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JP2009168709A - レーザ干渉計、及びそれを用いた測定装置 - Google Patents

レーザ干渉計、及びそれを用いた測定装置 Download PDF

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Publication number
JP2009168709A
JP2009168709A JP2008009032A JP2008009032A JP2009168709A JP 2009168709 A JP2009168709 A JP 2009168709A JP 2008009032 A JP2008009032 A JP 2008009032A JP 2008009032 A JP2008009032 A JP 2008009032A JP 2009168709 A JP2009168709 A JP 2009168709A
Authority
JP
Japan
Prior art keywords
laser
optical path
light component
unit
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008009032A
Other languages
English (en)
Japanese (ja)
Inventor
Toshihiro Nakayabu
俊博 中薮
Yoichi Tamura
陽一 田村
Akihiro Shimizu
昭裕 清水
Hideo Yanai
秀夫 谷内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ishikawa Prefecture
Ishikawa Prefectural Government
SIGMAKOKI Co Ltd
Original Assignee
Ishikawa Prefecture
Ishikawa Prefectural Government
SIGMAKOKI Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishikawa Prefecture, Ishikawa Prefectural Government, SIGMAKOKI Co Ltd filed Critical Ishikawa Prefecture
Priority to JP2008009032A priority Critical patent/JP2009168709A/ja
Priority to PCT/JP2008/064150 priority patent/WO2009090771A1/fr
Priority to CN2008801248420A priority patent/CN101918788A/zh
Publication of JP2009168709A publication Critical patent/JP2009168709A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/447—Polarisation spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2008009032A 2008-01-18 2008-01-18 レーザ干渉計、及びそれを用いた測定装置 Pending JP2009168709A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008009032A JP2009168709A (ja) 2008-01-18 2008-01-18 レーザ干渉計、及びそれを用いた測定装置
PCT/JP2008/064150 WO2009090771A1 (fr) 2008-01-18 2008-08-06 Interféromètre laser et instrument de mesure utilisant celui-ci
CN2008801248420A CN101918788A (zh) 2008-01-18 2008-08-06 激光干涉仪和使用该激光干涉仪的测量装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008009032A JP2009168709A (ja) 2008-01-18 2008-01-18 レーザ干渉計、及びそれを用いた測定装置

Publications (1)

Publication Number Publication Date
JP2009168709A true JP2009168709A (ja) 2009-07-30

Family

ID=40885178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008009032A Pending JP2009168709A (ja) 2008-01-18 2008-01-18 レーザ干渉計、及びそれを用いた測定装置

Country Status (3)

Country Link
JP (1) JP2009168709A (fr)
CN (1) CN101918788A (fr)
WO (1) WO2009090771A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160086053A (ko) * 2015-01-09 2016-07-19 한국산업기술대학교산학협력단 복수의 수평 레이저 시스템
CN113101072A (zh) * 2021-04-07 2021-07-13 刘新艳 一种具有躺椅功能的医疗护理用轮椅

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102042804B (zh) * 2009-10-13 2012-12-12 上海微电子装备有限公司 激光干涉仪测量装置和方法
CN114264255B (zh) * 2021-12-28 2023-06-13 中国科学院上海天文台 一种基于干涉位移测量系统的滚转角测量系统和方法
CN116117332B (zh) * 2023-02-10 2025-10-28 苏州迈为科技股份有限公司 下出光激光光路系统及太阳能电池划线机
CN118912341A (zh) * 2024-07-26 2024-11-08 一木科技有限公司 一种激光对准装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02297010A (ja) * 1989-05-12 1990-12-07 Futaba Corp 測長装置
JPH05231816A (ja) * 1992-02-25 1993-09-07 Nikon Corp 干渉計
JP2000314609A (ja) * 1999-05-06 2000-11-14 Nikon Corp レーザ干渉測長装置
JP2004138433A (ja) * 2002-10-16 2004-05-13 Ishikawa Pref Gov レーザ干渉計、及びそれを用いた測定装置
WO2007020738A1 (fr) * 2005-08-16 2007-02-22 Tokyo Seimitsu Co., Ltd. Dispositif de mesure de longueur au laser

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02297010A (ja) * 1989-05-12 1990-12-07 Futaba Corp 測長装置
JPH05231816A (ja) * 1992-02-25 1993-09-07 Nikon Corp 干渉計
JP2000314609A (ja) * 1999-05-06 2000-11-14 Nikon Corp レーザ干渉測長装置
JP2004138433A (ja) * 2002-10-16 2004-05-13 Ishikawa Pref Gov レーザ干渉計、及びそれを用いた測定装置
WO2007020738A1 (fr) * 2005-08-16 2007-02-22 Tokyo Seimitsu Co., Ltd. Dispositif de mesure de longueur au laser

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160086053A (ko) * 2015-01-09 2016-07-19 한국산업기술대학교산학협력단 복수의 수평 레이저 시스템
KR101665645B1 (ko) * 2015-01-09 2016-10-13 한국산업기술대학교산학협력단 복수의 수평 레이저 시스템
CN113101072A (zh) * 2021-04-07 2021-07-13 刘新艳 一种具有躺椅功能的医疗护理用轮椅
CN113101072B (zh) * 2021-04-07 2022-03-25 刘新艳 一种具有躺椅功能的医疗护理用轮椅

Also Published As

Publication number Publication date
WO2009090771A1 (fr) 2009-07-23
CN101918788A (zh) 2010-12-15

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