JP2011077134A - Substrate processing apparatus and substrate processing system equipped with the same - Google Patents

Abstract

There is provided a substrate processing apparatus capable of reducing waiting time and cycle time and performing efficient processing.
In the substrate processing apparatus, the control unit performs “processing” on a part of the fixed storage shelves 25a to 25f and the displacement storage shelves 29a to 29e in the loading / unloading unit 7 between the load port and the processing unit. As well as “for storage” as a stocker. In addition, since the ratio is changed by the control unit, conventionally, even when the FOUP is once transported to an external stocker, the control unit 13 sets the “processing” of the loading / unloading unit 7 to “for storage”. Changing the setting eliminates the need for transport. Therefore, the waiting time and cycle time can be shortened, and efficient processing can be performed.
[Selection] Figure 2

Description

  The present invention relates to a substrate processing apparatus including a processing unit that processes a semiconductor wafer, a glass substrate for a liquid crystal display device (hereinafter simply referred to as a substrate), and an internal buffer, and a substrate processing system including the same. The present invention relates to a technology for transporting a substrate by a FOUP (Front-Opening Unified Pod) that accommodates a plurality of substrates.

  Conventionally, as this type of substrate processing system, a plurality of substrate processing apparatuses that receive a FOUP containing an unprocessed substrate, process the substrate, and deliver the FOUP containing a processed substrate are provided. Between a plurality of substrate processing apparatuses, between a plurality of substrate processing apparatuses and a stocker, and the like. (For example, refer to Patent Document 1). An example of the transfer system is an automated wafer handling system (AMHS).

  In the substrate processing system configured as described above, for example, the FOUP stored in the stocker is transported to a certain substrate processing apparatus and processed in the processing unit, and the processed substrate is transported to the stocker together with the FOUP. It is temporarily stored until the next processing is performed.

  Further, as a substrate processing apparatus including a processing unit for processing a substrate, a plurality of processing units, a loading / unloading port for loading / unloading a FOUP, and an internal buffer arranged between the processing unit and the loading / unloading port, (For example, refer to Patent Document 2). Note that the internal buffer is configured to be capable of accommodating a plurality of FOUPs, and absorbs differences in throughput from other substrate processing apparatuses.

JP 2006-162450 A JP 2006-237559 A

  However, the conventional example having such a configuration has the following problems.

  (1) The substrate stored in the stocker is always transported by the transport system when the next processing is performed by the substrate processing apparatus. After the processing is performed by the substrate processing apparatus, the substrate is transported by the transport system again. After that, when it is determined that the waiting time cannot be adjusted by the internal buffer, it is once returned to the stocker. Therefore, extra time is required to be returned to the stocker, so that there is a problem that the waiting time becomes longer as a whole.

  (2) When the place where the substrate is located in the cycle time is examined by the ratio of time, the time where the substrate is located is about half. Therefore, it is difficult to shorten the cycle time in the entire substrate processing system.

  (3) While semiconductor devices are being miniaturized, the substrate may be stored as a sealed FOUP, but contamination of the substrate may be a problem while being stored in the stocker. Therefore, in order to ensure the cleanliness of the substrate, pre-process cleaning may be performed in another substrate processing apparatus before the original processing is performed in the substrate processing apparatus. When such pre-process cleaning is carried out excessively, the conveyance frequency increases and the conveyance waiting time increases, resulting in a problem that the cycle time becomes long.

  The present invention has been made in view of such circumstances, and a substrate processing apparatus capable of reducing waiting time and cycle time and performing efficient processing, and a substrate processing system including the same The purpose is to provide.

In order to achieve such an object, the present invention has the following configuration.
That is, the invention described in claim 1 is a substrate processing apparatus for processing a substrate accommodated in a FOUP, a loading / unloading port for taking in the FOUP accommodating the substrate and discharging the FOUP, and a processing unit for processing the substrate And an internal buffer that is arranged between the carry-in / out port and the processing unit and has a plurality of shelves on which substrates are placed together with a FOUP, and a part of the plurality of shelves, the carry-in / out port Control means for setting the processing unit with the processing unit, setting it for storage as a stocker, and changing the ratio between processing and storage. is there.

  [Operation / Effect] According to the invention described in claim 1, the control means sets a part of the plurality of shelves in the internal buffer for processing between the carry-in / out port and the processing unit, Set for storage as a stocker. Moreover, since the ratio is dynamically changed by the control means, conventionally, even if the FOUP is once transported to an external stocker, it can be transported by changing the setting of the internal buffer processing for storage. You do n’t have to. Therefore, the waiting time and cycle time can be shortened, and efficient processing can be performed.

  Note that the setting for processing and storage may be changed according to a rule determined in advance by the control means, or based on information received from an external host computer.

  In the present invention, it is preferable that the control means initializes the plurality of shelves approximately half each for the processing and the storage (claim 2). In the initial state, it is unclear how to properly use it. Therefore, it is possible to easily perform a flexible response according to the situation by performing the initial setting almost in half.

  In the present invention, when the control means receives the information for carrying out the storage FOUP in the internal buffer, the control means performs the pre-process cleaning in the processing unit and then sends the FOUP to the carry-in / out port. It is preferable to carry (claim 3). Even in the case of performing pre-process cleaning, it is not necessary to transport from the stocker to the substrate processing apparatus by the transport system, and can be completed inside the substrate processing apparatus. Therefore, the cycle time can be shortened even when pre-process cleaning is performed.

  According to a fourth aspect of the present invention, there is provided a substrate processing apparatus for processing a substrate accommodated in a FOUP, a stocker for temporarily storing a FOUP accommodating a substrate, and the substrate processing apparatus and the stocker. In a substrate processing system comprising a transport system for transporting a FOUP, and a host computer for controlling the substrate processing apparatus, the stocker, and the transport system, the substrate processing apparatus takes in a FOUP containing a substrate and loads the FOUP. An unloading / unloading port; a processing unit for processing a substrate; an internal buffer having a plurality of shelves disposed between the loading / unloading port and the processing unit for mounting the substrate together with the FOUP; , The communication with the host computer, and based on the information received from the host computer, the plurality of A part of, in conjunction with which to set the process in between the unloading port and the processing unit, is characterized in that it comprises a control means for setting for the storage of the stocker.

  [Operation / Effect] According to the invention described in claim 4, the control means of the substrate processing apparatus can convert a part of the plurality of shelves into the carry-in / out port, the processing unit, and the like based on information received from the host computer. It is set for processing during the period and for storage as a stocker. Moreover, since the control means dynamically changes the ratio based on the information received from the host computer, the processing of the internal buffer is conventionally used for storage even when the FOUP is once transported to an external stocker. By changing the setting of the control means, it is not necessary to carry. Therefore, the waiting time and cycle time can be shortened, and efficient processing can be performed.

  In the present invention, it is preferable that the control means initially sets the plurality of shelves to approximately half each for the processing and the storage (claim 5). In the initial state, it is unclear how efficiently it is properly used. Therefore, by setting the initial value almost in half, a flexible response can be easily performed according to the received information.

  In the present invention, when the control means receives information for carrying out the storage FOUP in the internal buffer from the host computer, the control means performs the pre-process cleaning in the processing unit and then carries out the carry-in / out port. It is preferable that the FOUP is transported in a second step (Claim 6). Even in the case of performing pre-process cleaning, it is not necessary to transport from the stocker to the substrate processing apparatus by the transport system, and can be completed inside the substrate processing apparatus. Therefore, the cycle time can be shortened even when pre-process cleaning is performed.

  According to the substrate processing apparatus of the present invention, the control means sets a part of the plurality of shelves in the internal buffer for processing between the carry-in / out port and the processing unit and for storage as a stocker. Set as. In addition, since the control means changes the ratio between processing and storage, conventionally, the control means changes the setting of the internal buffer processing for storage even when the FOUP is once transported to an external stocker. This eliminates the need for transportation. Therefore, the waiting time and cycle time can be shortened, and efficient processing can be performed.

It is a perspective view which shows schematic structure of the substrate processing apparatus which concerns on an Example. It is a perspective view which shows schematic structure of a carrying in / out part. It is a schematic diagram which shows the state of the initial setting of a carrying in / out part. It is a schematic diagram which shows the state of a different setting of a carrying in / out part. 1 is a block diagram showing an overall view of a substrate processing system.

  An embodiment of the present invention will be described below with reference to the drawings.

<Substrate processing equipment>
FIG. 1 is a perspective view illustrating a schematic configuration of a substrate processing apparatus according to an embodiment, and FIG. 2 is a perspective view illustrating a schematic configuration of a carry-in / out section.

  The substrate processing apparatus 1 according to the embodiment takes out a substrate W from a processing unit 3 that performs a predetermined process on the substrate W and a FOUP (Front-Opening Unified Pod) 5 that accommodates an unprocessed substrate W, and processes the unit. 3 and a carry-in / out unit 7 that transfers between the unit 3 and the unit 3. In the drawing, an xyz orthogonal coordinate system in which the z direction is a vertical direction and the xy plane is a horizontal plane is attached.

  The processing unit 3 includes a plurality of types of processing units 9 for performing processing such as cleaning the substrate W and drying the substrate W, for example. In the processing unit 9, the substrate W received from the loading / unloading unit 7 is processed, and the processed substrate W is again delivered to the loading / unloading unit 7.

  The loading / unloading unit 7 includes a load port 11 for loading / unloading the FOUP 5.

  The load port 11 is a unit attached to the loading / unloading unit 7, and the FOUP 5 is transported to / from the loading / unloading unit 7. The load port 11 in the present embodiment is configured so that, for example, two FOUPs 5 can be placed on the upper surface.

  When the FOUP 5 containing the unprocessed substrate W is placed on the load port 11 from the outside, a loading / unloading mechanism (not shown) provided in the load port 11 loads the FOUP 5 into the loading / unloading unit 7. The FOUP 5 emptied by the transfer of the substrate W to the processing unit 3 is carried out from the loading / unloading unit 7 to the load port 11 by a loading / unloading mechanism (not shown) provided in the load port 11. Further, the FOUP 5 containing the unprocessed substrate W and the FOUP 5 containing the processed substrate W are placed on the load port 11 from the inside.

  The load port 11 corresponds to a “carry-in / out port” in the present invention.

  The loading / unloading unit 7 is disposed between the load port 11 and the processing unit 3 and temporarily stores the FOUP 5 loaded from the load port 11 therein. Further, the substrate W accommodated in the FOUP 5 is transferred to the processing unit 3. Furthermore, although the details will be described later, the carry-in / out unit 7 also accommodates a FOUP 5 that is not transferred to the processing unit 3 of the substrate processing apparatus 1 under the instruction of the control unit 13.

  As described above, the substrate W (also referred to as a lot) accommodated in the FOUP 5 in the substrate processing apparatus 1 is transferred from the loading / unloading unit 7 to the processing unit 3, and is loaded again from the processing unit 3 when predetermined processing is completed. Delivered to the exit 7. Accordingly, the carry-in / out section 7 corresponds to an “internal buffer” in the present invention that transfers the substrate W to and from the processing unit 3.

  The substrate processing apparatus 1 is comprehensively controlled by the control unit 13. The control unit 13 includes a memory, a counter / timer, and the like (not shown). The memory stores a recipe that defines a procedure for processing the substrate W, a schedule for operating the processing unit 3 in accordance with the recipe, and the like. The control unit 13 includes a communication unit 15. The communication unit 13 is connected to an external network 17 and has a function of communicating with other devices and host computers (not shown) connected to the network 17.

  Next, the structure of the carry-in / out part 7 will be described with reference to FIG.

  The carry-in / out unit 7 includes a fixed shelf 19 and a displacement shelf 21 that store the FOUP 5 along the vertical direction (z direction), and a transport robot that transports the FOUP 5 accommodated in the fixed shelf 19 and the displacement shelf 21 and the like. 23.

  The fixed shelf row 19 includes a plurality of fixed storage shelves 25 arranged in a row in the vertical direction at predetermined intervals. In this embodiment, six fixed storage shelves 25 are provided. These fixed storage shelves 25 are, in order from the top, fixed storage shelves 25a to 25f. The fixed shelf row 19 is arranged on the left side when viewed from the processing unit 3 side.

  Each of the fixed storage shelves 25 a to 25 f is fixedly attached to a partition wall 27 that cuts off the atmosphere with the processing unit 3. The vertical interval between the fixed storage shelves 25a to 25f is set in accordance with at least the height of the FOUP 5. Therefore, each fixed accommodation shelf 25a-25f can mount one FOUP5. In each of the fixed storage shelves 25a to 25f, the FOUP 5 that stores an unprocessed substrate W, the FOUP 5 that is empty after the substrate W is taken out, and the FOUP 5 that stores a processed substrate W are placed. .

  The displacement storage shelf 21 includes a plurality of displacement storage shelves 29 that are displaced in the vertical direction. In this embodiment, five displacement storage shelves 29 are provided. The displacement storage shelves 29 are, in order from the top, displacement storage shelves 29a to 29e. The displacement storage shelf row 21 is disposed between the placement shelf 31 and the fixed shelf row 19. Each of the displacement storage shelves 29a to 29e can place the FOUP 5 on the upper surface, and the FOUP 5 that stores the unprocessed substrate W, the empty FOUP 5 after the substrate W is taken out, and the processed substrate A FOUP 5 containing W is placed.

  Note that the use of the fixed storage rack 25 and the displacement storage rack 29 described above is changed by the control unit 13 as described later.

  On the right side when the loading / unloading unit 7 is viewed from the processing unit 3 side, a storage shelf 33, an opener 35, a storage shelf 37, and a storage shelf 39 are arranged in order from the top along the vertical direction.

  The storage shelves 33, 37, and 39 are fixedly attached to the partition wall 27, similarly to the fixed shelf row 19. Each of the storage shelves 33, 37, 39 can place one FOUP 5.

  The opener 35 is used to deliver the substrate W stored in the FOUP 5 to the processing unit 3, and is disposed between the storage shelf 33 and the storage shelf 37 disposed along the vertical direction. . When the FOUP 5 containing the unprocessed substrate W is placed on the mounting shelf 31 of the opener 35 by the transfer robot 23, the opener 35 removes the lid (not shown) of the FOUP 5 and unprocessed substrates from the FOUP 5. W is taken out and the unprocessed substrate W is delivered to the processing unit 3 through the opening 41.

  The transfer robot 23 includes two storage shelves of interest among the stationary storage shelves 25 (25a to 25f), the displacement storage shelves 29 (29a to 29e), the storage shelves 33, 37, and 39 and the mounting shelf 31 of the opener 35. The FOUP 5 is transported between the mounting shelves.

  The transfer robot 23 mainly includes a support column 43, a horizontal driving unit 45, and a transfer arm 47.

  The transport arm 47 transports the FOUP 5 while holding it. The support column 43 is provided with a rail 49 in the z direction, and the transfer arm 47 is attached so as to be slidable in the vertical direction along the rail 49.

  The support | pillar 43 is a member extended | stretched to the perpendicular direction, and is attached to the vicinity of the upper end part so that sliding is possible along the guide rail 51 extended in the x direction. Further, the support 43 is connected to the horizontal drive unit 45 at the base end.

  The horizontal direction drive part 45 is slidably attached along the rail part 53 attached to the bottom part. The rail portion 53 is provided with two rails 55 on the upper surface in the x direction, and the horizontal driving portion 45 slides and moves on these rails 55, and the fixed shelf row 19, the displacement shelf row 21, , Move horizontally with the opener 35. Further, since the transfer arm 47 is configured to be movable in the vertical direction along the rail 49, the transfer robot 23 transfers the FOUP 5 in the xz plane within the loading / unloading unit 7.

  In other words, the transfer robot 23 is configured to be able to access any of the fixed storage shelves 25a to 25f, the displacement storage shelves 29a to 29e, the storage shelves 33, 37, and 39, and the mounting shelf 31. When the control unit 13 accesses the fixed storage shelves 25a to 25f, the control unit 13 operates the lifting mechanism (not shown) as necessary to lift and lower the displacement storage shelves 29a to 29e.

  The control unit 13 corresponding to the “control unit” in the present invention uses the fixed shelf row 19 and the displacement shelf row 21 as described above. This proper use will be described with reference to FIGS. FIG. 3 is a schematic diagram showing the initial setting state of the loading / unloading unit, and FIG. 4 is a schematic diagram showing different setting states of the loading / unloading unit.

  In the initial state, as shown in FIG. 3, the control unit 13 sets all the fixed storage shelves 25 a to 25 f in the fixed shelf row 19 to “for storage” and sets all the displacement storage shelves 29 a to 29 e in the displacement shelf row 21 to “ “For processing”. That is, all the shelves included in the fixed shelf row 19 and the displacement shelf row 21 are used approximately half by half. In order to facilitate understanding of the description, the storage shelves 33, 37, and 39 will be described assuming that no shelf type for processing or storage is set.

  The fixed storage shelves 25 a to 25 f of the fixed shelf row 19 set to “for storage” are used by the control unit 13 in the same manner as a stocker installed outside. In other words, the FOUP 5 including the lot (substrate W) that has been input for processing is used until the device that actually performs processing becomes empty, or after the processing is performed in the device, until the next device becomes empty. , Used to make waiting. In addition, when the control unit 13 receives a transport command from the host computer via the communication unit 15 because the device that actually performs processing has become available after the standby time has become longer than the predetermined time, the device is transported to that device. Before performing, it is preferable to perform prescribed pre-process cleaning in the processing unit 3. In this case, it is not necessary to transport from the stocker to the substrate processing apparatus 1 by the transport system, and it can be completed inside the substrate processing apparatus 1. Therefore, the cycle time can be shortened even when pre-process cleaning is performed.

  The displacement storage shelves 29 a to 29 e of the displacement shelf row 21 set to “for processing” are used by the control unit 13 to store the FOUP 5 before being processed by the processing unit 13 and the FOUP 5 after being processed.

  As described above, the shelf type is initially set to approximately half by half, even if it is unclear how to properly use the shelf type by half for storage and processing. Therefore, it is possible to easily perform a flexible response depending on the situation.

  The control unit 13 dynamically changes the setting of the shelf type for each shelf based on a preset rule. Alternatively, the setting of the shelf type may be dynamically changed for each shelf based on information received from the host computer via the communication unit 15.

  For example, if the control unit 13 determines that it is more appropriate to increase processing than storage based on a preset rule, the setting shown in FIG. Change. Specifically, in addition to the displacement storage shelves 29a to 29e of the displacement shelf row 21, the fixed storage shelf 25f of the fixed shelf row 19 is used for processing. Then, the fixed storage shelves 25a to 25e of the fixed shelf row 19 are set for storage. In this way, for example, when it is necessary to transport the FOUP 5 from the stocker to the apparatus, it is conventionally necessary to transport the FOUP 5 in the external stocker if the FOUP 5 is placed on the fixed storage shelf 25f. However, if the FOUP 5 is placed for storage, changing the shelf type as shown in FIG. 3 to FIG. 4 makes it possible to omit the transfer and save the time required for the transfer. . On the other hand, even if it is necessary to transport from the loading / unloading section 7 of the substrate processing apparatus 1 to an external stocker, if the FOUP 5 is placed on the fixed storage shelf 25f, FIGS. As described above, the control unit 13 changes the shelf type, so that the FOUP 5 need not be conveyed. Therefore, the waiting time and cycle time can be shortened, and efficient processing can be performed.

  As described above, in the substrate processing apparatus 1, the control unit 13 uses the fixed storage shelves 25 a to 25 f and the displacement storage shelves 29 a to 29 e in the loading / unloading unit 7 as part of the load port 11 and the processing unit 3. It is set as “for processing”, and “for storage” as a stocker. Moreover, since the ratio is changed by the control unit 13, conventionally, even when the FOUP 5 is once transported to an external stocker, the “processing” of the loading / unloading unit 7 is changed to “for storage”. However, changing the setting eliminates the need for transport. Therefore, the waiting time and cycle time can be shortened, and efficient processing can be performed.

<Substrate processing system>
Next, an example of a substrate processing system including the above-described substrate processing apparatus 1 will be described with reference to FIG. FIG. 5 is a block diagram showing an overall view of the substrate processing system.

  The substrate processing system includes a plurality of the above-described substrate processing apparatuses 1, a stocker 71 arranged for each predetermined number of substrate processing apparatuses 1, and a transport system 73 that transports the FOUP 5 to each substrate processing apparatus 1 and each stocker 71. And a host computer 75 for comprehensively controlling the above-described units. Each unit is communicably connected via a network 17. An example of the transfer system is an automated wafer handling system (AMHS).

  Each substrate processing apparatus 1 sets a part of the plurality of shelves for processing between the load port 11 and the processing unit 3 as described above based on the information received from the host computer 75, as well as the stocker 71. Set for storage as. As these settings, as described above, the total number of shelves for which the shelf type can be set is halved. Moreover, since the ratio is changed by the control unit 13 based on the information received from the host computer 75, the processing of the loading / unloading unit 7 is conventionally performed even when the FOUP 5 is once transported to the external stocker 71. Since the control unit 13 changes the setting for storage, it is not necessary to carry it. Therefore, the waiting time and cycle time can be shortened, and efficient processing can be performed.

  The control unit 13 may change the shelf type together with the information by applying its own rule instead of changing the shelf type based on the information from the host computer 75.

  When the control unit 13 receives a transfer command from the host computer 75 to transfer the FOUP 5 on the storage shelf to another substrate processing apparatus 1, the control unit 13 once processes the current substrate processing apparatus 1. It is preferable to carry out the pre-process cleaning in the unit 3 and then carry it out. In this case, it is not necessary to transport from the stocker 71 to the other substrate processing apparatus 1 by the transport system 73, and it can be completed inside the current substrate processing apparatus 1. Therefore, the cycle time can be shortened even when pre-process cleaning is performed.

  The present invention is not limited to the above embodiment, and can be modified as follows.

  (1) In each of the above-described embodiments, the shelf type is halved in the initial setting. However, even if the ratio of the initial setting is appropriately changed according to the assumed situation, the purpose of use of the substrate processing apparatus 1, and the like. Good. For example, as an initial setting that emphasizes the function as a stocker, 1: 2 for processing: for storage is set to 1: 2, or 1: 3 is set.

  (2) In the above-described embodiments, when transporting from storage, pre-process cleaning is performed inside the current substrate processing apparatus 1, but pre-process cleaning is not necessarily performed.

  (3) In each embodiment described above, the loading / unloading unit 7 includes the fixed shelf row 19 and the displacement shelf row 21, but the displacement shelf row 21 may be configured as the fixed shelf row 19. In this case, the transport robot 23 may be configured to travel on the near side that does not interfere with the shelf, and the transport arm 47 may be configured to be able to advance and retreat with respect to the shelf.

W ... Substrate 1 ... Substrate processing device 3 ... Processing unit 5 ... FOUP
DESCRIPTION OF SYMBOLS 7 ... Carry-in / out part 9 ... Processing part 11 ... Load port 13 ... Control part 15 ... Communication part 17 ... Network 19 ... Fixed shelf row 21 ... Displacement shelf row 23 ... Transfer robot 25 ... Fixed accommodation shelf 25a-25f ... Fixed accommodation shelf 27 ... Partition 29 ... Displacement storage shelf 29a-29e ... Displacement storage shelf 31 ... Mounting shelf 33 ... Storage shelf 35 ... Opener 41 ... Opening 43 ... Post 71 ... Stocker 73 ... Transport system 75 ... Host computer

Claims (6)

In a substrate processing apparatus for processing a substrate accommodated in a FOUP,
A loading / unloading port that takes in the FOUP containing the substrate and pays out the FOUP;
A processing unit for processing a substrate;
An internal buffer having a plurality of shelves arranged between the carry-in / out port and the processing unit and mounting the substrate together with the FOUP;
A part of the plurality of shelves is set for processing between the carry-in / out port and the processing unit, is set for storage as a stocker, and the ratio between processing and storage is changed. Control means;
A substrate processing apparatus comprising: The substrate processing apparatus according to claim 1,
The substrate processing apparatus is characterized in that the control means initially sets the plurality of shelves in half for the processing and the storage. The substrate processing apparatus according to claim 1 or 2,
The control means, when receiving the information for carrying out the storage FOUP in the internal buffer, transports the FOUP to the carry-in / out port after performing pre-process cleaning in the processing unit. Substrate processing apparatus. A substrate processing apparatus for processing a substrate accommodated in a FOUP, a stocker for temporarily storing a FOUP accommodating a substrate, a transport system for transporting a FOUP between the substrate processing apparatus and the stocker, and the substrate processing In a substrate processing system comprising an apparatus, a host computer for controlling the stocker and the transport system,
The substrate processing apparatus includes:
A loading / unloading port that takes in the FOUP containing the substrate and pays out the FOUP;
A processing unit for processing a substrate;
An internal buffer having a plurality of shelves arranged between the carry-in / out port and the processing unit and mounting the substrate together with the FOUP;
Communication with the host computer is possible, and a part of the plurality of shelves is set for processing between the carry-in / out port and the processing unit based on information received from the host computer. Along with the control means set for storage as a stocker,
A substrate processing system comprising: The substrate processing system according to claim 4, wherein
The substrate processing system is characterized in that the control means initially sets the plurality of shelves in half for the processing and the storage. The substrate processing system according to claim 3 or 4,
The control means, when receiving information to carry out the storage FOUP in the internal buffer from the host computer, transports the FOUP to the carry-in / out port after performing pre-process cleaning in the processing unit. A substrate processing system.

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