JP2010069392A - Substrate drying apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate drying apparatus in which the amount of air to be dried is reduced without reducing the conveyance speed of a large glass substrate that is conveyed at high speed.
SOLUTION: A trapezoidal hood 20 whose opening gradually increases from an entrance where a large glass substrate 10 is carried in toward an outlet where the large glass substrate 10 is carried out, and an air knife 30-1, which injects dry air onto both surfaces of the large glass substrate 10, 30-2 and an ionizer 40 that is located on one side of the large glass substrate 10 and generates ions.
[Selection] Figure 1

Description

  The present invention relates to drying of a large glass substrate that is conveyed at high speed, and more particularly to a substrate drying apparatus that reduces the amount of air used to dry the large glass substrate that is conveyed at high speed.

  As a side of a glass substrate becomes a large substrate exceeding 1 m, the substrate transport speed tends to be increased. In the drying process after washing the large glass substrate, the substrate is transported at a high speed, so that pure water for rinsing remains on the substrate surface of a large area, which causes spots and the like. For this reason, it is necessary to install air knives in multiple stages to remove the deionized water remaining on the substrate surface, and the amount of air used increases, which has been a factor affecting the cost of the drying process.

In Patent Document 1, in the air injection area from the upper and lower air knife nozzles, outside the substrate conveyance area by the conveyor means, the side of the substrate facing the corner that first enters the air injection area The rectifying plate is fixedly arranged at a position parallel to the section, and the air jetted from the nozzle port is isolated by this rectifying plate, and the air is guided by the surface of the rectifying plate and flows in the rectifying state. There is a description to that effect.
JP 2002-110622 A

  The present invention has been made to solve such a problem, and an object of the present invention is to provide a substrate drying apparatus in which the amount of air to be dried is reduced without reducing the conveyance speed of a large glass substrate that is conveyed at high speed. The purpose is to provide.

The substrate drying apparatus of the present invention is a substrate drying apparatus that dries a large-sized glass substrate that is conveyed at high speed, and a trapezoidal hood whose opening gradually increases from an inlet into which a large-sized glass substrate is carried in toward an outlet. When, characterized in that it comprises a air knife for injecting drying air on both sides of the large-size glass substrate.

  The hood of the substrate drying apparatus of the present invention has a hot air supply port.

  The hood of the substrate drying apparatus of the present invention is formed of a SUS material and is electrically grounded.

  According to the present invention, since the amount of air to be dried can be reduced without reducing the conveyance speed of a large glass substrate that is conveyed at high speed, the substrate drying apparatus that can dry at high speed without affecting the cost of the drying process Can be provided.

  Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is an apparatus configuration diagram showing the configuration of a substrate drying apparatus according to the present invention. In FIG. 1, a substrate drying apparatus 100 includes a trapezoidal hood 20 whose opening gradually increases from an entrance where a large glass substrate 10 is carried in by rollers 50-1 and 50-2, and a large glass. Air knives 30-1 and 30-2 that inject dry air onto both surfaces of the substrate 10 and an ionizer 40 that is located on one surface of the large glass substrate 10 and generates ions are included. The hood 20 is made of SUS material and is electrically grounded, and has a hot air supply port 22.

  The large glass substrate 10 is conveyed by rollers 50-1 and 50-2 in the direction of the arrow from the left to the right in the drawing. The trapezoidal hood 20 has an opening that gradually increases from the entrance through which the large glass substrate 10 is carried into the exit. The air knives 30-1 and 30-2 are installed at a predetermined angle with respect to the substrate surface of the large glass substrate 10 from the right angle in the transport direction, and inject dry air onto both surfaces of the substrate. The gap between the entrance of the hood 20 and the large glass substrate 10 is 2 to 10 mm, and the distance between the exit and the air knives 30-1 and 30-2 is 5 to 30 mm.

  Thereby, since the dry air sprayed on both surfaces of the large glass substrate 10 from the air knives 30-1 and 30-2 entrains the air in the substrate drying apparatus 100 and flows into the hood 20, the air in the apparatus is also dried. Can contribute. The dry air that has flowed in along with the in-apparatus air is squeezed in the hood 20 and flows out of the hood 20 at a speed close to the flow velocity when sprayed on both sides of the substrate, so that a drying effect equivalent to an air knife is obtained. For this reason, the air knife may be one stage by the air knives 30-1 and 30-2, and a multi-stage air knife is not necessary.

  Further, in order to prevent drying unevenness, the entire surface of the substrate should be wet evenly so that the pure water remaining on the substrate surface is instantaneously dried by the dry air sprayed from the air knives 30-1 and 30-2. Is desirable. The adjustment of the wetness is a predetermined value corresponding to the length, angle, gap, etc. of the hood 20 corresponding to the flow rate of the drying air by the air knives 30-1 and 30-2 and the conveyance speed of the large glass substrate 10. By setting to, it is possible to easily adjust compared to the adjustment of the injection speed by a multistage air knife.

  As described above, the air knife may be provided in one stage and the air in the apparatus can be used, so that the amount of air to be dried can be reduced. Further, by supplying hot air from the hot air supply port 22 of the hood 20, it is possible to further increase the reduction of dry air. Static electricity generated on the large glass substrate 10 by the high-speed air is neutralized by ions generated by the ionizer 40, and static electricity generated on the hood 20 is removed by electrically grounding the SUS material.

As described above, according to the present invention, it is possible to reduce the amount of air to be dried without reducing the transport speed of a large glass substrate that is transported at high speed, so that the speed of the drying process is not affected. It is possible to provide a substrate drying apparatus capable of drying. In addition, since static electricity generated by high-speed air is easily removed, it is possible to provide a substrate drying apparatus capable of high-speed drying by suppressing or preventing adhesion of foreign substances to the substrate due to static electricity.

The apparatus block diagram which shows the structure of the board | substrate drying apparatus by this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Large glass substrate 20 Hood 22 Hot air supply port 30-1, 30-2 Air knife 40 Ionizer 50-1, 50-2 Conveying roller 100 Substrate drying apparatus

Claims (3)

A substrate drying apparatus for drying a large glass substrate conveyed at high speed,
A trapezoidal hood whose opening gradually increases from the entrance where the large glass substrate is carried in toward the exit where it is carried out;
An apparatus for drying a substrate , comprising: an air knife for injecting dry air onto both surfaces of the large glass substrate.   The substrate drying apparatus according to claim 1, wherein the hood has a hot air supply port.   The substrate drying apparatus according to claim 1, wherein the hood is formed of a SUS material and is electrically grounded.

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