JP2009172879A - Alignment method and liquid jet head manufacturing method - Google Patents

Abstract

The relative positional relationship of a plurality of ink jet recording heads is adjusted by a simple operation with an inexpensive apparatus.
A moving table 61 is moved by using a mask 62 provided with a position confirmation mark 63 and a reference mark 64 and single-focus optical means 66 and 67 in which the distance between the optical axes is fixed. By aligning the optical axis of one single-focus optical means 66 with the position, the positional relationship of both optical axes of the single-focus optical means 66 and 67 is grasped, and the single-focus for the plurality of ink jet recording heads 220 and the mask 62 is obtained. The optical means is relatively moved, and the alignment position of the ink jet recording head 220 is aligned with the optical axis of the other single-focus optical means 67 while the mask position confirmation mark 63 is aligned with the optical axis of one single-focus optical means 66. By aligning the marks 22, the relative positional relationship of the plurality of ink jet recording heads 220 is adjusted.
[Selection] Figure 6

Description

  The present invention relates to an alignment method and a liquid ejecting head manufacturing method.

  An ink jet recording apparatus such as an ink jet printer or a plotter is an ink jet recording that includes a plurality of ink jet recording heads (liquid ejecting heads) that eject ink stored in a liquid container such as an ink cartridge or an ink tank as ink droplets. A head unit is provided. The ink jet recording head has a nozzle array composed of nozzle openings arranged in parallel, and the ink ejection surface side of the nozzle array of the plurality of ink jet recording heads is protected by a cover head which is a common component.

  The cover head is provided on the ink droplet discharge surface side of the ink jet recording head and has a window frame portion having an opening window portion that exposes the nozzle opening, and a side wall that is bent from the window frame portion to the side surface side of the ink jet recording head. And fixed by joining the side wall portion to the side surface of the ink jet recording head (for example, see Patent Document 1).

  Further, when joining a fixing member such as a cover head or a fixing plate and a plurality of ink jet recording heads, a reference mark provided on a flat glass mask is provided on a nozzle plate of the ink jet recording head. The ink jet recording head is moved with respect to the fixed member so that the alignment mark matches (for example, refer to Patent Document 2).

  That is, a mask provided with a reference mark and a plurality of inkjet recording head nozzle plates are overlaid, the alignment mark is observed through an optical means (such as a microscope or a camera) through the reference mark, and the reference mark is placed on the optical axis of the optical means. The alignment of the nozzle plate is adjusted so that the alignment marks match.

  For this reason, the relative positional relationship of the plurality of ink jet recording heads can be maintained in a desired relationship, and the cover head is a common component for the plurality of ink jet recording heads maintained in the desired relative positional relationship. Can be fixed.

  However, since the alignment mark and the reference mark coincide with each other on the optical axis of the optical means, it is necessary to confirm the two marks at the same time. In order to be able to confirm two marks at the same time, it is conceivable to apply a high-magnification microscope. However, a high-magnification microscope has a small depth of field and requires that the mask and the work be brought into close contact with each other. Further, it is conceivable to move the camera up and down on the optical axis to focus on each, but the vertical movement accuracy of the camera affects the alignment accuracy.

  For this reason, the conventional alignment adjustment uses a bifocal optical means. The bifocal optical means is very expensive, and the workability is reduced because the two optical axes are aligned. Also, the optical axis is likely to be displaced by the heat of the light source, etc., and it is desirable to adjust the optical axis immediately before alignment in order to prevent the influence, but this is impossible in practice, and alignment that allows displacement of the optical axis It becomes adjustment. Further, in the bifocal optical means, there are three colors of a reference mark, an alignment mark, and a background in one image, and thus it is necessary to devise in order to obtain contrast for each.

  As described above, the conventional technique for matching the alignment mark and the reference mark on the optical axis of the optical means requires a bifocal optical means that is expensive and subject to various restrictions on use, and the alignment adjustment of the ink jet recording head is required. The actual situation is that it is a large-scale work with expensive equipment.

JP 2002-160376 A JP 2004-322606 A

  The present invention has been made in view of the above situation, and an object of the present invention is to provide an alignment method capable of adjusting the relative positional relationship between a plurality of workpieces with a simple operation using an inexpensive apparatus.

  In addition, the present invention has been made in view of the above situation, and a liquid that can adjust the relative positional relationship between the substrates of a plurality of liquid ejecting heads and can attach common components to the plurality of substrates by a simple operation with an inexpensive apparatus. It is an object of the present invention to provide a method for manufacturing an ejection head.

  In order to achieve the above object, the alignment method of the present invention is provided with a position confirmation mark according to the positions of a plurality of workpiece marks, a mask provided with a reference mark, and at least two in which the distance between the optical axes is fixed. One single-focus optical means, and a moving means for relatively moving the positions of a plurality of workpieces and masks and the positions of at least two single-focus optical means, and the light of one single-focus optical means at the position of the reference mark By aligning the axes, the positional relationship of both optical axes of the single-focus optical means is grasped, the single-focus optical means is moved relative to a plurality of workpieces and masks, and the optical axis of one single-focus optical means is set. The alignment of the workpiece is adjusted by aligning the mark of the workpiece with the optical axis of the other single-focus optical means in a state where the mask position confirmation mark is aligned.

  In the alignment method of the present invention, the single focus optical means is used, and the mask mark is recognized by one optical means and the work mark is recognized by the other optical means. The relative positional relationship can be adjusted.

  In the above alignment method, the optical axis of one single-focus optical means is sequentially moved to the position of the mask position confirmation mark and the optical axis of the other single-focus optical means is sequentially moved to the mark position of the adjacent workpiece, The position of the optical axis of one single-focus optical means is used as a reference, and a workpiece mark is aligned with the optical axis of the other single-focus optical means to sequentially adjust the workpiece.

  In the above alignment method, a glass mask is used.

  In order to achieve the above object, a method of manufacturing a liquid jet head according to the present invention is characterized in that the alignment of the substrate of the liquid jet head as a work is adjusted by the alignment method, and common components are attached to a plurality of substrates.

  In the liquid ejecting head manufacturing method of the present invention, the relative positional relationship between the substrates of the plurality of liquid ejecting heads can be adjusted by a simple operation using an inexpensive device, and common components can be attached to the plurality of substrates.

  A workpiece to be aligned in the alignment method of the present invention is an ink jet recording head (liquid ejecting head) of an ink jet recording head unit. The ink jet recording head unit will be described with reference to FIGS.

  1 is an exploded perspective view of the ink jet recording head unit, FIG. 2 is an assembled perspective view of the ink jet recording head unit, FIG. 3 is a cross-sectional view of the main part of the ink jet recording head unit, and FIG. FIG. 5 shows a cross section of the ink jet recording head and the head case.

  As shown in the drawing, the ink jet recording head unit (head unit) 200 includes a cartridge case 210, an ink jet recording head 220, a cover head 240, and a fixing plate 250. The cartridge case 210 is an ink cartridge holding member having a cartridge mounting portion 211 to which an ink cartridge (not shown) is mounted. The ink cartridge is, for example, an ink supply unit configured as a separate body filled with black and three color inks. That is, each color ink cartridge is mounted in the cartridge case 210.

  In particular, as shown in FIG. 3, the cartridge case 210 is provided with a plurality of ink communication paths 212 having one end opened to each cartridge mounting portion 211 and the other end opened to the head case 230 side. Further, an ink supply needle 213 to be inserted into the ink supply port of the ink cartridge is fixed to the opening portion of the ink communication path 212 of the cartridge mounting portion 211. This fixing is performed through a filter (not shown) formed in the ink communication path 212 in order to remove bubbles and foreign matters in the ink.

  The head case 230 is fixed to the bottom surface of the cartridge case 210. The ink jet recording head 220 includes a plurality of piezoelectric elements 300 and ejects ink droplets from the nozzle openings 21 by driving the piezoelectric elements 300 on the end surface opposite to the cartridge case 210. A plurality of inks are provided for each ink color. Therefore, a plurality of head cases 230 are also provided independently for each ink jet recording head 220.

  As shown in FIGS. 4 and 5, the ink jet recording head 220 is composed of four substrates: a nozzle plate 20, a flow path forming substrate 10, a protective substrate 30, and a compliance substrate 40. Among these, the flow path forming substrate 10 is made of a silicon single crystal substrate, and an elastic film 50 made of silicon dioxide previously formed by thermal oxidation is formed on one surface thereof. The flow path forming substrate 10 is formed with a pressure generating chamber 12 partitioned by a plurality of partition walls.

  Two pressure generation chambers 12 in two rows in the width direction of the flow path forming substrate 10 are formed by anisotropic etching from the other surface side of the flow path forming substrate 10. Further, on the outer side in the longitudinal direction of the pressure generating chambers 12 in each row, a communicating portion constituting a reservoir 100 that communicates with a reservoir portion 31 provided on a protective substrate 30 described later and serves as a common ink chamber for each pressure generating chamber 12. 13 is formed. The communication portion 13 is in communication with one end portion in the longitudinal direction of each pressure generating chamber 12 through the ink supply path 14.

  A nozzle plate 20 is fixed to the opening surface side of the flow path forming substrate 10 via an adhesive, a heat welding film, or the like. The nozzle plate 20 is formed with nozzle openings 21 communicating with the pressure generation chambers 12 on the side opposite to the ink supply path 14. Thus, in this example, two rows of nozzle rows 21A in which the nozzle openings 21 are arranged in parallel in one ink jet recording head 220 are provided. In addition, the nozzle plate 20 is provided with alignment marks 22 that are used when positioning with the fixed plate 250, and two alignment marks 22 are provided at the end of the nozzle openings 21 in the juxtaposed direction. Yes.

  On the other hand, the piezoelectric element 300 is disposed on the elastic film 50 on the side opposite to the opening surface of the flow path forming substrate 10. The piezoelectric element 300 is formed by sequentially laminating an insulator film made of zirconium oxide, a lower electrode film made of metal, a piezoelectric layer made of lead zirconate titanate (PZT), and an upper electrode film made of metal. The

  The protective substrate 30 is bonded onto the flow path forming substrate 10 on which the piezoelectric element 300 is formed. The reservoir portion 31 is formed across the protective substrate 30 in the thickness direction and across the width direction of the pressure generation chamber 12, and is connected to the communication portion 13 of the flow path forming substrate 10 to be shared by the pressure generation chambers 12. A reservoir 100 serving as an ink chamber is configured. A piezoelectric element holding portion 32 having a space that does not hinder the movement of the piezoelectric element 300 is provided in a region of the protective substrate 30 that faces the piezoelectric element 300.

  A drive IC 110 for driving each piezoelectric element 300 is provided on the protective substrate 30. Each terminal of the drive IC 110 is connected to a lead wiring drawn from the individual electrode of each piezoelectric element 300 via a bonding wire or the like. As shown in FIG. 1, each terminal of the drive IC 110 is connected to the outside via an external wiring 111 such as a flexible printed cable (FPC), and various signals such as a print signal from the outside via the external wiring 111. To receive.

  The compliance substrate 40 is bonded onto the protective substrate 30, and an ink introduction port 44 for supplying ink to the reservoir 100 is formed penetrating in the thickness direction in a region facing the reservoir 100 of the compliance substrate 40. . In addition, the region of the compliance substrate 40 other than the ink introduction port 44 in the region facing the reservoir 100 is a flexible portion 43 formed thin in the thickness direction, and the reservoir 100 is sealed by the flexible portion 43. Has been. Compliance is given to the reservoir 100 by the flexible portion 43. A head case 230 having an ink supply communication path 231 is provided on the compliance substrate 40, and a concave portion 232 is formed in the head case 230 in a region facing the flexible portion 43. This is done as appropriate.

  The head case 230 is provided with a drive IC holding portion 233 penetrating in the thickness direction in a region facing the drive IC 110 provided on the protective substrate 30, and the external wiring 111 is inserted through the drive IC holding portion 233. Thus, the driving IC 110 is connected.

  The ink jet recording head 220 configured as described above takes ink from the ink cartridge from the ink introduction port 44 via the ink communication path 212 (see FIG. 3) and the ink supply communication path 231, and from the reservoir 100 to the nozzle opening 21. Fill the interior with ink. In this state, a voltage is applied to each piezoelectric element 300 corresponding to the pressure generation chamber 12 in accordance with a recording signal from the drive IC 110 to cause the elastic film 50 and the piezoelectric element 300 to bend and deform, whereby each pressure generation chamber 12 Ink droplets are ejected from the nozzle openings 21.

  Each member constituting the ink jet recording head 220 and the head case 230 are provided with two pin insertion holes 234 into which pins for positioning the respective members are inserted at the time of assembly. The inkjet recording head 220 and the head case 230 are integrally combined by inserting pins into the pin insertion hole 234 and joining the members while performing relative positioning of the members.

  The above-described ink jet recording head 220 forms a large number of chips on one silicon wafer at the same time, and bonds and integrates the nozzle plate 20 and the compliance substrate 40, and thereafter, a single chip size as shown in FIG. It is formed by dividing each flow path forming substrate 10. As shown in FIGS. 1 to 3, four ink jet recording heads 220 and head cases 230 are fixed to the cartridge case 210 at predetermined intervals in the arrangement direction of the nozzle rows 21A. That is, the head unit 200 is provided with eight nozzle rows 21A.

  In this way, by forming multiple nozzle rows 21A including nozzle openings 21 arranged in parallel using a plurality of inkjet recording heads 220, multiple nozzle rows 21A are formed in one inkjet recording head 220. Compared with this, it is possible to prevent the yield from decreasing. Further, by using a plurality of ink jet recording heads 220 in order to increase the number of nozzle rows 21A, the number of ink jet recording heads 220 that can be formed from one silicon wafer can be increased. It is possible to reduce the manufacturing cost by reducing the useless area.

  As shown in FIGS. 1 and 3, the four ink jet recording heads 220 are positioned and held by a fixing plate 250 that is a common fixing member joined to the ink droplet ejection surfaces of the plurality of ink jet recording heads 220. ing. The fixed plate 250 is a flat plate, defines an exposed opening 251 that exposes the nozzle opening 21, an exposed opening 251, and at least at both ends of the nozzle row 21 </ b> A on the ink droplet ejection surface of the ink jet recording head 220. And a joining portion 252 to be joined.

  The joining portion 252 extends between the fixing frame portion 253 provided along the outer periphery of the ink droplet discharge surface across the plurality of ink jet recording heads 220 and the adjacent ink jet recording head 220 to be exposed. A fixing beam portion 254 that divides the portion 251, and a joint portion 252 including the fixing frame portion 253 and the fixing beam portion 254 is simultaneously bonded to the ink droplet ejection surfaces of the plurality of ink jet recording heads 220. . Further, the fixing frame portion 253 of the joining portion 252 is formed so as to close the pin insertion hole 234 that positions each member when the ink jet recording head 220 is manufactured.

  As a material of the fixing plate 250, for example, a metal such as stainless steel, a glass ceramic, a silicon single crystal plate, or the like is preferable. The fixing plate 250 is preferably made of a material having the same thermal expansion coefficient as that of the nozzle plate 20 in order to prevent deformation due to a difference in thermal expansion from the nozzle plate 20. For example, when the nozzle plate 20 is formed of a silicon single crystal plate, the fixing plate 250 is preferably formed of a silicon single crystal plate.

  Since the fixing plate 250 blocks between the adjacent ink jet recording heads 220 by the fixing beam portion 254, the ink does not enter between the adjacent ink jet recording heads 220, and the piezoelectric element 300 and the driving IC 110. It is possible to prevent the ink jet recording head 220 from being deteriorated and destroyed by the ink. Further, since the ink droplet ejection surface of the ink jet recording head 220 and the fixing plate 250 are bonded without any gap by an adhesive, the recording medium is prevented from entering the gap and the deformation of the fixing plate 250 and the fixing plate 250 are prevented. Paper jam can be prevented.

  In the head unit 200 described above, four ink jet recording heads 220 are fixed to the fixed plate 250. The ink jet recording head 220 is positioned on the fixed plate 250 by using an alignment method described later.

  As shown in FIGS. 1 and 2, the head unit 200 includes a cover head 240 having a box shape so as to cover each ink jet recording head 220 on the opposite side of the fixing plate 250 from the ink jet recording head 220. Is provided. The cover head 240 includes an outer periphery of the fixing plate 250 on the side of the fixing portion 242 provided with the opening 241 corresponding to the exposed opening 251 of the fixing plate 250 and the ink droplet ejection surface of the ink jet recording head 220. And a side wall portion 245 provided so as to be bent.

  The fixing portion 242 includes a frame portion 243 provided corresponding to the fixing frame portion 253 of the fixing plate 250 and a beam portion provided corresponding to the fixing beam portion 254 of the fixing plate 250 to divide the opening 241. 244. In addition, the fixing part 242 including the frame part 243 and the beam part 244 is joined to the joining part 252 of the fixing plate 250.

  As described above, since the ink droplet ejection surface of the ink jet recording head 220 and the cover head 240 are joined without a gap, it is possible to prevent the recording medium from entering the gap and to prevent the deformation of the cover head 240 and the paper jam. Can be prevented. Further, since the side wall portion 245 of the cover head 240 covers the outer peripheral edge portions of the plurality of ink jet recording heads 220, it is possible to reliably prevent the ink from flowing around the side surfaces of the ink jet recording heads 220.

  The fixing portion 242 is provided with a flange portion 246 provided with a fixing hole 247 for positioning and fixing the cover head 240 to another member. The flange portion 246 is bent and provided so as to protrude from the side wall portion 245 in the same direction as the surface direction of the droplet discharge surface. As shown in FIGS. 2 and 3, the cover head 240 is fixed to a cartridge case 210 that is a holding member that holds the ink jet recording head 220 and the head case 230.

  As shown in FIGS. 2 and 3, the cartridge case 210 is provided with a protrusion 215 that protrudes toward the ink droplet ejection surface and is inserted into the fixing hole 247 of the cover head 240. The cover head 240 is fixed to the cartridge case 210 by being inserted into the fixing hole 247 of the cover head 240 and heating and crimping the tip of the protrusion 215. The protrusion 215 provided on the cartridge case 210 has an outer diameter smaller than that of the fixing hole 247 of the flange 246, so that the cover head 240 is positioned in the surface direction of the ink droplet discharge surface and the cartridge case. 210 can be fixed.

  The cover head 240 and the fixing plate 250 to which the plurality of ink jet recording heads 220 are bonded are fixed by positioning the fixing holes 247 of the cover head 240 and the plurality of nozzle rows 21A. Here, positioning of the fixing hole 247 of the cover head 240 and the plurality of nozzle rows 21A can be performed using an alignment device described later, but the fixing plate 250 and the plurality of ink jet recording heads 220 are positioned and fixed. At this time, the cover head 240 may be positioned and fixed at the same time.

  In the head unit 200 described above, a plurality of ink jet recording heads 220 are arranged, and a fixed plate 250 as a common component is attached every predetermined number. For this reason, the relative positions of the plurality of ink jet recording heads 220 are adjusted, and the individual ink jet recording heads 220 are attached to the fixed plate 250 with high accuracy. In order to adjust the relative position of the ink jet recording head 220, alignment adjustment is performed by the alignment method of the present invention, and the ink jet recording head 220 is manufactured.

The alignment method will be described with reference to FIGS.
6 and 7 illustrate the concept of the alignment method according to an embodiment of the present invention, and FIG. 8 illustrates the process of the alignment method.

  As shown in FIG. 6, the moving table 61 has a plurality of (five in the example of FIG. 6) ink jet recording heads 220 arranged along the moving direction (left and right in the figure), and the ink jet at the end. A glass mask 62 is disposed on the side of the recording head 220. The mask 62 is provided with position confirmation marks 63a, 63b, 63c, 63d, and 63e according to the position of the alignment mark 22 in a state corresponding to a predetermined relative positional relationship of the ink jet recording head 220.

  Since the inkjet recording head 220 is provided with the alignment marks 22 at both ends, the position confirmation marks 63 a, 63 b, 63 c, 63 d, and 63 e are each paired with respect to the alignment mark 22 of one inkjet recording head 220. Is provided. That is, the position confirmation marks 63 are provided at 10 locations. The distance between the position confirmation marks 63a, 63b, 63c, 63d, and 63e and the distance between the pair of position confirmation marks 63 coincide with the state of the alignment mark 22 in a state where the ink jet recording head 220 is arranged in a predetermined relative positional relationship. ing. A pair of reference marks 64 is provided at the end (right side in the drawing) of the mask 62, and the reference marks 64 coincide with the arrangement state of the pair of alignment marks 22 of the ink jet recording head 220.

  In addition, two single-focus optical means 66 and 67 having a fixed optical axis interval are provided below the moving table 61, and the optical axis of the single-focus optical means 66 is aligned with the reference mark 64 and the position confirmation mark 63. The alignment mark 22 of the ink jet recording head 220 is aligned with the optical axis of the single focus optical means 67. As the single focus optical means, for example, an optical means of a combination of an optical microscope and a camera is applied.

  As shown in FIG. 6, the position of the reference mark 64 is confirmed by a pair of single focus optical means 66, and the positional relationship between the four single focus optical means 66 and 67 is grasped. Thereby, the positional relationship of the four single-focus optical means 66 and 67 with respect to the reference mark 64 is grasped.

  As shown in FIG. 7, the moving table 61 is moved to the right side in the drawing so that the optical axes of the pair of single-focus optical means 66 coincide with the end position confirmation marks 63a. With this position state as a reference, the pair of alignment marks 22 of the ink jet recording head 220 at the end are aligned with the optical axes of the pair of single focus optical means 67. As a result, in accordance with the positional relationship between the four single-focus optical means 66 and 67 grasped in advance, the end of the optical axis (the position of the end position confirmation mark 63a) of the pair of single-focus optical means 66 is used as a reference. The position of the ink jet recording head 220 is adjusted.

  By moving the moving table 61, the optical axes of the pair of single-focus optical means 66 are sequentially aligned with the position confirmation marks 63b, 63c, 63d, 63e, and the pair of single-focus optical means 67 with the position confirmation mark 63 as a reference. The pair of alignment marks 22 of the ink jet recording head 220 are sequentially aligned with the optical axis. Accordingly, the relative positional relationship of the ink jet recording head 220 is adjusted so that the alignment mark 22 is positioned in the same state as the position confirmation marks 63a, 63b, 63c, 63d, and 63e of the mask 62.

  That is, as shown in FIG. 8 (s), the position of the reference mark 64 is confirmed by one single focus optical means 66, and the positional relationship between one single focus optical means 66 and the other single focus optical means 67 is grasped. Thus, the positional relationship of the single focus optical means 66 and 67 with respect to the reference mark 64 is grasped.

  As shown in FIG. 8A, the moving table 61 is moved to the right side in the drawing so that the optical axis of the single-focus optical means 66 coincides with the end position confirmation mark 63a, and the optical axis of the single-focus optical means 67 The pair of alignment marks 22 of the ink jet recording head 220 at the end are aligned. Thereby, according to the positional relationship between the single-focus optical means 66 and 67 that has been grasped in advance, the ink jet recording of the end portion with reference to the optical axis of the single-focus optical means 66 (the position of the end position confirmation mark 63a). The position of the head 220 is adjusted.

  As shown in FIG. 8B, the moving table 61 is moved to the right side in the drawing so that the optical axis of the single-focus optical means 66 coincides with the end position confirmation mark 63b, and the optical axis of the single-focus optical means 67 is reached. The pair of alignment marks 22 of the second ink jet recording head 220 from the end are aligned. Similarly, as shown in FIGS. 8C, 8D, and 8E, the moving table 61 is sequentially moved to the right side in the figure, and the optical axis of the single focus optical means 66 is moved to the position confirmation marks 63c, 63d, and 63e. The pair of alignment marks 22 of the third, fourth, and fifth ink jet recording heads 220 from the end are sequentially aligned with the optical axis of the single focus optical means 67 in order.

  Thereby, according to the positional relationship of the single focus optical means 66 and 67 grasped in advance, the optical axis of the single focus optical means 66 (positions of the position confirmation marks 63b, 63c, 63d and 63e) is used as the reference. The position of the fifth ink jet recording head 220 is adjusted.

  In the alignment method described above, one mask 62 and single focus optical means 66 and 67 are used, one of the single focus optical means recognizes the mark of the mask 62 by 66, and the other single focus optical means 67 recognizes the ink jet recording. Since the alignment mark 22 of the head 220 is recognized, the relative positional relationship of the five ink jet recording heads 220 can be accurately adjusted with a simple operation.

  That is, the relative positional relationship of the ink jet recording head 220 is adjusted by recognizing the mark on the mask 62 and adjusting the position of the alignment mark 22, so that there is no possibility of an accumulated error and the moving table 61 is moved. Since the single focus optical means 66 and 67 are fixed, the relative positional relationship of the five ink jet recording heads 220 can be adjusted very accurately. In addition, since the optical axes of the single focus optical means 66 and 67 in the reference state are fixed using at least two, that is, the single focus optical means 66 and 67, the movement table 61 is not affected by the movement accuracy. The relative positional relationship of the five ink jet recording heads 220 can be adjusted.

  The image captured by the single focus optical means 66 is the reference mark 64 and the position confirmation mark 63 (glass) and the background, and the image captured by the single focus optical means 66 is the alignment mark 22 of the ink jet recording head 220 and the background. Therefore, it is easy to obtain contrast, variation in image processing can be suppressed, and highly accurate position adjustment is possible without being affected by heat or the like. Further, since the mask 62 is made of glass having a small linear expansion coefficient and little change with respect to heat, the accuracy can be maintained high in this respect as well. And since it is the single focus optical means 66 and 67, it is possible to use a general and cheap optical means, and it can make an apparatus structure cheap.

  The number of single-focus optical means 66 and 67 is not limited to four, and the single-focus optical means 66 and 67 can be arranged according to the number of reference marks 64 and position confirmation marks 63. Since the single-focus optical means is general and inexpensive, when the number of ink jet recording heads 220, that is, the number of workpieces is small, the single-focus optical means is used according to the number of reference marks 64 and position confirmation marks 63. Even if it is arranged, the cost will not increase significantly.

It is a disassembled perspective view of the head unit which performs predetermined alignment. It is an assembly perspective view of a head unit. It is principal part sectional drawing of a head unit. It is a disassembled perspective view of the principal part of a head unit. It is sectional drawing which shows the recording head and head case of a head unit. It is a conceptual diagram of the alignment method which concerns on the example of 1 embodiment of this invention. It is a conceptual diagram of the alignment method which concerns on the example of 1 embodiment of this invention. It is process explanatory drawing of an alignment method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 Flow path formation board | substrate, 12 Pressure generation chamber, 20 Nozzle plate, 21 Nozzle opening, 22 Alignment mark, 61 Moving table, 62 Mask, 63 Position confirmation mark, 64 Reference mark, 66, 67 Single focus optical means, 100 Reservoir, 200 Head unit, 210 Cartridge case, 220 Inkjet recording head, 230 Head case, 240 Cover head, 250 Fixed plate, 300 Piezoelectric element

Claims (4)

A mask provided with position confirmation marks according to the positions of the marks of a plurality of workpieces and provided with reference marks,
At least two single-focus optical means in which the distance between the optical axes is fixed;
Using a moving means for relatively moving the positions of a plurality of workpieces and masks and the position of at least two single-focus optical means,
By aligning the optical axis of one single-focus optical means to the position of the reference mark, grasp the positional relationship of both optical axes of the single-focus optical means,
The single-focus optical means is moved relative to the plurality of workpieces and the mask, and the mask position confirmation mark is aligned with the optical axis of one single-focus optical means, and the optical axis of the other single-focus optical means is aligned. An alignment method characterized by adjusting the workpiece alignment by aligning the workpiece marks. The alignment method according to claim 1,
The optical axis of one single-focus optical means is sequentially moved to the position of the mask position confirmation mark, and the optical axis of the other single-focus optical means is sequentially moved to the mark position of the adjacent workpiece. An alignment method characterized by sequentially adjusting the workpiece alignment by aligning the mark of the workpiece with the optical axis of the other single-focus optical means on the basis of the position of the optical axis. In the alignment method according to any one of claims 1 and 2,
An alignment method using a glass mask.   A liquid ejecting head manufacturing method comprising: adjusting an alignment of a substrate of a liquid ejecting head as a workpiece by attaching the common component to a plurality of substrates by the alignment method according to claim 1. Method.

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