JP2011111289A - Conveyance device - Google Patents

Abstract

Provided is a transport device capable of maintaining a cassette posture in a normal state even in a cassette transport process.
A conveyance device includes a sensor capable of detecting a distance between a first conveyance table 110 and a second conveyance table 111 and a first side surface of a cassette 200; a first roller based on an output from the sensor; And a controller 260 that adjusts the rotation speed of the second roller.
[Selection] Figure 1

Description

  The present invention relates to a cassette carrying device, and more particularly, to a carrying device for carrying a cassette containing a liquid crystal glass substrate.

2. Description of the Related Art Conventionally, a conveying device that conveys various conveyed items has been proposed.
For example, the conveying apparatus described in JP-A-11-292242 describes a conveying apparatus having a plurality of belt conveyors.

  The conveying device includes a main motor that drives one belt conveyor, a driven motor that drives another belt conveyor, and a controller that matches the rotational speed of the driven motor to the rotational speed of the main motor.

  A cassette autochanger described in Japanese Patent Application Laid-Open No. 8-83455 includes a first console including a plurality of cassette accommodating portions and first cassette transporting means, a second console including a recording / reproducing device, and a first console. And a cassette transport section that moves between the second consoles to transport the cassette.

  In addition, a plurality of sensors for detecting the position of the cassette are provided along the cassette moving path of the cassette transport unit, and the cassette detects the amount of protrusion from the cassette transport unit based on the output from the sensor.

JP 11-292242 A JP-A-8-83455

  Assuming that a cassette for transporting a glass substrate is transported using the transport device described in JP-A-11-292242, depending on the state of the bottom surface of the cassette and the surface state of each belt conveyor, There may be a difference in transport speed between the left side and the left side.

  In this case, even if the cassette is normally arranged in the initial state, the cassette rotates while being transported in the transport direction.

  For this reason, when taking out the glass substrate from the cassette or inserting the glass substrate into the cassette, the opening of the cassette is not oriented in a predetermined direction, and the fork for taking out the glass substrate comes into contact with the cassette. Problem arises.

  Note that the cassette changer described in the above-mentioned Japanese Patent Application Laid-Open No. 8-83455 cannot detect the state of inclination of the cassette.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a transport device that can maintain the posture of the cassette in a normal state even during the transport process of the cassette. is there.

  The conveying apparatus which concerns on this invention is a conveying apparatus which conveys the cassette containing the 1st side surface and 2nd side surface which are arranged in the width direction. Of the bottom surface of the cassette, a portion located on the first side surface side is disposed, a first transport table extending in the transport direction, and a plurality of first rollers that are rotatably provided on the top surface of the first transport table and transport the cassette And a first driving unit that rotates the first roller, a second conveying table that is disposed on the second side surface of the bottom surface of the cassette, and extends parallel to the first conveying table, and a second conveying table A plurality of second rollers that are rotatably provided on the upper surface of the sheet, a second drive unit that rotates the second roller, a detection unit that can detect the distance between the first side surface, And a control unit that controls the first driving unit and the second driving unit based on the output to adjust the rotation speed of the first roller and the second roller. The detection unit is between a first distance between a first detection position located on the first side surface and a second detection position located on the front side in the transport direction of the first side surface relative to the first detection position. And the control unit increases the rotational speed of at least one of the first roller and the second roller so that the difference between the first distance and the second distance is smaller than a predetermined threshold value. Or reduce.

  Preferably, the detection unit can measure a distance between a first virtual reference line extending in the transport direction and the first side surface.

  Preferably, the detection unit includes a first sensor and a second sensor located on the front side in the transport direction from the first sensor, and the first sensor and the second sensor are arranged on a first virtual reference line. The

  Preferably, the control unit sets an initial reference time when the output fluctuation rate from the detection unit exceeds a reference fluctuation rate, and the control unit detects the first reference time after a first period from the initial reference time. The control unit sets the output of the detection unit at the second reference time after the second period from the initial reference time as the second distance.

  Preferably, when the control unit determines that the first distance is greater than the second distance, the control unit increases the rotation speed of the first roller, and determines that the second distance is greater than the first distance, the rotation of the second roller. Increase speed.

  Preferably, when the control unit determines that the first distance is greater than the second distance, the controller reduces the rotation speed of the second roller, and when the control unit determines that the second distance is greater than the first distance, Reduce the rotation speed.

  Preferably, the detection unit includes a third distance between the third detection position located on the second side surface and a fourth detection position located on the front side in the transport direction from the third detection position among the second side surfaces. And a fourth distance between them. When the control unit determines that the difference between the third distance and the fourth distance is greater than a predetermined threshold, the control unit is configured so that the difference between the third distance and the fourth distance is smaller than the predetermined threshold. The rotational speed of at least one of the second roller is increased or decreased.

  Preferably, when the control unit determines that the third distance is greater than the fourth distance, the control unit decreases the rotation speed of the first roller, and when the control unit determines that the fourth distance is greater than the third distance, The rotational speed of the second roller is reduced.

  In another aspect, the transport apparatus according to the present invention is a transport apparatus that transports a cassette, and is provided on a first transport base extending in the transport direction and rotatably on the upper surface of the first transport base, and transports the cassette. A plurality of first rollers, a first driving unit that rotates the first rollers, a second transport table that extends in parallel with the first transport table, and a top surface of the second transport table that are rotatably provided to transport the cassette. A plurality of second rollers, a second drive unit for rotating the second roller, a load sensor capable of measuring a load applied to the first roller, and the first roller and the second roller based on the output from the load sensor A control unit for adjusting the rotation speed.

  In another aspect, the transport device according to the present invention is a transport device that transports a cassette including a first side surface and a second side surface arranged in the width direction, a front surface, and a back surface. A portion located on the side surface side is arranged, and a first transport table extending in the transport direction, a plurality of first rollers that are rotatably provided on the upper surface of the first transport table, and transport the cassette, and rotate the first roller Of the bottom surface of the cassette, a portion located on the second side surface side is disposed, a second transport table extending in parallel with the first transport table, and a top surface of the second transport table. A plurality of second rollers to be transported, a second drive unit for rotating the second roller, a first front detector disposed above the cassette and arranged in the arrangement direction of the first transport table and the second transport table, and Positioned closer to the second carrier than the first front detector Based on outputs from the second front detection unit, the first front detection unit, and the second front detection unit, the first drive unit and the second drive unit are controlled, and the rotation speeds of the first roller and the second roller are controlled. A control unit for adjustment. The first front detector can detect that the front has passed under the first front detector, and the second front detector can detect that the front has passed under the second front detector. It can be detected. When the front passes through the first front detection unit before the second front detection unit, the control unit decreases the rotation speed of the first roller and increases the rotation speed of the second roller. When the first front detection unit passes after the second front detection unit, the rotation speed of the first row is increased and the rotation speed of the second roller is decreased.

  According to the transport apparatus according to the present invention, it is possible to suppress the posture of the cassette from being broken during the transport process of the cassette.

It is a front view of the conveying apparatus which concerns on embodiment of this invention. 2 is a perspective view of a cassette 200. FIG. It is a perspective view which shows the 2nd conveyance stand 111 typically. FIG. 3 is a plan view of a transport device 100. It is a top view which shows the process which corrects the attitude | position of a cassette. It is the front view which looked at a part of the 2nd conveyance stand 111 in section. It is a perspective view which shows a bearing and the surrounding structure. It is a top view of the conveying apparatus 100 which concerns on this Embodiment 2. FIG. It is a front view of the conveying apparatus 100 which concerns on this Embodiment 3. FIG. It is a top view which shows typically the conveying apparatus 100 shown in FIG.

A transport apparatus according to an embodiment of the present invention will be described with reference to FIGS.
(Embodiment 1)
FIG. 1 is a front view of a transport apparatus according to an embodiment of the present invention. As shown in FIG. 1, the transport device 100 is a cassette transport device that transports a cassette 200.

  The transport apparatus 100 includes a first transport stand 110 extending in the transport direction of the cassette 200 and a second transport that is provided at an interval from the first transport stand 110 in the width direction of the cassette 200 and extends in parallel with the first transport stand 110. A stand 111 is provided.

  The first transfer table 110 is provided on the upper surface of the first transfer table 110 and is provided with a roller 112 that is rotatable about a rotation center line extending in the arrangement direction of the first transfer table 110 and the second transfer table 111. including.

  The second transfer table 111 is provided on the upper surface of the second transfer table 111 and is provided with a roller 113 that is rotatable about a rotation center line extending in the arrangement direction of the second transfer table 111 and the first transfer table 110. including.

  The cassette 200 is disposed so as to straddle the rollers 112 and 113. With the cassette 200 placed in this manner, the cassettes 200 are transported by the rotation of the rollers 112 and 113.

  FIG. 2 is a perspective view of the cassette 200. As shown in FIG. 2, the cassette 200 includes a side part 204 provided with a lid 201, a side part 205 located on the opposite side of the side part 204, a front part 202, and a side opposite to the front part 202. At least a back surface portion 207, a bottom portion 203, and a top surface portion 206. In a state where the cassette 200 is mounted on the transport apparatus 100, the front portion 202 is disposed so as to face the front side in the transport direction.

  The height of the cassette 200 is, for example, about 2.5 m, the width of the lid 201 is, for example, about 3 mm, and the width of the front portion 202 is about 3 m.

  The lid 201 is detachably provided, and the lid 201 is removed from the cassette 200 when the glass substrate is accommodated in the cassette 200 or when the glass substrate accommodated in the cassette 200 is taken out.

  FIG. 3 is a perspective view schematically showing the second transfer table 111. As shown in FIG. 3, the second transfer table 111 extends long in the transfer direction of the cassette 200. As shown in FIG. The second transfer table 111 includes a pedestal 117 and a housing 118 fixed to the upper surface of the pedestal 117. A plurality of rollers 113 are rotatably provided in the housing 118. The rollers 113 are arranged at an interval in the extending direction of the second transport table 111.

  In addition, the 1st conveyance stand 110 shown in FIG. 1 is comprised similarly to the 2nd conveyance stand 111. FIG. Specifically, the first transfer table 110 includes a pedestal 114 extending in the transfer direction, a casing 115 fixed to the upper surface of the pedestal 114 and extending in the extending direction of the pedestal 114, and the casing 115 as an upper surface of the pedestal 114 And a fixing member 116 to be fixed to.

  A plurality of rollers 112 are provided on the upper surface of the housing 115 at intervals in the extending direction of the first conveyance table 110. As shown in FIG. 2, the roller 113 is formed in a columnar shape, and is provided so as to be rotatable around a rotation center line extending in the arrangement direction of the first transport table 110 and the second transport table 111. . The casing 118 is fixed to the upper surface of the pedestal 117 by a fixing member 119.

  The second transport table 111 further includes a drive unit 131 such as a motor that rotates the roller 113, and the first transport table 110 further includes a drive unit 130 such as a motor that rotates the roller 112.

  FIG. 4 is a plan view of the transfer device 100. As shown in FIG. 4, a third transfer table 210 is continuously provided in front of the first transfer table 110 in the transfer direction P. A fourth transfer table 211 is continuously provided in front of the second transfer table 111 in the transfer direction P.

  A plurality of rollers 212 are also rotatably arranged on the upper surface of the third conveyance table 210, and a roller 213 is also arranged to be rotatable on the upper surface of the fourth conveyance table 211.

  A sensor 150 is disposed on the outer surface of the first transport table 110, and a sensor 151 is disposed on the outer surface of the first transport table 110 located in front of the sensor 150 in the transport direction P. The sensor 150 is located at the first reference position Q1, and the sensor 151 is located at the second reference position Q2.

  The sensor 150 and the sensor 151 are arranged on a first virtual reference line F1 extending in the transport direction P.

  In the example shown in FIG. 4, since the first transport table 110 and the second transport table 111 are formed in a straight line, the first virtual reference line F <b> 1 is along the outer surface of the first transport table 110. It extends in a straight line.

  The sensor 150 detects a first distance L1 between the first inspection position Q11 and the first reference position Q1 of the side surface portion 205 of the cassette 200. The sensor 151 measures the distance between the second inspection position Q12 of the side surface portion 205 of the cassette 200 and the second reference position Q2. In the example shown in FIG. 4, the first reference position Q1 and the second reference position Q2 are arranged on the first virtual reference line F1.

  For this reason, the sensor 150 and the sensor 151 measure the distance between the first inspection position Q11 and the first virtual reference line F1, and the distance between the second inspection position Q12 and the first virtual reference line F1. Specifically, the sensor 150 measures the distance between the first reference position Q1 and the first inspection position Q11 in the arrangement direction of the first transport table 110 and the second transport table 111. Similarly, the sensor 151 measures the distance between the second reference position Q2 and the second inspection position Q12 in the arrangement direction of the first transport table 110 and the second transport table 111.

  Since the sensor 151 is disposed on the front side in the transport direction P with respect to the sensor 150, the second inspection position Q2 is located on the front side in the transport direction P with respect to the first inspection position Q1.

  The sensor 151 and the sensor 150 simultaneously detect the first distance L1 and the second distance L2. The timing at which the sensor 150 and the sensor 151 measure each distance is, for example, after a predetermined time has elapsed since the sensor 150 detected the cassette 200.

  The sensor 150 constantly outputs the measurement value to the control unit 260. The control unit 260 determines that the cassette 200 has reached the front of the sensor 150 when the variation rate of the output value of the sensor 150 exceeds a predetermined reference variation rate. The controller 260 stores the output values from the sensor 150 and the sensor 151 after a predetermined time has elapsed since it was determined that the cassette 200 has reached the front of the sensor 150.

  The cassette 200 is transported to the front side in the transport direction P until a predetermined time elapses after reaching the front side of the sensor 150. For this reason, the predetermined time is shorter than the passing time required for the cassette 200 to pass after reaching the front side of the sensor 150.

  The distance between the sensor 150 (first reference position Q1) and the sensor 151 (second reference position Q2) is set to be shorter than the length between the front surface 202 and the back surface of the cassette 200. More preferably, it is set to be longer than half the distance between the front surface 202 and the back surface of the cassette 200.

  The controller 260 adjusts the rotational speeds of the rollers 112 and 113 so that the difference between the first distance L1 and the second distance L2 is smaller than a predetermined threshold T.

  Thereby, the extending direction of the side surface portion 205 of the cassette 200 can be made substantially coincident with the transport direction P, and the posture of the cassette 200 can be corrected.

  Here, when the first distance L1 is larger than the second distance L2 and the difference between the first distance L1 and the second distance L2 is larger than the threshold value T, as shown in FIG. As it goes to the front side of P, it inclines so that it may leave | separate from the 2nd conveyance stand 111. FIG.

  Therefore, the control unit 260 controls the driving of the driving unit 130 so that the rotation speed of the roller 112 increases. Thus, by increasing the rotation speed of the roller 112, the side surface portion 205 is displaced along the first virtual reference line F1, as shown in FIG.

  When the second distance L2 is greater than the first distance L1, and the difference between the second distance L2 and the first distance L1 is greater than the threshold value T, the side surface portion 205 is directed toward the front side in the transport direction P. Inclined so as to be close to the second carrier 111. In this case, the control unit 260 controls the drive of the drive unit 131 so as to increase the rotation speed of the roller 113.

  Note that when the first distance L1 is larger than the second distance L2, the drive unit 131 may be driven so as to reduce the rotation speed of the roller 113. Furthermore, when the second distance L2 is larger than the first distance L1, the driving of the driving unit 130 may be controlled so as to reduce the rotation speed of the roller 112.

  As described above, the control unit 260 adjusts the rotation speed of the roller 112 and the roller 113, so that the posture of the cassette 200 can be corrected in a short time.

  The absolute value of the difference between the rotation speeds of the rollers 112 and 113 and the acceleration of the rotation speed are set based on the absolute values of the differences between the first distance L1 and the second distance L2. For example, the absolute value of the difference between the rotation speeds of the rollers 112 and 113 may be set to be proportional to the absolute value of the difference between the first distance L1 and the second distance L2. For this reason, when the difference between the first distance L1 and the second distance L2 is large, the difference in rotational speed between the roller 112 and the roller 113 increases, and the rotational speed of the cassette 200 increases. Thereby, even when the inclination of the posture of the cassette 200 is large, the posture of the cassette 200 can be quickly corrected.

  Further, the absolute value of the acceleration of the rotation speed of the rollers 112 and 113 may be set to be proportional to the absolute value of the difference between the first distance L1 and the second distance L2. As a result, when the posture of the cassette 200 is greatly inclined, the rotation acceleration of the rollers 112 and 113 increases, and the rotation speed of the rollers 112 and 113 can be set to the target value in a short time.

  In the example illustrated in FIG. 4, the transport apparatus 100 includes a sensor 152 provided on the outer surface of the second transport base 111, and a sensor 153 disposed on the front side in the transport direction P with respect to the sensor 152. Is further provided.

  Here, the 2nd conveyance stand 111 is extended linearly, and the extension direction of the 2nd conveyance stand 111 and the conveyance direction P correspond. For this reason, the second virtual reference line F <b> 2 extending in parallel with the transport direction P extends on the outer surface of the second transport base 111.

  The sensor 152 measures a third distance L3 between the third inspection position Q13 located on the side surface portion 204 and the third reference position Q3. The sensor 153 measures a fourth distance L4 between the third inspection position Q14 located on the side surface portion 204 and the fourth reference position Q4. The sensor 152 is located at the third reference position Q3. The sensor 153 is located at the fourth reference position Q4. In the example shown in FIG. 4, the third reference position Q3 and the fourth reference position Q4 are arranged on the second virtual reference line F2. Therefore, the sensor 152 and the sensor 153 measure the distance between the second virtual reference line F2 and the third inspection position Q13 and the distance between the second virtual reference line F2 and the third inspection position Q14.

  The sensors 152 and 153 detect each distance simultaneously with the sensors 150 and 151.

  And the control part 260 controls the rotational speed of the roller 113 and the roller 112 so that the difference of the 3rd distance L3 and the 4th distance L4 becomes smaller than the threshold value T.

  Here, when the fourth distance L4 is larger than the third distance L3 and the difference between the fourth distance L4 and the third distance L3 is larger than the threshold value T, as shown in FIG. As it goes to the front side of P, it inclines so that it may approach the 1st conveyance stand 110. FIG.

  Therefore, the control unit 260 controls the driving of the driving unit 130 so that the rotation speed of the roller 112 increases. Thus, by increasing the rotation speed of the roller 112, the side surface portion 205 is displaced along the first virtual reference line F1, as shown in FIG.

  When the third distance L3 is greater than the fourth distance L4 and the difference between the third distance L3 and the fourth distance L4 is greater than the threshold value T, the side surface portion 204 moves toward the front side in the transport direction P. Inclined so as to be away from the first transfer table 110. In this case, the control unit 260 controls the drive of the drive unit 131 so as to increase the rotation speed of the roller 113.

  Note that when the fourth distance L4 is larger than the third distance L3, the drive unit 131 may be driven so as to reduce the rotation speed of the roller 113. Furthermore, when the third distance L3 is larger than the fourth distance L4, the driving of the driving unit 130 may be controlled so as to reduce the rotation speed of the roller 112. Thereby, the posture of the cassette 200 can be corrected in a short time.

  Thus, by adjusting the rotation speeds of the rollers 112 and 113, the cassette 200 can be rotated while the cassette 200 is being conveyed.

  Thereby, in the initial state, when the cassette 200 is disposed at a normal position, the cassette 200 can be returned to a normal posture.

  As a result, the first distance L1, the second distance L2, the third distance L3, and the fourth distance L4 are substantially equal. When the distance between the first distance L1 and the third distance L3 is not equal and the distance between the second distance L2 and the fourth distance L4 is not equal, the cassette 200 is shifted in the width direction. Become. For example, when the cassette 200 is offset to the first transport table 110 side, the rotational speed of the roller 112 is made faster than the rotational speed of the roller 113 for a predetermined time. Thereby, the cassette 200 is displaced toward the second transport table 111 while rotating. After a predetermined time has elapsed, the rotational speed of the roller 113 is made faster than the rotational speed of the roller 112 in order to correct the posture of the cassette 200 whose posture is inclined. As a result, the cassette 200 rotates and rotates so as to return to a normal posture, and this time, it is displaced toward the first conveyance table 110 side. Here, the rotational speed of the cassette 200 and the displacement speed in the width direction of the cassette 200 can be changed by appropriately adjusting the rotational speed and speed difference of the rollers 112 and 113.

  Therefore, even if the posture of the cassette 200 is normal, if the position of the cassette 200 is shifted in the width direction, the rotation speed of the roller 112 is made faster than the rotation speed of the roller 113 and the rotation of the roller 113 is performed. By repeating increasing the speed higher than the rotation speed of the roller 112, the cassette 200 is adjusted so that the central portion in the width direction of the cassette 200 is positioned at the central portion in the width direction of the first transport table 110 and the second transport table 111. be able to. As a result, the cassette 200 can be corrected to a normal posture, and the cassette 200 can be positioned in the width direction so that the first distance L1, the second distance L2, the third distance L3, and the fourth distance L4 are substantially equal. Can be corrected.

  In order to correct the posture of the cassette 200, the control unit 260 returns the rotation speed of the roller 112 and the roller 113 to the normal rotation speed when a predetermined time has elapsed after changing the rotation speed of the roller 112 and the roller 113. . When a predetermined time has elapsed since the start of correcting the posture of the cassette 200, the cassette 200 reaches the next transfer table from the first transfer table 110 and the second transfer table 111. Therefore, when the cassette 200 reaches the next transport table, the rotational speeds of the rollers 112 and 113 are returned to the steady state, and preparations for correcting the next transported cassette 200 are made.

  The transfer device 100 is connected to the first transfer table 110 and is connected to the third transfer table 210 located on the front side in the transfer direction P and the second transfer table 111, and is positioned on the front side in the transfer direction P. A transport table 211.

  The third transfer table 210 and the fourth transfer table 211 are configured in the same manner as the first transfer table 110 and the like, and are provided with rollers 212 and 213 that are rotatably provided and a drive unit 230 that rotationally drives the rollers 212 and 213. , 231.

  A sensor 250 and a sensor 251 disposed on the front side in the transport direction from the sensor 250 are provided on the outer surface of the third transport base 210.

  A sensor 252 and a sensor 253 disposed on the front side in the transport direction P with respect to the sensor 252 are provided on the outer surface of the fourth transport base 211.

  Then, the control unit 260 determines the posture of the cassette 200 based on the outputs from the sensors 250, 251, 252, and 253, and controls the driving of the driving unit 230 and the driving unit 231, thereby controlling the cassette 200. Correct the posture.

  As described above, the transport device 100 determines the posture of the cassette 200 in a plurality of sections, and performs control to correct the posture of the transport device 100 when the cassette 200 is rotating from a predetermined state.

  In the transport apparatus 100, an interval between the cassettes 200 is set so that one cassette 200 is positioned in a section formed by the first transport table 110 and the second transport table 111.

  For this reason, for example, it is suppressed that a plurality of cassettes 200 are arranged in the section constituted by the 1st conveyance stand 110 and the 2nd conveyance stand 111, and other by correcting the posture of one cassette 200, etc. The collapse of the posture of the cassette 200 is suppressed.

  Thereby, even when the transport apparatus 100 transports a plurality of cassettes 200, the posture of each cassette 200 can be corrected.

  In the example shown in FIG. 4, the posture of the cassette 200 is determined by measuring the distance from the side surface portion of the cassette 200 using a plurality of sensors. The method is not limited to the above.

  For example, the posture of the cassette 200 may be determined using only the sensor 150.

  The control unit 260 stores a reference variation rate. The sensor 150 always performs distance sensing. When the cassette 200 reaches the sensor 150, the output value from the sensor 150 varies greatly. When the control unit 260 determines that the fluctuation rate of the output from the sensor 150 is larger than the reference fluctuation rate, the control unit 260 sets the time as the initial reference time.

  Then, the control unit 260 sets the output of the sensor 150 at the second reference time after the second period from the initial reference time as the second distance L2. At this time, the distance between the second inspection position Q12 and the sensor 150 is measured. Thereafter, the control unit 260 sets the output of the sensor 150 at the first reference time after the first period from the initial reference time as the first distance L1. At this time, the distance between the first inspection position Q11 and the sensor 150 is measured. Note that the second period is shorter than the first period. Based on the first distance L1 and the second distance L2, the rotational speeds of the rollers 112 and 113 are controlled.

  In the above modification, the inclination state of the cassette 200 is determined based on the distance between the sensor 150 and the two points of the first inspection position Q11 and the second inspection position Q12. However, the present invention is not limited to this. . For example, the distance between the cassette 200 and the sensor 150 may be measured at a plurality of positions.

  For example, the sensor 150 measures the first distance L1 for at least a predetermined period after the side surface portion 205 of the cassette 200 reaches the side of the sensor 150, and outputs the measurement result to the control unit 260 every moment.

  For example, when the first distance L1 increases with time, it is considered that the cassette 200 is inclined as shown in FIG. In this case, the control unit 260 increases the rotation speed of the roller 112 and decreases the rotation speed of the roller 113.

  On the other hand, when the first distance L1 decreases with time, the control unit 260 decreases the rotation speed of the roller 112 and increases the rotation speed of the roller 113. Even in such an example, the posture of the cassette 200 can be determined, and the posture of the cassette 200 can be corrected.

(Embodiment 2)
A transport apparatus 100 according to the second embodiment will be described with reference to FIGS. Of the configurations shown in FIGS. 6 and 7, configurations that are the same as or equivalent to the configurations shown in FIGS.

  FIG. 6 is a front view of a part of the second transfer table 111 as a cross-sectional view. As shown in FIG. 6, the roller 113 is rotatably provided on the housing 118 by a rotation shaft 120.

  As shown in FIG. 7, a bearing 320 is attached to the rotating shaft 120. Here, two bearings 320 are arranged at intervals, and the rollers 112 are arranged between the bearings 320.

  The outer race of the bearing 301 is attached to the inner peripheral surface of the hole formed in the housing 118, and the rotating shaft 120 is fixed to the inner race of the bearing 301. A pressure sensor 300 is disposed on the lower end side of the outer peripheral surface of the outer race of the bearing 301.

  Thereby, the load applied to the roller 112 can be detected by the two pressure sensors 300.

  FIG. 8 is a plan view of the transport apparatus 100 according to the second embodiment. As shown in FIG. 8, the first transport table 110 includes the pressure sensor 300 and two pressure sensors 301 provided on the bearings of the rollers 112 positioned in front of the pressure sensor 300 in the transport direction P. ing. The second transport table 111 includes a pressure sensor 302 provided on the bearing of the roller 113 and two pressure sensors 303 positioned on the front side in the transport direction P with respect to the pressure sensor 302.

  The pressure sensor 302 and the pressure sensor 300 are arranged in the arrangement direction of the first conveyance table 110 and the second conveyance table 111. The pressure sensor 303 and the pressure sensor 301 are also arranged in the arrangement direction of the first conveyance table 110 and the second conveyance table 111.

  The controller 260 stores a load applied to each of the pressure sensors 300 to 303 when the cassette 200 is in a normal posture.

  Then, the control unit 260 receives the output value from each of the pressure sensors 300 to 303, and determines that the posture of the cassette 200 is normal if the output from each load sensor is within a predetermined threshold range. The rotational speed of the rollers 112 and 113 is maintained.

  On the other hand, when the output values output from the pressure sensor 300 to the pressure sensor 303 exceed the threshold value, the rotational speeds of the rollers 112 and 113 are adjusted to correct the posture of the cassette 200.

  For example, in the example shown in FIG. 8, as the side surface portion 205 moves toward the front side in the transport direction P, it tilts away from the second transport base 111, and as the side surface portion 204 moves toward the front side in the transport direction P, It inclines so that it may approach the 1st conveyance stand 110.

  In such a state where the cassette 200 is inclined, the load applied to the pressure sensor 300 and the pressure sensor 303 is smaller than when the cassette 200 is in a normal posture. The load applied to the pressure sensor 301 and the pressure sensor 302 becomes larger than when the cassette 200 is in a normal posture.

  Thus, when the output values output from the pressure sensor 300 and the pressure sensor 303 are smaller than the threshold value and the output values output from the pressure sensor 301 and the pressure sensor 303 are larger than the threshold value, the control unit 260 rotates the roller 112. While increasing the speed, the rotational speed of the roller 113 is decreased.

  On the other hand, when the output values of the pressure sensor 300 and the pressure sensor 303 are larger than the threshold values and the output values of the pressure sensor 301 and the pressure sensor 302 are smaller than the threshold values, the control unit 260 decreases the rotation speed of the roller 112. And the rotational speed of the roller 113 is increased. In the transport apparatus 100 according to the second embodiment, the third transport base 210 is also provided with a pressure sensor 450 and a pressure sensor 451 provided on the front side in the transport direction P from the pressure sensor 450.

In the transfer device 100 according to the second embodiment, a plurality of pressure sensors 300 to
Although the pressure sensor 303 is used to detect the posture of the cassette 200, it may be detected using only the pressure sensor 300.

  For example, when the cassette 200 is in a normal posture, the load applied to the pressure sensor 300 does not vary greatly in the process of passing the cassette 200.

  On the other hand, as shown in FIG. 8, when the cassette 200 is tilted, the load applied to the pressure sensor 300 is initially greater than the threshold value and decreases as the cassette 200 passes.

  In this case, the control unit 260 increases the rotation speed of the roller 112 and decreases the rotation speed of the roller 113.

  On the other hand, when the side surface portion 205 is inclined toward the front side in the transport direction P so as to approach the second transport table 111, the load applied to the pressure sensor 300 is initially smaller than the threshold, and the cassette It grows as 200 passes.

  In this case, the control unit 260 increases the rotation speed of the roller 113 and decreases the rotation speed of the roller 112. Thus, the posture of the cassette 200 can be corrected only by the pressure sensor 300.

In the transfer apparatus 100 according to the second embodiment, the third transfer table 210 and the fourth transfer table 211 are also provided with a plurality of pressure sensors 450 to 453.

(Embodiment 3)
A transport apparatus 100 according to the third embodiment will be described with reference to FIGS. 9 and 10. Of the configurations shown in FIGS. 9 and 10, configurations that are the same as or correspond to the configurations shown in FIGS. 1 to 8 are given the same reference numerals, and the description thereof may be omitted.

  FIG. 9 is a front view of the transport apparatus 100 according to the third embodiment. As shown in FIG. 9, a plurality of sensors 311, 312, and 313 are arranged at intervals above the cassette 200 to be conveyed.

  FIG. 10 is a plan view schematically showing the transfer apparatus 100 shown in FIG. As shown in FIG. 10, a plurality of sensors 311 to 313 are arranged on the virtual vertical line L5 at intervals. The virtual vertical line L5 is a virtual straight line orthogonal to the transport direction P, and the plurality of sensors 311 to 313 are arranged in the arrangement direction of the first transport table 110 and the second transport table 111. Note that the sensor 311 is located closer to the first carrier 110 than the sensors 313 and 312, and the sensor 312 is disposed between the sensors 313 and 311. Note that the sensors 311 to 313 are arranged above the cassette 200.

  Then, the sensors 311 to 313 determine whether or not the cassette 200 is positioned below. Then, the control unit 260 determines the posture of the cassette 200 based on the outputs from the sensors 311 to 313, and adjusts the rotation speed of the roller 112 and the roller 113 when the posture of the cassette 200 is tilted.

  For example, in the example illustrated in FIG. 10, in the process of transporting the cassette 200, the portion located on the side surface portion 204 side of the front surface portion 202 of the cassette 200 passes through the virtual vertical line L <b> 5. As the cassette 200 is transported, the portion of the front portion 202 located from the side portion 204 side to the side portion 205 side sequentially passes the virtual vertical line L5.

  For this reason, the sensor 313 first detects that the cassette 200 has reached the lower side, and then the sensor 312 and the sensor 311 sequentially detect the cassette 200.

  Here, the control unit 260 calculates the time until the sensor 312 detects the cassette 200 after the sensor 313 detects the cassette 200 and the time until the sensor 311 detects the cassette 200 after the sensor 313 detects. To do.

  The controller 260 determines that the time from when the sensor 311 detects the cassette 200 until the sensor 312 detects the cassette 200 exceeds a predetermined threshold, and further, after the sensor 311 detects the cassette 200, the sensor When the time until 311 detects the cassette 200 exceeds a predetermined threshold, the rotation of the roller 112 is increased and the rotation of the roller 113 is decreased.

  On the other hand, when the sensor 311 detects the cassette 200 first, and then the sensor 312 and the sensor 313 sequentially detect the cassette 200, the controller 260 rotates the rotation speed of the roller 112 and the roller 113 as follows. Adjust.

  The time from when the sensor 311 detects the cassette 200 until the sensor 312 detects the cassette 200 and the time from when the sensor 311 detects the cassette 200 until the sensor 313 detects the cassette 200 exceeds a predetermined threshold. If so, the rotational speed of the roller 112 is decreased and the rotational speed of the roller 113 is increased.

  By controlling the driving of each roller in this way, the posture of the cassette can be corrected satisfactorily.

  Although the embodiment of the present invention has been described above, it should be considered that the embodiment disclosed this time is illustrative and not restrictive in all respects. The scope of the present invention is defined by the terms of the claims, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims. Furthermore, the above numerical values are examples, and are not limited to the above numerical values and ranges.

  100 Conveyor, 110, 111 Conveyor, 112 Roller, 150, 151 Sensor, 200 Cassette, 202 Front, 203 Bottom, 204 Side, 205 Side, 206 Top, 207 Back, 210, 211 Conveyor, 212, 213 roller, 230, 231 drive unit, 250, 251, 251, 253 sensor, F1, F2 virtual reference line, L5 virtual vertical line, P transport direction.

Claims (10)

A transport device for transporting a cassette including a first side surface and a second side surface arranged in the width direction,
Of the bottom surface of the cassette, a portion located on the first side surface side is disposed, and a first transport stand extending in the transport direction;
A plurality of first rollers which are rotatably provided on an upper surface of the first transport table and transport the cassette;
A first drive unit for rotating the first roller;
Of the bottom surface of the cassette, a portion located on the second side surface is disposed, and a second transport table extending in parallel with the first transport table,
A plurality of second rollers which are rotatably provided on the upper surface of the second conveying table and convey the cassette;
A second drive unit for rotating the second roller;
A detection unit capable of detecting a distance from the first side surface;
A control unit that controls the first driving unit and the second driving unit based on an output from the detection unit to adjust a rotation speed of the first roller and the second roller;
The detection unit includes a first distance between a first detection position located on the first side surface,
A second distance between the first side surface and the second detection position located on the front side in the transport direction from the first detection position;
The controller increases or decreases the rotational speed of at least one of the first roller and the second roller so that a difference between the first distance and the second distance is smaller than a predetermined threshold; Conveying device.   The transport device according to claim 1, wherein the detection unit is capable of measuring a distance between a first virtual reference line extending in the transport direction and the first side surface. The detection unit includes the first sensor and a second sensor located on the front side in the transport direction with respect to the first sensor,
The transport device according to claim 2, wherein the first sensor and the second sensor are arranged on the first virtual reference line. The control unit, when the fluctuation rate of the output from the detection unit exceeds the reference fluctuation rate, and the initial reference time,
The control unit sets the output of the detection unit at the first reference time after the first period from the initial reference time as the first distance,
The transport apparatus according to claim 1, wherein the control unit sets the output of the detection unit at a second reference time after a second period from the initial reference time as the second distance. The controller is
If it is determined that the first distance is greater than the second distance, the rotational speed of the first roller is increased,
The transport apparatus according to any one of claims 1 to 4, wherein when the second distance is determined to be greater than the first distance, the rotation speed of the second roller is increased. The controller is
If it is determined that the first distance is greater than the second distance, the rotational speed of the second roller is decreased,
The conveying apparatus according to any one of claims 1 to 5, wherein when the second distance is determined to be greater than the first distance, the rotation speed of the first roller is decreased. The detector is
A third distance between the third detection position located on the second side surface;
A fourth distance between the second side surface and a fourth detection position located on the front side in the transport direction from the third detection position;
When the control unit determines that the difference between the third distance and the fourth distance is greater than a predetermined threshold, the difference between the third distance and the fourth distance is smaller than a predetermined threshold. The conveying apparatus according to any one of claims 1 to 6, wherein a rotation speed of at least one of the first roller and the second roller is increased or decreased. If the controller determines that the third distance is greater than the fourth distance, the controller reduces the rotational speed of the first roller,
The transport device according to claim 7, wherein when the control unit determines that the fourth distance is greater than the third distance, the controller reduces the rotation speed of the second roller. A transport device for transporting a cassette,
A first transport stand extending in the transport direction;
A plurality of first rollers which are rotatably provided on an upper surface of the first transport table and transport the cassette;
A first drive unit for rotating the first roller;
A second transfer table extending parallel to the first transfer table;
A plurality of second rollers which are rotatably provided on the upper surface of the second conveying table and convey the cassette;
A second drive unit for rotating the second roller;
A load sensor capable of measuring a load applied to the first roller;
A conveying apparatus comprising: a control unit that adjusts the rotation speeds of the first roller and the second roller based on an output from the load sensor. A transport device for transporting a cassette including a first side surface and a second side surface arranged in the width direction, and a front surface and a back surface,
Of the bottom surface of the cassette, a portion located on the first side surface side is disposed, and a first transport stand extending in the transport direction;
A plurality of first rollers which are rotatably provided on an upper surface of the first transport table and transport the cassette;
A first drive unit for rotating the first roller;
Of the bottom surface of the cassette, a portion located on the second side surface is disposed, and a second transport table extending in parallel with the first transport table,
A plurality of second rollers provided on an upper surface of the second transport table and transporting the cassette;
A second drive unit for rotating the second roller;
A first front detection unit disposed above the cassette and arranged in the arrangement direction of the first transfer table and the second transfer table, and a second position positioned closer to the second transfer table than the first front detection unit. A front detection unit;
Control that controls the first drive unit and the second drive unit based on outputs from the first front detection unit and the second front detection unit, and adjusts the rotation speeds of the first roller and the second roller. With
The first front detector can detect that the front has passed under the first front detector,
The second front detection unit can detect that the front has passed under the second front detection unit,
The controller is
When the front passes through the first front detection unit earlier than the second front detection unit, the rotation speed of the first roller is decreased and the rotation speed of the second roller is increased,
The transport device that increases the rotation speed of the first row and decreases the rotation speed of the second roller when the front surface passes through the first front detection section after the second front detection section.

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