JP2009260054A - Resin sealing apparatus and resin sealing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To exactly make a pressure abnormal determination on a resin sealing by a simple method even in a region where a pressure change is large. <P>SOLUTION: A resin sealing apparatus 22 for sealing a substrate K arranged in a cavity 42 with resin includes: a memory 72 for memorizing a pressure waveform Ps used as a standard; a pressure sensor 70 for detecting a real pressure of the resin in the cavity 42; an operation part 74 for setting up an allowable range of the real pressure based on a standard pressure wave form Ps; and a comparison determination part 78 for making an abnormal determination when the real pressure exceeds the allowable range, wherein the allowable range at a specific time point T is set up based on pressure values at other than the specific time point T on a time base in the standard pressure waveform Ps. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a technical field of resin molding in which a resin is molded into a predetermined shape while applying pressure to the resin.

  Conventionally, a so-called “transfer method” in which a substrate (molded product) on which a semiconductor chip is mounted is placed in a cavity and molten resin is poured into the cavity by applying pressure from the outside of the cavity and sealed. Resin sealing devices are widely used.

  Also, in recent years, a substrate and a resin are disposed in a cavity formed between an upper mold and a lower mold that are disposed to face each other, and the substrate is sealed by compressing the resin disposed in this state. A resin sealing device called “compression method” has also been developed.

  In any case, the information on how the pressure of the resin sealed in the cavity changes with the progress of the sealing work is whether or not the sealing work is proceeding normally. It is considered that it becomes an important judgment material for judging.

  When it is attempted to determine the normality / abnormality of the sealing work by monitoring the pressure characteristics, for example, the technology related to the “apparatus operating state monitoring device” described in Patent Document 1 is used to determine whether the resin sealing is abnormal. It can be applied to. This operating state monitoring device digitizes a state signal representing a processing state of a device and sequentially inputs the state signal, and a waveform of a state in which the processing of the state signal is normal by using an input activation signal as a trigger. Reference waveform storage means for storing as a reference signal (standard characteristic), and state waveform comparison means for sequentially comparing the waveform of the state signal and the waveform of the reference signal using the input activation signal as a trigger. It is a feature.

  When applying the technology related to this device to abnormality determination of resin sealing, specifically, the pressure characteristics when sealing is performed normally are stored in advance as standard pressure in the device, and the acquisition of the characteristics is started. While maintaining a common measurement environment, for example, starting from the start of filling (start trigger), the actual pressure was compared with the stored standard pressure, and the degree of deviation between the two exceeded a predetermined threshold. It is understood that it will be judged as abnormal.

Japanese Patent Laid-Open No. 06-341931

  However, since the actual pressure of the resin during the sealing operation is constantly changing with the influence of various factors with time, this determination is not always easy in practice.

  In particular, in a transfer type resin sealing device, the actual pressure in the cavity is such as resin filling speed, temperature (viscosity), flow resistance (dimension runner, gate, cavity, etc. dimensions and shape), etc. It is highly influenced and changes very complexly.

  In addition, since the increase gradient of the actual pressure changes with time, it is a great obstacle that the influence of the deviation in the time axis direction between the start trigger of the standard pressure and the actual pressure is not uniform. For example, as shown in FIG. 8, it is assumed that a certain margin (allowable pressure σh) is given to the standard pressure Ps. In this case, a time zone in which the pressure change is small (for example, in the vicinity of the time T1) is not particularly problematic. However, in a time zone in which the pressure change is large (for example, in the vicinity of the time T2), even if the same allowable pressure σh is given, the activation trigger However, there is a risk that it will be judged as abnormal if it is slightly shifted in the time axis direction.

  In the case of the compression type resin sealing device, although the fluctuation factor itself is small, the effect of the deviation of the start trigger between the standard pressure and the actual pressure is rather than the case of the transfer method because of the steep rise of the actual pressure. In a large region where the pressure change is large, a slight deviation of the start trigger may cause a large pressure divergence and induce an erroneous determination.

  The present invention has been made in consideration of such circumstances, and is intended to enable accurate determination of resin sealing pressure abnormality by a simple method even in a region where the pressure change is large. It is an issue.

  The present invention is a resin sealing device for sealing a molded article placed in a cavity with a resin, which stores a standard pressure waveform and an actual pressure of the resin in the cavity. A means for detecting, a means for setting an allowable range of the actual pressure based on the standard pressure waveform, and a comparison / determination means for determining an abnormality when the actual pressure exceeds the allowable range. The above-described problem is solved by the fact that the permissible range at the point of time is based on pressure values other than the specific point on the time axis in the standard pressure waveform.

  That is, in setting the allowable range, instead of simply giving a constant margin to the standard pressure waveform (that is, giving a constant margin based only on the pressure value at a specific time point), Based on the pressure values at other points in time, a more appropriate allowable range can be set.

  Specifically, for example, the allowable range is set to be a range in which the standard pressure waveform is slid back and forth for a predetermined time. The permissible range set by such a method is a relatively small permissible range in a region where the pressure change is small, while it is a relatively large permissible range in a region where the pressure change is large. In other words, strict pressure control is possible in the area where the pressure change is small at the original standard pressure, and at the same time, the allowance is given a little margin in the area where the pressure change is large at the original standard pressure. Even if there is a slight shift in the time axis direction in the “superposition”, it is possible to effectively prevent frequent erroneous determinations. Furthermore, the setting of the permissible range here is very simple because it can be set by moving it back and forth for a predetermined time based on the standard pressure waveform.

  Here, when the standard pressure waveform is a waveform that repeatedly rises and falls, that is, when the standard pressure waveform has a descending gradient, the standard pressure waveform is slid forward by a predetermined time with respect to the standard pressure waveform. When the waveform is a phase advance pressure waveform, and the waveform slid after a predetermined time with respect to the standard pressure waveform is a phase delay pressure waveform, the pressure value of the phase advance pressure waveform is the pressure of the standard pressure waveform. It is possible to prevent erroneous determination in advance by not performing abnormality determination in a region where the pressure value of the phase lag pressure waveform is equal to or greater than the pressure value of the standard pressure waveform.

  Further, if the allowable range is set to be a range in which the standard pressure waveform is slid up and down by a predetermined pressure, a certain allowable range is given even in a region where there is almost no pressure change in the standard pressure waveform. be able to. In this way, an allowable range can be set with independent parameters by dividing a region with a relatively small pressure change and a region with a relatively large pressure change in the standard pressure waveform. It is possible. Also in this case, the allowable range is very simple because it can be set only by raising and lowering by a predetermined pressure with reference to the standard pressure waveform.

  Again, if the standard pressure waveform is a waveform that repeats rising and falling, that is, if there is a descending slope in the standard pressure waveform, the standard pressure waveform is slid forward by a predetermined time with respect to the standard pressure waveform, and The waveform slid up by a predetermined pressure is the phase advance maximum pressure waveform, and the waveform slid after a predetermined time and slid down by the predetermined pressure with respect to the standard pressure waveform is the minimum phase delay When the pressure waveform is set, the pressure value of the phase advance maximum pressure waveform is equal to or less than the pressure value of the standard pressure waveform, or the pressure value of the phase delay minimum pressure waveform is equal to or greater than the pressure value of the standard pressure waveform. In such a region, it is possible to prevent erroneous determination in advance by not performing abnormality determination.

  The permissible range may be set for each time point in the standard pressure waveform based on a pressure sample value of the standard pressure waveform within a predetermined time range before and after the time point. In this way, it is possible to set an allowable range collectively for a region where the pressure change is small and a region where the pressure change is large by one parameter.

  For example, the upper limit of the allowable range is set based on the maximum value of the pressure sample value within the predetermined range, and the lower limit of the allowable range is set based on the minimum value of the pressure sample value within the predetermined range.

  In addition, when setting the weight range, the change in the standard pressure waveform over time can be taken into account if the setting of the allowable range is weighted depending on how far from the time point the pressure sample value is based. It is possible to set an allowable range with high reliability.

  Further, if the abnormality determination is performed only in a specific time zone, only the time zone that greatly affects the quality of the finished product can be monitored, and the other parts can be left out of monitoring. As a result, the amount of information to be processed is reduced, and it is possible to completely eliminate erroneous determination in an area that is not so important in quality.

  In addition, if the setting method of the allowable range is selectable for each specific time zone, the optimum setting method can be selected for each time zone according to the importance in quality control and the pressure change, As a whole, the optimum tolerance can be determined.

  By applying the present invention, it is possible to accurately determine the pressure abnormality of the resin sealing even in a region where the pressure change is large by a simple method.

  Hereinafter, an example of an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a schematic configuration plan view showing an example of a resin sealing device to which an embodiment of the present invention is applied. FIG. 2 is a graph showing a first example of the relationship between the standard pressure waveform and the allowable range. FIG. 3 is a graph showing a second example of the relationship between the standard pressure waveform and the allowable range. FIG. 4 is a graph showing a third example of the relationship between the standard pressure waveform and the allowable range. FIG. 5 is a graph showing a fourth example of the relationship between the standard pressure waveform and the allowable range. FIG. 6 is a graph showing a fifth example of the relationship between the standard pressure waveform and the allowable range. FIG. 7 is an enlarged view before and after time T in FIG. Note that the graphs of FIGS. 2 to 7 are expressed in a somewhat simplified form for easy understanding.

<Configuration of resin sealing device>
The mold 24 of the resin sealing device 22 includes an upper mold 26 and a lower mold 28. The upper die 26 is further divided into upper and lower parts, and is mainly composed of a first upper die 30 and a second upper die 32 that is overlaid thereon. A heat insulating layer 34 is interposed between the first upper mold 30 and the second upper mold 32.

  The first upper mold 30 is located above the substrate K among the cull portion 36, the first and second recesses 38 and 40 in which the substrate K to be sealed is disposed, and the cavity 42 filled with the sealing resin. A corresponding upper cavity 44 is provided. In FIG. 1, the second upper mold 32 has a vertical thickness that is substantially the same as that of the first upper mold 30, but actually occupies most of the upper mold 26, and is not shown. It is attached to the stationary platen via an attachment block or the like.

  On the other hand, the lower die 28 is attached to the movable platen via a well-known attachment block, a support plate, etc. (not shown). The movable platen is connected to a press device (not shown), and can be moved forward and backward (moved in the vertical direction in FIG. 1) by driving the press device. The lower mold 28 is brought into contact with and separated from the mold 30), and the mold 24 is closed, clamped and opened. However, in the present invention, either the upper mold or the lower mold may be a movable mold.

  In the lower mold 28, a runner 50 and a lower cavity 52 (corresponding to the lower side of the substrate K in the cavity 42) are recessed. Further, a cylindrical pot 54 is formed, and a plunger 56 is disposed in the pot 54 so as to be movable forward and backward.

  The plunger 56 is provided with a pressure sensor 70 composed of a load cell or the like so that the actual pressure of the resin can be measured. However, in the present invention, the specific structure and installation position of the pressure sensor are not particularly limited. Rather, as the installation position, the encapsulated resin does not move as a complete “fluid”, and therefore it is possible to detect with higher accuracy by installing it at a position close to the cavity 42 that constitutes the sealed space. There is.

  Reference numeral 72 denotes a standard pressure waveform storage unit, 74 denotes a calculation unit capable of setting an allowable range based on the standard pressure waveform, and 78 denotes whether or not the actual pressure applied to the resin is within the allowable range. It is a comparison / determination unit for determining a sealing abnormality by determining (details will be described later).

<Operation of resin sealing device>
With the plunger 56 placed at the lower limit position, a resin material (molding material) 58 such as a tablet or a pellet is set in the pot 54, and the rise of the plunger 56 causes the cull portion 36 and the runner 50 to move under the melting temperature. The resin material 58 flows into the upper and lower cavities 44 and 52 formed above and below the substrate K. Thereafter, the temperature is raised while the mold is clamped by the upper mold 26 and the lower mold 28, and the mold is opened when the resin is cured, and the resin-sealed substrate K is taken out.

  During this series of operations, as a pretreatment, in this embodiment, the pressure characteristic detected when a good seal is performed is set as a standard pressure (standard pressure waveform) (that is, when an allowable range is set). The information is stored in the storage unit 72 in advance (as a basic information source).

  Further, an allowable range is set based on this standard pressure (standard pressure waveform) (details of this point will be described later).

  Then, the actual pressure of the encapsulated resin is detected in real time by the pressure sensor 70 during the actual sealing operation, and the comparison / determination unit 78 compares the “actual pressure” with the “set allowable range”. As a result of the comparison, when the actual pressure exceeds the set allowable range, it is determined that “some abnormality has occurred in the sealing operation”.

  For example, when a resin leak (or overflow) occurs for some reason, the actual pressure of the resin tends to be lower than when it is normal. In addition, when foreign matter such as burrs remains or mixes, the volume does not function as a resin diffusion space, so it tends to rise faster than the normal pressure (standard pressure waveform) at normal times. It becomes. Therefore, if the actual pressure exceeds a predetermined allowable range set based on the standard pressure waveform in advance, it is determined that the sealing abnormality is promptly performed, so that predetermined processing or maintenance can be performed reliably and quickly. Will be able to.

  Prior to determining whether or not the actual pressure is within the allowable range, it is necessary to perform an operation of “superimposing” the time axis of the standard pressure waveform and the time axis of the actual pressure on the basis of some common point. However, as this method, for example, as in the case of the above-mentioned Patent Document 1, literally, a specific time point on the time axis is used as a reference, and the position of a movable member (for example, the initial position of a plunger or a movable mold) is used as a reference. It may be the case. When a specific time point on the time axis is used as a reference, both characteristics are overlapped on the basis of the time when a start trigger such as the start time of filling, for example, the start time of mold clamping, for example, is used for the transfer method, and from there. It is compared and determined whether the actual pressure does not exceed the allowable range in accordance with the elapsed time. On the other hand, when the position of the movable member is used as a reference, the transfer method, for example, the position of the plunger at the start of filling, and the compression method, for example, the initial position of the movable mold at the start of mold clamping, etc. It is compared / determined whether or not the actual pressure exceeds the allowable range in accordance with the movement distance of the plunger or the mold from the center. Regardless of which method is used, accurate abnormality determination can be performed according to the present embodiment.

  Even when the position of the movable member is used as a reference, the “movable position” includes a concept before and after the time, and thus can be regarded as a “wide time axis”. In addition, the concept of “time axis” in this specification includes the concept of “axis of position of movable member” when the position of the movable member is used as a reference.

<About setting the allowable range>
Next, how the allowable range is set will be described.

  In FIG. 2, the line Ps (displayed by a solid line) is a standard pressure waveform, and the line Pb (displayed by a dotted line) is a phase advance pressure obtained by sliding the standard pressure waveform exactly the specified time width t (forward in the time axis direction). The waveform, line Pa (indicated by the alternate long and short dash line) shows a phase-lag pressure waveform obtained by sliding the standard pressure waveform as it is after the specified time width t (as viewed in the time axis direction). As a result, a range surrounded by the phase advance pressure waveform Pb and the phase delay pressure waveform Pa is set as an allowable range. That is, the phase advance pressure waveform Pb is the upper limit value of the allowable pressure, and the phase delay pressure waveform Pa is the lower limit value of the allowable pressure. In this way, the allowable range is set by sliding the standard pressure waveform Ps in the time axis direction for a predetermined time t. Therefore, the allowable range at a specific time point is the specific range on the time axis in the standard pressure waveform Ps. It is set based on the pressure value other than the time point. Here, the designated time t is the same on the phase advance side and the phase delay side, but may be different.

  The permissible range set by such a method is a relatively small permissible range σ2 in the region where the pressure change is small (for example, near T1 in FIG. 1), while the region where the pressure change is large (for example, near T2 in FIG. 1). ) Is a relatively large allowable range σ1. In other words, strict pressure control is possible in the region where the pressure change is small at the original standard pressure (standard pressure waveform), and at the same time, it is within the allowable range in the region where the pressure change is large at the original standard pressure (standard pressure waveform). Even if there is a slight margin, even if there is a slight shift in the time axis direction in the “superposition” at the time of comparison / determination, it is possible to effectively prevent frequent erroneous determinations. Furthermore, the setting of the permissible range here is very simple because it can be set by moving it back and forth for a predetermined time based on the standard pressure waveform.

  Here, as shown in FIG. 3, when the standard pressure waveform Ps is a waveform that repeatedly rises and falls, that is, when the standard pressure waveform Ps has a descending gradient, for example, the phase advance pressure waveform In the region β where the pressure value of Pb is equal to or smaller than the pressure value of the standard pressure waveform Ps, or in the region α where the pressure value of the phase delay pressure waveform Pa is equal to or larger than the pressure value of the standard pressure waveform Ps, abnormality determination is not performed. Thus, erroneous determination can be prevented in advance.

  Next, in FIG. 4, the line Ps (displayed by a solid line) is slid the standard pressure waveform, and the line Pb · max (displayed by a dotted line) is slid the standard pressure waveform as it is by the specified time width t (forward in the time axis direction). In addition, the phase advance maximum pressure waveform slid upward by the specified pressure width p (up in the pressure axis direction), the line Pa · min (indicated by a one-point difference line) is exactly the same as the standard pressure waveform after the specified time width t. The phase-lag minimum pressure waveforms are shown as being slid in the time axis direction (backward) and slid down by the specified pressure width p (down in the pressure axis direction). As a result, a range surrounded by the maximum phase advance pressure waveform Pb · max and the minimum phase delay pressure waveform Pa · min is set as an allowable range. That is, the phase advance maximum pressure waveform Pb · max is the upper limit value of the allowable pressure, and the phase delay minimum pressure waveform Pa · min is the lower limit value of the allowable pressure. In this way, the standard pressure waveform Ps is slid in the time axis direction for a predetermined time t, and further, an allowable range is set for the specified pressure width p in the pressure axis direction. The range is set based on pressure values other than the specific time point on the time axis in the standard pressure waveform Ps. Here, the designated time t is the same on the phase advance side and the phase lag side, and the designated pressure width p is the same on the upper limit value side and the lower limit value side, but they may be different.

  The permissible range set by such a method can give a constant permissible range even in a region where there is almost no pressure change in the standard pressure waveform Ps. As described above, since the allowable range can be set with independent parameters by dividing the region where the pressure change is relatively small and the region where the pressure change is relatively large in the standard pressure waveform Ps, more accurate pressure abnormality determination is possible. Is possible. In this case as well, the allowable range can be set by sliding back and forth for a predetermined time with reference to the standard pressure waveform Ps and then sliding up and down for the predetermined pressure (or vice versa). Convenient.

  Also here, as shown in FIG. 5, when the standard pressure waveform Ps is a waveform that repeatedly rises and falls, that is, when there is a descending gradient in the standard pressure waveform Ps, for example, the phase advance maximum Abnormal in the region β where the pressure value of the pressure waveform Pb · max is less than or equal to the pressure value of the standard pressure waveform Ps, or in the region α where the pressure value of the phase delay minimum pressure waveform Pa · min is greater than or equal to the pressure value of the standard pressure waveform Ps. By preventing the determination, erroneous determination can be prevented in advance.

  Next, in FIG. 6 and FIG. 7, the line Ps (displayed by a solid line) is a standard pressure waveform, the line Pmax (displayed by a dotted line) is a waveform indicating the upper limit value of the allowable range, and the line Pmin (displayed by a one-point difference line) is allowable. It is a waveform which shows the lower limit of a range. For example, an allowable range (upper limit value and lower limit value) at a specific time point T is set by specifying a specific time range (range from Tx to Ty) up to a specified time width t before and after the time point T as a reference. A pressure value within the time range (Tx to Ty) is determined as a sample value. For example, after further dividing the specific time range (Tx to Ty) along the time axis, the pressure value for each section is acquired as a sample value. As shown in detail in FIG. 7, time T to Tx is divided into five (Tn-1 to Tn-5), and time T to Ty is also divided into five (Tn + 1 to Tn + 5). . As a result, the pressure value at time Tn-5 (Tx) is Pn-5, the pressure value at time Tn-4 is Pn-4, the pressure value at time Tn-3 is Pn-3, and the pressure value at time Tn-2 is Pn-2, pressure value at time point Tn-1 is Pn-1, pressure value at time point Tn + 1 is Pn + 1, pressure value at time point Tn + 2 is Pn + 2, pressure value at time point Tn + 3 is Pn + 3, pressure value at time point Tn + 4 is Pn + 4, time point Tn + 5 The pressure value of (Ty) is acquired as Pn + 5. Then, a value calculated based on these sample values is set as an allowable range. In addition, the calculation method here is not particularly limited, as described below, using the maximum and minimum values of the pressure sample value, obtaining an average value of the sample value and adding a margin above and below it, A method may be used in which a differential value, an integral value, or a combination of these values is taken into account. Alternatively, the pressure sample values may be calculated after weighting according to the distance from the time point T (temporal distance). For example, if the pressure sample value closer to the time point T is set so that the evaluation weight becomes larger, the allowable range can be set by more flexibly capturing the change in the pressure value in the standard pressure waveform Ps.

  As a specific example, in the example shown as FIG. 6 and FIG. 7, among these sample values, the maximum (here, Pn-3) and the minimum (here, Pn + 5) are used. That is, the maximum pressure value Px and the minimum pressure value Py within the specific time range (Tx to Ty) are set by giving margins for the designated pressure widths P1 and P2, respectively. More specifically, the upper limit value PmaxT of the allowable range at the time point T is a value obtained by adding the designated pressure range P1 to the maximum pressure value Px (here, Pn-3) within the specific time range (Tx to Ty). . Further, the lower limit value PminT of the allowable range at the time T is a value obtained by subtracting the designated pressure width P2 from the minimum pressure value Py (here, Pn + 5) within the specific time range (Tx to Ty). Similarly, at all other points in time, the upper limit value and the lower limit value of the allowable range are set by the same method. As a result, a range surrounded by Pmax and Pmin is set as an allowable range. In this way, it is convenient to set a permissible range for a region where the pressure change is small and a region where the pressure change is large by one parameter. Here, the designated time t is the same before and after the time T, but may be different. In some cases, the designated time t may be set only on the front side and only on the rear side with respect to the time point T.

  In the above description, a so-called “margin” for the designated pressure ranges P1 and P2 is given, but this is not essential. In the above example, for example, the maximum pressure value Px and the minimum pressure value Py within the specific time range (Tx to Ty) can be set as the upper limit value and lower limit value of the allowable range as they are. Further, when the designated pressure ranges P1 and P2 are applied, different values may be applied to the upper limit value side P1 and the lower limit value side P2, or a configuration in which only one side is applied may be employed. Furthermore, the specified pressure width itself can be changed by some parameter (for example, according to a differential value or an integral value).

  Further, if the configuration is such that the abnormality determination is performed only in a specific time zone, only the time zone that greatly affects the quality of the finished product can be monitored, and the other parts can be left out of monitoring. As a result, the amount of information to be processed is reduced, and it is possible to completely eliminate erroneous determination in an area that is not so important in quality.

  In addition, if the setting method of the allowable range is selectable for each specific time zone, the optimum setting method can be selected for each time zone according to the importance in quality control and the pressure change, It is possible to determine the optimum allowable range as a whole in which the calculation load and the reliability are balanced.

  The present invention can be widely applied to a resin molding apparatus as well as a resin sealing apparatus that seals a substrate on which a semiconductor chip is mounted with a resin.

Schematic configuration plan view showing an example of a resin sealing device to which an embodiment of the present invention is applied Graph showing first example of relationship between standard pressure waveform and allowable range Graph showing second example of relationship between standard pressure waveform and allowable range Graph showing third example of relationship between standard pressure waveform and allowable range Graph showing fourth example of relationship between standard pressure waveform and allowable range Graph showing fifth example of relationship between standard pressure waveform and allowable range Enlarged view around time T in FIG. A graph when the technique of Patent Document 1 is applied to abnormality determination of resin sealing

Explanation of symbols

DESCRIPTION OF SYMBOLS 22 ... Resin sealing device 24 ... Die 26 ... Upper die 28 ... Lower die 42 ... Cavity 50 ... Runner 54 ... Pot 56 ... Plunger 70 ... Pressure sensor 72 ... Memory | storage part 74 ... Calculation part 78 ... Comparison and determination part K ... Substrate (molded product)

Claims (10)

A resin sealing device for sealing a molded product arranged in a cavity with a resin,
Means for storing a standard pressure waveform;
Means for detecting the actual pressure of the resin in the cavity;
Means for setting an allowable range of the actual pressure based on the standard pressure waveform;
Comparing / determining means for performing abnormality determination when the actual pressure exceeds the allowable range,
The allowable range at a specific time point is also based on pressure values other than the specific time point on the time axis in the standard pressure waveform. In claim 1,
The resin sealing device, wherein the allowable range is set to be a range in which the standard pressure waveform is slid back and forth for a predetermined time. In claim 2,
When a waveform slid by a predetermined time before the standard pressure waveform is a phase advance pressure waveform, and a waveform slid by a predetermined time with respect to the standard pressure waveform is a phase lag pressure waveform In addition,
Abnormality determination is not performed in a region where the pressure value of the phase advance pressure waveform is equal to or less than the pressure value of the standard pressure waveform, or in a region where the pressure value of the phase lag pressure waveform is equal to or greater than the pressure value of the standard pressure waveform. A resin sealing device. In claim 2 or 3,
Furthermore, the allowable range is set so as to be a range in which the standard pressure waveform is slid up and down by a predetermined pressure. In claim 4,
A waveform that is slid forward by a predetermined time with respect to the standard pressure waveform and slid upward by a predetermined pressure is used as a phase advance maximum pressure waveform, and is slid by a predetermined time with respect to the standard pressure waveform. And when the waveform slid down by a predetermined pressure is the phase delay minimum pressure waveform,
Abnormality determination is performed in a region where the pressure value of the phase advance maximum pressure waveform is equal to or less than the pressure value of the standard pressure waveform, or in a region where the pressure value of the phase delay minimum pressure waveform is equal to or greater than the pressure value of the standard pressure waveform. There is no resin sealing device. In claim 1,
The allowable range is set for each time point in the standard pressure waveform based on a pressure sample value of the standard pressure waveform within a predetermined time range before and after the time point. In claim 6,
The upper limit of the allowable range is set based on the maximum value of the pressure sample value within the predetermined time range, and the lower limit of the allowable range is set based on the minimum value of the pressure sample value within the predetermined time range. Resin sealing device. In claim 6 or 7,
When the allowable range is set for each time point in the standard pressure waveform based on the pressure sample value of the standard pressure waveform within a predetermined time range before and after the time point, how far away from the time point Weighting is given to the setting of the allowable range depending on whether it is based on a pressure sample value. In any one of Claims 1 thru | or 8.
The abnormality determination is performed only in a specific time zone. In any one of Claims 1 thru | or 9,
The method for setting the allowable range can be selected for each specific time period.

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