JP2010065799A - Flow passage structure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent breakage of a multilayer substrate even when a liquid is expanded by freezing. <P>SOLUTION: A slit 121 is formed in a thin plate 102, and the slit 121 is sealed by bonding the thin plate 102 to a thin plate 101 and a thin plate 103 while being held between them. An elastic film 104 is held between the thin plate 102 and the thin plate 103. The elastic film 104 is bent in the slit 121, and the bent part 141 is protruded to the slit 121. The internal space of the slit 121 is divided into two upper and lower areas 122 and 123 by the elastic film 104. One area 122 is a flow passage for carrying water. The other area 123 is filled with a gas such as air. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a channel structure.

  In recent years, small electronic devices such as mobile phones, notebook personal computers, digital cameras, watches, PDAs (Personal Digital Assistance), and electronic notebooks have made remarkable progress and development. In general, a primary battery or a secondary battery is used as a power source of an electronic device. However, research and development for using a fuel cell with high energy utilization efficiency as a power source of the electronic device has been performed.

In order to use the fuel cell, various peripheral devices are required. Peripheral devices include reformers, carbon monoxide removers, combustors, water coolers, and pumps. In order to allow fuel, water, reactants, products, etc. to flow between the fuel cell and various peripheral devices, a flow path is required. A multilayer substrate is used for the flow path. That is, each thin plate of the multilayer substrate is formed with one or a plurality of slits and one or a plurality of through holes, and by laminating these thin plates, the slits and the through holes are connected to form a predetermined flow path. Yes. A fuel cell and various peripheral devices are mounted on a multilayer substrate, and fuel, water, reactants, products, and the like are sent between the fuel cell and various peripheral devices by a flow path inside the multilayer substrate.
JP 2005-32609 A

By the way, when a fuel cell, various peripheral devices, and a fuel cell system using a multilayer substrate are used in a sub-freezing environment, water remaining inside the multilayer substrate is frozen. Since water expands due to freezing, a load due to expansion acts on the multilayer substrate from the inside of the multilayer substrate, and the multilayer substrate may be damaged.
Therefore, the problem to be solved by the present invention is to prevent damage to the multilayer substrate even if the liquid expands due to freezing.

In order to solve the above problems, according to one aspect of the present invention,
An elastic membrane is disposed in a space for flowing fluid, the space is divided into two regions by the elastic membrane, gas is filled in one of the two regions, and liquid flows in the other region. A feature channel structure is provided.

According to another aspect of the invention,
A bellows-like membrane is disposed in a space for flowing a fluid, the space is divided into two regions by the bellows-like membrane, one of the two regions is filled with gas, and a liquid flows in the other region. Is provided.

According to another aspect of the invention,
A liquid flow path through which a liquid flows, a gas flow path through which a gas flows, and a communication path from the gas flow path to the liquid flow path are formed;
A flow path structure is provided in which an electromagnetic valve is provided in the communication path.

  According to the present invention, even if the liquid remaining inside the flow path is frozen, damage to the flow path structure can be suppressed.

  Hereinafter, preferred embodiments for carrying out the present invention will be described with reference to the drawings. However, although various technically preferable limitations for implementing the present invention are given to the embodiments described below, the scope of the invention is not limited to the following embodiments and illustrated examples.

FIG. 1 is a block diagram showing a schematic configuration of the fuel cell system 1.
The fuel cell system 1 is attached to a mobile phone, a personal computer, a digital camera, a PDA (Personal Digital Assistance), an electronic notebook, a portable radio, and other electronic devices.

  The fuel cell system 1 includes a main body module 2 and a cartridge 3. The main body module 2 is mounted on an electronic device. The cartridge 3 can be attached to and detached from the electronic device. When the cartridge 3 is attached to the electronic device, the cartridge 3 is connected to the main body module 2.

The cartridge 3 includes a fuel storage unit 4, a water storage unit 5, a gas-liquid separation membrane 6, and a filtration unit 7.
The fuel storage unit 4 stores fuel (for example, methanol, ethanol, dimethyl ether, etc.). Water is stored in the water storage unit 5.
A gas-liquid separation membrane 6 is provided in the water storage unit 5, and a gas introduced from outside the cartridge 3 into the water storage unit 5 passes through the gas-liquid separation membrane 6, but the liquid in the water storage unit 5 is gas-liquid separated. It does not pass through the membrane 6. The gas that has passed through the gas-liquid separation membrane 6 is discharged to the outside. As the gas-liquid separation membrane 6, a porous tetrafluoroethylene resin may be used.
The filtering unit 7 filters water discharged from the water storage unit 5 and captures foreign matters contained in the water. The filtration part 7 has an ion exchange resin and a porous membrane.

  The main body module 2 includes a water supply pump 11, flow control valves 12, 13, humidifiers 14, 15, air pump 31, flow control valves 32-34, fuel supply pump 51, vaporizer 52, reformer 53, and CO remover. 54, a catalytic combustor 55, a heat insulating container 56, a fuel cell 57, a catalytic combustor 58, a heat exchanger 59, and the like.

  When the cartridge 3 is attached to the main body module 2, the filtration unit 7 is connected to the water supply pump 11, the fuel storage unit 4 is connected to the fuel supply pump 51, and the water storage unit 5 performs heat exchange via the flow path 67. Connected to the instrument 59.

  The fuel supply pump 51 is connected to the carburetor 52 via the flow path 60, and the carburetor 52 is connected to the reformer 53 via the flow path 61. A CO remover 54 is provided downstream of the reformer 53, and the reformer 53 and the CO remover 54 are accommodated in a heat insulating container 56 having a pressure sufficiently lower than the atmospheric pressure. In the heat insulating container 56, a CO remover 54 is connected downstream of the reformer 53. A catalyst combustor 55 is also accommodated in the heat insulating container 56 to prevent the combustion heat of the catalyst combustor 55 from being released outside the heat insulating container 56. The CO remover 54 is connected to the humidifier 14 via a flow path 62. The humidifier 14 is connected to the anode of the fuel cell 57 via the flow path 63. The anode of the fuel cell 57 is connected to the catalytic combustor 55 via the flow path 64. The catalytic combustor 55 is connected to the catalytic combustor 58 via the flow path 65. The catalytic combustor 58 is connected to a heat exchanger 59 via a flow path 66.

  The air pump 31 is connected to the flow rate control valve 32 via a flow path 35. The flow control valve 32 is connected to the CO remover 54 via the flow path 36. The air pump 31 is connected to the flow rate control valve 34 via a flow path 37. The flow control valve 34 is connected to the humidifier 15 via the flow path 40. The humidifier 15 is connected to the cathode of the fuel cell 57 via the flow path 41. The flow path 42 downstream of the cathode of the fuel cell 57 joins the flow path 65. The air pump 31 is connected to the flow rate control valve 33 via a flow path 38. The flow path 39 downstream of the flow control valve 33 joins the flow path 64.

  The water supply pump 11 is connected to the flow control valve 12 through a flow path 16 and is connected to the flow control valve 13 through a flow path 17. The flow path 18 downstream of the flow control valve 12 merges with the flow path 60. The flow control valve 13 is connected to the humidifier 14 via the flow path 19 and is connected to the humidifier 15 via the flow path 21. The downstream flow paths 20 and 22 of the humidifiers 14 and 15 merge with the flow path 67.

  The water supply pump 11 feeds water in the water storage unit 5 toward the vaporizer 52 and the humidifiers 14 and 15. The flow rate control valve 12 controls the flow rate of water flowing from the water supply pump 11 to the vaporizer 52. The flow rate control valve 13 controls the flow rate of water flowing from the water supply pump 11 to the humidifiers 14 and 15. The flow rate control valves 12 and 13 are provided with a flow rate sensor, and the flow rate of water is detected by the flow rate sensor.

  The air pump 31 sends external air toward the CO remover 54, the humidifier 15, and the catalytic combustor 55. The flow rate control valve 32 controls the flow rate of air flowing from the air pump 31 to the CO remover 54. The flow rate control valve 33 controls the flow rate of air flowing from the air pump 31 to the catalytic combustor 55. The flow control valve 34 controls the flow rate of air flowing from the air pump 31 to the humidifier 14. The flow rate control valves 32 to 34 are provided with a flow rate sensor, and the flow rate of air is detected by the flow rate sensor.

  The fuel supply pump 51 feeds the fuel in the fuel storage unit 4 toward the vaporizer 52. When the fuel is methanol, the mixing ratio (molar ratio) of the fuel sent to the vaporizer 52 by the fuel supply pump 51 and the water sent to the vaporizer 52 by the water supply pump 11 is 1 Is 1.2 to 1.8. The flow rate of water is adjusted by the flow rate control valve 12 so as to obtain such a mixing ratio.

The vaporizer 52 heats and vaporizes fuel and water. The fuel / water mixture vaporized by the vaporizer 52 flows to the reformer 53.
The reformer 53 reforms the fuel sent from the vaporizer 52 into hydrogen. Specifically, a mixture of fuel and water sent from the vaporizer 52 flows through the reformer 53, and the fuel and water react with each other through the catalyst layer to generate hydrogen, carbon dioxide, and the like. A trace amount of carbon monoxide is also produced at a concentration of several thousand to several tens of thousands ppm. When the fuel stored in the fuel storage unit 4 is methanol, in the reformer 53, reactions such as the following expressions (1) and (2) occur.
CH ₃ OH + H ₂ O → 3H ₂ + CO ₂ (1)
H ₂ + CO ₂ → H ₂ O + CO (2)
The product gas generated by the reformer 53 is sent to the CO remover 54.

  In the CO remover 54, the product gas sent from the reformer 53 and the air sent from the air pump 31 are mixed. The CO remover 54 selectively oxidizes carbon monoxide in the generated gas, thereby removing the carbon monoxide. The product gas that has passed through the CO remover 54 is sent to the humidifier 14. The humidifier 14 humidifies the generated gas flowing from the CO remover 54 with water flowing from the water supply pump 11. The generated gas that has passed through the humidifier 14 is sent to the anode of the fuel cell 57. The water that has passed through the humidifier 14 passes through the flow path 20 and the flow path 67 in order, and is sent to the water storage unit 5.

  The humidifier 15 humidifies the air flowing from the air pump 31 with the water flowing from the water supply pump 11. The air that has passed through the humidifier 15 is sent to the cathode of the fuel cell 57. The water that has passed through the humidifier 15 passes through the flow path 22 and the flow path 67 in order, and is sent to the water storage unit 5.

The fuel cell 57 includes an anode, an electrolyte membrane, a cathode, and the like. This fuel cell 57 generates electricity by causing an electrochemical reaction between hydrogen in the product gas supplied to the anode and oxygen in the air supplied to the cathode. When the electrolyte membrane is a solid polymer electrolyte membrane, a reaction such as the following equation (3) occurs at the anode, and a reaction such as the following equation (4) occurs at the cathode.
H ₂ → 2H ⁺ + 2e ⁻ (3)
_{^{2H + + 1 / 2O 2 +}} 2e - → H 2 O ··· (4)
The air that has passed through the cathode is sent to the catalyst combustor 58 through the flow path 42 and the flow path 65 in this order. At the anode, not all hydrogen in the product gas reacts, but there is also unreacted hydrogen, and about 20% of the hydrogen supplied to the anode is unreacted. The product gas that has passed through the anode is sent to the catalytic combustor 55.

  The catalytic combustor 55 oxidizes and burns hydrogen and the like in the product gas, thereby generating combustion heat. The heat generated by the catalytic combustor 55 is used for heating the reformer 53 and the CO remover 54. In order to increase the heating efficiency of the reformer 53 and the CO remover 54 and to keep the temperature distribution of the reformer 53 and the CO remover 54 appropriately, the reformer 53, the CO remover 54, and the catalytic combustor 55 Is housed in a rigid insulated container 56. The inside of the heat insulation container 56 is kept at a vacuum pressure, and thereby heat insulation is performed. Further, the reformer 53, the CO remover 54 and the catalytic combustor 55 are heated by an electric heater 73. The electric heater 73 is made of a metal thin film (for example, gold or platinum). The relationship between the electric resistance and temperature of the electric heater 73 is linear, and the electric heater 73 also functions as a thermistor. The electric heater 73 is a heating means when the catalytic combustor 55 cannot heat the reformer 53 and the CO remover 54 to a desired temperature at the start-up, or during steady operation when the catalytic combustor 55 is stably heated. Used as auxiliary heating means for fine adjustment of temperature.

  The product gas that has passed through the catalytic combustor 55 is sent to the catalytic combustor 58 through the flow path 65. The catalytic combustor 58 oxidizes and burns hydrogen or the like in the product gas, thereby removing the hydrogen so as to have a low concentration that does not cause a problem.

  The product gas that has passed through the catalytic combustor 58 is sent to the heat exchanger 59 through the flow path 66. The heat exchanger 59 cools the product gas by exchanging heat with the product gas heated by combustion with the outside. Thereby, water (steam) in the generated gas is liquefied. The liquefied water and produced gas are sent to the water storage unit 5 through the flow path 67. The water sent from the humidifiers 14 and 15 is mixed with the water and the product gas sent from the heat exchanger 59 to the water storage unit 5.

  In the water storage unit 5, liquefied water is stored. On the other hand, the product gas (water that has not been liquefied, carbon dioxide, etc.) passes through the gas-liquid separation membrane 6 and is discharged to the outside.

  The main body module 2 is provided with a control circuit 70, a power storage unit 71, and an interface 72. The control circuit 70 controls the water supply pump 11, the fuel supply pump 51, the flow control valves 12, 13, 32, 33, 34, and the like. The power storage unit 71 stores electricity generated by the fuel cell 57. The interface 72 performs data transfer between the control circuit 70 and the control unit of the electronic device.

  In FIG. 1, liquid water flows through the flow paths 16 to 22. Air flows through the flow paths 35 to 42. Fuel, water, a product, or air flows through the flow paths 60-66. In the flow path 67, liquid water, gaseous products, air, and the like flow.

FIG. 2 is a perspective view showing the appearance of the fuel cell system 1.
As shown in FIG. 2, the fuel cell system 1 has a multilayer substrate 100. On the multilayer substrate 100, flow control valves 12, 13, 32, 33, 34, a heat insulating container 56 and a fuel cell 57 are mounted. As described above, the reformer 53, the CO remover 54, and the catalytic combustor 55 are accommodated in the heat insulating container 56.

  An air pump 31 and two cartridges 3 are attached to the lower surface of the multilayer substrate 100. Although the air pump 31 is fixed to the multilayer substrate 100, the cartridge 3 can be detached from the multilayer substrate 100.

  The fuel supply pump 51, the vaporizer 52, the humidifiers 14 and 15, the catalyst combustor 58, the heat exchanger 59, and the water supply pump 11 shown in FIG. 1 are also attached to the multilayer substrate 100.

  The multilayer substrate 100 is obtained by laminating a plurality of thin plates such as ceramics and bonding them. Here, the flow paths 16 to 22, the flow paths 35 to 42, and the flow paths 60 to 67 shown in FIG. 1 are formed in the multilayer substrate 100 shown in FIG. 2. That is, each thin plate of the multilayer substrate 100 is formed with one or more slits and one or more through holes. When these thin plates are stacked, the slits and the through holes are connected, and the slits and the through holes flow. The paths 16 to 22, the flow paths 35 to 42, and the flow paths 60 to 67 are formed in the multilayer substrate 100 as shown in FIG.

  Hereinafter, each example of the channel structure using the multilayer substrate 100 will be specifically described.

<First example>
FIG. 3 is a cross-sectional view showing three thin plates 101, 102, and 103 that are continuously stacked in the multilayer substrate 100.
As shown in FIG. 3, slits 121 are formed in the thin plate 102, and the slits 121 are blocked by being joined to the thin plate 102 while being sandwiched between the thin plates 101 and 103. . An elastic film 104 is sandwiched between the thin plate 102 and the thin plate 103. The elastic film 104 is bent at the slit 121, and the bent portion 141 sticks to the slit 121. Therefore, the internal space by the slit 121 is divided into two upper and lower regions 122 and 123 by the elastic film 104. The elastic film 104 is made of a material that does not lose its elastic force even below freezing point. The volume of the region 123 is 10% or more, preferably 25% or more of the volume of the region 122 in a state where the liquid is filled therein.

  One region 122 is a channel through which a liquid such as water flows. That is, the flow paths 16 to 22 and 60 shown in FIG. The other region 123 is filled with a gas such as air and no liquid is mixed therein.

  When the fuel cell system 1 shown in FIG. 1 is stopped, the water supply pump 11, the fuel supply pump 51, and the like are stopped. When the water supply pump 11 stops, the water flowing in the flow paths 16 to 22 stays in the flow paths 16 to 22, and when the fuel supply pump 51 stops, the fuel flowing in the flow path 60 flows to the flow paths 16 to 16. 22 stays inside. The flow paths 20 and 22 are connected to the flow path 67. When the cartridge 3 is removed from the main body module 2, one end of the flow path 67 connected to the water storage unit 5 is opened, but cold air propagates from one open end of the flow path 67 located on the outer side. In order to begin, in the flow path 67 or the flow paths 20 and 22, first, the water inside freezes from the one end side opened first, and the inner side freezes and expands after one end is closed. is there. Accordingly, whether the cartridge 3 is detached from the main body module 2 or not, when the ambient temperature falls below the freezing point, the liquid in the flow paths 16 to 22 and 60 freezes and expands. If the liquid is water, it will expand by about 9% upon freezing. Then, the elastic film 104 is stretched and the volume of the region 122 is increased, but the gas in the region 123 is compressed and the volume in the region 123 is decreased. Since the smaller amount of the region 123 is only a part of the entire volume of the region 123, the compressed gas does not generate a stress sufficient to damage the three thin plates 101, 102, and 103. A similar effect occurs when the liquid in the channels 16 to 22 and 60 expands due to a temperature rise. Thus, since the region 123 exists in the slit 121 as a gap, even if the liquid staying in the region 123 expands due to freezing or thermal expansion due to a temperature rise, the portion 141 expands and the volume in the region 123 increases. Therefore, it is possible to prevent a large load from being applied to the thin plates 101 to 103. Therefore, damage to the multilayer substrate 100 can be suppressed. Therefore, when the fuel cell system 1 is stopped, it is not necessary to put antifreeze or the like into the region 122.

  The region 123 may be a sealed space, or may be communicated to the outside from the surface of the multilayer substrate 100. Further, the region 123 may be any of the flow paths 35 to 42 and the flow paths 61 to 67 shown in FIG.

<Second example>
FIG. 4 is a cross-sectional view showing three thin plates 201, 202, and 203 that are continuously stacked in the multilayer substrate 100.
As shown in FIG. 4, slits 221 are formed in the thin plate 202, and the thin plate 202 is joined to the thin plate 201 while being sandwiched between the thin plate 201 and the thin plate 203, thereby closing the slit 221. . An elastic film 204 is provided inside the slit 221. Both sides of the elastic film 204 are fixed to the inner wall of the slit 221 by the fixing material 205. The slit 221 is divided by the elastic film 204 into a region 222 on the thin plate 203 side and a region 223 on the thin plate 201 side. Each of the flow paths 16 to 22 and 60 shown in FIG. 1 has the same structure as the region 222, and a liquid such as water flows through the region 222. The other region 223 is filled with a gas such as air. Since the region 223 exists as a gap, even if expansion due to freezing of a liquid such as water in the region 222 or thermal expansion of the liquid occurs, it is possible to prevent a large load from being applied to the thin plates 201 to 203. Therefore, even if the fuel cell system 1 or the main body module 2 is exposed to a freezing point or a high temperature environment, damage to the multilayer substrate 100 can be suppressed. Therefore, when the fuel cell system 1 is stopped, it is not necessary to put antifreeze or the like into the region 222.

  Note that the region 223 may be a sealed space or may be communicated to the outside from the surface of the multilayer substrate 100. Further, the region 223 may be any of the flow paths 35 to 42 and the flow paths 61 to 67 shown in FIG.

<Third example>
FIG. 5 is a cross-sectional view showing four thin plates 301, 302, 303, and 304 that are continuously stacked in the multilayer substrate 100.
As shown in FIG. 5, slits 321 are formed in the thin plate 302, and slits 331 are also formed in the thin plate 303. The thin plates 302 and 303 are joined so that the slit 321 and the slit 331 overlap. The slits 321 and 331 are closed by joining the thin plates 302 and 303 to each other while being sandwiched between the thin plates 301 and 304.

  The width of the slit 331 is narrower than the width of the slit 321, and both sides of the slits 321 and 331 are steps 325. The elastic film 304 covers the slit 321 inside the slit 331. The elastic film 304 is bonded to the steps 325 on both sides of the slit 331. The elastic film 304 partitions the internal region 322 formed by the slits 321 and the internal region 323 formed by the slits 331. Each of the flow paths 16 to 22 and 60 shown in FIG. 1 has the same structure as the internal region 322, and a liquid such as water flows through the region 322. The other region 323 is filled with a gas such as air. Since the region 323 exists as a gap, even if expansion due to freezing of a liquid such as water in the region 322 or thermal expansion of the liquid occurs as shown in FIG. 6, a large load is not applied to the thin plates 301 to 304. Can be. Therefore, even if the fuel cell system 1 or the main body module 2 is exposed to a freezing point or a high temperature environment, damage to the multilayer substrate 100 can be suppressed. Therefore, when the fuel cell system 1 is stopped, it is not necessary to put antifreeze or the like into the region 322.

  Note that the region 323 may be a sealed space or may communicate with the outside from the surface of the multilayer substrate 100. Further, the region 323 may be any of the flow paths 35 to 42 and the flow paths 61 to 67 shown in FIG.

<Fourth example>
FIG. 7 is a cross-sectional view showing four thin plates 401, 402, 403, and 404 that are continuously stacked in the multilayer substrate 100.
As shown in FIG. 7, slits 421 are formed in the thin plate 402, and slits 431 are also formed in the thin plate 403. The thin plates 402 and 403 are joined so that the slit 421 and the slit 431 overlap. The slits 421 and 431 are closed by joining the thin plates 402 and 403 to each other while being sandwiched between the thin plates 401 and 404.

  The width of the slit 431 is narrower than the width of the slit 421, and the sides of the slits 421 and 431 are steps 425. A bellows-like film 404 covers the slit 421 inside the slit 431. The bellows-like film 404 is bonded to the steps 425 on both sides of the slit 431. The bellows-like film 404 partitions the internal region 422 by the slit 421 and the internal region 423 by the slit 431. Each of the flow paths 16 to 22 and 60 shown in FIG. 1 has the same structure as the region 422, and a liquid such as water flows through the region 422. The other region 423 is filled with a gas such as air. Since the region 423 exists as a gap, even if expansion due to freezing of liquid such as water in the region 422 or thermal expansion of the liquid occurs as shown in FIG. 8, a large load is not applied to the thin plates 401 to 404. Can be. Therefore, even if the fuel cell system 1 or the main body module 2 is exposed to a freezing point or a high temperature environment, damage to the multilayer substrate 100 can be suppressed. Therefore, when the fuel cell system 1 is stopped, it is not necessary to put antifreeze or the like into the internal region 422.

  Note that the region 423 may be a sealed space or may communicate with the outside from the surface of the multilayer substrate 100. Further, the region 423 may be any of the flow paths 35 to 42 and the flow paths 61 to 67 shown in FIG.

<Fifth example>
FIG. 9 is a cross-sectional view showing the multilayer substrate 100.
As shown in FIG. 9, a flow path 501 is formed in the multilayer substrate 100. The flow path 501 is formed of a slit formed in any thin plate (excluding the uppermost layer and the lowermost thin plate) of the multilayer substrate 100. The channel 501 is one of the channels 16 to 22 shown in FIG. 1, and a liquid such as water flows through the channel 501.

  Further, the channel 502 is formed in the multilayer substrate 100 in a layer different from the layer of the channel 502. The flow path 502 is formed of a slit formed in any thin plate (excluding the uppermost layer and the lowermost thin plate) of the multilayer substrate 100. The flow path 502 is one of the flow paths 35 to 40 shown in FIG. 1, and air flows through the flow path 502.

  A communication path 503 is formed in the multilayer substrate 100, and the communication path 503 communicates with the flow paths 501 and 502. The communication path 503 includes a through hole penetrating a thin plate between the layer of the flow channel 501 and the layer of the flow channel 502. A micro valve 510 is provided inside the multilayer substrate 100, and the communication path 503 is opened and closed by the micro valve 510. The micro valve 510 is a normally closed type valve.

The microvalve 510 is an electromagnetic valve, particularly an electromagnetic solenoid type valve.
Specifically, the micro valve 510 includes a valve body 511, a spring 512, a rod 513, a plunger 514, a coil 515, and the like. A valve body 511 and a plunger 514 are connected by a rod 513, and a coil 515 is wound around the plunger 514. The valve body 511, the plunger 514, and the rod 513 are urged by the spring 512, the valve body 511 is pushed out to the communication path 503, and the communication path 503 is closed by the valve body 511.

  During the operation of the fuel cell system 1 shown in FIG. 1, the water supply pump 11, the fuel supply pump 51, and the like are operating. At this time, no current flows through the coil 515, the valve body 511 is pushed out by the spring 512, and the communication path 503 is closed as shown in FIG.

  When the fuel cell system 1 shown in FIG. 1 is subsequently stopped, the water supply pump 11 and the fuel supply pump 51 are stopped, but the air pump 31 is not yet stopped. When a current flows through the coil 515, as shown in FIG. 10, the valve body 511 is drawn and the communication passage 503 is opened. Then, air blown by the air pump 31 flows into the flow path 502 through the communication path 503, and bubbles 521 are generated in the liquid 520.

  Thereafter, when the current of the coil 515 stops, the valve body 511 is pushed out by the spring 512, and the communication path 503 is closed by the valve body 511 again as shown in FIG. And the air pump 31 also stops.

  In this state, the ambient temperature decreases and the liquid 520 freezes. When the liquid 520 expands with freezing, the bubbles 521 are compressed, so that a large load can be prevented from being applied to the multilayer substrate 100. Therefore, even if the liquid 520 expands due to freezing or the like, damage to the multilayer substrate 100 can be suppressed. Therefore, when the fuel cell system 1 is stopped, it is not necessary to put antifreeze or the like into the flow path 501.

  Even when the microvalve 510 is of a normally open type, the opening / closing timing of the microvalve 510 is the same as that described above.

  Further, as shown in FIGS. 11 and 12, the microvalve 510 is provided vertically on the multilayer substrate 100 so that the valve element 511 of the microvalve 510 advances and retreats in a direction parallel to the communication path 503. May be. In this case, since the cross-sectional area of the valve body 511 is larger than the cross-sectional area of the communication path 503, the communication path 503 is closed by the valve body 511 when the valve body 511 is pushed out. Further, since the vertical cross-sectional area of the valve body 511 is smaller than the vertical cross-sectional area of the flow path 502, the flow path 502 is not completely blocked by the valve body 511 when the valve body 511 is pushed out.

  Note that the regions 123, 223, 323, and 423 may be sealed spaces or may communicate with the outside from the surface of the multilayer substrate 100. Further, the regions 123, 223, 323, and 423 may be any one of the flow paths 35 to 42 and the flow paths 60 to 67 shown in FIG.

It is the block diagram which showed schematic structure of the fuel cell system. It is the perspective view which showed the fuel cell system. It is the schematic sectional drawing which showed the flow-path structure in embodiment of this invention. It is the schematic sectional drawing which showed the flow-path structure in embodiment of this invention. It is the schematic sectional drawing which showed the flow-path structure in embodiment of this invention. It is the schematic sectional drawing which showed the flow-path structure in embodiment of this invention. It is the schematic sectional drawing which showed the flow-path structure in embodiment of this invention. It is the schematic sectional drawing which showed the flow-path structure in embodiment of this invention. It is the schematic sectional drawing which showed the flow-path structure in embodiment of this invention. It is the schematic sectional drawing which showed the flow-path structure in embodiment of this invention. It is the schematic sectional drawing which showed the flow-path structure in embodiment of this invention. It is the schematic sectional drawing which showed the flow-path structure in embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fuel cell system 16-22 Flow path 35-42 Flow path 100 Multilayer substrate 101-103, 201-203, 301-304, 401-404 Thin plate 104,204,304 Elastic film 121,221,321,331,421, 431 slit 122, 222, 322, 423 region 123, 223, 323, 423 region 404 bellows-like membrane 501 channel 502 channel 503 communication channel 510 microvalve

Claims (3)

  An elastic membrane is disposed in a space for flowing fluid, the space is divided into two regions by the elastic membrane, gas is filled in one of the two regions, and liquid flows in the other region. Characteristic channel structure.   A bellows-like membrane is disposed in a space for flowing a fluid, the space is divided into two regions by the bellows-like membrane, one of the two regions is filled with gas, and a liquid flows in the other region. A flow path structure characterized by A liquid flow path through which a liquid flows, a gas flow path through which a gas flows, and a communication path from the gas flow path to the liquid flow path are formed;
A flow path structure, wherein an electromagnetic valve is provided in the communication path.

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