JP2009196311A - Transfer apparatus, transfer method using the same, and mold supporting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a phenomenon of no transferring of fine transfer pattern set in the central part of a mold to a molding object, without providing a backup member for the mold even with a thin mold, in a transferring device transferring a fine transfer pattern formed in the mold to the molding object. <P>SOLUTION: In the transferring device 1 transferring the fine transfer pattern formed in the mold M to the molding object W, a portion Ma of the mold M formed with the fine transfer pattern is gradually deformed into a convex form compared to an original form of the portion Ma toward the center of the portion Ma, for avoiding transfer defect at the central part of the portion Ma. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a transfer device, a transfer method using the transfer device, and a mold holding device, and more particularly, to a device that transfers a fine transfer pattern formed on a mold onto a molded product.

  In recent years, a mold (mold) is produced by forming an ultrafine transfer pattern on a quartz substrate or the like by an electron beam drawing method or the like, and the mold is applied to a resist film formed on the surface of the substrate to be molded as a predetermined pressure. Research and development has been conducted on nanoimprint technology for transferring the transfer pattern formed on the mold by pressing (see, for example, Non-Patent Document 1).

  As a method for forming a nano-order fine pattern (transfer pattern) at a low cost, an imprint method using a lithography technique has been devised. This molding method is roughly classified into a thermal imprint method and a UV imprint method.

  In the thermal imprint method, a mold is pressed against a substrate and heated until the resin made of a thermoplastic polymer is sufficiently flowable to flow the resin into a fine pattern. It cools until it becomes below, solidifies the fine pattern transferred to the substrate, and then separates the mold.

  In the UV imprint method, a transparent mold capable of transmitting light is used, and the UV radiation is applied by pressing the mold against the UV curable liquid. Radiant light is applied for an appropriate time to cure the solution and transfer the fine pattern, and then pull back the mold.

  Recently, in rotary storage devices such as hard disks, CDs, and DVDs, there is a high interest in methods that utilize such nanoimprint technology as a means for forming a storage medium (recording medium) for forming high-density data on a disk. It has become to.

  As shown in FIG. 7, a conventional transfer apparatus 200 for transferring a fine transfer pattern holds a molded product W with a molded product holder 202, holds a mold M with a mold holder 204, The mold holder 204 is moved relative to the molded article holder 202 to bring the mold M closer to the molded article W, and the mold M is pressed against the molded article W, so that the fineness formed on the mold M A simple transfer pattern is transferred to the product W.

For example, Patent Document 1 can be cited as a document related to the transfer device 200.
Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology 25 (2001) 192-199 JP 2004-34300 A

  In the conventional transfer apparatus 200, for example, in order to perform transfer by the UV imprint method, a through-hole 206 is provided in the mold holder 204, and ultraviolet rays (ultraviolet rays generated by an ultraviolet generator (not shown)) are transmitted through the through-holes. The film passes through 206 and the mold M, and is irradiated onto the thin film of the UV curable resin of the article W to be molded that is pressed by the mold M to perform transfer.

  Further, in the conventional transfer apparatus 200, a backup glass 208 that transmits ultraviolet rays is disposed in the through-hole 206 positioned above the mold M, and the mold M is caused by the force received from the molded product W during transfer. It prevents deformation and makes uniform transfer.

  In the transfer device 200, the alignment between the molded product W held by the molded product holding body 202 and the mold M held by the mold holding body 204 may be automatically adjusted, for example. In this case, for example, the eye mark (alignment mark) formed on the mold M and the eye mark formed on the molding target W are photographed using the camera CM provided in the through hole 206. The captured video is image-processed to adjust the relative position of the product W with respect to the mold M (for example, the left-right direction in FIG. 7 or the direction perpendicular to the paper surface in FIG. 7).

  In this case, it is desirable that the camera CM be as close as possible to the mold M from the relationship of the focal length (depth of field) between the objective lens of the camera CM and the mold M or the molded product W. Since 208 is provided, the camera CM moves away from the mold M.

  Therefore, in order to bring the camera CM close to the mold M and to simplify the configuration of the apparatus, if the transfer to the molding product W by the mold M is performed without providing the backup glass 208, it should originally be flat. Due to the reaction force received from the molded product W by the transfer, etc., as shown by the two-dot chain line in FIG. 8, the mold M protrudes upward toward the center (so as to move away from the molded product W). ) It deforms very slightly. Then, the transfer pressing force is insufficient at the central portion of the mold M, and a phenomenon in which the fine transfer pattern provided at the central portion of the mold M is not transferred to the molded product W (so-called hollowing out phenomenon) occurs. There is a problem that it ends up.

  The present invention has been made in view of the above problems, and in a transfer apparatus for transferring a fine transfer pattern formed on a mold onto a molded product and a transfer method using the transfer apparatus, Even if it is thin, the object is to prevent a phenomenon in which a fine transfer pattern provided at the center of the mold is not transferred to a molded product without providing a member for backing up the mold. .

  According to the first aspect of the present invention, there is provided a transfer apparatus for transferring a fine transfer pattern formed on a mold onto a molded product, wherein a portion of the mold on which the fine transfer pattern is formed is set at the center of the portion. In order to avoid a transfer failure on the part side, the transfer device is configured to be deformed so as to gradually become convex as compared with the original form of the part as it goes to the center of the part.

  The invention according to claim 2 is a molding product holding body that holds the molding product, and a mold that is formed in a truncated cone shape or a truncated pyramid shape having a low height and a fine transfer pattern is formed on the upper surface. By pressing the slope of this mold, the upper surface is deformed and held so that it gradually protrudes toward the center, and moves in a direction approaching and moving away from the molded product holder. And a mold holder.

  A third aspect of the present invention is the transfer apparatus according to the second aspect, wherein a through hole is provided in a central portion of the mold holder.

  According to a fourth aspect of the present invention, in the transfer apparatus according to the second or third aspect, the mold holding body includes a holding part constituting member having a holding part with which a lower surface of the mold contacts, In order to engage with the inclined surface constituting member having an inclined surface that contacts the inclined surface, the holding portion constituting member and the inclined surface constituting member, and press the mold against the holding portion constituting member with the inclined surface constituting member And a pressing member configured to press the inclined surface constituent member toward the holding member constituent member.

  Invention of Claim 5 is the transfer method to the said to-be-molded product made | formed using the transfer apparatus of any one of Claims 1-4.

  According to a sixth aspect of the present invention, in a mold holding device of a transfer device that transfers a fine transfer pattern formed on a mold to a molded product, a portion of the mold on which the fine transfer pattern is formed, In order to avoid a transfer failure on the center side of this part, it is configured to be deformed and held so as to be gradually convex as compared to the original form of the part as it goes to the center of the part. This is a mold holding device of the transfer device.

  According to the present invention, in a transfer device that transfers a fine transfer pattern formed on a mold to a molded product, a transfer method using the transfer device, and a mold holding device, even if the mold is thin, There is an effect that it is possible to prevent a phenomenon in which a fine transfer pattern provided in the central portion of the mold is not transferred to the molded product without providing a member for backing up the mold.

  FIG. 1 is a front view showing a schematic configuration of a transfer apparatus 1 according to an embodiment of the present invention.

  The transfer device 1 transfers a fine transfer pattern formed on a surface (for example, a planar lower surface) Ma of a mold (mold) M to a surface (for example, a planar upper surface) Wa of a product (molded material) W. Further, it is an apparatus for transferring the surface Ma by bringing it into surface contact with the surface Wa and pressing it. As the molded product W, an information recording disk (for example, a DVD-ROM or a recording medium for a hard disk), a light guide plate of a backlight of a liquid crystal display device, or the like can be considered.

  The transfer is performed by, for example, the UV imprint method described above, and the transfer device 1 is in charge of the steps shown in FIGS.

  Here, transfer by the UV imprint method will be described with reference to FIG.

  The mold M is moved in the direction of the arrow shown in FIG. 2A, and as shown in FIG. 2B, the molded product W is pressed with a small force with the mold M, irradiated with ultraviolet rays, and UV curable resin ( UV curable resin) W2 is cured. After that, when the mold M is moved in the direction of the arrow shown in FIG. 2B and the mold M is separated from the molded product W, as shown in FIG. 2C, the molded product W (ultraviolet curable resin) is obtained. A fine transfer pattern is transferred to W2). Note that the mold M is made of quartz glass or the like that transmits ultraviolet rays.

  After the transfer, in the state shown in FIG. 2C, the cured UV curable resin W2 is used as a masking member, and a fine transfer pattern is formed on the substrate W1 by etching. For example, if the solvent is removed, the transfer of the fine transfer pattern onto the substrate W1 is completed as shown in FIG.

  In addition, the transfer device 1 includes a base frame 3, and the base frame 3 is provided with a molded product holder 5 and a mold holder (mold holder) 7. As shown by a two-dot chain line in FIG. 3, the mold holder 7 has a central portion in order to avoid a transfer failure to the molded product W on the central portion side of the portion M (for example, a planar surface) Ma of the mold M. The mold M is held so that the portion is convex.

  In other words, the mold holder 7 is compared with the original form Ma (planar form) as the planar part Ma of the mold M on which a fine transfer pattern is formed moves toward the center of the part Ma. Thus, the mold M is configured to be elastically deformed and held so as to gradually become slightly convex. The elastic deformation of the mold M is performed, for example, by applying a force that generates a bending moment to the mold M.

  The molded product holder 5 is formed by molding a molded product (formed product in which a fine transfer pattern is transferred to one surface Wa in the thickness direction formed into a circular flat plate shape or a rectangular flat plate shape), for example, a vacuum. It is comprised so that it may hold | maintain by adsorption | suction. The to-be-molded product holder 5 includes a planar holding portion 9, and the other side in the thickness direction of the to-be-molded product W comes into contact with the planar holding portion 9 to hold the to-be-molded product W. It has come to be.

  The mold holder 7 holds the mold M on the side of the molded article holder 5 (the lower side in FIG. 1), and the molded article holder 5 holds the molded article W (the molded article). The upper side of the holding body 5 is provided away from the molded article holding body 5. In addition, the mold holder 7 moves relative to the molded article holder 5 in a direction approaching / separating from the molded article holder 5 (vertical direction in FIG. 1) for transfer. It has become. In the following description, the mold holder 7 moves. However, instead of or in addition to the mold holder 7, the molded article holder 5 may move in the vertical direction in FIG.

  The mold M is formed into a low (thin) truncated cone shape, and an upper surface (a surface having a smaller area of two surfaces facing each other in parallel in the height direction of the mold M). A fine transfer pattern is formed on Ma. The upper surface Ma is formed in a planar shape as already understood. That is, when the fine transfer pattern is ignored, the upper surface Ma is flat. More specifically, for example, the top of the fine transfer pattern exists on one plane, and the bottom of the fine transfer pattern exists on another plane parallel to the one plane. Yes.

  In addition, the mold holder 7 presses the annular slope (side surface of the truncated cone) Mb of the mold M, for example, almost all around the mold M, and the mold M gradually protrudes toward the center. Is elastically deformed (see the two-dot chain line in FIG. 3) to hold the mold M integrally.

  The mold holder 7 is configured such that, for example, the amount of protrusion of the mold M (projection amount Δt indicated by a two-dot chain line in FIG. 3) can be adjusted by changing the pressing force of the inclined surface Mb of the mold M. Has been.

  Furthermore, the mold holding body 7 includes, for example, a planar holding section 11 that is parallel to and opposed to the holding section 9 of the molded article holding body 5, and the planar holding section 11 has a lower surface of the mold M. (A surface having a larger area of two surfaces that are aligned and parallel to each other in the height direction of the mold M; a surface on which no transfer pattern is formed) Mc contacts and the inclined surface Mb of the mold M Is pressed in the direction of the holding portion 11 so that the mold M is held.

  In FIG. 1, FIG. 3, FIG. 4, etc., the upper surface Ma of the mold M is positioned on the lower side, and the lower surface Mc of the mold M is positioned on the upper side.

  In the central portion of the mold holder 7, there is a through hole penetrating in a direction (vertical direction in FIG. 1; thickness direction of the mold M) perpendicular to the upper surface Ma and the lower surface Mc of the mold M held by the mold holder 7. A hole (for example, a cylindrical through hole) 13 is provided. The holding portion 11 of the mold holding body 7 is formed in a flat annular shape (for example, an annular shape), and is provided around the through hole 13, for example, adjacent to the through hole 13. The holding portion 11 of the mold holder 7 is separated from the outer periphery of the lower surface Mc of the mold M held by the mold holder 7.

  The mold holder 7 will be further described.

  The mold holding body 7 includes a holding portion constituting member 15, an inclined surface constituting member 17, and a pressing member 19. The holding part constituting member 15 includes the holding part 11 and is formed in an annular shape such as an annular shape. The inclined surface constituting member 17 includes a concave tapered inclined surface 21 in surface contact with the convex tapered inclined surface Mb of the mold M, and is formed in an annular shape such as an annular shape. The through hole 13 is provided in the holding member constituting member 15.

  The pressing member 19 is formed in an annular shape such as an annular shape, and is engaged with the holding portion constituting member 15 and the inclined surface constituting member 17. Then, in order to press the mold M against the holding portion 11 of the holding portion constituting member 15 with the inclined surface 21 of the inclined surface constituting member 17, the pressing member 19 pushes the inclined surface constituting member 17 to the holding portion constituting member 15 side (FIG. 1). And the upper side of FIG. 3 and the like).

  The mold M is sandwiched between the holding portion 11 and the inclined surface 21 by pressing the die M against the holding portion constituting member 15 side by the pressing member 19 through the inclined surface constituting member 17, and the die holding body 7 holds the die. M is held.

  The mold holder 7 (holding member constituting member 15) is integrally provided on a moving member 23 that is movable in a direction approaching or moving away from the molded article holder 5.

  The moving member 23 is moved and positioned using, for example, an actuator such as a servo motor and a ball screw controlled by a control device (not shown) that controls the operation of the entire transfer device 1. Further, the moving member 23 is provided with a through hole (through hole connected to the through hole 13) 25 in the same manner as the holding member constituting member 15. Ultraviolet rays generated by an unillustrated ultraviolet ray generator are applied to the product W through the through hole 25, the through hole 13, and the mold M. A camera CM for adjusting the alignment between the mold M and the workpiece W can be installed in the through hole 25 and the through hole 13.

  Explaining in more detail by taking an example, the holding member constituting member 15 is formed in an annular shape having a cylindrical through-hole 13 in the center of a disc having a predetermined thickness. In FIG. 1, an annular flat surface 27 at the upper end located on the upper side is in surface contact with the moving member 23 and is integrally provided on the moving member 23 by a fastener such as a bolt. An annular holding portion (convex portion) 11 is provided at the distal end portion of the holding portion constituting member 15. The holding portion 11 is provided adjacent to the through hole 13 around the outside of the through hole 13. A male screw 29 is formed on the outer periphery of the holding member constituting member 15.

  When viewed from the thickness direction of the mold M (in the direction of arrow AR1 in FIG. 1) while the mold M is held by the mold holding body 7, the center of the mold holding body 7, the holding portion 11 and the through-hole 13, and the mold The centers of M coincide with each other, and the holding portion 11 and the through hole 13 are located inside the lower surface Mc of the mold M.

  The inclined surface constituting member 17 is formed in an annular shape having a truncated cone-shaped through hole in the center of a disk having a predetermined thickness thinner than that of the mold M. The slope of the through hole constitutes an inclined surface 21. Further, a step 31 is provided on the outer periphery of the tip end portion of the inclined surface constituting member 17, and a planar and annular engaged portion 33 is formed by the step 31.

  The pressing member 19 is formed in an annular shape having a through hole in the center of a disk having a predetermined thickness that is thicker than the mold M. On the inner periphery of the pressing member 19 on the base end side, a female screw 35 that is screwed with the male screw 29 of the holding member constituting member 15 is formed. A flange portion 37 having an inner diameter smaller than the inner diameter of the female screw 35 is provided on the inner periphery on the distal end side of the pressing member 19, and an annular and flat engaging portion 39 formed on the flange portion 37. However, surface contact is made with the annular engaged portion 33 of the inclined surface constituting member 17.

  Then, the mold M is appropriately arranged on the holding portion constituting member 15 integrally held by the moving member 23, the inclined surface constituting member 17 is appropriately arranged on the die M, and the pressing member 19 is appropriately arranged on the holding portion constituting member 15. Then, when the male screw 29 and the female screw 35 are screwed together and tightened, as shown in FIGS. 1 and 3, the mold M is sandwiched between the holding member constituting member 15 and the inclined surface constituting member 17, and the die M is It is held by the mold holder 7.

  Further, as shown in FIG. 3, a force F2 applied to the entire circumference of the slope Mb of the mold M by the inclined surface constituting member 17, and a reaction force of the force F2 (from the holding portion 11 of the holding portion constituting member 15 to the die M The reaction force F3 causes a bending moment in the mold M, and the mold M is elastically deformed into a convex shape as indicated by a two-dot chain line toward the center.

  In addition, you may comprise so that the type | mold M may be pushed with the force F1 perpendicular | vertical to the slope Mb of the type | mold M. FIG. In this case, force F2 and force F4 are generated as component forces of force F1. The component force F4 is a force that compresses the mold M, and the component force F4 also deforms the mold M as indicated by a two-dot chain line.

  Further, the force F2 can be adjusted by adjusting the degree of tightening of the female screw 35 of the pressing member 19 with respect to the male screw 29 of the holding member constituting member 15, and the deformation amount of the mold M indicated by the two-dot chain line (for example, FIG. The value of “Δt1” shown in FIG.

  When viewed from the thickness direction of the mold M in a state where the mold M is held by the mold holding body 7, the center of the mold holding body 7 (the holding portion 11, the through hole 13, and the male screw 29) and the inclined surface constituting member 17. The center of (the inclined surface 21 and the engaged portion 33), the center of the mold M, and the center of the pressing member 19 (the female screw 35 and the engaging portion 39) coincide with each other. In the state where the mold M is held by the mold holder 7, the surface Ma of the mold M on which a fine transfer pattern is formed is closer to the molded product W than the inclined surface constituting member 17 and the pressing member 19. It slightly protrudes (the lower side of FIGS. 1 and 3).

  Here, the operation of the transfer apparatus 1 will be described.

  First, the operation of installing the mold M on the mold holder 7 will be described.

  As an initial state, it is assumed that the moving member 23 is separated from the molded article holding body 5 and only the holding portion constituting member 15 is attached to the moving member 23.

  In this initial state, the mold M is appropriately installed in contact with the holding portion 11, and the inclined surface constituting member 17 is appropriately installed so that the inclined surface 21 of the inclined surface constituting member 17 is in contact with the inclined surface Mb of the mold M. .

  Subsequently, the female screw 35 of the pressing member 19 is screwed into the male screw 29 of the holding portion constituting member 15 so that the engaging portion 39 of the pressing member 19 contacts the engaged portion 33 of the inclined surface constituting member 17. The pressing member 19 is installed.

  Subsequently, the tightness of the female screw 35 of the pressing member 19 is adjusted as appropriate so that the surface Ma of the mold M is appropriately convex (a convex surface that does not cause a hollow when transferred).

  Here, since the deformation | transformation of the type | mold M when the type | mold M was hold | maintained with the type | mold holding body 7 as mentioned above was calculated | required by the finite element method, this result is shown in FIG. In FIG. 5, the deformation amount of the mold M is exaggerated.

  FIG. 5 shows a quarter of the truncated cone-shaped mold M, and the mold M indicated by a two-dot chain line in FIG. 5 is not held by the mold holding body 7 (no external force is applied). The original shape of the mold M is shown, and the upper surface Ma and the lower surface Mc are planar.

  A mold M indicated by a solid line in FIG. 5 shows a deformed shape of the mold M when held by the mold holder 7, and the surface Ma of the mold M on which a fine transfer pattern is formed is the mold M. As it goes toward the center, it gradually becomes convex (convex downward in FIG. 5). On the other hand, the surface Mc facing the surface Ma is gradually concaved toward the center of the mold M.

  Next, an operation for transferring a fine transfer pattern from the mold M to the product W will be described.

  First, as an initial state, the mold M is placed on the mold holder 7 in a state where it is appropriately convex at the center, and the molded article holder 5 holds the molded article W before transfer. It shall be. In this initial state, the mold M and the workpiece W are separated from each other.

  In this initial state, under the control of the control device, the mold holder 7 is lowered and the molded product W is pressed by the mold M, ultraviolet rays are generated from the ultraviolet generator, and the molded product W is irradiated with ultraviolet rays. .

  Subsequently, after the ultraviolet curable resin W2 of the product to be molded W is cured, the mold holder 7 is raised and the mold M is separated from the product to be molded W. Thereafter, when the transferred molded product W is replaced with the next molded product (molded product before transfer) W, the initial state is restored.

  When the alignment between the mold M and the molded product W is automatically adjusted by the camera CM, the mold holder 7 is lowered and immediately before pressing the molded product W with the mold M (the mold M and the molded product W). When the mold holder 7 is separated from each other), the lowering of the mold holding body 7 is stopped, and the camera CM is placed near the mold M under the control of the control device (see FIG. 1). The (alignment mark) and the eye mark of the molded product W are photographed with the camera CM. The photographed image is subjected to image processing by the control device, and the alignment between the mold M and the workpiece W is automatically adjusted.

  In the automatic adjustment, the molded product holder 5 is not shown in a direction orthogonal to the moving direction of the mold holder 7 (for example, the left-right direction in FIG. 1 or the direction orthogonal to the paper surface in FIG. 1). It is assumed that the actuator can be moved and positioned relative to the mold holder 7 by an actuator such as a motor.

  According to the transfer apparatus 1, the portion Ma of the mold M on which a fine transfer pattern is formed is deformed so as to gradually protrude toward the center. Even if the rigidity is small in the thickness direction of the mold M, a fine transfer pattern provided in the center of the mold M is molded without providing a member for backing up the mold M such as backup glass. It is possible to prevent occurrence of a phenomenon that is not transferred to the product W (so-called hollowing out phenomenon), and accurate transfer can be performed.

  In order to prevent the above-described hollowing out phenomenon, it is conceivable that the central portion of the mold M is processed to be slightly convex in advance on the molded product W side, but this processing is difficult and correction (adjustment of the mold deflection) ) Etc. are also difficult to adopt and difficult to adopt.

  Further, according to the transfer device 1, since the mold M is held by pressing the inclined surface Mb of the mold M, the mold M is caused by the force F2 and the force F3 applied to the mold M when the mold M is held. The part Ma of the mold M, which is elastically deformed and has a fine transfer pattern, gradually becomes convex toward the center. Therefore, it is possible to suppress the occurrence of a void phenomenon during transfer with a simple configuration.

  Further, according to the transfer device 1, the through hole 13 in which the backup glass does not exist is provided in the center of the mold holder 7. Therefore, if the camera CM is installed in the through hole 13, the camera CM is changed to the mold M. Therefore, it is possible to obtain a more accurate image than in the prior art, and image processing is performed on this image to adjust the alignment of the molded product W with respect to the mold M more accurately than in the past.

  Further, according to the transfer device 1, when the mold M is pressed by the pressing member 19 to hold the mold M by the mold holding body 7, the inclined surface Mb of the mold M and the inclined surface 21 of the inclined surface constituting member 17 are mutually connected. The mold M can be held in a stable state.

  That is, when the inclined surface constituting member 17 and the pressing member 19 are integrally formed, the inclined surface 21 is difficult to be deformed because the rigidity of the portion other than the inclined surface 21 (the portion where the female screw 35 is formed) is high. The inclined surface 21 and the inclined surface Mb of the mold M are difficult to come into surface contact with each other, and the mold holder 7 is difficult to stably hold the mold M. However, since the inclined surface constituting member 17 and the pressing member 19 are separate, when the mold M is pushed by the inclined surface constituting member 17, the rigidity of the inclined surface constituting member 17 is relatively small. The inclined surface constituting member 17 is easily deformed. The inclined surface Mb of the mold M and the inclined surface 21 of the inclined surface constituting member 17 are in surface contact with each other, and the mold M can be held in a stable state by the mold holding body 7.

  Further, if the inclined surface constituting member 17 and the pressing member 19 are integrally formed, the female screw 35 is elastically deformed by a force received from the inclined surface 21 every time transfer is performed, and is loosened by the female screw 35. There is a risk that problems such as these may occur. However, since the inclined surface constituting member 17 and the pressing member 19 are separate, deformation of the female screw 35 of the pressing member 19 during transfer can be reduced, and loosening of the female screw 35 can be prevented. .

  In addition, although it is desirable that the inclined surface constituent member 17 and the pressing member 19 are separate, the pressing member 19 and the inclined surface constituent member 17 may be configured integrally. Further, the mold is formed in a form in which the mold M and the inclined surface constituting member 17 are integrated, and the integrated mold is pressed by the pressing member 19, and the surface of the integrated mold (a fine transfer pattern is formed). The structure may be such that the formed surface) is slightly convex toward the center.

  FIG. 4 is a view showing a modification of the mold holder 7a.

  The mold holder 7a shown in FIG. 4 holds the pressing member 19a by a fastening member such as a plurality of bolts provided at positions for distributing (for example, distributing) the circumferences of the holding member constituting member 15a and the pressing member 19a. It differs from the mold holder 7 shown in FIGS. 1 and 2 in that it is fixed to the component member 15a, and the other points are configured in substantially the same manner as the mold holder 7 shown in FIG. 1 and FIG. The effect is almost the same.

  In addition, the protrusion amount of the surface Ma of the mold | type M can be adjusted suitably by adjusting the dimension h1 shown in FIG. The dimension h1 is defined by the contact surface (annular plane) 39 of the pressing member 19a that contacts the inclined surface constituting member 17 and the contact surface (annular plane) 41 of the pressing member 19a that contacts the holding portion constituting member 15a. Is the distance between.

  Further, although the entire circumference of the mold M is pressed by the inclined surface constituting member 17, it is not always necessary to be the entire circumference. The slope Mb of the mold M is partially pressed to hold the mold M and become convex. It may be configured to be deformed.

  In the above description, the case where the mold M has a truncated cone shape is taken as an example, but the mold M may be formed in a truncated pyramid shape (for example, a quadrangular pyramid).

  In this case, the holding portion constituting members 15 and 15a, the through hole 13, the holding portion 11, the inclined surface constituting member 17, and the pressing members 19 and 19a also have a polygonal ring shape (for example, a rectangular ring shape) according to the shape of the mold M. It is assumed that it is formed. Furthermore, the inclined surface constituting member 17 may be divided according to the number of sides of the mold M, for example. By dividing in this way, the inclined surface constituting member 17 can be easily manufactured.

  Here, since the deformation | transformation of the type | mold M when the type | mold M formed in square pyramid shape with the type | mold holding body 7 was hold | maintained suitably as mentioned above was calculated | required with the finite element method, this result is shown in FIG. In FIG. 6, the deformation amount of the mold M is exaggerated in the same manner as in FIG. Further, FIG. 6 shows a quarter of the quadrangular frustum-shaped mold M, and the mold M indicated by a two-dot chain line in FIG. 6 is not held by the mold holding body 7a (external force is applied). The original shape of the mold M is not shown, and the upper surface Ma and the lower surface Mc are planar.

  A mold M indicated by a solid line in FIG. 6 shows a deformed shape of the mold M when held by the mold holding body 7a, and the surface Ma of the mold M on which a fine transfer pattern is formed is the mold M. As it goes toward the center, it gradually becomes convex (convex downward in FIG. 6). On the other hand, the surface Mc facing the surface Ma is gradually concaved toward the center of the mold M.

  By the way, in the above description, the backup glass 208 shown in FIG. 7 is completely removed, but a recess (see the broken line in FIG. 7) 43 is provided on the upper side of the backup glass 208 shown in FIG. Also, a thinned structure may be used. Thereby, the camera CM can be brought close to the mold M.

  Further, the transfer device 1 may perform transfer to the product W by the above-described thermal imprint method. In this case, the mold M may be composed of a member that does not transmit ultraviolet rays such as metal.

1 is a front view showing a schematic configuration of a transfer apparatus 1 according to an embodiment of the present invention. It is a figure which shows the outline | summary about the transfer by UV imprint method. FIG. 3 is a diagram showing a schematic configuration of a mold holder 7. It is a figure which shows schematic structure of the type | mold holding body 7a which is a modification of the type | mold holding body. FIG. 6 is a diagram showing a deformed state of a truncated cone-shaped mold M. It is a figure which shows the deformation | transformation state of square-pyramidal type | mold M. FIG. It is a figure which shows schematic structure of the conventional transfer apparatus 200. FIG. It is a figure which shows the deformation | transformation state of the type | mold M when transferring with the conventional transfer apparatus 200. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Transfer apparatus 5 Molded article holding body 7, 7a Type holding body 13 Through-hole 15, 15a Holding part constituting member 17 Inclined surface constituting member 19, 19a Press member 21 Inclined surface M type W Molded article

Claims (6)

In a transfer device for transferring a fine transfer pattern formed on a mold to a molded product,
In order to avoid a transfer defect on the central portion side of the part where the fine transfer pattern is formed, the part is gradually compared with the original form of the part toward the center of the part. A transfer device characterized in that it is deformed so as to be convex. A molded product holder for holding the molded product;
A mold that has a low truncated cone shape or a truncated pyramid shape and has a fine transfer pattern formed on the upper surface, presses the inclined surface of the mold, and the upper surface gradually protrudes toward the center. A mold holding body which is deformed and held so as to move in a direction approaching and moving away from the molded article holding body;
A transfer device comprising: The transfer apparatus according to claim 2, wherein
A transfer apparatus, wherein a through hole is provided in a central portion of the mold holder. In the transfer device according to claim 2 or 3,
The mold holding body includes a holding part constituting member having a holding part with which a lower surface of the mold contacts, an inclined surface constituting member having an inclined surface that comes into contact with an inclined surface of the mold, the holding part constituting member, and the inclination A pressing member that engages with the surface constituent member and presses the inclined surface constituent member toward the holding portion constituent member in order to press the mold against the holding portion constituent member with the inclined surface constituent member. A transfer apparatus characterized by being made.   The transfer method to the said to-be-molded product characterized by being made using the transfer apparatus of any one of Claims 1-4. In a mold holding device of a transfer device for transferring a fine transfer pattern formed on a mold to a molded product,
In order to avoid a transfer defect on the central portion side of the part in which the fine transfer pattern is formed, the part is gradually compared with the original form of the part toward the center of the part. A mold holding device for a transfer device, wherein the die holding device is configured to be deformed and held so as to be convex.

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