JP2011108789A - Transfer apparatus and system - Google Patents

Abstract

An object of the present invention is to stably transport a transport vehicle between a plurality of factories even when a relative displacement occurs between positions of a plurality of buildings and a displacement in a direction different from a traveling direction of the transport vehicle occurs. A semiconductor wafer transfer apparatus and a transfer system are provided.
A transport unit 100 includes a ceiling-side suspension member 1, a suspension bolt 2, a suspension support (movable support portion) 3, a track unit (track portion) 4, a transport vehicle running surface 5, a connection plate ( The displacement follower 101 has a slide mechanism (slide part) 31 extending in the y-axis direction, and the slide unit 31 is attached to the transport unit 100. By providing, it comprises so that the conveyance vehicle 7 can move.
[Selection] Figure 2

Description

  The present invention relates to a transfer device and a transfer system for transferring a semiconductor device storage container between a plurality of buildings.

  In a semiconductor device manufacturing factory, a transfer device for transferring semiconductor wafers is generally installed on the ceiling. In recent years, in order to improve production efficiency, it has been considered to transfer a semiconductor wafer not only within one semiconductor device manufacturing factory but also between a plurality of semiconductor device manufacturing factories. As a result, even if a desired manufacturing apparatus in the semiconductor device manufacturing factory is in use, if the same manufacturing apparatus in another semiconductor device manufacturing factory is not used, the semiconductor device is temporarily used. Production efficiency can be improved by advancing the manufacture of

  When a semiconductor wafer is transferred between two semiconductor device manufacturing factories, an inter-building passage (crossing corridor) is provided between the factories, and a transfer device is installed on the ceiling of the semiconductor device manufacturing factory and the inter-building passage. If there are strong winds, earthquakes, etc. due to differences in the construction methods of the two semiconductor device manufacturing factories, the relative position between the two factories may be displaced. It is assumed that this displacement exceeds 10 cm at the maximum. Therefore, if the transport device is completely fixed to the semiconductor device manufacturing factory and the inter-building passage, the transport device may be damaged due to a relative displacement between buildings due to strong winds, earthquakes, or the like.

  Patent Document 1 discloses a rail device that can absorb expansion and contraction using a movable rail even when a rail member on which a transport vehicle travels expands and contracts due to thermal expansion. However, a transport mechanism that can absorb the relative displacement of the building has not been proposed.

JP 2004-84259 A

  The present invention provides a transfer device and a transfer system that can transfer a semiconductor device storage container even when relative displacement occurs between positions of a plurality of buildings.

  According to one aspect of the present invention, there is provided a transport device that is provided on the ceilings of the first and second buildings and that travels a transport vehicle capable of transporting the semiconductor device storage container between the first and second buildings. A plurality of transport units that form a transport path for running the transport vehicle and at least one of the plurality of transport units, and a relative displacement occurs between the first and second buildings. The direction in which at least one of the plurality of transport units cancels the relative displacement so that the transport vehicle is not hindered from traveling between the first and second buildings. And a displacement follower to be moved.

  Moreover, according to one aspect of the present invention, there is provided a transport system that is provided on the ceilings of the first and second buildings and that allows a transport vehicle that can transport the semiconductor device storage container to travel between the first and second buildings. A plurality of transport units that form a transport path for traveling the transport vehicle, and at least one of the plurality of transport units, and a relative displacement between the first and second buildings. Even if it occurs, at least one of the plurality of transport units cancels the relative displacement so that the transport vehicle is not hindered from traveling between the first and second buildings. A displacement follower that moves in a moving direction, a movement amount acquisition unit that acquires at least one movement amount of the plurality of transport units, and a travel determination that determines whether the acquired movement amount exceeds a predetermined threshold value Part and said Momentum transport system characterized in that it comprises a transport vehicle controller for prohibiting the movement of the transport vehicle to the transport unit exceeds the predetermined threshold is provided.

  According to the present invention, the semiconductor device storage container can be transported even if a relative displacement occurs between positions of a plurality of buildings.

The figure which shows schematic structure of the conveyance system 200 which concerns on the 1st Embodiment of this invention. 1 is a perspective view of a transport unit 100 and a displacement follower 101 according to a first embodiment of the present invention. FIG. 3 is a cross-sectional view of an xz plane (a chain line P in FIG. 2) including the center in the y-axis direction of the track unit 4 in FIG. 2. FIG. 3 is a sectional view of a yz plane (a chain line Q in FIG. 2) including the slide mechanism 31 of FIG. The perspective view of the conveyance unit 100a and the displacement tracking part 101a which concern on the 2nd Embodiment of this invention. FIG. 6 is a cross-sectional view of the yz plane (the chain line R in FIG. 5) including the suspension support 3 of FIG. 5. FIG. 7 is a cross-sectional view of the track unit 4 and the xz plane inside thereof, including the one-dot chain line T of FIG. 6. FIG. 6 is a cross-sectional view of the xz plane (one-dot chain line S in FIG. 5) including the center in the y-axis direction of the track unit 4 in FIG. 5. Sectional drawing of xy plane containing the broken line U of FIG. The perspective view of the conveyance unit 100b and the displacement tracking part 101b which concern on the 3rd Embodiment of this invention. FIG. 11 is a top view of the rotation mechanism 51 and the track unit 4 of FIG. 10. The figure which shows schematic structure of the conveyance system 201 which concerns on the 4th Embodiment of this invention. 13 is a flowchart showing an example of processing operation of the transport system 201 in FIG.

  Hereinafter, embodiments of a transport apparatus and a transport system according to the present invention will be specifically described with reference to the drawings.

(First embodiment)
FIG. 1 is a diagram showing a schematic configuration of a transport system 200 according to the first embodiment of the present invention, and FIG. 2 is a perspective view of a transport unit 100 and a displacement follower 101 which are a part of the configuration of the transport system 200. The present transfer system 200 includes a semiconductor between first and second semiconductor device manufacturing factories (hereinafter referred to as first and second factories) 110 and 111 that manufacture semiconductor devices on a semiconductor wafer via an inter-building passage 112. A semiconductor device such as a wafer is transported. The connecting portion between the first and second factories 110 and 111 and the inter-building passage 112 is provided with a bellows-like building displacement absorbing part (not shown), and the first and second factories 110 and 111 are connected to each other. Even if displacement occurs, the connection between the first and second factories 110 and 111 and the inter-building passage 112 can be maintained.

  The transport system 200 includes a transport device having a plurality of transport units 100, a displacement follower 101, and a transport vehicle 7, and a transport vehicle controller 102.

  The transport unit 100 is installed on the ceiling between the first and second factories 110 and 111 and the inter-building passage 112. Each transport unit 100 includes a transport vehicle traveling surface 5 therein. The transport vehicle 7 holding the storage container 8 storing the semiconductor wafer travels along the transport vehicle travel surface 5 to transport the semiconductor wafer between the first and second factories 110 and 111.

  The displacement follower 101 is provided in at least one of the plurality of transport units 100. Even if the relative position between the first and second factories 110 and 111 is displaced due to strong winds, earthquakes, or the like, the displacement follower 101 causes the transport vehicle 7 to move to the first and second factories 110 and 110. This displacement is offset by moving at least a part of the components of the transport unit 100 so that traveling between the two is not hindered.

  The transport vehicle control unit 102 controls the travel of the transport vehicle 7. More specifically, for example, the transport vehicle control unit 102 controls the motor that drives the wheels (not shown in FIGS. 1 and 2) of the transport vehicle 7 to run or stop the transport vehicle 7. . The transport vehicle control unit 102 is realized by software using, for example, one or a plurality of computers. This computer may be installed in the first or second factory 110 or 111, or may be installed in another location. Moreover, you may implement | achieve at least one part control of the conveyance vehicle control part 102 with hardware.

  FIG. 2 illustrates two transport units 100 and a displacement follower 101 that are installed adjacent to each other in one direction. In the following, the horizontal direction in the figure is defined as the x axis, the vertical direction is defined as the z axis, the x axis (second direction), and the direction perpendicular to the z axis is defined as the y axis (first direction).

  FIG. 2A is a diagram showing a state (initial state) where there is no displacement in the relative position between the first and second factories 110 and 111, and FIG. 2B shows a displacement in the y-axis direction. It is a figure of a state (displacement state). As described above, in the present embodiment, even when a relative displacement in the y-axis direction occurs between the first and second factories 110 and 111, the transport vehicle 7 is not hindered from traveling, and the first and second factories It is intended to be able to travel stably between the two factories 110 and 111.

  The transport unit 100 includes a ceiling-side suspension member 1, a suspension bolt 2, a suspension support (movable support portion) 3, a track unit (track portion) 4, a transport vehicle traveling surface 5, and a connection plate (connection portion) 6. And bolts (not shown in FIG. 2) for fixing the members to each other. Further, the displacement follower 101 of the present embodiment has a slide mechanism (slide part) 31 extending in the y-axis direction. In FIG. 2, two slide mechanisms 31 are provided in one transport unit 100, but the number of slide mechanisms 31 provided in one transport unit 100 is arbitrary.

  The transport vehicle 7 travels in the x-axis direction along the transport vehicle travel surface 5 in the activation unit 4 while holding the semiconductor wafer storage container 8. The connection plate 6 connects adjacent track units 4, and the transport vehicle running surface 5 is also provided below the connection plate 6. Thereby, the connection plate 6 delivers the transport vehicle 7 between the track units 4, and the transport vehicle 7 travels between the adjacent transport units 100.

  The ceiling side suspension member 1 is fixed to the ceiling 61 with bolts. The slide mechanism 31 is fixed to the ceiling side suspension member 1 via the suspension bolt 2. Thereby, the slide mechanism 31 is also fixed to the ceiling 61. As will be described later, a part of the suspension support 3 is slidably fitted into a hollow portion in the slide mechanism 31. More specifically, the suspension support 3 can slide in the y-axis direction that is the longitudinal direction of the slide mechanism 31. Since the track unit 4 is fixed to the suspension support 3, the track unit 4 also slides along with the slide of the suspension support 3. A transport vehicle 7 is movably mounted on the transport vehicle traveling surface 5 in the activation unit 4, and when the suspension support 3 slides in the y-axis direction, the transport vehicle 7 also slides in the y-axis direction accordingly.

  FIG. 3 is a cross-sectional view of the xz plane (the chain line P in FIG. 2) including the center in the y-axis direction of the track unit 4 of FIG. The slide mechanism 31 has a hollow inside and opens downward. The suspension support 3 is fitted into the hollow portion so as to be slidable in the y-axis direction. More specifically, an LM (Linear Motion) guide or a slide rail (not shown) is provided inside the slide mechanism 31, and the suspension support 3 slides along this. As a result, the suspension support 3 can slide in the y-axis direction relative to the slide mechanism 31 fixed to the ceiling 61.

  4 is a cross-sectional view of a yz plane (a chain line Q in FIG. 2) including the slide mechanism 31 of FIG. The track unit 4 is fixed to the suspension support 3 by bolts 9. The track unit 4 has a hollow inside and opens downward. A transport vehicle traveling surface 5 is provided inside the track unit 4. The transport vehicle 7 includes wheels 10, and the wheels 10 travel along the transport vehicle travel surface 5. The wheels 10 are driven by the transport vehicle controller 102 shown in FIG.

  As shown in FIG. 4, the slide mechanism 31 may include a stopper (movement restriction unit) 32. The stopper 32 may be formed integrally with the slide mechanism 31 or may be a separate member attached to the slide mechanism 31. When the stopper 32 is provided, the suspension support 3 slides inside the stopper 32 in the y-axis direction. Therefore, the sliding amount of the suspension support 3 can be limited by the stopper 32, and the suspension support 3 can be prevented from sliding beyond the allowable amount, or the suspension support 3 can be prevented from being detached from the slide mechanism 31.

  The length of the track unit 4 in the y-axis direction is, for example, 40 cm. The length of the slide mechanism 31 in the y-axis direction is, for example, 80 cm, and the length of the suspension support 3 in the y-axis direction is shorter than this, for example, 55 cm. Furthermore, the length of the stopper 32 in the y-axis direction is, for example, 5 cm. Under this condition, the suspension support 3 can slide up to 15 cm in the cavity of the slide mechanism 31.

  Note that when the assumed displacement in the y-axis direction is sufficiently smaller than the length of the slide mechanism 31 in the y-axis direction, the slide mechanism 31 does not necessarily have to include the stopper 32. In this case, the length of the slide mechanism 31 may be close to the length of the suspension support 3 in the y-axis direction.

  Here, the conveyance unit 100 and the displacement follower 101 on the left side of FIG. 2 (a) are installed on the second factory 111 side (position m in FIG. 1) in the inter-building passage 112 in FIG. It is assumed that the conveyance unit 100 and the displacement follower 101 on the right side in FIG. 2A are installed closest to the inter-building passage 112 (position n in FIG. 1) in the second factory 111 in FIG. . In this case, it is assumed that only the second factory 111 is slightly displaced in the y-axis direction (that is, the direction perpendicular to the traveling direction of the transport vehicle 7). FIG. 2B is a diagram showing the situation at this time.

  When the displacement in the y-axis direction occurs in the second factory 111, the slide mechanism 31 in the second factory 112 is fixed to the ceiling 61. Therefore, the right slide mechanism 31 moves in the y-axis direction according to the displacement of the ceiling 61. Move to. On the other hand, as described above, the suspension support 3 is slidable in the cavity of the slide mechanism 31, and the left and right track units 4 fixed to the suspension support 3 are connected to each other by the connection plate 6. Yes. Therefore, the suspension support 3 in the second factory 111 moves along the slide mechanism 31 so as to cancel the displacement, and the connection with the track unit 4 in the inter-building passage 112 is maintained.

  Further, the inter-building passage 112 can maintain the connection with the second factory 111 by the bellows-like building displacement absorbing portion provided at the connection portion between the inter-building passage 112 and the second factory 111.

  As a result, the inter-building passage 112 is not displaced, and the left and right track units 4 can still be arranged in a straight line. Therefore, the transport vehicle 7 can travel stably along the transport vehicle travel surface 5 installed inside these, and there is no problem in transporting the semiconductor wafer storage container 8 between the first and second factories 110 and 111. Does not occur.

  In FIG. 2 and the like, an example in which the slide mechanism 31 and the suspension support 3 are provided in the y-axis direction perpendicular to the x-axis that is the traveling direction of the transport vehicle 7 is shown. It may be provided in a different direction.

  As described above, in the first embodiment, since the slide mechanism 31 is provided in the transport unit 100 so that the transport vehicle 7 can move in the y-axis direction, the relative relationship between the first and second factories 110 and 111 is relatively small. Even when a displacement in a direction (y-axis direction) different from the traveling direction of the transport vehicle 7 occurs due to the displacement, the transport vehicle 7 can be moved so as to cancel the displacement. The semiconductor wafer storage container 8 can be stably transferred between the second factories 110 and 111.

(Second Embodiment)
The first embodiment described above assumes a case where the first and second factories 110 and 111 are displaced perpendicular to the traveling direction of the transport vehicle 7. On the other hand, in the second embodiment described below, it is assumed that the first and second factories 110 and 111 are displaced in the x axis, that is, in the traveling direction of the transport vehicle 7. In the following description, the same reference numerals are given to the components common to the first embodiment, and different points will be mainly described below.

  FIG. 5 is a perspective view of the transport unit 100a and the displacement follower 101a according to the second embodiment of the present invention, and defines the x-axis, y-axis, and z-axis as in FIG. FIG. 5A is a diagram showing a state in which the first and second factories 110 and 111 are not displaced (initial state), and FIG. 5B is a diagram in which the first and second factories 110 and 111 are moved away from each other. FIG. 5C is a diagram showing a state displaced on the x-axis in the direction (displaced state), and FIG. 5C is a state displaced on the x-axis in the direction in which the first and second factories 110 and 111 approach each other (displaced state). ).

  Thus, in this embodiment, even when the first and second factories 110 and 111 are relatively displaced in the x-axis direction, the transport vehicle 7 can travel between the first and second factories 110 and 111. With that in mind.

  In the present embodiment, unlike FIG. 2, the connection plate 6 is not necessary, but the transport device has a variable length passage portion 41 as the displacement follower 101a.

  As will be described later, the variable length passage portion 41 is slidably fitted into a hollow portion in the adjacent track unit (movable track portion) 4, but is not fixed to the track unit 4. A transport vehicle travel surface 43 (not shown in FIG. 5) is also provided in the variable length passage portion 41, and the transport vehicle 7 travels the transport vehicle travel surface 5 in the track unit 4 and the transport vehicle travel in the variable length passage portion 41. Travel along the surface 43 in the x-axis direction. Unlike the first embodiment, the suspension support 3 is fixed to the ceiling 61 via the ceiling-side suspension member 1 and the suspension bolt 2.

  6 is a cross-sectional view of the yz plane (the chain line R in FIG. 5) including the suspension support 3 of FIG. The track unit 4 has a hollow inside and opens downward. A variable length passage portion 41 is movably mounted on the transport vehicle running surface 5 in the cavity. Since the variable length passage 41 is not fixed to the track unit 4 in the cavity of the track unit 4, the variable length passage 41 and the track unit 4 are relatively movable in the x-axis direction. That is, since the track unit 4 is fixed to the ceiling 61, it moves with the displacement of the ceiling 61, but the variable length passage portion 41 does not move. Note that the variable length passage portion 41 and the track unit 4 move relatively with the displacement of the first and second factories 110 and 111, and are not driven and moved from the outside.

  Moreover, the inside of the variable-length channel | path part 41 is also a cavity, and it opens toward the lower side. Inside the variable length passage portion 41, a transport vehicle running surface 43 is provided. The width of the transport vehicle travel surface 5 in the track unit 4 and the width of the transport vehicle travel surface 43 in the variable length passage portion 41 are set equal to each other, and the wheels 10 of the transport vehicle 7 are also transported on the transport vehicle travel surface 5. The vehicle can also travel on the traveling surface 43.

  FIG. 7 is a cross-sectional view of the track unit 4 and the xz plane inside thereof, including the alternate long and short dash line T of FIG. The transport vehicle 7 can smoothly transfer from the transport vehicle travel surface 5 in the track unit 4 to the transport vehicle travel surface 43 in the variable length passage portion 41, and can smoothly transfer from the transport vehicle travel surface 43 to the transport vehicle travel surface 5. In addition, it is desirable to form slopes near both ends of the variable length passage portion 41 in the x-axis direction. By forming such a slope, the transport vehicle 7 can move between the transport vehicle travel surface 5 and the transport vehicle travel surface 43 without causing play.

  8 is a cross-sectional view of the xz plane (the dashed-dotted line S in FIG. 5) including the center in the y-axis direction of the track unit 4 in FIG. 5, and FIG. 9 is a cross-sectional view in the xy plane including the dashed-dotted line U in FIG. FIG. As shown in FIGS. 8 and 9, a positioning groove 42 is formed on the upper surface of the variable length passage portion 41 along the moving direction of the facing track unit 4. Since the separate track units 4 are arranged at two positions on the left and right sides of the variable length passage portion 41, positioning grooves 42 are also provided at two positions on both sides in the x-axis direction. The track unit 4 is provided with positioning pins 12 that can be engaged with the corresponding positioning grooves 42. The positioning pin 12 may be formed integrally with the track unit 4 or a separate member attached to the track unit 4 may be attached.

  Thus, the track unit 4 moves in the x-axis direction along the variable length passage portion 41 with the positioning pin 12 engaged with the positioning groove 42. The amount of movement is regulated by the length of the positioning groove 42 in the x-axis direction. Further, as shown in FIG. 9, the length of the positioning pin 12 in the y-axis direction is slightly shorter than the length of the positioning groove 42 in the y-axis direction. Therefore, the variable length passage portion 41 hardly moves in the y-axis direction. As described above, the positioning pin 12 can freely move in the positioning groove 42 within the predetermined range in the x-axis direction. As a result, the variable length passage portion 41 can move in the x-axis direction relative to the track unit 4. .

  The length of the track unit 4 and the variable length passage portion 41 in the x-axis direction is, for example, 100 cm, respectively. Further, the length of the positioning groove 42 in the x-axis direction is, for example, 30 cm. The length of the positioning pin 12 in the x-axis direction is 4 cm, for example. Here, since the displacement may occur in the direction in which the first and second factories 110 and 111 approach each other, or the displacement may occur in the direction away from each other, in the initial state, each positioning pin 12 is positioned in the positioning groove 42. It is desirable to be placed near the center in the x-axis direction. At this time, even when the distance between the transport units 100a is extended by 13 cm at maximum or contracted due to an earthquake or the like, the transport vehicle 7 can travel.

  Here, the left conveyance unit 100a and the displacement follower 101a in FIG. 5A are installed on the second factory 111 side (position m in FIG. 1) in the inter-building passage 112, and the right conveyance unit. It is assumed that 100a and the displacement follower 101a are installed closest to the intercompartment passage 112 in the second factory 111 (position n in FIG. 1). In this case, it is assumed that the second factory 111 is slightly displaced in the x-axis direction (that is, the traveling direction of the transport vehicle 7). 5 (b), FIG. 8 (b) and FIG. 9 (b) are diagrams showing a situation when the second factory 111 is displaced in a direction away from the inter-building passage 112, and FIG. c), FIG. 8C, and FIG. 9C are diagrams showing a state when displacement in the approaching direction occurs.

  Since the track unit 4 is fixed to the ceiling 61 via the ceiling-side suspension member 1, the suspension bolt 2 and the suspension support 3, the transport unit 100 a is displaced in the x-axis direction by the same distance as the ceiling 61. Accordingly, when the second factory 111 is displaced in the direction away from the inter-building passage 112 (FIG. 5B, etc.), the distance between the left and right track units 4 is increased, but the transport vehicle 7 has a variable length passage portion 41. Can travel between the right and left track units 4. In addition, the inter-building passage 112 can maintain the connection with the second factory 111 by extending the bellows-like building displacement absorbing portion provided at the connecting portion between the inter-building passage 112 and the second factory 111.

  On the other hand, when the second factory 111 is displaced in a direction approaching the inter-building passage 112 (FIG. 5C, etc.), the distance between the left and right track units 4 is reduced. However, since the positioning pins 12 included in the left and right track units 4 can move only within the formation range of the positioning groove 42 of the variable length passage portion 41, the transport units 100a are not pressed against each other with a strong force. Therefore, the transport unit 100 a is not damaged, and the transport vehicle 7 can travel between the left and right track units 4 via the variable length passage portion 41. In addition, the inter-building passage 112 can maintain the connection with the second factory 111 by contraction of the bellows-like building displacement absorbing portion provided at the connection portion between the inter-building passage 112 and the second factory 111.

  In this way, even if a displacement in the x-axis direction occurs between the first and second factories 110 and 111, the transport vehicle 7 is transported along the track unit 4 so that the variable length passage portion 41 cancels the displacement. Therefore, the transport vehicle 7 travels on the transport vehicle travel surface 5 in the track unit 4 and the transport vehicle travel surface 43 in the variable length passage portion 41, and between the first and second factories 110 and 111, the semiconductor wafer storage container. 8 can be conveyed.

  2 may be provided in at least one of the plurality of transport units 100a illustrated in FIG. 1, and the displacement follower 101a in FIG. 5 may be provided in at least one. Thereby, even when displacement in both the x-axis and y-axis directions occurs, the transport vehicle 7 can travel between the first and second factories 110 and 111. In this case, the displacement followers 101 and 101a of FIGS. 2 and 5 may be provided in the same transport unit 100, or may be provided in separate transport units 100. When providing in the same conveyance unit 100, the variable length channel | path part 41 should just be provided instead of the connection board 6 in the conveyance unit 100 shown in FIG.

  Thus, in the second embodiment, since the variable length passage portion 41 is provided in the transport unit 100a, even when the first and second factories 110 and 111 are relatively displaced in the traveling direction of the transport vehicle 7, The transport vehicle 7 can stably transport the semiconductor wafer storage container 8 between the first and second factories 110 and 111. Furthermore, by combining with the first embodiment, the semiconductor wafer storage container 8 can be transported even when displacement occurs in both the traveling direction of the transport vehicle 7 and the direction perpendicular thereto.

(Third embodiment)
In the third embodiment described below, it is assumed that even when the first and second factories 110 and 111 are displaced in both the x-axis and the y-axis, the single displacement follower 101b absorbs the displacement. is doing. In the following description, the same reference numerals are given to the components common to the first and second embodiments, and the following description will focus on differences from the first embodiment.

  FIG. 10 is a perspective view of the transport unit 100b and the displacement follower 101b according to the third embodiment of the present invention, and defines the x-axis, y-axis, and z-axis as in FIG. 10A is a diagram showing a state (initial state) in which the first and second factories 110 and 111 are not displaced, and FIG. 10B is a diagram showing at least one of the first and second factories 110 and 111. It is a figure of the state (displacement state) in which one was displaced in the x-axis and y-axis directions.

  As described above, in the present embodiment, even when the first and second factories 110 and 111 are relatively displaced in the x-axis and y-axis directions, the transport vehicle 7 is between the first and second factories 110 and 111. Keep in mind that you can drive.

  In the present embodiment, unlike FIG. 2, the connection plate 6 is not required, but the transport device includes a rotation mechanism 51 (rotation unit) in which two positioning holes 52 are formed as the displacement follower 101b.

  As shown in FIG. 10, the ceiling side suspension member 1, the suspension bolt 2, the suspension support 3, and the track unit 4 are fixed to the ceiling 61. Further, the rotating mechanism 51 connects adjacent track units 4 to each other. Here, a slight gap of, for example, several centimeters exists between the two adjacent track units 4 in a steady state. This gap is a distance that the traveling vehicle 7 can travel between the track units 4 without derailing.

  FIG. 11 is a top view of the rotation mechanism 51 and the track unit 4 of FIG. Two positioning holes 52 are formed in the rotation mechanism 51. A positioning pin 13 that is rotatably inserted into the positioning hole 52 is provided on the upper surface of the track unit 4. The positioning pin 13 may be formed integrally with the track unit 4 or may be a separate member attached to the track unit 4. By inserting the positioning pins 13 of the left and right track units 4 into the two positioning holes 52 of the rotation mechanism 51, the rotation mechanism 51 and the track unit 4 are rotatably connected with the positioning pins 13 as fulcrums.

  The size of the positioning hole 52 is slightly larger than the size of the positioning pin 13, and the positioning pin 13 can hardly move in the x-axis and y-axis directions in the positioning hole 52. However, the track unit 4 can arbitrarily rotate on the xy plane with the positioning pin 13 as a rotation fulcrum. The track units 4 can rotate until the track units 4 come into contact with each other by this rotation, and the maximum rotation angle is, for example, 2 degrees.

  Thus, the track unit 4 and the rotation mechanism 51 are not fixed by the positioning pin 13, and the rotation mechanism 51 is generated between the first and second factories 110 and 111 with the positioning pin 13 as a fulcrum. It can be rotated to offset relative displacement.

  Here, the left conveyance unit 100b and the displacement follower 101b in FIG. 10A are installed on the second factory 111 side (position m in FIG. 1) in the inter-building passage 112, and the right conveyance unit. Assume that 100b and the displacement follower 101b are installed closest to the intercompartment passage 112 in the second factory 111 (position n in FIG. 1). Further, it is assumed that the ceiling 61 of the second factory 111 is slightly displaced in the x-axis and y-axis directions. FIG. 10B and FIG. 11B are diagrams showing the situation in this case.

  As described above, the track unit 4 and the like are fixed to the ceiling 61. However, since there is a gap between the track units 4, the x-axis and the y-axis between the first and second factories 110 and 111. When a displacement occurs in the direction, the right startup unit in the second factory 111 rotates with the positioning pin 13 of the left track unit 4 located in the inter-building passage 112 as a fulcrum. Thereby, the transport vehicle 7 can travel on the transport vehicle travel surface 5 in the track unit 4 and transport the semiconductor wafer storage container 8 between the first and second factories 110 and 111.

  The maximum rotation angle in one rotation mechanism 51 is, for example, 2 degrees. However, by providing the rotation mechanisms 51 in the plurality of track units 4, the angle that can be rotated as a whole can be further increased.

  Further, at least one of the plurality of transport units 100b shown in FIG. 1 is provided with the displacement follower 101b shown in FIG. 10, and further, at least one of the displacement followers 101 and 101a shown in FIGS. Also good. Thereby, even if a larger displacement occurs in the first and second factories 110 and 111, the transport vehicle 7 can travel between the factories 110 and 111.

  Thus, in the third embodiment, since the rotation mechanism 51 is provided in the transport unit 100b, the first and second factories 110 and 111 are relatively displaced in the two-dimensional direction including the traveling direction of the transport vehicle 7. Even in this case, the transfer vehicle 7 can transfer the semiconductor wafer storage container 8 between the first and second factories 110 and 111.

  In addition, without providing a gap between the track units 4, a bellows-like rotation mechanism may be provided between the track units 4 so that the displacement of the first and second factories 110 and 111 can be offset. .

(Fourth embodiment)
The fourth embodiment described below relates to the control of the transport vehicle 7 when at least one of the first and second factories 110 and 111 is displaced.

  FIG. 12 is a diagram showing a schematic configuration of a transport system 201 according to the fourth embodiment of the present invention. In FIG. 12, the same components as those in FIG. 1 are denoted by the same reference numerals, and different points will be mainly described below.

  The transport system 201 in FIG. 12 further includes a movement amount acquisition unit 103 and a travel determination unit 104 in addition to the configuration in FIG.

  The movement amount acquisition unit 103 acquires at least one of the movement amounts of the transport unit 100. The movement amount acquisition unit 103 may be attached to each transport unit 100. For example, one movement amount acquisition unit 103 is provided in each of the first and second factories 110 and 111 and the inter-building passage 112 to acquire a plurality of movement amounts. May be. Further, instead of acquiring the movement amounts of all the conveyance units 100, only the movement amounts of the conveyance units 100 that are expected to be particularly large may be acquired.

  The displacement follower 101 is, for example, the displacement followers 101, 101a, 101b according to the first to third embodiments. When the displacement follower 101 is the displacement follower 101 according to the first embodiment, the distance in the y-axis direction in which the slide mechanism 31 has slid can be used as the movement amount. In the case of the displacement follower 101a according to the second embodiment, the distance in the x-axis direction in which the interval between the track units 4 is expanded and contracted can be used as the movement amount. In the case of the displacement follower 101b according to the third embodiment, the rotation angle of the rotation mechanism 51 can be set as the movement amount.

  The travel determination unit 104 determines whether or not the movement amount acquired by the movement amount acquisition unit 103 exceeds a predetermined threshold. This threshold value is set to a value at which the transport vehicle 7 can stably travel between the first and second factories 110 and 111 even if the transport unit 100 moves. The reason is that there is a possibility that the amount of movement unexpectedly increases when the stopper 32 is not provided in the displacement follower 101 according to the first embodiment. In this case, if the transport vehicle 7 continues to travel, the transport vehicle This is because 7 may be removed.

  The transport vehicle control unit 102 permits or prohibits the travel of the transport vehicle 7 according to the determination result of the travel determination unit 104. The traveling determination unit 104 and the transport vehicle control unit 102 are realized by software using, for example, one or a plurality of computers. Moreover, you may implement | achieve at least one part control of the traveling determination part 104 and the conveyance vehicle control part 102 with hardware.

  FIG. 13 is a flowchart illustrating an example of a processing operation of the transport system 201 in FIG. First, the movement amount acquisition unit 103 acquires the movement amount of the transport unit 100 of the displacement tracking unit 101 (step S1). When the movement amount acquisition unit 103 can acquire a plurality of movement amounts, all the movement amounts that can be acquired are acquired. Next, the movement amount acquisition unit 103 transmits the acquired movement amount to the travel determination unit 104 (step S2), and the travel determination unit 104 receives this (step S3). The traveling determination unit 104 determines whether or not the received movement amount exceeds a predetermined threshold (step S4). When the movement amount acquisition unit 103 acquires a plurality of movement amounts, the travel determination unit 104 determines whether each movement amount exceeds a threshold value.

  When it determines with not exceeding (No of step S4), the conveyance vehicle control part 102 permits driving | running | working of the conveyance vehicle 7 (step S5), and the conveyance vehicle 7 continues driving | running | working (step S6). On the other hand, when it is determined that the movement amount exceeds the threshold value (Yes in step S4), the transport vehicle control unit 102 prohibits the transport vehicle 7 from traveling to the transport unit exceeding the threshold value (step S6). Stops (step S7). In this case, the movement of all the conveyance vehicles 7 may be stopped, or the conveyance vehicles 7 may continue to move in a conveyance unit whose movement amount does not exceed the threshold value.

  As described above, in the fourth embodiment, the movement amount acquisition unit 103 is provided, and when the movement amount of the conveyance unit 100 is larger than the predetermined threshold, the conveyance vehicle 7 stops traveling. The wheel can be prevented from being removed from the traveling surface 5 of the transport vehicle, and accidents and failures such as breakage can be prevented. Moreover, since the movement amount acquisition unit 103 can easily acquire movement amount data from the displacement follower 101, the movement amount can be evaluated easily, accurately, and quickly.

  In each of the above-described embodiments, the example in which the transport unit 100 and the displacement follower 101 are provided on the ceiling 61 of the semiconductor device manufacturing factory has been shown, but these may be provided on the ceiling 61 of another building such as a warehouse. . Further, when the first and second semiconductor manufacturing factories 110 and 111 are close to each other, the inter-building passage 112 is not necessary.

  At least a part of the transport system described in the above-described embodiment may be configured by hardware or software. When configured by software, a program for realizing at least a part of the functions of the transport system may be stored in a recording medium such as a flexible disk or a CD-ROM, and read and executed by a computer. The recording medium is not limited to a removable medium such as a magnetic disk or an optical disk, but may be a fixed recording medium such as a hard disk device or a memory.

  Further, a program that realizes at least a part of the functions of the transport system may be distributed via a communication line (including wireless communication) such as the Internet. Further, the program may be distributed in a state where the program is encrypted, modulated or compressed, and stored in a recording medium via a wired line such as the Internet or a wireless line.

  Based on the above description, those skilled in the art may be able to conceive additional effects and various modifications of the present invention, but the aspects of the present invention are not limited to the individual embodiments described above. Absent. Various additions, modifications, and partial deletions can be made without departing from the concept and spirit of the present invention derived from the contents defined in the claims and equivalents thereof.

DESCRIPTION OF SYMBOLS 3 Suspension support 4 Track unit 6 Connection board 7 Car carrier 12, 13 Positioning pin 31 Slide mechanism 32 Stopper 41 Variable length passage part 42 Positioning groove 51 Rotating mechanism 52 Positioning hole 61 Ceiling 100-100b Transport unit 101-101b Displacement follower Transport vehicle control unit 103 Travel amount acquisition unit 104 Travel determination unit 110 First semiconductor device manufacturing factory 111 Second semiconductor device manufacturing factory 200, 201 Transport system

Claims (9)

A transport device that is provided on the ceiling of the first and second buildings and travels between the first and second buildings by a transport vehicle capable of transporting the semiconductor device storage container,
A plurality of transport units forming a transport path for running the transport vehicle;
Even if a relative displacement occurs between at least one of the plurality of transport units and the first and second buildings, the transport vehicle moves between the first and second buildings. A transport device comprising: a displacement follower that moves at least one of the plurality of transport units in a direction that cancels the relative displacement so that travel of the transport vehicle is not hindered. The displacement follower has a slide portion that is fixed to the ceiling of the first or second building and extends in a first direction,
The transport unit is
When a displacement in the first direction occurs between the first and second buildings, a movable support portion that moves in the first direction along the slide portion to offset the displacement;
A track portion fixed to the movable support portion and causing the transport vehicle to travel in a second direction different from the first direction;
The transport apparatus according to claim 1, further comprising: a connection unit that connects the transport units adjacent to each other along the track unit.   The transport apparatus according to claim 2, wherein the slide unit includes a movement limiting unit that limits a movement amount of the movable support unit in the first direction to a predetermined amount or less. Each of at least two adjacent transfer units among the plurality of transfer units is fixed to the ceiling of the first or second building and moves the transfer vehicle along the arrangement direction of the two adjacent transfer units. Has a movable track section
The displacement follower is a variable length passage that moves the transport vehicle along the movable track so that the displacement in the travel direction of the transport vehicle generated between the first and second buildings is offset. The conveying apparatus according to claim 1, wherein In the variable length passage portion, a positioning groove is formed along the moving direction of the transport vehicle,
The movable track portion includes a positioning pin that is engaged with the positioning groove and moves by a distance corresponding to a displacement in a traveling direction of the transport vehicle generated between the first and second buildings. The transport apparatus according to claim 4.   The conveying device according to claim 5, wherein the positioning pin is engaged with a substantially central portion in a longitudinal direction of the positioning groove in a state where the first and second buildings are not displaced.   The transport device according to any one of claims 4 to 6, wherein an end portion of the variable length passage portion is formed in a slope shape so as not to be loose when the transport vehicle passes. Each of at least two adjacent transfer units among the plurality of transfer units is fixed to the ceiling of the first or second building and moves the transfer vehicle along the arrangement direction of the two adjacent transfer units. Has a movable track section
The displacement follower has a rotating part that rotates so as to offset the displacement generated between the first and second buildings by rotatably connecting the two adjacent movable track parts. The transport apparatus according to claim 1. A transport system that is provided on the ceilings of the first and second buildings and travels between the first and second buildings by a transport vehicle capable of transporting a semiconductor device storage container.
A plurality of transport units having a transport path for running the transport vehicle;
Even if a relative displacement occurs between at least one of the plurality of transport units and the first and second buildings, the transport vehicle moves between the first and second buildings. A displacement follower that moves at least one of the plurality of transport units in a direction that cancels the relative displacement so that travel of the transport vehicle is not hindered;
A movement amount acquisition unit that acquires at least one movement amount of the plurality of transport units;
A travel determination unit that determines whether the acquired movement amount exceeds a predetermined threshold;
A transport vehicle control unit that prohibits movement of the transport vehicle to the transport unit in which the movement amount exceeds the predetermined threshold.

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