JP2011191077A - Device for measuring axial deflection - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device for measuring axial deflection which can easily and inexpensively measure the amount of axial deflection of a rotary shaft body in the axial and radial directions in a non-contact manner. <P>SOLUTION: The device for measuring axial deflection includes a parallel target body which has a width variation part and is disposed on the outer peripheral surface of the rotary shaft body being a measuring object or of a large-diameter cylindrical body concentric with the shaft body so that one direction thereof may be parallel with the shaft body in the axial direction and which rotates together with the rotary shaft body, a light-emitting part as a light radiation source which is directed to the width variation part, and a light-receiving and operation display part which receives reflected light from the width variation part in rotation or transmitted light through the part, detects a change in light-receiving time and measures the amount of the axial deflection of the rotary shaft body in the axial direction based on the result of detection. Moreover, the device can be equipped with an upright target body which has the width variation part and is erected outward from the outer peripheral surface of the rotary shaft body so that the radial direction thereof and the one direction may be parallel with each other. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an axial runout measuring apparatus that can optically measure the axial runout amount in the axial direction and the radial direction of a rotating shaft body to be measured.

  For example, in a power generation turbine plant that generates power by rotating a turbine using energy held by water or steam, high efficiency and high operability and safety are required. In particular, when deformation such as shaft torsion, shaft deflection, shaft runout, etc. occurs in a turbine that rotates at high speed, it may cause a very dangerous situation. It is important to grasp the shaft runout of the rotating shaft body quantitatively, and to take certain measures when abnormalities are recognized. Therefore, it is possible to measure these easily and with high accuracy. Devices and measuring methods are desired. Of these, many proposals have been made for the measurement technique of shaft runout.

  By the way, as a shaft run-out measuring technique of a rotating shaft body which is a measurement target, for example, Patent Document 1 proposes. This proposal has a rotating body that rotates about a rotation axis and an adjacent reflection surface that is folded at a right angle on the narrow angle side, and the rotation body is coaxially parallel to the rotation axis. A reflection mirror provided; a detection irradiator that irradiates the reflection mirror with a light beam from an arbitrary incident direction; and a detection element that detects a reflected light beam reflected from the reflection surface of the light beam. The present invention relates to a shaft runout measuring apparatus. If this measuring device is used, the light beam applied to the reflecting mirror by the detector irradiator and the reflected light beam from the reflecting mirror are always parallel regardless of the rotation angle of the rotating body. It is not necessary to make adjustments with the position detector placed in consideration of the incident angle of the light beam by the irradiator, and the positional relationship of each component is determined without depending on the incident angle of the light beam, making adjustment easy There are advantages.

  Also, a conventional technique for measuring deflection of a rotating shaft has been proposed in Patent Document 2, for example. The technique described in Patent Document 1 relates to a bending moment measuring device for a rotating shaft body. In order to obtain the bending moment of the rotating shaft body, the disk attached to the outer peripheral surface of the rotating shaft body and the end face thereof are opposed to each other. And a distance measuring device for measuring the distance to the disk, and the inclination angle of the disk from the change in the distance due to the occurrence of deformation during rotation of the rotating shaft body. (A deflection angle of the rotating shaft body) is obtained. In the present specification, the term “shaft runout” is used hereinafter to include “shaft deflection”.

JP-A-10-339620 JP 57-12337 A JP 2000-205977 A JP 2002-333376 A JP 2006-84462 A

  However, in the technique described in Patent Document 1, it is not only structurally difficult to measure the axial runout generated in the axial direction in the rotary shaft body, but also it is necessary to use a reflector of a certain size. There is a limit to the number of reflecting mirrors installed on the outer peripheral surface of the body, and as a result, it is difficult to measure the amount of axial deflection with high accuracy. Further, in the deflection measurement technique described in Patent Document 2, since the distance to the disk on the outer peripheral surface of the rotating shaft body is measured by a direct distance measuring device, the shaft runout occurs in a direction perpendicular to the axial direction of the rotating shaft body. It is difficult to detect the shaft runout. In addition, when the axial deflection angle of the rotating shaft body is small, a very small distance must be measured by a distance measuring device, and therefore, the measuring device needs to have high measurement accuracy. There is a problem that it becomes expensive.

  The torque measuring devices proposed in Patent Documents 3 to 5 are good methods for measuring the torque applied to the rotating shaft body. However, the amount of shaft runout of the rotating shaft body that occurs during the rotation is essentially the same. It is not assumed to be measured, and the amount of shaft runout cannot be measured.

  The present invention has been made to solve the above-mentioned problems, and is a shaft runout measuring apparatus that can measure the shaft runout amount in the axial direction of the rotating shaft body and / or the direction perpendicular to the direction in a non-contact manner easily and inexpensively. The purpose is to provide.

  In order to achieve the above object, an axial runout measurement apparatus according to the present invention has a width changing portion in which a width in a direction orthogonal to a length corresponding to a length in one direction changes at a constant rate, and A parallel target body which is arranged on the outer peripheral surface of the rotating shaft body or the concentric large-diameter cylindrical body so that the axial direction and the one direction are parallel to each other and rotates together with the rotating shaft body, A light emitting unit having a light source that irradiates a light beam toward the width changing unit, and a reflected light from the rotating width changing unit or a transmitted light that passes through the light receiving unit is detected to detect a change in the light receiving time. And a light reception / calculation display unit that measures an axial deflection amount in the axial direction of the rotating shaft based on a detection result.

  Further, the shaft runout measuring apparatus of the present invention further includes a width changing portion in which the width in a direction orthogonal to the length in one direction changes at a constant rate, and the outer peripheral surface of the rotating shaft body The upright target body erected outward on the outer peripheral surface so that the one direction coincides with the radial direction thereof, a light emitting unit as a light beam irradiation source toward the width changing unit, and the rotating unit It includes a light receiving / calculating display section that receives reflected light or transmitted light from the width changing section, detects a change in the light receiving time, and measures a shaft runout amount in the radial direction of the rotating shaft based on the detection result. be able to.

  The width changing portion in the parallel target body can be appropriately selected from a light reflector, a light transmissive body, an opaque body, and the like. Further, only one width changing portion may be provided on the outer peripheral surface of the rotating shaft body or the large-diameter cylindrical body, or two or more width changing portions may be regularly arranged in the circumferential direction, preferably the latter It is preferable to arrange a plurality of them regularly. In this case, the number of width changing portions can be determined as appropriate. Here, the term “regular” means not only the state in which the adjacent width change portions are arranged at equal intervals, but also the arrangement of a plurality of width change portions as a whole even when they are not arranged at equal intervals. Is used to include cases where there is some regularity (the same applies hereinafter).

  Also, only one width changing portion in the upright target body may be installed on the outer peripheral surface of the rotating shaft body, or two or more may be evenly arranged in the circumferential direction. The latter type of placement is good. In this case, the number of width changing portions can be determined as appropriate.

  Either or both of the light emitting unit and the light receiving / calculating display unit used for measuring the axial shake amount in the axial direction of the rotating shaft body are the light emitting unit and the light receiving unit for measuring the axial shake amount in the radial direction of the rotating shaft body. -Can also be used as a calculation display unit.

  The shaft run-out measuring device of the present invention is formed on a parallel target body provided on an outer peripheral surface of a rotating shaft body or on an outer peripheral surface of a cylindrical body provided so as to concentrically surround the rotating shaft body. The light beam from the light emitting unit scans on the width changing portion, and the reflected light from the width changing portion or the transmitted light that passes through the width changing portion is received. By utilizing the one-to-one correspondence relationship between changes in shaft runout, the axial runout in the axial direction of the rotating shaft body (or the component of the axial runout in that direction) is obtained. The amount of axial runout in the axial direction can be measured easily and inexpensively without contact.

  In addition, as described above, the shaft runout measuring apparatus of the present invention arranges the parallel target body having the width changing portion on the outer peripheral surface of the rotating shaft body or the large-diameter cylindrical body, and from the outer peripheral surface of the rotating shaft body. A bowl-like upright target body having a width change portion is arranged in a substantially vertical manner, and the width change portions of the two target bodies are respectively irradiated with light rays from the light emitting portion, and the width change portions of these target bodies By detecting the reflected light from the light or the transmitted light passing through the width changing portion and detecting the change in the light receiving time, the axial runout (or the axial runout amount of the axial runout of the rotating shaft body is detected in the same manner as described above. Component in both directions) can be obtained, and as a result, the amount of axial runout in both the axial direction and the radial direction of the rotating shaft can be measured easily and inexpensively without contact.

It is a figure which shows one Embodiment of the axial runout measuring apparatus of this invention. It is a side view which shows another embodiment of the axial run-out measuring apparatus of this invention. It is a figure which shows the measurement principle of the shaft runout in the shaft runout measuring apparatus shown in FIG. It is a figure which shows the shaft runout measurement principle in case the shaft runout measuring apparatus shown in FIG. 2 is provided with the upright target body. It is a figure which shows another embodiment of the axial run-out measuring apparatus of this invention. It is a figure which shows the measurement principle of the axial twist in embodiment shown in FIG. It is a figure which shows the waveform of the axial run-out amount in the axial direction and radial direction of a rotating shaft body.

Hereinafter, embodiments of the axial runout measurement apparatus of the present invention will be described in detail with reference to the accompanying drawings, but the present invention is not limited to the following embodiments. In the following drawings, the same or common parts are denoted by the same reference numerals, and redundant description will be omitted below.
[Embodiment 1]
FIG. 1 is a diagram illustrating an example of an embodiment of an axial runout measurement apparatus according to the present invention. The shaft runout measuring apparatus 1 according to the embodiment shown in the figure includes a parallel target body 20 provided in parallel to the axial direction on the outer peripheral surface of a rotating shaft body 10 as a measurement object, and a side of the rotating shaft body 10. The light emitting unit 3 that is disposed and irradiates the parallel target body 20 with the light beam L1 from the side, and the light receiving / calculation display that is disposed on the side of the rotating shaft body 10 and receives the reflected light from the parallel target body 20. Part 4. The rotating shaft body 10 is rotatable in the arrow direction R in the figure by a rotational driving action from a rotating shaft body drive source (not shown).

  The parallel target body 20 attached to the outer peripheral surface of the rotating shaft body 10 has a non-reflective width changing portion 21 having a planar shape of a substantially right triangle composed of a long side, a short side perpendicular to the long side, and a hypotenuse. A pair of reflective width changing portions 22 arranged so as to face each other with their hypotenuses in contact with each other is defined as one unit, and a plurality of such units are arranged so that their long sides are in contact with each other to form a band shape. It has been done. The parallel target body 20 is wound around the entire circumference of the rotary shaft body 10 by the band, so that the long side of each unit is parallel to the axial direction of the rotary shaft body 10 and the short side is parallel to the circumferential direction. Provided. Here, examples of the reflective width changing portion 21 include a flexible reflective sheet in addition to a normal mirror, and examples of the non-reflective width changing portion 22 include a sheet made of a material that does not reflect light. Can be used. This non-reflective width changing portion 22 may or may not have flexibility. Note that the reflective and non-reflective width changing portions are not limited to those formed to change linearly, such as the substantially right triangle, and are formed to change quadratic or exponentially. It may be the one that was made. Moreover, when the outer peripheral surface of the rotating shaft body 10 is made of a material that does not reflect light, the parallel target body 20 does not need to use a pair of the reflective width changing portion 21 and the non-reflective width changing portion 22. The reflective width changing portions 21, 21,... May be simply arranged in the circumferential direction as described above.

  As the light emission part 3, what has a light source which can light-emit continuously is used. As this light source, in addition to various lasers, light emitting diodes or lamps, a combination of one of these and a lens, a slit, a pinhole, or the like can be used. Of these, a directional light beam is emitted. It is preferable to use various possible lasers.

  In FIG. 1, the light reception / calculation display unit 4 includes a light reception unit 5, a calculation display unit 6, and a signal line 7 that electrically connects them. As shown in FIG. 1, the light receiving unit 5 and the calculation display unit 6 may be configured separately from each other and electrically connected by a signal line 7, or may be configured integrally.

  As the light receiving unit 5, a light receiving element that can receive the reflected light L <b> 2 from the parallel target body 20 and can output an electric signal of a predetermined magnitude by receiving light, or a light receiving device including these can be used suitably. Here, examples of the light receiving element include a photodiode, a phototransistor, and a photomultimeter. An imaging device such as a CCD camera can also be used as the light receiving device. As shown in FIG. 1, the light receiving unit 5 may be configured to receive only one light beam, or may be configured to receive a plurality of light beams if necessary. .

  The calculation display unit 6 continuously receives one or more electric signals output from the light receiving unit 5 based on a setting program stored in advance therein, and is generated in the rotary shaft body 10. An axial runout amount in the axial direction is calculated and displayed. Furthermore, other information such as the rotation speed (cycle) may be calculated and displayed. Examples of such a configuration (structure) include known ones including a CPU and a storage device. Moreover, there is no restriction | limiting about the external shape of the calculation display part 6, It can select suitably from well-known external shapes.

  The light beam L1 emitted continuously from the light emitting unit 3 is a row of the reflective width changing unit 21 and the non-reflective width changing unit 22 provided on the irradiated surface of the parallel target body 20 that rotates with the rotary shaft 10. Is irradiated at a predetermined position (usually a position substantially in the axial direction of the rotary shaft 10). The incident angle of the light beam with respect to the parallel target body 20 is not particularly limited, but is preferably set to about 0 ° (substantially perpendicular incidence), and more preferably to 0 ° (incident perpendicularly). Thereby, the irradiated surface of the parallel target body 20 can be irradiated with the light beam L1 on the pin spot, so that the light beam diameter of the reflected light L2 incident on the light receiving unit 5 described later can be reduced, and as a result, there is an advantage that an error hardly occurs. . If the incident angle of the light beam is not set to about 0 ° but is set to an arbitrary angle that is an acute angle, it is necessary to change the installation position of the light receiving / calculating display unit 4 according to the magnitude of the angle. As a result, a combined value of the axial runout amount in both the axial direction and the radial direction of the rotary shaft body 10 is obtained, so that it is necessary to obtain the axial runout amount in each direction from the composite value.

  During the rotation of the rotating shaft 10, the reflective width changing portion 21 and the non-reflective width changing portion 22 appear alternately on the scanning line of the light beam L1. When L1 is irradiated on the reflective width changing portion 21, the reflected light L2 is reflected in a predetermined direction according to the incident angle, and when the non-reflective width changing portion 22 is irradiated, the light beam L1 is Does not reflect. Therefore, the light receiving unit 5 generates and outputs an electric pulse signal corresponding to the reception and non-light reception of the reflected light L2, and the calculation display unit 6 continuously receives the input of the electric pulse signal. Obtain the change in light reception time. In addition, the calculation display unit 6 further receives an input of the rotational speed signal of the rotary shaft body 10, and whether or not the rotational speed of the rotary shaft body 10 is constant (within a predetermined rotational speed range) due to the variation. It may be determined whether or not there is. In the present specification, hereinafter, “rotation” of the rotating shaft body refers to rotation at a constant speed within a range of a predetermined rotation speed.

  FIG. 2 is a partial cross-sectional side view showing another embodiment of the axial runout measurement apparatus of the present invention. In the embodiment shown in this figure, the annular flange 11a and its outermost circumferential edge extend at right angles to the annular body 11a in one direction, and its axis is common to that of the rotary shaft 10. A bowl-shaped body 11 having a substantially L-shaped cross section having a cylindrical portion 11 b arranged concentrically is provided in the middle of the rotating shaft body 10. The parallel target body 20 is provided in the cylindrical part 11b along the circumferential direction. The parallel target body 20 has a translucent width changing portion (opening which may be a substantially right triangle) in which a long side and a short side perpendicular to the long side coincide with the axial direction and the circumferential direction of the rotary shaft body 10. ) 21 and a pair of light-opaque width changing portions 22 that are arranged opposite to each other with a common hypotenuse are arranged continuously in the circumferential direction of the cylindrical portion 11b.

  In the present embodiment, by using the optical transmission means 13 and 14 such as an optical fiber cable, the light emitting unit 3 and the light receiving / calculating display unit 4 (combination of the light receiving unit 5 and the calculating display unit 6) are arranged around the rotary shaft body 10. It can be arranged at an appropriate position. This is because the light transmission means 13 and 14 are installed from the light emitting part 3 and the light receiving part 5, respectively, and the light emission port of the light transmission means 13 is opposed to the inside of the bowl-like body 11 and the parallel target body 20 is sandwiched therebetween. This is because the light receiving port of the light transmission means 14 is arranged so that the light beam L13 can be irradiated to a predetermined position on the irradiated surface of the parallel target body 20 at the incident angle.

  FIG. 3 shows the measurement principle of the axial runout measurement apparatus of the embodiment shown in FIG. 2 as an example. In this figure, (a) shows the scanning condition of the light beam on the parallel target body, (b) shows the relationship between the width changing part and the scanning position of the light beam, and (c) to (e) are from the light receiving part. The waveform of the electric pulse signal sent out is shown. Further, in this drawing, although the light emitting unit 3 and the light receiving / calculating display unit 4 are not shown, the light beam L3 is emitted from the back side toward the front side toward the drawing of the parallel target body 20, and the parallel target body 20 is shown. Only the light beam L3 that passes through the translucent width changing portion 21 and travels forward is received. In order to facilitate understanding, the light ray L3 is indicated by a dotted line in the portion of the optical path that is shielded by the light-opaque width changing portion 22, and a portion indicated by a one-dot chain line outside the parallel target body 20. Yes.

  For example, when the rotating shaft 10 is rotated at a low speed, the light beam L3 is apparently irradiated by irradiating the light beam L3 to a predetermined position (substantially intermediate in the width direction of the cylindrical portion) of the parallel target body 20 that rotates. Scans on the circumference passing through that position (see scan line 28 in the figure). The scanning line 28 is used as a reference. On the scanning line 28, the light beam L <b> 3 is alternately applied to the translucent width changing portion 21 and the impermeable width changing portion 22.

The axial runout that occurs in the axial direction of the rotating shaft 10 changes the relative position of the rotating shaft 10 in the same direction with respect to the irradiation position of the light beam L3, and as shown in FIG. The position of the light beam L3 that scans the width changing portion of the lens is shifted from the reference line 28 in any axial direction. Along with this, the transmissivity width (represented as “axial runout” in the figure) of the reflective width changing portion 21 that is successively irradiated with the light beam L3 changes, and as a result, the respective transmissivity in the light receiving portion 5 changes. The light reception time changes. For example, when an axial runout occurs in the lower left direction of FIG. 3A on the rotating shaft 10 that is rotating, the scanning line position of the light beam on the parallel target body 20 is x ₀ as shown in FIG. 3B. To x ₁ (this position may be defined by the distance along the long side from the short side of the width changing portion 21 or may be specified by the distance from the tip of the width changing portion 21, but FIG. ) Is defined by the former distance.) If it is changed to (), the light reception time is shortened from T ₀ to T ₁ (see FIG. 3D). The shaft runout occurs in the upper right direction in FIG. 3 to the rotary shaft 10 in rotation (a), when the scanning position of the light beam L3 is changed from x ₀ to x _2, T photodetection time from T ₀ with it ₂ (see FIG. 3E). Thus to set the position x ₀ of the reference scan line 28 on the parallel target member 20, by detecting a change in light reception time, or the axial direction of the rotary shaft body 10 by the following equation (Formula 1 or Formula 2) The amount of shaft runout in the direction can be obtained. In addition, you may obtain | require the axial run-out amount of the rotating shaft body 10 with an absolute value as needed.

  FIG. 4 shows the parallel target body 20 shown in FIG. 2 having light-transmitting width changing portions 26, 26,... And light-opaque width changing portions 27, 27,. The other example of embodiment of the shaft touch measuring apparatus of this invention which combined the arranged upright target body 25 is shown. The parallel target body 20 and the upright target body 25 are in contact with each other with the short sides of the respective light-opaque width changing portions 22, 22, 22,..., 27, 27, 27,. The angle formed by both the target bodies 20 and 25 is substantially a right angle, preferably a right angle. In this figure, the irradiated surface of the parallel target body 20 is irradiated with the light beam L3 at a predetermined incident angle and transmitted through the light-transmitting width changing portion 21, so that the axis of the rotary shaft body 10 as shown in FIG. The amount of shaft runout in the direction can be obtained. In addition, this incident angle can be set similarly to the incident angle to the parallel target body in FIG.

  Further, while the rotating shaft 10 is rotating, a light beam L4 from a light emitting unit (not shown) is irradiated to a predetermined position on the irradiated surface of the upright target body 27 substantially in parallel with the axial direction, and the upright target body 25 is irradiated. A light beam L4 is scanned on the top. The light beam L4 may be emitted from the same light source (light emitting unit) as the light beam L3, or may be emitted from a different light source. In the former case, a known device for branching and guiding the light beam can be used alone or in appropriate combination.

  Similar to the description with reference to FIG. 3, when an axial runout occurs in the radial direction of the rotating rotating shaft 10 on the basis of the scanning line 29, the upright target body 25 is installed at the installation position of the upright target body 25. 25 appears as a slight movement in the radial direction, and the scanning line of the light beam L4 deviates from the reference scanning line 29 in the movement direction. As a result, the light transmission width in the rotation direction of each of the porous width changing portions 26 that are successively irradiated with the light beam L4 (indicated as “axial runout” in the figure) changes, and the respective light transmission in the light receiving portion 5 changes. The light reception time changes. From the change in the light reception time and the set position of the reference scanning line 29, the axial runout amount in the radial direction of the rotary shaft body 10 can be obtained by the same method as the calculation method in the case of the parallel target body described above. The light receiving / calculating display unit for calculating the axial runout amount in the radial direction of the rotating shaft body may be the same as the light receiving / calculating display unit for calculating the shaft runout amount in the axial direction of the rotating shaft body. It may be a body.

  FIG. 5 shows still another embodiment of the shaft runout measuring apparatus of the present invention. The embodiment shown in this figure is electrically connected to the rotary shaft 10, the light emitting unit 3, the light receiving units 5, 5, 5, and the light receiving units 5, 5, 5 and the signal lines 7, 7, 7. And an optical transmission system for guiding and branching light rays between the light emitting unit 3 and the light receiving units 5, 5, and 5. The rotary shaft body 10 is provided with a parallel target body 20 on the outer peripheral surface at an arbitrary position in the middle in the length direction, and a bowl-like upright target at a position near the position and a position away from the position by a predetermined distance. The bodies 31 and 33 are provided. Note that the parallel target body 20, the light emitting unit 3, the light receiving unit 5, the calculation display unit 6, and the signal line 7 are essentially the same as those shown in the embodiment shown in FIG. Description is omitted.

  A plurality of light-reflective width changing portions 32, 32, 32,..., 34, 34, 34,... Are provided on the mutually opposing surfaces (irradiated surfaces) of the bowl-shaped upright target bodies 31, 33, respectively. Is arranged. Each of the light-reflecting width changing portions 32 and 34 (in FIG. 5, the shape of the width changing portion 32 is not shown, but a width changing portion having the same shape and the same size as that of the upright target body 34 is provided. ) Has a planar shape of a substantially right triangle surrounded by a short side, a long side orthogonal to the short side, and a hypotenuse (see FIG. 4). These short sides are arranged on concentric circles having a diameter larger than that of the rotary shaft 10 on the opposed irradiated surfaces of the rod-shaped bodies 31 and 33, and the long sides thereof coincide with the radial direction of the rotary shaft 10. The reflective width changing portions 21, 21,... Are regularly arranged in a saw blade shape.

  The light transmission system transmits light rays to the light transmission means 35 that transmits the light beam L5 from the light emitting unit 3, the lens 36 that uses the light beam L5 as parallel light, the parallel target body 20, and the bowl-like upright target bodies 31 and 33. A device for guiding and a device for guiding the reflected light from these target bodies 20, 31 and 33 to the light receiving units 5, 5 and 5, respectively. A half mirror 37, a reflection mirror 38, and a condensing lens 39 are used as devices that guide the light beam to the parallel target body 20, and light branching means 41 is used as a device that guides the light beam to the upright target bodies 31 and 33. Condensing lenses 43 and 45 are used. In addition, half mirrors 40, 42, and 44 are used as devices that guide the reflected lights L9, L10, and L11 from the parallel target body 20 and the upright target bodies 31 and 33 to the light receiving unit 5, respectively.

  The light beam L5 emitted from the light emitting unit 3 is transmitted by the optical transmission means 35 such as an optical fiber cable, and is converted into parallel light by the lens 36, and then partially reflected as a light beam L6 perpendicular to the optical path by the half mirror 37. The rest enters the optical path branching means 41. The optical path branching means 41 is composed of a half mirror 41a and a reflective mirror 41b arranged in a square shape with an inclination of 45 degrees and 135 degrees with respect to the optical path, respectively, and the light beam L5 incident on the half mirror 41a. A part of the light is reflected at right angles to the optical path, branched in one direction along the axis of the rotating shaft 10 (light ray L7), and the remaining part is transmitted through the reflection mirror 41b in the direction opposite to the light ray L7. The light is reflected and branched (light ray L8).

  The light beam L6 is reflected by the reflecting mirror 38 toward the rotary shaft 10 at a substantially right angle with respect to the optical path, further passes through the half mirror 40 on the optical path, and the diameter of the light beam is narrowed down by the condenser lens 39. Thus, the light is irradiated to a predetermined position of the light reflectivity width changing portion 21 in the parallel target body 20 (usually a position substantially in the axial direction of the rotating shaft body 10). At the irradiation position of the light beam L6, the plurality of light-reflective width changing portions 21 pass at a constant period as the rotating shaft 10 rotates. As a result, the light beam L6 apparently scans the parallel target body 20 in the rotation direction at the irradiation position.

  The light beam L7 is transmitted through the half mirror 42 provided on the optical path, and then the diameter of the light beam is narrowed down by the condenser lens 41, and the reflected width changing portion 32 on the irradiated surface of the upright target body 32 is irradiated. . Similarly, the light beam L8 passes through the half mirror 44 provided on the optical path, and is narrowed down by the condenser lens 45 to reflect the width change portions 34, 34,... On the irradiated surface of the upright target body 34.・ Is irradiated.

  On the other hand, the light beams L6 to L8 irradiated to the irradiated surfaces of the parallel target body 20 and the upright target bodies 31 and 33 are respectively in the direction opposite to the incident direction of the target bodies 20, 31 and 33 on their optical paths. Reflected (reflected light L9, L10, L11). These reflected lights L9, L10, and L11 that travel back through the optical paths of the light beams L6 to L8 are on the opposite side of the incident surfaces of the light beams L6 to L8 of the half mirrors 40, 42, and 44 respectively installed in these optical paths. It is separated from the light beams L6 to L8 by being incident from the surface and being reflected at substantially right angles from the respective optical paths. The separated reflected lights L9, L10, and L11 are received by the light receiving units 5, 5, and 5, respectively. The reflected light incident on each of the light receiving portions 5, 5 and 5 corresponds to reception and non-light reception of the reflected light, and is converted into an electric pulse signal having a predetermined magnitude corresponding to each intensity, Input to the calculation display unit 6 via lines 7, 7, and 7, respectively.

  When an axial runout occurs in the rotating shaft 10, the apparent scanning position of the light beam L6 on the parallel target body 20 changes, and accordingly, the reflection from the individual reflective width changing portions 21, 21,. The light reception time changes. As a result, the waveform of the electric pulse signal continuously input to the calculation display unit 6 changes. The calculation display unit 6 obtains the shaft runout amount of the rotating shaft body 10 from the change in the light receiving time by the above method. The calculation result can be displayed on a part of the calculation display unit 6 or can be output to another device by wire or wirelessly.

  Further, when radial shaft runout occurs in the rotating shaft 10, the scanning height positions of the light beam L7 on the width changing portions 32, 34 of the upright target bodies 31, 33 are respectively inward and outward in the radial direction of the rotating shaft 10. To change. As a result, the light reception time at the light receiving portions 5 and 5 of the reflected light from the width changing portions 32 and 34 changes (see FIG. 6). The light receiving units 5 and 5 continuously output electric pulse signals corresponding to the light reception and non-light reception to the calculation display unit 6, and the calculation display unit 6 rotates based on the input signal by the same method as described above. A shaft runout amount in the radial direction of the shaft body 10 is obtained. Further, the axial contact amount in the radial direction of the rotary shaft body 10 at the installation position of the other upright target body 33 (or 31) may be obtained on the basis of the installation position of one upright target body 31 (or 33). Good. Furthermore, the rotational speed (cycle) of the rotating shaft body 10 can be obtained from the input signal. These calculation results can be displayed on a part of the calculation display unit 6 or output to other devices by wire or wirelessly.

  Moreover, in the axial run-out measuring apparatus of this embodiment, the axial contact amount in the axial direction and the radial direction at the respective installation positions of the parallel target body and the upright target body can be obtained continuously. In such a shaft touch measurement device, light is irradiated onto each of the parallel target body and the upright target body on the same scanning line from directions along two orthogonal coordinates (x direction and y direction) passing through the axis of the rotary shaft body 10. You may arrange so that. With such an arrangement, as shown in FIG. 7, the amount of axial touch or the amount of axial contact of the rotating shaft in the x direction and the y direction is continuously obtained, and the vector sum thereof is obtained. It is possible to monitor the dynamic change of the axial touch in the axial direction or the radial direction. At this time, the change can be monitored with very high accuracy by increasing the number of width changing portions in the parallel target body and the upright target body.

  Moreover, in this embodiment, the axial twist produced in the rotating shaft body 10 can be measured from the change in the positional relationship in the rotational direction of the reflective width changing portions 32 and 34 in the upright target bodies 31 and 33 in advance. That is, as shown in FIG. 6, the position of the width changing portion 32 in the upright target body 31 is used as a reference, and the positional relationship in the rotation direction of the width changing portion 34 in the upright target body 33 in the calculation display portion 6 (“axis” in FIG. It is also possible to detect a change in the portion indicated as “twist” by an electric pulse signal from the light receiving unit 5 and detect the amount of shaft twist of the rotating shaft body 10 from the detection result.

  The shaft runout amount measuring device of the present invention includes a shaft runout amount in the axial direction of a wide range of rotating shaft bodies ranging from a rotating shaft body provided in a rotating machine such as an electric motor to a turbine shaft in a power generation plant, and the direction and diameter. It can be effectively used to measure the amount of axial deflection in the three-dimensional direction.

DESCRIPTION OF SYMBOLS 1 Axis shake measuring device 3 Light emission part 4 Light reception / calculation display part 5 Light reception part 6 Calculation display part 7 Signal line 10 Rotating shaft body 20 Parallel target body 21 Reflective width change part 22 Nonreflective width change part
26 Translucent Width Changer 27 Light Impermeable Width Changer 28, 29 Apparent Scanning Lines 31, 33 Upright Target Body 32, 34 Width Changer (Reflective Width Changer)
35 Light transmission means 36 Lens 38 Reflection mirrors 37, 39, 42, 44 Half mirror 41 Light branching means 41a Half mirror 41b Reflection mirrors 40, 43, 45, 47, 48 Condensing lenses L5 to L13 Light rays

Claims (5)

  Corresponding to the length in one direction, it has a width changing part where the width in the direction perpendicular to this changes at a constant rate, and the rotating shaft body to be measured or the large diameter cylindrical body concentric with this A parallel target body that is arranged on the outer peripheral surface so that its axial direction and the one direction are parallel to each other and rotates together with the rotary shaft body, a light emitting section as a light source for the width changing section, and a rotation A light receiving device that receives a reflected light from the width changing portion in the inside or a transmitted light passing therethrough to detect a change in light receiving time, and measures an axial runout amount in the axial direction of the rotating shaft based on the detection result. A shaft runout measuring device including an operation display unit.   Furthermore, it has a width changing portion in which the width in the direction orthogonal to the length in one direction changes at a constant rate, and the one direction coincides with the radial direction from the outer peripheral surface of the rotating shaft body. As described above, the upright target body erected on the outer peripheral surface, the light emitting unit as a light irradiation source toward the width changing unit, and the reflected or transmitted light from the rotating width changing unit is received and received. The shaft shake measuring device according to claim 1, further comprising a light receiving / calculating display unit that detects a change in time and measures a shaft shake amount in a radial direction of the rotary shaft body based on the detection result.   The axial runout measurement according to claim 1 or 2, wherein a plurality of width changing portions in the parallel target body are regularly arranged on the outer peripheral surface of the rotating shaft body or the large-diameter cylindrical body in a circumferential direction thereof. apparatus. The shaft runout measuring apparatus according to claim 2 or 3, wherein a plurality of width changing portions in the upright target body are regularly arranged in a circumferential direction.   One or both of the light emitting unit and the light receiving / calculating display unit used for measuring the axial shake amount in the axial direction of the rotating shaft body are the light emitting unit and the light receiving unit for measuring the axial shake amount in the radial direction of the rotating shaft body. The shaft runout measuring apparatus according to any one of claims 1 to 4, which is also used as a calculation display unit.

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