JP2009156788A5

JP2009156788A5 - X-ray inspection device

Info

Publication number: JP2009156788A5
Application number: JP2007337572A
Authority: JP
Filing date: 2007-12-27
Publication date: 2012-10-11
Anticipated expiration: 2027-12-27

Claims

An X-ray inspection apparatus for executing reconstruction processing of an image of the inspection target area by receiving X-rays transmitted through the inspection target area of an object by a plurality of detection surfaces,
A plurality of x-ray detectors for imaging on the plurality of detection planes;
Detector driving means for moving each of the X-ray detectors along a predetermined axial direction;
X-ray output means for outputting X-rays in a corresponding manner so that X-rays transmitted through the region to be inspected enter the plurality of X-ray detectors which have respectively moved to a plurality of imaging positions;
Control means for controlling the operation of the X-ray examination apparatus;
The control means
An image acquisition control unit that controls the exposure timing of each of the X-ray detectors and the detector driving unit;
X-ray output control means for controlling the X-ray output means;
An X-ray examination apparatus including image reconstruction processing means for reconstructing image data of the examination area based on data of intensity distribution of X-rays transmitted through the examination area detected at a plurality of detection surfaces; .

The X-ray inspection apparatus according to claim 1, wherein the detector driving means moves the plurality of X-ray detectors in parallel in a predetermined plane.

The X-ray output control means
Origin setting means for setting each of the origin positions of the radiation of the X-rays so that the X-rays pass through the region to be inspected and enter each of the plurality of detection surfaces;
The X-ray examination apparatus according to claim 1 or 2 , wherein the X-ray output means moves the X-ray focal position of the X-ray source to each of the origin positions to generate the X-ray.

The X-ray output unit is configured to, from among the plurality of X-ray detectors disposed at the imaging position, the plurality of X-ray focal points corresponding respectively to the plurality of X-ray detectors in the exposure state simultaneously. Generate x-rays,
The X-rays from the X-ray output means pass through the inspection object area from the corresponding X-ray focal point position to each of the X-ray detectors in the simultaneously exposed state, and while X-rays transmitted through the incident Te, X-rays from the X-ray focal position that does not correspond further comprises a shielding member for shielding, X-rays inspection apparatus according to claim 1.

The X-ray output means moves an X-ray focal position of the X-ray source by deflecting an electron beam to be irradiated onto a target surface which is a continuous surface of the X-ray source,
The X-ray output control means
For each X-ray detector the be simultaneously exposed state, the to be incident X-ray is time division, controls the X-ray output unit, X-ray inspection apparatus according to claim 1.

The X-ray examination apparatus according to claim 2 , wherein the image reconstruction processing means reconstructs the image data of the region to be examined by an iterative method.