JP2010282151A - Optical element eccentricity adjustment assembly method and eccentricity adjustment assembly apparatus - Google Patents

Abstract

When a test optical element assembly is formed by coaxially arranging a plurality of optical elements, measurement of the eccentricity of the optical element, adjustment of the eccentricity, and assembly of the optical element are performed in the entire system. As a result, it can be performed with high accuracy and efficiency.
Only the first lens located closest to the measurement light incident side is set (S1). Next, the eccentric amount of the first lens is measured (S2), and the position adjustment amount of the first lens is calculated based on the measured value (S3). Next, the eccentricity of the first lens is adjusted so that the eccentricity approaches 0 (S4), and the eccentricity of the first lens is measured again (S5), and is the threshold value or less? Is determined (S6). If it is larger than the threshold value, the process returns to step 3. If it is equal to or smaller than the threshold value, the first lens is adhered and held inside the lens barrel 61 (S7). Thereafter, it is determined whether or not there is a next lens to be set (S8), and if there is a next lens, the processes of steps 1 to 7 are repeated for that lens.
[Selection] Figure 1

Description

  The present invention measures the decentering amount of the test optical element based on the coordinate data of the index image formed by irradiating the test light of the optical element such as a combined lens with the measurement light, The present invention relates to an optical element eccentricity adjustment assembly method and an eccentricity adjustment assembly apparatus for assembling a test optical element assembly while adjusting.

  Conventionally, in the process of manufacturing a device using a lens, the amount of eccentricity of each lens is measured, and the lens is held in a lens frame (lens barrel) so as to reduce the eccentricity based on the measured value. The method of damaging is known. Among them, as a method for measuring the amount of eccentricity of a lens, a method using a measurement technique called an autocollimation method is known (see Patent Documents 1 to 3 below).

  In these eccentricity measurement methods, the test surface is irradiated with measurement light that projects an index pattern of a predetermined shape while rotating the test optical element about a predetermined axis, and reflected or transmitted from the test surface. An index image formed by light is formed on the imaging surface. This index image is picked up for each rotation position of the test surface, and the coordinates of the image center point are obtained for each rotation position. When the test surface is decentered, each image center point of the index image imaged at each rotational position is distributed along one circle in the coordinate system set for the imaging surface. The amount of eccentricity of the test surface can be obtained from the distribution status.

  Specifically, a circle to be fitted to each image center point (hereinafter referred to as “approximate circle”) is obtained and the center is set as a measurement reference point, and the distance or approximation from this measurement reference point to any image center point is approximated. The radius of the circle can be obtained as the amount of eccentricity of the test surface.

Further, the decentering amount of the lens to be examined is calculated based on the distance between the center points of the circle obtained for the front and back surfaces.
Using such a method, the decentering amount of the test lens is measured, and based on this measurement value, a process for adjusting the position of the test lens so that the decentering amount becomes zero is performed.

JP-A-2005-55202 JP 2007-17431 A JP 2007-327771 A

  By the way, in the above method, the case where the test lens is a single lens has been described. However, in various lens systems, there are also known a combination lens type in which a plurality of lenses are arranged coaxially. ing. However, in these assembled lenses, for each lens, how to proceed with the measurement of the amount of eccentricity of the lens, the adjustment of the eccentricity, and the assembly of the lens, so that it is highly accurate and efficient. No clear method has been established.

  The present invention has been made in view of such circumstances, and in the case where the optical element to be tested is a structure in which a plurality of optical elements are arranged coaxially, the measurement of the eccentricity of the optical element, the eccentricity It is an object of the present invention to provide an optical element eccentricity adjustment assembly method and an eccentricity adjustment assembly apparatus capable of performing the above adjustment and optical element assembly as a whole system with high accuracy and efficiency.

An optical element eccentricity adjustment assembly method according to the present invention includes:
In a test optical element assembly in which a plurality of optical elements are arranged on the same axis in a lens barrel, the decentering amount of each optical element is measured, and the test optical is adjusted while adjusting the decentering amount. An optical element eccentricity adjustment assembly method for assembling an element assembly,
First, among the optical elements that are to constitute the test optical element assembly, only the first optical element that is to be disposed at one end in the arrangement direction is disposed on the coaxial axis, The amount of eccentricity in the first optical element is measured, and the setting position of the first optical element is adjusted based on this measured value so that the amount of eccentricity in the first optical element is reduced. Holding the first optical element on the lens barrel at the position
Subsequently, a second optical element to be disposed adjacent to the first optical element on the side opposite to the incident side of the measurement light is disposed on the coaxial axis, and the second optical element Is measured, and the setting position of the second optical element is adjusted so that the eccentricity amount of the second optical element is reduced based on the measured value. At the adjusted position, Hold the second optical element in the lens barrel,
Thereafter, in the same manner, for the optical element to be arranged adjacent to the side opposite to the measurement light incident side, the eccentricity is sequentially measured and the set position is adjusted and held in the lens barrel. It is characterized by damaging.

  Further, the measurement of the amount of eccentricity is performed by irradiating the surface to be measured with measurement light that projects a predetermined index pattern, and an index image formed on the imaging surface by reflected light or transmitted light from the surface to be measured. While rotating the test surface around a predetermined axis, images are taken at at least three different rotational positions or two rotational positions that are 180 degrees apart from each other, and each index image is imaged at each rotational position. The coordinates of the center point are specified in the coordinate system set for the imaging surface, and the eccentricity of the test surface is measured based on the coordinate data of each specified image center point. It is preferable.

Further, the measurement of the amount of eccentricity of the optical element is performed by specifying a circle that passes through the index image for each predetermined rotation angle for each of the front and back surfaces of the optical element, and the center point of the specified circle Find the coordinates of
After that, it is preferable to calculate the difference between the coordinates of the center point of the circle for each of the front and back surfaces of the optical element, and use the calculated value as the eccentric amount of the optical element.

On the other hand, an eccentricity adjustment assembly device for an optical element according to the present invention includes:
In a test optical element assembly in which a plurality of optical elements are arranged on the same axis in a lens barrel, the decentering amount of each optical element is measured, and the test optical is adjusted while adjusting the decentering amount. An optical element eccentricity adjustment assembly apparatus for assembling an element assembly,
Optical element arrangement means for arranging each optical element that should constitute the test optical element assembly on the same axis sequentially from the incident side of the measurement light;
Eccentricity measuring means for measuring the eccentricity of the optical element arranged using the measuring light every time the optical element is arranged on the coaxial axis,
In accordance with the result of this measurement, setting position adjusting means for adjusting the setting position of the optical element so that the amount of eccentricity in the optical element is small;
Optical element holding means for holding the optical element in the lens barrel at the adjusted position;
It is characterized by comprising.

  Moreover, it is preferable that the said optical element arrangement | positioning means is equipped with the optical element adsorption | suction means which conveys each of the said optical element.

  Further, the optical element arranging means includes a plurality of piezoelectric elements that are arranged around the optical element and press the side surface of the optical element by a minute amount in order to adjust the eccentric amount of the optical element. Is preferred.

  Further, the plurality of piezo elements form a set for co-adjustment with respect to the same optical element, and the amount of eccentricity can be sequentially adjusted for each of the plurality of optical elements. PZT moving means for moving the piezo element to a position corresponding to each of the optical elements, and the PZT moving means moves the piezo element in the arrangement direction of the optical elements. And a PZT horizontal direction moving means for performing an operation of moving the piezoelectric element in and out of the optical element in the radial direction.

  In the optical element eccentricity adjusting and assembling method according to the present invention, the first optical element to be arranged at one end in the optical element arrangement direction among the optical elements to constitute the test optical element assembly. Only the optical element is placed on the same axis, the amount of eccentricity in the first optical element is measured, and the amount of eccentricity in the first optical element is reduced based on the measured value. The set position of the first optical element is adjusted, and at this adjusted position, the first optical element is held in the lens barrel. Subsequently, the measurement light is incident on the first optical element. Arranges the second optical element to be arranged adjacent to the opposite side on the same axis, measures the amount of eccentricity in the second optical element, and based on the measured value, the second optical element Adjust the setting position of the second optical element so that the amount of eccentricity in the element is small. Then, the second optical element is held in the lens barrel at the position, and thereafter, in the same manner, sequentially with respect to the optical elements to be arranged adjacent to the side opposite to the measurement light incident side, The eccentricity is measured and the set position is adjusted and held in the lens barrel.

  Accordingly, each optical element is held in the lens barrel while the eccentric amount is adjusted in order from the incident side of the measurement light. For example, when measuring the eccentric amount in the second optical element, The decentering amount of the first optical element that is already held does not have to be taken into account, and the decentering amount measured at this time can be treated as being caused by the second optical element. Similarly, the optical element whose eccentricity is measured thereafter is the eccentricity of only the optical element without considering the influence of the eccentricity of the optical element that has been adjusted and held so far. be able to.

  Therefore, when the assembly target is a test optical element assembly in which a plurality of optical elements are coaxially arranged, the measurement of the eccentricity of the optical element, the adjustment of the eccentricity, and the assembly of the optical element are performed. Can be performed with high accuracy and efficiency.

  Further, in the optical element eccentricity adjustment assembly apparatus according to the present invention, the optical element disposing means for sequentially disposing each optical element to be included in the optical element assembly to be tested on the coaxial side from the measurement light incident side; Each time the optical element is arranged on the coaxial axis, an eccentricity measuring means for measuring the eccentricity of the optical element arranged using the measuring light, and depending on the result of the measurement A setting position adjusting unit that adjusts a setting position of the optical element so that an eccentricity amount in the optical element is small; an optical element holding unit that holds the optical element in a lens barrel at the adjusted position; It has. Therefore, when the assembly target is a test optical element assembly in which a plurality of optical elements are coaxially arranged, the measurement of the eccentricity of the optical element, the adjustment of the eccentricity, and the assembly of the optical element are performed. Can be performed with high accuracy and efficiency.

It is a flowchart which shows the procedure of the eccentricity adjustment assembly method of the optical element which concerns on one Embodiment of this invention. It is the schematic for demonstrating the eccentric adjustment assembly apparatus used for the eccentric adjustment assembly method shown in FIG. FIG. 2 is a schematic diagram for explaining a technique for performing an eccentricity adjustment operation in the method shown in FIG. 1 ((A) is a two-point adjustment method, and (B) is a three-point adjustment method). It is the schematic (measurement from the downward direction) for demonstrating the principal part of embodiment method shown in FIG. It is the schematic for demonstrating the principal part of embodiment method shown in FIG. 1 (measurement from upper direction). It is a conceptual diagram for demonstrating the PZT moving means of this embodiment apparatus. It is the schematic which shows the eccentric adjustment assembly apparatus which performs the measurement from upper direction.

  Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings. FIG. 2 is a schematic configuration diagram of an apparatus used for an optical element eccentricity adjustment assembly method according to an embodiment of the present invention.

  That is, the decentering adjustment assembly apparatus 1 measures the decentering amount of each test lens of the test lens assembly 5 and adjusts so that the measured decentering amount becomes substantially zero. The measurement head 10, the base 20 that rotatably holds the lens assembly 5, the analysis calculation unit 30 that performs various calculations for calculating the amount of eccentricity, and the measurement head 10 in the vertical direction in the figure. And a Z-axis stage 40 that is movably held.

  The measuring head 10 includes a light source 11 that outputs a light beam irradiated on the lens assembly 5 and a slit (for example, a “reticle” hereinafter) that passes the light beam output from the light source 11. A reticle plate 12 having a beam splitter 13 for reflecting the light beam from the reticle plate 12 upward in the figure, a collimator lens 14 for converting the incident light beam into a parallel light beam, and converging the parallel light beam to a light convergence point F. An objective lens 15 and an imaging camera 17 equipped with an imaging element 16 such as a CCD or CMOS are provided.

On the other hand, the lens assembly 5 has two lenses 51 and 52 held in a lens barrel 53 (in this embodiment, for convenience of explanation, the assembly 5 is made up of two lenses. However, among the lens surfaces 51 a, 51 b, 52 a, 52 b of the lenses 51, 52, the lens 52 can be processed in the same manner. the focal plane of the lower side in the figure of the lens surface 52a of (the focal point of the lens surface 52a (the surface located curvature center) C ₃ paraxial; not shown), than the lens surface 51a in the figure of the lower lens 51 It is comprised so that it may be located below in the figure.

  The base 20 includes a mounting member 21 on which the test lens assembly 5 is mounted, and an XY axis stage 22 and a rotary stage 23 that support the mounting member 21. The XY axis stage 22 is used when the position of the test lens assembly 5 placed on the placement member 21 and the measurement head 10 is adjusted, and the test placed on the placement member 21. The lens assembly 5 is configured to be movable in a direction perpendicular to the optical axis L of the lens assembly 5 to be tested. The rotation stage 23 is configured to rotate the lens assembly 5 placed on the placement member 21 around the rotation axis E shown in the figure. In addition, a through hole is formed in each central portion of the XY axis stage 22 and the rotary stage 23 following the mounting member 21, and the light flux between the measuring head 10 and the test lenses 51 and 52 is transmitted through the through hole. Can enter and exit.

  The analysis calculation unit 30 includes an analysis device 31 configured by a computer or the like for analyzing each image captured at the time of measurement, an image display device 32 for displaying an analysis result, each image, and the like, and an analysis device. And an input device 33 for performing various inputs to 31.

  Further, the test lenses 51 and 52 constituting the test lens assembly 5 are sequentially arranged on the same axis in the lens barrel 53, and the transport and installation of the test lenses 51 and 52 are automatically performed. It is preferred to be configured to be performed by an apparatus. In such a case, it is preferable that the automatic apparatus includes a lens suction unit that can vacuum-suck the lens surface with, for example, a flexible suction cup. In addition, it is preferable to include moving arm means for holding and moving the lens suction means.

  Further, the lens assembly 5 is adjusted so that the measured eccentricity approaches 0 (desirably 0) by the eccentricity adjusting means shown in FIGS. 3 (A) and 3 (B). ), Eccentricity adjustment is performed.

  That is, FIG. 3A shows a mode for carrying out a two-point adjustment method in which eccentricity adjustment is performed using two PZTs, and each lens 51 and 52 is held in a predetermined position. A cylindrical adjustment jig 65 having flexibility is disposed along the outer peripheral surface of the lens barrel 61. Corresponding to each lens arrangement position of the lens barrel 61, a hole 66 is provided through the wall at every 90 degrees in the circumferential direction, and the adjustment jig 65 is fitted with these holes 66. And the convex part 67 contact | abutted to the lenses 51 and 52 is provided. In addition, PZT62A and B which have pressing front-end | tip part 62Aa and Ba are provided so that the adjacent 2 convex part 67 can be pressed among these convex parts 67. FIG.

  FIG. 3B shows a mode for carrying out a three-point adjustment method in which eccentricity adjustment is performed using three PZTs. Lenses formed by holding the lenses 51 and 52 at predetermined positions. A hole 66A that penetrates the wall portion is provided every 120 degrees in the circumferential direction of the lens barrel 61A, and presses of the PZTs 62C, D, and E that engage with each of the hole portions 66A and contact the side surface of the lens 51. Tip portions 62Ca, Da, and Ea are provided.

  3A and 3B, the PZT 62A, B, C, D, and E are provided for each of the test lenses 51 and 52 constituting the test lens assembly 5. PZT 62A, B, C, D, E may be provided for each of the test lenses 51, 52, and PZT vertical movement means for moving the PZT 62A in the lens arrangement direction is provided. You may do it. Further, the movement, drive, and the like of these PZTs 62A, B, C, D, and E may be controlled according to a program stored in a control unit provided in the analysis apparatus 31. Further, as described above, when the PZT vertical movement means for moving the PZT 62A, B, C, D, E in the lens arrangement direction is provided, the PZT 62A, B, C, D, E are temporarily moved in the lens radial direction. Since it is necessary to perform the operation to move in and out by the PZT horizontal movement means, such control related to the operation of putting in and out PZT 62A, B, C, D and E is also performed in the control unit provided in the analyzer 31. It is preferable that the configuration is performed in accordance with a stored program.

  The optical element eccentricity adjustment assembly method according to the present embodiment will be described below with reference to the flowchart of FIG.

  In this optical element eccentricity adjustment assembly method, first, only the first lens located closest to the measurement light incident side is set (S1).

  Next, the eccentricity of the first lens is measured using the eccentricity adjustment assembly apparatus 1 shown in FIG. 2 (S2).

  Next, based on the amount of eccentricity measured in step 2 (S2), the position adjustment amount of the first lens is calculated using equations (A) and (B) described later (S3).

  Next, the eccentricity of the first lens is adjusted using the eccentricity adjusting means shown in FIGS. 3A and 3B so that the amount of eccentricity approaches 0 (S4).

  Next, the eccentric amount of the first lens is measured again in the same manner as the measurement of the eccentric amount in step 2 (S2) (S5).

  Next, it is determined whether or not the eccentricity measured in step 5 (S5) is equal to or less than a predetermined threshold value, that is, for example, a value that is small enough to be ignored (see FIG. 5). S6).

  Next, as a result of the determination in step 6 (S6), if it is determined that the value is equal to or smaller than the predetermined threshold value, the process proceeds to step 7 (S7). If it is determined that the value is larger than the predetermined threshold value, step 3 (S3). Returning to step S3, the position adjustment amount of the first lens is calculated based on the measured eccentricity amount (S3) in the same manner as the calculation of the position adjustment amount in step 3 (S3).

  On the other hand, as a result of the determination in the above step 6 (S6), it is determined that the threshold value is equal to or less than the predetermined threshold value, and when proceeding to step 7 (S7), in step 7 (S7), as shown in FIG. The lens 1 is adhered and held inside the lens barrel 61 with its position adjusted.

  Thereafter, it is determined whether or not there is a next lens to be set. If the result of this determination is that there is no next lens, this routine is terminated. On the other hand, if there is still a next lens, steps 1 to 7 for that lens are performed. The processing of (S1-7) is performed.

  As a result, with respect to all the lenses constituting the lens assembly 5 to be examined, the eccentricity adjustment and the adhesion holding in the lens barrel 61 are sequentially performed, and the assembly is completed.

Hereinafter, the adjustment procedure of each of the lenses 51A, B, and C will be described with reference to FIG.
In this example, the test lens assembly 5 is constituted by three lenses.

  As shown in the conceptual diagram of FIG. 4, the measurement light from the objective lens 15 of the measurement head 10 disposed below proceeds in the order in which the lens 51A, the lens 51B, and the lens 51C are arranged.

In the method of the present embodiment, a series of steps of measuring the eccentric amounts of the lenses 51A, B, and C, adjusting the eccentricity, and maintaining the adhesion of the lenses 51A, B, and C in the lens barrel 61 in the order in which the measurement light enters. Processing is performed (in FIG. 4, the order of (A), (B), (C)). Note that the process switching between the lenses is performed by driving the Z-axis stage 40 in the vertical direction in the drawing to adjust the position to the measurement reference of each lens. That is, for example, this is done by matching the focal position F of the objective lens 15 with the focal position (for example, C ₃ ) of the lens surface to be measured.

  When the lenses are assembled in this order, the eccentricity of the lens 51B is measured after the eccentricity adjustment of the lens 51A is performed. Therefore, the eccentricity measured at this time includes the eccentricity of the lens 51A. The amount is not substantially included, and it is only necessary to adjust the eccentricity of the lens 51B based on this measured value. Next, the amount of eccentricity of the lens 51C is measured, but the amount of eccentricity measured at this time does not substantially include the amount of eccentricity of the lens 51A or the lens 51B. It is only necessary to adjust the eccentricity of the lens 51C based on the measurement value. In this way, when the measuring head 10 is arranged below, it is not necessary to provide the spacing ring 63 for maintaining the spacing as shown in FIG.

  Further, contrary to the above, in the order opposite to the order in which the measurement light is incident, the eccentricity measurement of the lenses 51A, B, and C, the eccentricity adjustment, and the lens barrel 61 of the lenses 51A, B, and C are included. In this case, even if the lens is once adjusted in eccentricity, it will be measured to have eccentricity when measuring the eccentricity of the next lens. It is not preferable because the eccentricity adjustment and lens assembly of each lens constituting the lens are extremely complicated.

  In addition, it is preferable to use an ultraviolet curable adhesive or the like for bonding and holding the lenses 51A, B, and C in the lens barrel 61A. In this case, an ultraviolet light source is disposed in the vicinity of the lens barrel 61. It is preferable to control so that the light source is driven only at a timing that requires adhesive fixation. The control in this case is also preferably configured to be performed according to a program stored in a control unit provided in the analysis device 31.

  According to the method of the present embodiment, the order of the lenses in which a series of processes of measuring the amount of eccentricity of the lens, adjusting the eccentricity, and maintaining the adhesion of the lens is performed from the incident side of the measurement light. Thus, it is possible to adjust the eccentricity of the lens to be tested and to maintain the adhesion.

  Note that the method of the present invention is not limited to the case where the measurement head 10 is arranged downward as shown in FIG. 4. For example, the measurement head 10 is arranged upward as shown in FIG. This can also be performed using measurement light emitted from the objective lens 15, and substantially the same operational effects can be achieved. In this case, it is important to arrange a well-known spacing ring for spacing between the lenses 51A, B, C.

  In the above case, in the order in which the measurement light enters, that is, the lens 51A, the lens 51B, and the lens 51C, the eccentricity measurement, the eccentricity adjustment, and the mirror of the lens 51 are sequentially performed from the upper side in the figure. Each process of adhesion holding in the cylinder 61 is performed (in order of (A), (B), and (C) in FIG. 5).

  Further, as shown in FIG. 6, the apparatus according to the present embodiment has PZT vertical movement means 41B and PZT 62A, B, C, D for moving PZT 62A, B, C, D, E in the lens arrangement direction as PZT movement means. , And a PZT horizontal direction moving means 41A for performing an operation for moving E in and out of the lens in the radial direction. FIG. 6 is a schematic diagram for explaining specific operation modes of these means. In practice, PZT 62C, D, and E are applied to the lenses 51A, B, and C from three directions around the lenses 51A, B, and C as shown in FIG. 3B. For convenience of explanation, FIG. 6 will be described mainly focusing on the operation of PZT62C.

  That is, as shown in FIG. 6A, the pressing tip portion (head) 62Ca of the PZT 62C facing the side surface of the lens 51A located at the lowermost stage of the lens barrel 61A is inserted into the hole 66A of the lens barrel 61A. The pressing position adjusting operation of the pressing tip 62Ca with respect to the lens 51A is a program stored in the control unit provided in the analysis apparatus 31 described above so that the lens 51A is accurately set to a normal position. Accordingly, the pressing tip 62Ca is operated by a minute amount. In addition, since the same operation as that of the pressing tip portion 62Ca is performed on the pressing tip portions (heads) 62Da and Ea of the PZTs 62D and E (see FIG. 3B), the pressing tip portions 62Ca and 62Da are eventually obtained. , Ea is used to adjust the position of the lens 51A from the three directions around it.

  When the operation for adjusting the pressing position of the lens 51A is thus completed, the same operation for adjusting the pressing position on the lens 51B and the lens 51C is successively performed. FIG. 6B shows a state when the pressing position adjustment operation of the lens 51B is performed. This pressing position adjustment operation itself is performed in the same manner as the pressing position adjustment operation of the lens 51A. In the movement operation of the PZT 62C from the state of (A) to the state of FIG. 6 (B), the PZT 62C is moved upward (Z direction in the drawing) without moving in the horizontal direction (for example, the X direction). Therefore, PZT horizontal direction moving means 41A for moving the PZT 62C in the horizontal direction is provided. That is, from the state shown in FIG. 6A, the PZT horizontal movement means 41A moves the PZT 62C in the horizontal direction (left direction in the figure), so that the pressing tip 62Ca of the PZT 62C becomes the hole of the lens barrel 61A. 66A is removed. In this state, the PZT vertical movement means 41B moves the PZT 62C upward (Z direction) by a predetermined distance, so that the pressing tip 62Ca of the PZT 62C faces the hole 66A corresponding to the lens 51B. Move to the position you want. Subsequently, when the PZT horizontal moving means 41A moves the PZT 62C in a direction approaching the lens 51B, the pressing tip 62Ca of the PZT 62C is inserted into the hole 66A corresponding to the lens 51B, and the state shown in FIG. 6B. Will be set to.

  As described above, in the apparatus according to the present embodiment, the PZT horizontal direction moving means 41A that performs an operation of moving the PZT 62C, D, and E in and out of the lens radial direction, and the PZT vertical direction that moves the PZT 62C, D, and E in the lens arrangement direction. Since the moving means 41B is provided, the adjustment of a plurality of lenses can be performed easily and smoothly by one lens position adjusting means.

  After this, the PZT 62C is moved to the position where the position of the lens 51C is adjusted. In this case, the moving operation of the lens position adjusting means can be performed in the same manner as the above operation. Also in the embodiment shown in FIG. 3A, each PZT 62A, B (each pressing tip 62Aa, Ba) is moved similarly by the PZT horizontal direction moving means 41A and the PZT vertical direction moving means 41B. Move operation can be performed. Further, as in the embodiment shown in FIG. 3A, when a convex portion 67 that abuts on each of the lenses 51A, B, and C is provided, or a part of the pressing tip portions 62Ca, Da, and Ea described above. When the rod-shaped head member corresponding to the above is already inserted into the hole 66 corresponding to each of the lenses 51A, 51B, and 51C, the convex portion 67 and the outer end of the rod-shaped head member. In this case, the PZT horizontal direction moving means 41A is not necessarily required, and PZTA, B, C, D, and PZT62A, B, C, D, and E may be used. Depending on the stroke of E, the PZT moving means can be constituted only by the PZT vertical direction moving means 41B.

  In the embodiment shown in FIG. 6, the lens adjustment is sequentially performed from the lower lens. However, it is of course possible to perform the lens adjustment sequentially from the upper lens.

  FIG. 7 shows an eccentricity adjustment assembly apparatus 201 provided with a measurement head 210 that emits measurement light from above as shown in FIG. In addition, the member corresponding to the member shown in FIG. 2 shall be represented by the code | symbol which added 200 to the code | symbol shown in FIG. 2, and detailed description about these individual members is abbreviate | omitted.

  Here, the measurement of the eccentricity of each lens performed using the apparatus 1 shown in FIG.

  In the following, description will be given by taking as an example a case where the lens surface 52a of the lens surfaces 51a, 51b, 52a, 52b of the test lens assembly 5 is used as a test surface and the amount of eccentricity is measured. In this case, as a measurement preparation, the height adjustment of the measurement head 10 is performed using the Z-axis stage 40 so that the light convergence point F of the measurement head 10 is located on the focal plane of the lens surface 52a. The position of the test lens assembly 5 after completion of this adjustment is taken as the initial position.

  <1> First, the number N of measurement points (N is an arbitrary integer of 3 or more, for example, N = 18) is set.

  <2> Next, a measurement light beam for projecting a predetermined index pattern (cross-shaped pattern using a reticle) is irradiated from the measurement head 10 to the lens assembly 5 to be imaged, and after the imaging, Using the rotation stage 23, the lens assembly 5 (lens surface 52a) is rotated around the rotation axis E by 360 / N degrees (when N = 18, 20 degrees).

  <3> Next, the coordinates of the image center point of the imaged index image are obtained in a coordinate system set on the imaging surface of the image sensor 16 (an orthogonal coordinate system or a polar coordinate system can be set as appropriate). The method for obtaining the coordinates of the image center point (the method for specifying the coordinates of the center point of the crosshairs) may be the same as that described in Patent Document 3, for example.

  <4> It is determined whether or not the test surface (lens surface 52a) has rotated a total of 360 degrees around the rotation axis E from the initial position. If it is determined as NO, the above procedures <1> to <3> are performed. Is repeated to obtain the coordinates of the image center point of the index image captured at each rotational position. Note that image processing and calculation processing necessary for obtaining the coordinates of each image center point are performed in the analysis device 31, and the obtained coordinates of each image center point are sequentially stored in the storage unit of the analysis device 31.

  After that, an approximate circle to be fitted to each image center point is obtained, the center is set as a measurement reference point, and the distance from this measurement reference point to an arbitrary image center point and the radius of the approximate circle are determined based on the deviation of the test surface. Calculate as the core amount. Note that the arithmetic processing in this case is also performed in the analysis device 31.

  Next, supplementary explanation will be given for each calculation method in the case of adjusting the eccentricity with reference to FIGS. 3 (A) and 3 (B) described above.

  That is, as shown in FIG. 3 (A), the eccentricity in the X direction and the Y direction can be adjusted with an adjusting jig using two PZTs (piezo elements). The quantity is calculated using a mathematical formula.

That is, assuming that the eccentricity measurement value is (e _x , e _y ), the eccentricity adjustment amounts L _P1 and L _P2 of the two PZTs 62A and B installed at an angle of 90 degrees are, for example, the following formula (A) (P1 represents a direction matching the Y direction, and P2 represents a direction matching the X direction).

  In addition, as shown in FIG. 3B, the eccentricity in the X direction and the Y direction can be adjusted using three PZTs. In this case, the eccentricity adjustment amount is also calculated using a mathematical expression. .

That is, assuming that the eccentricity measurement value is (e _x , e _y ), the eccentricity adjustment amounts L _P1 , L _P2 , and L _P3 of the three PZTs 62A, B, and C installed at an angle of 120 degrees are, for example, (P1 represents a direction coinciding with the Y direction, P2 represents a direction rotated 120 degrees counterclockwise from the Y direction, and P3 rotates 240 degrees counterclockwise from the Y direction. Direction).

As mentioned above, although embodiment of the eccentricity adjustment assembly method of the optical element of this invention was described, this invention is not limited to the thing of the said embodiment, The thing of a various aspect is made into embodiment. Is possible. For example, in the above embodiment, the index image formed on the imaging surface by the reflected light from the test surface is rotated at least three different rotational positions while rotating the test surface around a predetermined axis. The image is taken at each rotation position (for example, every 120 degrees apart), and the measurement reference point (the center point of the approximate circle created by each image center point) is based on the coordinates of the image center point of each index image imaged at each rotation position. However, in the method of the present invention, instead of this, an index image formed on the imaging surface by the reflected light from the test surface is captured at every two rotational positions 180 degrees apart from each other. Then, the measurement reference point may be obtained by obtaining the average of the coordinates of the image center point of each captured index image.
Further, four or more piezoelectric elements for adjusting one lens may be provided.

  Moreover, as the above-described mounting member 21, a cylindrical member that supports the lens assembly 5 to be tested may be used at the edge portion of the upper end surface thereof. However, as shown in FIG. A chuck mechanism including a block and a rotating disk may be used.

  In the above-described embodiment, the test lens is used as the test optical element. However, with respect to an assembly of various optical elements (for example, filters, prisms, and the like) in which a plurality of optical elements are arranged on the same axis. It is applicable.

  In the above embodiment, a cross-shaped reticle is used for projecting the index pattern. Instead, another shape such as a pinhole is used for projecting the index pattern. Is also possible.

  The apparatus for measuring the amount of eccentricity used in the above embodiment is of a light reflection type for observing an index image formed by reflected light from the test surface, but is transmitted by light transmitted from the test surface. The present invention can also be applied to the case where the eccentricity is measured using a light transmission type that observes the formed index image.

1, 201 Eccentricity adjustment assembly device 5, 5A, 5B, 205 Test lens assembly 10, 210 Measuring head 11, 211 Light source 12, 212 Reticle plate 13, 213 Beam splitter 14, 214 Collimator lens 15, 215 Objective lens 16 216 Imaging element 17, 217 Imaging camera 20, 220 Base 21, 221 Mounting member 22, 222 XY axis stage 23, 223 Rotating stage 30, 230 Analysis operation unit 31, 231 Analyzing device 32, 232 Image display device 33, 233 Input device 40, 240 Z-axis stage 41, 241 Support part 41A Horizontal direction moving means 41B Vertical direction moving means 42, 242 Guide part 43, 243 Movable parts 51, 51A-C, 52, 251, 252 Lens 51a, 51b, 52a, 52b, 251a, 251b 252a, 252b
Lens surface 53, 61A, 61B, 253 Lens barrel (lens frame)
62A-E PZT (piezo element)
62Aa to Ea Pressing tip 63 Spacing ring F Light convergence point Z, L Optical axis E Rotating axis

Claims (7)

In a test optical element assembly in which a plurality of optical elements are arranged on the same axis in a lens barrel, the decentering amount of each optical element is measured, and the test optical is adjusted while adjusting the decentering amount. An optical element eccentricity adjustment assembly method for assembling an element assembly,
First, among the optical elements that should constitute the test optical element assembly, only the first optical element that should be arranged at one end in the arrangement direction is arranged on the coaxial axis, The amount of eccentricity in the first optical element is measured, and the setting position of the first optical element is adjusted based on this measured value so that the amount of eccentricity in the first optical element is reduced. Holding the first optical element on the lens barrel at the position
Subsequently, a second optical element to be disposed adjacent to the first optical element on the side opposite to the incident side of the measurement light is disposed on the coaxial axis, and the second optical element Is measured, and the setting position of the second optical element is adjusted so that the eccentricity amount in the second optical element is reduced based on the measured value. Hold the second optical element in the lens barrel,
Thereafter, in the same manner, for the optical element to be arranged adjacent to the side opposite to the measurement light incident side, the eccentricity is sequentially measured and the set position is adjusted and held in the lens barrel. A decentering adjustment assembly method for an optical element, characterized by comprising:   The amount of eccentricity is measured by irradiating the surface to be measured with measurement light that projects a predetermined index pattern, and generating an index image formed on the imaging surface by reflected or transmitted light from the surface to be measured. While rotating the inspection surface around a predetermined axis, images are taken at each of at least three different rotational positions or two rotational positions that are 180 degrees apart from each other, and the image center point of each index image captured at each rotational position Is determined in the coordinate system set for the imaging surface, and the eccentricity of the test surface is measured based on the coordinate data of each specified image center point. The method for assembling and decentering an optical element according to claim 1. The measurement of the eccentricity of the optical element is performed by specifying a circle passing through the image of the index for each predetermined rotation angle for each of the front and back surfaces of the optical element, and the coordinates of the specified center point of the circle Seeking
Thereafter, the difference between the obtained coordinates of the center point of the circle for each of the front and back surfaces of the optical element is calculated, and the calculated value is used as the eccentric amount of the optical element. The method of assembling and decentering an optical element according to claim 1 or 2. In a test optical element assembly in which a plurality of optical elements are arranged on the same axis in a lens barrel, the decentering amount of each optical element is measured, and the test optical is adjusted while adjusting the decentering amount. An optical element eccentricity adjustment assembly apparatus for assembling an element assembly,
Optical element arrangement means for arranging each optical element that should constitute the test optical element assembly on the same axis sequentially from the incident side of the measurement light;
Eccentricity measuring means for measuring the eccentricity of the optical element arranged using the measuring light every time the optical element is arranged on the coaxial axis,
In accordance with the result of this measurement, setting position adjusting means for adjusting the setting position of the optical element so that the amount of eccentricity in the optical element is small;
Optical element holding means for holding the optical element in the lens barrel at the adjusted position;
An optical element eccentricity adjusting and assembling apparatus comprising:   5. The optical element eccentricity adjusting / assembling apparatus according to claim 4, wherein the optical element arranging means includes optical element suction means for conveying each of the optical elements.   The optical element arranging means includes a plurality of piezo elements arranged around the optical element and pressing a side surface of the optical element by a minute amount in order to adjust an eccentric amount of the optical element. An optical element eccentricity adjustment assembly apparatus according to claim 4 or 5. The plurality of piezo elements form a set that adjusts in cooperation with the same optical element,
PZT moving means for moving the piezo element to a position corresponding to each of the optical elements so that the amount of eccentricity can be sequentially adjusted for each of the plurality of optical elements,
The PZT moving means includes PZT vertical direction moving means for moving the piezo elements in the arrangement direction of the optical elements, and PZT horizontal direction moving means for performing operations for moving the piezo elements in and out of the radial directions of the optical elements. The decentering / assembling apparatus for an optical element according to claim 6.

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