JP2010266338A - Touch panel inspection apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a touch panel inspection apparatus, capable of shortening an inspection time and conducting an effective inspection for even an inspection object, such as, touch panel which has wiring arranged in the form of a matrix in an x-axis direction and a y-axis direction, by conducting inspection in a noncontact inspection fashion. <P>SOLUTION: The touch panel inspection apparatus includes a first signal applying means for applying an AC signal for conducting a continuity inspection of x-axis wiring which is the inspection object; a second signal applying means for applying an AC signal for conducting a continuity inspection of y-axis wiring which is the inspection object; a third signal applying means for applying an AC signal for conducting a short circuit inspection between the x-axis wiring which is the inspection object and adjacent y-axis wiring; a plurality of power supply sections for supplying AC signals from respective applying means, in order to inspect the continuity and short circuiting of the wiring which is the inspection object; an inspection head section having a plurality of inspection parts for detecting an electric signal from the wiring; and a moving means for moving the inspection head section, along the surface of the inspection object in a prescribed axis direction. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

The present invention relates to a touch panel inspection device, and more particularly, quickly and efficiently performs continuity and short circuit inspection of wiring formed on a touch panel without damaging the touch panel by using non-contact supply electrodes and detection electrodes. The present invention relates to a touch panel inspection apparatus capable of performing the above.
In addition, this invention can test | inspect with respect to the test | inspection object which has the wiring arrange | positioned not only in what is called a touch panel but a matrix form in the X-axis direction and the Y-axis direction like a touch panel.

  Conventionally, an inspection object having wiring arranged in a matrix formed in an X-axis direction and a Y-axis direction formed on an ITO film called a touch panel (or touch screen or touch screen) is referred to as an X-axis direction. A contact (needle-like conduction probe) is brought into contact with each of the wirings arranged in the Y-axis direction, and inspection of a short circuit between each wiring and an adjacent wiring has been performed.

  However, in the method in which the contact is in contact with each wiring as described above, the wiring formed on the ITO film and the contact are not stable, and the electrical characteristics are unstable due to the instability of the contact resistance due to the oxide film. It had a problem that could not be measured accurately. Further, since the contact is brought into pressure contact with the wiring to be inspected, there is a problem that a dent is formed by the contact of the contact with the wiring.

On the other hand, as disclosed in Patent Document 1, there is an inspection technique for accurately inspecting electrical characteristics such as a resistance value of the entire touch panel that can accurately detect a predetermined touch input position on the assembled touch panel. Proposed. Thus, a technique for inspecting the electrical characteristics of the function of the assembled touch panel is disclosed.
However, a technique for inspecting the continuity and short circuit of the wiring before assembly as described above is not disclosed.

  Conventionally, a plasma display panel (PDP) or the like exists as a glass substrate having wiring formed on the surface. A PDP glass substrate has a plurality of rod-like wirings formed in one direction. In the manufacturing process, it is necessary to inspect the continuity and short circuit of a plurality of wires arranged in one direction.

  As such a PDP inspection apparatus, a non-contact inspection technique as disclosed in Patent Document 2 has been proposed. In the non-contact inspection technique disclosed in Patent Document 2, a signal is supplied to a wiring to be inspected, and a signal detected from this wiring and a wiring detected at a distance of 4 or 5 patterns from this wiring are detected. The inspection is performed by comparing the signals and detecting the difference.

  However, the technique disclosed in Patent Document 2 can inspect wirings arranged in parallel in one direction, and in a matrix form in the x-axis direction and the y-axis direction like a touch panel. It was not possible to inspect the wiring placed in

JP 2005-274225 A Japanese Unexamined Patent Publication No. 2006-200992

  The present invention has been made in view of such circumstances, and even if the inspection object is an inspection object such as a touch panel having wirings arranged in a matrix in the x-axis direction and the y-axis direction, it is non-contact Provided is a touch panel inspection apparatus capable of efficiently performing an inspection by shortening an inspection time by performing an inspection by an inspection method.

The invention according to claim 1 is an x-axis wiring in which a plurality of rod-shaped wirings are arranged in parallel, and a y-axis wiring that is arranged in a matrix with the x-axis wiring and in which a plurality of rod-shaped wirings are arranged in parallel. An inspection apparatus for inspecting continuity and short-circuit between the x-axis wiring and the y-axis wiring of an inspection object having a first signal for supplying an alternating current signal to perform continuity inspection of the x-axis wiring to be inspected Short-circuit inspection between the supply means, the second signal supply means for supplying an AC signal for conducting the continuity test of the y-axis wiring to be inspected, and the y-axis wiring adjacent to the x-axis wiring to be inspected A third signal supply means for supplying an AC signal for carrying out the operation, a plurality of power supply sections for supplying an AC signal from each supply means for inspecting the continuity and short circuit of the wiring to be inspected, and the wiring A plurality of voltage detectors for detecting electrical signals from An inspection head unit, a moving means for moving the inspection head unit on the surface of the inspection object in a predetermined axial direction, a plurality of power feeding units of the inspection head unit, the plurality of voltage detection units, and the first to first units. A connection means for electrically connecting three signal supply means, one end portion of the plurality of x-axis wires and one end portion of the plurality of y-axis wires are arranged in a non-contact manner, and the first signal supply Based on the common electrode part electrically connected to one end of the means and one end of the second signal supply means, and the detection signal from the inspection head part, the conduction and short circuit of the x-axis wiring and the y-axis wiring, respectively A determination unit that performs an inspection, and the inspection head unit is disposed in a non-contact manner on the other end of the x-axis wiring to be inspected and electrically connected to the other end of the first signal supply unit Detects electrical signals of the connected first feeding unit and the x-axis wiring to be inspected Therefore, the first voltage detection unit arranged in a non-contact manner on the x-axis wiring and the other end portion of the second signal supply means are arranged in a non-contact manner at the other end portions of the plurality of y-axis wirings, respectively. A plurality of second power feeding sections electrically connected to one end of the third signal supply means, and a plurality of the second signal supply means and / or the second signal supply means are disposed on the plurality of y-axis wirings in a non-contact manner. A plurality of second voltage detectors for detecting an electric signal caused by the AC signal supplied by the three-signal supply means, and the other end of the third signal supply means are electrically connected and x to be inspected There is provided a touch panel inspection apparatus comprising a third power feeding unit arranged in a non-contact manner with an axial wiring.
According to a second aspect of the present invention, the AC signal supplied from the second signal supply means to the plurality of second power supply units is an AC signal having a different frequency, respectively. I will provide a.
The invention according to claim 3 provides the touch panel inspection apparatus according to claim 1 or 2, wherein the AC signals supplied by the first to third signal supply means are all AC signals having different frequencies. To do.
The invention according to claim 4 provides the touch panel inspection apparatus according to claim 1, wherein the moving means moves in the y-axis direction in which the y-axis wiring is extended.
By providing these inventions, the above problems can be solved.

  According to the invention described in any one of claims 1 to 4, even if the inspection object is an inspection object such as a touch panel having wiring arranged in a matrix in the x-axis direction and the y-axis direction, non-contact inspection By carrying out the inspection by the method, it is possible to provide a touch panel inspection apparatus that can reduce the inspection time and perform the inspection efficiently.

It is a schematic plan view which shows one Embodiment of the touchscreen used as the test object of this invention. It is a schematic diagram for demonstrating the test | inspection method of this test | inspection apparatus. It is a graph which shows the alternating current signal detected from the alternating current signal and pattern (wiring) for demonstrating the inspection method of this inspection apparatus. 1 shows an embodiment of an inspection head 3 and a common electrode portion 6 of an inspection apparatus according to the present invention. It is a schematic plan view which shows a state in case this inspection apparatus is implemented. It is a schematic plan view which shows the case where the conduction test of x-axis wiring is implemented. Note that the x-axis wiring to be inspected indicates Line: X6 in FIG. It is a schematic plan view which shows the case where the conduction test of a y-axis wiring is implemented. The y-axis wiring to be inspected indicates Line: Y1 in FIG. It is a schematic plan view which shows the case where a short circuit inspection of x-axis wiring and y-axis wiring is implemented. The x-axis wiring to be inspected is indicated by Line: X1 in FIG. 1, and the y-axis wiring is indicated by Line: Y1 in FIG. It is a schematic plan view which shows the case where the conduction test of a y-axis wiring is implemented. Note that the y-axis wiring to be inspected indicates Line: Y8 in FIG.

The best mode for carrying out the present invention will be described.
This inspection apparatus can improve inspection efficiency for a substrate or a glass substrate having a plurality of wirings arranged in a matrix in the x-axis direction and the y-axis direction, such as a touch panel.
First, a touch panel to be inspected by the inspection apparatus will be described.
FIG. 1 is a schematic plan view showing an embodiment of a touch panel to be inspected according to the present invention. In the touch panel TP of FIG. 1, a plurality of x-axis wirings arranged in the x-axis direction and y-axis wirings arranged in the y-axis direction are arranged in a glass substrate shape. In FIG. 1, 14 x-axis wirings are formed (Line: X1 to Line: X14 indicated by reference numerals), and eight y-axis wirings (Line: Y1 to Line: Y8 indicated by reference numerals) are formed. .
Since the x-axis wiring and y-axis wiring of the touch panel TP are arranged so as to cover the touch area on the screen (the part covered by P1 and P2) with these wirings, one x-axis as shown in FIG. The wiring (and the y-axis wiring) is formed so as to cover the entire touch area by repeatedly forming the wide portion and the narrow portion. By being formed in this way, when the touch panel TP is used, it is possible to detect on which x-axis wiring and on which y-axis wiring the touched location (contact location) is located.
Note that the x-axis wiring and the y-axis wiring are not limited to 14 and 8, respectively, and are appropriately adjusted by the touch panel manufacturer. Further, the length and the size of the wide part and the narrow part are appropriately adjusted by the touch panel manufacturer.

  Each of these x-axis wiring and y-axis wiring has a tag portion T formed so that one end thereof can be connected to an electronic component such as a driver, and an electrical connection portion (tag portion T) to other electronic components. Are extended and formed. The tag portion T is formed at a location separated from the touch areas (P1 to P2) in plan view so that electrical connection can be made. In the touch panel TP of FIG. 1, tag portions T of (x-axis wiring and y-axis wiring) are formed on the right side as viewed in the drawing. The tag portion T can be formed in one place at a place other than the touch area, and the x-axis wiring, the y-axis wiring, and the tag portion T can be formed at the peripheral portion.

  This inspection apparatus (not shown) is determined as the first signal supply means 21, the second signal supply means 22, the third signal supply means 23, the inspection head section 3, the moving means 4, the connection means 5, and the common electrode section 6. Means 9 are provided.

The first signal supply means 21 supplies a first AC signal for performing a continuity test on the x-axis wiring to be inspected. The first signal supply means 21 is configured by connecting two AC power supplies having a phase difference of 180 degrees through a ground (see power supply PW1 and power supply PW2 shown in FIG. 2).
One end of the first signal supply unit 21 is electrically connected to the common electrode unit 6, and the other end is electrically connected to the first power feeding unit 71. For this reason, the first signal supply means 21 supplies an AC signal for inspection to the x-axis wiring via the shared electrode portion 6 and the first power feeding portion 71.

  The 2nd signal supply means 22 supplies the 2nd alternating current signal for implementing the conduction | electrical_connection test of the y-axis wiring used as test object. Similar to the first signal supply means 21, the second signal supply means 22 is configured by connecting two AC power supplies having a phase difference of 180 degrees via a ground. One end of the second signal supply unit 21 is electrically connected to the common electrode unit 6, and the other end is electrically connected to the second power feeding unit 72. For this reason, the second signal supply unit 22 supplies an AC signal for inspection to the y-axis wiring via the shared electrode unit 6 and the second power feeding unit 72.

The second signal supply means 22 is provided so that a continuity test can be performed on all y-axis wirings formed on the touch panel TP. Specifically, there is a method of setting AC signals with different frequencies by the same number as the number of y-axis wirings, and supplying AC signals with respective frequencies to the y-axis wirings. Signals can be alternately supplied to adjacent y-axis wirings.
In addition, it is preferable that this 2nd signal supply means 22 prepares several alternating current signal sources for the alternating current signal of a different frequency.

The third signal supply means 23 supplies a third AC signal for performing a short-circuit inspection between the x-axis wiring to be inspected and the y-axis wiring arranged adjacent thereto.
One end of the third signal supply unit 23 is electrically connected to the second power feeding unit 72, and the other end is electrically connected to the third power feeding unit 73. For this reason, the third signal supply unit 23 inspects a short circuit between the x-axis wiring and the y-axis wiring via the second power feeding unit 72 and the third power feeding unit 73.

The inspection principle of this inspection apparatus will be described with reference to a schematic diagram. FIG. 2 is a schematic diagram for explaining an inspection method of the present inspection apparatus. In this inspection apparatus, in order to inspect the continuity of the wiring W formed on the glass substrate, the power feeding part A and the power feeding part B are physically arranged in a non-contact manner at both ends of the wiring W. An AC signal having the same frequency and a phase difference of 180 degrees is supplied from the AC power supply PW1 and the AC power supply PW2 that supply AC signals that are 180 degrees different to the power supply section A and the power supply section B (see FIG. 3).
The AC signal supplied from the two AC power sources PW1 and PW2 is supplied with an AC signal for inspection to the power feeding unit A (or power feeding unit B), and this AC signal is supplied from the power feeding unit A (or power feeding unit B) to the wiring W. Is supplied, a current whose phase is advanced by 90 degrees is generated in the wiring W due to capacitive coupling between the wiring W and the power feeding unit A. At this time, since the power feeding unit A and the power feeding unit B supply AC signals having a phase difference of 180 degrees to the wiring W, when there is no defect in the wiring W (when the conduction state is good), two power feedings are performed. Signals cancel each other due to the influence of the AC signal supplied from the unit (see the pattern application current shown in FIG. 3).
For this reason, the detection electrode portion C arranged for detecting a signal generated in the wiring W detects a signal at the 0 level.

If there is a continuity failure (disconnection failure) at the location indicated by the resistance on the wiring W shown in FIG. 3, the detection electrode unit C detects a signal affected by the AC signal supplied from the power supply unit A. As a result, a conduction failure can be detected.
In the embodiment shown in FIG. 3, two detection electrode portions (C, D) are shown as the detection electrode portion. However, only one detection electrode portion may be used, or both detection electrodes may be detected. It is good also as a structure which uses an electrode part.

  The AC signals supplied from the first signal supply means 21 to the third signal supply means 23 can all be set to different frequencies. In this case, when a continuity or short circuit failure is detected, it is possible to specify on which wiring the failure exists.

  FIG. 4 shows an embodiment of the inspection head 3 and the common electrode portion 6 of the inspection apparatus according to the present invention. The inspection head 3 according to the present invention includes a plurality of power supply units that supply AC signals from each supply unit and a plurality of electric signals that detect electric signals from the wirings, in order to inspect the continuity and short circuit of the wiring to be inspected. It has a voltage detector.

The inspection head unit 3 shown in FIG. 4 is arranged in a non-contact manner at the other end of the x-axis wiring to be inspected and is electrically connected to the other end of the first signal supply means 21. It has a portion 71.
The first power feeding unit 71 is disposed so as to be located at the left end of the x-axis wiring of the inspection head unit 3. By arrange | positioning in this position, the common electrode part 6 and the 1st electric power feeding part 71 can implement the conduction | electrical_connection test from end to end of x-axis wiring x-axis wiring.
In addition, this 1st electric power feeding part 71 is provided so that it may be arrange | positioned on the wide part of the end part of x-axis wiring.

In order to detect the electrical signal of the x-axis wiring to be inspected, the first voltage detection unit 81 is disposed on the x-axis wiring in a non-contact manner. The first voltage detection unit 81 is disposed on the wider portion adjacent to the wider portion of the x-axis wiring than the first power feeding portion 71. The place where the first voltage detection unit 81 is disposed is not particularly limited as long as it is between the first power supply unit 71 and the common electrode unit 6, but a place in the panel area is preferable.
In addition, the 1st electric power feeding part 71 and the 1st voltage detection part 81 are arrange | positioned non-contactingly on the same x-axis wiring.

  As described above, the first voltage detection unit 81 is arranged on the x-axis wiring (one x-axis wiring) to be inspected, but in order to detect an electric signal of the x-axis wiring, An electric part (auxiliary voltage detection part) can also be provided. In FIG. 4, the auxiliary voltage detection unit 83 can be arranged at a location located on the wide portion of the x-axis wiring at the right end of the panel area.

The inspection head unit 3 is arranged in a non-contact manner at the other end portions of the plurality of y-axis wirings, and is electrically connected to the other end of the second signal supply unit 22 or one end of the third signal supply unit 23. A second power feeding unit 72 is provided.
The second power feeding unit 72 is provided with the same number of second power feeding units 72 as the number of y-axis wirings (eight in the embodiment of FIG. 1), and each second power feeding unit 72 is physically connected to the y-axis wiring. Arranged without contact.
This 2nd electric power feeding part 72 is connected with the 2nd signal supply means 22 and the 3rd signal supply means 23, and is connected with either one by a connection means, or is connected or controlled with both.

The inspection head unit 3 is arranged in a non-contact manner on each of the plurality of y-axis wirings, and detects a plurality of electrical signals caused by the AC signal supplied by the second signal supply unit 22 and / or the third signal supply unit 23. The second voltage detector 82 is provided.
The second voltage detectors 82 are provided with the same number of second voltage detectors 82 as the number of y-axis wires (eight in the embodiment of FIG. 1). It is arranged physically without contact.

  In the inspection head unit 3 illustrated in FIG. 4, the second power feeding unit 72 and the second power detection unit 82 for the four y-axis wirings are directed toward the paper surface according to the shape of the tag unit of the y-axis wiring. The second power feeding unit 72 is disposed above the second power feeding unit 72, and the second power detection unit 82 is disposed above the wide portion adjacent to the wide portion of the y-axis wiring in which the second power feeding unit 72 is disposed. . For the remaining four y-axis wirings, a second voltage detection unit 82 is arranged on the lower side of the inspection head unit 3 toward the paper surface, and the width of the y-axis wiring in which the second voltage detection unit 82 is arranged is wide. The 2nd electric power feeding part 72 is arrange | positioned above the wide part in an adjacent position rather than a part.

The inspection head unit 3 includes a third power feeding unit 73 that is electrically connected to the other end of the third signal supply unit 23 and is disposed in non-contact with the x-axis wiring to be inspected.
The third power supply unit 73 is disposed on the x-axis wiring that is the same inspection target as the first power supply unit 71 and the first power detection unit 72. The third power feeding portion 73 is formed so as to be disposed on a wide portion at a substantially central portion of the x-axis wiring in the touch area.

In FIG. 4 which shows the test | inspection head part 3 of this test | inspection apparatus, the 1st electric power feeding part 71 is shown by the electrode part X11, the 1st electric power detection part 81 is shown by the electrode part X21, and the several 2nd electric power feeding part 72 is made into the electrode part Y11. , Electrode part Y21, electrode part Y31, electrode part Y41, electrode part Y52, electrode part Y62, electrode part Y72, electrode part Y82, the second voltage detector 82 is represented by electrode part Y12, electrode part Y22, electrode part Y32, electrode part Y42, electrode part Y51, electrode part Y61, electrode part Y71, electrode part Y81 are shown, third power feeding part 73 is shown by electrode part X51, and auxiliary voltage detector 83 is shown by electrode part X91. Yes.
These electrode portions are formed to have a shape (for example, a circle or a rectangle) having the same size as that of the wide portion of the wiring.

  The inspection head unit 3 is formed of a plate-like member having the electrode unit as described above, and the inspection head unit 3 performs inspection by moving on the glass substrate. First, as shown in FIG. 4, the inspection head portion 3 is formed to have the length of the x-axis wiring and the size of two wide portions of the y-axis wiring.

  The common electrode portion 6 is arranged in a non-contact manner with respect to all one end portions of the plurality of x-axis wirings and one end portion of the plurality of y-axis wirings, and one end of the first signal supply unit and one end of the second signal supply unit. Are electrically connected to each other. In the embodiment of FIG. 5, the tag part T of the x-axis wiring and the tag part of the y-axis wiring are gathered at one place on the glass substrate, and these tag parts T are in a physically non-contact state over the whole. Is arranged in. The common electrode portion 6 may move simultaneously with the inspection head portion described later, but is maintained in a non-contact state with all the wirings described later.

  In this inspection apparatus, the inspection head unit 3 is moved in the predetermined axial direction (the long axis direction v of the y-axis wiring in FIG. 5) on the surface of the glass substrate as the inspection object. As this moving means, a mechanism for moving a linear track using a linear motor or the like can be used.

  The inspection head unit 3 includes a connection unit that electrically connects the plurality of power supply units, the plurality of detection units, and the first to third signal supply units. This connection means performs electrical connection as appropriate using a plurality of changeover switches.

The inspection apparatus includes a determination unit that performs continuity and short-circuit inspection of each of the x-axis wiring and the y-axis wiring based on the detection signal from the inspection head unit 3.
This determination means determines continuity and short-circuit between the x-axis wiring and the y-axis wiring to be inspected based on the inspection signals detected from the respective power detection units.
When determining the continuity of the x-axis wiring to be inspected, the AC signal from the first power supply unit 71 and the common electrode unit 6 is supplied, and the signal detected by the first power detection unit 81 is the first power supply unit. It is determined whether it is caused by the AC signal supplied from 71 or the AC signal supplied from the common electrode unit 6 or is affected by both. In addition, it determines with favorable conduction | electrical_connection when the signal is negated under the influence from any electric power feeding part.

  When determining the continuity of the y-axis wiring to be inspected, an AC signal from the second power feeding unit 72 and the common electrode unit 6 is supplied, and the signal detected by the second power sensing unit 82 is the second power feeding unit. Whether it is caused by the AC signal supplied from 72, the AC signal supplied from the common electrode unit 6, or whether it is affected by both. In addition, it determines with favorable conduction | electrical_connection when the signal is negated under the influence from any electric power feeding part.

When the short circuit between the x-axis wiring and the y-axis wiring to be inspected is determined, the AC signal of the third signal supply means 23 is supplied from the second power feeding unit 72 and the third power feeding unit 73, and the second power detection. Whether the signal detected by the unit 82 is caused by an AC signal supplied from the second power feeding unit 72 or caused by an AC signal supplied from the third power feeding unit 73 has an influence on either. Judgment is made depending on whether or not it is received. In this case, when there is a short-circuit failure, the AC signals from the second power feeding unit 72 and the third power feeding unit 73 cancel each other, or the signal from the second power feeding unit 72 is affected. .
In addition, when there is no short circuit failure, the signal from the third power feeding unit 73 is affected.

Since the tag portion T of the touch panel TP has a plurality of tag portions T of each wiring arranged in parallel, there is a problem of short-circuit failure with the adjacent tag portion T. Especially, as shown in FIG. The tag part T may have a short circuit failure.
In this case, by supplying an AC signal to the second feeding unit 72 arranged in the y-axis wiring to be inspected and the y-axis wiring to be inspected for short-circuiting, the second voltage detecting unit 82 is connected to another y-axis wiring. If the AC signal from is detected, a short circuit failure is detected.
Moreover, the alternating current signal which detects the short circuit of a y-axis wiring may set the alternating current signal from which a frequency differs, and may set so that a short circuit may be detected by setting the frequency from which it differs alternately.

The above description shows the arrangement of the electrode unit and the power feeding unit when the inspection head unit 3 is moved in the long axis direction of the y-axis wiring by the moving means, and the inspection head unit 3 is arranged in the long axis direction of the x-axis wiring. In the case of movement, the correspondence between the x-axis and the y-axis of the electrode unit and the power feeding unit is interchanged.
The above is the configuration of the touch panel inspection apparatus according to the present invention.

Next, the operation of this inspection apparatus will be described.
The touch panel TP is disposed at a predetermined position of the inspection apparatus, and the inspection of the touch panel TP is started (see FIG. 5).
As shown in FIG. 5, the inspection head unit 3 is moved downward by the moving means toward the paper surface.
When the touch panel TP of FIG. 1 is inspected, the first voltage detection unit 71 and the first power supply unit 81 are arranged on the x-axis wiring, and the y-axis wiring Line: Y1 to Y4 on the y-axis wiring. The inspection is started when each of the second power feeding units 72 and the second power detection unit 82 is arranged.

When the inspection as described above is started, the continuity inspection of the x-axis wiring Line: X1 and the continuity inspection of the y-axis wiring Line: Y1 to Y4 are inspected.
At this time, for example, a continuity test of the x-axis wiring as shown in FIG. 6 is performed, and a continuity test of the y-axis wiring as shown in FIG. 7 is performed.
When the above-described continuity inspection between the x-axis wiring and the y-axis wiring is performed, a short circuit inspection between the x-axis wiring (Line: X1) and these y-axis wirings (line: Y1 to Y8) is performed.

Next, the inspection head unit 3 moves in the movement v direction, and the x-axis wiring Line: X2 is inspected as an inspection target. In this case, the first power feeding unit 71 and the first voltage detection unit 81 move until they are arranged on the wide portion of the x-axis wiring Line: X2.
In this case, as in the case of the x-axis wiring Line: X1, a continuity test is performed, and a short-circuit test with each y-axis wiring is performed.

The inspection target of the x-axis wiring is the x-axis wiring Line: X14. When this continuity inspection is performed, the continuity inspection of the y-axis wiring Line: Y5 to Y8 is then performed as shown in FIG. It will be.
In each inspection process, a defect (conductivity failure or short circuit failure) is detected.
The above is the description of the operation of the present invention.

21 ... First signal supply means 22 ... Second signal supply means 23 ... Third signal supply means 3 ... Inspection head part 71 ... First power supply part 72 ... Second power supply Part 73 ... Third power feeding part 81 ... First voltage detection part 82 ... Second voltage detection part

Claims (4)

The x-axis of an inspection object having an x-axis wiring in which a plurality of rod-shaped wirings are arranged in parallel, and a y-axis wiring arranged in a matrix and the plurality of rod-shaped wirings arranged in a matrix An inspection device for inspecting the continuity and short circuit between the wiring and the y-axis wiring,
First signal supply means for supplying an alternating current signal for conducting a continuity test of the x-axis wiring to be inspected;
Second signal supply means for supplying an AC signal for conducting a continuity test of the y-axis wiring to be inspected;
Third signal supply means for supplying an AC signal for performing a short circuit inspection between the x-axis wiring to be inspected and the adjacent y-axis wiring;
In order to inspect continuity and short circuit of the wiring to be inspected, an inspection head unit having a plurality of power supply units for supplying an AC signal from each supply means and a plurality of power detection units for detecting an electrical signal from the wiring When,
Moving means for moving the inspection head portion on the surface of the inspection object in a predetermined axial direction;
Connection means for electrically connecting the plurality of power feeding sections of the inspection head section, the plurality of power detection sections, and the first to third signal supply means;
One end of the plurality of x-axis wirings and one end of the plurality of y-axis wirings are arranged in a non-contact manner, and one end of the first signal supply unit and one end of the second signal supply unit are electrically connected, respectively. A common electrode part to be connected to each other,
On the basis of the detection signal from the inspection head unit, it has a determination means for performing continuity and short circuit inspection of each of the x-axis wiring and the y-axis wiring
The inspection head portion is
A first feeding unit that is disposed in a non-contact manner on the other end of the x-axis wiring to be inspected, and is electrically connected to the other end of the first signal supply unit,
In order to detect an electrical signal of the x-axis wiring to be inspected, a first voltage detection unit arranged in a non-contact manner on the x-axis wiring;
A plurality of second power feeding portions that are arranged in a non-contact manner at the other end portions of the plurality of y-axis wirings and are electrically connected to the other end of the second signal supply means or one end of the third signal supply means; ,
A plurality of second voltage detectors arranged in a non-contact manner on each of the plurality of y-axis wires and detecting an electric signal caused by an AC signal supplied from the second signal supply unit and / or the third signal supply unit And
A third power feeding unit that is electrically connected to the other end of the third signal supply means and arranged in a non-contact manner with the x-axis wiring to be inspected;
A touch panel inspection apparatus comprising:   2. The touch panel inspection apparatus according to claim 1, wherein the AC signals supplied from the second signal supply means to the plurality of second power feeding units are AC signals having different frequencies.   3. The touch panel inspection apparatus according to claim 1, wherein all of the AC signals supplied by the first to third signal supply means are AC signals having different frequencies. The touch panel inspection apparatus according to claim 1, wherein the moving unit moves in a y-axis direction in which the y-axis wiring extends.

Images