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JP2009289839A - Anti-static electricity measure material, method of manufacturing the same, and anti-static electricity measure component - Google Patents

Anti-static electricity measure material, method of manufacturing the same, and anti-static electricity measure component Download PDF

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JP2009289839A
JP2009289839A JP2008138791A JP2008138791A JP2009289839A JP 2009289839 A JP2009289839 A JP 2009289839A JP 2008138791 A JP2008138791 A JP 2008138791A JP 2008138791 A JP2008138791 A JP 2008138791A JP 2009289839 A JP2009289839 A JP 2009289839A
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static electricity
particles
insulating
insulating film
metal particles
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Masanori Nagano
将典 長野
Noriyuki Kozu
典之 神津
Akihisa Matsuda
明久 松田
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Taiyo Yuden Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an anti-static electricity measure material which has a stable electrostatic breakdown voltage and a low limited voltage, and to provide a method of manufacturing the anti-static electricity measure material, and an anti-static electricity measure component. <P>SOLUTION: The anti-static electricity measure component 10 has portions of internal electrodes 14A and 14B disposed on an insulating cover layer 12 opposite each other, and a film made of a material 16 for dealing with static electricity is provided between those internal electrodes 14A and 14B. The material 16 for dealing with static electricity has a structure such that conductive particles 18 each having an insulating film 20 formed on a surface are dispersed in an insulating resin matrix 22. The insulating film 20 is formed by performing a conversion treatment on surfaces of the metal particles 18 using an alcohol amine-based reaction accelerator. The metal particles 18 having the insulating films 20 formed on the surfaces are dispersed in the insulating resin matrix 22 to obtain the material 16 for dealing with static electricity which has the stable electrostatic breakdown voltage and low limited voltage. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、各種電子機器などに用いられる静電気対策材料とその製造方法,静電気対策部品に関するものである。   The present invention relates to an antistatic material used in various electronic devices, a manufacturing method thereof, and an antistatic component.

静電気対策用の積層バリスタでは、容量と静電気耐圧はトレードオフの関係にあり、使用上必要な静電気耐圧を保持した場合、その材料の固有誘電率により数pFが限界となり、高速伝送ラインに用いることはできない。仮に、カバー部に低誘電率の材料を使用したとしても、同水準の1pF程度の低容量化に留まる。   In multilayer varistors for static electricity countermeasures, capacitance and electrostatic withstand voltage are in a trade-off relationship. When the required electrostatic withstand voltage is maintained, a few pF is the limit due to the intrinsic dielectric constant of the material, and it should be used for high-speed transmission lines. I can't. Even if a low dielectric constant material is used for the cover portion, the capacitance is still reduced to about 1 pF.

高速伝送ラインに使用可能なほど静電容量が小さく、かつ、必要な静電気耐圧を有する静電気吸収材料として、樹脂中に導電性の粒子を分散させた低誘電率静電気吸収材料が報告されている。例えば、下記特許文献1には、絶縁バインダと、導電性粒子と、半導体粒子からなる過電圧保護ポリマー組成物が開示されている。また、下記特許文献2には、絶縁性バインダと、内部コア及び外部シェルからなる導電性粒子と、半導電性粒子とを含む電気過大応力に対する保護を与える組成物が開示されている。
特表2001−523040号公報 特開平11−317113号公報
A low dielectric constant electrostatic absorbing material in which conductive particles are dispersed in a resin has been reported as an electrostatic absorbing material having a capacitance that is small enough to be used for a high-speed transmission line and a necessary electrostatic withstand voltage. For example, Patent Document 1 below discloses an overvoltage protection polymer composition comprising an insulating binder, conductive particles, and semiconductor particles. Patent Document 2 below discloses a composition that provides protection against electrical overstress including an insulating binder, conductive particles composed of an inner core and an outer shell, and semiconductive particles.
Special table 2001-523040 gazette JP-A-11-317113

しかしながら、以上のような背景技術には次のような問題がある。まず、前記特許文献1に記載の技術では、表面が被覆されていない導電性粒子を用いることにより、該導電性粒子同士が接触している場合、それは、あたかも一つの粒子のような働きを生じ、静電気耐圧の低下を引き起こしやすくなる。このため、精密な導電性粒子分布の制御が必要になるという問題がある。また、前記特許文献2に記載の技術では、粒子全面を種々の素材で被覆しており、導電性コアと絶縁性シェルで構成される場合、その絶縁層のエネルギー障壁により、制限電圧が高くなるという問題が生じる。   However, the background art as described above has the following problems. First, in the technique described in Patent Document 1, when conductive particles whose surfaces are not coated are used, when the conductive particles are in contact with each other, it acts like a single particle. It tends to cause a decrease in electrostatic withstand voltage. For this reason, there is a problem that precise control of the conductive particle distribution is required. In the technique described in Patent Document 2, when the entire surface of the particle is coated with various materials, and is composed of a conductive core and an insulating shell, the limiting voltage is increased due to the energy barrier of the insulating layer. The problem arises.

本発明は、以上の点に着目したもので、その目的は、安定した静電気耐圧と、低い制限電圧を有する静電気対策材料とその製造方法,静電気対策部品を提供することである。   The present invention focuses on the above points, and an object of the present invention is to provide an antistatic material having a stable electrostatic withstand voltage and a low limiting voltage, a manufacturing method thereof, and an antistatic component.

前記目的を達成するため、本発明の静電気対策材料の製造方法は、反応促進剤を用いた化成処理によって金属粒子の表面に絶縁膜を形成するステップと、絶縁膜が表面に形成された前記金属粒子を硬化型の絶縁性樹脂に分散させるステップと、を有することを特徴とする。主要な形態の一つは、前記金属粒子がAl粒子であって、アルコールアミン系の反応促進剤を用いて、ベーマイト法による化成処理を行うことを特徴とする。   In order to achieve the above object, the method for producing an antistatic material of the present invention comprises a step of forming an insulating film on the surface of metal particles by chemical conversion treatment using a reaction accelerator, and the metal on which the insulating film is formed. Dispersing the particles in a curable insulating resin. One of the main forms is characterized in that the metal particles are Al particles, and a chemical conversion treatment by a boehmite method is performed using an alcoholamine-based reaction accelerator.

本発明の静電気対策材料は、反応促進剤を用いた化成処理によって、表面に絶縁膜が形成された導電性の金属粒子を、硬化型の絶縁性樹脂に分散させたことを特徴とする。主要な形態の一つは、前記金属粒子がAl粒子であって、アルコールアミン系の反応促進剤を用いたベーマイト法による化成処理により、前記絶縁膜が形成されることを特徴とする。他の形態は、前記絶縁性樹脂の硬化後の硬度が、デュロメータタイプAで20〜40°であることを特徴とする。   The antistatic material of the present invention is characterized in that conductive metal particles having an insulating film formed on the surface thereof are dispersed in a curable insulating resin by chemical conversion treatment using a reaction accelerator. One of the main forms is characterized in that the metal particles are Al particles, and the insulating film is formed by chemical conversion treatment by a boehmite method using an alcoholamine-based reaction accelerator. Another aspect is characterized in that the hardness of the insulating resin after curing is 20 to 40 ° in the durometer type A.

本発明の静電気対策部品は、基板上に所定の間隔で相対向する一対の電極を有し、該一対の電極間に、前記いずれかに記載の静電気対策材料を設けたことを特徴とする。本発明の前記及び他の目的,特徴,利点は、以下の詳細な説明及び添付図面から明瞭になろう。   The antistatic component of the present invention has a pair of electrodes opposed to each other at a predetermined interval on a substrate, and the antistatic material described above is provided between the pair of electrodes. The above and other objects, features and advantages of the present invention will become apparent from the following detailed description and the accompanying drawings.

本発明は、化成処理によって金属粒子の表面に絶縁膜を形成し、前記金属粒子を絶縁性樹脂中に分散させることとした。このため、安定した静電気耐圧が得られるとともに、低い制限電圧を有する静電気対策材料(静電気吸収材料)とそれを利用した静電気対策部品が得られるという効果がある。   In the present invention, an insulating film is formed on the surface of the metal particles by chemical conversion treatment, and the metal particles are dispersed in the insulating resin. For this reason, it is possible to obtain a stable electrostatic withstand voltage, and to obtain an antistatic material (electrostatic absorption material) having a low limiting voltage and an antistatic component using the same.

以下、本発明を実施するための最良の形態を、実施例に基づいて詳細に説明する。   Hereinafter, the best mode for carrying out the present invention will be described in detail based on examples.

最初に、図1及び図2を参照しながら本発明の実施例1を説明する。図1(A)は、本実施例の静電気対策部品の主要断面図,図1(B)は前記(A)の部分拡大部,図1(C)は前記(B)を#A−#A線に沿って切断し矢印方向に見た断面図である。図2は、本実施例の静電気対策材料の樹脂硬度とESD耐圧(静電気耐圧)及び制限電圧の関係を示す図である。図1(A)に示すように、本実施例の静電気対策部品10は、絶縁性のカバー層12上に、内部電極14A,14Bの一部が対向するように配設されており、これら内部電極14A,14Bの間には、静電気対策材料(ないしESD吸収材料)16からなる膜が設けられている。前記内部電極14A上には、他方の内部電極14Bにもかかるように保護膜24が設けられている。また、前記内部電極14A,14Bは、それぞれ外部電極26A,26Bに接続され、更に外部電極26A,26Bの外側には、Niめっき28A,28Bと、Snめっき30A,30Bが設けられている。   First, Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1A is a main cross-sectional view of the anti-static component of this embodiment, FIG. 1B is a partially enlarged portion of FIG. 1A, and FIG. It is sectional drawing cut | disconnected along the line and seeing in the arrow direction. FIG. 2 is a diagram showing the relationship between the resin hardness, ESD withstand voltage (electrostatic withstand voltage), and limit voltage of the antistatic material of this example. As shown in FIG. 1A, the antistatic component 10 of the present embodiment is disposed on an insulating cover layer 12 so that part of the internal electrodes 14A and 14B face each other. A film made of an antistatic material (or ESD absorbing material) 16 is provided between the electrodes 14A and 14B. A protective film 24 is provided on the internal electrode 14A so as to cover the other internal electrode 14B. The internal electrodes 14A and 14B are connected to external electrodes 26A and 26B, respectively, and Ni platings 28A and 28B and Sn platings 30A and 30B are provided outside the external electrodes 26A and 26B.

前記静電気対策材料16は、図1(B)に示すように、表面に絶縁膜20が形成された導電性の金属粒子18が、絶縁性樹脂マトリックス22中に分散された構造となっている。前記金属粒子18としては、例えば、Al,鉄鋼,Cu,Zn,Mg,Ni,ステンレスなどの各種の金属粒子が利用され、その形状は略球状である。また、前記絶縁性樹脂マトリックス22としては、エポキシ樹脂,シリコーン樹脂,ポリイミド樹脂等の公知の各種の硬化型の絶縁性樹脂が利用可能である。ここで、前記絶縁膜20は、前記金属粒子18の表面を化成処理することにより形成されたものであって、このような絶縁膜20が表面に形成された金属粒子18を絶縁性樹脂マトリックス22中に分散することにより、安定した静電気耐圧(ESD耐圧)を得ることができ、かつ、低い制限電圧を有する静電気対策材料16を得ることができる。   As shown in FIG. 1B, the antistatic material 16 has a structure in which conductive metal particles 18 having an insulating film 20 formed on the surface thereof are dispersed in an insulating resin matrix 22. For example, various metal particles such as Al, steel, Cu, Zn, Mg, Ni, and stainless steel are used as the metal particles 18, and the shape thereof is substantially spherical. Further, as the insulating resin matrix 22, various known curable insulating resins such as epoxy resin, silicone resin, and polyimide resin can be used. Here, the insulating film 20 is formed by subjecting the surface of the metal particles 18 to chemical conversion, and the metal particles 18 having the insulating film 20 formed on the surface thereof are converted into the insulating resin matrix 22. By dispersing in, a stable electrostatic withstand voltage (ESD withstand voltage) can be obtained, and an antistatic material 16 having a low limit voltage can be obtained.

ここで、前記金属粒子18としてAl粒子を利用した場合を例にあげて、静電気対策材料16の製造方法の一例を説明する。まず、Al粉末に純水を加え、反応促進剤としてTEA(トリエタノールアミン)を添加し、所定温度及び時間で化成処理を行う。そして、濾過,純水洗浄,メタノール置換,乾燥を経て、化成処理Al粉末を得る。すると、Al粒子の表面に、絶縁性のベーマイト層(水和酸化物層)が生成する。次に、熱処理脱水を行うと、表面のベーマイト層の結晶水が脱離して酸化物となる。この酸化物の層が絶縁膜20に相当する。この状態で、樹脂(例えば、エポキシ樹脂など)と混合して、静電気対策材料のペーストを得る。得られたペースとは、印刷などの適宜手法で樹脂基板に塗布され、熱硬化される。なお、ここでは、加熱脱水によって前記ベーマイト層(水和酸化物層)の結晶水を脱離してから樹脂と混練りしたが、加熱脱水を行わずに水和酸化物層の状態のままで混練りするようにしてもよい。この場合は、前記水和酸化物層が絶縁膜20に相当する。   Here, an example of a manufacturing method of the antistatic material 16 will be described by taking as an example a case where Al particles are used as the metal particles 18. First, pure water is added to Al powder, TEA (triethanolamine) is added as a reaction accelerator, and a chemical conversion treatment is performed at a predetermined temperature and time. And a chemical conversion treatment Al powder is obtained through filtration, pure water washing | cleaning, methanol substitution, and drying. Then, an insulating boehmite layer (hydrated oxide layer) is generated on the surface of the Al particles. Next, when heat treatment dehydration is performed, crystal water in the boehmite layer on the surface is desorbed to become an oxide. This oxide layer corresponds to the insulating film 20. In this state, it is mixed with a resin (for example, epoxy resin) to obtain a paste of antistatic material. The obtained pace is applied to the resin substrate by an appropriate technique such as printing and is thermally cured. Here, although the crystal water of the boehmite layer (hydrated oxide layer) was removed by heat dehydration and then kneaded with the resin, it was mixed in the state of the hydrated oxide layer without performing heat dehydration. You may make it knead. In this case, the hydrated oxide layer corresponds to the insulating film 20.

従来の気中酸化(大気中ないし酸素リッチ中)による膜形成手法で得られた絶縁膜の場合、nmオーダーの厚みしか得られないが、本実施例のように、アルコールアミン系の反応促進剤を用いて化成処理で形成した絶縁膜20は、μmオーダーの厚みで均一な膜となる。前記絶縁膜20の厚み,構造,緻密性は、処理液,温度,時間などの化成処理条件により任意に制御が可能である。   In the case of an insulating film obtained by a conventional film formation method by air oxidation (in the air or in oxygen-rich), only an nm order thickness can be obtained. However, as in this example, an alcoholamine-based reaction accelerator The insulating film 20 formed by chemical conversion treatment using a film becomes a uniform film with a thickness on the order of μm. The thickness, structure, and denseness of the insulating film 20 can be arbitrarily controlled by chemical conversion treatment conditions such as treatment liquid, temperature, and time.

以上のようにして得られた静電気対策材料16では、金属粒子18の導電部が、前記絶縁膜20で遮蔽され、隣接する金属粒子18の導電部と接触することがないため、精密な分散制御を行うことなく、安定した静電気耐圧を発現する。また、絶縁膜20の厚み,構造,緻密性を任意に制御可能であるため、所望の粒子間距離,粒子導電部間エネルギー障壁を選択でき、任意の静電気耐圧,制限電圧の設計が可能である。なお、絶縁膜20の構造は緻密であることが望ましい。   In the antistatic material 16 obtained as described above, the conductive portion of the metal particle 18 is shielded by the insulating film 20 and does not come into contact with the conductive portion of the adjacent metal particle 18, so that precise dispersion control is performed. Stable electrostatic withstand voltage is developed without performing. Further, since the thickness, structure, and denseness of the insulating film 20 can be arbitrarily controlled, a desired interparticle distance and energy barrier between particle conductive portions can be selected, and an arbitrary electrostatic withstand voltage and limit voltage can be designed. . It is desirable that the insulating film 20 has a dense structure.

図2には、前記絶縁性樹脂マトリックス22の硬化後の樹脂硬度と、ESD耐圧(静電気耐圧)及び制限電圧の関係が示されており、その結果をまとめたものが、以下の表1に示されている。図2は、横軸が樹脂硬度[°],縦軸左側がESD耐圧[kV],縦軸右側が制限電圧[V](8kV)を表している。なお、樹脂硬度は、デュロメータ(タイプA)を用いた場合の結果である。これら図2及び表1に示すように、硬化後の樹脂硬度が、デュロメータ(タイプA)で20〜40°であれば、30kV以上の安定したESD耐圧と、低い制限電圧が得られることがわかる。

Figure 2009289839
FIG. 2 shows the relationship between the resin hardness after curing of the insulating resin matrix 22, the ESD withstand voltage (electrostatic withstand voltage), and the limiting voltage. The results are summarized in Table 1 below. Has been. In FIG. 2, the horizontal axis represents the resin hardness [°], the left vertical axis represents the ESD withstand voltage [kV], and the right vertical axis represents the limit voltage [V] (8 kV). In addition, resin hardness is a result at the time of using a durometer (type A). As shown in FIG. 2 and Table 1, when the resin hardness after curing is 20 to 40 ° with a durometer (type A), it can be seen that a stable ESD withstand voltage of 30 kV or more and a low limiting voltage can be obtained. .
Figure 2009289839

また、以下の表2には、Al粒子径,水和膜(絶縁膜)の厚み及び緻密度,絶縁性樹脂マトリックス22の種類,Al粒子と絶縁性樹脂の配合比,未被覆導電性粒子の添加量,絶縁粒子の添加量を変えた場合の制限電圧[V](8kV)と、ESD耐圧[kV]の測定結果が示されている。前記未被覆導電性粒子は、表面が絶縁被覆されていない導電性の粒子であり、絶縁膜20が形成された粒子同士の接触頻度向上のために添加したものである。また、前記絶縁粒子は、ペーストのレオロジー(粘性)調整のために一般的に添加されるものである。この結果から、絶縁膜20の厚み,構造,緻密性などを制御することにより、所望の粒子間距離,粒子間導電部間エネルギー障壁を選択して、任意のESD耐圧,制限電圧の設計が可能であることが分かる。

Figure 2009289839
Table 2 below shows the Al particle diameter, the thickness and density of the hydrated film (insulating film), the type of the insulating resin matrix 22, the blending ratio of the Al particles and the insulating resin, and the uncoated conductive particles. The measurement results of the limiting voltage [V] (8 kV) and the ESD withstand voltage [kV] when the addition amount and the addition amount of the insulating particles are changed are shown. The uncoated conductive particles are conductive particles whose surfaces are not insulated and are added to improve the contact frequency between the particles on which the insulating film 20 is formed. The insulating particles are generally added to adjust the rheology (viscosity) of the paste. From this result, by controlling the thickness, structure, denseness, etc. of the insulating film 20, it is possible to select a desired interparticle distance and energy barrier between conductive parts between particles and to design an arbitrary ESD withstand voltage and limiting voltage. It turns out that it is.
Figure 2009289839

このように、実施例1によれば、導電性の金属粒子18の表面に、化成処理によって所望の厚み,構造,緻密性の絶縁膜20を形成し、前記金属粒子18を絶縁性樹脂マトリックス22中に分散させることとした。このため、安定した静電気耐圧(ESD耐圧)が得られるとともに、低い制限電圧を有する静電気対策材料16と、それを利用した静電気対策部品10が得られるという効果がある。   As described above, according to Example 1, the insulating film 20 having a desired thickness, structure, and density is formed on the surface of the conductive metal particles 18 by chemical conversion treatment, and the metal particles 18 are formed into the insulating resin matrix 22. It was decided to be dispersed inside. For this reason, it is possible to obtain a stable electrostatic withstand voltage (ESD withstand voltage), an antistatic material 16 having a low limiting voltage, and an antistatic component 10 using the same.

なお、本発明は、上述した実施例に限定されるものではなく、本発明の要旨を逸脱しない範囲内において種々変更を加え得ることができる。例えば、以下のものも含まれる。
(1)前記実施例で示した形状,寸法,材料は一例であり、必要に応じて適宜変更してよい。例えば、前記実施例で示したAl粒子とトリエタノールアミンも一例であり、Zn粒子とアルコールアミン系の反応促進剤の組み合わせでもよいし、鉄系粒子を燐酸を用いて化成処理してもよい。むろん、これらも一例であり、同様の効果を奏するものであれば、他の公知の各種の金属粒子と反応促進剤の組み合わせとしてよい。
In addition, this invention is not limited to the Example mentioned above, A various change can be added in the range which does not deviate from the summary of this invention. For example, the following are also included.
(1) The shape, dimensions, and materials shown in the above-described embodiments are examples, and may be appropriately changed as necessary. For example, the Al particles and triethanolamine shown in the above examples are also examples, and a combination of Zn particles and an alcoholamine-based reaction accelerator may be used, or iron-based particles may be subjected to chemical conversion treatment using phosphoric acid. Of course, these are also examples, and other known metal particles and reaction accelerators may be combined as long as the same effects can be obtained.

(2)前記実施例で示した静電気対策部品10も一例であり、必要に応じて適宜設計変更してよい。例えば、図3(A)に示す静電気対策部品10Aは、カバー層12上に、内部電極14Aと14Bの端部が所定の隙間をあけて向き合うように配置されており、前記隙間を埋めるように、前記静電気対策材料16が設けられている。また、図3(B)に示す静電気対策部品10Bは、内部電極14A〜14Dを所定の間隔で積層し、それらの間に前記静電気対策材料16を設けた構造となっており、前記内部電極14Aの上面と、内部電極14Dの底面が、カバー層12A,12Bで覆われた構造となっている。むろん、これらの例に限定されるものではなく、相対向する電極間に前記静電気対策材料16を設けたものであればよい。   (2) The static electricity countermeasure component 10 shown in the above embodiment is also an example, and the design may be changed as needed. For example, the anti-static component 10A shown in FIG. 3A is arranged on the cover layer 12 so that the end portions of the internal electrodes 14A and 14B face each other with a predetermined gap, and fill the gap. The antistatic material 16 is provided. 3B has a structure in which internal electrodes 14A to 14D are stacked at a predetermined interval, and the antistatic material 16 is provided between them, and the internal electrode 14A. And the bottom surface of the internal electrode 14D are covered with the cover layers 12A and 12B. Of course, it is not limited to these examples, What is necessary is just to provide the said antistatic material 16 between the electrodes which oppose.

(3)絶縁膜20を表面に設けた金属粒子18のほかに、表面に絶縁膜を形成しない導電性粒子(金属粒子)や、絶縁性粒子,半導体粒子を、絶縁性樹脂マトリックス22中に添加し、絶縁膜20が形成された粒子同士の接触頻度の向上を図ったり、粘性調整を行ったりしてもよい。   (3) In addition to the metal particles 18 provided with the insulating film 20 on the surface, conductive particles (metal particles) that do not form an insulating film on the surface, insulating particles, and semiconductor particles are added to the insulating resin matrix 22. The contact frequency between the particles on which the insulating film 20 is formed may be improved, or the viscosity may be adjusted.

(4)前記実施例では、絶縁膜20の厚み,構造,緻密性などを制御することにより、所望の粒子間距離,粒子導電部間エネルギー障壁を選択して、任意のESD耐圧,制限電圧の設計を行うこととしたが、これに加えて、分散粒子径,分散粒子表面被覆有無,分散粒子/樹脂配合比,電極形状,導電性粒子や絶縁性粒子の添加の有無によって、所望の電気特性の制御を図るようにしてよい。   (4) In the above-described embodiment, by controlling the thickness, structure, denseness, etc. of the insulating film 20, a desired interparticle distance and energy barrier between particle conductive portions are selected, and an arbitrary ESD withstand voltage and limit voltage can be selected. In addition to this, the desired electrical characteristics depend on the dispersed particle size, dispersion particle surface coating presence / absence, dispersion particle / resin blending ratio, electrode shape, and presence / absence of addition of conductive particles or insulating particles. It is possible to control this.

(5)本発明の静電気対策材料は、単品又は多連の静電気対策部品,コンデンサ,インダクタ,抵抗などの各材料との複合電子部品(例えば、静電気対策機能付EMIフィルターアレイなど)への応用が可能である。また、樹脂基板への埋め込みにより、静電気対策機能付樹脂基板もしくはモジュールとしての応用も可能である。   (5) The antistatic material of the present invention can be applied to single or multiple antistatic components, composite electronic components such as capacitors, inductors and resistors (for example, EMI filter arrays with antistatic functions). Is possible. Further, by embedding in a resin substrate, application as a resin substrate or a module with an anti-static function is also possible.

本発明によれば、金属粒子の表面に、化成処理によって所望の厚み,構造,緻密性の絶縁膜を形成し、前記金属粒子を絶縁性樹脂中に分散させることにより、安定した静電気耐圧と低い制限電圧を得ることとしたので、電気機器を静電気より保護する静電気対策材料及び静電気対策部品の用途に適用できる。   According to the present invention, an insulating film having a desired thickness, structure, and density is formed on the surface of metal particles by chemical conversion treatment, and the metal particles are dispersed in the insulating resin, so that stable electrostatic withstand voltage and low Since the voltage limit is obtained, it can be applied to the use of antistatic materials and antistatic components that protect electrical equipment from static electricity.

本発明の実施例1を示す図であり、(A)は静電気対策部品の主要断面図,(B)は前記(A)の部分拡大図,(C)は前記(B)を#A−#A線に沿って切断し、矢印方向に見た断面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows Example 1 of this invention, (A) is principal sectional drawing of an antistatic component, (B) is the elements on larger scale of said (A), (C) is said (B) # A- # It is sectional drawing cut | disconnected along A line and seeing in the arrow direction. 前記実施例1の静電気対策材料の樹脂硬度とESD耐圧及び制限電圧の関係を示す図である。It is a figure which shows the relationship between the resin hardness of the antistatic material of the said Example 1, ESD withstand pressure | voltage, and a limiting voltage. 本発明の他の実施例を示す主要断面図である。It is principal sectional drawing which shows the other Example of this invention.

符号の説明Explanation of symbols

10,10A,10B:静電気対策部品
12,12A,12B:カバー層
14A〜14D:内部電極
16:静電気対策材料(ESD吸収材料)
18:金属粒子
20:絶縁膜
22:絶縁性樹脂マトリックス
24:保護膜
26A,26B:外部電極
28A,28B:Niめっき
30A,30B:Snめっき
10, 10A, 10B: Antistatic components 12, 12A, 12B: Cover layers 14A to 14D: Internal electrodes 16: Antistatic material (ESD absorbing material)
18: Metal particle 20: Insulating film 22: Insulating resin matrix 24: Protective film 26A, 26B: External electrodes 28A, 28B: Ni plating 30A, 30B: Sn plating

Claims (6)

反応促進剤を用いた化成処理によって金属粒子の表面に絶縁膜を形成するステップと、
絶縁膜が表面に形成された前記金属粒子を硬化型の絶縁性樹脂に分散させるステップと、
を有することを特徴とする静電気対策材料の製造方法。
Forming an insulating film on the surface of the metal particles by chemical conversion treatment using a reaction accelerator;
Dispersing the metal particles having an insulating film formed on the surface thereof in a curable insulating resin;
A method for producing an anti-static material, characterized by comprising:
前記金属粒子がAl粒子であって、アルコールアミン系の反応促進剤を用いて、ベーマイト法による化成処理を行うことを特徴とする請求項1記載の静電気対策材料の製造方法。   The method for producing an antistatic material according to claim 1, wherein the metal particles are Al particles, and a chemical conversion treatment by a boehmite method is performed using an alcoholamine-based reaction accelerator. 反応促進剤を用いた化成処理によって、表面に絶縁膜が形成された金属粒子を、硬化型の絶縁性樹脂に分散させたことを特徴とする静電気対策材料。   An anti-static material, wherein metal particles having an insulating film formed on a surface are dispersed in a curable insulating resin by chemical conversion treatment using a reaction accelerator. 前記金属粒子がAl粒子であって、アルコールアミン系の反応促進剤を用いたベーマイト法による化成処理により、前記絶縁膜が形成されることを特徴とする請求項3記載の静電気対策材料。   4. The antistatic material according to claim 3, wherein the metal particles are Al particles, and the insulating film is formed by chemical conversion treatment by a boehmite method using an alcoholamine-based reaction accelerator. 前記絶縁性樹脂の硬化後の硬度が、デュロメータタイプAで20〜40°であることを特徴とする請求項3又は4記載の静電気対策材料。   The antistatic material according to claim 3 or 4, wherein the hardness of the insulating resin after curing is 20 to 40 ° in durometer type A. 基板上に所定の間隔で相対向する一対の電極を有し、該一対の電極間に、請求項3〜5のいずれかに記載の静電気対策材料を設けたことを特徴とする請求項3〜5のいずれかに記載の静電気対策部品。   A pair of electrodes facing each other at a predetermined interval are provided on a substrate, and the antistatic material according to any one of claims 3 to 5 is provided between the pair of electrodes. The antistatic component as described in any one of 5 above.
JP2008138791A 2008-05-27 2008-05-27 Anti-static electricity measure material, method of manufacturing the same, and anti-static electricity measure component Withdrawn JP2009289839A (en)

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Cited By (3)

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JP2011204443A (en) * 2010-03-25 2011-10-13 Tdk Corp Electrostatic countermeasure element
WO2013011821A1 (en) * 2011-07-15 2013-01-24 株式会社村田製作所 Esd protection device and method for producing same
WO2014034435A1 (en) * 2012-08-26 2014-03-06 株式会社村田製作所 Esd protection device and method for producing same

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011204443A (en) * 2010-03-25 2011-10-13 Tdk Corp Electrostatic countermeasure element
WO2013011821A1 (en) * 2011-07-15 2013-01-24 株式会社村田製作所 Esd protection device and method for producing same
CN103650267A (en) * 2011-07-15 2014-03-19 株式会社村田制作所 ESD protection device and method for producing same
CN103650267B (en) * 2011-07-15 2015-09-02 株式会社村田制作所 Esd protection device and manufacture method thereof
US9386673B2 (en) 2011-07-15 2016-07-05 Murata Manufacturing Co., Ltd. ESD protection device and method for producing same
WO2014034435A1 (en) * 2012-08-26 2014-03-06 株式会社村田製作所 Esd protection device and method for producing same
CN104584344A (en) * 2012-08-26 2015-04-29 株式会社村田制作所 ESD protection device and manufacturing method thereof
US9466970B2 (en) 2012-08-26 2016-10-11 Murata Manufacturing Co., Ltd. ESD protection device and method for manufacturing the same
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