JP2010512292A - Environmental isolation system for flat panel displays - Google Patents

Abstract

The present invention generally relates to a system for storing and transporting flat panel display materials. Flat panel display systems have environmental protection capabilities, material tracking capabilities, and / or workstation loading capabilities. One component of a flat panel display system is a transportable and sealable container. Another component of a flat panel display system is a sealable loading port. The container is docked at the loading port, and the substrate is processed.

Description

  The present invention generally relates to an isolation system for storing and handling workpieces, and more particularly to a container for storing a flat panel display substrate and a storage system acting on the container.

  Increasing the quality and output of liquid crystal displays (LCDs) used in the manufacture of flat panel displays (FPDs) is a challenging process. In addition to this challenge, the size of glass has also increased significantly as large-screen TVs have become more popular. Because image quality is a major competitive feature in the market, FPD manufacturers must carefully test every panel with strict defect detection, while simultaneously reducing test time and increasing quality and output. .

  The production volume of large area FPDs is adversely affected by the glass panel being damaged due to particle contamination. This problem becomes more serious as panel sizes increase and pattern dimensions decrease.

  There are no known sealed containers for FPD, partly because of the size of the FPD. Therefore, to reduce the contamination of FPD during processing, it is necessary to isolate the FPD from the environment.

  One aspect of the present invention is to provide a system that isolates the FPD substrate being processed from contamination. In one embodiment, the system has a load port, and the load port has a load port door made of a retractable flexible material. In one embodiment, the flexible material is retracted into a pocket or zone located above the loading port.

  In other embodiments, the flexible material is retracted into a pocket or zone located below the loading port. It is also within the scope of the present invention that the flexible material can be retracted into a lateral pocket or zone, or can be retracted into a pocket or zone located above a container seated on a loading port. Is in.

  Another aspect of the present invention is to provide a container that prevents or minimizes damage to the substrate stored in the container. In one embodiment, the container has a door made of a retractable flexible material. The flexible material can be formed of any material such as, but not limited to, plastic, polymer and stainless steel foil. Any suitable apertureless flexible material that can accommodate operation and withstand repeated bending and stress of opening and closing should be used. In one embodiment, the flexible material is retracted into a pocket located in the upper region of the container. In other embodiments, the flexible material is retracted into a pocket located in the lower region of the container. It is also within the scope of the present invention for the material to be retracted into the side pocket.

  Another aspect of the present invention is to provide a clean filtered air or gas environment for the FPD substrate during a manufacturing cycle including storage, transport, tool loading and inspection. In one embodiment, the container and / or loading port can also adjust environmental conditions such as ionization, humidity and temperature.

  Yet another embodiment of the invention transports the container throughout the manufacturing facility and positions the container on the loading port. In one embodiment, the container has a wheel. The wheel may be a driven wheel or a motor driven wheel. In other embodiments, a belt conveyor or wheel conveyor moves the containers throughout the manufacturing facility and positions them on the loading port. In another embodiment, the container is provided with a plurality of lifting points where one mechanism (eg AGV etc.) lifts the container.

  Other aspects and advantages of the present invention will become apparent from the following detailed description, taken in conjunction with the accompanying drawings, illustrating by way of example the principles of the invention.

  Aspects of the invention will become apparent from the following detailed description, taken in conjunction with the accompanying drawings, illustrating by way of example the principles of the invention.

FIG. 3 illustrates a substrate container, tool loading mini-environment, and process tool (eg, manufacturing tool, measurement tool) according to one embodiment of the invention. It is a perspective view which shows the container of one embodiment. It is a figure which shows the container which has a door with a slot. It is a figure which shows the container which has a door with a slot. FIG. 5 shows one embodiment of a flexible door that is pulled towards the container frame at the end of the enclosure to minimize the seal gap. FIG. 5 shows one embodiment of a flexible door that is pulled towards the container frame at the end of the enclosure to minimize the seal gap. FIG. 6 is a simplified schematic diagram illustrating a container having a flexible membrane door of another embodiment. FIG. 6 shows another form of container according to one embodiment of the present invention. FIG. 6 shows another form of container according to one embodiment of the present invention. It is a figure which shows other embodiment of a substrate container. It is a figure which shows the container door arrange | positioned in an open position. FIG. 3 shows that the container has a clean air flow system. FIG. 3 shows that the container has a clean air flow system. 1 is a diagram illustrating one embodiment of an FPD delivery system. It is a figure which shows the port door 192 and container door which are arrange | positioned in an open position. It is a figure which shows one embodiment of a container conveyance loading system. FIG. 5 shows that the flexible door is retracted into the bottom pocket. FIG. 5 shows that the flexible door is retracted into the bottom pocket. FIG. 5 shows that the flexible door is retracted into the bottom pocket. FIG. 3 shows one embodiment of a method for connecting pulleys by a common shaft to synchronize the pulley drive system. It is a figure which shows the container in a docking position. It is a figure which shows the container in a docking position. It is a figure which shows other embodiment of a board | substrate conveyance system. It is a figure which shows other embodiment of a board | substrate conveyance system. It is a figure which shows other embodiment of a board | substrate conveyance system. It is a figure which shows the board | substrate stored in the container by the non-planar form. It is a figure which shows the board | substrate stored in the container by the non-planar form. FIG. 3 shows one embodiment of a container having a movable seal. FIG. 3 shows one embodiment of a container having a movable seal. 1 is a schematic diagram illustrating a containment shipping container for a large area substrate that minimizes resonance or vibration of the substrate according to one embodiment of the present invention.

  The present invention will be described in terms of systems and devices for large area substrates such as flat panel display substrates. However, it will be apparent to those skilled in the art that the present invention may be practiced without some or all of these specific details. In other instances, well known processing operations have not been described in detail in order not to unnecessarily obscure the present invention.

  The present invention generally includes a system for storage and transport of FPD (Flat Panel Display) material. The FPD system may have environmental protection capabilities, material tracking capabilities, and / or workstation loading capabilities. One of the components for the system has a transportable and sealable container. Other components of the system have a sealable loading port where the container is docked to the loading port and the substrate is processed.

  FIG. 1 illustrates a substrate container, tool loading mini-environment, and process tool (eg, manufacturing tool, measurement tool) according to one embodiment of the invention. As shown in FIG. 1, the container 1 stores the FPD substrate in the container in a substantially horizontal direction. In FIG. 1, the container 1 is disposed at a mounting position in front of the mini environment 100. In this embodiment, the container 1 forms a closed enclosure except for the front opening, and the front opening is also referred to as a retractable flexible membrane 3 (also referred to herein as a container door or a container shield). ). Merely by way of example, the flexible membrane 3 is retracted on a roller (which may or may not be segmented) or a wheel to allow access to the substrate in the container 1. . Other devices that can retract the membrane are also within the scope of the present invention. In one embodiment, the membrane can be kept out of physical contact everywhere around the front opening, thereby creating a small gap that allows the membrane to be retracted without wear. In other embodiments, this gap is minimized or eliminated, as will be described in more detail later.

  The container support mechanism 101 on which the container 1 is seated has, for example, a mechanism for moving the front surface of the container close to the front opening of the mini-environment 100, like a FOUP (front opening unified pod) advance plate of a conventional loading port. Alternatively, the container may be placed on the container support mechanism 101 at the position shown in FIG. In this loading position, the container door is preferably in close proximity to the front door of the mini-environment to form a proximity seal between the two doors. In any case, once the container 1 is placed in this loading position, both the container door 3 of the container and the door of the mini environment 100 are opened, so that the transport mechanism 106 in the mini environment accesses the FPD board. Make it possible. In one embodiment, as described below, the movements of both doors are synchronized so that both doors are opened and closed together. It should be understood that in one embodiment, the door 108 of the mini-environment 100 may be a retractable flexible membrane similar to the door 3. Synchronized door movement minimizes particle contamination because neither door exposes a potentially contaminated outer surface to the open space of the container or mini-environment. In one embodiment, it is within the scope and spirit of the present invention that process tool 102 does not include a mini-environment. In this case, the container front door (ie, the membrane or shield) is located proximate to the door or access zone of the panel handling system of the process tool 102.

  The mini-environment front door 108 may also be coupled with the container door before raising both doors 3, 108 together. Similar to the conventional port door connected to the FOUP door, by connecting both doors 3, 108 to each other, particles existing on the outer surface of both doors are captured between the container door 3 and the front door 108. . The front door 108 may be connected to the container door 3 at any height. In one embodiment, the front door 108 and the container door 3 are connected together near the bottom of each door. The container door 3 is configured so that the substrate handling robot 106 can be raised to a position where it can access the workpiece stored in the top shelf of the container.

  When both the container door 3 and the mini-environment door 108 are opened, a small gap is formed between both doors that is exposed to the outside environment. In order to prevent contaminants from the outside environment from entering the container or mini-environment 100, the mini-environment may have a fan filter unit 104 that allows clean air to flow inside the mini-environment. To produce a pressure in the mini-environment that is slightly higher than ambient or external pressure. This pressure difference pushes clean air out of the mini-environment 100 through the gap, preventing contamination from the outside. Alternatively, the mini-environment 100 or process tool 102 may not have a fan and filter, but instead utilizes a clean air flow provided by an optional fan filter unit 110 in the container 1. Also good. As described above, the door of the mini-environment (or the process tool if the mini-environment is not used) may be a rolling membrane (shown) as well as the container door, and slides vertically to open and close. It may be a conventional rigid door. It is also possible to seal the gap by opening the container 1 and sealing the container 1 against the mini-environment 100 after both doors are opened.

It should be appreciated that there are various ways of supplying power or motion (eg, mechanical force) to the container door mechanism and optional fan filter system. By way of example only, supplying power to the container
a) a portable energy storage device (eg, battery, supercap, fuel cell) for the container;
b) electrical contacts at the loading station,
c) non-contact power transmitted by an electromagnetic field from the stationary conductor of the loading station to the pick-up coil and circuit of the container;
d) a loading station air port supplying pressurized gas, and / or
e) A mechanical linkage that is associated with the container when the container is at the loading station. The power supply b), c), d) or e) is directly controlled by a source outside the container to control the movement of the container door and, for example, the operation / control of the fan / filter unit. Also, control signals may be provided at the loading station to control the timing of container door movement and the activation / control of the filter unit. There are numerous ways to transmit one or more control signals to the container, such as, but not limited to, optically coupled light emitting diodes (LEDs) and light sensors at the loading station, or Includes radio frequency signals.

  FIG. 2 is a perspective view of a container in one embodiment. The container 1 has a front opening 14 through which the substrate passes. The movable door 3 is made of a flexible material and passes over the roller 2 during opening and closing of the movable door 3. The lower end and the upper end of the movable door 3 are terminated by bars 4 and 5, respectively. Bars 4 and 5 allow uniform tension to be maintained across the width of the door 3. Both ends of the end bars 4, 5 may be supported by guides or slides (not shown) which keep the bars (and thus the membrane door) at a constant distance from the container body during door movement. To do. Each end of each bar is connected to the end of the timing / synchronization belt 7. The belt 7 is attached to the bar 5, then passes over the pulleys 8, 9, 10 and then attached to the end bar 4. Similarly, the belt 6 is attached to the other end of the end bar 5 and passes over three pulleys (including pulleys 11 and 12) on the other side of the container and then the other end of the bar 4 It is connected to. A shaft 15 is connected to the pulleys 8 and 11 so that the movements of both belts 6 and 7 are synchronized. Other pulleys rotate freely without a cross shaft. It should be appreciated that in one embodiment, both belts 6, 7 may travel diagonally across the side of the container 1 rather than around the entire circumference of the container 1. In this case, one pulley on each side is omitted.

  One concern would be particles that adhere to the inside of the door 3 while the door 3 is open or during the opening movement. These particles may detach from the inside of the door after the door 3 is closed and contaminate the substrate stored in the container 1. There are several ways to reduce this potential particle problem. When a fan and filter are attached to the container 1 and a small hole or other opening (eg, slot, micropore) is provided in the top surface 13 of the container, clean air flows out of the container through the small hole. This clean air stream prevents particles from depositing on the top surface of the container 1 and thereby prevents the particles from being moved onto the inner surface of the door when the door 3 is opened. Clean air also flows over (in line with) the inner surface of the door 3 when the door 3 is opened.

  Another concern is the generation and movement of particles at the interface between the flexible door 3 and the roller 2. Particle generation is reduced by reducing the contact between the roller 2 and the door 3. For example, the roller 2 has a thin ridge or protrusion on the entire length of the roller in order to reduce the contact area between the roller 2 and the door 3. As a modification, the inner surface of the door 3 may have a raised portion or a protruding portion that reduces the contact area. The container door 3 is opened and closed by various mechanisms. The lower end bar 4 may engage the vertical drive mechanism of the mini environment 100 or process tool 102. The vertical drive mechanism rises to open the door 3 and descends to close the door 3 without the need to provide any power actuator on the container 1. As a variant, the electric motor may be connected to the shaft 15, the end of the roller 2, or any timing belt pulley. The rotational movement of the motor causes the shaft, roller, or pulley connected to it to rotate, thereby moving the timing belt and door link system. Similarly, a linear actuator (e.g., a pneumatic device) that imparts door motion may be coupled to the door 3 or the belts 6, 7. Any other suitable mechanism for raising and lowering the door is within the scope of the present invention. The door 3 shown in FIG. 2 moves on the roller 2. It is within the scope of the present invention for the container to have a frame that surrounds the roller 2 and includes a docking interface, as shown in FIG.

  3 and 4 show a container having a slotted door. The door 3 has an upper door portion 17 and a lower door portion 19, which terminate at the bars 4 and 16, respectively, and form a slot opening 18. The bars 4, 16 are connected at their ends, thereby allowing movement to be transmitted to both door parts 17, 19 with one drive. The lower door portion 19 passes over the roller 20 and terminates at a termination bar 21. As the timing belts 6, 7 are moved, the slot 18 moves up and down with both timing belts 6, 7, thereby allowing access to a single storage location within the container. It is within the scope of the present invention that the slot 18 is large enough to provide access to two or more substrates stored in the container 1. The slot 18 may be formed by a hole cut in a single piece of flexible material, or may be formed by a perforated plate, ie, a single plate with a hole attached to the flexible material of the door 3. May be. In the embodiment of FIGS. 3 and 4, the membrane door is indexed to the location of the substrate to be removed, thus the door remains in front of the support element and the hole is one or more support elements or substrates. Enable access to.

  The slotted door container of FIGS. 3 and 4 should have the same characteristics as the container bar guide, particle reduction, and drive mechanism of the container shown in FIG. The bottom surface should have clean air flow holes to improve the cleanliness of the lower door portion. A mini-environment or process tool vertical drive mechanism may engage the bar 4 or 16 to move the slot to a different position when accessing the substrate for processing. FIG. 3 shows the container 1 with an optional fan 110 and filter unit 112. The fan 110 and filter unit 112 should provide a sufficiently clean air flow to ensure that particles do not move from the outside environment through the slot 18 into the container. Furthermore, the container 1 may include a wall region that forms part of its front opening. When the slot 18 is moved to cover the wall 109, the container opening is effectively closed. The wall of the container opening is arranged at an arbitrary height. FIG. 3 shows one embodiment in which the barrier or wall is located at the top portion of the container opening 14. When the container door is raised until the slot 18 is placed over the wall 109, the lower portion 19 of the door covers the entire container opening 14. Similarly, a mini-environment or process tool port door may have a movable door with a single slot. In this case, once the container is seated in the loading position, the port door is preferably moved or indexed with the container door, and the port door is preferably aligned with the slot of the container door. In other embodiments, the port door may have a door similar to a conventional port door.

  5A and 5B show one embodiment of a flexible door that can be pulled toward the container frame at the end of the enclosure to minimize the seal gap. In this embodiment, the container has a movable roller assembly 25. The roller assembly 25 includes a roller 2, a pivot arm 26, a pivot bearing 27, a roller tension spring 28, a spring mounting portion 29, and a stop block 30. The pivot arm 26 is held against the stop block 30 until the force vector perpendicular to the longitudinal axis of the pivot bar exceeds the spring tension of the spring 28. The pivot arm 26 then pivots at the pivot bearing 27 and separates from the stop block 30. The tension spring force is preferably greater than the belt tension and any frictional force caused by closing the door. In one embodiment, closing the container door and sealing the container door against the stop block 30 is accomplished via a single movement. It is within the scope of the present invention for the roller assembly to include a slide bearing assembly.

  It should be understood that the drive system of FIG. 5A is similar to the drive system of FIG. The drive system has a timing belt 7 and a pulley, and the door terminates at the upper bar 5 and the lower bar 4. FIG. 5A shows slide portions 22 and 26 connected to the bars 5 and 4 respectively, and the slide portions 22 and 26 form a slide support portion. A belt spring 23 is added to maintain the belt tension within the working range when the door moves toward the front of the container. This motion effectively reduces the belt / door circumference and the belt spring 23 keeps the corresponding belt from loosening. When the belt and the door are moved in the direction of lowering the door, the upper bar 5 hits the end block 24 because the sliding support for the bar 4 enters the recessed slide contour 31. The recessed slide profile 31 is the part of the slide that is slightly inclined towards the front of the container, so that the bar 4 moves along its guide path and the end of the door faces towards the container. Moving. While the bar 4 moves through the recessed slide profile, the bar 5 does not move against the end stop (end block) and the roller until the roller assembly pivots toward the end block 24. Increase the force applied to the. The pivoting of the roller assembly is combined with the movement of the bar 4 through the recessed slide profile, moving the entire surface of the door (under the roller) towards the container, thus minimizing the gap. There is also a holding mechanism that prevents the bar 4 from moving upward due to the displacement force of the tension spring of the roller once the door is closed.

  The drive belt may be replaced with any similar flexible coupling, such as a cable, cord, V-belt, flat belt, or band. The movable roller in FIGS. 5A and 5B should be in a linear motion rather than a pivot. The pulleys 8-10 may be located at different locations, and the belt 7 follows different paths as long as it remains connected to the two ends of the flexible door. The flexible door material may be wound on a spring-tensioned roller in such a way that the window blind or awning operates.

  FIG. 6 is a simplified schematic diagram illustrating a container having a flexible membrane door of another embodiment. The container 1 has a docking interface 150, which in one embodiment is configured to receive a drive pin. The drive pin engages and is latched to the docking interface 150 by either rotation or other suitable mechanism. The container 1 has a fan / filter assembly 110 and a membrane door 3. In one embodiment, a key may be used as the drive pin, and the key is used to lock and unlock the flexible membrane so that the door is secured by the lock. When unlocked, it is raised or lowered. In one embodiment, the key remains captured with the container, such as a rotating latch with integrated retaining means.

  7A and 7B show another form of container according to one embodiment of the present invention. 7A and 7B, the membrane door 3 is configured to pass or roll around the shafts 154,156. The membrane door 3 has a raised portion 158 or protrusion for minimizing contact between the membrane doors as the door passes around the shaft.

  FIG. 8 shows another embodiment of the substrate container. The container has a container shell that forms an enclosure, the enclosure having a first side wall, a second side wall, and a rear wall extending from a bottom wall (ie, base) and a top wall. The container shell shown in FIG. 8 has a front opening through which the substrate can pass. Unlike the FOUP, the container door has a flexible material. The container door may include any suitable material that is compatible with the process and clean room environment and can withstand bending induced by repeated opening and closing. Exemplary materials include polyester films, synthetic fluoropolymers, fiber reinforced polyester films, fiber reinforced synthetic fluoropolymer stainless steel foils, and the like. In one embodiment, the container door may be electrically conductive for antistatic purposes.

  FIG. 8 shows the container door 3 in the closed position. In this embodiment, the container also has a base disposed along the bottom surface. As will be described in more detail later, the container door 3 may be retracted into the top portion of the container shell or the side portion of the container shell to provide access to the substrate stored in the container 1.

  FIG. 9 shows the container door in the open position. In FIG. 9, the top wall and side panels of the container are omitted for the purpose of illustration. In this embodiment, the container door 3 retracts into the top zone (region) of the container shell (e.g., along the inner top wall of the container or along the outer top wall of the container). For example, the container door 3 may be retracted into a pocket on the top wall of the container shell or into the top of the container near the top wall of the container shell. Nevertheless, in this embodiment, the container door 3 passes over a roller that extends across the top of the front opening. As shown, when the container door passes over the roller, the container door 3 bends substantially at a right angle, requiring a flexible material. It is within the scope of the present invention that the container includes two or more rollers that guide the container door. For example, in order to reduce the degree of bending of the container door, a pair of rollers arranged at an angle of 45 ° from each other may be included. The air inlet plenum 170 allows air to flow into the area into which the door 3 is retracted, and a discharge plenum is configured along the top side.

  FIG. 9 shows that the lower end and the upper end of the container door terminate together with the guide bar. These guide bars allow a uniform tension to always be maintained over the entire width of the door 3. Both ends of the guide bar may be supported by guides or slides (not shown) that maintain the bar at a fixed distance from the container body during door movement. In this embodiment, each guide bar is connected to two timing / synchronization belts. The belt 6 shown in FIG. 9 is attached at one end to the guide bar, then extends downward along the side of the front opening, passes over the pulley, and then backs the top of the side panel. The other end is attached to the other guide bar after extending diagonally backward to the other corner and passing over the second pulley. A belt attached to the other end of each guide bar extends through a similar set of pulleys. The pulleys 8 and 11 are connected by a shaft so that the movements of the belts are synchronized. Other pulleys rotate freely without a cross shaft.

  10A and 10B show that the container includes a clean air flow system. In this embodiment, the container has an air inlet plenum 170, an air outlet plenum, and a number of clean air blowers 110. The blower 110 draws external air into the container and creates a clean air flow in the container. FIG. 10B shows a diffuser screen 180 located between the plenum and the blower. The blower 110 creates a clean air flow into the container. This causes a slight pressure increase of clean air in the container. Air flows out of the proximity seal formed by the container door and other vents designed to sweep particles from contaminated surfaces such as rollers and bearings. The space between the blower panel and the diffuser screen 180 is a plenum that allows the pressure to be more evenly distributed before the air exits the plenum and enters the container. In other words, the plenum outlet is an outlet that supplies air to the interior of the container. If space for the plenum is allocated, the filter element may be arranged differently to be placed in the mini-environment, i.e. the blower pressurizes the plenum volume and the filter Located at the location shown as the diffuser screen. This allows the filter to benefit from the uniform pressure of the plenum and form a non-turbulent air flow. It is possible to attach the filter almost directly to the blower to generate a clean but somewhat turbulent air flow, saving space and at the same time creating a clean pressurized interior in the container.

  FIG. 11A illustrates one embodiment of an FPD delivery system. Here, the delivery system has a mini-environment 100 that houses the FPD handling robot 106. The mini-environment 100 is generally a clean that allows the FPD handling robot 106 to remove the FPD substrate or panel from the container and then transport the substrate to a process tool or other container without contaminating the substrate. Functions as a transfer chamber. In this embodiment, the mini-environment has a port door 192 and a door storage chamber or door storage zone 190. Since the door storage chamber 190 is disposed above the mini-environment 100, the port door 192 moves upward and enters the chamber 190. The door storage chamber 190 may be located on either side of the mini environment. FIG. 11A further shows the port door 192 in the closed position. As will be described in more detail later, the container is seated on the loading port.

  FIG. 11B shows the port door 192 and the container door in the open position. The port door 192 is raised and is in the door chamber 190, which is a clean environment. The container door is drawn into the top of the container 1. The loading port door and the container door may operate integrally or each door may operate individually. For example, the mini-environment 100 has a port door drive mechanism for moving the port door between an open position and a closed position. The container has another drive mechanism for moving the container door between an open position and a closed position. As a modification, the port door may have a driving means for moving the container door in order to engage the container door and move the two doors together. It is also within the scope of the present invention for the container door and port door to move in two different directions. The FPD handling robot 106 is inserted into the container. After the mini-environment door and the container door are placed in the open position, the FPD handling robot accesses any substrate in the container.

  FIG. 12 illustrates one embodiment of a container transport / loading system. Here, the container is placed on the loading port of the mini-environment 100 connected to the process tool 102. The container 1 is moved between the transport system and the loading port by a belt conveyor. In one embodiment, the containers are placed on the loading port by a belt conveyor. It is within the scope of the present invention for the loading port and transport system to move the container 1 using an air bearing system or wheel. The container is shown in the docking position. Rather than having a top handle, the container 1 may have two loading points 174 that extend from each side of the container so that the forklift-type device lifts the container. The four lifting points distribute the weight of the container acting on the lifting device. The container may have any number of lifting points and / or similar means for lifting and supporting the container.

  FIG. 13 shows a process tool or mini-environment with a loading port and a container seated on the loading port. Although FIG. 13 shows a single load port, it is within the scope of the present invention for a process tool or mini-environment to have multiple load ports. The multiple loading ports may be stacked in the vertical direction or arranged in the horizontal direction. In this embodiment, the container door is retracted into the bottom of the container shell. For example, the container door may be retracted into the pocket 204 in the bottom wall of the container shell or into the bottom of the container proximate to the bottom wall of the container shell. Nevertheless, in this embodiment, the container door moves over a roller 200 that extends across the bottom of the front opening. It is within the scope of the present invention for the container to have two or more rollers 200, 202 that guide the container door. For example, the container may have a pair of rollers disposed at an angle of 45 ° from each other to reduce the degree of bending of the container door. The upper and lower edges of the container door terminate with guide bars. These guide bars make it possible to maintain a uniform tension at all times over the entire width of the flexible door. The end of the guide is supported by a guide or slide (not shown) that maintains the bar at a fixed distance from the container body during door movement. As will be described later, the flexible door is driven by a drive mechanism. FIG. 13 shows one embodiment of a drive mechanism for moving the flexible door between an open position and a closed position, and an air discharge means for the container. In this embodiment, the container door drive mechanism has three pulley systems located on each side of the container. The first pulley 206 is disposed in front of the top of the container above the front opening. The second pulley 200 is disposed in front of the bottom of the container below the container opening. The third pulley 202 is disposed behind the bottom of the container, and both ends thereof are attached to the guide bar.

  Two belts (one belt attached to each end of the guide bar) move the door between the open and closed positions. When the door is placed in the open position, the belt 205 shown in FIG. 14 is attached at one end to the top guide bar, extends upward along the side of the front opening, passes over the first pulley, Back down along the back of the bottle, towards the second pulley, under the second pulley, back towards the rear of the container, over the third pulley, towards the bottom guide bar, Installed on the bar. A belt attached to the other end of each guide bar (the right die of the container) extends through a similar set of pulleys. The set of the first pulley and the third pulley is preferably connected by a shaft so that the movements of the belts are synchronized. The second pulley is not connected by a common shaft.

  13 and 15 show the guide bar not retracted into the bottom pocket when the container door is placed in the open position. Instead, the top guide remains in the forward opening facing outward. However, the top guide bar is lowered below the bottom substrate, so that the top guide bar does not prevent access to the bottom substrate (eg, by a substrate handling robot).

  FIGS. 13-15 show the flexible door retracting into the bottom pocket. The bottom pocket may be part of the container or an additional structure placed under the container. By retracting the container door into the lower pocket, the container door is maintained in a controlled environment while the container is opened. FIG. 13 shows that the air flow in the container allows air to move into the bottom pocket and out of the rear wall of the bottom pocket. While the container door is retracted into the bottom pocket, the “clean” side of the container door (the side facing the substrate when the container door is closed) is facing up. Thus, while the container door is in the bottom pocket, the air flow in the container moves over the “clean” side of the container door, thereby preventing or minimizing particles from contaminating the container door. To do. The perforated surface of the rear wall of the bottom pocket allows air to move out of the bottom pocket and return to the surrounding environment.

  FIG. 16 illustrates an embodiment of a method for connecting pulleys by a common shaft 206 to synchronize the pulley drive system. By moving the flexible doors in a synchronized manner (eg, moving both belts at the same speed), the movement of the doors is prevented to prevent the doors from tilting and / or contacting the container. Control.

  17 to 19 show an embodiment of a substrate transfer system. The system has a loading port and a mini-environment for accessing the substrate stored in the container and transporting the substrate to a process tool (or other container). The container shown in FIGS. 17-19 has a container door that, in one embodiment, opens by being retracted into the bottom pocket. The loading port has a conveyor system that advances and supports the containers over the loading port. In this embodiment, the conveyor is shown as a number of rollers. However, the conveyor system may be configured by a belt conveyor, for example.

  17 and 18 show the container in the docking position. The loading port has a container support, a loading port door, and a drive bar. In this embodiment, when the container is in the docking position, the drive bar engages with the container door, and the drive bar functions as a drive mechanism for opening and closing the container door. In this embodiment, the container support does not have a container advancement mechanism similar to a conventional loading port. As described above, the container is advanced by the conveyor. Accordingly, the container support is used to store the loading port door. As shown in FIG. 17, the loading port door opens when retracted into the container support. Air flow generated by the mini-environment (e.g., by pressure differential) or by other devices preferably moves into the container support to allow the clean air flow to flow on the "clean" side of the loading port door ( On the inner surface of the loading port door. FIG. 17 shows that the mini-environment, the interior of the container and the surrounding environment have different pressures, so that the air flow moves as shown in FIG.

  19A, 19B, 20A, and 20B show another embodiment of the substrate transfer system. In this embodiment, the transport system has a load port, which has a slide assembly for transporting the substrate to the process tool. The loading port shown in FIGS. 19A-20B is similar to the loading port shown in FIGS. 17 and 18, with the loading port door retracting into the container support. Other types of loading ports (eg, loading ports with a loading port door retracted upwards or sideways) are within the scope of the present invention. In this embodiment, the loading port has a vertical motion slide assembly for transporting the substrate from the container to the process tool. The loading port may have a single I / O port or multiple I / O ports. Here, a loading port having a single I / O port will be described.

  19A and 19B show a slide assembly having three supports for supporting a substrate. Of course, the slide assembly may have any number of supports. FIG. 19 shows that the vertical slide assembly is adjusted to align vertically with the substrate stored in the container. Once the slide assembly and substrate are aligned, the substrate is removed from the container onto the slide assembly. There are many ways to remove a substrate from a container, including but not limited to, for example, a method that allows a substrate to be supported by an air bearing and allows the substrate to slide from the container to the assembly, It includes a method of supporting by a roller and actuating the roller to move the substrate from the container to the slide assembly, or a method of supporting the substrate by a belt and actuating the belt to move the substrate from the container to the slide assembly. If air bearings are used to support and transport the substrate, the substrate support should be slid out of the container with the container support tilted slightly toward the front of the container or away from the front of the container. is there. The slide assembly may have a mechanical device (eg, a vacuum cup) for gripping a portion of the substrate and pulling the substrate out of the container and onto the air bearing.

  In operation, when the container door and the loading port door are opened, the slide assembly is aligned with any substrate stored in the container. Next, the substrate is removed from the container onto the slide assembly. If necessary, the assembly then aligns the substrate with the process tool opening, allowing the substrate to be transferred from the assembly to the tool. Once the substrate is processed, the substrate is transported back to the assembly, which aligns itself with an empty shelf in the container and transports the substrate back into the container. FIGS. 19A and 19B illustrate that it is preferable to provide a clean air flow into the transport zone between the loading port and the process tool to minimize or eliminate contamination of the substrate by the particles. The transport zone may be enclosed and may have an open space in a controlled environment.

  21A and 21B show another embodiment of the substrate transfer system. This transfer system has in particular a loading port (not shown) and a wafer transfer device. The container shown in FIG. 21B stores the substrate in a non-linear or non-planar form. Here, the container stores each substrate in a convex shape. 22A and 22B illustrate that the container stores the substrates in other non-planar configurations and that each substrate need not be stored in the container in the same non-planar configuration. In one embodiment, the deflection of each substrate is 3-4 inches (7.62-10.16 cm) over the length of the substrate or panel. Of course, other deflections are within the scope of the present invention. Storing the substrate in a non-linear or non-planar form adds rigidity to the substrate. The container support has rollers, air bearings, pads or belts by way of example only. By storing the substrate in a non-planar form, it is possible to greatly reduce the deflection of the substrate and simplify support and handling during transport. The substrate is intentionally deformed or bent about its longitudinal centerline or its horizontal centerline. The deformation at the centerline is exemplary, and the substrate or flat panel display may be deflected or deformed along any one line or point or along many lines or points. The deformation can be controlled by the position of the support point and other forces applied to the substrate.

  The transport device of this system generally includes an elevator mechanism and a transport assembly. The elevator mechanism has a vertical tower or housing with a drive mechanism substantially enclosed within the enclosure to minimize contamination of the substrate by particles generated by the elevator. The transport assembly is coupled (permanently or detachably) to the drive mechanism of the elevator. 21A and 21B show a transport assembly having a number of wheels for supporting the substrate and moving the substrate between the container and the process tool. As described above, the transport assembly is merely an example, and the substrate may be supported and transported by a roller, an air bearing, a belt, or the like. In a preferred embodiment, the support on the transport assembly is aligned with the support in the container. The transfer assembly may planarize the substrate or maintain the substrate in a non-linear form. If the substrate is planarized, the transport assembly needs to provide an additional third support to properly support the substrate.

  The transport assembly may have a horizontal stationary frame or a horizontally adjustable frame. The horizontal stationary frame is aligned vertically with the substrate in the container, and the substrate is transported onto the horizontal stationary frame. Only the wheels, air bearings or belts in the container and the transport assembly move. Alternatively, the frame moves along the Y axis to allow the transport assembly to enter the container and lift the substrate from the support shelf, similar to a conventional end effector.

  The elevator mechanism may have any height and may access, for example, one or more containers using a single elevator mechanism. At a minimum, the transport assembly has a certain range of vertical movement to access each substrate stored in the container. The elevator mechanism may have part of the loading port or may have another element of the system. As with the embodiment of FIGS. 20A and 20B, it is preferable to maintain a clean air flow through the transport zone to minimize contamination of the substrate with particles.

  22A and 22B show a substrate stored in a container in a non-planar form. In conventional wafer containers (eg, FOUP or SMIF pods), each storage shelf has two supports, each support being placed along one container wall and supporting the outer edge of the wafer. Unlike conventional containers, each shelf in the FPD container has two or more spaced apart support members in the container. The horizontal spacing and vertical arrangement of the support members is based at least in part on the type and size of the substrate stored in the container. 22A and 22B illustrate that one embodiment of the support member supports and produces a convex or concave substrate shape. It is also within the scope of the present invention for the container to store the substrate in other forms (eg, “S” shape, etc.)

  Figures 23 and 24 show one embodiment of a container having a movable seal. In this embodiment, the movable outer frame 400 (having a supple sealing surface) allows the flexible door 3 of the container seal 410 of the container shell (which also has a supple sealing surface). Press against the front to form a contact seal against the outside environment. In other words, the movable seal frame 400 presses the flexible door 3 against the fixed seal 404 and effectively seals the container. For example, when the movable seal frame 400 is placed in the open position, the movable seal frame 400 is about 4 mm laterally away from the container frame seal 402. When the movable seal frame 400 is closed and the container is sealed, the first 2 mm of movement causes the movable seal frame 400 to move to a position that contacts the flexible door 3. As the movable seal frame 400 continues to move toward the container frame, the final 2 mm movement pushes the container door 3 against the container seal 402 on the front surface 410 of the container frame. The container door pulling system is flexible, which causes the container door to be pushed forward and slightly distorted. As a variant, when the movable seal frame 400 is placed in the open position, there is a 2 mm (or other distance) gap between the movable seal frame and the flexible door 3. Regardless of the exact distance, the movable seal frame 400 and the container door are separated and the flexible door 3 can be moved to its open position. In this embodiment, the flexible door is rolled up into the top zone of the container shell. As described above, the flexible door may be configured to move downward or to either side when moving between the open and closed positions.

  Actuation of the movable frame may be driven by a motor 406 or solenoid (or any other driving force) provided on the container, or connected to the container when the container is docked to a tool or loading port. It may be driven by an external driving force. In this embodiment, the outer frame is moved between two positions by a linkage 408. Other mechanisms may be used. 23 and 24 show a flexible door configured to be rolled up into the top zone of the container. However, movable seals also work when the flexible door is retracted down to the bottom of the container or laterally around any side wall. FIGS. 23 and 24 further show a motor 406 provided on the container as a flexible door drive system. It is within the scope of the present invention to provide such a drive device outside the container and connect it to the container, for example, at a docking position. It is also an additional feature that when the container no longer engages the process tool or loading port, the movable seal and flexible door are locked in the closed position to eliminate inadvertent exposure to the outside environment.

  When the flexible door or latch is driven by an electrical mechanism provided on the container, the electrical mechanism can obtain the driving force in various ways. For example, the electrical mechanism may be coupled via an inductive contactless transmission while the container is in the docking position or at all positions when moving from tool to tool. The electrical mechanism may also receive power (electric power) transmitted through the conductive contacts when the container is docked at the process tool or loading port. The electrical mechanism may also receive power (electric power) from a battery located on the container itself. Other power sources are within the scope of the present invention.

  When power (power) is supplied to the container while the container is docked at the process tool or loading port, the actuating mechanism can operate in various ways during container unloading or loading at the loading port. It is driven to the position. The control signal can be used in the next movement stage (eg, confirming that the container door is open before the substrate handling robot attempts to access the substrate) or the removal of the container from the tool or loading port (the container is Prior to moving the loading port to ensure that the container door is closed, the container is fed to ensure proper positioning of the mechanism is achieved. Other control signals are also supplied to the container, such as signals that inform the actuator status and command the actuator. These control signals (as well as other control signals) are merely exemplary and include electrical galvanic contact, inductive contactless coupling, or light between the transmitter and detector (infrared, ultraviolet or visible). Light)) may be transmitted to the container. Communication between the container and the process tool is received and processed by a microcontroller provided in the container. The microcontroller controls actuator movement and / or provides status signals.

  FIG. 25 is a schematic diagram illustrating a containment / transport container for a large area substrate that minimizes substrate resonance or vibration in accordance with one embodiment of the present invention. The container 1 has a removable door that can securely seal a substrate (also referred to as a wafer) 608 in the container, actuate a latch, and hold the substrate. The substrate 608 is placed on the support member 602. Support member 602, also referred to as a shelf, has independent members such as rods, teeth, flat racks, pull wires or other support elements, which may be cantilevered. 25 shows the substrate 608 supported at two locations corresponding to the support member 602, the number of support members used, the form of the support member (for example, shape and size), and the shape of the substrate. And the substrate may be supported at any number of locations based on the size and desired deflection point of the substrate. The substrate is loaded into the container 1 through an opening formed by removing the door and engages the peripheral support member 600b. FIG. 25 shows the peripheral support member 600b in a position lowered from an initial position (position where the grip extension 604 is substantially in the same plane as the plane formed through the top surface of the support member 602). Yes. Once the substrate 608 is loaded into the container 1, a door is placed on the container and the container is sealed via a known latching mechanism available for FOUP. Next, when the peripheral support members 600a and 600b are driven downward (or upward), the substrate 608 comes into contact with the grip extension 604 of the peripheral support member 600b and the concave surface of the peripheral support member 600a. It is bent or deformed. It should be understood that the peripheral support member 600a may have a gripping extension similar to the peripheral support member 600b, and vice versa, and variations may be provided. The structure for driving the peripheral support member downward includes a lever in the container 1, such as a door actuated retainer that moves downward when the door is placed in the container. Other mechanisms include a latch key that locks the door and raises or lowers the surrounding support member or other independent means separate from the door. In one embodiment, the perimeter support member 600a is attached to the inner surface of the door and the perimeter support member 600b is located on the opposite side of the container. Of course, the perimeter support member may be located on any opposing side of the container and is not limited to being on the door. In the embodiment of FIG. 25, the substrate 608 is deformed into a curved shape, but may have many other shapes depending on the number and position of the support members 602 and the relative movement of the surrounding support members 600a and 600b. Although the peripheral support members 600a and 600b are shown to move in the same direction, one peripheral support member may translate upward and the other peripheral support member may translate downward. Good. For example, it should be understood that the restricted curved shape of FIG. 25 minimizes vibrations and resonances caused by transport / conveyance. The substrate 608 can be any geometric shape including, but not limited to, circular, square, rectangular or any other quadrilateral.

  It should be understood that the container and isolation system are merely exemplary and are not intended to limit the invention. It will be apparent to those skilled in the art, given the preferred embodiment of the container and system for storing, transporting (including transport) and loading the FPD, that the system of the present invention can achieve certain advantages. For example, the containers and systems can be used to transport, store or transport other types of substrates, or can be used in conjunction with other equipment in a semiconductor manufacturing plant. Many of the above inventive concepts are related to other semiconductor manufacturing processes such as 450 mm substrates, or other non-semiconductors such as solar cell substrates including all manufacturing techniques such as single crystal silicon, polycrystalline silicon, thin films and organic processes etc. It is equally applicable to manufacturing applications. The container disclosed in the present application can be used as a container for transporting a substrate between different factories and as a container for transporting a substrate in a factory. Embodiments of the present invention also include containers configured to support a single substrate or multiple substrates passing through the above embodiments.

  Although the invention has been described in some detail for purposes of clarity of understanding, it will be apparent that certain modifications may be practiced within the scope of the claims. Accordingly, the embodiments of the present invention are intended to be illustrative and not limiting. Further, the present invention is not limited to the details shown in the present application, but can be modified within the scope of the claims and the equivalents thereof. In the claims, elements and / or steps do not imply any particular order of operation, unless explicitly stated in the claims.

Claims (30)

A container for a flat panel display,
Base and
The top,
A side wall extending between the base and the top, and an opening is formed along the side of the container;
And a flexible door movably disposed over the opening, the flexible door having a rigid top member and a rigid bottom member, and an end of the rigid top member and the rigid bottom member. An end is attached to each drive member, each drive member being synchronized with each other via a rotatable shaft.   The container of claim 1 further comprising a plurality of support elements disposed within the container for supporting a flat panel display.   The container according to claim 1, wherein the drive member is a belt, and the belt contacts and is driven by a respective end of a rotatable shaft.   The container of claim 2, wherein the plurality of support elements are configured to form an air bearing on which a flat panel display rests.   The container of claim 1, wherein the flexible door has a rigid intermediate member with a hole formed therein, the hole allowing access to one or more flat panel displays.   The flexible door has a pair of rigid intermediate members spaced from each other between a rigid top member and a rigid bottom member, the rigid intermediate member forming an opening into the container. The container according to claim 1.   The container is configured to face each other with a tool for processing a flat panel display, the tool having a drive bar that engages the container, and the drive bar is configured to move the flexible door The container according to claim 6.   The flexible door is disposed between a fixed seal and a movable seal, and when the flexible door opens and closes, the flexible door is spaced from the fixed seal and the movable seal. The container of claim 1, which is spaced apart.   The movable seal is coupled to an actuator that presses the movable seal against the first surface of the flexible door and the second surface of the flexible door against the fixed seal. 9. A container according to claim 8 configured to be pressed.   The container of claim 8, wherein a flexible seal and the movable seal are disposed around the periphery of the flexible door. A container carrying a flat panel display,
A plurality of spaced apart support members configured within the container to support the flat panel display;
An opening configured along the surface of the container and allowing access to the inner region of the container;
A flexible door movably disposed over the opening, the flexible door having a rigid top member and a rigid bottom member, the rigid top member being rigid via a drive member Connected to the bottom member,
And a synchronizing shaft disposed across the outer surface of the container, the synchronizing shaft moving the flexible door to open or close access to the inner region of the container. Drive the
Furthermore, it has an air supply part mounted on the surface of the container, and the air supply part has an access part to the inner region of the container, and generates air pressure in the container to prevent the invasion of particles from the outer environment. Configured to let the container.   The container according to claim 11, wherein the air supply unit is a blower attached to a side surface of the container so as to face the opening.   Furthermore, the container of Claim 11 which has a filter arrange | positioned downstream of the said air supply part.   14. The container of claim 13, further comprising a diffuser configured to disperse air from the air supply and the filter within an interior region of the container.   The container according to claim 11, further comprising a second synchronization shaft disposed along an outer surface of the container so as to be diagonally opposite to the synchronization shaft.   The container of claim 11, wherein the air supply is further configured to scavenge an air flow over an inner surface of the flexible door when the flexible door is in an open state.   And a flexible door receiving cavity disposed between the outer surface of the inner region and the outer surface of the container, the flexible door receiving cavity when the flexible door is in the open state. The container of claim 11, configured to receive a flexible door.   The container of claim 17, wherein the flexible door receiving cavity is disposed along a bottom surface of the container.   The container of claim 11, wherein the container is configured to face each other with a loading port of a flat panel display processing tool. Flat panel display processing tools,
An enclosure, the enclosure having a controlled environment therein, the enclosure comprising a handling robot for moving the flat panel substrate to and from the flat panel display processing tool, and a loading port And is configured to move the flat panel substrate through the loading port,
And a container configured to transport a flat panel substrate, said container facing the loading port through a movable door movably disposed over an opening formed along the surface thereof. Configured to
The movable door has a rigid top member and a rigid bottom member, the rigid top member being coupled to the rigid bottom member via a plurality of drive members,
The container further includes a synchronization shaft disposed across its outer surface, the synchronization shaft opening the flexible door to open and close access to the inner region of the container. Driving a plurality of drive members to be moved,
The flat panel display processing system, wherein the movable door is slidably moved around the outer surface of the container.   21. The flat panel display processing system of claim 20, wherein the handling robot has a slide assembly configured to move in two dimensions.   21. The flat panel display processing system according to claim 20, wherein the container includes a support member that supports a flat panel substrate, and the flat panel substrate is non-planar when supported by the support member.   The handling robot has an arm extension configured to access an inner region of the container when the movable door is open, the arm extension engaging a non-planar flat panel substrate 23. The flat panel display processing system of claim 22, wherein the flat panel display processing system is curved upward.   The movable door has a pair of rigid intermediate members spaced apart from each other between a rigid top member and a rigid bottom member, the pair of rigid intermediate members extending into the container. 21. The flat panel display processing system of claim 20, wherein the flat panel display processing system forms an opening.   The enclosure engages a movable door of the container via a drive bar extending from a surface thereof, and the drive bar includes movement of the movable door and movement of the movable door of the enclosure. The flat panel display processing system of claim 24, configured to synchronize.   21. The flat panel display processing system of claim 20, wherein the movable door is formed of one of a polyester film and a stainless steel foil. Flat panel display processing tools,
A container configured to transport a substrate, the container being configured to process the flat panel display via a movable door movably disposed over an opening formed along a surface thereof. Configured to face each other,
The movable door has a rigid top member and a rigid bottom member, the rigid top member being coupled to the rigid bottom member via a plurality of drive members,
The container further has a synchronization shaft disposed across its outer surface, the synchronization shaft moving the flexible door to open and close access to the inner region of the container. Drive the drive member to be
The flat panel display processing system, wherein the movable door is slidably moved around the outer surface of the container.   28. The flat panel display processing system of claim 27, wherein the container has a plurality of support elements configured to support a bottom surface of a substrate.   And a peripheral support member configured to support the peripheral surface of the substrate via the gripping extension, and to change the shape of the substrate into a non-planar shape. 30. The flat panel display processing system of claim 28, configured to translate from a plane configured via a support element.   30. The flat panel display processing system according to claim 29, wherein the non-planar shape is a curved shape, and the peripheral support member is translated in a vertical direction.

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