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JP2010269210A - Cyclone dust collector - Google Patents

Cyclone dust collector Download PDF

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JP2010269210A
JP2010269210A JP2009120726A JP2009120726A JP2010269210A JP 2010269210 A JP2010269210 A JP 2010269210A JP 2009120726 A JP2009120726 A JP 2009120726A JP 2009120726 A JP2009120726 A JP 2009120726A JP 2010269210 A JP2010269210 A JP 2010269210A
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cyclone
gas
particles
filter element
dust collector
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Hideo Nagamitsu
秀夫 長光
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TOSEI KK
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TOSEI KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a cyclone dust collector capable of retaining high dust removal performance for a long time even when a gas contains particles of substances of low specific gravities. <P>SOLUTION: A filter portion 3 capturing particles in a gas is arranged in the upper part of a cyclone portion 2 carrying out centrifugal separation of the particles in the gas, and a distributor 4 is arranged in the gas passage between the cyclone portion 2 and the filter portion 3. The particles contained in the gas are removed in three stages of centrifugal separation in the cyclone portion 2, falling under the resistance of the distributor 4 and filtration in the filter portion 3. Clogging of the filter portion 3 is thus controlled because relatively coarse particles are removed in the cyclone portion 2 and the distributor 4 in advance, and fine particles unremovable by the cyclone portion 2 and the distributor 4 can be captured by the filter portion 3. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

本発明は、粒子を含むガスから粒子を遠心分離するサイクロン集塵装置に関し、例えば、真空ポンプ,排気ブロワ,コンプレッサ等の吸排気システムにおいて、吸気前にガスに含まれる粒子(コンタミネーション)を捕捉して、清浄ガスを前記吸排気システムに吸気させるサイクロン集塵装置に関する。   The present invention relates to a cyclone dust collector that centrifuges particles from a gas containing particles. For example, in an intake / exhaust system such as a vacuum pump, an exhaust blower, and a compressor, particles (contamination) contained in the gas are captured before intake. Then, the present invention relates to a cyclone dust collecting apparatus that draws clean gas into the intake / exhaust system.

特許文献1には、ガスの導入口が形成される筒状部、及び、該筒状部に連設され下方に向かって縮径する円錐状部とからなる外筒と、除塵後の清浄ガスを排出する内筒とからなるサイクロン集塵装置が開示されている。   Patent Document 1 discloses an outer cylinder composed of a cylindrical part in which a gas inlet is formed, a conical part continuously connected to the cylindrical part and having a diameter reduced downward, and clean gas after dust removal. The cyclone dust collector which consists of an inner cylinder which discharges is disclosed.

前記サイクロン集塵装置においては、前記導入口から導入されたガスが下降旋回流となり、その遠心力によってガス中の粒子が前記外筒の内壁側に分離して落下し、外筒の下端から回収される。そして、除塵後の清浄ガスは、円錐状部の途中から方向を反転して上昇流となり、前記内筒を通って後段の装置(例えば、真空ポンプなど)に供給される。   In the cyclone dust collector, the gas introduced from the introduction port becomes a downward swirling flow, and particles in the gas are separated and dropped to the inner wall side of the outer cylinder by the centrifugal force, and recovered from the lower end of the outer cylinder Is done. Then, the clean gas after dust removal reverses the direction from the middle of the conical portion to form an upward flow, and is supplied to a subsequent apparatus (for example, a vacuum pump) through the inner cylinder.

特開平10−000384号公報JP-A-10-000384

ところで、例えばアルミナ、シリコン、黒鉛などの比重の軽い物質の粒子を含むガスを、前記サイクロン集塵装置で除塵させる場合、粗い粒子は分離回収することが可能であるが、微粒子は分離回収することができない。このため、微粒子が、真空ポンプなどの後段装置に吸い込まれ、故障要因になってしまうという問題が生じる。   By the way, for example, when a gas containing particles of a substance having a low specific gravity such as alumina, silicon, graphite, etc. is removed by the cyclone dust collector, coarse particles can be separated and collected, but fine particles should be separated and collected. I can't. For this reason, there arises a problem that the fine particles are sucked into a subsequent apparatus such as a vacuum pump and become a cause of failure.

一方、フィルタを用いれば、比重の軽い物質の微粒子であっても取り除くことが可能であるが、フィルタを用いる場合、微粒子の他、粗い粒子もフィルタで捕捉させることになるため、直ぐに目詰まりが発生してしまい、後段装置を長時間に渡って運転させることができないという問題が生じる。   On the other hand, if a filter is used, it is possible to remove even fine particles of a substance having a low specific gravity. However, if a filter is used, coarse particles as well as fine particles are trapped by the filter, so clogging occurs immediately. It occurs, and there arises a problem that the latter apparatus cannot be operated for a long time.

本発明は上記問題点に着目してなされたものであり、ガスが比重の軽い物質の粒子を含む場合であっても、高い除塵性能を長時間に渡って維持することが可能なサイクロン集塵装置を提供することを目的とする。   The present invention has been made paying attention to the above problems, and even when the gas contains particles of a substance having a low specific gravity, cyclone dust collection capable of maintaining high dust removal performance for a long time. An object is to provide an apparatus.

このため、本願発明に係るサイクロン集塵装置は、外部から粒子を含むガスを吸引し、前記粒子を遠心分離するサイクロン部と、前記サイクロン部の上部に設けられ、前記サイクロン部で前記粒子が分離されたガスをろ過して外部に排出するフィルタ部と、前記サイクロン部と前記フィルタ部との間のガス通路に設けられ、前記サイクロン部から排出されたガスを整流して、前記フィルタ部に導入させる整流板と、を含んで構成される。   For this reason, the cyclone dust collector according to the present invention is provided with a cyclone part that sucks a gas containing particles from the outside and centrifuges the particles, and an upper part of the cyclone part, and the particles are separated by the cyclone part. A filter unit that filters the discharged gas and discharges it to the outside, and is provided in a gas passage between the cyclone unit and the filter unit, rectifies the gas discharged from the cyclone unit, and introduces it into the filter unit And a rectifying plate to be configured.

上記構成では、サイクロン部で粒子が遠心分離された後のガスが、抵抗となる整流板を通過してフィルタ部に導入され、フィルタ部でのろ過を経て、外部へ排出される。   In the above configuration, the gas after the particles are centrifuged in the cyclone section passes through the rectifying plate serving as a resistance, is introduced into the filter section, and is exhausted through the filter section.

ここで、前記整流板を、前記ガス通路の径方向に沿って複数並べる構成とするとよい。上記構成では、前記ガス通路の横断面において、複数の整流板がフィルタ部に向かうガスの抵抗となり、サイクロン部で分離されなかった粒子の一部を落下させる。   Here, it is preferable that a plurality of the rectifying plates are arranged along the radial direction of the gas passage. In the configuration described above, in the cross section of the gas passage, the plurality of rectifying plates serve as gas resistance toward the filter unit, and some of the particles that are not separated by the cyclone unit are dropped.

また、前記フィルタ部が、上部から排気側配管が導出される筒状のケースと、前記筒状のケース内に前記サイクロン部と略同軸に設置される筒状のフィルタエレメントとを含み、前記筒状のフィルタエレメントの中空部の下端を閉塞させる一方、前記中空部の上端開口部を前記排気側配管に接続させ、前記筒状のフィルタエレメントの外周と前記ケースの内周とで形成される環状空間に、前記サイクロン部から排出されたガスを、前記整流板を介して導入し、前記ガスを前記筒状のフィルタエレメントの外周から中空部内に通過させて、前記排気側配管によって外部へ排出させる構成とするとよい。   In addition, the filter portion includes a cylindrical case from which an exhaust side pipe is led out from above, and a cylindrical filter element that is installed substantially coaxially with the cyclone portion in the cylindrical case, An annular formed by the outer periphery of the cylindrical filter element and the inner periphery of the case, the lower end of the hollow part of the filter element being closed, while the upper end opening of the hollow part is connected to the exhaust pipe. The gas discharged from the cyclone portion is introduced into the space through the rectifying plate, and the gas is allowed to pass from the outer periphery of the cylindrical filter element into the hollow portion and is discharged to the outside through the exhaust side pipe. It may be configured.

上記構成では、サイクロン部から排出されたガスは、整流板を通って、筒状のフィルタエレメントの外周とケースの内周とで形成される環状空間内に導入された後、フィルタエレメントの外周から中空部内に通過してろ過され、前記中空部から外部に排出される。   In the above configuration, the gas discharged from the cyclone portion passes through the current plate and is introduced into an annular space formed by the outer periphery of the cylindrical filter element and the inner periphery of the case, and then from the outer periphery of the filter element. It passes through the hollow part, is filtered, and is discharged from the hollow part to the outside.

ここで、前記筒状のフィルタエレメントの外周面を、凹凸を繰り返す波型に形成するとよい。   Here, the outer peripheral surface of the cylindrical filter element may be formed into a corrugated shape that repeats unevenness.

また、前記筒状のフィルタエレメントの空隙率を、内側から外側に向けて大きくするとよい。   The porosity of the cylindrical filter element may be increased from the inside toward the outside.

上記発明によると、ガスに含まれる粒子が、サイクロン部での遠心分離、粒子を含むガスの流れに対して整流板が抵抗になることによる粒子の落下、更に、フィルタ部におけるろ過の3段階で取り除かれる。   According to the above invention, the particles contained in the gas are separated in three stages: centrifugal separation in the cyclone section, drop of the particles due to the resistance of the rectifying plate to the flow of the gas containing the particles, and filtration in the filter section. Removed.

このため、ろ過のみを行わせる場合に比べて、フィルタ部で捕捉される粒子量が少なくなって、フィルタ部の目詰まりが抑制されるので、長時間に渡って除塵を行うことが可能であり、また、サイクロン部で除塵されなかった粒子を、フィルタ部で捕捉させるので、たとえ比重の小さい物質の微粒子であっても除塵が可能で、高い除塵性能を発揮させることができる。   For this reason, compared with the case where only filtration is performed, the amount of particles captured by the filter unit is reduced, and clogging of the filter unit is suppressed, so that it is possible to perform dust removal for a long time. In addition, since the particles that have not been removed by the cyclone are captured by the filter, dust can be removed even if the particles have a low specific gravity, and high dust removal performance can be achieved.

本発明に係るサイクロン集塵装置の実施形態を示す断面斜視図である。It is a cross-sectional perspective view which shows embodiment of the cyclone dust collector which concerns on this invention. 本発明に係るサイクロン集塵装置の実施形態を示す正面図及び部分拡大斜視図である。It is the front view and partial expansion perspective view which show embodiment of the cyclone dust collector which concerns on this invention.

以下に、本発明の実施の形態を図面に基づいて説明する。図1,図2は、本発明に係るサイクロン集塵装置の実施形態を示す。   Embodiments of the present invention will be described below with reference to the drawings. 1 and 2 show an embodiment of a cyclone dust collecting apparatus according to the present invention.

図1,図2に示すサイクロン集塵装置1は、サイクロン部2と、該サイクロン部2の上側に設けられるフィルタ部3と、前記サイクロン部2とフィルタ部3とを連通させるガス通路に介装される整流板4とを含んで構成される。   A cyclone dust collecting apparatus 1 shown in FIGS. 1 and 2 is provided with a cyclone unit 2, a filter unit 3 provided on the upper side of the cyclone unit 2, and a gas passage that allows the cyclone unit 2 and the filter unit 3 to communicate with each other. And the current plate 4 to be configured.

前記サイクロン部2は、含塵ガスを下降旋回流として粒子(コンタミネーション)と清浄ガスとに遠心分離する外筒20と、該外筒20の途中で発生する上昇流により清浄ガスを排出させる内筒21とによって構成される。   The cyclone unit 2 includes an outer cylinder 20 that centrifuges dust-containing gas into a downward swirling flow into particles (contamination) and clean gas, and exhausts clean gas by an upward flow generated in the middle of the outer cylinder 20. The cylinder 21 is comprised.

更に、前記外筒20は、筒状部22と、該筒状部22に連設され下方に向かって縮径する円錐状部23とで構成され、前記筒状部22の周壁には、前記筒状部22の接線方向と略平行に設けられた吸気側配管24が接続され、前記円錐状部23には、遠心分離されて落下した粒子を外部に排出させるための粒子排出口(ドレン)25が形成されている。
なお、粒子排出口(ドレン)25の下部にはバルブ25aが装着されている(図1にのみ図示)。このバルブ25aは、集塵操作中は閉成されている。
Further, the outer cylinder 20 includes a cylindrical portion 22 and a conical portion 23 continuously connected to the cylindrical portion 22 and having a diameter reduced downward. An intake side pipe 24 provided substantially parallel to the tangential direction of the cylindrical part 22 is connected, and the conical part 23 has a particle outlet (drain) for discharging particles that have been centrifuged and dropped to the outside. 25 is formed.
A valve 25a is attached to the lower part of the particle discharge port (drain) 25 (shown only in FIG. 1). The valve 25a is closed during the dust collection operation.

また、前記内筒21は、下方に向かって縮径する円錐状に形成され、上端部21aを、前記筒状部22の上端内周22aに固定することで、内筒21は、外筒20(筒状部22)と同軸に筒状部22内に設置され、内筒21の下端開口部21bは、前記筒状部22で囲まれる空間内に開口する。   The inner cylinder 21 is formed in a conical shape with a diameter decreasing downward, and the upper end 21 a is fixed to the inner periphery 22 a of the upper end of the cylindrical part 22. It is installed in the cylindrical part 22 coaxially with the (cylindrical part 22), and the lower end opening part 21b of the inner cylinder 21 opens into a space surrounded by the cylindrical part 22.

前記外筒20の外側には、前記粒子排出口25を設置面から離間させてサイクロン集塵装置1を設置するための脚部26が固定される。前記筒状部22の上端側外周には、前記フィルタ部3を搭載して固定するためのフランジ22bが形成されている。   A leg portion 26 for installing the cyclone dust collecting apparatus 1 with the particle discharge port 25 spaced apart from the installation surface is fixed to the outside of the outer cylinder 20. A flange 22b for mounting and fixing the filter portion 3 is formed on the outer periphery on the upper end side of the cylindrical portion 22.

前記フィルタ部3は、筒状のケース30と、該ケース30内に支持されるフィルタエレメント31とを含んで構成される。   The filter unit 3 includes a cylindrical case 30 and a filter element 31 supported in the case 30.

前記筒状のケース30の下端部外周には、前記サイクロン部2側のフランジ22bと接合されるフランジ30aが形成され、前記フランジ22bとフランジ30aとを複数のボルト32で締結させることで、サイクロン部2の上部にフィルタ部3が同軸に連結される。前記筒状のケース30の上端側は閉塞され、上部周壁を貫通して、排気側配管33がケース30内にまで延設される。   A flange 30a to be joined to the flange 22b on the cyclone portion 2 side is formed on the outer periphery of the lower end portion of the cylindrical case 30, and the flange 22b and the flange 30a are fastened by a plurality of bolts 32, whereby a cyclone is provided. The filter unit 3 is coaxially connected to the upper part of the unit 2. The upper end side of the cylindrical case 30 is closed, penetrates the upper peripheral wall, and the exhaust side pipe 33 extends into the case 30.

また、前記筒状のケース30は、本体側30cと前記排気側配管33を支持する蓋側30dとの上下2分割に形成され、ヒンジ(蝶番)34によって蓋側30dを水平軸回りに揺動させることで、蓋側30dが本体側30cに連結されて閉塞空間を形成する状態(閉状態)と、本体側30cの上部を開放させる(開状態)とに切り替えられるようになっており、前記開状態とすることで、フィルタエレメント31の点検・交換・清掃作業などが行えるようになっている。   The cylindrical case 30 is divided into two parts, a main body side 30c and a lid side 30d that supports the exhaust side pipe 33, and the lid side 30d is swung around a horizontal axis by a hinge (hinge) 34. By doing so, the lid side 30d is connected to the main body side 30c to form a closed space (closed state), and the upper part of the main body side 30c is opened (open state). In the open state, the filter element 31 can be inspected, replaced, cleaned, and the like.

前記フィルタエレメント31は筒状に形成されて、ケース30内にサイクロン部2及びケース30と同軸に設置され、前記ケース30の内周と前記フィルタエレメント31の外周との間に環状空間が形成されるようにしてある。   The filter element 31 is formed in a cylindrical shape, and is installed coaxially with the cyclone unit 2 and the case 30 in the case 30, and an annular space is formed between the inner periphery of the case 30 and the outer periphery of the filter element 31. It is made to do.

前記フィルタエレメント31の中空部31aの下端は、フィルタエレメント31が載置される円盤状の下側ホルダ35によって閉塞され、前記中空部31aの上端開口は、前記排気側配管33の上流端に接続され、フィルタエレメント31の外周側から中空部31a内にガスを通過させることでろ過を行い、ろ過後のガスは、前記排気側配管33によって外部装置に向けて排出される。   The lower end of the hollow portion 31 a of the filter element 31 is closed by a disk-shaped lower holder 35 on which the filter element 31 is placed, and the upper end opening of the hollow portion 31 a is connected to the upstream end of the exhaust side pipe 33. Then, filtration is performed by allowing gas to pass from the outer peripheral side of the filter element 31 into the hollow portion 31 a, and the filtered gas is discharged toward the external device through the exhaust side pipe 33.

前記外部装置とは、例えば、真空ポンプ,排気ブロワ,コンプレッサ等の吸排気システムであり、上記サイクロン集塵装置1によってガス中の粒子(コンタミネーション)を取り除いてから、前記吸排気システムにガスを吸引させる。   The external device is, for example, an intake / exhaust system such as a vacuum pump, an exhaust blower, or a compressor. After the particles (contamination) in the gas are removed by the cyclone dust collector 1, gas is supplied to the intake / exhaust system. Inhale.

前記下側ホルダ35は、ケース30に固定され、該下側ホルダ35の下面には、フィルタエレメント31の中空部31aと略同径の筒状部35aが、同軸に一体的に支持されており、該筒状部35aの下端は、整流板4に近接する位置まで垂下されるようにしてある。   The lower holder 35 is fixed to the case 30, and a cylindrical portion 35 a having substantially the same diameter as the hollow portion 31 a of the filter element 31 is integrally and coaxially supported on the lower surface of the lower holder 35. The lower end of the cylindrical portion 35 a is suspended to a position close to the rectifying plate 4.

また、前記下側ホルダ35の中心には、該ホルダ35と、フィルタエレメント31の上端面に重ねられる上側ホルダ36とを連結させる連結棒37の一端が支持され、フィルタエレメント31が、両ホルダ35,36の間に挟持されるようになっている。   Further, at the center of the lower holder 35, one end of a connecting rod 37 that connects the holder 35 and the upper holder 36 that is overlaid on the upper end surface of the filter element 31 is supported. , 36.

前記上側ホルダ36は、浄化ガスを排出させるための孔が開口される円盤状に形成され、その上面には、ゴムなどの弾性部材で形成されるワッシャ状のシール部材40が固定され、前記排気側配管33の上流側開口端縁が前記シール部材40に押し付けられることで、前記排気側配管33とフィルタエレメント31の中空部31aとが気密に接続されるようになっている。   The upper holder 36 is formed in a disk shape having a hole for exhausting purified gas, and a washer-like seal member 40 formed of an elastic member such as rubber is fixed on the upper surface thereof, and the exhaust The upstream opening edge of the side pipe 33 is pressed against the seal member 40, so that the exhaust side pipe 33 and the hollow portion 31 a of the filter element 31 are airtightly connected.

前記フィルタエレメント31は、図2に示すように、外周面が凹凸を繰り返す波型に形成され、かつ、空隙率が内側から外側に向けて大きくなるように、換言すれば、内側ほど捕捉される粒子径が小さくなるように形成される。   As shown in FIG. 2, the filter element 31 is formed in a corrugated shape whose outer peripheral surface repeats irregularities, and in other words, the void ratio increases from the inside toward the outside, in other words, the inside is captured. It is formed so that the particle diameter becomes small.

前記フィルタエレメント31は、以下のようにして製作される。まず、細いステンレス繊維を数本束にして糸状とし、これを編み込んで可撓性を有するシート38(メッシュ生地)を製作し、かつ、このシート38を、凹凸を繰り返す波型形状とする。   The filter element 31 is manufactured as follows. First, a bundle of several thin stainless fibers is formed into a thread shape, which is knitted to produce a flexible sheet 38 (mesh fabric), and the sheet 38 is formed into a corrugated shape with repeated irregularities.

そして、複数の孔が開口された筒状の芯材39の外側に、前記波型形状のシート38を複数回巻き付けて、芯材39の外側にシート38を積層させるが、前記巻き付けトルクを、内側から外側に向けて小さくし、巻き始めはきつく巻き付け、シート38を積層される毎により緩く巻き付けるようにする。   Then, the corrugated sheet 38 is wound a plurality of times on the outer side of the cylindrical core member 39 having a plurality of holes opened, and the sheet 38 is laminated on the outer side of the core member 39. The size is reduced from the inside to the outside, and the winding start is tightly wound so that the sheet 38 is wound more loosely every time it is laminated.

前述のように、巻き付けトルクを内側ほど大きくすることで、内側ではシート38が潰されてステンレス繊維が密に重なり合うことで、内側の空隙率が外側に比べて小さくなり、内側ほど捕捉される粒子径が小さくなり、逆に、外側ではシート38が緩やかに巻き付けられるので、ステンレス繊維の糸の間隔が大きくなり、外側ほど捕捉される粒子径が大きくなる。   As described above, by increasing the winding torque toward the inner side, the sheet 38 is crushed on the inner side and the stainless fibers are closely overlapped, so that the inner porosity is smaller than the outer side, and the particles that are trapped toward the inner side. On the contrary, since the sheet 38 is gently wound on the outside, the interval between the threads of the stainless fiber is increased, and the captured particle diameter is increased toward the outside.

また、外側ほどシート38を緩く巻き付けることで、外側のシート38では波型の凹凸高さが内側に比べて大きくなり、フィルタエレメント31の外表面が凹凸を繰り返す波型となる。   In addition, by winding the sheet 38 loosely toward the outer side, the corrugated height of the outer sheet 38 becomes larger than that of the inner side, and the outer surface of the filter element 31 has a corrugated shape with repeated irregularities.

尚、図2に示す例では、フィルタエレメント31の外表面に形成される波型の稜線が、略水平(サイクロン部2の軸線に直交する方向)になるように形成されているが、稜線がスパイラル状になるように、換言すれば、サイクロン部2の軸線と平行な線に対して稜線が斜めに交差するようにしてもよい。   In the example shown in FIG. 2, the corrugated ridge formed on the outer surface of the filter element 31 is formed so as to be substantially horizontal (in a direction orthogonal to the axis of the cyclone unit 2). In other words, the ridgeline may cross obliquely with respect to a line parallel to the axis of the cyclone unit 2 so as to form a spiral.

前記整流板4は短冊状に形成され、その長手方向を、前記内筒21の上端部21aの開口(ガス通路)を横断する方向とし、長手方向と直交する方向で傾斜するように、前記内筒21の上端側開口縁に固定され、かつ、傾斜面が相互に略平行となるように前記内筒21の径方向に沿って複数並べて設けられる。   The rectifying plate 4 is formed in a strip shape, and the longitudinal direction of the rectifying plate 4 is defined as a direction crossing the opening (gas passage) of the upper end portion 21a of the inner cylinder 21, and the inner plate 21 is inclined in a direction perpendicular to the longitudinal direction. A plurality of the cylinders 21 are provided side by side along the radial direction of the inner cylinder 21 so as to be fixed to the opening edge on the upper end side of the cylinder 21 and so that the inclined surfaces are substantially parallel to each other.

また、前記整流板4のサイクロン部2側の端縁を通り、サイクロン部2の軸線と平行な線が、隣接する他の整流板4に交差するように、整流板4の設置間隔・傾斜角を設定してある。   Further, the installation interval / inclination angle of the rectifying plate 4 passes through the edge of the rectifying plate 4 on the cyclone portion 2 side, and a line parallel to the axis of the cyclone portion 2 intersects the other rectifying plate 4 adjacent thereto. Is set.

従って、サイクロン部2の軸線と平行に上昇するガスの流れは、その方向を保ったまま整流板4の設置部分を通過することができず、整流板4の端面に衝突した後、整流板4で挟まれる傾斜を有したスリット状の空間を通過して、フィルタ部3に導入される。   Therefore, the flow of the gas rising in parallel with the axis of the cyclone unit 2 cannot pass through the installed portion of the rectifying plate 4 while maintaining its direction, and after colliding with the end face of the rectifying plate 4, the rectifying plate 4 It passes through a slit-like space having an inclination sandwiched between the two and is introduced into the filter unit 3.

次に、上記サイクロン集塵装置1の作用を説明する。前記吸気側配管24からサイクロン部2に導入される含塵ガスは、前記吸気側配管24が、筒状部22の接線方向と略平行に設けられていることから、旋回流となって下降し、旋回によって発生する遠心力が、ガス中の粒子を外筒20の内壁側に遠心分離する。前記遠心分離された粒子は、外筒20内を落下し、外筒20の下端に設けられる粒子排出口25から回収される。   Next, the operation of the cyclone dust collector 1 will be described. The dust-containing gas introduced into the cyclone part 2 from the intake side pipe 24 descends as a swirl flow because the intake side pipe 24 is provided substantially parallel to the tangential direction of the cylindrical part 22. The centrifugal force generated by the swirling centrifuges the particles in the gas toward the inner wall side of the outer cylinder 20. The centrifuged particles fall in the outer cylinder 20 and are collected from a particle outlet 25 provided at the lower end of the outer cylinder 20.

但し、前記サイクロン部2では、上記のように粒子を遠心分離するため、比重が軽い物質(例えば、アルミナ、シリコン、黒鉛など)の微粒子を分離することは難しく、主に粗い粒子が分離される。   However, in the cyclone unit 2, since the particles are centrifuged as described above, it is difficult to separate fine particles of a substance having a low specific gravity (for example, alumina, silicon, graphite, etc.), and coarse particles are mainly separated. .

前記外筒20内の下降旋回流は、外筒20内で方向を反転して上昇流となり、この上昇流は、内筒21を通ってフィルタ部3に向かうが、内筒21の出口に設けられた前記整流板4が抵抗となるため、サイクロン部2で分離されなかった粒子のうちの比較的粗い粒子が落とされ、内筒21を通って外筒20の下端に設けられる粒子排出口25から回収される。   The downward swirling flow in the outer cylinder 20 reverses the direction in the outer cylinder 20 to become an upward flow, and this upward flow passes through the inner cylinder 21 toward the filter unit 3 but is provided at the outlet of the inner cylinder 21. Since the flow straightening plate 4 is a resistance, relatively coarse particles out of the particles not separated by the cyclone unit 2 are dropped, and the particle discharge port 25 provided at the lower end of the outer cylinder 20 through the inner cylinder 21. Recovered from.

前記整流板4で落とされなかった微粒子は、フィルタ部3にガスと共に導入され、フィルタエレメント31で捕捉される。また、ガスが、整流板4で挟まれる傾斜を有したスリット状の空間を通過することで、整流板4の傾斜に沿った向きに流れの方向が変化し、サイクロン部2及び整流板4で除塵されなった粒子を含むガスが、ケース30の内周壁に吹き付けられ、また、旋回流を生じるなどして、これによっても粒子の分離が図られる。   The fine particles that have not been dropped by the rectifying plate 4 are introduced into the filter unit 3 together with the gas and are captured by the filter element 31. Further, the gas passes through a slit-shaped space having an inclination sandwiched between the rectifying plates 4, so that the flow direction changes in a direction along the inclination of the rectifying plate 4, and the cyclone unit 2 and the rectifying plate 4 The gas containing the dust-removed particles is sprayed on the inner peripheral wall of the case 30 and a swirling flow is generated, thereby separating the particles.

このように、ガスに含まれる粒子のうち、粗い粒子がサイクロン部2で遠心分離され、中程度の粒子は整流板4で落とされ、細かい粒子はフィルタ部3において捕捉され、係る3段階の除塵が行われる。   In this way, of the particles contained in the gas, coarse particles are centrifuged in the cyclone unit 2, medium particles are dropped by the rectifying plate 4, and fine particles are captured by the filter unit 3. Is done.

フィルタエレメント31だけで除塵を行う場合、細かい粒子のみではなく粗い粒子も捕捉する必要があり、フィルタエレメント31が直ぐに目詰まりを起こし、フィルタエレメント31のライフサイクルが短くなってしまう。   When dust is removed only with the filter element 31, it is necessary to capture not only fine particles but also coarse particles, and the filter element 31 is immediately clogged, and the life cycle of the filter element 31 is shortened.

これに対し、上記のように、フィルタエレメント31によるろ過を行わせる前に、サイクロン部2及び整流板4で比較的粗い粒子を除塵させておけば、フィルタエレメント31に捕捉される粒子の量が相対的に減って、フィルタエレメント31のライフサイクルを長くすることができ、本実施形態のサイクロン集塵装置1を付属する吸排気システムの長時間運転が可能になる。   On the other hand, as described above, if relatively coarse particles are removed by the cyclone unit 2 and the current plate 4 before filtering by the filter element 31, the amount of particles captured by the filter element 31 is reduced. The life of the filter element 31 can be increased and the life of the filter element 31 can be lengthened, and the intake / exhaust system to which the cyclone dust collector 1 of the present embodiment is attached can be operated for a long time.

また、サイクロン部2は、遠心分離を行うため目詰まりは発生しないが、嵩比重が軽い物質の微粒子を分離することが難しいため、サイクロン部2で浄化されたガスをそのまま後段の吸排気システムに送ると、吸排気システムが微粒子を吸引して故障原因になってしまう。   The cyclone unit 2 is not clogged because of the centrifugal separation, but it is difficult to separate fine particles of a substance having a low bulk specific gravity. Therefore, the gas purified by the cyclone unit 2 is used as it is in the subsequent intake / exhaust system. If sent, the intake / exhaust system will suck in the fine particles and cause failure.

これに対し、上記実施形態のように、サイクロン部2からの浄化ガスを、フィルタ部3でろ過させるようにすれば、サイクロン部2で除塵できない微粒子がフィルタ部3で捕捉されることで、充分に除塵されたガスを後段の吸排気システムに送ることができ、吸排気システムの故障発生を未然に防止することができる。   On the other hand, if the purified gas from the cyclone unit 2 is filtered by the filter unit 3 as in the above embodiment, fine particles that cannot be removed by the cyclone unit 2 are sufficiently captured by the filter unit 3. Thus, the dust-removed gas can be sent to the subsequent intake / exhaust system, and the intake / exhaust system can be prevented from malfunctioning.

更に、本実施形態のフィルタエレメント31は、目詰まりを発生し難い構造になっている。前述のように、フィルタエレメント31は、空隙率が外側ほど大きくなるように形成されているから、粗い粒子は、外側で捕捉されるのに対し、微粒子は、外側のフィルタ層を通過して内側で捕捉されるため、フィルタエレメント31の厚み全体を有効利用して、粒子を捕捉することができる。   Furthermore, the filter element 31 of the present embodiment has a structure that is less likely to cause clogging. As described above, the filter element 31 is formed so that the void ratio increases toward the outer side, so that coarse particles are captured on the outer side, whereas fine particles pass through the outer filter layer to the inner side. Therefore, the entire thickness of the filter element 31 can be effectively used to capture particles.

例えば、フィルタエレメント31の厚み方向において空隙率を一定とし、かつ、この一定の空隙率を、微粒子を捕捉できる小さい値とすると、フィルタエレメント31の表面側で粗い粒子及び微粒子が捕捉され、目詰まりの発生が早まってしまう。   For example, when the porosity is constant in the thickness direction of the filter element 31 and the constant porosity is a small value that can capture fine particles, coarse particles and fine particles are captured on the surface side of the filter element 31 and clogging occurs. Will occur sooner.

また、目詰まりの発生を抑制するために、前記空隙率を一様に大きくすると、目詰まりの発生は抑制できるものの、微粒子を捕捉できず、微粒子を含むガスを後段の装置に送ることになってしまい、後段装置(真空ポンプ等の吸排気システム)の故障要因になってしまう。   Further, if the porosity is increased uniformly in order to suppress the occurrence of clogging, the occurrence of clogging can be suppressed, but the particulates cannot be captured, and the gas containing the particulates is sent to a subsequent apparatus. As a result, it becomes a failure factor of the latter stage device (intake and exhaust system such as a vacuum pump).

これに対し、上記のように、フィルタエレメント31の空隙率を外側ほど大きくすれば、細かい粒子ほど内側で捕捉されるから、目詰まりの発生を抑制しつつ、微粒子を捕捉させることができ、フィルタエレメント31のライフサイクルを延ばし、また、後段装置(真空ポンプ等の吸排気システム)が微粒子を吸い込むことを抑制して、後段装置の故障を未然に防止できる。   On the other hand, as described above, if the porosity of the filter element 31 is increased toward the outer side, finer particles are captured on the inner side, so that fine particles can be captured while suppressing the occurrence of clogging. The life cycle of the element 31 can be extended, and the latter apparatus (intake / exhaust system such as a vacuum pump) can be prevented from sucking fine particles, so that failure of the latter apparatus can be prevented.

また、本実施形態のフィルタエレメント31の外表面が、凹凸を繰り返す波型に形成されているから、ろ過面積を広く確保でき、また、表面が平らである場合のように広い面積に粒子が一様に載積することがないため、粗い粒子が表面で捕捉されて蓄積されても落下し易く、係る作用によってもフィルタエレメント31のライフサイクルを延ばすことができる。   In addition, since the outer surface of the filter element 31 of the present embodiment is formed in a corrugated shape with repeated irregularities, it is possible to secure a wide filtration area, and particles are distributed over a wide area as in the case where the surface is flat. Therefore, even if coarse particles are trapped and accumulated on the surface, they are easy to fall, and the life cycle of the filter element 31 can be extended by such an action.

更に、フィルタエレメント31の製作において、凹凸を繰り返す波型のシート38を芯材39に巻き付けるから、緩く巻かれる外側では、シート38の凹凸が潰されずに残り、潰されずに残った凹凸によって積層されるシート38間に隙間ができ、このシート38間の隙間に粒子が落下して下方に蓄積されることで、フィルタエレメント31のライフサイクルが長くなる。   Further, in the manufacture of the filter element 31, the corrugated sheet 38 that repeats unevenness is wound around the core material 39, so that the unevenness of the sheet 38 remains without being crushed on the outer side where it is loosely wound, and is laminated by the unevenness remaining without being crushed. A gap is formed between the sheets 38, and the particles fall in the gap between the sheets 38 and accumulate downward, thereby extending the life cycle of the filter element 31.

また、本実施形態のフィルタエレメント31は、高い捕捉効率を発揮することができる。前記フィルタエレメント31は、シート38を芯材39に対して複数回巻き付けて形成され、巻き付けトルクを徐々に緩めることで基本的には外側ほど空隙率が大きくなるが、局所的には空隙率にばらつきがあるため、粒子が、シート38を構成するステンレス繊維への衝突を繰り返し、これによって粒子の通過速度が遅くなるため、高い捕捉効率を発揮できる。   Moreover, the filter element 31 of this embodiment can exhibit high capture efficiency. The filter element 31 is formed by winding the sheet 38 around the core 39 a plurality of times, and the porosity is basically increased toward the outside by gradually loosening the winding torque, but locally the porosity is increased. Since there is variation, the particles repeatedly collide with the stainless steel fibers constituting the sheet 38, thereby slowing the passage speed of the particles, so that high capture efficiency can be exhibited.

更に、シート38を構成するステンレス繊維の束がガス圧力を受けることで毛細状に拡がり、このステンレス繊維の束の隙間にミクロン単位の微粒子まで捕捉することができ、これによっても捕捉効率を高くできる。   Further, the bundle of stainless steel fibers constituting the sheet 38 expands into a capillary shape when subjected to gas pressure, and fine particles in units of microns can be captured in the gaps between the bundles of stainless steel fibers, which can also increase the capture efficiency. .

また、前述のように、フィルタエレメント31は内側ほど空隙率が小さくため、微粒子の捕捉する領域が内側から徐々に外側に拡がり、フィルタエレメント31の厚み全体を有効利用して微粒子を捕捉でき、高い捕捉効率を長時間維持することが可能である。   Further, as described above, since the porosity of the filter element 31 is smaller toward the inner side, the region where the fine particles are captured gradually expands from the inner side to the outer side, and the entire thickness of the filter element 31 can be effectively used to capture the fine particles. It is possible to maintain the capture efficiency for a long time.

以上のように、本実施形態のサイクロン集塵装置1では、フィルタエレメント31のライフサイクルを長くしつつ、比重の軽い物質の微粒子まで除塵できる高い除塵性能を発揮でき、サイクロン集塵装置1で浄化されたガスを吸引する吸排気システムを、故障を発生させることなく長時間運転させることができる。   As described above, in the cyclone dust collector 1 of the present embodiment, the filter element 31 can have a high dust removal performance that can remove fine particles of a substance having a low specific gravity while extending the life cycle of the filter element 31, and the cyclone dust collector 1 performs purification. The intake / exhaust system that sucks the generated gas can be operated for a long time without causing a failure.

尚、前記サイクロン部2を構成する外筒20及び内筒21の形状・配置は、図1,図2に示したものに限定されず、遠心力で粒子を分離する構成のものであればよい。   In addition, the shape and arrangement of the outer cylinder 20 and the inner cylinder 21 constituting the cyclone unit 2 are not limited to those shown in FIGS. 1 and 2, and may be any structure as long as particles are separated by centrifugal force. .

また、フィルタエレメント31を、ステンレス繊維の束を編み込んだものに限定するものではなく、また、外表面を平らにし、及び/又は、厚み方向(径方向)で空隙率を一定としても良い。   Further, the filter element 31 is not limited to one in which a bundle of stainless steel fibers is knitted, and the outer surface may be flattened and / or the porosity may be constant in the thickness direction (radial direction).

更に、上記実施形態では、シート38を幾重にも巻き付けてフィルタエレメント31を形成したが、空隙率が異なる複数の筒状フィルタエレメントを、同心円状に重ねてフィルタエレメント31を形成することができる。   Further, in the above embodiment, the filter element 31 is formed by winding the sheet 38 several times. However, the filter element 31 can be formed by concentrically stacking a plurality of cylindrical filter elements having different porosity.

また、整流板4の形状や並べ方は、図1,図2に示したものに限定されず、例えば、内筒21の上端部21aの開口域を、中心を通る境界線で2つの領域に分け、各半円領域で整流板の傾きの方向を異ならせたり、扇状に形成した整流板4を、傾斜させて周方向に複数並べてファン状としたりすることができる。   The shape and arrangement of the rectifying plates 4 are not limited to those shown in FIGS. 1 and 2. For example, the opening area of the upper end 21 a of the inner cylinder 21 is divided into two areas by a boundary line passing through the center. The direction of inclination of the rectifying plate can be varied in each semicircular region, or a plurality of rectifying plates 4 formed in a fan shape can be inclined to form a fan shape.

また、整流板4は、上記のように、サイクロン部2の軸方向に対して斜めに交差する傾斜面を有する構成の他、サイクロン部2の軸方向に対して直交するように設置することができ、また、サイクロン部2の軸芯に対し、放射状に設置することもできる。加えて、前述のように、整流板4をガス通路の同一断面上に複数並べることができる他、ガス通路の上下流方向に離間させて複数の整流板4を設けることができる。   Further, as described above, the rectifying plate 4 may be installed so as to be orthogonal to the axial direction of the cyclone unit 2 in addition to the configuration having an inclined surface that obliquely intersects the axial direction of the cyclone unit 2. It can also be installed radially with respect to the axis of the cyclone unit 2. In addition, as described above, a plurality of rectifying plates 4 can be arranged on the same cross section of the gas passage, and a plurality of rectifying plates 4 can be provided separated in the upstream and downstream direction of the gas passage.

また、個々の整流板4は、平板状のものに限定されず、捻れ・湾曲・屈曲などの変形加工を施したものであってもよく、また、薄い板状のものに限定されず、例えば、横断面が円や楕円の部材などを用いることができる。更に、例えば、複数の孔が開口された複数の平板を、上下方向に隙間を設けて設置し、かつ、各平板の孔が、サイクロン部2の軸線と平行な方向に直線的に並ばないように、相互にずらして設けるようにしても良い。   Further, the individual current plate 4 is not limited to a flat plate shape, and may be subjected to deformation processing such as twisting / curving / bending, and is not limited to a thin plate shape. A member having a circular or elliptical cross section can be used. Further, for example, a plurality of flat plates having a plurality of holes are provided with a gap in the vertical direction, and the holes of each flat plate are not aligned linearly in a direction parallel to the axis of the cyclone unit 2. Alternatively, they may be shifted from each other.

1 サイクロン集塵装置
2 サイクロン部
3 フィルタ部
4 整流板
20 外筒
21 内筒
24 吸気側配管
30 ケース
31 フィルタエレメント
33 排気側配管
DESCRIPTION OF SYMBOLS 1 Cyclone dust collector 2 Cyclone part 3 Filter part 4 Current plate 20 Outer cylinder 21 Inner cylinder 24 Intake side piping 30 Case 31 Filter element 33 Exhaust side piping

Claims (5)

外部から粒子を含むガスを吸引し、前記粒子を遠心分離するサイクロン部と、
前記サイクロン部の上部に設けられ、前記サイクロン部で前記粒子が分離されたガスをろ過して外部に排出するフィルタ部と、
前記サイクロン部と前記フィルタ部との間のガス通路に設けられ、前記サイクロン部から排出されたガスを整流して、前記フィルタ部に導入させる整流板と、
を含んで構成されるサイクロン集塵装置。
A cyclone section for sucking a gas containing particles from the outside and centrifuging the particles;
A filter unit that is provided at an upper part of the cyclone unit, filters the gas from which the particles have been separated in the cyclone unit, and discharges the gas to the outside;
A rectifying plate that is provided in a gas passage between the cyclone unit and the filter unit, rectifies the gas discharged from the cyclone unit, and introduces the gas into the filter unit;
A cyclone dust collector composed of.
前記整流板を、前記ガス通路の径方向に沿って複数並べた請求項1記載のサイクロン集塵装置。   The cyclone dust collector according to claim 1, wherein a plurality of the current plates are arranged along a radial direction of the gas passage. 前記フィルタ部が、上部から排気側配管が導出される筒状のケースと、前記筒状のケース内に前記サイクロン部と略同軸に設置される筒状のフィルタエレメントとを含み、前記筒状のフィルタエレメントの中空部の下端を閉塞させる一方、前記中空部の上端開口部を前記排気側配管に接続させ、
前記筒状のフィルタエレメントの外周と前記ケースの内周とで形成される環状空間に、前記サイクロン部から排出されたガスを、前記整流板を介して導入し、前記ガスを前記筒状のフィルタエレメントの外周から中空部内に通過させて、前記排気側配管によって外部へ排出させる請求項1又は2記載のサイクロン集塵装置。
The filter unit includes a cylindrical case from which an exhaust side pipe is led out from above, and a cylindrical filter element installed substantially coaxially with the cyclone unit in the cylindrical case. While closing the lower end of the hollow portion of the filter element, the upper end opening of the hollow portion is connected to the exhaust pipe,
Gas discharged from the cyclone portion is introduced into the annular space formed by the outer periphery of the cylindrical filter element and the inner periphery of the case via the rectifying plate, and the gas is supplied to the cylindrical filter. The cyclone dust collector according to claim 1 or 2, wherein the cyclone dust collector is passed through the hollow portion from the outer periphery of the element and discharged to the outside by the exhaust side pipe.
前記筒状のフィルタエレメントの外周面を、凹凸を繰り返す波型に形成した請求項3記載のサイクロン集塵装置。   The cyclone dust collector of Claim 3 which formed the outer peripheral surface of the said cylindrical filter element in the waveform which repeats an unevenness | corrugation. 前記筒状のフィルタエレメントの空隙率を、内側から外側に向けて大きくした請求項3又は4記載のサイクロン集塵装置。   The cyclone dust collector of Claim 3 or 4 which increased the porosity of the said cylindrical filter element toward inner side from the inner side.
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