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JP2010014532A - Acceleration switch - Google Patents

Acceleration switch Download PDF

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Publication number
JP2010014532A
JP2010014532A JP2008174490A JP2008174490A JP2010014532A JP 2010014532 A JP2010014532 A JP 2010014532A JP 2008174490 A JP2008174490 A JP 2008174490A JP 2008174490 A JP2008174490 A JP 2008174490A JP 2010014532 A JP2010014532 A JP 2010014532A
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Japan
Prior art keywords
acceleration switch
substrate
acceleration
switch
mass body
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JP2008174490A
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Japanese (ja)
Inventor
Kazuo Toda
和男 戸田
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NIPPON MEMS KK
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NIPPON MEMS KK
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Priority to JP2008174490A priority Critical patent/JP2010014532A/en
Priority to PCT/JP2009/062261 priority patent/WO2010002028A1/en
Publication of JP2010014532A publication Critical patent/JP2010014532A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H35/00—Switches operated by change of a physical condition
    • H01H35/14—Switches operated by change of acceleration, e.g. by shock or vibration, inertia switch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To detect an acceleration direction, in an acceleration switch having a space inside a weight and an opposed electrode in the space. <P>SOLUTION: An acceleration switch 001 has only one opposed electrode on the center of the weight in order to acquire non-directional sensitivity, and cannot detect the acceleration direction. On the contrary, an acceleration switch 002 has a plurality of opposed electrodes, and therefore can detect the acceleration direction as many as the number of the opposed electrodes. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、加速度スイッチに関する。   The present invention relates to an acceleration switch.

意匠登録１３１００５３に示されるような質量体内部に対向電極を持つ、無指向性の加速度スイッチは、ノーマリーオフかつ無指向性のスイッチとして使用でき、また半導体製造の技術を使用し単結晶Siをベースに作成可能なため形状も小さくできるなどさまざまなメリットがある。   An omnidirectional acceleration switch with a counter electrode inside the mass body as shown in the design registration 1310053 can be used as a normally-off and omnidirectional switch. There are various merits, such as the ability to make the base and the shape can be reduced.

この加速度スイッチは省電力用に、たとえば少容量のバッテリーしか持たないようなポータブルな機器に用いれば、人間の振動を検知しない時、すなわち使用しない時はシステムをオフにしておき、振動を検知したとき、すなわち使用する時は、自動的にシステムをオンして、無駄なバッテリーを使用しないようにすることなどができる。   If this acceleration switch is used for power saving, for example, in portable equipment that has only a small capacity battery, when the human vibration is not detected, that is, when it is not used, the system is turned off and the vibration is detected. When it is used, that is, when it is used, the system can be automatically turned on so as not to use a useless battery.

こういった使用の仕方をする場合は、どのような方向の振動でも検知することが望ましいので、感度が無指向性であることが有利となる。 When using such a method, it is desirable to detect vibrations in any direction, so it is advantageous that the sensitivity is non-directional.

意匠登録１３１００５３Design registration 1310053

しかしながら無指向性であるため、方向の検知が必要な場合は、逆に不利となる。たとえば傾斜センサーに使用した場合はどちらの方向に傾けたかは不明となり傾斜方向の情報を得ることはできないという不具合がある。   However, since it is omnidirectional, it is disadvantageous when direction detection is required. For example, when it is used for a tilt sensor, it is unclear which direction it is tilted, and there is a problem that information on the tilt direction cannot be obtained.

このため、使用目的によっては、いずれかの方向に振動が発生し、あるいは加速度が加わったかを検知することが必要となる。   For this reason, depending on the purpose of use, it is necessary to detect whether vibration has occurred in any direction or acceleration has been applied.

そこで、本発明の目的は、上記加速度スイッチにおいて、振動または加速度の方向を検知できるようにすることである。   Accordingly, an object of the present invention is to enable the acceleration switch to detect the direction of vibration or acceleration.

本発明は、質量体内部に対向電極を持つ加速度スイッチにおいて、対向電極を複数設ける、加速度スイッチである。   The present invention is an acceleration switch in which a plurality of counter electrodes are provided in an acceleration switch having a counter electrode inside the mass body.

本発明によれば、電極が平面方向において、方向を検知するのに必要な数の対向電極を設けるため、どの方向の振動か、あるいは傾斜かなどを明確に検知することができる。   According to the present invention, since the number of counter electrodes necessary for detecting the direction in the planar direction is provided, it is possible to clearly detect which direction the vibration is or the inclination.

以下、本発明を実施するための最良の一形態について図面を参照して説明する。
［加速度スイッチの構成と動作］ The best mode for carrying out the present invention will be described below with reference to the drawings.
[Configuration and operation of acceleration switch]

まず意匠文献にある加速度スイッチの構成と動作について説明する。
図１は意匠登録１３１００５３に見られる質量体内部の空間に対向電極を持つ、無指向性加速度スイッチ００１の構成を説明する、上面側から見た図である。ただし実際にはこの上にキャップとなる層(第１基板)、およびこの下には支持層(第３基板)が存在する。また質量体を支持する梁は意匠登録１３１００５３では４本であるが、ここでは１本とした。図２は図１で示すＡ−Ａ´面で切った断面図であり、図１で省略されている層も含む。また図１は図２のＢ−Ｂ´面で切った図に相当する。図３は図１で省略した上部のキャップ層(第１基板)の上面図である。さらに図１同様に図３のＡ−Ａ´面で切った断面図も図２となる。 First, the configuration and operation of the acceleration switch in the design literature will be described.
FIG. 1 is a diagram illustrating a configuration of a non-directional acceleration switch 001 having a counter electrode in a space inside a mass body, which is found in the design registration 1310053, as viewed from the upper surface side. However, in reality, a layer (first substrate) serving as a cap is present thereon, and a support layer (third substrate) is present below the layer. The number of beams that support the mass body is four in the design registration 1310053, but here is one. FIG. 2 is a cross-sectional view taken along the plane AA ′ shown in FIG. 1, and includes layers omitted in FIG. Further, FIG. 1 corresponds to a view taken along the plane BB ′ of FIG. FIG. 3 is a top view of the upper cap layer (first substrate) omitted in FIG. Further, FIG. 2 is a cross-sectional view taken along the plane AA ′ of FIG.

図１〜図３に示すように、加速度スイッチ００１は、上から、ガラスなどの絶縁材料を用いる第１基板(キャップ層)１０５、単結晶シリコンなどを用いる第２基板１０１(１０２、１０３、１０４も含む)、およびガラスなどの絶縁材料を用いる第３基板(支持層)１０６が積層されて構成される。第２基板の単結晶シリコンは電気的な導通を取るためたとえば低抵抗シリコンが使用される。また貫通電極１０７および１０８は金などの金属を埋め込むことにより形成され、加速度スイッチを外部と結びつけるための接点となる。また第１基板と第３基板は陽極接合などの方法により第２基板と接合される。   As shown in FIGS. 1 to 3, the acceleration switch 001 includes, from above, a first substrate (cap layer) 105 using an insulating material such as glass, and a second substrate 101 (102, 103, 104 using single crystal silicon). And a third substrate (support layer) 106 using an insulating material such as glass. For example, low-resistance silicon is used for the single crystal silicon of the second substrate in order to establish electrical conduction. The through electrodes 107 and 108 are formed by embedding a metal such as gold, and serve as a contact for connecting the acceleration switch to the outside. The first substrate and the third substrate are bonded to the second substrate by a method such as anodic bonding.

ここで図４に示すように矢印方向に加速度が加わるとスイッチ全体は矢印方向に運動し、梁で支えられた質量体は運動しないため、質量体内部の空間にある対向電極１０４と質量体１０３が接触する。なお図４ではわかりやすくするため、質量周辺の梁や周辺部は省略されている。これにより電気的導通が対向電極１０４から質量体１０３、梁１０２、基板周辺部１０１、貫通電極１０７を通り外部接点とつながる。また対向電極１０４はもう一つの貫通電極１０８を通じて外部接点とつながる。 Here, as shown in FIG. 4, when acceleration is applied in the direction of the arrow, the entire switch moves in the direction of the arrow, and the mass body supported by the beam does not move. Therefore, the counter electrode 104 and the mass body 103 in the space inside the mass body. Touch. In FIG. 4, beams and peripheral portions around the mass are omitted for easy understanding. Thereby, electrical continuity is connected from the counter electrode 104 to the external contact through the mass body 103, the beam 102, the substrate peripheral portion 101, and the through electrode 107. The counter electrode 104 is connected to an external contact through another through electrode 108.

これによりこの加速度スイッチを電子デバイスのスイッチとして使用すれば、振動を検知したときのみ電子デバイスを起動させ、振動を検知しないときは電子デバイスをオフの状態にすることにより、無駄なバッテリーの使用を制限することなどができる。 Thus, if this acceleration switch is used as a switch for an electronic device, the electronic device is activated only when vibration is detected, and when the vibration is not detected, the electronic device is turned off. It can be restricted.

しかしながら上記の構成では加速度の感度は平面方向には無指向性であるため、方向を感知したい場合は有効ではない。そこで加速度の方向も感知できる本発明の実施形態を図５以下で説明する。
図５は加速度の方向を検知できる加速度スイッチ００２の構成を説明する、上面側から見た図である。ただし実際にはこの上にキャップとなる層(第１基板)、およびこの下には支持層(第３基板)が存在する。図６は図５で示すＣ−Ｃ´面で切った断面図であり、図５で省略されている層も含む。また図５は図６のＤ−Ｄ´面で切った図に相当する。図７は図１で省略した上部の層(第１基板)の上面図である。さらに図５同様に図７のＣ−Ｃ´面で切った断面図も図６となる。 However, in the above configuration, the sensitivity of acceleration is omnidirectional in the plane direction, so it is not effective when it is desired to sense the direction. Therefore, an embodiment of the present invention that can sense the direction of acceleration will be described with reference to FIG.
FIG. 5 is a diagram illustrating the configuration of the acceleration switch 002 that can detect the direction of acceleration, as viewed from the upper surface side. However, in reality, a layer (first substrate) serving as a cap is present thereon, and a support layer (third substrate) is present below the layer. FIG. 6 is a cross-sectional view taken along the CC ′ plane shown in FIG. 5, and includes layers omitted in FIG. 5. FIG. 5 corresponds to a view taken along the line DD ′ of FIG. FIG. 7 is a top view of the upper layer (first substrate) omitted in FIG. Further, as in FIG. 5, a cross-sectional view taken along the line CC ′ of FIG. 7 is also shown in FIG.

図５〜図７に示すように、加速度スイッチ００２は、上から、ガラスなどの絶縁材料を用いる第１基板(キャップ層)２０６、単結晶シリコンなどを用いる第２基板２０１(２０２、２０３、２０４、２０５も含む)、およびガラスなどの絶縁材料を用いる第３基板(支持層)２０７が積層されて構成される。第２基板の単結晶シリコンは電気的な導通を取るためたとえば低抵抗シリコンが使用される。また貫通電極２０８、２０９および２１０は金などの金属を埋め込むことにより形成され、加速度スイッチを外部と結びつけるための接点となる。   As shown in FIG. 5 to FIG. 7, the acceleration switch 002 includes a first substrate (cap layer) 206 using an insulating material such as glass and a second substrate 201 (202, 203, 204 using single crystal silicon) from the top. , 205), and a third substrate (support layer) 207 using an insulating material such as glass. For example, low-resistance silicon is used for the single crystal silicon of the second substrate in order to establish electrical conduction. The through electrodes 208, 209 and 210 are formed by embedding a metal such as gold, and serve as contacts for connecting the acceleration switch to the outside.

ここで図８に示すように矢印方向に加速度が加わるとスイッチ全体は矢印方向に運動し、質量体は運動しないため、質量体内部の空間にある対向電極２０４と質量体２０３あるいは対向電極２０５と質量体２０３が接触する。なおここではわかりやすくするため、質量周辺の梁や周辺部は省略されている。これにより加速度の方向を区別して検知できるようになる。なお電気的導通は対向電極２０４が質量体２０３と接触した場合は貫通電極２０８を通じて、対向電極２０５が質量体２０３と接触した場合は貫通電極２０９を通じて導通し、それぞれ外部接点と別々につなげることができる。 Here, as shown in FIG. 8, when the acceleration is applied in the direction of the arrow, the entire switch moves in the direction of the arrow and the mass body does not move. Therefore, the counter electrode 204 and the mass body 203 or the counter electrode 205 in the space inside the mass body The mass body 203 contacts. Note that the beams around the mass and the periphery are omitted here for the sake of clarity. As a result, the direction of acceleration can be distinguished and detected. Electrical conduction is conducted through the through electrode 208 when the counter electrode 204 is in contact with the mass body 203, and is conducted through the through electrode 209 when the counter electrode 205 is in contact with the mass body 203. it can.

これによりこの加速度スイッチをたとえば傾斜センサーとして使用すれば、傾斜の方向により、それぞれの方向を分けて検知することが可能となる。 Thus, if this acceleration switch is used as, for example, a tilt sensor, it becomes possible to detect each direction separately according to the direction of tilt.

さらに細かく加速度の方向をわけて検知する場合は対向電極を必要な数だけ設けることにより検知することができる。たとえば４方向を検知したい場合はたとえば図９に示される加速度スイッチ００３のような構成を用いることにより可能となる。   Further, when detecting the direction of acceleration more finely, it can be detected by providing the necessary number of counter electrodes. For example, when it is desired to detect four directions, it is possible to use a configuration such as an acceleration switch 003 shown in FIG.

図９に示される加速度スイッチ００３は図１や図５に示される加速度スイッチ００１、００２と同様に第２基板３０１(３０２〜３０７も含む)をはさんで、上下にキャップ層(第１基板)３０８、支持層(第３基板)３０９を持つ。００３の断面図を図１０に、またキャップ層(第１基板)の上面図を図１１に示す。各方向の加速度は対向電極３０４，３０５，３０６，３０７により個別に検知できる。このため４方向の加速度を別個に感知できるようになり、たとえば傾斜センサーに用いた場合は４方向の傾斜それぞれを別個に感知できるようになる。   As in the case of the acceleration switches 001 and 002 shown in FIGS. 1 and 5, the acceleration switch 003 shown in FIG. 9 sandwiches the second substrate 301 (including 302 to 307) and vertically covers the cap layer (first substrate). 308 and a support layer (third substrate) 309 are provided. A cross-sectional view of 003 is shown in FIG. 10, and a top view of the cap layer (first substrate) is shown in FIG. The acceleration in each direction can be individually detected by the counter electrodes 304, 305, 306, and 307. For this reason, accelerations in four directions can be sensed separately. For example, when used in a tilt sensor, tilts in four directions can be sensed separately.

本発明の参考文献の実施形態である加速度スイッチ００１の構成を説明する上面側から見た図である。この図は説明をわかりやすくするため断面図である図２をＢ−Ｂ´平面で切った図となっている。It is the figure seen from the upper surface side explaining the structure of the acceleration switch 001 which is embodiment of the reference of this invention. This figure is a cross-sectional view of FIG. 2 taken along the plane BB ′ for easy understanding. 同加速度スイッチ００１の構成を説明するため図１のＡ−Ａ´面で切った断面図である。FIG. 2 is a cross-sectional view taken along the plane AA ′ of FIG. 1 for explaining the configuration of the acceleration switch 001. 同加速度スイッチ００１のキャップ層(第１基板)の上面図である。It is a top view of the cap layer (first substrate) of the same acceleration switch 001. 同加速度スイッチ００１の動作を説明する図である。It is a figure explaining operation | movement of the same acceleration switch 001. FIG. 本発明の実施形態である加速度スイッチ００２の構成を説明する、上面側から見た図である。この図は説明をわかりやすくするため断面図である図６をＤ−Ｄ´面で切った図となっている。It is the figure seen from the upper surface side explaining the structure of the acceleration switch 002 which is embodiment of this invention. This drawing is a cross-sectional view of FIG. 6 taken along the line DD ′ for easy understanding. 同加速度スイッチ００２の構成を説明するため図５のＣ−Ｃ´面で切った断面図である。FIG. 6 is a cross-sectional view taken along the plane CC ′ of FIG. 5 for explaining the configuration of the acceleration switch 002. 同加速度スイッチ００２のキャップ層(第１基板)の上面図である。It is a top view of a cap layer (first substrate) of the same acceleration switch 002. 同加速度スイッチ００２の動作を説明する図である。It is a figure explaining operation | movement of the same acceleration switch 002. 本発明の実施形態である加速度スイッチ００３の構成を説明する、上面側から見た図である。この図は説明をわかりやすくするため断面図である図１０をＦ−Ｆ´面で切った図となっている。It is the figure seen from the upper surface side explaining the structure of the acceleration switch 003 which is embodiment of this invention. This figure is a cross-sectional view of FIG. 10 taken along the FF ′ plane for easy understanding. 同加速度スイッチ００３の構成を説明するため図９のＥ−Ｅ´面で切った断面図である。FIG. 10 is a cross-sectional view taken along the line EE ′ of FIG. 9 for explaining the configuration of the acceleration switch 003. 同加速度スイッチ００３のキャップ層(第１基板)の上面図である。It is a top view of a cap layer (first substrate) of the same acceleration switch 003.

符号の説明Explanation of symbols

００１ 意匠文献にある無指向性の加速度スイッチ
１０１ 加速度スイッチ００１の第２基板の周辺部
１０２ 加速度スイッチ００１の第２基盤の梁部分
１０３ 加速度スイッチ００１の第２基盤の重り部分
１０４ 加速度スイッチ００１の第２基盤の対向電極
１０５ 加速度スイッチ００１の第１基盤
１０６ 加速度スイッチ００１の第３基盤
１０７ 加速度スイッチ００１の貫通電極
１０８ 加速度スイッチ００１の貫通電極
００２ 対向電極を複数持つ加速度スイッチの例
２０１ 加速度スイッチ００２の第２基板の周辺部
２０２ 加速度スイッチ００２の第２基板の梁部分
２０３ 加速度スイッチ００２の第２基板の重り部分
２０４ 加速度スイッチ００２の第２基板の対向電極
２０５ 加速度スイッチ００２の第２基板の対向電極
２０６ 加速度スイッチ００２の第１基盤
２０７ 加速度スイッチ００２の第３基盤
２０８〜２１０ 加速度スイッチ００２の貫通電極
００３ 対向電極を複数持つ加速度スイッチの例
３０１ 加速度スイッチ００３の第２基板の周辺部
３０２ 加速度スイッチ００３の第２基板の梁部分
３０３ 加速度スイッチ００３の第２基板の重り部分
３０４〜３０７ 加速度スイッチ００３の第２基板の対向電極
３０８ 加速度スイッチ００３の第１基盤
３０９ 加速度スイッチ００３の第３基盤
３１０〜３１４ 加速度スイッチ００３の貫通電極
001 Nondirectional acceleration switch 101 in design literature Peripheral portion of second substrate of acceleration switch 001 102 Beam portion of second base of acceleration switch 001 103 Weight portion of second base of acceleration switch 001 104 First portion of acceleration switch 001 Two substrate counter electrodes 105 First substrate of acceleration switch 001 106 Third substrate of acceleration switch 001 107 Penetration electrode of acceleration switch 001 108 Penetration electrode of acceleration switch 001 002 Example of acceleration switch having a plurality of counter electrodes 201 Acceleration switch 002 Peripheral portion of the second substrate 202 Beam portion of the second substrate of the acceleration switch 002 203 Weight portion of the second substrate of the acceleration switch 002 204 Counter electrode of the second substrate of the acceleration switch 002 205 Counter electrode of the second substrate of the acceleration switch 002 206 Acceleration First base of switch 207 Third base of acceleration switch 002 208 to 210 Through electrode of acceleration switch 002 Example of acceleration switch having a plurality of counter electrodes 301 Peripheral portion of second substrate of acceleration switch 003 302 First of acceleration switch 003 Beam portion of two substrates 303 Weight portion of second substrate of acceleration switch 003 304 to 307 Counter electrode of second substrate of acceleration switch 003 308 First substrate of acceleration switch 003 309 Third substrate of acceleration switch 003 310 to 314 Acceleration switch 003 through electrode

Claims (1)

内側に空間を持つ質量体と、前記質量体を支える梁と、前記質量体の前記空間に対向電極を持つ加速度スイッチにおいて、前記対向電極を複数設けることを特徴とする、
加速度スイッチ。

In the acceleration switch having a mass body having a space inside, a beam supporting the mass body, and a counter electrode in the space of the mass body, the counter electrode is provided in a plurality,
Acceleration switch.

JP2008174490A 2008-07-03 2008-07-03 Acceleration switch Pending JP2010014532A (en)

Priority Applications (2)

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JP2008174490A JP2010014532A (en) 2008-07-03 2008-07-03 Acceleration switch
PCT/JP2009/062261 WO2010002028A1 (en) 2008-07-03 2009-06-30 Acceleration switch

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011108559A1 (en) * 2010-03-03 2011-09-09 セイコーインスツル株式会社 Acceleration switch and electronic device
CN102735328A (en) * 2011-03-30 2012-10-17 精工电子有限公司 Signal processing circuit, vibration detection circuit, and electronic device
CN102810430A (en) * 2011-06-01 2012-12-05 精工电子有限公司 Acceleration switch
CN103163329A (en) * 2011-12-09 2013-06-19 精工电子有限公司 Acceleration signal processing device
US20130207485A1 (en) * 2012-02-09 2013-08-15 Seiko Instruments Inc. Acceleration switch and electronic device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09145740A (en) * 1995-09-22 1997-06-06 Denso Corp Acceleration sensor
JPH11183517A (en) * 1997-12-25 1999-07-09 Denso Corp Dynamical quantity sensor
JP2006344573A (en) * 2005-05-13 2006-12-21 Gunma Prefecture Acceleration switch and electronic device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09145740A (en) * 1995-09-22 1997-06-06 Denso Corp Acceleration sensor
JPH11183517A (en) * 1997-12-25 1999-07-09 Denso Corp Dynamical quantity sensor
JP2006344573A (en) * 2005-05-13 2006-12-21 Gunma Prefecture Acceleration switch and electronic device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011108559A1 (en) * 2010-03-03 2011-09-09 セイコーインスツル株式会社 Acceleration switch and electronic device
JP2012145599A (en) * 2010-03-03 2012-08-02 Seiko Instruments Inc Acceleration switch and electronic device
JP4996771B2 (en) * 2010-03-03 2012-08-08 セイコーインスツル株式会社 Electronic devices
CN102844832A (en) * 2010-03-03 2012-12-26 精工电子有限公司 Acceleration switch and electronic device
US8791380B2 (en) 2010-03-03 2014-07-29 Seiko Instruments Inc. Acceleration switch and electronic device
CN102844832B (en) * 2010-03-03 2015-07-22 精工电子有限公司 Acceleration switch and electronic device
CN102735328A (en) * 2011-03-30 2012-10-17 精工电子有限公司 Signal processing circuit, vibration detection circuit, and electronic device
CN102810430A (en) * 2011-06-01 2012-12-05 精工电子有限公司 Acceleration switch
US8772656B2 (en) 2011-06-01 2014-07-08 Seiko Instruments Inc. Acceleration switch
CN103163329A (en) * 2011-12-09 2013-06-19 精工电子有限公司 Acceleration signal processing device
US20130207485A1 (en) * 2012-02-09 2013-08-15 Seiko Instruments Inc. Acceleration switch and electronic device
US8772657B2 (en) * 2012-02-09 2014-07-08 Seiko Instruments Inc. Acceleration switch and electronic device

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