発生を抑えると共に開口部をより滑らかに仕上げることも可能となる。   In this way, by forming the joint part into a shape that gradually decreases in diameter, even when the opening part and the joint part come into contact with each other when the drill moves backward, the cutting is transmitted from the drill (joint part) to the opening part. The power will increase gradually. Thereby, generation | occurrence | production of defects, such as a fine chip, can be suppressed effectively. In addition, by forming the connecting portion into a tapered shape, it is possible to suppress the generation of fine chips and finish the opening more smoothly.

また、胴部の軸方向寸法が、一方のドリルの先端からつなぎ部の小径部側の端部までの軸方向寸法の0.2倍以上かつ0.5倍以下に設定されていてもよい。   Further, the axial dimension of the body part may be set to be 0.2 times or more and 0.5 times or less of the axial dimension from the tip of one drill to the end part on the small diameter part side of the connecting part.

このように寸法関係を定めたのは以下の理由による。すなわち、胴部の軸方向寸法が0.2倍未満だと、ドリルと加工面(ここでは貫通孔の内周面となる面)との接触面積が過小になり、ドリルの摩耗が早期に進行するおそれがあるからである。また、0.5倍を超えると、ドリルと加工面との接触面積が過大となるために接触面間に生じる摩擦抵抗で加工面にヤケ等の不具合が発生するおそれがあるからである。以上より、胴部の軸方向寸法を上記範囲内に設定することにより、ガラス板の穿孔工程についての切削性、耐久性をドリルに付与でき、かつ内周面とその開口部の加工精度にも優れた貫通孔を形成することが可能になる。   The dimensional relationship is determined in this way for the following reason. In other words, if the axial dimension of the body is less than 0.2 times, the contact area between the drill and the machining surface (here, the inner peripheral surface of the through hole) becomes too small, and wear of the drill progresses early. It is because there is a possibility of doing. In addition, if the ratio exceeds 0.5 times, the contact area between the drill and the processed surface becomes excessive, and there is a risk that defects such as burns may occur on the processed surface due to frictional resistance generated between the contact surfaces. From the above, by setting the axial dimension of the barrel within the above range, the cutting performance and durability of the glass plate perforation process can be imparted to the drill, and the processing accuracy of the inner peripheral surface and its opening can also be improved. An excellent through hole can be formed.

また、以上の形態を成すドリルは、胴部のドリル先端側に位置し、胴部に向かうにつれて漸次拡径する拡径部を一体に備えるものであってもよい。   Moreover, the drill which comprises the above form may be integrally provided with the enlarged diameter part which is located in the drill front end side of a trunk | drum, and gradually expands as it goes to a trunk | drum.

ドリルの芯出し(特にコアドリルの芯出し)が正確に行われていない状態で穿孔作業を行うと、芯振れしたドリルにより孔の内周面に不均一な力が作用するために、表面性状に優れた貫通孔を形成することが難しくなる。特にこの傾向は、孔の開口端又はその近傍において顕著となる。この点、上記のように拡径部を胴部のドリル先端側に設けることで、芯振れを抑える向きにドリルが案内されるので、孔の開口端又はその近傍に作用する不要な力を低減することができる。また、芯振れが抑制されることで、ドリルの後退開始時、ドリルが孔の開口部と接触するのを避けて微細なカケの発生をより高い確率で防止することができる。上記の案内機能は、拡径部をテーパ形状とすることでより有効に作用する。   If drilling is performed when the centering of the drill is not performed correctly (especially when the core drill is centered), uneven force acts on the inner peripheral surface of the hole due to the centering of the drill. It becomes difficult to form excellent through holes. This tendency is particularly remarkable at the opening end of the hole or in the vicinity thereof. In this regard, by providing the enlarged diameter portion on the drill tip side of the barrel portion as described above, the drill is guided in a direction that suppresses center runout, so unnecessary force acting on or near the opening end of the hole is reduced. can do. Further, by suppressing the core runout, it is possible to prevent the occurrence of fine chipping with a higher probability by avoiding the drill from coming into contact with the opening of the hole when the drill starts to retract. Said guidance function acts more effectively by making a diameter-expanded part into a taper shape.

また、一方のドリルが先行ドリルである場合、その先端から胴部のつなぎ部側の端部までの軸方向寸法がガラス板の厚み寸法より小さいものであってもよい。   Moreover, when one drill is a preceding drill, the axial direction dimension from the front-end | tip to the edge part by the side of the connection part of a trunk | drum may be smaller than the thickness dimension of a glass plate.

後行ドリルについては、ガラス板を完全に貫通するので、上記のようにドリルが最も奥深くまで侵入した状態では、つなぎ部がガラス板の厚み方向内側にまで達するように最大侵入位置を調整することができるが、先行ドリルについては、ガラス板を貫通することなく厚み方向の中間位置で停止させる必要がある。よって、上記のガラス板との寸法関係を満たすようにドリルの所定部位(胴部、つなぎ部など)の軸方向寸法を設定することで、ドリルの後退開始時につなぎ部を確実にガラス板の厚み方向内側に位置させることができる。   As for the following drill, since the glass plate is completely penetrated, the maximum penetration position should be adjusted so that the connecting part reaches the inner side in the thickness direction of the glass plate when the drill penetrates deepest as described above. However, the preceding drill needs to be stopped at an intermediate position in the thickness direction without penetrating the glass plate. Therefore, by setting the axial dimension of a predetermined part of the drill (body, joint, etc.) so as to satisfy the dimensional relationship with the glass plate, the thickness of the glass plate can be ensured when the drill starts to retract. It can be located inside the direction.

以上の説明に係る一方または双方のドリルには、上記の形状ないし寸法関係を有する限りにおいて種々のドリルが使用できるが、加工速度や生産効率の観点から中空の切刃形状を有するコアドリルを採用することもできる。コアドリルとしては、円筒状の台金(本発明でいえば胴部やつなぎ部)の表面にダイヤモンド砥粒などの切削用砥粒を適当なボンド材で固着させてなるサーフェスタイプや、当該砥粒をメタルボンド内に分散配置して形成したチップを使用したインプリタイプなどがある。ここで、例えば砥粒の突出量が大きく切削性に優れたサーフェスタイプのコアドリルを採用する場合、切削用砥粒を表面に固着してなる胴部の外径とつなぎ部の外径最小値との差が、当該砥粒の平均粒径の2倍以上に設定されていてもよい。   Various drills can be used as one or both of the drills according to the above description as long as they have the above-described shape or dimensional relationship, but a core drill having a hollow cutting edge shape is adopted from the viewpoint of processing speed and production efficiency. You can also. As a core drill, a surface type in which cutting abrasive grains such as diamond abrasive grains are fixed to a surface of a cylindrical base metal (in the present invention, a body part or a joint part) with an appropriate bonding material, or the abrasive grains There is an implement type using a chip formed by dispersing and arranging in a metal bond. Here, for example, when adopting a surface type core drill having a large abrasive grain protrusion and excellent machinability, the outer diameter of the body formed by fixing the abrasive grains for cutting on the surface and the outer diameter minimum value of the joint portion and May be set to be twice or more the average particle size of the abrasive grains.

このように、コアドリルを使用する場合、胴部とつなぎ部との最大外径差を切削用砥粒の平均粒径の2倍以上とすることで、例えば若干の芯振れを想定した上で、胴部で切削形成された孔の内部につなぎ部の全領域が侵入した場合であっても、この孔の開口部とつなぎ部の小径部側の端部に固着した上記砥粒とが接触することはない。そのため、上記のようにドリルが最も奥深くに侵入した状態でつなぎ部の全領域が孔の内部にまで達する場合には、ドリルの後退開始時につなぎ部(ないし小径部)と開口部とが干渉する事態を確実に回避することができる。   Thus, when using a core drill, by assuming that the maximum outer diameter difference between the body portion and the connecting portion is twice or more the average particle size of the abrasive grains for cutting, for example, assuming a slight runout, Even when the entire region of the joint portion enters the inside of the hole cut and formed in the body portion, the opening of this hole and the abrasive grains fixed to the end portion on the small diameter side of the joint portion come into contact with each other. There is nothing. Therefore, when the entire area of the connecting portion reaches the inside of the hole with the drill penetrating deepest as described above, the connecting portion (or small diameter portion) interferes with the opening when the drill starts to retract. The situation can be avoided reliably.

また、前記課題の解決は、本発明に係るガラス板の製造方法によっても達成される。すなわち、このガラス板の製造方法は、ガラス板の一端面の側から切削を伴い先行ドリルを厚み方向に侵入させて有底孔を形成した後に先行ドリルを後退させ、然る後、ガラス板の他端面の側から切削を伴い後行ドリルを先行ドリルと同軸に侵入させることでガラス板に貫通孔を形成する穿孔工程を含むガラス板の製造方法において、少なくとも一方のドリルに、軸方向に沿って一定の外径寸法を有する胴部と、胴部のドリル基端側に位置し胴部よりも外径寸法の小さい小径部と、胴部と小径部とをつなぐつなぎ部とを備え、一方のドリルの先端から少なくともつなぎ部の胴部側までの部分に切削能力を持たせたものを穿孔工程に使用し、かつ、一方のドリルを最も奥深くまで侵入させた状態では、つなぎ部がガラス板の厚み方向内側にまで達するようにした点をもって特徴づけられる。   Moreover, the solution of the said subject is achieved also by the manufacturing method of the glass plate which concerns on this invention. That is, this glass plate manufacturing method involves cutting the front drill in the thickness direction with cutting from one end surface side of the glass plate to form a bottomed hole, and then retracting the preceding drill. In a glass plate manufacturing method including a drilling step in which a through-hole is formed in a glass plate by causing a subsequent drill to penetrate coaxially with a preceding drill with cutting from the other end surface side, along at least one of the drills along the axial direction. A body portion having a constant outer diameter, a small-diameter portion located on the drill base end side of the body portion and having a smaller outer diameter than the body portion, and a connecting portion that connects the body portion and the small-diameter portion, In the drilling process, a part that has cutting ability at least from the tip of the drill to the body side of the joint is used in the drilling process. To the inside in the thickness direction It characterized with that the way.

上記の製造方法についても、本欄の冒頭で述べた製造装置と同一の技術的特徴を有することから、上記製造装置による作用効果と同一の作用効果を得ることができる。   The manufacturing method described above also has the same technical features as the manufacturing apparatus described at the beginning of this section, so that the same operational effects as the operational effects of the manufacturing apparatus can be obtained.

また、以上の製造装置および製造方法により製造されるガラス板は、フラットパネルディスプレイ用のガラス基板であることが好ましい。   Moreover, it is preferable that the glass plate manufactured by the above manufacturing apparatus and manufacturing method is a glass substrate for flat panel displays.

このようにすれば、フラットパネルディスプレイを製造する際の熱処理工程において、貫通孔(排気孔)、特にその開口部を起点としてガラス基板に破損が生じるという事態を効果的に回避することができる。   By doing so, it is possible to effectively avoid a situation in which the glass substrate is damaged starting from the through hole (exhaust hole), particularly the opening, in the heat treatment step when manufacturing the flat panel display.

以上のように、本発明に係るガラス板の製造装置とその製造方法によれば、ガラス板の穿孔工程において、ガラス板端面の開口部にチッピング等の微細なカケが残る事態を可及的に防止して、貫通孔を精度よく形成することができる。   As described above, according to the glass plate manufacturing apparatus and the manufacturing method thereof according to the present invention, in the glass plate perforation process, it is possible to prevent the occurrence of minute chips such as chipping at the opening of the glass plate end surface. In this way, the through hole can be formed with high accuracy.

本発明の一実施形態に係るガラス板の製造装置の主たる構成要素である先行ドリルおよび後行ドリルの要部を示す断面図である。It is sectional drawing which shows the principal part of the precedent drill and subsequent drill which are the main components of the manufacturing apparatus of the glass plate which concerns on one Embodiment of this invention. 図1に示すドリルを先端側から見た平面図である。It is the top view which looked at the drill shown in FIG. 1 from the front end side. (a)〜(d)はそれぞれ、本発明の一実施形態に係るガラス板の製造方法における穿孔工程のうち先行ドリルによる穿孔作業の概要を時系列順に示す断面図である。(A)-(d) is sectional drawing which shows the outline | summary of the drilling operation | work by a preceding drill among the drilling processes in the manufacturing method of the glass plate which concerns on one Embodiment of this invention in order of time series, respectively. 先行ドリルを後退させる際のガラス板に対する作用を説明するための要部拡大断面図である。It is a principal part expanded sectional view for demonstrating the effect | action with respect to the glass plate at the time of retracting | retreating a preceding drill. (a)〜(d)はそれぞれ、本発明の一実施形態に係るガラス板の製造方法における穿孔工程のうち後行ドリルによる穿孔作業の概要を時系列順に示す断面図である。(A)-(d) is sectional drawing which shows the outline | summary of the drilling operation | work by a subsequent drill among the punching processes in the manufacturing method of the glass plate which concerns on one Embodiment of this invention in order of a time series, respectively.

以下、本発明の一実施形態を図面に基づき説明する。なお、この実施形態では、PDP用のガラス基板の角部に排気孔としての貫通孔を形成する場合を例にとって説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, a case where through holes as exhaust holes are formed at corners of a glass substrate for PDP will be described as an example.

本発明の一実施形態に係るガラス板の製造装置は、例えば図3(a)に示すように、ガラス板3の下側に配置される先行ドリル1と、先行ドリル1と互いに軸心位置を一致させた状態でガラス板3の上側に配置される後行ドリル2とを主たる構成要素として備えている。これら先行ドリル1と後行ドリル2は、互いに独立して上下動および回転駆動できるように構成されている。なお、ここでいう『上下』方向は、単に各図における要素間の位置関係を容易に理解するために規定したに過ぎない。よって、以下に述べるガラス板の製造装置の設置方向や使用態様、あるいは当該製造装置におけるガラス板の設置方向を特定するものではない。   The glass plate manufacturing apparatus according to one embodiment of the present invention has, as shown in FIG. 3A, for example, a preceding drill 1 disposed on the lower side of the glass plate 3 and the preceding drill 1 having axial positions relative to each other. A trailing drill 2 disposed on the upper side of the glass plate 3 in a matched state is provided as a main component. The preceding drill 1 and the succeeding drill 2 are configured to be able to move up and down and rotate independently of each other. Note that the “vertical” direction here is merely defined for easy understanding of the positional relationship between elements in each drawing. Therefore, it does not specify the installation direction and usage of the glass plate manufacturing apparatus described below, or the installation direction of the glass plate in the manufacturing apparatus.

先行ドリル1は、図1に示すように、最大外径部となる胴部11と、胴部11のドリル基端側に位置し胴部11よりも外径寸法の小さい小径部12と、胴部11と小径部12とをつなぐつなぎ部13とを一体に有するものである。この実施形態では、先行ドリル1はコアドリルであって、図1および図2に示すように総じて筒状を呈する。また、この先行ドリル1は、胴部11のドリル先端側に位置しかつ胴部11に近づくにつれてテーパ状に拡径する形状をなす拡径部14を一体に備えている。つなぎ部13に関しても、図1に示すように、胴部11から離れるにつれてテーパ状に縮径する形状をなしており、かつ外径一定の胴部11とその下端で断面R部を介して滑らかにつながっている。同様に、外径一定の小径部12ともその上端で断面R部を介してつなぎ部13が滑らかにつながっている。   As shown in FIG. 1, the preceding drill 1 includes a barrel portion 11 that is the maximum outer diameter portion, a small-diameter portion 12 that is located on the drill base end side of the barrel portion 11 and has a smaller outer diameter than the barrel portion 11, and a barrel The connecting portion 13 that connects the portion 11 and the small diameter portion 12 is integrally provided. In this embodiment, the leading drill 1 is a core drill and generally has a cylindrical shape as shown in FIGS. 1 and 2. Further, the preceding drill 1 is integrally provided with an enlarged diameter portion 14 that is located on the drill tip side of the trunk portion 11 and that has a shape that increases in diameter in a tapered shape as it approaches the trunk portion 11. As shown in FIG. 1, the connecting portion 13 also has a shape that decreases in a taper shape as the distance from the body portion 11 increases. Connected to. Similarly, the connecting portion 13 is smoothly connected to the small diameter portion 12 having a constant outer diameter via the cross section R at the upper end thereof.

次に、各要素間の寸法関係について述べる。まず、先行ドリル1の先端から胴部11のつなぎ部13側の端部までの軸方向寸法L1(図1を参照)が、切削対象となるガラス板3の厚み寸法t(図3(a)を参照)よりも小さくなるように設定されている。この実施形態では、後述する図3(c)に示すように、先行ドリル1がガラス板3の下端面の側から切削を伴い最も奥深くに(上端面に近い側に)侵入した状態において、つなぎ部13の全領域がガラス板3の上下端面間に位置するようにその軸方向寸法L1が設定されている。 Next, the dimensional relationship between each element will be described. First, the axial dimension L 1 (see FIG. 1) from the tip of the preceding drill 1 to the end of the trunk portion 11 on the connecting portion 13 side is the thickness dimension t (FIG. 3 (a) of the glass plate 3 to be cut. (See)). In this embodiment, as shown in FIG. 3C, which will be described later, in the state where the leading drill 1 has entered from the lower end surface side of the glass plate 3 deeply with cutting (to the side closer to the upper end surface), it is connected. The axial dimension L 1 is set so that the entire region of the portion 13 is located between the upper and lower end surfaces of the glass plate 3.

また、先行ドリル1の先端からつなぎ部13の小径部12側の端部までの軸方向寸法をL2とした場合、胴部11の軸方向寸法d1が上記軸方向寸法L2の0.2倍以上かつ0.5倍以下となるように設定されている。拡径部14についても同様に、上記軸方向寸法L2の0.2倍以上かつ0.4倍以下となるようにその軸方向寸法d2が設定されている。 Further, 0 from the leading edge of the preceding drill 1 when the axial dimension of the end portion of the small diameter portion 12 side of the connecting portion 13 and the L 2, the axial dimension d 1 of the body portion 11 of the axial dimension L 2. It is set to be 2 times or more and 0.5 times or less. Similarly, the axial dimension d 2 of the enlarged diameter portion 14 is set to be 0.2 times or more and 0.4 times or less of the axial dimension L 2 .

後行ドリル2についても、先行ドリル1と同様に、胴部21と小径部22とつなぎ部23、および拡径部24とを一体に有するものであり、かつその寸法関係も同じである。   Similarly to the preceding drill 1, the subsequent drill 2 also has a body portion 21, a small diameter portion 22, a connecting portion 23, and an enlarged diameter portion 24, and the dimensional relationship is also the same.

上記構成の先行ドリル1および後行ドリル2は、例えば胴部11,21と小径部12,22とつなぎ部13,23、および拡径部14,24とを一体化してなる金属製本体の表面の一部又は全領域に、ダイヤモンド砥粒やCBN砥粒などの研削用砥粒(図示は省略)を適当なボンド材で固着することにより形成される。   The preceding drill 1 and the following drill 2 having the above-described configuration are, for example, the surface of a metal main body formed by integrating the body portions 11 and 21, the small diameter portions 12 and 22, the connecting portions 13 and 23, and the enlarged diameter portions 14 and 24. Is formed by adhering abrasive grains (not shown) such as diamond abrasive grains and CBN abrasive grains with an appropriate bonding material.

次に、先行ドリル1と後行ドリル2とを使用して、ガラス板に貫通孔を形成する手順を図3〜図5に基づき説明する。   Next, a procedure for forming a through hole in a glass plate using the preceding drill 1 and the succeeding drill 2 will be described with reference to FIGS.

まず、図3(a)に示すように、水平姿勢にあるガラス板3の下方に配置した先行ドリル1を回転を伴って上昇させることにより、先行ドリル1をガラス板3の下端面の側から切削を伴って厚み方向に侵入させていく。この実施形態では、図3(b)に示すように、先行ドリル1のドリル先端に設けた拡径部14の先端(小径側)を先行してガラス板3の厚み方向内側に侵入させていく。なお、この際、先行ドリル1の侵入箇所に切削液を供給しながら、先行ドリル1をガラス板3に侵入させるようにしてもよい。水等の冷却液を先行ドリル1に供給しながら侵入させるようにしてもよい。   First, as shown in FIG. 3A, the preceding drill 1 is moved from the lower end surface side of the glass plate 3 by raising the preceding drill 1 disposed below the glass plate 3 in a horizontal posture with rotation. It penetrates in the thickness direction with cutting. In this embodiment, as shown in FIG. 3 (b), the distal end (smaller diameter side) of the enlarged diameter portion 14 provided at the drill distal end of the preceding drill 1 is advanced to enter the inner side in the thickness direction of the glass plate 3. . At this time, the preceding drill 1 may enter the glass plate 3 while supplying the cutting fluid to the entry location of the preceding drill 1. You may make it penetrate | invade, supplying coolant, such as water, to the advance drill 1. FIG.

そして、図3(c)に示すように、ガラス板3の上端面の側に所定の厚み寸法分だけ残した状態で先行ドリル1がガラス板3の軸方向中間位置まで侵入した時点で、先行ドリル1の上昇を停止する。この段階では、図3(c)に示すように、先行ドリル1の拡径部14と胴部11だけでなく少なくともつなぎ部13の一部がガラス板3の厚み方向内側(上端面と下端面との間)に位置している。この実施形態では、つなぎ部13の全領域が先行ドリル1によりガラス板3に形成された有底孔31の内部に位置している。そして、この状態から、先行ドリル1の下降動作を開始し、図3(d)に示すように、ガラス板3から先行ドリル1を抜き出して同図に示す退避位置まで移動させる。これにより、ガラス板3には、下方のみが開口する非貫通状態の有底孔31が形成された状態となる。この実施形態では、先行ドリル1の形状に倣って略円筒状の有底孔31が形成されると共に、その中央に略円柱状のコア32が残るようになっている。   And as shown in FIG.3 (c), when the preceding drill 1 penetrate | invades to the axial direction intermediate position of the glass plate 3 in the state which left only the predetermined thickness dimension at the upper end surface side of the glass plate 3, it precedes. The ascent of the drill 1 is stopped. At this stage, as shown in FIG. 3 (c), not only the diameter-expanded portion 14 and the body portion 11 of the preceding drill 1 but also at least a part of the connecting portion 13 is inside in the thickness direction of the glass plate 3 (upper end surface and lower end surface). Between). In this embodiment, the entire region of the connecting portion 13 is located inside the bottomed hole 31 formed in the glass plate 3 by the preceding drill 1. From this state, the descending operation of the preceding drill 1 is started, and as shown in FIG. 3D, the preceding drill 1 is extracted from the glass plate 3 and moved to the retracted position shown in FIG. As a result, the glass plate 3 is in a state in which a bottomed hole 31 in a non-penetrating state that is open only at the bottom is formed. In this embodiment, a substantially cylindrical bottomed hole 31 is formed following the shape of the preceding drill 1, and a substantially columnar core 32 remains in the center thereof.

また、先行ドリル1が最もガラス板3の上端面に近い側まで侵入した位置から下降動作を開始する際、図3(c)に示すように、先行ドリル1の最大外径部となる胴部11は全てガラス板3に形成された有底孔31の内部に位置している。また、有底孔31の下方に位置する開口部33は、先行ドリル1の何れの部位(胴部11、つなぎ部13、小径部12)とも接触していない。そのため、上記のように先行ドリル1が上昇動作から下降動作へと移行する際には、先行ドリル1の下降動作に起因する負荷、特に上昇から下降に転じる際の不安定な動作に起因する負荷を開口部33に与えずに済む。これにより、開口部33の内周面又はその周辺(端面部分など)に微細なカケが発生する事態を可及的に抑制することができる。   Further, when the descending operation is started from the position where the preceding drill 1 enters the side closest to the upper end surface of the glass plate 3, as shown in FIG. 11 is located inside the bottomed hole 31 formed in the glass plate 3. Further, the opening 33 located below the bottomed hole 31 is not in contact with any part (the trunk 11, the connecting part 13, the small diameter part 12) of the preceding drill 1. Therefore, when the preceding drill 1 shifts from the ascending operation to the descending operation as described above, the load caused by the descending operation of the preceding drill 1, particularly, the load caused by the unstable operation when turning from ascending to descending To the opening 33. As a result, it is possible to suppress as much as possible the occurrence of fine chipping on the inner peripheral surface of the opening 33 or the periphery thereof (such as the end surface portion).

また、図4に示すように、先行ドリル1を下降させていくと、ドリルの若干の芯振れも影響して、開口部33と先行ドリル1のつなぎ部13とが接触する場合も考えられるが、この場合も、つなぎ部13をテーパ形状とし、その外周面にダイヤモンド砥粒等の研削用砥粒を固着させることでつなぎ部13に研削能力を付与しているので、開口部33の内周面を円滑に切削することができる。そのため、つなぎ部13と開口部33とが干渉するまでの時点で既に開口部33に微細なカケが発生していた場合であっても、当該微細なカケをつなぎ部13の研削面となる外周面(又は胴部11とつなぎ部13との間の断面R部)で削り取って、開口部33の表面性状を改善することができる。   Further, as shown in FIG. 4, when the leading drill 1 is lowered, it may be possible that the opening 33 and the joint portion 13 of the leading drill 1 come into contact with each other due to the slight centering of the drill. Also in this case, the connecting portion 13 has a tapered shape, and grinding ability such as diamond abrasive grains is fixed to the outer peripheral surface of the connecting portion 13 so that the connecting portion 13 has a grinding ability. The surface can be cut smoothly. For this reason, even if fine cracks have already occurred in the opening 33 until the joint 13 and the opening 33 interfere with each other, the outer periphery that becomes the grinding surface of the joint 13 The surface property of the opening 33 can be improved by scraping off the surface (or the section R between the trunk portion 11 and the connecting portion 13).

次に、図5(a)に示すように、ガラス板3の上方に配置した後行ドリル2を回転を伴って下降させることにより、後行ドリル2をガラス板3の上端面の側から切削を伴って厚み方向に侵入させていく。この場合、後行ドリル2を、先に穿孔を行った先行ドリル1とその軸心を合わせた状態で配置しているので、ガラス板3に既に形成されている有底孔31の軸心と後行ドリル2の軸心とが一致した状態で後述する穿孔作業が実施される。   Next, as shown in FIG. 5 (a), the trailing drill 2 disposed above the glass plate 3 is lowered with rotation to cut the trailing drill 2 from the upper end surface side of the glass plate 3. Intrusions in the thickness direction. In this case, since the trailing drill 2 is arranged in a state in which the preceding drill 1 previously drilled and its axis are aligned, the axis of the bottomed hole 31 already formed in the glass plate 3 A drilling operation to be described later is performed in a state where the axis of the subsequent drill 2 coincides.

そして、後行ドリル2を下降させ続けてさらにガラス板3に侵入させていくことにより、図5(b)に示すように、先行ドリル1で形成した有底孔31の底部となる部分が全て削り取られる。これにより、コア32も除去され(ガラス板3本体と分離されて落下し)、内径寸法が一定の貫通孔34が形成される。そして、後行ドリル2の胴部21が全て貫通孔34の内部に侵入する位置まで後行ドリル2を下降させた状態(図5(c)を参照)から、後行ドリル2の上昇動作を開始し、図5(d)に示すように、ガラス板3から後行ドリル2を抜き出して同図に示す退避位置まで移動させる。これにより、ガラス板3には、両端面に開口部33、35を有する貫通孔34が形成される。また、貫通孔34の内周面がその軸方向全領域にわたって先行ドリル1の胴部11および後行ドリル2の胴部21で研削されることになるので、貫通孔34の内周面が高精度に仕上げられる。   Then, by continuing to lower the trailing drill 2 and further entering the glass plate 3, as shown in FIG. 5 (b), all the portions that become the bottom of the bottomed hole 31 formed by the preceding drill 1 are all. Scraped off. Thereby, the core 32 is also removed (separated from the glass plate 3 main body and dropped), and a through hole 34 having a constant inner diameter is formed. Then, from the state in which the trailing drill 2 is lowered to a position where all of the body portion 21 of the trailing drill 2 enters the inside of the through hole 34 (see FIG. 5C), the rising operation of the trailing drill 2 is performed. As shown in FIG. 5D, the subsequent drill 2 is extracted from the glass plate 3 and moved to the retracted position shown in FIG. As a result, the glass plate 3 is formed with through holes 34 having openings 33 and 35 on both end faces. Further, since the inner peripheral surface of the through hole 34 is ground by the body portion 11 of the preceding drill 1 and the body portion 21 of the subsequent drill 2 over the entire region in the axial direction, the inner peripheral surface of the through hole 34 is high. Finished with precision.

また、後行ドリル2が最も奥深くの位置まで下降(侵入)した後、上昇動作に転じる際、図5(c)に示すように、後行ドリル2の最大外径部となる胴部21は全てガラス板3の上端面に形成された貫通孔34の開口部35よりも下方に位置している。また、この際、開口部35は、胴部21を含め後行ドリル2の何れの部位とも非接触の状態にある。そのため、上記のように後行ドリル2が下降動作から上昇動作へと移行する際には、後行ドリル2の下降動作に起因する負荷、特に下降(侵入動作)から上昇(引抜き動作)に転じる際の不安定な動作に起因する負荷を開口部35に与えずに済む。これにより、開口部35の内周面又はその周辺(端面部分など)に微細なカケが発生する事態を可及的に抑制して、高精度の貫通孔34を形成することができる。   Further, when the trailing drill 2 descends (intrudes) to the deepest position and then starts to move up, as shown in FIG. 5 (c), the body portion 21 serving as the maximum outer diameter portion of the trailing drill 2 is All are located below the opening 35 of the through-hole 34 formed in the upper end surface of the glass plate 3. At this time, the opening 35 is not in contact with any part of the subsequent drill 2 including the body 21. Therefore, when the succeeding drill 2 shifts from the descending operation to the ascending operation as described above, the load caused by the descending operation of the succeeding drill 2, particularly, the descending (intrusion operation) is changed to the ascending (drawing operation). It is not necessary to apply a load due to unstable operation at the time to the opening 35. As a result, it is possible to suppress the occurrence of minute chipping on the inner peripheral surface of the opening 35 or the periphery thereof (such as the end surface portion) as much as possible, and to form the highly accurate through hole 34.

以上、本発明に係るガラス板の製造装置とその製造方法の一実施形態を説明したが、これらは、上記例示の形態に限定されることなく、本発明の範囲内において任意の形態を採り得る。   As mentioned above, although one Embodiment of the manufacturing apparatus of the glass plate which concerns on this invention, and its manufacturing method was described, these are not limited to the form of the said illustration, Arbitrary forms can be taken within the scope of the present invention. .

例えば、上記実施形態では、つなぎ部13,23の外周面をテーパ形状とした場合を例示したが、もちろんこれ以外の形態を採ることも可能である。例えばつなぎ部13,23の断面を凹凸何れかの曲線で構成することで、当該つなぎ部13,23を小径部12に向けて漸次縮径する形状とすることも可能である。   For example, in the above-described embodiment, the case where the outer peripheral surfaces of the connecting portions 13 and 23 are tapered is illustrated, but it is of course possible to adopt other forms. For example, by forming the cross-sections of the connecting portions 13 and 23 with a curved surface of any one of the concave and convex portions, it is possible to form the connecting portions 13 and 23 so as to gradually reduce the diameter toward the small diameter portion 12.

また、拡径部14は必ずしも一体に有する必要はなく、例えば図示は省略するが、各ドリル1,2の先端面と胴部11,21とを断面R部を介して滑らかにつなぐようにしてもよい。あるいは、各ドリル1,2として、コアドリル以外のドリル、例えば先端面に切削刃を有する種々の中実ドリルを使用してもよい。   The diameter-expanded portion 14 does not necessarily have to be integrally formed. For example, although not illustrated, the tip end surfaces of the drills 1 and 2 and the body portions 11 and 21 are smoothly connected via the cross-section R portion. Also good. Alternatively, as each of the drills 1 and 2, a drill other than the core drill, for example, various solid drills having a cutting blade on the tip surface may be used.

また、上記実施形態では、先行ドリル1と後行ドリル2とを同一形状、同一寸法とした場合を例示したが、もちろん上記形状や寸法を相違させることも可能である。例えば、後行ドリル2の外径寸法(胴部21の外径寸法)は先行ドリル1と同一のままとし、その小径部22を先行ドリル1の小径部12に対して異径とし、これに応じて各つなぎ部13,23のテーパ角を相違させてもよい。   Moreover, although the case where the preceding drill 1 and the following drill 2 were made into the same shape and the same dimension was illustrated in the said embodiment, of course, it is also possible to make the said shape and dimension different. For example, the outer diameter dimension of the succeeding drill 2 (the outer diameter dimension of the body portion 21) remains the same as that of the preceding drill 1, and the small diameter portion 22 has a different diameter with respect to the small diameter portion 12 of the preceding drill 1. Accordingly, the taper angles of the connecting portions 13 and 23 may be made different.

また、上記実施形態では、図5(c)に示すように、貫通孔34をその軸方向全長にわたって後行ドリル2を、その胴部21および拡径部24が全て貫通孔34の内部に侵入する位置まで下降させた状態から上昇動作に転じる場合を例示したが、もちろんこれ以外の穿孔工程に本発明に係るガラス板の製造装置を使用することも可能である。例えば図示は省略するが、拡径部24の先端側の一部が貫通孔34から下方に突出する位置まで後行ドリル2を侵入(下降)させた状態から、当該後行ドリル2の上昇動作を開始して貫通孔34から後行ドリル2を引き抜くようにしてもよい。   Further, in the above-described embodiment, as shown in FIG. 5C, the subsequent drill 2 extends through the entire length in the axial direction of the through hole 34, and the body portion 21 and the enlarged diameter portion 24 all enter the inside of the through hole 34. Although the case where it started to the ascending operation from the state lowered to the position where it is moved is illustrated, it is of course possible to use the glass plate manufacturing apparatus according to the present invention for other drilling processes. For example, although illustration is omitted, the ascending operation of the succeeding drill 2 from a state in which the succeeding drill 2 has entered (lowered) to a position where a part of the distal end side of the enlarged diameter portion 24 protrudes downward from the through hole 34. May be started and the subsequent drill 2 may be pulled out from the through hole 34.

また、以上の説明では、PDP用のガラス基板に排気孔としての貫通孔を形成する場合に本発明を適用したが、これ以外に、FED用或いはELD用のガラス基板に貫通孔を形成する場合にも同様にして本発明を適用できるのはもちろん、微細なカケの発生が問題となる貫通孔をガラス板に形成する必要がある場合には、それら全般にわたっても本発明を適用することが可能である。   In the above description, the present invention is applied to the case where a through hole as an exhaust hole is formed in a glass substrate for PDP. However, in the case where a through hole is formed in a glass substrate for FED or ELD in addition to this, In addition, the present invention can be applied to the same manner as well, and when it is necessary to form a through hole in the glass plate in which generation of fine cracks is a problem, the present invention can be applied to all of them. It is.

本発明の効果を確認すべく、以下に示す試験ならびにその検討を行った。本発明に係る先行ドリルおよび後行ドリルを備えたガラス板の製造装置(実施例)、および、従来のドリルを備えたガラス板の製造装置(比較例)について、先に共通する項目を説明する。まず、貫通孔を形成するガラス板には、横寸法が500mmで縦寸法が600mmであり且つ厚みが1.8mmのPDP用のガラス基板を、それぞれ20枚ずつ用意した。そして、上記ガラス板に排気孔となる貫通孔を形成した。何れも先行ドリルをガラス基板の下側から侵入させると共に、後行ドリルをガラス基板の上側から侵入させて穿孔を行った。   In order to confirm the effect of the present invention, the following tests and examinations were conducted. Regarding the glass plate manufacturing apparatus (Example) provided with the preceding drill and the subsequent drill according to the present invention and the glass plate manufacturing apparatus (Comparative Example) provided with the conventional drill, common items will be described first. . First, 20 glass substrates for PDP each having a horizontal dimension of 500 mm, a vertical dimension of 600 mm, and a thickness of 1.8 mm were prepared for the glass plates forming the through holes. And the through-hole used as an exhaust hole was formed in the said glass plate. In either case, the preceding drill was entered from the lower side of the glass substrate, and the subsequent drill was entered from the upper side of the glass substrate for drilling.

ここで、実施例に係るドリルは先行ドリル、後行ドリルともに図1に示す形状のドリル(コアドリル)を使用した。外径は2.0mmとした。また、その他の部位の寸法については、d1=0.54mm、L1=1.04mm、L2=1.1mmとした(図1を参照)。これに対して、従来例に係るドリルは、先行ドリル、後行ドリルともに、例えば上記引用文献1の図4に示すように、外径寸法が一定のコアドリルを使用した。外径は実施例と同じく2.0mmとした。 Here, the drill which concerns on an Example used the drill (core drill) of the shape shown in FIG. The outer diameter was 2.0 mm. As for the dimensions of the other parts, and d 1 = 0.54mm, L 1 = 1.04mm, and L 2 = 1.1 mm (see Figure 1). On the other hand, the drill according to the conventional example used a core drill having a constant outer diameter as shown in FIG. The outer diameter was 2.0 mm as in the example.

そして、上述のようにして貫通孔を形成したガラス板に対して熱曲げを与えることで当該ガラス板を破損させ、破損した破断面の破面解析により求めた熱強度データに対してワイブルプロット処理を施し、各実施例および比較例ごとに破損確率10%における熱強度を算出した。ここで、熱曲げは、各ガラス板にラバーヒーターを貼り付けて当該ガラス板の一方の端面を加熱するラバーヒーター法により行った。その結果を、下記の表1に示す。

Figure 2011111370
Then, the glass plate having the through holes formed as described above is damaged by applying thermal bending to the glass plate, and the Weibull plot processing is performed on the heat intensity data obtained by the fracture surface analysis of the broken fracture surface. The thermal strength at a failure probability of 10% was calculated for each example and comparative example. Here, the thermal bending was performed by a rubber heater method in which a rubber heater was attached to each glass plate and one end surface of the glass plate was heated. The results are shown in Table 1 below.
Figure 2011111370

上記の熱曲げによる破損は、通常、加工面(貫通孔)又はその周辺の荒れやカケ(微細なカケを含む)を起点として発生することから、熱強度が高いほど加工面又はその周辺における荒れやカケが少なく、熱強度が低いほど加工面又はその周辺における荒れやカケが多いことを意味する。ここで、上記表1によれば、本発明に係るドリルで貫通孔を形成したガラス板(実施例)のほうが、従来のドリルで貫通孔を形成したガラス板(比較例)よりも熱強度が高いことから、カケの発生抑制には、本発明に係るドリルを備えたガラス板の製造装置が有効であることがわかる。   The above-mentioned damage due to thermal bending usually occurs from the rough surface or chipping (including fine cracks) of the processed surface (through hole) or its periphery, so the higher the thermal strength, the rougher the processed surface or its periphery. It means that there are many roughness and cracks in a processed surface or its periphery, so that there are few and fragile and heat intensity is low. Here, according to Table 1 above, the glass plate (Example) in which the through hole is formed with the drill according to the present invention has a thermal strength higher than the glass plate (Comparative Example) in which the through hole is formed with the conventional drill. Since it is high, it turns out that the production apparatus of the glass plate provided with the drill which concerns on this invention is effective for generation | occurrence | production suppression of a crack.

1 先行ドリル
2 後行ドリル
3 ガラス板
11 胴部
12 小径部
13 つなぎ部
14 拡径部
21 胴部
22 小径部
23 つなぎ部
24 拡径部
31 有底孔
32 コア
33 開口部(先行ドリル侵入側)
34 貫通孔
35 開口部(後行ドリル侵入側)
DESCRIPTION OF SYMBOLS 1 Leading drill 2 Subsequent drill 3 Glass plate 11 trunk | drum 12 small diameter part 13 splice part 14 enlarged diameter part 21 trunk | drum 22 small diameter part 23 splice part 24 enlarged diameter part 31 bottomed hole 32 core 33 opening part (preceding drill intrusion side) )
34 Through-hole 35 Opening (rear drill entry side)

Claims (7)

ガラス板の一端面の側から切削を伴い先行ドリルを厚み方向に侵入させて有底孔を形成した後に該先行ドリルを後退させ、然る後、前記ガラス板の他端面の側から切削を伴い後行ドリルを前記先行ドリルと同軸に侵入させることで前記ガラス板に貫通孔を形成し得るように構成されるガラス板の製造装置において、
少なくとも前記一方のドリルは、軸方向に沿って一定の外径寸法を有する胴部と、該胴部のドリル基端側に位置し前記胴部よりも外径寸法の小さい小径部と、前記胴部と前記小径部とをつなぐつなぎ部とを備えると共に、前記一方のドリルの先端から少なくとも前記つなぎ部の前記胴部側までの部分に切削能力が付与されており、かつ、
前記一方のドリルを最も奥深くまで侵入させた状態では、前記つなぎ部の少なくとも一部が前記ガラス板の厚み方向内側にまで達するように構成されていることを特徴とするガラス板の製造装置。
After cutting from one end surface side of the glass plate to penetrate the leading drill in the thickness direction to form a bottomed hole, the preceding drill is retracted, and thereafter, cutting from the other end surface side of the glass plate is performed. In a glass plate manufacturing apparatus configured to form a through hole in the glass plate by allowing a subsequent drill to penetrate coaxially with the preceding drill,
At least one of the drills includes a barrel portion having a constant outer diameter along the axial direction, a small-diameter portion that is located on a drill base end side of the barrel portion and has a smaller outer diameter than the barrel portion, and the barrel A cutting portion is provided to a portion from the tip of the one drill to at least the body side of the connecting portion, and a connecting portion connecting the portion and the small diameter portion, and
An apparatus for producing a glass plate, characterized in that at least a part of the connecting portion reaches the inside in the thickness direction of the glass plate in a state where the one drill is inserted deepest.
前記つなぎ部は、前記胴部からドリル基端側に向かうにつれて漸次縮径する形状を有する請求項1に記載のガラス板の製造装置。   The said connection part is a manufacturing apparatus of the glass plate of Claim 1 which has a shape gradually diameter-reduced as it goes to the drill base end side from the said trunk | drum. 前記つなぎ部は、テーパ状に縮径する形状を有する請求項1又は2に記載のガラス板の製造装置。   The said connection part is a manufacturing apparatus of the glass plate of Claim 1 or 2 which has a shape which reduces in diameter in a taper shape. 前記一方のドリルは、前記胴部のドリル先端側に位置し前記胴部に向かうにつれて漸次拡径する拡径部を一体に備える請求項1〜3の何れかに記載のガラス板の製造装置。   The said one drill is a manufacturing apparatus of the glass plate in any one of Claims 1-3 integrally provided with the enlarged diameter part which is located in the drill front end side of the said trunk | drum, and expands gradually as it goes to the said trunk | drum. 前記一方のドリルは前記先行ドリルであって、その先端から前記胴部の前記つなぎ部側の端部までの軸方向寸法が前記ガラス板の厚み寸法より小さい請求項1〜4の何れかに記載のガラス板の製造装置。   The said one drill is the said precedent drill, Comprising: The axial direction dimension from the front-end | tip to the edge part by the side of the said connection part of the said trunk | drum is smaller than the thickness dimension of the said glass plate. Glass plate manufacturing equipment. 前記一方のドリルはコアドリルであって、前記胴部および前記つなぎ部の表面には切削用の砥粒が固着されており、前記胴部の外径と前記つなぎ部の外径最小値との差が前記切削用砥粒の平均粒径の2倍以上に設定されている請求項1〜5の何れかに記載のガラス板の製造装置。   The one drill is a core drill, and abrasive grains for cutting are fixed to the surface of the body part and the joint part, and the difference between the outer diameter of the body part and the outer diameter minimum value of the joint part Is set to at least twice the average particle size of the cutting abrasive grains. ガラス板の一端面の側から切削を伴い先行ドリルを厚み方向に侵入させて有底孔を形成した後に該先行ドリルを後退させ、然る後、前記ガラス板の他端面の側から切削を伴い後行ドリルを前記先行ドリルと同軸に侵入させることで前記ガラス板に貫通孔を形成する穿孔工程を含むガラス板の製造方法において、
少なくとも前記一方のドリルに、軸方向に沿って一定の外径寸法を有する胴部と、該胴部のドリル基端側に位置し前記胴部よりも外径寸法の小さい小径部と、前記胴部と前記小径部とをつなぐつなぎ部とを備え、前記一方のドリルの先端から少なくとも前記つなぎ部の前記胴部側までの部分に切削能力を持たせたものを前記穿孔工程に使用し、かつ、
前記一方のドリルを最も奥深くまで侵入させた状態では、前記つなぎ部が前記ガラス板の厚み方向内側にまで達するようにしたことを特徴とするガラス板の製造方法。
After cutting from one end surface side of the glass plate to penetrate the leading drill in the thickness direction to form a bottomed hole, the preceding drill is retracted, and thereafter, cutting from the other end surface side of the glass plate is performed. In the method of manufacturing a glass plate, including a drilling step of forming a through hole in the glass plate by allowing a subsequent drill to penetrate coaxially with the preceding drill,
At least one of the drills has a barrel portion having a constant outer diameter along the axial direction, a small-diameter portion located on the drill base end side of the barrel portion and having a smaller outer diameter than the barrel portion, and the barrel A connecting portion that connects the portion and the small diameter portion, and a portion having cutting ability at least from the tip of the one drill to the body portion side of the connecting portion is used in the drilling step, and ,
In the state which penetrated said one drill to the deepest, the said connection part reached | attained to the thickness direction inner side of the said glass plate, The manufacturing method of the glass plate characterized by the above-mentioned.
JP2009269928A 2009-11-27 2009-11-27 Apparatus and method for manufacturing glass plate Pending JP2011111370A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012029666A1 (en) * 2010-09-01 2012-03-08 旭硝子株式会社 Hole boring drill for glass
JP2016132079A (en) * 2015-01-21 2016-07-25 三菱重工業株式会社 Hole processing method
EP3991935A1 (en) 2020-10-27 2022-05-04 Shin-Etsu Chemical Co., Ltd. Method for machining synthetic quartz glass substrate
CN116001113A (en) * 2022-12-29 2023-04-25 宁夏盾源聚芯半导体科技股份有限公司 Silicon ring surface punching method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012029666A1 (en) * 2010-09-01 2012-03-08 旭硝子株式会社 Hole boring drill for glass
JP2016132079A (en) * 2015-01-21 2016-07-25 三菱重工業株式会社 Hole processing method
EP3991935A1 (en) 2020-10-27 2022-05-04 Shin-Etsu Chemical Co., Ltd. Method for machining synthetic quartz glass substrate
KR20220056126A (en) 2020-10-27 2022-05-04 신에쓰 가가꾸 고교 가부시끼가이샤 Method for machining synthetic quartz glass substrate
CN114474412A (en) * 2020-10-27 2022-05-13 信越化学工业株式会社 Method for processing synthetic quartz glass substrate
US11673385B2 (en) 2020-10-27 2023-06-13 Shin-Etsu Chemical Co., Ltd. Method for machining synthetic quartz glass substrate
CN116001113A (en) * 2022-12-29 2023-04-25 宁夏盾源聚芯半导体科技股份有限公司 Silicon ring surface punching method
CN116001113B (en) * 2022-12-29 2024-06-07 宁夏盾源聚芯半导体科技股份有限公司 Silicon ring surface punching method

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