JP2010002415A - Method for measuring sound pressure intensity distribution of ultrasonic wave, method and device of measuring energy density distribution of ultrasonic wave - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for measuring a sound pressure intensity distribution which can measure correctly the sound pressure intensity distribution of ultrasonic wave. <P>SOLUTION: The method for measuring the sound pressure intensity distribution of ultrasonic wave includes irradiating a substrate 4 with dispersed stress light emission particles with ultrasonic waves, and measuring at least one of the intensity and distribution of light which the stress light emission particles emit by energy of ultrasonic wave. The sound pressure intensity distribution of ultrasonic wave can be measured correctly. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for measuring the sound pressure intensity distribution of ultrasonic waves, a method for measuring the energy density distribution of ultrasonic waves, and an apparatus used for those methods.

  Currently, ultrasonic waves are used in, for example, cleaning devices, therapeutic devices, and diagnostic devices. In order to improve the reliability of these apparatuses, it is necessary to grasp the sound pressure intensity distribution of the ultrasonic waves to be used. In particular, when ultrasonic waves are used in, for example, an ultrasonic diagnostic apparatus or treatment apparatus used for the human body, it is very important to measure the intensity distribution from the viewpoint of safety and security.

  Moreover, in order to further increase the cleaning degree when performing the ultrasonic cleaning operation, it is necessary to evaluate the cleaning degree of the device after the cleaning. In order to realize this, it is essential to accurately measure and manage the sound pressure intensity distribution of the ultrasonic waves.

  Many techniques for measuring the sound pressure due to ultrasonic vibration have been studied so far. For example, Patent Document 1 discloses a method for measuring the intensity and frequency of ultrasonic waves in a liquid. In this method, an impact force sensor or a sensor for detecting the wavelength of an ultrasonic wave is attached to an article having a certain shape, and the article is used as a probe for detecting an ultrasonic sound field. Therefore, the distribution of the sound field can be measured by moving the article up, down, left and right in the liquid. Further, Patent Document 2 discloses a sound pressure sensor for detecting the sound pressure of ultrasonic waves in an ultrasonic cleaning operation. The piezoelectric element that becomes the pressure-sensitive portion of the sound pressure sensor is formed by forming a sheet of piezoelectric ceramic material, punching out the sheet using a mold, and firing the sheet. By creating in this way, it is possible to detect vibration of an ultrasonic wave having a frequency of 500 kHz or more, which is difficult for a piezoelectric element using conventional piezoelectric ceramics.

  Patent Document 3 discloses a medium microphone that detects vibration and sound waves. The pressure-sensitive part that detects sound waves of the medium microphone is a rubber pressure-sensitive layer made of silicon rubber, and can detect broadband vibrations and sound waves that propagate in a structure, water, or the ground.

JP 2006-304029 A (released on November 2, 2006) Japanese Patent Laid-Open No. 2001-50808 (published February 23, 2001) JP 2003-348695 A (published December 5, 2003)

  By the way, in the technique of patent document 1 mentioned above, since a pressure receiving area becomes large compared with the method of sticking the piezoelectric element used as a pressure-sensitive part to the conventional glass or metal rod, and measuring the sound field of an ultrasonic wave. Although the sensitivity can be improved, a fine distribution state of sound pressure cannot be detected.

  In the techniques of Patent Documents 2 and 3, the sound pressure can be detected at one point where the sensor exists, but in order to measure the sound pressure distribution in a transient state that changes with time unlike the steady state, the sensor is arranged in an array. This is a complicated configuration. The sensor array itself affects the sound pressure distribution.

  Further, in the technique using the sensor or the medium microphone described in Patent Documents 1 to 3, for example, when the sound pressure intensity measurement is performed in the liquid, it is necessary to immerse the sensor and the medium microphone in the liquid. In the state where these immersion materials are present, the environment in a normal liquid is different.

  Furthermore, although it is possible to measure the sound pressure intensity at a specific position where the piezoelectric element exists, it is not considered to measure the entire sound pressure intensity distribution in detail and accurately. In addition, a technique of using stress luminescent particles for measuring the intensity of sound pressure by ultrasonic waves is not known.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a method capable of accurately and precisely measuring the sound pressure intensity distribution due to ultrasonic waves in an environment such as a liquid. There is.

  As a result of studying the above problems for many years, the present inventors finally found out a phenomenon in which stress-stimulated luminescent particles emit light even with ultrasonic energy, and have achieved the present invention. A measuring method according to the present invention is a method for measuring a sound pressure intensity distribution by ultrasonic waves in order to solve the above-mentioned problem, and irradiating a substrate on which stress-luminescent particles are dispersed with ultrasonic waves, It is characterized in that at least one of the light intensity emitted by the stress-stimulated luminescent particles and the distribution thereof is measured by the energy of sound waves.

  In the measurement method according to the present invention, the base material is preferably a gel or a liquid in order to reduce the change in acoustic impedance and efficiently propagate ultrasonic waves, but an elastic body may be used. .

  Further, in the measurement method according to the present invention, the particle diameter of the stress-stimulated luminescent particles is preferably equal to or less than the wavelength in order not to affect the ultrasonic sound field in the substrate, and is preferably 10 nm or more and 100 μm or less. It is preferable that

  In the measurement method according to the present invention, the stress luminescent particle base material is an oxide having a stuffed tridymite structure, a three-dimensional network structure, a feldspar structure, a wurtzite structure, a spinel structure, a corundum structure, or a β-alumina structure, Sulphides, carbides or nitrides are preferred.

In the measuring method according to the present invention, the base material of the stress-stimulated luminescent particles preferably has an α-SrAl ₂ O ₄ structure containing lattice defects.

  In order to solve the above problems, a measuring apparatus according to the present invention is an apparatus for measuring a sound pressure intensity distribution by ultrasonic waves, and an ultrasonic wave generating means for irradiating ultrasonic waves to a base material in which stress luminescent particles are dispersed. And detecting means for detecting the light emission intensity or its distribution from the light emitted from the stress-stimulated luminescent particles by the energy of the ultrasonic waves. The detection means preferably has a mechanism having a shallow depth of focus and capable of detecting a three-dimensional light intensity distribution by scanning the focus.

  The measuring apparatus according to the present invention further includes processing means for converting the light emission intensity detected by the detection means into an electric signal, and display means for displaying a distribution of the light emission intensity from the electric signal converted by the processing means. It is preferable to further provide.

  The present invention is a method for measuring the energy density distribution of ultrasonic waves, wherein the stress-luminescent particles are emitted by the ultrasonic energy by irradiating the substrate on which the stress-luminescent particles are dispersed with ultrasonic waves. A method for measuring at least one of light intensity and its distribution, and an apparatus for measuring the energy density distribution of ultrasonic waves, and an ultrasonic wave generating means for irradiating ultrasonic waves onto a substrate on which stress-luminescent particles are dispersed; Also included is a measuring device including detection means for detecting luminescence intensity from light emitted from the stress-stimulated luminescent particles by the energy of the ultrasonic waves.

  As described above, the measurement method according to the present invention is a method of measuring the sound pressure intensity distribution by ultrasonic waves, and irradiating the substrate on which stress-stimulated luminescent particles are dispersed with ultrasonic waves, and the energy of the ultrasonic waves. Is a method of measuring at least one of the light intensity emitted from the stress-stimulated luminescent particles and the distribution thereof. Further, as described above, the measuring apparatus according to the present invention is an apparatus for measuring the sound pressure intensity distribution by ultrasonic waves, and an ultrasonic wave generating means for irradiating ultrasonic waves to a substrate on which stress luminescent particles are dispersed; Detecting means for detecting luminescence intensity from light emitted from the stress-stimulated luminescent particles by the energy of the ultrasonic waves. Therefore, there is an effect that the sound pressure intensity distribution by ultrasonic waves can be measured accurately and in detail in an environment such as in a liquid.

It is a figure which shows schematic structure of the measuring apparatus of Embodiment 1 which concerns on this invention. It is a figure which shows schematic structure of the measuring apparatus of Embodiment 1 'which concerns on this invention. It is a graph which shows the light emission intensity average value change of the selection area in the stress light emission sheet | seat of an Example. It is a figure which shows the spatial distribution of the emitted light intensity at the time of the ultrasonic wave OFF and the ultrasonic wave ON measured in the Example. (A) of FIG. 5 is a figure which shows the selection area | region in a stress light emitting film, (b) of FIG. 5 and (c) of FIG. 5 mounted on the ultrasonic transducer | vibrator shown in (a) of FIG. It is a figure which shows the light emission image at the time of the ultrasonic oscillation of a stress light emitting film. 6A is a graph showing the distribution in the horizontal direction (X-axis direction) of the emission intensity surrounded by the broken line in FIG. 5B, and FIG. 6B is the graph of FIG. FIG. 6C is a graph showing a distribution in the vertical direction (Y-axis direction) of light emission intensity surrounded by a broken line in c), and FIG. 6C shows a three-dimensional distribution of light emission intensity around the vibrator. FIG. 7A is a graph comparing the emission intensity with respect to different ultrasonic energy, and FIG. 7B is a graph comparing the emission intensity with respect to the sound pressure level measured by the vibration sensor. FIG. 8A is a diagram showing selected areas in the stress-stimulated luminescent film in another example, and FIG. 8B is a diagram showing the stress-stimulated film shown in FIG. It is a figure which shows a light emission image. It is a graph which shows the change by the time of the emitted light intensity in the selection area (1-9) shown to (b) of FIG. (A) of FIG. 10 is a figure which shows the light emission image at the time of the ultrasonic oscillation of the stress light emission film installed in the ultrasonic cleaning machine, (b) of FIG. 10 is from the image shown to (a) of FIG. It is a figure which shows the light emission image after deducting a background, (c) of FIG. 10 shows the energy density distribution of the ultrasonic wave obtained in Example 2-3.

<1. Measuring method according to the present invention>
The measurement method according to the present invention is a method for measuring a sound pressure intensity distribution by an ultrasonic wave, irradiating a substrate on which stress-luminescent particles are dispersed with ultrasonic waves, and applying the ultrasonic light energy to the stress-luminescent particles. What is necessary is just to measure at least one among the intensity | strength of the light which radiates, and its distribution.

  The sound pressure intensity distribution means a distribution of sound pressure intensity generated in the measurement object. About this distribution, you may graph the measured intensity | strength. Further, this distribution may be created, for example, by detecting the intensity of the sound pressure generated in the measurement object by the detection unit and processing the detected data by the processing unit or the like.

  A stress-stimulated luminescent particle is a luminescent material that emits light by a mechanical stimulus such as an external force. The stimulus is not particularly limited as long as the stress-stimulated luminescent particles can emit light, and examples thereof include sound pressure, response pressure, and pressurization. As will be described later in detail, the stress-stimulated luminescent particles have a structure in which a luminescent center is added to a base material.

  The base material is for dispersing the stress-stimulated luminescent particles. Such a substrate is not particularly limited as long as stress-stimulated luminescent particles can be dispersed, and may be, for example, a liquid, a gel, or an elastic body.

  Here, an example of a specific procedure of the measurement method according to the present invention will be described below, but the present invention is not limited to this.

  First, an ultrasonic wave is irradiated to the base material in which the stress luminescent particles are dispersed (ultrasonic irradiation process). The form of the substrate is not particularly limited, and may be a form stored in a container or the like, or may be a sheet form. Further, the form of the base material may be, for example, the measurement object itself, or a sheet-like base material may be installed on another measurement object such as a support, or the measurement object made into a sheet shape. The entire wall surface of the object may be coated. Moreover, these forms may be employ | adopted independently and a some form may be employ | adopted collectively.

  The ultrasonic source is not particularly limited, and may be, for example, an ultrasonic vibrator, piezoelectric element, magnetostrictive element, pulse laser, cavitation, impact by impact, explosive, etc. May emit ultrasonic waves. Although it does not specifically limit as a frequency of the ultrasonic wave irradiated to a stress luminescent particle, For example, when using for medical use, a frequency of 2 MHz-20 MHz is more preferable.

  The method for dispersing the stress-stimulated luminescent particles on the base material is not particularly limited, and the stress light-emitting particles may be dispersed so that the sound pressure intensity distribution of the ultrasonic wave irradiated on the base material can be accurately measured.

  In addition, when the base material is stored in a container, the material and shape of the container are not particularly limited as long as the ultrasonic wave can propagate to the base material inside the container. It is preferable that a part or the whole is light-transmitting material. By using such a material or shape, it becomes easy to detect light emitted by the stress-stimulated luminescent particles dispersed in the base material by the detection means.

  In the ultrasonic irradiation process, the ultrasonic wave applied to the base material becomes vibration and propagates in the base material. The vibration (sound pressure) forms sound field energy in the base material and is transmitted to the dispersed stress luminescent particles, whereby the stress luminescent particles emit light (light emission process). Since the intensity of this light changes in accordance with the sound field energy that is a function of the intensity of the sound pressure, the intensity of the sound pressure can be obtained from the emission intensity.

  Next, the light emitted from the stress-stimulated luminescent particles in the light emitting step may be detected (detection step). The specific mode of the means for detecting (detecting means) is not particularly limited as long as it detects light, but the light may be converted into an electrical signal. The configuration of the detection means is not limited to receiving light and converting it into an electrical signal.For example, as described here, in the case of receiving light and converting it into an electrical signal, You may provide the condensing lens and the image pick-up element (light receiving element), and you may provide so that an optical fiber may be guide | induced to a light receiving element. For example, when a detection unit including a condenser lens and an image sensor is used, light emitted from the stress luminescent particles is received by the image sensor via the condenser lens. In the image sensor, received light is converted into an electric signal. For example, a CCD or a photodiode can be used as the imaging element. Moreover, if the depth of focus of the detection means is set to be shallow, it is advantageous for identifying the detection location of light intensity, and if this focus is scanned three-dimensionally, a three-dimensional distribution of light intensity can be measured.

  The position where the detection means is installed is not particularly limited, but it may be installed at a position where the light of the stress luminescent particles can be detected. For example, when the base material is stored in a container and only a part thereof is formed of a light-transmitting material, the position of the detection means is fixed at a position where light can be received from the material. Alternatively, when the entire container is formed of a light-transmitting material, the detection means may be installed so as to be movable.

  When changing from light to an electrical signal in the detection step, the detection unit may transmit the electrical signal to a processing unit connected to the detection unit to digitize the emission intensity (processing step). The processing means is not particularly limited as long as it can perform arithmetic processing. For example, a personal computer, a microcomputer, an FPGA, or the like may be used. In the case of digitizing the electrical signal, the specific method may be as long as the intensity of the light emission detected by the detection means or the distribution thereof can be grasped.

  Note that a recording medium may be connected to the detection means or the like, and the recording medium may store data digitized by the processing steps. Further, a display unit may be connected to the detection unit and / or the recording medium so that the display unit displays the digitized data. The specific configuration of the digitized data is not particularly limited, and examples thereof include a JPEG format or a TIFF format. The display means is not particularly limited, and may be connected to the processing means or may be independent. For example, a monitor, a projector, a plotter, a printer, a synchroscope, or the like may be used. The data display form is not particularly limited as long as the intensity and distribution of light emission are shown. The distribution of the emitted light intensity displayed in this way corresponds to the distribution of the sound pressure intensity by ultrasonic waves.

<2. Measuring apparatus according to the present invention>
Next, one embodiment of the measuring apparatus according to the present invention will be described below with reference to FIGS. 1 and 2, but the present invention is not limited to this embodiment.

[Embodiment 1 of measuring apparatus]
(Configuration of measuring device 1)
FIG. 1 is a diagram showing a schematic configuration of a sound pressure intensity distribution measuring apparatus 1 according to the present embodiment. As shown in FIG. 1, the measuring apparatus 1 according to the present embodiment includes an ultrasonic wave generation unit 2, a container 3, a base material 4, a detection unit 5, a processing unit 6, and a display unit 7.

  The ultrasonic wave generation means 2 is a member that functions as a generation source that generates ultrasonic waves. The ultrasonic wave generation means 2 is not particularly limited as long as it can generate ultrasonic waves. For example, an ultrasonic vibrator, a piezoelectric element, a magnetostrictive element, a pulse laser, a cavitation, impact caused by impact, and explosives. Etc. may be used.

  The container 3 is a member for storing the base material 4. In the present embodiment, the container 3 is rectangular, and a part of the window 3 is provided with a light-transmitting property. However, the container 3 does not have to be rectangular. It may be formed of a material having properties.

  As described above, the base material 4 is a member in which stress luminescent particles are dispersed. The substrate 4 is not particularly limited, and for example, a liquid or a gel may be used. Examples of the liquid include, but are not limited to, water, various alcohols, oils, mercury, and the like. Examples of the gel include a polymer such as carboxyvinyl polymer or glycyrrhizic acid mainly containing water. The mixture which mixed the substance is mentioned.

  The detecting means 5 is a member for detecting the intensity of light emitted from the stress-stimulated luminescent particles. The detection means 5 may be installed so as to be able to receive the light of the stress luminescent particles generated by the ultrasonic energy generated from the sound pressure. The detecting means 5 detects the intensity of the light and converts it into an electric signal. The detection means 5 includes a condensing lens 51 and an image sensor (light receiving element) 52, and light emitted from the stress luminescent particles is received by the image sensor 52 through the condensing lens 51. The light receiving means for receiving light is not limited to the condensing lens 51, and for example, an optical fiber may be used.

  The processing means 6 is a means for processing the electrical signal detected by the detection means 5. The processing means 6 is connected to the detection means 5, and the light emission intensity is digitized by processing the detected electrical signal by, for example, arithmetic processing. Such processing means 6 is not particularly limited, and for example, a personal computer, a microcomputer, an FPGA, or the like may be used.

  The display unit 7 is a unit for displaying the light emission intensity digitized by the processing unit 6. The display means 7 is not particularly limited, and may be, for example, a monitor connected to the personal computer described above.

  In the present embodiment, the processing means 6 and the display means 7 are shown as being integrated, but they may not be integrated.

  The stress-stimulated luminescent particles dispersed in the base material 4 have a property of emitting light when an external force is applied, and are obtained by adding a luminescent center to a base material.

  The matrix material of the stress-stimulated luminescent particles is not limited to this, but includes a stuffed tridymite structure, a three-dimensional network structure, a feldspar structure, a crystal structure with controlled lattice defects, a wurtzite structure, a spinel structure, and a corundum. Examples thereof include oxides, sulfides, carbides or nitrides having a structure or β-alumina structure.

  As the luminescent center of the stress luminescent particles, rare earth ions of Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Ti, Examples include transition metal ions of Zr, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Nb, Mo, Ta, and W.

For example, when a strontium and aluminum-containing composite oxide is used as a base material, an emission center includes xSrO.yAl ₂ O ₃ .zMO (M is a divalent metal, Mg, Ca, or Ba, and x, y, and z are XSrO.yAl ₂ O ₃ .zSiO ₂ (x, y, z are each independently a positive integer) is more preferably used, and SrMgAl ₁₀ O ₁₇ : Eu It is more preferable to use (Sr _x Ba _1-x ) Al ₂ O ₄ : Eu (0 <x <1), BaAl ₂ Si ₂ O ₈ : Eu.

  The average particle size of the stress-stimulated luminescent particles is not particularly limited, but is preferably 10 nm or more and 100 μm or less, and more preferably 50 μm or less. By having such a particle size, it can be uniformly dispersed throughout the substrate such as a liquid or gel. Furthermore, since the stress-stimulated luminescent particles have a fine shape within the above range, there is an effect that the resolution in the space for measuring the sound pressure by ultrasonic waves can be increased.

In addition, a translucent coating layer may be further provided around the stress-stimulated luminescent particles. The stress-stimulated luminescent particles tend to increase the dispersibility of the particles as the difference in specific gravity from the base material to be dispersed decreases. For example, when the base material is water and the base material of the stress luminescent particles has an α-SrAl ₂ O ₄ structure, the specific gravity of water is 1 and the specific gravity of the stress luminescent particles is 3.34. Therefore, when a translucent coating layer is provided around the stress-stimulated luminescent particles, the specific gravity of the stress-stimulated luminescent particles is reduced. Therefore, since the difference in specific gravity with the base material is reduced, the dispersibility of the particles is enhanced. As the base material, α-SrAl ₂ O ₄ structure comprising a lattice defect is more preferable. SrAl ₂ O ₄ has a α-phase is less symmetry monoclinic, become either phase state of more symmetry is high hexagonal β phase. The α-SrAl ₂ O ₄ structure including lattice defects refers to a crystal structure in which Sr to O are partially missing in this α-phase SrAl ₂ O ₄ .

(How to use the measuring device 1)
Next, the usage method of the measuring apparatus 1 which concerns on this Embodiment is demonstrated below.

  First, an ultrasonic wave is generated from the ultrasonic wave generation means 2 and irradiated to the container 3 (ultrasonic irradiation process). The vibration by the irradiated ultrasonic wave propagates to the base material 4 stored via the container 3. Light is emitted from the stress-stimulated luminescent particles dispersed in the base material 4 by the sound field energy generated from the sound pressure generated by this vibration (light emission process). This light enters the detection means 5 through a translucent window installed in the container 3.

  The detection means 5 includes a condensing lens 51 and an image sensor 52, and light emitted from the stress luminescent particles is received by the image sensor 52 via the condensing lens 51. The received light undergoes photoelectric conversion in the image sensor 52, and the received light is converted into an electrical signal (detection step). The electric signal thus converted is transmitted to the processing means 6 connected to the detection means 5.

  The processing means 6 performs A / D conversion on the received electrical signal to digitize the light emission intensity for each pixel of the image sensor 52 (processing step). This digitized data is stored in a recording medium in JPEG format or TIFF format. The stored data is displayed as a measurement result on the display means.

  Here, the emission intensity data displayed by the display means is represented as an ultrasonic sound pressure intensity distribution. For example, the distribution state of the sound pressure of the ultrasonic wave in the base material 4 is displayed three-dimensionally with the sound pressure generation position as the XY axis and the emission intensity as the Z axis. At this time, measure the accurate intensity of sound pressure by measuring the emission intensity background data in the absence of sound pressure in advance and correcting the emission intensity at the time of sound pressure generation using this data. can do.

[Embodiment 2 of measuring apparatus]
Next, another embodiment of the measuring apparatus according to the present invention will be described below.
(Configuration of measuring device 1 ')
FIG. 2 is a diagram showing a schematic configuration of the sound pressure intensity distribution measuring apparatus 1 ′ according to the present invention. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 2, the measuring apparatus 1 ′ according to the present embodiment is an embodiment in that it includes an ultrasonic generating container 9 in which the ultrasonic generating means 2 and the container 3 of FIG. 1 are integrated. Different from 1. The ultrasonic generation container 9 has an opening, in which a liquid is stored and a measurement object 10 is installed. The solution stored in the ultrasonic generation container 9 is not particularly limited as long as it can propagate vibrations due to ultrasonic waves to the measurement object 10, but the measurement object 10 may be installed. The hardness is preferably as high as possible. The measurement object 10 is not particularly limited, and may be a beaker or an aluminum foil, for example.

  Further, the measurement object 10 is provided with a base material 4 '. Stress luminescent particles are dispersed in the base material 4 '. The material of the substrate 4 ′ is not particularly limited, but a material that can strongly hold and fix the dispersed stress-stimulated luminescent particles is preferable. Examples of such a material include polymer materials such as one-component curable or two-component curable acrylic resins, epoxy resins, urethane resins, and transparent silicone rubber. Moreover, in this Embodiment, the shape of base material 4 'is apply | coated to the measuring object 10, and forms the layer. The method for forming the layer of the substrate 4 ′ on the measurement object 10 is not particularly limited. For example, the layer is formed by mixing the above-described material and the stress-luminescent particles into a paste and applying the paste to the measurement object 10. May be. Although the thickness of the layer is not particularly limited, it is preferable to install the layer on the measurement object 10 in consideration of not affecting the vibration of the ultrasonic wave propagating in the solution.

(How to use the measuring device 1 ')
Next, a method of using the measuring apparatus 1 ′ according to the present embodiment will be described below. The ultrasonic irradiation process, the light emission process, and the detection process in the present embodiment are different from those in the first embodiment.

  First, in the ultrasonic wave irradiation step, ultrasonic waves are generated from the ultrasonic wave generation container 9 to propagate vibrations in the solution. This vibration is transmitted to the measurement object 10 installed inside the ultrasonic wave generation container 9, and a sound pressure is generated. The sound pressure is transmitted to the base material 4 ′ installed on the measurement object 10, and the sound field energy is generated, whereby the stress luminescent particles dispersed in the base material 4 ′ emit light (light emission process).

  The light of the stress-stimulated luminescent particles thus radiated is detected by the detection means 5 installed on the upper part of the ultrasonic wave generation container 9 (detection step).

  In addition, this invention is not limited to the form mentioned above, The said stress light emitting particle | grains generate | occur | produce by the stress luminescent particle, the ultrasonic generator which irradiates an ultrasonic wave to the said stress luminescent particle, and the energy of the said ultrasonic wave. It may be a kit that measures a sound pressure intensity distribution by an ultrasonic wave equipped with a detection device that detects sound pressure intensity from light.

  Moreover, according to the structure of this invention, it can apply also to the apparatus which measures the energy density distribution of an ultrasonic wave, and can measure the energy density distribution of an ultrasonic wave suitably.

  Examples will be shown below, and the embodiments of the present invention will be described in more detail. Of course, the present invention is not limited to the following examples, and it goes without saying that various aspects are possible in detail. Further, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope shown in the claims, and the present invention is also applied to the embodiments obtained by appropriately combining the disclosed technical means. It is included in the technical scope of the invention. Moreover, all the literatures described in this specification are used as reference.

[Example 1: Measurement of sound pressure intensity distribution]
The following apparatus was used for the measurement of the sound pressure intensity distribution using ultrasonic waves used in this example. In this embodiment, an ultrasonic oscillator (manufactured by Panametrics-NDT, Model: 5072PR, frequency 20 MHz) and a camera (Photolon FASTCAM-512PCI, Model 2K) as a light receiving means (detecting means) were used. Further, a SrAl ₂ O ₄ : Eu stress light emitting film was coated on both surfaces of a 12 μm thick aluminum foil to prepare a stress light emitting sheet having a thickness of about 160 μm, and placed on the surface of the ultrasonic gel.

The SrAl ₂ O ₄ : Eu stress light-emitting film was prepared as follows. That is, first, it was weighed so that Sr _0.9 Eu _0.01 Ho _0.01 Al ₂ O ₄ was obtained. Further, this substance was sufficiently mixed in ethanol, and further dried, pre-baked and main-baked. Thereafter, SrAl ₂ O ₄ : Eu powder obtained by pulverizing the material was mixed with a transparent epoxy resin, and this was applied onto an aluminum foil by screen printing.

  Using these, the light emission intensity of the selected area in the stress light-emitting sheet was measured. FIG. 3 is a graph showing a change in the average value of light emission intensity in a selected area in the stress light-emitting sheet of this example. This graph shows the relationship between time (horizontal axis) and the average value (vertical axis) of light intensity, and the points in the graph are representative examples, and not all are plotted.

  From this graph, it was found that the emission intensity of the stress-stimulated luminescent sheet increases when ultrasonic waves are generated (ultrasonic ON). In addition, emission was strong where the sound field energy was strong, that is, where the sound pressure was strong, and the emission intensity varied with time. From this, it was found that the sound field changes with time. Note that the emission intensity could be measured quantitatively by back-calculating the sound pressure from the emission intensity using a calibration curve prepared in advance.

  Next, FIG. 4 is a graph showing the spatial distribution of the emission intensity when the ultrasonic wave is OFF (frame 100) and when the ultrasonic wave is ON (frame 800). By comparing these graphs, it was found that the sound pressure intensity distribution of the ultrasonic waves in the space can be observed in real time.

[Example 2: Quantification of spatial ultrasonic energy density distribution]
(Example 2-1: Quantification of spatial ultrasonic energy density distribution when using a 20 MHz ultrasonic transducer)
Next, the spatial ultrasonic energy density distribution was quantified using an ultrasonic transducer that vibrates at a frequency of 20 MHz by ultrasonic oscillation of an ultrasonic oscillator. Specifically, 1 mm of gel was placed on the surface of the ultrasonic vibrator, and a stress light emitting film was placed thereon, and the relationship between the emission intensity and the ultrasonic energy during ultrasonic oscillation was measured.

  In this example, an ultrasonic oscillator (manufactured by Panametrics-NDT, Model: 5072PR) and a camera (manufactured by Photron) as a light receiving means (detecting means) were used. Moreover, a stress light emitting film (thickness 0.2 mm, size 15 mm × 15 mm) in which a stress light emitting film having a thickness of 100 μm was provided on a silicon film was prepared and placed on the surface of the gel. Using these, the light emission intensity of the selected area in the stress light-emitting film was measured. (A) of FIG. 5 is a figure which shows the selection area | region in a stress light emitting film, (b) of FIG. 5 and (c) of FIG. 5 mounted on the ultrasonic transducer | vibrator shown in (a) of FIG. It is a figure which shows the light emission image at the time of the ultrasonic oscillation of a stress light emitting film. The stress-stimulated luminescent films of Example 2-1 and Example 2-2, which will be described later, were manufactured by the same method as in Example 1.

  In addition, FIG. 6 shows a change in emission intensity in the selected area at this time. FIG. 6A is a graph showing the distribution in the horizontal direction (X-axis direction) of the light emission intensity surrounded by a broken line in FIG. 5B. In this graph, the vertical axis indicates the emission intensity, the horizontal axis indicates the horizontal distance, the leftmost (selected area “2” shown in FIG. 5A) is 0 mm, and the center of the vibrator is 5 mm. To position. In this graph, since the emission intensity is high in the vicinity of 5 mm, which is the center of the vibrator, it has been found that the emission intensity is distributed within the range of the diameter of the vibrator of 4 mm. This result showed that the distribution was the same as that in the Y-axis direction, as shown in FIG. FIG. 6B is a graph showing the distribution in the vertical direction (Y-axis direction) of the light emission intensity surrounded by the broken line in FIG. In the graph shown in FIG. 6B, the center of the vibrator is located at 5 mm. FIG. 6C shows a three-dimensional distribution of light emission intensity around the vibrator at this time.

  In addition, the ultrasonic energy was quantitatively measured by inversely calculating the ultrasonic energy from the light emission intensity from the graph showing the correspondence between the light emission intensity and the ultrasonic energy prepared in advance.

  To change the ultrasonic energy, adjust the electrical energy input to the vibrator by adjusting three parameters: (1) energy range of the oscillator, (2) PRF (Pulse repeat frequency) pulse repetition frequency, and (3) attenuation factor. Went by. The ultrasonic energy is proportional to the electric energy input to the vibrator (proportional coefficient K is the mechanical-electric conversion coefficient of the vibrator). FIG. 7A shows a graph comparing the light emission intensities with respect to the different ultrasonic energy. In this graph, the vertical axis indicates the emission intensity, the horizontal axis indicates the ultrasonic energy, and the straight line indicates y = 16.44405x−56.54768. In addition, Table 1 shows the ultrasonic energy and emission intensity at each point shown in FIG. At the same time, a graph comparing the light emission intensity with respect to the sound pressure level measured by the sound pressure sensor is shown in FIG.

  That is, as shown in FIG. 7A and Table 1, the light emission intensity (light energy) from the stress luminescent particles is proportional to the intensity of the ultrasonic energy applied to the luminescent particles. It has become clear from FIG. 7B that there is no linear proportional relationship between the levels.

  As shown in (a) of FIG. 7 and Table 1, it is clear that the emission intensity is proportional to the ultrasonic energy. Thus, it has been found that the emission intensity can be calculated as the intensity of the ultrasonic energy corresponding to the space from the coefficient of the emission intensity and the ultrasonic energy. Therefore, by obtaining the emission intensity in each selected area and calculating the intensity of the ultrasonic energy, as shown in FIG. 5B, from the emission image at the time of oscillation of the 20 MHz ultrasonic vibrator, the three-dimensional It was found that an ultrasonic intensity distribution (ultrasonic energy density distribution) was obtained.

(Example 2-2: Quantification of spatial ultrasonic energy density distribution when a 6 MHz ultrasonic transducer is used)
Next, the spatial ultrasonic energy density distribution was quantified using an annular ultrasonic transducer that vibrates at a frequency of 6 MHz. In this example, only the size (35 × 35 mm) of the stress-stimulated luminescent film was different from the example described above, and the other conditions were the same. At this time, the light emission intensity of the selected area in the stress light-emitting film was measured. (A) of FIG. 8 is a figure which shows the selection area | region in a stress light emission film, (b) of FIG. 8 is a figure which shows the light emission image at the time of the ultrasonic oscillation of the stress light emission film shown to (a) of FIG. It is.

  Further, FIG. 9 shows a change in emission intensity in the selected area at this time. FIG. 9 is a graph showing a change in emission intensity with time in the selected areas (1 to 9) shown in FIG. In this graph, the vertical axis represents emission intensity, and the horizontal axis represents time. Thus, according to this example, it is possible to observe the ultrasonic intensity distribution by quantifying the light emission distribution in the stress light-emitting film from the light emission image shown in FIG. all right.

(Example 2-3: Quantification of spatial ultrasonic energy density distribution when using 40 KHz ultrasonic cleaner)
Next, the spatial ultrasonic energy density distribution was quantified using a 40 KHz ultrasonic cleaner as an ultrasonic wave generation source. Specifically, a stress light emitting film (12 × 25 cm) is installed in an ultrasonic cleaning machine, and the light emitted from the stress light emitting film is detected using a camera (manufactured by Photron). The ultrasonic energy was quantified from the distribution of emission intensity. In this example, the luminous intensity of the stress-stimulated luminescent film was measured using a 150 μm thick luminescent particle dispersion film as the stress-stimulated luminescent film. The result is shown in FIG. The luminous particle dispersion film was produced by dispersing in a silicon rubber.

  FIG. 10A is a view showing a light emission image at the time of ultrasonic oscillation of the stress light emission film installed in the ultrasonic cleaner, and FIG. 10B is a back view of the image shown in FIG. It is a figure which shows the light emission image after deducting a ground. Further, the energy density distribution of the ultrasonic waves obtained in this example is shown in FIG. According to this example, as shown in FIG. 10 (b), since the light emission distribution in the stress-stimulated luminescent film can be specified by ultrasonic excitation, it can be seen that the ultrasonic energy density distribution can be observed as in the above-described example. It was.

  The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims, and embodiments obtained by appropriately combining technical means disclosed in different embodiments. Is also included in the technical scope of the present invention.

  The measurement method according to the present invention can accurately, precisely, and easily measure the sound pressure intensity distribution and energy density distribution by ultrasonic waves, and is therefore applied to medical examinations, treatments, and cleaning of precision instruments. be able to.

DESCRIPTION OF SYMBOLS 1, 1 'Measuring apparatus 2 Ultrasonic wave generation means 3 Container 4, 4' Base material 5 Detection means

Claims (10)

A method for measuring the sound pressure intensity distribution by ultrasound,
A measurement method comprising: irradiating a substrate on which stress-stimulated luminescent particles are dispersed with ultrasound, and measuring at least one of light intensity emitted from the stress-stimulated luminescent particles and its distribution by the energy of the ultrasound.   The measurement method according to claim 1, wherein the substrate is a gel or a liquid.   The measurement method according to claim 1, wherein the base material is an elastic body.   4. The measurement method according to claim 1, wherein a particle diameter of the stress-stimulated luminescent particles is 10 nm or more and 100 μm or less.   The matrix material of the stress-stimulated luminescent particles is an oxide, sulfide, carbide or nitride having a stuffed tridymite structure, a three-dimensional network structure, a feldspar structure, a wurtzite structure, a spinel structure, a corundum structure or a β-alumina structure. The measurement method according to claim 1, wherein: Base material of the stress luminescent particles, measuring method according to claim 1, any one of 4, which is a alpha-SrAl ₂ O ₄ structure comprising a lattice defect. An apparatus for measuring the sound pressure intensity distribution by ultrasonic waves,
An ultrasonic wave generating means for irradiating ultrasonic waves onto a substrate in which stress-stimulated luminescent particles are dispersed;
And a detecting means for detecting a light emission intensity from light emitted from the stress-stimulated luminescent particles by the energy of the ultrasonic waves. Processing means for converting the emission intensity detected by the detection means into an electrical signal;
The measuring apparatus according to claim 7, further comprising display means for displaying a distribution of emission intensity from the electrical signal converted by the processing means. A method for measuring the energy density distribution of ultrasonic waves,
A measurement method comprising: irradiating a substrate on which stress-stimulated luminescent particles are dispersed with ultrasound, and measuring at least one of light intensity emitted from the stress-stimulated luminescent particles and its distribution by the energy of the ultrasound. An apparatus for measuring an ultrasonic energy density distribution,
An ultrasonic wave generating means for irradiating ultrasonic waves onto a substrate in which stress-stimulated luminescent particles are dispersed;
And a detecting means for detecting a light emission intensity from light emitted from the stress-stimulated luminescent particles by the energy of the ultrasonic waves.