JP2011081231A - Substrate for liquid crystal device, method for manufacturing the liquid crystal device, the liquid crystal device and electronic device - Google Patents

Abstract

A liquid crystal device substrate, a liquid crystal device manufacturing method, a liquid crystal device, and an electronic apparatus capable of accurately aligning the alignment direction of liquid crystals.
A liquid crystal device includes an element substrate and a counter substrate disposed opposite to each other, a liquid crystal layer sandwiched between the element substrate and the counter substrate, and the element substrate and the counter substrate. An alignment film 34 and an alignment film 36 provided on the side facing each liquid crystal layer 40 are provided. The element substrate 10 is provided with a wire grid polarizer 30, and the counter substrate 20 is provided with a wire grid polarizer 32. The wire grid polarizer 30 and the wire grid polarizer 32 have a region overlapping each other in a plane and a region not overlapping each other in a plane.
[Selection] Figure 2

Description

  The present invention relates to a substrate for a liquid crystal device, a method for manufacturing the liquid crystal device, a liquid crystal device, and an electronic apparatus.

  In a projection display device such as a projector that projects an image on a screen, a liquid crystal device is used as a light modulation element that modulates light from a light source. A liquid crystal device usually has a configuration in which liquid crystal is sandwiched between a pair of substrates. An alignment film is provided on both surfaces of the pair of substrates, and the alignment film is subjected to an alignment process such as rubbing in order to regulate the alignment of liquid crystal molecules in a predetermined direction.

  In a liquid crystal device, the polarization state of transmitted light is controlled by changing the alignment direction of liquid crystal molecules in accordance with a driving voltage. Therefore, if the alignment directions of the alignment films of the pair of substrates are not accurately aligned with a predetermined direction based on the optical design, the optical characteristics (contrast and the like) of the liquid crystal device are deteriorated. As a method for improving such alignment accuracy, a method of providing an alignment mark on a substrate has been proposed (see, for example, Patent Document 1 and Patent Document 2).

  In the method described in Patent Document 1, a rubbing process is performed on the alignment film with reference to the alignment mark for polarizing plate attachment provided on both substrates. Further, an alignment mark is also provided on the polarizing plate, and alignment is performed at the time of attaching the polarizing plate with the alignment mark provided on the substrate.

  In the method described in Patent Document 2, the alignment film is rubbed and the substrates are bonded to each other based on the assembly alignment marks provided on both substrates. In addition, when the polarizing plate is attached, the alignment with the outer shape of the polarizing plate is performed based on the assembly alignment mark.

JP 2001-125092 A JP 2000-221461 A

  However, the method described in Patent Document 1 does not mention a specific alignment method when performing the rubbing process, and does not describe an alignment method between the substrates when bonding the substrates together. . Therefore, there is a problem that it is unclear whether the alignment direction can be accurately aligned. The method described in Patent Document 2 includes a step of inspecting positional accuracy using an assembly alignment mark and a rubbing mark formed during the rubbing process after the rubbing process, and the process becomes complicated. There is a problem. In addition, alignment is performed using the alignment mark as a mark when the substrates are bonded together, but there is a problem that it is not clear how accurately the alignment can be performed. Furthermore, in the methods described in both patent documents, there is a problem that it is difficult to accurately align the polarizing plate with respect to the substrate when there is a deviation between the outer shape of the polarizing plate or the alignment mark and the optical axis. is there.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A method for manufacturing a substrate for a liquid crystal device according to this application example includes a step of forming an optical element having a polarization separation function on a substrate, a step of forming an alignment film on the substrate, and the alignment of the substrate A step of performing an alignment process on the film, wherein the alignment process is performed based on an optical axis of the optical element.

  According to this method, the alignment processing direction in the alignment film is optically aligned with reference to the direction of the optical axis of the optical element formed on the substrate. For this reason, the alignment process of the alignment film of the substrate for a liquid crystal device can be accurately performed in a predetermined direction based on the optical design of the liquid crystal device. This also eliminates the need for a step of inspecting positional accuracy after the alignment process.

  Application Example 2 In the method for manufacturing a substrate for a liquid crystal device according to the application example, the step of performing the alignment process includes: a reference polarizer having an optical axis that is in a predetermined positional relationship with the direction in which the alignment process is performed; And a step of determining the relative positional relationship between the reference polarizer and the substrate in the opposing plane by disposing the substrate facing the reference polarizer so that the optical element and the optical element overlap in a plane. Including the step of determining the positional relationship between the reference polarizer and the substrate so that the optical axis of the optical element is in a predetermined direction with respect to the optical axis of the reference polarizer. The positional relationship may be adjusted.

  According to this method, the optical axis of the optical element formed on the substrate is aligned with a predetermined direction with the optical axis of the reference polarizer as a reference, thereby accurately aligning the direction in which the alignment process is performed on the substrate. be able to.

  Application Example 3 In the method for manufacturing a substrate for a liquid crystal device according to the application example, the predetermined direction is parallel or orthogonal to the optical axis of the optical element with respect to the optical axis of the reference polarizer. It may be a direction.

  According to this method, since the intensity of light transmitted through the optical element and the reference polarizer is aligned in the maximum or minimum direction, the direction in which the alignment process is performed on the substrate can be more easily and accurately aligned. it can.

  Application Example 4 A method for manufacturing a liquid crystal device according to this application example is a method for manufacturing a liquid crystal device including a pair of substrates disposed to face each other and a liquid crystal layer sandwiched between the pair of substrates. A method of preparing the pair of substrates manufactured using the method for manufacturing a substrate for a liquid crystal device described above, and the optical elements formed on the pair of substrates overlapping each other in a plane. A step of arranging the pair of substrates to face each other, a step of determining a relative positional relationship in the plane of the pair of substrates facing each other, and a step of bonding the pair of substrates to each other. In the step of determining the positional relationship, the positional relationship between the pair of substrates is adjusted so that the optical axis of the other optical element is in a predetermined direction with respect to the optical axis of the one optical element. It is characterized by.

  According to this method, each alignment film of the pair of substrates is subjected to an alignment process in a predetermined direction based on the optical design of the liquid crystal device with reference to the optical axis of the optical element formed on the substrates. . In the step of determining the positional relationship between the pair of substrates, the substrates are aligned with respect to the optical axis of the optical element provided on each substrate. Therefore, the alignment treatment of the alignment film and the alignment of the substrates are optically performed with reference to the optical axis of the same optical element. Therefore, the alignment direction of the liquid crystal in the liquid crystal device is determined based on the optical design of the liquid crystal device. Can be accurately adjusted to the direction. As a result, a liquid crystal device having more excellent optical characteristics (contrast and the like) can be manufactured.

  Application Example 5 In the method of manufacturing a liquid crystal device according to the application example, the predetermined direction is parallel or orthogonal to the optical axis of the other optical element with respect to the optical axis of the one optical element. It may be the direction to do.

  According to this method, since the intensity of the light transmitted through one optical element and the other optical element is aligned in the maximum or minimum direction, alignment between the substrates can be easily performed with higher accuracy.

  Application Example 6 In the method of manufacturing a liquid crystal device according to the application example, the method further includes a step of disposing a polarizing plate outside at least one of the pair of bonded substrates, and the step of disposing the polarizing plate. Determining a relative positional relationship between the pair of substrates and the polarizing plate so that the optical axis of the polarizing plate is in a predetermined direction with respect to the optical axis of the optical element; Also good.

  According to this method, in the step of arranging the polarizing plate, the positional relationship between the substrate and the polarizing plate is determined so that the optical axis of the polarizing plate is in a predetermined direction with respect to the optical axis of the optical element. Accordingly, the alignment treatment of the alignment film, the alignment between the substrates, and the alignment of the polarizing plate are optically performed with reference to the optical axis of the same optical element. It is possible to accurately match a predetermined direction based on the optical design of the apparatus.

  Application Example 7 In the method of manufacturing a liquid crystal device according to the application example, the predetermined direction is a direction in which the optical axis of the polarizing plate is parallel or orthogonal to the optical axis of the optical element. May be.

  According to this method, since the intensity of the light transmitted through the optical element and the polarizing plate is adjusted to the maximum or minimum, the alignment between the substrate and the polarizing plate can be easily performed with higher accuracy.

  Application Example 8 A liquid crystal device according to this application example includes a pair of substrates disposed to face each other, a liquid crystal layer sandwiched between the pair of substrates, and the liquid crystal layer of each of the pair of substrates. And an optical element having a polarization separation function is provided on at least one of the pair of substrates.

  According to this configuration, alignment processing can be performed on the alignment film in a predetermined direction based on the optical design of the liquid crystal device with respect to the optical axis of the optical element provided on the substrate in at least one of the substrates. In the step of determining the positional relationship between the pair of substrates, the substrates can be aligned with respect to the optical axis of the optical element provided on one substrate. Therefore, the alignment process of the alignment film and the alignment of the substrates are optically performed with reference to the direction of the optical axis of the same optical element, so that the alignment direction of the liquid crystal in the liquid crystal device can be changed to the optical design of the liquid crystal device. It is possible to accurately match the predetermined direction based on the above. As a result, a liquid crystal device having excellent optical characteristics (such as contrast) can be provided.

  Application Example 9 In the liquid crystal device according to the application example, the optical element may be provided on each of the pair of substrates.

  According to this configuration, the alignment process can be accurately performed on the alignment film with respect to the optical axis of the optical element for each of the pair of substrates. In the step of determining the positional relationship between the pair of substrates, the positional relationship between the substrates can be optically aligned based on the optical axis of each optical element. Thereby, the alignment direction of the liquid crystal in the liquid crystal device can be aligned with higher accuracy.

  Application Example 10 In the liquid crystal device according to the application example described above, the optical elements provided on the pair of substrates may have regions that overlap in a plane.

  According to this configuration, the substrates can be accurately aligned by irradiating light onto a region where the optical elements provided on the pair of substrates are planarly overlapped and measuring the intensity of the transmitted light. it can.

  Application Example 11 In the liquid crystal device according to the application example described above, the optical element provided on the pair of substrates may have a region that overlaps in a plane and a region that does not overlap in a plane. Good.

  According to this configuration, when a pair of substrates are aligned so that the optical axes of the optical elements are orthogonal to each other, light does not transmit in a region where the optical elements overlap each other in a plane, but the optical elements are planar. The light is transmitted in a region that does not overlap. For this reason, when optically aligning other constituent members with respect to a pair of substrates, in the region where the optical elements do not overlap with each other in plane, the configuration is based on the optical axis of the optical element of one substrate. The member can be aligned.

  Application Example 12 The liquid crystal device according to the application example may further include a polarizing plate disposed outside at least one of the pair of substrates.

  According to this configuration, when the polarizing plate is disposed, the optical axis of the polarizing plate can be optically aligned with respect to the optical axis of the optical element of the substrate. For this reason, it is possible to eliminate the influence on the alignment due to the deviation of the positional relationship between the outer shape of the polarizing plate and the optical axis. Further, since the alignment process of the alignment film, the alignment of the substrates and the alignment of the polarizing plate can be optically performed with reference to the direction of the optical axis of the same optical element, the polarizing plate with respect to the alignment direction of the liquid crystal The direction of the optical axis can be accurately aligned with a predetermined direction based on the optical design of the liquid crystal device.

  Application Example 13 In the liquid crystal device according to the application example described above, the optical element may be disposed in a region that does not overlap the liquid crystal layer in a planar manner.

  According to this configuration, since the optical element is disposed in a region that does not overlap the liquid crystal layer in a plan view, even if the optical element on the substrate is irradiated with light after sealing the liquid crystal between the pair of substrates, the optical element The liquid crystal is not interposed on the optical path of the light passing through. For this reason, when the liquid crystal is sealed and other components such as the polarizing plate are optically aligned with reference to the optical axis of the optical element, the optical influence of the liquid crystal can be eliminated.

  Application Example 14 An electronic apparatus according to this application example includes the liquid crystal device described above.

  According to this configuration, since the electronic apparatus includes the above-described liquid crystal device, display quality such as contrast can be improved.

The schematic diagram which shows schematic structure of the projection type display apparatus as an example of an electronic device. 1 is a schematic configuration diagram illustrating a configuration of a liquid crystal panel according to a first embodiment. FIG. 3 is an equivalent circuit diagram illustrating an electrical configuration of the liquid crystal panel according to the first embodiment. The figure explaining the structure of the optical element with which the liquid crystal panel which concerns on 1st Embodiment is provided. The figure explaining the optical design conditions of the liquid crystal light valve concerning a 1st embodiment. 3 is a flowchart showing a method for manufacturing the liquid crystal panel according to the first embodiment. The figure explaining the orientation processing method which concerns on 1st Embodiment. The figure explaining the alignment method of the board | substrates which concern on 1st Embodiment. The figure explaining the alignment method of the board | substrates which concern on 1st Embodiment. The figure explaining the optical design conditions of the liquid crystal light valve concerning a 2nd embodiment. The figure explaining the orientation processing method which concerns on 2nd Embodiment. The schematic block diagram which shows the structure of the liquid crystal display which concerns on 3rd Embodiment. 9 is a flowchart showing a method for manufacturing a liquid crystal display according to a third embodiment. The figure explaining the alignment method of the polarizing plate which concerns on 3rd Embodiment. The figure explaining the structure of the optical element with which the liquid crystal panel which concerns on 4th Embodiment is provided.

  The present embodiment will be described below with reference to the drawings. In each of the drawings to be referred to, in order to show the configuration in an easy-to-understand manner, the layer thickness, dimensional ratio, angle, and the like of each component are appropriately changed.

<Projection type display device>
First, a schematic configuration of a projection display device (liquid crystal projector) will be described as an example of an electronic apparatus including a liquid crystal light valve as a liquid crystal device according to the present embodiment. FIG. 1 is a schematic diagram illustrating a schematic configuration of a projection display device as an example of an electronic apparatus.

  As shown in FIG. 1, the projection display apparatus 100 according to the present embodiment includes a light source 110, two dichroic mirrors 121 and 122, three reflection mirrors 123, 124, and 125, and a light incident side. A lens 126, a relay lens 127, a lens 128 on which light is emitted, three liquid crystal light valves 1 as liquid crystal devices, a cross dichroic prism 130, and a projection lens 132 are provided.

  The projection display device 100 corresponds to each color light of red (R) light, green (G) light, and blue (B) light, and three liquid crystal light valves 1R, 1G, 1B (hereinafter, corresponding color lights). Are also simply referred to as the liquid crystal light valve 1). Each liquid crystal light valve 1 includes a liquid crystal panel 2, a polarizing plate 45 disposed on the light incident side of the liquid crystal panel 2, and a polarizing plate 46 disposed on the light emitting side of the liquid crystal panel 2. I have. The liquid crystal light valve 1 functions as a light modulation unit that modulates a light beam according to image information.

  The liquid crystal panel 2 and the polarizing plates 45 and 46 are fixed to a predetermined positional relationship, for example, by being guided by a frame or the like. At least one of the polarizing plates 45 and 46 may be attached to the liquid crystal panel 2. Further, a retardation plate, dustproof glass, or the like may be further provided between the liquid crystal panel 2 and the polarizing plates 45 and 46.

  The light source 110 includes a lamp 111 and a reflector 112. The lamp 111 is, for example, a high pressure mercury lamp. The reflector 112 reflects the light emitted from the lamp 111 in the direction of the dichroic mirror 121. The dichroic mirror 121 transmits red (R) light out of the light flux from the light source 110 and reflects blue (B) light and green (G) light. The red light branched by passing through the dichroic mirror 121 is reflected by the reflection mirror 125 and enters the liquid crystal light valve 1R for red light.

  Of the light reflected by the dichroic mirror 121, the green light is branched by being reflected by the dichroic mirror 122, and enters the liquid crystal light valve 1G for green light. On the other hand, blue light out of the light reflected by the dichroic mirror 121 is branched by passing through the dichroic mirror 122 and enters the light guide unit 120.

  The light guide unit 120 includes a relay lens system including a lens 126, a relay lens 127, and a lens 128. The light guide unit 120 is provided in order to prevent a decrease in light use efficiency due to light divergence or the like because the length of the optical path of blue light is longer than the length of the optical path of other color lights in the projection display device 100. ing. The blue light transmitted through the dichroic mirror 122 enters the liquid crystal light valve 1B for blue light via the light guide means 120.

  The three color lights of R, G, and B modulated by each liquid crystal light valve 1 enter the cross dichroic prism 130. The cross dichroic prism 130 is an optical element that combines the optical images modulated by the liquid crystal light valves 1 to form a color image. The cross dichroic prism 130 has a configuration in which four right-angle prisms are bonded together, and a dielectric multilayer film is formed on a substantially X-shaped interface where the right-angle prisms are bonded together. The dielectric multilayer film formed at one of the substantially X-shaped interfaces reflects red light, and the dielectric multilayer film formed at the other interface reflects blue light. By these dielectric multilayer films, the red light and the blue light are bent and aligned with the traveling direction of the green light, whereby the three color lights are combined to form light representing a color image.

  The light synthesized by the cross dichroic prism 130 is enlarged and projected on the screen 140 by the projection lens 132 which is a projection optical system. As a result, the image is enlarged and displayed on the screen 140.

  In such a projection display apparatus 100, it is desirable that the liquid crystal light valve 1 has more excellent optical characteristics (contrast and the like) in order to project a brighter color image on the screen 140 with good contrast.

(First embodiment)
<Configuration of liquid crystal light valve>
Next, the configuration of the liquid crystal light valve according to the first embodiment will be described with reference to the drawings. FIG. 2 is a schematic configuration diagram showing the configuration of the liquid crystal panel according to the first embodiment. Specifically, FIG. 2A is a plan view, and FIG. 2B is a cross-sectional view taken along the line AA ′ in FIG. FIG. 3 is an equivalent circuit diagram showing an electrical configuration of the liquid crystal panel according to the first embodiment. FIG. 4 is a diagram illustrating a configuration of an optical element included in the liquid crystal panel according to the first embodiment. Specifically, FIG. 4A is a perspective view illustrating a schematic configuration of the optical element, and FIG. 4B is a cross-sectional view taken along line BB ′ in FIG. FIG. 5 is a diagram for explaining optical design conditions of the liquid crystal light valve according to the first embodiment.

  As shown in FIGS. 2A and 2B, the liquid crystal panel 2 according to the first embodiment includes an element substrate 10 and a counter substrate 20 as a pair of substrates arranged to face each other, and the element substrate 10. And a liquid crystal layer 40 sandwiched between the counter substrate 20 and the counter substrate 20. The element substrate 10 and the counter substrate 20 are, for example, transparent substrates such as quartz, and are bonded to each other by a sealing material 41. In a region surrounded by the sealing material 41, a pixel region 3 that performs light modulation in the liquid crystal panel 2 is disposed. The liquid crystal panel 2 is an active matrix type having a plurality of pixels 4 arranged in a matrix in the pixel region 3.

  As shown in FIG. 2B, on the liquid crystal layer 40 side of the element substrate 10, a pixel electrode 16 constituting each pixel 4 and a TFT (Thin Film Transistor) as a switching element for driving and controlling the pixel electrode 16. Transistor) 19 is provided. The pixel electrode 16 is made of a translucent electrode such as ITO (Indium Tin Oxide). An alignment film 34 is provided on the side of the element substrate 10 facing the liquid crystal layer 40 so as to cover the pixel electrodes 16 and the like. The alignment film 34 is made of, for example, a polyimide resin. The surface of the alignment film 34 is subjected to an alignment process in a predetermined direction by, for example, a rubbing process.

  The light shielding layers 22 and 24 are provided on the counter substrate 20 on the liquid crystal layer 40 side. The light shielding layer 22 partitions the area of each pixel 4 in a lattice shape. The light shielding layer 24 is disposed in the periphery of the pixel region 3. The light shielding layers 22 and 24 are made of, for example, a metal such as chromium (Cr) having a light shielding property, an inorganic compound such as a metal oxide, or an organic compound having a light shielding property. A common electrode 18 is provided so as to cover the light shielding layers 22 and 24 and to overlap the pixel region 3 in a planar manner. The common electrode 18 is made of a translucent electrode such as ITO.

  An alignment film 36 is provided on the side of the counter substrate 20 facing the liquid crystal layer 40 so as to cover the common electrode 18. The alignment film 36 is made of, for example, polyimide resin. The surface of the alignment film 36 is subjected to an alignment process in a predetermined direction by a rubbing process or the like. Note that the alignment film 34 and the alignment film 36 are disposed in a region surrounded by the sealing material 41.

  As shown in FIG. 2A, the sealing material 41 that joins the element substrate 10 and the counter substrate 20 is provided in a frame shape around the pixel region 3. The sealing material 41 is made of, for example, a thermosetting or ultraviolet curable adhesive. Although illustration is omitted, the sealing material 41 has an injection port in which a part of the side portion is missing. From this inlet, liquid crystal constituting the liquid crystal layer 40 is injected into a space surrounded by the element substrate 10, the counter substrate 20, and the sealing material 41, and sealed with a sealing material.

  The element substrate 10 is slightly larger than the counter substrate 20, and has one side protruding from the counter substrate 20. A data line driving circuit 13 and an external connection terminal 11 are provided on this one side. The external connection terminal 11 has a plurality of terminals connected to the outside. Inside the sealing material 41 of the element substrate 10, a pair of scanning line driving circuits 15 and a wiring 15 a connecting the pixel region 3 are provided. The light shielding layer 24 of the counter substrate 20 is provided so as to overlap the scanning line driving circuit 15 in a planar manner.

  Vertical conduction portions 42 are disposed at four corner portions of the sealing material 41 located between the element substrate 10 and the counter substrate 20. Although not shown, each vertical conduction part 42 is provided with a vertical conduction material and a vertical conduction terminal. By the vertical conduction portion 42, the common electrode 18 on the counter substrate 20 side is electrically connected to the element substrate 10 side and is also electrically connected to a designated terminal of the external connection terminals 11.

  As shown in FIGS. 2A and 2B, a wire grid polarizer 30 as an optical element is provided on the periphery of the element substrate 10. For example, the wire grid polarizer 30 is disposed on the surface of the element substrate 10 facing the counter substrate 20. Further, a wire grid polarizer 32 as an optical element is provided on the peripheral edge of the counter substrate 20. For example, the wire grid polarizer 32 is disposed on the surface of the counter substrate 20 facing the element substrate 10.

  The wire grid polarizers 30 and 32 are disposed outside the sealing material 41. That is, the wire grid polarizers 30 and 32 are disposed in a region that does not overlap the liquid crystal layer 40 in a planar manner. Further, the wire grid polarizers 30 and 32 have a region that overlaps with each other in a plane and a region that does not overlap with each other in a plane. The wire grid polarizers 30 and 32 have a polarization separation function. The configuration of the wire grid polarizers 30 and 32 will be described later.

  As shown in FIG. 3, in the pixel region 3 of the liquid crystal panel 2, the scanning lines 12 and the data lines 14 are formed so as to intersect each other, and the pixels 4 correspond to the intersections of the scanning lines 12 and the data lines 14. Is provided. Each pixel 4 is provided with a pixel electrode 16 and a TFT 19 for driving and controlling the pixel electrode 16.

  A source electrode (not shown) of the TFT 19 is electrically connected to a data line 14 extending from the data line driving circuit 13. Data signals S1, S2,..., Sn are supplied to the data line 14 from the data line driving circuit 13 in a line sequential manner. A gate electrode (not shown) of the TFT 19 is a part of the scanning line 12 extending from the scanning line driving circuit 15. The scanning signals G1, G2,..., Gm are supplied to the scanning lines 12 from the scanning line driving circuit 15 in line sequence. A drain electrode (not shown) of the TFT 19 is electrically connected to the pixel electrode 16.

  The data signals (pixel signals) S1, S2,..., Sn are written to the pixel electrode 16 through the data line 14 at a predetermined timing by turning on the TFT 19 for a certain period. The pixel signal of a predetermined level written in the liquid crystal layer 40 through the pixel electrode 16 in this way is held for a certain period by the liquid crystal capacitance formed between the common electrode 18 (see FIG. 2B). In order to prevent leakage of the held pixel signals S1, S2,..., Sn, a storage capacitor 17a is formed between the capacitor line 17 formed along the scanning line 12 and the pixel electrode 16, Arranged in parallel with the liquid crystal capacitor.

<Configuration of wire grid polarizer>
Next, the configuration of the wire grid polarizers 30 and 32 will be described. As shown in FIGS. 4A and 4B, the wire grid polarizers 30 and 32 include a plurality of metal reflection films 31 arranged in a stripe shape. The metal reflection film 31 has a linear shape, and is disposed on the element substrate 10 in the wire grid polarizer 30 and substantially parallel to the counter substrate 20 in the wire grid polarizer 32. The metal reflection film 31 is made of a metal having high light reflectivity, for example, aluminum. The material of the metal reflective film 31 may be APC (silver-palladium-copper alloy) or the like.

  The metal reflection films 31 are arranged at a predetermined pitch. The arrangement pitch of the metal reflection films 31 is set to be smaller than the wavelength of incident light, and is, for example, about 40 nm to 140 nm. The height of the metal reflective film 31 is, for example, about 100 nm. The width of the metal reflection film 31 is, for example, about 100 nm. The wire grid polarizers 30 and 32 can be formed in the process of forming the TFT 19 and the like by a semiconductor process. Therefore, the wire grid polarizers 30 and 32 are formed with the same accuracy as the TFT 19 or the like.

  The wire grid polarizers 30 and 32 have a function of separating incident light into reflected light and transmitted light having different polarization states. The wire grid polarizers 30 and 32 reflect a polarization component parallel to the extending direction of the metal reflection film 31 in the incident light and transmit a polarization component orthogonal to the extension direction of the metal reflection film 31. That is, the wire grid polarizers 30 and 32 have transmission axes 30a and 32a and reflection axes 30b and 32b as optical axes. As shown in FIG. 4A, the transmission axes 30 a and 32 a are orthogonal to the extending direction of the metal reflecting film 31, and the reflecting axes 30 b and 32 b are parallel to the extending direction of the metal reflecting film 31.

  The wire grid polarizers 30 and 32 are aligned when the alignment films 34 and 36 (see FIG. 2B) are subjected to an alignment process such as a rubbing process and when the element substrate 10 and the counter substrate 20 are bonded together. Used as a reference. That is, with reference to the transmission axes 30a and 32a of the wire grid polarizers 30 and 32, the direction in which the alignment films 34 and 36 are subjected to the alignment process and the relative positional relationship between the element substrate 10 and the counter substrate 20 are determined. The

The metal reflective film 31 may be formed directly on the element substrate 10 or the counter substrate 20 or may be formed on an insulating layer. Further, the metal reflection film 31 may be covered with a protective layer made of silicon oxide (SiO ₂ ) or the like.

<Optical design conditions for liquid crystal light valves>
Next, optical design conditions of the liquid crystal light valve according to the first embodiment will be described. As shown in FIG. 5A, the liquid crystal light valve 1 includes a liquid crystal panel 2, a polarizing plate 45, and a polarizing plate 46. The polarizing plate 45 is disposed on the counter substrate 20 side of the liquid crystal panel 2. The polarizing plate 46 is disposed on the element substrate 10 side of the liquid crystal panel 2. The light irradiated to the liquid crystal light valve 1 enters from the polarizing plate 45 side, passes through the liquid crystal panel 2 from the counter substrate 20 side to the element substrate 10 side, and is emitted from the polarizing plate 46 side.

  The liquid crystal panel 2 according to the first embodiment is a TN (Twisted Nematic) liquid crystal panel. The liquid crystal layer 40 is composed of liquid crystal having positive dielectric anisotropy. The alignment film 36 of the counter substrate 20 is subjected to an alignment process such as a rubbing process in an alignment direction 36a indicated by an arrow. The alignment film 34 of the element substrate 10 is subjected to an alignment process such as a rubbing process in an alignment direction 34a indicated by an arrow. As shown in FIG. 5B, the alignment direction 34a of the element substrate 10 and the alignment direction 36a of the counter substrate 20 in the liquid crystal panel 2 are orthogonal to each other.

  The polarizing plate 45 has a transmission axis 45a as an optical axis. The transmission axis 45a is, for example, parallel to the alignment direction 36a of the counter substrate 20. The polarizing plate 46 has a transmission axis 46a as an optical axis. The transmission axis 46 a is, for example, parallel to the alignment direction 34 a of the element substrate 10. Therefore, the transmission axis 45a of the polarizing plate 45 and the transmission axis 46a of the polarizing plate 46 are orthogonal to each other.

  As shown in FIG. 5A, in a state where no voltage is applied to the liquid crystal panel 2 (non-driving state), the liquid crystal molecules 40a existing in the vicinity of the interface with the alignment film 36 in the liquid crystal layer 40 are aligned in the major axis direction. Oriented along the direction 36a. The liquid crystal molecules 40a existing in the vicinity of the interface with the alignment film 34 are aligned so that the major axis direction is along the alignment direction 34a. Therefore, in the liquid crystal layer 40, the alignment is performed so that the major axis direction of the liquid crystal molecules 40a is twisted by 90 ° from the alignment film 36 on the light incident side toward the alignment film 34 on the light emission side. Is regulated.

  The light irradiated to the liquid crystal light valve 1 is converted into linearly polarized light parallel to the transmission axis 45a (alignment direction 36a) by the polarizing plate 45 and enters the liquid crystal panel 2 from the counter substrate 20 side. The linearly polarized light parallel to the transmission axis 45a incident on the liquid crystal panel 2 is rotated by 90 ° by the twist of the liquid crystal molecules 40a in the liquid crystal layer 40 in a non-driven state, and is converted into linearly polarized light parallel to the alignment direction 34a (transmission axis 46a). The liquid crystal panel 2 is emitted from the element substrate 10 side.

  The linearly polarized light parallel to the transmission axis 46 a passes through the polarizing plate 46 as it is and is emitted from the liquid crystal light valve 1. A display mode based on an optical design that provides a bright display state in which light is transmitted in the non-driven state is referred to as normally white. Note that the display mode (optical design) is not limited to this, and may be normally black which is a dark display state where light is not transmitted in the non-driven state.

  On the other hand, although not shown, when a voltage is applied to the liquid crystal panel 2 (driving state), the liquid crystal molecules 40a are arranged so that the major axis direction rises, and the major axis direction of the liquid crystal molecules 40a is the optical axis of the incident light. The alignment state changes so as to be parallel to the surface. Accordingly, the linearly polarized light parallel to the transmission axis 45a incident on the liquid crystal panel 2 is emitted from the liquid crystal panel 2 as it is, but is not transmitted through the polarizing plate 46, so that a dark display state is obtained.

  In the present embodiment, the predetermined alignment directions 34 a and 36 a based on the optical design of the alignment films 34 and 36 are directions parallel or orthogonal to the transmission axes 30 a and 32 a of the wire grid polarizers 30 and 32. In the liquid crystal panel 2, the optical design conditions such as the alignment directions 34 a and 36 a of the alignment films 34 and 36 and the transmission axes 45 a and 46 a of the polarizing plates 45 and 46 are not limited to the above forms.

<Manufacturing method of liquid crystal panel>
Next, a manufacturing method of the liquid crystal panel according to the first embodiment will be described with reference to the drawings. FIG. 6 is a flowchart showing a method for manufacturing the liquid crystal panel according to the first embodiment. FIG. 7 is a diagram for explaining the alignment processing method according to the first embodiment. Specifically, FIG. 7A is a perspective view showing the rubbing apparatus, and FIG. 7B is a cross-sectional view taken along the line CC ′ in FIG. 7A. 8 and 9 are diagrams for explaining a method of aligning substrates according to the first embodiment.

  6, steps P11 to P13 and steps P21 to P23 are steps for manufacturing the substrate for the liquid crystal panel 2, that is, the element substrate 10 and the counter substrate 20. Steps P11 to P13 are steps for manufacturing the element substrate 10, and Steps P21 to P23 are steps for manufacturing the counter substrate 20. The process of manufacturing the element substrate 10 and the process of manufacturing the counter substrate 20 are performed independently. Process P31 to process P33 are processes for manufacturing the liquid crystal panel 2 by combining the element substrate 10 and the counter substrate 20. In addition, a well-known technique is applicable to the process which is not explained in full detail among these processes.

<Manufacturing process of liquid crystal panel substrate>
First, a process for manufacturing the element substrate 10 will be described. In the process P11, the TFT 19, the wire grid polarizer 30 as an optical element, the pixel electrode 16 and the like are formed on the element substrate 10. The wire grid polarizer 30 is formed in a process of forming the TFT 19 and the like by a semiconductor process.

  More specifically, a metal thin film made of a material for forming the wire grid polarizer 30 is formed on the element substrate 10, and the metal thin film is patterned using, for example, a photolithography method, and arranged in a stripe shape. A wire grid polarizer 30 including a plurality of metal reflection films 31 is formed. Thereby, the wire grid polarizer 30 can be formed with the same accuracy as the TFT 19 and the like, and without complicating the manufacturing process. As a method of forming the wire grid polarizer 30, a two-beam interference exposure method using a laser beam, an electron beam exposure method, or the like may be used.

  Subsequently, in Step P12, for example, a polyimide resin is applied by spin coating or the like to the surface of the element substrate 10 on which these elements, electrodes, and the like are formed, thereby forming the alignment film 34. In Step P13, the surface of the alignment film 34 is subjected to an alignment process in the alignment direction 34a shown in FIG. In this embodiment, alignment processing is performed by a rubbing method using the rubbing apparatus 200.

<Rubbing device>
First, the structure of the rubbing apparatus 200 used for manufacturing the liquid crystal panel substrate according to the present embodiment will be described. As illustrated in FIGS. 7A and 7B, the rubbing apparatus 200 includes a stage 210, a light source 216, a light receiving unit 218, and a rubbing processing unit 220. The upper surface of the stage 210 has a rectangular shape, for example. The stage 210 includes a rotary stage 212 and a reference polarizer 214.

  The rotary stage 212 has, for example, a circular shape and has an upper surface that is slightly smaller in plan than the stage 210, and the thickness thereof is thinner than the thickness of the stage 210. The stage 210 is provided with a concave portion corresponding to the rotary stage 212 on the upper surface side, and the rotary stage 212 is disposed in the concave portion. The upper surface of the stage 210 and the upper surface of the rotary stage 212 are substantially flat surfaces.

  The rotation stage 212 has a rotation axis (not shown) at the center of the circular upper surface, and can rotate around the rotation axis as indicated by a rotation arrow R1 in FIG. In addition, at least a portion around the region of the rotary stage 212 that overlaps the reference polarizer 214 in a plane is made of a light-transmitting material. Although not shown, the rotary stage 212 has a suction hole and a suction path connected to a suction device, and the element substrate 10 (or the counter substrate 20) for performing an alignment process is formed on the alignment film 34 (on the upper surface of the rotary stage 212). It is placed and fixed by suction (not shown).

  The reference polarizer 214 is provided on the stage 210 and is disposed so as to be parallel to the upper surface of the rotary stage 212 at a position overlapping the rotary stage 212 in a plane. The reference polarizer 214 is a polarizing plate, for example, and has a transmission axis (not shown) as an optical axis. The transmission axis of the reference polarizer 214 has a predetermined positional relationship, for example, a direction parallel or orthogonal to a moving direction D1 of the stage 210 described later. The reference polarizer 214 may be an optical element having a polarization separation function such as a wire grid polarizer.

  The element substrate 10 (or the counter substrate 20) placed on the rotation stage 212 is arranged so that the wire grid polarizer 30 (or the wire grid polarizer 32) overlaps the reference polarizer 214 in a plane. The reference polarizer 214 desirably has a sufficiently larger area than the wire grid polarizers 30 and 32. In addition, the reference polarizer 214 may be provided at a plurality of locations in a region that overlaps the rotation stage 212 of the stage 210 in a plane, or the reference polarizer 214 and the rotation stage 212 so as to overlap the entire region of the rotation stage 212 in a plane. They may have substantially the same size.

  Further, the reference polarizer 214 moves in the rotation direction in synchronization with the rotation of the rotary stage 212 while maintaining the direction of the transmission axis as a reference (predetermined positional relationship with respect to the movement direction D1 of the stage 210). It may be configured to. With such a configuration, even when the wire grid polarizer 30 (or the wire grid polarizer 32) is significantly moved in the rotation direction by the rotation stage 212, the reference polarizer 214 is planarly overlapped. can do.

  The light source 216 is disposed on the side opposite to the upper surface of the stage 210 so as to overlap the reference polarizer 214 in a plane. The light source 216 irradiates substantially parallel light in the direction of the reference polarizer 214. As the light source 216, for example, a lamp that emits light having a wavelength in the visible light region may be used, or a light emitting diode (LED), a laser diode, or the like may be used. A collimator lens may be disposed on the reference polarizer 214 side of the light source 216.

  Note that a portion of the stage 210 that overlaps the reference polarizer 214 and the light source 216 in plan view is a through hole, for example, so that the light irradiated from the light source 216 to the reference polarizer 214 is not blocked. A light source 216 may be provided in the through hole of the stage 210. In addition, a part or the whole of the stage 210 that overlaps the reference polarizer 214 and the light source 216 in a plan view may be made of a light-transmitting material.

  The light receiving unit 218 is disposed on the side opposite to the light source 216 of the stage 210. The light receiving unit 218 is located on the optical path of the light L1 that is irradiated from the light source 216 and passes through the reference polarizer 214 and the wire grid polarizer 30 (or the wire grid polarizer 32). The light receiving unit 218 has a function of measuring the intensity of the received light L1. For example, a photomultimeter may be used as the light receiving unit 218 to convert the intensity of the light L1 into an electrical signal and measure it. Alternatively, the luminance of light may be measured using a luminance meter or the like as the light receiving unit 218.

  Note that the stage 210 is arranged such that light emitted from the light source 216 is incident from the normal direction of the reference polarizer 214, that is, the normal direction of the element substrate 10 (or the counter substrate 20) placed on the rotary stage 212. It is desirable to arrange the light source 216 relative to the other. The positional relationship between the light source 216 and the light receiving unit 218 may be upside down in the drawing. The light source 216 and the light receiving unit 218 may be configured to move in the rotation direction in synchronization with the rotation of the rotary stage 212.

  The rubbing processing unit 220 includes a roller 222 and a rubbing cloth 224. The roller 222 has a cylindrical shape, and the length thereof is, for example, not less than the length of the long side of the element substrate 10 (or the counter substrate 20). The roller 222 is made of, for example, a metal material such as SUS or aluminum. The roller 222 is rotated about a rotation shaft 226 in a direction indicated by a rotation arrow R2 by a rotation drive mechanism (not shown) including a motor, a transmission, and the like. The rubbing cloth 224 is wound around the roller 222. The rubbing cloth 224 is obtained by, for example, planting short fibers such as rayon on a base material.

  The rubbing apparatus 200 includes a moving mechanism (not shown) that moves the stage 210 in a predetermined direction with respect to the rubbing processing unit 220. The moving mechanism includes a drive device such as a rack and pinion method. The stage 210 is moved by the moving mechanism toward the rubbing processing unit 220 in the direction of the arrow along the moving direction D1 parallel to the upper surface of the stage 210. The direction of the C-C ′ line in FIG. 7A is a direction along the moving direction D <b> 1 of the stage 210. Accordingly, the rubbing processing unit 220 moves relative to the element substrate 10 in the direction opposite to the arrow. Note that the rubbing apparatus 200 may be configured to move the rubbing processing unit 220 relative to the stage 210.

  The direction of the rotating shaft 226 of the roller 222 is, for example, a direction orthogonal to the moving direction D1 of the stage 210. In this case, alignment anisotropy is imparted to the alignment film 34 along the moving direction D1 of the stage 210 by rubbing. Therefore, the direction of orientation anisotropy imparted to the surface of the orientation film 34, that is, the orientation direction 34a is a direction along the movement direction D1. Moreover, the direction of the rotating shaft 226 can be appropriately adjusted according to the orientation direction 34a based on the optical design.

  When the direction of the rotation axis 226 of the roller 222 is different from the direction orthogonal to the moving direction D1 of the stage 210, the alignment direction 34a applied to the alignment film 34 by the rubbing process is a direction orthogonal to the rotation axis 226 of the roller 222. And a combined vector of the moving direction D1 of the stage 210. Therefore, the alignment direction 34 a applied to the alignment film 34 by the alignment process has a predetermined positional relationship with the transmission axis of the reference polarizer 214.

<Rubbing method>
Next, a method (rubbing method) of performing an alignment process by the rubbing method in Step P13 will be described. First, as shown in FIGS. 7A and 7B, the element substrate 10 is placed on the upper surface of the rotary stage 212 with the surface on which the alignment film 34 is formed facing up, and is fixed by suction. At this time, the wire grid polarizer 30 provided on the element substrate 10 is arranged so as to overlap the reference polarizer 214 in a planar manner. The stage 210 and the rubbing processing unit 220 are sufficiently separated from each other.

  Next, relative alignment of the element substrate 10 in the plane facing the reference polarizer 214 provided on the stage 210 is performed so that the alignment film 34 of the element substrate 10 is subjected to an alignment process in the alignment direction 34a based on the optical design. Determine the positional relationship. Here, the reference polarizer 214 and the element substrate 10 (wire grid polarization) are set so that the transmission axis of the reference polarizer 214 is in a predetermined direction, for example, parallel or orthogonal to the transmission axis 30a of the wire grid polarizer 30. The relative positional relationship with the child 30) is adjusted.

  More specifically, the light receiving unit 218 measures the intensity of the light L1 that is irradiated with light from the light source 216 and passes through the reference polarizer 214 and the wire grid polarizers 30 and 32. Then, by rotating the rotary stage 212, the relative positional relationship between the transmission axis 30a of the wire grid polarizer 30 and the transmission axis of the reference polarizer 214 is changed, and the intensity of the light L1 received by the light receiving unit 218. Adjust so that becomes the maximum or minimum.

  At this time, the intensity of the light L1 received by the light receiving unit 218 is maximized when the transmission axis 30a of the wire grid polarizer 30 and the transmission axis of the reference polarizer 214 are parallel to each other. Further, the intensity of the light L1 received by the light receiving unit 218 is minimized when the transmission axis 30a of the wire grid polarizer 30 and the transmission axis of the reference polarizer 214 are orthogonal to each other.

  Whether to select the maximum or minimum intensity of the received light L1 depends on the sensitivity characteristics of the device that measures the intensity of the light L1 (the sensitivity is high on the side where the light intensity is low, or the light The higher the intensity, the higher the sensitivity). The direction of the transmission axis 30 a of the wire grid polarizer 30 and the direction of the transmission axis of the reference polarizer 214 can be arbitrarily set according to the optical design of the liquid crystal panel 2. As a result, the relative positional relationship between the stage 210 and the element substrate 10, that is, the direction in which the alignment process is performed on the element substrate 10 is determined.

  Next, the pressing amount of the rubbing cloth 224 against the element substrate 10 is adjusted to a desired value, and the stage 210 is moved in the direction of the arrow along the movement direction D1. By the movement of the stage 210, the rubbing processing unit 220 relatively moves while rubbing the alignment film 34 of the element substrate 10. When the rubbing process is performed in one direction, the suction fixation is released and the element substrate 10 is removed. The rubbing process may be performed a plurality of times in the same direction.

  Above, process P13 is completed. In the element substrate 10 subjected to the rubbing process in the process P13, the transmission axis 30a of the wire grid polarizer 30 and the alignment direction 34a of the alignment film 34 have a predetermined positional relationship, for example, a positional relationship that is parallel or orthogonal to each other. . According to such a method, the alignment direction 34 a in the alignment film 34 can be optically aligned with reference to the transmission axis 30 a of the wire grid polarizer 30. For this reason, the alignment process on the alignment film 34 of the element substrate 10 is accurately performed in a predetermined direction based on the optical design of the liquid crystal panel 2 as compared with the case where the rubbing process is performed based on the outer shape of the element substrate 10 and the alignment mark. It can be carried out. This also eliminates the need for a step of inspecting positional accuracy after the alignment process.

  Next, in the process P21 of the process of manufacturing the counter substrate 20, the light shielding layers 22 and 24 are formed on the counter substrate 20, and the wire grid polarizer 32 as the optical element, the common electrode, as in the process P11. 18 etc. are formed. In step P22, the alignment film 36 is formed on the surface of the counter substrate 20 in the same manner as in step P12. Then, in the process P23, the alignment process is performed on the surface of the alignment film 36 in the alignment direction 36a shown in FIG. As a result, the alignment film 36 of the counter substrate 20 can be accurately aligned in a predetermined direction based on the optical design of the liquid crystal panel 2. Thus, a pair of substrates of the element substrate 10 and the counter substrate 20 are prepared.

<Manufacturing process of liquid crystal panel>
Next, in the process P31, the element substrate 10 and the counter substrate 20 are aligned. First, as shown in FIG. 8, the wire grid polarizer 30 formed on the element substrate 10 and the wire grid polarizer 32 formed on the counter substrate 20 are opposed to the element substrate 10 so as to overlap each other in a plane. The substrate 20 is disposed facing the substrate 20. A sealing material 41 is applied in advance to the element substrate 10 or the counter substrate 20.

  The element substrate 10 and the counter substrate 20 are held in parallel with each other by holding portions 230 and 232 that can be fixed by suction. Further, the counter substrate 20 is rotatably held with the normal direction of the surface of the counter substrate 20 (element substrate 10) as a rotation axis. The holding parts 230 and 232 are made of a material having translucency, for example. When the material of the holding parts 230 and 232 is non-translucent, a through hole or the like that transmits light may be provided at a position that overlaps the wire grid polarizers 30 and 32 in a plane.

  Subsequently, the light source 234 is arranged on the opposite side of the element substrate 10 from the counter substrate 20. In addition, the light receiving unit 236 is disposed on the opposite side of the counter substrate 20 from the element substrate 10. Then, light from the light source 234 is sequentially incident on the wire grid polarizer 30 and the wire grid polarizer 32. The light L2 transmitted through the wire grid polarizer 30 and the wire grid polarizer 32 is received by the light receiving unit 236, and the intensity of the light L2 is measured.

  At this time, it is desirable to relatively arrange the light source 234 so that the light emitted from the light source 234 enters from the direction of the normal line of the element substrate 10 (counter substrate 20). The positional relationship between the light source 234 and the light receiving unit 236 may be upside down in the drawing. The light source 234 has the same configuration as that of the light source 216 in the rubbing device 200, and the light receiving unit 236 has the same configuration as that of the light receiving unit 218 in the rubbing device 200.

  Next, as shown in FIG. 9, the relative positional relationship between the opposing surfaces of the element substrate 10 and the counter substrate 20 is determined. Here, with reference to the transmission axis 30a of the wire grid polarizer 30 of the element substrate 10, the element substrate 10 and the counter substrate 20 are arranged such that the transmission axis 32a of the wire grid polarizer 32 of the counter substrate 20 is in a predetermined direction. Adjust the positional relationship between each other. In FIG. 9, illustration of the holding unit 230 and the holding unit 232 in FIG. 8 is omitted.

  More specifically, with the element substrate 10 fixed, the counter substrate 20 is rotated in a plane where the element substrate 10 and the counter substrate 20 face each other, and the intensity of the light L2 received by the light receiving unit 236 is maximum or The positional relationship between the transmission axis 30a of the wire grid polarizer 30 and the transmission axis 32a of the wire grid polarizer 32 is changed so as to be minimized.

  Here, the intensity of the light L2 received by the light receiving unit 236 is maximized when the transmission axis 30a of the wire grid polarizer 30 and the transmission axis 32a of the wire grid polarizer 32 are parallel to each other. In addition, the intensity of the light L2 received by the light receiving unit 236 is minimized when the transmission axis 30a of the wire grid polarizer 30 and the transmission axis 32a of the wire grid polarizer 32 are orthogonal to each other.

  By the way, the alignment film 34 of the element substrate 10 is subjected to an alignment process in a predetermined alignment direction 34a based on the optical design of the liquid crystal panel 2 based on the transmission axis 30a of the wire grid polarizer 30 by the rubbing process in the process P13. Has been done. Further, the alignment film 36 of the counter substrate 20 is subjected to an alignment process in a predetermined alignment direction 36a based on the optical design of the liquid crystal panel 2 based on the transmission axis 32a of the wire grid polarizer 32 by the rubbing process in the process P23. Has been done.

  For example, the transmission axis 30a of the wire grid polarizer 30 and the alignment direction 34a of the alignment film 34 are parallel to each other, and the transmission axis 32a of the wire grid polarizer 32 and the alignment direction 36a of the alignment film 36 are parallel to each other. To do. At this time, if the transmission axis 30a of the wire grid polarizer 30 and the transmission axis 32a of the wire grid polarizer 32 are adjusted so as to be orthogonal to each other, the orientation direction 34a of the element substrate 10 and the orientation direction 36a of the counter substrate 20 are The positions are orthogonal to each other based on the optical design of the liquid crystal panel 2 (see FIG. 5B).

  Thereby, the element substrate 10 and the counter substrate 20 can be aligned with high precision so that the respective alignment directions 34a and 36a are in predetermined directions based on the optical design of the liquid crystal panel 2. Thus, the positional relationship between the element substrate 10 and the counter substrate 20 is determined. Note that the alignment may be performed by rotating the element substrate 10 in a state where the counter substrate 20 is fixed, or the alignment may be performed by rotating both the element substrate 10 and the counter substrate 20.

  Next, in the process P32, the element substrate 10 and the counter substrate 20 are bonded to each other. The bonding is performed by bringing the opposing element substrate 10 and the counter substrate 20 into contact with each other through the sealing material 41 applied in advance while maintaining the positional relationship aligned in the process P31, and performing pressure bonding. Subsequently, in process P33, liquid crystal is injected between the element substrate 10 and the counter substrate 20 from the opening (injection port) of the sealing material 41, and the injection port is sealed. Thus, the liquid crystal panel 2 is manufactured.

  According to the method for manufacturing a liquid crystal panel according to the present embodiment, the transmission axis 30a of the wire grid polarizer 30 provided on the element substrate 10 and the transmission axis 32a of the wire grid polarizer 32 provided on the counter substrate 20 are used as a reference. Thus, the element substrate 10 and the counter substrate 20 can be optically aligned. Therefore, the alignment treatment of the alignment films 34 and 36 and the alignment between the element substrate 10 and the counter substrate 20 are optically performed with reference to the transmission axes 30a and 32a of the wire grid polarizers 30 and 32. The alignment direction of the liquid crystal layer 40 in the liquid crystal panel 2 can be accurately aligned with a predetermined direction based on the optical design. As a result, the liquid crystal panel 2 having more excellent optical characteristics (contrast and the like) can be manufactured.

  In the process of manufacturing the element substrate 10 (process P11 to process P13) and the process of manufacturing the counter substrate 20 (process P21 to process P23), for example, a plurality of element substrates 10 or counter substrates 20 are impositioned. Manufacture may be performed in the state of the mother substrate. Further, in the process of manufacturing the liquid crystal panel 2 (from the process P31 to the process P33), for example, the counter substrate 20 is individually bonded to the mother substrate on which the element substrate 10 is attached, and the liquid crystal is injected and sealed. This may be cut at a predetermined position.

  Although not described here, in the manufacturing process of the projection display device 100 including the liquid crystal light valve 1, the alignment between the liquid crystal panel 2 and the polarizing plates 45 and 46 (see FIG. 1) is performed. When the liquid crystal panel 2 and the polarizing plates 45 and 46 are aligned, for example, the transmission axis 30a of the wire grid polarizer 30 provided on the element substrate 10 (or the wire grid polarizer 32 provided on the counter substrate 20). With reference to the transmission axis 32a), at least one of the transmission axis 45a of the polarizing plate 45 and the transmission axis 46a of the polarizing plate 46 can be optically aligned.

  According to such a method, the alignment between the liquid crystal panel 2 and the polarizing plates 45 and 46 is based on the alignment processing direction of the alignment films 34 and 36 in the liquid crystal panel 2 and the alignment between the element substrate 10 and the counter substrate 20. Optically based on the direction of the wire grid polarizer 30 used. For this reason, the transmission axes 45a and 46a of the polarizing plates 45 and 46 in the liquid crystal light valve 1 can be accurately aligned in a predetermined direction based on the optical design of the liquid crystal light valve (see FIGS. 5A and 5B). ).

  In the liquid crystal panel 2, the wire grid polarizers 30 and 32 have regions that do not overlap each other in plan view (see FIGS. 2A and 2B). Therefore, the alignment between the liquid crystal panel 2 and the polarizing plates 45 and 46 can be optically performed in a region where one of the wire grid polarizers 30 and 32 does not overlap the other in plan view. Further, the wire grid polarizers 30 and 32 are disposed in a region that does not overlap the liquid crystal layer 40 in a planar manner. Therefore, when the liquid crystal panel 2 and the polarizing plates 45 and 46 are optically aligned, the optical influence by the liquid crystal layer 40 can be eliminated.

(Second Embodiment)
<Configuration of liquid crystal light valve and optical design conditions>
Next, the configuration of the liquid crystal light valve according to the second embodiment will be described with reference to the drawings. The liquid crystal light valve according to the second embodiment differs from the liquid crystal light valve according to the first embodiment in the alignment method of the liquid crystal panel and the alignment treatment in the alignment film, but the other configurations are the same. is there. FIG. 10 is a view for explaining optical design conditions of the liquid crystal light valve according to the second embodiment. Constituent elements common to the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIG. 10A, the liquid crystal light valve 5 according to the second embodiment includes a liquid crystal panel 6, and a polarizing plate 55 that is disposed on the light incident side of the liquid crystal panel 6 and has a transmission axis 55a. And a polarizing plate 56 having a transmission axis 56a, which is disposed on the light emission side of the liquid crystal panel 6. The liquid crystal panel 6 includes a liquid crystal layer 50 sandwiched between the element substrate 10 and the counter substrate 20. The liquid crystal panel 6 according to the second embodiment is a VA (Vertical Alignment) type liquid crystal panel. The liquid crystal layer 50 is composed of a liquid crystal having negative dielectric anisotropy.

  In the liquid crystal panel 6, an alignment film 52 is provided on the side of the element substrate 10 facing the liquid crystal layer 50. An alignment film 54 is provided on the side of the counter substrate 20 facing the liquid crystal layer 50. The alignment films 52 and 54 are made of a photo-alignment material. Examples of the material of the alignment films 52 and 54 include a photo-alignment material that is aligned by a photoduplexing reaction such as a resin material containing a cinnamoyl group, a coumarin group, or a chalcone group as a functional group, and an azo group as a functional group. Examples thereof include a photo-alignment material that is aligned by a photoisomerization reaction, such as a resin material to be contained.

  In the liquid crystal panel 6, the alignment films 52 and 54 are subjected to an alignment process by a photo-alignment method. For example, the alignment film 52 is subjected to an alignment process in an alignment direction 52a indicated by an arrow. For example, the alignment film 54 is subjected to an alignment process in an alignment direction 54a indicated by an arrow. As shown in FIG. 10B, the alignment direction 52a of the element substrate 10 and the alignment direction 54a of the counter substrate 20 in the liquid crystal panel 6 are parallel to each other, but are opposite to each other.

  As shown in FIG. 10B, the transmission axis 55a of the polarizing plate 55 is shifted by 45 ° counterclockwise with respect to the alignment direction 54a of the alignment film 54, for example. Further, the transmission axis 56 a of the polarizing plate 56 is shifted by 45 ° clockwise with respect to the alignment direction 52 a of the alignment film 52, for example. Therefore, the transmission shaft 55a and the transmission shaft 56a are orthogonal to each other.

  In a state where no voltage is applied to the liquid crystal panel 6 (non-driving state), in the liquid crystal layer 50, the liquid crystal molecules 50a are aligned with their major axis directions rising along the normal direction of the element substrate 10 and the counter substrate 20. Accordingly, the linearly polarized light that is incident on the liquid crystal panel 6 and is parallel to the transmission axis 55a of the polarizing plate 55 passes through the liquid crystal layer 50 and is emitted from the liquid crystal panel 6 as it is. Display state. That is, the display mode (optical design) of the liquid crystal panel 6 is normally black that does not transmit light in the non-driven state.

  On the other hand, although not shown, in a state where a voltage is applied to the liquid crystal panel 6 (driving state), the liquid crystal molecules 50a are arranged so that the major axis direction is tilted. The light incident on the liquid crystal panel 6 in this driving state is given a 90 ° phase difference due to the birefringence of the liquid crystal layer 50. Therefore, the linearly polarized light that is incident on the liquid crystal panel 6 and is parallel to the transmission axis 55 a of the polarizing plate 55 becomes linearly polarized light whose oscillation direction is rotated by 90 ° due to the birefringence of the liquid crystal layer 50 and is emitted from the liquid crystal panel 6. Since this linearly polarized light is parallel to the transmission axis 56a of the polarizing plate 56 and transmits through the polarizing plate 56, a bright display state is obtained.

  In the liquid crystal panel 6, the optical design conditions such as the alignment directions 52 a and 54 a of the alignment films 52 and 54 and the transmission axes 55 a and 56 a of the polarizing plates 55 and 56 are not limited to the above forms.

  Here, in the liquid crystal panel 6, as shown in FIG. 10C, in the non-driven state, the major axis direction of the liquid crystal molecules 50a is inclined by the angle α with respect to the normal direction of the element substrate 10 (opposing substrate 20). You may orient so that it may stand up. This inclination is called a pretilt, and the angle α is called a pretilt angle. The pretilt is for controlling the direction in which the liquid crystal molecules 50a are tilted in the driving state. The direction in which the liquid crystal molecules 50 a are tilted is related to the viewing angle characteristics of the liquid crystal panel 6. For example, in the liquid crystal panel 6, the viewing angle characteristics can be further widened by dividing the pixel region into a plurality of small regions and changing the direction in which the liquid crystal molecules 50 a are tilted depending on the small regions.

  In the liquid crystal panel 6, the pretilt direction and the pretilt angle α are controlled by the alignment directions 52 a and 54 a of the alignment films 52 and 54. The pretilt direction of the liquid crystal molecules 50a is parallel to the alignment directions 52a and 54a. The liquid crystal molecules 50a are in a pre-tilted state in which the alignment film 52 side is pre-tilted with the alignment restricted in the direction of the arrow along the alignment direction 52a and the alignment film 54 side in the direction of the arrow along the alignment direction 54a.

  In the liquid crystal panel 6 according to the second embodiment, wire grid polarizers 30 and 32 are provided on the element substrate 10 and the counter substrate 20, respectively. The wire grid polarizers 30 and 32 are used as a reference for alignment when performing alignment processing on the alignment films 52 and 54 and bonding the element substrate 10 and the counter substrate 20 together.

<Manufacturing method of liquid crystal panel>
Next, a method for manufacturing a liquid crystal panel according to the second embodiment will be described with reference to the drawings. The manufacturing method of the liquid crystal panel according to the second embodiment includes the same steps as the manufacturing method of the liquid crystal panel according to the first embodiment, but the first is that alignment processing is performed on the alignment film by a photo-alignment method. This is different from the liquid crystal panel manufacturing method according to the first embodiment. Constituent elements common to the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  In step P12 in the process of manufacturing the element substrate 10, the alignment film 52 is formed by applying the above-described photo-alignment material to the surface of the element substrate 10 by, for example, a spin coating method. Subsequently, in process P13, an alignment process is performed on the surface of the alignment film 52 in the alignment direction 52a shown in FIG. Also in the process of manufacturing the counter substrate 20, a photo-alignment material is applied to the surface of the counter substrate 20 in the process P 22 to form the alignment film 54, and the process shown in FIG. 10B on the surface of the alignment film 54 in the process P 23. An alignment process is performed by an optical alignment method in the alignment direction 54a shown. Hereinafter, an alignment processing method according to the second embodiment will be described. FIG. 11 is a diagram for explaining an alignment processing method according to the second embodiment.

<Optical alignment device>
First, a schematic configuration of the light irradiation apparatus 300 used for the alignment process of the liquid crystal panel according to the present embodiment will be described with reference to FIG. The light irradiation apparatus 300 used for the alignment process of the liquid crystal panel according to the present embodiment includes a light source 310, a shutter 316, a polarizer 318, a stage 320, and a light receiving unit 322.

  On the stage 320, the element substrate 10 or the counter substrate 20 that performs the alignment process is placed. A surface of the stage 320 on which the element substrate 10 or the counter substrate 20 is placed is referred to as a placement surface. The stage 320 is made of a material having translucency, for example. A translucent material is used for the stage 320, and a through hole or a translucent material is formed in a region overlapping the wire grid polarizer 30 provided on the element substrate 10 or the wire grid polarizer 32 provided on the counter substrate 20 in a plane. It is good also as a structure which arrange | positions the member which has this.

  The stage 320 includes a rotation mechanism (not shown) that rotates the stage 320 in a plane parallel to the placement surface. The rotation mechanism has, for example, a rotation axis parallel to the normal direction of the mounting surface in a region that overlaps the wire grid polarizers 30 and 32 of the stage 320 and rotates the stage 320 around the rotation axis. Let

  The light source 310 is disposed so as to face the mounting surface of the stage 320. The light source 310 is a light source that emits light L3 including ultraviolet rays for performing photo-alignment processing. The light source 310 includes a lamp 312 and a condenser mirror 314. The lamp 312 is composed of, for example, a high pressure mercury lamp. The condensing mirror 314 is disposed so as to cover a portion of the lamp 312 opposite to the stage 320. The light L3 emitted from the lamp 312 is reflected and collected by the condenser mirror 314, and is irradiated on the stage 320 side as, for example, parallel light along the normal direction of the mounting surface of the stage 320.

  The shutter 316 is located on the optical path of the light L3 emitted from the light source 310 to the stage 320 side, and is arranged in parallel to the mounting surface of the stage 320. The shutter 316 is made of a light-shielding material. The shutter 316 is movably held in a plane parallel to the mounting surface of the stage 320 by a shutter holding unit (not shown). By moving the shutter 316 by the shutter holding unit, the light L3 from the light source 310 can be irradiated to the alignment films 52 and 54 of the element substrate 10 or can be shielded from being irradiated to the alignment films 52 and 54. .

  Here, the alignment films 52 and 54 are disposed in a region surrounded by the seal material 41, and the wire grid polarizers 30 and 32 are disposed outside the seal material 41 (FIGS. 2A and 2B). b)). Therefore, if the shutter 316 is disposed at a position where the shutter 316 overlaps the alignment films 52 and 54 in a plane and does not overlap the wire grid polarizers 30 and 32, the light L3 from the light source 310 is converted into the wire grid polarizer 30, 32 and the alignment films 52 and 54 can be prevented from being irradiated. A through hole, a notch, or the like may be provided in a region that overlaps the wire grid polarizers 30 and 32 of the shutter 316 in a planar manner.

  The polarizer 318 is located on the optical path of the light L3 irradiated from the light source 310 to the stage 320 side. The polarizer 318 is held by a holding unit (not shown), and is arranged in parallel with the mounting surface of the stage 320. For example, the polarizer 318 is disposed between the shutter 316 and the stage 320. The polarizer 318 may be disposed between the light source 310 and the shutter 316.

  The polarizer 318 includes an optical element having a polarization separation function such as a wire grid, a polarizing plate, or the like, and has a transmission axis in a predetermined direction. The light L3 from the light source 310 passes through the polarizer 318, and is irradiated on the stage 320 side as linearly polarized light L3a parallel to the transmission axis of the polarizer 318. When the linearly polarized light L3a is irradiated onto the alignment film 52 of the element substrate 10, the alignment film 52 is subjected to an alignment process in a direction parallel to the transmission axis of the polarizer 318.

  The light receiving unit 322 is disposed on the side opposite to the mounting surface of the stage 320 so as to overlap the wire grid polarizers 30 and 32 in a plane. That is, the light receiving unit 322 is positioned on the optical path of the light L4 that passes through the wire grid polarizers 30 and 32 out of the linearly polarized light L3a that has passed through the polarizer 318. The light receiving unit 322 has a function of measuring the intensity of the received light L4, like the light receiving unit 218 and the light receiving unit 236 in the first embodiment.

<Photo alignment method>
Next, a method (photo-alignment method) of performing an alignment process by the photo-alignment method in step P13 and step P23 will be described. In the following, the process P13 will be described, but the alignment process is performed also in the process P23 in the same manner as in the process P13.

  First, as shown in FIG. 11, the element substrate 10 is mounted on the mounting surface of the stage 320 with the surface on which the alignment film 52 is formed facing up. At this time, the shutter 316 is arranged at a position where the light L3 from the light source 310 is irradiated on the wire grid polarizer 30 and not on the alignment film 52.

  Next, the relative positional relationship between the element substrate 10 placed on the stage 320 and the polarizer 318 in the facing surface is determined. Here, relative to the polarizer 318 and the element substrate 10 (wire grid polarizer 30) so that the transmission axis of the polarizer 318 is in a predetermined direction with reference to the transmission axis 30a of the wire grid polarizer 30. The correct positional relationship.

  More specifically, of the light L3 from the light source 310, linearly polarized light L3a that has passed through the polarizer 318 is applied to the wire grid polarizer 30, and the intensity of the light L4 that passes through the wire grid polarizer 30 is determined by the light receiving unit 322. taking measurement. Then, by rotating the stage 320, the relative position between the transmission axis 30a of the wire grid polarizer 30 and the transmission axis of the polarizer 318 so that the intensity of the light L4 received by the light receiving unit 322 is maximized or minimized. Change the relationship.

  Here, the intensity of the light L4 received by the light receiving unit 322 is maximized when the transmission axis 30a of the wire grid polarizer 30 and the transmission axis of the polarizer 318 are parallel to each other. In addition, the intensity of the light L4 received by the light receiving unit 322 is minimized when the transmission axis 30a of the wire grid polarizer 30 and the transmission axis of the polarizer 318 are orthogonal to each other. Thereby, the relative positional relationship of the element substrate 10 with respect to the polarizer 318 is determined. That is, the polarization direction of the linearly polarized light L3a applied to the alignment film 52 is determined as a predetermined direction based on the optical design with reference to the transmission axis 30a of the wire grid polarizer 30.

  Next, the shutter 316 is moved by the shutter holding unit, and the alignment film 52 is irradiated with the linearly polarized light L <b> 3 a that has passed through the polarizer 318. Thereby, the molecules in the alignment film 52 are arranged in a predetermined direction. That is, the alignment process is performed on the alignment film 52 in a predetermined alignment direction 52a (see FIG. 10) based on the optical design with reference to the transmission axis 30a of the wire grid polarizer 30. When the element substrate 10 is larger than the light beam of the linearly polarized light L3a, the stage 320 may be moved along a predetermined direction in a plane parallel to the placement surface when performing the alignment process.

  In the above method, the light source 310 of the light irradiation device 300 is used as a light source for irradiating light when the positional relationship between the element substrate 10 and the polarizer 318 is optically adjusted. Alternatively, a light source such as the light source 234 (see FIG. 8) in the first embodiment may be used. In addition, although the stage 320 is rotated with respect to the polarizer 318, the stage 320 may be fixed and the polarizer 318 may be rotated within the facing surface.

  The transmission axis 30 a of the wire grid polarizer 30 in the liquid crystal panel 6 and the transmission axis of the polarizer 318 in the light irradiation device 300 can be arbitrarily set according to the optical design of the liquid crystal panel 6.

  By the way, in the above-described process P13, the light L3 from the light source 310 is irradiated to the stage 320 side along the normal direction of the mounting surface of the stage 320. However, the light L3 from the light source 310 is mounted. You may make it irradiate by inclining with a predetermined angle with respect to the normal line direction of a surface. In this way, the pretilt angle α of the liquid crystal molecules 50a shown in FIG. 10C can be effectively controlled according to the inclination angle of the light L3 with respect to the normal direction of the mounting surface.

  According to the manufacturing method of the liquid crystal panel according to the second embodiment, the same effect as the manufacturing method of the liquid crystal panel according to the first embodiment can be obtained. In addition, since the element substrate 10 and the counter substrate 20 are provided with the wire grid polarizers 30 and 32 serving as the alignment reference, the light irradiation device 300 may not include the alignment reference polarizer.

  The alignment films 34 and 36 of the liquid crystal panel 2 according to the first embodiment are formed of a photo-alignment material in the same manner as the liquid crystal panel 6 according to the second embodiment, and the alignment films 34 and 36 have a second alignment film. It is good also as a structure which performs a photo-alignment process similarly to the manufacturing method of the liquid crystal panel which concerns on embodiment. Further, the alignment films 52 and 54 of the liquid crystal panel 6 according to the second embodiment are formed of polyimide resin or the like in the same manner as the liquid crystal panel 2 according to the first embodiment. It is good also as a structure which performs a rubbing process similarly to the manufacturing method of the liquid crystal panel which concerns on this embodiment. In any configuration, the same effects as those can be obtained.

(Third embodiment)
In the above embodiment, the liquid crystal light valve has been described as the liquid crystal device, but the present invention can also be applied to a liquid crystal display. Next, a liquid crystal display as a liquid crystal device according to a third embodiment will be described.

<Configuration of liquid crystal display>
FIG. 12 is a schematic configuration diagram illustrating a configuration of a liquid crystal display according to the third embodiment. Specifically, FIG. 12A is a plan view, and FIG. 12B is a cross-sectional view taken along the line AA ′ in FIG.

  The liquid crystal display according to the third embodiment is different from the liquid crystal light valve according to the first embodiment in that the element substrate 10 and the counter substrate 20 include a plurality of wire grid polarizers, The difference is that the polarizing plate 46 is attached to the liquid crystal panel 2, but the other configurations are the same. Constituent elements common to the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIGS. 12A and 12B, the liquid crystal display 7 according to the third embodiment includes a liquid crystal panel 8, a polarizing plate 45, and a polarizing plate 46. The liquid crystal panel 8 includes an element substrate 10, a counter substrate 20, and a liquid crystal layer 40.

  In the present embodiment, the element substrate 10 includes wire grid polarizers 37a and 37b as optical elements at the periphery. The counter substrate 20 includes wire grid polarizers 38a and 38b as optical elements at the peripheral edge. The wire grid polarizer 37a and the wire grid polarizer 38a are arranged so as not to overlap each other in a plane. The wire grid polarizer 37b and the wire grid polarizer 38b have areas that overlap each other in a plane.

  In the element substrate 10, the transmission axes (not shown) of the wire grid polarizers 37 a and 37 b are parallel to each other, and are used as a reference for alignment when the alignment film 34 is subjected to the alignment process. Similarly, in the counter substrate 20, the transmission axes (not shown) of the wire grid polarizers 38 a and 38 b are parallel to each other, and are used as a reference for alignment when performing alignment processing on the alignment film 36. .

  As shown in FIG. 12 (b), the polarizing plate 45 is attached to the outside of the counter substrate 20, that is, the surface opposite to the liquid crystal layer 40. The polarizing plate 46 is attached to the outside of the element substrate 10, that is, the surface opposite to the liquid crystal layer 40.

  Although not shown, the liquid crystal display 7 according to the third embodiment can be used by being mounted on a mobile phone as an electronic device. Further, the electronic device on which the liquid crystal display 7 is mounted may be an electronic book, a personal computer, a digital still camera, a viewfinder type or a monitor direct-view type video tape recorder, an in-vehicle monitor of a car navigation device, and the like.

<Manufacturing method of liquid crystal display>
Next, a method for manufacturing a liquid crystal display according to the third embodiment will be described with reference to the drawings. The manufacturing method of the liquid crystal display according to the third embodiment is different from the manufacturing method of the liquid crystal panel according to the first embodiment in that it further includes a polarizing plate attaching step, but the other configurations are the same. FIG. 13 is a flowchart showing a method for manufacturing a liquid crystal display according to the third embodiment. FIG. 14 is a diagram for explaining a polarizing plate alignment method according to the third embodiment. Constituent elements common to the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIG. 13, the manufacturing method of the liquid crystal display according to the third embodiment includes a polarizing plate attaching step P34 after the liquid crystal injection / sealing step P33.

  In this embodiment, in the process P13 in the process of manufacturing the element substrate 10, optical alignment is performed with reference to at least one transmission axis of the wire grid polarizers 37a and 37b, and the same as in the first embodiment. Then, the alignment film 34 is subjected to an alignment process in a predetermined direction in optical design. In step P23 in the process of manufacturing the counter substrate 20, optical alignment is performed with reference to at least one transmission axis of the wire grid polarizers 38a and 38b, and the alignment film is formed in the same manner as in the first embodiment. In 36, an alignment process is performed in a predetermined direction in the optical design.

  In step P31, the element substrate 10 and the counter substrate 20 are opposed to each other so that the wire grid polarizer 37b formed on the element substrate 10 and the wire grid polarizer 38b formed on the counter substrate 20 overlap each other in a plane. The optical alignment is performed in the same manner as in the first embodiment.

  Next, in process P34, the polarizing plate 45 and the polarizing plate 46 are aligned and affixed on both outer sides of the liquid crystal panel 8. One of the polarizing plate 45 and the polarizing plate 46 is attached first, and then the other is attached. Here, the polarizing plate 45 is attached first.

  First, as shown in FIG. 14, a polarizing plate 45 is disposed outside the counter substrate 20 of the liquid crystal panel 8. The liquid crystal panel 8 and the polarizing plate 45 are held in parallel with each other by holding parts (not shown). Further, the polarizing plate 45 is held rotatably about the surface of the liquid crystal panel 8 (the surface of the counter substrate 20) and the normal direction of the surface of the polarizing plate 45 as a rotation axis.

  Subsequently, the light source 234 is disposed outside the element substrate 10 of the liquid crystal panel 8. In addition, a light receiving portion 236 is disposed on the opposite side of the polarizing plate 45 from the liquid crystal panel 8. Then, light from the light source 234 is sequentially incident on the wire grid polarizer 37 a and the polarizing plate 45. The light L5 transmitted through the wire grid polarizer 37a and the polarizing plate 45 is received by the light receiving unit 236, and the intensity of the light L5 is measured.

  At this time, it is desirable to relatively arrange the light source 234 so that the light emitted from the light source 234 enters from the direction of the normal line of the element substrate 10 (counter substrate 20). The positional relationship between the light source 234 and the light receiving unit 236 may be upside down in the drawing.

  Next, the relative positional relationship in the plane where the liquid crystal panel 8 and the polarizing plate 45 face each other is determined. Here, the positional relationship between the liquid crystal panel 8 and the polarizing plate 45 is adjusted so that the transmission axis 45a of the polarizing plate 45 is in a predetermined direction with reference to the transmission axis of the wire grid polarizer 37a of the element substrate 10. .

  More specifically, with the liquid crystal panel 8 fixed, the polarizing plate 45 is rotated in a plane where the liquid crystal panel 8 and the polarizing plate 45 face each other, and the intensity of the light L5 received by the light receiving unit 236 is maximum or The relative positional relationship between the transmission axis of the wire grid polarizer 37a and the transmission axis 45a of the polarizing plate 45 is changed so as to be minimized. At this time, the liquid crystal panel 8 may be rotated with the polarizing plate 45 fixed, or both the liquid crystal panel 8 and the polarizing plate 45 may be rotated.

  The intensity of the light L5 received by the light receiving unit 236 is maximized when the transmission axis of the wire grid polarizer 37a and the transmission axis 45a of the polarizing plate 45 are parallel to each other. In addition, the intensity of the light L5 received by the light receiving unit 236 is minimized when the transmission axis of the wire grid polarizer 37a and the transmission axis 45a of the polarizing plate 45 are orthogonal to each other. Thereby, the positional relationship between the liquid crystal panel 8 and the polarizing plate 45 is determined.

  The light from the light source 234 may be incident on the wire grid polarizer 38a of the counter substrate 20 instead of the wire grid polarizer 37a of the element substrate 10. Since the wire grid polarizer 37a and the wire grid polarizer 38a do not overlap with each other in plane, the alignment between the liquid crystal panel 8 and the polarizing plate 45 is performed with reference to the transmission axis of one of the wire grid polarizers. It can be carried out. In addition, since the wire grid polarizers 37a and 38a are arranged in a region that does not overlap the liquid crystal layer 40 in plan view, the optical influence of the liquid crystal layer 40 can be eliminated during alignment.

  Subsequently, while maintaining the positional relationship between the liquid crystal panel 8 and the polarizing plate 45 determined as described above, the polarizing plate 45 is attached to the counter substrate 20 of the liquid crystal panel 8. Thereby, the transmission axis 45a can be optically aligned in a predetermined direction in optical design with the transmission axis of the wire grid polarizer 37a as a reference, and the polarizing plate 45 can be attached.

  Next, a polarizing plate 46 is attached to the element substrate 10 of the liquid crystal panel 8 to which the polarizing plate 45 is attached. Since the polarizing plate 45 is first optically aligned and attached to the liquid crystal panel 8 in a predetermined direction in the optical design, the polarizing plate 46 has the transmission axis 45a as a reference. Optical alignment can be performed so that the transmission axis 46a is in a predetermined direction in optical design.

  Although not shown, a polarizing plate 46 is disposed outside the element substrate 10 of the liquid crystal panel 8, and light from the light source 234 is sequentially incident on the liquid crystal panel 8 (polarizing plate 45) and the polarizing plate 46. At this time, the light from the light source 234 may be incident on an area where the wire grid polarizers 37a and 37b and the wire grid polarizers 38a and 38b are not provided. The positional relationship between the liquid crystal panel 8 (polarizing plate 45) and the polarizing plate 46 is determined so that the intensity of the light L5 received by the light receiving unit 236 is maximized or minimized, and the polarizing plate 46 is used as the element substrate of the liquid crystal panel 8. Paste to 10. Thus, the liquid crystal display 7 is completed.

  According to the configuration and the manufacturing method of the liquid crystal display according to the third embodiment, the direction of the alignment treatment of the alignment films 34 and 36 in the liquid crystal panel 8 and the element, as in the first and second embodiments. The positional relationship between the substrate 10 and the counter substrate 20 can be accurately matched with a predetermined direction based on the optical design of the liquid crystal display 7.

  According to the configuration and the manufacturing method of the liquid crystal display 7 according to the third embodiment, the alignment between the liquid crystal panel 8 and the polarizing plates 45 and 46 is optical with respect to the direction of the wire grid polarizer 37a (or 38a). Done. The wire grid polarizer 37a (or 38a), together with the wire grid polarizer 37b (or 38b), serves as a reference for the direction of the alignment treatment of the alignment films 34 and 36 in the liquid crystal panel 8, and the element substrate 10 and This is a reference for alignment between the counter substrates 20. Therefore, the transmission axes 45a and 46a of the polarizing plates 45 and 46 in the liquid crystal display 7 are determined based on the optical design of the liquid crystal display 7 as compared with a method of aligning with reference to the outer shape of the polarizing plate or the alignment mark. The direction can be adjusted with higher accuracy.

  The configuration of the wire grid polarizer in the liquid crystal display 7 is not limited to the above form. Each of the element substrate 10 and the counter substrate 20 may be provided with three or more wire grid polarizers. In addition, one of the element substrate 10 and the counter substrate 20 is provided with a plurality of wire grid polarizers, and one wire grid polarization so as to overlap with any one of the plurality of wire grid polarizers in a plane. The child may be provided on the other substrate.

  Further, the transmission axes of the wire grid polarizers 37a and 37b may be orthogonal to each other. Further, the transmission axes of the wire grid polarizers 38a and 83b may be orthogonal to each other. According to such a configuration, the wire grid polarizers 37a and 37b (or the wire grid polarized light) in the alignment process of the process P13 and the process P23, the bonding of the substrate of the process P32, and the polarizing plate bonding of the process P34. When aligning with respect to the optical elements 38a and 38b), it is possible to simultaneously configure a positional relation parallel to the transmission axis of the opposing polarizer or polarizing plate and a perpendicular positional relation. Therefore, according to the optical design conditions of the liquid crystal display 7 and the sensitivity characteristics of the measuring device, the alignment is performed by selecting either one or both of the positional relationships perpendicular to each other and the transmission axes facing each other. It can be carried out.

  In addition, the structure in which each of the element substrate and the counter substrate in the liquid crystal display of the present embodiment has a plurality of wire grid polarizers, and the manufacturing method for performing alignment based on these wire grid polarizers are the second. The present invention can also be applied to the case where a polarizing plate 55 and a polarizing plate 56 are attached to the liquid crystal panel 6 according to the embodiment to form a liquid crystal display.

(Fourth embodiment)
Next, a liquid crystal device according to a fourth embodiment will be described with reference to the drawings. The liquid crystal device according to the fourth embodiment differs from the liquid crystal device of the above embodiment in that the liquid crystal panel includes a dielectric interference film prism as an optical element instead of a wire grid polarizer. Other configurations are the same.

  FIG. 15 is a diagram illustrating a configuration of an optical element included in the liquid crystal panel according to the fourth embodiment. Specifically, FIG. 15A is a perspective view of the optical element, and FIG. 15B is a cross-sectional view taken along line D-D ′ in FIG. Constituent elements common to the above-described embodiment are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIGS. 15A and 15B, the liquid crystal panel according to the fourth embodiment includes a prism array 71 and a dielectric interference film 74 formed on the prism array 71 as optical elements. An optical element is provided. Here, this optical element is referred to as a dielectric interference film prism 70.

  The prism array 71 is formed on the element substrate 10 (or the counter substrate 20), and has a plurality of triangular prisms (prism shape) of ridges 72 having two inclined surfaces. In other words, the convex stripes 72 are formed continuously and periodically, whereby the prism array 71 having a triangular wave section is formed. The prism array 71 is made of, for example, a resin having a thermosetting or photocurable translucency such as an acrylic resin. The height of the ridges 72 of the prism array 71 is, for example, about 0.5 μm to 3 μm, and the pitch between the adjacent ridges 72 is, for example, about 1 μm to 6 μm.

Since the dielectric interference film 74 is formed on the prism array 71, the dielectric interference film 74 has a surface reflecting a triangular prism-shaped (prism-shaped) slope formed by the plurality of ridges 72. The dielectric interference film 74 is a so-called three-dimensional photonic crystal layer in which a plurality of dielectric films made of two kinds of materials having different refractive indexes are alternately stacked. The dielectric interference film 74 is formed, for example, by laminating seven layers of titanium oxide (TiO ₂ ) films and silicon oxide (SiO ₂ ) films alternately. The material of the dielectric film may be tantalum oxide (Ta ₂ O ₅ ) or silicon (Si). The film thickness of one dielectric film constituting the dielectric interference film 74 is, for example, about 10 nm to 100 nm, and the total film thickness of the dielectric interference film 74 is, for example, about 300 nm to 1 μm.

  The dielectric interference film prism 70 has a polarization separation function for separating incident light into reflected light and transmitted light having different polarization states. As shown in FIG. 15A, the dielectric interference film prism 70 reflects a polarization component parallel to the extending direction of the ridges 72 in the incident light, and is orthogonal to the extending direction of the ridges 72. Transmits polarized light components. That is, the dielectric interference film prism 70 has a transmission axis 70a and a reflection axis 70b as optical axes. The transmission axis 70 a is orthogonal to the extending direction of the ridge 72, and the reflection axis 70 b is parallel to the extending direction of the ridge 72.

  The stacking pitch of the dielectric films constituting the dielectric interference film 74 and the pitch of the ridges 72 are appropriately adjusted according to the characteristics required for the dielectric interference film prism 70. In the dielectric interference film 74, the transmittance (reflectance) can be controlled by the number of laminated dielectric films constituting the dielectric interference film 74. That is, by reducing the number of laminated dielectric films, it is possible to increase the transmittance of linearly polarized light parallel to the reflection axis 70b (the extending direction of the ridges 72) and to reduce the reflectance. When a predetermined number or more of dielectric films are stacked, most of the linearly polarized light parallel to the reflection axis 70b is reflected.

  In the dielectric interference film prism 70 according to the present embodiment, by adjusting the dielectric interference film 74, for example, about 70% of linearly polarized light parallel to the reflection axis 70b is reflected among the incident light, and the remaining 30% is transmitted. It is set to be. The surface of the dielectric interference film 74 may be covered with a resin layer and flattened.

  Even when the liquid crystal device in the above embodiment includes the dielectric interference film prism 70 as an optical element instead of the wire grid polarizers 30, 32, 37a, 37b, 38a, and 38b, the method for manufacturing the liquid crystal device in the above embodiment Can be applied, and the same effects as in the above embodiment can be obtained.

  As mentioned above, although embodiment of this invention was described, various deformation | transformation can be added with respect to the said embodiment in the range which does not deviate from the meaning of this invention. As modifications, for example, the following can be considered.

(Modification 1)
In the manufacturing method of the liquid crystal device of the above embodiment, the alignment film is subjected to the alignment treatment by the rubbing method or the photo-alignment method. As a method for performing the alignment treatment, for example, another method such as a method of irradiating the alignment film with an ion beam or a method of forming the alignment film by oblique deposition may be applied.

  In the method of irradiating an ion beam, an alignment treatment is performed by irradiating an alignment film formed of an inorganic material or the like on a substrate with an ion beam such as argon ions at a predetermined direction and a predetermined angle. . In this method, the orientation is regulated along the direction in which the ion beam is irradiated, and a pretilt angle is given depending on the angle at which the ion beam is irradiated.

  In the method of forming an alignment film by oblique vapor deposition, an alignment film made of an inorganic material or the like is vapor-deposited by a vapor deposition source located in a predetermined direction and a predetermined angle with respect to the substrate. In this method, the orientation is regulated along the direction of the vapor deposition source relative to the substrate, and a pretilt angle is given depending on the angle of the vapor deposition source relative to the substrate.

  In such a method of irradiating an ion beam and a method of forming an alignment film by oblique vapor deposition, the relative alignment between the direction of irradiating the ion beam or the direction of the vapor deposition source and the substrate is determined by the wire of the above embodiment. This can be done with reference to the transmission axis of the grid polarizer. Therefore, even when the alignment treatment is performed by such a method, the same effect as in the above embodiment can be obtained.

(Modification 2)
The liquid crystal device of the above embodiment has a configuration including a wire grid polarizer or a dielectric interference film prism as an optical element, but is not limited to this configuration. The optical element may be another optical element as long as it has a polarization separation function.

(Modification 3)
In the above embodiment, the liquid crystal device includes a TN liquid crystal panel or a VA liquid crystal panel, but the present invention is not limited to this form. The liquid crystal device may include an FFS (Fringe-Field Switching) type or IPS (In-Plane Switching) type liquid crystal panel that controls the alignment of liquid crystal molecules by a lateral electric field in a direction parallel to the substrate. In addition, the liquid crystal device may include an ECB (Electrically Controlled Birefringence) type liquid crystal panel that controls alignment of liquid crystal molecules by a vertical electric field generated between the element substrate and the counter substrate. Even in these liquid crystal devices, the configuration of the liquid crystal device and the manufacturing method of the liquid crystal device of the above embodiment can be applied.

  DESCRIPTION OF SYMBOLS 1,5 ... Liquid crystal light valve as a liquid crystal device, 7 ... Liquid crystal display as a liquid crystal device, 10 ... Element substrate as a pair of substrates, 20 ... Opposite substrates as a pair of substrates, 30, 32, 37a, 37b, 38a , 38b ... wire grid polarizer as optical element, 30a, 32a ... transmission axis as optical axis, 34, 36, 52, 54 ... alignment film, 40 ... liquid crystal layer, 45, 46, 55, 56 ... polarizing plate, 45a, 46a, 55a, 56a ... Transmission axis as optical axis, 70 ... Dielectric interference film prism as optical element, 70a ... Transmission axis as optical element, 100 ... Projection type display device as an example of electronic equipment, 214 ... reference polarizer.

Claims (14)

Forming an optical element having a polarization separation function on a substrate;
Forming an alignment film on the substrate;
Performing an alignment treatment on the alignment film of the substrate,
In the step of performing the alignment process, the alignment process is performed with reference to the optical axis of the optical element. A method for producing a substrate for a liquid crystal device according to claim 1,
The step of performing the alignment process includes the step of placing the substrate on the reference polarizer so that a reference polarizer having an optical axis that is in a predetermined positional relationship with a direction in which the alignment process is performed and the optical element overlap in a plane. Disposing and determining a relative positional relationship between the reference polarizer and the substrate in an opposing plane,
In the step of determining the positional relationship, the relative positional relationship between the reference polarizer and the substrate is such that the optical axis of the optical element is in a predetermined direction with respect to the optical axis of the reference polarizer. A method for manufacturing a substrate for a liquid crystal device, wherein It is a manufacturing method of the substrate for liquid crystal devices according to claim 2,
The method for manufacturing a substrate for a liquid crystal device, wherein the predetermined direction is a direction in which the optical axis of the optical element is parallel or orthogonal to the optical axis of the reference polarizer. A method of manufacturing a liquid crystal device, comprising: a pair of substrates disposed opposite to each other; and a liquid crystal layer sandwiched between the pair of substrates,
Preparing the pair of substrates manufactured using the method for manufacturing a substrate for a liquid crystal device according to any one of claims 1 to 3,
Placing the pair of substrates facing each other so that the optical elements formed on the pair of substrates overlap each other in plan view;
Determining a relative positional relationship in the opposing surfaces of the pair of substrates;
Bonding the pair of substrates together,
In the step of determining the positional relationship, the positional relationship between the pair of substrates is adjusted such that the optical axis of the other optical element is in a predetermined direction with respect to the optical axis of the one optical element. A method for manufacturing a liquid crystal device. A method of manufacturing a liquid crystal device according to claim 4,
The method of manufacturing a liquid crystal device, wherein the predetermined direction is a direction in which the optical axis of the other optical element is parallel or orthogonal to the optical axis of the one optical element. A manufacturing method of a liquid crystal device according to claim 5,
Further comprising the step of disposing a polarizing plate on the outside of at least one of the pair of substrates bonded together,
In the step of disposing the polarizing plate, relative to the optical axis of the optical element in a plane in which the pair of substrates and the polarizing plate face each other so that the optical axis of the polarizing plate is in a predetermined direction. A method for manufacturing a liquid crystal device, wherein a specific positional relationship is determined. It is a manufacturing method of the liquid crystal device according to claim 6,
The method of manufacturing a liquid crystal device, wherein the predetermined direction is a direction in which the optical axis of the polarizing plate is parallel or orthogonal to the optical axis of the optical element. A pair of substrates disposed opposite each other;
A liquid crystal layer sandwiched between the pair of substrates;
An alignment film provided on each of the pair of substrates facing the liquid crystal layer,
A liquid crystal device, wherein an optical element having a polarization separation function is provided on at least one of the pair of substrates. The liquid crystal device according to claim 8,
The liquid crystal device, wherein the optical element is provided on each of the pair of substrates. The liquid crystal device according to claim 9,
2. The liquid crystal device according to claim 1, wherein the optical elements provided on the pair of substrates have a region overlapping each other in a plane. The liquid crystal device according to claim 10,
The liquid crystal device, wherein the optical elements provided on the pair of substrates have a region that overlaps with each other in a plane and a region that does not overlap with each other in a plane. The liquid crystal device according to any one of claims 8 to 11,
A liquid crystal device, further comprising: a polarizing plate disposed outside at least one of the pair of substrates. The liquid crystal device according to any one of claims 8 to 12,
The liquid crystal device, wherein the optical element is disposed in a region that does not overlap the liquid crystal layer in a planar manner.   An electronic apparatus comprising the liquid crystal device according to any one of claims 8 to 13.

Images