JP2010025892A - Probe and probe card using the same - Google Patents

Abstract

To reduce the cost by simplifying the structure while maintaining the positional accuracy of the probe.
A probe according to the present invention is composed of a single wire, and is provided at the tip of the probe, which is electrically contacted with an electrode portion of an object to be inspected, and a central portion thereof. The probe is configured to include a needle center portion that follows the needle tip portion and a needle rear portion that is provided on the rear end side and continues to the needle center portion. The needle rear portion is fixed to the substrate side to support the needle center portion, the needle center portion has elasticity and elastically supports the needle tip portion in an annular shape of one rotation or more, and Electrical contact is made with the electrode on the substrate side. Further, the probe is used for a probe card that is in contact with each of a plurality of electrode portions of an object to be inspected and inspected.
[Selection] Figure 1

Description

  The present invention relates to a probe that contacts and inspects a plurality of electrodes formed on an object to be inspected such as an IC chip portion of a semiconductor wafer, and a probe card using the same.

  In order to inspect a large number of IC chip portions formed on a semiconductor wafer, a probe card in which a large number of probes are arranged in accordance with electrode portions of the IC chip portion is generally known. A probe used in such a probe card is composed of a plurality of parts such as springs and pins. A large number of probes are incorporated in the probe card.

  Moreover, there exists a probe card of patent document 1 as an example of another probe card. This probe card is configured as shown in FIG. A wiring portion 2 is provided on the lower surface of the wiring board 1 on the probe card main body side. A needle guide 3 is provided below the wiring portion 2 with a certain space therebetween. The needle guide 3 is provided with a through hole 4, and a probe 5 is inserted into the through hole 4. The probe 5 is substantially C-shaped. The base end of the C-shaped probe 5 is inserted into the hole of the needle guide 3 and is pressed against the wiring portion 2 by the elastic body 6 and fixed. In this state, the needle center portion 7 of the probe 5 is inserted into the through hole 4, and the needle tip portion 8 comes into contact with the electrode portion 9 of the IC chip portion.

Furthermore, there exists a probe card of patent document 2 as an example of another probe card. Similar to the probe card of Patent Document 1, this probe card is also formed in a substantially C-shaped probe. The base end of the C-shaped probe is fixed, and the tip is in contact with the electrode part of the IC chip part.
JP 2000-46871 A Japanese Patent Laid-Open No. 11-218549

  However, in the conventional probe card described above, since one probe is composed of a plurality of parts, there is a problem that the cost of the probe card increases when many probes are incorporated in the probe card.

  Moreover, in the probe card of patent document 1, 2, the front-end | tip part of a probe may shift | deviate from an electrode part, and a probe may become somewhat unstable.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a probe whose structure is simplified and costs are reduced while maintaining the positional accuracy of the probe, and a probe card using the probe.

  In order to solve the above-mentioned problems, a probe according to the present invention is composed of a single wire, and is provided on the tip side of the probe and electrically contacts the electrode portion of the object to be inspected, and its central portion. A needle center portion that follows the needle tip portion and a needle rear portion that is provided on the rear end side and that follows the needle center portion. The needle central portion is fixed to the needle, and the needle central portion is elastic and supports the needle tip portion elastically in an annular shape of one rotation or more, and is electrically connected to the electrode on the substrate side. Contact with each other.

  The probe card includes probes that are in electrical contact with a plurality of electrode portions of the object to be inspected, and the probe described above is used as the probe, and the probes are attached to the plurality of electrode portions of the object to be inspected. A substrate that faces and supports the substrate, the substrate includes a one-side substrate portion disposed facing the object to be inspected, and another substrate portion located inside the one-side substrate portion, The one side substrate portion includes a through hole that supports the probe tip portion of the probe so as to be retractable and a bag hole to which the needle rear portion is fitted and fixed, and the other side substrate portion is connected to the probe. The center portion of the needle is provided with an electrode that makes electrical contact.

  In the probe according to the present invention, the annular needle center portion elastically supports the needle tip portion, and the needle tip portion is in electrical contact with the electrode on the substrate side. Instead, the needle tip portion can be stably supported by the elasticity of the center portion of the annular needle. Furthermore, since the needle tip portion is supported by the through hole of the one side substrate portion so as to be able to appear and retract, the position accuracy can be maintained.

  Furthermore, the structure of the probe is simplified, and the cost can be reduced.

  Hereinafter, a probe according to an embodiment of the present invention and a probe card using the probe will be described with reference to the accompanying drawings. The present invention is an invention characterized by a probe. Since the probe having the same configuration as that of the conventional probe card can be used except for the probe portion, the probe portion will be mainly described here.

  As shown in FIGS. 1 and 3, the probe 11 is composed of a single wire. Specifically, the probe 11 includes a needle tip portion 12, a needle center portion 13, and a needle rear portion 14.

  The needle tip portion 12 is a portion for making electrical contact with an electrode portion of an inspection object such as an IC chip. The needle tip portion 12 is provided on the distal end side of the probe 11. The needle tip portion 12 is formed in a linear shape. The linear needle tip portion 12 is supported by the needle center portion 13 and is inserted into a through hole 23 of the substrate-side one-side substrate portion 21 to be described later so as to be projected and retracted toward the electrode portion of the object to be inspected. It is extended.

  The needle center portion 13 is a portion for elastically supporting the needle tip portion 12 while being supported by the needle rear portion 14. The needle center portion 13 is formed following the needle tip portion 12 and is provided at the center portion of the probe 11. The needle center portion 13 is formed with elasticity. Specifically, since the wire constituting the probe 11 is made of an elastic metal wire, the needle center portion 13 formed in an annular shape has elasticity.

  The needle center portion 13 is formed in an annular shape of one rotation or more. In this embodiment, specifically, it is formed in an annular shape that is wound half a turn. Thereby, both the needle tip portion 12 and the needle rear portion 14 on both sides of the needle center portion 13 are extended to the one side substrate portion 21 side. Since the needle center portion 13 is formed in an annular shape with an elastic wire, the diameter of the annular elastic wire changes to elastically support the needle tip portion 12 and the needle rear portion 14. And since the needle rear part 14 is fixed to the one side substrate part 21 side, the needle center part 13 elastically supports the needle tip part 12 in a state of being supported by the needle rear part 14. Furthermore, the annular needle center portion 13 is in electrical contact with the electrode 25 of the other substrate portion 22 on the substrate side.

  The needle rear portion 14 is a portion that is fixed to the substrate side and directly supports the needle center portion 13 and indirectly the needle tip portion 12. The needle rear portion 14 is formed following the needle center portion 13 and is provided on the rear end side of the probe 11. The needle rear portion 14 is formed in a straight line, and is fitted and fixed to the bag hole 24 on the substrate side. The needle center portion 13 is directly supported by the needle rear portion 14 fitted and fixed in the bag hole 24, and the needle tip portion 12 is elastically supported through the needle center portion 13.

  Next, a probe card using the above-described probe 11 will be described.

  The probe card is a card provided with probes that are in electrical contact with a plurality of electrode portions of an object to be inspected. The overall configuration of this probe card is the same as that of the existing probe cards disclosed in Patent Documents 1 and 2, etc. The probe 11 is incorporated in this probe card.

  The probe card is configured to include a substrate 20 for supporting the probe 11 by facing the plurality of electrode portions of the object to be inspected. The substrate 20 includes a one-side substrate portion 21 disposed facing the object to be inspected, and another substrate portion 22 located inside the one-side substrate portion 21 (upper side in FIGS. 1 and 3). It is configured with.

  The one-side substrate portion 21 is disposed at a predetermined interval from the other-side substrate portion 22, and the probe 11 is accommodated between the one-side substrate portion 21 and the other-side substrate portion 22. The one side substrate portion 21 is configured to include a through hole 23 that supports the needle tip portion 12 of the probe 11 so that it can protrude and retract, and a bag hole 24 to which the needle rear portion 14 is fitted and fixed.

  The through hole 23 is provided at a position corresponding to each electrode portion of the object to be inspected. The through-hole 23 is set to a size that allows the needle tip portion 12 of the probe 11 to be inserted and retracted. The bag hole 24 is formed so that the needle tip portion 12 of the probe 11 is inserted into the through hole 23 and the needle center portion 13 is mounted between the one side substrate portion 21 and the other side substrate portion 22. It is provided in the part where the tip is located. The bag hole 24 is set to a size capable of inserting the needle rear portion 14.

  The other side substrate portion 22 is a plate portion that is in electrical contact with the needle center portion 13 of the probe 11. The other side substrate portion 22 includes an electrode 25 and a fall prevention guide 26. The electrode 25 is a portion for making electrical contact with the needle center portion 13 of the probe 11. The electrode 25 is provided in a portion where the needle center portion 13 is located in a state where the needle rear portion 14 of the probe 11 is fitted and fixed in the bag hole 24. As a result, the electrode 25 and the probe 11 are in electrical contact with each other reliably.

  The fall prevention guide 26 is supported so that the probe 11 does not fall over by fitting the needle tip portion 12 into the through hole 23 and fitting the needle rear portion 14 with the needle center portion 13 of the probe 11 inserted into the bag hole 24. It is a member for doing. The overturn prevention guide 26 is made of a plate material provided with a support groove 27 into which the needle center portion 13 of the probe 11 is fitted. The support groove 27 is set in accordance with the width and length in which the needle center portion 13 can be fitted.

  The annular portion of the needle center portion 13 of the probe 11 is disposed so as to be positioned between the electrode 25 of the other substrate portion 22 and the through hole 23 of the one substrate portion 21. Thus, when the needle tip portion 12 is pushed into the through hole 23 by overdrive, the annular needle center portion 13 absorbs fluctuations in the needle tip portion 12 while changing its diameter. That is, the needle center portion 13 supported by the needle rear portion 14 is elastically supported by the needle tip portion 12 while being deformed.

  The probe card incorporating the probe 11 configured as described above is used as follows.

  When inspecting an IC chip portion or the like of a semiconductor wafer, the probe card is attached to the inspection device, and the probe tip 12 of the probe 11 of the probe card is in electrical contact with each electrode of the IC chip portion or the like. An energization test is performed.

  At this time, when the needle tip portion 12 of the probe 11 contacts the electrode, the needle tip portion 12 is elastically supported by the needle center portion 13. That is, the needle tip portion 12 is pushed by the electrode by being in contact with the electrode and pushed into the through hole 23, but the needle tip portion 12 is elastically supported by the needle center portion 13, When the needle tip portion 12 is pushed in, the needle center portion 13 is deformed to support the needle tip portion 12. Thereby, the needle tip portion 12 is electrically contacted with the electrode at a constant pressure.

  At this time, the needle tip portion 12 may be slightly displaced in the lateral direction (left and right direction of the probe 11 and the needle center portion 13) in a state where the needle tip portion 12 is in contact with an electrode such as an IC chip portion. Is allowed at the needle center 13. That is, since the needle tip portion 12 is elastically supported by the needle center portion 13, even if the needle tip portion 12 is slightly laterally shifted, the needle center portion 13 is deformed to absorb the shift, and the needle The tip 12 is securely brought into contact with an electrode such as an IC chip.

  On the other hand, since the needle center portion 13 of the probe 11 is in electrical contact with the electrode 25 of the other side substrate portion 22, the inspection portion of the inspection device and the electrode of the IC chip portion of the semiconductor wafer are electrically connected. Then, an inspection signal is transmitted.

  When the probe 11 is worn or damaged by the test, the probe 11 is replaced. When replacing the probe 11, the following procedure is performed.

  The other side substrate part 22 is removed with the probe 11 attached. Next, the probe 11 to be replaced is specified, the needle rear portion 14 of the probe 11 is removed from the bag hole 24, and the needle tip portion 12 is removed from the through hole 23 to remove the probe 11.

  Next, a new probe 11 is attached. That is, the needle tip portion 12 of the probe 11 is inserted into the through hole 23, and the needle rear portion 14 is inserted into the bag hole 24.

  Next, the needle center portion 13 of the probe 11 attached to the other side substrate portion 22 is aligned so as to align with the support groove 27 of the overturn prevention guide 26 of the one side substrate portion 21, and the other side substrate portion 22 is moved to one side. It is attached to the substrate part 21 side. Thereby, the needle center portion 13 of the probe 11 is fitted into the support groove 27 of the fall prevention guide 26 and the probe 11 is set.

  When all the probes 11 are newly attached or replaced, all the needle tip portions 12 are inserted into the through holes 23 and the bag holes 24 of the other side substrate portion 22 and attached in the same manner as described above. The part 22 is attached to the one side substrate part 21 side.

  As described above, in the probe 11 of the present embodiment, the annular needle center portion 13 elastically supports the needle tip portion 12, and the needle tip portion 12 is electrically connected to the electrode 25 of the other side substrate portion 22. Because of the contact, the needle tip portion 12 can be stably supported not by the elasticity of the needle tip portion 12 but by the elasticity of the annular needle center portion 13. Even when the needle tip portion 12 contacts the electrode of the IC chip portion and slightly deviates, the needle center portion 13 absorbs the deviation, so that the needle tip portion 12 can be stably supported.

  Furthermore, since the needle tip part 12 is supported by the through hole 23 of the one side board | substrate part 21 so that it can protrude and retract, the position accuracy can be maintained.

  Furthermore, the structure of the probe 11 is simplified, and the cost can be reduced. Furthermore, the cost of the probe card using a large number of probes 11 can be reduced.

[Modification]
In the above embodiment, the needle center portion 13 of the probe 11 is formed by one and a half turns, but may be formed by two and a half turns as shown in FIG. Further, it may be formed by winding three or more half turns. It is set based on the elasticity required for the needle tip portion 12. Furthermore, the needle center portion 13 may be formed in two rotations or three or more rotations. In this case, the needle rear portion 14 is fixed to the other substrate portion 22 side.

  In the embodiment, each probe 11 is handled individually, but a plurality of probes 11 may be handled at the same time. Specifically, as shown in FIG. 5, the plurality of probes 11 may be simultaneously removed from the one-side substrate portion 21 through the support rods 28 through the needle center portions 13 of the plurality of probes 11 and attached at the same time. Thereby, it becomes easy to handle a large number of probes 11.

It is front sectional drawing which shows the principal part of the probe card which concerns on embodiment of this invention. It is principal part sectional drawing which shows the conventional probe card. It is side surface sectional drawing which shows the principal part of the probe card which concerns on embodiment of this invention. It is front sectional drawing which shows the 1st modification of this invention. It is front sectional drawing which shows the 2nd modification of this invention.

Explanation of symbols

  11: Probe, 12: Needle tip part, 13: Needle center part, 14: Needle rear part, 20: Substrate, 21: One side board part, 22: Other side board part, 23: Through hole, 24: Bag hole, 25 : Electrode, 26: fall prevention guide, 27: support groove.

Claims (5)

A needle tip portion that is formed of a single wire and is provided on the distal end side thereof and that is in electrical contact with the electrode portion of the object to be inspected, and a needle center portion that is provided in the center portion and that follows the needle tip portion. And a probe provided on the rear end side, and a needle rear portion following the needle center portion,
The needle rear part is fixed to the substrate side to support the needle center part,
A probe characterized in that the needle center portion has elasticity and forms an annular shape of one or more rotations to elastically support the needle tip portion and to be in electrical contact with the electrode on the substrate side. The probe according to claim 1, wherein
The needle center part is formed in an annular shape with one and a half turns, the needle tip part extends from the through hole on the substrate side so as to be able to protrude and retract, and the needle rear part is fitted and fixed to the bag hole on the substrate side Probe characterized by being made. A probe card including probes that are in electrical contact with a plurality of electrode portions of an object to be inspected,
While using the probe according to claim 1 or 2 as the probe, comprising a substrate for supporting the probe facing the plurality of electrode portions of the device under test,
The substrate includes a one-side substrate portion disposed facing the object to be inspected, and an other-side substrate portion positioned inside the one-side substrate portion,
The one side substrate portion includes a through hole that supports the probe tip portion of the probe so that it can protrude and retract, and a bag hole to which the needle rear portion is fitted and fixed,
The probe card according to claim 1, wherein the other substrate portion includes an electrode that is in electrical contact with the needle center portion of the probe. The probe card according to claim 3,
The needle center portion of the probe is formed in an annular shape that is wound half a turn and is in electrical contact with the electrode of the other side substrate portion,
The needle tip portion of the probe extends so as to be able to appear and retract from the through hole of the one side substrate portion,
The probe card according to claim 1, wherein the needle rear portion of the probe is fitted and fixed in a bag hole on the substrate side. The probe card according to claim 4,
The probe card, wherein the needle center portion of the probe is formed in an annular shape that is wound one turn between the electrode of the other side substrate portion and the through hole of the one side substrate portion.

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