JP2009172965A - Photosensitive web peeling apparatus and peeling method - Google Patents

Abstract

An object of the present invention is to prevent a shock when a substrate is separated from a peeling roller as much as possible with a simple configuration and to peel a support layer from the substrate with good accuracy.
An automatic base peeling apparatus includes a peeling roller that continuously peels a base film from a glass substrate, and an axial direction of the peeling roller that is disposed on the side of the glass substrate. And a plurality of guide rollers 106 capable of holding the glass substrate 24 when the film 26 is peeled off. The guide rollers 106 disposed on both ends in the axial direction of the peeling roller 104 are disposed at positions higher than the guide rollers 106 disposed on the central side in the axial direction of the peeling roller 104.
[Selection] Figure 5

Description

  In the present invention, a photosensitive web in which a support layer and at least a photosensitive material layer are laminated is adhered to the substrate so that the photosensitive material layer side faces the substrate to obtain a bonded substrate. The present invention relates to a peeling apparatus and a peeling method for a photosensitive web to be peeled from the substrate.

  For example, a liquid crystal panel substrate, a printed wiring substrate, and a PDP panel substrate are configured by attaching a photosensitive sheet (photosensitive web) having a photosensitive material (photosensitive resin) layer to the substrate surface. In the photosensitive sheet body, a photosensitive material layer and a protective film are sequentially laminated on a flexible plastic support.

  Therefore, a pasting device (laminating device) used for pasting this type of photosensitive sheet body normally transports substrates such as a glass substrate and a resin substrate spaced apart from each other by a predetermined interval, and to the substrate. In accordance with the range of the photosensitive material layer to be pasted, a method of removing the protective film from the photosensitive sheet body is employed.

  For example, in the film sticking method and apparatus disclosed in Patent Document 1, as shown in FIG. 11, the laminated film 1a fed out from the film roll 1 is wound around the guide rolls 2a and 2b and is transported horizontally. It extends along the surface. A rotary encoder 3 that outputs a number of pulse signals corresponding to the feed amount of the laminated film 1a is attached to the guide roll 2b.

  A laminate film 1a extending along a horizontal film transport surface is wound around a suction roll 4, and a half cutter 5 and a cover film peeling device 6 are interposed between the guide roll 2b and the suction roll 4. And are provided.

  The half cutter 5 includes a pair of disk cutters 5a and 5b. The disc cutters 5a and 5b move along the film width direction of the laminated film 1a, thereby cutting the cover film 1b of the laminated film 1a integrally with the photosensitive resin layer (not shown) on the back side thereof. .

  The cover film peeling apparatus 6 winds the adhesive tape 7a fed from the adhesive tape roll 7 to the cover film 1b strongly between the pressing rolls 8a and 8b, and then winds it by the take-up roll 9. Thereby, the cover film 1b is peeled off from the photosensitive resin layer and wound around the winding roll 9 together with the adhesive tape 7a.

  Downstream of the suction roll 4, lamination rolls 12 a and 12 b are provided for laminating and laminating the laminate film 1 a on the upper surfaces of a plurality of substrates 11 that are sequentially and intermittently conveyed by the substrate conveying device 10. . A support film take-up roll 13 is disposed downstream of the lamination rolls 12a and 12b. The translucent support film 1c affixed to the substrate 11 is peeled off from the substrate 11 by moving along the peripheral surface of the peeling roller 15 disposed on the transport roller 14, and the support film take-up roll 13 is wound up.

JP-A-11-34280

  By the way, the axial length of the peeling roller 15 is set corresponding to the dimension of the substrate 11 in the width direction (the direction of arrow L in FIG. 12). For this reason, particularly when a wide substrate 11 is used, a peeling roller 15 that is considerably long in the axial direction is employed. For this reason, the peeling roller 15 is likely to be bent due to its own weight, and a gap corresponding to one substrate 11 is formed between the peeling roller 15 and the conveying roller 14 in the central portion of the peeling roller 15. On the other hand, a considerably large gap G is formed at both ends of the peeling roller 15.

  Therefore, when the translucent support film 1 c is peeled from the substrate 11, the translucent support film 1 c is pulled and the substrate 11 is in close contact with the outer peripheral surface of the peeling roller 15. For this reason, both ends in the width direction of the substrate 11 are held in close contact with the peeling roller 15 while being separated from the conveying roller 14.

  However, when the rear end side of the substrate 11 comes close to the peeling roller 15, both end portions in the width direction of the substrate 11 may be separated from the peeling roller 15 and fall onto the conveying roller 14. Thereby, a part of the photosensitive resin layer (or a part of the cushion layer) adheres to the translucent support film 1c and is easily peeled off from the substrate 11 side, and damage to the substrate 11 is caused. There's a problem.

  The present invention solves this type of problem, and with a simple configuration, the impact when the substrate is separated from the peeling roller is prevented as much as possible, and the support layer is peeled off from the substrate with good accuracy. An object of the present invention is to provide a peeling apparatus and a peeling method for a photosensitive web.

  In the present invention, a photosensitive web in which a support layer and at least a photosensitive material layer are laminated is adhered to the substrate so that the photosensitive material layer side faces the substrate to obtain a bonded substrate. The present invention relates to a photosensitive web peeling apparatus for peeling from a substrate.

  The peeling device includes a transport mechanism that slides in contact with the substrate and transports the attached substrate, a peeling roller that is disposed on the support layer side and peels the support layer from the substrate, and an axial direction of the peeling roller on the substrate side. And a plurality of guide rollers that can hold the substrate when the support layer is peeled off.

  The plurality of guide rollers correspond to axial deformation due to the weight of the peeling roller, and are arranged at different height positions on the both axial ends and the axial center.

  Further, the pasted substrate is conveyed with the substrate facing downward, and the plurality of guide rollers are arranged below the peeling roller, and the arrangement positions on both ends in the axial direction are more than the arrangement positions on the central side in the axial direction. Is preferably set at a higher position.

  Furthermore, it is preferable that the peeling device is provided with a spring for pressing the plurality of guide rollers toward the substrate.

  Furthermore, this peeling apparatus preferably includes an actuator capable of moving a plurality of guide rollers back and forth with respect to the substrate.

  Furthermore, a plurality of substrates are integrally bonded to the photosensitive web, and the peeling roller is peeled off from the substrate integrally with a part of the photosensitive web exposing the support layer between the substrates. It is preferable to make it.

  The present invention also provides a bonded substrate obtained by adhering a photosensitive web in which a supporting layer and at least a photosensitive material layer are laminated to the substrate so that the photosensitive material layer side faces the substrate, and then supporting the supporting web. The present invention relates to a photosensitive web peeling method for peeling a layer from the substrate.

  In this peeling method, a plurality of guide rollers are arranged along the axial direction of the peeling roller that peels the support layer from the substrate, and the plurality of guide rollers correspond to axial deformation due to the weight of the peeling roller. When the support layer is peeled off from the substrate via the peeling roller while being transported to the attached substrate, the plurality of support layers are disposed at different height positions on the axially opposite ends and the axially central side. The substrate on which at least the support layer is peeled off is held via the guide roller.

  Further, the plurality of substrates are integrally bonded to the photosensitive web, and the peeling roller is configured to peel the support layer from the substrate integrally with a part of the photosensitive web exposed between the substrates. It is preferable.

  In the present invention, the plurality of guide rollers correspond to the deformation in the axial direction due to the weight of the peeling roller, and are arranged at different height positions on the both axial ends and the axial central side. For this reason, the substrate is held in close contact with the outer peripheral surface of the peeling roller via the guide roller while the support layer is peeled off. Thereby, it is possible to suppress as much as possible the impact caused by the separation of the substrate from the peeling roller, and it is possible to satisfactorily prevent peeling of necessary portions other than the support layer, damage to the substrate, and the like. .

  FIG. 1 is a schematic configuration diagram of a photosensitive laminate manufacturing apparatus 20 incorporating a peeling apparatus according to the first embodiment of the present invention.

  In the manufacturing process of the color filter for liquid crystal or organic EL, the manufacturing apparatus 20 performs an operation of thermally transferring the photosensitive resin layers 28 (described later) of the long photosensitive webs 22a and 22b in parallel to the glass substrate 24. Do. Hereinafter, the glass substrate 24 on which the photosensitive webs 22a and 22b are laminated is also referred to as a bonded substrate 24a. The photosensitive webs 22a and 22b are each set to a predetermined width dimension. For example, the photosensitive web 22a is configured to be wider than the photosensitive web 22b.

  FIG. 2 is a cross-sectional view of the photosensitive webs 22 a and 22 b used in the manufacturing apparatus 20. The photosensitive webs 22a and 22b are basically configured by laminating a flexible base film (support) 26, a photosensitive resin layer (photosensitive material layer) 28, and a protective film 30.

  As shown in FIG. 1, the manufacturing apparatus 20 accommodates two (or more than two) photosensitive web rolls 23a and 23b obtained by winding photosensitive webs 22a and 22b in a roll shape. Width of the first and second web feed mechanisms 32a and 32b capable of synchronously feeding the photosensitive webs 22a and 22b from the photosensitive web rolls 23a and 23b, and the protective film 30 of each of the fed photosensitive webs 22a and 22b. Each protective film 30 includes first and second processing mechanisms 36a and 36b that form a half-cut portion 34 that is a boundary position that can be cut in the direction, and an adhesive label 38 (see FIG. 3) that partially includes a non-adhesive portion 38a. First and second label adhesion mechanisms 40a and 40b to be adhered to each other.

  Downstream of the first and second label adhering mechanisms 40a and 40b are first and second reservoir mechanisms 42a and 42b for changing the photosensitive webs 22a and 22b from tact feed to continuous feed, and the respective photosensitive webs. First and second peeling mechanisms 44a and 44b for peeling the protective film 30 from the 22a and 22b at a predetermined length interval, and a substrate transport mechanism 45 for transporting the glass substrate 24 to a pasting position while being heated to a predetermined temperature. And an affixing mechanism 46 for adhering the photosensitive resin layer 28 exposed by peeling off the protective film 30 to the glass substrate 24 integrally and in parallel.

  First and second detection mechanisms 47a and 47b that directly detect the respective half-cut portions 34, which are the boundary positions of the photosensitive webs 22a and 22b, are disposed in the vicinity of the attachment position in the attachment mechanism 46. The

  In the vicinity of the downstream of the first and second web feed mechanisms 32a and 32b, the rear ends of the substantially used photosensitive webs 22a and 22b and the tips of the newly used photosensitive webs 22a and 22b are pasted, respectively. Is attached. A film terminal position detector 51 is disposed downstream of the attachment table 49 in order to control the displacement in the width direction due to the winding displacement of the photosensitive web rolls 23a and 23b.

  The first and second processing mechanisms 36a and 36b are provided with a roller pair 50 for calculating the roll diameter of each photosensitive web roll 23a and 23b accommodated and wound in the first and second web feed mechanisms 32a and 32b. Arranged downstream. Each of the first and second processing mechanisms 36a and 36b includes a single round blade 52. The round blade 52 travels in the width direction of the photosensitive webs 22a and 22b, and the photosensitive webs 22a and 22b are predetermined. A half-cut portion 34 is formed at the position.

  As shown in FIG. 2, the half-cut portion 34 needs to cut at least the protective film 30. In practice, in order to cut the protective film 30 with certainty, the photosensitive resin layer 28 to the base film 26 are cut. The cutting depth of the round blade 52 is set. In place of the round blade 52, the half-cut portion 34 may employ, for example, a method of forming with a knife blade, a push cutting blade (Thomson blade) or the like in addition to a cutting method using laser light or ultrasonic waves. .

  Two first and second processing mechanisms 36a and 36b are disposed at a predetermined distance apart in the conveying direction of the photosensitive webs 22a and 22b (in the direction of arrow A), respectively, and two are placed with the remaining portion 30b interposed therebetween. Two half-cut portions 34 may be formed simultaneously.

  The half-cut part 34 is set, for example, at a position where it enters the glass substrates 24 on both sides by 10 mm. A portion sandwiched between the half cut portions 34 between the glass substrates 24 functions as a mask when the photosensitive resin layer 28 is attached to the glass substrate 24 in a frame shape in an attaching mechanism 46 described later.

  The first and second label bonding mechanisms 40a and 40b connect the peeling portion 30aa at the front side of the peeling side and the peeling portion 30ab at the back side of the peeling side in order to leave the remaining portion 30b of the protective film 30 correspondingly between the glass substrates 24. An adhesive label 38 is supplied. As shown in FIG. 2, the protective film 30 has a remaining portion 30 b sandwiched between the first peeled portion 30 aa and the later peeled portion 30 ab.

  As shown in FIG. 3, the adhesive label 38 is formed in a strip shape, and is formed of, for example, the same resin material as the protective film 30. The adhesive label 38 has a non-adhesive portion (including a slight adhesion) 38a to which a pressure-sensitive adhesive is not applied at the center, and the front side of the non-adhesive portion 38a, that is, both ends in the longitudinal direction of the adhesive label 38 It has the 1st adhesion part 38b adhered to exfoliation part 30aa, and the 2nd adhesion part 38c adhered to back exfoliation part 30ab.

  As shown in FIG. 1, each of the first and second label bonding mechanisms 40a and 40b includes suction pads 54a to 54g, each of which can attach a maximum of seven adhesive labels 38 with a predetermined interval between them. A pedestal 56 for holding the photosensitive webs 22a and 22b from below is disposed so as to be movable up and down at the position where the adhesive label 38 is attached by the pads 54a to 54g.

  The first and second reservoir mechanisms 42a and 42b are configured to absorb the speed difference between the tact conveyance of the upstream photosensitive webs 22a and 22b and the continuous conveyance of the downstream photosensitive webs 22a and 22b. A movable dancer roller 60 is provided. The second reservoir mechanism 42b includes a dancer for adjusting the lengths of the conveyance paths until the photosensitive webs 22a and 22b sent from the first and second web delivery mechanisms 32a and 32b reach the attaching mechanism 46. A roller 61 is provided.

  The first and second peeling mechanisms 44a and 44b arranged downstream of the first and second reservoir mechanisms 42a and 42b block the tension fluctuation on the delivery side of the photosensitive webs 22a and 22b, respectively, and the tension at the time of lamination is reduced. A suction drum 62 is provided for stabilization. In the vicinity of each suction drum 62, a peeling roller 63 is disposed, and the protective film 30 peeled off from the photosensitive webs 22a and 22b via the peeling roller 63 is respectively wound on the protective film except for the remaining portion 30b. It is wound around the take-up portion 64.

  On the downstream side of the first and second peeling mechanisms 44a and 44b, first and second tension control mechanisms 66a and 66b capable of applying tension to the photosensitive webs 22a and 22b are disposed. Each of the first and second tension control mechanisms 66a and 66b includes a cylinder 68, and the tension dancer 70 swings and displaces under the driving action of the cylinder 68. The tension of 22a, 22b can be adjusted.

  The first and second detection mechanisms 47a and 47b are provided with photoelectric sensors 72a and 72b such as laser sensors and photosensors. The photoelectric sensors 72a and 72b are wedge-shaped groove-shaped portions of the half-cut portion 34, and are protected. A step due to the thickness of the film 30 or a change due to a combination thereof is directly detected, and this detection signal is used as a boundary position signal. The photoelectric sensors 72a and 72b are disposed to face the backup rollers 73a and 73b. In place of the photoelectric sensors 72a and 72b, an image inspection means such as a non-contact displacement meter or a CCD camera may be used. Further, the CCD camera may be disposed at a position not facing the backup rollers 73a and 73b.

  The substrate transport mechanism 45 includes a plurality of sets of substrate heating units (for example, heaters) 74 disposed so as to sandwich the glass substrate 24 and a transport unit 76 that transports the glass substrate 24 in the direction of arrow C. The substrate heating unit 74 constantly monitors the temperature of the glass substrate 24. When an abnormality occurs, the conveyance unit 76 is stopped or alarmed, and the abnormal information is transmitted to cause the abnormal glass substrate 24 to be discharged NG in the subsequent process. It can be used for management or production management. An air levitation plate (not shown) is disposed in the conveyance unit 76, and the glass substrate 24 is levitated and conveyed in the direction of arrow C. The glass substrate 24 can be transported by a roller conveyor.

  A substrate stocker 71 that accommodates a plurality of glass substrates 24 is provided upstream of the substrate heating unit 74. Each glass substrate 24 accommodated in the substrate stocker 71 is sucked and taken out by a suction pad 79 provided in the hand portion 75 a of the robot 75 and inserted into the substrate heating portion 74.

  The affixing mechanism 46 includes rubber rollers 80a and 80b that are arranged vertically and are heated to a predetermined temperature. The backup rollers 82a and 82b are in sliding contact with the rubber rollers 80a and 80b, and the backup roller 82b is pressed toward the rubber roller 80b by the pressure cylinders 84a and 84b constituting the roller clamp portion 83.

  In the vicinity of the rubber roller 80a, a contact prevention roller 86 for preventing the photosensitive webs 22a and 22b from contacting the rubber roller 80a is movably disposed. In the vicinity of the upstream of the attaching mechanism 46, a preheating unit 87 for preheating the photosensitive webs 22a and 22b to a predetermined temperature is disposed. This preheating part 87 is provided with heating means, such as an infrared bar heater, for example.

  The glass substrate 24 is transported in the direction of arrow C from the pasting mechanism 46 via the transport path 88. In the transport path 88, film transport rollers 90a and 90b and a substrate transport roller 92 are disposed. The distance between the rubber rollers 80 a and 80 b and the substrate transport roller 92 is preferably set to be equal to or less than the length of one glass substrate 24.

  A plurality of transport rollers 96 constituting the transport mechanism 94 are arranged in the arrow C direction downstream of the attaching mechanism 46. A cooling mechanism 98 and a base automatic peeling device 100 that is a peeling device according to the first embodiment are provided along the transport mechanism 94.

  The base automatic peeling apparatus 100 presses the remaining portion 30b of the protective film 30 exposed between the glass substrates 24 so that the remaining portion 30b is integrated with the photosensitive resin layer 28 corresponding to the half-cut portion 34 from the glass substrate 24. A pre-peeling portion 102 to be peeled, a peeling roller 104 which is disposed downstream of the pre-peeling portion 102 and continuously peels the base film 26 from the glass substrate 24, and a shaft of the peeling roller 104 on the glass substrate 24 side. A plurality of guide rollers 106 arranged along the direction and capable of holding the glass substrate 24 when the base film 26 is peeled off.

  As shown in FIG. 4, the pre-peeling portion 102 presses the remaining portion 30 b of the protective film 30 exposed between the glass substrates 24 to peel the remaining portion 30 b from the glass substrate 24, and the peeling An elevating cylinder 110 is provided for advancing and retracting the member 108 relative to the remaining portion 30b.

  As shown in FIG. 5, the conveying roller 96 includes a plurality of roller portions 96a arranged in the axial direction of the peeling roller 104 (in the direction of arrow L), and a shaft portion 96b that integrally supports the plurality of roller portions 96a. Have.

  The peeling roller 104 is set to have an axial length corresponding to the dimension in the width direction (direction of arrow L in FIG. 5) intersecting with the conveyance direction of the glass substrate 24. The peeling roller 104 is configured to be relatively long, and a central portion in the axial direction is bent downward by its own weight. A plurality of guide rollers 106 are arranged on both sides in the direction of the arrow L via support bases 111a and 111b, and correspond to the axial deformation caused by the weight of the peeling roller 104. Arranged at different heights on the center side.

  Specifically, the guide rollers 106 arranged on both axial sides of the peeling roller 104 are arranged at positions higher than the guide rollers 106 arranged on the axially central side of the peeling roller 104. Each guide roller 106 is preferably configured to be individually rotatable, and is formed of, for example, a polyamide-based resin, a PEEK (polyether ether ketone) resin, or a polyethylene resin.

  As shown in FIG. 1, the base film 26 peeled off by the peeling roller 104 is taken up by a take-up shaft 112. The take-up shaft 112 applies torque to the base film 26 by controlling the torque during driving.

  A measuring instrument 130 for measuring the area position of the photosensitive resin layer 28 actually attached to the glass substrate 24 is disposed downstream of the automatic base peeling apparatus 100. The measuring instrument 130 includes a camera 132 such as a CCD, for example, and the camera 132 is disposed for photographing the glass substrate 24 on which the photosensitive resin layer 28 is attached.

  A photosensitive laminate stocker 136 that houses a plurality of photosensitive laminates 134 is provided downstream of the measuring device 130. The photosensitive laminate 134 from which the base film 26 and the remaining portion 30b have been peeled off from the attachment substrate 24a by the automatic base peeling apparatus 100 is sucked and taken out by the suction pad 140 provided on the hand portion 138a of the robot 138, and is exposed to light. Is accommodated in the conductive laminate stocker 136.

  In the manufacturing apparatus 20, the first and second web feed mechanisms 32a and 32b, the first and second processing mechanisms 36a and 36b, the first and second label adhesion mechanisms 40a and 40b, and the first and second reservoir mechanisms 42a and 42b. The first and second peeling mechanisms 44a and 44b, the first and second tension control mechanisms 66a and 66b, and the first and second detection mechanisms 47a and 47b are arranged above the attaching mechanism 46. On the contrary, the first and second web feed mechanisms 32a and 32b to the first and second detection mechanisms 47a and 47b are arranged below the affixing mechanism 46, and the photosensitive webs 22a and 22b are moved up and down. However, the photosensitive resin layer 28 may be attached to the lower side of the glass substrate 24, or the entire manufacturing apparatus 20 may be configured in a straight line.

  The manufacturing apparatus 20 is entirely controlled via a laminating process control unit 200. For each functional unit of the manufacturing apparatus 20, for example, a laminating control unit 202, a substrate heating control unit 204, a base peeling control unit 206, and the like are provided. Provided, and these are connected by an in-process network. The laminating process control unit 200 is connected to a factory network, and performs information processing for production such as production management and operation management of instruction information (condition setting and production information) from a factory CPU (not shown).

  The substrate heating control unit 204 receives the glass substrate 24 from the upstream process, controls the operation of heating the glass substrate 24 to a desired temperature and supplying the glass substrate 24 to the pasting mechanism 46, the handling of information on the glass substrate 24, and the like.

  The laminating control unit 202 controls each functional unit as a master of the entire process, and the position of the half-cut portion 34 of the photosensitive webs 22a and 22b detected by the first and second detection mechanisms 47a and 47b. Based on the information, a control mechanism capable of controlling the relative position between each boundary position and the glass substrate 24 at the pasting position and the relative position between the respective boundary positions is configured.

  The base peeling control unit 206 controls the operation of peeling the base film 26 from the sticking substrate 24a supplied from the sticking mechanism 46, and discharging the photosensitive laminate 134 to the downstream process, and the sticking substrate. 24a and information on the photosensitive laminate 134 are controlled.

  The interior of the manufacturing apparatus 20 is partitioned into a first clean room 212a and a second clean room 212b through a partition wall 210. The first clean room 212a accommodates the first and second web feed mechanisms 32a and 32b to the first and second tension control mechanisms 66a and 66b, and the second clean room 212b includes the first and second detections. The mechanisms 47a and 47b and thereafter are accommodated. The first clean room 212a and the second clean room 212b communicate with each other through the penetration part 214.

  The operation of the manufacturing apparatus 20 configured as described above will be described below in relation to the peeling method according to the first embodiment.

  First, the photosensitive webs 22a and 22b are sent out from the respective photosensitive web rolls 23a and 23b attached to the first and second web delivery mechanisms 32a and 32b. The photosensitive webs 22a and 22b are conveyed to the first and second processing mechanisms 36a and 36b.

  In the first and second processing mechanisms 36a and 36b, the round blade 52 moves in the width direction of the photosensitive webs 22a and 22b, and the photosensitive webs 22a and 22b are moved from the protective film 30 to the photosensitive resin layer 28 to the base film. Cut to 26 to form a half-cut portion 34 (see FIG. 2).

  Further, as shown in FIG. 1, the photosensitive webs 22a and 22b are stopped after being transported in the direction of the arrow A corresponding to the dimension of the remaining portion 30b of the protective film 30, and the half-blade 52 is halfway under the traveling action. A cut site 34 is formed. Thus, the photosensitive webs 22a and 22b are provided with a front peeling portion 30aa and a rear peeling portion 30ab with the remaining portion 30b interposed therebetween (see FIG. 2).

  Next, the respective photosensitive webs 22 a and 22 b are conveyed to the first and second label adhering mechanisms 40 a and 40 b, and a predetermined application site of the protective film 30 is arranged on the cradle 56. In the first and second label adhering mechanisms 40a and 40b, a predetermined number of adhesive labels 38 are adsorbed and held by the adsorbing pads 54a to 54g, and each adhering label 38 straddles the remaining portion 30b of the protective film 30, and a front peeling portion. 30aa and the rear peeling portion 30ab are integrally bonded (see FIG. 3).

  For example, the photosensitive webs 22a and 22b to which the seven adhesive labels 38 are bonded, as shown in FIG. 1, after the first and second reservoir mechanisms 42a and 42b are prevented from changing the tension on the delivery side, It is continuously conveyed to the first and second peeling mechanisms 44a and 44b. In the first and second peeling mechanisms 44a and 44b, as shown in FIG. 6, the base film 26 of the photosensitive webs 22a and 22b is adsorbed and held by the suction drum 62, and the protective film 30 leaves the remaining portion 30b. It peels from the said photosensitive webs 22a and 22b. The protective film 30 is peeled off via the peeling roller 63 and wound around the protective film take-up portion 64 (see FIG. 1).

  Under the action of the first and second peeling mechanisms 44a and 44b, after the protective film 30 is peeled from the base film 26 leaving the remaining portion 30b, the photosensitive webs 22a and 22b are moved to the first and second tension control mechanisms. The tension is adjusted by 66a and 66b, and the half-cut portion 34 is detected by the photoelectric sensors 72a and 72b by the first and second detection mechanisms 47a and 47b.

  Each photosensitive web 22a, 22b is quantitatively transported to the affixing mechanism 46 under the rotational action of the film transport rollers 90a, 90b based on the detection information of the half-cut region 34, respectively. On the other hand, the glass substrate 24 is transported to the affixing position in a heated state under the action of the substrate transport mechanism 45. The glass substrate 24 is temporarily disposed between the rubber rollers 80a and 80b corresponding to the portion where the photosensitive resin layer 28 of the photosensitive webs 22a and 22b arranged in parallel is attached.

  In this state, by raising the backup roller 82b and the rubber roller 80b, the glass substrate 24 is sandwiched between the rubber rollers 80a and 80b with a predetermined pressing pressure. Further, the photosensitive resin layers 28 arranged in parallel are transferred (laminated) to the glass substrate 24 under the rotating action of the rubber roller 80a.

  Here, as the lamination conditions, the speed is 1.0 m / min to 10.0 m / min, the temperature of the rubber rollers 80a and 80b is 80 ° C to 150 ° C, the rubber hardness of the rubber rollers 80a and 80b is 40 degrees to 90 degrees, The pressing pressure (linear pressure) of the rubber rollers 80a and 80b is 50 N / cm to 400 N / cm.

  When the lamination of one photosensitive web 22a, 22b is completed on the glass substrate 24 via the rubber rollers 80a, 80b, the rotation of the rubber roller 80a is stopped, while the photosensitive webs 22a, 22b are laminated. The glass substrate 24, that is, the attached substrate 24 a is clamped by the substrate transport roller 92.

  Then, the rubber roller 80b is retracted in the direction away from the rubber roller 80a to release the clamp, and the rotation of the substrate transport roller 92 is started, so that the bonded substrate 24a is quantitatively transported in the direction of arrow C, and the photosensitive web. The position between the substrates 22a and 22b moves to a predetermined position near the lower side of the rubber roller 80a. On the other hand, the next glass substrate 24 is transported toward the attaching position via the substrate transport mechanism 45.

  When the tip of the next glass substrate 24 is disposed between the rubber rollers 80a and 80b, the rubber roller 80b is raised, and the next glass substrate 24 and the photosensitive webs 22a and 22b are clamped by the rubber rollers 80a and 80b. Is done. Lamination is started under the rotational action of the rubber rollers 80a and 80b and the substrate transport roller 92, and the bonded substrate 24a is transported in the direction of arrow C.

  The bonded substrate 24 a is cooled through the cooling mechanism 98 and then transferred to the base automatic peeling apparatus 100. In this base automatic peeling apparatus 100, first, the elevating cylinder 110 constituting the pre-peeling portion 102 disposed on the upstream side of the peeling roller 104 is driven. For this reason, the peeling member 108 rises and is inserted between the glass substrates 24, and presses the remaining portion 30b vertically upward. Accordingly, the remaining portion 30b exposed between the glass substrates 24 is peeled off from the end of the glass substrate 24 together with the photosensitive resin layer 28 that easily adheres to the glass substrate 24 corresponding to the half-cut portion 34. .

  On the other hand, on the downstream side of the pre-peeling portion 102, the base film 26 is continuously wound from the pasting substrate 24a via the peeling roller 104 under the rotating action of the winding shaft 112 (see FIG. 1). At that time, as shown in FIG. 5, the peeling roller 104 is deformed by its own weight with respect to the axial direction, and a central portion in the axial direction of the peeling roller 104 is curved downward.

  In this case, in the first embodiment, the plurality of guide rollers 106 are arranged corresponding to the axial deformation caused by the weight of the peeling roller 104. Specifically, the guide rollers 106 arranged at both axial ends of the peeling roller 104 are arranged at positions higher than the guide rollers 106 arranged at the axial center side of the peeling roller 104. Accordingly, the glass substrate 24 is guided by the plurality of guide rollers 106 when the tip portion moves from the pre-peeling portion 102 to the peeling roller 104 side, and is curved according to the outer peripheral surface shape of the peeling roller 104. The base film 26 is peeled off (see FIG. 5).

  Next, when the rear end side in the transport direction of the glass substrate 24 is separated from the peeling roller 104, the rear end portion of the glass substrate 24 is held by a plurality of guide rollers 106. Thereby, the impact caused by the separation of the glass substrate 24 from the peeling roller 104 can be suppressed as much as possible.

  For this reason, a necessary part other than the base film 26 from the glass substrate 24, for example, the photosensitive resin layer 28 (or a cushion layer (not shown) formed on the photosensitive resin layer 28) is peeled off or the glass substrate 24 is damaged. The effect that it becomes possible to prevent etc. favorably is acquired.

  As described above, the glass substrate 24 from which the base film 26 has been peeled is disposed at an inspection station corresponding to the measuring instrument 130 as shown in FIG. In this inspection station, as shown in FIG. 1, images of the glass substrate 24 and the photosensitive resin layer 28 are captured by the camera 132 with the glass substrate 24 positioned and fixed. Then, by applying image processing, the pasting position is calculated. Thereafter, the photosensitive laminate 134 is accommodated in the photosensitive laminate stocker 136 via the robot 138.

  FIG. 7 is a schematic front explanatory view of a base automatic peeling apparatus 220 which is a peeling apparatus according to a second embodiment of the present invention, and FIG. 8 is a schematic side explanatory view of the base automatic peeling apparatus 220.

  In addition, the same referential mark is attached | subjected to the component same as the base automatic peeling apparatus 100 which concerns on 1st Embodiment, and the detailed description is abbreviate | omitted. Similarly, in the third and fourth embodiments described below, detailed description thereof is omitted.

  The automatic base peeling device 220 includes a moving mechanism 222 that moves the plurality of guide rollers 106 forward and backward with respect to the outer peripheral surface of the peeling roller 104. The moving mechanism 222 includes, for example, two cylinders 224a and 224b, and the cylinders 224a and 224b are connected to elevating platforms 226a and 226b that can move up and down. A predetermined number of guide rollers 106 are supported on the lifts 226 a and 226 b at height positions corresponding to the deformed shape caused by the weight of the peeling roller 104, respectively, in a freely rotatable manner.

  In the second embodiment configured as described above, as shown in FIG. 8, when the tip of the glass substrate 24 is transferred to the peeling roller 104, the plurality of guide rollers 106 include cylinders 224 a and 224 b. The tip of the glass substrate 24 does not come into contact with the guide roller 106.

  When the base film 26 is peeled off from the glass substrate 24 while the glass substrate 24 is conveyed in the direction of arrow C, both ends in the width direction of the glass substrate 24 follow the shape of the outer peripheral surface of the peeling roller 104. It bends and is held in close contact with the outer peripheral surface of the peeling roller 104 (see FIG. 7). In this state, the cylinders 224a and 224b are driven, and the lifting platforms 226a and 226b are raised.

  For this reason, the plurality of guide rollers 106 supported by the elevators 226a and 226b are raised and hold the glass substrate 24 (see the two-dot chain line in FIGS. 7 and 8). Therefore, when the rear end portion of the glass substrate 24 is detached from the peeling roller 104, both end portions in the width direction of the glass substrate 24 can be held in a curved shape by the guide roller 106. Thereby, it becomes possible to suppress as much as possible the impact caused by the separation of the glass substrate 24 from the peeling roller 104, and the same effect as in the first embodiment can be obtained.

  Moreover, particularly in the second embodiment, the tip of the glass substrate 24 does not come into contact with the guide roller 106 when being transferred to the peeling roller 104. For this reason, there exists an advantage that the glass substrate 24 can be conveyed toward the arrow C direction more smoothly.

  FIG. 9 is a schematic front explanatory view of a base automatic peeling apparatus 240 which is a peeling apparatus according to the third embodiment of the present invention.

  The automatic base peeling device 240 includes a moving mechanism 242 and the moving mechanism 242 includes cam means 244a and 244b. The cam means 244a and 244b have cam members 248a and 248b that are rotatably mounted on shafts of motors 246a and 246b, respectively, and the cam members 248a and 248b can swing around the support shafts 250a and 250b. Engage with the swing bases 252a and 252b. A predetermined number of guide rollers 106 are rotatably supported on the swing bases 252a and 252b, respectively.

  When the tops of the cam members 248 a and 248 b are engaged with the swing bases 252 a and 252 b, the guide rollers 106 are arranged along the outer peripheral surface shape of the peeling roller 104, and the glass substrate 24 is arranged on the outer periphery of the peeling roller 104. It can be held on the surface (see the two-dot chain line in FIG. 9).

  In the third embodiment configured as described above, the same effect as in the second embodiment can be obtained.

  FIG. 10 is a schematic front explanatory view of a base automatic peeling apparatus 260 which is a peeling apparatus according to the fourth embodiment of the present invention.

  The automatic base peeling device 260 includes a moving mechanism 262, and the moving mechanism 262 includes support bases 264a and 264b. A plurality of locking cylinders 266 are fixed to the support bases 264a, 264b, and a lifting column 268 is disposed on the locking cylinders 266 so as to be movable up and down. A guide roller 106 is rotatably supported at the upper part of the elevating column body 268, and a spring 270 is provided at the lower part of the elevating column body 268. The elevating column body 268 can be slidably contacted with the outer peripheral surface of the peeling roller 104 under the pressing action of the spring 270.

  In the fourth embodiment configured as described above, the same effect as in the first to third embodiments can be obtained.

  In the first to fourth embodiments, the two photosensitive web rolls 23a and 23b are used. However, the present invention is not limited to this, and one photosensitive web roll or three or more photosensitive web rolls are used. A photosensitive web roll may be employed.

It is a schematic block diagram of the manufacturing apparatus of the photosensitive laminated body incorporating the peeling apparatus which concerns on the 1st Embodiment of this invention. It is sectional drawing of the elongate photosensitive web used for the said manufacturing apparatus. It is explanatory drawing of the state by which the adhesive label was adhere | attached on the said elongate photosensitive web. It is a schematic front explanatory drawing of a base automatic peeling apparatus. It is a schematic side surface explanatory view of the base automatic peeling device. It is explanatory drawing at the time of peeling a protective film from the said photosensitive web. It is a schematic front explanatory drawing of the base automatic peeling apparatus which is a peeling apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic side surface explanatory view of the base automatic peeling device. It is a schematic front explanatory drawing of the base automatic peeling apparatus which is a peeling apparatus which concerns on the 3rd Embodiment of this invention. It is a schematic front explanatory drawing of the base automatic peeling apparatus which is a peeling apparatus which concerns on the 4th Embodiment of this invention. It is explanatory drawing of the film sticking apparatus currently disclosed by patent document 1. FIG. It is explanatory drawing of the peeling roller which comprises the said film sticking apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 20 ... Manufacturing apparatus 22a, 22b ... Photosensitive web 23a, 23b ... Photosensitive web roll 24 ... Glass substrate 26 ... Base film 28 ... Photosensitive resin layer 30 ... Protective film 32a, 32b ... Web delivery mechanism 40a, 40b ... Label adhesion Mechanism 44a, 44b ... Peeling mechanism 45 ... Substrate transport mechanism 46 ... Paste mechanism 63 ... Peeling roller 80a, 80b ... Rubber rollers 100, 220, 240, 260 ... Base automatic peeling device 102 ... Pre-peeling unit 104 ... Peeling roller 106 ... Guide Rollers 222, 242 and 262 ... moving mechanisms 224a and 224b ... cylinders 244a and 244b ... cam means 246a and 246b ... motors 268 ... lifting column 270 ... springs

Claims (7)

A photosensitive web in which a support layer and at least a photosensitive material layer are laminated is adhered to the substrate with the photosensitive material layer side facing the substrate to obtain a bonded substrate, and then the support layer is peeled from the substrate A photosensitive web peeling device,
A transport mechanism that slidably contacts the substrate and transports the attached substrate;
A peeling roller that is disposed on the support layer side and peels the support layer from the substrate;
A plurality of guide rollers arranged on the substrate side along the axial direction of the peeling roller, and capable of holding the substrate when peeling the support layer;
With
The plurality of guide rollers correspond to the deformation in the axial direction due to the weight of the peeling roller, and are arranged at different height positions on the both axial ends and the axial central side. apparatus. The peeling apparatus according to claim 1, wherein the attachment substrate is conveyed with the substrate facing downward,
The plurality of guide rollers are arranged below the peeling roller, and the arrangement positions on both ends in the axial direction are set higher than the arrangement positions on the central side in the axial direction. Web peeling device.   3. The peeling apparatus according to claim 1, further comprising a spring for pressing the plurality of guide rollers toward the substrate.   The peeling apparatus of any one of Claims 1-3 WHEREIN: The actuator which can advance / retreat the some said guide roller with respect to the said board | substrate is provided, The peeling apparatus of the photosensitive web characterized by the above-mentioned. 5. The peeling apparatus according to claim 1, wherein a plurality of the substrates are integrally bonded to the photosensitive web.
The photosensitive web peeling apparatus, wherein the peeling roller peels the support layer from the substrate together with a part of the photosensitive web exposed between the substrates. A photosensitive web in which a support layer and at least a photosensitive material layer are laminated is adhered to the substrate with the photosensitive material layer side facing the substrate to obtain a bonded substrate, and then the support layer is peeled from the substrate A method for peeling a photosensitive web,
A plurality of guide rollers are arranged along an axial direction of a peeling roller for peeling the support layer from the substrate, and the plurality of guide rollers are axially adapted to deformation in the axial direction due to the weight of the peeling roller. It is arranged at different height positions on both ends and the axial center.
When the support layer is peeled from the substrate via the peeling roller while transporting the bonded substrate, at least the support layer is peeled off via the plurality of guide rollers. A method for peeling off a photosensitive web, characterized in that: 7. The peeling method according to claim 6, wherein a plurality of the substrates are integrally bonded to the photosensitive web.
The method for peeling a photosensitive web, wherein the peeling roller peels the support layer from the substrate together with a part of the photosensitive web exposed between the substrates.

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