JP2010014670A - Visual inspection apparatus, visual inspection method, image processing method, and visual inspecting apparatus using the apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To inclusively evaluate and inspect an appearance abnormal section and a surface depth abnormal section on many conditions that are close for visual inspection, using a simple apparatus structure. <P>SOLUTION: The cylinder peripheral surface inspecting apparatus 10 comprises an illumination section 12 for projecting the striped pattern from the bright field to the dark field on the peripheral surface of the cylinder object 1; a line laser projector for projecting light on the cylinder peripheral surface; a camera 14 for imaging the cylinder peripheral surface; and an image processing apparatus 30 for extracting the abnormal sections of the cylinder object 1 from pick-up image data. The image processing apparatus 30 comprises an appearance abnormality inspection section that aligns the positions of a plurality of developed images of different illumination conditions and imaging angles, reconstructs them into a virtual screen hierarchical array, and extracts the appearance abnormal section of the cylinder object 1 from stratification image data; a surface depth abnormality inspection section that indexes, from image data, the position of the cylinder peripheral surface on which a line laser beam is projected, extracts the surface depth abnormal section, and maps it on the virtual screen hierarchy array while performing alignment; and a determining section for inclusively determining the pass/fail of the cylinder object 1 from many data of different abnormality extraction conditions that are similar to visual inspection. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an appearance inspection apparatus, an appearance inspection method, an image processing method, and an appearance inspection apparatus using the appearance inspection apparatus for determining whether or not the appearance of a cylindrical body is acceptable.

Conventionally, an appearance inspection is performed in order to maintain the quality of a cylindrical pellet. As an inspection method, there is a method using an appearance inspection apparatus. In the peripheral surface appearance inspection device, the imaging inspection unit is uniformly illuminated with epi-illumination while rotating the cylindrical body, the rotating cylindrical body is imaged by the line sensor, and an inspection is performed by detecting the abnormal part. Is. Then, the inspection at this time has been performed using an image signal obtained by imaging the inspection unit irradiated with illumination light from one direction with a line sensor (see, for example, Patent Document 1). In addition, the end face appearance inspection apparatus performs an appearance inspection using a two-dimensional image taken at the center of a pellet under moderate illumination (see, for example, Patent Documents 2 and 3).
In addition, the surface distance of the pellet is measured by laser light irradiation triangulation from one direction, and the peripheral surface and the end surface are inspected by combining the measurement information using the intensity of the regular reflection light or scattered light. Methods are disclosed in US Pat.
JP-A-3-253963 JP-A-6-51091 Japanese Patent Laid-Open No. 7-27712 JP-A-3-226696 JP-A-8-15162

However, the conventional method for inspecting the appearance of pellets has the following problems.
That is, a visual inspection of a small amount of pellets can be dealt with by visual inspection by an inspector, but as the number of inspections increases, instability factors such as fatigue of the inspector increase. In addition, there has been a situation in which visual inspection cannot be performed for a long time with respect to things such as MOX fuel pellets with high radiation dose.
And in the peripheral surface and end surface appearance inspection apparatuses described in Patent Documents 1 to 5, characteristic surface abnormal appearance inspection, that is, a specific defect that can take S / N under certain conditions such as illumination and imaging angle. Although it is possible to make it an apparatus so that it can be detected and to further automate it, it is possible to comprehensively judge various kinds of defects and their depth etc. as in the visual appearance inspection performed by an inspector. There was a problem that pass / fail could not be judged. In other words, when an inspector finds a peculiar sign, it changes the angle of looking at the peculiar part and the periphery, observes the abnormality under dark field or bright field conditions, grasps the content, and deepens the depth of the abnormal part. There was a current situation that the acceptance of the pellet was judged.

  In order to cope with this problem, if an inspection line is constructed by arranging a large number of cameras and a large number of imaging devices so that these multiple defects can be detected, the device becomes a complex and large-scale line system. It is difficult and difficult to adopt because it takes time and effort for maintenance and requires a large installation space, and it is difficult to implement a high-level inspection instead of visual appearance inspection by an inspector. It was. Further, if these pieces of information are collected separately, there is a problem that it is difficult to make a comprehensive judgment by matching the information of the abnormal part to the position.

  The present invention has been made in view of the above-described problems, and in the inspection of a cylindrical body, a simple apparatus structure is used to perform continuous imaging with a single fixed two-dimensional camera. Provide an appearance inspection device, appearance inspection method, image processing method, and appearance inspection device using this that complement the abnormal portion of the appearance and the abnormal portion of the surface depth depending on conditions, and can comprehensively evaluate and inspect The purpose is to do.

  In order to achieve the above object, an appearance inspection apparatus according to the present invention is an appearance inspection apparatus for inspecting the appearance of a cylindrical body, and from a bright field that is parallel to the cylinder axis to a dark field on a cylindrical circumferential surface of the cylindrical body. Illumination unit that emits light so that a striped pattern from which a developed image of the image is obtained can be reflected in the captured image of the normal circumferential surface of the cylinder, and a line laser that projects line laser light from the outside in the radial direction of the cylindrical body toward the circumferential surface of the cylinder From a projector, a camera of a two-dimensional imaging device that images a cylindrical circumferential surface of a cylindrical body that rotates about a cylindrical body axis, and a plurality of image data that captures the cylindrical circumferential surface of the cylindrical body irradiated by the illumination unit, From the appearance abnormality inspection unit that extracts an abnormal portion of the outer appearance of the peripheral surface and a plurality of image data obtained by imaging the cylindrical peripheral surface of the cylindrical body on which the line laser light is projected, the cylindrical peripheral surface on which the line laser light is projected Determine the position of the abnormal part of the surface depth of the cylinder circumference. A surface depth abnormality inspection unit to be output, and a determination unit that evaluates at least the abnormal portion of the appearance and the abnormal portion of the surface depth with the pass / fail criteria information of the abnormal portion set in advance and determines the pass / fail of the cylindrical body It is characterized by having.

  In the present invention, a plurality of image data over the entire circumference obtained by imaging a striped pattern region reflected on the circumferential surface of the cylinder with a camera is a plurality of images each capable of identifying a surface position under illumination conditions from a bright field to a dark field and different imaging angles. The developed image is reconstructed, and using these developed images, the appearance abnormality inspection unit can extract the abnormal part of the appearance on the circumferential surface of the cylinder from the plurality of developed images with different positions. In addition, the surface position of the cylindrical peripheral surface projected with the line laser light is determined from the image data obtained by imaging the cylindrical peripheral surface projected with the line laser light in the surface depth abnormality inspection unit, and the surface depth is calculated. And map to the developed image. Then, the abnormal portion of the surface depth is extracted, and the extracted abnormal portion of the appearance and the surface depth is evaluated with each other in the determination unit, so that the pass / fail of the cylindrical body can be comprehensively determined. As described above, the abnormal portion can be detected based on the developed image data in which the surface positions of a large number of conditions are matched and can be comprehensively determined, so that an appearance inspection closer to the visual inspection can be performed.

  Further, in the appearance inspection apparatus according to the present invention, image data in which the illumination and imaging angle conditions are the same with respect to the cylinder axis is reconstructed from image data obtained by imaging the cylindrical circumferential surface irradiated by the illumination unit with a camera. It is preferable that an image reconstruction unit that generates developed image data with different illumination and imaging angle conditions is provided.

  In the present invention, for example, the image reconstruction unit extracts pixel data in a line of pixels having the same illumination and imaging angle condition with respect to the cylinder axis from the image data, and reconstructs the pixel data to develop a developed image. Data can be generated. The reconstructed developed image data is obtained by imaging a cylindrical surface with a fixed illumination and imaging angle condition with the cylindrical circumferential surface of the cylindrical body as a developed plane. That is, the developed image data is a developed image with different illumination and imaging angle conditions. Since it becomes data, it is possible to detect an abnormal part that meets the inspection request.

  Further, the appearance inspection apparatus according to the present invention is an appearance inspection apparatus for inspecting the appearance of a cylindrical body, and illuminates a light with uniform brightness over the entire area of the cylindrical end surface of the cylindrical body, and a predetermined value is applied to the cylindrical end surface. A line laser projector that projects a line laser beam at an angle, a two-dimensional imaging device camera that captures the cylindrical end surface of a moving cylindrical body, and a cylindrical end surface of a cylindrical body that is at a different position irradiated by the illumination unit From the plurality of image data, the appearance abnormality inspection unit for extracting the abnormal portion of the appearance of the cylindrical end surface, and the line laser from the plurality of image data obtained by imaging the cylindrical end surface of the cylindrical body at different positions where the line laser beam is projected. The position of the cylinder end face where the light is projected is determined, and the surface depth abnormality inspection part that extracts the abnormal part of the surface depth of the cylinder end face, and at least the abnormal part of the appearance and the abnormal part of the surface depth are set in advance. The Evaluated in acceptance criteria information normally portion is characterized by comprising a determination unit for determining acceptance or rejection of the cylindrical body.

  In the present invention, using the image data obtained by capturing the cylindrical end surface with the camera of the two-dimensional image sensor, the appearance abnormality inspection unit extracts the appearance abnormality portion on the cylinder end surface, and the surface depth abnormality inspection unit extracts the line laser light from the image data. The position of the end face of the cylinder where the light is projected is determined, the abnormal part of the surface depth is extracted, and the abnormal part of the extracted appearance and surface depth is evaluated in the judging part to comprehensively judge the pass / fail of the cylindrical body can do. Thus, since an abnormal part can be detected based on many conditions, the external appearance inspection close | similar to visual inspection can be performed.

  Further, in the appearance inspection method according to the present invention, a light is applied so that a striped pattern from which a developed image of a dark field from a bright field parallel to the cylinder axis is obtained on the cylindrical circumferential surface of the cylindrical body is reflected in the normal circumferential surface captured image of the cylinder. An imaging unit, a line laser projector that projects line laser light from the outside in the radial direction of the cylindrical body toward the cylindrical circumferential surface, and a cylindrical circumferential surface of the cylindrical body that rotates about the cylindrical body axis An appearance inspection method for inspecting the appearance of a cylindrical body using a camera of a two-dimensional image sensor, the step of imaging the cylindrical circumferential surface of the cylindrical body with a camera while rotating the cylindrical body, and irradiation with an illumination unit A step of reconstructing image data having the same illumination and imaging angle conditions with respect to the cylinder axis from a plurality of image data obtained by imaging the cylindrical peripheral surface to generate a plurality of developed image data having different illumination and imaging angle conditions And the illumination and imaging angle conditions are different. Extracting the abnormal portion of the appearance of the cylindrical peripheral surface from the developed image data, and a plurality of image data obtained by imaging the cylindrical peripheral surface on which the line laser light is projected, on the cylindrical peripheral surface on which the line laser light is projected. The process of determining the position and extracting the abnormal part of the surface depth of the cylindrical peripheral surface, and evaluating at least the extracted abnormal part of the appearance and the abnormal part of the surface depth with the pass / fail criteria information of the abnormal part set in advance And a step of determining pass / fail of the cylindrical body.

  In the present invention, it is possible to capture a striped pattern region reflected on a cylindrical peripheral surface rotated by the illumination unit with a camera and generate image data by processing the image data. This developed image data is an image of a cylindrical surface that has a certain illumination and imaging angle condition with the cylindrical circumferential surface as a development plane, and has different characteristic developed image data with different illumination and imaging angle conditions. An abnormal part of the appearance can be extracted. Then, the position of the cylindrical surface on which the line laser beam is projected is obtained from the captured image data of the region where the line laser beam is projected, and the surface depth is calculated from this position to determine the three-dimensional information. For example, the surface depth Compared with the standard reference information, the abnormal portion of the surface depth of the cylindrical peripheral surface can be extracted. Then, the pass / fail of the cylindrical body can be determined based on the extracted abnormal portion of the appearance and the abnormal portion of the surface depth.

  Further, in the appearance inspection method according to the present invention, an illumination unit that irradiates light of uniform brightness over the entire area of the cylindrical end surface of the cylindrical body, a line laser projector that projects line laser light at a predetermined angle on the cylindrical end surface, and , An appearance inspection method for inspecting the appearance of a cylindrical body using a camera of a two-dimensional image sensor that captures an end surface of a moving cylindrical body, where illumination and imaging angle conditions are different while moving the cylindrical body Imaging the cylindrical end face of the cylindrical body at the camera, extracting abnormal portions of the cylindrical end face from a plurality of image data obtained by imaging the cylindrical end face at different positions of the imaging angle, and line laser light A step of determining the position of the cylinder end surface on which the line laser beam is projected from a plurality of image data obtained by imaging the cylinder end surface on which the projection is projected, and extracting an abnormal portion of the surface depth of the cylinder end surface; Has been an abnormal portion of the abnormal portion and the surface depth of the appearance, and evaluated with acceptance criteria information of a preset abnormal portion is characterized by having a step of determining acceptability of the cylindrical body.

In the present invention, the moving cylindrical end face irradiated by the illumination unit is imaged by a camera, and the plurality of imaged image data become characteristic image data having different illumination and imaging angle conditions depending on the movement position, and these image data The abnormal part of the appearance can be extracted from the image.
Then, the moving cylindrical end face on which the line laser beam is projected is imaged with a camera. Obtain the position of the cylinder end face where the line laser beam was projected from the captured image data, calculate the surface depth from this position, determine the three-dimensional information, and compare it with the standard reference information of the surface depth, for example. Thus, the abnormal portion of the surface depth of the cylinder end face can be extracted. Then, the pass / fail of the cylindrical body can be determined based on the extracted abnormal portion of the appearance and the abnormal portion of the surface depth.

  Further, in the image processing method according to the present invention, in an apparatus that inspects and measures an object that is rotated or moved by a camera, an image that is temporally developed in a hierarchy of a developed virtual screen array using a virtual screen array having a necessary hierarchy. Pixels with the same conditions are mapped to the expanded virtual screen array corresponding to the position of the target object in the hierarchy, and image reconstructed image data of different hierarchies with different imaging conditions is obtained, and multiple hierarchies with different imaging conditions are obtained. Map the information obtained by comprehensively analyzing the data of the development virtual screen array of the required hierarchy to the development virtual screen array corresponding to the position of the target object of the hierarchy with predetermined logic from the development virtual screen arrangement of The object is inspected and measured by comprehensively identifying and judging the surface of the object with a predetermined logic from these multi-layered expanded virtual screen arrangements. There.

  In the present invention, it is possible to obtain a multi-condition unfolded image by layer from the images of one camera that is continuously capturing images.

  In addition, the appearance inspection apparatus according to the present invention is characterized by using the above-described image processing method.

  In the present invention, an abnormal part can be easily extracted from a plurality of developed image data subjected to matching processing, and the abnormal part can be superimposed and displayed at the same position on the circumferential surface of the cylinder. The abnormal part can be extracted based on the above, and the surface of the object at the common position in each hierarchy can be comprehensively identified and determined.

  In the appearance inspection method according to the present invention, in the object surface inspection apparatus, a color camera is used to project a line laser beam having a specific wavelength at an angle from the camera optical axis, and the line laser beam is specified. The surface of the object is imaged by illuminating with the illumination light whose wavelength is cut, and the image of the color of the specific wavelength of the line laser light is extracted from the captured image, the surface position is determined from this image, and the line laser is extracted from the captured image. It is characterized in that an image other than a color having a specific wavelength of light is extracted, a surface state is determined from this image, and identification including the shape and pass / fail of the object surface is performed from the determined surface position and surface state.

  In the present invention, from a single color camera image that is continuously captured, it is possible to obtain multi-condition development images for each layer at the same time, and it is also possible to obtain information on the projection surface of the line laser light at the same time. As a result, these pieces of information can be easily handled as position-matched information. In addition, in an appearance inspection apparatus using such an appearance inspection method, these pieces of information can be taken simultaneously with an image from a single color camera without collecting these information separately or taking them in two steps. The device is simple and inexpensive. Further, since each data can be collected from the same image, the alignment of these data can be made simple and highly reliable.

According to the appearance inspection apparatus, the appearance inspection method, the image processing method, and the appearance inspection apparatus using the same according to the present invention, a plurality of pieces of image data captured by a camera are used and image data with different illumination and imaging angle conditions are used. Extract the abnormal part of the appearance on the peripheral surface of the cylinder or the end face of the cylinder, and determine the position of the surface of the cylinder on which the line laser beam was projected from the image data obtained by imaging the cylinder on which the line laser beam was projected. It is possible to determine whether or not the cylindrical body is acceptable by comprehensively evaluating the extracted abnormal portions of the appearance and the surface depth. Thus, since an abnormal part can be detected based on many conditions, the external appearance inspection close | similar to visual inspection can be performed.
In addition, since these inspections can be carried out by an appearance inspection apparatus having a simple device structure, an inspection close to the visual appearance inspection of the inspector can be automated.

Hereinafter, a first embodiment of an appearance inspection apparatus, an appearance inspection method, an image processing method and an appearance inspection apparatus using the same according to the present invention will be described with reference to FIGS.
1 is a side view of a cylindrical peripheral surface inspection apparatus according to a first embodiment of the present invention, FIG. 2 is a cross-sectional view taken along line BB shown in FIG. 1, and FIG. 3 is a diagram illustrating a schematic configuration of an image processing apparatus. FIG. 4 is a flowchart showing a flow of processing of an appearance inspection method by a cylindrical peripheral surface inspection apparatus, and FIG. 5 is a diagram showing an example of a layered virtual screen array of abnormal portions extracted under each condition.

A reference numeral 10 shown in FIG. 1 is a cylindrical circumferential surface inspection device that forms an appearance inspection device according to the first embodiment, and inspects a cylindrical circumferential surface 1A of a cylindrical body 1 that forms a cylindrical body inspection sample to be inspected. Device.
The cylindrical circumferential surface inspection apparatus 10 includes a rotating unit 11 that rotates the cylindrical body 1 in a circumferential direction around a cylindrical body axis at a predetermined inspection position, and an illumination unit 12 that irradiates light to the cylindrical circumferential surface 1A of the cylindrical body 1. And line laser projectors 13A and 13B (13) that project line laser beams La and Lb from the radially outer side of the cylindrical body 1 toward the cylindrical circumferential surface 1A, and the cylindrical body 1 that rotates about the cylindrical body axis. The camera 14 is a two-dimensional imaging device that images the cylindrical peripheral surface 1A of the cylinder, and an image processing apparatus 30 that performs image processing on image data output from the camera 14 and extracts an abnormal portion of the cylindrical body 1. .

  The rotating unit 11 includes a pair of rollers 11A and 11A and a roller drive motor 11B for rotating the rollers 11A and 11A. The rotating unit 11 rotates the cylinders 1A and 11A at a constant speed by the roller drive motor 11B, thereby rotating the cylinder 1 at a constant peripheral speed around the cylinder axis. The rollers 11A and 11A are set to appropriate lengths so that the cylindrical body 1 can be stably rotated according to the axial length of the cylindrical body 1.

  The camera 14 is equipped with an imaging lens 14A and a two-dimensional imaging device 14B, and the imaging center axis Lo of the camera 14 is perpendicular to the cylinder axis of the cylinder 1 on the rollers 11A and 11A. That is, the cylindrical body axis of the cylindrical body 1 is arranged in the vertical direction with respect to the surface of the two-dimensional imaging device 14B. And the camera 14 images the area | region of the striped pattern (it mentions later in detail) reflected on the cylindrical peripheral surface 1A of the cylindrical body 1 at the speed according to the resolution of the predetermined circumferential direction, and the image data is imaged. This is output to the processing device 30. At this time, the camera 14 is arranged so that the cylinder axis of the cylinder 1 and the imaging scanning line of the two-dimensional imaging element 14B are parallel to each other.

As shown in FIG. 1, the illumination unit 12 includes a plurality of sample axis parallel illuminations 12A, 12A,... Arranged in parallel with the axial direction of the cylindrical body 1, a light shielding plate 12B, and sample axis parallel illuminations 12A, 12A, ... and an illumination support 12C for supporting the light shielding plate 12B, and side illuminations 12D and 12D (see FIG. 2).
The sample axis parallel illuminations 12A, 12A,... Have a cross-sectional columnar shape or an elliptical shape with a scallop type lens having directivity parallel to the cylinder axis, and the columnar body 1A has a columnar body 1A. The striped pattern from which a developed image of a dark field from a bright field parallel to the axis is obtained is displayed on the illumination support 12 </ b> C at a distance from each other so as to be reflected in the normal cylindrical surface captured image. As the light shielding plate 12B, an optical black dyed one is used so that the space between the sample axis parallel illuminations 12A becomes dark.

As a result, the sample axis parallel illumination 12A, 12A,... Form a striped pattern of brightness that is continuous with the captured image taken by the camera 14 with respect to the normal portion of the cylindrical surface of the cylindrical body 1. The cylindrical body surface image data becomes characteristic images under the conditions of illumination and imaging angle from bright field to dark field, depending on the location, and the illumination and imaging angle conditions are determined by matching the positions from these images. By reconstructing the same virtual development image for each layer, an abnormal appearance portion in the cylindrical body 1 can be detected.
The type, size, arrangement position, and brightness of the sample axis parallel illumination 12A are based on the concentricity of the cylindrical body 1, the variation in outer diameter, the bending, the abnormal part type, and how much defect detection accuracy is required. The optimal arrangement is determined.

Further, an opening 12a is formed in the illumination support 12C at a position on the vertical axis of the cylindrical body 1. The camera 14 can image the cylindrical circumferential surface 1A of the cylindrical body 1 through the opening 12a. As described above, the illumination light of the sample axis parallel illumination 12A, 12A,... Is reflected on the normal surface of the cylindrical peripheral surface 1A of the cylindrical body 1, and the reflected light is shown by the dense two-dot chain line A in FIG. It reaches the camera 14 through the columnar light shielding plate 14C by the imaging optical path. Then, the reflected light reaching the camera 14 is collected by the imaging lens 14A and imaged by the two-dimensional imaging device 14B (bright field). In this bright field region, if there are defects that cause abnormal reflection such as metal inclusions on the peripheral surface of the pellet, the defect appears brighter, and defects that are difficult to perform normal reflection such as pits and cracks often appear dark.
In addition, the peripheral surface portion where the regular reflection light on the normal peripheral surface does not form an image on the image pickup element appears dark, and if there is an abnormal surface having a reflection angle different from that of the normal surface, a portion appears brighter than the normal surface (dark field). In other words, because there are multiple illuminations with different angles, abnormal surfaces with different reflection angles from the normal surface appear brighter than the normal surface in the dark field. It becomes easy.

  As shown in FIG. 2, the side illuminations 12 </ b> D and 12 </ b> D on both sides are arranged at an obliquely upper position with a predetermined angle with respect to the cylinder axis of the cylinder 1, and darkness of the cylinder circumferential surface 1 </ b> A of the cylinder 1. Light (side light Lc) is emitted toward the entire length of the field-image-captured portion in an arrangement in which the regular reflection light of the side light Lc on the normal cylindrical circumferential surface 1A does not enter the camera 14. If the cylindrical peripheral surface 1A has a defective portion such as a dent or a flaw, a part of the light reflected by the defective portion is captured by the camera 14, and a part of the defective portion appears brighter than the normal portion. Therefore, by extracting the abnormal part, it is possible to check the defective part of the cylindrical peripheral surface 1A with higher accuracy. In this way, the side light Lc has a configuration that plays a role of complementary illumination so that the oblique surface is brightly reflected in the image portion where the normal surface is a dark field.

The line laser projectors 13A and 13B shown in FIG. 1 are arranged on both the left and right sides (left and right direction in FIG. 1) with the photographing center axis L _O of the camera 14 in between. The line laser beams La and Lb projected from the line laser projectors 13A and 13B have a linear shape, and are irradiated onto the cylindrical peripheral surface 1A of the cylindrical body 1 at a certain angle and projected onto the cylindrical end surface 1B. Forming a line. That is, the optical axes of the line laser beams La and Lb are at an arbitrary angle with respect to the photographing center axis L _O of the camera 14.

Then, a cylindrical peripheral surface 1A (hereinafter referred to as a line laser projection surface) on which the projection line and line laser beams La and Lb are projected is imaged by the camera 14, and is diffusely reflected from the line laser projection surface. Are captured as image data. The image data is obtained by subjecting the image of the surface of the line laser projection surface to image processing, grinding state on the cylindrical peripheral surface 1A of the cylindrical body 1, surface depth of the chip (depth dimension in the outer diameter direction), abnormal outer diameter, An abnormal part such as a dent-like abnormal part can be detected. Specifically, the image processing device 30 processes the image data to determine the position of the projected surface, calculate its height (corresponding to the surface depth), and the surface abnormality of the cylindrical circumferential surface 1A is detected. It is also possible to determine whether it has a depth or a rough surface, and further calculate and evaluate the volume of the chipped portion.
At this time, the depth of the surface is obtained by measuring the surface depth by complementing the measurement data of the two line laser beams from the left and right of the projected line laser beams La and Lb by matching the positions. Can be measured more accurately and reliably.

As illustrated in FIG. 3, the image processing apparatus 30 includes a transmission / reception unit 31, an image storage unit 32, an image processing unit 33, an abnormality inspection unit 34, a condition information storage unit 35, and a determination unit 36. ing.
The transmission / reception unit 31 is connected to the camera 14 and transmits an imaging condition, a data transmission condition, an imaging start signal, an imaging end signal, and the like to the camera 14 and receives image data of an image captured from the camera 14. It is.

  Then, the image processing apparatus 30 receives the image data captured by the camera 14 by the transmission / reception unit 31 and then captures the image data into the image storage unit 32. The image processing unit 33 performs image processing on the image data, and the abnormality inspection unit 34 performs the condition processing. Compared with the standard reference information of the normal part stored in the information storage unit 35 in advance, the abnormal part (defect part such as chipping and cracking) of the cylindrical body 1 (see FIG. 1) and the abnormal part of the surface depth , And the pass / fail of the cylindrical body 1 is determined based on the data comprehensively evaluated by the comprehensive evaluation pass / fail criteria information stored in advance in the condition information storage unit 35 for the extracted abnormal portion matched with the peripheral surface position. Judgment.

  The image processing unit 33 includes an image reconstruction unit 33A and a line laser projection image processing unit 33B. In the image reconstruction unit 33A, a plurality of image data for one or more rounds of the cylindrical body 1 (see FIG. 1) stored in the image storage unit 32 is reconstructed, and a plurality of developed image data is obtained. Is to be generated. For example, the extracted virtual screen array that extracts pixel data in a line of pixels having the same illumination and imaging angle conditions with respect to the cylinder axis from the image data, and synchronizes the position of the cylinder circumferential surface of the cylinder 1 with the pixel data It is possible to generate a plurality of developed image data in which the cylinder surface positions of the cylinders are synchronized. Then, the developed image data generated at this time is an image of the entire surface of the cylindrical surface that makes a certain illumination and imaging angle condition with the cylindrical circumferential surface 1A of the cylindrical body 1 as a developed plane. That is, each of the developed image data is developed image data in which the cylindrical surface positions of characteristic cylindrical bodies having different illumination and imaging angle conditions are synchronized, and therefore, an abnormal part meeting the inspection request can be detected.

  In addition, each developed image data is matched with the cylindrical surface position of each developed image data, and is detected from each developed image data with different illumination and imaging angle conditions from bright field to dark field under each detection condition. The positions of the different image portions are hierarchically mapped to the developed virtual screen array around the cylindrical surface. By analyzing and identifying abnormal parts extracted from these different conditions (OR, AND, etc.), it is possible to recognize more accurate abnormal parts / normal parts, and according to each condition, the actual condition of the surface can be more accurately determined. I can grasp. An image obtained by combining these can be monitored by the monitor 15.

  The line laser projection image processing unit 33B obtains the projection line of the line laser beams La and Lb (see FIG. 1) from the captured image data, that is, the position of the surface where the line laser beam is projected onto the outer periphery of the cylindrical body 1. From this line laser projection surface position, the surface depth at that position of the cylindrical body 1 is calculated. The outer diameter data of the cylindrical body 1 can be obtained by sampling this value for one round, and the depth of the unevenness of the outer circumferential development surface of the cylindrical body 1 is also one of the layers of the developed virtual screen arrangement described above. Can be mapped to a location. Furthermore, the surface reflected light amounts of the line laser beams La and Lb can also be collected. Here, the above-described outer peripheral development surface surface depth, surface reflection light quantity, and outer diameter data are collectively referred to as outer peripheral three-dimensional information mapped as one of the layers of the development virtual screen arrangement described above.

As the surface condition such as chipping, a portion where the depth is difficult to detect in one of the line laser beams La and Lb appears, or a part of the developed virtual screen arrangement appears missing. On the other hand, after the surface positions obtained by the line laser beams La and Lb are put into the virtual development screen array of each layer around the cylindrical surface, both data from the line laser beams La and Lb are complemented or averaged. In addition, as the comprehensive data is hierarchically mapped to the virtual development screen array around the cylinder surface, more accurate measurement can be performed.
Further, the outer diameter data of the outer periphery three-dimensional information can be reversed to a cylindrical body, corrected for measurement distortion and the like, calibrated with a standard sample, and used as outer diameter and outer strain measurement values.

The abnormality inspection unit 34 includes an appearance abnormality inspection unit 34A and a surface depth abnormality inspection unit 34B.
In the appearance abnormality inspection unit 34A, an abnormal portion of the appearance of the cylindrical peripheral surface 1A of the cylindrical body 1 based on the developed image data with different illumination and imaging angle conditions from the bright field to the dark field generated by the image reconstruction unit 33A. To extract. As will be described in detail later, an abnormal part (this is referred to as “unique abnormal part”) is extracted from a plurality of development image data hierarchically mapped to the virtual development screen array as necessary.
Further, in the surface depth abnormality inspection unit 34B, the standard information of the normal part set in advance, which is stored in the condition information storage unit 35 in advance, for example, is the three-dimensional information that is hierarchically mapped to the developed virtual screen arrangement described above. In comparison with the above, an abnormal portion of the surface depth of the cylindrical peripheral surface 1A is extracted.
The data of the abnormality inspection unit 34A and the abnormality inspection unit 34B are complementarily evaluated.

  Further, the determination unit 36 sets in advance an abnormal portion of the appearance of the expanded virtual screen array, an abnormal portion of the surface depth, and the like that are synchronized with the cylindrical surface position of the cylindrical body 1 extracted by the abnormality inspection unit 34. The pass / fail criteria information of the abnormal part is comprehensively evaluated, and pass / fail (pass, hold, fail, etc.) of the cylindrical body 1 is determined. The result is sent to the sorting unit 91A, and the cylindrical body 1 is sorted in correspondence with these evaluation data.

  The monitor 15 includes image data received from the camera 14 by the transmission / reception unit 31 of the image processing apparatus 30, development image data reconstructed in a hierarchical development virtual screen array, development image data in which extracted abnormal parts are marked, and the like. As necessary, various images and lists are output and displayed.

Next, an appearance inspection method for inspecting the cylindrical peripheral surface 1A of the cylindrical body 1 using the cylindrical peripheral surface inspection apparatus 10 according to the first embodiment configured as described above will be described based on the drawings.
As shown in FIGS. 1, 2, 3, and 4, first, in step S <b> 1, the columnar body 1 disposed on the pair of rollers 11 </ b> A and 11 </ b> A of the rotating unit 11 from the carry-in conveyance unit 19 </ b> A by the columnar body moving mechanism 18. The sample axis parallel illuminations 12A and 12A of the illumination unit 12 so that a striped pattern in which a developed image of a dark field from a bright field parallel to the cylinder axis is obtained on the cylindrical peripheral surface 1A Are turned on, and the side lights 12D and 12D (see FIG. 2) are turned on with appropriate brightness. Then, line laser beams La and Lb are projected from both line laser projectors 13A and 13B.

  Next, in step S2, the roller drive motor 11B of the rotating unit 11 is driven to rotate the rollers 11A and 11A at a constant speed, thereby rotating the cylinder 1 at a constant peripheral speed. The area of the cylindrical peripheral surface 1A that appears to be a striped pattern with the illumination of is picked up at a pitch speed corresponding to a predetermined circumferential resolution, and the image data is output to the image processing device 30. The image data at this time is a plurality of image data for one round or more than one round. The plurality of pieces of image data are received by the transmission / reception unit 31 in the image processing apparatus 30 shown in FIG. Following step S2, the process proceeds to step S3 and step S5.

  Depending on the level required for the inspection, images with no mutual interference can be obtained by imaging at the timing when the sample axis parallel illumination 12A, 12A,..., The side illumination 12D, and the line laser projectors 13A, 13B are turned on and off. It can also be obtained as data.

Further, in the inspection of the cylindrical peripheral surface 1A of the cylindrical body 1 when some colors may be excluded from the appearance inspection, an RGB color camera is used as the camera 14, and, for example, an R-cut felter is inserted in step S1. The illumination unit 12 is turned on to provide illumination light, R-color (for example, wavelength 635 nm) line laser beams La and Lb are projected, and in step S2, the cylindrical peripheral surface 1A of the rotating cylindrical body 1 is captured by the camera. 14, a plurality of images are taken at a specified pitch. In this example, an apparatus that performs line laser projection of an R color (for example, a wavelength of 635 nm) is taken up. However, the G and R lines are matched to the actual condition that the cylindrical end surface 1B that is the subject is a normal color or an abnormal color. It is preferable to use a cut felt that uses a laser to cut this color from the illumination light.
When the image data is taken into the image storage unit 32 from the camera 14 through the transmission / reception unit 31, the color image from which the image of the monochromatic wavelength line laser light La, Lb can be extracted is separated, and the image processing unit 33 performs the step S5. Stored as image data used in the line laser projection image processing unit 33B. Further, the image data excluding the color image by the line laser beams La and Lb is used for the image reconstruction unit 33A of the image processing unit 33 in step S3 described later.
As a result, a single camera 14 can simultaneously obtain a plurality of developed images under various conditions of appearance inspection and a surface position inspection image by laser projection.

Next, in step S3, the image reconstruction unit 33A reconstructs image data having the same illumination and imaging angle condition with respect to the cylinder axis from a plurality of image data captured and captured in the image storage unit 32. A plurality of developed image data having different illumination and imaging angle conditions is generated. In this plurality of reconstructed image reconstructions, the reconstructed virtual screen array that synchronizes the cylindrical surface positions of the cylindrical body 1 is hierarchically reconstructed, and the illumination and imaging angle conditions in which the cylindrical surface positions of the cylindrical body 1 are synchronized are different. A plurality of developed image data is generated.
In step S3, the image data can be collectively collected after the image data for one round of the cylindrical body 1 is taken into the image storage unit 32 while the image data is taken into the image storage unit 32 in step S2.

  Next, in step S4, in the appearance abnormality inspection unit 34A of the abnormality inspection unit 34, the standard reference information of the abnormality and normal part stored in the condition information storage unit 35 from each of the plurality of developed image data obtained in step S3. To extract abnormalities and normal parts of the appearance of the cylindrical circumferential surface 1A (extraction of first abnormal part information E1).

On the other hand, in step S5 following step S2, the line laser projected image processing unit 33B of the image processing unit 33 projects line lasers projected by the line laser projectors 13A and 13B from the image data captured in step S2 described above. The projection lines (line laser projection surface) of the light La and Lb are extracted to determine the position of the line laser projection surface, and the development surface position corresponding to the corresponding position of the development virtual screen array and the depth of the position are calculated. And plot it on the surface depth hierarchy of the expanded virtual screen array. The surface reflected light amount is also plotted in the surface reflected light amount hierarchy of the developed virtual screen array. From these, the three-dimensional information of the cylindrical surface is determined, the abnormal portion of the surface depth is extracted, and the line laser beam surface reflected light amount, the outer diameter data of the cylindrical body 1 and the irregularities of the cylindrical surface are obtained (second abnormal portion information E2). Extraction).
At this time, the cylindrical surface obtained by the two line laser beams La and Lb is obtained twice, and is plotted and stored at the corresponding position in each layer. Depending on the state of the cylinder surface, the measurement accuracy on one side or both sides may be deteriorated or missing, but more practical cylinder surface shape measurement can be performed by using these surface data obtained by double or averaging. .

In addition, when some interference between the illumination light and the line laser light affects the inspection, the light can be imaged and inspected while blinking alternately or in an arbitrary pattern in synchronization with the imaging of the camera.
In addition, the process of measuring the surface depth in step S5 and hierarchically plotting it on a developed virtual screen array that synchronizes the cylindrical surface position of the cylindrical body 1 is also performed while taking the image data into the image storage unit 32 or taking one round. It is also possible to collect all image data after the image data is loaded into the image storage unit 32.

In step S6, an abnormal part (first abnormal part information E1) extracted from a plurality of developed image data in which the cylindrical surface position of the cylindrical body 1 is matched and hierarchically placed in the developed virtual screen array, and the line laser The abnormal part (second abnormal part information E2) extracted from the optical image can be superimposed and displayed at the same cylindrical circumferential surface position, and the plurality of pieces of information can be comprehensively evaluated to complement the cylindrical surface of the cylindrical body 1. The third abnormal portion information E3 that can be more accurately recognized and more accurately determined is obtained.
For example, the extracted first abnormal part information E1 and the second abnormal part information E2 are comprehensively complemented based on the correlation of the developed image data of the plurality of hierarchies, such as being able to identify an abnormal part at a common position. Evaluate and extract as a specific abnormal part (extraction of third abnormal part information E3).

FIG. 5 shows an abnormal part (N1 to N3) extracted from a plurality of development image data and a line laser beam image extracted from a plurality of development image data hierarchically arranged in the development virtual screen array by matching the cylindrical surface positions of the cylinder 1 It is a figure which shows an example of the picture of the expansion | deployment virtual screen arrangement | sequence according to the layer of the abnormal part (N5) obtained by carrying out comprehensive evaluation of the some information of a part (N4).
The abnormal portion expanded virtual screen array illustrated in FIG. 5 includes the abnormal portions (N1 to N4) extracted from the developed images and the line laser light images having different conditions, and the first abnormal portion information E1 and the second abnormal portions. It is an example of the abnormal part of the 3rd abnormal part information E3 (N5) obtained from part information E2.
In the following description, each abnormal part is simply abbreviated as N1 to N5.

  For example, in the inspection of a sintered grinding cylinder, N1 is an abnormal part extracted from a developed image of a place taken at an oblique angle in a bright field from one side of the cylinder surface of the cylinder 1, and N2 is the center of the cylinder 1 Abnormal part extracted from the developed image of the place taken in the dark field on the axis (the optical axis of the camera 14), N3 is extracted from the developed image of the place where the side illumination shaft part from one side is taken in the dark field The abnormal part N4 is an abnormal part extracted from the left and right line laser light images, and N5 is a picture of the abnormal part of the third abnormal part information E3. It should be noted that these abnormal portions are displayed with good S / N ratios of characteristic defects by utilizing the features of the present method that can use developed images under various conditions. In addition, N1 and N3 indicate abnormal detection portions from the developed image at one side of the cylinder 1 across the center of the cylinder 1, but when determining N5, the opposite side across the center of the cylinder 1 and An abnormal part is also extracted from each of the developed images in the vicinity, and N5 is determined based on data from the developed images under many different conditions.

  In the defect K1, such as a chip observed in a sintered grinding cylinder, a chip wall with an angle that does not reflect regularly at N1 is detected, and some edges and walls of the chip that cause specular reflection in the dark field at N2 and N3 are detected. In N4, a part of the wall surface of the chip is likely to be missed, but it is supplemented with the images of the left and right line laser beams, followed by the first abnormal part information E1 as necessary, and the solid of the chip. The shape can be detected. In N5, the abnormal part of the third abnormal part information E3 followed by the first abnormal part information E1 as necessary based on the second abnormal part information E2 is a missing picture.

  In defects K2, such as circumferential scratches and grinding scratches that are likely to occur in sintered grinding cylinders, the S / N is small at N1 and N2, but it is detected with good S / N in the dark field developed image of N3 (in handling) (S / N increases in the dark field part away from N1 and N2 after rubbing in the axial direction, etc.), but N4 is likely to disturb data, but S / N is not good. And in N5, it becomes a picture of the abnormal part of the 3rd abnormal part information E3 which made the 1st abnormal part information E1 from N3 and its peripheral dark field expansion picture the main.

  In an unground defect K3 unique to the sintered grinding cylinder, S / N is likely to appear well in the developed image around N1, and one of the defects K3 in the developed image in the dark field such as N2 and N3. The portion is detected, and in N4, depending on the degree of the dent, the S / N cannot be expected so much in a portion where the dent depth is shallow. In N5, a picture of the abnormal portion of the third abnormal portion information E3 mainly including the first abnormal portion information E1 due to excessive reflection around the bright field and partial reflection of the dark field is obtained.

In a defect K4 such as a metal inclusion in a sintered grinding cylinder, a picture of an abnormal part of the third abnormal part information E3 mainly including the first abnormal part information E1 by the synthesis of the N1 bright-field excessive reflection from both sides. It becomes.
In the defect K5 such as a pit of the sintered grinding cylindrical body, a picture of the abnormal portion of the third abnormal portion information E3 mainly including the first abnormal portion information E1 due to N1 bright field reflection failure is obtained.
In the defect K6 such as a crack in the sintered grinding cylinder, a part of the defect K6 is detected in the developed image in the vicinity of N1 or in the dark field such as N3 depending on the occurrence of the crack. In N4, S / N cannot be expected unless it is very large. And in N5, it becomes a picture of the abnormal part of the 3rd abnormal part information E3 which made the main the 1st abnormal part information E1 which combined and integrated the detection abnormal part which mainly has a dark field.

Next, in step S7, the third abnormal part information E3 (and the layered data of the expanded virtual screen array at the same location) extracted in the abnormality inspection part 34 is compared with the pass / fail criterion information of the abnormal part set in advance. Then, the defective portion of the cylindrical peripheral surface 1A of the cylindrical body 1 is determined, and pass / fail is determined. The pass / fail determination at this time is determined by the determination unit 36 based on the determination conditions required for the appearance inspection set in the condition information storage unit 35, and the determination result is sent to the selection unit 91 </ b> A via the communication unit 41. At the same time, it can be displayed on the monitor 15 together with a developed image that clearly shows the defective part.
Moreover, the cylindrical body 1 after the inspection is sent to the carry-out conveyance unit 19B by the cylindrical body moving mechanism 18 and is carried out to the next stage. Among these, the cylindrical body 1 determined to be rejected and held is synchronized with the determination result. Then, it is sorted by the sorting unit 91A and discharged out of the transport unit.
In addition, the data of the abnormal portion of each cylindrical body evaluated from the data of each condition is accumulated, analyzed, and faded back to the production line.

In the appearance inspection apparatus and the appearance inspection method according to the first embodiment described above, the positions are synchronized from the plurality of image data picked up by the camera 14 as the developed image data in the places where the illumination and the imaging angle conditions are different, and are developed in each layer. In the virtual screen arrangement, the abnormal portion of the appearance on the cylindrical peripheral surface 1A of the cylindrical body 1 is comprehensively extracted from a plurality of developed images under different conditions, and the line laser beams La and Lb are irradiated. The position and depth of the cylindrical peripheral surface 1A on which the line laser beams La and Lb are projected are calculated from the image data obtained by imaging the cylindrical body 1, and plotted on the virtual cylindrical surface hierarchy of the developed virtual screen arrangement, and the surface depth In addition, the cylindrical portion 1 is judged to be acceptable by comprehensively evaluating the extracted abnormal portions of the appearance and surface depth and the data put into the developed virtual screen array for each layer under various conditions. Door can be. In this way, abnormal parts can be detected based on a large number of conditions, and these are extracted and complemented as a comprehensive virtual development data according to a number of different conditions. Can be inspected.
Moreover, these inspections can be performed by the cylindrical peripheral surface inspection device 10 having a simple device structure of one camera 14, and an inspection close to the visual appearance inspection of the inspector can be automated.

Next, a second embodiment of the present invention will be described with reference to FIGS. 6 to 9, and the same reference numerals are used for members and parts that are the same as or similar to those of the first embodiment described above. A description is omitted, and a configuration different from the first embodiment will be described.
6 is a plan view of the cylindrical end surface inspection device according to the second embodiment, FIG. 7 is a cross-sectional view taken along the line CC of the cylindrical end surface inspection device shown in FIG. 6, and FIG. FIGS. 9A to 9I are flowcharts showing the flow of the cylinder, and are views showing the moving state of the cylindrical body at the time of inspection.

  As shown in FIGS. 6 and 7, the appearance inspection apparatus according to the second embodiment is a cylindrical end face inspection apparatus 20 for inspecting both cylindrical end faces 1 </ b> B and 1 </ b> B of a cylindrical body 1. The cylindrical end surface inspection device 20 is provided on both sides of the conveyance unit 21 at positions shifted from each other in the conveyance direction (see FIG. 10 described later). In other words, the same cylindrical end surface inspection device 20 is arranged in line symmetry on the opposite side of the conveyance unit 21. 6 and 7 are diagrams showing one cylindrical end surface inspection device 20, and in the following description, the configuration and the inspection method of the one cylindrical end surface inspection device 20 will be described.

The cylindrical end surface inspection apparatus 20 projects a line laser beam with a predetermined angle to the transport unit 21 that moves the cylindrical body 1 in the horizontal direction, the illumination unit 22 that irradiates the cylindrical end surface 1B of the cylindrical body 1, and the cylindrical end surface 1B. Line laser projectors 23A and 23B (23), a camera 24 of a two-dimensional image sensor that images the cylindrical end surface 1B of the moving cylindrical body 1, and an image data output from the camera 24 is processed to extract abnormal portions. The image processing apparatus 30 is schematically configured.
Conveying section 21, the cylindrical body 1, perpendicular in the state in which the plane of the cylindrical end face 1B is directed in a direction orthogonal to the photographing center axis L _O of the camera 24 for imaging the central axis L _O of the camera 24 horizontal Move in the direction.

The camera 24 is equipped with an imaging lens 24A and a two-dimensional imaging device 24B, is disposed to face the cylindrical end surface 1B of the cylindrical body 1, and the surface of the two-dimensional imaging device 24B is perpendicular to the cylindrical body axis. It is arranged to become. Here, in the position of the cylinder 1, the position when the imaging center axis L _O of the camera 24 coincides with the cylinder axis of the cylinder 1 will be described as the center position P0.

  As shown in FIG. 7, in the illumination part 22 of the cylindrical end face 1B, the light source part 220 and the convex lens 221 are arranged in a line in the vertical direction. The light source unit 220 and the convex lens 221 are surrounded by the lens hood body 223. Further, a half mirror box 224 is provided below these light sources. In the half mirror box 224, a half mirror 224A inclined at 45 degrees with respect to the optical axis of the light beam emitted from the light source unit 220 is housed. The half mirror 224 </ b> A reflects the light emitted from the light source unit 220 toward the cylindrical end surface 1 </ b> B of the cylindrical body 1 that moves in the transport unit 21. Then, the light beam emitted from the light source unit 220 is focused by the convex lens 221 and passes through the (R) cut felter 222 so as not to be mixed with the color of the line laser beam. The illumination light D is reflected, and the normal surface of the cylindrical end surface 1B of the cylindrical body 1 is illuminated, so that the cylindrical end surface 1B can be clearly imaged.

As shown in FIG. 6, the line laser projectors 23 </ b> A and 23 </ b> B are arranged on both sides (vertical direction in FIG. 6) with the imaging center axis L _O of the camera 24 interposed therebetween. The line laser beams La and Lb projected from the line laser projectors 23A and 23B are linear, and two parallel laser beams are provided near the center of the columnar end surface 1B of the columnar body 1 located at the center position P0. It is installed to be projected as a line. That is, the optical axes of the line laser beams La and Lb are positioned so as to form a predetermined angle with respect to the photographing center axis L _O of the camera 24.
The line laser beams La and Lb are projected onto the cylindrical end surface 1B of the cylindrical body 1, and a projection line, that is, a cylindrical end surface 1B (hereinafter referred to as a line laser) on which the line laser beams La and Lb are projected onto the cylindrical end surface 1B. A light emitting surface). This line laser projection surface is photographed by the camera 24 and captured as image data.

  The specific configuration of the image processing apparatus 30, that is, the configuration of the transmission / reception unit 31, the image storage unit 32, the image processing unit 33, the abnormality inspection unit 34, the condition information storage unit 35, and the determination unit 36. Since the configuration is the same as that of the image processing apparatus 30 (see FIG. 3) of the first embodiment, detailed description thereof will be omitted, and the image processing apparatus 30 will be described with reference to FIG.

Next, an appearance inspection method for inspecting the cylindrical end surface 1B of the cylindrical body 1 using the cylindrical end surface inspection apparatus 20 according to the second embodiment configured as described above will be described based on the drawings.
As shown in FIGS. 6 to 9, an RGB color camera is used as the camera 24. First, in step S11, the illumination unit 22 including the R-cut felter 222 is turned on as illumination light D, and an R color (for example, wavelength) is used. The line laser projectors 23A and 23B (635 nm) are also turned on.

Next, in step S12, a plurality of images are taken at a prescribed pitch by the camera 24 on the cylindrical end surface 1B of the cylindrical body 1 that flows stably and continuously at a constant speed as shown in FIG. In this example, an apparatus that emits a line laser of R color is taken up. However, G, R, or a specific single wavelength line laser is used in accordance with the actual condition that the cylindrical end surface 1B that is the subject is a normal color or an abnormal color. A cut felter that cuts this color from the illumination light is used.
Then, the plurality of image data captured in step S12 are sequentially output to the image processing apparatus 30 shown in FIG. The plurality of image data are sequentially taken into the image storage unit 32 by the transmission / reception unit 31 in step S13.

  Here, the image captured at the center position P0 is regularly reflected on the normal surface of the cylindrical end surface 1B, and is captured with uniform brightness over the entire end surface. When there is an abnormal part with a different reflectance on the cylindrical end surface 1B, the abnormal part is reflected with a brightness different from that of the normal part. In addition, the images captured at the imaging position P1 and the imaging position P2 are images with different imaging angles that are shifted from the image at the center position P0 in the front-rear direction of conveyance.

In step S14, among the sequentially captured images, an image captured at a predetermined position including an image captured at the center position P0, and G and B (other than R) image data of this image In the image reconstruction unit 33A, the relative position of the columnar end surface 1B of the columnar body 1 that is the subject is corrected and mapped to each layer on the end surface virtual screen hierarchical array based on the image position captured at the center position P0. .
For example, the 0th layer is an image at the center position P0 (FIG. 9 (e)), the 1st layer is FIG. 9 (f), the 2nd layer is FIG. 9 (g), the 3rd layer is FIG. 9 is obtained by correcting the relative position of the cylindrical end face 1B of FIG. 9C and mapping the image data of each image on each layer. The images of these layers overlap with the position of the cylinder end surface 1B as it is. These correspond to the cylindrical end surface of the cylindrical end surface 1B viewed from a right angle, the cylindrical end surface viewed slightly from the right, the cylindrical end surface viewed from the right, the cylindrical end surface viewed from the left slightly, and the cylindrical end surface viewed from the left. This is an image corresponding to a visual effect. At this time, the image data from the G and B (other than R) images are not affected by the line laser beam.

Further, in step S14, the cylindrical end surface 1B is subjected to conditions such as the standard reference information of the normal part previously stored in the condition information storage unit 35 from the captured image at the center position P0 in the appearance abnormality inspection unit 34A (see FIG. 3). Extract the abnormal part of the appearance.
In addition, the images of the cylindrical end face 1B at the imaging positions P1 and P2 having different imaging angles are mapped to the end face virtual screen hierarchical arrangement by correcting the relative positions, and stored in advance in the condition information storage unit 35 in the abnormality inspection unit 34. Under the conditions such as the standard reference information of the normal portions of the imaging positions P1 and P2 that have been taken into account, image information different in parallax, brightness, etc. of the imaging positions P1 and P2 is also taken into account, and the abnormal portion of the appearance of the cylindrical end surface 1B is integrated Extract more accurately (first appearance abnormality information F1).

  Next, in step S15, the line laser is extracted from an area where the line laser light projected onto the cylindrical end surface 1B may be reflected from the sequential images taken by the camera 24 of the cylindrical end surface 1B captured in the image storage unit 32. Separate the light color (for example, R) image data from the line laser beam colorless (for example, GB) image data.

In step S16, from the image data in which the line laser beam is not reflected, the image reconstructing unit 33A causes the constant pixels of the imaging vertical angles of X1 to Xn to be arranged in the end face virtual screen hierarchical array at the center position P0. By mapping hierarchically so as to match the captured image at, the image of the surface appearance of the cylinder end face 1B is reconstructed from a plurality of different angles, and the inspector holds the cylinder 1 with tweezers. A plurality of image data corresponding to an appearance inspection (from different angles) is obtained by observing the cylinder end face while tilting the cylinder end face.
Further, if the portion where the line laser beam is reflected is removed from the selected imaging vertical angle, the line laser projection inspection and the appearance inspection can be simultaneously performed without using the color cut felter.

  In the appearance abnormality inspection unit 34A (see FIG. 3), an abnormal portion of the appearance of the cylindrical end surface 1B is extracted from a plurality of reconstructed images at different angles under the corresponding abnormal part extraction conditions stored in advance in the condition information storage unit 35. Extract. In consideration of different image information such as parallax and brightness of reconstructed images at different angles, the abnormal portion of the appearance of the cylindrical end surface 1B is extracted more accurately and comprehensively (second appearance abnormality information F2).

Next, in step S17, in the line laser projection image processing unit 33B and the surface depth abnormality inspection unit 34B shown in FIG. 3, image data captured by the camera 24 (here, imaged in step S12 and in step S15). The projected line laser light projection position is detected from the color (for example, image data obtained by separating the image of the line laser light projected on the end face 1B) (R), and the line laser projected surface of the cylindrical end face 1B is detected. The three-dimensional information is determined and mapped to the end face virtual screen hierarchy array that matches the image at the center position P0. Further, the brightness of the laser line light of this image is mapped to the end face virtual screen hierarchical arrangement to generate a laser diffused light image F4.
From the data of the entire cylindrical end surface 1B, the reference solid surface of the cylindrical end surface 1B of the condition information recording unit 35 is referred to extract an abnormal portion of the surface depth (extraction of the surface depth abnormal information F3), and the end surface virtual screen hierarchy Map to an array.

Next, in step S18, each of the extracted information (F1 to F4) is hierarchically mapped to the end face virtual screen hierarchy array in position synchronization in the abnormality inspection unit 34 shown in FIG. A plurality of end face virtual screen hierarchies that are hierarchically mapped are comprehensively evaluated with the characteristic logic of the condition information recording unit 35, and a peculiar abnormal part is extracted (extraction of peculiar abnormality information F5).
For example, in a defect such as a chip with a depth found on the end surface of a sintered ground cylindrical body, a chipped peeling surface having a small regular reflection is detected by the first appearance abnormality information F1 and the second appearance abnormality information F2. However, some areas may be difficult to distinguish from the normal surface. In the surface depth abnormality information F3, by using the projection surface of the line laser light from both directions, the three-dimensional shape of the chip can be measured, and the evaluation can be evaluated by the size and volume of the chip. For end face rubbing traces and sintered delamination traces that are likely to occur in mass-produced sintered grinding cylinders, surface depth abnormality information F3 is used as abnormal part extraction data in first appearance abnormality information F1 and second appearance abnormality information F2. Taking into account the surface measurement data, it is judged at the same level as an inspector. The discoloration of the surface is comprehensively evaluated from the data of the first appearance abnormality information F1 and the second appearance abnormality information F2, and is determined as specific abnormality information F5. For the attached matter, the surface abnormality of the surface depth abnormality information F3, the first appearance abnormality information F1 and the second appearance abnormality information F2 are considered and evaluated comprehensively, and the abnormal part is determined as the specific abnormality information F5. To do.

Subsequently, in step S19, the determination unit 36 evaluates the extracted abnormal abnormality information F5 by comparing it with the pass / fail criterion information of the abnormal part set in advance, and determines the pass / fail of the cylindrical end face 1B of the cylindrical body 1. Thus, the defective portion of the cylindrical body 1 is determined, and pass / fail and hold are determined.
And the cylindrical body 1 after the inspection is carried out to the acceptable product stock section 60 by the transport unit 21 and is determined to be rejected and suspended, as in the first embodiment. The cylindrical body 1 is sorted by the sorting unit 91 </ b> B in synchronization with the determination result and discharged out of the transport unit 21.

  As described above, in the appearance inspection method of the cylindrical end surface inspection apparatus 20 according to the second embodiment, the appearance inspection can be performed without stopping the cylindrical body 1 while being transported by the transport unit 21, As with the configuration, it is possible to conduct inspections at a level close to visual inspection by an inspector because it is possible to extract abnormal parts of the appearance and surface depth under a number of conditions, evaluate them, and inspect them under a number of conditions. it can.

As described above, the first and second embodiments of the appearance inspection apparatus, the appearance inspection method, the image processing method, and the appearance inspection apparatus using the same according to the present invention have been described. The present invention is not limited to the embodiment, and can be changed as appropriate without departing from the scope of the invention.
For example, the configurations and the number of installations of the illumination units 12 and 22 and the line laser projectors 13 and 23 can be arbitrarily determined. That is, two line laser projectors are used in the first and second embodiments, but three or more line laser projectors may be used. In short, the first and second embodiments are standard configurations, and the size, arrangement location, spacing, etc. of the illumination are the size, curvature, normal peripheral surface state and detection of the cylindrical body 1 It may be adjusted according to the required resolution of the defect to be performed.

  In the first embodiment, a separate image is processed without taking an image irradiated with the illumination unit 12 and the line laser projector 13 at the same time, so that a more accurate inspection is performed. Also good. That is, the camera 14 captures an image obtained by rotating the cylindrical body 1 once with illumination in a striped pattern from which a dark field developed image can be obtained from the bright field described above. Furthermore, by capturing the images of the line laser projectors La and Lb projected by the line laser projectors 13A and 13B at the second rotation with the camera 14, and extracting and reconstructing pixels at necessary locations from the plurality of images, An abnormal appearance portion may be extracted by obtaining the developed image data.

Moreover, in FIG. 2, five peripheral surfaces of the cylindrical body 1 are simultaneously imaged and inspected. When the normal imaging lens 14 </ b> A is used, the outer cylindrical body 1 has an imaging angle in the axial direction as compared with the middle cylindrical body 1, so that an image with an imaging angle is obtained from the middle cylindrical body 1. For this reason, the inspection image of the middle cylinder 1 and the image of the outer cylinder 1 are not the same.
In order to cope with such a severe requirement that the difference due to the position of the cylindrical body 1 is not practically acceptable, the number of images taken simultaneously is reduced to an allowable number (minimum of 1). Alternatively, a tericentric lens is used for the imaging lens 14A. Alternatively, a deformed cylindrical lens is inserted between the imaging lens 14 </ b> A and the cylindrical body 1 in parallel to the axis of the cylindrical body 1, and the outer cylindrical body 1 has the same imaging angle in the axial direction as compared with the central cylindrical body 1. It is possible to cope with such a problem by using a telecentric optical system of a parabolic mirror. Moreover, the side illumination 12D is made into parallel light illumination. However, since there are disadvantages such as complicated and large equipment, it is desirable to have a simple configuration within a practically allowable range.

Further, in the cylindrical peripheral surface appearance inspection apparatus according to the present invention, the above-described appearance inspection abnormality and surface depth abnormality inspection are performed from the image in which the illumination of the previous item and the projection of the line laser beam are performed at the same time. If this is done, the positional relationship between them can be easily determined, the surface position can be matched with high accuracy and at high speed, and the inspection time can be shortened. In this case, it is preferable that the projection position of the line laser beam is a dark field position of illumination.
However, if the inspection accuracy is more important than the time, after irradiating and taking a round image, the illumination is turned off and the line laser light is projected to take another round image, and the first and second round images are taken. It is also possible to detect the deviation of the feature points on the surface and perform the comprehensive determination of the previous item from the pellet surface position data of the first and second rounds corrected for the deviation.

  Furthermore, in the first embodiment, the cylindrical peripheral surface inspection device 10 and in the second embodiment, the cylindrical end surface inspection device 20 is an appearance inspection device, but the present invention is not limited to these. You may employ | adopt the external appearance inspection apparatus 40 (refer FIG. 10) which combined the test | inspection apparatus 10 and the cylinder end surface inspection apparatus 20, and was able to test | inspect both the cylinder peripheral surface and cylinder end surface of a cylindrical body. Here, the code | symbol 50 in FIG. 10 has shown the direction change part of the cylindrical body 1, and the code | symbol 60 has shown the collection | recovery part of the cylindrical body by which the pass determination was carried out by the external appearance test | inspection. The cylindrical body by the appearance inspection device 40 passes through the direction changing unit 50 from the cylindrical circumferential surface inspection device 10, sequentially moves to the collection unit through the column end surface inspection devices 20, 20 and is subjected to appearance inspection. .

1 is a side view of a cylindrical circumferential surface inspection apparatus according to a first embodiment of the present invention. It is the BB sectional view taken on the line shown in FIG. It is a figure explaining schematic structure of an image processing device. It is the flowchart which showed the flow of the process of the external appearance inspection method by a cylindrical peripheral surface inspection apparatus. It is a figure which shows an example of the picture of the layered expansion | deployment virtual screen arrangement | sequence of the abnormal part extracted on each condition. It is a top view of the cylinder end surface inspection apparatus by a second embodiment. It is CC sectional view taken on the line of the cylindrical end surface inspection apparatus shown in FIG. It is the flowchart which showed the flow of the process of the external appearance inspection method by a cylindrical end surface inspection apparatus. (A)-(i) It is a figure which shows the movement state of the cylindrical body at the time of a test | inspection. It is a top view which shows the external appearance inspection apparatus by other embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cylindrical body 1A Cylindrical peripheral surface 1B Cylindrical end surface 10 Cylindrical peripheral surface inspection apparatus 11 Rotating part 12, 22 Illumination part 13, 23 Line laser projector 14, 24 Camera 20 Cylindrical end surface inspection apparatus 21 Conveying part 30 Image processing apparatus 33 Image processing part 33A Image reconstruction unit 34 Abnormality inspection unit 34A Appearance abnormality inspection unit 34B Surface depth abnormality inspection unit 36 Determination unit

Claims (8)

An appearance inspection device for inspecting the appearance of a cylindrical body,
An illumination unit that emits light so that a striped pattern from which a developed image of a dark field is obtained from a bright field parallel to a cylinder axis is reflected on a cylindrical circumferential surface of the cylindrical body,
A line laser projector that projects line laser light from the radially outer side of the cylindrical body toward the cylindrical circumferential surface;
A camera of a two-dimensional image sensor that images the cylindrical circumferential surface of the cylindrical body that rotates about a cylindrical body axis;
From a plurality of image data obtained by imaging the cylindrical circumferential surface of the cylindrical body irradiated by the illumination unit, an appearance abnormality inspection unit that extracts an abnormal part of the appearance of the cylindrical circumferential surface;
The position of the cylindrical circumferential surface to which the line laser light is projected is determined from a plurality of image data obtained by imaging the cylindrical circumferential surface of the cylindrical body on which the line laser beam is projected, and the surface depth of the cylindrical circumferential surface is determined. Surface depth abnormality inspection part for extracting the abnormal part of the thickness,
At least the abnormal part of the appearance and the abnormal part of the surface depth are evaluated by pass / fail reference information of the abnormal part set in advance, and a determination unit that determines the pass / fail of the cylindrical body,
An appearance inspection apparatus characterized by comprising:   From the image data obtained by imaging the cylindrical peripheral surface irradiated by the illumination unit with the camera, image data having the same illumination and imaging angle condition with respect to the cylinder body axis is reconstructed to obtain the illumination and imaging angle condition. The visual inspection apparatus according to claim 1, further comprising an image reconstruction unit that generates different developed image data. An appearance inspection device for inspecting the appearance of a cylindrical body,
An illuminating unit that irradiates light of uniform brightness over the entire cylindrical end surface of the cylindrical body;
A line laser projector for projecting a line laser beam at a predetermined angle to the cylindrical end face;
A camera of a two-dimensional image sensor that images the cylindrical end face of the moving cylindrical body;
From a plurality of image data obtained by imaging the cylindrical end surface of the cylindrical body at different positions, an external appearance abnormality inspection unit that extracts an abnormal portion of the external appearance of the cylindrical end surface;
The position of the column end surface projected with the line laser light is determined from a plurality of image data obtained by imaging the column end surface of the cylinder at different positions where the line laser beam is projected, and the surface of the column end surface A surface depth abnormality inspection part that extracts an abnormal part of the depth;
At least the abnormal part of the appearance and the abnormal part of the surface depth are evaluated by pass / fail reference information of the abnormal part set in advance, and a determination unit that determines the pass / fail of the cylindrical body,
An appearance inspection apparatus characterized by comprising: An illumination unit that irradiates light on a cylindrical peripheral surface of the cylindrical body so that a striped pattern that obtains a developed image of a dark field from a bright field that is parallel to the cylindrical body axis is reflected in the cylindrical peripheral surface captured image; and A line laser projector that projects line laser light from the radially outer side toward the cylindrical circumferential surface, and a camera of a two-dimensional imaging device that images the cylindrical circumferential surface of the cylindrical body that rotates about a cylindrical body axis; An appearance inspection method for inspecting the appearance of the cylindrical body using
Imaging the cylindrical circumferential surface of the cylindrical body with the camera while rotating the cylindrical body;
Image data having the same illumination and imaging angle conditions with respect to the cylinder axis is reconstructed from a plurality of image data obtained by imaging the cylindrical peripheral surface irradiated by the illumination unit, and the illumination and imaging angle conditions are different. Generating image data; and
Extracting an abnormal portion of the appearance of the cylindrical peripheral surface from the developed image data with different illumination and imaging angle conditions;
From a plurality of image data obtained by imaging the cylindrical peripheral surface on which the line laser light is projected, the position of the cylindrical peripheral surface on which the line laser light is projected is determined, and an abnormal portion of the surface depth of the cylindrical peripheral surface is determined. Extracting the
Evaluating at least the extracted abnormal part of the appearance and the abnormal part of the surface depth with pass / fail criteria information of the abnormal part set in advance, and determining pass / fail of the cylindrical body;
An appearance inspection method characterized by comprising: An illumination unit that irradiates light of uniform brightness over the entire cylindrical end surface of the cylindrical body, a line laser projector that projects line laser light at a predetermined angle on the cylindrical end surface, and the cylindrical end surface of the moving cylindrical body An external appearance inspection method for inspecting the external appearance of the cylindrical body using a camera of a two-dimensional image sensor that images
Imaging the cylindrical end surface of the cylindrical body at a position where illumination and imaging angle conditions are different while moving the cylindrical body with the camera;
A step of extracting an abnormal portion of the appearance of the cylindrical end face from a plurality of image data obtained by imaging the cylindrical end face at a position where the imaging angle condition is different;
The position of the cylindrical end surface projected with the line laser light is determined from a plurality of image data obtained by imaging the cylindrical end surface projected with the line laser light, and an abnormal portion of the surface depth of the cylindrical end surface is extracted. Process,
Evaluating at least the extracted abnormal part of the appearance and the abnormal part of the surface depth with pass / fail criteria information of the abnormal part set in advance, and determining pass / fail of the cylindrical body;
An appearance inspection method characterized by comprising: In an apparatus for inspecting and measuring an object that rotates or moves with a camera,
Using the virtual screen array having the necessary hierarchy, the same pixels under the imaging conditions that are temporally expanded to the hierarchy of the expanded virtual screen array are mapped to the expanded virtual screen array corresponding to the position of the target object of the hierarchy, and a plurality of Obtain image reconstructed image data of different layers with different imaging conditions, and combine the data of expanded virtual screen arrays of the required layers with a predetermined logic from multi-layered expanded virtual screen arrays with different imaging conditions. Mapping the information obtained by the analysis to the expanded virtual screen array corresponding to the position of the object of the hierarchy,
An image processing method characterized in that an object is inspected and measured by comprehensively identifying and judging the surface of an object with a predetermined logic from the multi-layered expanded virtual screen arrangement.   An image inspection apparatus using the image processing method according to claim 6. In object surface inspection equipment,
Using a color camera, the line laser light of a specific wavelength is projected at an angle from the camera optical axis, and the surface of the object is imaged by illuminating with illumination light that cuts off the specific wavelength of the line laser light. ,
An image of a specific wavelength color of the line laser light is extracted from the captured image, and the surface position is determined from the image, and an image other than the color of the specific wavelength of the line laser light is extracted from the captured image. Determine the surface condition
An appearance inspection method characterized in that identification including the shape and pass / fail of the object surface is performed from the determined surface position and surface state.

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