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JP2009302701A - Constant temperature type crystal device - Google Patents

Constant temperature type crystal device Download PDF

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JP2009302701A
JP2009302701A JP2008152491A JP2008152491A JP2009302701A JP 2009302701 A JP2009302701 A JP 2009302701A JP 2008152491 A JP2008152491 A JP 2008152491A JP 2008152491 A JP2008152491 A JP 2008152491A JP 2009302701 A JP2009302701 A JP 2009302701A
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crystal
vibrator
temperature
holding
piece
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Toshio Sugiyama
利夫 杉山
Kenji Kasahara
憲司 笠原
Hiroyuki Mitome
博之 見留
Yuya Nishimura
裕也 西村
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Nihon Dempa Kogyo Co Ltd
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Nihon Dempa Kogyo Co Ltd
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Abstract

【課題】温度変化時における応力の発生を防止した上で、周波数偏差を高精度に維持した表面実装用とした恒温型の水晶デバイスを提供する。
【解決手段】底壁と枠壁からなる凹部を有する容器本体1に収容された振動子用水晶片2と、容器本体1に収容されて振動子用水晶片2を加熱する発熱抵抗体4及び振動子用水晶片2の動作温度を検出する温度感応抵抗体3と、容器本体1の開口端面に設けられたカバー5とを備え、振動子用水晶片2の動作温度を一定に維持する表面実装用とした恒温型の水晶デバイスにおいて、振動子用水晶片2は容器本体1の内底面に水平方向として固着される保持用水晶板10に面対向し、振動子用水晶片2の励振電極から引出電極の延出した外周部が保持用水晶板10に固着された構成とする。
【選択図】図1
A constant temperature crystal device is provided for surface mounting in which the occurrence of stress during temperature change is prevented and the frequency deviation is maintained with high accuracy.
A vibrator crystal piece 2 housed in a container body 1 having a recess composed of a bottom wall and a frame wall, a heating resistor 4 and a vibrator housed in the container body 1 to heat the vibrator crystal piece 2 The surface sensitive resistor 3 for detecting the operating temperature of the crystal piece 2 for use and the cover 5 provided on the opening end face of the container body 1 are used for surface mounting to keep the operating temperature of the crystal piece 2 for vibrator constant. In the constant temperature type quartz crystal device, the vibrator crystal piece 2 faces the holding crystal plate 10 fixed in the horizontal direction on the inner bottom surface of the container body 1, and the extraction electrode extends from the excitation electrode of the vibrator crystal piece 2. The outer peripheral portion is fixed to the holding crystal plate 10.
[Selection] Figure 1

Description

本発明は表面実装用とした恒温型水晶デバイスを技術分野とし、特に、熱膨張係数差による振動子用水晶片の応力歪みを抑制して周波数安定度を高めた表面実装用の恒温型水晶デバイスに関する。   The present invention relates to a constant temperature crystal device for surface mounting, and more particularly to a constant temperature crystal device for surface mounting that suppresses stress distortion of a crystal piece for a vibrator due to a difference in thermal expansion coefficient and increases frequency stability. .

(発明の背景)
恒温型の水晶デバイス例えば水晶振動子は動作温度を一定に維持することから、これを用いた水晶発振器は周波数安定度が高く(例えば1〜0.5ppm以下)、光通信用とした基地局等の通信設備に使用される。近年では、これらの通信設備でも小型化が浸透し、その一貫として表面実装用とした恒温型の水晶デバイスが求められている。
(Background of the Invention)
Constant-temperature crystal devices such as crystal oscillators maintain a constant operating temperature, so crystal oscillators using them have high frequency stability (for example, 1 to 0.5 ppm or less), such as base stations for optical communications. Used for communication equipment. In recent years, downsizing of these communication facilities has been permeated, and as a part of this, a constant temperature crystal device for surface mounting is required.

(従来技術の一例、特許文献1、2)
第11図は一従来例を説明する表面実装用とした恒温型の水晶振動子(以下、恒温型振動子とする)の図で、同図(a)は恒温型振動子の断面図、同図(b)は水晶片の平面図である。
(An example of conventional technology, Patent Documents 1 and 2)
FIG. 11 is a diagram of a constant temperature crystal resonator (hereinafter, referred to as a constant temperature resonator) for surface mounting, illustrating a conventional example. FIG. 11 (a) is a cross-sectional view of the constant temperature resonator. FIG. 2B is a plan view of the crystal piece.

恒温型振動子は、容器本体1、振動子用水晶片2、温度感応抵抗体3、発熱抵抗体4、及び金属カバー5を備える。容器本体1は積層セラミックからなり、両主面に凹部を有する。そして、一主面の凹部には水晶保持端子6が設けられた内壁段部を有し、他主面の凹部端面には外部端子7を有する。   The constant temperature type vibrator includes a container body 1, a vibrator crystal piece 2, a temperature sensitive resistor 3, a heating resistor 4, and a metal cover 5. The container body 1 is made of a laminated ceramic and has concave portions on both main surfaces. The concave portion on one main surface has an inner wall stepped portion provided with a crystal holding terminal 6, and the external terminal 7 is provided on the concave end surface of the other main surface.

振動子用水晶片2は例えば二回回転YカットのSCカット(特許文献2参照)とし、両主面に励振電極8aを有して長さ方向の一端部両側に引出電極8bを延出する。引出電極8bの延出した水晶片の一端部両側は、内壁段部の水晶保持端子6に導電性接着剤9によって固着される。水晶保持端子6は外部端子7中の水晶端子に電気的に接続する。   The vibrator crystal piece 2 is, for example, an SC cut of Y-rotation twice (see Patent Document 2), has excitation electrodes 8a on both main surfaces, and extends extraction electrodes 8b on both sides of one end in the length direction. Both sides of one end of the crystal piece from which the extraction electrode 8b extends are fixed to the crystal holding terminal 6 on the inner wall step by the conductive adhesive 9. The crystal holding terminal 6 is electrically connected to a crystal terminal in the external terminal 7.

温度感応抵抗体3及び発熱抵抗体4はいずれも膜抵抗からなり、温度感応抵抗体3は一主面の凹部底面に、発熱抵抗体4は他主面の凹部底面に形成される。そして、温度抵抗体用及び発熱抵抗体用の外部端子7に電気的に接続する。金属カバー5は例えばシーム溶接によって一主面の開口端面に接合し、振動子用水晶片2を密閉封入する。   Both the temperature sensitive resistor 3 and the heat generating resistor 4 are formed of film resistance, and the temperature sensitive resistor 3 is formed on the bottom surface of the concave portion on one main surface, and the heat generating resistor 4 is formed on the bottom surface of the concave portion on the other main surface. And it electrically connects to the external terminal 7 for temperature resistors and heating resistors. The metal cover 5 is joined to the opening end surface of one main surface by, for example, seam welding, and the crystal piece 2 for vibrator is hermetically sealed.

このようなものでは、温度感応素子及び発熱抵抗体用の外部端子7と接続した図示しない比較器やパワートランジスタを有する温度制御回路によって、水晶振動子(振動子用水晶片2)の動作温度を一定に維持する。動作温度は周波数温度特性の常温(25℃)以上の高温側であって、通常では周波数変化が緩くなる極値温度T℃に設定される。SCカットでは周波数温度特性を変曲点が約95℃となる3次曲線とし、動作温度(極値温度T℃)は極大値となる概ね80℃とする(第12図)。   In such a case, the operating temperature of the crystal resonator (vibrator crystal piece 2) is kept constant by a temperature control circuit having a comparator and a power transistor (not shown) connected to the temperature sensitive element and the external terminal 7 for the heating resistor. To maintain. The operating temperature is on the high temperature side of the normal temperature (25 ° C.) or higher of the frequency temperature characteristic, and is usually set to an extreme temperature T ° C. at which the frequency change becomes gentle. In SC cut, the frequency temperature characteristic is a cubic curve with an inflection point of about 95 ° C., and the operating temperature (extreme temperature T ° C.) is about 80 ° C., which is a maximum value (FIG. 12).

なお、水晶振動子の動作温度を常温以上として周囲温度よりも高くするので、容器本体1内の槽内温度を制御できる。例えば動作温度を常温近傍とした場合は、周囲温度がこれより上昇したとき、発熱抵抗体4を用いた制御回路によっては、常温近傍に低下させることができないことによる。また、極小値よりも極大値の方が温度が低く、消費電力が小さいので極大値が選択される。   In addition, since the operating temperature of the crystal unit is set to the normal temperature or higher and higher than the ambient temperature, the temperature in the tank in the container body 1 can be controlled. For example, when the operating temperature is close to room temperature, when the ambient temperature rises above this, depending on the control circuit using the heating resistor 4, it cannot be lowered to near room temperature. Further, the maximum value is selected because the maximum value is lower than the minimum value and the power consumption is small.

そして、温度感応抵抗体(例えばサーミスタ)3によって水晶振動子の動作温度を検出し、極値温度T℃との比較器による温度差信号に基づき、パワートランジスタの出力を制御する。そして、発熱抵抗体4に動作温度(極値温度T℃)とする電力を供給する。これにより、水晶振動子は動作温度を極値温度T℃に維持し、水晶端子に接続した図示しない発振回路の発振周波数を周囲温度の変化に拘わらずに高精度に維持する。   Then, the operating temperature of the crystal resonator is detected by a temperature sensitive resistor (eg, thermistor) 3, and the output of the power transistor is controlled based on the temperature difference signal from the comparator with the extreme temperature T ° C. The heating resistor 4 is supplied with electric power at the operating temperature (extreme temperature T ° C.). As a result, the crystal resonator maintains the operating temperature at the extreme temperature T ° C., and maintains the oscillation frequency of an oscillation circuit (not shown) connected to the crystal terminal with high accuracy regardless of the change in the ambient temperature.

通常では、動作温度となる極値温度(T℃)での発振周波数を公称周波数f0とし、極値温度T℃から例えば±α°の槽内温度を許容し、周波数偏差規格をf0±βppmをとする。なお、温度制御回路や発振回路は容器本体1と別個に、あるいは振動子用水晶片2とともに容器本体1に一体的に収容される。これらにより、例えばヒータ線を用いた恒温型振動子に比較して小型化を促進する。
特開2004−343339号公報 特開2007−201858号公報 特開2008−11335号公報(第7図、SCカットの周波数温度特性) 特許第3017746号公報 特許第3017750号公報 FCS Vol.su-31 No.1 January 1984 p11〜 (Simplified Expressions for the stress-Frequency Coefficients of Quartz Plates)
Normally, the oscillation frequency at the extreme temperature (T ° C.) that is the operating temperature is the nominal frequency f 0, the temperature inside the tank is allowed to be ± α °, for example, from the extreme temperature T ° C., and the frequency deviation standard is f 0 ± β ppm. And The temperature control circuit and the oscillation circuit are accommodated in the container body 1 separately from the container body 1 or together with the vibrator crystal piece 2. Thus, for example, miniaturization is promoted as compared with a constant temperature type vibrator using a heater wire.
JP 2004-343339 A JP 2007-201858 A JP 2008-11335 A (FIG. 7, SC cut frequency temperature characteristics) Japanese Patent No. 3017746 Japanese Patent No. 3017750 FCS Vol. su-31 No.1 January 1984 p11〜 (Simplified Expressions for the stress-Frequency Coefficients of Quartz Plates)

(従来技術の問題点)
しかしながら、上記構成の恒温型振動子では、動作温度を一定にして恒温型とするものの、極値温度T℃に対して許容温度±α°内で槽内温度は変化する。その一方で、振動子用水晶片2は容器本体1の内壁段部に固着され、振動子用水晶片2と容器本体1とは温度に対する熱膨張係数を異にする。これにより、許容温度±α°内での容器本体1との熱膨張係数差に基づき、振動子用水晶片2には応力歪みを生じて、振動周波数が変化する。
(Problems of conventional technology)
However, although the constant temperature type vibrator having the above-described configuration is a constant temperature type with a constant operating temperature, the temperature in the tank changes within an allowable temperature ± α ° with respect to the extreme temperature T ° C. On the other hand, the vibrator crystal piece 2 is fixed to the inner wall step portion of the container main body 1, and the vibrator crystal piece 2 and the container main body 1 have different thermal expansion coefficients with respect to temperature. Thereby, based on the difference in thermal expansion coefficient from the container body 1 within the allowable temperature ± α °, stress distortion occurs in the vibrator crystal piece 2 and the vibration frequency changes.

したがって、恒温型振動子の動作中における槽内温度の変化時には、水晶振動子自体の周波数温度特性と、熱膨張係数差に基づいた応力歪みとによる周波数変化を生ずる。この場合、SCカットでは、動作温度としての極値温度T℃を極大値(80℃)とする。したがって、動作温度が極値温度T℃から上昇又は下降すると、振動周波数はいずれの場合でも、極値温度時(T℃)の公称周波数f0から低下する。   Therefore, when the temperature in the bath changes during the operation of the constant temperature type vibrator, a frequency change occurs due to the frequency temperature characteristics of the crystal vibrator itself and the stress strain based on the difference in thermal expansion coefficient. In this case, in the SC cut, the extreme temperature T ° C. as the operating temperature is set to the maximum value (80 ° C.). Accordingly, when the operating temperature rises or falls from the extreme temperature T ° C., the vibration frequency drops from the nominal frequency f 0 at the extreme temperature (T ° C.) in any case.

そして、極値温度T℃から温度が上昇した場合と下降した場合とでは、温度変化時の応力歪みによる作用も逆になるので、周波数変化は互いに反対方向になる。例えば極値温度T℃からの温度上昇時に周波数が低下したとすると、極値温度T℃からの温度下降時には周波数が高くなる。   Then, when the temperature rises from the extreme temperature T ° C. and when the temperature falls, the action due to stress strain at the time of temperature change is also reversed, and the frequency change is in the opposite direction. For example, if the frequency decreases when the temperature rises from the extreme temperature T ° C., the frequency increases when the temperature drops from the extreme temperature T ° C.

したがって、この場合には、水晶振動子(SCカット)の周波数温度特性によって、槽内温度が極値温度T(80℃)から上昇して例えば許容値の+α°上昇して、周波数偏差規格内の−βppmとなった場合でも、応力歪みによっての周波数低下分が加わる。したがって、周波数温度特性と応力歪みとによる周波数変化を考慮すると、周波数偏差規格を満足しなくなる。   Therefore, in this case, due to the frequency temperature characteristics of the crystal resonator (SC cut), the temperature in the tank rises from the extreme temperature T (80 ° C.) and rises, for example, + α ° of the allowable value, and is within the frequency deviation standard. Even in the case of −β ppm, a frequency drop due to stress strain is added. Therefore, when frequency change due to frequency temperature characteristics and stress strain is taken into consideration, the frequency deviation standard is not satisfied.

但し、極値温度T(80℃)から許容値の−α°以下に下降して周波数偏差規格の−βppm外となった場合でも、応力歪みによっての周波数上昇分が加わるので、程度によっては周波数偏差規格を満足することができる。しかし、前述のように、温度上昇時の周波数偏差規格を満足することはできない。   However, even if the temperature falls below the allowable value of -α ° from the extreme temperature T (80 ° C) and falls outside the frequency deviation standard of -βppm, the frequency increase due to stress strain is added. The deviation standard can be satisfied. However, as described above, the frequency deviation standard at the time of temperature rise cannot be satisfied.

これらにより、水晶振動子の動作温度を例えば極値温度t°±α℃として周波数温度特性による周波数偏差を1ppm以内としても、応力歪みによる周波数変化分が加算されるので、1ppmとした周波数偏差を超えてしまう問題があった。なお、熱膨張係数差による応力歪みによる周波数変化以外にも、例えば導電性接着剤9の状態変化等を含む保持系の変化によっても周波数は変化する。   As a result, even if the operating temperature of the crystal resonator is, for example, the extreme temperature t ° ± α ° C., and the frequency deviation due to the frequency temperature characteristic is within 1 ppm, the frequency variation due to stress strain is added, so the frequency deviation is 1 ppm. There was a problem that exceeded. In addition to the frequency change due to the stress strain due to the difference in thermal expansion coefficient, the frequency also changes due to a change in the holding system including a change in the state of the conductive adhesive 9, for example.

このことから、応力歪みによる周波数変化分を見込んで、水晶振動子の動作温度を極値温度t°±α′(<α)として設計することが考えられる。しかし、この場合は、温度制御回路を含めた恒温構造の精度が求められ、設計を困難にする。特に、振動子用水晶片2を固着する導電性接着剤9を例えばポリイミド系として硬度が高い場合は、応力による周波数変化分も大きくなるので、問題が顕著になる。   From this, it is conceivable to design the operating temperature of the crystal resonator as an extreme temperature t ° ± α ′ (<α) in consideration of the frequency change due to stress strain. However, in this case, the accuracy of the constant temperature structure including the temperature control circuit is required, which makes designing difficult. In particular, when the conductive adhesive 9 for fixing the crystal unit 2 for vibrator is made of, for example, polyimide, and has a high hardness, the amount of change in frequency due to stress increases, so the problem becomes significant.

例えば導電性接着剤9をポリイミド系に代えてシリコーン系として応力を緩和することも考えられる。しかし、この場合には、熱硬化温度も低くて硬化時の放出ガスが振動子用水晶片2に付着して振動特性を悪化させる。これに対して、ポリイミド系は熱硬化温度も高くて硬化時の放出ガスも殆どなく、振動子用水晶片2への付着がないことから振動特性を良好に維持する。   For example, the conductive adhesive 9 may be replaced by a silicone system instead of a polyimide system to relieve stress. However, in this case, the thermosetting temperature is also low, and the released gas at the time of curing adheres to the vibrator crystal piece 2 to deteriorate the vibration characteristics. On the other hand, the polyimide system has a high thermosetting temperature, hardly emits gas during curing, and does not adhere to the vibrator crystal piece 2, so that the vibration characteristics are favorably maintained.

(発明の目的)
本発明は、温度変化時における応力の発生を防止した上で、周波数偏差を高精度に維持して設計を容易にする表面実装用とした恒温型の水晶デバイスを提供することを目的とする。
(Object of invention)
An object of the present invention is to provide a constant temperature crystal device for surface mounting that prevents the generation of stress at the time of temperature change and maintains the frequency deviation with high accuracy to facilitate the design.

本発明は、特許請求の範囲(請求項1)に示したように、少なくとも一主面に底壁と枠壁からなる凹部を有して前記凹部内に振動子用水晶片を収容した容器本体と、前記容器本体に収容されて前記振動子用水晶片を加熱する発熱抵抗体及び前記振動子用水晶片の動作温度を検出する温度感応抵抗体と、前記容器本体の一主面の開口端面に設けられたカバーとを備え、前記振動子用水晶片の動作温度を一定に維持する表面実装用とした恒温型の水晶デバイスにおいて、前記振動子用水晶片は前記容器本体の内底面に水平方向として固着される保持用水晶板に面対向し、前記振動子用水晶片の励振電極から引出電極の延出した外周部が前記保持用水晶板に固着されるとともに、前記保持用水晶板の前記容器本体の内表面に対する固着位置と前記振動子用水晶片の前記保持用水晶板に対する固着位置とは異なる構成とする。   According to the present invention, as shown in the claims (Claim 1), a container main body having a recess composed of a bottom wall and a frame wall on at least one main surface and containing a crystal piece for a vibrator in the recess; A heating resistor housed in the container main body for heating the vibrator crystal piece, a temperature sensitive resistor for detecting an operating temperature of the vibrator crystal piece, and an opening end face of one main surface of the container main body. A constant temperature crystal device for surface mounting that maintains a constant operating temperature of the vibrator crystal piece, and the vibrator crystal piece is fixed to the inner bottom surface of the container body in a horizontal direction. An outer peripheral portion facing the holding crystal plate and extending from the excitation electrode of the vibrator crystal piece is fixed to the holding crystal plate, and the inner surface of the container main body of the holding crystal plate Position and the vibration The structure different from the fixed position relative to the holding quartz plate child for the crystal element.

このような構成であれば、表面実装用の水晶デバイスを恒温型とした上で、振動子用水晶片を保持用水晶板に固着(保持)する。この場合、振動子用水晶片と保持用水晶板との温度に対する熱膨張係数は同じ水晶なので基本的に同一とする。そして、保持用水晶板の内表面に対する固着位置と、振動子用水晶片の保持用水晶板に対する固着位置とは異ならせる。したがって、保持用水晶板と容器本体との熱膨張係数差によって両者の固着部間に応力歪みが生じても、これとは固着位置の異なる保持用水晶板と振動子用水晶片との固着位置間での応力歪みは緩和される。したがって、容器本体の槽内温度が変化しても、応力歪みよっての振動子用水晶片の周波数変化を防止する。   With such a configuration, the crystal device for surface mounting is made to be a constant temperature type, and the crystal piece for vibrator is fixed (held) to the holding crystal plate. In this case, the thermal expansion coefficient with respect to the temperature of the vibrator crystal piece and the holding crystal plate is basically the same because they are the same crystal. The fixing position of the holding crystal plate to the inner surface is different from the fixing position of the vibrator crystal piece to the holding crystal plate. Therefore, even if a stress distortion occurs between the fixing parts due to the difference in thermal expansion coefficient between the holding crystal plate and the container main body, the difference between the fixing positions of the holding crystal plate and the vibrator crystal piece between the fixing positions is different. The stress strain at is relaxed. Therefore, even if the temperature in the tank of the container main body changes, the frequency change of the quartz crystal piece for vibrator due to the stress strain is prevented.

このことから、容器本体の槽内温度の変化による周波数変化は、基本的に、水晶振動子の周波数温度特性に基づいた変化分のみとなる。したがって、振動子用水晶片の熱膨張係数差に基づいた応力歪みによる周波数変化分は考慮する必要がないので、恒温構造の設計を容易にして周波数偏差を高精度に維持する。   From this, the frequency change due to the change in the temperature of the vessel body is basically only the change based on the frequency-temperature characteristics of the crystal resonator. Therefore, it is not necessary to consider the frequency change due to the stress strain based on the difference in thermal expansion coefficient of the quartz crystal piece for the vibrator, so that the design of the constant temperature structure is facilitated and the frequency deviation is maintained with high accuracy.

(実施態様項)
本発明の請求項2では、請求項1において、前記振動子用水晶片の動作温度は周波数温度特性の常温以上の極大値又は極小値となる極値温度とする。これにより、振動子用水晶片の周波数温度特性における動作温度を明確にする。そして、極値温度よりも槽内温度が上昇又は下降した際の応力歪みによっての互いに反対方向となる振動子用水晶片の周波数変化を排除できる。
(Embodiment section)
According to a second aspect of the present invention, in the first aspect, the operating temperature of the vibrator crystal piece is an extreme temperature at which the frequency temperature characteristic has a maximum value or a minimum value equal to or higher than room temperature. This clarifies the operating temperature in the frequency temperature characteristics of the crystal unit for vibrator. Then, it is possible to eliminate a change in frequency of the quartz crystal piece for vibrators in opposite directions due to stress strain when the temperature in the bath rises or falls below the extreme temperature.

但し、振動子用水晶片の動作温度は例えばSCカットの場合のように、常温以上の極小値と極大値との間の温度であっても、前述したように応力歪みを考慮する必要がないので基本的には適用できる。この場合、例えば極大値と極小値との間の例えば0温度係数となる切断角度として変曲点温度を動作温度とすることにより、温度変化に対する周波数変化を小さくできる。   However, even if the operating temperature of the quartz crystal piece for vibrator is a temperature between the minimum value and the maximum value above room temperature as in the case of SC cut, for example, it is not necessary to consider stress strain as described above. Basically applicable. In this case, the frequency change with respect to the temperature change can be reduced by setting the inflection point temperature as the operating temperature, for example, as the cutting angle between the maximum value and the minimum value, which is, for example, 0 temperature coefficient.

同請求項3では、請求項2において、前記振動子用水晶片は周波数温度特性の常温以上に極大値を有するSCカット、又は周波数温度特性の常温以上に極小値を有するATカットとする。これにより、請求項2での振動子用水晶片を具体的にし、通信用とした高安定な発振周波数を得られる。なお、SCカット以外でも例えばITカットとした常温以上に極大値を有する所謂二回回転Yカットであれば適用できることは勿論である。   In the third aspect of the present invention, in the second aspect, the quartz crystal piece for vibrator is an SC cut having a maximum value above the room temperature of the frequency temperature characteristic or an AT cut having a minimum value above the room temperature of the frequency temperature characteristic. As a result, the crystal unit for vibrator according to claim 2 is made concrete and a highly stable oscillation frequency for communication can be obtained. In addition to the SC cut, it is needless to say that it can be applied to a so-called two-turn Y-cut having a maximum value above room temperature, for example, an IT cut.

同請求項4では、請求項1において、前記振動子用水晶片は前記保持用水晶板にポリイミド系の導電性接着剤によって固着される。これにより、例えば柔軟性としたシリコーン系等に比較し、有機ガスの発生を防止して振動特性を良好に維持した上で、ポリイミド系の接着剤の硬性による応力歪みを緩和して、請求項1での効果を顕著にする。   In the fourth aspect of the present invention, in the first aspect, the vibrator crystal piece is fixed to the holding crystal plate with a polyimide-based conductive adhesive. Thereby, for example, compared to a silicone type made flexible, the generation of organic gas is prevented and vibration characteristics are maintained well, and stress distortion due to the hardness of the polyimide-based adhesive is alleviated. The effect of 1 is remarkable.

同請求項5(第1実施形態に相当)では、請求項1において、前記引出電極は前記振動子用水晶片の一端部両側に延出し、前記振動子用水晶片の一端部両側が前記保持用水晶板の一端部両側に固着し、前記保持用水晶板は長さ方向の両端部中央が前記容器本体の内表面に固着する。これにより、振動子用水晶片の一端部両側は保持用水晶板とともに自由端となるので応力歪みを生じない。   According to claim 5 (corresponding to the first embodiment), in claim 1, the extraction electrode extends to both sides of one end portion of the vibrator crystal piece, and both ends of the end portion of the crystal piece for vibrator are the holding crystal. The holding quartz plate is fixed to both sides of one end of the plate, and the center of both ends in the length direction is fixed to the inner surface of the container body. As a result, both sides of one end of the crystal piece for vibrator become free ends together with the holding crystal plate, so that stress distortion does not occur.

同請求項6では(第2実施形態に相当)、請求項1において、前記引出電極は前記振動子用水晶片の一端部両側に延出し、前記振動子用水晶片の一端部両側が前記保持用水晶板の一端部両側に固着し、前記保持用水晶板は前記一端部両側よりも中央寄りとした幅方向の両端側が前記容器本体の内表面に固着する。   In claim 6 (corresponding to the second embodiment), in claim 1, the extraction electrode extends to both sides of one end of the vibrator crystal piece, and both ends of the crystal part for vibrator are on the holding crystal. The holding quartz plate is fixed to both sides of one end of the plate, and both end sides in the width direction which are closer to the center than both sides of the one end are fixed to the inner surface of the container body.

これによれば、振動子用水晶片の保持用水晶板に対する固着位置と、保持用水晶板の内表面に対する固着位置とは、長さ方向で異ならせる。したがって、保持用水晶板の中央寄りでの幅方向に応力歪みを生じても、これから離間した一端部両側での応力歪みは軽減する。したがって、振動子用水晶片と保持用水晶板とが固着する一端部両側は自由端となるので応力歪みは生じない。   According to this, the fixing position of the vibrator crystal piece to the holding crystal plate and the fixing position to the inner surface of the holding crystal plate are different in the length direction. Therefore, even if stress strain is generated in the width direction near the center of the holding crystal plate, the stress strain on both sides of the one end portion separated from the center is reduced. Therefore, both sides of the one end portion where the vibrator crystal piece and the holding crystal plate are fixed are free ends, so that no stress distortion occurs.

同請求項7(第4実施形態に相当)では、請求項1において、前記引出電極は前記振動子用水晶片の両端部に延出し、前記振動子用水晶片の両端部が前記保持用水晶板の両端部に固着し、前記保持用水晶板は両端部が前記容器本体の内表面に固着し、前記振動子用水晶片の両端部の前記保持用水晶板に対する固着位置と、前記保持用水晶板の両端部の前記内表面に対する固着位置とは幅方向で異なる。   According to claim 7 (corresponding to the fourth embodiment), in claim 1, the extraction electrode extends to both ends of the vibrator crystal piece, and both ends of the vibrator crystal piece are formed on the holding crystal plate. The holding crystal plate is fixed to both end portions, and both end portions of the holding crystal plate are fixed to the inner surface of the container main body, the fixing positions of the both end portions of the vibrator crystal piece to the holding crystal plate, and the holding crystal plate The fixing positions of both end portions with respect to the inner surface are different in the width direction.

この場合は、振動子用水晶片の保持用水晶板に対する固着位置と、保持用水晶板の内表面に対する固着位置とは、幅方向での固着位置を異ならせる。したがって、請求項6と同様に、振動子用水晶片と保持用水晶板とが固着する両端部は自由端となるので応力歪みは生じない。   In this case, the fixing position of the vibrator crystal piece to the holding crystal plate and the fixing position to the inner surface of the holding crystal plate are different in the width direction. Therefore, similarly to the sixth aspect, since both ends where the crystal unit for vibrator and the crystal plate for holding are fixed become free ends, stress distortion does not occur.

請求項1において、前記容器本体には少なくとも温度制御回路素子又は発振回路素子を設ける。これにより、付加価値を高めた水晶デバイスを得られる。   The container body according to claim 1 is provided with at least a temperature control circuit element or an oscillation circuit element. Thereby, a crystal device with increased added value can be obtained.

(第1実施形態)
第1図は本発明の第1実施形態を説明する図で、同図(a)は恒温型振動子の断面図、同図(b)は容器本体の平面図、同図(c)は保持用基板の平面図である。なお、前従来例と同一部分には同番号を付与してその説明は簡略又は省略する。
(First embodiment)
FIG. 1 is a view for explaining a first embodiment of the present invention. FIG. 1 (a) is a cross-sectional view of a constant temperature type vibrator, FIG. 1 (b) is a plan view of a container body, and FIG. FIG. In addition, the same number is attached | subjected to the same part as a prior art example, and the description is simplified or abbreviate | omitted.

恒温型振動子は、前述したように、積層セラミックからなる容器本体1の一主面となる凹部底面に温度感応抵抗体3を設け、他主面の凹部底面に発熱抵抗体4を設ける。温度感応抵抗体3及び発熱抵抗体4はいずれも膜抵抗として印刷・焼成によって形成される。振動子用水晶片2はSCカットとし、周波数温度特性の極大値となる極値温度T(80℃)を動作温度とする。容器本体11における一主面の開口端面には金属カバー5を被せて、振動子用水晶片2を密閉封入する。   As described above, the constant temperature type vibrator is provided with the temperature sensitive resistor 3 on the bottom surface of the concave portion, which is one main surface of the container body 1 made of multilayer ceramic, and the heating resistor 4 is provided on the bottom surface of the concave portion of the other main surface. Both the temperature sensitive resistor 3 and the heating resistor 4 are formed by printing and baking as film resistance. The resonator crystal piece 2 is SC-cut, and the extreme temperature T (80 ° C.) that is the maximum value of the frequency temperature characteristic is the operating temperature. An opening end face of one main surface of the container main body 11 is covered with a metal cover 5 so that the vibrator crystal piece 2 is hermetically sealed.

そして、この実施形態では、振動子用水晶片2は保持用水晶板10に面対向し、励振電極8aから引出電極8bの延出した一端部両側が導電性接着剤9によって固着される。保持用水晶板10は例えば振動子用水晶片2と同一切断角度のSCカットとする。そして、振動子用水晶片2が固着されて電気的に接続する水晶保持端子6を一主面の一端部両側に有する。水晶保持端子6は図示しない配線路によって外側面を経て他主面に延出し、両端部中央の導通端子11と電気的に接続する。例えば配線路上にはコーティング等による保護膜を設けて、例えば真空吸着による移送時での断線等を防止する。   In this embodiment, the resonator crystal piece 2 faces the holding crystal plate 10, and both ends of one end of the extraction electrode 8 b extending from the excitation electrode 8 a are fixed by the conductive adhesive 9. The holding crystal plate 10 is, for example, an SC cut having the same cutting angle as that of the vibrator crystal piece 2. And the crystal holding | maintenance crystal | crystallization piece 2 is fixed, and it has the crystal | crystallization holding | maintenance terminal 6 which electrically connects on the both ends of the one end part of one main surface. The crystal holding terminal 6 extends to the other main surface through the outer surface by a wiring path (not shown), and is electrically connected to the conduction terminal 11 at the center of both ends. For example, a protective film made of coating or the like is provided on the wiring path to prevent disconnection or the like during transfer by vacuum suction, for example.

導通端子11は、これに対応して容器本体1の内底面に設けられた両端部中央の回路端子12に図示しない導電性接着剤9によって固着され、電気的に接続する。要するに、保持用水晶板は両端部中央が容器本体1の内表面である内壁段部の両端部中央に固着され、振動子用水晶片2は保持用水晶板の一端部両側として固着される。   Correspondingly, the conductive terminal 11 is fixed to the circuit terminal 12 at the center of both ends provided on the inner bottom surface of the container body 1 by a conductive adhesive 9 (not shown) and is electrically connected. In short, the center of both ends of the holding crystal plate is fixed to the center of both ends of the inner wall step which is the inner surface of the container main body 1, and the vibrator crystal piece 2 is fixed as both sides of one end of the holding crystal plate.

導電性接着剤9はいずれも有機系ガスの発生が少ないポリイミド系とする。そして、容器本体1の外底面に設けた振動子用水晶片2の外部端子(水晶端子)7を発振回路に、温度感応抵抗3及び発熱抵抗体4の外部端子7を温度制御回路に接続する。これにより、恒温型振動子の動作温度を前述したように極値温度T(80℃)±α°内に制御して、発振周波数の周波数偏差規格をf0±βppmとする。   All the conductive adhesives 9 are made of polyimide which generates less organic gas. Then, the external terminal (crystal terminal) 7 of the vibrator crystal piece 2 provided on the outer bottom surface of the container body 1 is connected to the oscillation circuit, and the temperature sensitive resistor 3 and the external terminal 7 of the heating resistor 4 are connected to the temperature control circuit. As a result, the operating temperature of the constant temperature oscillator is controlled within the extreme temperature T (80 ° C.) ± α ° as described above, and the frequency deviation standard of the oscillation frequency is set to f 0 ± β ppm.

このような構成であれば、振動子用水晶片2の一端部両側はこれと同一切断角度として熱膨張係数を同一とする保持用水晶板10に固着される。したがって、振動子用水晶片2が容器本体1の熱膨張係数と異なっても、基本的に熱膨張係数差による応力歪みを抑止できる。   With such a configuration, both ends of one end of the crystal piece 2 for vibrator are fixed to the holding crystal plate 10 having the same cutting angle and the same thermal expansion coefficient. Therefore, even when the vibrator crystal piece 2 is different from the thermal expansion coefficient of the container main body 1, stress distortion due to the difference in thermal expansion coefficient can be basically suppressed.

但し、保持用水晶板10は振動子用水晶片2と同一切断角度のSCカットとしたが、基本的には水晶であれば熱膨張係数がほぼ同一なので適用できる。特に、保持用水晶板10が振動子用水晶片2よりも耐応力性の小さい切断角度例えばATカットであれば、保持用水晶板10が応力歪みを吸収して振動子用水晶片2には伝達されないので好適である(非特許文献1)。   However, the holding crystal plate 10 has an SC cut with the same cutting angle as that of the crystal piece 2 for vibrator, but basically, a quartz crystal can be applied because it has almost the same thermal expansion coefficient. In particular, if the holding crystal plate 10 is a cutting angle having a stress resistance smaller than that of the resonator crystal piece 2, such as an AT cut, the holding crystal plate 10 absorbs stress distortion and is not transmitted to the resonator crystal piece 2. Therefore, it is suitable (nonpatent literature 1).

そして、この実施形態では、特に、保持用水晶板10は両端部中央を容器本体1の内表面である内壁段部に、振動子用水晶片2は保持用水晶板10の一端部両側として固着される。したがって、保持用水晶板10と容器本体1(セラミック)との熱膨張係数差によって、保持用水晶板10に長さ方向での応力歪み(例えば長さ方向での湾曲)を生じても、保持用水晶板10は両端部中央が保持されるので、幅方向での両端側は自由端となって応力歪みは生じない。そして、振動子用水晶片2は一端部両側が保持用水晶板10に固着されて熱膨張係数を同一とするので、振動子用水晶片2にも応力歪みを生じない。   In this embodiment, in particular, the holding crystal plate 10 is fixed to the inner wall step which is the inner surface of the container body 1 at the center of both ends, and the vibrator crystal piece 2 is fixed to both ends of the holding crystal plate 10. The Therefore, even if stress distortion in the length direction (for example, bending in the length direction) occurs in the holding crystal plate 10 due to a difference in thermal expansion coefficient between the holding crystal plate 10 and the container main body 1 (ceramic), the holding crystal plate 10 is held. Since the center of both ends of the crystal plate 10 is held, both end sides in the width direction become free ends and no stress distortion occurs. The vibrator crystal piece 2 has both ends fixed to the holding crystal plate 10 and has the same thermal expansion coefficient, so that no stress distortion occurs in the vibrator crystal piece 2.

この場合、恒温構造とした容器本体1の槽内温度は動作温度(極値温度80℃)を基準として±α°以内に制御される。したがって、槽内温度が極値温度T(80℃)から許容範囲の±α°変化しても、極値温度を中心とした温度変化に対して、応力歪みによっての互いに反対方向となる周波数変化を抑制する。   In this case, the temperature in the tank of the container body 1 having a constant temperature structure is controlled within ± α ° with reference to the operating temperature (extreme temperature 80 ° C.). Therefore, even if the temperature in the tank changes from the extreme temperature T (80 ° C.) by an allowable range of ± α °, the frequency changes in opposite directions due to stress strain with respect to the temperature change around the extreme temperature. Suppress.

このことから、容器本体1の槽内温度に動作温度T(80℃)から許容範囲±α°内の変化があっても、SCカットの周波数温度特性による周波数変化のみを生じ、応力歪みによる周波数変化を無視できる。したがって、周波数偏差規格f0±βppmは周波数温度特性が支配的になるとともにこれに依存するので、恒温型振動子の設計を容易にする。   From this, even if there is a change within the allowable range ± α ° from the operating temperature T (80 ° C.) in the tank temperature of the container body 1, only the frequency change due to the SC cut frequency temperature characteristic occurs, and the frequency due to stress strain Change can be ignored. Therefore, the frequency deviation standard f 0 ± β ppm becomes dominant and depends on the frequency temperature characteristic, so that the design of the constant temperature type vibrator is facilitated.

なお、本実施形態では、保持用水晶板10は両端部中央を内壁段部(内表面)に、振動子用水晶片2は保持用水晶板10の一端部両側として固着したが、基本的には、保持用水晶板10の内表面に対する固着位置と、振動子用水晶片2の保持用水晶板10に対する固着位置が異なっていれば、振動子用水晶片2に生ずる応力歪みは緩和される。   In this embodiment, the holding crystal plate 10 is fixed to the inner wall step (inner surface) at the center of both ends, and the resonator crystal piece 2 is fixed to both ends of the holding crystal plate 10. If the fixing position of the holding crystal plate 10 to the inner surface and the fixing position of the vibrator crystal piece 2 to the holding crystal plate 10 are different, the stress distortion generated in the vibrator crystal piece 2 is alleviated.

また、温度感応抵抗体3及び発熱抵抗体4をいずれも膜抵抗として表面に露出して形成したが、例えば発熱抵抗体4を底壁の積層面あるいは内底面(凹部底面)に形成してよい「第2図(ab)」。この場合、発熱抵抗体4は外気から遮断されるので加熱効果を高められる。   Further, although both the temperature sensitive resistor 3 and the heating resistor 4 are formed exposed on the surface as film resistance, for example, the heating resistor 4 may be formed on the laminated surface of the bottom wall or the inner bottom surface (recess bottom surface). “FIG. 2 (ab)”. In this case, since the heating resistor 4 is shielded from the outside air, the heating effect can be enhanced.

さらには、温度感応抵抗体3及び発熱抵抗体4のいずれをも容器本体1の外底面に形成してもよい(不図示)。そして、温度感応抵抗体3及び発熱抵抗体4はいずれか一方あるいはいずれをもチップ素子として形成しても同様である。第2図(c)では温度感応抵抗体3と複数の発熱抵抗体4とを凹部底面に形成した例を示している。   Further, both the temperature sensitive resistor 3 and the heating resistor 4 may be formed on the outer bottom surface of the container body 1 (not shown). The temperature sensitive resistor 3 and the heat generating resistor 4 are the same even if any one or both are formed as a chip element. FIG. 2 (c) shows an example in which the temperature sensitive resistor 3 and the plurality of heating resistors 4 are formed on the bottom surface of the recess.

また、本実施形態では内壁段部を設けて保持用水晶板10の両端部中央を固着したが、例えば第3図に示したように、内壁段部を設けることなく導電性接着剤9の厚み等によって間隙を持たせて凹部底面に固着してもよい。但し、保持用水晶板10の対向面と接触しても格別の支障はない。これにより、高さ寸法を小さくできる。勿論、凹部底面にチップ素子を配設する場合は、内壁段部を要する。   Further, in this embodiment, the inner wall step portion is provided and the center of both end portions of the holding crystal plate 10 is fixed. However, as shown in FIG. 3, for example, the thickness of the conductive adhesive 9 is not provided without the inner wall step portion. For example, the gap may be fixed to the bottom surface of the recess with a gap. However, there is no particular problem even if it comes into contact with the facing surface of the holding crystal plate 10. Thereby, a height dimension can be made small. Of course, when a chip element is disposed on the bottom surface of the recess, an inner wall step is required.

そして、振動子用水晶片2は平板状として図示しているが、ベベルやコンベックス状であってもよい。この場合、励振電極8aの形成された振動領域の接触を防止する図示しない枕を保持用水晶板10の他端部に設けることも、あるいは振動子用水晶片2との対向面に凹部を設けることもできる。   Further, although the vibrator crystal piece 2 is illustrated as a flat plate shape, it may be a bevel or a convex shape. In this case, a pillow (not shown) for preventing contact of the vibration region where the excitation electrode 8a is formed may be provided at the other end of the holding crystal plate 10, or a recess may be provided on the surface facing the vibrator crystal piece 2. You can also.

(第2実施形態)
第4図は本発明の第2実施形態を説明する図で、同図(a)は恒温型振動子の断面図、同図(b)は容器本体の平面図、同図(c)は保持用基板の平面図である。なお、これ以降の実施形態では、前実施形態と同一部分には同番号を付与してその説明は簡略又は省略する。
(Second Embodiment)
FIG. 4 is a diagram for explaining a second embodiment of the present invention, in which FIG. 4 (a) is a cross-sectional view of a thermostatic transducer, FIG. 4 (b) is a plan view of a container body, and FIG. FIG. In the following embodiments, the same parts as those in the previous embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

この実施形態では、保持用水晶板10は前述同様に一主面の一端部両側に水晶保持端子6を有し、引出電極の延出した振動子用水晶片2の一端部両側が導電性接着剤9によって固着される。そして、ここでは、水晶保持端子6は、外側面を経て他主面の一端部両側よりも中央寄りとして幅方向の両端側に設けた導通端子11と電気的に接続する。   In this embodiment, the holding crystal plate 10 has the crystal holding terminals 6 on both sides of one end portion of one main surface as described above, and both ends of the one end portion of the crystal piece 2 for vibrator with the lead electrode extended are conductive adhesive. 9 is fixed. In this case, the crystal holding terminal 6 is electrically connected to the conduction terminals 11 provided at both ends in the width direction so as to be closer to the center than both sides of one end of the other main surface through the outer surface.

導通端子11はこれに対応して容器本体1の内底面に設けられた回路端子12に導電性接着剤9によって固着される。要するに、保持用水晶板10の内底面に対する長さ方向での固着位置と、振動子用水晶片2の保持用水晶板10に対する同方向での固着位置とを異ならせる。   Correspondingly, the conductive terminal 11 is fixed to the circuit terminal 12 provided on the inner bottom surface of the container body 1 by the conductive adhesive 9. In short, the fixing position in the length direction with respect to the inner bottom surface of the holding crystal plate 10 is different from the fixing position in the same direction with respect to the holding crystal plate 10 of the vibrator crystal piece 2.

ここでは、保持用水晶板10の他端部中央を導電性あるいは絶縁性の接着剤9aによって固着して3点保持として安定度を高める。導電性接着剤9及び接着剤9aはいずれも有機系ガスの発生が少ないポリイミド系とする。そして、容器本体1の内底面には温度感応抵抗体3が、外底面には発熱抵抗体4が前述同様に形成される。   Here, the center of the other end of the holding crystal plate 10 is fixed by a conductive or insulating adhesive 9a to increase the stability by holding three points. The conductive adhesive 9 and the adhesive 9a are both polyimide-based, which generates less organic gas. A temperature sensitive resistor 3 is formed on the inner bottom surface of the container body 1 and a heating resistor 4 is formed on the outer bottom surface in the same manner as described above.

そして、容器本体1の外底面に設けた振動子用水晶片2の外部端子7を発振回路に、温度感応抵抗3及び発熱抵抗体4の外部端子7を温度制御回路に接続する。水晶振動子の動作温度は前述したように極値温度T(80℃)±α°内に制御して、発振周波数の周波数偏差規格をf0±βppmとする。   Then, the external terminal 7 of the vibrator crystal piece 2 provided on the outer bottom surface of the container body 1 is connected to the oscillation circuit, and the external terminals 7 of the temperature sensitive resistor 3 and the heating resistor 4 are connected to the temperature control circuit. As described above, the operating temperature of the crystal resonator is controlled within the extreme temperature T (80 ° C.) ± α °, and the frequency deviation standard of the oscillation frequency is set to f 0 ± β ppm.

このようなものでは、振動子用水晶片2の保持用水晶板10に対する固着位置は一端部両側とし、保持用水晶板10の内底面に対する固着位置はそれよりも中央寄りの一端部両端側して、長さ方向での固着位置を異ならせる。したがって、容器本体1との熱膨張係数差によって、保持用水晶板10の中央寄りでの固着位置間に幅方向に応力歪みを生じても、これから離間した一端部両側での応力歪みは軽減する。   In such a case, the fixing position of the resonator crystal piece 2 to the holding crystal plate 10 is on both sides of one end, and the fixing position to the inner bottom surface of the holding crystal plate 10 is on both ends of one end closer to the center. The position of fixing in the length direction is varied. Therefore, even if a stress strain occurs in the width direction between the fixing positions near the center of the holding crystal plate 10 due to the difference in thermal expansion coefficient with the container body 1, the stress strain on both sides of the one end separated from the center is reduced. .

これにより、振動子用水晶片2と保持用水晶板10とが接続する一端部両側はとともに同一の熱膨張係数に基づいて幅方向に伸縮するので、振動子用水晶片2は同方向での応力歪みを発生しない。また、振動子用水晶片2の長さ方向の他端部は自由端なので同方向にも応力歪みは生じない。   As a result, both sides of the one end of the vibrator crystal piece 2 and the holding crystal plate 10 are expanded and contracted in the width direction based on the same thermal expansion coefficient, so that the vibrator crystal piece 2 is stress-strained in the same direction. Does not occur. Further, since the other end portion of the vibrator crystal piece 2 in the length direction is a free end, no stress distortion occurs in the same direction.

したがって、第1実施形態と同様に、槽内温度が極値温度T(80℃)から許容範囲の±α°変化しても、極値温度を中心とした温度変化に対して、応力歪みによっての互いに反対方向となる周波数変化を抑制する。これにより、周波数偏差規格f0±βppmは周波数温度特性が支配的になるとともにこれに依存するので、恒温型振動子の設計を容易にする。   Therefore, as in the first embodiment, even if the temperature in the tank changes from the extreme temperature T (80 ° C.) by an allowable range of ± α °, the stress changes due to the temperature change centered on the extreme temperature. To suppress frequency changes in opposite directions. As a result, the frequency deviation standard f 0 ± β ppm becomes dominant and depends on the frequency temperature characteristic, thereby facilitating the design of the constant temperature type vibrator.

なお、第2実施形態においても、第1実施形態と同様に、温度感応抵抗体3及び発熱抵抗体4は容器本体1の任意の箇所に設けることができる。そして、例えば第5図に示したように、容器本体1に内壁段部を形成して回路端子12を設け、導通端子11と図示しない導電性接着剤によって接続し、例えば内底面にチップ素子とした温度感応抵抗体3及び発熱抵抗体4を設けることもできる。   In the second embodiment, as in the first embodiment, the temperature sensitive resistor 3 and the heating resistor 4 can be provided at any location of the container body 1. And, for example, as shown in FIG. 5, an inner wall step is formed on the container body 1 to provide a circuit terminal 12, which is connected to the conduction terminal 11 by a conductive adhesive (not shown). The temperature sensitive resistor 3 and the heating resistor 4 can be provided.

(第3実施形態)
第6図は本発明の第3実施形態を説明する図で、同図(a)は恒温型振動子の断面図、同図(b)は容器本体の平面図、同図(c)は保持用基板の平面図である。
(Third embodiment)
FIG. 6 is a diagram for explaining a third embodiment of the present invention, where FIG. 6 (a) is a cross-sectional view of a thermostatic transducer, FIG. 6 (b) is a plan view of a container body, and FIG. FIG.

第3実施形態では、例えばいずれも膜抵抗とした温度感応抵抗体3及び発熱抵抗体4を保持用水晶板10に形成する。保持用水晶板10は前述同様に一主面の一端部両側に水晶保持端子6を有し、他主面の中央寄りの導通端子11aに電気的に接続する。水晶保持端子6には振動子用水晶片2の引出電極の延出した一端部両側が固着する。   In the third embodiment, for example, the temperature sensitive resistor 3 and the heat generating resistor 4 which are both film resistors are formed on the holding crystal plate 10. As described above, the holding crystal plate 10 has crystal holding terminals 6 on both sides of one end portion of one main surface, and is electrically connected to the conduction terminal 11a closer to the center of the other main surface. Both ends of the extended end portion of the lead electrode of the crystal piece 2 for vibrator are fixed to the crystal holding terminal 6.

そして、ここでは、振動子用水晶片2と対面する保持用水晶板10の一主面に温度感応抵抗体3が、他主面に発熱抵抗体4が形成される。これらは、いずれも保持用水晶板10の中央領域とする。温度感応抵抗体3及び発熱抵抗体4からは図示しない配線路が延出して、保持用水晶板10の他主面の他端側に設けた導通端子11(bc)と電気的に接続する。   Here, the temperature sensitive resistor 3 is formed on one main surface of the holding crystal plate 10 facing the crystal plate 2 for vibrator, and the heat generating resistor 4 is formed on the other main surface. These are all the central region of the holding crystal plate 10. A wiring path (not shown) extends from the temperature sensitive resistor 3 and the heating resistor 4 and is electrically connected to a conduction terminal 11 (bc) provided on the other end side of the other main surface of the holding crystal plate 10.

そして、振動子用水晶片2、温度感応抵抗3及び発熱抵抗体4の導通端子11(abc)は、これらに対応して設けられた容器本体1の内底面の回路端子12(abc)に図示しない導電性接着剤によって固着される。これらの回路端子12(abc)は外底面の外部端子7に電気的に接続する。   The conduction crystal terminal 2 (abc) of the resonator crystal piece 2, the temperature sensitive resistor 3 and the heating resistor 4 are not shown in the circuit terminal 12 (abc) on the inner bottom surface of the container body 1 provided corresponding thereto. It is fixed by a conductive adhesive. These circuit terminals 12 (abc) are electrically connected to the external terminals 7 on the outer bottom surface.

このような構成であっても、振動子用水晶片2の保持用水晶板10に対する固着位置と、保持用水晶板10の内底面に対する固着位置とを長さ方向で異にする。したがって、第2実施形態と同様に、容器本体1との固着位置である中央寄りの幅方向での両端側との間の熱膨張係数差による応力歪みは、これとは離間した保持用水晶板10の一端部両側では軽減される。   Even in such a configuration, the fixing position of the vibrator crystal piece 2 to the holding crystal plate 10 and the fixing position to the inner bottom surface of the holding crystal plate 10 are different in the length direction. Therefore, similarly to the second embodiment, the stress distortion due to the difference in thermal expansion coefficient between the both end sides in the width direction near the center which is the fixing position with the container body 1 is separated from the holding crystal plate. 10 is reduced on both sides of one end.

これにより、一端部両側が固着される振動子用水晶片2は保持用水晶板10とともに伸縮するので応力歪みは抑制される。このことから、槽内温度が変化しても、応力歪みによっての互いに反対方向となる周波数変化を抑制するので、周波数精度を高精度に維持した恒温型振動子の設計を容易にする。   As a result, the vibrator crystal piece 2 to which both ends of the one end are fixed expands and contracts together with the holding crystal plate 10, so that stress distortion is suppressed. Therefore, even if the temperature in the tank changes, frequency changes in opposite directions due to stress strain are suppressed, so that it is easy to design a thermostat type vibrator that maintains high frequency accuracy.

なお、第3実施形態では保持用水晶板10の両主面に温度感応抵抗体3及発熱抵抗体4を膜抵抗として形成したが、例えば保持用水晶板10に段差や凹部等を形成してチップ素子とすることもできる。そして、温度感応抵抗体3又は発熱抵抗体4のいずれか一方を保持用水晶板10に形成し、他方は容器本体の任意の箇所に形成することもできる。   In the third embodiment, the temperature sensitive resistor 3 and the heat generating resistor 4 are formed as film resistors on both main surfaces of the holding crystal plate 10. However, for example, a step or a recess is formed on the holding crystal plate 10. It can also be a chip element. Then, either the temperature sensitive resistor 3 or the heat generating resistor 4 can be formed on the holding crystal plate 10 and the other can be formed at an arbitrary location on the container body.

(第4実施形態)
第7図は本発明の第4実施形態を説明する図で、同図(a)は恒温型振動子の断面図、同図(b)は水晶片の平面図、同図(c)は保持用基板の平面図、同図(d)は容器本体の平面図である。
(Fourth embodiment)
FIG. 7 is a view for explaining a fourth embodiment of the present invention. FIG. 7 (a) is a cross-sectional view of a constant temperature type vibrator, FIG. 7 (b) is a plan view of a crystal piece, and FIG. FIG. 4D is a plan view of the container body.

第4図実施形態では、振動子用水晶片2は両主面の励振電極8aから両端部に引出電極8bを延出する。保持用水晶板10は両端部中央に水晶保持端子6を有し、振動子用水晶板2の両端部中央が導電性接着剤9によって固着される。そして、水晶保持端子6は他主面の長さ方向の両端側に設けた導通端子11と電気的に接続する。   In the embodiment of FIG. 4, the quartz crystal piece 2 for vibrator extends from the excitation electrodes 8a on both main surfaces to the extraction electrodes 8b at both ends. The holding crystal plate 10 has a crystal holding terminal 6 at the center of both ends, and the center of both ends of the crystal plate 2 for vibrator is fixed by a conductive adhesive 9. The crystal holding terminals 6 are electrically connected to the conduction terminals 11 provided on both end sides in the length direction of the other main surface.

導通端子11はこれに対応して容器本体1の内底面に設けられた回路端子12に導電性接着剤9によって固着される。要するに、振動子用水晶片2の保持用水晶板10に対する幅方向での固着位置と、保持用水晶板10の内底面に対する同方向での固着位置とを異ならせる。   Correspondingly, the conductive terminal 11 is fixed to the circuit terminal 12 provided on the inner bottom surface of the container body 1 by the conductive adhesive 9. In short, the fixing position in the width direction of the vibrator crystal piece 2 with respect to the holding crystal plate 10 is different from the fixing position in the same direction with respect to the inner bottom surface of the holding crystal plate 10.

ここでは、導通端子11の形成された長辺とは反対側となる長辺の中央を導電性あるいは絶縁性の接着剤9aによって固着して3点保持として安定度を高める。この例でも、導電性接着剤9及び接着剤9aはいずれもポリイミド系とする。そして、容器本体1の内底面には温度感応抵抗体3が、外底面には発熱抵抗体4が前述同様に形成される。   Here, the center of the long side opposite to the long side on which the conductive terminal 11 is formed is fixed by the conductive or insulating adhesive 9a to maintain the three points, thereby increasing the stability. Also in this example, both the conductive adhesive 9 and the adhesive 9a are polyimide. A temperature sensitive resistor 3 is formed on the inner bottom surface of the container body 1 and a heating resistor 4 is formed on the outer bottom surface in the same manner as described above.

このようなものでは、振動子用水晶片2の保持用水晶板10に対する固着位置と、保持用水晶板10の内底面に対する固着位置とを幅方向で異ならせる。したがって、容器本体1との熱膨張係数差によって、保持用水晶板10の一長辺側となる固着位置間に長さ方向の応力歪みを生じても、これから離間して振動子用水晶片2の固着される両端部中央間での応力歪みは軽減する。   In such a case, the fixing position of the vibrator crystal piece 2 to the holding crystal plate 10 and the fixing position to the inner bottom surface of the holding crystal plate 10 are made different in the width direction. Therefore, even if stress strain in the length direction is generated between the fixing positions on the long side of the holding crystal plate 10 due to the difference in thermal expansion coefficient with the container body 1, the vibrator crystal piece 2 of the vibrator crystal piece 2 is separated from this. Stress strain between the centers of both ends to be fixed is reduced.

これにより、振動子用水晶片2と保持用水晶板10とが接続する両端部中央はとともに同一の熱膨張係数に基づいて長さ方向に伸縮するので、振動子用水晶片2は同方向での応力歪みを発生しない。また、振動子用水晶片2の幅方向での両端部は自由端なので同方向にも応力歪みは生じない。   As a result, the center of both ends where the resonator crystal piece 2 and the holding crystal plate 10 are connected are expanded and contracted in the length direction based on the same thermal expansion coefficient, so that the resonator crystal piece 2 is stressed in the same direction. Does not generate distortion. Further, since both end portions in the width direction of the crystal unit 2 for vibrator are free ends, no stress distortion occurs in the same direction.

したがって、各実施形態と同様に、槽内温度が変化しても、応力歪みによっての互いに反対方向となる周波数変化を抑制するので、周波数精度を高精度に維持した恒温型振動子の設計を容易にする。なお、振動子用水晶片2の両端部中央を固着したが、保持用水晶板10の内底面に対する固着位置よりも離間した方が効果は高まるので、導通端子11の形成される長辺とは反対側となる他方の長辺の両端を保持してもよい。   Therefore, as in each embodiment, even if the temperature in the tank changes, frequency changes in opposite directions due to stress strain are suppressed, so it is easy to design a thermostatic oscillator that maintains high frequency accuracy. To. In addition, although the center of both ends of the resonator crystal piece 2 is fixed, the effect is enhanced when it is separated from the fixing position with respect to the inner bottom surface of the holding crystal plate 10, so that it is opposite to the long side where the conduction terminal 11 is formed. You may hold | maintain the both ends of the other long side used as the side.

そして、この実施形態でも、第3実施形態と同様にして、保持用水晶板10に温度感応抵抗体3や発熱抵抗体4を形成できるともに、温度感応抵抗体3や発熱抵抗体4を任意な位置やチップ素子として配置できる。   In this embodiment, as in the third embodiment, the temperature sensitive resistor 3 and the heat generating resistor 4 can be formed on the holding crystal plate 10, and the temperature sensitive resistor 3 and the heat generating resistor 4 can be arbitrarily formed. It can be arranged as a position or chip element.

(他の事項)
上記実施形態では表面実装用とした恒温型の水晶デバイスを恒温型振動子として説明したが、例えば第8図(abc)、第9図及び第10図(ab)に示したようにICチップ13aを含む温度補償素子や発振回路素子等の回路素子13を一体的に収容して恒温型の水晶発振器を構成できる。なお、第8図(abc)はいずれも断面図であり、外部端子は電源、出力、アース等となる。
(Other matters)
In the above embodiment, the constant temperature crystal device for surface mounting has been described as a constant temperature oscillator. For example, as shown in FIGS. 8 (abc), 9 and 10 (ab), the IC chip 13a A constant temperature crystal oscillator can be configured by integrally housing circuit elements 13 such as temperature compensation elements and oscillation circuit elements. FIG. 8 (abc) is a cross-sectional view, and the external terminals are a power source, an output, a ground, and the like.

第8図(abc)は一主面にのみ凹部を有する容器本体1を用いた例である。例えば第8図(a)では凹部底面に温度感応抵抗体3、発熱抵抗体4及び回路素子13を配置し、保持用水晶板10を内壁段部に接合する。第8図(b)では凹部底面に保持用水晶板10を配置し、温度感応抵抗体3、発熱抵抗体4及び回路素子13を有する回路基板14を内壁段部に設ける。第8図(c)では内壁段部を2段とし、一段目の中蓋15によって振動子用水晶片2を密閉封入し、2段面の基板14と独立分離する。   FIG. 8 (abc) is an example using the container body 1 having a recess only on one main surface. For example, in FIG. 8A, the temperature sensitive resistor 3, the heating resistor 4 and the circuit element 13 are arranged on the bottom surface of the recess, and the holding crystal plate 10 is joined to the inner wall step. In FIG. 8B, the holding crystal plate 10 is arranged on the bottom surface of the recess, and the circuit board 14 having the temperature sensitive resistor 3, the heating resistor 4 and the circuit element 13 is provided on the inner wall step. In FIG. 8 (c), the inner wall stepped portion has two steps, and the vibrator crystal piece 2 is hermetically sealed by the first-stage inner lid 15, and is separated from the substrate 14 on the second step surface.

第9図は保持用水晶板10の下面に振動子用水晶片2及び温度感応抵抗体3及び発熱抵抗体4を設け、保持用水晶片10の上面に回路素子13を設ける。そして、保持用水晶板10の下面であって発振回路等の各端子が形成された両端部を内壁段部に固着する。この場合でも、保持用水晶板10の内壁段部に対する固着位置と、振動子用水晶片2の保持用水晶板10に対する固着位置は異なる。したがって、保持用水晶板10と内壁段部との間に応力歪み生じても、振動子用水晶片2の応力歪みは緩和される。   In FIG. 9, the crystal piece 2 for the vibrator, the temperature sensitive resistor 3 and the heating resistor 4 are provided on the lower surface of the holding crystal plate 10, and the circuit element 13 is provided on the upper surface of the holding crystal piece 10. Then, both end portions of the lower surface of the holding crystal plate 10 where the terminals such as the oscillation circuit are formed are fixed to the inner wall step portion. Even in this case, the fixing position of the holding crystal plate 10 to the inner wall step portion and the fixing position of the vibrator crystal piece 2 to the holding crystal plate 10 are different. Therefore, even if stress distortion occurs between the holding crystal plate 10 and the inner wall step, the stress distortion of the vibrator crystal piece 2 is alleviated.

なお、第8図(bc)及び第9図での保持用水晶板10は内壁段部に固着されて、金属カバー5と振動子用水晶片2とを遮蔽する。したがって、保持用水晶板10と金属カバー5との間には断熱空間層が形成される。これにより、振動子用水晶片2が外気温度(周囲温度)の変化を受けにくい構造となって、急激な温度変化によるサーマルショックによる周波数変動を防止できる。   The holding crystal plate 10 in FIGS. 8 (bc) and 9 is fixed to the inner wall step portion to shield the metal cover 5 and the vibrator crystal piece 2. FIG. Therefore, a heat insulating space layer is formed between the holding crystal plate 10 and the metal cover 5. As a result, the quartz crystal piece 2 for vibrator is less susceptible to changes in the outside air temperature (ambient temperature), and frequency fluctuations due to thermal shock due to sudden temperature changes can be prevented.

また、第10図(ab)は両主面に凹部を有する容器本体1を用いた例である。例えば第10図(a)では温度感応抵抗体3、発熱抵抗体4を設けた保持用水晶板10を一主面の凹部に、ICチップ13を含む回路素子13を他主面に設ける。そして、第10図(b)では回回路素子13を配置した回路基板14を他主面の凹部に接合した例である。なお、これらの配置構成に限らず、必要に応じて任意に構成できる。   FIG. 10 (ab) shows an example in which a container body 1 having recesses on both main surfaces is used. For example, in FIG. 10 (a), the holding crystal plate 10 provided with the temperature sensitive resistor 3 and the heating resistor 4 is provided in the concave portion on one main surface, and the circuit element 13 including the IC chip 13 is provided on the other main surface. FIG. 10 (b) shows an example in which the circuit board 14 on which the circuit elements 13 are arranged is joined to the recesses on the other main surface. It should be noted that the present invention is not limited to these arrangement configurations and can be arbitrarily configured as necessary.

さらに、水晶振動子はSCカットとしたが、例えば使用頻繁最も高くて周波数温度特性の極小値を80℃近傍に有するATカット等であってもよく、特には常温(25℃)近傍以上に極値を有する周波数温度特性とした水晶振動子(水晶片)であれば適用できる。そして、導電性接着剤は有機系ガスの発生を抑制するポリイミド系としたが、例えばAuSn等の共晶合金を用いた固着でもよく、要はガスの発生の少ない固着であればよい。   Furthermore, although the crystal resonator is SC cut, it may be, for example, an AT cut that has the highest frequency of use and has a minimum frequency temperature characteristic in the vicinity of 80 ° C. A crystal resonator (crystal piece) having a frequency temperature characteristic having a value can be applied. The conductive adhesive is a polyimide based material that suppresses the generation of organic gas, but may be fixed using, for example, a eutectic alloy such as AuSn.

本発明の第1実施形態を説明する図で、同図(a)は恒温型振動子の断面図、同図(b)は容器本体の平面図、同図(c)は保持用基板の平面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a figure explaining 1st Embodiment of this invention, The figure (a) is sectional drawing of a thermostat type vibrator, The figure (b) is a top view of a container main body, The figure (c) is a plane of a holding substrate. FIG. 本発明の第1実施形態の他例を説明する図で、同図(abc)ともに恒温型振動子の断面図である。It is a figure explaining other examples of a 1st embodiment of the present invention, and the figure (abc) is a sectional view of a constant temperature type vibrator. 本発明の第1実施形態のさらに他例を説明する恒温型振動子の断面図である。FIG. 6 is a cross-sectional view of a constant temperature oscillator for explaining still another example of the first embodiment of the present invention. 本発明の第2実施形態を説明する図で、同図(a)は恒温型振動子の断面図、同図(b)は容器本体の平面図、同図(c)は保持用基板の平面図である。FIG. 6 is a diagram for explaining a second embodiment of the present invention, in which FIG. (A) is a cross-sectional view of a thermostatic transducer, FIG. (B) is a plan view of a container body, and (c) is a plan view of a holding substrate. FIG. 本発明の第2実施形態の他例を説明する恒温型振動子の断面図である。It is sectional drawing of the thermostat type | mold explaining the other example of 2nd Embodiment of this invention. 本発明の第3実施形態を説明する図で、同図(a)は恒温型振動子の断面図、同図(b)は容器本体の平面図、同図(c)は保持用基板の平面図である。FIG. 6 is a diagram for explaining a third embodiment of the present invention, in which FIG. (A) is a cross-sectional view of a thermostatic transducer, FIG. (B) is a plan view of a container body, and (c) is a plan view of a holding substrate. FIG. 本発明の第4実施形態を説明する図で、同図(a)は恒温型振動子の断面図、同図(b)は水晶片の平面図、同図(c)は保持用基板の平面図、同図(d)は容器本体の平面図である。FIG. 6A is a cross-sectional view of a thermostatic oscillator, FIG. 5B is a plan view of a crystal piece, and FIG. 4C is a plan view of a holding substrate. The figure and the figure (d) are top views of a container main part. 本発明の他の実施形態を説明する図で、同図(abc)ともに恒温型とした水晶発振器の断面図である。It is a figure explaining other embodiment of this invention, and the same figure (abc) is sectional drawing of the crystal oscillator made into the constant temperature type. 本発明のさらに他の実施形態を説明する恒温型とした水晶発振器の断面図である。It is sectional drawing of the crystal oscillator made into the constant temperature type explaining further another embodiment of this invention. 本発明のまたさらに他の実施形態を説明する図で、同図(ab)ともに恒温型とした水晶発振器の断面図である。FIG. 6 is a diagram for explaining still another embodiment of the present invention, and FIG. 5B is a cross-sectional view of a constant temperature crystal oscillator. 従来例を説明する図で、同図(a)は恒温型振動子の断面図、同図(b)は水晶片の平面図である。It is a figure explaining a prior art example, the figure (a) is a sectional view of a thermostat type vibrator, and the figure (b) is a top view of a crystal piece. 従来例を説明するSCカットとした水晶振動子の周波数温度特性である。It is a frequency temperature characteristic of the crystal resonator made into SC cut explaining a prior art example.

符号の説明Explanation of symbols

1 容器本体、2 水晶片、3 温度感応抵抗体、4 発熱抵抗体、5 金属カバー、
6 水晶保持端子、7 外部端子、8a 励振電極、8b 引出電極、9 導電性接着剤、10 保持用水晶板、11 導通端子、12 回路端子、13 回路素子。
1 Container body, 2 Crystal piece, 3 Temperature sensitive resistor, 4 Heating resistor, 5 Metal cover,
6 Crystal holding terminal, 7 External terminal, 8a Excitation electrode, 8b Lead electrode, 9 Conductive adhesive, 10 Holding crystal plate, 11 Conducting terminal, 12 Circuit terminal, 13 Circuit element

Claims (8)

少なくとも一主面に底壁と枠壁からなる凹部を有して前記凹部内に振動子用水晶片を収容した容器本体と、前記容器本体に収容されて前記振動子用水晶片を加熱する発熱抵抗体及び前記振動子用水晶片の動作温度を検出する温度感応抵抗体と、前記容器本体の一主面の開口端面に設けられたカバーとを備え、前記振動子用水晶片の動作温度を一定に維持する表面実装用とした恒温型の水晶デバイスにおいて、前記振動子用水晶片は前記容器本体の内底面に水平方向として固着される保持用水晶板に面対向し、前記振動子用水晶片の励振電極から引出電極の延出した外周部が前記保持用水晶板に固着されるとともに、前記保持用水晶板の前記容器本体の内表面に対する固着位置と前記振動子用水晶片の前記保持用水晶板に対する固着位置とは異なることを特徴とする恒温型の水晶デバイス。   A container main body having a recess made of a bottom wall and a frame wall on at least one main surface, and housing the crystal quartz piece for vibrator in the recess, and a heating resistor housed in the container main body for heating the crystal quartz piece for vibrator And a temperature-sensitive resistor for detecting an operating temperature of the vibrator crystal piece, and a cover provided on an opening end surface of one main surface of the container body, and maintaining the operating temperature of the vibrator crystal piece constant. In the constant temperature crystal device for surface mounting, the crystal piece for the vibrator faces the holding crystal plate fixed in a horizontal direction on the inner bottom surface of the container body, and is drawn from the excitation electrode of the crystal piece for the vibrator. The outer peripheral part where the electrode extends is fixed to the holding crystal plate, the fixing position of the holding crystal plate to the inner surface of the container body, and the fixing position of the vibrator crystal piece to the holding crystal plate Is different Constant-temperature type quartz crystal device according to claim Rukoto. 請求項1において、前記振動子用水晶片の動作温度は周波数温度特性の常温以上となる極大値あるいは極小値となる極値温度とした恒温型の水晶デバイス。   2. The constant temperature crystal device according to claim 1, wherein an operating temperature of the vibrator crystal piece is an extreme temperature at which the operating temperature of the frequency temperature characteristic is equal to or higher than room temperature, or an extreme temperature at which the operating temperature becomes a minimum value. 請求項2において、前記振動子用水晶片は周波数温度特性の常温以上に極大値を有するSCカット、又は周波数温度特性の常温以上に極小値を有するATカットとした恒温型の水晶デバイス。   3. The constant temperature crystal device according to claim 2, wherein the quartz crystal piece for vibrator is an SC cut having a maximum value above the room temperature of the frequency temperature characteristic or an AT cut having a minimum value above the room temperature of the frequency temperature characteristic. 請求項1において、前記振動子用水晶片は前記保持用水晶板にポリイミド系の導電性接着剤によって固着された恒温型の水晶デバイス。   2. The constant temperature crystal device according to claim 1, wherein the vibrator crystal piece is fixed to the holding crystal plate with a polyimide conductive adhesive. 請求項1において、前記引出電極は前記振動子用水晶片の一端部両側に延出し、前記振動子用水晶片の一端部両側が前記保持用水晶板の一端部両側に固着し、前記保持用水晶板は長さ方向の両端部中央が前記容器本体の内表面に固着した恒温型の水晶デバイス。   2. The holding crystal plate according to claim 1, wherein the extraction electrode extends to both sides of one end portion of the vibrator crystal piece, and both ends of the one end portion of the vibrator crystal piece are fixed to both sides of one end portion of the holding crystal plate. Is a constant temperature crystal device in which the center of both end portions in the length direction is fixed to the inner surface of the container body. 請求項1において、前記引出電極は前記振動子用水晶片の一端部両側に延出し、前記振動子用水晶片の一端部両側が前記保持用水晶板の一端部両側に固着し、前記保持用水晶板は前記一端部両側よりも中央寄りとした幅方向の両端側が前記容器本体の内表面に固着した恒温型の水晶デバイス。   2. The holding crystal plate according to claim 1, wherein the extraction electrode extends to both sides of one end portion of the vibrator crystal piece, and both ends of the one end portion of the vibrator crystal piece are fixed to both sides of one end portion of the holding crystal plate. Is a constant temperature crystal device in which both ends in the width direction closer to the center than both sides of the one end are fixed to the inner surface of the container body. 請求項1において、前記引出電極は前記振動子用水晶片の両端部に延出し、前記振動子用水晶片の両端部が前記保持用水晶板の両端部に固着し、前記保持用水晶板は両端部が前記容器本体の内表面に固着し、前記振動子用水晶片の両端部の前記保持用水晶板に対する固着位置と、前記保持用水晶板の両端部の前記内表面に対する固着位置とは幅方向で異なる恒温型の水晶デバイス。   2. The extraction electrode according to claim 1, wherein the lead electrodes extend to both end portions of the vibrator crystal piece, and both end portions of the vibrator crystal piece are fixed to both end portions of the holding crystal plate. Are fixed to the inner surface of the container main body, and the fixing positions of the both ends of the crystal piece for vibrator to the holding crystal plate and the fixing positions of the both ends of the holding crystal plate to the inner surface are in the width direction. Different constant temperature crystal devices. 請求項1において、前記容器本体には少なくとも温度制御回路素子又は発振回路素子を設けてなる恒温型の水晶デバイス。   The constant temperature crystal device according to claim 1, wherein the container body is provided with at least a temperature control circuit element or an oscillation circuit element.
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JP2023135986A (en) * 2022-03-16 2023-09-29 カシオ計算機株式会社 vibration device
JP7743655B1 (en) 2024-04-26 2025-09-24 日本電波工業株式会社 Crystal unit with built-in temperature sensor
JP2025168235A (en) * 2024-04-26 2025-11-07 日本電波工業株式会社 Crystal vibrator with built-in temperature sensor

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