JP2011041295A - Physical quantity distribution detection apparatus and physical information acquisition apparatus - Google Patents

Abstract

A signal acquisition method with excellent noise resistance in a CMOS imaging device is provided.
A signal conversion unit generates a modulated wave by frequency-modulating or phase-modulating a carrier signal based on a pixel signal output from an imaging unit via a vertical signal line. The AD conversion unit 120 uses the modulated wave generated by the signal conversion unit 100 to efficiently perform AD conversion processing by pulse count processing. The pixel signal detected by the imaging unit is not transmitted to the output side as a voltage mode or current mode pixel signal, but is converted into a modulated signal related to the frequency and transmitted, so that noise resistance is good. Even when the counter clock or gate signal used for the count processing for AD conversion is wired to the AD conversion processing unit, it is easy to adopt a mechanism for lowering the frequency of the counter clock or gate signal. It is possible to easily reduce noise and power consumption problems caused by.
[Selection] Figure 2

Description

  The present invention relates to a physical quantity distribution detection device, a physical information acquisition method, and a physical information acquisition device. More specifically, for example, a plurality of unit components that are sensitive to electromagnetic waves input from the outside such as light and radiation are arranged, and the physical quantity distribution converted into an electric signal by the unit components is converted into an electric signal. For example, the present invention relates to a technique for acquiring information for a predetermined purpose, which is suitable when using a physical quantity distribution detection device (physical quantity distribution detection device) such as a solid-state imaging device. In particular, the present invention relates to noise resistance when a signal detected by a detection unit is an analog signal or converted into digital data and transmitted to the output side.

  For example, physical quantities formed by arranging multiple unit components (for example, pixels) that are sensitive to changes in physical quantities, such as electromagnetic waves input from outside such as light and radiation, or pressure (contact etc.) Distribution detection semiconductor devices are used in various fields.

  As an example, in the field of video equipment, a CCD (Charge Coupled Device) type, a MOS (Metal Oxide Semiconductor) or a CMOS (Complementary Metal-oxide) that detects changes in light (an example of an electromagnetic wave), which is an example of a physical quantity. A solid-state imaging device using a semiconductor (complementary metal oxide semiconductor) type imaging device (imaging device) is used.

  In the field of computer equipment, fingerprint authentication devices that detect fingerprint images based on changes in electrical characteristics based on pressure and changes in optical characteristics are used. These read out, as an electrical signal, a physical quantity distribution converted into an electrical signal by a unit component (a pixel in a solid-state imaging device).

  Further, in some solid-state imaging devices, an amplifying solid-state imaging device (APS; Active Pixel Sensor) that has a driving transistor for amplification in a pixel signal generation unit that generates a pixel signal corresponding to the signal charge generated in the charge generation unit. There is an amplification type solid-state imaging device including a pixel having a configuration (also called a gain cell or an in-pixel amplifier). For example, many CMOS solid-state imaging devices have such a configuration (see, for example, Non-Patent Document 1).

Kazuya Yonemoto, “Basics and Applications of CCD / CMOS Image Sensors”, CQ Publisher, August 10, 2003, First Edition: Chapters 6 and 7

  In such an amplification type solid-state imaging device, in order to read out a pixel signal to the outside, address control is performed on an imaging unit in which a plurality of unit pixels are arranged, and a signal from each unit pixel is determined at a predetermined address. The data is read out in order or arbitrarily. That is, the amplification type solid-state imaging device is an example of an address control type solid-state imaging device.

  In the address-type solid-state imaging device, for example, a MOS transistor is used as a switching element for selecting a pixel or a switching element for reading a signal charge. Further, MOS transistors are used in the horizontal scanning circuit and the vertical scanning circuit, and there is an advantage that the switching element and the imaging unit can be manufactured with a series of configurations.

  For example, in a MOS type solid-state imaging device, each unit pixel has a MOS transistor, and the signal charge accumulated in the pixel by photoelectric conversion is read to the pixel signal generation unit, and the signal charge is read as a current signal or voltage signal. It is the structure which converts to and outputs.

  For example, an amplification type solid-state imaging device which is a kind of XY address type solid-state imaging device in which unit pixels are arranged in a matrix form an active element (MOS transistor) such as a MOS structure in order to give the pixel itself an amplification function. ) To form a pixel. That is, signal charges (photoelectrons and holes) accumulated in a photodiode which is a photoelectric conversion element are amplified by the active element of the pixel signal generation unit and read out as image information.

  By the way, in this type of XY address type solid-state imaging device, for example, an imaging unit is configured by arranging a large number of pixel transistors in a two-dimensional matrix, and a signal corresponding to incident light for each line (row) or each pixel. Charge accumulation is started, and a current or voltage signal based on the accumulated signal charge is sequentially read out from each pixel by addressing. Here, in the MOS (including CMOS) type, as an example of address control, a method of simultaneously accessing one row and reading out pixel signals from the imaging unit in units of rows (hereinafter also referred to as a row unit readout method or a column readout method). ) Is often used.

  FIG. 14 is a schematic configuration diagram of a column readout type solid-state imaging device 1. The solid-state imaging device 1 includes a drive control unit 7 having a horizontal scanning unit 12 and a vertical scanning unit 14 around an imaging unit 10 having a pixel array structure in which a plurality of unit pixels 3 are arranged in rows and columns. It has. In addition to the horizontal scanning unit 12 and the vertical scanning unit 14, the drive control unit 7 receives a master clock CLK0 from the outside, generates various internal clocks, and controls the horizontal scanning unit 12, the vertical scanning unit 14 and the like. A timing controller 11 having a configuration of “Lock Loop (phase synchronization circuit)” is provided. In addition, a column processing unit 20 as a signal processing unit that processes pixel signals output from the imaging unit 10, a horizontal selection switch unit 60 having a selection switch (SW) 60a, a horizontal signal line 86, and an output unit 88 It has.

  As an example, 1280 unit pixels 3 in the horizontal direction (H) and 960 unit pixels 3 in the vertical direction (V) are arranged in the imaging unit 10. Each unit pixel 3 is connected to a row control line 15 controlled by the vertical scanning unit 14 and a vertical signal line 18 that transmits a pixel signal to the column processing unit 20.

  The column processing unit 20 has a storage capacity (not shown), a noise removing unit 22a using a CDS (Correlated Double Sampling) process, and a unit for sampling / holding (S / H) a signal (S / H unit). ) Column signal processing unit 22 having 22b.

  In such a configuration, in the 1H period (for example, 63.3 μS) for processing one row, the period required for reading out the pixel signal from the imaging unit 10 is about 8.5 μS, and the horizontal selection switch unit 60 The period required for horizontal transfer is the remaining 54.8 μS.

  The analog pixel signal read from the imaging unit is converted into digital data by an analog-digital converter (AD converter; Analog Digital Converter) as necessary. In the configuration of FIG. 14, as an example, an AD converter (ADC) is incorporated in the output unit 88.

  Here, generally, since the pixel signal is output in a form in which the signal component is added to the reset component, by taking the difference between the signal voltage corresponding to the reset component and the signal voltage corresponding to the signal component, It is necessary to extract a true effective signal component.

  The same applies to the case where an analog pixel signal is converted into digital data. Finally, the difference signal component between the signal voltage corresponding to the reset component and the signal voltage corresponding to the signal component needs to be converted to digital data. For this reason, various AD conversion mechanisms have been proposed (see, for example, Non-Patent Document 1 and Non-Patent Documents 2 to 5 below).

W. Yang et. Al., “An Integrated 800x600 CMOS ImageSystem,” ISSCC Digest of Technical Papers, pp. 304-305, Feb., 1999 Toshifumi Imamura and Miko Yamamoto, “3. Research on high-speed and functional CMOS image sensors”, [online], [March 15, 2004 search], Internet <URL: http://www.sankaken.gr.jp/ project / iwataPJ / report / h12 / h12index.html> Toshifumi Imamura, Miko Yamamoto, Naoya Hasegawa, “3. Research on high-speed and functional CMOS image sensors”, [online], [Search on March 15, 2004], Internet <URL: http://www.sankaken.gr .jp / project / iwataPJ / report / h14 / h14index.html> Oh-Bong Kwon et. Al., “A Novel Double Slope Analog-to-Digital Converter for a High-Quality 640x480 CMOS Imaging System”, VL3-03 1999 IEEE p335-338

  For example, in Non-Patent Documents 1 to 5, the signal output of pixels arranged in a matrix is read out sequentially to a vertical signal line for each row, and then digital data is output by an AD conversion circuit provided for each vertical signal line. The mechanism to convert to is disclosed. Hereinafter, such an AD method is also referred to as a column ADC method.

  Here, in the AD conversion mechanism described in Non-Patent Documents 1 to 5 (column ADC method), more specifically, the voltage of a ramp waveform whose voltage value changes with a certain slope from the pixel signal from the imaging unit (see Signal RAMP) and the time required for the comparison process is counted by the counter clock. Specifically, the count waveform starts when the comparison is started, and the voltage of the ramp waveform when the comparator output is inverted is calculated. By outputting a counter value (digital data) to be expressed, the pixel signal of each vertical column is converted into digital pixel data for each vertical column.

  FIG. 15 is a schematic configuration diagram of a column ADC type solid-state imaging device 1. The solid-state imaging device 1 includes a drive control unit 7 provided outside the imaging unit 10, a column processing unit 20 having a count processing unit (CNT) 23 and a column AD circuit 24 arranged for each vertical column, A reference signal generation unit 26 having a DAC (Digital Analog Converter) that supplies a reference voltage for AD conversion to the column AD circuit 24 of the processing unit 20 and a function as a sense amplifier using digital signal processing And an output unit 88.

  The column AD circuit 24 passes through the reference voltage RAMP generated by the reference signal generator 26 and the vertical signal line 18 (H1, H2,...) From the unit pixel 3 for each row control line 15 (V1, V2,...). A voltage comparison unit 242 that compares the obtained analog pixel signal, and a memory that holds, for each bit data, a result of counting the time until the voltage comparison unit 242 completes the comparison process using the count processing unit 24 The data storage unit 244 includes two sets of n latches (flip-flops) as a device, and has an n-bit AD conversion function. By having two sets of n latches, data corresponding to the reset component and data corresponding to the signal component can be individually held.

  One input terminal of the voltage comparison unit 24 is input with the stepped reference voltage RAMP generated by the reference signal generation unit 26 in common with the input terminal of the other voltage comparison unit 242, and the other input terminal has The vertical signal lines 18 in the corresponding vertical columns are connected to each other, and the pixel signal voltages from the imaging unit 10 are individually input. The output signal of the voltage comparison unit 242 is supplied to the data storage unit 244.

  The count processing unit 24 performs a count process based on a counter clock CK0 (for example, both clock frequencies are equal) corresponding to the master clock CLK0, and count outputs CK1, CK2,..., CKn together with a counter clock CK0 for synchronization, This is supplied to each column AD circuit 24 of the column processing unit 20 in common.

  That is, the column AD circuit 24 of each vertical column can be arranged by routing the wiring of the count outputs CK1, CK2,..., CKn from the count processing unit 24 to each latch of the data storage unit 244 arranged for each vertical column. One count processing unit 24 is used in common.

  The output side of each column AD circuit 24 is connected to a horizontal signal line 86. The horizontal signal line 86 has a signal line having a width of 2n bits, and is supplied to 2n sense amplifiers corresponding to the respective output lines (not shown) in the output unit 88. A subtracting circuit (not shown) is provided in the output unit 88, and true effective signal data is extracted by taking the difference between the data corresponding to the reset component and the data corresponding to the signal component. .

  According to such a column ADC system, AD conversion is performed in each column (vertical column), which is advantageous for increasing the reading speed and the AD conversion processing.

  However, in the conventional physical quantity distribution detection semiconductor device, as described above, the signal charge accumulated in the pixel by photoelectric conversion is read to the pixel signal generation unit, and the signal charge is converted into a current signal or a voltage signal and output. It has become.

  That is, information transmission is performed by assigning a magnitude according to a signal charge amount to a voltage amplitude or a current amplitude and assigning a unit signal amount according to the difference in strength. For this reason, there is a problem that the output signal is easily affected by the substrate bias effect and the wiring length and is inferior in noise resistance (referred to as a first problem).

  Also, in AD conversion, signal charges are converted into current signals and voltage signals, and then AD conversion is performed. Therefore, the above-mentioned substrate bias effect and the influence of the wiring length appear in the AD conversion result, and the first problem is similarly generated. To do.

  In addition, the column ADC system has the following problems when it is applied to a larger-scale (20 million pixel class) and high-speed (500 fps) CMOS image sensor.

  For example, as the ramp signal line becomes longer, the resistance, the wiring capacity, and the total connected gate capacity increase. The value varies depending on the position inside the chip, and the longer the ramp signal line, the greater the influence. As a result, the voltage of the ramp signal line (reference signal RAMP) varies depending on the position inside the CMOS image sensor chip, and the color sensitivity of each pixel cannot be corrected accurately, and it appears as shading of an image. The second problem).

  This becomes more conspicuous when an attempt is made to operate a CMOS image sensor having a large chip size and a high conversion speed. In other words, when the sensor chip size increases and a high conversion rate is required, it becomes difficult to accurately and quickly transmit the reference signal for AD conversion processing to all the comparators. Sensitivity correction (color sensitivity correction in the case of color) cannot be performed.

  Further, when the number of pixels is increased, the AD conversion using the reference voltage requires a processing period. That is, the conventional column ADC configuration shown in FIG. 15 is difficult in terms of high-speed AD conversion. In order to shorten the AD conversion processing time, it is conceivable to increase the frequency of the counter clock CK0. Then, the counter clock CK0 for synchronization and the count outputs CK1, CK2,. Therefore, it is necessary to wire up to each latch of the data storage unit 244 arranged for each vertical column, and this wiring leads to an increase in noise and power consumption (referred to as a third problem).

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a new mechanism that can solve at least one of the first to third problems.

  A physical information acquisition apparatus according to the present invention is an apparatus suitable for carrying out the physical information acquisition method according to the present invention, and converts a carrier signal into a signal related to a frequency based on change information detected by a detection unit. A signal conversion unit for conversion is provided, and physical information for a predetermined purpose is acquired using a signal related to the frequency generated by the signal conversion unit.

  The physical quantity distribution detection device according to the present invention is a device used to carry out the physical information acquisition method and physical information acquisition device according to the present invention, and carries a carrier signal based on change information detected by a detection unit. AD that converts the signal to be processed into digital data by using the signal related to the frequency generated by the signal converter or the signal related to the frequency generated by the signal converter as the signal to be processed. The conversion processing unit and unit components are provided on a detection area arranged in a predetermined order.

  Further, the invention described in the dependent claims defines further advantageous specific examples of the physical information acquisition method, the physical information acquisition device, or the physical quantity distribution detection device according to the present invention.

  For example, the configuration further includes an AD conversion processing unit that converts the processing target signal into digital data using the change information detected by the detection unit as a processing target signal using a signal related to the frequency generated by the signal conversion unit. You can also.

  The signal conversion unit and the AD conversion processing unit may be provided outside the detection region in which the unit components are arranged in a predetermined order, but may be provided on the detection region. In the latter case, it is desirable that the area occupied by the signal conversion unit and the AD conversion processing unit should not affect the physical information detection processing in the detection unit.

  In this case, as a technique for reducing the number of signal conversion units and AD conversion processing units, when only the signal conversion unit is provided on the detection region, one signal conversion unit is assigned to a plurality of unit components, or A configuration may be adopted in which a selection switching unit that assigns one output terminal to a plurality of signal conversion units is provided.

  Further, when both the signal conversion unit and the AD conversion processing unit are provided on the detection region, a configuration in which a selection switching unit that assigns one output terminal to the plurality of signal conversion units and / or the AD conversion processing unit is provided. Take it. Needless to say, the selection switching unit is also provided on the detection region. ,

  Further, when the signal conversion unit, the AD conversion processing unit, and the selection switching unit are provided on the detection region, the physical quantity distribution detection device is preferably a backside illumination type. Here, the backside illumination type in the present invention has a semiconductor element layer that forms a signal conversion unit, an AD conversion processing unit, and a selection switching unit on one surface side with respect to the element layer on which the detection unit is formed. Means that the physical quantity is configured to be incident on the detection unit from the other surface side of the element layer.

  In addition, it is not essential that all of the signal conversion unit, the AD conversion processing unit, and the selection switching unit are provided in the same semiconductor element layer, and at least the signal conversion unit, the AD conversion processing unit, and the selection switching unit are provided on the other side. It may be formed in any number of semiconductor element layers on the side opposite to the side. For example, the signal conversion unit, the AD conversion processing unit, and the selection switching unit may be provided in individual semiconductor element layers.

  The signal conversion unit only needs to have a function of converting the carrier signal into a modulated signal related to the frequency based on the change information detected by the detection unit, and the frequency component itself of the carrier signal is changed as a modulation signal. A frequency modulation unit that modulates with information can be provided, and a phase modulation unit that modulates the phase component of the carrier signal with change information as a modulation signal can also be provided.

  In addition, the AD conversion processing unit performs pulse count processing on a predetermined count target pulse width with the signal output from the signal conversion unit, thereby converting the processing target signal, which is change information detected by the detection unit, into digital data. It is advisable to adopt a configuration for conversion. At this time, it is preferable to adopt a mechanism for lowering these frequencies in order to reduce problems such as noise and power consumption due to wiring of the counter clock and the gate signal to be measured.

  For example, when a frequency modulation unit is provided as the signal conversion unit, the pulse width of the reference signal may be counted from the output signal of the frequency modulation unit. By counting the pulse width of the reference signal using the signal output from the signal converter as a counter clock (counting), the frequency of the reference signal as the gate signal used for the AD conversion counting process is set. Can be lowered. Alternatively, the frequency modulation unit can divide the output signal and use it as a gate signal to lower the frequency and count the pulse width with the reference signal.

  In addition, when a phase modulation unit is provided as a signal conversion unit, a phase discrimination unit that extracts phase information based on a reference signal having a predetermined frequency and a signal output from the phase modulation unit is provided and output from the phase discrimination unit. What is necessary is just to count the width | variety of the count object pulse showing phase information with the signal output from the reference signal of a predetermined frequency, or a phase modulation part.

  In this case, a mechanism for lowering the frequency of the counting target pulse representing the phase information may be employed. That is, the frequency of the count target pulse as a gate signal used in the count process for AD conversion is lowered.

  In addition, when the difference signal component between the reference component and the signal component of the analog processing target signal represented including the reference component and the signal component is converted into digital data, the configuration of the AD conversion processing unit is down It is desirable to employ a configuration that includes a count processing unit that performs count processing in one of the count mode and the up-count mode, and holds the count value at the time of completion of processing. At this time, it is preferable to switch the count processing mode depending on which of the reference component and the signal component is being processed.

  Here, as the mode switching process of the count process, as a first process, any one of a reference component and a signal component having different physical properties in one processing target signal output from the same unit element such as a pixel is used. The signal corresponding to one is counted in either the down count mode or the up count mode, and the count value at the time of completion is held.

  Thereafter, as the second process, the other of the reference component and the signal component is counted in the other one of the down-count mode and the up-count mode, and the count value when the comparison process is completed is calculated. Hold.

  By doing so, the count value held after the second process becomes a difference from the first count value. That is, by performing the count process twice while switching the count mode, a digital value corresponding to the difference between the reference component and the signal component is obtained as the count value of the second count process.

  It should be noted that the signal component to be processed in the second processing only needs to indicate at least the true signal component in the processing target signal, and does not mean only the true signal component. May include a noise component, a reset component, and the like.

  In addition, the reference component and the signal component are relative, and the difference signal component between the reference component and the signal component is, in short, the physical property of one processing target signal output from the same unit element such as a pixel. Any difference component between two different signal components may be used.

  When performing the counting process for the reference component and the signal component, the width of a predetermined pulse to be counted is pulse-counted (counted) using the signal output from the signal conversion unit as a counter clock, so that the reference component and It is preferable to obtain a count value corresponding to each magnitude of the signal component. The frequency of the gate signal used for the count processing for AD conversion can be lowered.

  When performing count processing in the down count mode or the up count mode, it is preferable to switch the processing mode while using a common up / down counter. By doing so, the counter circuit used for the counting process can be made compact. In addition, by performing the counting process by switching between the two modes, the subtraction process between the reference component and the signal component can be performed directly, and a special subtractor for taking the difference between the reference component and the signal component is not necessary.

  The count process in the second process is preferably started from the count value held in the first process. By doing so, the count value held after the second processing becomes a digital value of the difference between the reference component and the signal component itself.

  Here, if the count process is performed for the reference component as the first process and the count process is performed for the signal component as the second process, the count value held after the second process is equal to the signal component side. The digital value is obtained by subtracting the reference component side from.

  In addition, when the signal to be processed of a unit component such as a pixel is a signal component that appears after the reference component as a time series, the second processing is processing for a signal obtained by adding the signal component to the reference component, The count value held after the second process represents the signal component of the unit component.

  In addition, if the processing for the reference component is performed in the down-count mode and the processing for the signal component is performed in the up-count mode, the count value retained after the two processings is determined from the signal component side. A digital value obtained by subtracting the component side is obtained as a positive value.

  If these two are combined and the down-count process is performed for the reference component as the first process and the up-count process is performed for the signal component as the second process, the count retained after the second process The digital value obtained by subtracting the reference component side from the signal component side is obtained as a positive value. If the signal to be processed of the unit component is a signal component that appears after the reference component as a time series, it is convenient because digital data representing the effective signal component of the unit component is obtained as a positive value.

  In addition, the count value held in the second process for the previous process target signal is further stored in another data storage unit, and the first process and the second process are performed for the current process target signal. When performing, it is preferable to perform the reading process of the count value from the data storage unit in parallel. In short, the overall processing time is shortened by using pipeline processing for AD conversion processing using count processing and processing for reading out AD conversion results to the outside. Even in the case of performing the pipeline operation in which the AD conversion process and the read process are performed in parallel, it is only necessary to have one memory device for holding the AD converted data for each AD conversion unit. Can be minimized.

  The above-described AD conversion processing includes in a unit component a charge generation unit that generates a charge corresponding to an incident electromagnetic wave, and a unit signal generation unit that generates a unit signal according to the charge generated by the charge generation unit, Processing for converting analog unit signals generated by the unit signal generation unit and output in the column direction into digital data as processing target signals in a semiconductor device for physical quantity distribution detection in which the unit components are arranged in a matrix Can be used.

  In this way, when the unit components are arranged in a two-dimensional matrix, the analog unit signal generated by the unit signal generation unit and output in the column direction is accessed and fetched in units of rows (in column parallel) ( (Vertical) Scan reading is performed, and it is preferable to speed up reading of unit signals and AD conversion processing by performing the first process and the second process for each unit component in this line unit. .

  Further, in the case where the unit components are arranged in a two-dimensional matrix, when the signal conversion unit and the AD conversion processing unit are provided outside the detection area, these are the arrangement directions of the unit component columns. It is preferable to provide a plurality in the row direction.

  The signal conversion unit takes in analog unit signals generated by the unit signal generation unit and output in the column direction in units of rows, and the AD conversion processing unit is in charge of each unit component in units of rows. It is better to perform the process. Further, the unit signal generation unit preferably has a semiconductor element for amplification.

  Here, if the charge generation unit has a photoelectric conversion element that receives light as electromagnetic waves and generates charge corresponding to the received light, the semiconductor device is configured as a solid-state imaging device. be able to.

  According to the present invention, the carrier signal is converted into a signal related to the frequency (modulated signal) based on the change information detected by the detection unit, and the physical information for a predetermined purpose is acquired using the modulated signal. It was.

  The change information detected by the detection unit is not transmitted to the output side as a voltage mode or current mode signal, but is converted to a modulated signal related to the frequency and transmitted, so that the carrier signal (modulated signal) Even if the amplitude, frequency, or phase fluctuates, it has little effect on the signal carried by the modulated signal, is less susceptible to substrate bias effects, wiring length, wiring capacity, total gate capacity, etc. When the input signal becomes weak, the degradation amount of the SN ratio (signal power to noise power ratio) is small, and the noise resistance is good.

  Further, AD conversion processing can be efficiently performed by performing AD conversion processing by pulse count processing in the AD conversion processing unit using the modulated wave generated in the signal conversion unit. In addition, even when the counter clock and gate signal used for the count processing for AD conversion are wired to the AD conversion processing unit, it is easy to adopt a mechanism for reducing the frequency of the counter clock and gate signal. It is possible to easily reduce noise and power consumption caused by routing.

FIG. 1 is a schematic configuration diagram of a first embodiment of a CMOS solid-state imaging device which is an embodiment of a physical information acquisition device according to the present invention. 3 is a diagram for explaining a signal conversion unit 100 and an AD conversion unit 120 provided in a column signal processing unit 22. FIG. 6 is a timing chart for explaining the operation of the first example in the column signal processing unit (particularly, the signal conversion unit and the AD conversion unit) of the solid-state imaging device of the first embodiment shown in FIG. 1. 7 is a timing chart for explaining the operation of the second example in the column signal processing unit (particularly, the signal conversion unit and the AD conversion unit) of the solid-state imaging device according to the first embodiment shown in FIG. 1. It is a schematic block diagram of 2nd Embodiment of the CMOS solid-state imaging device which is one Embodiment of the physical information acquisition apparatus which concerns on this invention. 6 is a timing chart for explaining an operation in a column signal processing unit (particularly, a signal conversion unit and an AD conversion unit) of the solid-state imaging device of the second embodiment shown in FIG. 5. It is FIG. (1) explaining the 1st example of 3rd Embodiment of the CMOS solid-state imaging device which is one Embodiment of the physical information acquisition apparatus which concerns on this invention. It is FIG. (2) explaining the 1st example of 3rd Embodiment of the CMOS solid-state imaging device which is one Embodiment of the physical information acquisition apparatus which concerns on this invention. It is a figure explaining the 2nd example of 3rd Embodiment of the CMOS solid-state imaging device which is one Embodiment of the physical information acquisition apparatus which concerns on this invention. It is a figure explaining the 1st example of 4th Embodiment of the CMOS solid-state imaging device which is one Embodiment of the physical information acquisition apparatus which concerns on this invention. It is a figure explaining the 2nd example of 4th Embodiment of the CMOS solid-state imaging device which is one Embodiment of the physical information acquisition apparatus which concerns on this invention. It is a figure explaining 5th Embodiment of the CMOS solid-state imaging device which is one Embodiment of the physical information acquisition apparatus which concerns on this invention. It is sectional drawing which shows an example of the structure of the back surface irradiation type imaging part 10 suitable for implement | achieving 3rd-5th embodiment, and a peripheral circuit part. 1 is a schematic configuration diagram of a column readout type solid-state imaging device. 1 is a schematic configuration diagram of a column ADC type solid-state imaging device.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following, a case where a CMOS image sensor, which is an example of an XY address type solid-state imaging device, is used as a device will be described as an example.

  However, this is merely an example, and the target device is not limited to a MOS imaging device. Embodiments described later are applied to all semiconductor device for physical quantity distribution detection in which a plurality of unit components that are sensitive to electromagnetic waves input from the outside such as light and radiation are arranged in a line or matrix. The same applies.

<Schematic Configuration of Imaging Device; First Embodiment>
FIG. 1 is a schematic configuration diagram of a first embodiment of a CMOS solid-state imaging device which is an embodiment of a physical information acquisition device according to the present invention. The solid-state imaging device 1 is applied as, for example, an electronic still camera or an FA (Factory Automation) camera that can capture a color image. The solid-state imaging device 1 is an example of a physical quantity distribution detection device.

  The solid-state imaging device 1 has an image pickup in which unit pixels including light receiving elements as detection units that output signals corresponding to the amount of incident light are arranged in a square lattice of rows and columns (that is, a two-dimensional matrix). A column-type signal output from each unit pixel is a voltage signal, and a CDS (Correlated Double Sampling) processing function section and other function sections are provided for each vertical column It is.

  Here, in the configuration of the first embodiment, the “functional unit that converts the carrier signal into a signal related to the frequency based on the signal charge reflecting the light amount”, which is a characteristic part of the present invention, is provided in the column processing unit 20. It is characterized in that it is provided. This will be specifically described below.

  That is, as shown in FIG. 1A, in the solid-state imaging device 1 of the first embodiment, a large number of unit pixels 3 (an example of unit constituent elements) are arranged in rows and columns (in a two-dimensional matrix). An imaging unit (pixel unit) 10, a so-called area sensor unit, a drive control unit 7 provided outside the imaging unit 10, and a column signal processing unit (referred to as a column circuit in the figure) 22 arranged in each vertical column The column processing unit 20 includes a horizontal selection switch unit 60. Although not shown, an external circuit is provided on a circuit board different from the semiconductor region in which the imaging unit 10 is provided.

  The read current source unit 27 is provided on a signal path (vertical signal line 18) between the imaging unit 10 and the column processing unit 20, and each vertical signal having both functions of a signal read line and a read current supply line. A load transistor unit including a load MOS transistor (not shown) having a drain terminal connected to the line 18 is arranged, and a load control unit (load MOS controller) for driving and controlling each load MOS transistor is provided. At this time, the current supply of the vertical signal line 18 is controlled on / off every time the read row is switched for the purpose of reducing the current consumption and eliminating the influence of the accumulated charge on the parasitic capacitance.

  As the drive control unit 7, for example, a horizontal scanning unit 12 and a vertical scanning unit 14 are provided. Further, as another component of the drive control unit 7, a drive signal operation for supplying a control pulse at a predetermined timing to each functional unit of the solid-state imaging device 1 such as the horizontal scanning unit 12, the vertical scanning unit 14, or the column processing unit 20. A unit (an example of a read address control device) 16 is provided.

  Each element of the drive control unit 7 is integrally formed in a semiconductor region such as single crystal silicon together with the imaging unit 10 using a technique similar to the semiconductor integrated circuit manufacturing technique, and is a solid-state imaging that is an example of a semiconductor system. It is configured as an element (imaging device).

  In FIG. 1, some of the rows and columns are omitted for the sake of simplicity, but in reality, tens to thousands of unit pixels 3 are arranged in each row and each column of the imaging unit 10. . Although not shown, the imaging unit 10 is formed with a color separation filter and an on-chip lens having a predetermined color coding for each pixel. Although not shown, each unit pixel 3 of the imaging unit 10 is configured by a photoelectric conversion element such as a photodiode or a photogate, and a transistor circuit.

  The unit pixel 3 is output from the unit pixel 3 after being amplified by a vertical scanning unit 14 via a vertical control line 15 for selecting a vertical column and a unit signal generation unit having an amplification element detected by a plurality of detection units. Are connected to the column processing unit 20 via vertical signal lines 18 as transmission lines for transmitting the pixel signals S0 (_1 to h; pixel numbers in one row).

  The horizontal scanning unit 12 and the vertical scanning unit 14 start a shift operation (scanning) in response to a driving pulse given from the driving signal operation unit 16. The vertical control line 15 includes various pulse signals for driving the unit pixel 3.

  The horizontal scanning unit 12 defines a horizontal readout column (horizontal address) (selects each column signal processing unit 22 in the column processing unit 20), a horizontal address setting unit 12x, and a horizontal address setting unit 12x. The horizontal drive unit 12y guides each signal of the column processing unit 20 to the horizontal signal line 86 in accordance with the read address defined in FIG.

  Although not shown, the horizontal address setting unit 12x includes a shift register or a decoder, selects pixel information from the column signal processing unit 22 in a predetermined order, and selects the selected pixel information as a horizontal signal. It functions as a selection means for outputting to the line 86.

  The vertical scanning unit 14 defines a vertical readout row (vertical address) and a horizontal readout column (horizontal address) (selects the row of the imaging unit 10), and a vertical address setting unit 14x. A vertical drive unit 14y for driving the unit pixel 3 by supplying a pulse to the row control line 15 for the unit pixel 3 on the read address in the horizontal direction defined by the address setting unit 14x.

  Although not shown in the drawing, the vertical address setting unit 14x has a shutter shift register for controlling the row for the electronic shutter in addition to the vertical shift register or the decoder for performing the basic control of the row from which the signal is read.

  The vertical shift register is for selecting each unit pixel 3 in units of rows when reading pixel information from the imaging unit 10, and constitutes a signal output row selection means together with the vertical drive unit 14y of each row. The shutter shift register is for selecting each pixel in units of row when performing the electronic shutter operation, and constitutes an electronic shutter row selection means together with the vertical drive unit 14y of each row.

  Although not shown, the drive signal operation unit 16 is provided with a functional block of a timing generator TG (an example of a read address control device) that supplies a clock signal required for the operation of each unit and a pulse signal with a predetermined timing, and a terminal 1a. A communication interface functional block that receives data instructing an input clock CLK0, an operation mode, and the like and outputs data DATA including information of the solid-state imaging device 1 via a terminal 1b. Also, the horizontal address signal is output to the horizontal address setting unit 12x and the vertical address signal is output to the vertical address setting unit 14x, and each address setting unit 12x, 14x receives it and selects a corresponding row or column.

  The drive signal operation unit 16 may be provided as a separate semiconductor integrated circuit independently of other functional elements such as the imaging unit 10 and the horizontal scanning unit 12. In this case, an imaging device which is an example of a semiconductor system is constructed by the imaging device including the imaging unit 10 and the horizontal scanning unit 12 and the drive signal operation unit 16. This imaging device may be provided as an imaging module in which peripheral signal processing circuits, power supply circuits, and the like are also incorporated.

  The column processing unit 20 is configured to include a column signal processing unit 22 for each vertical column (column), and each column signal processing unit 22 receives a pixel signal for one row, and each column signal processing unit 22 outputs a pixel signal of the corresponding column. S0 (_1 to h; pixel number in one row) is processed to output a processed pixel signal S1 (_1 to h; pixel number in one row).

  For example, although not shown, the column signal processing unit 22 has a storage unit having a storage capacity, and is based on a pixel signal (unit signal) S0 read from the unit pixel 3 via the vertical signal line 18. A signal holding function of a line memory structure for storing a potential signal Vm representing physical information for a predetermined purpose can be provided. Similarly, it may have a storage capacity and be provided with a function of a noise removing means using a CDS (Correlated Double Sampling) process.

  When the CDS process is performed, the pixel information for the voltage mode pixel information input via the vertical signal line 18 based on the two sample pulses such as the sample pulse SHP and the sample pulse SHD given from the drive signal operation unit 16 is obtained. By taking the difference between the signal level immediately after reset (noise level: 0 level) and the true signal level, fixed pattern noise (FPN) due to fixed variation for each pixel and noise called reset noise Remove signal components.

  The column signal processing unit 22 may be provided with an AGC (Auto Gain Control) circuit having a signal amplification function, other processing function circuits, or the like as required after the CDS processing function unit.

  Although details will be described later, as shown in FIG. 1B, the column signal processing unit 22 converts the carrier signal into a signal related to the frequency based on the signal charge reflecting the light amount as a configuration unique to the present embodiment. The signal conversion unit 100 is provided as a functional unit that performs the above-described operation. Note that a pulse count AD converter 120 that realizes AD conversion by performing digital count processing based on a modulated carrier signal (modulated signal) may be provided in the subsequent stage of the signal converter 100.

  Here, the signal conversion unit 100 only needs to have a function of converting the carrier signal into a modulated signal related to the frequency based on the pixel signal in the voltage mode acquired by the imaging unit 10, and the frequency f itself of the carrier signal is used. Voltage / frequency conversion unit (V / F) 102 as a frequency modulation unit that modulates with a pixel signal as a modulation signal or voltage / phase conversion unit (V as a phase modulation unit that modulates phase φ with a pixel signal as a modulation signal / P) 106.

  The AD conversion unit 120 provided at the subsequent stage of the signal conversion unit 100 may be any unit that performs digital count processing based on the carrier signal (modulated signal) that has been modulated by the signal conversion unit 100. Configuration for counting the pulse width or phase fluctuation width, or conversely, counting the pulse width of the reference signal or the phase fluctuation width with the reference signal with the modulated signal, that is, counting the number of pulses per set time with the modulated signal Any of the configurations can be employed.

  The pixel signal output from the imaging unit 10 is represented by a reference level such as a reset level and a true signal level superimposed on the reset level. Therefore, in order to extract the true signal level, the reset level and the signal are extracted. Difference processing between levels is performed. At this time, the relationship between the signal conversion unit 100 and the AD conversion unit 120 can be realized by taking the difference between the number of pulses of the reset level and the signal level. In addition, the difference processing can eliminate individual variations in the signal conversion unit 100 such as the frequency offset and phase offset of the voltage controlled oscillator.

  At the subsequent stage of the column processing unit 20, a horizontal selection switch unit 60 including a horizontal reading switch (selection switch) (not shown) is provided. The output terminal of the column signal processing unit 22 in each vertical column is connected to the input terminal i of the selection switch of the horizontal selection switch unit 60 corresponding to each vertical column for sequentially reading the pixel signal S2 from the column signal processing unit 22. ing.

  The control gate terminal c of each vertical column of the horizontal selection switch unit 60 is connected to the horizontal drive unit 12y of the horizontal scanning unit 12 that controls and drives the readout address in the horizontal direction. On the other hand, a horizontal signal line 86 for sequentially transferring and outputting pixel signals in the row direction is commonly connected to the output terminals o of the selection switches in the vertical columns of the horizontal selection switch unit 60. An output unit 88 is provided at the rear end of the horizontal signal line 86.

  The horizontal signal line 86 transmits individual pixel signals S0 (specifically, pixel signals S2 based thereon) transmitted from the unit pixels 3 via the vertical signal lines 18 in the horizontal direction that is the arrangement direction of the vertical signal lines 18. It functions as a readout line for outputting in a predetermined order. From the column signal processing unit 22, a signal selected by a selection switch that is omitted for each vertical column is taken out and passed to the output unit 88.

  That is, the voltage signal of each vertical column corresponding to the signal charge representing the pixel information processed by the column signal processing unit 22 is generated by the horizontal read pulses φg1 to φgh corresponding to the horizontal selection signals φH1 to φHh from the horizontal scanning unit 12. A selection switch provided for each vertical column to be driven is selected at a predetermined timing and read out to the horizontal signal line 86. Then, the signal is input to the output unit 88 provided at the rear end of the horizontal signal line 86.

  The output unit 88 amplifies the pixel signals S2_1 to h (h = n) of each unit pixel 3 output from the imaging unit 10 through the horizontal signal line 86 with an appropriate gain, and then outputs an output terminal to the external circuit as the imaging signal S3. 88a is supplied. For example, the output unit 88 may only perform buffering, or may perform black level adjustment, column variation correction, color-related processing, or the like before that. When the AD conversion function unit is provided in the column signal processing unit 22, the output unit 88 has a parallel / serial conversion function, and the n-bit parallel digital data acquired by the column signal processing unit 22 is converted into serial data. It is also possible to adopt a configuration for converting to and outputting.

  That is, in the column-type solid-state imaging device 1 of the present embodiment, the output signal (voltage signal) from the unit pixel 3 is the vertical signal line 18 → the column processing unit 20 (column signal processing unit 22) → the horizontal signal line 86. → Transmitted in the order of the output unit 88. The drive is such that the pixel output signals for one row are sent in parallel to the column processing unit 20 via the vertical signal line 18, and the processed signals are serially output via the horizontal signal line 86. The transfer operation of the pixel signal to the column processing unit 20 is simultaneously performed on the unit pixels 3 for one row.

  As long as driving for each vertical column or horizontal column is possible, each pulse signal is supplied to the unit pixel 3 from either the horizontal direction or the vertical column direction, that is, driving for applying a pulse signal. The physical wiring method of the clock line is free.

  In the solid-state imaging device 1 having such a configuration, the horizontal scanning unit 12 and the vertical scanning unit 14 and the drive signal operation unit 16 that controls them are sequentially selected for each pixel of the imaging unit 10 in a horizontal unit, and the selection is performed. A CMOS image sensor of a type that simultaneously reads out information of one horizontal parallel pixel is configured.

  The external circuit provided at the subsequent stage of the output unit 88 is on a substrate (printed substrate or semiconductor substrate) different from the solid-state imaging device in which the imaging unit 10 and the drive control unit 7 are integrally formed in the same semiconductor region. The circuit configuration corresponding to each photographing mode is adopted.

  A solid-state imaging device 1 is configured by a solid-state imaging device (an example of a semiconductor device or a physical information acquisition device according to the present invention) including an imaging unit 10 and a drive control unit 7 and an external circuit. The drive control unit 7 is separated from the imaging unit 10 and the column processing unit 20, and the imaging unit 10 and the column processing unit 20 constitute a solid-state imaging device (an example of a semiconductor device). You may comprise with the control part 7 as an imaging device (an example of the physical information acquisition apparatus which concerns on this invention).

  Although not shown, the external circuit includes, for example, an A / D (Analog to Digital) conversion unit that converts the analog imaging signal S3 output from the output unit 88 into digital imaging data D3, and an A / D conversion unit. A digital signal processor (DSP) that performs digital signal processing based on digitized imaging data. When the column signal processing unit 22 includes an AD conversion function, the external circuit does not need to include an A / D conversion unit.

  The digital signal processing unit has a function of a digital amplifier unit that appropriately amplifies and outputs a digital signal output from the A / D conversion unit, for example. Further, for example, color separation processing is performed to generate image data RGB representing each image of R (red), G (green), and B (blue), and other signal processing is performed on the image data RGB for monitoring. Output image data is generated. Further, the digital signal processing unit is provided with a functional unit that performs signal compression processing for storing imaging data in a recording medium.

  The external circuit also includes a D / A (Digital to Analog) converter that converts the image data digitally processed by the digital signal processor into an analog image signal. The image signal output from the D / A converter is sent to a display device such as a liquid crystal monitor (not shown). The operator can perform various operations such as switching the imaging mode while viewing the menu and images displayed on the display device.

  Although an example in which the external circuit in charge of signal processing in the subsequent stage of the solid-state image sensor is performed outside the solid-state image sensor (imaging chip) is shown here, all or part of the external circuit (for example, an A / D converter or digital The functional element of the amplifier unit or the like may be built in the chip of the solid-state imaging device. In other words, an external circuit is configured on the same semiconductor substrate as the solid-state image pickup element in which the image pickup unit 10 and the drive control unit 7 are integrally formed in the same semiconductor region, and is substantially the same as the solid-state image pickup device 1 physically. The information acquisition apparatus may be the same.

  Further, in the figure, the solid-state imaging device 1 is configured by including the horizontal selection switch unit 60 and the drive control unit 7 together with the imaging unit 10, and the solid-state imaging device 1 substantially functions as a physical information acquisition device. However, the physical information acquisition apparatus is not necessarily limited to such a configuration. It is not a requirement that the entire horizontal selection switch unit 60 and the drive control unit 7 or one functional part be integrally formed in the same semiconductor region as the imaging unit 10. The horizontal selection switch unit 60 and the drive control unit 7 are formed on a circuit board different from the imaging unit 10 (which means not only another semiconductor substrate but also a general circuit board), for example, a circuit board on which an external circuit is provided. May be.

<Details of signal converter and AD converter>
FIG. 2 is a diagram illustrating the signal conversion unit 100 and the AD conversion unit 120 provided in the column signal processing unit 22. Here, the signal converter 100 only needs to have a function of converting the carrier signal into a modulated signal related to the frequency based on the pixel signal, and either the frequency f itself or the phase φ of the carrier signal is used as the modulation signal. Any signal may be used as long as it is modulated by the pixel signal.

  For example, as shown in FIGS. 2A and 2B, among the carrier signal parameters, the frequency f is modulated by the pixel signal, that is, the amplitude of the pixel signal is made to correspond to the frequency of the carrier signal and the amplitude is constant. Thus, a frequency modulation unit using a frequency modulation (FM) method that changes the frequency according to the amplitude of the pixel signal as a modulation signal, that is, a voltage / frequency conversion (V / F conversion) method can be provided.

  For example, the voltage / frequency converter 102 shifts (shifts) a large signal level to a high / low frequency and a small signal level to a low / high frequency so that the signal amplitude of the pixel signal becomes the frequency deviation of the carrier signal. To modulate.

  In principle, by adding a pixel signal as a modulation signal to a control voltage of an oscillator that can control the oscillation frequency by voltage, that is, a voltage controlled oscillator (VCO), an FM modulation signal (modulated signal) A modulation signal Fout1) is obtained.

  Humans pulse the information obtained by their eyes and transmit them to the brain. If a frequency modulation method as shown in FIG. 2A or FIG. 2B is adopted, a mechanism for transmitting and transmitting a frequency according to the amount of light is obtained, which is similar to a mechanism for information transmission of the human eye. .

  Alternatively, as shown in FIG. 2C, the phase φ is modulated with the pixel signal in the carrier signal parameters, that is, the amplitude of the pixel signal is made to correspond to the phase of the carrier signal, and the phase is constant with the amplitude and frequency. A phase modulation unit using a phase modulation (PM) method that changes according to the amplitude of a pixel signal as a modulation signal, that is, a voltage / phase conversion (V / P conversion) method can be provided.

  For example, the voltage / phase converter 106 shifts a large signal level to a large / small phase fluctuation and a small signal level to a small / large phase fluctuation (for example, so that the signal amplitude of the pixel signal becomes the phase deviation of the carrier signal ( The modulated signal Fout2 is acquired by performing modulation by shifting.

  This phase modulation method modulates the phase φ of the carrier signal and changes the phase of the signal by the modulated signal with a constant amplitude. The difference is whether the modulation signal is assigned to the frequency of the carrier signal itself or to the phase. No, it is similar to FM modulation both in terms of waveform and mathematical formula, and can be considered in the same manner as the frequency modulation method in terms of characteristics.

  When the FM method or PM method is used, even if the amplitude, frequency, or phase of the carrier signal (modulated signal) fluctuates during signal transmission, there is little effect on the image signal carried by the modulated signal, and the receiving side When the input signal becomes weak, the amount of degradation of the SN ratio (signal power to noise power ratio) is small, and the noise resistance is good.

  In addition, the AD conversion unit 120 provided in the subsequent stage of the signal conversion unit 100 only needs to perform digital count processing based on the carrier signal (modulated signal) modulated by the signal conversion unit 100.

  For example, when the AD converter 120 is provided at the subsequent stage of the voltage / frequency converter 102, the modulated signal Fout1 output from the voltage / frequency converter 102 has a relatively low frequency as shown in FIG. A pulse count processing unit 122 that counts the pulse width of the reference signal F1 can be provided. The configuration shown in FIG. 2A has an advantage that the reference signal F1 can function as a time gate signal, and the frequency of the reference signal F1 can be lowered. Even when the reference signal F1 is wired to the AD conversion unit 120 arranged for each vertical column, the frequency of the reference signal F1 is lowered to reduce the noise and power consumption problems caused by the routing of the wiring. be able to.

  Alternatively, as shown in FIG. 2B, a pulse count that counts the pulse width of the modulated signal Fout1 output from the voltage / frequency conversion unit 102 with a relatively high frequency reference signal F1 input from the outside. A processing unit 124 can be provided. In the configuration shown in FIG. 2B, the modulated signal Fout1 functions as a time gate signal. Therefore, if the modulated signal Fout1 is further divided and then counted by the reference signal F1, it is used as a counter clock. There is an advantage that the frequency of the functioning reference signal F1 can be lowered. Even when the reference signal F1 is used as a counter clock and wiring is performed up to the AD converters 120 arranged for each vertical column, the frequency of the reference signal F1 is lowered to reduce noise and power consumption caused by the routing of the wiring. Can be reduced.

  When the AD conversion unit 120 is provided at the subsequent stage of the voltage / phase conversion unit 106, as shown in FIG. 2C, first, the reference signal F2 having a predetermined frequency and the voltage / phase conversion unit 106 as the phase modulation unit are output. A phase discriminating unit 126 that extracts phase information by digital processing (performs phase discrimination) is provided based on the modulated signal Fout2. The phase discriminating unit 126 performs a phase discrimination process between the reference signal F2 input from the outside and the modulated signal Fout2 output from the voltage / phase conversion unit 106, so that the phase variation width signal PWo representing the pixel signal is obtained. Is output.

  A pulse count processing unit 128 that counts the phase fluctuation width signal PWo corresponding to the pixel signal detected by the phase discrimination unit 126 using the modulated signal Fout2 or the reference signal F2 output from the voltage / phase conversion unit 106 is provided. .

  Since the phase fluctuation width signal PWo functions as a time gate signal, the phase fluctuation (phase fluctuation width signal PWo) is not limited to represent the frequency of the modulated signal Fout2, and the frequency of the reference signal F2 is lowered. By adopting a configuration in which the frequency is reduced to a lower frequency, there is an advantage that the frequency of the reference signal functioning as a counter clock can be lowered. Even when the reference signal F2 is used as a counter clock and wiring is performed up to the AD converters 120 arranged for each vertical column, the frequency of the reference signal F2 can be lowered to reduce noise and power consumption due to the routing of the wiring. Can be reduced.

<Operation of Solid-State Imaging Device; First Embodiment; First Example>
FIG. 3 is a timing chart for explaining the operation of the first example in the column signal processing unit 22 (particularly, the signal conversion unit 100 and the AD conversion unit 120) of the solid-state imaging device 1 of the first embodiment shown in FIG. is there. As a comparative example, the timing of the conventional method in which AD conversion is performed by comparing the ramp-like reference signal RAMP and the pixel signal voltage and counting the time required for the comparison with the counter clock CLK0 is indicated by a dotted line.

  In this first example, as shown in FIG. 2A, the pulse width of a relatively low frequency reference signal F1 input from the outside is counted by the modulated signal Fout1 output from the voltage / frequency converter 102. As shown in FIG. 2C, the phase variation width signal PWo corresponding to the pixel signal detected by the phase discriminating unit 126 is input from the outside with a relatively high frequency reference signal F2 or signal to be processed. The case where the count processing is performed with the modulation signal Fout2 is shown. In short, this is a case where the number of pulses per set time or per phase fluctuation signal PWo is counted by the modulated signal Fout1 or the modulated signal Fout2 (or the reference signal F1).

  As a mechanism for converting an analog pixel signal sensed by each unit pixel 3 of the imaging unit 10 into a digital signal, as described above, it corresponds to the reference component in the pixel signal from the unit pixel 3 and each voltage signal of the signal component. The modulated signal Fout1 is pulse-counted with the reference signal F1, or the phase variation width signal is phase-discriminated based on the modulated signal Fout2 corresponding to each voltage signal of the reference component and signal component in the pixel signal from the unit pixel 3. A method of obtaining count values corresponding to the magnitudes of the reference component and the signal component by counting PWo with the reference signal F1 is employed.

  Here, in the pixel signal output from the vertical signal line 18, the signal component Vsig appears after the reset component ΔV including the noise of the pixel signal as a reference component as a time series. When the first process is performed for the reference component (reset component ΔV), the second count process is for a signal obtained by adding the signal component Vsig to the reference component (reset component ΔV). This will be specifically described below.

  For the first reading (also referred to as P-phase detection), the drive signal operation unit 16 first resets the count value of the pulse count processing unit 122 or the pulse count processing unit 128 to the initial value “0” and performs pulse count processing. The unit 122 or the pulse count processing unit 128 is set to the down count mode. Then, after the first reading from the unit pixel 3 in the arbitrary row Hx to the vertical signal line 18 (H1, H2,...) Is stabilized, the drive signal operation unit 16 performs the voltage / frequency conversion unit 102 and the voltage / phase. The conversion unit 106 and the phase discrimination unit 126 are instructed to start processing. This is to eliminate the influence on the peripheral portion by operating them only when necessary. Note that the constant voltage / frequency converter 102, the voltage / phase converter 106, and the phase discriminator 126 may be activated.

  In response to this, the voltage / frequency converter 102 outputs a frequency corresponding to the pixel signal voltage of an arbitrary vertical signal line 18 (Vx) supplied from the imaging unit 10 as the modulated signal Fout1 (t32). The voltage / phase conversion unit 106 outputs the modulated signal Fout2 having a predetermined frequency having a phase variation corresponding to the pixel signal voltage of an arbitrary vertical signal line 18 (Vx) supplied from the imaging unit 10 (t32). The phase discriminating unit 126 performs phase discrimination based on the modulated signal Fout2, and outputs the phase fluctuation width signal PWo indicating the phase fluctuation according to the pixel signal voltage of the vertical signal line 18 (Vx) (t32). .

  Next, in order to measure the number of pulses corresponding to the pixel signal read from the imaging unit 10 for the first time in the pulse count processing unit 122 or the pulse count processing unit 128 arranged for each row, the modulated signal Fout1 When the output of the phase variation width signal PW becomes stable, the drive signal operation unit 16 supplies the reference signal F1 and the reference signal F2 to the pulse count processing unit 122 and the pulse count processing unit 128 to perform the first counting operation. The down-counting is started from the initial value “0” (t34).

  At this time, the pulse count processing unit 122 and the pulse count processing unit 128 use the modulated signal Fout1 and the reference signal F2 (or the modulated signal Fout2) to generate one clock width (active) of the reference signal F1 and the phase fluctuation width signal PWo. The period is counted in the negative direction.

  When the pulse count processing unit 122 or the pulse count processing unit 128 finishes counting one clock width, the count operation is stopped, and the AD conversion is completed by latching (holding / storing) the count value at that time as pixel data. (T36). That is, at the time of the first reading, the count value corresponding to the magnitude of the reset component Vrst is obtained by counting (counting) one clock of the modulated signal Fout1 and the phase fluctuation width signal PWo with the reference signal F1 and the reference signal F2. Get.

  At the time of the first reading, since the count process is performed for the reset level Vrst in the pixel signal voltage Vx, the reset component ΔV of the unit pixel 3 is read.

  The reset component ΔV includes noise that varies for each unit pixel 3 as an offset. However, since the variation of the reset component ΔV is generally small and the reset level Vrst is generally common to all pixels, the output value of the reset component ΔV in the pixel signal voltage Vx of the arbitrary vertical signal line 18 is approximately known. Therefore, the bit resolution for the reset component ΔV can be suppressed lower than the bit resolution for the signal component Vsig. For example, the signal component Vsig is about 7 bits (up to −1023) with respect to 11 bits (up to +1023). be able to.

  For this purpose, in the illustrated signal form, the reset component ΔV has a larger signal form than the signal component Vsig, so that the voltage / frequency converter 102 increases the signal amplitude of the pixel signal (reset component). It is preferable to modulate by shifting (ΔV) to a low frequency and shifting a small signal level (signal component Vsig) to a high frequency. In order to shorten the measurement width (count period) of the reference signal F1 and shorten the AD conversion period, it is preferable to set the frequency of the modulated wave Fout1 relatively higher than in the second example.

  In the present embodiment, since the pixel signal voltage Vx is directly converted into the modulated signal Fout1 and the phase fluctuation width signal PWo and then counted, the pixel signal voltage is obtained using the reference voltage as in Non-Patent Document 1. Unlike a mechanism in which a pulse width signal corresponding to the signal width is generated and the pulse width is counted with a predetermined counter clock, the modulated signal Fout1 and the phase fluctuation width signal PWo are stabilized, that is, from the unit pixel 3 in an arbitrary row Hx. The counting process can be started immediately at the same time as the first reading to the vertical signal lines 18 (H1, H2,...) Is stabilized.

For example, if the modulated signal Fout1 itself or the phase fluctuation width signal PWo having the same frequency as the modulated signal Fout2 is counted by the high frequency reference signal F1 or the modulated signal Fout2, the vertical signal line 18
The count result is obtained substantially at the same time as the first reading to (H1, H2,...) Is stabilized.

  Further, the modulated signal Fout1 is divided and then counted by the reference signal F1, or the frequency of the modulated signal Fout2 is lowered to generate a phase fluctuation width signal PWo to generate the reference signal F1 and the modulated signal. Even when the count processing is performed with Fout2, the first reading from the unit pixel 3 in any row Vx to the vertical signal line 18 (H1, H2,...) In the non-patent document 1 or the like is stable. By setting the width narrower than the width from when the reset component ΔV coincides with the reference voltage, it is possible to shorten the period (t32 to t36) from the time when the first reading is stabilized until the end of counting. is there.

  However, the frequency of the reference signal F1 and the modulated signal Fout2 (or the reference signal F1), that is, the clock frequency of the count processing is one clock of the modulated signal Fout1 and the modulated signal Fout2 (or one active period; in this example, H The level period) is determined by a frequency that can be counted with a predetermined bit width, so that the higher the frequency of the modulated signal Fout1 or the modulated signal Fout2, the higher the lock is required. However, the frequency can also be kept low by adopting the configuration in which the frequency division is performed after the frequency division as described above.

  In any case, it is possible to ensure the same bit resolution as in the prior art. For example, when reading the reset component ΔV for the first time, the longest period of the count processing for the reset component ΔV is the 7-bit count period (128 (Clock)), the reset component ΔV can be compared. Even if such bit resolution is ensured, it is possible to shorten the period (t32 to t36) from the time when the first reading is stabilized until the end of counting.

  In the subsequent second reading (also referred to as D-phase detection), in addition to the reset component ΔV, the signal component Vsig corresponding to the amount of incident light for each unit pixel 3 is read, and the same operation as the first reading is performed. That is, first, the drive signal operation unit 16 sets the pulse count processing unit 122 or the pulse count processing unit 128 to the up-count mode. Then, after the second reading from the unit pixel 3 of the arbitrary row Hx to the vertical signal line 18 (H1, H2,...) Is stabilized, the drive signal operation unit 16 performs the voltage / frequency conversion unit 102 and the voltage / phase. The conversion unit 106 and the phase discrimination unit 126 are instructed to start processing. This is to eliminate the influence on the peripheral portion by operating them only when necessary. Note that the constant voltage / frequency converter 102, the voltage / phase converter 106, and the phase discriminator 126 may be activated.

  In response to this, the voltage / frequency converter 102 outputs a frequency corresponding to the pixel signal voltage of an arbitrary vertical signal line 18 (Vx) supplied from the imaging unit 10 as the modulated signal Fout1 (t42). The voltage / phase conversion unit 106 outputs the modulated signal Fout2 having a predetermined frequency having a phase variation corresponding to the pixel signal voltage of the arbitrary vertical signal line 18 (Vx) supplied from the imaging unit 10 (t42). The phase discriminating unit 126 performs phase discrimination based on the modulated signal Fout2, and outputs a phase fluctuation width signal PWo indicating a phase fluctuation according to the pixel signal voltage of the vertical signal line 18 (Vx) (t42). . In the figure, t42 is set at substantially the same time as t20 in the conventional example. However, since the first process can be performed earlier than the conventional example, the second process from the completion of the first process t36. The interval from the start t42 can be made shorter than the interval from the first process completion t12 to the second process start t20 in the conventional example.

  Next, in order to measure the number of pulses corresponding to the pixel signal read from the imaging unit 10 for the second time in the pulse count processing unit 122 or the pulse count processing unit 128 arranged for each row, the modulated signal Fout1 When the output of the phase variation width signal PW becomes stable, the drive signal operation unit 16 supplies the reference signal F1 and the reference signal F2 to the pulse count processing unit 122 and the pulse count processing unit 128 to perform the second counting operation. On the contrary to the first time, the up-counting is started from the count value corresponding to the reset component ΔV of the unit pixel 3 acquired at the first reading time. That is, the count process is started in the positive direction (t44).

  At this time, the pulse count processing unit 122 and the pulse count processing unit 128 use the modulated signal Fout1 and the reference signal F2 (or the modulated signal Fout2) to generate one clock width (active) of the reference signal F1 and the phase fluctuation width signal PWo. The period is counted in the positive direction.

  When the pulse count processing unit 122 or the pulse count processing unit 128 finishes counting one clock width, the count operation is stopped, and the AD conversion is completed by latching (holding / storing) the count value at that time as pixel data. (T46). That is, at the time of the second reading, the count value corresponding to the magnitude of the signal component Vsig is obtained by counting (counting) one clock of the modulated signal Fout1 and the phase fluctuation width signal PWo with the reference signal F1 and the reference signal F2. Get.

  At the time of the second reading, since the count process is performed on the signal component Vsig in the pixel signal voltage Vx, the signal component Vsig of the unit pixel 3 is read out.

  Here, in the present embodiment, the count operation in the pulse count processing unit 122 or the pulse count processing unit 128 is down-counting at the first reading and up-counting at the second reading, so the pulse counting processing unit 122 or The subtraction shown in Expression (1) is automatically performed in the pulse count processing unit 128, and the count value corresponding to the subtraction result is held in the pulse count processing unit 122 or the pulse count processing unit 128.

  Here, the expression (1) can be transformed into the expression (2). As a result, the count value held in the pulse count processing unit 122 or the pulse count processing unit 128 corresponds to the true signal component Vsig. It becomes.

  That is, as described above, subtraction in the pulse count processing unit 122 or the pulse count processing unit 128 by two readings and counting processing, such as down-counting at the first reading and up-counting at the second reading. By the processing, the reset component ΔV including the variation for each unit pixel 3 and the offset component for each column signal processing unit 22 can be removed, and only the signal component Vsig corresponding to the incident light amount for each unit pixel 3 can be simplified. Can be taken out in configuration.

  There are individual variations in the components in the column signal processing unit 22, that is, there are solid variations (frequency offset or phase offset) in the voltage / frequency conversion unit 102, voltage / phase conversion unit 106 or phase discrimination unit 126 of the signal conversion unit 100. Moreover, the solid variation can be removed. At this time, there is an advantage that reset noise in the pixel signal can be removed.

  Therefore, the column signal processing unit 22 (the signal conversion unit 100 and the AD conversion unit 120) of this embodiment is not only a digital conversion unit that converts an analog pixel signal into digital pixel data, but also a CDS (Correlated Double Sampling; It also operates as a correlation double sampling) processing function unit.

  In addition, since the pixel data indicated by the count value obtained by Expression (2) indicates a positive signal voltage, a complement calculation or the like is unnecessary, and the compatibility with existing systems is high.

  Here, since the pixel signal voltage Vx is directly converted into the modulated signal Fout1 and the phase fluctuation width signal PWo at the time of the second reading, the count process is performed, so that the reset signal Vrst is modulated similarly to the count process. Immediately when Fout1 and the phase fluctuation width signal PWo are stabilized, that is, approximately at the same time as the second reading from the unit pixel 3 in any row Hx to the vertical signal line 18 (H1, H2,...) Is stabilized. Processing can be started.

For example, if the modulated signal Fout1 itself or the phase fluctuation width signal PWo having the same frequency as the modulated signal Fout2 is counted by the high frequency reference signal F1 or the modulated signal Fout2, the vertical signal line 18
The count result is obtained substantially at the same time as the second reading to (H1, H2,...) Is stabilized.

  Further, the modulated signal Fout1 is divided and then counted by the reference signal F1, or the frequency of the modulated signal Fout2 is lowered to generate a phase fluctuation width signal PWo to generate the reference signal F1 and the modulated signal. Even when the count processing is performed with Fout2, the second reading from the unit pixel 3 in any row Hx to the vertical signal line 18 (H1, H2,...) In the non-patent document 1 or the like is stable. By setting the width narrower than the width from when the reset component ΔV coincides with the reference voltage, it is possible to shorten the period (t42 to t46) from the time when the second reading is stabilized to the end of counting. is there.

  In a mechanism that generates a pulse width signal corresponding to a pixel signal voltage using a reference voltage as in Non-Patent Document 1 and counts the pulse width with a predetermined counter clock, the second read time depends on the amount of incident light. Since the signal component Vsig is read out, in order to determine the amount of light in a wide range, it is necessary to take a wide up-count period (t20 to t24; comparison period) and to greatly change the reference voltage. It is very different from time-consuming.

  That is, according to the mechanism of the present embodiment, both the counting process for the reset component ΔV (reference component) and the counting process for the signal component Vsig are almost the same when the pixel signal voltage read from the imaging unit 10 is stabilized. At the same time, the counting process can be completed, and the total AD conversion period of two times can be greatly shortened.

  In addition, since the reference signal F1 and the reference signal F2 used for the first and second processing can be easily made the same, the precision of AD conversion in the first and second times can be easily equalized. As a result, the subtraction result shown by the equation (1) by the up / down counter is obtained correctly. In the mechanism described in Non-Patent Document 1, etc., in order to easily equalize the AD conversion accuracy between the first time and the second time, it is necessary to keep the slope of the reference signal constant, and it is necessary to consider instability factors There is a big difference from that.

  At a predetermined timing after the second count process is completed, the drive signal operation unit 16 instructs the horizontal scanning unit 12 to read out pixel data. In response to this, the horizontal scanning unit 12 sequentially shifts the horizontal selection signal CH (i) to be supplied to the horizontal selection switch unit 60, that is, the horizontal readout pulses φg1 to φgh. In the figure, the reading is shown to start at approximately the same time as t28 in the conventional example. However, since the second processing can actually be performed earlier than the conventional example, the reading is performed from the completion of the second processing t46. The interval until the start can be made shorter than the interval between the second processing completion t22 and the reading start t28 in the conventional example.

  In this way, the count value represented by the equation (2) stored and held in the pulse count processing unit 122 or the pulse count processing unit 128, that is, the pixel data represented by n-bit digital data is converted into n horizontal signals. The two-dimensional image is represented by sequentially outputting from the output terminal 88a to the outside of the column signal processing unit 22 and the chip having the imaging unit 10 via the line 86, and thereafter repeating the same operation for each row. Video data can be obtained.

  As described above, according to the solid-state imaging device of the first embodiment, the count process is performed twice by switching the processing mode while using the up / down counter. Further, in the configuration in which the unit pixels 3 are arranged in a matrix, the column signal processing unit 22 is configured by a column parallel column AD circuit provided for each vertical column.

  For this reason, the subtraction processing between the reference component (reset component) and the signal component can be directly acquired as the second count result for each vertical column, and the memory device that holds the respective count results of the reference component and the signal component Can be realized by a latch function included in the count processing unit, and it is not necessary to prepare a dedicated memory device for holding AD converted data separately from the counter.

  In addition, a special subtracter for taking the difference between the reference component and the signal component becomes unnecessary. Therefore, the circuit scale and circuit area can be reduced as compared with the conventional configuration, and in addition, an increase in noise and an increase in current or power consumption can be eliminated.

  Further, the signal conversion unit 100 converts the voltage mode pixel signal into an FM modulated signal (modulated signal Fout1) or a PM modulated signal (modulated signal Fout2) related to the frequency, and then performs AD conversion by performing count processing. Since the column AD circuit (AD converter) is configured as described above, problems such as line resistance, wiring capacitance, total gate capacitance connected, and substrate vise effect due to the length of the ramp signal line are affected by FM modulation signals (covered signals). Since it is irrelevant to the modulation signal Fout1) and the PM modulation signal (modulated signal Fout2), the influence of the substrate bias effect and the wiring length does not appear in the AD conversion result.

  In addition, the count processing can be controlled by one counter clock for operating the count processing section regardless of the number of bits and the control line for switching the count mode, and a signal for guiding the count value of the count processing section required in the conventional configuration to the memory device A line becomes unnecessary, and an increase in noise and an increase in power consumption can be solved. In addition, the count result can be acquired almost simultaneously with the stabilization of the pixel signal voltage Vx read from the imaging unit 10, and the AD conversion process can be completed.

  That is, in the solid-state imaging device 1 in which the AD conversion device is mounted on the same chip, the voltage comparison unit 252 and the pulse count processing unit 122 or the pulse count processing unit 128 are paired to constitute a column AD circuit as an AD conversion unit. At the same time, as the operation of the pulse count processing unit 122 or the pulse count processing unit 128, the down count and the up count are used in combination, and the difference between the basic component of the signal to be processed (the reset component in the present embodiment) and the signal component is calculated. By using digital data, it is possible to eliminate problems such as circuit scale, circuit area, power consumption, the number of wiring for interface with other functional units, noise and current consumption due to this wiring, AD conversion processing can be dramatically shortened.

<Operation of Solid-State Imaging Device; First Embodiment; Second Example>
FIG. 4 is a timing chart for explaining the operation of the second example in the column signal processing unit 22 (particularly, the signal conversion unit 100 and the AD conversion unit 120) of the solid-state imaging device 1 according to the first embodiment shown in FIG. is there. In this second example, as shown in FIG. 2B, the modulated signal Fout1 is counted as a time gate signal and counted with a reference signal F1 as a high-frequency counter clock supplied from the outside.

  That is, in order to measure the number of pulses corresponding to the pixel signal read from the imaging unit 10 in the pulse count processing unit 122 or the pulse count processing unit 128 arranged for each row, the modulated signal Fout1 and the phase fluctuation width When the output of the signal PWo becomes stable, the drive signal operation unit 16 supplies the reference signal F1 to the pulse count processing unit 122 to start the counting process.

  At this time, at the time of the count operation for the first reset component ΔV, the down-counting is started from the initial value “0” (t34), and at the time of the count operation for the second signal component Vsig, the count is held after the end of the first time. Up counting is started from the count value corresponding to the reset component ΔV of the unit pixel 3 placed, contrary to the first time, that is, counting processing is started in the positive direction (t44).

  At this time, the pulse count processing unit 122 uses the modulated signal Fout1 output from the voltage / frequency conversion unit 102 as a time gate signal, and uses one pulse width as a counter clock for the reference signal F1 supplied from the outside. Is used for counting. In order to keep the frequency of the reference signal F1 low, it is preferable to keep the frequency of the modulated wave Fout1 relatively low compared to the case of the first example. If the frequency of the modulated wave Fout1 is as high as that in the first example, the modulated wave Fout1 is divided into a plurality of the modulated waves Fout1 by dividing the modulated wave Fout1 and counting one pulse width. The frequency of the reference signal F1 may be kept low by counting the period.

  Hereinafter, as in the first example, the pulse count processing unit 122 or the pulse count processing unit 128 stops the count operation after counting one clock width, and latches (holds / stores) the count value at that time as pixel data. ) To complete AD conversion (t36 / t46).

  As described above, the count processing mode is different between the first example and the second example. That is, in the first example, the output signal of the signal conversion unit 100 (modulated signals Fout1 and Fout2 that are themselves) is set with the phase fluctuation width signal PWo corresponding to the reference signal F1 or the reference signal F2 supplied from the outside as the subject of counting. And the reference signal F2) corresponding to Fout2. On the other hand, in the second example, the output signal of the signal conversion unit 100 (the modulated signal Fout1 that is itself) is counted and counted by the reference signal F1 supplied from the outside. However, other points are not different from the first example.

  Therefore, in the second example, as in the first example, the count result can be acquired almost simultaneously with the stabilization of the pixel signal voltage Vx read from the imaging unit 10, and the AD conversion process can be completed. The conversion process can be dramatically shortened.

  Even when the modulated signal Fout1 is divided into time gate signals and then counted with the reference signal F1, the pulse signal of the time gate signal to be counted is set narrow so that the pixel signal reading is stabilized. It is possible to shorten the period (t32 to t36, t42 to t46) from the count to the end of the count, and it is possible to shorten the total AD conversion period for two times.

<Schematic Configuration of Imaging Device; Second Embodiment>
FIG. 5 is a schematic configuration diagram of a second embodiment of a CMOS solid-state imaging device which is an embodiment of a physical information acquisition device according to the present invention. Here, focusing on the column processing unit 20, it is shown together with its main peripheral part. The solid-state imaging device 1 according to the second embodiment is different from the solid-state imaging device 1 according to the first embodiment in the configuration of the column signal processing unit 22 (particularly the subsequent circuit of the AD conversion unit 120).

  That is, the column signal processing unit 22 of the second embodiment has a subsequent stage (specifically, the pulse count processing unit 122 or the pulse count processing unit 128 shown in FIG. 2; collectively referred to as the count processing unit 121). A data storage unit 130 as an n-bit memory device that holds the count result held in the AD conversion unit 120 and a switch unit 132 arranged between the count processing unit 121 and the data storage unit 130 are provided. The horizontal selection switch unit 60 is arranged between the data storage unit 130 and the horizontal signal line 86.

  A memory transfer instruction pulse CN8 as a control pulse is supplied from the drive signal operation unit 16 to the individual switches in the switch unit 132 at a predetermined timing in common with other switches in the vertical column. When the memory transfer instruction pulse CN8 is supplied, the switch unit 132 transfers the count value of the corresponding count processing unit 121 to the data storage unit 130. The data storage unit 130 holds and stores the transferred count value.

  Note that the mechanism for holding the count value of the count processing unit 121 in the data storage unit 130 at a predetermined timing is not limited to the configuration in which the switch unit 132 is arranged between them, and for example, the count processing unit 121, the data storage unit 130, Can be realized by controlling the output enable of the count processing unit 121 with the memory transfer instruction pulse CN8, or the memory transfer instruction pulse as a latch clock for determining the data take-in timing of the data storage unit 130. It can also be realized by using CN8.

  A horizontal selection signal CH (i), that is, horizontal readout pulses φg1 to φgh, is input from the horizontal scanning unit 12 (horizontal driving unit 12y) to the horizontal selection switch unit 60 at the subsequent stage of the data storage unit 130 via the control line 12c. . The horizontal selection switch unit 60 holds the count value fetched from the count processing unit 121 in the data storage unit 130 until there is an instruction by a control pulse through the control line 12c.

  In the horizontal scanning unit 12 and the horizontal selection switch unit 60, each data storage unit 130 is in parallel with the signal conversion unit 100 and the count processing unit 121 of the column signal processing unit 22 performing the processes that they are responsible for. Has a function of a reading scanning unit for reading the count value held by the.

  According to the configuration of the second embodiment, since the count result held by the count processing unit 121 can be transferred to the data storage unit 130, the count operation of the count processing unit 121, that is, AD conversion processing, and the count result The reading operation to the horizontal signal line 86 can be controlled independently, and a pipeline operation in which the AD conversion processing and the signal reading operation to the outside are performed in parallel can be realized.

<Operation of Solid-State Imaging Device; Second Embodiment>
FIG. 6 is a timing chart for explaining operations in the column signal processing unit 22 (particularly, the signal conversion unit 100 and the AD conversion unit 120) of the solid-state imaging device 1 according to the second embodiment shown in FIG. Here, although it shows by the modification with respect to the 1st example of 1st Embodiment, a deformation | transformation application is possible similarly to a 2nd example. The AD conversion processing in the column signal processing unit 22 is the same as in the first embodiment. The detailed explanation is omitted here.

  In the second embodiment, the data storage unit 130 is added to the configuration of the first embodiment, and the basic operation including AD conversion processing is the same as that of the first embodiment, but the pulse count Before the operation of the processing unit 122 or the pulse count processing unit 128 (t32), the count result of the preceding row Hx-1 is transferred to the data storage unit 130 based on the memory transfer instruction pulse CN8 from the drive signal operation unit 16.

  In the first embodiment, the pixel data cannot be output to the outside of the column signal processing unit 22 only after the second reading process, that is, the AD conversion process, is completed. On the other hand, in the configuration of the second embodiment, the count value indicating the result of the previous subtraction process is transferred to the data storage unit 130 prior to the first read process (AD conversion process). There is no.

  Thus, the signal output operation from the data storage unit 130 to the outside through the horizontal signal line 86 and the output unit 88, the current Hx reading, the modulation processing by the signal conversion unit 100, and the pulse count processing unit 122 or the pulse count processing. The counting operation of the unit 128 can be performed in parallel, and the column reading & AD period itself can be set to 1H period, thereby enabling more efficient signal output.

  Although it differs from the first embodiment in that a data storage unit 130 and a switch unit 132 are provided as components for pipeline operation in the subsequent stage of the AD conversion unit 120, other points are different from those in the first embodiment. There is no difference. Therefore, also in the second embodiment, as in the first embodiment, the count result can be acquired almost simultaneously with the completion of the AD conversion processing when the pixel signal voltage Vx read from the imaging unit 10 is stabilized. AD conversion processing can be dramatically shortened.

  For example, in the configuration of the first embodiment, in the 1H period (for example, 63.3 μS), the column readout & AD period required for reading out the pixel signal from the imaging unit 10 and AD conversion processing is about 8.5 μS, and the horizontal transfer period is long. Whereas it is 54.8 μS, by adopting the configuration of the second embodiment, the column read & AD period 8.5 μS itself can be made 1H period (8.5 μS).

<Schematic Configuration of Imaging Device; Third Embodiment; First Example>
7 and 8 are diagrams illustrating a first example of the third embodiment of the CMOS solid-state imaging device which is an embodiment of the physical information acquisition device according to the present invention. Here, although it has shown in the modification with respect to 1st Embodiment, a deformation | transformation application is possible similarly to 2nd Embodiment.

  The solid-state imaging device 1 according to the third embodiment is characterized in that the signal conversion unit 100 is incorporated in the imaging unit 10. In particular, the first example is characterized in that the signal conversion unit 100 is provided for each unit pixel 3 and the output is passed to the AD conversion unit 120 of the column signal processing unit 22 for each vertical column. That is, the present embodiment is characterized in that one AD conversion unit 120 is assigned to one charge generation unit 32, pixel signal generation unit 33, and signal conversion unit 100, respectively.

  As shown in FIG. 7B, the column signal processing unit 22 in the column processing unit 20 has frequency information (modulated signal Fout1) or phase information (modulated signal Fout2) output from the signal conversion unit 100. The AD conversion unit 120 that performs pulse count processing based on the modulation signal F0) is provided. Correspondingly, in FIG. 7A showing the overall outline, the column signal processing unit 22 is described as a column AD.

  Further, as shown in FIG. 8A, the unit pixel 3 in the imaging unit 10 includes a charge generation unit 32 that detects a signal charge, and a pixel signal in a voltage mode based on the signal charge generated by the charge generation unit 32. And a pixel signal generation unit 33 as an intra-pixel amplifier for generating each of the unit pixels 3.

  The configurations of the charge generation unit 32 and the pixel signal generation unit 33 are the same as those of a normal CMOS image sensor. In this embodiment, a general-purpose 4TR configuration can be used as the CMOS sensor, For example, as described in Japanese Patent No. 2708455, a 3TR configuration including three transistors can be used. Of course, these pixel configurations are merely examples, and any CMOS image sensor array configuration can be used.

  The intra-pixel amplifier (pixel signal generation unit 33) may be of a charge / voltage conversion (Q / V) type capable of converting the signal charge generated by the charge generation unit 32 into a voltage mode pixel signal, For example, a floating diffusion amplifier configuration is used. As an example, as shown in FIG. 8B, with respect to the charge generation unit 32, an example of a read selection transistor 34, which is an example of a charge readout unit (transfer gate unit / read gate unit), and an example of a reset gate unit. A configuration having an amplifying transistor 42 having a source follower configuration, which is an example of a detection element that detects a potential change of a certain reset transistor 36, vertical selection transistor 40, and floating diffusion 38, can be used.

  The horizontal wiring is common to pixels in the same row, and all unit pixels 3 in the same row are simultaneously driven and controlled by the vertical drive unit 14y of the vertical scanning unit 14. For example, a transfer drive buffer 252, a reset drive buffer 254, and a selection drive buffer 256 are accommodated in the vertical drive unit 14y.

  As the wiring for the unit pixel 3, three lines of a transfer gate wiring (read selection line TRG) 55, a reset wiring (RST) 56, and a vertical selection line (SEL) 57 for row address selection are laid in the horizontal direction. The vertical signal line 18 and the drain line (Vdd supply wiring) are laid in the vertical direction, and internal wiring (wiring in the pixel) such as connecting the floating diffusion 38 and the gate of the amplifying transistor 42 is laid. Although not shown, there are two-dimensional wirings used for the light shielding film for the pixel boundary portion and the black level detection pixel.

  The output side of the amplifying transistor 42 is connected to the read current source unit 27 via the read current supply line 19, so that when the signal is read, the load MOS transistor in the read current source unit 27 and the selected row A source follower is assembled with the amplifying transistor 42 so that a constant current predetermined by the load MOS transistor connected to each amplifying transistor 42 continues to flow through the amplifying transistor (see FIG. 7A). . Although there is a problem that the current consumption increases, the read current supply line 19 may be omitted and current may be constantly supplied to the amplifying transistor 42 of the source follower output.

  In addition, as a characteristic part of the third embodiment, a signal conversion unit 100 that performs FM modulation and PM modulation based on the voltage mode pixel signal is provided in the subsequent stage of the pixel signal generation unit 33. Based on the signal charge generated by the charge generation unit 32, the pixel signal generation unit 33 converts the signal into a voltage mode pixel signal, and then the signal conversion unit 100 converts the carrier signal into a signal related to the frequency. Therefore, there is an advantage that an FM modulation circuit and a PM modulation circuit using a general-purpose VCO can be used.

  The output of the signal conversion unit 100 is connected in common to the signal conversion unit 100 in the same vertical column to the vertical signal line 18 that functions as a signal readout line for pixel signals, and is modulated according to the signal charge acquired by the unit pixel 3. The signal F0 (Fout1 or Fout2) is supplied to the AD conversion unit 120 in the column signal processing unit 22 (see FIG. 7A).

  The transistor output of the signal conversion unit 100 is configured as a source follower connected to the read current source unit 27, so that the source between the load MOS transistor in the read current source unit 27 and the transistor in the selected row is a signal read signal. A follower may be assembled so that a constant current predetermined by a load MOS transistor connected to each transistor continues to flow through the transistor.

<Schematic Configuration of Imaging Device; Third Embodiment; Second Example>
FIG. 9 is a diagram illustrating a second example of the third embodiment of the CMOS solid-state imaging device which is an embodiment of the physical information acquisition device according to the present invention. Here, a modification to the first example of the third embodiment is shown.

  In the solid-state imaging device 1 of the second example of the third embodiment, the signal conversion unit 100 is incorporated in the imaging unit 10, and one AD conversion is performed on the charge generation unit 32 and the pixel signal generation unit 33 in a plurality of vertical columns. By assigning the unit 120, the circuit scale for overall signal modulation can be reduced.

  In this case, a selector switch 58 is provided between the output side of the unit pixel 3 and the vertical signal line 18 in order to allocate one AD conversion unit 120 to the plurality of charge generation units 32 and the pixel signal generation unit 33. Then, the modulation signal F0 (Fout1 or Fout2) selected by the selector switch 58 is supplied from the single output terminal 59 to the AD converter 120 via the vertical signal line 18. The selector switch 58 functions as a selection switching unit that assigns one signal conversion unit 100 to a plurality of unit pixels 3, and a control signal that instructs a reading row is input as a switching control signal.

  Correspondingly, although not shown in the figure, the column processing unit 20 is provided with a number of AD conversion units 120 in consideration of the allocation. As a configuration in which the number of AD conversion units 120 is maximized, a configuration in which one AD conversion unit 120 is assigned to each of the two charge generation units 32 and the pixel signal generation unit 33 can be adopted. As a configuration in which the number is minimized, a configuration in which one AD conversion unit 120 is assigned to the charge generation unit 32 and the pixel signal generation unit 33 in all vertical columns may be employed.

  Moreover, what is necessary is just to take the structure which allocates one AD conversion part 120 with respect to the some electric charge generation part 32 and the pixel signal generation part 33. FIG. For example, as shown in FIG. 9A, it is possible to employ a configuration in which each signal converter 100 is provided and a selector switch 58 is arranged downstream of each signal converter 100. In this case, the selector switch 58 has a function of a selection switching unit that assigns a single output terminal 59 to a plurality of signal converters 100, that is, assigns one AD converter 120. Alternatively, as shown in FIG. 9B, by adopting a configuration in which a selector switch 58 is arranged in front of the signal conversion unit 100, the number of signal conversion units 100 is reduced, and the overall circuit scale for signal modulation is dramatically increased. It can also be made smaller. In this case, the selector switch 58 has a function of a selection switching unit that assigns a single output terminal 59 to a plurality of unit pixels 3, that is, assigns one signal conversion unit 100.

  If the structure of 3rd Embodiment is taken, the modulation signal F0 (Fout1 or Fout2) according to the signal charge acquired by each unit pixel 3 will be provided in the exterior of the imaging part 10, regardless of the first example and the second example. The transmission is transmitted to the column processing unit 20 and transmitted, and the form is the same as the information transmission mechanism of the human eye.

  The operations of the signal conversion unit 100 and the AD conversion unit 120 are the same as those in the first embodiment. Also in the third embodiment, similarly to the first embodiment, the pixel signal voltage Vx read out from the imaging unit 10 is used. As a result, the count result can be acquired almost at the same time, and the AD conversion process can be completed, so that the AD conversion process can be dramatically shortened.

  Further, by arranging the signal conversion unit 100 up to the imaging unit 10 and leaving the AD conversion unit 120 in the column processing unit 20, it is possible to enjoy the effects that cannot be obtained with the conventional configuration.

  However, as can be seen from FIGS. 8 and 9, the size of the unit pixel 3 is increased by the addition of the signal conversion unit 100, and in the second example, a selector needs to be arranged in the imaging unit 10, It becomes difficult to increase the density, for example, the area of the entire imaging unit 10 is increased.

  Further, it is necessary to arrange a readout current supply line 19 in addition to the vertical signal line 18 for signal extraction, and when forming a wiring layer that forms a wiring with respect to the active element of the imaging unit 10, incident light is transmitted to the wiring layer. In a surface sensor having a normal surface-receiving type pixel structure that is taken into the photoelectric conversion element from the same surface side, the read current supply line 19 also becomes a factor that blocks light.

  In order to solve these problems, a back-illuminated sensor structure may be used as will be described later. In the back-illuminated type, a wiring layer for wiring to the active element and a layer for arranging other circuit members are formed on one side of the element layer on which the photoelectric conversion element is formed, and incident light is transmitted. A back-side light-receiving pixel structure that takes in the photoelectric conversion element from the other side of the element layer, that is, the side opposite to the layer on which the wiring layer and other members are arranged. By adopting such a backside light receiving type pixel structure, it is not necessary to arrange wiring and circuit members in consideration of the light receiving surface. In other words, wiring on the photoelectric conversion element region can be performed without worrying about the problem of light shielding by the wiring and circuit members, and the degree of freedom of arrangement of the wiring and circuit members is increased.

  However, even in the case of the back-illuminated type, in order not to increase the size of the entire imaging unit 10 while reducing the number of layers for wiring and circuit members opposite to the light incident surface, the signal conversion unit 100 and It is preferable to reduce the circuit scale of the selector switch 58, and it is considered appropriate to adopt the configuration shown in FIG. 9B that can reduce the number of signal conversion units 100.

<Schematic Configuration of Imaging Device; Fourth Embodiment; First Example>
FIG. 10 is a diagram for explaining a first example of the fourth embodiment of the CMOS solid-state imaging device which is an embodiment of the physical information acquisition device according to the present invention. Here, a modification to the first example of the third embodiment is shown. The solid-state imaging device 1 according to the fourth embodiment is characterized in that not only the signal conversion unit 100 but also the AD conversion unit 120 is incorporated in the imaging unit 10.

  In particular, the first example is characterized in that the signal conversion unit 100 and the AD conversion unit 120 are provided for each unit pixel 3 and the output is taken out of the imaging unit 10 for each vertical column. Although not shown, the AD conversion unit 120 is provided in the imaging unit 10, and the output of the AD conversion unit 120 can be immediately passed to the output unit 88 via the horizontal selection switch unit 60 and the horizontal signal line 86. .

  As shown in FIG. 10, the unit pixel 3 in the imaging unit 10 includes a charge generation unit 32 that detects a signal charge, and a pixel that generates a voltage mode pixel signal based on the signal charge generated by the charge generation unit 32. A pixel signal generation unit 33 as an amplifier is provided for each unit pixel 3.

  In addition, as a characteristic part of the third embodiment, a signal conversion unit 100 and an AD conversion unit 120 are provided in this order after the pixel signal generation unit 33. The output of the AD conversion unit 120 is connected in common to the AD conversion unit 120 in the same vertical column to the vertical signal line 18 that is an output line of the pixel signal, and the modulation signal F0 (in accordance with the signal charge acquired by the unit pixel 3). The counter value acquired by the AD conversion unit 120 based on Fout1 or Fout2) is supplied to the output unit 88 via the horizontal selection switch unit 60 and the horizontal signal line 86.

<Schematic Configuration of Imaging Device; Fourth Embodiment; Second Example>
FIG. 11 is a diagram illustrating a second example of the fourth embodiment of the CMOS solid-state imaging device which is an embodiment of the physical information acquisition device according to the present invention. Here, a modification to the second example of the third embodiment is shown.

  In the solid-state imaging device 1 of the second example of the fourth embodiment, the signal conversion unit 100 and the AD conversion unit 120 are incorporated into the imaging unit 10, and the charge generation unit 32 and the pixel signal generation unit 33 in a plurality of vertical columns are included. This is characterized in that one selection switch in the horizontal selection switch section 60 is assigned.

  In this case, a selector switch 58 is provided between the output side of the unit pixel 3 and the vertical signal line 18 in order to assign one selection switch to the plurality of charge generation units 32 and the pixel signal generation unit 33. The count value selected by the selector switch 58 (by the AD conversion unit 120) is supplied to the selection switch via the vertical signal line 18. The selector switch 58 receives a control signal for instructing a reading row as a switching control signal.

  Correspondingly, although not shown in the figure, the horizontal selection switch unit 60 is provided with a number of selection switches in consideration of the allocated portion. As a configuration in which the number of selection switches is maximized, a configuration in which a single signal conversion unit 100 and AD conversion unit 120 are assigned to two charge generation units 32 and pixel signal generation units 33, respectively, can be adopted. As a configuration in which the number of switches is minimized, a configuration in which one selection switch is assigned to the charge generation unit 32 and the pixel signal generation unit 33 in all vertical columns may be employed.

  In addition, a configuration may be adopted in which one selection switch is assigned to the plurality of charge generation units 32 and the pixel signal generation unit 33, and as illustrated in FIG. 11A, the signal conversion unit 100 and the AD conversion unit 120, respectively. And a selector switch 58 may be provided downstream of each AD converter 120. In this case, the selector switch 58 has a function of a selection switching unit that assigns a single output terminal 59 to a plurality of AD conversion units 120, that is, assigns a selection switch in one horizontal selection switch unit 60.

  Alternatively, as illustrated in FIG. 11B, the number of the signal conversion units 100 and the AD conversion units 120 can be reduced by adopting a configuration in which the selector switch 58 is disposed in front of the signal conversion unit 100. In this case, the selector switch 58 assigns a single output terminal 59 to a plurality of unit pixels 3, that is, a selection switch in one signal conversion unit 100 or AD conversion unit 120, in other words, one horizontal selection switch unit 60. It has a function of a selection switching section for assigning.

  Although not shown, as an intermediate mode between FIG. 11A and FIG. 11B, a signal conversion unit 100 is provided for each of the plurality of signal conversion units 100 and one AD conversion unit 120. By adopting a configuration in which the selector switch 58 is disposed between them, the number of AD conversion units 120 can be reduced. In this case, the selector switch 58 assigns a single output terminal 59 to a plurality of signal converters 100, that is, a selection switch that assigns one AD converter 120, in other words, a selection switch in one horizontal selection switch 60. Have the function of the department.

  If the structure of 4th Embodiment is taken, the counter value according to the signal charge acquired by each unit pixel 3, ie, AD conversion result, was provided in the exterior of the imaging part 10, regardless of the 1st example and the 2nd example. A mechanism for transmitting to the horizontal selection switch unit 60 and immediately transmitting it to the output unit 88 is the same as the information transmission mechanism for human eyes.

  The operations of the signal conversion unit 100 and the AD conversion unit 120 are the same as those in the first embodiment. Also in the fourth embodiment, the pixel signal voltage Vx read out from the imaging unit 10 is the same as in the first embodiment. As a result, the count result can be acquired almost at the same time, and the AD conversion process can be completed, so that the AD conversion process can be dramatically shortened.

  Further, by adopting an aspect in which not only the signal conversion unit 100 but also the AD conversion unit 120 is arranged in the imaging unit 10, it is possible to enjoy an effect that cannot be obtained with the conventional configuration.

  However, as can be seen from FIGS. 10 and 11, since the AD conversion unit 120 is also incorporated in the imaging unit 10 based on the configuration of the third embodiment, it is more difficult to achieve high density. That is, the size of the unit pixel 3 is increased by the addition of the signal conversion unit 100 and the AD conversion unit 120, and in the second example, it is necessary to arrange a selector in the imaging unit 10, and the entire imaging unit 10 It becomes difficult to increase the density, for example, by increasing the area.

  Similarly to the third embodiment, it is necessary to arrange the readout current supply line 19 in addition to the vertical signal line 18 for signal extraction, and a wiring layer that forms a wiring for the active element of the imaging unit 10 is formed. At this time, in a surface sensor having a normal surface-receiving type pixel structure that takes incident light into the photoelectric conversion element from the same surface side as the wiring layer, the readout current supply line 19 becomes a factor that blocks light.

  In order to solve these problems, as described in the third embodiment, a back-illuminated sensor structure may be used. However, even in the case of the back-illuminated type, in order to reduce the number of layers for wiring and circuit members opposite to the light incident surface and not increase the size of the entire imaging unit 10, the signal conversion unit 100 and It is preferable to reduce the circuit scale of the AD conversion unit 120 and the selector switch 58, and it is appropriate to adopt the configuration shown in FIG. 11B that can reduce the number of signal conversion units 100 and AD conversion units 120. Conceivable.

<Schematic Configuration of Imaging Device; Fifth Embodiment>
FIG. 12 is a diagram for explaining a fifth embodiment of a CMOS solid-state imaging device which is an embodiment of a physical information acquisition device according to the present invention. Here, a modification to the first example of the third embodiment is shown. However, the deformation mode described here can be similarly applied to the second example of the third embodiment and the first and second examples of the fourth embodiment.

  The fifth embodiment is characterized in that a signal conversion unit 101 that directly performs signal conversion by FM modulation or PM modulation based on the signal charge generated by the charge generation unit 32 is provided. In order to directly perform FM modulation or PM modulation, as shown in FIG. 10A, the signal conversion unit 100 may be a charge injection type modulation circuit. That is, it is only necessary to have a function of converting the carrier signal into a modulated signal related to the frequency based on the signal charge, and the charge / frequency as a frequency modulation unit that modulates the frequency f of the carrier signal itself with the signal charge as the modulation signal. It is only necessary to have either a conversion unit (Q / F) or a charge / phase conversion unit (Q / P) as a phase modulation unit that modulates the phase φ with a signal charge as a modulation signal.

  As shown in FIG. 10B, the read selection transistor 34 as a switch for transferring the signal charge generated by the charge generation unit 32 to the signal conversion unit 100 is connected to the charge generation unit 32 and the signal as necessary. It may be provided between the converter 100. Further, a reset transistor 36 may be provided as a reset gate portion for discharging charges.

  In each of the third and fourth embodiments described above, the pixel signal generation unit 33 converts the signal into a voltage mode pixel signal based on the signal charge generated by the charge generation unit 32, and then the carrier signal is changed to the frequency. Since the signal is converted to a related signal, an FM modulation circuit or a PM modulation circuit using a general-purpose VCO can be used, but the circuit configuration is redundant.

  On the other hand, in the fifth embodiment, since the FM modulation and the PM modulation are performed directly based on the signal charge generated by the charge generation unit 32, the circuit configuration can be made compact.

<Back-illuminated sensor structure; sectional view>
FIG. 13 is a cross-sectional view showing an example of the structure of the back-illuminated imaging unit 10 and the peripheral circuit unit suitable for realizing the third to fifth embodiments. In FIG. 13A, by polishing the wafer by CMP (Chemical Mechanical Polishing), a semiconductor element made of silicon (Si) having a thickness of about 10 to 20 μm for the charge generation unit 32 and the pixel signal generation unit 33 is used. Layer 631 is formed. Desirable ranges of the thickness are 5 to 15 μm for visible light, 15 to 50 μm for infrared light, and 3 to 7 μm for ultraviolet region. A light shielding film 633 is formed on one surface side of the semiconductor element layer 631 with the SiO 2 film 632 interposed therebetween.

  Unlike the wiring, the light shielding film 633 is laid out in consideration of only optical elements. An opening 633 A is formed in the light shielding film 633. A silicon nitride film (SiN) 634 is formed on the light shielding film 633 as a passivation film, and a color filter 635 and a micro lens 636 are formed above the opening 633A. In other words, light entering from one surface side of the semiconductor element layer 631 has a pixel structure that is guided to the light receiving surface of the photodiode 433 formed in the semiconductor element layer 631 through the microlens 636 and the color filter 635. ing. A wiring layer 638 on which transistors and metal wirings are formed is provided on the other surface side of the semiconductor element layer 631, and a substrate support material 639 having a thickness of several hundred μm is further attached below the wiring layer 638.

  Here, the first layer in the wiring layer 638 is a wiring in the pixel, the second layer is a vertical wiring for the vertical signal line 18 and the drain line, and the third layer is a transfer gate wiring ( It is used as a horizontal wiring for a read selection line TRG) 55, a reset wiring (RST) 56, a vertical selection line (VSEL) 57 for setting a row address, and the like.

  In realizing the third and fourth embodiments, the vertical wiring is not limited to the vertical signal line 18 but between the load MOS transistor of the read current source unit 27 and the amplification transistor 42 of the selected row at the time of signal reading. A read current supply line 19 is also arranged for assembling the source follower and keeping a constant current predetermined by the load MOS transistor connected to each amplification transistor 42 flowing through the amplification transistor 42.

  For the read current supply line 19, a fourth layer is provided in the wiring layer 638. Increasing the number of layers in the wiring layer 638 does not affect the optical design on the light receiving surface side. This point is significantly different from the surface light receiving type which increases the number of layers and affects the optical design on the light receiving surface side. Of course, the vertical signal line 18 may also be arranged in the fourth and subsequent layers. In this case, the number of wirings in the second layer can be reduced, and the pixel can be miniaturized.

  Between the wiring layer 638 and the substrate support 639, a semiconductor element layer made of silicon (Si) having a thickness of about 10 to 20 μm is used for the signal conversion unit 100, the AD conversion unit 120, and the selector switch 58. 640 is formed. It is not essential that all of the signal conversion unit 100, the AD conversion unit 120, and the selector switch 58 are provided in the same semiconductor element layer. At least the signal conversion unit 100, the AD conversion unit 120, and the selector switch 58 are It may be formed in any number of semiconductor element layers on the side opposite to the light receiving surface side. For example, the semiconductor element layer 640 has a three-layer structure of 640a, 640b, and 640c, and the signal conversion unit 100, the AD conversion unit 120, and the selector switch 58 are provided in the individual semiconductor element layers 640a, 640b, and 640c, respectively. May be. Thus, even if the semiconductor element layer 640 is provided, the optical design on the light receiving surface side is not affected at all. In this respect, when a circuit member is arranged on the light receiving surface side, it is greatly different from the surface light receiving type that affects the optical design on the light receiving surface side.

  Here, in the conventional CMOS image sensor, the wiring layer side is the front side, and the front-side light receiving type pixel structure that takes in incident light from the wiring layer side is adopted, whereas the back-illuminated type shown here is used. In the element structure, incident light is captured from the surface (back surface) side opposite to the wiring layer 638 and the semiconductor element layer 640.

  As is clear from this backside light receiving pixel structure, the light shielding film 633 is only present as a metal layer between the microlens 636 and the photodiode 433, and the light shielding film 633 has a high height from the photodiode 433. Is as low as the thickness of the SiO 2 film 632 (for example, about 0.5 μm), it is possible to eliminate the limitation of light collection due to kicking in the metal layer.

  In addition, as can be seen from FIG. 13 (A), a back-side light-receiving pixel structure that takes in light from the surface opposite to the wiring layer (back surface side) is adopted, so that the circuit members in the wiring and the semiconductor element layer 640 are used. The wiring can be routed and the circuit members can be arranged on the photoelectric conversion element region such as a photodiode without worrying about the problem of light shielding due to.

  Further, as can be seen from FIG. 13A, since the wiring layer 638 does not exist on the light receiving surface side, the light shielding film 633, the color filter 635, and the microlens 636 can be formed at a low position with respect to the light receiving surface. Therefore, it is advantageous in terms of color mixing and peripheral light reduction under sensitivity.

  In the back-illuminated sensor structure shown in this example, not only the read current supply line 19 but also other wirings (wiring in the pixel, vertical wiring excluding the read current supply line 19, horizontal wiring) Also, the incident light is arranged on the surface opposite to the side that takes in the photoelectric conversion element, but this is not essential. That is, in realizing the third or fourth embodiment, the present invention may be applied only to the read current supply line 19 that needs to be provided separately from the vertical signal line 18. In this case, for example, when the surface irradiation type sensor structure is modified, a layer structure as shown in FIG. 13B is obtained.

  For example, when diverting a sensor that has already been optically designed as a surface type, and making it a global shooter (high speed) with compatibility of characteristics (Compatibility), it is necessary to use a digital control line and an analog system. A certain vertical signal line can be used for isolation between the front surface and the back surface.

  However, as a real problem, the signal conversion unit 100, the AD conversion unit 120, and the semiconductor element layer 640 for the selector switch 58 are disposed on the opposite side of the light receiving surface across the semiconductor element layer 631 in which the photodiode 433 and the like are formed. It is possible to arrange the wiring layer 642 for the read current supply line 19 and the wiring layer 638 for other wiring (wiring in the pixel, vertical wiring, horizontal wiring) on the light receiving surface side. Things that are not impossible, increase the number of processes.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. Various changes or improvements can be added to the above-described embodiment without departing from the gist of the invention, and embodiments to which such changes or improvements are added are also included in the technical scope of the present invention.

  Further, the above embodiments do not limit the invention according to the claims (claims), and all combinations of features described in the embodiments are not necessarily essential to the solution means of the invention. Absent. The embodiments described above include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements. Even if some constituent requirements are deleted from all the constituent requirements shown in the embodiment, as long as an effect is obtained, a configuration from which these some constituent requirements are deleted can be extracted as an invention.

  For example, in the above-described embodiment, accumulation of signal charges corresponding to incident light is started for each line (row), and a current or voltage signal based on the accumulated signal charges is sequentially picked up from each pixel by addressing. The example of application to a device of a row-by-row readout system (column readout system for controlling electronic exposure time read out from) has been described, but in a system in which accumulation of signal charges corresponding to incident light is started for each pixel. Similarly to the above embodiments, the carrier signal is converted into a signal related to the frequency based on the accumulated signal charge, and physical information for a predetermined purpose is acquired using the signal related to the frequency. It can be.

  In the above embodiment, a CMOS type solid-state imaging device that is sensitive to electromagnetic waves input from the outside such as light and radiation is exemplified. However, the pixel accumulation time and readout time are determined by address setting. The mechanism described in the above embodiment can be applied to any physical quantity distribution detection device that detects a change in a physical quantity of a certain type. The present invention can also be applied to a semiconductor device having a structure that does not include a unit signal generation unit in a unit component, such as a CCD (charge coupled device).

  For example, a fingerprint authentication device that detects a fingerprint image based on a change in electrical characteristics or a change in optical characteristics based on pressure is used for information related to fingerprints. In other mechanisms for detecting physical changes, such as Japanese Patent Application Laid-Open No. 2001-125734, the carrier signal is converted into a frequency-related signal based on the physical quantity change information detected by the detection unit, and the frequency is changed to this frequency. It can be set as the structure which acquires the physical information for predetermined purposes using the signal concerned.

  DESCRIPTION OF SYMBOLS 1 ... Solid-state imaging device, 3 ... Unit pixel, 7 ... Drive control part, 10 ... Imaging part, 11 ... Timing control part, 12 ... Horizontal scanning part, 14 ... Vertical scanning part, 15 ... Row control line, 16 ... Drive signal Operation unit, 18 ... vertical signal line, 19 ... read current supply line, 20 ... column processing unit, 22 ... column signal processing unit, 27 ... read current source unit, 86 ... horizontal signal line, 88 ... output unit, 60 ... horizontal Selection switch unit, 100... Signal conversion unit, 102... Voltage / frequency conversion unit, 106... Voltage / phase conversion unit, 120... AD conversion unit, 121 ... count processing unit, 122, 124, 128 ... pulse count processing unit, 126 ... Phase discriminating unit, 130 ... Data storage unit, 132 ... Switch unit, 631 ... Semiconductor element layer, 638,642 ... Wiring layer, 639 ... Substrate support material, 640 ... Semiconductor element layer

Claims (17)

An apparatus for detecting a physical quantity distribution, including a detection unit that detects change information according to a change in an incident physical quantity, and unit components that output a signal based on the change information detected by the detection unit are arranged in a predetermined order. A physical information acquisition device that uses and acquires physical information for a predetermined purpose based on the signal acquired under a predetermined detection condition for a physical quantity,
Based on the change information detected by the detection unit, a signal conversion unit that converts the carrier signal into a signal related to the frequency,
Using the signal related to the frequency generated by the signal conversion unit, the change information detected by the detection unit as a processing target signal, and an AD conversion processing unit that converts the processing target signal into digital data,
The physical information acquisition apparatus, wherein the physical information for the predetermined purpose is acquired using a signal related to the frequency generated by the signal conversion unit. The physical information acquisition apparatus according to claim 1, wherein the signal conversion unit is provided in a detection region in which the unit components are arranged in a predetermined order. The selection switching unit for allocating one signal conversion unit to the plurality of unit components or allocating one output terminal to the plurality of signal conversion units is further provided. The physical information acquisition device described. The physical information acquisition apparatus according to claim 1, wherein the signal conversion unit and the AD conversion processing unit are provided in a detection region in which the unit components are arranged in a predetermined order. The physical information acquisition apparatus according to claim 1, wherein the signal conversion unit includes a frequency modulation unit that modulates a frequency component in the carrier signal based on change information detected by the detection unit. A unit signal generation unit that generates a unit signal based on change information detected by the detection unit is included in the unit component,
The physical information acquisition according to claim 1, wherein the signal conversion unit includes a frequency modulation unit that modulates a frequency component in the carrier signal based on the unit signal generated by the unit signal generation unit. apparatus. The physical information acquisition apparatus according to claim 1, wherein the signal conversion unit includes a phase modulation unit that modulates a phase component in the carrier signal based on change information detected by the detection unit. A unit signal generation unit that generates a unit signal based on change information detected by the detection unit is included in the unit component,
The physical information acquisition according to claim 1, wherein the signal conversion unit includes a phase modulation unit that modulates a phase component in the carrier signal based on the unit signal generated by the unit signal generation unit. apparatus. The signal conversion unit includes a phase modulation unit that modulates a phase component in the carrier signal based on change information detected by the detection unit,
The AD conversion processing unit includes a phase discriminating unit that extracts phase information based on a reference signal having a predetermined frequency and a signal output from the phase modulating unit, and a count representing the phase information output from the phase discriminating unit. The processing target signal, which is change information detected by the detection unit, is converted into digital data by performing pulse count processing on the width of the target pulse with the reference signal having the predetermined frequency or the signal output from the phase modulation unit. The physical information acquisition apparatus according to claim 1, wherein: An apparatus for detecting a physical quantity distribution, including a detection unit that detects change information according to a change in an incident physical quantity, and unit components that output a signal based on the change information detected by the detection unit are arranged in a predetermined order. There,
A signal conversion unit that converts a carrier signal into a signal related to a frequency based on change information detected by the detection unit is provided in a detection region in which the unit components are arranged in a predetermined order,
A selection switching unit that assigns one signal conversion unit to a plurality of the unit components in the detection area or assigns one output end to the plurality of signal conversion units is provided. Physical quantity distribution detector. Using the signal related to the frequency generated by the signal converting unit, the change information detected by the detecting unit is used as a processing target signal, and an AD conversion processing unit that converts the processing target signal into digital data is provided in the detection region. The physical quantity distribution detection device according to claim 10, wherein The physical quantity distribution detection device according to claim 11, further comprising a selection switching unit that assigns one output end to a plurality of the signal conversion units and / or the AD conversion processing units in the detection region. . The physical quantity distribution detection device according to claim 10, wherein the signal conversion unit includes a frequency modulation unit that modulates a frequency component in the carrier signal based on change information detected by the detection unit. A unit signal generation unit that generates a unit signal based on change information detected by the detection unit is included in the unit component,
The physical quantity distribution detection according to claim 10, wherein the signal conversion unit includes a frequency modulation unit that modulates a frequency component in the carrier signal based on the unit signal generated by the unit signal generation unit. apparatus. The physical quantity distribution detection device according to claim 10, wherein the signal conversion unit includes a phase modulation unit that modulates a phase component in the carrier signal based on change information detected by the detection unit. A unit signal generation unit that generates a unit signal based on change information detected by the detection unit is included in the unit component,
The physical quantity distribution detection according to claim 10, wherein the signal conversion unit includes a phase modulation unit that modulates a phase component in the carrier signal based on the unit signal generated by the unit signal generation unit. apparatus. The signal conversion unit includes a phase modulation unit that modulates a phase component in the carrier signal based on change information detected by the detection unit,
The AD conversion processing unit includes a phase discriminating unit that extracts phase information based on a reference signal having a predetermined frequency and a signal output from the phase modulating unit, and a count representing the phase information output from the phase discriminating unit. The processing target signal, which is change information detected by the detection unit, is converted into digital data by performing pulse count processing on the width of the target pulse with the reference signal having the predetermined frequency or the signal output from the phase modulation unit. The physical quantity distribution detection device according to claim 11, wherein:

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