JP2011177731A - Machining apparatus and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To suppress deterioration in machining accuracy caused by high acceleration and deceleration of a machining head. <P>SOLUTION: An auxiliary frame 17 is provided which supports a Y axis frame 3 having a laser machining head 7 movably along a pair of X axis frames 1 and which moves along the X axis frames 1 in parallel with and synchronously with the Y axis frame 3. In a mounting bracket 19 provided in the auxiliary frame 17 movably in the Y axis direction, there is provided a driving part 15 which corrects a head position and moves the laser machining head 7 in the X axis direction. When the Y axis frame 3 bends in the X axis direction in moving in the X axis direction, a sensor head 29 provided in a support arm 21 on the laser machining head 7 side measures a linear scale 25 provided in the mounting bracket 19, and detects displacement of the laser machining head 7 caused by the bending of the Y axis frame 3. In this instance, the driving part 15 for correcting head position is driven in a manner offsetting the bending of the Y axis frame 3 to correct the displacement of the laser machining head 7. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  In the present invention, the machining head moves along the first support member, and the first support member carries out machining on the workpiece while moving along the second support member that supports both ends thereof. The present invention relates to a processing apparatus and a processing method.

  As a conventional machining apparatus, for example, a laser machining apparatus described in Patent Document 1 below has a long first axis carriage that moves along a first axis guide rail and a second axis that includes a laser machining head. A carriage moves along a second axis guide rail orthogonal to the first axis guide rail. As a result, the laser processing head is moved and positioned on the two-dimensional plane of the plate-like workpiece to perform laser processing.

  Here, when the first-axis carriage moves along the first-axis guide rail, the second-axis carriage provided with the laser processing head is supported as a heavy object, so that the deflection is generated. Since this changes depending on the position of the second-axis carriage, the machining accuracy is lowered.

JP-A-8-52585

  By the way, in such a laser processing apparatus, conventionally, the processing time is shortened by high acceleration / deceleration when the laser processing head is moved, and the processing accuracy is improved because it is less backlashed than the gear drive. Since it can be realized, a linear motor is adopted as a drive source.

  However, when the laser processing head is moved at high acceleration / deceleration, the deflection of the head support member that supports the laser processing head becomes larger, and the reduction in processing accuracy becomes more remarkable. For this reason, in order to maintain the machining accuracy, it is necessary to provide a certain limit to the acceleration / deceleration even if the linear motor drive is adopted, and there is a limit to shortening the machining time.

  Therefore, an object of the present invention is to suppress a decrease in machining accuracy due to high acceleration / deceleration of the machining head.

  The present invention provides a first head support member that extends in the first direction by supporting a processing head movably in a first direction, and both ends of the first head support member in the extending direction. And a second head support member that supports the first head support member so as to be movable in a second direction orthogonal to the first direction. When the head moves in the second direction along the second head support member together with the first head support member, the first head support member bends, and the displacement of the processing head due to the deflection is caused. A position deviation detecting means to detect, and a position to move the machining head in a direction opposite to the deflection direction of the first head support member so as to correct the position deviation of the machining head detected by the position deviation detecting means. Offset And having a means.

  According to the present invention, since the machining head is moved in the direction opposite to the deflection direction of the first head support member, the positional deviation of the machining head due to the deflection of the first head support member can be corrected. And the fall of the processing precision by high acceleration / deceleration of a processing head can be suppressed.

It is a top view of the laser processing apparatus concerning the 1st Embodiment of this invention. It is a front view of the laser processing apparatus of FIG. It is explanatory drawing for calculating | requiring the deflection amount of the Y-axis frame supported by the X-axis frame of the laser processing apparatus of FIG. It is a graph which shows the case where acceleration is low as (a), and the case where acceleration is high as (b), respectively, about the measurement result which shows the deflection state of the Y-axis frame immediately after the stop of a laser processing head. It is explanatory drawing which shows the specific example at the time of implementing the measurement of FIG. It is a correlation diagram of the acceleration of a laser processing head, and the roundness of a processing circle. It is a top view corresponding to Drawing 1 of a 2nd embodiment. It is a top view corresponding to Drawing 1 of a 3rd embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
As shown in FIGS. 1 and 2, the laser processing apparatus as the processing apparatus according to the first embodiment of the present invention has a pair of left and right X-axis frames 1 arranged in the Y-axis direction (left and right in FIGS. 1 and 2). The X-axis direction (the vertical direction in FIG. 1 and the direction orthogonal to the paper surface in FIG. 2) is extended and arranged with a predetermined interval in the direction. On the pair of X-axis frames 1, both ends of a Y-axis frame 3 extending in the Y-axis direction are supported so as to be movable in the X-axis direction. The Y-axis direction corresponds to the first direction, the X-axis direction corresponds to the second direction, the Y-axis frame 3 corresponds to the first head support member, and the pair of X-axis frames 1 corresponds to the second direction. Each corresponds to a head support member.

  The Y-axis frame 3 includes an upper frame 3a extending between the pair of X-axis frames 1, and left and right sides that are bent downward from both longitudinal ends of the upper frame 3a and supported by the X-axis frame 1. A pair of side frames 3b and 3c are provided, and the gate shape is exhibited as a whole.

  The lower ends of the side frames 3b and 3c are movable in the X-axis direction along the guide rails 5 provided on the X-axis frame 1. In the upper frame 3a of the Y-axis frame 3, a Y-axis carriage 9 provided with a laser processing head 7 as a lower part as a processing head is provided so as to be movable in the Y-axis direction. The Y-axis carriage 9 conveys and moves the laser machining head 7 in the Y-axis direction, while the Y-axis frame 3 conveys and moves the laser machining head 7 in the X-axis direction. X-axis carriage.

  Accordingly, the Y-axis frame (X-axis carriage) 3 is moved along the X-axis frame 1 in the second direction corresponding to the vertical direction in FIG. 1, and the Y-axis carriage 9 is illustrated along the Y-axis frame 3. 1, the laser processing head 7 is moved and positioned with respect to the workpiece W set on the processing table 13.

  The drive source used for the movement of the Y-axis frame 3 in the X-axis direction and the movement of the Y-axis carriage 9 (laser machining head 7) in the Y-axis direction here uses a linear motor. In this way, high acceleration / deceleration can be realized when the laser processing head 7 is moved.

  As described above, when the laser machining head 7 is accelerated / decelerated particularly using a linear motor as a drive source, the Y-axis frame 3 supporting the laser machining head 7 moves or stops in the X-axis direction. Sometimes, a long Y-axis frame 3 having a heavy laser processing head 7 is affected by the acceleration (deceleration) speed, and as shown by a two-dot chain line in FIG. It will bend in the X-axis direction with the laser processing head 7) as the center.

  For this reason, in this embodiment, a mechanism is provided for correcting the positional deviation of the laser processing head 7 due to the deflection of the Y-axis frame 3. FIG. 1 shows a case where the laser processing head 7 is positioned at the center in the longitudinal direction of the Y-axis frame 3 in order to simplify the description. Therefore, at this time, the deflection of the Y-axis frame 3 is substantially symmetrical with respect to the laser processing head 7 in FIG.

  Here, in this embodiment, as shown in FIG. 1, in addition to the above-described configuration in which the Y-axis carriage 9 including the laser processing head 7 is moved along the Y-axis frame 3 by the linear motor, the laser processing head 7 is provided. A head position correcting drive unit 15 is provided as a positional deviation correcting means for moving the Y-axis carriage 9 in the X-axis direction. The head position correcting drive unit 15 also employs a linear motor.

  In addition, an auxiliary frame 17 as an auxiliary member is provided in parallel with the Y-axis frame 3. The auxiliary frame 17 is arranged at a constant interval along the X-axis direction with respect to the Y-axis frame 3, and both longitudinal ends thereof extend upward in FIG. 1 of the side frames 3 b and 3 c of the Y-axis frame 3. It is connected and fixed near the end of the part. Therefore, the auxiliary frame 17 moves in the X-axis direction in synchronization with the Y-axis frame 3.

  The auxiliary frame 17 is provided with a mounting bracket 19 projecting toward the Y-axis frame 3, and the head position correcting drive unit 15 described above is provided on the side surface of the mounting bracket 19 in the Y-axis direction. Yes. The head position correcting drive section 15 moves the guide section 23 at the tip of the support arm 21 protruding from the Y-axis carriage 9 toward the auxiliary frame 17 in the X-axis direction. The guide portion 23 and the head position correcting drive portion 15 are omitted in FIG.

  Further, a linear scale 25 as a movable sensor portion is extended in the X-axis direction via a linear scale bracket 27 at a position facing the support arm 21 on the Y-axis frame 3 side of the mounting bracket 19. Yes. A sensor head 29 as a head sensor unit for detecting the linear scale 25 is provided close to the support arm 21 at a position facing the linear scale 25 in the Y-axis direction.

  Note that a non-contact displacement sensor such as a photoelectric type or an electromagnetic induction type can be used as the positional deviation detection means including the linear scale 25 and the sensor head 29.

  In the laser processing apparatus having such a configuration, when the Y-axis frame 3 is accelerated and moved along the X-axis frame 1 by linear motor driving in order to move the laser processing head 7 downward in FIG. In this case, the Y-axis frame 3 is affected by the heavy laser processing head 7 and the Y-axis carriage 9 and elastically bends upward in FIG. Will be transformed.

  The positional deviation of the laser processing head 7 in the X-axis direction due to the deflection deformation of the Y-axis frame 3 with respect to the initial command position from a control unit (not shown) is measured by the sensor head 29 detecting the linear scale 25. Then, based on the measurement result by the sensor head 29, the control unit drives the head position correcting drive unit 15 so that the Y-axis carriage 9 (laser processing head 7) is opposite to the deflection direction with respect to the auxiliary frame 17. The deflection of the Y-axis frame 3 is canceled to correct the positional deviation of the laser processing head 7 due to the deflection.

  On the other hand, when the laser machining head 7 decelerates to move to the command position after moving downward in FIG. 1 in the X-axis direction, the Y-axis frame 3 moves in the direction opposite to that during acceleration. And bend in the same direction (downward in FIG. 1). In this case, after the sensor head 29 detects the linear scale 25 in the same manner as described above, the control unit drives the head position correcting drive unit 15 to move the laser processing head 7 in a direction opposite to the deflection direction (see FIG. 1), the position shift is corrected.

  The auxiliary frame 17 that moves in the X-axis direction in synchronization with the Y-axis frame 3 has a mounting bracket 19 and a head position correction that are sufficiently lighter in weight than the laser processing head 7 mounted on the Y-axis frame 3. Since only the drive unit 15 and the linear scale 25 are mounted, the deflection deformation due to high-speed acceleration / deceleration is negligibly small.

  Further, if the slight deflection deformation of the auxiliary frame 17 is more reliably suppressed, for example, CFRP (carbon fiber reinforced resin) that is light and highly rigid is used for the auxiliary frame 17, the mounting bracket 19, and the linear scale bracket 27. That's fine. For the Y-axis frame 3, a conventional rolled steel for general structure such as SS400 is used.

  Here, the deflection δ [mm] of the Y-axis frame 3 is obtained by considering the connection structure of the X-axis frame 1 and the Y-axis frame 3 as a simple beam structure with both ends supported, as shown in the schematic diagram of FIG. Can be sought.

In FIG. 3, it is assumed that a force F [N] is applied to the longitudinal center position of the Y-axis frame 3. Here, if the weight of the laser processing head 7 including the Y-axis carriage 9 is m [kg] and the acceleration acting on the laser processing head 7 is a [m / s ² ], F [N] is
F [N] = m [kg] × a [m / s ² ]
The deflection δ [mm] can be obtained from the following equation.

δ [mm] = {β × F [N] × L ³ [mm ³ ]} / {E [GPa] × I [mm ⁴ ]
+ Deflection due to the weight of the Y-axis frame 3 where β is a deflection coefficient (a coefficient determined by the type of beam), L [mm] is the length of the Y-axis frame 3, and E [GPa] is a longitudinal elastic modulus (depending on the material of the beam). (Determined coefficient), I [mm ⁴ ] is a cross-sectional secondary moment (a value obtained from the cross-sectional shape of the beam). The weight m [kg] of the laser processing head 7 including the Y-axis carriage 9 and the length L [mm] of the Y-axis frame 3 are values determined by the laser processing apparatus. Therefore, the deflection δ [mm] of the Y-axis frame 3 is determined by the acceleration a [m / s ² ] acting on the laser processing head 7.

FIG. 4 shows the results of actual measurement of the deflection (displacement) of the Y-axis frame 3 with respect to the speed of the laser machining head 7, that is, the acceleration. This measurement result shows that the Y-axis frame 3 shows the deflection of the Y-axis frame 3 when the laser processing head 7 stops at the B position after moving from the A position with the acceleration a [m / s ² ] as shown in FIG. 3 is measured by a laser displacement meter 31.

4A shows an acceleration a [m / s ² ] of 2.8 [m / s ² ], and FIG. 4B shows an acceleration a [m / s ² ] of 8.3 [m / s]. ² ], and in FIG. 4B, which has a higher acceleration, it can be seen that the displacement of the Y-axis frame 3 immediately after the laser processing head 7 indicated by C is stopped is larger. When the displacement of the Y-axis frame 3 increases (acceleration increases), as shown in FIG. 6, the roundness of the round hole by laser processing deteriorates. Note that the decelerations in FIGS. 4A and 4B are equivalent to each other.

  Therefore, as described above, by moving the laser processing head 7 in the direction opposite to the deflection direction so as to cancel the displacement (deflection deformation) of the Y-axis frame 3 by driving the head position correction drive unit 15, Even if the acceleration is increased in order to effectively exhibit the function of the linear motor, the roundness of the round hole to be processed can be secured and the processing accuracy can be increased.

  In FIG. 3, the deflection δ [mm] is obtained assuming that the force F [N] is applied to the longitudinal center position of the Y-axis frame 3, but the deflection δ [mm] is obtained at an arbitrary position in the longitudinal direction of the Y-axis frame 3. When the force F [N] acts, the deflection δ [mm] can be obtained using the following equation.

δ [mm] = {F [N] × a [mm ² ] × b [mm ² ]} / {3 × L [mm] × E [GPa] × I [mm ⁴ ]}
+ Deflection due to dead weight of Y-axis frame 3 In the above formula, a and b are distances from the pair of left and right X-axis frames 1 to the laser processing head 7, as shown in FIG.

  Further, in the present embodiment, an auxiliary frame 17 that is arranged in parallel to the Y-axis frame 3 and moves in the X-axis direction in synchronization is provided, and the positional deviation detection means is an X for the auxiliary frame 17 of the laser processing head 7. The amount of displacement in the axial direction is detected. Therefore, by detecting the amount of displacement of the laser processing head 7 in the X-axis direction with respect to the auxiliary frame 17, it is possible to measure the positional displacement of the laser processing head 7 due to the deflection of the Y-axis frame 3. By moving the laser processing head 7 so as to correct the above, the laser processing head 7 can be positioned at the original command position.

  In the present embodiment, the positional deviation detection means is a linear scale which is a movable sensor unit provided on the auxiliary frame 17 and movable along the auxiliary frame 17 in synchronization with the movement of the laser processing head 7 in the Y-axis direction. 25 and a sensor head 29 which is a head sensor portion provided in the laser processing head 7 so as to face the linear scale 25. For this reason, since the sensor head 29 moves in the Y-axis direction in synchronization with the laser processing head 7, the detection accuracy by the sensor head 29 can be ensured.

  In the present embodiment, the positional deviation detection means includes a linear scale 25 provided on the auxiliary frame 17 and extending in the X-axis direction, and a sensor head provided on the laser processing head 7 so as to face the linear scale 25. 29. Therefore, in this case, when correcting the positional deviation of the laser processing head 7, the laser processing head 7 is moved in the X-axis direction with respect to the auxiliary frame 17, so that the deflection deformation of the Y-axis frame 3 is corrected. The parallelism between the linear scale 25 and the sensor head 29 is maintained, and a decrease in detection accuracy can be suppressed.

[Second Embodiment]
In the second embodiment, as shown in FIG. 7, as a displacement detection means, instead of the linear scale 25 and the sensor head 29 in the first embodiment of FIG. Is used. The movable sensor unit 33 is provided on a surface of the movable body 37 provided on the auxiliary frame 17 so as to be movable in the Y-axis direction and faces the Y-axis carriage 9, and the head sensor unit 35 faces the movable sensor unit 33. Are provided on the Y-axis carriage 9. In this case, since the interval between the movable sensor unit 33 and the head sensor unit 35 changes when the Y-axis frame 3 bends due to high acceleration / deceleration in the X-axis direction, the amount of change in this interval is detected. Thus, the deflection of the Y-axis frame 3, that is, the positional deviation of the laser processing head 7 can be obtained.

  In this case, for example, an ultrasonic method can be used as the positional deviation detection means including the movable sensor unit 33 and the head sensor unit 35.

  In the present embodiment, after detecting the positional deviation, the driving mechanism unit composed of a linear motor that moves the Y-axis frame 3 in the X-axis direction is driven to move the laser processing head 7 in the X-axis direction to cause the positional deviation. to correct. Therefore, in this case, the drive mechanism unit composed of a linear motor that moves the Y-axis frame 3 in the X-axis direction includes the positional deviation correction means.

  For this reason, in the present embodiment, the head position correction drive unit 15 used in the first embodiment is not necessary, and thus the structure can be simplified and the cost can be reduced. Note that the head position correcting drive unit 15 may be used as in the first embodiment.

  Also in the present embodiment, the laser machining head 7 can be moved in the direction opposite to the deflection direction of the Y-axis frame 3 to correct the positional deviation of the laser machining head 7, and therefore, similarly to the first embodiment, the linear motor Even when the acceleration at the time of moving the laser processing head 7 is increased so as to effectively exhibit the above function, the roundness of the round hole to be processed can be secured and the processing accuracy can be increased.

[Third Embodiment]
In the third embodiment, as shown in FIG. 8, as a displacement detection means, instead of the linear scale 25 and the sensor head 29 in the first embodiment of FIG. Is used. The movable sensor unit 39 is provided on the surface of the movable body 43 attached to the right side frame 3c in FIG. 8 so as to face the Y-axis carriage 9, and the head sensor unit 41 faces the movable sensor unit 39. Provided on the Y-axis carriage 9. In this case, the movable sensor unit 39 and the head sensor unit 41 are displaced from each other in the X-axis direction when the Y-axis frame 3 is bent by high acceleration / deceleration in the X-axis direction. Thus, the deflection of the Y-axis frame 3, that is, the positional deviation of the laser processing head 7 can be obtained.

  In this case, for example, a photoelectric type can be used as the positional deviation detection means including the movable sensor unit 39 and the head sensor unit 41.

  In the present embodiment, after detecting the positional deviation, as in the second embodiment, the laser machining head 7 is moved by driving the drive mechanism unit composed of a linear motor that moves the Y-axis frame 3 in the X-axis direction. Move in the axial direction to correct misalignment. Therefore, in this case, the drive mechanism unit composed of a linear motor that moves the Y-axis frame 3 in the X-axis direction includes the positional deviation correction means.

  For this reason, in the present embodiment, the head position correction drive unit 15 used in the first embodiment is not required, and the auxiliary frame 17 used in the first and second embodiments is not required. Therefore, the structure can be further simplified and the cost can be reduced accordingly. Note that, as in the first embodiment, the auxiliary frame 17 may be provided and the head position correcting drive unit 15 may be used.

  Also in the present embodiment, the laser machining head 7 can be moved in the direction opposite to the deflection direction of the Y-axis frame 3 to correct the positional deviation of the laser machining head 7, and therefore, similarly to the first embodiment, the linear motor Even when the acceleration at the time of moving the laser processing head 7 is increased so as to effectively exhibit the above function, the roundness of the round hole to be processed can be secured and the processing accuracy can be increased.

  In each of the above-described embodiments, the processing of the round hole by the laser processing head 7 has been described as an example. However, the processing is not limited to this processing, and the processing head is moved and positioned in the X-axis direction and the Y-axis direction. Applicable if it does.

  Further, in each of the above-described embodiments, the drive source used for the movement of the Y-axis frame 3 in the X-axis direction and the movement of the Y-axis carriage 9 (laser machining head 7) in the Y-axis direction, and a head position correction drive unit Although the linear motor is employed for all of the 15 driving sources, the linear motor is not particularly limited, and the same effect can be expected by using various driving means.

1 X-axis frame (second head support member)
3 Y-axis frame (first head support member)
7 Laser processing head (processing head)
15 Head position correction drive section (position shift correction means)
17 Auxiliary frame (auxiliary member)
25 Linear scale (movable sensor, misalignment detection means)
29 Sensor head (head sensor unit, misregistration detection means)
33, 39 Movable sensor section (positional deviation detection means)
35, 41 Head sensor unit (positional deviation detection means)

Claims (8)

  A first head support member that supports the processing head to be movable in the first direction and extends in the first direction, and supports both ends of the first head support member in the extension direction. A processing apparatus comprising: a second head support member that movably supports the first head support member in a second direction orthogonal to the first direction, wherein the processing head includes the first head support member. The first head support member bends when moving in the second direction along with the second head support member together with the one head support member, and a position shift that detects a position shift of the processing head due to this bend. A position deviation correcting means for moving the machining head in a direction opposite to the deflection direction of the first head support member so as to correct the position deviation of the machining head detected by the position deviation detection means; The Processing apparatus characterized by.   An auxiliary member arranged in parallel to the first head support member and moving in the second direction in synchronization is provided, and the misalignment detection means is configured to provide the second member with respect to the auxiliary member of the processing head. The processing apparatus according to claim 1, wherein a displacement amount in a direction is detected.   The positional deviation detection means is provided on the auxiliary member and is movable along the auxiliary member in synchronization with the movement of the machining head in the first direction, and is opposed to the movable sensor unit. The processing apparatus according to claim 2, further comprising a head sensor unit provided in the processing head.   The movable sensor unit is configured by a linear scale extending in the second direction, and the sensor head is provided in the machining head so as to face the linear scale in the first direction. The processing apparatus according to claim 3.   The positional deviation detection means is opposed to the movable sensor unit that moves along the second head support member in synchronization with the first head support member, and the movable sensor unit in the first direction. The processing apparatus according to claim 1, further comprising: a head sensor unit provided on the processing head, and detecting a displacement amount in the second direction between the sensor units.   5. The position deviation correcting unit includes a drive unit that moves the machining head relative to the auxiliary member in a direction opposite to the direction of deflection of the first head support member. The processing apparatus according to any one of the above.   The processing apparatus according to claim 5, wherein the misalignment correction unit is a first head support member driving unit that moves the first head support member in the second direction.   The processing head is moved in the first direction along the first head support member, and the first head support member is supported in the second direction perpendicular to the first direction while supporting both ends thereof. A machining method for machining a workpiece using the machining head while moving along a second head support member extending to the workpiece, wherein the machining head together with the first head support member The first head support member is deflected when moving in the second direction, and the displacement of the machining head due to the deflection is detected, and the machining head is adjusted to correct the displacement. A processing method comprising moving the support member in a direction opposite to the direction of deflection of the support member.

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