JP2010258035A - Substrate processing equipment - Google Patents

Abstract

An object of the present invention is to provide a processing apparatus capable of correcting downward deflection of a pair of upper and lower air knives.
A gas is injected onto the upper surface of the substrate at a predetermined inclination angle, an upper air knife having an upper hook provided in the middle in the longitudinal direction, and a gas is injected onto the lower surface of the substrate at a predetermined inclination angle. The lower air knife 8 provided with a lower hook in the middle in the longitudinal direction, the upper support member 25 and the lower support member 26 provided in parallel above the upper air knife and below the lower air knife, and the upper support member A suspension member 27 having an upper locking portion 29 provided at the lower end of the upper hook 31 so as to be swingable is provided at a midway portion in the longitudinal direction so as to be positioned in a vertical direction, and a midway portion in the longitudinal direction of the lower support member. There is provided a push-up member 32 having a lower locking portion 34 which is provided so as to be positioned in the vertical direction and engages with a lower hook 35 in a swingable manner at the upper end.
[Selection] Figure 4

Description

  The present invention relates to a substrate processing apparatus for drying a processing liquid adhering to a cleaned substrate by a gas sprayed from an air knife.

  For example, in a manufacturing process of a liquid crystal display device or a semiconductor device, a resist is applied to a substrate such as a glass substrate or a semiconductor wafer which is a processing target of these devices, and this substrate is developed and then etched. A circuit pattern is precisely formed on the surface. When the circuit pattern is formed on the substrate, a cleaning process is performed in which organic substances such as a resist film and a resist residue adhering to the surface of the substrate are removed with a cleaning liquid.

  If the cleaning liquid remains on the cleaned substrate, it may cause dirt such as a water mark. Therefore, a drying process is performed in which a gas is sprayed from the air knife onto the upper and lower surfaces of the substrate cleaned with the cleaning liquid to remove the cleaning liquid remaining on the substrate.

  In the drying process, the substrate is transported horizontally into the chamber of the processing apparatus, a gas is jetted onto the upper and lower surfaces of the substrate by a pair of upper and lower air knives, and the cleaning liquid adhering to the substrate is removed by the gas.

  When a substrate is dried using a pair of air knives, it is required that the substrate surface of the substrate be uniformly and efficiently and reliably dried. Therefore, it is important to accurately and uniformly set the distance between the pair of upper and lower air knives and the plate surface of the substrate over the entire length in the longitudinal direction of the air knives.

  Recently, the size of the substrate tends to increase. In this case, since the air knife needs to be longer than the width dimension of the substrate, for example, an air knife having a length of 3 m or more may be used. When the lengthened air knife is installed in the chamber along the direction intersecting the substrate transport direction, the air knife above the substrate is bent downward by its own weight, and the middle part in the longitudinal direction is compared with the both ends. You will be approaching the top surface. Similarly, the lower air knife is bent downward by its own weight, so that the midway portion in the longitudinal direction is more spaced from the lower surface of the substrate than both ends.

  In this way, if the spacing between the air knife and the upper and lower surfaces of the substrate is non-uniform, the gas velocity received by the substrate surface in the longitudinal direction of the air knife will not be constant. It may be impossible to perform a uniform drying process.

  Therefore, the air knife is made of a thick material having rigidity that does not cause bending due to its own weight. However, in that case, since the air knife becomes heavier, handling such as assembling work becomes inconvenient, and the air knife is expensive because it uses an expensive material such as stainless steel.

  Therefore, even if the air knife is elongated as shown in Patent Document 1, it has been proposed to prevent bending without increasing the rigidity of the air knife itself. That is, as shown in FIG. 8 of Patent Document 1, a support tool is attached to a midway portion of the air knife in the longitudinal direction, and one end of a connecting member is connected to the support tool. The other end of the connecting member is connected to an air supply pipe arranged in parallel with the air knife. The air supply pipe and the air knife are connected by a tube so that gas can be supplied to the air knife.

JP 2006-245328 A

  According to the air knife support structure disclosed in Patent Document 1, the support member attached to the air knife is connected and fixed to one end of the connecting member, and the other end of the connecting member is connected and fixed to the air supply pipe. . Therefore, when the air supply pipe is bent, the air knife cannot be absorbed, and the air knife may be bent together with the air supply pipe.

  Further, the air knife is required to adjust the height and the inclination angle with respect to the plate surface of the substrate. However, as shown in Patent Document 1, in order to prevent the air knife from being bent, the air knife is attached to a support that is connected and fixed to the air supply pipe via the connecting member. Sometimes the height and tilt of the knife cannot be adjusted.

  The present invention makes it possible to prevent bending without increasing the rigidity of the air knife, and to adjust the height and inclination of the air knife with respect to the plate surface of the substrate. It is in providing a processing apparatus.

The present invention is a processing apparatus for injecting gas onto the upper and lower surfaces of a substrate that is horizontally transported in a chamber to dry the substrate,
An upper air knife disposed opposite to the upper surface of the substrate conveyed in the chamber and injecting a gas at a predetermined inclination angle on the upper surface of the substrate; and an upper air knife provided with an upper hook in the middle in the longitudinal direction;
A lower air knife disposed opposite to the lower surface of the substrate and injecting a gas at a predetermined inclination angle to the lower surface of the substrate, and having a lower hook provided in the middle in the longitudinal direction,
An upper support member and a lower support member provided in parallel above and in the same direction as each air knife above the upper air knife and below the lower air knife;
A suspension member having an upper locking portion that is provided at a lower end of the upper support member so as to be positioned in a vertical direction and engages the upper hook in a swingable manner.
And a push-up member provided at an upper end of the lower support member so as to be positioned in a vertical direction and having a lower locking portion with which the lower hook is swingably engaged. In the processing device.

The upper locking portion and the lower locking portion are cylindrical,
It is preferable that one end of the upper hook and the lower hook is fixed to the upper air knife and the lower air knife, and the other end is formed in a hook portion that engages with the upper locking portion and the lower locking portion, respectively.

One end and the other end in the longitudinal direction of the upper air knife and the lower air knife are attached to the middle part of the connecting member in the vertical direction so that the tilt angle and the vertical direction can be positioned respectively.
It is preferable that one end and the other end in the longitudinal direction of the upper support member and the lower support member are connected and fixed to the upper end and the lower end of the pair of connection members, respectively.

  It is preferable that a plurality of the suspending members and the push-up members are provided in the middle in the longitudinal direction of the upper support member and the lower support member.

  According to this invention, the upper hook provided on the upper air knife is swingably engaged with the upper locking portion of the suspension member, and can be positioned in the vertical direction with respect to the upper support member. In addition to preventing the upper air knife from bending downward, the angle of the upper air knife relative to the plate surface of the substrate and the positioning in the vertical direction can be adjusted.

  In addition, the lower hook provided on the lower air knife is swingably engaged with the lower locking portion of the push-up member, and can be positioned in the vertical direction with respect to the lower support member. Not only can it be prevented from bending downward, but also the angle of the lower air knife with respect to the plate surface of the substrate and the positioning in the vertical direction can be adjusted.

The longitudinal cross-sectional view which follows the longitudinal direction of the chamber which shows one Embodiment of this invention. The front view which abbreviate | omitted a part of air knife unit. The perspective view of the one end part of an air knife unit. The side view which shows the mechanism which prevents the bending of an upper air knife and a lower air knife. The graph which measured the deflection of the upper air knife. The graph which measured the bending of the lower air knife. (A) is the graph which measured the wind speed of the gas on the board | substrate when the bending of an upper air knife is not corrected, (b) measured the wind speed of the gas on a board | substrate when the bending of an upper air knife was corrected. Graph, (c) is a diagram showing conditions when measuring the wind speed on the substrate.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a longitudinal sectional view of the substrate processing apparatus along the longitudinal direction. The processing apparatus includes a chamber 1. In the chamber 1, a plurality of transport rollers 2 that are rotationally driven by a drive mechanism (not shown) are arranged at predetermined intervals along the longitudinal direction.

  An opening 3 is formed at one end of the chamber 1 in the longitudinal direction, and an opening 4 is formed at the other end. The substrate W cleaned in the previous step is supplied from the carry-in port 3 into the chamber 1. The substrate W supplied into the chamber 1 is horizontally transported in the direction indicated by the arrow by the transport roller 2 and unloaded from the transport outlet 4. Then, while the substrate W is transported through the chamber 1, a drying process is performed in which the cleaning liquid adhering to the upper and lower surfaces is removed by the air knife unit 6.

  2 and 3, the air knife unit 6 has an upper air knife 7 and a lower air knife 8 in which gas ejection holes 7a, 8a are formed on the front end surface over almost the entire length in the longitudinal direction. Each of these air knives 7 and 8 is formed by superposing two plate materials having corrosion resistance such as stainless steel plates.

  As shown in FIG. 3, each air knife 7, 8 has a rectangular plate-like height in which a pair of long holes 11 are formed at one end in the width direction on one side and the other side in the longitudinal direction (only one is shown). The height adjusting member 12 is connected by a pair of mounting screws 13 through the elongated hole 11.

  A plurality of gas supplies connected to a gas supply section for supplying a gas such as compressed air ejected from the ejection holes 7a and 8a to the side surfaces of the air knives 7 and 8 via tubes (both not shown). Mouth bodies 7b and 8b are provided.

  A protruding portion 14 is provided at one end of the height adjusting member 12 in the width direction. The protrusion 14 is pressed by a height adjusting screw 16 screwed into a mounting piece 15 provided on the rear end face of each of the air knives 7 and 8.

  If the protrusion 14 is pressed by the height adjusting screw 16 in a state where the pair of mounting screws 13 are loosened, the air knives 7 and 8 are moved in the height direction of the side surfaces with respect to the height adjusting member 12. That is, it can be moved along the vertical direction.

  The end surface of the band plate-shaped angle adjusting member 18 is attached and fixed to the other end in the width direction of the height adjusting member 12 by a pair of set screws 19. One end of the angle adjusting member 18 protrudes from the front end surface of each air knife 7, 8. One end portions of the pair of angle adjusting members 18 are overlapped, and the overlapped portion can be rotated by an angle adjusting screw 22 in the middle portion of the connecting member 21 having a U-shaped side surface and fixed at a predetermined rotation angle. Is attached.

  Therefore, the upper air knife 7 and the lower air knife 8 can be angle-adjusted with respect to the connecting member 21 by the angle adjusting screw 22 through the angle adjusting member 18 and the height adjusting member 12 through the height adjusting member 12. The height can be adjusted by the height adjusting screw 16.

  As shown in FIG. 2, the upper side of the pair of connecting members 21 provided at one end and the other end in the longitudinal direction of the upper air knife 7 and the lower air knife 8 and the other end in the longitudinal direction of the upper support member 25 and the like. One end and the other end in the longitudinal direction of the lower support member 26 are attached and fixed to the lower side.

  The upper support member 25 and the lower support member 26 are formed of members having a shape that is relatively difficult to bend with respect to a load, for example, an angle member. Suspension members 27 made of bolts are provided at two locations along the longitudinal direction of the upper support member 25.

  As shown in FIG. 4, a pair of fixing nuts 28 are screwed into the middle of the suspension member 27 with one side of the upper support member 25 interposed therebetween. Accordingly, the suspension member 27 can be positioned and adjusted with respect to the upper support member 25 in the vertical direction.

  A columnar upper locking portion 29 is provided at the lower end of the suspension member 27 with its axis line orthogonal to the axis line of the suspension member 27.

  An L-shaped flange formed on the other end of the upper hook 31 having one end attached and fixed to the rear end surface of the midway in the longitudinal direction of the upper air knife 7 on the arc-shaped outer peripheral surface of the upper locking portion 29 31a is engaged. That is, the collar portion 31 a is engaged with the upper locking portion 29 so as to be swingable. A groove 31b is formed in the flange 31a, and the suspension member 27 is passed through the groove 31a.

  Accordingly, if the vertical position of the suspension member 27 with respect to the upper support member 25 is adjusted by a pair of fixing nuts 28, the upper locking portion 29 provided at the lower end of the suspension member 27 and the upper portion The downward bending of the upper air knife 7 can be removed by engagement with the upper hook 31 provided on the air knife 7.

  When the angle of the upper air knife 7 is adjusted by loosening the angle adjusting screw 22 and rotating the angle adjusting member 18, the hook portion 31 a of the upper hook 31 is locked to the upper position in accordance with the rotation of the upper air knife 7. Since it swings in the direction intersecting the longitudinal direction of the upper air knife 7 with respect to the part 29, the angle of the upper air knife 7 can be changed.

  As shown in FIG. 2, push-up members 32 made of bolts are provided at two locations along the longitudinal direction of the lower support member 26. As shown in FIG. 4, a pair of fixing nuts 33 are screwed into the middle portion of the push-up member 32 with one side of the lower support member 26 interposed therebetween. Accordingly, the push-up member 32 can be adjusted in the vertical direction with respect to the lower support member 26.

  A cylindrical lower locking portion 34 is provided at the upper end of the push-up member 32 so that its axis is orthogonal to the axis of the push-up member 32. An L-shaped hook formed on the other end of the lower hook 35 having one end attached and fixed to the rear end surface of the middle part in the longitudinal direction of the lower air knife 8 is formed on the arc-shaped outer peripheral surface of the lower locking portion 34. The part 35a is engaged. That is, the flange 35a is engaged with the lower locking portion 34 so as to be swingable in a direction intersecting with the longitudinal direction of the lower air knife 8.

  Accordingly, if the vertical position of the push-up member 32 with respect to the lower support member 26 is adjusted by a pair of fixing nuts 33, a lower locking portion 34 provided at the upper end of the push-up member 32 and the lower air knife The downward bending of the lower air knife 8 can be removed by the engagement with the lower hook 35 provided on the lower part 8.

  Further, when the angle adjustment screw 22 screwed to the connecting member 21 is loosened and the angle adjustment member 18 is rotated to adjust the angle of the lower air knife 8, the lower hook is adjusted in accordance with the rotation of the lower air knife 8. Since the 35 flange portions 35a swing with respect to the lower locking portion 34, the angle of the lower air knife 8 can be changed.

  The upper air knife 7, the lower air knife 8, the upper support member 25 and the lower support member 26 are integrated by a pair of connecting members 21 provided at both ends of the pair of air knives 7, 8. It is unit 6.

  The air knife unit 6 configured as described above is incorporated in the chamber 1. That is, as shown in the figure, L-shaped support members 37 extend the front end of the horizontal portion to the outside of both ends in the width direction in the direction intersecting the transport direction of the substrate W of the chamber 1. 1 is provided in a protruding manner.

  The lower end of the vertical portion of the support member 37 is fixed to a fixing portion 38 such as a gantry on which the chamber 1 is placed. And the attachment part 21a provided in the outer surface of the intermediate part of the connection member 21 of the said air knife unit 6 is connected and fixed to the front-end | tip part of the horizontal part of a pair of left and right support members 37.

  The pair of upper and lower air knives 7 and 8 of the air knife unit 6 has a predetermined angle, for example, an angle of 55 degrees, with respect to the vertical direction so that these ejection holes 7a and 8a face the upstream side in the transport direction of the substrate W. And is inclined at a predetermined angle with respect to a horizontal direction parallel to the width direction orthogonal to the transport direction of the substrate W. That is, it is inclined with respect to the flower direction of the substrate W. Further, the pair of upper and lower air knives 7 and 8 are attached and fixed to the pair of support members 37 such that the substrate W passes through a front end surface where the ejection holes 7a and 8a are opened. .

  According to the processing apparatus configured in this manner, if the upper air knife 7 and the lower air knife 8 are formed without using thick plate materials, sufficient rigidity cannot be obtained. The lower air knife 8 tries to bend obliquely downward as indicated by an arrow D1, and the lower air knife 8 attempts to bend obliquely downward as indicated by an arrow D2 in FIG.

  However, the upper air knife 7 is provided with upper hooks 31 at two locations in the middle in the longitudinal direction, and these upper hooks 31 are swingably engaged with an upper locking portion 29 provided at the lower end of the suspension member 27. is doing. Therefore, the upper air knife 7 is prevented from being bent toward the oblique lowering indicated by the arrow D1 by the engagement of the upper hook 31 and the upper locking portion 29.

  Since the suspension member 27 is attached to the upper support member 25, the weight of the upper air knife 7 is added to the upper support member 25 via the suspension member 27. 7 may be bent.

  However, since the hanging member 27 can be adjusted in the vertical mounting position with respect to the upper support member 25, when the upper support member 25 is bent downward, the hanging member 27 correspondingly. If the attachment position of 27 to the upper support member 25 is shifted upward, the deflection of the upper air knife 7 can be removed.

  The upper air knife 7 is bent obliquely downward as indicated by an arrow D1. On the other hand, the suspension member 27 moves up and down in the vertical direction. However, the flange portion 31 a of the upper hook 31 provided on the upper air knife 7 is engaged with the upper locking portion 29 provided on the lower end of the suspension member 27 so as to be swingable.

  Therefore, even if the upward direction of the suspending member 27 is not the same as the reverse direction where the upward direction of the suspending member 27 is collinear with respect to the bending direction D1 of the upper air knife 7, the suspending member 27 is adjusted according to the amount of bending of the upper air knife 7. The upper air knife 7 can be surely removed from the bending.

  Moreover, when changing the inclination angle of the upper air knife 7 with respect to the plate surface of the substrate W by changing the attachment angle of the angle adjusting member 18 with respect to the connecting member 21, the flange 31 a of the upper hook 31 provided on the upper air knife 7 is provided. Since it swings with respect to the upper locking portion 29 provided at the lower end of the suspension member 27, the angle can be changed reliably.

  That is, in order to remove the bending of the upper air knife 7, it is not necessary to connect and fix the upper hook 31 provided on the upper air knife 7 and the upper support member 25 as in the prior art. Therefore, it is possible not only to remove the deflection of the upper air knife 7 by adjusting the attachment position of the suspension member 27 with respect to the upper support member 25, but also to set the angle of the upper air knife 7.

  Similar to the upper air knife 7, lower hooks 35 are provided at two locations along the longitudinal direction of the lower air knife 8, and these lower hooks 35 are attached to a lower locking portion 34 provided at the upper end of the push-up member 32. It is engaged so that it can swing.

  Therefore, even if the lower air knife 8 bends obliquely downward as indicated by the arrow D2, if the push-up member 32 is lifted in the vertical direction and positioned according to the amount of bending, the lower air knife 8 is removed from the oblique downward deflection. can do. In addition, since the lower hook 35 is swingably engaged with the lower locking portion 34 provided at the upper end of the push-up member 32, the angle of the lower air nozzle 8 can also be set.

  In the graph of FIG. 5, the broken line A is a graph obtained by measuring the amount of deflection when the upper air knife 7 is not supported by the suspension member 27, and the broken line B is a single suspended portion in the longitudinal direction of the upper air knife 7. It is the graph which measured the amount of bending when it supports with the lowering member 27, and the broken line C is a graph which measured the amount of bending when the longitudinal direction middle part is supported with the two hanging members 27. In addition, the vertical axis | shaft of the graph of FIG. 5 is a deflection amount (mm), and a horizontal axis shows the position which divided the longitudinal direction of the air knife 7 into 11 equal parts.

  As is apparent from the graphs A to C, it is understood that the amount of deflection is greatly reduced by supporting the upper air knife 7 with the suspension member 27. The upper air knife 7 has a length of 3 m and is made of a stainless steel plate.

  In the graph of FIG. 6, the broken line D is a graph obtained by measuring the amount of bending when the lower air knife 8 is not supported by the push-up member 32, and the broken line E is a push-up member that is located in the middle in the longitudinal direction of the lower air knife 8. It is the graph which measured the amount of bending when it supports by 32, and the broken line F is the graph which measured the amount of bending when the longitudinal direction middle part was supported by two pushing-up members 32.

  As is apparent from the graphs D to F, it is understood that the amount of deflection is greatly reduced by supporting the lower air knife 8 with the push-up member 32. The lower air knife 8 has a length of 3 m and is made of a stainless steel plate, like the upper air knife 7. The vertical axis of the graph in FIG. 6 is the amount of deflection (mm), and the horizontal axis indicates the position obtained by dividing the longitudinal direction of the air knife 7 into 11 equal parts.

  Note that the lower air knife 8 and the upper air knife 7 are deflected in the direction opposite to the upper air knife 7 with respect to the transport direction of the substrate W as indicated by D1 and D2 in FIG. Therefore, the downward deflection amount of the upper air knife 7 is indicated by minus, and the downward deflection amount of the lower air knife 8 is indicated by plus.

  FIG. 7A shows the gas velocity on the plate surface of the substrate W when the compressed air is supplied to the upper air knife 7 at 3000 NL / min without correcting the deflection of the upper air knife 7 in 38 positions in the longitudinal direction. It is the graph measured by. As shown in FIG. 7C, the upper air knife 7 has an inclination angle θ of 55 degrees with respect to the plate surface of the substrate W, and a distance d between the lower end of the center of the upper air knife 7 in the longitudinal direction and the plate surface of the substrate W. Was arranged to be 5 mm.

  That is, when the deflection of the upper air knife 7 is not corrected, the distance from the tip to the substrate W is 5 mm at the longitudinal center of the upper air knife 7, but the distance increases toward both ends. That is, the distance between the tip of the upper air knife 7 and the upper surface of the substrate W is not constant.

  If the distance between the tip of the upper air knife 7 and the upper surface of the substrate W is not constant, the flow velocity of the gas on the upper surface of the substrate W in the longitudinal direction of the upper air knife 7 as shown in FIG. A difference occurs depending on the distance between the tip of 7 and the substrate W. That is, the flow velocity decreases as the distance increases. As a result, the drying process in the width direction of the substrate W cannot be performed uniformly, and thus drying unevenness occurs.

  FIG. 7B corrects the deflection of the upper air knife 7 and measures the gas velocity on the plate surface of the substrate W at 38 points in the longitudinal direction when compressed gas is supplied to the upper air knife 7 at 3000 NL / min. It is a graph. The arrangement of the upper air knife 7 with respect to the plate surface of the substrate W is set so as to be inclined at an angle of 55 as shown in FIG. 7C and the distance between the tip and the upper surface of the substrate W is 5 mm at the center in the longitudinal direction. did.

  As can be seen from FIG. 7B, when the deflection of the upper air knife 7 is corrected, there is almost no difference in the gas flow velocity on the upper surface of the substrate W in the longitudinal direction of the upper air knife 7. As a result, the drying process in the width direction of the substrate W is uniformly performed, so that drying unevenness does not occur.

  In the graphs of FIGS. 7A and 7B, the vertical axis represents the wind speed on the upper surface of the substrate W, and the horizontal axis represents the measurement position in the longitudinal direction of the upper air knife 7.

  In the embodiment described above, two portions in the longitudinal direction of the upper and lower air knives are held by the suspension member and the push-up member. However, the locations where each air knife is held are limited to two. Of course, there may be one or three or more locations.

  DESCRIPTION OF SYMBOLS 1 ... Chamber, 6 ... Air knife unit, 7 ... Upper air knife, 8 ... Lower air knife, 12 ... Height adjustment member, 16 ... Height adjustment screw, 18 ... Angle adjustment member, 25 ... Upper support member, 26 ... Stock support member, 27 ... suspension member, 29 ... upper locking part, 31 ... upper hook, 32 ... push-up member, 34 ... lower locking part, 35 ... lower hook, support member.

Claims (4)

A processing apparatus for injecting gas onto the upper and lower surfaces of a substrate that is horizontally conveyed in a chamber to dry the substrate
An upper air knife disposed opposite to the upper surface of the substrate conveyed in the chamber and injecting a gas at a predetermined inclination angle on the upper surface of the substrate; and an upper air knife provided with an upper hook in the middle in the longitudinal direction;
A lower air knife disposed opposite to the lower surface of the substrate and injecting a gas at a predetermined inclination angle to the lower surface of the substrate, and having a lower hook provided in the middle in the longitudinal direction,
An upper support member and a lower support member provided in parallel above and in the same direction as each air knife above the upper air knife and below the lower air knife;
A suspension member having an upper locking portion that is provided at a lower end of the upper support member so as to be positioned in a vertical direction and engages the upper hook in a swingable manner.
And a push-up member provided at an upper end of the lower support member so as to be positioned in a vertical direction and having a lower locking portion with which the lower hook is swingably engaged. Processing equipment. The upper locking portion and the lower locking portion are cylindrical,
The upper hook and the lower hook have one end fixed to the upper air knife and the lower air knife, respectively, and the other end is formed in a hook portion that engages with the upper locking portion and the lower locking portion, respectively. The substrate processing apparatus according to claim 1. One end and the other end in the longitudinal direction of the upper air knife and the lower air knife are attached to the middle part of the connecting member in the vertical direction so that the tilt angle and the vertical direction can be positioned respectively.
2. The substrate processing apparatus according to claim 1, wherein one end and the other end in the longitudinal direction of the upper support member and the lower support member are connected and fixed to an upper end and a lower end of the pair of connecting members, respectively. .   The substrate processing apparatus according to claim 1, wherein a plurality of the suspension members and push-up members are provided in a middle portion in the longitudinal direction of the upper support member and the lower support member.

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