JP2010101778A

JP2010101778A - Pressure sensor and manufacturing method therefor

Info

Publication number: JP2010101778A
Application number: JP2008274063A
Authority: JP
Inventors: Hiroki Matsui; 宏樹松井
Original assignee: Denso Corp
Current assignee: Denso Corp
Priority date: 2008-10-24
Filing date: 2008-10-24
Publication date: 2010-05-06

Abstract

<P>PROBLEM TO BE SOLVED: To constitute a case by a single member, which includes both a caulking part for fixing with a connector part by caulking, and a sealing surface for applying a metal touch seal with a seating surface of a mounting hole in a wall surface for housing a medium that reaches the pressure to be measured. <P>SOLUTION: The case 1 is constituted of a high-strength material. The material strength of a rear end part 12 of the case 1, in other words, the caulking part 12a for fixing the connector part 2, is lowered to be changed into a low-strength material by an annealing or decarburization treatment. It is thereby possible to use a low-strength material for the caulking part 12a, while using a high-strength material for a part from a screw part 13 to the sealing surface 14. Hence the case 1, which includes both the caulking part 12a for fixing with the connector part 2 can be constituted by a single member, by caulking and the sealing surface 14 for applying the metal touch seal with the seating surface of the mounting hole in the wall surface for housing the medium to be pressure to be measured. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、一面が被測定圧力を受ける受圧面となっている圧力センサに関するものであり、エンジンヘッドに取りつけエンジンの燃焼室内の圧力を測定するために用いられる圧力センサ（燃焼圧センサ）に適用すると好適である。 The present invention relates to a pressure sensor having a pressure-receiving surface that receives a pressure to be measured, and is applied to a pressure sensor (combustion pressure sensor) that is attached to an engine head and used to measure the pressure in the combustion chamber of the engine. It is preferable.

従来より、例えばエンジンヘッドに搭載され、エンジンの燃焼室内の圧力（気筒の圧力）を検出する圧力センサとして、例えば特許文献１に示されるものがある。この特許文献１に開示された圧力センサでは、ケースの一端部に、一面が被測定圧力を受ける受圧面となっている受圧用ダイアフラムが設けられ、受圧用ダイアフラムがその受圧面に被測定圧力を受けて歪むと、その歪が圧力伝達部材を介して感歪素子を備えたセンサチップに伝えられるように構成されている。このため、被測定圧力の大きさに応じた応力がセンサチップに伝わり、それにより生じる感歪素子の出力変化に基づいて被測定圧力を検出するようになっている。 2. Description of the Related Art Conventionally, for example, Patent Document 1 discloses a pressure sensor that is mounted on an engine head and detects a pressure (cylinder pressure) in a combustion chamber of an engine. In the pressure sensor disclosed in Patent Document 1, a pressure receiving diaphragm having one surface serving as a pressure receiving surface for receiving the pressure to be measured is provided at one end of the case, and the pressure receiving diaphragm provides the pressure to be measured to the pressure receiving surface. When it receives and distorts, it is comprised so that the distortion may be transmitted to the sensor chip provided with the strain sensitive element via a pressure transmission member. For this reason, the stress according to the magnitude of the pressure to be measured is transmitted to the sensor chip, and the pressure to be measured is detected based on the output change of the strain sensitive element.

このように構成される圧力センサでは、ケースのうち受圧用ダイアフラムが備えられる先端部とは反対側となる後端部にターミナルが備えられたコネクタ部の一部を嵌め込んだのち、ケースの後端部をかしめることによりケースに対してコネクタ部を固定している。そして、ケースの外周部には、ネジ部や被測定圧力となる媒体が収容された壁面の取付け穴に設けられた座面と接するシール面が備えられ、ネジ部にて締め付けることで、シール面と座面とのメタニカルシールが行われるように構成されている。
特開２００８−６４５２９号公報 In the pressure sensor configured in this way, after fitting a part of the connector part provided with the terminal into the rear end part opposite to the tip part provided with the pressure receiving diaphragm in the case, The connector is fixed to the case by caulking the end. The outer peripheral portion of the case is provided with a seal surface in contact with a seat surface provided in a mounting hole of a wall surface in which a screw portion or a medium to be measured pressure is accommodated. And the seating surface are configured to be sealed.
JP 2008-64529 A

しかしながら、この種の圧力センサは小型であるが強固な締め付けが要求される。すなわち、ケースの外周部に備えられたシール面と圧力センサが取り付けられる取付け穴に設けられた座面とによるメタニカルシールが強固に行えるように、ケースのうちシール面を押さえ付けるための部分（例えばネジ部からシール面に至るまでの部分）を高強度材料で構成しなければならない。 However, this type of pressure sensor is small but requires strong tightening. That is, the portion of the case for pressing the sealing surface (so that the sealing surface provided on the outer periphery of the case and the seating surface provided in the mounting hole to which the pressure sensor is attached can be firmly sealed) For example, the portion from the screw portion to the seal surface) must be made of a high-strength material.

ところが、これを実現するためにケース材料に高強度材料を使用すると、ケースの後端部をかしめる際にかしめが行えなくなるという問題が発生する。したがって、ケースとコネクタ部との組付け構造をかしめとは別手段にて行うようにするか、もしくは、かしめ部とネジ部からシール面に至る部分とを別部品にすることで、それぞれが別材料で構成されるようにすることが必要になり、部品点数の増加およびコスト高になるという問題が起こる。 However, if a high-strength material is used for the case material to realize this, there arises a problem that caulking cannot be performed when the rear end portion of the case is caulked. Therefore, the assembly structure of the case and the connector part is made by means other than caulking, or the caulking part and the part from the screw part to the seal surface are made as separate parts. It becomes necessary to be made of a material, resulting in an increase in the number of parts and a cost increase.

一方、ケース材料に高強度材料を使用せずに低強度材料を使用する場合、ケースの後端部をかしめることが可能になるが、ケースのうちネジ部からシール面に至る部分も低強度材料で構成されることになり、強固な締め付けが行えないという問題が発生する。このため、締め付け力による強度が足りず、圧力センサの破損などの原因になり兼ねない。 On the other hand, when using a low-strength material without using a high-strength material for the case material, it is possible to caulk the rear end of the case, but the portion of the case from the screw to the sealing surface also has low strength. It will be comprised with material, and the problem that firm clamping cannot be performed will generate | occur | produce. For this reason, the strength due to the tightening force is insufficient, and the pressure sensor may be damaged.

また、コネクタ部のケースへの固定を圧入によって行うことも可能であるが、この場合でもケースの後端部が高強度であると高い圧入力が必要になるという問題がある。 Although it is possible to fix the connector part to the case by press-fitting, even in this case, there is a problem that a high pressure input is required if the rear end part of the case has high strength.

本発明は上記点に鑑みて、コネクタ部との固定をかしめによって行うかしめ部や被測定圧力となる媒体が収容された壁面の取付け穴の座面とのメタルタッチシールを行うシール面が備えられるケースを一部材で構成できる圧力センサおよびその製造方法を提供することを第１の目的とする。 In view of the above, the present invention is provided with a sealing surface that performs metal touch sealing with a caulking portion that is fixed to the connector portion by caulking or a seating surface of a mounting hole of a wall surface that accommodates a medium to be measured pressure. It is a first object of the present invention to provide a pressure sensor that can be formed of a single member and a manufacturing method thereof.

また、コネクタ部を圧入固定する部位や被測定圧力となる媒体が収容された壁面の取付け穴の座面とのメタルタッチシールを行うシール面が備えられるケースを一部材できる圧力センサおよびその製造方法を提供することを第２の目的とする。 Further, a pressure sensor capable of forming a case with a seal surface for performing a metal touch seal with a portion for press-fitting a connector portion and a seating surface of a mounting hole of a wall surface in which a medium to be measured is accommodated, and a manufacturing method thereof The second object is to provide the above.

上記目的を達成するため、請求項１に記載の発明では、ケース（１）には、該ケース（１）の周面と直行する方向へ張り出したテーパ状のシール面（１４）が全周に形成されていると共に、被測定圧力となる媒体が収納された壁面（２００）の取付け穴（２０１）に対して固定するための固定手段（１３）が備えられ、固定手段（１３）にて該ケース（１）を取付け穴（２０１）に固定することにより座面（２０２）に対してシール面（１４）を押し付けることでメタルタッチシールを行うように構成されており、ケース（１）が一部材で構成されている共に、後端部（１２）の少なくともかしめ部（１２ａ）は低強度材料で構成され、かつ、少なくとも固定手段（１３）からシール面（１４）に至るまでの部分が低強度材料よりも高い強度を有する高強度材料で構成されていることを特徴としている。 In order to achieve the above object, according to the first aspect of the present invention, the case (1) has a taper-shaped sealing surface (14) projecting in a direction perpendicular to the circumferential surface of the case (1) on the entire circumference. And a fixing means (13) for fixing the fixing means (13) to the mounting hole (201) of the wall surface (200) in which the medium to be measured is stored. The case (1) is fixed to the mounting hole (201), and the seal surface (14) is pressed against the seat surface (202) to perform the metal touch seal. In addition to the members, at least the caulking portion (12a) of the rear end portion (12) is made of a low-strength material, and at least the portion from the fixing means (13) to the sealing surface (14) is low. Higher strength than strength materials It is characterized by being composed of a high strength material with.

このように、固定手段（１３）からシール面（１４）に至る部分については高強度材料を用いつつ、かしめ部（１２ａ）については低強度材料にしている。したがって、かしめ部（１２ａ）を容易にかしめることができ、かつ、固定手段（１３）からシール面（１４）に至る部分については高強度材料となっているため、強固な締め付けを行うことが可能となる。これにより、コネクタ部（２）との固定をかしめによって行うかしめ部（１２ａ）や被測定圧力となる媒体が収容された壁面の取付け穴の座面とのメタルタッチシールを行うシール面（１４）が備えられるケース（１）を一部材で構成することが可能となる。 In this way, a high strength material is used for the portion from the fixing means (13) to the seal surface (14), while the caulking portion (12a) is made of a low strength material. Therefore, the caulking portion (12a) can be easily caulked, and the portion from the fixing means (13) to the seal surface (14) is made of a high strength material, so that it can be firmly tightened. It becomes possible. As a result, the sealing surface (14) for performing the metal touch seal with the caulking portion (12a) that is fixed to the connector portion (2) by caulking and the seating surface of the mounting hole of the wall surface that accommodates the medium to be measured pressure. It is possible to form the case (1) provided with a single member.

また、請求項２に記載の発明では、コネクタ部（２）をケース（１）の後端部（１２）に対して圧入することにより固定するものに対して、請求項１と同様の構造、具体的には、後端部（１２）のうち少なくともコネクタ部（２）が圧入される部分は低強度材料で構成され、かつ、少なくとも固定手段（１３）からシール面（１４）に至るまでの部分が低強度材料よりも高い強度を有する高強度材料で構成されるようにしたことを特徴としている。このような構造とすることにより、コネクタ（２）を後端部（１２）に圧入する際の圧入力を低減することが可能になる。 Moreover, in invention of Claim 2, with respect to what fixes a connector part (2) by press-fitting with respect to the rear-end part (12) of case (1), it is the same structure as Claim 1, Specifically, at least a portion of the rear end portion (12) into which the connector portion (2) is press-fitted is made of a low-strength material, and at least from the fixing means (13) to the seal surface (14). It is characterized in that the portion is made of a high-strength material having higher strength than the low-strength material. By adopting such a structure, it is possible to reduce pressure input when the connector (2) is press-fitted into the rear end portion (12).

例えば、請求項２に記載したように、ケース（１）のうち後端部（１２）の少なくともかしめ部（１２ａ）において焼きなまし処理もしくは脱炭処理を行うことにより低強度化することができる。この場合、該低強度化されていない部分は高強度材料にて構成されることになる。 For example, as described in claim 2, the strength can be reduced by performing an annealing process or a decarburizing process in at least the caulking part (12a) of the rear end part (12) of the case (1). In this case, the portion not reduced in strength is made of a high-strength material.

また、請求項４に記載したように、ケース（１）のうち少なくとも固定手段（１３）からシール面（１４）に至るまでの部分において焼き入れ処理もしくは浸炭処理を行うことにより高強度化することもできる。この場合、該高強度化されていない部分が低強度材料にて構成されることになる。 Further, as described in claim 4, at least a portion of the case (1) from the fixing means (13) to the seal surface (14) is subjected to quenching or carburizing to increase the strength. You can also. In this case, the non-strengthened part is composed of a low-strength material.

なお、請求項５に記載したように、高強度材料とは降伏応力６００ＭＰａ以上の金属材料を意味しており、低強度材料とは降伏応力６００ＭＰａ未満の金属材料を意味している。 In addition, as described in claim 5, the high-strength material means a metal material having a yield stress of 600 MPa or more, and the low-strength material means a metal material having a yield stress of less than 600 MPa.

請求項６ないし１１に記載の発明は、請求項１ないし５に記載の圧力センサの製造方法の一例に相当する。 The inventions according to claims 6 to 11 correspond to an example of a manufacturing method of the pressure sensor according to claims 1 to 5.

すなわち、請求項６に記載したように、ケース（１）を高強度材料にて一部材で形成しておき、後端部（１２）の少なくともかしめ部（１２ａ）に対して熱処理を行うことで低強度化する強度調整工程を行うことで、請求項１に記載の圧力センサを製造することができる。また、請求項７に記載したように、ケース（１）を高強度材料にて一部材で形成したのち、後端部（１２）の少なくともコネクタ部（２）が圧入される部分に対して熱処理を行うことで低強度化する強度調整工程を行うことで、請求項２に記載の圧力センサを製造することができる。例えば、請求項８に記載したように、強度調整工程では、焼きなまし処理もしくは脱炭処理を行うことにより、後端部（１２）を低強度化することができる。 That is, as described in claim 6, the case (1) is formed of a high-strength material as one member, and heat treatment is performed on at least the caulking portion (12a) of the rear end portion (12). The pressure sensor according to claim 1 can be manufactured by performing the strength adjusting step for reducing the strength. Further, as described in claim 7, after the case (1) is formed of a high-strength material as a single member, at least the connector portion (2) of the rear end portion (12) is heat-treated. The pressure sensor of Claim 2 can be manufactured by performing the intensity | strength adjustment process to which intensity | strength is reduced by performing. For example, as described in claim 8, in the strength adjusting step, the strength of the rear end portion (12) can be reduced by performing an annealing process or a decarburizing process.

また、請求項９に記載したように、ケース（１）を低強度材料にて一部材で形成しておき、少なくとも固定手段（１３）からシール面（１４）に至るまでの部分に対して熱処理を行うことで高強度化する強度調整工程を行うことで、請求項１に記載の圧力センサを製造することができる。また、請求項１０に記載したように、ケース（１）を低強度材料にて一部材で形成したのち、少なくとも固定手段（１３）からシール面（１４）に至るまでの部分に対して熱処理を行うことで高強度化する強度調整工程を行うことで、請求項２に記載の圧力センサを製造することができる。例えば、請求項１１に記載したように、強度調整工程では、焼き入れ処理もしくは浸炭処理を行うことにより、少なくとも固定手段（１３）からシール面（１４）に至るまでの部分を高強度化することができる。 In addition, as described in claim 9, the case (1) is made of a low-strength material as a single member, and at least a portion from the fixing means (13) to the seal surface (14) is heat-treated. The pressure sensor according to claim 1 can be manufactured by performing the strength adjustment process for increasing the strength by performing the above. Further, as described in claim 10, after the case (1) is formed of a low-strength material as a single member, at least a portion from the fixing means (13) to the seal surface (14) is subjected to heat treatment. The pressure sensor of Claim 2 can be manufactured by performing the intensity | strength adjustment process which makes it high intensity | strength by performing. For example, as described in claim 11, in the strength adjustment step, at least a portion from the fixing means (13) to the seal surface (14) is increased in strength by performing a quenching process or a carburizing process. Can do.

なお、上記各手段の括弧内の符号は、後述する実施形態に記載の具体的手段との対応関係を示すものである。 In addition, the code | symbol in the bracket | parenthesis of each said means shows the correspondence with the specific means as described in embodiment mentioned later.

以下、本発明の実施形態について図に基づいて説明する。なお、以下の各実施形態相互において、互いに同一もしくは均等である部分には、図中、同一符号を付してある。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, the same or equivalent parts are denoted by the same reference numerals in the drawings.

（第１実施形態）
本実施形態では、圧力センサをエンジンヘッドに搭載し、燃焼室内における燃焼圧を検出する燃焼圧センサとして適用した場合について説明する。図１は、本発明の第１実施形態に係る圧力センサ１００のエンジン２００への取付構造を示す概略断面図である。以下、図１に基づいて本実施形態にかかる圧力センサ１００について説明する。 (First embodiment)
In the present embodiment, a case will be described in which a pressure sensor is mounted on an engine head and applied as a combustion pressure sensor for detecting a combustion pressure in a combustion chamber. FIG. 1 is a schematic cross-sectional view showing a structure for mounting the pressure sensor 100 to the engine 200 according to the first embodiment of the present invention. Hereinafter, the pressure sensor 100 according to the present embodiment will be described with reference to FIG.

図１に示すように、圧力センサ１００は、大きくは、ケース１と、このケース１に接続されたコネクタ部２とを有するものである。エンジン２００には、燃焼室に通じる取付穴２０１が設けられており、圧力センサ１００は、ケース１の先端部１１（図１中の下端部）から取付穴２０１に挿入されて、エンジン２００の燃焼室に臨んだ状態で搭載されている。 As shown in FIG. 1, the pressure sensor 100 roughly includes a case 1 and a connector portion 2 connected to the case 1. The engine 200 is provided with a mounting hole 201 that communicates with the combustion chamber, and the pressure sensor 100 is inserted into the mounting hole 201 from the front end portion 11 (the lower end portion in FIG. 1) of the case 1 to burn the engine 200. It is mounted in the state facing the room.

ケース１は、降伏応力６００ＭＰａ以上の高強度材料、例えばステンレス材料（例えばＳＵＳ６３０、ＳＵＳ３０４）や炭素が含有された炭素鋼等の金属にて構成されており、その先端部１１に受圧部としての受圧用ダイアフラム１０およびハウジング３０を備えている。本実施形態では、ケース１は円筒状とされ、ケース１の先端部１１は他の部位に比べて薄肉化されており、この薄肉化された先端部１１において、ハウジング３０と共に受圧用ダイアフラム１０が接合されることで一体化された構造とされている。具体的には、ケース１の先端部１１がハウジング３０の外周壁の一部と接合されていると共に、ハウジング３０の外周壁の一部と受圧用ダイアフラム１０の外周壁の一部が溶接等により接合されている。 The case 1 is made of a high-strength material having a yield stress of 600 MPa or more, for example, a stainless material (for example, SUS630, SUS304) or a metal such as carbon steel containing carbon. A diaphragm 10 and a housing 30 are provided. In the present embodiment, the case 1 has a cylindrical shape, and the distal end portion 11 of the case 1 is thinner than other portions. The pressure-reducing diaphragm 10 together with the housing 30 is formed at the thinned distal end portion 11. The structure is integrated by joining. Specifically, the tip 11 of the case 1 is joined to a part of the outer peripheral wall of the housing 30, and a part of the outer peripheral wall of the housing 30 and a part of the outer peripheral wall of the pressure receiving diaphragm 10 are welded or the like. It is joined.

そして、ケース１は、先端部１１と反対側となる後端部１２において内径および外径が拡大され、その後端部１２においてコネクタ部２が接続されている。具体的には、ケース１の後端部１２にコネクタ部２の先端のフランジ部２ａを収容させたのち、ケース１の後端部１２のかしめ部１２ａをかしめることにより、ケース１に対してコネクタ部２が固定されている。本実施形態では、ケース１のうちかしめが行われる後端部１２の少なくともかしめ部１２ａを焼きなまし処理もしくは脱炭処理することにより、材料強度を低下させ、降伏強度６００ＭＰａ未満の低強度材料に変化させている。このため、ケース１の後端部１２のかしめ部１２ａをかしめることが可能となっている。 The case 1 has an inner diameter and an outer diameter enlarged at a rear end portion 12 opposite to the front end portion 11, and a connector portion 2 is connected at the rear end portion 12. Specifically, after the flange portion 2a at the tip of the connector portion 2 is accommodated in the rear end portion 12 of the case 1, the caulking portion 12a of the rear end portion 12 of the case 1 is caulked to the case 1 The connector part 2 is fixed. In the present embodiment, at least the caulking portion 12a of the rear end portion 12 where the caulking is performed in the case 1 is annealed or decarburized, thereby reducing the material strength and changing the material to a low strength material having a yield strength of less than 600 MPa. ing. For this reason, it is possible to caulk the caulking portion 12 a of the rear end portion 12 of the case 1.

また、ケース１における先端部１１と後端部１２の間に位置する部位において、ケース１の外周面には、エンジン２００の取付穴２０１に対して圧力センサ１００を固定するための取付部となるネジ部１３が形成されている。取付部はネジ部１３以外の構成であっても構わないが、本実施形態では、取付穴２０１とネジ結合可能なネジ部１３を用い、ネジ部１３とネジ穴としての取付穴２０１とのネジ結合により、圧力センサ１００をエンジン２００に取り付けている。 Further, in a portion located between the front end portion 11 and the rear end portion 12 in the case 1, the outer peripheral surface of the case 1 serves as an attachment portion for fixing the pressure sensor 100 to the attachment hole 201 of the engine 200. A screw portion 13 is formed. Although the attachment portion may have a configuration other than the screw portion 13, in this embodiment, the screw portion 13 that can be screw-coupled to the attachment hole 201 is used, and the screw between the screw portion 13 and the attachment hole 201 as the screw hole is used. The pressure sensor 100 is attached to the engine 200 by the coupling.

また、ケース１のうちネジ部１３よりも先端部１１側において、ケース１の外径が縮小されている。そして、この外径が縮小させられた位置において、ケース１の外周面には、周面と直交する方向へ張り出したテーパ状のシール面１４が全周に形成された構造とされている。そして、このシール面１４に対向するように、取付穴２０１の内面には、シール面１４に対応したテーパ状の座面２０２が構成されている。このため、圧力センサ１００をエンジン２００へネジ結合することで、その軸力により、ケース１のシール面１４とエンジン２００の取付穴２０１の座面２０２とが密着してメタルタッチシールされるようになっている。そして、本実施形態では、ケース１を高強度材料で構成していることから、ネジ部１３からシール面１４に至る部分も高強度材料で構成され、締め付け力を所望強さ確保することができる。 Further, the outer diameter of the case 1 is reduced on the tip 11 side of the case 1 with respect to the screw portion 13. And in the position where this outer diameter was reduced, it is set as the structure where the taper-shaped sealing surface 14 which protruded in the direction orthogonal to a peripheral surface was formed in the outer peripheral surface of case 1 in the perimeter. A tapered seating surface 202 corresponding to the sealing surface 14 is formed on the inner surface of the mounting hole 201 so as to face the sealing surface 14. For this reason, the pressure sensor 100 is screwed to the engine 200 so that the axial force causes the seal surface 14 of the case 1 and the seating surface 202 of the mounting hole 201 of the engine 200 to be in close contact with each other to be metal touch sealed. It has become. In this embodiment, since the case 1 is made of a high-strength material, the portion from the screw portion 13 to the seal surface 14 is also made of a high-strength material, and a desired strength can be secured for the fastening force. .

なお、ケース１のうちネジ部１３からシール面１４に至る部分の外径はφ６．５ｍｍ、内径はφ５．５ｍｍとされ、ネジ部１３を締結した時の締め付け力は１０〜１５Ｎ／ｍ程度必要になる。このため、ネジ部１３からシール面１４に至る部分が低強度材料で構成されているとケース１の厚みに応じた剛性上、必要な締め付け力を得ることができないが、高強度材料で構成されるようにすることで必要な締め付け力を得ることが可能となる。 In addition, the outer diameter of the part from the screw part 13 to the seal surface 14 in the case 1 is φ6.5 mm, the inner diameter is φ5.5 mm, and the tightening force when the screw part 13 is fastened is about 10 to 15 N / m. become. For this reason, if the portion from the screw portion 13 to the seal surface 14 is made of a low-strength material, the required tightening force cannot be obtained due to the rigidity corresponding to the thickness of the case 1, but it is made of a high-strength material. By doing so, it becomes possible to obtain a necessary tightening force.

受圧用ダイアフラム１０は、ステンレス材料（例えばＳＵＳ６３０）等の金属にて構成され、円形状とされている。受圧用ダイアフラム１０における中央部を円形状の圧力伝達部１０ａとして、その周囲を囲むように圧力伝達部１０ａよりも薄肉化された歪み部１０ｂが形成されている。また、受圧用ダイアフラム１０における受圧面と反対側には凹部１０ｃが形成されていると共に、この凹部１０ｃを囲むように歪み部１０ｂよりも外周側に外周壁１０ｄが備えられている。そして、受圧用ダイアフラム１０の凹部１０ｃ内にハウジング３０の先端部が嵌め込まれ、この状態で外周壁１０ｄとハウジング３０の先端部が全周溶接等により接合されることで、受圧用ダイアフラム１０とハウジング３０とが接合されている。ハウジング３０のうち受圧用ダイアフラム１０と接合される部位では、ハウジング３０の外周面の径が受圧用ダイアフラム１０の外周壁１０ｄの外径と等しくされており、溶接等による受圧用ダイアフラム１０とハウジング３０との接合が容易に行えるようになっている。 The pressure receiving diaphragm 10 is made of a metal such as a stainless material (for example, SUS630) and has a circular shape. The central part of the pressure receiving diaphragm 10 is a circular pressure transmission part 10a, and a distortion part 10b thinner than the pressure transmission part 10a is formed so as to surround the periphery. Further, a concave portion 10c is formed on the opposite side of the pressure receiving diaphragm 10 from the pressure receiving surface, and an outer peripheral wall 10d is provided on the outer peripheral side of the strained portion 10b so as to surround the concave portion 10c. And the front-end | tip part of the housing 30 is engage | inserted in the recessed part 10c of the pressure-receiving diaphragm 10, and the outer peripheral wall 10d and the front-end | tip part of the housing 30 are joined by the perimeter welding etc. in this state, and the pressure-receiving diaphragm 10 and housing 30 is joined. In the portion of the housing 30 where the pressure receiving diaphragm 10 is joined, the diameter of the outer peripheral surface of the housing 30 is equal to the outer diameter of the outer peripheral wall 10d of the pressure receiving diaphragm 10, and the pressure receiving diaphragm 10 and the housing 30 by welding or the like. Can be easily joined.

このような構成の受圧用ダイアフラム１０は、受圧用ダイアフラム１０における燃焼室側の面を受圧面として、被測定圧力、つまり本実施形態の場合には燃焼圧がこの受圧面に印加されることで歪み部１０ｂが歪み、それに伴って圧力伝達部１０ａが歪むように構成されている。 The pressure receiving diaphragm 10 having such a configuration is configured such that the pressure on the combustion chamber side of the pressure receiving diaphragm 10 is a pressure receiving surface, and the pressure to be measured, that is, the combustion pressure in the present embodiment, is applied to the pressure receiving surface. The strain portion 10b is distorted, and the pressure transmission portion 10a is distorted accordingly.

また、ケース１の先端部１１において、受圧用ダイアフラム１０が接合されたハウジング３０と、ハウジング３０に接続された金属ステム４０、センサチップ５０、および、圧力伝達部材６０が備えられている。 In addition, a housing 30 to which the pressure receiving diaphragm 10 is joined, a metal stem 40 connected to the housing 30, a sensor chip 50, and a pressure transmission member 60 are provided at the distal end portion 11 of the case 1.

ハウジング３０は、中空部を有する円筒形状をなしており、中空部に圧力伝達部材６０を配置した状態で、一端側が受圧用ダイアフラム１０に接合され、他端側が金属ステム４０に接合されている。ハウジング３０には、両端部の中間位置において外周壁が径方向に突出させられた突起部３０ａが備えられている。この突起部３０ａは、ハウジング３０の中心軸に対して周方向に一周するように形成され、外径がケース１の先端部１１の外径と一致させられている。そして、この突起部３０ａとケース１の先端部１１とが溶接等により全周接合されることにより、ハウジング３０および受圧用ダイアフラム１０にてケース１の先端部が密閉された状態となっている。 The housing 30 has a cylindrical shape having a hollow portion. With the pressure transmission member 60 disposed in the hollow portion, one end side is joined to the pressure receiving diaphragm 10 and the other end side is joined to the metal stem 40. The housing 30 is provided with a protruding portion 30a in which an outer peripheral wall is protruded in a radial direction at an intermediate position between both end portions. The projecting portion 30 a is formed so as to make one round in the circumferential direction with respect to the central axis of the housing 30, and the outer diameter is matched with the outer diameter of the distal end portion 11 of the case 1. The protrusion 30a and the tip 11 of the case 1 are joined all around by welding or the like, so that the tip of the case 1 is sealed by the housing 30 and the pressure-receiving diaphragm 10.

金属ステム４０は、有底円筒状に加工されたステンレス（例えばＳＵＳ６３０）などの金属製の部材であり、ハウジング３０側の端部が開口部４１とされ、底部４２の少なくとも一部が薄肉状の歪み部となっている。この金属ステム４０は、ハウジング３０の他端に固定されている。具体的には、ハウジング３０の他端には、内径が拡大された収容部３１が形成されており、金属ステム４０のうちハウジング３０側の先端の外径が収容部３１の内径と一致させられている。そして、ハウジング３０の収容部３１内に金属ステム４０を挿入した状態で、ハウジング３０における収容部３１と対応する位置の外周部から溶接を行うことにより、ハウジング３０と金属ステム４０の外周面とが接合されている。 The metal stem 40 is a metal member such as stainless steel (for example, SUS630) processed into a bottomed cylindrical shape, the end on the housing 30 side is an opening 41, and at least a part of the bottom 42 is thin. It is a distortion part. The metal stem 40 is fixed to the other end of the housing 30. Specifically, a housing portion 31 having an enlarged inner diameter is formed at the other end of the housing 30, and the outer diameter of the tip of the metal stem 40 on the housing 30 side is matched with the inner diameter of the housing portion 31. ing. And in the state which inserted the metal stem 40 in the accommodating part 31 of the housing 30, by welding from the outer peripheral part of the position corresponding to the accommodating part 31 in the housing 30, the housing 30 and the outer peripheral surface of the metal stem 40 are made. It is joined.

センサチップ５０は、金属ステム４０における底面のうち開口部４１と反対側の面に例えば低融点ガラスなどの接着剤５１を介して貼り付けられている。センサチップ５０には、歪ゲージのような感歪素子が形成されている。例えば、半導体基板にて構成されたセンサチップ５０に対して拡散抵抗などからなる歪ゲージを形成し、このゲージによりホイートストンブリッジ回路を形成することにより感歪素子が構成される。 The sensor chip 50 is attached to the surface of the metal stem 40 opposite to the opening 41 through an adhesive 51 such as low-melting glass. The sensor chip 50 is formed with a strain sensitive element such as a strain gauge. For example, a strain gauge made of a diffused resistor or the like is formed on the sensor chip 50 formed of a semiconductor substrate, and a Wheatstone bridge circuit is formed by this gauge, thereby forming a strain sensitive element.

圧力伝達部材６０は、例えばステンレスなどの金属やセラミックなどからなるものであり、円柱状の棒部材にて構成されている。本実施形態では、圧力伝達部材６０は、受圧用ダイアフラム１０の圧力伝達部１０ａと金属ステム４０の底部４２との間に挟まれて配置されている。圧力伝達部材６０は、受圧用ダイアフラム１０の圧力伝達部１０ａおよび底部４２とそれぞれ荷重を与えた状態で接触している。このため、被測定圧力の大きさに応じて受圧用ダイアフラム１０の歪み部１０ｂが歪むと、その歪による応力が圧力伝達部１０ａを介して圧力伝達部材６０に伝わり、それが更に金属ステム４０の底部４２に伝えられる。これにより、底部４２が歪んでその歪による応力がセンサチップ５０に伝えられるため、センサチップ５０に備えられた感歪素子の抵抗値が変化させられる。 The pressure transmission member 60 is made of, for example, a metal such as stainless steel or ceramic, and is configured by a columnar bar member. In the present embodiment, the pressure transmission member 60 is disposed between the pressure transmission part 10 a of the pressure receiving diaphragm 10 and the bottom part 42 of the metal stem 40. The pressure transmission member 60 is in contact with the pressure transmission part 10a and the bottom part 42 of the pressure receiving diaphragm 10 in a state where a load is applied thereto. For this reason, when the strained portion 10b of the pressure receiving diaphragm 10 is distorted according to the magnitude of the pressure to be measured, the stress due to the strain is transmitted to the pressure transmitting member 60 via the pressure transmitting portion 10a, which is further transmitted to the metal stem 40. It is transmitted to the bottom part 42. As a result, the bottom 42 is distorted and the stress due to the distortion is transmitted to the sensor chip 50, so that the resistance value of the strain sensitive element provided in the sensor chip 50 is changed.

なお、ハウジング３０の内部には、ハウジング３０の内壁面や金属ステム４０の外壁面および圧力伝達部材６０の外周面と接触する放熱部材３２が備えられ、ハウジング３０の外周部には、ハウジング３０の外周面とケース１の内周面とに接触する放熱部材３３が備えられている。放熱部材３２により、圧力伝達部材６０の位置決めに加え、圧力伝達部材６０からハウジング３０や金属ステム４０への伝熱効率を高められており、放熱部材３３により、ハウジング３０や金属ステム４０からケース１への伝熱効率が高められるようになっている。 The housing 30 is provided with a heat radiating member 32 that comes into contact with the inner wall surface of the housing 30, the outer wall surface of the metal stem 40, and the outer peripheral surface of the pressure transmission member 60. A heat radiating member 33 is provided in contact with the outer peripheral surface and the inner peripheral surface of the case 1. In addition to positioning of the pressure transmission member 60 by the heat radiating member 32, the heat transfer efficiency from the pressure transmission member 60 to the housing 30 and the metal stem 40 is enhanced, and from the housing 30 and the metal stem 40 to the case 1 by the heat radiating member 33. The heat transfer efficiency is improved.

また、金属ステム４０におけるセンサチップ５０が貼り付けられた側には、ホルダ７０が備えられている。ホルダ７０も有底円筒状を為しており、その開口側が金属ステム４０の外周に嵌め込まれ、接着剤７１を介して金属ステム４０に接合されている。ホルダ７０の底部にはリード線やフレキシブルプリント基板（ＦＰＣ）などからなる配線部材７２の一部が貼り付けられている。そして、ホルダ７０の底部に形成された図示しない窓穴を通じて、センサチップ５０と配線部材７２の所望位置がボンディングワイヤ７３等により電気的に接続されている。 A holder 70 is provided on the side of the metal stem 40 where the sensor chip 50 is attached. The holder 70 also has a bottomed cylindrical shape, and the opening side thereof is fitted into the outer periphery of the metal stem 40 and joined to the metal stem 40 via an adhesive 71. A part of a wiring member 72 made of a lead wire or a flexible printed circuit board (FPC) is attached to the bottom of the holder 70. A desired position of the sensor chip 50 and the wiring member 72 is electrically connected by a bonding wire 73 or the like through a window hole (not shown) formed in the bottom of the holder 70.

さらに、図１に示されるように、ケース１における後端部１２側において、ケース１内におけるコネクタ部２よりも内側（先端部側）に、セラミック基板などからなる配線基板８０が備えられている。この配線基板８０には、ＩＣチップ８１が搭載され、ボンディングワイヤ８２にて配線基板８０とＩＣチップ８１とが電気的に接続されている。ＩＣチップ８１には、センサチップ５０からの出力を増幅したり調整したりするための回路が形成されている。 Further, as shown in FIG. 1, a wiring substrate 80 made of a ceramic substrate or the like is provided on the rear end portion 12 side of the case 1 on the inner side (front end portion side) of the connector portion 2 in the case 1. . An IC chip 81 is mounted on the wiring board 80, and the wiring board 80 and the IC chip 81 are electrically connected by bonding wires 82. The IC chip 81 is formed with a circuit for amplifying and adjusting the output from the sensor chip 50.

また、コネクタ部２におけるケース１側の端部にも、セラミック基板などからなる配線基板８３が備えられている。この配線基板８３は、上記配線基板８０とリード線やフレキシブルプリント基板などからなる配線部材８４を介して電気的に接続されている。 A wiring board 83 made of a ceramic board or the like is also provided at the end of the connector part 2 on the case 1 side. The wiring board 83 is electrically connected to the wiring board 80 via a wiring member 84 made of a lead wire or a flexible printed board.

一方、上記コネクタ部２は、ケース１の後端部１２に対して、Ｏリング２１を介して接続されている。このコネクタ部２は樹脂などからなるもので、コネクタ部２には、金属製のターミナル２２がインサート成形などにより一体化されている。そして、ケース１内にてコネクタ部２のターミナル２２が配線基板８３と電気的に接続されることで、配線基板８３、配線部材８４、配線基板８０、配線部材７２およびボンディングワイヤ７３等を通じてターミナル２２とセンサチップ５０に形成された感歪素子などとの電気的な接続が行われている。このため、圧力センサ１００は、ターミナル２２を通じて自動車のＥＣＵなど、外部との信号のやりとりなどが可能になっている。 On the other hand, the connector part 2 is connected to the rear end part 12 of the case 1 via an O-ring 21. The connector portion 2 is made of resin or the like, and a metal terminal 22 is integrated with the connector portion 2 by insert molding or the like. Then, the terminal 22 of the connector portion 2 is electrically connected to the wiring board 83 in the case 1, so that the terminal 22 is passed through the wiring board 83, the wiring member 84, the wiring board 80, the wiring member 72, the bonding wire 73, and the like. Are electrically connected to the strain sensitive elements formed on the sensor chip 50. For this reason, the pressure sensor 100 can exchange signals with the outside such as the ECU of the automobile through the terminal 22.

このように構成された圧力センサ１００は、ターミナル２２を介して電力供給を受けて作動する。そして、受圧用ダイアフラム１０が受けた被測定圧力となる燃焼圧に応じてセンサチップ５０から信号が出力されると、その信号がボンディングワイヤ７３や配線部材７２等を介してＩＣチップ８１に伝えられる。そして、ＩＣチップ８１に備えられた処理回路等によって信号処理が行われた後、その信号がボンディングワイヤ８２や配線基板８０、配線部材８４、配線基板８３およびターミナル２２を通じて出力される。これにより、外部に対して燃焼圧に応じた信号を伝えることが可能となる。 The pressure sensor 100 configured in this manner operates by receiving power supply via the terminal 22. When a signal is output from the sensor chip 50 according to the combustion pressure that is the pressure to be measured received by the pressure receiving diaphragm 10, the signal is transmitted to the IC chip 81 via the bonding wire 73, the wiring member 72, and the like. . Then, after signal processing is performed by a processing circuit or the like provided in the IC chip 81, the signal is output through the bonding wire 82, the wiring board 80, the wiring member 84, the wiring board 83, and the terminal 22. As a result, a signal corresponding to the combustion pressure can be transmitted to the outside.

続いて、本実施形態の圧力センサ１００の製造方法について説明する。ただし、圧力センサ１００の製造方法のうち、ケース１に対する強度調整工程以外は従来と変更がないため、従来と異なる強度調整工程を主に説明する。 Then, the manufacturing method of the pressure sensor 100 of this embodiment is demonstrated. However, in the manufacturing method of the pressure sensor 100, since there is no change from the conventional method except for the strength adjusting step for the case 1, the strength adjusting step different from the conventional method will be mainly described.

図２（ａ）は、本実施形態の圧力センサ１００の製造工程中の強度調整工程を示した断面図であり、図２（ｂ）は、強度調整工程後の圧力センサ１００の組付け工程を示した断面図である。 FIG. 2A is a cross-sectional view showing a strength adjustment process during the manufacturing process of the pressure sensor 100 of the present embodiment, and FIG. 2B shows an assembly process of the pressure sensor 100 after the strength adjustment process. It is sectional drawing shown.

まず、図２（ａ）に示す工程では、降伏応力６００ＭＰａ以上の高強度材料、例えば焼ステンレス材料（例えばＳＵＳ６３０、ＳＵＳ３０４）や炭素が含有された炭素鋼等の金属にて構成されるケース１を成形等により形成する。そして、ケース１における後端部１２を高周波コイル３００内に配置し、高周波コイル３００による加熱を行う熱処理工程を実施する。これにより、後端部１２の少なくともかしめ部１２ａが焼きなまし処理もしくは脱炭処理され、材料強度が低下させられることで、降伏強度６００ＭＰａ未満の低強度材料に変化させることが可能となる。 First, in the process shown in FIG. 2A, a case 1 made of a high strength material having a yield stress of 600 MPa or more, for example, a metal such as a baked stainless steel material (for example, SUS630, SUS304) or carbon steel containing carbon is used. Formed by molding or the like. And the rear-end part 12 in case 1 is arrange | positioned in the high frequency coil 300, and the heat processing process which heats with the high frequency coil 300 is implemented. As a result, at least the caulking portion 12a of the rear end portion 12 is annealed or decarburized, and the material strength is reduced, so that the material can be changed to a low strength material having a yield strength of less than 600 MPa.

次に、図２（ｂ）に示す工程では、受圧用ダイアフラム１０、ハウジング３０、金属ステム４０、センサチップ５０、圧力伝達部材６０およびホルダ７０を組付けて一体化したユニットに対して、配線部材７２を貼り付ける。そして、これらをケース１の先端部１１側から挿入した後、先端部１１とハウジング３０とを溶接等により接合する。 Next, in the step shown in FIG. 2B, a wiring member is applied to a unit in which the pressure receiving diaphragm 10, the housing 30, the metal stem 40, the sensor chip 50, the pressure transmission member 60 and the holder 70 are assembled and integrated. 72 is pasted. And after inserting these from the front-end | tip part 11 side of case 1, the front-end | tip part 11 and the housing 30 are joined by welding etc. FIG.

続いて、ボンディングワイヤ７３等を介してセンサチップ５０と配線部材７２とを電気的に接続する。また、配線部材７２をＩＣチップ８１が備えられた配線基板８０に電気的に接続すると共に、配線基板８０に対して配線部材８４を電気的に接続する。さらに、ターミナル２２に対して配線基板８３を電気的に接続したコネクタ部２を用意し、配線基板８３に対して配線部材８４を電気的に接続する。 Subsequently, the sensor chip 50 and the wiring member 72 are electrically connected via a bonding wire 73 or the like. In addition, the wiring member 72 is electrically connected to the wiring substrate 80 provided with the IC chip 81, and the wiring member 84 is electrically connected to the wiring substrate 80. Furthermore, the connector part 2 in which the wiring board 83 is electrically connected to the terminal 22 is prepared, and the wiring member 84 is electrically connected to the wiring board 83.

そして、ケース１の後端部１２内に配線基板８０をケース１の後端部１２側から挿入してケース１の中空部内に貼り付けて固定したのち、ケース１の後端部１２からコネクタ部２の先端において径方向に突き出したフランジ部２ａを挿入し、後端部１２のかしめ部１２ａをかしめることにより、コネクタ部２をケース１に固定する。このとき、後端部１２が低強度材料に変化させられているため、後端部１２のかしめ部１２ａを容易にかしめることができ、かつ、ネジ部１３からシール面１４に至る部分については高強度材料となっているため、強固な締め付けを行うことが可能となる。これにより、圧力センサ１００が完成する。 The wiring board 80 is inserted into the rear end portion 12 of the case 1 from the rear end portion 12 side of the case 1 and attached and fixed in the hollow portion of the case 1. The connector portion 2 is fixed to the case 1 by inserting the flange portion 2 a protruding in the radial direction at the tip of 2 and caulking the caulking portion 12 a of the rear end portion 12. At this time, since the rear end portion 12 is changed to a low-strength material, the caulking portion 12a of the rear end portion 12 can be easily caulked, and the portion from the screw portion 13 to the sealing surface 14 Since it is a high-strength material, it is possible to perform firm tightening. Thereby, the pressure sensor 100 is completed.

以上の説明した本実施形態の圧力センサ１００では、ケース１を高強度材料で構成しておき、ケース１の後端部１２、つまりコネクタ部２を固定するためのかしめ部１２ａに対して、焼きなまし処理もしくは脱炭処理を行うことにより、材料強度を低下させて低強度材料に変化させている。このため、ネジ部１３からシール面１４に至る部分については高強度材料を用いつつ、かしめ部１２ａについては低強度材料にすることが可能となる。したがって、コネクタ部２との固定をかしめによって行うかしめ部１２ａや被測定圧力となる媒体が収容された壁面の取付け穴の座面とのメタルタッチシールを行うシール面１４が備えられるケース１を一部材で構成することが可能となる。 In the pressure sensor 100 of the present embodiment described above, the case 1 is made of a high-strength material, and the rear end portion 12 of the case 1, that is, the caulking portion 12 a for fixing the connector portion 2 is annealed. By performing the treatment or the decarburization treatment, the material strength is lowered to change to a low strength material. For this reason, it is possible to use a high-strength material for the portion from the screw portion 13 to the seal surface 14 and a low-strength material for the caulking portion 12a. Therefore, the case 1 provided with the sealing surface 14 that performs the metal touch seal with the caulking portion 12a that is fixed to the connector portion 2 by caulking and the seating surface of the mounting hole of the wall surface that accommodates the medium to be measured pressure. It becomes possible to comprise with a member.

（第２実施形態）
本発明の第２実施形態について説明する。本実施形態の圧力センサ１００は、第１実施形態に対してケース１の材質およびケース１における熱処理工程を変更したものであり、その他に関しては第１実施形態と同様であるため、第１実施形態と異なる部分についてのみ説明する。 (Second Embodiment)
A second embodiment of the present invention will be described. The pressure sensor 100 of the present embodiment is obtained by changing the material of the case 1 and the heat treatment process in the case 1 with respect to the first embodiment, and is otherwise the same as the first embodiment. Only different parts will be described.

図３（ａ）は、本実施形態の圧力センサ１００の製造工程中の強度調整工程を示した断面図であり、図３（ｂ）は、強度調整工程後の圧力センサ１００の組付け工程を示した断面図である。 FIG. 3A is a cross-sectional view showing a strength adjustment process during the manufacturing process of the pressure sensor 100 of the present embodiment, and FIG. 3B shows an assembly process of the pressure sensor 100 after the strength adjustment process. It is sectional drawing shown.

まず、図３（ａ）に示す工程では、降伏応力６００ＭＰａ未満の低強度材料、例えばステンレス材料（例えばＳＵＳ６３０、ＳＵＳ３０４）や炭素が含有された炭素鋼等の金属にて構成されるケース１を成形等により形成する。そして、ケース１における先端部１１側、具体的にはネジ部１３からシール面１４に至るまでの部分が含まれるように高周波コイル３００内に配置し、高周波コイル３００による加熱を行う熱処理工程を実施する。これにより、先端部１１の少なくともネジ部１３からシール面１４に至るまでの部分が焼き入れ処理もしくは浸炭処理され、材料強度が向上させられることで、降伏強度６００ＭＰａ以上の高強度材料に変化させることが可能となる。 First, in the step shown in FIG. 3A, a case 1 made of a low-strength material having a yield stress of less than 600 MPa, for example, a stainless material (for example, SUS630, SUS304) or a metal such as carbon steel containing carbon is formed. Etc. are formed. Then, the heat treatment process is performed in which the case 1 is disposed in the high frequency coil 300 so as to include the portion from the tip portion 11 side, specifically, from the screw portion 13 to the seal surface 14 and heating by the high frequency coil 300 is performed. To do. Thereby, at least a part from the screw part 13 to the seal surface 14 of the tip part 11 is quenched or carburized, and the material strength is improved, thereby changing the material to a high strength material having a yield strength of 600 MPa or more. Is possible.

この後、図３（ｂ）に示す工程において、上記第１実施形態における図２（ｂ）の工程と同様の工程を行うことで、圧力センサ１００が完成する。 Thereafter, in the process shown in FIG. 3B, the pressure sensor 100 is completed by performing the same process as the process of FIG. 2B in the first embodiment.

このように、本実施形態の圧力センサ１００では、ケース１を低強度材料で構成しておき、ケース１の先端部１１、具体的にはネジ部１３からシール面１４に至るまでの部分を含むように、焼き入れ処理もしくは浸炭処理を行うことにより、材料強度を向上させて高強度材料に変化させている。このため、ネジ部１３からシール面１４に至る部分については高強度材料にしつつ、かしめ部１２ａについては低強度材料を用いることが可能となる。したがって、コネクタ部２との固定をかしめによって行うかしめ部１２ａや被測定圧力となる媒体が収容された壁面の取付け穴の座面とのメタルタッチシールを行うシール面１４が備えられるケース１を一部材で構成することが可能となる。 As described above, in the pressure sensor 100 of the present embodiment, the case 1 is made of a low-strength material, and includes the tip 11 of the case 1, specifically, the portion from the screw portion 13 to the seal surface 14. As described above, by performing quenching or carburizing, the material strength is improved and the material is changed to a high-strength material. For this reason, it is possible to use a high-strength material for the portion from the screw portion 13 to the seal surface 14 and a low-strength material for the caulking portion 12a. Therefore, the case 1 provided with the sealing surface 14 that performs the metal touch seal with the caulking portion 12a that is fixed to the connector portion 2 by caulking and the seating surface of the mounting hole of the wall surface that accommodates the medium to be measured pressure. It becomes possible to comprise with a member.

（第３実施形態）
本発明の第３実施形態について説明する。本実施形態の圧力センサ１００は、第１実施形態に対してケース１へのコネクタ部２の固定構造を変更したものであり、その他に関しては第１実施形態と同様であるため、第１実施形態と異なる部分についてのみ説明する。 (Third embodiment)
A third embodiment of the present invention will be described. The pressure sensor 100 of the present embodiment is obtained by changing the structure for fixing the connector portion 2 to the case 1 with respect to the first embodiment, and is otherwise the same as the first embodiment, so the first embodiment Only different parts will be described.

図４（ａ）は、本実施形態の圧力センサ１００の製造工程中の強度調整工程を示した断面図であり、図４（ｂ）は、強度調整工程後の圧力センサ１００の組付け工程を示した断面図である。 FIG. 4A is a cross-sectional view showing the strength adjustment process during the manufacturing process of the pressure sensor 100 of the present embodiment, and FIG. 4B shows the assembly process of the pressure sensor 100 after the strength adjustment process. It is sectional drawing shown.

まず、図４（ａ）に示す工程では、上述した第１実施形態の図２（ａ）と同様の工程を行うことで、ケース１の後端部１２を降伏強度６００ＭＰａ未満の低強度材料に変化させる。この後、図４（ｂ）に示す工程において、ケース１の後端部１２内にコネクタ部２を圧入したのち、ケース１の後端部１２の外周から溶接することにより、ケース１に対して後端部１２を固定している。具体的には、コネクタ部２は、基本的には樹脂等の絶縁材料で構成されるため、Ｏリング２１に代えて溶接用金属リング２３を配置しておき、この溶接用金属リング２３とケース１の後端部１２の内周面とを接合する。これにより、コネクタ部２がケース１に対して固定される。 First, in the process shown in FIG. 4A, the rear end portion 12 of the case 1 is made into a low-strength material having a yield strength of less than 600 MPa by performing the same process as in FIG. 2A of the first embodiment described above. Change. Thereafter, in the step shown in FIG. 4B, the connector portion 2 is press-fitted into the rear end portion 12 of the case 1 and then welded from the outer periphery of the rear end portion 12 of the case 1. The rear end portion 12 is fixed. Specifically, since the connector portion 2 is basically made of an insulating material such as resin, a welding metal ring 23 is disposed in place of the O-ring 21, and the welding metal ring 23 and the case are arranged. 1 is joined to the inner peripheral surface of the rear end portion 12. Thereby, the connector part 2 is fixed to the case 1.

このような固定構造とされる場合においても、後端部１２を低強度化しておくことで、コネクタ部２を後端部１２に圧入する際の圧入力を低下させることが可能となる。 Even in the case of such a fixing structure, it is possible to reduce the pressure input when the connector portion 2 is press-fitted into the rear end portion 12 by reducing the strength of the rear end portion 12.

（他の実施形態）
上記各実施形態では、圧力センサ１００を燃焼圧センサとして適用した場合について説明したが、他の被測定圧力を測定するためのものに対しても適用することができる。また、上記各実施形態では、圧力センサ１００を構成する各構成要素の一例を示したに過ぎず、適宜変更可能である。例えば、ハウジング３０と金属ステム４０とを別部材にて構成したが、これらを一部材で構成しても構わない。また、ハウジング３０とケース１とを別部材にて構成したが、これらを一部材にて構成しても構わない。 (Other embodiments)
In each of the above embodiments, the case where the pressure sensor 100 is applied as a combustion pressure sensor has been described. However, the present invention can also be applied to a device for measuring other measured pressures. Moreover, in each said embodiment, only an example of each component which comprises the pressure sensor 100 was shown, and it can change suitably. For example, the housing 30 and the metal stem 40 are configured as separate members, but may be configured as a single member. Moreover, although the housing 30 and the case 1 were comprised by the separate member, you may comprise these by one member.

また、上記実施形態では、圧力センサ１００を取付け穴２０１に固定することによりシール面１４を座面２０２に押し付けるための固定手段としてネジ部１３を例に挙げたが、ネジ部１３とは異なる固定手段であっても構わない。例えば、取付け穴２０１の内径に対してケース１の外径を同等ないし若干大きく設定しておき、圧力センサ１００が取付け穴２０１内に圧入固定されるような固定手段であっても構わない。この場合でも、固定手段となる圧入部位からシール面１４までに至る部分が高強度材料となるようにすれば良い。 In the above embodiment, the screw portion 13 is taken as an example of fixing means for pressing the seal surface 14 against the seat surface 202 by fixing the pressure sensor 100 to the mounting hole 201. It may be a means. For example, the outer diameter of the case 1 may be set to be equal to or slightly larger than the inner diameter of the mounting hole 201, and the pressure sensor 100 may be a fixing means that is press-fitted and fixed in the mounting hole 201. Even in this case, the portion from the press-fitting site serving as the fixing means to the seal surface 14 may be made of a high-strength material.

また、上記第３実施形態では、コネクタ部２をケース１の後端部１２に対して圧入する構造の圧力センサ１００に対して、第１実施形態と同様、ケース１の後端部１２を低強度化するための熱処理工程を行う場合について説明した。これに対し、第２実施形態と同様、ケース１を低強度材料で構成しておき、ケース１のうちネジ部１３からシート面１４に至るまでの部分を熱処理することで高強度化するようにしても、第３実施形態と同様の効果を得ることができる。 In the third embodiment, the rear end portion 12 of the case 1 is lower than the pressure sensor 100 having a structure in which the connector portion 2 is press-fitted into the rear end portion 12 of the case 1 as in the first embodiment. The case where the heat treatment process for strengthening is performed has been described. On the other hand, as in the second embodiment, the case 1 is made of a low-strength material, and the portion from the screw portion 13 to the seat surface 14 in the case 1 is heat treated to increase the strength. However, the same effect as the third embodiment can be obtained.

また、高周波コイル３００を用いて強度調整工程を行ったが、他の加熱装置を用いて行っても構わない。 Moreover, although the intensity adjustment process was performed using the high frequency coil 300, you may perform using another heating apparatus.

なお、上記各実施形態では、ケース１の構成材料として用いられる高強度材料と低強度材料の例を区別していないが、これはケース１を製造するときの焼きいれ処理や浸炭処理の温度や時間等に応じて適宜決まるものであり、処理前の材料自体は同じであっても構わないためである。このため、ケース１の製造条件に応じて高強度材料と低強度材料のいずれとするかを決めておき、その後、ケース１を高強度材料で構成したのであれば第１実施形態のようにかしめ部１２ａを低強度化するための熱処理工程を行い、ケース１を低強度材料で構成したのであれば第２実施形態のようにネジ部１３からシール面１４に至るまでの部分を高強度化するための熱処理工程を行えば良い。 In addition, in each said embodiment, although the example of the high strength material used as a constituent material of case 1 and a low strength material is not distinguished, this is the temperature of the burning process or carburizing process at the time of manufacturing case 1, and This is because it is appropriately determined according to time and the like, and the material itself before processing may be the same. For this reason, it is determined whether to use a high-strength material or a low-strength material according to the manufacturing conditions of the case 1, and then, if the case 1 is made of a high-strength material, it is caulked as in the first embodiment. If the heat treatment step for reducing the strength of the portion 12a is performed and the case 1 is made of a low-strength material, the strength from the screw portion 13 to the seal surface 14 is increased as in the second embodiment. The heat treatment process for this may be performed.

本発明の第１実施形態にかかる圧力センサ１００の断面構成を示す図である。It is a figure showing the section composition of pressure sensor 100 concerning a 1st embodiment of the present invention. （ａ）は、図１に示す圧力センサ１００の製造工程中の強度調整工程を示した断面図であり、（ｂ）は、強度調整工程後の圧力センサ１００の組付け工程を示した断面図である。(A) is sectional drawing which showed the intensity | strength adjustment process in the manufacturing process of the pressure sensor 100 shown in FIG. 1, (b) is sectional drawing which showed the assembly | attachment process of the pressure sensor 100 after an intensity | strength adjustment process. It is. （ａ）は、本発明の第２実施形態の圧力センサ１００の製造工程中の強度調整工程を示した断面図であり、（ｂ）は、強度調整工程後の圧力センサ１００の組付け工程を示した断面図である。(A) is sectional drawing which showed the intensity adjustment process in the manufacturing process of the pressure sensor 100 of 2nd Embodiment of this invention, (b) is the assembly | attachment process of the pressure sensor 100 after an intensity adjustment process. It is sectional drawing shown. （ａ）は、本発明の第３実施形態の圧力センサ１００の製造工程中の強度調整工程を示した断面図であり、（ｂ）は、強度調整工程後の圧力センサ１００の組付け工程を示した断面図である。(A) is sectional drawing which showed the intensity adjustment process in the manufacturing process of the pressure sensor 100 of 3rd Embodiment of this invention, (b) is the assembly | attachment process of the pressure sensor 100 after an intensity adjustment process. It is sectional drawing shown.

Explanation of symbols

１ケース
２コネクタ部
２ａフランジ部
１０受圧用ダイアフラム
１０ｄ外周壁
１１先端部
１２後端部
１２ａかしめ部
１３ネジ部
１４シール面
２２ターミナル
２２溶接用金属リング
３０ハウジング
４０金属ステム
５０センサチップ
６０圧力伝達部材
７２、８４配線部材
８０、８３配線基板
１００圧力センサ
２００エンジン
２０１取付穴
２０２座面
３００高周波コイル DESCRIPTION OF SYMBOLS 1 Case 2 Connector part 2a Flange part 10 Pressure-receiving diaphragm 10d Outer peripheral wall 11 Front-end | tip part 12 Rear-end part 12a Caulking part 13 Screw part 14 Sealing surface 22 Terminal 22 Welding metal ring 30 Housing 40 Metal stem 50 Sensor chip 60 Pressure transmission member 72, 84 Wiring member 80, 83 Wiring board 100 Pressure sensor 200 Engine 201 Mounting hole 202 Seat surface 300 High frequency coil

Claims

One surface is a pressure receiving surface that receives the pressure to be measured, and a circular pressure receiving diaphragm (10) that is distorted by receiving the pressure to be measured on the pressure receiving surface;
A pressure transmission member (60) whose one end is in contact with the other surface opposite to the pressure receiving surface of the pressure receiving diaphragm (10);
The pressure transmission member (60) is provided on the other end side opposite to the one end portion, and a force corresponding to the pressure to be measured received by the pressure receiving diaphragm (10) is transmitted through the pressure transmission member (60). A sensor chip (50) formed with a strain sensitive element that generates a signal in response thereto,
A housing (30) composed of a cylindrical member surrounding the pressure transmission member (60), and having one end joined to the other surface of the pressure receiving diaphragm (10) opposite to the pressure receiving surface;
The sensor chip (50) is affixed to contact with the other end of the pressure transmission member (60), and is displaced based on the force corresponding to the measured pressure applied from the pressure transmission member (60). A metal stem (40) for transmitting a force corresponding to the pressure to be measured to the sensor chip (50),
A case (1) constituted by a cylindrical member having a hollow portion for receiving the metal stem (40) and the pressure transmission member (60), the distal end portion (11) being joined to the housing (30);
The terminal (12) for fixing the rear end (12) opposite to the front end (11) of the case (1) by caulking the caulking (12a) and taking out a signal from the sensor chip (50) 22) a connector part (2) provided with,
In the case (1), a taper-shaped sealing surface (14) projecting in a direction perpendicular to the peripheral surface of the case (1) is formed on the entire periphery, and a medium serving as the pressure to be measured is accommodated. Fixing means (13) for fixing to the mounting hole (201) of the wall surface (200) is provided, and the case (1) is fixed to the mounting hole (201) by the fixing means (13). It is configured to perform a metal touch seal by pressing the seal surface (14) against the seat surface (202)
The case (1) is composed of one member, and at least the caulking part (12a) of the rear end part (12) is composed of a low-strength material, and at least from the fixing means (13) to the sealing surface. (14) The pressure sensor characterized in that the portion up to (14) is made of a high-strength material having higher strength than the low-strength material.

One surface is a pressure receiving surface that receives the pressure to be measured, and a circular pressure receiving diaphragm (10) that is distorted by receiving the pressure to be measured on the pressure receiving surface;
A pressure transmission member (60) whose one end is in contact with the other surface opposite to the pressure receiving surface of the pressure receiving diaphragm (10);
The pressure transmission member (60) is provided on the other end side opposite to the one end portion, and a force corresponding to the pressure to be measured received by the pressure receiving diaphragm (10) is transmitted through the pressure transmission member (60). A sensor chip (50) formed with a strain sensitive element that generates a signal in response thereto,
A housing (30) composed of a cylindrical member surrounding the pressure transmission member (60), and having one end joined to the other surface of the pressure receiving diaphragm (10) opposite to the pressure receiving surface;
The sensor chip (50) is affixed to contact with the other end of the pressure transmission member (60), and is displaced based on the force corresponding to the measured pressure applied from the pressure transmission member (60). A metal stem (40) for transmitting a force corresponding to the pressure to be measured to the sensor chip (50),
A case (1) constituted by a cylindrical member having a hollow portion for receiving the metal stem (40) and the pressure transmission member (60), the distal end portion (11) being joined to the housing (30);
A terminal (22) that is fixed by being press-fitted into a rear end (12) opposite to the front end (11) of the case (1) and takes out a signal from the sensor chip (50) is provided. A connector part (2),
In the case (1), a taper-shaped sealing surface (14) projecting in a direction perpendicular to the peripheral surface of the case (1) is formed on the entire periphery, and a medium serving as the pressure to be measured is accommodated. Fixing means (13) for fixing to the mounting hole (201) of the wall surface (200) is provided, and the case (1) is fixed to the mounting hole (201) by the fixing means (13). It is configured to perform a metal touch seal by pressing the seal surface (14) against the seat surface (202)
The case (1) is composed of one member, and at least a portion of the rear end portion (12) into which the connector portion (2) is press-fitted is composed of a low strength material, and at least the fixing means. A pressure sensor characterized in that a portion from (13) to the seal surface (14) is made of a high-strength material having higher strength than the low-strength material.

The case (1) is reduced in strength by annealing or decarburizing at the rear end (12), and the portion not reduced in strength is made of the high-strength material. The pressure sensor according to claim 1, wherein the pressure sensor is provided.

The case (1) is strengthened by quenching or carburizing at least in the portion from the fixing means (13) to the seal surface (14). The pressure sensor according to claim 1 or 2, wherein a portion that is not formed is made of the low-strength material.

5. The pressure sensor according to claim 1, wherein the high-strength material is a metal material having a yield stress of 600 MPa or more, and the low-strength material is a metal material having a yield stress of less than 600 MPa.

One surface is a pressure receiving surface that receives the pressure to be measured, and a circular pressure receiving diaphragm (10) that is distorted by receiving the pressure to be measured on the pressure receiving surface;
A pressure transmission member (60) whose one end is in contact with the other surface opposite to the pressure receiving surface of the pressure receiving diaphragm (10);
The pressure transmission member (60) is provided on the other end side opposite to the one end portion, and a force corresponding to the pressure to be measured received by the pressure receiving diaphragm (10) is transmitted through the pressure transmission member (60). A sensor chip (50) formed with a strain sensitive element that generates a signal in response thereto,
A housing (30) composed of a cylindrical member surrounding the pressure transmission member (60), and having one end joined to the other surface of the pressure receiving diaphragm (10) opposite to the pressure receiving surface;
The sensor chip (50) is affixed to contact with the other end of the pressure transmission member (60), and is displaced based on the force corresponding to the measured pressure applied from the pressure transmission member (60). A metal stem (40) for transmitting a force corresponding to the pressure to be measured to the sensor chip (50),
A case (1) constituted by a cylindrical member having a hollow portion for receiving the metal stem (40) and the pressure transmission member (60), the distal end portion (11) being joined to the housing (30);
A terminal for taking out a signal from the sensor chip (50), which is fixed by caulking the caulking part (12a) of the rear end part (12) opposite to the front end part (11) of the case (1). 22) a connector part (2) provided with,
In the case (1), a taper-shaped sealing surface (14) projecting in a direction perpendicular to the peripheral surface of the case (1) is formed on the entire periphery, and a medium serving as the pressure to be measured is accommodated. Fixing means (13) for fixing to the mounting hole (201) of the wall surface (200) is provided, and the case (1) is fixed to the mounting hole (201) by the fixing means (13). A pressure sensor manufacturing method configured to perform a metal touch seal by pressing the seal surface (14) against the seat surface (202) by:
After the case (1) is made of a high-strength material as a single member, a strength adjustment step for reducing the strength by performing heat treatment on at least the caulking portion (12a) of the rear end portion (12) is performed. Then, at least the caulking portion (12a) of the rear end portion (12) is made of a low-strength material, and at least a portion from the fixing means (13) to the seal surface (14) is the low-strength material. A method of manufacturing a pressure sensor, comprising a step of making a high-strength material having higher strength.

One surface is a pressure receiving surface that receives the pressure to be measured, and a circular pressure receiving diaphragm (10) that is distorted by receiving the pressure to be measured on the pressure receiving surface;
A pressure transmission member (60) whose one end is in contact with the other surface opposite to the pressure receiving surface of the pressure receiving diaphragm (10);
The pressure transmission member (60) is provided on the other end side opposite to the one end portion, and a force corresponding to the pressure to be measured received by the pressure receiving diaphragm (10) is transmitted through the pressure transmission member (60). A sensor chip (50) formed with a strain sensitive element that generates a signal in response thereto,
A housing (30) composed of a cylindrical member surrounding the pressure transmission member (60), and having one end joined to the other surface of the pressure receiving diaphragm (10) opposite to the pressure receiving surface;
The sensor chip (50) is affixed to contact with the other end of the pressure transmission member (60), and is displaced based on the force corresponding to the measured pressure applied from the pressure transmission member (60). A metal stem (40) for transmitting a force corresponding to the pressure to be measured to the sensor chip (50),
A case (1) constituted by a cylindrical member having a hollow portion for receiving the metal stem (40) and the pressure transmission member (60), the distal end portion (11) being joined to the housing (30);
A terminal (22) that is fixed by being press-fitted into a rear end (12) opposite to the front end (11) of the case (1) and takes out a signal from the sensor chip (50) is provided. A connector part (2),
In the case (1), a taper-shaped sealing surface (14) projecting in a direction perpendicular to the peripheral surface of the case (1) is formed on the entire periphery, and a medium serving as the pressure to be measured is accommodated. Fixing means (13) for fixing to the mounting hole (201) of the wall surface (200) is provided, and the case (1) is fixed to the mounting hole (201) by the fixing means (13). A pressure sensor manufacturing method configured to perform a metal touch seal by pressing the seal surface (14) against the seat surface (202) by:
After the case (1) is formed of a high-strength material as a single member, the strength is reduced by performing heat treatment on at least the connector portion (2) of the rear end portion (12). By performing the strength adjusting step, at least a portion of the rear end portion (12) into which the connector portion (2) is press-fitted is made of a low-strength material, and at least the sealing means (13) from the fixing means (13). 14) A method for manufacturing a pressure sensor, comprising a step of forming a portion up to 14) with a high-strength material having higher strength than the low-strength material.

The method for manufacturing a pressure sensor according to claim 6 or 7, wherein in the strength adjusting step, the strength of the rear end portion (12) is reduced by performing an annealing process or a decarburizing process.

One surface is a pressure receiving surface that receives the pressure to be measured, and a circular pressure receiving diaphragm (10) that is distorted by receiving the pressure to be measured on the pressure receiving surface;
A pressure transmission member (60) whose one end is in contact with the other surface opposite to the pressure receiving surface of the pressure receiving diaphragm (10);
The pressure transmission member (60) is provided on the other end side opposite to the one end portion, and a force corresponding to the pressure to be measured received by the pressure receiving diaphragm (10) is transmitted through the pressure transmission member (60). A sensor chip (50) formed with a strain sensitive element that generates a signal in response thereto,
A housing (30) composed of a cylindrical member surrounding the pressure transmission member (60), and having one end joined to the other surface of the pressure receiving diaphragm (10) opposite to the pressure receiving surface;
The sensor chip (50) is affixed to contact with the other end of the pressure transmission member (60), and is displaced based on the force corresponding to the measured pressure applied from the pressure transmission member (60). A metal stem (40) for transmitting a force corresponding to the pressure to be measured to the sensor chip (50),
A case (1) constituted by a cylindrical member having a hollow portion for receiving the metal stem (40) and the pressure transmission member (60), the distal end portion (11) being joined to the housing (30);
A terminal for taking out a signal from the sensor chip (50), which is fixed by caulking the caulking part (12a) of the rear end part (12) opposite to the front end part (11) of the case (1). 22) a connector part (2) provided with,
In the case (1), a taper-shaped sealing surface (14) projecting in a direction perpendicular to the peripheral surface of the case (1) is formed on the entire periphery, and a medium serving as the pressure to be measured is accommodated. Fixing means (13) for fixing to the mounting hole (201) of the wall surface (200) is provided, and the case (1) is fixed to the mounting hole (201) by the fixing means (13). A pressure sensor manufacturing method configured to perform a metal touch seal by pressing the seal surface (14) against the seat surface (202) by:
After the case (1) is formed of a low-strength material as a single member, the strength is increased by heat-treating at least the portion from the fixing means (13) to the sealing surface (14). By performing the adjustment process, at least the caulking portion (12a) of the rear end portion (12) is made of a low-strength material, and at least a portion from the fixing means (13) to the sealing surface (14). A method of manufacturing a pressure sensor, comprising: a step of making a high strength material having higher strength than the low strength material.

One surface is a pressure receiving surface that receives the pressure to be measured, and a circular pressure receiving diaphragm (10) that is distorted by receiving the pressure to be measured on the pressure receiving surface;
A pressure transmission member (60) whose one end is in contact with the other surface opposite to the pressure receiving surface of the pressure receiving diaphragm (10);
The pressure transmission member (60) is provided on the other end side opposite to the one end portion, and a force corresponding to the pressure to be measured received by the pressure receiving diaphragm (10) is transmitted through the pressure transmission member (60). A sensor chip (50) formed with a strain sensitive element that generates a signal in response thereto,
A housing (30) composed of a cylindrical member surrounding the pressure transmission member (60), and having one end joined to the other surface of the pressure receiving diaphragm (10) opposite to the pressure receiving surface;
The sensor chip (50) is affixed to contact with the other end of the pressure transmission member (60), and is displaced based on the force corresponding to the measured pressure applied from the pressure transmission member (60). A metal stem (40) for transmitting a force corresponding to the pressure to be measured to the sensor chip (50),
A case (1) constituted by a cylindrical member having a hollow portion for receiving the metal stem (40) and the pressure transmission member (60), the distal end portion (11) being joined to the housing (30);
A terminal (22) that is fixed by being press-fitted into a rear end (12) opposite to the front end (11) of the case (1) and takes out a signal from the sensor chip (50) is provided. A connector part (2),
In the case (1), a taper-shaped sealing surface (14) projecting in a direction perpendicular to the peripheral surface of the case (1) is formed on the entire periphery, and a medium serving as the pressure to be measured is accommodated. Fixing means (13) for fixing to the mounting hole (201) of the wall surface (200) is provided, and the case (1) is fixed to the mounting hole (201) by the fixing means (13). A pressure sensor manufacturing method configured to perform a metal touch seal by pressing the seal surface (14) against the seat surface (202) by:
After the case (1) is formed of a low-strength material as a single member, the strength is increased by heat-treating at least the portion from the fixing means (13) to the sealing surface (14). By performing the adjusting step, at least a portion of the rear end portion (12) into which the connector portion (2) is press-fitted is made of a low-strength material, and at least from the fixing means (13) to the sealing surface (14 The method of manufacturing the pressure sensor characterized by including the process which the part until it reaches | attains) is comprised with the high intensity | strength material which has a higher strength than the said low intensity | strength material.

The strength adjustment process includes increasing the strength of at least a portion from the fixing means (13) to the seal surface (14) by performing a quenching process or a carburizing process. Or a method for producing the pressure sensor according to 10.