JP2010058330A - Method for forming image pattern and image pattern and semiconductor device, electric circuit, display module, color filter, and light emitting element - Google Patents

Abstract

An image pattern forming method capable of forming an image pattern with high definition and excellent flatness irrespective of pattern density, pressing conditions, and solution characteristics of coating ink.
An image pattern forming method includes an ink application process for applying an ink material to a main surface 1a of a transfer blanket 1, and an ink lyophilic part 5 and an ink lyophobic part that are obtained by passing the ink application process. 4 and the ink material applied to the main surface 1a by being in close contact with the printing plate 3 separated from each other in a desired pattern, the one applied to the region corresponding to the ink lyophilic portion 5 The ink material remaining on the main surface 1a by bringing the main surface 1a after the partial ink removing step to be transferred to the printing plate 3 and the partial ink removing step into close contact with the substrate to be printed An ink transfer step of transferring the ink to the surface of the substrate to be printed.
[Selection] Figure 5

Description

  The present invention relates to an image pattern forming method, an image pattern, a semiconductor device, an electric circuit, a display module, a color filter, and a light emitting element.

  In the present invention, when a functional resin material such as a resist agent or a conductive paste material, or a color filter material for liquid crystal is formed into a desired pattern by using a printing method, it has a high definition close to the conventional photolithography quality. The present invention relates to an image pattern forming method for obtaining a high quality image excellent in the flatness of a resin surface. Further, the present invention relates to an image pattern, a semiconductor device, an electric circuit, a display module, a color filter, and a light emitting element formed by the image pattern forming method.

  In recent lithographic offset printing, the non-image area of the printing plate is formed of a material having liquid repellency with respect to ink, that is, silicone rubber, fluorine compound, etc., without using so-called “fountain solution”. Planographic waterless offset printing using a waterless lithographic plate that selectively deposits ink only on the image area is the mainstream. In general, a lithographic offset printing machine is equipped with many kneading rollers and an attaching roller that applies ink to the printing plate surface, and the ink is spread evenly by kneading between the rollers, and printing is performed via the attaching roller. A desired image pattern is formed by being applied to the plate surface and further transferred from the printing plate to the blanket and from the blanket to the substrate to be printed. At this time, since the ink is transferred by tearing to both sides and causing cohesive failure, a stringing phenomenon may occur between the inks. Therefore, film thickness unevenness and volume unevenness occur in the transferred image pattern, resulting in deterioration of resolution and flatness of the image pattern.

  As a method for solving such degradation of resolution and flatness due to the stringing phenomenon, Japanese Patent No. 3689536 (Patent Document 1) discloses a method in which a silicone resin blanket with an ink layer applied thereon is formed with a convex portion in a predetermined shape. By rolling / contacting on the formed relief printing plate, the entire amount of ink corresponding to the projection is transferred and removed, and then the ink remaining on the blanket is transferred to the printing substrate. An image pattern forming method for eliminating the yarn drawing phenomenon is disclosed. However, in the image pattern forming method described in Patent Document 1, the non-image area / image area is patterned by contact / non-contact between the blanket and the relief printing plate. If an erroneous contact between the blanket and the relief printing plate occurs due to the degree of pattern density on the relief printing plate, an accurate image pattern may not be formed. As an image pattern forming method for solving this problem, an image in which a non-image area / image area pattern is formed using lyophilicity / liquid repellency with respect to ink, and only image area ink is divided / transferred. A pattern forming method is disclosed in Patent Document 1 and Japanese Patent Publication No. 7-80342 (Patent Document 2).

Further, a related technique is disclosed in Japanese Patent Application Laid-Open No. 2004-249696 (Patent Document 3).
Japanese Patent No. 3689536 Japanese Patent Publication No. 7-80342 JP 2004-249696 A

  The image pattern forming method disclosed in Patent Document 1 will be described in detail below with reference to FIGS.

  First, as shown in FIG. 9, an ink layer 101 is formed on a printing plate 100 on which a lyophilic / liquid repellent pattern is formed using a cap coater, a die coater, a doctor blade, or the like. Subsequently, the image transfer sheet 104 having ink repellency on the surface is brought into close contact with the printing plate 100 via the ink layer 101 and pressed.

  Thereafter, by separating the printing plate 100 and the image transfer sheet 104, as shown in FIG. 10, the ink remains on the printing plate 100 side on the ink lyophilic portion 102 and the ink on the ink lyophobic portion 103. Only 101b1 and 101c1 are transferred onto the image transfer sheet 104. Thereafter, the image transfer sheet 104 is further brought into close contact with the substrate to be printed 105 and pressed. After that, as shown in FIG. 11, the image transfer sheet 104 and the substrate to be printed 105 are separated to transfer the inks 101 b 1 and 101 c 1 on the image transfer sheet 104 onto the substrate to be printed 105. In this way, a desired image pattern is formed on the substrate 105 to be printed.

  However, when the ink layer 101 is formed on the printing plate 100, the surface of the printing plate 100 is not uniform, and the ink lyophilic portion 102 and the ink lyophobic portion 103 are formed on the surface of the printing plate 100. Therefore, depending on the solution characteristics of the coating ink, as shown in FIG. 9, a large amount of ink is unevenly distributed in the ink lyophilic portion 102 and the ink on the ink lyophobic portion 103 is reduced. As a result, the ink layer 101 has a thick ink film. The portion 101a and the ink thin film portions 101b and 101c are formed. The film thicknesses of the ink thick film portion 101a and the ink thin film portions 101b and 101c vary depending on the density of the image pattern on the printing plate 100. The larger the ink lyophilic portion around the ink, the more uneven the ink is. The ink film thickness of the part becomes thinner. In the example shown in FIG. 9, the film thickness at the ink thin film portion 101c is thinner than the film thickness at the ink thin film portion 101b. Inks 101b1 and 101c1 in FIGS. 10 and 11 are inks transferred from the ink thin film portions 101b and 101c, respectively.

  In this way, the thickness of the ink pattern varies due to the density of the image pattern, so that the uniformity of the film thickness of the image pattern finally formed on the substrate 105 to be printed may be lowered, and the flatness may be lowered. is there. Furthermore, when the ink solution characteristics are extreme, particularly when the surface tension of the ink is very high and the lyophilic / liquid repellent contrast is very high, specifically, the contact angle with respect to the ink lyophilic portion 102 is 15 ° or less. When the contact angle with respect to the ink lyophobic portion 103 satisfies the characteristic of 40 ° or more, the ink repellency portion 102 becomes so concentrated that ink cannot be applied to the ink lyophobic portion 103, and the printing plate Thus, the ink layer 101 cannot be formed over the entire area. In such a situation, an image pattern cannot be formed.

  On the other hand, in the image pattern forming method disclosed in Patent Document 2, first, as shown in FIG. 12, not a printing medium (printing plate) on which a lyophilic / liquid repellent pattern is formed, An unnecessary ink removing body 200 is prepared, and an ink layer 201 is formed on the surface thereof. Subsequently, the printing medium (printing plate) 202 on which the ink lyophilic part (ink receiving part) 203 and the ink lyophobic part 204 are formed is brought into close contact with the unnecessary ink removing body 200 via the ink layer 201 and pressed. Then, by separating the printing medium (printing plate) 202 and the unnecessary ink removing body 200, the ink layer is transferred only to the ink lyophilic portion 203 as shown in FIG. Further, the printing medium (printing plate) 202 is brought into close contact with the substrate to be printed 205 and pressed, and then the printing medium (printing plate) 202 and the substrate to be printed 205 are separated as shown in FIG. The ink in the ink lyophilic portion 203 is transferred to the substrate to be printed 205, and a desired image pattern is formed.

  Here, in the image pattern forming method disclosed in Patent Document 2, since the surface of the unnecessary ink removing body 200 is a surface made of a uniform material, the surface of the unnecessary ink removing body 200 has a solution of coating ink. A uniform ink layer 201 can be formed regardless of the characteristics. However, when considering the follow-up of the image pattern on the surface of a non-flexible substrate to be printed such as a glass substrate or a printed board, the printing medium (printing plate) 202 is made of a flexible material such as rubber or resin. Therefore, the pattern accuracy of the lyophilic / liquid-repellent pattern that can be formed on the printing medium (printing plate) 202 is not the same as that of conventional offset printing plate materials such as Al substrates and glass substrates. Both the resolution and flatness are greatly reduced compared to the pattern accuracy on a flexible material.

  Further, in the image pattern forming method disclosed in Patent Document 2, the printing medium (printing plate) 202 and the unnecessary ink removing body 200 or the printing medium (printing plate) are sandwiched between the ink layers at the time of ink transfer. ) 202 and the substrate to be printed 205 are in close contact with each other as shown in FIG. 15A. At this time, in the case of a printing medium (printing plate) made of a flexible material such as rubber or resin, As shown in FIG. 15B, the printing medium (printing plate) 202 extends due to the pressing pressure during ink transfer. Accordingly, the image pattern formed on the print medium 202 is similarly extended. That is, the length L changes to the length L ′ as shown in FIG. When the printing medium 202 is separated from the unnecessary ink removing body 200, the portion to which the ink is attached returns to the length L as shown in FIG. 15C, but when pressed against the substrate to be printed 205, As shown in FIG. 15D, the portion of the printing medium 202 to which the ink is attached extends to a length L ′. As a result, as shown in FIG. 15E, an image pattern having a length L ′ is printed on the printing substrate 205. This means that the resolution of the image pattern is lowered.

  Furthermore, in the image pattern forming method disclosed in Patent Document 2, the ink layer remaining in the ink lyophilic part (ink receptor) finally formed on the printing medium (printing plate) is used as the substrate to be printed. Since it is necessary to transfer, the surface of the substrate to be printed must be made of a material having an ink lyophilic property as compared with the ink lyophilic portion, and the material of the substrate to be printed is extremely limited. Alternatively, there is a problem that it is necessary to improve the lyophilicity of the ink in advance by performing treatment such as surface roughening on the surface of the substrate to be printed. Furthermore, since the transfer is from the ink lyophilic part to the printing substrate having higher ink lyophilic property, it is difficult to transfer the entire amount of ink, and there is a possibility that a stringing phenomenon due to cohesive failure of the ink may occur. Therefore, there is a problem that an image having high definition and excellent flatness cannot be formed.

  The present invention has been made in view of the above-described problems, and it is possible to form an image pattern with high definition and excellent flatness regardless of the density of the pattern, the pressing conditions, and the solution characteristics of the coating ink. An object is to provide an image pattern forming method and an image pattern produced by the method. Furthermore, it aims at providing the semiconductor device manufactured by the said image pattern formation method, an electric circuit, a display body module, a color filter, and a light emitting element.

  In order to achieve the above object, an image pattern forming method according to the present invention includes an ink application step of applying an ink material to the main surface of a transfer blanket, and the main surface that has undergone the ink application step. A liquid repellent part and the ink material applied to the main surface of the ink material applied to the region corresponding to the ink lyophilic part by adhering to a printing plate partitioned from each other in a desired pattern. A partial ink removing step to be transferred to a printing plate, and the main surface that has undergone the partial ink removing step are brought into close contact with a substrate to be printed, thereby allowing the ink material remaining on the main surface to be printed. And an ink transfer process for transferring to the surface of the substrate.

  According to the present invention, a uniform ink layer can be formed / transferred regardless of the density of the pattern, pressing conditions, and the solution characteristics of the applied ink, so that an image pattern with high definition and excellent flatness can be formed. Can do.

(Embodiment 1)
(Constitution)
An image pattern forming method according to the first embodiment of the present invention will be described. In the image pattern forming method, an ink application process in which an ink material is applied to the main surface of a transfer blanket, and the main surface that has undergone the ink application process are separated from each other in a desired pattern by an ink lyophilic part and an ink lyophobic part. A partial ink removing step of transferring, to the printing plate, the one applied to the region corresponding to the ink lyophilic portion of the ink material applied to the main surface by closely contacting the printed plate; An ink transfer step of transferring the ink material remaining on the main surface to the surface of the substrate to be printed by bringing the main surface that has undergone the partial ink removal step into close contact with the substrate to be printed; including.

  In other words, in the image pattern forming method according to the present invention, the transfer blanket coated with the ink material on the entire surface is brought into intimate contact with the printing plate on which the image pattern of the ink lyophilic part and the ink lyophobic part is formed. Removing the ink material on the transfer blanket corresponding to the ink lyophilic portion of the ink by transferring it onto the printing plate, and then transferring the ink material remaining on the transfer blanket to the surface of the printing substrate. It is a feature.

(Action / Effect)
According to the image pattern forming method in the present embodiment, a uniform ink layer can be formed / transferred regardless of the density of the pattern, the pressing conditions, and the solution characteristics of the coating ink, so that it has high definition and excellent flatness. An image pattern can be formed.

Example 1
A more specific embodiment will be described with reference to FIGS.

  In this example, CF ink (green) and Ag nanoparticle-dispersed ink are used as ink materials, the coating film thickness is about 1.5 μm, and a printing plate with a pattern of L / S = 20 μm / 20 μm is used on a glass substrate. An image pattern was formed. “L / S” means Line / Space, which is the ratio of the width of the part where ink should be placed on the final printed object to the width of the part that should be blank (the part where ink is not placed). is there. In addition, the contact angles of each ink with respect to the ink lyophobic part 4 (silicone resin) and the ink lyophilic part 5 (resist resin) are 5 ° and 35 ° for the CF ink (green), respectively, and Ag nanoparticle dispersion For the ink, they were 10 ° and 55 °, respectively.

  First, as shown in FIG. 1, the ink layer 2 is applied to the entire surface of the main surface 1a of the transfer blanket 1 composed of a laminate of a silicone resin rubber layer and a urethane resin cushion layer using a slit coater. Formed. As another method for forming the ink layer 2, as shown in FIG. 2, the ink layer 2 is formed on the ink spread sheet 11 having a surface having higher ink repellency than the transfer blanket 1, and FIG. As shown in FIG. 4, the transfer blanket 1 can be pressed against the ink spreading sheet 11 through the ink layer 2 to form a uniform ink layer 2 on the transfer blanket 1 as shown in FIG. It is.

  Further, as the material of the transfer blanket 1, it is necessary to follow the surface shape of the printing plate and the substrate to be printed, and to transfer the entire amount of the ink material to the substrate to be printed. A laminate of a surface layer excellent in releasability and flexibility such as silicone resin rubber or fluororesin rubber and a cushion layer material such as urethane resin or woven fabric can be used.

  Subsequently, as shown in FIG. 5, an ink layer is formed on a printing plate 3 on which an image pattern is formed by an ink lyophobic portion 4 made of a silicone resin and an ink lyophilic portion 5 made of a resist resin on a support made of an Al thin plate. The transfer blanket 1 is brought into close contact via 2. As shown in FIG. 6, only the ink layer on the ink lyophilic part 5 is transferred onto the printing plate 3 by peeling after the contact and pressing, and the ink on the ink repellent part 4 Only the layer 2 remains on the transfer blanket 1 in its entirety. That is, the ink blank 2 is partially removed from the transfer blanket 1.

  The printing plate 3 used in this example has a step difference of about 0.5 μm between the ink lyophobic portion 4 made of silicone resin and the ink lyophilic portion 5 made of resist resin. It is smaller than 5 μm. This printing plate 3 is a substantially lithographic printing plate.

  Further, since the support of the printing plate 3 needs to be made of a material that can withstand the load applied during printing, it is generally a metal thin plate such as an Al thin plate, a plastic film such as polyethylene terephthalate, rubber, quartz glass. Or a complex thereof. The ink lyophobic part 4 may be a silicone resin or a heat-cured fluororesin, and the ink lyophilic part 5 may be a metal thin film layer such as an Al or Ti thin film, or a resist resin. In addition, heat cured epoxy resin, gelatin, urethane resin, or the like can be used.

  Further, as shown in FIG. 7, the ink layer remaining on the transfer blanket 1 is peeled off after the transfer blanket 1 is pressed against the substrate 6 to be printed, which is a glass substrate. Was transferred onto the substrate 6 to be printed. As a result, both the CF ink (green) and the Ag nanoparticle-dispersed ink could be formed as an image pattern of L / S = 20 μm / 20 μm on the glass substrate. Thereafter, a baking process suitable for each ink material was performed, and the solvent was evaporated to solidify the ink, thereby completing an image pattern made of each ink material.

  The film thickness of each image pattern was 1.2 μm for the CF ink (green), 1.0 μm for the Ag nanoparticle-dispersed ink, and both surface flatness was about 0.1 μm or less. .

(Comparative Example 1)
As Comparative Example 1, the same image pattern forming method as in Example 1 using a printing plate in which the step between the ink lyophobic part and the ink lyophilic part is larger than the coating film thickness and is about 2.5 μm. Thus, an image pattern was formed on the glass substrate. All other materials and inks used were the same as in Example 1.

  In this comparative example, the level difference between the ink lyophobic part and the ink lyophilic part is about 2.5 μm, which is larger than the ink film thickness of 1.5 μm. A uniform ink layer is not formed when pressed through close contact with the ink, and the film thickness of the ink layer on the ink repellent part remaining on the transfer blanket becomes non-uniform, and the finally obtained image pattern The film thickness uniformity was greatly reduced as compared with Example 1.

(Comparative Example 2)
As Comparative Example 2, an image pattern was formed on a glass substrate in accordance with the same image pattern forming method as in Example 1 using NBR rubber used for normal paper printing or the like on the ink repellent part or the transfer blanket surface layer. did. All other materials and inks used were the same as in Example 1.

  In this comparative example, NBR rubber has high liquid repellency equivalent to silicone resin or fluorine resin, but has low releasability, so that the entire amount of ink is not transferred in the process of ink transfer and is torn on both sides. As a result, partial transfer occurred due to cohesive failure, resulting in film thickness unevenness and volume unevenness in the transferred image pattern, and the resolution and flatness of the finally obtained image pattern were greatly reduced.

(Comparative Example 3)
As Comparative Example 3, an image pattern was formed on a glass substrate in accordance with the image pattern forming method described in Patent Document 1 using the same ink as in Example 1. In addition, the same material as Example 1 was used about the base material of the printing plate, the ink lyophobic part, the ink lyophilic part, and the image transfer sheet.

  In this comparative example, when the CF ink (green) is used, an image pattern of L / S = 20 μm / 20 μm can be formed on the glass substrate, the film thickness is 1.2 μm, and the surface flatness. Was about 0.2 μm.

  On the other hand, when the Ag nanoparticle-dispersed ink is used, the contact angle with respect to the ink lyophobic part (silicone resin) is 10 ° and the contact angle with respect to the ink lyophilic part (resist resin) is 55 °. Since the ink is very high, the ink is unevenly distributed in the ink lyophilic part, and a uniform ink layer cannot be formed on the printing plate, and an image pattern cannot be formed.

(Comparative Example 4)
As Comparative Example 4, an image pattern was formed on a glass substrate according to the image pattern forming method described in Patent Document 2 using the same ink as in Example 1. In addition, the same material as Example 1 was used about the unnecessary ink removal body, the base material of the printing medium, the ink lyophobic part, the ink lyophilic part and the image transfer sheet.

  In this comparative example, regardless of whether CF ink (green) or Ag nanoparticle-dispersed ink is used, the ink layer forming process on the unnecessary ink removing body, the printing medium (printing plate) ink lyophilic part Ink transfer / transfer was performed without any problem with respect to the ink transfer process. However, in either case, the ink can only be partially transferred onto a glass substrate that has not been subjected to surface treatment, and the film thickness of the transferred image pattern is 0.5 to It was very thin, about 0.6 μm, and the surface flatness was very inferior, 0.3 to 0.4 μm or more.

(Action / Effect)
As described above, in the image pattern forming method according to the present invention, the ink material is first applied to the surface of the transfer blanket that is a uniform surface, and the non-image area / image area is determined by the lyophilic / liquid-repellent contrast to the ink. It is characterized in that the portion is patterned to form an image pattern. Accordingly, it is possible to form a uniform, high-definition and excellent flatness image pattern regardless of pattern density, pressing conditions, and coating ink solution properties. Since the level difference between the liquid part and the ink lyophilic part is a substantially lithographic printing plate whose thickness is smaller than the coating ink layer thickness, the ink layer on the transfer blanket follows the surface shape of the printing plate and adheres to the entire surface with uniform pressure. / Because it is pressed, an image pattern having excellent in-plane uniformity of film thickness can be formed. Furthermore, since the printing plate based on the present invention is a substantially flat printing plate, force is applied in a vertically symmetrical manner when dividing the ink of the ink lyophobic portion and the ink lyophilic portion, so that the sectional shape of the divided ink is substantially the same. It becomes a rectangle, and it becomes possible to form a pattern with a higher aspect ratio than in the prior art.

  The transfer blanket surface layer is formed of a material such as silicone resin rubber or fluororesin rubber, but these materials are excellent in releasability and flexibility, and more than the ink lyophilic part on the printing plate. Is a material with higher ink repellency and higher ink lyophilicity than the ink lyophobic part. Therefore, use a wide range of general ink lyophilic materials such as plastic materials, glass substrates, and metal materials as printing substrates. At the same time, since the entire amount of ink can be transferred, a stringing phenomenon does not occur, and it is possible to form an image pattern with high definition and excellent flatness as compared with the prior art.

  Furthermore, in the present invention, since the ink lyophilic / liquid-repellent pattern is formed on the printing plate instead of on the transfer blanket, the printing blanket can be printed even when the transfer blanket extends due to the pressing pressure during ink transfer. The image pattern formed on the plate does not stretch. The reason is as shown in FIGS. 8 (a) to 8 (e). That is, when the ink lyophobic portion 4 having a length L is formed on the printing plate 3 as shown in FIG. 8A, the ink layer 2 that is pressed and extended as shown in FIG. This is in contact with the ink repellent portion 4 of length L. When the transfer blanket 1 is separated from the printing plate 3, the ink layer 2 has a shorter length L 'instead of a length L as shown in FIG. However, when this ink layer is pressed against the substrate 6 to be printed, the ink layer having the length L ′ as shown in FIG. As shown in e), an image pattern having a length L is finally formed on the substrate 6 to be printed. That is, it is finally possible to form an image pattern having the same resolution and flatness as on the printing plate.

  Furthermore, regarding the blanket deformation at the time of ink transfer, because the lyophilic / liquid repellent pattern is formed on the printing plate instead of the deformed blanket, like the image pattern forming method described in Patent Document 2, The line width of the image line portion does not increase due to blanket deformation due to the pressing pressure during ink transfer.

  According to the present invention, at the time of transfer to a substrate to be printed, the ink remaining on the surface of the blanket having ink repellency is transferred to the substrate to be printed. The entire amount of ink can be transferred. As a result, it becomes possible to form a high-definition and excellent flatness image pattern on a larger number of substrates to be printed compared to the image pattern forming method described in Patent Document 2, and a semiconductor device and an electric circuit Further, it is possible to realize further higher performance and cost reduction of a wide range of application products such as display module, color filter, and light emitting element.

(More preferable form)
More preferable conditions of the image pattern forming method in the present embodiment will be described.

  Preferably, the ink application step includes a step of transferring an ink layer coated on the entire surface of the ink spreading material having a surface having higher ink repellency than the main surface of the transfer blanket onto the main surface. . By adopting this configuration, a uniform ink layer can be formed on the transfer blanket even when the transfer blanket is not flat but cylindrical.

  Further, the ink material is an ink material having a contact angle with respect to the ink lyophilic portion of the printing plate of 20 ° or less and a contact angle with respect to the ink lyophobic portion of the printing plate of 40 ° or more. Is preferred. Ink materials having such a contact angle characteristic, that is, an ink material having such a characteristic that a uniform ink layer cannot be formed on a printing plate by the method described in Patent Document 1, can be made uniform by applying the present invention. An ink layer can be formed, and an image pattern with high definition and excellent flatness can be formed.

  The level difference between the ink lyophilic part and the ink lyophobic part in the printing plate is smaller than the thickness of the ink material applied by being transferred from the transfer blanket to the printing plate. preferable. By adopting this configuration, a uniform ink layer can be formed, and an image pattern with high definition and excellent flatness can be formed.

  It is preferable that the ink lyophobic part of the printing plate and the main surface of the transfer blanket are made of a silicone resin material. By adopting this configuration, the silicone resin material that has both high liquid repellency and high releasability is used on the ink liquid repellent part and the transfer blanket surface of the printing plate, so that the entire amount of ink can be transferred, It is possible to form an image pattern with high definition and excellent flatness.

  It is preferable that the ink lyophobic part of the printing plate and the main surface of the transfer blanket are made of a fluorine compound resin material. By adopting this configuration, the fluorine compound resin material having both high liquid repellency and high releasability is used for the ink liquid repellent part and the transfer blanket surface layer of the printing plate. This makes it possible to form an image pattern with high definition and excellent flatness.

(Image pattern)
The image pattern based on this invention is an image pattern manufactured using one of the above-mentioned image pattern formation methods. By using such an image pattern, it becomes possible to form an image pattern with high definition and excellent flatness by a low-cost printing method. Therefore, it is possible to realize further higher performance and lower cost of applied products such as semiconductor devices, electric circuits, display modules, color filters, and light emitting elements.

  A semiconductor device according to the present invention is a semiconductor device manufactured using any one of the image pattern forming methods described above.

  An electric circuit according to the present invention is an electric circuit manufactured by using any one of the image pattern forming methods described above.

  The display module according to the present invention is a display module manufactured by using any one of the image pattern forming methods described above.

  The color filter based on this invention is a color filter manufactured using one of the above-mentioned image pattern formation methods.

  A light emitting device according to the present invention is a light emitting device manufactured using any one of the above-described image pattern forming methods.

  These products can also be manufactured using any of the image pattern forming methods described above, so that a uniform ink layer can be easily formed / transferred, thereby realizing high performance and low cost. it can.

  In addition, the said embodiment disclosed this time is an illustration in all the points, Comprising: It is not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and includes all modifications within the scope and meaning equivalent to the terms of the claims.

It is explanatory drawing of the 1st process of the image pattern formation method in Embodiment 1 based on this invention. It is explanatory drawing of the 2nd process of the image pattern formation method in Embodiment 1 based on this invention. It is explanatory drawing of the 3rd process of the image pattern formation method in Embodiment 1 based on this invention. It is explanatory drawing of the 4th process of the image pattern formation method in Embodiment 1 based on this invention. It is explanatory drawing of the 5th process of the image pattern formation method in Embodiment 1 based on this invention. It is explanatory drawing of the 6th process of the image pattern formation method in Embodiment 1 based on this invention. It is explanatory drawing of the 7th process of the image pattern formation method in Embodiment 1 based on this invention. (A)-(e) is explanatory drawing of the relationship between the image pattern finally obtained with the transfer blanket extending with the image pattern formation method in Embodiment 1 based on this invention. It is explanatory drawing of the 1st process of the 1st image pattern formation method based on a prior art. It is explanatory drawing of the 2nd process of the 1st image pattern formation method based on a prior art. It is explanatory drawing of the 3rd process of the 1st image pattern formation method based on a prior art. It is explanatory drawing of the 1st process of the 2nd image pattern formation method based on a prior art. It is explanatory drawing of the 2nd process of the 2nd image pattern formation method based on a prior art. It is explanatory drawing of the 3rd process of the 2nd image pattern formation method based on a prior art. It is explanatory drawing of the relationship between the image pattern finally obtained with a transfer blanket extending with the 2nd image pattern formation method based on a prior art.

Explanation of symbols

  1 transfer blanket, 1a main surface, 2 ink layer, 3 printing plate, 4 ink lyophobic part, 5 ink lyophilic part, 6,205 substrate to be printed, 100 printing plate, 101 ink layer, 101a ink thick film part, 101b, 101c Ink thin film part, 101b1, 101c1 ink, 102 Ink lyophilic part, 103, 204 Ink lyophobic part, 200 Unnecessary ink remover, 201 Ink layer, 202 Print medium (printing plate), 203 Ink lyophilic part ( Ink receptor part).

Claims (12)

An ink application process for applying an ink material to the main surface of the transfer blanket;
Among the ink materials applied to the main surface, the main surface that has undergone the ink application step is brought into close contact with a printing plate in which an ink lyophilic part and an ink lyophobic part are separated from each other in a desired pattern. A partial ink removal step of transferring the material applied to the area corresponding to the ink lyophilic part to the printing plate;
An ink transfer step of transferring the ink material remaining on the main surface to the surface of the substrate to be printed by bringing the main surface that has undergone the partial ink removal step into close contact with the substrate to be printed; An image pattern forming method.   The ink coating step includes a step of transferring, onto the main surface, an ink layer that has been entirely coated on an ink spreading material having a surface with higher ink repellency than the main surface of the transfer blanket. 2. The image pattern forming method according to 1.   The ink material is an ink material having a contact angle with respect to an ink lyophilic portion of the printing plate of 20 ° or less and a contact angle with respect to an ink lyophobic portion of the printing plate of 40 ° or more. 3. The image pattern forming method according to 1 or 2.   The step between the ink lyophilic part and the ink lyophobic part in the printing plate is smaller than the film thickness of the ink material applied by being transferred from the transfer blanket to the printing plate. Item 4. The image pattern forming method according to any one of Items 1 to 3.   The image pattern forming method according to any one of claims 1 to 4, wherein the ink repellency portion of the printing plate and the main surface of the transfer blanket are made of a silicone resin material.   5. The image pattern forming method according to claim 1, wherein the ink repellent part of the printing plate and the main surface of the transfer blanket are made of a fluorine compound resin material.   An image pattern manufactured using the image pattern forming method according to claim 1.   A semiconductor device manufactured using the image pattern forming method according to claim 1.   An electric circuit manufactured using the image pattern forming method according to claim 1.   A display module manufactured using the image pattern forming method according to claim 1.   A color filter manufactured using the image pattern forming method according to claim 1.   A light emitting device manufactured using the image pattern forming method according to claim 1.

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