JP2011173054A - Filter and coating apparatus equipped with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a filter using a sheet-formed filter and being capable of ensuring a sufficient filtration area on the flat surface of the filter and reducing the time needed for liquid feed by increasing the filtration flow rate without lowering the filtration accuracy of the filter and a coating apparatus equipped with it. <P>SOLUTION: The filter includes an inflow housing having an inflow inlet for a fluid and an inflow chamber communicating with the inflow inlet, an outflow housing having an outflow outlet for a fluid and an outflow chamber communicating with the outflow outlet and a sheet-formed filter arranged so as to partition between the inflow chamber and the outflow chamber. A filter supporting means having two or more through holes penetrating from the face on the side of the filter to the face on the outflow side of the filter is arranged on the outflow side of the filter, and the filter-supporting means consists of a diffusion layer arranged on the side of the filter to diffuse the fluid in the direction in parallel with the filter and a supporting layer arranged on the outflow side of the filter to support the filter through the diffusion layer. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a filter suitable for filtration of a coating liquid and a coating apparatus equipped with the same, and in particular, a plasma display panel (hereinafter sometimes abbreviated as PDP), a color filter for a liquid crystal display (hereinafter referred to as “PDP”). , LCM), and used for the production of optical filters, printed circuit boards, integrated circuits, semiconductors, etc., and also relates to a coating apparatus used in these fields.

  One of the displays that are attracting attention among various types of displays is a plasma display panel (hereinafter referred to as PDP) that is large, thin, and lightweight. The PDP generates a discharge in a discharge space formed between the front plate and the back plate, and the discharge generates ultraviolet rays centering on a wavelength of 147 nm from the xenon gas, and the ultraviolet rays excite the phosphor to cause display. It becomes possible. Full-color display can be supported by causing the driving circuit to emit light by separately emitting discharge cells in which phosphors emitting red (R), green (G), and blue (B) are separately applied.

  In this PDP, an alternating current (AC) type plasma display, which has been actively developed recently, includes a front glass plate on which display electrodes / dielectric layers / protective layers are formed, address electrodes / dielectric layers / rib layers / fluorescence. It has a structure in which a mixed gas of He—Xe or Ne—Xe is sealed in a discharge space that is bonded to a rear glass plate on which a body layer is formed and is partitioned by stripe-shaped or grid-shaped barrier ribs. Each of the phosphor layers of R, G, and B has a phosphor paste mainly composed of powdered phosphor particles extending in one direction for each color formed on the back plate, or such a partition and this It is filled in a recess formed by an auxiliary partition perpendicular to the surface. In order to manufacture a product having such a structure with high productivity and high quality, a coating technique for coating phosphors in a certain pattern is important.

  As a method for applying the phosphor paste, a screen printing method is generally used. However, in recent years, since the use efficiency of the coating liquid is high and it is inexpensive and easy to apply, it has a plurality of fine discharge openings. There has been proposed and studied a method of using a coating head, filling the concave portion with the coating liquid while facing the back plate and moving the coating head relatively (see Patent Document 1).

  In a coating apparatus in which this coating method is used, it is generally performed that a paste after removing foreign matters with a filter is sent to a coating head and coated on a substrate. Specific examples of foreign matters in the paste include particles mixed in the paste manufacturing process, the liquid feeding process to the coating head, aggregated phosphor particles, gelled binder resin, and the like.

  In general, not only phosphor pastes, but also filters used for removing foreign substances mixed in the coating liquid are baked using resins such as polypropylene, polyethylene, and tetrafluoroethylene, and stainless fibers having a higher Young's modulus than the resin. Examples thereof include a sintered filter obtained by forming a sheet metal into a sheet shape, a sheet filter obtained by further forming a pleated shape or a rolled product, or a mesh filter obtained by woven stainless fibers in a sheet shape.

Among them, a filter using a sheet-like filter has a relatively simple structure and can be filtered even with a small amount of liquid, and thus is preferably used for the filtration of a coating liquid.
Such a filter has two housing members and a filter and a screen that supports the filter so as to be sandwiched between the two housing members as shown in Patent Document 2, for example, on both the upstream side and the downstream side. The structure which arrange | positions adjacent to is common.

  In recent years, due to competition in the display industry, such as PDP and LCM, which is intensifying, cost reduction is required in various parts.

  As a means for reducing the cost, shortening the manufacturing tact is very effective. However, it is not easy to shorten the manufacturing tact. For example, even if a high-viscosity phosphor paste is fed to the coating head, a very long time is required, which is a major obstacle to shortening the manufacturing tact.

  In order to obtain a high-quality product, the removal performance of foreign matters is extremely important. Further, in the case of the coating head described in Patent Document 1, there is a problem that the discharge opening is clogged with foreign matter because it is a fine discharge opening.

  Therefore, it is impossible to increase the filtration flow rate at the expense of filtration accuracy using a filter with a large opening. Therefore, it is necessary to increase the filtration flow rate while maintaining the filtration accuracy using a filter with fine openings, but in this case, since the pressure loss of the filter itself is large, it is difficult to increase the filtration flow rate, and the time required for liquid feeding is reduced. It cannot be shortened. Therefore, there is a problem that the manufacturing tact cannot be shortened. Furthermore, when trying to increase the filtration flow rate by liquid feeding at a high pressure, there is a problem that the filter is deformed or broken by the high pressure.

  As means for increasing the filtration flow rate, for example, as shown in Patent Document 3, a proposal has been made to step the through-holes of the screen that supports the filter. Specifically, since the supply port side of the through-hole is a large-diameter opening and the other surface side is a step-through through-hole that opens to a small diameter, and the filter body is disposed on the porous support plate side that opens to a large diameter. In addition, a means is disclosed in which the non-contact area is relatively large so that the effective filtration area of the filter body is improved and the mass productivity is improved.

  However, in the method described in Patent Document 3, when focusing on the flow of the paste inside the filter, the paste flows in the filter inside the filter in the range of the contact area between the filter and the support plate that is still present. This will form a non-retained part. As a result, a sufficient filtration area cannot be secured on the filter plane, which is extremely inefficient, and there is a limit to increasing the filtration flow rate.

  That is, the flow of fluid on the filter plane is substantially limited to the limited area corresponding to the through-hole of the filter support means disposed on the outflow side, and the filtration area of the entire filter plane cannot be effectively utilized. There was a problem that the filtration flow rate could not be increased.

Japanese Patent Laid-Open No. 10-27543 JP 2002-233710 A Japanese Patent No. 314497

  The present invention has been made in view of the above, and is a filter using a sheet-like filter, which ensures a sufficient filtration area on the filter plane and reduces the filtration flow rate without reducing the filtration accuracy of the filter. An object of the present invention is to provide a filter capable of shortening the time required for liquid feeding by increasing the amount of liquid and a coating apparatus equipped with the same.

In order to achieve the above object, the present invention provides:
An inflow housing having a fluid inlet and an inflow chamber communicating therewith,
An outflow housing having an outlet for fluid and an outflow chamber communicating therewith,
And a filter having a sheet-like filter arranged to partition the inflow chamber and the outflow chamber,
On the outflow side of the filter, filter support means having a plurality of through-holes leading from the filter side surface to the outflow side surface is arranged,
The filter support means is disposed on the filter side, and a diffusion layer for diffusing fluid in a direction parallel to the filter,
And a support layer which is disposed on the outflow side and supports the filter via the diffusion layer.

  Further, it is preferable that the diffusion layer is provided with a plurality of recesses at least on the filter side of the filter support means, and the recesses communicate with each other in a direction parallel to the filter.

  The diffusion layer is preferably a mesh.

  Moreover, it is preferable that the said filter is comprised with a fibrous filter medium and the fiber diameter which comprises the said mesh is larger than the fiber diameter which comprises the said filter.

  Moreover, it is preferable that both the said filter part and a mesh are metal.

  Further, the present invention is a coating apparatus having a coating liquid container for storing a coating liquid and a coating head communicating with the coating liquid container, wherein the filter is provided between the coating liquid container and the coating head. An application apparatus is provided.

  Moreover, it is preferable that the said coating head has at least 1 discharge opening part, and the opening area per this discharge opening part is 0.04 mm <2> or less.

  Conventionally, the flow of fluid on the filter plane substantially flows only in a limited area corresponding to the through-hole of the filter support means arranged on the outflow side, and the filtration area of the entire filter plane cannot be effectively utilized.

On the other hand, according to the present invention,
An inflow housing having a fluid inflow port and an inflow chamber communicating therewith, an outflow housing having a fluid outflow port and an outflow chamber communicating therewith, and a sheet shape disposed so as to partition the inflow chamber and the outflow chamber A filter support means having a plurality of through holes on the outflow side of the filter, the filter support means being arranged on the filter side, and in a direction parallel to the filter. And a support layer for supporting the filter through the diffusion layer, so that the fluid is sufficiently diffused in the direction parallel to the filter on the inflow side of the through hole. be able to. As a result, in the filter disposed on the inflow side of the diffusion layer, the fluid can flow substantially over the entire filter plane. That is, the filtration area of the filter can be effectively utilized, and the filtration flow rate can be increased without reducing the filtration accuracy of the filter.

  Further, the diffusion layer is preferably provided with a plurality of recesses on at least the filter side of the filter support means, and the recesses communicate with each other in a direction parallel to the filter. A communicating diffusion space is formed, and the fluid can be sufficiently diffused in the direction parallel to the filter on the inflow side of the through-hole. As a result, in the filter disposed on the inflow side of the diffusion layer, the fluid can flow substantially over the entire filter plane. That is, the filtration area of the filter can be effectively used, and the filtration flow rate can be increased without reducing the filtration accuracy of the filter.

  Moreover, since it becomes possible to support a filter with a support layer through the part which is contacting the filter other than a recessed part, it can suppress that a filter deform | transforms or breaks by high pressure, and filtration accuracy falls.

  The diffusion layer is preferably a mesh. By using the mesh, a diffusion space communicating in the direction parallel to the filter can be easily formed, and sufficient fluid can be diffused in the direction parallel to the filter on the inflow side of the through hole. As a result, in the filter disposed on the inflow side of the diffusion layer, the fluid can flow substantially over the entire filter plane. That is, the filtration area of the filter can be effectively used, and the filtration flow rate can be increased without reducing the filtration accuracy of the filter. Moreover, since it becomes possible to support a filter with a support layer through the part where the fiber which comprises a mesh interweaves, it can suppress that a filter deform | transforms or breaks by high pressure, and filtration accuracy falls. Moreover, it is preferable that the fiber diameter which comprises the said mesh is larger than the fiber diameter which comprises the said filter. By making the fiber diameter constituting the mesh larger than the fiber diameter constituting the filter, the space for diffusion can be appropriately set, and good diffusibility can be expressed.

  The filter and the mesh are preferably made of metal. By using a metal, even if a high pressure is applied, it is not compressed and deformed, so that the space for diffusion is not compressed and good diffusibility can be maintained.

  Furthermore, it is a coating apparatus having a coating liquid container for storing the coating liquid and a coating head communicating with the coating liquid container, and maintaining the filtration system by providing the filter between the coating liquid container and the coating head. When supplying the coating liquid to the coating head, the time required for the supply can be shortened, so that the operating tact time of the coating apparatus can be shortened and the manufacturing cost can be reduced.

In addition, the coating head has at least one discharge opening, an opening area per one discharge opening is 0.04 mm ² or less, and includes the above-described filter to reduce the discharge opening due to foreign matter. In other words, there is no problem and good coating can be performed.

It is sectional drawing of the filter which concerns on one embodiment of this invention. It is (a) enlarged perspective view and (b) enlarged sectional view of the filter support means concerning one embodiment of the present invention. It is the (a) enlarged perspective view and (b) enlarged sectional view of the preferable filter support means concerning other embodiments of the present invention. It is (a) expanded perspective view and (b) expanded sectional view of the preferable filter support means which concerns on another one embodiment of this invention. It is (a) enlarged perspective view and (b) enlarged sectional view of another preferable filter support means according to still another embodiment of the present invention. (A) is the schematic diagram which showed the flow at the time of using the conventional filter support means which does not have a diffused layer, (b) showed the flow at the time of using the filter support means of this invention. It is a schematic diagram. It is the (a) enlarged perspective view and (b) enlarged sectional view of the conventional filter support means which does not have a diffusion layer. It is a schematic block diagram of the coating device provided with the filter of this invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
However, the present invention is not limited to this, and can be applied in various fields dealing with fluids.

  FIG. 1 shows a cross-sectional view of a filter according to an embodiment of the present invention. The filter 1 shown in FIG. 1 includes an inflow chamber 6 and an outflow housing 7 sandwiching a sheet-like filter 8 that traps foreign matters and a plate-like filter support means 9 disposed adjacent thereto. It is configured to partition the outflow chamber. At the same time, an O-ring 10 that prevents liquid leakage is mounted so as to contact the inflow housing 6, the outflow housing 7, and the filter 8. The inflow housing 6 has an inflow port 2 and an inflow chamber 4. The inflow port 2 is an inlet through which the fluid to be filtered before filtration flows into the filter 1, and the inflow chamber 4 has a substantially cylindrical shape, communicates with the inflow port 2, and contacts the filter 8. The outflow housing 7 has an outflow port 3 and an outflow chamber 5. The outflow port 3 is an outlet for allowing the filtered fluid to flow out of the filter 1. The outflow chamber 5 has a substantially cylindrical shape, communicates with the outflow port 3, and comes into contact with the filter 8. The positions of the inlet 2 and the outlet 3 of the filter 1 are on the vertical line in the center of the filter 8, and their directions are perpendicular to the filter 8. As shown in FIG. 1, the filter is installed in such a manner that the inlet 2 is on the lower side and the outlet is on the upper side, so that the air bubbles accumulated in the inflow chamber, the outflow chamber, the inside of the filter, or the through hole of the filter support means However, it is not limited to this depending on the characteristics of the fluid to be filtered and can be installed in the opposite direction.

  What can be used as the sheet-like filter 8 disposed so as to be sandwiched between the inflow housing 6 and the outflow housing 7 is a woven or non-woven fabric of resin such as polypropylene, polyethylene, tetrafluoroethylene, glass fiber, or porous ceramic. There are sintered filters using stainless steel fibers and mesh filters formed by weaving wire, etc., but it may be selected according to the characteristics of the fluid to be filtered and the conditions of use of the filter 1, and the ones other than those shown here are used. May be.

  FIG. 2A shows an enlarged perspective view of the filter support means according to one embodiment of the present invention, and FIG. 2B shows an enlarged cross-sectional view of the filter support means of FIG. The filter 8 can be used by laminating a plurality of filters, and may be selected depending on the characteristics of the fluid to be filtered and the use conditions of the filter 1. For example, as shown in FIG. A combination or a plurality of mesh filters having different openings may be stacked. Further, the filtration accuracy of the filter 8 may be selected according to the particle size of a foreign substance desired to be removed from the fluid to be filtered, and is not particularly limited.

  In the filter 1 shown in FIG. 1, a rough flow from when the fluid to be filtered flows into the filter 1 until it flows out will be described. FIG. 8 is a schematic configuration diagram of a coating apparatus including the filter of the present invention. In FIG. 8, the container 62 for storing the fluid to be filtered has a space in the upper part thereof. The piping in the container 62 extends to the vicinity of the bottom of the container 62 and is immersed in the liquid to be filtered. The fluid to be filtered in the container 62 is fed by applying pressure to the upper space of the container 62 and flows into the inlet 2 of the filter 1 shown in FIG. 8 is contacted. Then, when passing through the filter 8, foreign matters are removed by the filter 8. The fluid to be filtered after removing the foreign matter passes through the through hole of the filter support means 9, fills the outflow chamber 5, flows to the outlet 3, and flows out of the filter 1 through the outlet 3.

  The liquid feeding pressure is preferably 1 MPa or less. If it exceeds this, it may be necessary to increase the size in order to improve the pressure resistance of the associated equipment such as the filter 1, the container 62, and the opening / closing valve 69, which is often expensive. More preferably, it is 0.5 MPa or less. By doing so, it is possible to cope with a general pressure design. In addition, there may be a case where bubbles accumulated in the filter 1 can be efficiently discharged by setting the outflow side to a negative pressure during liquid feeding, in which case the pressure difference from the inflow side is set to 1 MPa or less. Good.

  In the filter 1 shown in FIG. 1, a plate-like filter support means 9 provided with a large number of through holes is disposed adjacent to the filter 8. This is to prevent the filter 8 itself from being deformed by the pressure applied to the filter 8 during liquid feeding. Therefore, as long as the strength that can withstand the pressure can be maintained, the material and shape are not particularly limited, and the material may be selected from resin, ceramic, or metal such as titanium or stainless steel, and the shape may be a large number of rods. Although it may be a support member constituted by a member, it is preferable to be a plate-like filter support means made of a metal such as stainless steel in consideration of ease of manufacture and cost.

  What is necessary is just to determine suitably the thickness of the filter support means 9, the magnitude | size of a through-hole, and the opening rate of a through-hole according to the pressure to give, the allowable deformation amount of the filter support means 9, and the filtration flow rate. Note that the aperture ratio is a value obtained by opening area / (opening area + non-opening area). Generally, in many cases, the thickness is 0.1 to 10 mm, the through-hole 13 is configured to have a diameter of 0.1 to 10 mm, and an aperture ratio of 10 to 80%. And the size of the filter 8, ease of handling, and cost.

  In the example shown in FIG. 2, the filter support means 9 is plate-shaped and has a plurality of through holes 13 having a round hole shape. The filter support means 9 is disposed on the filter side and is disposed on the outflow side for diffusing the fluid to be filtered in a direction parallel to the filter. The filter support means 9 is for supporting the filter 8 via the diffusion layer 14. It consists of a support layer 15.

  The diffusion layer 14 is located on the filter-side surface of the filter support means 9, and has a plurality of recesses 16. The recesses 16 communicate with each other in a direction parallel to the filter. 16 is sufficiently diffused in a direction parallel to the filter along 16 and then reaches the through-hole 13 and flows into the outflow chamber 5.

  The through-hole 13 may have a shape other than a round hole, or any shape as long as the fluid to be filtered flows smoothly, such as an oval shape or a square shape. In order to increase the filtration flow rate, the total opening area of the through-holes 13 on the diffusion layer 14 side is preferably large.

  The filter 8 is in contact with a plurality of contact regions 17 formed in the diffusion layer 14, thereby supporting the filter 8 from the support layer 15 located on the outflow side, and the filter 8 is deformed by receiving pressure due to liquid feeding. To prevent that. The number and shape of the contact areas 17 are not particularly limited. However, if the contact area 17 is too large, a paste portion is soaked in the filter 8 and wetted, but a stay portion where the paste does not flow is formed. Since they are connected, it is preferable to provide a large number of small contact areas 17.

  The recess 16 is arranged in a radial shape at an arbitrary angle with the center of the through-hole 13 as a reference, and is formed as a groove shape communicating with the through-hole 13. The depth and width of the recess 16 are not particularly limited as long as the fluid to be filtered flows smoothly. Although it may be determined as appropriate depending on the characteristics of the fluid to be filtered, it is preferable to design the pressure loss to be smaller than the pressure loss of the filter 8. As a guideline, for example, the concave portion 16 in the direction parallel to the diffusion layer 14 is used. Is preferably at least approximately equal to the opening area of the filter 8, and the depth of the recess 16 is preferably at least larger than either the fiber diameter constituting the filter 8 and / or the thickness of the filter 8.

  In the case where the filter 8 is formed by stacking a plurality of filters, it is preferable to consider the mesh filter 12 that is located closest to the diffusion layer 14 in the filter 8 as a guide. The maximum values of the depth and width of the recess 16 are not particularly limited as long as the strength of the filter support means 9 can be secured.

  The filter support means 9 including the recess 16 is preferably manufactured by etching because a fine shape can be easily formed. It is also possible to manufacture the diffusion layer 14 and the support layer 15 separately and to bond them by diffusion bonding.

  FIG. 3 (a) is an enlarged perspective view of a filter support means according to another embodiment of the present invention, and FIG. 3 (b) is an enlarged cross-sectional view of the filter support means of FIG. 3 (a). As shown in FIG. 3, the through-hole 13 may have a mortar shape in which the diameter of the through-hole 13 is increased on the inflow side. By doing so, the contact area 17 can be further reduced, and at the same time, the flow becomes smooth. The through-hole 13 may have a shape other than a round hole, or any shape as long as the fluid to be filtered flows smoothly, such as an oval shape or a square shape. In order to increase the filtration flow rate, the total opening area of the through-holes 13 in the direction parallel to the diffusion layer 14 is preferably large.

  The filter 8 is in contact with a plurality of contact regions 17 formed in the diffusion layer 14, thereby supporting the filter 8 from the support layer 15 located on the outflow side, and the filter 8 is deformed by receiving pressure due to liquid feeding. To prevent that. The number and shape of the contact areas 17 are not particularly limited. However, if the contact area 17 is too large, a paste portion is soaked in the filter 8 and wetted, but a stay portion where the paste does not flow is formed. Since they are connected, it is preferable to provide a large number of small contact areas 17.

  The recess 16 is arranged in a radial shape at an arbitrary angle with the center of the through-hole 13 as a reference, and is formed as a groove shape communicating with the through-hole 13. The depth and width of the recess 16 are not particularly limited as long as the fluid to be filtered flows smoothly. Although it may be determined as appropriate depending on the characteristics of the fluid to be filtered, it is preferable to design the pressure loss to be smaller than the pressure loss of the filter 8. As a guideline, for example, the recess 16 in the direction parallel to the diffusion layer 14 is used. The total area is preferably at least substantially equal to the opening area of the filter 8, and the depth of the recess 16 is preferably at least greater than either the fiber diameter constituting the filter 8 and / or the thickness of the filter.

  In the case where the filter 8 is formed by stacking a plurality of filters, it is preferable to consider the mesh filter 12 that is located closest to the diffusion layer 14 in the filter 8 as a guide. The maximum values of the depth and width of the recess 16 are not particularly limited as long as the strength of the filter support means 9 can be secured.

  The filter support means 9 including the recess 16 is preferably manufactured by etching because a fine shape can be easily formed. It is also possible to manufacture the diffusion layer 14 and the support layer 15 separately and to bond them by diffusion bonding.

  Next, still another preferred embodiment of the filter support means disposed in the filter of the present invention will be described. FIG. 4 (a) shows an enlarged perspective view of a filter support means according to still another embodiment of the present invention, and FIG. 4 (b) shows an enlarged cross-sectional view of the filter support means of FIG. 4 (a).

  In FIG. 4, the filter support means 9 is plate-shaped and has a plurality of through holes 13 having a round hole shape. The through-hole 13 may have a shape other than a round hole, or any shape as long as the fluid to be filtered flows smoothly, such as an oval shape or a square shape. In order to increase the filtration flow rate, the total opening area of the through holes 13 in the direction parallel to the diffusion layer 14 is preferably increased.

  The filter support means includes a diffusion layer 14 for diffusing the fluid to be filtered in a direction parallel to the filter and a support layer 15 for supporting the filter via the diffusion layer 14. The diffusion layer 14 is located on the filter-side surface of the filter support means, and is formed with a plurality of recesses 16. The recesses 16 communicate with each other in a direction parallel to the filter. And then sufficiently diffuses in a direction parallel to the filter, then reaches the through-hole 13, passes through the through-hole 13 of the support layer 15, and flows to the outflow chamber.

  The filter is in contact with a plurality of contact regions 17 formed in the diffusion layer 14 to support the filter from the support layer 15 located on the outflow side and to prevent the filter from being deformed by receiving pressure due to liquid feeding. is doing. The number and shape of the contact areas 17 are not particularly limited, but considering the flow inside the filter and deformation of the filter due to liquid feeding, it is preferable to provide a large number of the contact areas 17.

  In the example shown in FIG. 4, the recess 16 has a plurality of grooves arranged in a lattice shape and communicates with the through-hole 13. The depth and width of the recess 16 are not particularly limited as long as the fluid to be filtered flows smoothly. Although it may be determined as appropriate depending on the characteristics of the fluid to be filtered, it is preferable to design the pressure loss to be smaller than the pressure loss of the filter on the inflow side. As a guideline, for example, a recess in a direction parallel to the diffusion layer 14 The total area of 16 is preferably at least substantially equal to the opening area of the filter, and the depth of the recess 16 is preferably at least larger than either the fiber diameter constituting the filter and / or the thickness of the filter. In the case where the filter 8 is formed by stacking a plurality of filters, it is preferable to consider the mesh filter 12 that is located closest to the diffusion layer 14 in the filter 8 as a guide. The maximum value of the depth of the recess 16 is not particularly limited as long as the strength of the filter support means can be ensured.

  Further, it is preferable that the filter support means including the recess 16 is manufactured by etching because a fine shape can be easily formed. It is also possible to manufacture the diffusion layer 14 and the support layer 15 separately and to bond them by diffusion bonding.

  Still another preferred embodiment of the filter support means disposed in the filter of the present invention will be described.

  FIG. 5 (a) shows an enlarged perspective view of a filter support means according to still another embodiment of the present invention, and FIG. 5 (b) shows an enlarged cross-sectional view of the filter support means of FIG. 5 (a).

  In FIG. 5, the filter support means is a diffusion layer 14 composed of a support layer 15 having a plate-like shape and a plurality of round hole-shaped through holes 13 and a mesh 19 for diffusing the fluid to be filtered in a direction parallel to the filter. The diffusion layer 14 made of the mesh 19 is located on the filter side of the filter support means 9.

  The mesh 19 is formed by weaving a wire, and from its structure, a portion where the wire is folded can be used as a contact region 17 with the filter, and an opening 81 portion and a space portion where the wire is not folded. 82 can function as a space communicating in a direction parallel to the filter.

  The material of the mesh 19 can be a metal or a resin, and is not particularly limited. However, when liquid is supplied, a metal such as stainless steel is used to increase the rigidity so that the space is not compressed by pressure. preferable.

  In addition, as a weaving form of the mesh 19, various weaving forms such as a plain weave, a twill weave, a plain tatami mat, a twill mat can be selected as long as a space communicating in a direction parallel to the filter can be formed. .

  In the diffusion layer 14, the opening portion 81 and the space portion 82 where the wire is not folded are communicated in a direction parallel to the filter, so that the fluid to be filtered is in a direction parallel to the filter along the communicated space portion 82. After sufficiently diffusing, it flows through the through-hole 13 of the support layer 15 and flows into the outflow chamber 5.

  The through-hole 13 may have a shape other than a round hole or any shape as long as the fluid to be filtered flows smoothly, such as an oval shape or a square.

Note that the filter 8 supports the filter 8 from the support layer 15 located on the outflow side by contacting the plurality of contact regions 17 that are portions where the wire rods of the mesh 19 are folded, and receives the pressure due to liquid feeding to receive the filter 8. Prevents deformation. The number and shape of the contact regions 17 are uniquely determined by the fiber diameter constituting the mesh 19, the openings to be applied, and the weaving form.
In consideration of the flow inside the filter and deformation of the filter 8 due to liquid feeding, it is preferable to provide a large number of the contact areas 17 having a small contact area 17. Focusing on the flow of paste inside the filter 8, for example, when the contact area 17 is large, in the range of the contact area 17, a stagnant portion is formed in which the paste is soaked in the filter 8 but is not wet. become. As a result, a sufficient filtration area cannot be secured on the filter plane and is extremely inefficient, so there is a limit in increasing the filtration flow rate, but the contact region can be obtained by applying a wire like the mesh 19. 17 can be substantially line-contacted, and can be made extremely small, so that the filtration area of the entire filter plane can be effectively utilized. As a result, the retention portion is hardly formed. Therefore, the aggregation of the paste, which is likely to occur in the staying portion, is eliminated, and the reduction of the filter performance and the life of the filter can be prevented.

  In addition, the mesh 19 does not obtain the diffusion layer 14 by machining such as cutting, but the wire 19 is woven. Therefore, by appropriately determining the fiber diameter and openings of the wire constituting the mesh 19, the mesh 19 can be easily spaced. This is preferable in that the diffusion layer 14 having the portion 82 can be obtained. From the above viewpoint, the contact region 17 can be reduced by applying a mesh having a small fiber diameter. However, if the fiber diameter is too small, the space portion of the diffusion layer 14 is also reduced, resulting in an increase in pressure loss, and it may be difficult for the fluid to be filtered to flow along the space portion 82 to diffuse sufficiently. Therefore, the mesh 19 is preferably designed so as to have a pressure loss smaller than the pressure loss of the filter 8. As a guideline, for example, the fiber diameter of the mesh 19 is the fiber diameter constituting the filter 8 and / or the filter. It is preferable to make it larger than at least one of the thicknesses of 8. For example, when the fiber diameter of the mesh 19 is larger than the fiber diameter constituting the mesh filter 12, the space portion 82 larger than the mesh filter 12 can be obtained, so that the pressure loss is reduced and the fluid to be filtered passes through the space portion 82 of the mesh 19. It can flow easily and diffuse sufficiently. Further, when the thickness of the mesh 19 is larger than the thickness of the filter 8, the space portion 82 larger than that of the mesh filter 12 can be obtained in the same manner, so that the pressure loss is reduced, and the fluid to be filtered easily enters the space portion 82 of the mesh 19. It can flow and diffuse sufficiently. If the opening 81 of the mesh 19 is too large, the filter 8 is deformed by the pressure due to the liquid feeding, and the filter 8 falls into the opening 81 of the mesh 19. As a result, the filter 8 is locally stretched, and the filter 8 itself Openings may open and foreign matter may pass through due to deterioration of filtration accuracy, leading to the disadvantage of being applied onto the product.

Further, when the discharge opening 66 of the coating head 65 shown in FIG. 8 is as small as 0.04 mm ² , for example, there is a possibility that the foreign matter that has passed through may block the discharge opening 66. Therefore, it is preferable to determine the opening 81 of the mesh 19 within a range in which the filter 8 is not deformed by the pressure due to the liquid feeding and does not drop. Assuming that the filter 8 is supported, a deflection calculation is performed based on the thickness and Young's modulus of the filter 8, the allowable deformation amount (deflection amount) of the filter 8, the pressure value of the liquid feeding, and the like, and an approximate value of the mesh 81 of the mesh 19 is determined. It is possible.

  Further, as shown in FIG. 5B, the mesh 19 also has a role of supporting the filter 8 at the portion of the through-hole 13 of the support layer 15, and prevents the filter 8 from falling into the through-hole 13. Therefore, it is preferable that the opening 81 of the mesh 19 is made smaller than the size of the through-hole 13 at the maximum so that the filter 8 can be supported even at the portion of the through-hole 13, and the opening of the filter 8 can be suppressed. . The opening area of the mesh 19 is preferably at least substantially equal to the opening area of the filter so that the fluid to be filtered flows smoothly. In the case where a plurality of filters 8 are laminated, it is preferable to consider the mesh filter 12 located on the diffusion layer 14 side of the filter 8 by applying the above guidelines.

  Further, regarding the weaving form of the mesh 19, a plain weave or twill weave is preferable because a larger space may be taken than a plain or twill weave.

  Further, depending on the characteristics of the fluid to be filtered, etc., there may be a case where the diffusion layer 14 in which a plurality of meshes 19 are stacked can gain space and reduce pressure loss.

  In addition, since the filter 8 has a role of removing foreign matters, the sintered filter 11 or the mesh filter 12 is often used by basically laminating a fine mesh. However, depending on the size of the foreign matter to be removed, the characteristics of the fluid to be filtered, etc., for example, the mesh filter 12 may be selected within the above-described preferable range and the role of the diffusion layer 14 may be able to be played.

  The thickness of the filter support layer 15 is not particularly limited as long as the pressure resistance strength by liquid feeding can be ensured, but generally, if the thickness is too large, the pressure loss at the through-hole 13 increases, so the pressure strength is reduced. In many cases, it is better to make the thickness as thin as possible. The support layer 15 is preferably manufactured by etching because a fine shape can be easily formed.

  From the above, for example, as the filter 8, a # 500 mesh filter having a fiber diameter of 0.025 mm, an opening of 0.0258 mm, and an aperture ratio of 25.6% is used, and the through-hole 13 of the support layer 15 is a round hole having a diameter of 3 mm. In this case, the mesh 19 may be # 60 mesh having a diameter of 0.14 mm, an opening of 0.283 mm, and an aperture ratio of 44.8%.

  In addition, the cross-sectional shape of the fibers constituting the mesh 19 may be substantially circular, or substantially square or geometrical, and in that case, the fiber diameter is determined by the diameter of a circle circumscribing the cross-sectional shape. Just do it. Further, the mesh 19 may be sintered, and in this case, the woven portions are firmly joined, so that deformation is hardly caused.

  Further, the mesh 19 and the support layer 15 may be sintered. Similarly, it can be firmly joined and can be easily handled. In this case, the filter 8 can also be sintered together. For example, if a higher degree of cleaning is required, it may be preferable to handle the mesh 19, the support layer 15, and the filter 8 individually without sintering. For example, when these are sintered, there is a risk that foreign matters may adhere depending on the surrounding environment during sintering. If sintering is performed as it is, foreign substances are sandwiched between the members. Even if the sintered structure is washed before use, foreign matter is difficult to fall off, and it may be suddenly discharged during use. Therefore, it is possible to provide a good filter system with no foreign matter adhering by separately cleaning the filter 8, the mesh 19, and the support layer 15 to remove the attached foreign matter and combining them in the housing in a high clean environment. There is a case. Further, the mesh 19 may be washed and reused after use, or may be disposable.

  Next, the flow of the fluid to be filtered will be described. FIG. 6A is a schematic diagram showing a flow when, for example, a filter support means having no diffusion layer is used. FIG. 6B is a schematic diagram showing a flow when the filter support means of FIG. 5 which is another preferred form of the filter support means arranged in the filter of the present invention is used.

  In FIG. 6A, which is a schematic diagram showing the flow when using the conventional filter support means having no diffusion layer, the fluid to be filtered flowing into the filter 8 is not present because there is no diffusion layer. As shown by the streamline 83, it cannot pass through the filtration area of the entire filter plane. That is, in the area of the contact region 17, a staying portion in which the fluid to be filtered soaks into the filter 8 but gets wet but does not flow is formed. As a result, it is understood that a sufficient filtration area cannot be secured on the filter plane and it is difficult to increase the filtration flow rate. In addition, when the pressure due to liquid feeding is applied to the filter 8, the deformation of the filter 8 does not occur in the contact region 17. However, if the through-hole 13 is extremely large, for example, the filter 8 falls into the through-hole 13 due to the pressure. There is a disadvantage that the opening opens.

  In FIG. 6B, which is a schematic diagram showing the flow when the filter support means of the present invention is used, the fluid to be filtered can diffuse in a direction parallel to the diffusion layer 14 because there is the diffusion layer 14 arranged. Therefore, the fluid to be filtered flowing into the filter 8 can pass through the filtration area of the entire filter plane as indicated by the flow line 83, so that the filtration flow rate can be easily increased. Further, even when the pressure due to liquid feeding is applied to the filter 8, the contact region 17 of the mesh 19 is supported by the support layer 15, so that the filter 8 is not deformed. In the through-hole 13, for example, even when the through-hole 13 is very large, the mesh 19 is present, so that the filter 8 can be supported even at the through-hole 13 portion, and no drop occurs.

  Next, the shape of the filter 1 shown in FIGS. The filter 1 may include a first support holder 20 in the inflow chamber 4 of the inflow housing 6 and a second support holder 25 in the outflow chamber 5 of the outflow housing 7. .

  Here, the region of the filter in which the inflow chamber 4 and the outflow chamber 5 are in contact with the filter 8 is defined as an effective filtration region. Although the inflow chamber 4 has a substantially cylindrical shape in the filter 1 shown in FIG. 1, the fluid to be filtered flowing in from the inlet 2 flows without stagnation and can be smoothly expanded to the effective filtration region of the filter 8. Any shape can be used. For example, it may have a substantially truncated cone shape that gradually expands from the inlet 2 toward the effective filtration region, and is not limited to that shown in FIG. Here, the effective filtration region refers to a region in the filter 1 where the fluid to be filtered can be filtered, and does not include a portion sandwiched between the inflow housing 6 and the outflow housing 7 of the filter 8. Therefore, when the inflow chamber 4 and the outflow chamber 5 have different filter areas in contact with the filter 8, the smaller area of the area of the filter 8 in contact with the filter 8 is an effective filtration area. However, in this case, since the fluid to be filtered may stay in the inflow chamber 4 or the outflow chamber 5, the regions of the filter 8 where the inflow chamber 4 and the outflow chamber 5 are in contact with the filter 8 are substantially the same. Is preferred. Note that the fluid to be filtered is a fluid to be filtered and is, for example, a coating liquid, blood, sludge, or the like, but is not limited thereto.

  In the filter 1 shown in FIG. 1, the outflow chamber 5 has a substantially cylindrical shape. However, the fluid to be filtered in the effective filtration region immediately after passing through the filter 8 flows without staying, and toward the outlet 3. Any shape that can be smoothly narrowed is acceptable. For example, it may have a substantially truncated cone shape that gradually narrows from the effective filtration area toward the outlet 3, and is not limited to that shown in FIG.

  The position and direction of the inflow port 2 and the outflow port 3 may be any depending on the connection with other equipment or piping to the filter 1, but it is preferable that the fluid to be filtered does not stay. For example, when the inflow chamber 4 or the outflow chamber 5 has a substantially truncated cone shape, the inflow port 2 or the outflow port 3 preferably communicates with the filter 8 in the inflow chamber 4 or the outflow chamber 5 at the most distant position. This is not necessarily the case.

  The filter 1 uses an O-ring 10 to prevent liquid leakage. For example, a material such as nitrile rubber, fluorine rubber, silicon rubber, or acrylic rubber is used for the O-ring for preventing liquid leakage, but it is selected depending on the characteristics of the fluid to be filtered and the use conditions of the filter 1. Any other than those shown here may be used. Further, the filter 1 uses the O-ring 10 for preventing liquid leakage, but other liquid leakage preventing materials, sealing materials, etc. may be used as long as leakage can be prevented. There is no particular limitation.

  Next, the coating device provided with the filter according to the present invention will be described with reference to the drawings. FIG. 8 is a schematic configuration diagram of a coating apparatus including the filter of the present invention. The coating apparatus shown in FIG. 8 can be particularly preferably applied to, for example, a phosphor coating process in a plasma display panel member. That is, it is suitable for applying a phosphor paste containing phosphor powder that emits light in any of three colors of R (red), G (green), and B (blue) to an uneven substrate for a plasma display panel. Can be used.

  The coating apparatus 60 shown in FIG. 8 includes the filter 1 according to the present invention, a coating liquid container 62 for storing a coating liquid such as a phosphor paste, a table 64 for fixing the substrate 63, and the coating liquid 61 on the substrate 63. A coating head 65 for coating, and a moving means (not shown) for relatively moving the table 64 and the coating head 65 three-dimensionally are provided.

  In the case where the substrate to be coated is the back plate of the plasma display, the coating head has a discharge opening for completing the coating in one or a plurality of coating operations for all desired grooves formed on the substrate. Are preferably arranged in a substantially straight line. In the case of a back plate of a plasma display, it is preferable to apply a coating liquid containing phosphor powder of any one color of R, G, and B. In that case, the coating head corresponds to the number of coatings and the groove to be coated. The discharge openings 66 are provided at a number and a pitch.

  The shape of the discharge opening 66 is not particularly limited, and may be a round hole shape or a long hole shape as long as it can be stably applied to the uneven substrate. In the case of a concavo-convex substrate for a plasma display panel, the opening area per discharge opening 66 is preferably 0.04 mm 2 or less in consideration of the size of the groove and the amount of phosphor paste filled in the groove. .

  The coating head 65 has a manifold portion 67 for storing the coating liquid 61 therein, and a pipe 68 for supplying the coating liquid 61 is connected to the opposite side of the pipe 68 to the filter 1 according to the present invention. The coating liquid container 62 is connected via an open / close valve 69 that controls the supply of the coating liquid. Further, a pipe 70 for supplying pressurized gas for discharging the coating liquid 61 from the discharge opening 66 is connected to the coating head 65, and the opposite end of the pipe 70 is connected to a pressurized gas switching valve 71. One is connected to a pressurized gas source 73 having a desired pressure, and the other is open to the atmosphere.

  A pipe 70 for supplying pressurized gas for supplying the coating liquid 61 to the coating head 65 is connected to the coating liquid container 62, and the opposite end of the pipe 70 is connected via a pressurized gas switching valve 72. One is connected to a pressurized gas source 73 having a desired pressure, and the other is open to the atmosphere.

  In the coating apparatus 60 shown in FIG. 8, the coating liquid supply to the coating head 65 is performed by pressurizing the coating liquid container 62 by connecting the switching valve 72 to the pressurized gas source 73 with the switching valve 71 open to the atmosphere. The opening / closing valve 69 is opened. The coating liquid flowing out of the coating liquid container 62 flows into the filter 1 through the pipe 68, and the foreign substances are removed by the filter 8 selected according to the particle size of the foreign substances to be captured. At this time, in the filter according to the present invention shown in FIGS. 2 to 5, the coating liquid that has flowed in over the entire filter plane flows to the outflow side. In the diffusion layer 14, since the space portion communicates in the direction parallel to the filter, the fluid to be filtered sufficiently diffuses in the direction parallel to the filter along the space portion thus communicated, and then reaches the through-hole 13. And flows to the outflow chamber 5. Therefore, the inside of the filter 8 can effectively utilize the filtration area of the entire filter plane without the coating liquid remaining.

  Further, the filter 8 is in contact with the plurality of contact regions 17, thereby supporting the filter from the support layer 15 located on the outflow side, and preventing the filter 8 from being deformed by receiving pressure due to the liquid feeding. A predetermined amount of the coating liquid that has flowed out of the filter 1 is stored in the coating head 65 so as to leave a space above the manifold portion 67 of the coating head 65.

  In the coating apparatus 60, the coating liquid 61 is applied by supplying the coating liquid 61 from the coating liquid container 62 into the manifold portion 67 of the coating head 65 until reaching a predetermined amount, and then loading the substrate 63 below the coating head 65. The table 64 is moved in a predetermined direction, or the coating head 65 is moved in a predetermined direction above the substrate 63, and during that time, the coating liquid 61 is discharged from the coating head 65 and is applied onto the substrate 63. Apply.

  The discharge and stop of the coating liquid 61 are performed by switching the switching valve 71 to the pressurized gas source 73 with the open / close valve 69 closed and supplying pressurized gas to the space above the manifold portion 67.

  Normally, the phosphor paste used in the PDP phosphor coating process has a very high viscosity of several thousand to several tens of thousands mPa · s, but there is a problem even if such a high viscosity coating liquid is used. Absent.

  As described above, the filter according to the present invention and the coating apparatus including the filter ensure a sufficient filtration area on the filter plane, and easily increase the filtration flow rate without reducing the filtration accuracy of the filter. The time required for the liquid can be shortened.

  Next, according to the embodiment of the present invention, an example in the case where the coating liquid is applied to the back plate of the plasma display will be described.

Example 1
The material to be coated has a size of 990 × 600 mm, and the surface of the material to be coated is 3097 ribs with a height of 0.12 mm and a top width of 0.05 mm with a pitch of 0.3 mm (groove width of 0.25 mm). Was used. The coating liquid used was a phosphor paste containing a red phosphor powder having a viscosity of 50 Pa · s.

As the coating apparatus of the present invention, the coating apparatus 60 and the coating head 65 (made of stainless steel) shown in FIG. 8 were used. The coating head 65 has 1030 through-holes having a hole diameter of 0.1 mm (opening area 0.00785 mm ² ) and a discharge opening 66 arranged substantially in a straight line.

The filter 1 having the shape shown in FIG. 1 was used, and the filter 8 and the filter support means 9 were those shown in FIG. The inflow chamber 4 has a substantially cylindrical shape with an inner diameter of 122 mm and a height of 13 mm, and the outflow chamber 5 has a substantially cylindrical shape with an inner diameter of 122 mm and a height of 8.5 mm. In addition, the inner surfaces of the inflow chamber 4 and the outflow chamber 5 are smooth, and the substantially cylindrical end portions are smoothly curved. The inflow port 2 and the outflow port 3 have an inner diameter of 15 mm. The material of the inflow housing 6 and the outflow housing 7 is SUS304. The filter 8 sandwiched between the layers is a laminated structure, and is a sintered filter 11 made of SUS316. A # 500 mesh having a diameter of 141 mm, a filtration accuracy of 0.04 mm on the inflow side, a wire diameter of 0.025 mm, and an opening of 0.0258 mm. The filter 12 was arranged on the outflow side, and configured to supplement the fallen fibers of the sintered filter 11.
Further, the filters 8 were individually ultrasonically cleaned without being sintered, and the individual filters 8 having a higher degree of cleaning were assembled in a clean room.
Further, the filter support means 9 adjacent to the filter 8 has a thickness of 0.5 mm and a hole diameter of 3 mm arranged in a staggered manner with a pitch of 4 mm so as to open a large number so that the opening ratio is about 50%, and the material is SUS304. Further, the O-ring 10 has a designation number P132 of JIS B2401 (2005) and is made of silicon.
In the filter support means 9, a thickness of 0.25 mm is used as the diffusion layer 14.
That is, the depth of the recess 16 was set to 0.25 mm. Further, the width of the recess 16 was 0.3 mm, and eight locations were formed at a 45 ° pitch with the through hole 13 as the center. As a result, in the diffusion layer 14, the recess 16 and the through-hole 13 are in communication. The production was performed by etching.

  First, the coating liquid is supplied to the coating head 65. The supply of the coating liquid is fed from the coating liquid container 62 under a pressure of 0.45 MPa, passes through the open on-off valve 69, and the coating liquid from which foreign matter has been removed by the filter 1 is the manifold portion of the coating head 65. 67 until the liquid level from the discharge opening 66 reaches 25 mm. Then, the open / close valve 69 was closed and a pressure of 0.7 MPa was applied to the coating head 65, whereby the coating liquid 61 was discharged from the coating head 65 and applied to the substrate 63. Table 1 shows the average supply time of the coating liquid when this is repeated 1000 times. The supply time of the coating liquid was 6.4 sec on average. The discharge opening 66 could be applied without clogging even one hole with foreign matter, and without foreign matter entering the substrate 63 after application.

  When the substrate 63 coated with the phosphor paste was dried, a phosphor layer was formed in the recess formed by the partition walls, and the plasma display back plate was completed.

  The time allowed for supply in this coating process is 7.0 sec or less, and it was confirmed that the target could be sufficiently achieved.

Example 2
The filter support means has the shape having the diffusion layer 14 shown in FIG.

  The recess 16 has a plurality of grooves arranged in a lattice pattern and communicates with the through-hole 13. The depth of the recess 16 was 0.25 mm. The width of the recess 16 was 0.3 mm, and the pitch between the grooves was 0.5 mm. As a result, in the diffusion layer 14, the recess 16 and the through-hole 13 are in communication. The production was performed by etching.

  The result was 6.1 sec as shown in Table 1. The discharge opening 66 could be applied without clogging even one hole with foreign matter, and without foreign matter entering the substrate 63 after application.

  When the substrate 63 coated with the phosphor paste was dried, a phosphor layer was formed in the recess formed by the partition walls, and the plasma display back plate was completed.

  The time allowed for supply in this coating process is 7.0 sec or less, and it was confirmed that the target could be sufficiently achieved.

Example 3
The filter support means has the shape having the diffusion layer 14 shown in FIG.

  As the diffusion layer 14, a plain weave # 60 mesh having a wire diameter of 0.14 mm, an aperture of 0.283 mm, and an aperture ratio of 44.8% was used.

  The support layer 15 has a thickness of 0.5 mm, holes with a diameter of 3 mm and a staggered arrangement of 4 mm pitches, a large number of openings are made to have an opening ratio of about 50%, and the material is SUS304.

  The filter 8 was supported by the support layer 15 supporting the contact region 17 which is a portion in which the wires are interwoven.

  The result was 6.0 sec as shown in Table 1. The discharge opening 66 could be applied without clogging even one hole with foreign matter, and without foreign matter entering the substrate 63 after application.

  When the substrate 63 coated with the phosphor paste was dried, a phosphor layer was formed in the recess formed by the partition walls, and the plasma display back plate was completed. The time allowed for supply in this coating process is 7.0 sec or less, and it was confirmed that the target could be sufficiently achieved.

Comparative Example 1
As a conventional filter, the filter support means 9 has the shape shown in FIG. The diffusion layer 14 is not provided, and only the filter support means 9 is provided.

  The filter support means 9 has a thickness of 0.5 mm, a hole with a diameter of 3 mm and a staggered arrangement of 4 mm pitches, and a large number of holes are formed so that the opening ratio is about 50%. As a result, as shown in Table 1, it took 8.0 seconds. However, the discharge opening 66 could be applied without clogging even one hole with foreign matter and without foreign matter entering the substrate 63 after application.

  When the substrate 63 coated with the phosphor paste was dried, a phosphor layer was formed in the recess 16 formed by the partition walls, and the plasma display back plate was completed.

  The time allowed for supply in this coating process is 7.0 sec or less, and the supply time exceeds 1.0 sec. Therefore, the required number of plasma display back plates cannot be supplied to the subsequent process, and the target has not been achieved.

Comparative Example 2
As a conventional filter, the through hole 13 of the filter support means 9 has a stepped shape described in Patent Document 3, and the other configurations are the same as those of the first embodiment. The diffusion layer 14 was not provided, and the through hole 13 of the filter support means 9 had a diameter of 5 mm on the large diameter side and a diameter of 3 mm on the small diameter side. The filter support means has a thickness of 0.5 mm, the through-holes 13 are arranged in a staggered manner at a pitch of 4 mm, a large number of openings are made, and the opening ratio is about 50% on the small diameter side, and the material is SUS304.
As a result, as shown in Table 1, it took 7.6 seconds. Further, foreign matter was mixed in the substrate 63 after application.

  When the substrate 63 coated with the phosphor paste was dried, a phosphor layer was formed in the recess formed by the partition walls, and the plasma display back plate was completed.

  The time allowed for supply in this coating process is 7.0 sec or less, and the supply time exceeds 0.6 sec. Therefore, the required number of plasma display back plates cannot be supplied to the subsequent process, and the target has not been achieved.

  Although the large diameter side was provided and the contact area 17 was made small, it was found that the coating liquid was divided between the through-hole 13 and the through-hole 13 and the entire filter plane could not be utilized as an effective filtration area. Moreover, when the foreign material mixed in was analyzed, it turned out that it was a fallen fiber of the sintered filter 11. Since the # 500 mesh filter for dropping fiber supplementation fell and opened at the large-diameter portion, it is estimated that the dropping fiber was applied on the product.

Comparative Example 3
As a conventional filter, the filter support means 9 has the shape shown in FIG. 7, the through-hole 13 is enlarged, and the rest is the same as in the first embodiment. The diffusion layer 14 was not provided, and only the filter support means 9 was used. The filter support means 9 has a thickness of 0.5 mm, holes with a diameter of 5 mm and a staggered arrangement of 4 mm pitches, a large number of openings are made to have an opening ratio of about 62%, and the material is SUS304.
As a result, as shown in Table 1, it took 7.4 seconds. Further, foreign matter was mixed in the substrate 63 after application, and the discharge opening 66 was clogged with two holes.

  When the substrate 63 coated with the phosphor paste was dried, a phosphor layer was formed in the recess formed by the partition walls, and the plasma display back plate was completed.

The time allowed for supply in this coating process was 7.0 sec or less, and the supply time exceeded 0.4 sec. Therefore, the required number of plasma display back plates could not be supplied to the subsequent process, and the target was not achieved. Although the large-diameter through-hole 13 is provided and the contact area 17 is reduced, it can be seen that the coating liquid is divided between the through-hole 13 and the through-hole 13 and the entire filter plane cannot be used as an effective filtration area. became.
Further, when the foreign matter that had been mixed in and the foreign matter that had clogged the discharge opening 66 were analyzed, it was found that they were fallen fibers of the sintered filter 11.
Since the # 500 mesh filter for dropping fiber supplementation fell and opened at the large-diameter portion, it is estimated that the dropping fiber was applied on the product.

  INDUSTRIAL APPLICABILITY The present invention can be suitably used for plasma display panel coating apparatuses and can be applied to fields requiring high filtration accuracy, such as liquid crystal display color filter coating apparatuses.

DESCRIPTION OF SYMBOLS 1 Filter 2 Inflow port 3 Outlet 4 Inflow chamber 5 Outflow chamber 6 Inflow housing 7 Outflow housing 8 Filter 9 Filter support means 10 O-ring 11 Sintered filter 12 Mesh filter 13 Through-hole 14 Diffusion layer 15 Support layer 16 Recessed portion 17 Contact Region 19 Mesh 20 First support holder 25 Second support holder 60 Application device 61 Coating liquid 62 Container 63 Substrate 64 Table 65 Application head 66 Discharge opening 67 Manifold part 68 Pipe 69 Open / close valve 70 Pipe 71 Switching valve 72 Switching valve 73 Pressurized gas source 81 Opening portion 82 Space portion 83 Streamline

Claims (7)

An inflow housing having a fluid inlet and an inflow chamber communicating therewith,
An outflow housing having an outlet for fluid and an outflow chamber communicating therewith,
And a filter having a sheet-like filter arranged to partition the inflow chamber and the outflow chamber,
On the outflow side of the filter, filter support means having a plurality of through-holes leading from the filter side surface to the outflow side surface is arranged,
The filter support means is disposed on the filter side, and is provided with a diffusion layer for diffusing the fluid in a direction parallel to the filter, and a support layer disposed on the outflow side and for supporting the filter via the diffusion layer. The filter characterized by becoming. The filter according to claim 1, wherein the diffusion layer is provided with a plurality of recesses on at least a filter side of the filter support means, and the recesses communicate with each other in a direction parallel to the filter. The filter according to claim 1, wherein the diffusion layer is a mesh. The filter according to claim 3, wherein the filter is made of a fibrous filter medium, and a fiber diameter constituting the mesh is larger than a fiber diameter constituting the filter. The filter according to claim 3 or 4, wherein both the filter and the mesh are made of metal. It is a coating device which has a coating liquid container which stores a coating liquid, and a coating head connected to this, Comprising: The filter in any one of Claims 1-5 is provided between the said coating liquid container and the said coating head. An applicator characterized by. The coating apparatus according to claim 6, wherein the coating head has at least one ejection opening, and an opening area per ejection opening is 0.04 mm ² or less.

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