JP2009270752A - Local clean tunnel - Google Patents

Abstract

【Task】
The local clean region is configured by simple means, and the formation of various types of local clean regions is facilitated.
[Solution]
The local clean tunnel 20 is arranged in a clean room and can accommodate the production facility 13. The clean air source 11, the elastic flow path member 12 connected to the clean air source and having a large number of small holes 12 b, and the clean air flowing out from the small holes of the elastic flow path member are discharged from the local clean tunnel to the outside. And a resin curtain 15 for preventing leakage. The distance h between the lower end of the curtain and the floor where the production equipment is installed is adjustable.
[Selection] Figure 1

Description

  The present invention relates to a local clean tunnel used for further cleaning the inside of a clean room where a production line is installed.

  A conventional example relating to local cleaning is described in Patent Document 1. In the clean room described in this publication, a self-propelled partition unit is placed around the local clean area in order to easily and quickly build a local clean area having a necessary degree of cleanness in a necessary area in the clean room. Provided. Therefore, a transport rail is provided in a lattice shape in the clean room, and a self-propelled fan filter unit (hereinafter referred to as FFU) is freely moved along the transport rail so that it can be placed in any area in the clean room. The local clean region where the degree of cleanliness can be obtained is formed.

Another conventional example regarding local cleaning is described in Patent Document 2. In the local clean room described in this publication, it is easy to adjust the atmospheric pressure in the room, and in order to maintain a clean environment without greatly increasing the amount of air blown, a large number of openings can be adjusted on the floor surface on the exhaust side. The opening is formed.
JP 2006-2972 A JP 2004-165331 A

  In the local clean room described in Patent Document 1, it is possible to surely form a region with a high degree of cleanness at a desired position in a short time. However, in order to form a local clean room, a rail must be arranged on the floor surface, and a space in which the self-propelled FFU can travel along the rail has to be secured, resulting in a large apparatus. At the same time, it is necessary to make the clean room large enough to afford.

  In the clean room described in Patent Document 2, since the opening ratio of the so-called grating floor is changed, a special means for changing the opening ratio is required and the air flow changes. It is necessary to respond to changes in

  The present invention has been made in view of the above-mentioned problems of the prior art, and an object thereof is to make it easy to form a local clean region of various shapes while configuring the local clean region with simple means. Another object of the present invention is to save labor and reduce the cost of construction for forming a local clean region.

  A feature of the present invention that achieves the above object is that in a local clean tunnel that is disposed in a clean room and can accommodate production equipment, a clean air source and an elastic flow path that is connected to the clean air source and has many small holes formed therein. A floor having a member and a resin curtain for preventing clean air flowing out from a small hole of the elastic flow path member from leaking out of the local clean tunnel, and a lower end of the curtain and a production facility installed The curtain is configured so that the distance between the surfaces can be adjusted.

  In this feature, an R-type unit panel covering the elastic flow path member is provided, and an outer wall surface of the clean tunnel is formed by connecting a lower end portion of the R-type unit panel and an upper end portion of the curtain. A punching plate on which a plurality of holes are formed may be placed in the clean tunnel.

  Further, in the above feature, a plurality of elastic flow path members are arranged in a semicircular shape, adjacent elastic flow path members are connected by the cylindrical surface portion, and the upper end portion of the curtain is connected to the elastic flow path member located at the end. In addition, a large number of small holes may be formed at intervals on the inner peripheral surface side of each elastic flow path member so that a down flow from the clean air source to the production facility can be formed.

  According to the present invention, in order to form the local clean region, the flow path for downflow is formed by the duct having a large number of holes in the outer peripheral portion, so that the local clean region can be configured by simple means. In addition, local clean regions having various shapes can be easily formed. Furthermore, labor saving and cost reduction of construction for forming a local clean region can be achieved.

  Several embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of an embodiment of a local clean tunnel 20 according to the present invention. FIG. 3 is a longitudinal sectional view showing an example of the clean room 1 having the local clean tunnel 20 shown in FIG.

  The clean room 1 has a double chamber structure, and a space 3 for housing production equipment 13 used for manufacturing semiconductors and the like is partitioned by an inner wall 2. The ceiling of the space 3 is covered with a ceiling surface 4. Fan filter units (FFU) 9 are arranged at a plurality of positions on the upper surface of the ceiling surface 4 at intervals, and clean air is supplied downward (A) from the outside of the space 3 into the space 3. On the floor surface of the space 3, a grating floor 6 having a plurality of through holes formed in a slit shape is disposed. The flow that flows into the space 3 from the FFU 9 as a down flow is exhausted out of the space 3 through the slit-like holes of the grating floor 6.

  Here, an underfloor chamber 7 is formed between the grating floor 6 in the space 3 and the bottom surface of the clean room 1, and a return space 8 is formed between the side wall and the inner wall 2 of the clean room 1. The air flow (B) that has passed through the groove is a flow that flows through the return space 8 to the upper portion of the clean room 1.

  Since the ceiling chamber 5 is also formed between the outer ceiling surface and the ceiling surface 4 of the clean room 1, the air that has passed through the return space 8 flows laterally through the ceiling chamber 5, and dust is removed again by the FFU 9. Then, it is supplied to the space as a downflow (A) of clean air. Thereafter, the air continues to circulate.

  In the clean room 1, a number of production facilities 13 are arranged, and each production facility 13 has a predetermined cleanliness (cleanness). In order to achieve the cleanliness of these production facilities 13, the production facilities 13 are accommodated in the clean tunnel 20 so that the set cleanliness is achieved by a single unit or several production facilities 13. In FIG. 1, a clean tunnel 20 is arranged for each production facility 13.

  The clean tunnel 20 has a semicircular cross section so as to cover the production facility 13, and a curtain 15 whose length can be adjusted is connected to the semicircular portion 10. The curtain 15 uses a commercially available film such as vinyl, nylon, or polyethylene. The upper semi-circular portion 10 is formed into a dome shape by pressurizing an R-type unit panel that covers both sides to form a hermetically sealed shell or a shell-like resin film that covers both sides with a flexible resin film. ing. As the resin film, like the curtain 15, a film that is widely available on the market such as vinyl, nylon, or polyethylene is used. If these resin films are used, both the curtain 15 and the semicircular portion 10 can be constructed at low cost.

  A rectangular punching plate 14 in which a large number of small holes 14b are arranged in a lattice pattern or a staggered pattern is disposed in the upper portion of the dome-shaped clean tunnel 20. A resin spiral duct 12 is placed on the punching plate 14. A large number of small holes 12b are formed on the cylindrical surface of the spiral duct 12 at substantially the same pitch. The spiral duct 12 is connected to a clean air source 11 that generates clean air via a flexible connecting channel 11b that is flexible.

  The clean air source 11 may be an FFU, and is preferably disposed at a position that does not interfere with the movement of the production apparatus 13. Therefore, it is not always necessary to dispose in the vicinity of the production apparatus 13. When the clean air source 11 must be arranged away from the production equipment 13, it is effective that the connecting channel 11b is elastic and flexible, and the connecting flow 11b can be used even in a slight gap. This makes it easier to route.

  The curtain 15 has its end wound around a mandrel 16, and the distance h between the grating floor 6 and the curtain 15 end can be adjusted by adjusting the winding angle of the curtain 15 end. Here, the distance h is determined as follows. The pressure outside the clean tunnel 20 is governed by the downflow (A) from the FFU 9 provided on the ceiling surface 4. Therefore, the pressure in the clean tunnel 20 is set higher than the ambient pressure so that air containing dust does not flow into the clean tunnel 20 from the outside. On the other hand, since the clean air supply source 11 supplied to the clean tunnel 20 uses FFU or the like, its output is approximately constant. Therefore, the resistance in the discharge port through which clean air is discharged from the clean tunnel 20 is changed to change the pressure in the clean tunnel 20.

  The clean air that has flowed into the clean tunnel 20 flows out into the clean room through the gap h between the end of the curtain 15 and the grating floor 6, so that the outside air must be changed into the clean tunnel 20 by changing the gap h. Do not flow into. In order to form this differential pressure, it is experimentally obtained by changing the gap h in advance, or is predicted by simulation, or a pressure gauge or an anemometer is disposed in the clean tunnel 20 and the pressure due to the change in the gap h is set. Or measure changes in flow velocity. The pressure and flow velocity of the clean tunnel 20 are controlled by any one of these methods to prevent intrusion of air from the outside of the clean tunnel 20.

  Another embodiment of the present invention will be described with reference to FIG. FIG. 2 is a perspective view of another embodiment of the clean tunnel 20. In the embodiment shown in FIG. 1, the clean tunnel 20 and the clean air supply portion are formed by the semicircular portion 10 such as the R-type unit panel, the spiral duct 12, and the punching plate 14. However, in this embodiment, a large number of tubes are used. The duct 12d is connected and arranged in a semicircular shape, and the resin film curtain 15 is connected to the tube duct 12d located at the end. The tube duct 12d is easy to handle if it is made of resin. In the tube duct 12d, small holes 12f are formed at substantially equal pitches in the axial direction. The small hole 12f is formed on the inner diameter side of the semicircular portion, and the down flow (C) is supplied to the production facility 13 through the small hole 12f. Other configurations are the same as those of the clean tunnel 20 shown in FIG. Also in the present embodiment, the distance h between the curtain 15 and the grating floor 6 is adjusted to facilitate the supply of clean air to the production facility 13 and to remove dust from the clean tunnel 20 into the clean tunnel 20. It is possible to prevent air containing air from flowing in.

It is a perspective view of one Example of the local clean tunnel which concerns on this invention. It is a perspective view of other examples of a local clean tunnel concerning the present invention. It is front sectional drawing of the clean room which has a local clean tunnel.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Clean room, 2 ... Inner wall, 3 ... Space, 4 ... Ceiling surface, 5 ... Ceiling chamber, 6 ... Grating floor, 7 ... Underfloor chamber, 8 ... Return space, 9 ... Fan filter unit (FFU), 10 ... Semicircle 11: Clean air source, 11 b ... Connection flow path, 12 ... Elastic flow path member (spiral duct), 12 b ... Small hole, 12 d ... Elastic flow path member (tube duct), 12 f ... Small hole, 13 ... Production equipment 14 ... punching plate, 14b ... small hole, 15 ... curtain, 16 ... mandrel, 20 ... local clean tunnel.

Claims (3)

  In a local clean tunnel that is placed in a clean room and can accommodate production equipment, a clean air source, an elastic channel member that is connected to the clean air source and has a large number of small holes, and a small hole in the elastic channel member It has a resin curtain that prevents leaked clean air from leaking outside from the local clean tunnel, and the distance between the lower end of the curtain and the floor on which the production equipment is installed can be adjusted. A local clean tunnel characterized by comprising the curtain as described above.   An R-type unit panel that covers the elastic channel member is formed, an outer wall surface of a clean tunnel is formed by connecting a lower end portion of the R-type unit panel and an upper end portion of the curtain, and the elastic channel member is mounted. The local clean room according to claim 1, wherein a punching plate having a plurality of holes formed therein is disposed in the clean tunnel.   A large number of the elastic flow path members are arranged in a semicircular shape, adjacent elastic flow path members are connected at their cylindrical surface portions, the upper end portion of the curtain is connected to the elastic flow path member located at the end, and 2. The down flow from the clean air source to the production facility can be formed by forming a large number of small holes at intervals on the inner peripheral surface side of each elastic flow path member. Local clean room.

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