JP2009191898A - Bearing with sensor and manufacturing method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a bearing with a sensor capable of accurately predicting a defect caused by temperature abnormality in advance and of obtaining high response, and to provide its manufacturing method. <P>SOLUTION: This bearing with a sensor, which is a rolling bearing having rolling bodies rolling on rolling surfaces, comprises a first temperature sensor 1 arranged inside the bearing and a second temperature sensor 2 arranged at a position where a distance from the rolling surface 22a is different from the distance to the first temperature sensor. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a sensor-equipped bearing in which a rolling element rolls on a rolling surface and a method for manufacturing the same.

  Patent Document 1 discloses a system for detecting deterioration of a lubricant sealed inside a bearing in order to prevent occurrence of abnormality in the bearing. In this system, an IC tag, a power supply circuit, and a lubricant deterioration detection sensor driven by this power supply are mounted on a bearing. The IC tag, the deterioration detection sensor, and the power supply circuit are installed on a substrate to constitute one bearing-equipped electronic component, and this bearing-equipped electronic component is disposed on the outer ring of the bearing (see FIG. 1 of Patent Document 1).

Patent Document 2 discloses a rolling device with a sensor in which sensors such as a vibration sensor and a temperature sensor are provided outside a bearing housing. This sensor measures vibration, temperature, etc., and monitors the abnormal state of the bearing.
JP 2007-256033 A JP 2007-108187 A

  When temperature measurement is performed using the system of Patent Document 1, the rolling surface that is a heat source and the sensor unit cannot be brought close to each other, and therefore temperature monitoring cannot be performed with high response. Even in the apparatus of Patent Document 2, since the distance between the heat generation source and the sensor unit is large, temperature monitoring cannot be performed with high response.

  The present invention has been made in view of the above-described problems of the prior art, and it is an object of the present invention to provide a sensor-equipped bearing capable of reliably predicting a defect caused by temperature abnormality in advance and capable of high response, and a method for manufacturing the same.

  In order to achieve the above object, the sensor-equipped bearing according to the present embodiment is a rolling bearing in which a rolling element rolls on a rolling surface, and includes a first temperature sensor disposed inside the bearing, and the first temperature sensor. And a second temperature sensor arranged at a position where the distance from the rolling surface is different from the temperature sensor.

  According to this sensor-equipped bearing, since the first temperature sensor and the second temperature sensor are arranged at positions where the distance from the rolling surface that the rolling element rolls and becomes a heat generation source is different, both temperature sensors Thus, a temperature difference can be obtained from the sensor output difference, and a malfunction due to temperature abnormality can be predicted in advance with a high response.

  That is, a temperature change on the transfer surface can be detected based on a temperature difference obtained from a sensor output difference between the first temperature sensor and the second temperature sensor. This eliminates the need for a memory and a calculation device for recording a temperature history required when only one temperature sensor is used, and can detect a bearing temperature abnormality with a simple system. For example, a temperature abnormality can be detected by detecting the peak of the temperature difference.

  Further, it is preferable that the first and second temperature sensors have a thin film formed directly on the bearing component from a polymer material by a sputtering method. Since the thin film of the temperature sensor is directly formed on the bearing part from the polymer material by the sputtering method, the thin film of the polymer material can be made thinner than the case where the thin film is adhered to the bearing part and can be bonded without an adhesive. A stronger bond can be obtained, the temperature sensor can be made thinner, and the mounting space is not limited and can be incorporated in any part of the bearing. For this reason, the response of temperature measurement is fast, and it is small and excellent in mass productivity.

  In addition, the first and second temperature sensors can be configured to have sensor portions formed separately from each other on the thin film. The sensor portion can be formed by patterning on the thin film by, for example, an ink jet method or photolithography. Alternatively, the temperature sensor may be adhered by using a thin film directly formed on the bearing component as an adhesive layer.

  The first and second temperature sensors may be provided in a fixed rolling surface, a vicinity of the fixed rolling surface, or a sealing device that seals the inside of the bearing.

  The first and second temperature sensors can be configured to have a cover portion that covers the sensor portion. The cover part can be formed by sputtering, and can protect the sensor part and reduce the thickness of the temperature sensor as a whole.

  Moreover, it is preferable to provide a wireless transmission means for wirelessly transmitting a sensor output difference signal from the first and second temperature sensors. Thereby, since the signal line extended from a bearing becomes unnecessary, the restrictions at the time of designing a bearing using apparatus can be reduced, and the freedom degree of design of a bearing using apparatus can be improved.

  The method for manufacturing a sensor-equipped bearing according to the present embodiment is a method for manufacturing a rolling bearing in which a rolling element rolls on a rolling surface, and a thin film is directly formed on a bearing component from a polymer material by a sputtering method. In addition, a first temperature sensor and a second temperature sensor at a position where the distance from the rolling surface is different from the first temperature sensor are provided.

  According to this method of manufacturing a bearing with a sensor, since a thin film is directly formed on a bearing part from a polymer material by sputtering, the thin film can be made thinner than when a thin film is pasted and can be bonded without an adhesive. Since the first and second temperature sensors are provided on the thin film, the first and second temperature sensors can be made thinner, the mounting space is not limited, and any bearing of the bearing can be obtained. It can also be incorporated into parts. For this reason, the response of temperature measurement is fast, it is small and excellent in mass productivity, and a rolling bearing equipped with a temperature sensor can be manufactured easily and at low cost. Furthermore, since the first temperature sensor and the second temperature sensor are formed at positions where the distance from the rolling surface that is a heat generation source when the rolling element rolls is different, the temperature from the sensor output difference of both temperature sensors. It is possible to obtain a difference, and it is possible to manufacture a rolling bearing including a temperature sensor that can reliably predict in advance a malfunction caused by a temperature abnormality of the bearing and can achieve a high response.

  In the method of manufacturing a bearing with a sensor, it is preferable that the sensor portions of the first and second temperature sensors are formed on the thin film.

  The first and second temperature sensors may be bonded to the bearing component using the thin film as an adhesive layer. In this case, it is preferable that the first and second temperature sensors have a base material formed of the same type of polymer material as the thin film, and the base material is bonded to the thin film by thermocompression bonding.

  ADVANTAGE OF THE INVENTION According to this invention, the malfunctioning resulting from temperature abnormality can be reliably estimated beforehand, and the bearing with a sensor which can perform high response, and its manufacturing method can be provided.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  First, the measurement principle of the differential temperature sensor according to this embodiment will be described. FIG. 1 is a diagram for explaining the measurement principle of a differential type temperature sensor according to this embodiment, and is a plan view schematically showing an example of arrangement of two temperature sensors with respect to a heat generation source. It is the graph (b) which shows roughly the relationship between the temperature measured by one temperature sensor, and time, and the graph (c) which shows roughly the relationship between the temperature difference and time which were obtained from two temperature sensors.

  As shown in FIG. 1A, the first temperature sensor A and the second temperature sensor B are arranged on the measurement object D where the heat generation source H exists, and the first temperature sensor A is the second temperature sensor A. It is arranged at a position closer to the heat generation source H than the temperature sensor B. That is, the first temperature sensor A is arranged close to the heat generation source H and the second temperature sensor B is arranged far away, and the first temperature is between the heat generation source H and the second temperature sensor B. Sensor A is located. For this reason, when heat propagates from the heat generation source H in the direction c, the first temperature sensor A detects the temperature earlier in time, and the second temperature sensor B detects the temperature later than the heat propagation time.

  When heat is generated by the heat generation source H in FIG. 1A and heat is propagated in the direction c, the time of heat propagation is within the temperature rise range as shown in FIG. 1B. In addition, the temperature detection by the first temperature sensor A is earlier than the temperature detection by the second temperature sensor B. Therefore, the detected temperature curve a by the first temperature sensor A indicated by the broken line is the second temperature sensor indicated by the solid line. The detected temperature curve B is shifted to the earlier side (short time side) than the detected temperature curve b.

  Here, the temperature difference (Ta−Tb) between the detected temperature Ta by the first temperature sensor A and the detected temperature Tb by the second temperature sensor B at the same time t in FIG. ) And changes with time, and the peak K of the temperature difference (Ta−Tb) corresponds to the time when the temperature has risen most rapidly. This is because the temperature difference (Ta-Tb) becomes the largest when the temperature rises most rapidly. As described above, by detecting the peak K of the temperature difference (Ta−Tb) by the first and second temperature sensors A and B, it is possible to detect the sudden rise in temperature in the heat generation source H.

  As shown in FIGS. 1A to 1C, the first and second temperature sensors A and B are provided at positions where the distance from the heat generation source H is different, so that the rapid temperature generated by the heat generation source H is increased. The change can be detected from the temperature difference (Ta−Tb) by the temperature sensors A and B. For example, if the heat generation source H in FIG. 1A is a rolling surface on which the rolling elements of the rolling bearing roll, the first and second temperature sensors A and B can be used if the bearing operates normally during use. The temperature detected by is gradually increased with the operating time, but when a bearing abnormality occurs and heat is generated on the rolling surface, the peak K of the temperature difference (Ta-Tb) as shown in FIG. It is possible to detect the occurrence of bearing temperature abnormalities.

<First Embodiment>
FIG. 2 is a cross-sectional view of an essential part showing a rolling bearing with a temperature sensor according to the first embodiment.

  As shown in FIG. 2, the temperature sensor bearing 20 includes an inner ring 21 having a raceway surface 21a on the outer peripheral surface, an outer ring 22 having a raceway surface 22a on the inner peripheral surface, and an outer ring raceway surface 22a and an inner ring raceway surface 21a. A plurality of balls 24, which are rolling elements arranged between them, a cage 23 for holding the plurality of balls 24 in an equal position, and a differential temperature sensor 10 for detecting the bearing temperature. .

  The bearing 20 is a rolling bearing with a seal in the case of inner ring rotation, and includes seals 30 and 33 as sealing devices on both sides. The seal 30 includes a ring-shaped cored bar 31 having a flange on the outer periphery and an elastic body 32 formed by integrally vulcanizing synthetic rubber on the outer side thereof. An annular main portion 34 composed of a portion other than the flange portion and the outer elastic body 32, and a flange portion of the cored bar 31 and an outer elastic body thereof are engaged with a retaining groove 25 on the inner peripheral surface of the outer ring 22. The crimping portion 35 and the lip portion 36 made of an elastic body on the inner peripheral side of the core metal 31 and in contact with the receiving groove 26 on the outer peripheral surface of the inner ring 21 are divided.

  The seal 30 is a rolling bearing by being pushed into the retaining groove 25 on the inner peripheral surface of the outer ring 22 while elastically deforming the crimping portion 35 in a state where the lip portion 36 is in contact with the receiving groove 26 on the outer peripheral surface of the inner ring 21. It is disposed between the 20 outer rings 22 and the inner ring 21. The seal 33 has the same structure as the seal 30 and is similarly disposed between the outer ring 22 and the inner ring 21. As a general material for such seals 30, 33, steel plates such as SPCC and SECC are used as the core metal, and nitrile rubber, acrylic rubber, silicone rubber, fluorine rubber, etc. are used as the elastic body forming the lip. Synthetic rubber is used. The seals 30 and 33 as the sealing device are not limited to the contact rubber seals as shown in FIG. 2, but may be non-contact rubber seals, non-contact steel plates, and the like.

  The temperature sensor 10 is provided on the inner peripheral surface 22b of the outer ring 22 on the fixed side and in the vicinity of the raceway surface 22a, and a through hole P penetrating from the inner peripheral surface 22b of the outer ring 22 to the side surface of the outer ring 22 is provided as a wiring lead-out portion. ing. A plurality of electrical wires 11 extending from the temperature sensor 10 are led out from the side surface of the outer ring 22 through the through-hole P and connected to a temperature detection device 51 installed outside the bearing.

  The above-described differential temperature sensor 10 will be described with reference to FIGS. FIG. 3 is an enlarged plan view showing a temperature sensor provided in the bearing of FIG. FIG. 4 is a main part sectional view schematically showing a sectional configuration of the temperature sensor of FIG. 3, and is a view cut along the IV-IV line direction of FIG.

  As shown in FIGS. 3 and 4, the differential temperature sensor 10 includes a thin film 12 formed directly on the inner peripheral surface 22 b near the raceway surface 22 a of the outer ring 22, platinum formed on the thin film 12, and the like. A film-like first sensor part 1, a film-like second sensor part 2 made of platinum or the like formed on the thin film 12 at a position away from the first sensor part 1, and a first sensor From the film-like electrical connection portion 3 made of platinum or the like formed on the thin film 12 so as to extend from the portion 1 wide, and from the platinum or the like formed on the thin film 12 so as to extend from the second sensor portion 2 wide The film-like electrical connection part 4 and the common film-like electrical connection part 5 made of platinum or the like formed on the thin film 12 so as to extend widely from the first sensor part 1 and the second sensor part 2. And a cover 14 arranged so as to cover the thin film 12, the sensor parts 1, 2 and the electrical connection parts 3-5. The provided, plane has a thin structure thickness in a rectangular shape as a whole.

  As shown in FIG. 3, each of the film-like first and second sensor portions 1 and 2 is composed of a narrow strip portion, and the strip portion is folded back at a plurality of locations in order to ensure a long overall strip length. It is. Electrical wirings 11 (FIG. 2) are electrically connected to the wide electrical connection parts 3 to 5 extending from the sensor parts 1 and 2, respectively.

  As shown in FIGS. 2 to 4, the differential temperature sensor 10 in which the first and second sensor portions 1 and 2 are provided on the common thin film 12 has an inner circumference in the vicinity of the raceway surface 22 a of the outer ring 22. It arrange | positions at the surface 22b and the 1st sensor part 1 exists in the position closer than the 2nd sensor part 2 with respect to the track surface 22a.

  2 is connected to a plurality of electrical wirings 11 extending from the electrical connection portions 3 to 5 of the temperature sensor 10, and the resistance values of the first and second sensor portions 1 and 2 that change due to temperature changes are obtained. Based on the temperature measurement. In this temperature measurement, a temperature difference can be obtained from the output difference between the first sensor unit 1 and the second sensor unit 2.

  Further, the electrical connection parts 3 to 5 are thin films wider than the sensor parts 1 and 2 and the resistance change due to temperature fluctuation is smaller than that of the sensor parts 1 and 2. The influence on accuracy can be suppressed.

  3 and 4, the temperature sensor 10 is formed by directly forming the thin film 12 on the inner peripheral surface 22b in the vicinity of the outer ring raceway surface 22a from a polymer material such as polyimide, PEEK, or PPS by sputtering. The sensor parts 1 and 2 and the electrical connection parts 3 to 5 are formed on a conductive thin film made of platinum (Pt) or the like patterned by, for example, an ink jet method or photolithography, and then the cover 14 is formed by a sputtering method. By forming the sensor parts 1 and 2 and the electrical connection parts 3 to 5 so as to cover the molecular material, they can be directly installed on the outer ring 22 before being incorporated in the rolling bearing 20 as shown in FIG.

  Note that the sputtering method is a method in which an inert material such as argon gas is collided with a target at a high speed to knock out atoms and molecules constituting the target, and the thinned atoms and molecules are deposited on a surface to be formed. It is a method of forming.

  Further, as the above-described polymer material, polyimide, PEEK, and PPS are preferable from the viewpoint of heat resistance and oil resistance, but the present invention is not limited thereto, and other polymer materials may be used.

  In addition, for example, as proposed in the Japanese Patent Application No. 2006-241497 by the applicant of the present invention, the ink jet method uses an ink in which ultrafine particles of metal such as Pt are dispersed in an independent state from a fine nozzle onto the thin film 12. By discharging, a predetermined fine conductive pattern as shown in FIG. 3 can be formed. The ejected ink is baked or left in a low vacuum gas to evaporate and form the sensor parts 1 and 2 and the electrical connection parts 3 to 5 made of a strong conductive thin film.

  As described above, the advantage of directly forming the thin film 12 serving as the substrate of the temperature sensor 10 on the inner peripheral surface 22b of the outer ring 22 from the polymer material using the sputtering method in the bearing 20 with the temperature sensor of FIG. It is as (5).

  (1) The polymer material thin film 12 can be bonded to the surface of a bearing component such as the inner peripheral surface 22b in the vicinity of the raceway surface 22a of the outer ring 22 without an adhesive.

  (2) A stronger bond is obtained between the thin film 12 and the inner peripheral surface 22b of the outer ring 22 than bonding a bearing component made of a metal material or the like and a thin film made of a polymer material with a commercially available adhesive. be able to. This is because an extremely small unit of polymer material is deposited on the surface of the bearing component by the sputtering method, and a strong anchor effect is generated between the surface of the bearing component and the polymer material.

  (3) The film thickness of the thin film 12 can be adjusted freely. Although the minimum thickness of the polymer material film that is commercially available varies depending on the type, it is about 25 μm, and if it is less than that, there is a problem that manufacturing and handling are difficult. When used, a thin film having a film thickness in the range of several tens of nm to several μm can be easily formed, and handling is also easy.

  (4) A thin film 12 is formed from a polymer material on the surface of the bearing component by sputtering, and the sensor parts 1 and 2 and the electrical connection parts 3 to 5 are patterned by an ink jet method or photolithography, and further by a sputtering method. A cover 14 can be formed. Thereby, the temperature sensor 10 can be further thinned so that the entire thickness Z (FIG. 4) is in the range of several tens of nm to several μm, and the temperature measurement accuracy of the temperature sensor 10 is improved. At the same time, the response of temperature detection becomes good, and the detectability of temperature abnormality can be improved.

  (5) Since it can be configured thinner and smaller than the conventional chip type laminated thermistor, there is no restriction on the mounting position of the temperature sensor 10. Therefore, the temperature sensor 10 can be incorporated into any part of the bearing.

  According to the rolling bearing 20 with a temperature sensor of FIGS. 2 to 4, an abnormality occurs during use of the rolling bearing 20, and the balls 24 as rolling elements roll between the inner ring raceway surface 21a and the outer ring raceway surface 22a. Then, when a temperature abnormality (abrupt temperature rise) occurs, as shown in FIG. 3, the first sensor unit 1 of the temperature sensor 10 with respect to the outer ring raceway surface 22a corresponding to the heat generation source H of FIG. Is close and the second sensor unit 2 is at a distant position. Based on the temperature difference obtained from the sensor output difference between the first sensor unit 1 and the second sensor unit 2, the temperature difference ( By detecting the peak K of (Ta-Tb), the temperature change due to the rapid temperature rise can be measured with high response, and the occurrence of temperature abnormality due to the occurrence of abnormality in the bearing can be detected.

  As described above, by providing the first sensor unit 1 and the second sensor unit 2 of the temperature sensor 10 at different positions from the track surface 22a that is a heat generation source, a sudden temperature change is caused by the sensor unit 1. By detecting from the temperature difference between the two, it is possible to reliably predict in advance a problem caused by a temperature abnormality of the bearing, and to detect with high response.

  In addition, since the measurement is performed with a single sensor in the case of a single sensor unit, in order to detect a rapid temperature rise due to an abnormal state of the bearing, the temperature detector 51 in FIG. According to the rolling bearing 20 with the temperature sensor of the present embodiment, the memory for recording the history and the arithmetic unit for detecting the rapid temperature rise from the temperature history recorded in the memory are required. A memory and an arithmetic unit are not required, and a simple temperature abnormality detection system can be configured, thereby detecting a bearing temperature abnormality.

  Furthermore, since the temperature sensor 10 can be configured in a small and thin film, the mounting space for the temperature sensor 10 is not limited and can be incorporated in any part of the bearing, has a quick response, is small, and is excellent in mass productivity. Rolling bearings can be realized.

<Second Embodiment>
FIG. 5 is a cross-sectional view of an essential part showing a rolling bearing with a temperature sensor according to a second embodiment. Since the rolling bearing 20A with a temperature sensor shown in FIG. 5 has the same basic configuration as that of the rolling bearing 20 with a temperature sensor shown in FIG. 1, the same reference numerals are given to the same parts, and the description thereof is omitted.

  A rolling bearing 20A with a temperature sensor in FIG. 5 has the same configuration as the bearing and the configuration and position of the temperature sensor 10, but transmits a sensor signal to the outside wirelessly. That is, a wireless transmission unit 52 including a wireless signal generation device and a power supply circuit is composed of an IC tag, and this wireless transmission unit 52 is provided on the side surface of the outer ring 22 of the rolling bearing 20A. The electrical wiring 11 from the temperature sensor 10 is connected to the wireless transmission unit 52 through a through hole (wiring derivation unit) P in the outer ring 22.

  The sensor output difference signals from the sensor units 1 and 2 of the temperature sensor 10 are transmitted wirelessly from the wireless transmission unit 52, and the sensor output difference signal is received by the wireless signal receiving device 50 outside the bearing as shown in FIG. Based on the output difference signal, the temperature detector 51 measures the temperature difference, detects the temperature difference, and detects the peak of the temperature difference as shown in FIG.

  According to the rolling bearing with temperature sensor 20A of FIG. 5, the temperature difference (Ta− of FIG. 1C) is based on the temperature difference obtained from the sensor output difference between the first sensor unit 1 and the second sensor unit 2. By detecting the peak K of Tb), a temperature change due to a rapid temperature rise can be measured with high response, and the occurrence of temperature abnormality due to the occurrence of abnormality in the bearing can be detected. As a result, it is possible to reliably predict in advance problems caused by bearing temperature abnormalities and enable high-response detection, and it is possible to detect bearing temperature abnormalities with a simple temperature abnormality detection system that does not require memory or an arithmetic unit. . Also, since the wireless transmission means is used as means for sending the sensor output difference signal of the first and second sensor portions of the temperature sensor to the temperature detection device, and the signal cable does not extend from the bearing, the design of the bearing using device Can be reduced, and the degree of freedom in designing the bearing equipment is improved.

  Next, another example of the temperature sensor of FIGS. 3 and 4 will be described with reference to FIG. FIG. 6 is a cross-sectional view of relevant parts similar to FIG. 4 showing another example of the temperature sensor according to the present embodiment.

  A temperature sensor 10A in FIG. 6 has a planar configuration similar to that in FIG. 3 and includes a first sensor unit 1, a second sensor unit 2, and electrical connection units 3 to 5, and an inner portion of the outer ring 22 in the vicinity of the raceway surface 22a. A thin film 16 is formed on the peripheral surface 22b from a polymer material by a sputtering method in the same manner as described above, and the thin film 16 can be used as an adhesive layer for bonding.

  That is, the temperature sensor 10 </ b> A is formed by forming sensor parts 1 and 2 and electrical connection parts 3 to 5 similar to those in FIGS. 3 and 4 on a base material 17 made of the same kind of polymer material film as the thin film 16. The sensor parts 1 and 2 and the electrical connection parts 3 to 5 are formed so as to cover. The temperature sensor 10A can be installed on the inner peripheral surface 22b of the outer ring 22 by bonding the base material 17 to the thin film 16 formed on the inner peripheral surface 22b in the vicinity of the outer ring raceway surface 22a by thermocompression bonding.

  According to the configuration of FIG. 6, the thin film 16 made of the polymer material and the inner peripheral surface 22 b are firmly bonded by using the sputtering method, and the base material 17 made of the polymer material film is the thin film 16 made of the same material. Bonded firmly by thermocompression bonding. In addition, since the thin film 16 as the adhesive layer can be made extremely thin, the thickness of the temperature sensor installed on the inner peripheral surface 22b can be reduced, and the thin film 16 can be disposed anywhere on the bearing.

  Next, the present invention will be described more specifically with reference to examples, but the present invention is not limited to the examples.

  A bearing with a temperature sensor similar to that shown in FIG. 2 was produced by steps (a) to (d) as shown in FIG. FIG. 7 is a side view showing manufacturing steps (a) to (d) of the present embodiment. In manufacturing steps (a) to (d) of FIG. 7, the temperature sensor having the cross-sectional configuration of FIG. 6 is manufactured by the same lithography process as that for semiconductor manufacturing.

  As shown in FIG. 7A, a photoresist 42 having a thickness of about 2 μm was applied onto the polyimide film 41 by spin coating, and a pre-bake treatment was performed.

  Next, as shown in FIG. 7B, a mask patterned in the shape of the first sensor portion, the shape of the second sensor portion, and the shape of the electrical connection portion as shown in FIG. The exposure process is performed from above b), and then the development process is performed using a developing solution, so that the first sensor unit, the second sensor unit, and the electricity corresponding to the mask pattern of FIG. Each pattern of the connection part was formed.

  Next, as shown in FIG. 7C, a platinum film 43 having a thickness of about 250 nm is formed by sputtering, and then on the film 41 by using a lift-off method with acetone as shown in FIG. 7D. By removing the remaining photoresist, the platinum film 43 in FIG. 7D was exposed. After obtaining the temperature sensor as shown in FIG. 9 as described above, annealing was performed under the conditions of 250 ° C. × 5 hours, and wiring work to the electrical connection portion was performed.

  The platinum film 43 in FIG. 7D constitutes the first sensor portion 61, the second sensor portion 62, and the electrical connection portions 63, 64, 65 in FIG. The first sensor unit 61 and the second sensor unit 62 constitute a platinum resistance thermometer, and the electrical resistance of the platinum resistance thermometer varies with temperature change, and the temperature shown in FIG. The temperature is measured by the detection device 51.

  The thin film temperature sensor of FIG. 9 manufactured as described above is heated on the thin film 16 (FIG. 6) formed directly from polyimide on the inner peripheral surface 22b in the vicinity of the raceway surface 22a of the outer ring 22 of FIG. Bonded by pressure bonding.

  The temperature change during the rotation test of the rolling bearing with a differential type temperature sensor obtained as described above was measured. The measurement results are shown in FIGS. As a result, the measured temperature changed as shown in FIG. 10, and a peak could be detected in the temperature difference data at a sudden temperature change point as shown in FIG.

  As described above, the best modes and examples for carrying out the present invention have been described. However, the present invention is not limited to these, and various modifications are possible within the scope of the technical idea of the present invention. is there. For example, in the present embodiment, the temperature sensor 10 has two sensor units. However, the present invention is not limited to this, and may be three or four or more, and a plurality of temperature differences may be detected. Also good.

  2 and 5, the temperature sensor 10 is installed in the vicinity of the outer ring raceway surface 22a. However, the present invention is not limited to this. For example, as shown by a broken line in FIG. It may be provided on the bearing inner side, may be provided on the raceway surface 22a, or may be provided near the inner ring raceway surface 21a. In addition, when providing in the track surface 22a, you may form the dent of minute depth in the track surface previously.

  3 and 6 have a configuration in which two sensor portions 1 and 2 are provided on a common thin film 12 or base material 17, but the present invention is not limited to this, and separately. For example, two temperature sensors having a single sensor unit may be arranged such that the distances to the track surface 22a are different. In this case, for example, one of the temperature sensors having a single sensor portion is provided on the raceway surface 22a, and the other is provided near the raceway surface 22a, or the raceway surface is provided on the inner peripheral surface 22b near the raceway surface 22a. The distance may be different from that of 22a, or may be provided on the core 31 of the seal 30.

  4 and 6, the covers 14 and 19 of the temperature sensors 10 and 10A may be omitted. Further, when there is a margin in the mounting space of the temperature sensor 10A of FIG. 6 inside the bearing, the temperature sensor 10A may be bonded to the bearing component with an adhesive.

  In addition, a large number of temperature sensors can be manufactured at a low cost by forming a large number of temperature sensors on a relatively large film by the steps (a) to (d) in FIG. 7 and then cutting them into individual temperature sensors. Can be produced.

  2 and 5, the inner ring of the rolling bearing is the rotating side, but the outer ring may be the rotating side. In this case, the temperature sensor 10 can be similarly provided on the fixed inner ring. 2 and 5 are single row deep groove ball bearings, but the present invention is not limited to this, and other types of rolling bearings may be used.

  In addition, examples of applications of the rolling bearing with temperature sensor of the present embodiment include automotive bearings, machine tool spindles, etc., for example, automotive electrical components, alternators and intermediate pulleys that are engine auxiliary machines, electromagnetic clutches for car air conditioners, It is preferably applied to rolling bearings such as water pumps, hub units, gas heat pump electromagnetic clutches, compressors, linear guide devices, and ball screws.

It is a figure for demonstrating the measurement principle of the differential type temperature sensor by this Embodiment, and is a top view which shows schematically the example of arrangement | positioning of two temperature sensors with respect to a heat-generation source (a) By two temperature sensors It is the graph (b) which shows roughly the relationship between the measured temperature and time, and the graph (c) which shows roughly the relationship between the temperature difference obtained from two temperature sensors, and time. It is principal part sectional drawing which shows the rolling bearing with a temperature sensor by 1st Embodiment. It is a top view which expands and shows the temperature sensor provided in the inside of the bearing of FIG. FIG. 4 is a cross-sectional view of a principal part schematically showing a cross-sectional configuration of the temperature sensor of FIG. 3, which is a view cut along the IV-IV line direction of FIG. It is principal part sectional drawing which shows the rolling bearing with a temperature sensor by 2nd Embodiment. It is principal part sectional drawing similar to FIG. 4 which shows another example of the temperature sensor by this Embodiment. It is a figure which shows the manufacturing process (a) thru | or (d) of a present Example. It is an enlarged plan view which shows the mask pattern used at the exposure process of FIG.7 (b). It is an enlarged plan view which shows the temperature sensor obtained by the present Example. It is a figure which shows the example of the temperature change in the bearing rotation test of a present Example. It is a figure which shows the example of the temperature difference change in the bearing rotation test of a present Example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10,10A Temperature sensor 1 1st sensor part 2 2nd sensor part 3-5 Electrical connection part 11 Electrical wiring 12, 16 Thin film 20, 20A Rolling bearing 21 Inner ring 21a Inner ring raceway surface 22 Outer ring 22a Outer ring raceway surface 22b Inner peripheral surface 24 balls, rolling elements 30, 33 seal 31 core metal 50 wireless signal receiver 51 temperature detector 52 wireless transmission part A first temperature sensor B second temperature sensor D object to be measured H heat generation source K peak

Claims (10)

A rolling bearing in which a rolling element rolls on a rolling surface,
A sensor comprising: a first temperature sensor disposed in a bearing; and a second temperature sensor disposed at a position different from the rolling surface with respect to the first temperature sensor. With bearing.   The sensor-equipped bearing according to claim 1, wherein a temperature change in the transfer surface is detected based on a temperature difference obtained from a sensor output difference between the first temperature sensor and the second temperature sensor.   3. The sensor-equipped bearing according to claim 1, wherein the first and second temperature sensors have a thin film directly formed on a bearing component from a polymer material by a sputtering method. 4.   The sensor-equipped bearing according to claim 3, wherein the first and second temperature sensors each have a sensor portion formed separately on the thin film.   5. The sensor according to claim 1, wherein the first and second temperature sensors are provided in a sealing device that seals the rolling surface, the vicinity of the rolling surface, or the inside of the bearing. bearing.   The sensor-equipped bearing according to any one of claims 1 to 5, further comprising wireless transmission means for wirelessly transmitting a sensor output difference signal from the first and second temperature sensors. A rolling bearing manufacturing method in which a rolling element rolls on a rolling surface,
A thin film is directly formed on the bearing component from a polymer material by a sputtering method, and a second temperature sensor is formed on the thin film at a position where the distance from the rolling surface is different from the first temperature sensor. A temperature sensor, and a method of manufacturing a sensor-equipped bearing.   The method for manufacturing a sensor-equipped bearing according to claim 7, wherein the sensor portions of the first and second temperature sensors are formed on the thin film.   The method for manufacturing a sensor-equipped bearing according to claim 7, wherein the first and second temperature sensors are bonded to the bearing component using the thin film as an adhesive layer.   The sensor-equipped bearing according to claim 9, wherein the first and second temperature sensors include a base material formed of the same type of polymer material as the thin film, and the base material is bonded to the thin film by thermocompression bonding. Manufacturing method.

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