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JP2009233561A - Micromixer - Google Patents

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JP2009233561A
JP2009233561A JP2008082469A JP2008082469A JP2009233561A JP 2009233561 A JP2009233561 A JP 2009233561A JP 2008082469 A JP2008082469 A JP 2008082469A JP 2008082469 A JP2008082469 A JP 2008082469A JP 2009233561 A JP2009233561 A JP 2009233561A
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channel
distribution
channels
mixing
fluid
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JP4286895B1 (en
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Norihisa Senoo
典久 妹尾
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Okayama Prefecture Ind Promotion Foundation
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a micromixer that is compact and yet can advantageously enhance its mixing efficiency. <P>SOLUTION: The micromixer is constituted of a stack of a base plate having a plurality of feed ports from which fluids are fed, a distribution plate having at least one distribution channel per fluid and at least two distribution channels in total through which the fluids individually flow from each of the plurality of feed ports, a junction plate having at least one mixing channel that causes the fluids from each of the distribution channels to merge and mix together, and a top plate having a storage member that stores the mixed fluids. The distribution channels are equipped with main channels each parallelly extending between the neighboring distribution channels, and a plurality of branch channels each branching from the main channels and extending toward the opposite main channels respectively. The branch channels are disposed in such a manner that at least the end part of a branch channel of one of the neighboring distribution channels and at least the end part of a branch channel of the other of the neighboring distribution channels are alternately arrayed. The mixing channel extends in the direction of crossing all of the branch channels each disposed between the neighboring distribution channels, and introduces the fluids from the intersections with the individual branch channels. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、例えば、欧州ではμ−TAS(Micro Total Analysis Systemの略)、米国ではLab−on−A−chipと称されるマイクロリアクターに代表される微細構造をもつマイクロ流体素子を用いて行う、複数種類の微量流体の混合・撹拌を可能にする新規なマイクロミキサに関する。   The present invention is carried out by using a microfluidic device having a microstructure represented by a microreactor represented by μ-TAS (abbreviation of Micro Total Analysis System) in Europe and Lab-on-A-chip in the United States, for example. The present invention relates to a novel micromixer that enables mixing and stirring of a plurality of types of microfluids.

マイクロミキサの構造に関する従来技術としては、例えば特許文献1に記載されているように、Y字状に微小流路を形成した基板を用いたマイクロミキサや、特許文献2に記載されているように、T字状に微小流路を形成した基板を用いたマイクロミキサが知られている。
特開2006−205080号公報 特開2006−7063号公報
As a conventional technique related to the structure of a micromixer, for example, as described in Patent Document 1, a micromixer using a substrate in which a micro flow path is formed in a Y shape, or as described in Patent Document 2, A micromixer using a substrate having a T-shaped micro flow path is known.
JP 2006-205080 A JP 2006-7063 A

これらY字状やT字状の微小流路を形成したマイクロミキサ内では、流れは層流状態である。よって、2つの供給口から供給された溶液は、微小流路では2層の流れとなり、これら2層の撹拌・混合は拡散に支配されるため、完全混合を短時間で行うことは難しく、ある程度の時間が必要であるという問題がある。   In the micromixer in which these Y-shaped and T-shaped microchannels are formed, the flow is in a laminar flow state. Therefore, the solution supplied from the two supply ports becomes a two-layer flow in the microchannel, and the stirring / mixing of these two layers is governed by diffusion. Therefore, it is difficult to perform complete mixing in a short time. There is a problem that time is required.

また、混合時間の短縮を目的として、2液の界面の面積を大きくするための手段としては、例えば2層の流れを平面上で多数に分割して、多数の層流を形成し、混合・撹拌効率を向上させる方法が挙げられる。しかしながら、かかる方法は、流れを多数に分割するため、精密加工技術を用いて複雑なマルチ流路の形成が必要であり、これは、加工コストの高騰を招くため好ましくない。また、マルチ流路を用いた場合であっても、やはり平面的に形成された微小流路であるので、流体は依然として層流であり、撹拌・混合は拡散で支配されるため、混合効率に関して改良の余地があった。加えて、マルチ流路を平面上に形成するには、ある程度、大きな基板面積が必要となり、これは、マイクロミキサ全体を小型化する用途には使用できないという問題もあった。   For the purpose of shortening the mixing time, as a means for increasing the area of the interface between the two liquids, for example, the flow of two layers is divided into a large number on a plane to form a large number of laminar flows. The method of improving stirring efficiency is mentioned. However, since such a method divides the flow into a large number, it is necessary to form a complicated multi-channel using a precision processing technique, which is not preferable because the processing cost increases. In addition, even when multi-channel is used, since it is a micro-channel formed in a plane, the fluid is still laminar and stirring / mixing is governed by diffusion. There was room for improvement. In addition, in order to form a multi-channel on a plane, a large substrate area is required to some extent, which has a problem that it cannot be used for the purpose of downsizing the entire micromixer.

さらに、他のマイクロミキサの従来技術としては、多孔フィルターを用いたミキサー、多層ミキサー、流体のらせん流れを利用したカオス混合によって混合を行うミキサー、流路壁に衝突させることで発生する擬似乱流を利用するミキサー、超音波、電場、磁場、微小な撹拌子を利用したマイクロミキサ(例えば特許文献3)等の多種多様なマイクロミキサが報告されているが、これらのマイクロミキサはいずれも、流路パターンや装置構成が複雑であるため、高価となり、大量生産には適さないという問題がある。
特開2006−320877号公報
Furthermore, other micromixer conventional technologies include a mixer using a porous filter, a multilayer mixer, a mixer that performs mixing by chaotic mixing using a spiral flow of fluid, and a pseudo turbulent flow generated by colliding with a flow path wall. A wide variety of micromixers have been reported, such as mixers using ultrasonic waves, ultrasonic waves, electric fields, magnetic fields, and micromixers using micro stirrers (for example, Patent Document 3). Since the road pattern and the device configuration are complicated, there is a problem that it is expensive and not suitable for mass production.
JP 2006-320877 A

本発明は、上述した問題点を鑑みなされたものであり、小型でありながらも混合効率を有利に高めることができるマイクロミキサを提供することにある。   The present invention has been made in view of the above-described problems, and it is an object of the present invention to provide a micromixer that can advantageously increase mixing efficiency while being small in size.

上記目的を達成するため、本発明に従うマイクロミキサは、流体が供給される複数の供給口を有するベースプレート、各供給口からの流体が通る、各流体宛少なくとも1本、合計で少なくとも本の分配流路を有する分配プレート、各分配流路から流体を合流、混合させる少なくとも本の混合流路を有する合流プレート、及び混合された流体を導き、貯留する貯留部を有するトッププレートを積み重ねてなり、かかる分配流路は、隣接する分配流路間にて並列に延在する本流路と、本流路から分岐し、対向する本流路に向かって延在する複数本の支流路とを具え、支流路は、隣接する一方の分配流路の支流路の少なくとも先端部と他方の分配流路の支流路の少なくとも先端部とが交互に並ぶ配置となり、混合流路は、隣接する分配流路間にある全ての支流路を横切る方向に延在し、各支流路との交点から流体を導き、分配流路のうち、2本の分配流路間に挟まれている分配流路の本流路の幅が、その他の分配流路の本流路の幅よりも大きいことを特徴とする。 To achieve the above object, a micromixer according to the present invention includes a base plate having a plurality of supply ports to which fluid is supplied, at least one distribution for each fluid through which the fluid from each supply port passes, and a total of at least three distributions. A distribution plate having a flow path, a merge plate having at least two mixing flow paths for merging and mixing fluid from each distribution flow path, and a top plate having a reservoir for guiding and storing the mixed fluid are stacked. The distribution flow path includes a main flow path extending in parallel between adjacent distribution flow paths, and a plurality of branch flow paths branched from the main flow path and extending toward the opposed main flow paths. The channel has an arrangement in which at least the tip of the branch channel of one adjacent distribution channel and at least the tip of the branch channel of the other distribution channel are alternately arranged, and the mixing channel is between the adjacent distribution channels. That extends in a direction transverse to all the tributary flow paths, guide the fluid from the intersection of the respective branch flow paths, among the distribution channel, the two widths of the main channel of the distribution channel, which is sandwiched between the distribution channel Is larger than the width of the main flow path of the other distribution flow path .

また、分配流路の本流路及び支流路は、直線状に延在してなることが好ましい。   Moreover, it is preferable that the main channel and the branch channel of the distribution channel extend linearly.

更に、混合流路は、直線状に延在してなることが好ましい。   Furthermore, the mixing channel preferably extends linearly.

加えて、分配流路間に挟まれている分配流路の本流路の幅は、その他の分配流路の本流路の幅の120〜300%の範囲にあることが好ましく、より好ましくは、150〜200%の範囲にある。なお、ここでいう「本流路の幅」は、本流路にて、その延在方向に対し直交する方向に測定した距離をいうものとする。   In addition, the width of the main channel of the distribution channel sandwiched between the distribution channels is preferably in the range of 120 to 300% of the width of the main channel of the other distribution channels, more preferably 150. It is in the range of ~ 200%. The “width of the main channel” here refers to the distance measured in the direction perpendicular to the extending direction in the main channel.

加えてまた、ベースプレート、分配プレート、合流プレート及びトッププレートを積層してなる積層体を、複数積層してなることが好ましい。   In addition, it is preferable that a plurality of stacked bodies each including a base plate, a distribution plate, a merging plate, and a top plate are stacked.

本発明によれば、混合効率を格段に高めることができるマイクロミキサを提供することが可能である。   ADVANTAGE OF THE INVENTION According to this invention, it is possible to provide the micromixer which can raise mixing efficiency markedly.

以下、図面を参照しつつ本発明の実施の形態を説明する。図1〜3は、本発明に従うマイクロミキサの要部構成を示したものである。図1は、本発明に従う代表的なマイクロミキサの上面図であり、図2は、図1に示すマイクロミキサの側方断面図であり、図3は、図1に示すマクロミキサの分解図である。図4〜6は、図1〜3に示すマイクロミキサの、ベースプレート、分配プレート及び合流プレートを夫々に示した拡大図である。図7(a)〜(c)は、本発明のマイクロプレートにより、流体を分配プレートから合流プレートへと導いたときの流体の混合パターンを概略的に説明した図である。図8は、図1〜3に示すマイクロミキサの、トッププレートの拡大図である。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 to 3 show the main configuration of a micromixer according to the present invention. 1 is a top view of a representative micromixer according to the present invention, FIG. 2 is a side sectional view of the micromixer shown in FIG. 1, and FIG. 3 is an exploded view of the macromixer shown in FIG. . 4 to 6 are enlarged views respectively showing a base plate, a distribution plate, and a confluence plate of the micromixer shown in FIGS. FIGS. 7A to 7C are diagrams schematically illustrating a fluid mixing pattern when the fluid is guided from the distribution plate to the junction plate by the microplate of the present invention. FIG. 8 is an enlarged view of the top plate of the micromixer shown in FIGS.

図示のマイクロミキサ1は、複数の流体、この例では2種の流体A及びBを当該装置に導入するための供給口1a及び1bを個別に有するベースプレート2を基盤とする。ここで、供給口1a及び1bには、例えば口金10を装着し、該口金10に流体A及びBの供給管(図示せず)を接続して流体A及びBをそれぞれの供給口に供給する。   The illustrated micromixer 1 is based on a base plate 2 having separate supply ports 1a and 1b for introducing a plurality of fluids, in this example two kinds of fluids A and B, into the apparatus. Here, for example, a base 10 is attached to the supply ports 1a and 1b, and supply pipes (not shown) of fluids A and B are connected to the base 10 to supply the fluids A and B to the respective supply ports. .

このベースプレート2の上に、各供給口1a及び1bからの流体A及びBを案内する、各流体宛1本または複数本であり(少なくとも3本以上の)、図示例で各2本の分配流路30、すなわち流体Aを通す分配流路30Aと、同様に流体Bを通す分配流路30Bを有する分配プレート3を、載置する。ここで、前記の供給口1a及び1bからの流体は、供給孔11a及び11b(図4参照)を介して、図5に示すように、分配プレート3に形成した貯留部11に導かれ、ここから各流体宛2本の分配流路30Aまたは30Bに導入される。 On the base plate 2, one or a plurality ( at least three or more) of fluids A and B for guiding the fluids A and B from the supply ports 1a and 1b are provided. The distribution plate 3 having the channel 30, that is, the distribution channel 30A through which the fluid A passes and the distribution channel 30B through which the fluid B passes similarly is placed. Here, the fluid from the supply ports 1a and 1b is led to the storage portion 11 formed in the distribution plate 3 through the supply holes 11a and 11b (see FIG. 4), as shown in FIG. To the two distribution channels 30A or 30B addressed to each fluid.

なお、分配流路30は、隣接する分配流路30A、30B間にて並列に延在する本流路33と、かかる本流路33から分岐し、対向する本流路33に向かって延在する複数本の支流路34とを具える。本流部33は、離間した流体Aの貯留部11から対向する流体Bの貯留部11側へとほぼ直線状に延び、かつ2本の同種分配流路間に異種分配流路が入り込む配置を採ることによって、4本の分配流路は異種流体の流路が交互に並ぶ配列となる。このとき、支流路34は、隣接する一方の分配流路30の支流路34の少なくとも先端部35と、他方の分配流路30の支流路34の少なくとも先端部35とが本流路33の延在方向へ交互に並ぶ配置となる。図示例では、隣接する一方の分配流路30Aの支流路34の全体と、他方の分配流路30Bの支流路34の全体とが交互に並ぶ配置となる。また、分配流路30のうち、2本の分配流路間に挟みまれている分配流路30である中央分配流路36は、それを挟む2本の分配流路30の双方に対し支流路34を有するのに対し、挟まれていない外側の分配流路30である外側分配流路37では、中央分配流路36と対向する側にのみ支流路34を有する。また、図示は省略したが、分配プレートに設けられた分配流路30が2本の場合には、2本の分配流路30は、互いに対向する側にのみ支流路34を有する。
また、図示例のように、分配流路30の本流路33及び支流路34を直線状とすることで、本流路33及び支流路34をジグザグ状や波状とする場合に比べ、流体を円滑に流すことができ、流体の迅速な混合を有利に達成することができるとともに、分配プレート3上にて分配流路30が設けられている部分の面積を小さくして、マイクロミキサ1の小型化を図ることができる。なお、図示例では、支流路34は本流路33の延在方向に対し直交する方向に延在しているが、支流路34の本流路33に対する延在方向はその他の角度範囲とすることができる。また、図示例では支流路34の先端部35は、一定の曲率を有する形状となっているが、角部を有するような、その他の形状とすることもできる。
The distribution channel 30 includes a main channel 33 extending in parallel between adjacent distribution channels 30A and 30B, and a plurality of channels branched from the main channel 33 and extending toward the opposing main channel 33. The branch flow path 34 is provided. The main flow portion 33 extends substantially linearly from the storage portion 11 of the separated fluid A to the opposing storage portion 11 side of the fluid B, and adopts an arrangement in which a different kind of distribution channel enters between the two homogeneous distribution channels. As a result, the four distribution channels are arranged in such a manner that channels of different fluids are alternately arranged. At this time, the branch channel 34 has at least the tip 35 of the branch channel 34 of the adjacent one of the distribution channels 30 and at least the tip 35 of the branch channel 34 of the other distribution channel 30 extending from the main channel 33. Arranged alternately in the direction. In the illustrated example, the entire branch channel 34 of one adjacent distribution channel 30A and the entire branch channel 34 of the other distribution channel 30B are alternately arranged. Further, of the distribution channels 30, the central distribution channel 36, which is the distribution channel 30 sandwiched between the two distribution channels, is a branch channel for both of the two distribution channels 30 sandwiching it. In contrast, the outer distribution flow path 37 that is the outer distribution flow path 30 that is not sandwiched includes the branch flow path 34 only on the side facing the central distribution flow path 36. Although not shown, when there are two distribution channels 30 provided on the distribution plate, the two distribution channels 30 have branch channels 34 only on the sides facing each other.
Further, as shown in the example, the main flow path 33 and the branch flow path 34 of the distribution flow path 30 are linear, so that the fluid can be smoothly flowed compared to the case where the main flow path 33 and the branch flow path 34 are zigzag or wavy. The flow of the fluid can be advantageously achieved, and rapid mixing of the fluid can be advantageously achieved, and the area of the distribution channel 30 provided on the distribution plate 3 can be reduced to reduce the size of the micromixer 1. Can be planned. In the illustrated example, the branch flow path 34 extends in a direction orthogonal to the extension direction of the main flow path 33, but the extension direction of the branch flow path 34 with respect to the main flow path 33 may be in another angular range. it can. In the illustrated example, the distal end portion 35 of the branch channel 34 has a shape having a certain curvature, but may have other shapes such as corner portions.

さらに、図3及び6に示すように、分配プレート3の上には、隣接する分配流路30A、30B間にある全ての支流路34を横切る方向に延在し、支流路34との交点41から流体を導く、混合流路40を有する合流プレート4を、載置する。各混合流路40は、隣接する分配流路30A及び30B間の全ての支流路34と直交する直線状であり、隣接する分配流路30A、30B間の各支流路34と各々交点41をもって交わることになる。そして、各混合流路40には、全ての支流路34との交点41を介して、流体A及びBが長手方向に交互に導入される。すなわち、流体A及びBは、多数の交点41を介して微小な区分に分割されて、各混合流路40内に供給され、ここで流体A及びBの各々が微小な流体区分間での分子の拡散により隣接区分間で相互に混合される。この分割された流体区分は、マイクロメートルからナノメートルオーダーと非常に小さいため、分子の拡散距離が短縮され、迅速な混合が行われる。また、混合流路40を直線状とすることで、混合流路40をジグザグ状や波状とする場合よりも、合流プレート4上にて混合流路40が設けられている部分の面積が小さくなるので、分配流路30の本流路33を直線状とすることと組み合わせると、マイクロミキサ1の小型化を更に図ることができる。   Further, as shown in FIGS. 3 and 6, on the distribution plate 3, it extends in a direction crossing all the branch channels 34 between the adjacent distribution channels 30 </ b> A, 30 </ b> B, and an intersection 41 with the branch channel 34. A merging plate 4 having a mixing channel 40 that guides the fluid from is placed. Each mixing channel 40 is a straight line orthogonal to all the branch channels 34 between the adjacent distribution channels 30A and 30B, and intersects each branch channel 34 between the adjacent distribution channels 30A and 30B at intersections 41, respectively. It will be. Then, the fluids A and B are alternately introduced into each mixing channel 40 in the longitudinal direction via the intersection points 41 with all the branch channels 34. That is, the fluids A and B are divided into minute sections via a large number of intersections 41 and supplied into each mixing channel 40, where each of the fluids A and B is a molecule between the minute fluid sections. Are mixed with each other between adjacent sections. Since this divided fluid section is very small, on the order of micrometers to nanometers, the diffusion distance of molecules is shortened and rapid mixing is performed. Also, by making the mixing channel 40 linear, the area of the portion where the mixing channel 40 is provided on the confluence plate 4 is smaller than when the mixing channel 40 is zigzag or corrugated. Therefore, when the main flow path 33 of the distribution flow path 30 is combined with a straight line, the micromixer 1 can be further downsized.

かような混合原理によれば、上記した分配流路30及び混合流路40の幅や深さを調整することによって、上記の流体区分の大きさを制御でき、その結果、流体の混合特性を制御することができる。また、混合流路40における流体区分の混合パターンは、例えば、図7(a)に示すような分配流路30と混合流路40の組合せを採用し、流体Aと流体Bを供給した場合に、隣接する混合流路40A及び40B(図7(b)参照)だけを抜き出し、それらを全て組み合わせて、交点41毎に導かれる流体を流体区分毎に概略的に示すと、図7(c)のような混合パターンとなる。すなわち、交点41毎に導かれる流体の微小な流体区分の周囲を異種の流体区分で囲むような混合パターンとなる。かような流体区分の混合パターンが実現されれば、流体の混合はより加速されることになる。   According to such a mixing principle, the size of the fluid section can be controlled by adjusting the width and depth of the distribution channel 30 and the mixing channel 40 described above, and as a result, the mixing characteristics of the fluid can be controlled. Can be controlled. The mixing pattern of the fluid sections in the mixing channel 40 is, for example, when a combination of the distribution channel 30 and the mixing channel 40 as shown in FIG. When only the adjacent mixing channels 40A and 40B (see FIG. 7B) are extracted, and all of them are combined, the fluid guided at each intersection 41 is schematically shown for each fluid section. The mixed pattern is as follows. That is, a mixed pattern is formed in which a small fluid section of fluid guided at each intersection 41 is surrounded by different fluid sections. If such a fluid division mixing pattern is realized, fluid mixing will be accelerated.

以上の流体A及びBの効果的な混合は、混合流路40毎に行われ、混合後の混合流体は、図8に示すようなトッププレート5に形成した貯留部50に集合、一旦貯められ、出口流路51から排出される。   The above-described effective mixing of the fluids A and B is performed for each mixing flow path 40, and the mixed fluid after mixing is collected and temporarily stored in a storage portion 50 formed in the top plate 5 as shown in FIG. And is discharged from the outlet channel 51.

また、分配流路30は3本以上であり、分配流路30のうち、2本の分配流路間に挟まれている分配流路30である中央分配流路36の本流路33の幅W1が、その他の分配流路30、すなわち挟まれていない外側の分配流路30である外側分配流路37の本流路33の幅W2よりも大きい。
外側分配流路37からは1本の混合流路40へと流体が導かれるのに対し、中央分配流路36からは2本の混合流路40へと流体が導かれる。そのことから、分配流路30の本流路33の幅が全て同一の場合には、外側分配流路37から1本の混合流路40に導かれる流体量が、中央分配流路36から1本の混合流路40に導かれる流体量よりも大きくなり、混合流路間における流体の混合比に大きな差が生じる。その結果、かかる混合比の差に起因して、流体同士を迅速に混合することができなくなる
その対策として、中央分配流路36の本流路33の幅W1を、外側分配流路37の本流路33の幅W2よりも大きくすることで、中央分配流路36の本流路33の容積を、外側分配流路37の本流路33の容積よりも大きくして、中央分配流路36に供給される流体の総量を、外側分配流路37に供給される流体の総量よりも大きくすることができる。そうすることで、中央分配流路36から混合流路401本当たりに導かれる流体量を大きくすることができるので、混合流路間における流体の混合比の差が小さくなる。その結果、上記したような流体の迅速な混合を抑制することなく、迅速な混合が可能となる。
このとき、中央分配流路36の本流路33の幅W1は、外側分配流路37の本流路33の幅W2の120〜300%の範囲にあることが好ましく、より好ましくは、150〜200%の範囲にある。中央分配流路36の本流路33の幅W1が、外側分配流路37の本流路33の幅W2の120%未満の場合には、中央分配流路36の本流路33の幅W1が小さくなり過ぎることから、中央分配流路36の本流路33の容積を充分に確保することができずに、中央分配流路36から混合流路40へと導かれる流体量を有効に確保することができない。そのことから、混合流路間における流体の混合比の差を充分に小さくすることができずに、流体を迅速に混合することができない可能性がある。一方、中央分配流路36の本流路33の幅W1が、外側分配流路37の本流路33の幅W2の300%を超える場合には、中央分配流路36の本流路33の幅W2が大きくなり過ぎて、中央分配流路36の本流路33の容積が大きくなり過ぎることから、外側分配流路37から混合流路40に導かれる流体量に対し、中央分配流路36から混合流路40に導かれる流体量が大きくなり過ぎる。その結果、混合流路間における流体の混合比に大きな差が生じ、かかる混合比の差に起因して、流体同士を迅速に混合することができない可能性がある。
Further, there are three or more distribution channels 30, and the width W 1 of the main channel 33 of the central distribution channel 36, which is the distribution channel 30 sandwiched between two distribution channels among the distribution channels 30. Is larger than the width W2 of the main flow path 33 of the other distribution flow path 30, that is, the outer distribution flow path 37 that is the outer distribution flow path 30 that is not sandwiched .
The fluid is guided from the outer distribution channel 37 to the single mixing channel 40, while the fluid is guided from the central distribution channel 36 to the two mixing channels 40. Therefore, when all the widths of the main flow path 33 of the distribution flow path 30 are the same, the amount of fluid guided from the outer distribution flow path 37 to one mixing flow path 40 is one from the central distribution flow path 36. This is larger than the amount of fluid guided to the mixing flow path 40, and a large difference occurs in the fluid mixing ratio between the mixing flow paths. As a result, fluids cannot be rapidly mixed due to the difference in the mixing ratio.
As a countermeasure, by making the width W1 of the main flow path 33 of the central distribution flow path 36 larger than the width W2 of the main flow path 33 of the outer distribution flow path 37, the volume of the main flow path 33 of the central distribution flow path 36 is increased. The total volume of the fluid supplied to the central distribution channel 36 can be made larger than the total amount of the fluid supplied to the outer distribution channel 37 by making it larger than the volume of the main channel 33 of the outer distribution channel 37. . By doing so, the amount of fluid guided from the central distribution channel 36 per 401 mixing channels can be increased, so that the difference in the fluid mixing ratio between the mixing channels is reduced. As a result, rapid mixing is possible without suppressing rapid mixing of fluids as described above.
At this time, the width W1 of the main flow path 33 of the central distribution flow path 36 is preferably in the range of 120 to 300% of the width W2 of the main flow path 33 of the outer distribution flow path 37, more preferably 150 to 200%. It is in the range. When the width W1 of the main flow path 33 of the central distribution flow path 36 is less than 120% of the width W2 of the main flow path 33 of the outer distribution flow path 37, the width W1 of the main flow path 33 of the central distribution flow path 36 is reduced. Therefore, the volume of the main flow path 33 of the central distribution flow path 36 cannot be sufficiently secured, and the amount of fluid guided from the central distribution flow path 36 to the mixing flow path 40 cannot be effectively secured. . For this reason, the difference in the mixing ratio of the fluid between the mixing channels cannot be sufficiently reduced, and the fluid may not be rapidly mixed. On the other hand, when the width W1 of the main flow path 33 of the central distribution flow path 36 exceeds 300% of the width W2 of the main flow path 33 of the outer distribution flow path 37, the width W2 of the main flow path 33 of the central distribution flow path 36 is Since the volume of the main flow path 33 of the central distribution flow path 36 becomes excessively large, the volume of the fluid guided from the outer distribution flow path 37 to the mixing flow path 40 is mixed from the central distribution flow path 36 to the mixing flow path. The amount of fluid led to 40 becomes too large. As a result, a large difference occurs in the mixing ratio of the fluid between the mixing flow paths, and there is a possibility that the fluids cannot be rapidly mixed due to the difference in the mixing ratio.

さらにまた、前記ベースプレート2、分配プレート3、合流プレート4及びトッププレート5の積層体を1つのエレメントとして、該エレメントを複数積み重ねて使用することによって、混合を複数回繰り返して更なる混合効率の向上を図ることも可能である。あるいは、上記エレメントを並列に使用し、3種以上の流体の混合を行うことも可能である。勿論、エレメント内で導入する流体数を上述の2種から3種以上にすることも可能である。   Furthermore, by using the laminated body of the base plate 2, the distribution plate 3, the merging plate 4 and the top plate 5 as one element and using a plurality of the elements stacked, the mixing is repeated a plurality of times to further improve the mixing efficiency. It is also possible to plan. Alternatively, it is possible to mix three or more fluids using the elements in parallel. Of course, it is possible to increase the number of fluids introduced in the element from two to three or more.

なお、上述したところは本発明の実施形態の一部を示したに過ぎず、本発明の趣旨を逸脱しない限り、これらの構成を交互に組み合わせたり、種々の変更を加えたりすることができる。   The above description shows only a part of the embodiment of the present invention, and these configurations can be combined alternately or various changes can be made without departing from the gist of the present invention.

次に、本発明に従うマイクロミキサ(実施例マイクロミキサ)、及び比較のため従来技術のマイクロミキサ(従来例マイクロミキサ)を夫々試作し、それらの性能評価を行ったので、以下に説明する。   Next, a micromixer according to the present invention (example micromixer) and a conventional micromixer (conventional example micromixer) were prototyped and their performance was evaluated for comparison, and will be described below.

実施例マイクロミキサ1は、図3に示すように、ベースプレート2の各供給口1a及び1bからの流体が通る、本流路(長さ:15.32mm、幅:0.18mm、深さ:5mm)及び支流路(長さ:0.3mm、幅:0.08mm、深さ:5mm、)からなる4本の分配流路30A及び30Bを有する分配プレート3と、隣接する分配流路間にある全ての支流路を横切る方向に延在する3本の混合流路40(各流路サイズ:長さ13.5mm、幅0.1mm、深さ3mm)を有する合流プレート4と、各分配流路40にて合流、混合した混合流体の貯留部50を有するトッププレート5と、の積み重ねに成る。また、出口流路51からの混合流体は、紫外可視分光光度計に混合水溶液が直接流入するように構成した。   As shown in FIG. 3, the micromixer 1 is a main channel (length: 15.32 mm, width: 0.18 mm, depth: 5 mm) through which the fluid from the supply ports 1a and 1b of the base plate 2 passes. And the distribution plate 3 having four distribution channels 30A and 30B consisting of branch channels (length: 0.3 mm, width: 0.08 mm, depth: 5 mm), and all between adjacent distribution channels Merging plate 4 having three mixing channels 40 (each channel size: length 13.5 mm, width 0.1 mm, depth 3 mm) extending in a direction crossing the branch channel, and each distribution channel 40 And a top plate 5 having a reservoir 50 of the mixed fluid that has been merged and mixed at the top. The mixed fluid from the outlet channel 51 was configured so that the mixed aqueous solution directly flows into the ultraviolet-visible spectrophotometer.

従来技術マイクロミキサ201は、図12に示すように、第1管状部材202と第2管状部材203とを対向させて設け、第1管状部材202内を通る第1流体7と、第2管状部材203内を通る第2流体8とを対流で衝突させて混合流体とした後、この混合流体9は、第3管状部材206を通って排出される構成の有する。第1管状部材202及び第2管状部材203のサイズはともに、長さ35mm、外径1.6mm及び内径0.48mmとし、第3管状部材206のサイズは、長さ50mm、外径1.6mm及び内径0.48mmとした。また、実施例マイクロミキサと同様に、出口流路からの混合流体は、紫外可視分光光度計に混合水溶液が直接流入するように構成した。   As shown in FIG. 12, the prior art micromixer 201 is provided with a first tubular member 202 and a second tubular member 203 facing each other, a first fluid 7 passing through the first tubular member 202, and a second tubular member. After the second fluid 8 passing through 203 is collided with the second fluid 8 to form a mixed fluid, the mixed fluid 9 is discharged through the third tubular member 206. Both the first tubular member 202 and the second tubular member 203 have a length of 35 mm, an outer diameter of 1.6 mm, and an inner diameter of 0.48 mm, and the third tubular member 206 has a length of 50 mm and an outer diameter of 1.6 mm. The inner diameter was 0.48 mm. Further, similarly to the example micromixer, the mixed fluid from the outlet channel was configured such that the mixed aqueous solution directly flowed into the UV-visible spectrophotometer.

これらマイクミキサを用いて、2種類の流体の混合特性を評価した。混合させた2種類の流体は、KI:KIO:HBO:2%の硫酸水溶液(流体A)、並びに1.60%KI水溶液、0.41%KIO水溶液、3.34%HBO水溶液及び0.80%NaOH水溶液を、体積比で、1:1:1:1の割合で混合した4種混合水溶液(流体B)である。これら流体を、実施例マイクロミキサ及び従来例マイクロミキサの夫々の供給口から0.5〜7.5mL/minの流量にて供給した。そして、流体Aと流体Bの混合特性を、Villermaux/Dushman反応を利用して評価した。すなわち、2種の流体を混合するとき、混合特性が良い場合には速い反応が優先的に進み、逆に混合特性が悪い場合には遅い反応も進む現象を利用して、遅い反応により生成される物質の濃度を測定することで混合特性を評価することができる。具体的には、上記流体Aと流体Bとを混合すると、酸−アルカリ中和反応あるいは混合特性が悪い場合の反応であるI生成反応が起こり、このI生成反応が起こった場合、生成したIは一部I となるが、このI は353nmの波長で吸収ピークを持つため、その吸光度を測定することで混合特性を評価した。なお、353nmの波長での吸収ピークが小さいほど、混合特性が優れていることを示している。 Using these microphone mixers, the mixing characteristics of two types of fluids were evaluated. The two fluids mixed were KI: KIO 3 : H 3 BO 3 : 2% sulfuric acid aqueous solution (fluid A), 1.60% KI aqueous solution, 0.41% KIO 3 aqueous solution, 3.34% H 3 BO 3 aqueous solution and 0.80% NaOH aqueous solution are mixed at a ratio of 1: 1: 1: 1 by volume ratio, which is a four-type mixed aqueous solution (fluid B). These fluids were supplied at a flow rate of 0.5 to 7.5 mL / min from the respective supply ports of the example micromixer and the conventional micromixer. Then, the mixing characteristics of fluid A and fluid B were evaluated using the Villermuux / Dushman reaction. That is, when two types of fluids are mixed, a fast reaction is preferentially advanced when the mixing characteristics are good, and conversely, a slow reaction is also advanced when the mixing characteristics are poor. The mixing characteristics can be evaluated by measuring the concentration of the substance. Specifically, when mixing the fluids A and B, acid - alkali neutralization reaction or mixing characteristic reactions occur at a I 2 formation reaction worse case, if this I 2 formation reaction occurred, generating The I 2 partly becomes I 3 , but this I 3 has an absorption peak at a wavelength of 353 nm, and thus its absorbance was measured to evaluate the mixing characteristics. In addition, it has shown that the mixing characteristic is excellent, so that the absorption peak in the wavelength of 353 nm is small.

その結果、実施例マイクロミキサは、従来例マイクロミキサに比べ、いずれの流速においても、353nmの波長での吸収ピークが小さく、混合特性に優れていた。   As a result, the example micromixer had a small absorption peak at a wavelength of 353 nm and excellent mixing characteristics at any flow rate compared with the conventional micromixer.

本発明によれば、小型でありながら混合効率を格段に高めることができるマイクロミキサを提供することが可能になった。かような極めて高い効率の下に混合を行うことができることから、μ−TASやマイクロ化学プラント,高速液体クロマトグラフィー用グラジエントミキサーなどの分野に有利に適合する技術である。   ADVANTAGE OF THE INVENTION According to this invention, it became possible to provide the micromixer which can improve mixing efficiency markedly though it is small. Since mixing can be performed with such extremely high efficiency, the technique is advantageously adapted to fields such as μ-TAS, a microchemical plant, and a gradient mixer for high performance liquid chromatography.

本発明に従うマイクロミキサの上面図である。It is a top view of the micromixer according to the present invention. 図1に示すマイクロミキサの側断面図である。It is a sectional side view of the micromixer shown in FIG. 図1に示すマイクロミキサの分解図である。It is an exploded view of the micromixer shown in FIG. 図1に示すマイクロミキサのベースプレートの上面図である。It is a top view of the base plate of the micromixer shown in FIG. 図1に示すマイクロミキサの分配プレートの上面図である。It is a top view of the distribution plate of the micromixer shown in FIG. 図1に示すマイクロミキサの合流プレートの上面図である。It is a top view of the confluence | merging plate of the micromixer shown in FIG. 分配流路及び混合流路の組合せを示す概略図である。It is the schematic which shows the combination of a distribution flow path and a mixing flow path. 図1に示すマイクロミキサのトッププレートの上面図である。It is a top view of the top plate of the micromixer shown in FIG. 従来例マイクロミキサを説明する概念図である。It is a conceptual diagram explaining a prior art micromixer.

符号の説明Explanation of symbols

1 マイクロミキサ
A、B 流体
1a、1b 供給口
2 ベースプレート
10 口金
3 分配プレート
30、30A、30B 分配流路
33 本流路
34 支流路
35 支流部の先端部
36 中央分配流路
37 外側分配流路
11 貯留部
40、40A、40B 混合流路
4 合流プレート
41 交点
5 トッププレート
50 貯留部
51 出口流路
1 Micromixer A, B Fluid 1a, 1b Supply port 2 Base plate 10 Base 3 Distribution plate 30, 30A, 30B Distribution flow path 33 Main flow path 34 Branch flow path 35 Branch flow path tip 36 Central distribution flow path 37 Outer distribution flow path 11 Reservoir 40, 40A, 40B Mixed channel 4 Junction plate 41 Intersection 5 Top plate 50 Reservoir 51 Exit channel

Claims (6)

流体が供給される複数の供給口を有するベースプレート、各供給口からの流体が通る、各流体宛少なくとも1本、合計で少なくとも2本の分配流路を有する分配プレート、各分配流路からの流体を合流、混合させる少なくとも1本の混合流路を有する合流プレート、及び混合された流体を貯留する貯留部を有するトッププレートを積み重ねてなるマイクロミキサにおいて、
前記分配流路は、隣接する分配流路間にて並列に延在する本流路と、該本流路から分岐し、対向する本流路に向かって延在する複数本の支流路とを具え、該支流路は、隣接する一方の分配流路の支流路の少なくとも先端部と他方の分配流路の支流路の少なくとも先端部とが交互に並ぶ配置となり、
前記混合流路は、前記隣接する分配流路間にある全ての支流路を横切る方向に延在し、各支流路との交点から流体を導くことを特徴とするマイクロミキサ。
A base plate having a plurality of supply ports to which fluid is supplied, a distribution plate having at least two distribution channels in total, at least one for each fluid through which the fluid from each supply port passes, and a fluid from each distribution channel In a micromixer formed by stacking a merging plate having at least one mixing channel for merging and mixing, and a top plate having a reservoir for storing the mixed fluid,
The distribution channel includes a main channel extending in parallel between adjacent distribution channels, and a plurality of branch channels branched from the main channel and extending toward the opposing main channel, The branch channel is an arrangement in which at least the tip of the branch channel of one adjacent distribution channel and at least the tip of the branch channel of the other distribution channel are alternately arranged,
The micromixer characterized in that the mixing channel extends in a direction crossing all the branch channels between the adjacent distribution channels, and guides a fluid from an intersection with each branch channel.
前記分配流路の本流路及び支流路は、直線状に延在してなる、請求項1に記載のマイクロミキサ。   The micromixer according to claim 1, wherein the main flow channel and the branch flow channel of the distribution flow channel extend linearly. 前記混合流路は、直線状に延在してなる、請求項1又は2に記載のマイクロミキサ。   The micromixer according to claim 1, wherein the mixing channel extends linearly. 前記分配流路が3本以上であり、該分配流路のうち、2本の分配流路間に挟まれている分配流路の本流路の幅が、その他の分配流路の本流路の幅よりも大きい、請求項1〜3のいずれか一項に記載のマイクロミキサ。   There are three or more distribution channels, and the width of the main channel of the distribution channel sandwiched between two distribution channels is the width of the main channel of the other distribution channels. The micromixer according to any one of claims 1 to 3, wherein the micromixer is larger. 前記分配流路間に挟まれている分配流路の本流路の幅は、その他の分配流路の本流路の幅の120〜300%の範囲にある、請求項4に記載のマイクロミキサ。   The micromixer according to claim 4, wherein a width of the main flow path of the distribution flow path sandwiched between the distribution flow paths is in a range of 120 to 300% of a width of the main flow path of the other distribution flow paths. 前記ベースプレート、分配プレート、合流プレート及びトッププレートを積層してなる積層体を、複数積層してなる、請求項1〜5のいずれかに記載のマイクロミキサ。   The micromixer according to any one of claims 1 to 5, wherein a plurality of laminated bodies formed by laminating the base plate, distribution plate, confluence plate, and top plate are laminated.
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