JP2010114280A - Substrate heating plate heater - Google Patents

Abstract

[PROBLEMS] To secure rigidity at high temperature even without using a support plate made of aluminum, there is no warping or bending at high temperature, and various characteristics (excellent corrosion resistance) as an aluminum support plate A substrate heating plate heater that can satisfy an insulating film (so-called alumite treatment) is obtained.
A substrate heating plate heater includes a support plate 1 made of a metal plate and a heater wire 3 embedded in the support plate 1. A reinforcing member 4 having higher rigidity than the supporting plate 1 is embedded in the supporting plate 1 along the heater wire 3, and the reinforcing member 4 is covered with a lid 7 made of the same material as the supporting plate 1.
[Selection] Figure 3

Description

  In the present invention, a thin film pattern is formed on a substrate such as a semiconductor wafer, or the substrate is etched on the substrate, and further, a thin film is formed on a substrate such as a glass substrate by means such as chemical vapor deposition (CVD). The present invention relates to a substrate heating plate heater that places and heats a substrate in the step of forming the substrate.

For example, a semiconductor product is manufactured through a process of applying a photomask or the like on a substrate such as a semiconductor wafer to form a thin film pattern such as an electrode pattern or etching a thin film into a predetermined pattern. An electrode pattern made of a transparent conductive film or the like formed on a transparent substrate used in a display device or the like is formed by means such as a chemical vapor deposition method such as a so-called plasma CVD method.
In the process of manufacturing a substrate for these electronic devices, in most cases, the substrate is heated to a predetermined temperature. A substrate heating plate heater is used to heat the substrate while it is mounted.

  Conventionally, a substrate heating plate heater used for heating such a substrate has a heater wire such as a sheathed heater embedded in a metal support plate such as stainless steel or aluminum having good thermal conductivity, and the heater wire generates heat. In many cases, the support plate is heated by the above-described method, and the substrate placed thereon is heated. In particular, a substrate heating plate heater using an aluminum support plate has a small heat capacity of the support plate, and thus has excellent temperature responsiveness, a short heating and cooling time, and easy temperature control. Further, by anodizing the surface, the substrate surface can be insulated and the corrosion resistance can be increased.

  The substrate heating temperature by the substrate heating plate heater is determined by the film forming temperature of the thin film pattern, photoresist, etc., but a high heating temperature of 400 ° C. or higher is often required. In a conventional substrate heating plate heater using an aluminum support plate, sufficient rigidity of the support can be secured at a temperature of 400 ° C. or lower. However, when the heating temperature exceeds 400 ° C., the support plate made of aluminum has a drawback that the rigidity is lowered and it is easy to bend.

  Therefore, when the heating temperature is high and insulation is required, it is necessary to use a substrate heating plate heater using a support plate made of ceramic having higher rigidity than aluminum or ceramic sprayed stainless steel. However, they are expensive, and the stainless steel support plate has a larger heat capacity than the aluminum support plate, so the temperature uniformity is lower than the substrate heating plate heater using the aluminum support plate. Responsiveness is poor and cost is high. Further, the time for heating to a predetermined temperature and the cooling from the predetermined temperature to room temperature becomes long, and the temperature control is not easy.

JP 2007-184289 A JP 2007-184288 A JP 2005-123000 A JP 2005-122999 A JP 2004-193114 A Japanese Patent Laid-Open No. 11-40330

  In view of the above-described problems of conventional substrate heating plate heaters, the present invention ensures rigidity at high temperatures, and does not warp or bend at high temperatures, even when using an aluminum support plate. It is an object of the present invention to provide a substrate heating plate heater that can satisfy various characteristics as a support plate made of aluminum that can be easily anodized.

  In the present invention, in order to achieve the above object, a reinforcing member 4 having rigidity higher than that of the supporting plate 1 is embedded in the aluminum supporting plate 1 together with the heater wire 3, and the reinforcing member 4 is the same as the supporting plate 1. The reinforcing member 4 is prevented from being exposed on the surface of the support plate 1 by being covered with the cover 7 made of material.

  That is, the substrate heating plate heater according to the present invention includes a support plate 1 made of a metal plate and a heater wire 3 embedded in the support plate 1, and the support plate 1 extends along the heater wire 3. A reinforcing member 4 having higher rigidity than that of the support plate 1 is embedded, and the reinforcing member 4 is covered with a lid 7 made of the same material as that of the support plate 1.

  In the substrate heating plate heater having such a feature, since the reinforcing member 4 having rigidity higher than that of the supporting plate 1 is embedded in the supporting plate 1 along the heater wire 3, the supporting plate 1 becomes high temperature and has rigidity. Even if it falls, it is reinforced by the reinforcing member 4 and the rigidity at high temperature can be secured. In addition, since the reinforcing member 4 is covered with the lid 7 made of the same material as the support plate 1 and the reinforcing member 4 is not exposed on the surface of the support plate 1, any reinforcing member 4 can be used. In particular, when the surface of the support plate 1 is subjected to corrosion resistance treatment, the entire surface of the support plate 1 can be uniformly treated, so that a material suitable for alumite treatment can be selected and has good corrosion resistance. The surface can be obtained by easy means.

  It is preferable that the lid body 7 covers a portion of the support plate 1 where the heater wire 3 and the reinforcing member 4 are embedded, and a joint portion between the lid body 7 and the support plate 1 is integrated. For example, the lid 7 is preferably welded to the support plate 1 by friction stir welding. As a result, there is no discontinuity between the support plate 1 and the lid 7, and there is no partial corrosion of the joint portion at high temperatures due to the corrosion resistance treatment, and a substrate heating plate heater excellent in corrosion resistance such as alumite treatment is obtained. It is done.

  As described above, according to the present invention, a substrate heating plate heater having high rigidity even at high temperatures can be obtained. In addition, since the reinforcing member 4 does not appear on the surface of the support plate 1 and the surface of the support plate 1 can be uniformly treated, a good insulating surface such as alumite treatment can be formed and excellent in corrosion resistance. A substrate heating plate heater can be obtained.

In the present invention, a reinforcing member 4 having rigidity higher than that of the supporting plate 1 is embedded in the aluminum supporting plate 1 together with the heater wire 3, and the reinforcing member 4 is covered with a lid 7 made of the same material as the supporting plate 1. Thus, the reinforcing member 4 is prevented from being exposed on the surface of the support plate 1 and the above-described object is achieved.
Hereinafter, the best mode for carrying out the present invention will be described in detail.

FIG. 1 is a bottom view of a substrate heating plate heater according to an embodiment of the present invention, and FIG. 2 is a side view thereof.
The support plate 1 is made of a metal plate, and most preferably an aluminum alloy plate is used. For example, it is made of an aluminum alloy plate having a thickness of 50 mm.

As will be described later, the support plate 1 is subjected to surface oxidation treatment by means such as anodic oxidation in order to make the surface corrosion resistant, and alumite (oxide film such as Al ₂ O ₃ ) is formed on the surface. Therefore, as the support plate 1, an aluminum alloy suitable for surface treatment such as anodization is used. For example, as an international aluminum alloy name, an Al-Mg alloy of the 5000 series, an Al-Mg-Si alloy of the 6000 series, etc. are used.

  For the purpose of reducing the thickness and weight while maintaining the required rigidity of the support plate 1, ribs 2 are formed on the back surface thereof and concave portions 9 are formed between the ribs as shown in FIG. 1. Further, a cylindrical lead wire drawing tube portion 6 is erected at the center of the back surface of the support plate 1.

  A heater wire 3 is wired in the support plate 1, and a lead wire of the heater wire 3 is drawn from the lead wire lead-out cylinder portion 6 to the power supply side. The wiring pattern of the heater wire 3 is, for example, as shown in FIG. 1, which is designed and embedded in a pattern in which the heating temperature of the support plate 1 is as uniform as possible over the entire surface. Although the heat radiation amount of the support plate 1 is larger in the peripheral portion than in the central portion, for example, when the lead wire drawing cylinder portion 6 as described above is erected in the central portion, there is also heat radiation from there. A wiring pattern of the heater wire 3 is employed so that the heater wire 3 is wired so that these balances are balanced, so that the uniformity of the temperature distribution of the heat sink 1 can be obtained.

  The heater wire 3 is composed of, for example, a sheathed heater, and a heating wire made of a high melting point metal such as tungsten, nichrome, or tantalum is housed in a metal cylindrical sheath, and this is an inorganic material made of magnesia powder or the like filled in the sheath. Insulated with insulating material. The sheath of the sheathed heater is generally made of stainless steel. However, when the support plate 1 is made of an aluminum alloy as described above, it is preferable to use a similar aluminum alloy for the sheath. Thereby, the thermal stress by the difference in the thermal expansion coefficient of the support plate 1 and the heater wire 3 can be reduced, and the curvature and bending of the support plate 1 by a thermal strain can be reduced.

  FIG. 3 shows a cross section of a portion of the support plate 1 where the heater wire 3 is embedded. As shown in FIG. 3, a lid groove 12 is provided on the back surface of the support plate 1, a heater groove 11 is provided at the bottom of the lid groove 12, and the heater wire 3 is placed in the heater groove 11. To be embedded.

  The heater wire 3 is embedded in the support plate 1 by moving toward the back surface side of the support plate 1, that is, the surface side shown in FIG. In FIG. 3 showing a cross section of a portion of the support plate 1 where the heater wire 3 is embedded, a depth dimension d1 from the heating surface to the heater wire 3 and a depth dimension d2 from the back surface to the heater wire 3 are d1>. For example, d2 is set to about d1: d2 = 3: 2. Thereby, the temperature distribution on the surface side which is the heating surface of the support plate 1 can be made uniform. Further, in the case where a film forming process is performed by a plasma CVD method, the potential distribution during film formation on the surface side, which is the heating surface of the support plate 1, can be made uniform.

  A reinforcing member 4 for reinforcing the rigidity of the supporting plate 1 is embedded in the supporting plate 1 along the heater wire 3. As the reinforcing member 4, an aluminum alloy having higher rigidity than that of the support plate 1, for example, an Al-Mn alloy in the 3000 series as an international aluminum alloy name, or an aluminum alloy having relatively many components such as Si and Ni is used. To do. This is a long member having a rectangular cross section and the like, and is embedded in the groove along the straight portion of the heater wire 3. In the embodiment shown in FIG. 3, the reinforcing member 4 is embedded in the heater groove 11 together with the heater wire 3, so that the reinforcing member 4 is adjacent to the heater wire 3 along the straight portion of the support plate 1. It is buried inside.

  The lid body 7 is fitted into the lid groove 12 and fixed. The lid 7 is made of an aluminum alloy made of the same material as that of the support plate 1, and the length, width and thickness thereof correspond to the length, width and depth of the lid groove 12 on the back surface of the support plate 1. Therefore, the lid 7 is closely fitted in the lid groove 12 on the back surface of the support plate 1. The lid 7 is joined to the edge of the lid groove 12 by means such as welding. For example, the edges of the lid 7 and the lid groove 12 are welded by friction stir welding (FSW). In the friction stir welding, a cylindrical tool having a protrusion at the tip is rotated and pressed with a strong force to press against the joint between the support plate 1 and the cover 12 that are the base materials for joining the protrusion, thereby generating frictional heat. Is generated, and the base material is softened, and the joint portion between the support plate 1 and the lid 12 is integrated by plastic flow around the joint portion by the rotational force of the tool and kneading. Also called friction stir welding. Thereby, the junction part of the support plate 1 and the cover body 12 is joined so that there is no discontinuity. The joint between the support plate 1 and the lid 12 thus welded is polished as necessary to flatten the unevenness of the weld, and the support plate 1 and the lid 12 are flush with each other.

  In the friction stir welding, since the support plate 1 and the lid 12 are once melted, mixed, and integrated, there is no discontinuity at the joint. Further, in this friction stir welding, the heat input can be made extremely small and the penetration depth can be increased, so that it is optimal for joining the support plate 1 and the lid 12. There is also an advantage that it can be welded in the atmosphere.

Thereafter, the entire surface of the support plate 1 and the lid 7 is subjected to surface treatment to make it corrosion resistant. For example, a so-called alumite treatment in which the surface of an aluminum alloy forming the support plate 1 and the lid 7 is oxidized by electrolysis of water in a strong acid and coated with an oxide film is performed. Aluminum oxide is formed by electrochemically oxidizing the surfaces of the support plate 1 and the lid 7 by diluting sulfuric acid, oxalic acid, or the like, using the aluminum alloy forming the support plate 1 and the lid 7 as an anode. An oxide film of Al ₂ O ₃ is generated. As described above, for this surface treatment, the support plate 1 and the lid body 7 are made of Al-Mg alloy having an international aluminum alloy name suitable for surface treatment by anodization in the order of 5000 or Al-Mg in the order of 6000. An Mg—Si alloy or the like is used.

  FIG. 4 shows a cross section of a portion of the support plate 1 where the heater wire 3 is embedded, as in FIG. 3 described above for another embodiment of the present invention. In the embodiment shown in FIG. 4, the reinforcing member 4 is provided so as to cover the heater groove 11 in which the heater wire 3 is embedded, and the reinforcing member 4 is inserted into the lid groove 12. It is buried in the groove on the lower surface. Therefore, the reinforcing member 4 is disposed adjacent to the heater wire 3 and on the back side of the support plate 1 therefrom.

  FIG. 5 shows a cross section of a portion of the support plate 1 where the heater wire 3 is embedded, as in FIG. 3 described above for another embodiment of the present invention. In the embodiment shown in FIG. 5, reinforcing member grooves 13 and 13 are provided on both sides separately from the heater groove 11 in which the heater wire 3 is embedded, and the reinforcing member is provided in the reinforcing member grooves 13 and 13. 4 and 4 are buried. The reinforcing members 4 and 4 are slightly separated from the heater wire 3, but are arranged along the heater wire 3 at a position close to the heater wire 3. The reinforcing member 4 may be provided only on one side of the heater wire 3.

  According to the present invention, a thin film pattern is formed on a substrate such as a semiconductor wafer or the substrate is etched on a substrate such as a glass substrate by means of a chemical vapor deposition method (CVD method) or the like. In the step of forming a thin film, a substrate heating plate heater suitable for placing and heating the substrate can be provided.

It is a back view which shows the board | substrate heating plate heater by one Example of this invention. 1 is a side view illustrating a substrate heating plate heater according to an embodiment of the present invention. It is principal part sectional drawing which shows the cross section of the part by which the heater wire of the board | substrate heating plate heater support plate by one Example of this invention was embed | buried. It is principal part sectional drawing which shows the cross section of the part by which the heater wire of the board | substrate heating plate heater support plate by other Example of this invention was embed | buried. It is principal part sectional drawing which shows the cross section of the part by which the heater wire of the board | substrate heating plate heater support plate by other Example of this invention was embed | buried.

Explanation of symbols

1 Support Plate 3 Heater Wire 4 Reinforcing Member 7 Lid

Claims (3)

In a substrate heating plate heater having a support plate (1) made of a metal plate and a heater wire (3) embedded in the support plate (1), a heater wire (3 ), A reinforcing member (4) having a higher rigidity than that of the support plate (1) is embedded, and the reinforcing member (4) is covered with a lid (7) made of the same material as the support plate (1). A substrate heating plate heater characterized by. The lid (7) covers the portion of the support plate (1) where the heater wire (3) and the reinforcing member (4) are embedded, and the joint between the lid (7) and the support plate (1) is integrated. The substrate heating plate heater according to claim 1, wherein the substrate heating plate heater is formed. The substrate heating plate heater according to claim 1 or 2, wherein the lid (7) is welded to the support plate (1) by friction stir welding.

Images