JP2009199194A - System for managing use of semiconductor device analysis apparatus, and semiconductor device analysis apparatus with use management function - Google Patents

Abstract

An object of the present invention is to provide a use management system for an analysis / analysis apparatus for a semiconductor device and an analysis / analysis apparatus for a semiconductor device with a use management function capable of reliably grasping an efficient use reservation and the actual use corresponding to the use reservation.
A computer terminal 30 displays reservation status information in a database 10D transmitted from a management computer 10 via a network 20, reservation request information input by a user based on the reservation status information, and correspondence thereto Then, the usage record information input by the user is transmitted to the management computer 10 and stored in the database 10D. The management computer 10 updates the reservation status information based on the reservation request information, and transmits a set of usage record information stored in the database 10D to the computer terminal 30 in response to a request from the computer terminal 30.
[Selection] Figure 1

Description

  The present invention relates to a device usage management system shared by a large number of users, and more particularly to a usage management system for a semiconductor device analysis / analysis device and a semiconductor device analysis / analysis device with a usage management function.

  Conventionally, an LSI tester, a FIB (Focused Ion Beam) repair device, and the like are known as analysis and analysis devices that are one of semiconductor device manufacturing devices. These analysis / analysis apparatuses are expensive and large-scale, and one analysis / analysis apparatus is used by a plurality of users. In addition, when a plurality of different types of analysis / analysis apparatuses are required, it is economically difficult to concentrate them on a single business office, so these analysis / analysis apparatuses are their owners. Distributed to multiple business sites belonging to semiconductor manufacturers.

  In order for the users of each business office to use the analysis / analysis device, it is necessary to check the location of the desired analysis / analysis device each time. It was necessary to check with the person in charge. Further, in order to use the analysis / analysis apparatus, a complicated operation is performed in which a desired item is entered on a reservation form, and the person in charge counts the reservation form and informs whether or not it can be used.

  Therefore, in order to efficiently operate the analysis / analysis apparatus, a usage management system such as a scheduling method for managing the usage status of a plurality of users is used.

A scheduling method for using a semiconductor manufacturing apparatus is described in, for example, Patent Document 1.
Japanese Patent Laid-Open No. 10-135096

  However, while the conventional usage management system for semiconductor analysis / analysis apparatus enables efficient user reservations, the actual usage of the analysis / analysis apparatus cannot be accurately grasped. For example, the time when a user reserved the use and the actual use time of the analysis / analysis apparatus by the user do not always coincide with each other, and such information is not accurately transmitted to the administrator.

  Such information relating to the actual state of use of the analysis / analysis apparatus is extremely important for an administrator who determines the timing of maintenance and investment for the analysis / analysis apparatus, but it has been difficult to obtain accurately.

  The present invention is a usage management system for managing the use of an analysis / analysis apparatus for a semiconductor device by a computer network, and a management computer and a computer terminal connected to each other via the network, and reservation status information of the analysis / analysis apparatus for the semiconductor device And a database connected to the management computer, and the computer terminal displays the reservation status information of the database transmitted from the management computer, and the reservation request information input by the user based on the reservation status information, The usage record information input by the user corresponding to the reservation request information is transmitted to the management computer and stored in the database, and the management computer updates the reservation status information based on the reservation request information and transmits it to the computer terminal. And use stored in the database. A set of recorded information, and transmits to the computer terminal in response to a request from the computer terminal.

  Further, according to the present invention, in the configuration described above, the management computer identifies a user based on ID information input to the computer terminal, and according to a set level for a user who has not input usage record information to the computer terminal. The time that can be reserved is limited.

  Further, according to the present invention, in the configuration described above, the management computer identifies a user based on ID information input to the computer terminal, and sends a set warning message to a user who has not input usage record information to the computer terminal. It is characterized by being displayed on a computer terminal for notification.

  In the above configuration, the present invention is characterized in that the management computer identifies a specific manager based on ID information input to the computer terminal, and the setting is changed by the manager.

  Further, according to the present invention, in the configuration described above, the management computer identifies a specific administrator based on ID information input to the computer terminal, and the reservation status of the administrator is given priority over the reservation request information of the user. It is characterized by updating information.

  In the above configuration, the present invention is characterized in that the management computer outputs a set of usage record information as a file.

  Further, the present invention is characterized in that, in the above configuration, the management computer graphs a set of usage record information and displays it on a computer terminal.

  In the above configuration, the present invention is characterized in that the usage record information includes an actual usage time of the analysis / analysis apparatus of the semiconductor device.

  In the above configuration, the present invention is characterized in that the usage record information includes information on an actual usage status of the analysis / analysis apparatus of the semiconductor device.

  The present invention also relates to an analysis and analysis apparatus for a semiconductor device whose use is managed by a computer network, that is, an analysis and analysis apparatus for a semiconductor device having a use management function, and a management computer and a computer terminal connected to each other via a network, A database storing reservation status information of an analysis / analysis device of a semiconductor device and connected to a management computer, and the computer terminal displays the reservation status information of the database transmitted from the management computer and displays the reservation status information Based on the reservation request information, the reservation request information input by the user and the usage record information input by the user corresponding to the reservation request information are transmitted to the management computer and stored in the database. Update reservation status information and send to computer terminal Also, a set of usage record information stored in the database, and transmits to the computer terminal in response to a request from the computer terminal.

  According to the semiconductor device analysis / analysis device usage management system and the semiconductor device analysis / analysis device with a usage management function according to the present invention, an efficient use reservation of the analysis / analysis device is made and the actual usage is surely grasped. can do.

  A use management system for an analysis / analysis apparatus for a semiconductor device according to an embodiment of the present invention will be described. Here, the analysis / analysis apparatus of the semiconductor device is, for example, an LSI tester or an FIB repair apparatus. These analysis / analysis apparatuses are expensive and large-scale, and one analysis / analysis apparatus is used by a plurality of users. In addition, when a plurality of different types of analysis / analysis apparatuses are required, it is economically difficult to concentrate them on a single business office, so these analysis / analysis apparatuses are their owners. Distributed across multiple business sites belonging to semiconductor manufacturers.

  First, the system configuration of this usage management system will be described with reference to the system configuration diagram of FIG. In this usage management system, a database 10D is connected to a management computer 10 corresponding to a server. The database 10D stores reservation status information of the analysis / analysis apparatus of the semiconductor device. This reservation status information includes user ID information including the member's department, name, contact information, etc. of the reserved user, reservation time information including the date, start time, and end time reserved by the user, This includes model information including the model name reserved by the user and reservation cancellation wait information. Further, the database 10D stores device information related to all analysis / analysis devices arranged in each business office or usable ones among these analysis / analysis devices. The device information includes the model name, location name, and specifications of the analysis / analysis device.

  The management computer 10 is connected to a plurality of computer terminals 30 via a network 20 such as the Internet or a LAN. These computer terminals 30 correspond to clients of the management computer 10 and function as input devices and display devices for a plurality of users who use the analysis / analysis device and a manager of the usage management system, respectively. .

  Hereinafter, the flow of processing executed by the use management system will be described with reference to the flowcharts of FIGS. 3 and 4 show the flow of the two subroutines included in FIG. 3, that is, the user input process and the administrator input process, respectively. 5 to 10 are examples of display screens displayed on the computer terminal 30 by the processing described below. These display screens are not limited to FIGS. 5 to 10 and can be changed without departing from the gist.

  First, in step S <b> 1 of FIG. 2, when a user or administrator accesses the management computer 10 from the computer terminal 30, the computer terminal 30 displays the device information of the database 10 </ b> D transmitted from the management computer 10. Although not shown, a cell indicating the model name of each analysis / analysis apparatus is arranged on the display screen. When a cell of a model desired by the user or administrator is selected by clicking or the like based on this device information, a reservation status display process for the corresponding model is performed in step S2.

  In this reservation status display process, the computer terminal 30 displays the reservation status information of the database 10D transmitted from the management computer 10 as a browsing mode (that is, a state before login).

  This reservation status information is reservation status information corresponding to only the model selected in step S1, and is, for example, a display screen as shown in FIG. On this display screen, a plurality of time cells 51 divided in unit time along a time series are arranged.

  Since the time cell 51 corresponding to the time that has already passed and the time cell 51 corresponding to the time that has not yet passed are displayed in cells of different colors, the time zone that cannot be reserved in the first place It ’s easier to see.

  In addition, in the already reserved time cell 51R, a part or all of the ID information such as the name or department of the reserved user or administrator is displayed, and the time cell is more than the other time cells. It is displayed in a color that is easy to see.

  In addition, for example, apart from the time cells 51 and 51R, a cancel waiting cell 52 in which the number of waiting for cancellation for a certain period, for example, one week is displayed.

  The user or administrator determines whether to continue the processing based on this reservation status information or as necessary. If so, log in step S3. If not, go to the management computer. End access. The login is started at the computer terminal 30 by, for example, clicking the login icon 53 on the display screen of FIG. A user or an administrator inputs ID information on a login screen (not shown) on the computer terminal 30.

  The ID information includes a user's or administrator's name, department, contact information (extension phone number, e-mail address, etc.), name code, and the like. This ID information is identified by the management computer 10. Here, when the input ID information does not match the ID information registered in the database in advance as a user or administrator, the management computer 10 displays that fact on the computer terminal 30 and again executes step S2. Similarly, the reservation status information is displayed on the computer terminal 30 in the browsing mode.

  If the input ID information matches the ID information registered in the database 10D as a non-administrator user, the management computer 10 permits the input user to log in as the user mode, and the user input in step S4 Process. On the other hand, if the input ID information matches the ID information registered in the database 10D as an administrator, the management computer 10 permits the input person to log in as the administrator mode, and the administrator in step S5 Perform input processing.

  After the user input process in step S4 or the administrator input process in step S5 is performed, a series of processes is terminated by logging out according to the desire of the administrator or the user.

  Hereinafter, the user input process in step S4 will be described with reference to the flowchart of FIG. In this user input process, first, the computer terminal 30 displays the reservation status information in the database 10D transmitted from the management computer 10 as a user login mode (that is, a mode in which further input processing can be performed by the user).

  Next, in step S4-1 in FIG. 3, the user confirms whether or not the reservation can be made in the time zone of the date desired by the user based on the reservation status information displayed on the computer terminal 30. If the time zone of the date to be used is empty, the time cell 51 corresponding to the first time (that is, the start time) of the time zone of the date is selected by clicking or the like. Here, if the selected time cell 51 corresponds to a time that has not yet elapsed, the reservation input process in step S4-2 is started. On the other hand, when the time cell 51R corresponding to the time that has already elapsed and the user has reserved in the past is selected, the use record input process in step S4-3 is started.

  Below, the reservation input process of step S4-2 is demonstrated. In this reservation input process, when a time cell 51 is selected, the management computer 10 displays a display screen provided with input items necessary for reservation on the date corresponding to the time cell 51 as shown in FIG. Are displayed on the computer terminal 30. The input items necessary for the reservation include at least a specific reservation start time and end time. Furthermore, a process name, priority, model name, and other items may be provided as input items. The user inputs these input items on the computer terminal 30 and confirms them by, for example, clicking a registration icon. Hereinafter, these input items and information including the date will be referred to as reservation request information. The confirmed reservation request information is transmitted to the management computer 10 by the computer terminal 30.

  When the management computer 10 determines that the reservation can be made based on the start time and the end time based on the reservation status information in the database 10D and the transmitted reservation request information, the management computer 10 has already reserved the time slot As described above, the reservation status information in the database 10D is updated, and the updated reservation status information is transmitted to the computer terminal 30 for display. At that time, in the computer terminal 30, a part or all of the ID information of the reserved user is displayed in the reserved time cell 51R. The reserved time cell 51R may be displayed in a specific color according to the priority included in the reservation request information as necessary.

  On the other hand, if reservation request information indicating an unreservable time zone is input due to an erroneous input by the user, etc., the management computer 10 transmits an error message to the corresponding computer terminal 30 to display it, and again The display screen on which input items necessary for the reservation are provided on the date is displayed on the computer terminal 30.

  The use record input process in step S4-3 performed when the selected time cell corresponds to the time that has already passed will be described. In this use record input process, information indicating how the user who reserved the analysis analysis apparatus in the reservation input process in step S4-2 actually used the analysis analysis apparatus after using the analysis analysis apparatus, That is, the usage record information is input to the computer terminal 30, and the computer terminal 30 transmits the usage record information to the management computer 10.

  Specifically, first, a display screen having a record item of the use record information corresponding to the reserved analysis / analysis apparatus, for example, a display screen as shown in FIG. 7 is displayed on the computer terminal 30 by the management computer 10. Is done. The record item of the usage record information includes at least the usage time of the analysis / analysis apparatus. Other record items of usage record information include, for example, process name, priority, processing application, number of samples, presence / absence of CAD link, number of wiring layers, number of cuts, deposition length, number of insulating film deposition points, trouble This includes the matters to be communicated to the administrator. These use record information record items may be set by an administrator so as to include items other than those described above, if necessary.

  A user who reserves and uses this analysis / analysis apparatus inputs each record item of the use record information to the computer terminal 30 and transmits it to the management computer 10 by, for example, clicking a registration icon. The management computer 10 stores information on the actual usage of these in the database 10D.

  On the other hand, in step S4-1 in FIG. 3, when the user confirms whether or not the reservation can be made in the time zone of the desired date based on the reservation status information displayed on the computer terminal 30, the user desires. If the date time zone is not available, the cancel waiting cell 52 can be selected by clicking or the like, and the cancel waiting input process of step S4-4 can be performed. In this cancel wait input process, the management computer 10 displays the number of cancel waits on the computer terminal 30, and the user inputs cancel wait information such as a desired reservation time to the computer terminal 30 and transmits it to the management computer 10. On the other hand, the management computer 10 stores the cancellation wait information by matching with the reservation status information in the database 10D.

  When a reservation cancellation by another user occurs, the management computer 10 automatically notifies the user who has input the cancellation waiting information through the computer terminal 30 by e-mail or the like. Thereafter, the user performs the reservation input process in step S4-2 in the same manner as described above.

  When canceling the reservation, when the user selects the reserved time cell 51R by clicking or the like at the computer terminal 30, the management computer 10 performs the same processing as in the reservation input process of step S4-2 in FIG. The display screen is displayed on the computer terminal 30 together with the reservation request information already input. The user who cancels the reservation transmits to the management computer 10 that the reservation displayed on the display screen is canceled by clicking the delete icon or the like.

  In the following, when the ID information input by the login in step S3 matches the ID information registered in the database 10D as an administrator, that is, for the administrator input process in step S5, refer to the flowchart of FIG. I will explain.

  In this administrator input process, first, the computer terminal 30 sets the reservation status information in the database 10D transmitted from the management computer 10 as an administrator login mode (that is, a mode in which further input processing can be performed by the administrator). indicate. Here, an icon for selecting a plurality of processes that can be performed by the administrator is further displayed. In step S5-1, the administrator selects any one of the plurality of processes by clicking the icon. . The management computer 10 determines this and executes the selected process. The processes that can be performed by the administrator include a reservation input process S5-2, a file output process S5-3, a statistical output S5-4, and a system setting process S5-5, and processes other than those described above are added as necessary. .

  The reservation input process in step S5-2 performed by the administrator is the same as the reservation input process in step S4-2 in the user input process in step S4. It is possible to cancel the reserved time zone, and the reservation can be made with priority over the user.

  In the file output process in step S5-3, the management computer 10 edits the set of use record information stored in the database 10D in the use record input process in step S4-3 for each period and record item set by the administrator. For example, as shown in the display screen of FIG. 8, the file names are displayed on the computer terminal 30 as a selectable statistical file group. When the administrator selects a desired file name based on this display screen and designates it by clicking an execution icon or the like, or designates a desired file name via the computer terminal 30 by another method, the management computer 10 However, the statistical file corresponding to the file name is output to the computer terminal 30 as a file. As an example of the output file, there is a table showing the relationship between the usage time of a certain analysis / analysis apparatus and the department to which the used user belongs in a set period.

  By outputting the statistical file in this way, the administrator imports and edits one statistical file or a plurality of statistical files output to the computer terminal 30 into the spreadsheet software of the administrator's preference, Using the graph function of the administrator's preference, it is possible to graph from various viewpoints and perform various statistical analyses.

  Here, it is preferable that the statistical file output to the computer terminal 30 is generated in a versatile file format that can be imported into a wider variety of application software, for example, CSV format.

  In the statistical output process of step S5-4, the statistical file edited by the management computer 10 with the period and recording items set by the administrator is stored in the computer terminal 30 regardless of the file output as in step S5-3. Direct graph output. Specifically, for example, a display screen as shown in FIG. 9 is displayed on the computer terminal 30, and the administrator inputs a total period and a total item (that is, a record item of use record information) to the computer terminal 30, When it is confirmed by clicking the execution icon or the like, the management computer 10 displays a graph according to the designation on the computer terminal 30. In the example of the figure, the usage time for each month in a specified counting period is shown for a certain analysis device.

  In the system setting process in step S5-5, the administrator inputs, for example, each item on the display screen as shown in FIG. 10 via the computer terminal 30 and clicks a registration icon as the system setting of the usage management system. Confirm and set the management computer 10.

  As a feature of this system setting, the administrator makes a notification regarding the fact that usage record information has not been entered to the user who has neglected to enter usage record information in step S4-3 even though the analyzer has been reserved and used. Precautionary measures and sanctions can be established.

  More specifically, the administrator sets a period for which the presence / absence of usage record information is checked, for example, a start period thereof. During this period, the management computer 10 identifies a user who has failed to input usage record information. Identification of a user who has failed to input usage record information is performed by the management computer 10 referring to the database 10D and examining reservation request information for which usage record information does not exist correspondingly.

  The administrator can set a warning level and notify a warning message corresponding to the warning level to a user who fails to input usage record information. This warning message is notified until the user who has failed to input the usage record information completes the input. As a result, precautions against the non-entry of usage record information are taken. This warning message is either one of an e-mail automatically sent by the management computer 10 with the e-mail address included in the user's ID information as a destination, and a display screen of reservation status information after the user logs in , Or both. When the warning level is set to the lowest level, the notification of the warning message may be omitted.

  Furthermore, the administrator can set a reservation restriction level and impose a reservation restriction corresponding to the level of the user who has failed to input the usage record information. In this reservation restriction, in addition to the restriction on the reservationable time, a restriction from various viewpoints such as a restriction on the number of reservations and a restriction on priority can be set.

  This reservation restriction is a sanctions against non-entry of usage record information because it restricts the execution of business to the user, and may prevent unentry of usage record information in subsequent reservation and use. it can.

  In addition, in this system setting, it is possible to impose a reservation time limit on all users at the discretion of the administrator in consideration of failure of the analysis / analysis apparatus or suspension of operation due to maintenance. For example, the longest usable time, a time zone, a day of the week, etc. are set as detailed settings related to the restriction of the reservation time. Note that the detailed setting related to the restriction of the reservation time may be set as a reservation restriction level for the user who has failed to input the use record information described above.

  As for other setting items, the administrator enters his / her password, all ID information input at login in step S3, that is, name, department, contact information (extension telephone number, e-mail address, etc.). And all input items such as name code can be registered and changed as an arbitrary password group. Thereby, unauthorized access such as impersonation by other users can be reliably prevented.

  Also, the administrator sets the department name included in the reservation request information as a registered department name that is assumed to be reserved in advance, so that it is included in the use record information in the use record process of step S4-3. The department name can be normalized.

  In addition, by registering the e-mail address of another administrator, the administrator can notify the communication items such as troubles included in the use record information input by the user in the use record process of step S4-3. It can be automatically sent to other administrators.

  According to the above-described use management system, the use record input process is performed, and further, it is possible to take preventive measures and sanctions for the user who has not input the use record information without inputting the use record information. Thereby, in this usage management system, not only efficient use reservation of the analysis analyzer can be made, but also the actual usage of the analysis analyzer can be surely grasped. As a result, the administrator can surely obtain useful information for determining the timing of the investment for the maintenance of the analysis / analysis apparatus and the new purchase of the analysis / analysis apparatus.

  Furthermore, as another embodiment of the present invention, the same effect as described above can be obtained even by an analysis / analysis apparatus to which the above-described use management system function is added. That is, as shown in FIG. 11, the management computer 10 connected to the computer terminal 30 via the network 20 may be incorporated in the analysis / analysis apparatus 100.

  In addition, this invention is not limited to the said embodiment, It can change in the range which does not deviate from a summary.

  For example, the management computer 10 may perform a process having functions other than those described above, for example, a process for notifying the communication items from the administrator to all users.

  The manager includes a plurality of managers having different hierarchies, for example, a higher manager and a lower manager, and the higher manager performs the reservation input process and the system setting process in preference to the lower manager. It is good also as what can do. In this case, a predetermined maintenance contractor may be registered as a high-order manager, and the use of the analysis / analysis apparatus may be managed by the maintenance contractor with the highest priority given to reservation restrictions for maintenance work.

  Further, the analysis / analysis apparatus of the semiconductor device is not limited to the LSI tester or the FIB repair apparatus, but other analysis / analysis apparatuses such as a laser microscope, an atomic force microscope, and a scanning electron microscope (Scanning). Electron Microscope), Transmission Electron Microscope, Scanning Probe Microscope, Scanning Tunneling Microscope, and the like may be used. Furthermore, the use management target may be an apparatus other than the analysis / analysis apparatus, that is, a measurement apparatus, a manufacturing apparatus, or the like as long as it is reserved and used by an administrator or a user.

1 is a system configuration diagram illustrating a usage management system for an analysis / analysis apparatus for a semiconductor device according to an embodiment of the present invention. It is a flowchart of the process performed by the usage management system of the analysis / analysis apparatus of the semiconductor device by embodiment of this invention. It is a flowchart of the process performed by the usage management system of the analysis / analysis apparatus of the semiconductor device by embodiment of this invention. It is a flowchart of the process performed by the usage management system of the analysis / analysis apparatus of the semiconductor device by embodiment of this invention. It is a display screen of the reservation status information displayed with the usage management system of the analysis analysis apparatus of the semiconductor device by embodiment of this invention. It is the display screen of the reservation input process displayed with the usage management system of the analysis analysis apparatus of the semiconductor device by embodiment of this invention. It is a display screen of the use memory input process displayed by the use management system of the analysis analyzer of the semiconductor device by embodiment of this invention. It is a display screen of the file output process displayed with the usage management system of the analysis analysis apparatus of the semiconductor device by embodiment of this invention. It is a display screen of the statistics output process displayed with the usage management system of the analysis analyzer of the semiconductor device by embodiment of this invention. It is a display screen of the system setting process displayed with the usage management system of the analysis analysis apparatus of the semiconductor device by embodiment of this invention. 1 is a system configuration diagram showing an analysis / analysis apparatus for a semiconductor device with a use management function according to an embodiment of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Management computer 20 Network 30 Computer terminal 51,51R Time cell 52 Cancel waiting cell 100 Analysis analyzer

Claims (10)

A use management system for managing the use of analysis and analysis devices for semiconductor devices by a computer network,
A management computer and a computer terminal connected to each other via a network, and a database storing reservation status information of the analysis / analysis apparatus of the semiconductor device and connected to the management computer,
The computer terminal displays the reservation status information of the database transmitted from the management computer, and the user corresponding to the reservation request information input by the user based on the reservation status information and the reservation request information The usage record information input by is transmitted to the management computer and stored in the database,
The management computer updates the reservation status information based on the reservation request information and transmits it to the computer terminal. Also, the management computer stores the set of usage record information stored in the database in response to a request from the computer terminal. In response, the computer system transmits the information to the computer terminal.   The management computer can identify the user based on ID information input to the computer terminal and can make a reservation according to a set level for the user who has not input the usage record information to the computer terminal. 2. The use management system for an analysis / analysis apparatus for a semiconductor device according to claim 1, wherein time is limited.   The management computer identifies the user by ID information input to the computer terminal, and issues a warning message to the user who has not input the usage record information to the computer terminal according to a set level. 3. The usage management system for an analysis / analysis apparatus for a semiconductor device according to claim 1 or 2, wherein the notification is displayed on the computer terminal.   The semiconductor device according to claim 2, wherein the management computer identifies a specific manager based on ID information input to the computer terminal, and the setting is changed by the manager. Use analysis system for analysis and analysis equipment.   The management computer identifies a specific administrator based on the ID information input to the computer terminal, prioritizes the reservation request information of the user, and sets the reservation status information based on the reservation request information of the administrator. The usage management system for an analysis / analysis apparatus for a semiconductor device according to claim 1, wherein the system is updated.   6. The usage management system for an analysis / analysis apparatus for a semiconductor device according to claim 1, wherein the management computer outputs the set of usage record information to the computer terminal as a file.   7. The usage management of the analysis / analysis apparatus for a semiconductor device according to claim 1, wherein the management computer graphs the set of usage record information and displays the graph on the computer terminal. system.   8. The usage management system for an analysis analyzer of a semiconductor device according to claim 1, wherein the usage record information includes an actual usage time of the analysis analyzer of the semiconductor device. .   9. The use of the analysis / analysis apparatus for a semiconductor device according to any one of claims 1 to 8, wherein the use record information includes information on an actual use state of the analysis / analysis apparatus for the semiconductor device. Management system. A semiconductor device analysis / analysis device whose use is managed by a computer network,
A management computer and a computer terminal connected to each other via a network, and a database storing reservation status information of the analysis / analysis apparatus of the semiconductor device and connected to the management computer,
The computer terminal displays the reservation status information of the database transmitted from the management computer, and the user corresponding to the reservation request information input by the user based on the reservation status information and the reservation request information The usage record information input by is transmitted to the management computer and stored in the database,
The management computer updates the reservation status information based on the reservation request information and transmits it to the computer terminal. Also, the management computer collects the set of usage record information stored in the database in response to a request from the computer terminal. Accordingly, the analysis / analysis apparatus for a semiconductor device with a use management function is transmitted to the computer terminal.

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