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JP2010024108A - Dielectric porcelain composition and electronic component produced using it - Google Patents

Dielectric porcelain composition and electronic component produced using it Download PDF

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JP2010024108A
JP2010024108A JP2008189030A JP2008189030A JP2010024108A JP 2010024108 A JP2010024108 A JP 2010024108A JP 2008189030 A JP2008189030 A JP 2008189030A JP 2008189030 A JP2008189030 A JP 2008189030A JP 2010024108 A JP2010024108 A JP 2010024108A
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Hitoshi Masumura
均 増村
Jun Toshima
順 戸島
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Namics Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a dielectric porcelain composition capable of being fired at a low temperature, and an electronic component produced using it. <P>SOLUTION: The dielectric porcelain composition contains 100 mass parts of a (BaNdSm)TiO<SB>3</SB>-based porcelain composition as a main component, and against which 7-17 mass parts of Bi<SB>2</SB>O<SB>3</SB>, 1-5 mass parts of SiO<SB>2</SB>, 1-5 mass parts of ZnO, 0.5-3.5 mass parts of MgO, 0.5-3.0 mass parts of B<SB>2</SB>O<SB>3</SB>, 0.2-1.0 mass parts of Li<SB>2</SB>O and 0.2-1.5 mass parts of CuO are contained. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、低温で焼成可能な誘電体磁器組成物及びそれを用いて作製した電子部品に関する。   The present invention relates to a dielectric ceramic composition that can be fired at a low temperature and an electronic component manufactured using the dielectric ceramic composition.

近年の携帯電話等の高周波機器の小型化、高機能化、低価格化の流れに伴い、高周波機器に使用される部品にもまた、小型化、高機能化、低価格化が要求される。なかでも、これらの部品の材料として用いられる誘電体磁器組成物は、その焼成体の比誘電率(K値)が大きく、誘電損失(tanδ)が小さく、静電容量の温度依存性が小さいことが要求される。   With the recent trend of high-frequency devices such as mobile phones to be downsized, highly functional, and low-priced, parts used in high-frequency devices are also required to be downsized, highly functional, and low-priced. In particular, the dielectric ceramic composition used as a material for these parts has a large relative dielectric constant (K value) of the fired body, a small dielectric loss (tan δ), and a small temperature dependence of capacitance. Is required.

この要求に応えるべく、(BaNdSm)TiO系磁器組成物を主成分として、これに対し、Bi、SiO、ZnO、B、及び場合によりMgO、LiOを含有させた磁器組成物が提案されている(例えば、特許文献1参照)。 In order to meet this requirement, a (BaNdSm) TiO 3 -based porcelain composition is used as a main component, while Bi 2 O 3 , SiO 2 , ZnO, B 2 O 3 , and optionally MgO and Li 2 O are contained. A ceramic composition has been proposed (see, for example, Patent Document 1).

ところで、一般に誘電体磁器組成物は、1000℃以上の高温で焼成されるが、誘電体磁器組成物を用いた部品の低価格化を実現するためには、誘電体磁器組成物が低温で焼成可能であることが重要である。低温で焼成可能であると、高価な高温焼成炉が不要であり、また、焼成に際し、必要な電気エネルギーも少なく、環境への負荷も小さくすることができるからである。特に、誘電体磁器組成物が積層セラミックコンデンサに用いられる場合、内部電極として従来から用いられているPd、Pt、Au等の高価な貴金属に代えて、安価なAg単独又はAgの合金の使用可能性が広がり、低価格化への大きな寄与が期待できる。すなわち、焼成温度を、例えば800℃以下の低温にすることができれば、Agの融点962℃と比べて焼成温度が150℃以上も低くなるため、高温焼成におけるAgの融解、蒸発といった問題を避けることができるのである。また、そのような低温であれば、外部電極との同時焼成も容易になり、有用性は極めて高い。   By the way, in general, a dielectric ceramic composition is fired at a high temperature of 1000 ° C. or higher. However, in order to reduce the price of parts using the dielectric ceramic composition, the dielectric ceramic composition is fired at a low temperature. It is important that it is possible. This is because if it can be fired at a low temperature, an expensive high-temperature firing furnace is unnecessary, and in the firing, less electrical energy is required and the burden on the environment can be reduced. In particular, when the dielectric ceramic composition is used for a multilayer ceramic capacitor, it is possible to use inexpensive Ag alone or an Ag alloy instead of expensive noble metals such as Pd, Pt, Au, etc. that have been conventionally used as internal electrodes. It can be expected to make a significant contribution to price reduction. In other words, if the firing temperature can be lowered to, for example, 800 ° C. or lower, the firing temperature becomes 150 ° C. or more lower than the melting point of Ag 962 ° C., so avoid problems such as melting and evaporation of Ag in high-temperature firing. Can do it. Further, at such a low temperature, simultaneous firing with an external electrode becomes easy, and its usefulness is extremely high.

しかしながら、特許文献1に記載された誘電体磁器組成物は、800℃以下の低温で焼結させることが難しく、焼成温度に関しては改善の余地がある。
特開2007−55828号公報
However, the dielectric ceramic composition described in Patent Document 1 is difficult to sinter at a low temperature of 800 ° C. or less, and there is room for improvement with respect to the firing temperature.
JP 2007-55828 A

本発明の目的は、高周波領域で使用するのに好適な電気的特性を有する、低温で焼成可能な誘電体磁器組成物を提供することであり、そのような誘電体磁器組成物を用いて作製した電子部品を提供することにある。本明細書において、低温焼成とは、800℃以下の温度での焼成をいう。   An object of the present invention is to provide a dielectric ceramic composition that can be fired at a low temperature and has electrical characteristics suitable for use in a high frequency region, and is produced using such a dielectric ceramic composition. Is to provide an electronic component. In this specification, low temperature baking means baking at a temperature of 800 ° C. or lower.

本発明者は、鋭意検討を進めた結果、(BaNdSm)TiO系磁器組成物を主成分とし、添加物成分としてBi、SiO、ZnO、MgO、B、LiO、CuOを特定量で含有させた誘電体磁気組成物により、上記の課題を解決しうることを見出し、本発明を完成させた。 As a result of diligent investigation, the present inventor has a (BaNdSm) TiO 3 -based porcelain composition as a main component, and Bi 2 O 3 , SiO, ZnO, MgO, B 2 O 3 , Li 2 O, as additive components, The inventors have found that the above problems can be solved by using a dielectric magnetic composition containing CuO in a specific amount, and have completed the present invention.

本発明は、(BaNdSm)TiO系磁器組成物100質量部を主成分として、これに対し、Bi 7〜17質量部、SiO 1〜5質量部、ZnO 1〜5質量部、MgO 0.5〜3.5質量部、B 0.5〜3.0質量部、LiO 0.2〜1.0質量部及びCuO 0.2〜1.5質量部を含有する、誘電体磁器組成物に関する。また、本発明は、低温焼成用である、上記の誘電体磁器組成物に関する。 The present invention is mainly composed of 100 parts by weight of (BaNdSm) TiO 3 ceramic composition, and 7 to 17 parts by weight of Bi 2 O 3 , 1 to 5 parts by weight of SiO 2, 1 to 5 parts by weight of ZnO, Contains 0.5 to 3.5 parts by weight of MgO, 0.5 to 3.0 parts by weight of B 2 O 3 , 0.2 to 1.0 parts by weight of Li 2 O, and 0.2 to 1.5 parts by weight of CuO The present invention relates to a dielectric ceramic composition. The present invention also relates to the above dielectric ceramic composition for low-temperature firing.

さらに、本発明は、上記の誘電体磁器組成物を用いて作製した電子部品に関する。また、本発明は、誘電体層と内部電極層を備えた積層セラミックコンデンサであって、誘電体層が上記誘電体磁器組成物の焼成体で構成され、内部電極層がAg又はAg合金で構成される、積層セラミックコンデンサに関する。   Furthermore, this invention relates to the electronic component produced using said dielectric material ceramic composition. The present invention also provides a multilayer ceramic capacitor having a dielectric layer and an internal electrode layer, wherein the dielectric layer is composed of a fired body of the dielectric ceramic composition, and the internal electrode layer is composed of Ag or an Ag alloy. The present invention relates to a multilayer ceramic capacitor.

本発明によれば、高周波領域で使用するのに好適な電気的特性を有する、低温で焼成可能な誘電体磁器組成物が提供され、またそのような誘電体磁器組成物を用いて作製した電子部品が提供される。より詳細には、本発明の誘電体磁器組成物は、800℃以下での低温で焼結させることができるため、電子部品の低価格化に大きく貢献しうるものである。また、本発明の誘電体磁器組成物によれば、800℃以下での低温焼成によっても、K値が60以上であり、tanδが10×10−4以下であり、+25℃での静電容量を基準としたとき、+25〜+125℃の温度範囲における静電容量の温度変化率の係数(TC)が±30ppm/℃以内であり、高周波領域での使用に好適な電気特性を有する焼成体が得られる。 ADVANTAGE OF THE INVENTION According to this invention, the dielectric ceramic composition which can be baked at low temperature which has an electrical characteristic suitable for use in a high frequency area | region is provided, and the electron produced using such a dielectric ceramic composition Parts are provided. More specifically, since the dielectric ceramic composition of the present invention can be sintered at a low temperature of 800 ° C. or lower, it can greatly contribute to the cost reduction of electronic parts. In addition, according to the dielectric ceramic composition of the present invention, the K value is 60 or more, the tan δ is 10 × 10 −4 or less, and the capacitance at + 25 ° C. even by low-temperature firing at 800 ° C. or less. As a reference, a coefficient of temperature change rate (TC) of capacitance in a temperature range of +25 to + 125 ° C. is within ± 30 ppm / ° C., and a fired body having electrical characteristics suitable for use in a high frequency region is obtained. can get.

なお、静電容量の温度依存性については、一般に、米国電子工業会(EIA)によるC0G特性が基準とされる。C0G特性は、+25℃での静電容量を基準としたとき−55℃〜+125℃の広い温度範囲において静電容量のTCが±30ppm/℃以内と平坦である温度特性のことであるが、−55℃〜+25℃はゆるく規格化されており、実際に問題になるのは+25℃〜+125℃までの静電容量のTCである。そこで、本明細書においては、+25℃〜+125℃までの静電容量のTCを考慮することとする。   Note that the temperature dependence of the capacitance is generally based on the C0G characteristics by the Electronic Industries Association (EIA). The C0G characteristic is a temperature characteristic in which the TC of the capacitance is flat within ± 30 ppm / ° C. in a wide temperature range of −55 ° C. to + 125 ° C. with reference to the capacitance at + 25 ° C., −55 ° C. to + 25 ° C. is loosely standardized, and what actually becomes a problem is the TC of the electrostatic capacity from + 25 ° C. to + 125 ° C. Therefore, in this specification, TC of capacitance from + 25 ° C. to + 125 ° C. is considered.

本発明の誘電体磁器組成物は、(BaNdSm)TiO系磁器組成物を主成分とし、添加物成分としてBi、SiO、ZnO、MgO、B、LiO、CuOを含有する。Bi、SiO、ZnOは、電気的特性の向上への寄与が大きい成分であり、MgO、B、LiO、CuOは、焼成温度の低下への寄与が大きい成分である。なお、本発明の誘電体磁器組成物は、不可避的な不純物としてAl、Ca、Fe、Sn等が含まれることがある。 The dielectric ceramic composition of the present invention comprises a (BaNdSm) TiO 3 ceramic composition as a main component, and Bi 2 O 3 , SiO 2 , ZnO, MgO, B 2 O 3 , Li 2 O, CuO as additive components. Containing. Bi 2 O 3 , SiO 2 , and ZnO are components that greatly contribute to the improvement of electrical characteristics, and MgO, B 2 O 3 , Li 2 O, and CuO are components that greatly contribute to the decrease in firing temperature. is there. The dielectric ceramic composition of the present invention may contain Al, Ca, Fe, Sn, etc. as unavoidable impurities.

本発明において、主成分となる(BaNdSm)TiO系磁器組成物は、特に限定されず、例えば、BaCO、TiO、Nd、Smを出発原料として、これら原料を混合した後、仮焼することにより得ることができる。ただし、出発原料は、上記のものに限られず、焼成により酸化物を生成する水酸化物、炭酸塩、硝酸塩等の金属塩を用いることができる。なお、BaOについては、通常、安定なBaCOが出発原料として用いられ、仮焼により、BaCOのBaO以外の部分(CO)を、炭酸ガスとして放出させる。 In the present invention, the (BaNdSm) TiO 3 -based porcelain composition as the main component is not particularly limited. For example, these raw materials are mixed using BaCO 3 , TiO 2 , Nd 2 O 3 , and Sm 2 O 3 as starting materials. Then, it can be obtained by calcination. However, the starting materials are not limited to those described above, and metal salts such as hydroxides, carbonates, and nitrates that generate oxides by firing can be used. Note that the BaO, usually stable BaCO 3 is used as a starting material, by calcination, BaO rest of BaCO 3 and (CO 2), is released as carbon dioxide.

好ましい(BaNdSm)TiO系磁器組成物は、BaCOが18〜22mol%、Ndが9〜13mol%、Smが2〜6mol%、TiOが63〜67mol%(ただし、各成分のmol%の合計を100mol%とする)となるように秤量し、これらを湿式混合した後に乾燥させ、次いで混合粉を1170℃付近で仮焼し、得られた仮焼体を湿式粉砕し乾燥させて得ることができる。 A preferred (BaNdSm) TiO 3 -based porcelain composition is 18-22 mol% BaCO 3 , 9-13 mol% Nd 2 O 3 , 2-6 mol% Sm 2 O 3 , 63-67 mol% TiO 2 (however, The total of mol% of each component is 100 mol%), these are wet-mixed and dried, then the mixed powder is calcined at around 1170 ° C., and the obtained calcined body is wet-pulverized And dried.

本発明において、添加物成分であるBi、SiO、ZnO、MgO、B、LiO、CuOは、主成分である(BaNdSm)TiO系磁器組成物100質量部に対して、Bi 7〜17質量部、SiO 1〜5質量部、ZnO 1〜5質量部、MgO 0.5〜3.5質量部、B 0.5〜3.0質量部、LiO 0.2〜1.0質量部及びCuO 0.2〜1.5質量部である。このような量とすることにより、本発明の誘電体磁器組成物は、800℃以下の低温焼成によっても、K値を60以上、tanδ10×10−4以下、+25℃での静電容量を基準としたとき、+25〜+125℃の温度範囲でのTCを±30ppm/℃以内である焼成体を得ることができる。 In the present invention, Bi 2 O 3 , SiO 2 , ZnO, MgO, B 2 O 3 , Li 2 O, and CuO as additive components are contained in 100 parts by mass of the main component (BaNdSm) TiO 3 -based ceramic composition. in contrast, Bi 2 O 3 7~17 parts by, SiO 2 1 to 5 parts by weight, ZnO 1 to 5 parts by weight, MgO 0.5 to 3.5 parts by weight, B 2 O 3 0.5~3.0 parts by weight, and Li 2 O 0.2 to 1.0 parts by weight and CuO 0.2 to 1.5 parts by weight. By setting such an amount, the dielectric ceramic composition of the present invention has a K value of 60 or more, tan δ 10 × 10 −4 or less, and a capacitance at + 25 ° C. even when subjected to low temperature firing of 800 ° C. or less. As a result, a fired body having a TC within a temperature range of +25 to + 125 ° C. within ± 30 ppm / ° C. can be obtained.

さらに、主成分である(BaNdSm)TiO系磁器組成物100質量部に対して、Bi 10〜17質量部、SiO 2〜4質量部、ZnO 2〜4質量部、MgO 1〜3質量部、B 1〜2.5質量部、LiO 0.4〜0.8質量部及びCuO 0.4〜1.2質量部が好ましい。 Furthermore, 10 to 17 parts by mass of Bi 2 O 3 , 2 to 4 parts by mass of SiO 2 , 2 to 4 parts by mass of ZnO, and 1 to 2 parts of MgO 1 to 100 parts by mass of the main component (BaNdSm) TiO 3 -based ceramic composition. 3 parts by mass, 1 to 2.5 parts by mass of B 2 O 3 , 0.4 to 0.8 parts by mass of Li 2 O, and 0.4 to 1.2 parts by mass of CuO are preferable.

次に、本発明の誘電体磁器組成物を用いて作製した電子部品について、単板型及び積層セラミックコンデンサを例にとって説明する。   Next, an electronic component manufactured using the dielectric ceramic composition of the present invention will be described taking a single plate type and a multilayer ceramic capacitor as examples.

はじめに、主成分である(BaNdSm)TiO系磁器組成物と、添加物成分であるBi、SiO、ZnO、MgO、B、LiO、CuOの出発原料とを、焼成後に本発明の範囲内になるように秤量し、エタノールやトルエン等を媒体とし、ジルコニアビーズ等の粉砕媒体を用いて、一定時間湿式混合を行う。この際、適宜、分散剤を使用することができる。このようにして得られた混合体にポリビニルブチラール(PVB)等のバインダ樹脂、フタル酸ベンジルブチル(BBP)等の可塑剤を混合しセラミックスリップを調製する。このセラミックスリップから、ドクターブレード法によりシートを作製する。なお、Bi、SiO、ZnO、MgO、B、LiO、CuO等の出発原料は、焼成により酸化物を生成する水酸化物、炭酸塩、硝酸塩等の金属塩を用いてもよい。 First, a main component (BaNdSm) TiO 3 -based porcelain composition and additive components Bi 2 O 3 , SiO 2 , ZnO, MgO, B 2 O 3 , Li 2 O, and CuO as starting materials, After firing, the mixture is weighed so as to be within the range of the present invention, and wet mixing is performed for a certain time using a grinding medium such as zirconia beads using ethanol or toluene as a medium. At this time, a dispersant can be appropriately used. A ceramic slip is prepared by mixing a binder resin such as polyvinyl butyral (PVB) and a plasticizer such as benzylbutyl phthalate (BBP) with the mixture thus obtained. From this ceramic slip, a sheet is produced by a doctor blade method. In addition, starting materials such as Bi 2 O 3 , SiO 2 , ZnO, MgO, B 2 O 3 , Li 2 O, and CuO are metal salts such as hydroxides, carbonates, and nitrates that generate oxides by firing. It may be used.

次いで、単板型コンデンサの場合には、所望の厚さになるように、得られたシートを重ね、金型で圧力をかけ打ち抜き、円盤状サンプルを得る。得られたサンプルを、所定の温度で、大気中で焼成する。焼成体の両面に、Agペーストを印刷し、焼付けを行い、電極を形成し、単板型セラミックコンデンサを製造する。ここで、大気中での焼成は、800℃以下の低温で行うことができ、例えば750〜800℃の温度が挙げられる。焼成時間は、適宜、設定することができ、例えば、1〜5時間とすることができる。Agペーストとしては、Ag又はAg合金の粉末及びガラスフリットをバインダ樹脂及び溶剤に分散したものを使用することができる。バインダ樹脂としてはエチルセルロース等のセルロース系樹脂やメチルメタクリレート等のアクリル樹脂を用いることができ、溶剤としては、例えばエチルカルビトール、ブチルカルビトール、ターピネオール、ジヒドロターピネオール、エチルセルソルブ、ブチルセルソルブ、石油系溶剤、及びそれらの混合物を使用することができる。Agペーストには、適宜、分散剤等の添加剤を加えることができる。   Next, in the case of a single plate capacitor, the obtained sheets are stacked so as to have a desired thickness, and are punched by applying pressure with a mold to obtain a disk-shaped sample. The obtained sample is fired in the air at a predetermined temperature. An Ag paste is printed on both sides of the fired body and baked to form electrodes, thereby producing a single plate type ceramic capacitor. Here, the firing in the atmosphere can be performed at a low temperature of 800 ° C. or less, and examples include a temperature of 750 to 800 ° C. The firing time can be set as appropriate, and can be, for example, 1 to 5 hours. As the Ag paste, it is possible to use an Ag or Ag alloy powder and a glass frit dispersed in a binder resin and a solvent. Cellulose resins such as ethyl cellulose and acrylic resins such as methyl methacrylate can be used as the binder resin, and examples of the solvent include ethyl carbitol, butyl carbitol, terpineol, dihydroterpineol, ethyl cellosolve, butyl cellosolve, petroleum System solvents and mixtures thereof can be used. Additives such as a dispersant can be appropriately added to the Ag paste.

積層セラミックコンデンサの場合には、上記のようにして得られたシート上に、内部電極ペーストを印刷する。次いで内部電極ペースト層が引き出されている列が交互になるようにして、所望の枚数のシートを積層して積層体を得る。得られた積層体を加圧、切断し、積層ブロックを作成し、所定の温度で、大気中で焼成する。焼成体の引き出し電極両側に、外部電極ペーストを塗布し、焼付けを行い、内部電極と電気的に接続された外部電極を形成し、積層セラミックコンデンサを得る。ここで大気中での焼成は、800℃以下の低温で行うことができ、例えば750〜800℃の温度が挙げられる。焼成時間は、適宜、設定することができ、例えば、1〜5時間とすることができる。   In the case of a multilayer ceramic capacitor, the internal electrode paste is printed on the sheet obtained as described above. Next, a desired number of sheets are laminated so that the rows from which the internal electrode paste layers are drawn are alternated to obtain a laminate. The obtained laminate is pressed and cut to form a laminate block, which is baked in the air at a predetermined temperature. An external electrode paste is applied to both sides of the lead electrode of the fired body and baked to form an external electrode electrically connected to the internal electrode to obtain a multilayer ceramic capacitor. Here, the firing in the atmosphere can be performed at a low temperature of 800 ° C. or less, and examples include a temperature of 750 to 800 ° C. The firing time can be set as appropriate, and can be, for example, 1 to 5 hours.

上記の積層セラミックコンデンサの製造方法では、積層セラミックコンデンサの内部電極層と誘電体層とは同時焼成により得られる。本発明の誘電体磁器組成物を使用することにより、同時焼成を800℃以下の低温で行うことができるので、内部電極ペーストの導電成分をAg又はAg合金としても、Agの融解、蒸発といった問題が発生することなく、本発明の誘電体磁器組成物の焼成体からなる誘電体層と、Ag又はAg合金からなる内部電極層とを備えた積層セラミックコンデンサを得ることができる。Ag合金としては、当該分野で使用されるものであれば特に限定されない。内部電極ペーストとしては、Ag又はAg合金の粉末をバインダ樹脂及び溶剤に分散したものを使用することができる。バインダ樹脂としてはエチルセルロース等のセルロース系樹脂やメチルメタクリレート等のアクリル樹脂を用いることができ、溶剤としては、例えばエチルカルビトール、ブチルカルビトール、ターピネオール、ジヒドロターピネオール、エチルセルソルブ、ブチルセルソルブ、石油系溶剤及びそれらの混合物を使用することができる。内部電極ペーストには、適宜、分散剤等の添加剤を加えることができる。   In the above method for producing a multilayer ceramic capacitor, the internal electrode layer and the dielectric layer of the multilayer ceramic capacitor are obtained by simultaneous firing. By using the dielectric ceramic composition of the present invention, simultaneous firing can be performed at a low temperature of 800 ° C. or lower, so that the problem of melting and evaporation of Ag occurs even when the conductive component of the internal electrode paste is Ag or an Ag alloy. Thus, a multilayer ceramic capacitor including a dielectric layer made of a fired body of the dielectric ceramic composition of the present invention and an internal electrode layer made of Ag or an Ag alloy can be obtained. The Ag alloy is not particularly limited as long as it is used in this field. As the internal electrode paste, an Ag or Ag alloy powder dispersed in a binder resin and a solvent can be used. Cellulose resins such as ethyl cellulose and acrylic resins such as methyl methacrylate can be used as the binder resin, and examples of the solvent include ethyl carbitol, butyl carbitol, terpineol, dihydroterpineol, ethyl cellosolve, butyl cellosolve, petroleum System solvents and mixtures thereof can be used. Additives such as a dispersant can be appropriately added to the internal electrode paste.

さらに、外部電極を形成する外部電極用導電性ペーストを塗布してから、800℃以下の低温で同時焼成を行い、内部電極層、誘電体層、外部電極を形成させることもでき、便利である。外部電極ペーストとしては、Ag又はAg合金の粉末及びガラスフリットをバインダ樹脂及び溶剤に分散したものを使用することができる。バインダ樹脂としてはエチルセルロース等のセルロース系樹脂やメチルメタクリレート等のアクリル樹脂を用いることができ、溶剤としては、例えばエチルカルビトール、ブチルカルビトール、ターピネオール、ジヒドロターピネオール、エチルセルソルブ、ブチルセルソルブ、石油系溶剤、及びそれらの混合物を使用することができる。外部電極ペーストには、適宜、分散剤等の添加剤を加えることができる。   In addition, it is convenient to apply an external electrode conductive paste for forming external electrodes and then perform simultaneous firing at a low temperature of 800 ° C. or lower to form internal electrode layers, dielectric layers, and external electrodes. . As the external electrode paste, an Ag or Ag alloy powder and glass frit dispersed in a binder resin and a solvent can be used. Cellulose resins such as ethyl cellulose and acrylic resins such as methyl methacrylate can be used as the binder resin, and examples of the solvent include ethyl carbitol, butyl carbitol, terpineol, dihydroterpineol, ethyl cellosolve, butyl cellosolve, petroleum System solvents and mixtures thereof can be used. Additives such as a dispersant can be appropriately added to the external electrode paste.

本発明の誘電体磁器組成物は、積層セラミックコンデンサの材料に制限されず、高周波領域で使用される種々の誘電体共振器や温度補償用誘電体材料等、種々の電子部品の材料としても有用である。   The dielectric ceramic composition of the present invention is not limited to the material of the multilayer ceramic capacitor, but is also useful as a material for various electronic components such as various dielectric resonators used in the high frequency region and dielectric materials for temperature compensation. It is.

以下において、本発明を実施例によってさらに詳細に説明する。ただし、本発明は、これらの実施例により、何ら制限されるものではない。   In the following, the present invention will be described in more detail by way of examples. However, this invention is not restrict | limited at all by these Examples.

実施例1:単板型セラミックコンデンサ
主成分である(BaNdSm)TiO系磁器組成物を、以下のようにして調製した。出発原料であるBaCO、TiO、Nd、Smを、BaCO 20mol%、Nd 11mol%、Sm 4mol%、TiO 65mol%になるように秤量した。これらを、水を媒体とし、ジルコニアビーズを粉砕媒体として用いて、3時間湿式混合した後に乾燥させた。得られた乾燥体を1170℃で2時間仮焼し、次いで、再度、水を媒体とし、ジルコニアビーズを粉砕媒体として用いて、3時間湿式混合した後に乾燥させて、主成分である(BaNdSm)TiO系磁器組成物を得た。
Example 1 Single Plate Ceramic Capacitor A (BaNdSm) TiO 3 -based ceramic composition as a main component was prepared as follows. BaCO 3 , TiO 2 , Nd 2 O 3 , and Sm 2 O 3 as starting materials were weighed so as to be 20 mol% BaCO 3 , 11 mol% Nd 2 O 3 , 4 mol% Sm 2 O 3 , and 65 mol% TiO 2 . . These were wet-mixed for 3 hours using water as a medium and zirconia beads as a grinding medium, and then dried. The obtained dried body was calcined at 1170 ° C. for 2 hours, and again wet-mixed for 3 hours using water as a medium and zirconia beads as a grinding medium, and then dried to be the main component (BaNdSm) A TiO 3 -based porcelain composition was obtained.

得られた主成分である(BaNdSm)TiO系磁器組成物と、添加物成分の出発原料であるBi、SiO、ZnO、MgO、B、LiO及びCuOとを、焼成後の組成が表1に示すような目的組成になるように秤量し、エタノールとトルエンを質量比で50:50とした混合物を媒体として、ジルコニアビーズを粉砕媒体として用いて、16時間湿式混合してセラミックスラリーを得た。 The obtained main component (BaNdSm) TiO 3 -based porcelain composition and Bi 2 O 3 , SiO 2 , ZnO, MgO, B 2 O 3 , Li 2 O and CuO which are starting materials of additive components Weighing so that the composition after firing becomes the target composition shown in Table 1, using a mixture of ethanol and toluene in a mass ratio of 50:50 as a medium, and using zirconia beads as a grinding medium, wet for 16 hours A ceramic slurry was obtained by mixing.

得られたセラミックスラリーに、バインダ樹脂としてポリビニルブチラール(PVB)樹脂10質量%、可塑剤としてフタル酸ベンジルブチル(BBP)3質量%を添加し、更に16時間混合してセラミックスリップを得た。   To the obtained ceramic slurry, 10% by mass of polyvinyl butyral (PVB) resin as a binder resin and 3% by mass of benzylbutyl phthalate (BBP) as a plasticizer were added, and further mixed for 16 hours to obtain a ceramic slip.

得られたセラミックスリップを、ドクターブレード法によりシート状にし、媒体を揮発させ、厚さ約40μmのセラミックシートを得た。   The obtained ceramic slip was formed into a sheet by a doctor blade method, and the medium was volatilized to obtain a ceramic sheet having a thickness of about 40 μm.

得られたセラミックシートを25枚重ね、16.5mmφの金型を用いて、成型機にて3000kg/cmの圧力で打ち抜き成型して、厚さ1mmの円板状サンプルを得た。 25 sheets of the obtained ceramic sheets were stacked and punched and molded at a pressure of 3000 kg / cm 2 using a mold of 16.5 mmφ to obtain a disk-shaped sample having a thickness of 1 mm.

こうして得られた円板状サンプルを、温度を変化させて、2時間、大気中で焼成した。表1に示す温度は、得られた焼成体の吸水率が0.01%未満となった温度である。吸水率は、焼成体を、水に入れて真空脱泡して吸水させた後に、表面を拭いて計測した重量(A)と、それを150℃1時間で乾燥させたものの重量(B)とを測定し、((A)−(B))/(B)×100%として算出した。なお、以下において、「焼結」とは、得られた焼成体の吸水率が0.01%未満となったことをいう。   The disk-like sample thus obtained was fired in the air for 2 hours while changing the temperature. The temperature shown in Table 1 is the temperature at which the water absorption rate of the obtained fired body was less than 0.01%. The water absorption is the weight (A) measured by wiping the surface after the fired body is put in water and vacuum degassed to absorb water, and the weight (B) of the dried product at 150 ° C. for 1 hour. Was measured and calculated as ((A)-(B)) / (B) × 100%. In the following, “sintering” means that the water absorption of the obtained fired body is less than 0.01%.

Ag粉末、媒体としてターピネオール、ブチルカルビトール及びブチルカルビトールアセテート、Ag粉末に対して6質量%のエチルセルロース、6質量%のガラスフリットを混練して、Agペーストを調製した。表1に示す温度で、2時間、大気中で焼成して得られた焼成体の両面にAgペーストを塗り、650℃で焼付けし電極を形成し、単板型セラミックコンデンサを得た。得られた単板型セラミックコンデンサについて、K値、tanδを、1kHz、1Vrms(実効電圧)の測定条件でLCRメーターを用いて測定した。また、静電容量の温度係数TCを、+25℃における静電容量を基準とし、125℃での静電容量の差から算出した。K値について60以上、tanδについて10×10−4以下、TCについて±30ppm/℃以内を目標値とする。 Ag paste was prepared by kneading Ag powder, terpineol, butyl carbitol and butyl carbitol acetate as media, 6% by mass of ethylcellulose and 6% by mass of glass frit with respect to Ag powder. An Ag paste was applied to both sides of a fired body obtained by firing in the air for 2 hours at the temperature shown in Table 1, and baked at 650 ° C. to form an electrode, thereby obtaining a single plate ceramic capacitor. With respect to the obtained single plate type ceramic capacitor, the K value and tan δ were measured using an LCR meter under measurement conditions of 1 kHz and 1 Vrms (effective voltage). In addition, the temperature coefficient TC of the capacitance was calculated from the difference in capacitance at 125 ° C. with reference to the capacitance at + 25 ° C. The target value is 60 or more for K value, 10 × 10 −4 or less for tan δ, and within ± 30 ppm / ° C. for TC.

表1は、上記のようにして得られた単板型コンデンサの特性を表したものであり、×印は、本発明の範囲外の比較例を示す。   Table 1 shows the characteristics of the single-plate capacitor obtained as described above, and the x marks indicate comparative examples outside the scope of the present invention.

Figure 2010024108
Figure 2010024108

試料No.1〜6は、CuO量を変化させたものである。CuO未添加の試料No.1は、800℃以下の低温では焼結しなかった。また、添加量が2質量部の試料No.6は焼成温度を低くすることはできるが、誘電分散現象が発生し、TC及びtanδは目標値に及ばなかった。他方、CuO量が、0.2〜1.5質量部の試料No.2〜5は、800℃以下で焼結可能であり、K値、TC及びtanδのいずれも良好であった。   Sample Nos. 1 to 6 are obtained by changing the amount of CuO. Sample No. 1 to which no CuO was added was not sintered at a low temperature of 800 ° C. or lower. Sample No. 6 with an addition amount of 2 parts by mass could lower the firing temperature, but dielectric dispersion occurred, and TC and tan δ did not reach the target values. On the other hand, Sample Nos. 2 to 5 having a CuO amount of 0.2 to 1.5 parts by mass were sinterable at 800 ° C. or lower, and all of the K value, TC, and tan δ were good.

試料No.7〜13は、LiO量を変化させたものである。LiO未添加の試料No.7及び添加量が0.1質量部の試料No.8は、800℃以下の低温では焼結しなかった。また、添加量が1.2質量部のNo.14では、K値、TC及びtanδのいずれも目標値に及ばなかった。他方、LiO量が、0.2〜1.0質量部の試料No.9〜13は、800℃以下で焼結可能であり、K値、TC及びtanδのいずれも良好であった。 Sample Nos. 7 to 13 are obtained by changing the amount of Li 2 O. Sample No. 7 to which no Li 2 O was added and Sample No. 8 having an addition amount of 0.1 part by mass were not sintered at a low temperature of 800 ° C. or lower. Moreover, in No. 14 with an addition amount of 1.2 parts by mass, none of the K value, TC, and tan δ reached the target value. On the other hand, Sample Nos. 9 to 13 having an amount of Li 2 O of 0.2 to 1.0 part by mass could be sintered at 800 ° C. or lower, and all of K value, TC, and tan δ were good.

試料No.15〜21は、B量を変化させたものである。B未添加の試料No.15は、800℃以下の低温では焼結しなかった。また、添加量が3.5質量部である試料No.21もまた、800℃以下の低温では焼結せず、K値、TC及びtanδのいずれも目標値に及ばなかった。他方、B量が0.5〜3質量部の試料No.16〜20は、800℃以下で焼結可能であり、K値、TC及びtanδのいずれも良好であった。 Sample Nos. 15 to 21 are obtained by changing the amount of B 2 O 3 . Sample No. 15 to which B 2 O 3 was not added was not sintered at a low temperature of 800 ° C. or lower. In addition, Sample No. 21, whose added amount was 3.5 parts by mass, was not sintered at a low temperature of 800 ° C. or lower, and none of the K value, TC, and tan δ reached the target value. On the other hand, Sample Nos. 16 to 20 having an amount of B 2 O 3 of 0.5 to 3 parts by mass were sinterable at 800 ° C. or lower, and all of the K value, TC, and tan δ were good.

試料No.32〜28は、MgO量を変化させたものである。MgO未添加の試料No.22は、800℃以下の低温では焼結しなかった。また、添加量が4質量部である試料No.28もまた、800℃以下の低温では焼結せず、tanδも目標値に及ばなかった。他方、MgO量が0.5〜3.5質量部の試料No.23〜27は、800℃以下で焼結可能であり、K値、TC及びtanδのいずれも良好であった。   Sample Nos. 32 to 28 are obtained by changing the amount of MgO. Sample No. 22 to which no MgO was added was not sintered at a low temperature of 800 ° C. or lower. Further, Sample No. 28 having an addition amount of 4 parts by mass was not sintered at a low temperature of 800 ° C. or lower, and tan δ did not reach the target value. On the other hand, Sample Nos. 23 to 27 having an MgO amount of 0.5 to 3.5 parts by mass were capable of being sintered at 800 ° C. or lower, and all of the K value, TC, and tan δ were good.

試料No.29〜33は、ZnO量を変化させたものである。ZnO未添加の試料No.29は、800℃以下の低温では焼結しなかった。また、添加量が6質量部である試料No.33もまた、800℃以下の低温では焼結せず、K値及びtanδも目標値に及ばなかった。他方、添加量が1.0〜5.0質量部の試料No.30〜32は、800℃以下で焼結可能であり、K値、TC及びtanδのいずれも良好であった。   Sample Nos. 29 to 33 are obtained by changing the amount of ZnO. Sample No. 29 to which ZnO was not added was not sintered at a low temperature of 800 ° C. or lower. Further, Sample No. 33 having an addition amount of 6 parts by mass also did not sinter at a low temperature of 800 ° C. or lower, and the K value and tan δ did not reach the target values. On the other hand, Sample Nos. 30 to 32 having an addition amount of 1.0 to 5.0 parts by mass were sinterable at 800 ° C. or lower, and all of the K value, TC, and tan δ were good.

試料No.34〜38は、SiO量を変化させたものである。SiO未添加の試料No.34は、800℃以下の低温では焼結しなかった。また、添加量が6質量部の試料No.38は、焼成温度を低くすることはできるが、K値及びtanδが目標値に及ばなかった。他方、添加量が、1.0〜5.0質量部の試料No.35〜37は、800℃以下で焼結可能であり、K値、TC及びtanδのいずれも良好であった。 Sample Nos. 34 to 38 are obtained by changing the amount of SiO 2 . Sample No. 34 to which no SiO 2 was added was not sintered at a low temperature of 800 ° C. or lower. In addition, Sample No. 38 with an addition amount of 6 parts by mass could lower the firing temperature, but the K value and tan δ did not reach the target values. On the other hand, Sample Nos. 35 to 37 having an addition amount of 1.0 to 5.0 parts by mass were sinterable at 800 ° C. or lower, and all of K value, TC and tan δ were good.

試料No.39〜44は、Bi量を変化させたものである。添加量が5質量部の試料No.39は、800℃以下の低温では焼結しなかった。また、添加量が19質量部の試料No.44は、焼成温度を低くすることはできるが、tanδは目標値に及ばなかった。他方、添加量が、7.0〜17.0質量部の試料No.40〜No.43は、800℃以下で焼結可能であり、K値、TC及びtanδのいずれも良好であった。 Sample Nos. 39 to 44 are obtained by changing the amount of Bi 2 O 3 . Sample No. 39 having an addition amount of 5 parts by mass was not sintered at a low temperature of 800 ° C. or lower. In addition, Sample No. 44 having an addition amount of 19 parts by mass could lower the firing temperature, but tan δ did not reach the target value. On the other hand, Samples No. 40 to No. 43 having an addition amount of 7.0 to 17.0 parts by mass were sinterable at 800 ° C. or lower, and all of the K value, TC, and tan δ were good.

試料No.45は、特許文献1:特開2007−55828号公報の実施例の資料番号No.3に該当し、試料No.46〜47は、添加物成分の各成分間の比はそのままにして、添加物成分の合計を20質量部、23質量部まで増加させた試料である。No.45〜47は、それぞれ930℃、890℃、860℃で焼結し、いずれも800℃以下の低温焼成には遠く及ばなかった。試料No.48は、特許文献1:特開2007−55828号公報の実施例の資料番号No.24に該当し、試料No.49〜50は、添加物成分の各成分間の比はそのままにして、添加物成分の合計を20質量部、23質量部まで増加させた試料である。No.48〜50は、それぞれ930℃、900℃、870℃で焼結し、いずれも800℃以下の低温焼成には遠く及ばなかった。   Sample No. 45 corresponds to Document No. 3 in the example of Patent Document 1: Japanese Patent Application Laid-Open No. 2007-55828, and Samples Nos. 46 to 47 have the ratio of each additive component as it is. Thus, the total of the additive components was increased to 20 parts by mass and 23 parts by mass. Nos. 45 to 47 were sintered at 930 ° C., 890 ° C., and 860 ° C., respectively, and all did not far reach low-temperature firing at 800 ° C. or less. Sample No. 48 corresponds to Document No. 24 in the Examples of Patent Document 1: Japanese Patent Application Laid-Open No. 2007-55828, and Sample Nos. 49 to 50 have the ratio of each additive component as it is. Thus, the total of the additive components was increased to 20 parts by mass and 23 parts by mass. Nos. 48 to 50 were sintered at 930 ° C., 900 ° C., and 870 ° C., respectively, and all did not far reach low-temperature firing at 800 ° C. or less.

以上によれば、添加物成分であるBi、SiO、ZnO、MgO、B、LiO及びCuOを特定量で含むことにより、800℃以下の低温で焼結可能であり、K値、TC及びtanδが目標値を満たし、優れた電気特性がもたらされることがわかる。特に、MgO、B、LiO及びCuOについては、試料No.22と23、試料No.15と16、試料No.7・8と9、試料No.1と2との対比から、添加の有無により、焼成温度への影響が大きく、これらは焼成温度の低下への寄与が大きい成分といえる。一方、Bi、SiO、ZnOについては、試料No.39と40、試料No.34と35、試料No.29と30との対比から、むしろ電気的特性への改善への寄与が大きい成分といえる。 According to the above, it is possible to sinter at a low temperature of 800 ° C. or less by containing the additive components Bi 2 O 3 , SiO 2 , ZnO, MgO, B 2 O 3 , Li 2 O and CuO in specific amounts. It can be seen that the K value, TC, and tan δ meet the target values, resulting in excellent electrical characteristics. In particular, for MgO, B 2 O 3 , Li 2 O and CuO, from the comparison of sample Nos. 22 and 23, sample Nos. 15 and 16, sample Nos. 7 and 8 and 9, sample Nos. 1 and 2 Depending on the presence or absence of addition, the influence on the firing temperature is large, and these can be said to be components that greatly contribute to the reduction of the firing temperature. On the other hand, for Bi 2 O 3 , SiO 2 and ZnO, there is a contribution to the improvement in electrical characteristics rather than the comparison with Sample Nos. 39 and 40, Sample Nos. 34 and 35, and Sample Nos. 29 and 30. It can be said that it is a big ingredient.

実施例2:積層セラミックコンデンサ(1)
表1の試料No.4の組成で、実施例1と同様にして、厚さ11μmのセラミックシートを得た。Ag粉末、媒体としてターピネオール及び石油系溶剤、Ag粉末に対して6質量%のエチルセルロースを混練して、内部電極用Agペーストを調製した。セラミックシート上に内部電極用Agペーストを印刷し、内部電極を形成した。内部電極が形成されたセラミックスシートを、内部電極ペースト層が引き出されている列が交互になるよう80枚積層し、積層体を得た。得られた積層体を加圧、切断し、積層ブロックを作成した。
Example 2: Multilayer ceramic capacitor (1)
A ceramic sheet having a thickness of 11 μm was obtained in the same manner as in Example 1 with the composition of Sample No. 4 in Table 1. Ag powder for internal electrodes was prepared by kneading 6% by mass of ethyl cellulose with Ag powder, terpineol and petroleum solvent as a medium, and Ag powder. An internal electrode Ag paste was printed on the ceramic sheet to form an internal electrode. Eighty ceramic sheets on which internal electrodes were formed were laminated so that the rows from which the internal electrode paste layers were drawn were alternated to obtain a laminate. The obtained laminate was pressed and cut to produce a laminate block.

次いで、積層ブロックを、大気中で、770℃で2時間焼成した。Ag粉末、媒体としてターピネオール、ブチルカルビトール及びブチルカルビトールアセテート、Ag粉末に対して6質量%のエチルセルロース、6質量%のガラスフリットを混練して、外部電極用Agペーストを調製した。焼成後のセラミック焼成体の引き出し電極両側に、外部電極用Agペーストを塗布し、大気中で、650℃で焼付けて、内部電極と電気的に接続された外部電極を形成して、積層セラミックコンデンサを得た。   Next, the laminated block was fired at 770 ° C. for 2 hours in the air. Ag powder for external electrodes was prepared by kneading Ag powder, terpineol, butyl carbitol and butyl carbitol acetate as media, and 6% by mass of ethyl cellulose and 6% by mass of glass frit with respect to Ag powder. The ceramic paste after firing is coated with an external electrode Ag paste and baked in the atmosphere at 650 ° C. to form an external electrode electrically connected to the internal electrode. Got.

得られた積層セラミックコンデンサの外形寸法は、長さ2.0mm、幅1.2mm、厚さ1.2mmであった。内部電極間に介在する各誘電体セラミック層の厚さは8μmであり、有効誘電体セラミック層の総数は80層であった。   The outer dimensions of the obtained multilayer ceramic capacitor were 2.0 mm in length, 1.2 mm in width, and 1.2 mm in thickness. The thickness of each dielectric ceramic layer interposed between the internal electrodes was 8 μm, and the total number of effective dielectric ceramic layers was 80 layers.

実施例1と同様にして、得られた積層セラミックコンデンサの電気的特性を測定したところ、静電容量10,000pF、tanδが2×10−4、+25℃での静電容量を基準として、+25℃〜+125℃での静電容量のTCが−20ppm/℃と良好なものが得られた。 The electrical characteristics of the obtained multilayer ceramic capacitor were measured in the same manner as in Example 1. As a result, the capacitance was 10,000 pF, tan δ was 2 × 10 −4 , and the capacitance at + 25 ° C. was +25. A good TC of -20 ppm / ° C. was obtained at a capacitance of -20 ° C. to + 125 ° C.

実施例3:セラミックコンデンサ(2)
実施例2における焼成前の積層ブロックの引き出し電極側に、外部電極用ペーストを塗布し、大気中で、770℃で2時間焼成することにより、誘電体層、内部電極層及び外部電極層を同時焼成により形成して、積層セラミックコンデンサを得た。
Example 3: Ceramic capacitor (2)
The external electrode paste is applied to the lead electrode side of the laminated block before firing in Example 2, and the dielectric layer, the internal electrode layer, and the external electrode layer are simultaneously formed by firing at 770 ° C. for 2 hours in the air. A multilayer ceramic capacitor was obtained by firing.

得られた積層セラミックコンデンサの外形寸法は、長さ2.0mm、幅1.2mm、厚さ1.2mmであった。内部電極間に介在する各誘電体セラミック層の厚さは8μmであり、有効誘電体セラミック層の総数は80層であった。   The outer dimensions of the obtained multilayer ceramic capacitor were 2.0 mm in length, 1.2 mm in width, and 1.2 mm in thickness. The thickness of each dielectric ceramic layer interposed between the internal electrodes was 8 μm, and the total number of effective dielectric ceramic layers was 80 layers.

実施例1と同様にして、得られた積層セラミックコンデンサの電気的特性を測定したところ、静電容量10,000pF、tanδが2×10−4、+25℃での静電容量を基準として、+25℃〜+125℃での静電容量のTCが−20ppm/℃と良好なものが得られた。 The electrical characteristics of the obtained multilayer ceramic capacitor were measured in the same manner as in Example 1. As a result, the capacitance was 10,000 pF, tan δ was 2 × 10 −4 , and the capacitance at + 25 ° C. was +25. A good TC of -20 ppm / ° C. was obtained at a capacitance of -20 ° C. to + 125 ° C.

本発明の誘電体磁器組成物は、高周波領域において使用される種々の誘電体共振器や温度補償用誘電体材料、積層セラミックコンデンサとして用いることができる。   The dielectric ceramic composition of the present invention can be used as various dielectric resonators used in the high frequency region, dielectric materials for temperature compensation, and multilayer ceramic capacitors.

Claims (5)

(BaNdSm)TiO系磁器組成物100質量部を主成分として、これに対し、Bi 7〜17質量部、SiO 1〜5質量部、ZnO 1〜5質量部、MgO 0.5〜3.5質量部、B 0.5〜3.0質量部、LiO 0.2〜1.0質量部及びCuO 0.2〜1.5質量部を含有する、誘電体磁器組成物。 (BaNdSm) TiO 3 -based porcelain composition 100 parts by mass, Bi 2 O 3 7 to 17 parts by mass, SiO 2 1 to 5 parts by mass, ZnO 1 to 5 parts by mass, MgO 0.5 Dielectric containing ~ 3.5 parts by mass, B 2 O 3 0.5-3.0 parts by mass, Li 2 O 0.2-1.0 parts by mass and CuO 0.2-1.5 parts by mass Porcelain composition. 低温焼成用である、請求項1記載の誘電体磁器組成物。   The dielectric ceramic composition according to claim 1, which is for low-temperature firing. 請求項1又は2記載の誘電体磁器組成物を用いて作製した電子部品。   The electronic component produced using the dielectric ceramic composition of Claim 1 or 2. 誘電体層と内部電極層を備えた積層セラミックコンデンサであって、誘電体層が請求項1又は2記載の誘電体磁器組成物の焼成体で構成され、内部電極層がAg又はAg合金で構成される、積層セラミックコンデンサ。   A multilayer ceramic capacitor comprising a dielectric layer and an internal electrode layer, wherein the dielectric layer is composed of a fired body of the dielectric ceramic composition according to claim 1 or 2, and the internal electrode layer is composed of Ag or an Ag alloy. Multilayer ceramic capacitor. 内部電極層に接続する外部電極層を備えた積層セラミックコンデンサであって、誘電体層、内部電極層及び外部電極層が同時焼成により形成される、請求項4記載の積層セラミックコンデンサ。   The multilayer ceramic capacitor according to claim 4, wherein the multilayer ceramic capacitor includes an external electrode layer connected to the internal electrode layer, wherein the dielectric layer, the internal electrode layer, and the external electrode layer are formed by simultaneous firing.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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