JP2010031953A - Vibration damping-vibration control device by compression coil spring - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration damping-vibration control device of a simple structure without substantially causing influence by an increase in elastic resistance and strength for holding a shape to compression displacement of a compression coil spring. <P>SOLUTION: The vibration damping-vibration control device by the compression coil spring is composed of a load carrying compression coil 2, and a low hardness and low repulsion elastic modulus member 3 oppositely arranged to the outer periphery of the compression coil spring 2. The low hardness and low repulsion elastic modulus member 3 is constituted so as to always contact with an opposed surface with the compression coil spring 2. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention is a novel vibration damping / vibration prevention device that can exhibit a damper effect by utilizing the vibration absorption of a low hardness and low rebound elastic modulus member without damaging the vibration damping characteristics of the compression coil spring with a simple structure. It relates to the device.

  The importance of several “measurement environments” including vibration suppression and vibration isolation as peripheral technologies for maintaining “observation, inspection, processing, operation, etc.” by ultra-fine technologies represented by nanotechnology and biotechnology Recognition is deepening. Under such circumstances, in order to prevent the influence of extraneous vibrations transmitted through the floor on precision instruments and to ensure an appropriate measurement environment, vibration suppression and vibration control mechanisms are used for the installation of instruments.

  3D shape measuring instrument that reads high-precision shapes of optical elements used in exposure devices that form circuit patterns of electronic devices used in computers and communication equipment, and optical devices that use blue lasers, and electrons that are used in gene analysis Equipment that requires nanometer accuracy, such as a microscope, has a high need to prevent the effects of extraneous vibration, and the performance of the vibration isolation mechanism that attenuates vibration transmitted from the floor to the equipment can improve the performance of the measuring device. It will be an important factor that influences.

  In recent years, precision measurement, which was performed at the research and development stage, has been carried out in the 100% inspection process on the production line as the product has become denser and more accurate.・ The demand for equipment with high anti-vibration performance is increasing.

  Conventionally, a structure incorporating an air spring has been used as a vibration damping and vibration isolating mechanism. In particular, by using a diaphragm-type air spring having a natural frequency of 1 to 2 kHz, the function of the vibration suppression / vibration prevention mechanism is realized by a system of the air spring and the mass of devices supported by the air spring. .

  The advantage of using an air spring is that an auxiliary tank is attached and an orifice is placed between the air spring and the tank, so that attenuation due to the viscous resistance of air can be obtained, and the resonance peak at the natural frequency is lowered. Although it is possible to suppress the fluctuation of the support load due to the disturbance, it is not easy to handle in terms of air supply and management for maintaining the performance of the air spring.

  On the other hand, a combination of a compression coil spring 51 and a damping material is used as a damping / anti-vibration mechanism that requires maintenance and does not use an expensive air spring, and obtains a damping / vibration function in the vertical and horizontal directions. A device according to is known. For example, as shown in FIG. 6, this device uses a combination of a compression coil spring 51 as an elastic body and a columnar viscoelastic body 52, and the viscoelastic body 52 is arranged in the space of the compression coil spring 51. The flange 53 is attached to both ends of the viscoelastic body 52 and both ends of the compression coil spring 51, and the compression coil spring 51 and the viscoelastic body 52 are integrated so as to act in a composite manner.

  If this apparatus is used for vibration suppression / vibration support of a mechanical instrument, it is possible to obtain a vibration suppression / vibration prevention effect against an external force applied in the horizontal and vertical directions.

  Incidentally, in the case of the vibration damping / vibration-proof structure shown in FIG. 6, the load applied to this mechanism is supported by the coil spring 51, but the viscoelastic resistance of the viscoelastic body 52 as the vibration damping material is the compression of the compression coil spring 51. The greater the amount of deflection, the greater the elastic repulsion force. Conversely, the viscous resistance decreases and the elastic body becomes substantially an elastic body, so that the damping effect fluctuates and deteriorates. Specifically, the anti-vibration characteristic deteriorates as the natural frequency of the entire device increases, and in addition, due to an increase in the resonance magnification Q value, the convergence time of shaking when an excessive fluctuation is applied to the device is significantly increased. In particular, in the case of a vibration damping / vibration-proof mechanism that supports a light load, since the spring constant of the compression coil spring 51 is small, the displacement due to the load fluctuation is large, and accordingly, the compression fluctuation rate of the viscoelastic body 52 is increased and the vibration damping / vibration mechanism is increased. The problem arises that the anti-vibration performance changes greatly.

  Further, according to the vibration suppression / vibration prevention mechanism described in Patent Document 1 shown in FIG. 7, the load acting on the vibration suppression / vibration prevention mechanism is changed, causing a large stroke displacement in the deflection of the compression coil spring 61. Even so, the natural frequency of the entire apparatus can be adjusted by appropriately adjusting the compression amount control means (adjustment screw) 63 of the viscoelastic body 62.

  However, in this adjustment mechanism, when adjusting the natural frequency, it is necessary to make adjustment while performing frequency response measurement using an acceleration sensor or the like, which is complicated. In addition, in a general structure where the vibration suppression / vibration mechanisms are arranged at four corners and at four locations to support the load, when the applied load has an eccentric center of gravity, the load applied to each vibration suppression / vibration prevention mechanism is different. Therefore, the vibration characteristics of the individual vibration suppression / vibration mechanisms change in correlation with each other, so it is necessary to measure and adjust the four vibration suppression / vibration mechanisms several times, which is very complicated and easy to handle. Have difficulty.

  According to the vibration damping and vibration isolating mechanism described in Patent Document 2 shown in FIG. 8, even if the load acting on the vibration damping and vibration isolating mechanism changes and a large stroke displacement occurs in the deflection of the compression coil spring, The vibration damping / vibration isolation mechanism can exhibit stable vibration isolation performance without being affected by the resistance of the damping material. The vibration suppression / vibration isolation performance of this vibration suppression / anti-vibration mechanism changes the viscoelastic characteristics by changing the width, thickness, and hardness of the band-like viscoelastic body 71 used for the vibration suppression material. It can be easily adjusted by changing the viscoelastic properties.

  However, since the damping material is incorporated in the vibration damping / vibration isolation mechanism as a separate component independent of the compression coil spring, it is necessary to expand and contract as an independent component to follow the expansion and contraction of the compression coil spring. A certain degree of restoring strength is required for the displacement, and this required strength becomes a resistance against the expansion and contraction displacement of the compression coil spring, which influences the magnitude of the compression deformation stroke of the compression coil spring. There is a problem of affecting the performance of the vibration isolation mechanism.

Japanese Patent No. 3543758 JP 2006-207723 A

  Conventionally, the viscoelastic member for damping is compressed together with the compression displacement of the compression coil spring to become an elastic resistor, or requires strength for shape retention at the time of expansion / contraction displacement. There is a disadvantage that the influence on performance such as increase of natural frequency and Q value is inevitable

  In view of this, the present invention arranges a low-hardness and low-rebound elastic modulus member at an effective location that hardly causes an effect of an increase in elastic resistance or strength for shape retention on the compression displacement of the compression coil spring. Therefore, we realized a vibration damping and vibration isolator with a simple structure that has very little change in vibration damping and vibration isolation characteristics against the compression displacement of the compression coil spring.

  Specifically, the invention according to claim 1 is a vibration damping and vibration isolating device using a compression coil spring, and is arranged to face a compression coil for carrying a load and an inner periphery or an outer periphery of the compression coil spring. A vibration damping and vibration isolating device using a compression coil spring comprising a low hardness and low rebound resilience member, wherein the low hardness and low rebound resilience member is configured such that the surface facing the compression coil spring is always in contact. It was.

  The invention according to claim 2 is the compression coil spring according to claim 1, wherein the low hardness and low rebound resilience member has a plate shape, is wound around an inner periphery or an outer periphery of the compression coil spring, and both ends thereof are fixed. It was set as a vibration control and vibration control device.

  According to a third aspect of the present invention, the fixing of both ends of the low hardness and low rebound resilience member in which the plate-shaped low hardness and low rebound resilience member is wound around the inner periphery or the outer periphery of the compression coil spring is performed. The vibration damping / vibration isolating device using a compression coil spring according to claim 2, wherein a non-elastic sheet or tape is wound around the outer periphery of the member having hardness and low rebound resilience.

  The invention according to claim 4 is the compression according to claim 1, wherein the low hardness and low rebound resilience member has a Shore A hardness of 10 or less and a rebound resilience of 30% or less. A vibration damping and vibration isolating device using a coil spring was adopted.

  A fifth aspect of the present invention is the vibration damping / vibration isolation device using the compression coil spring according to any one of the first, second, third, and fourth aspects, wherein the low hardness and low rebound resilience member is a flexible urethane foam. did.

  According to the vibration damping and vibration isolating device of the first aspect of the present invention, the structure is simpler than the air spring system and easy to handle, and the conventional vibration damping and vibration isolating device using a compression coil spring and a viscoelastic member is used. Compared to the mechanism, there is no increase in elastic resistance when the displacement increases due to load fluctuations, and the strength of the damping member is so small that it does not affect the damping and damping performance. Anti-vibration effect is obtained. In other words, the vibration damping and vibration isolating device has no change in natural frequency or Q value when the compression coil spring is compressed. Therefore, it is a low-cost vibration damping and vibration isolator that is durable and does not require maintenance.

  Further, according to the invention of claim 2, in addition to the effect of claim 1, the low hardness and low rebound resilience member has a plate shape, so that it is easy to manufacture. Further, the both ends of the plate-shaped low hardness and low rebound elastic modulus member may be fixed with an adhesive, a double-sided tape, or a rubber band. According to the invention of claim 3, in addition to the effects of claims 1 and 2, the non-elastic sheet or tape is wound around the outer periphery of the low hardness and low rebound elastic modulus member. Easy to manufacture.

  In the invention of claim 4, since the low hardness and low rebound resilience member has a Shore A hardness of 10 or less and a rebound resilience of 30% or less, this damping effect is ensured. In the invention of claim 5, since the low hardness and low rebound resilience member is a flexible urethane foam, it is easily available.

  The purpose of exerting the vibration suppression / vibration-proof performance of the vibration suppression / anti-vibration mechanism over a long period of time regardless of the stroke of the compression deformation of the compression coil spring is This was realized by providing a rebound elastic modulus member and arranging it so as to always contact the surface facing the compression coil spring.

Embodiment 1 of the present invention will be described below with reference to the drawings.
FIG. 1A is a partial longitudinal sectional side view of Embodiment 1 of the present invention, and FIG. 1B is a horizontal sectional plan view thereof. The vibration damping and vibration isolating mechanism according to the present invention comprises a mounting plate or table 1a, a base or frame 1b, a compression coil spring 2 which is an elastic body, and a low hardness and low rebound resilience member 3. The mounting plate or table 1a and the base or frame 1b are arranged above and below the compression coil spring 2, the upper mounting plate or table 1a serves as a support for the structure, and the lower base or frame 1b is controlled. It will be the installation base on the floor or table of the vibration and vibration isolator.

  The low hardness and low rebound resilience member 3 has a plate shape and is wound around the outer periphery of the compression coil spring 2. This low hardness and low rebound resilience member 3 does not become a resistance as a support due to its low rebound resilience against the load and vibration acting on the compression coil spring 2, but exclusively with the vibration of the structure. The vibration energy propagating from one end of the spring 2 to the other end is attenuated to obtain vibration suppression / vibration prevention performance. As the low hardness and low rebound resilience member 3, it is effective to use a soft urethane foam having a Shore A hardness of 10 or less and a rebound resilience of 30% or less. Needless to say, a similar result can be obtained if the material has a Shore A hardness of 10 or less and a rebound resilience of 30% or less.

  A non-elastic sheet or tape 4 is wound around the outer peripheral portion of the low hardness and low rebound resilience member 3, and the low hardness and low rebound resilience member 3 is held on the outer periphery of the compression coil spring 2. It is comprised so that the surface facing 2 may always contact. The material of the non-elastic sheet or tape 4 may be anything as long as the elastic force and strength do not affect the vibration damping / vibration-proof characteristics, and examples thereof include polyvinylidene chloride, vinyl chloride, polyethylene, and Japanese paper. Further, the low hardness and low rebound resilience member 3 may be wound around the outer periphery of the compression coil spring 2 and both ends thereof may be fastened with an adhesive and double-sided tape or a rubber band may be wound.

  2 (a) and 2 (b) are a partial longitudinal sectional side view and a transverse sectional plan view of Embodiment 2 of the present invention. This vibration damping / vibration isolation mechanism comprises a mounting plate or table 1a, a base or frame 1b, a compression coil spring 2 which is an elastic body, and a low hardness and low rebound resilience member 3. Needless to say, the configuration is such that the low hardness and low rebound resilience member 3 and the compression coil spring are always in contact with each other on the opposing surface of the inner peripheral portion of FIG. . As described above, the low hardness and low rebound resilience member 3 may be a plate shape, a cylindrical shape, a cylindrical shape, or a prismatic shaped product according to the shape of the compression coil spring.

  Next, damping characteristics were compared with the apparatus of Example 1 using the same compression coil spring as that of Example 1 of the present invention. In FIG. 3, the vertical axis represents acceleration (one scale 10 gal), the horizontal axis represents time (one scale 0.5 seconds), and the force attenuation and time attenuation when a constant force is applied to both are shown. 3A shows only the compression coil spring, and FIG. 3B shows the damping characteristic of the apparatus of the first embodiment. In the figure (a), the acceleration is large and the decay time is long. In the figure (b), the acceleration is also small, the force is attenuated from the beginning, and the decay time is within 2 seconds. Therefore, it can be said that this device has both a force attenuation and a time attenuation effect.

  Further, FIG. 4 is a diagram showing the gist of the measurement experiment. A weight 32 is added on the mounting plate 31, and the vibration damping / vibration-preventing mechanisms 34 of the first embodiment are arranged at four corners and four locations between the floor surface 33 and the mounting plate 31 to confirm the vibration damping / vibration preventing effect. Acceleration pickups 35 were installed on the floor surface 33 and the mounting plate 32 shown in the figure, and the vibration transmissibility between the floor surface 33 and the mounting plate 32 was measured. Graphs of vertical vibration characteristics obtained by measurement are shown in FIGS.

  FIG. 5A is a graph of vertical vibration characteristics when the added weight is 38 kg, and FIG. 5B is a graph of vertical vibration characteristics when the added weight is 55 kg. As is clear by comparing the two figures, changes in the resonance frequency and resonance magnification (Q value), that is, the peak height of the arrows 7a and 7b in the figure, which serve as an index of damping / anti-vibration characteristics even under two load conditions It was confirmed that there was very little and good value was shown as an anti-vibration and anti-vibration effect.

BRIEF DESCRIPTION OF THE DRAWINGS The schematic sectional drawing of the apparatus of Example 1 of this invention is shown, (a) A figure is a partial longitudinal cross-sectional side view, (b) A figure is a cross-sectional top view. BRIEF DESCRIPTION OF THE DRAWINGS The schematic sectional drawing of the apparatus of Example 2 of this invention is shown, (a) A figure is a partial longitudinal cross-sectional side view, (b) A figure is a cross-sectional top view. It is the graph which displayed the damping characteristic at the time of giving a vibration with the device of Example 1 of this invention, and the same spring as the compression coil spring used for this, (a) The figure is a case only with a compression coil spring, (B) The figure is a graph of the apparatus of Example 1. It is a figure which shows the outline | summary of the apparatus of the measurement experiment of the vibration transmissibility of Example 1 of this invention, (a) A figure is a top view, (b) A figure is a side view. FIG. 5 is a graph showing the vibration characteristics showing the results of the measurement experiment of FIG. 4 of the present invention, where (a) shows the vertical vibration characteristics when the weight is 38 kg, and (b) shows the vertical direction when the weight is 55 kg. This shows the vibration characteristics. It is a side view which shows the prior art example which uses a compression coil spring and a viscoelastic member. It is a side view which shows the improved prior art example using a compression coil spring and a viscoelastic member. It is a side view which shows the improved prior art example using a compression coil spring and a viscoelastic member.

Explanation of symbols

1a Mount or table 1b Base or frame 2 Compression coil spring inner layer 3 Low hardness and low rebound resilience member 4 Inelastic sheet or tape
31 Mounting plate 32 Weight 33 Floor 34 Damping / vibration control device 35 Acceleration pickup

Claims (5)

In the vibration damping and vibration isolator using a compression coil spring,
It is composed of a load-carrying compression coil and a low-hardness and low-rebound elastic modulus member disposed facing the inner periphery or outer periphery of the compression coil spring,
A vibration damping and vibration isolating device using a compression coil spring, wherein the low hardness and low rebound resilience member is configured such that the surface facing the compression coil spring is always in contact.   2. The compression by a compression coil spring according to claim 1, wherein the low hardness and low rebound elastic modulus member has a plate shape, is wound around an inner periphery or an outer periphery of the compression coil spring, and both ends thereof are fixed. Vibration and vibration isolator.   Fixing both ends of the low hardness and low rebound resilience member by winding the plate-shaped low hardness and low rebound resilience member around the inner periphery or outer periphery of the compression coil spring, the low hardness and low rebound resilience member The vibration damping / vibration isolating device using a compression coil spring according to claim 2, wherein an inelastic sheet or a tape is wound around the outer periphery of the compression coil spring.   4. The compression coil spring according to claim 1, wherein the low hardness and low rebound resilience member has a Shore A hardness of 10 or less and a rebound resilience of 30% or less. Vibration suppression and vibration control device.   5. The vibration damping and vibration isolating device using a compression coil spring according to claim 1, wherein the low hardness and low rebound elastic modulus member is a flexible urethane foam.

Images