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JP2009015944A - Optical disk device - Google Patents

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JP2009015944A
JP2009015944A JP2007174988A JP2007174988A JP2009015944A JP 2009015944 A JP2009015944 A JP 2009015944A JP 2007174988 A JP2007174988 A JP 2007174988A JP 2007174988 A JP2007174988 A JP 2007174988A JP 2009015944 A JP2009015944 A JP 2009015944A
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light
aberration
signal
optical
phase difference
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Hiromi Kudo
裕美 工藤
Takeshi Shimano
健 島野
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Hitachi Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To correct aberrations by detecting aberrations caused by adjustment of an optical element or aberrations generated by an optical recording medium. <P>SOLUTION: A homodyne system is applied to an optical system, aberrations are directly detected from a signal or the value of a phase difference obtained by using the homodyne system, the optical element of a unique grating structure, and a photodetector divided into two or more, and aberrations are corrected based on the result. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、光の収差検出機構及び収差補正機構を有する光ディスク装置に関する。   The present invention relates to an optical disc apparatus having an optical aberration detection mechanism and an aberration correction mechanism.

光記録技術において高密度かつ高速に記録再生を行うためには、光学系の収差が、ある基準以下に抑えられている必要がある。この基準としては、用いる光源の波長をλとするとき、たとえば収差の2乗平均平方根(Root Mean Square :RMS)値で0.07λとするマレシャルの基準を満たすことが必要である。ところが近年の光ディスクの高密度化に伴う対物レンズ開口数(Numerical Aperture :NA)の増大により、わずかな光学部品のずれ、ディスク基板の傾き、厚さずれでも容易にこの基準を超える収差が発生しやすくなっている。対物レンズで集光されるスポットの大きさはλ/NAに比例するため、記録密度を増大させるためにNAを大きくすることが検討されてきた。しかし一般にずれに対する収差発生の感度は、NAのべき乗に比例し、たとえば対物レンズの傾きなどで発生する非点収差はNAの2乗、ディスクの傾きで生じるコマ収差はNAの3乗、ディスク基板の厚さずれで発生する球面収差はNAの4乗に比例する収差を発生する。このことから光学部品調整の精度やディスク傾き、基板厚ずれなどをなるべく緩和するには、発生する収差を抑える工夫が必要となる。そのため、たとえばディスク基板厚ずれについて、球面収差を検出して補正する方法(特開2001-307349号公報)や、再生信号の振幅がなるべく大きくなるように、収差補正素子を制御する方法(特開2005-100483号公報)などが提案されている。また、特に光ディスク光学系の中で用いることを明示してはいないが、格子溝の方向が異なる回折格子を用いて回折光の位相を変化させ、0次光と+1次光(−1次光)を干渉させるシェアリング干渉を用いた検出方法などがある。   In order to perform recording and reproduction at high density and high speed in the optical recording technology, the aberration of the optical system needs to be suppressed to a certain standard or less. As this standard, when the wavelength of the light source to be used is λ, it is necessary to satisfy the Marshall standard, for example, 0.07λ as a root mean square (RMS) value of aberration. However, due to the increase in the numerical aperture (NA) associated with the recent increase in the density of optical discs, aberrations that exceed this standard can easily occur even with slight optical component deviations, disc substrate tilts, and thickness deviations. It has become easier. Since the size of the spot focused by the objective lens is proportional to λ / NA, it has been studied to increase the NA in order to increase the recording density. However, in general, the sensitivity of aberration generation with respect to deviation is proportional to the power of NA. For example, astigmatism caused by the tilt of the objective lens is the square of NA, the coma caused by the tilt of the disk is the cube of NA, and the disk substrate. Spherical aberration that occurs due to the difference in thickness of the lens generates aberration proportional to the fourth power of NA. For this reason, in order to reduce the accuracy of optical component adjustment, disk tilt, substrate thickness deviation, and the like as much as possible, it is necessary to devise a technique for suppressing the generated aberration. Therefore, for example, a method of detecting and correcting spherical aberration for disc substrate thickness deviation (Japanese Patent Laid-Open No. 2001-307349), or a method of controlling an aberration correction element so that the amplitude of a reproduction signal is as large as possible (Japanese Patent Laid-Open No. 2001-307349). 2005-100483) and the like have been proposed. In addition, although it is not specified to be used in an optical disk optical system, the phase of diffracted light is changed using diffraction gratings having different grating groove directions, and 0th-order light and + 1st-order light (−1st-order light) are used. For example, a detection method using sharing interference.

特開2001-307349号公報JP 2001-307349 A 特開2005-100483号公報JP 2005-100483 A 特開2002-202223号公報JP 2002-202223 A

特開2001-307349号公報に記載された方法は、球面収差の検出のみしか想定しておらず、コマ収差や非点収差などの収差が検出できないという問題点がある。特開2005-100483号公報に記載された方法は、直接的に収差を検出するわけではなく、収差による信号振幅劣化がなるべく少なく、信号振幅がなるべく大きい補正条件を探索する手法であるため、試行錯誤が必要である上、ピーク近傍で変化の微分係数が0となり検出誤差が大きいという問題点がある。特開2002-202223号公報に記載されたシェアリング干渉を用いる方法は、機構が複雑かつ大型で電力浪費量も大きく、光ディスク装置に搭載しにくいという問題点がある。   The method described in Japanese Patent Laid-Open No. 2001-307349 assumes only detection of spherical aberration, and has a problem that it cannot detect aberrations such as coma and astigmatism. The method described in Japanese Patent Laid-Open No. 2005-100483 does not directly detect aberrations, but is a method for searching for a correction condition with as little signal amplitude degradation as possible and as large signal amplitude as possible. In addition to the need for mistakes, there is a problem that the differential coefficient of change near the peak becomes 0 and the detection error is large. The method using sharing interference described in Japanese Patent Application Laid-Open No. 2002-202223 has a problem that the mechanism is complicated and large in size, has a large amount of power consumption, and is difficult to mount on an optical disc apparatus.

以上の従来技術の問題点に鑑みて、本発明の解決すべき課題は、簡単な構造で任意の収差を検出し、補正することができる高効率の光ディスク装置を提供することである。   In view of the above problems of the prior art, the problem to be solved by the present invention is to provide a highly efficient optical disc apparatus capable of detecting and correcting an arbitrary aberration with a simple structure.

本発明では、光ディスク装置の光学系にホモダイン光検出方式と呼ばれる方式を適用し、光ディスクから反射される光束の収差を、間接的にではなく直接的に位相分布として検出し、その結果をもとに収差補正を行う。ホモダイン光検出方式は、光通信の分野で検出信号の高S/N化のために検討された方式であり、通常は信号振幅の増幅の目的で用いられている。しかし本発明ではそれを光の位相検出に用いるものである。   In the present invention, a method called a homodyne light detection method is applied to the optical system of the optical disk device, and the aberration of the light beam reflected from the optical disk is detected not directly but as a phase distribution. Aberration correction is performed. The homodyne light detection method is a method studied for increasing the S / N ratio of detection signals in the field of optical communication, and is usually used for the purpose of signal amplitude amplification. However, in the present invention, it is used for detecting the phase of light.

本発明の光ディスク装置は、半導体レーザなどの光源と、光源から出射した光を第1と第2の光束に分割する第1の分割手段と、収差を補正する手段と、収差を補正するためのフィードバック制御を行う手段と、第1の光束を光情報記録媒体上に集光して照射する手段と、第2の光束を光情報記録媒体には集光せずに参照光として反射させる手段と、光情報記録媒体から反射した信号光と参照光を再び第1の分割手段に導いて重ね合わせて干渉させた第3の光束を分割するとともに、分割されたそれぞれの光に含まれる信号光と参照光の位相関係を互いに異ならしめる第2の分割手段と、第2の分割手段により分割されたそれぞれの第4の光束をそれぞれ相互に対応する複数の領域に分割して各領域ごとに光強度を電気信号として検出する検出手段と、すべての第4の光束の対応する各領域の電気信号を用いて第3の光束の対応する各領域における信号光と参照光の位相差を求める演算手段と、演算手段の演算結果を用いて収差補正手段を制御する制御手段を備える。   An optical disc apparatus according to the present invention includes a light source such as a semiconductor laser, a first dividing unit that divides light emitted from the light source into first and second light beams, a unit that corrects aberration, and a component for correcting aberration. Means for performing feedback control, means for condensing and irradiating the first light flux on the optical information recording medium, means for reflecting the second light flux as reference light without condensing on the optical information recording medium, and The signal light reflected from the optical information recording medium and the reference light are again guided to the first splitting means to superimpose and interfere with the third light flux, and the signal light included in each of the split lights A second dividing unit that makes the phase relationship of the reference light different from each other, and each fourth light beam divided by the second dividing unit is divided into a plurality of mutually corresponding regions, and the light intensity for each region Is detected as an electrical signal. Means for calculating the phase difference between the signal light and the reference light in each corresponding region of the third light flux using the electrical signals of each corresponding region of all the fourth light fluxes, Control means for controlling the aberration correction means is provided.

本発明によると、簡単な構造にもかかわらず、任意の収差を検出することが可能で、検出された収差を補正することによって良好な記録再生を行うことが可能になる。また、光ディスク装置に搭載可能な軽量・小型化が実現できる。   According to the present invention, it is possible to detect an arbitrary aberration regardless of a simple structure, and it is possible to perform good recording and reproduction by correcting the detected aberration. Further, it is possible to realize a light weight and downsizing that can be mounted on an optical disk device.

以下、図を用いて本発明の実施形態を説明する。
図1は、本発明による光ディスク装置の一例を示す概略図である。半導体レーザ101からの光をコリメートレンズ102によって平行光にして、λ/2板103を透過させて偏光プリズム104に入射させる。偏光プリズム104は分離面に入射するP偏光をほぼ100%透過し、S偏光をほぼ100%反射させる機能を有している。このときλ/2板の光軸周りの回転角度を調整することにより、一部の光をS偏光として偏光プリズム104を反射させ、一部の光をP偏光として透過させるようにすることができる。反射する光はλ/4板105を透過して円偏光に変換され、2次元アクチュエータ106に搭載された対物レンズ107により、光ディスク108上の記録膜に集光される。光ディスクからの反射光は同じ光路を戻り、対物レンズ107によって平行光とされ、λ/4板105により最初に入射したときとは90°偏光方向が回転した直線偏光となって偏光プリズム104に入射する。すると偏光が回転しているため、この光ディスク108からの反射光はP偏光となって偏光プリズム104を透過し、偏光プリズム125に入射する。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic view showing an example of an optical disc apparatus according to the present invention. The light from the semiconductor laser 101 is converted into parallel light by the collimator lens 102, transmitted through the λ / 2 plate 103, and incident on the polarizing prism 104. The polarizing prism 104 has a function of transmitting almost 100% of the P-polarized light incident on the separation surface and reflecting almost 100% of the S-polarized light. At this time, by adjusting the rotation angle around the optical axis of the λ / 2 plate, a part of the light can be reflected as the S-polarized light and the polarizing prism 104 can be reflected, and a part of the light can be transmitted as the P-polarized light. . The reflected light passes through the λ / 4 plate 105 and is converted into circularly polarized light, and is condensed on the recording film on the optical disk 108 by the objective lens 107 mounted on the two-dimensional actuator 106. The reflected light from the optical disk returns to the same optical path, is converted into parallel light by the objective lens 107, and is incident on the polarizing prism 104 as linearly polarized light whose polarization direction is rotated by 90 ° when it is first incident on the λ / 4 plate 105. To do. Then, since the polarized light is rotated, the reflected light from the optical disk 108 becomes P-polarized light, passes through the polarizing prism 104, and enters the polarizing prism 125.

一方、半導体レーザ101からの光のうち、偏光プリズム104を透過したP偏光はλ/4板110により円偏光に変換され、光軸方向に可動する1次元アクチュエータ111に搭載されたコーナーキューブプリズム112に入射する。コーナーキューブプリズム112は、立方体の対向する頂点を結んだ対角線に垂直な面で立方体を切断した形状を有し、切断面の方から光を入射させると、どのような入射角で光を入射させても反射光路の対称性から、反射光が必ず入射光と同じ方向に戻る素子である。コーナーキューブプリズム112からの反射光は偏光方向が回転しているので補償素子130をコーナーキューブ稜線に合わせて貼り付けることで補償する。補償された反射光、すなわち参照光は、光軸を同じくして同じ光路を戻り、λ/4板110により入射時と偏光方向が90°回転した直線偏光となって偏光プリズム104に入射する。すると偏光が回転しているため、このコーナーキューブプリズム112からの反射光はS偏光となって偏光プリズム104を反射し、光ディスク108からの反射光と重なり合って偏光プリズム125に入射する。ただし光ディスク108からの反射光とコーナーキューブプリズム112からの反射光は互いに直交する直線偏光となっている。   On the other hand, of the light from the semiconductor laser 101, P-polarized light transmitted through the polarizing prism 104 is converted into circularly polarized light by the λ / 4 plate 110, and the corner cube prism 112 mounted on the one-dimensional actuator 111 movable in the optical axis direction. Is incident on. The corner cube prism 112 has a shape in which a cube is cut by a plane perpendicular to a diagonal line connecting opposite vertices of the cube. When light is incident from the cut surface, the incident angle is any incident angle. However, due to the symmetry of the reflected light path, the reflected light always returns in the same direction as the incident light. Since the polarization direction of the reflected light from the corner cube prism 112 is rotated, the compensating element 130 is compensated by being attached to the corner cube ridge line. The compensated reflected light, that is, the reference light returns along the same optical path with the same optical axis, and enters the polarizing prism 104 as linearly polarized light whose polarization direction is rotated by 90 ° by the λ / 4 plate 110. Then, since the polarized light is rotated, the reflected light from the corner cube prism 112 becomes S-polarized light, reflects off the polarizing prism 104, and enters the polarizing prism 125 so as to overlap with the reflected light from the optical disk. However, the reflected light from the optical disk 108 and the reflected light from the corner cube prism 112 are linearly polarized light orthogonal to each other.

偏光プリズム125は偏光プリズム104と異なり、P偏光の一部を透過させ、S偏光をほぼ100%反射させる機能を有する。これによりコーナーキューブプリズム112からの反射光はほぼ100%反射され、ディスクからの反射光は一部が偏光プリズム125を透過し、一部が反射される。反射された光は偏光位相変換分離素子114に入射し、さらに2つの光の干渉の位相差が異なる4つの光に分割される。位相差が異なる4つの光は、収差検出用の回折格子116によりさらに分割され、集光レンズ118により光検出器115に集光され検出される。   Unlike the polarizing prism 104, the polarizing prism 125 has a function of transmitting part of the P-polarized light and reflecting almost 100% of the S-polarized light. As a result, almost 100% of the reflected light from the corner cube prism 112 is reflected, and a part of the reflected light from the disk is transmitted through the polarizing prism 125 and a part thereof is reflected. The reflected light is incident on the polarization phase converting / separating element 114 and further divided into four lights having different phase differences of interference between the two lights. The four lights having different phase differences are further divided by the diffraction grating 116 for aberration detection, and are collected and detected by the condenser lens 118 on the photodetector 115.

ここで、偏光位相変換分離素子114と収差検出用の回折格子116及び光検出器115、光検出器からの信号のその後の信号処理の過程について詳細に説明する。   Here, the polarization phase conversion / separation element 114, the diffraction grating 116 for detecting aberration, the photodetector 115, and the subsequent signal processing of the signal from the photodetector will be described in detail.

偏光位相変換分離素子114は、図2に示すように、無偏光回折格子203と無偏光回折格子203により分割された少なくとも2つの光の一方には作用せず、少なくとももう一方の光を円偏光に変換する同一基板からなる角度選択的偏光変換素子204と偏光分離素子205からなる。これらのうち、角度選択的偏光変換素子204を光軸方向に光学軸を有する一軸性異方性光学材料で構成し、さらに偏光分離素子205と一体に張り合わせて形成することで小型化を実現する。   As shown in FIG. 2, the polarization phase conversion / separation element 114 does not act on one of at least two lights divided by the non-polarization diffraction grating 203 and the non-polarization diffraction grating 203, and at least the other light is circularly polarized. An angle selective polarization conversion element 204 and a polarization separation element 205 which are made of the same substrate to be converted into Of these, the angle-selective polarization conversion element 204 is formed of a uniaxial anisotropic optical material having an optical axis in the optical axis direction, and further formed integrally with the polarization separation element 205 to achieve miniaturization. .

まず、信号光偏光方向201と参照光偏光方向202が直交するように信号光と参照光が無偏光回折格子203に入射すると、偏光方向を問わずに2つの光はともに2つの異なる進行方向の光にそれぞれ分離する。これは無偏光回折格子203をブレーズ化することにより容易に可能である。一方は直進する0次光、他方は所定の回折角で回折する1次回折光である。次に、これらの光は光学軸206が素子の面に対して垂直な一軸異方性を持ち、かつ回折光の回折方向が信号光偏光方向201と参照光偏光方向202とそれぞれ実質的に45度をなす角度選択性偏光変換素子204に入射すると、直進する0次光には何ら位相差を生じないが、傾いて入射した1次回折光は位相差を生じ、信号光と参照光で回転方向が逆向きの円偏光に変換される。さらに、角度選択性偏光変換素子204の出射光を、光学軸207を図中の向きとする偏光分離回折格子205に入射させる。偏光分離回折格子は液晶や、ニオブ酸リチウム、水晶などの異方性材料によりブレーズ格子を形成することにより容易に実現できる。すなわち偏光方向により屈折率が異なる材質であるため、ある偏光方向とそれと直交する偏光方向とで格子によって加わる位相分布が逆転するように配置すればよい。これにより1次回折光と−1次回折光が直交する偏光方向となるようにすることができる。以上のようにして分離された4つの光における、信号光成分と参照光成分の干渉の位相差を0°,90°,180°,270°とすることができる。   First, when the signal light and the reference light are incident on the non-polarized diffraction grating 203 so that the signal light polarization direction 201 and the reference light polarization direction 202 are orthogonal to each other, both the two lights have two different traveling directions regardless of the polarization direction. Separate into light. This can be easily done by blazing the non-polarized diffraction grating 203. One is a 0th-order light traveling straight, and the other is a first-order diffracted light diffracted at a predetermined diffraction angle. Next, these lights have uniaxial anisotropy in which the optical axis 206 is perpendicular to the surface of the element, and the diffraction directions of the diffracted light are substantially 45 respectively in the signal light polarization direction 201 and the reference light polarization direction 202. When entering the angle-selective polarization conversion element 204 that makes a degree, there is no phase difference in the 0th-order light traveling straight, but the tilted incident first-order diffracted light produces a phase difference, and the signal light and the reference light rotate in the rotation direction. Is converted into circularly polarized light in the reverse direction. Further, the outgoing light of the angle selective polarization conversion element 204 is made incident on the polarization separation diffraction grating 205 with the optical axis 207 oriented in the figure. The polarization separation diffraction grating can be easily realized by forming a blaze grating with an anisotropic material such as liquid crystal, lithium niobate, or quartz. That is, since the refractive index differs depending on the polarization direction, the phase distribution applied by the grating may be reversed between a certain polarization direction and a polarization direction perpendicular thereto. As a result, the first-order diffracted light and the −1st-order diffracted light can be in the polarization directions orthogonal to each other. The phase difference of interference between the signal light component and the reference light component in the four lights separated as described above can be set to 0 °, 90 °, 180 °, and 270 °.

図3は、4つの光の干渉の位相差が0°,180°,90°,270°になることを説明するための図である。図中、Erefは参照光の電界ベクトル、Esigは信号光の電界ベクトルである。図3(a)は図2の直線偏光側の偏光状態、図3(b)は円偏光側の偏光状態である。PD1,PD2,PD3,PD4は、それぞれ位相差0°,180°,90°,270°の光を受光する図1の光検出器115上の図示していない受光部を意味しており、図3(a)(b)において斜めの軸に射影される光が対応する受光部で受光される光の成分であることを意味している。参照光と信号光は偏光方向が直交しているため、偏光分離回折格子によって分離される各偏光成分への射影ベクトルはPD1側で矢印が同じ向きとなり、PD2側で矢印が逆向きとなる。これによりPD1では参照光と信号光の位相差が0°、PD2では位相差が180°で干渉することになる。次に、図3(b)では参照光と信号光がともに回転方向の異なる円偏光となるため、それぞれのPD3側への射影ベクトルと、PD4側への射影ベクトルは矢印の先端がベクトルを示す線分の端ではなく途中の位置にずれていることになる。このときの位相差がそれぞれ90°と270°になるのである。   FIG. 3 is a diagram for explaining that the phase difference of interference of four lights becomes 0 °, 180 °, 90 °, and 270 °. In the figure, Eref is an electric field vector of reference light, and Esig is an electric field vector of signal light. 3A shows the polarization state on the linearly polarized light side in FIG. 2, and FIG. 3B shows the polarization state on the circularly polarized light side. PD1, PD2, PD3, and PD4 mean light receiving portions (not shown) on the photodetector 115 in FIG. 1 that receive light having phase differences of 0 °, 180 °, 90 °, and 270 °, respectively. 3 (a) and 3 (b) mean that the light projected on the oblique axis is a component of the light received by the corresponding light receiving unit. Since the polarization directions of the reference light and the signal light are orthogonal to each other, the projection vector to each polarization component separated by the polarization separation diffraction grating has the same direction of the arrow on the PD1 side and the reverse direction of the arrow on the PD2 side. As a result, interference occurs when the phase difference between the reference light and the signal light is 0 ° in PD1, and the phase difference is 180 ° in PD2. Next, in FIG. 3B, since both the reference light and the signal light are circularly polarized light having different rotation directions, the projection vector to the PD3 side and the projection vector to the PD4 side indicate vectors at the tip of the arrow. That is, it is shifted to the middle position instead of the end of the line segment. The phase difference at this time is 90 ° and 270 °, respectively.

本発明では後で説明するように、これらPD1,PD2,PD3,PD4をさらに空間的に分割して、ディスクの反射光束の位相分布、すなわち収差分布を検出するのであるが、ここではその前に、ホモダイン検出方式により信号光の振幅が参照光の振幅で増幅され、信号光と参照光の位相差が演算により求められることを以下に説明する。光検出器に入射した光の干渉強度はPD1(0°),PD2(180°),PD3(90°),PD4(270°)上でそれぞれ   In the present invention, as will be described later, these PD1, PD2, PD3, and PD4 are further spatially divided to detect the phase distribution of the reflected light beam of the disk, that is, the aberration distribution. The following explains that the amplitude of the signal light is amplified by the amplitude of the reference light by the homodyne detection method, and the phase difference between the signal light and the reference light is obtained by calculation. The interference intensity of light incident on the photodetector is PD1 (0 °), PD2 (180 °), PD3 (90 °), and PD4 (270 °).

Figure 2009015944
と表される。添字のsigは信号光、refは参照光を意味する。したがってこれらを用いて以下のような差動演算を行う。
Figure 2009015944
It is expressed. The subscript sig means signal light, and ref means reference light. Therefore, the following differential calculation is performed using these.

Figure 2009015944
さらにこれらを用いて
Figure 2009015944
Furthermore, using these

Figure 2009015944
のように参照光振幅により増幅された信号振幅と、参照光と信号光の位相差が求められることがわかる。従来のホモダイン検出では主に、この信号増幅効果を狙っているのであるが、本発明においては位相差を求める演算を光束内で分割して行うことにより、収差を検出するのである。
Figure 2009015944
It can be seen that the signal amplitude amplified by the reference light amplitude and the phase difference between the reference light and the signal light are obtained. The conventional homodyne detection mainly aims at this signal amplification effect, but in the present invention, the aberration is detected by dividing the calculation for obtaining the phase difference in the light beam.

次に、図1の収差検出用の回折格子116と収差検出用の回折格子116から出射された光を受光する光検出器115について図4、図5、図6、図7を用いて説明する。まず、収差検出用の回折格子を図4、図5のようにn分割の構造にする理由について説明する。収差Wは、光束の光軸を原点とし、有効径の半径で規格化した動径半径座標をρ、動径角をθとする極座標において、ゼルニケの直交多項式を用いて、   Next, the aberration detection diffraction grating 116 in FIG. 1 and the photodetector 115 that receives light emitted from the aberration detection diffraction grating 116 will be described with reference to FIGS. 4, 5, 6, and 7. . First, the reason why the diffraction grating for aberration detection is made into an n-divided structure as shown in FIGS. The aberration W is obtained by using Zernike's orthogonal polynomial in polar coordinates where the radial axis coordinate normalized by the radius of the effective diameter is ρ and the radial angle is θ, with the optical axis of the light beam as the origin.

Figure 2009015944
と展開することができる。右辺の第1項は定数の位相オフセット、第2項はx方向のチルト、第3項はy方向のチルト、第4項はデフォーカス、第5項は動径角0°または90°方向の非点収差、第6項は動径角45°方向の非点収差、第7項は動径角0°方向のコマ収差、第8項は動径角90°方向のコマ収差、第9項は3次の球面収差であり、Anは各収差係数である。これらがいわゆる3次収差までの展開項であり、光ピックアップの収差測定としては一般にここまでの展開項数で十分である。この式を光束内の既知の異なる位置(ρm,θm)における収差測定値Wmを用いて係数Anに対する連立方程式として
Figure 2009015944
And can be expanded. The first term on the right side is a constant phase offset, the second term is the tilt in the x direction, the third term is the tilt in the y direction, the fourth term is defocused, the fifth term is in the radial angle 0 ° or 90 ° direction Astigmatism, 6th term is astigmatism in radial angle 45 ° direction, 7th term is coma aberration in radial angle 0 ° direction, 8th term is coma aberration in radial angle 90 ° direction, 9th term Is a third-order spherical aberration, and An is each aberration coefficient. These are the expansion terms up to the so-called third-order aberration, and the expansion terms up to here are generally sufficient for measuring the aberration of the optical pickup. The formula known different positions within the light beam (ρ m, θ m) as simultaneous equations for the coefficients A n using an aberration measurement value W m of

Figure 2009015944
のように表すことができる。またこれを、行列を用いて示すと
Figure 2009015944
It can be expressed as And this is shown using a matrix

Figure 2009015944
と表される。したがってこの連立方程式はn=mのときに、一意に未知数である収差係数を決めることができる。n>mのときは解が不定になり係数を決めることはできない。n<mのときは求める係数の数よりも収差の測定点数の方が多いので、連立方程式としては一般に解は不能であるが、誤差を含む式と解釈すれば最小2乗法などによって誤差を最小とする係数を決めることができる。したがってたとえば図4のような構造の回折格子を用いて光束を未知数9個に分割し、m=n=9として上記の連立方程式を解くことにより、3次の各収差係数を検出することができる。検出できる収差の展開項数は図5に示す回折格子のように分割数nを増やすことにより増やすことができる。
Figure 2009015944
It is expressed. Therefore, this simultaneous equation can uniquely determine an unknown aberration coefficient when n = m. When n> m, the solution is indefinite and the coefficient cannot be determined. When n <m, the number of aberration measurement points is larger than the number of coefficients to be obtained, so it is generally impossible to solve as a simultaneous equation. However, if it is interpreted as an equation containing an error, the error is minimized by the least square method. Can be determined. Therefore, for example, by dividing the light beam into nine unknowns using a diffraction grating having a structure as shown in FIG. 4 and solving the above simultaneous equations with m = n = 9, each third-order aberration coefficient can be detected. . The number of aberration expansion terms that can be detected can be increased by increasing the number of divisions n as in the diffraction grating shown in FIG.

図1における収差検出用の回折格子116からの回折光が、図6のように+1次光は強度が0に等しくなるような構造の回折格子とし、−1次光を収差検出のための光、0次光を再生信号を得るための光とすると、収差検出用の回折格子116からの出射された光は図7に示すような光検出器において各々受光される。再生信号を得るための0次光は光検出器上において分割のない光検出器141,143,137,139で検出する。再生信号に寄与する信号については図7中の太線で示す。一方、収差検出のための−1次光はn分割光検出器140,142,136,138で検出する。収差検出に寄与する信号については図7中の細線で示す。図7中のPD1(0°),PD2(180°),PD3(90°),PD4(270°)は、図3で説明した位相差の異なる光を受光している光検出器である。   The diffraction light from the diffraction grating 116 for aberration detection in FIG. 1 is a diffraction grating having a structure in which the intensity of the + 1st order light is equal to 0 as shown in FIG. If the 0th-order light is used to obtain a reproduction signal, the light emitted from the diffraction grating 116 for detecting aberration is received by a photodetector as shown in FIG. Zero order light for obtaining a reproduction signal is detected by photodetectors 141, 143, 137, and 139 without division on the photodetector. Signals that contribute to the reproduction signal are indicated by thick lines in FIG. On the other hand, −1st order light for aberration detection is detected by n-divided photodetectors 140, 142, 136, and 138. Signals contributing to aberration detection are indicated by thin lines in FIG. PD1 (0 °), PD2 (180 °), PD3 (90 °), and PD4 (270 °) in FIG. 7 are photodetectors that receive light having different phase differences described in FIG.

まず、再生信号について説明する。光検出器141(PD1(0°))、光検出器143(PD2(180°))、光検出器137(PD3(90°))、光検出器139(PD4(270°))で受光された光のうち、光検出器141(PD1(0°))と光検出器143(PD2(180°))からの信号を差動増幅器121へ、光検出器137(PD3(90°))と光検出器139(PD4(270°))の信号を差動増幅器122へ入力し、そこで差動増幅演算を行い、信号Sig1_RFS、信号Sig2_RFSをそれぞれ出力する。出力されたSig1_RFS,Sig2_RFSを、次に再生信号演算回路144に入力する。再生信号演算回路144においてSig1_RFSの2乗とSig2_RFSの2乗を計算し、それらの和をとった後、平方根をとることで再生信号(RFS)を得る。   First, the reproduction signal will be described. Light is received by the light detector 141 (PD1 (0 °)), the light detector 143 (PD2 (180 °)), the light detector 137 (PD3 (90 °)), and the light detector 139 (PD4 (270 °)). Of the received light, signals from the photo detector 141 (PD1 (0 °)) and the photo detector 143 (PD2 (180 °)) are sent to the differential amplifier 121, and the photo detector 137 (PD3 (90 °)) The signal of the photodetector 139 (PD4 (270 °)) is input to the differential amplifier 122, where differential amplification is performed, and signals Sig1_RFS and Sig2_RFS are output, respectively. The output Sig1_RFS and Sig2_RFS are then input to the reproduction signal arithmetic circuit 144. The reproduction signal calculation circuit 144 calculates the square of Sig1_RFS and the square of Sig2_RFS, calculates the sum of them, and obtains the reproduction signal (RFS) by taking the square root.

次に、収差検出のための信号について説明する。光検出器140(PD1(0°))、光検出器142(PD2(180°))、光検出器136(PD3(90°))、光検出器138(PD4(270°))で受光された光のうち、光検出器140(PD1(0°))からの信号IPD1_nと光検出器142(PD2(180°))からの信号IPD2_nを差動増幅器121へ、光検出器136(PD3(90°))からの信号IPD3_nと光検出器138(PD4(270°))からの信号IPD4_nを差動増幅器122へ入力し、そこで差動増幅演算を行い、信号Sig1_n、信号Sig2_nをそれぞれ出力する。この出力信号を位相差演算回路120に入力し、位相差演算回路120において位相差計算を行う。 Next, signals for aberration detection will be described. Photodetector 140 (PD1 (0 °)), photodetector 142 (PD2 (180 °)), photodetector 136 (PD3 (90 °)), and photodetector 138 (PD4 (270 °)) Of the received light, the signal I PD1_n from the photodetector 140 (PD1 (0 °)) and the signal I PD2_n from the photodetector 142 (PD2 (180 °)) are sent to the differential amplifier 121 to the photodetector 136 ( PD3 signals I PD4_n from (90 °)) signals from I PD3_n photodetector 138 (PD4 (270 °)) input to the differential amplifier 122, where performs differential amplification operation, signal Sig1_n, signal Sig2_n Are output respectively. This output signal is input to the phase difference calculation circuit 120, and the phase difference calculation circuit 120 calculates the phase difference.

位相差演算回路120からの出力を収差計算機127に入力する。収差計算機127内では、まず位相差演算回路120からの出力を波長に換算した後、その値を式(1)に示したゼルニケの直交多項式に代入して、式(3)に示すn個の連立方程式を解く。   The output from the phase difference calculation circuit 120 is input to the aberration calculator 127. In the aberration calculator 127, first, the output from the phase difference calculation circuit 120 is converted into a wavelength, and the value is substituted into the Zernike orthogonal polynomial shown in the equation (1) to obtain n pieces of the equation (3). Solve simultaneous equations.

連立方程式の解が収差係数Anであるので、それらの値に基づいて各収差補正手段へフィードバックをかける。例えば式(1)中のA9(3次球面収差)に基づいて、ビームエキスパンダ113を制御することで球面収差の補正が可能であり、また、A7(0°方向コマ収差)、A8(90°方向コマ収差)に基づいてレンズチルト機構つきアクチュエータ106を制御し、A5(0°または90°方向の非点収差)、A6(45°方向の非点収差)に基づいて液晶素子117を制御する。これにより球面収差、コマ収差、非点収差の補正が可能である。 Since the solution of the simultaneous equations is a aberration coefficients A n, and feedback to the aberration correcting means on the basis of those values. For example, based on Equation (1) A 9 (3 order spherical aberration) in a spherical aberration can be corrected by controlling the beam expander 113, also, A 7 (0 ° direction coma), A The actuator 106 with a lens tilt mechanism is controlled based on 8 (90 ° direction astigmatism), and based on A 5 (0 ° or 90 ° direction astigmatism) and A 6 (45 ° direction astigmatism). The liquid crystal element 117 is controlled. This makes it possible to correct spherical aberration, coma and astigmatism.

ここで演算により求められる位相の値は、信号光と参照光の位相差であることに注意されたい。つまり、図1において半導体レーザを出射して、偏光ビームスプリッタ104までの光学系で生じる収差については、信号光と参照光の両方に生じることになるが、これは検出できない。逆に検出できるのはビームスプリッタにより信号光が参照光と分離されたあとに混入する収差なのであるが、これには対物レンズの調整ずれによって発生する非点収差や、ディスク基板厚ずれによって発生する球面収差など、主要な収差が含まれる。ただし、ディスク傾きによるコマ収差については、原点に対して奇関数となるため、往復光路でキャンセルされてしまい、検出ができない。   Note that the phase value obtained by the calculation here is the phase difference between the signal light and the reference light. That is, in FIG. 1, the aberration generated in the optical system from the semiconductor laser to the polarization beam splitter 104 occurs in both the signal light and the reference light, but this cannot be detected. On the contrary, what can be detected is an aberration that is mixed after the signal light is separated from the reference light by the beam splitter, but this is caused by astigmatism caused by misalignment of the objective lens and disc substrate thickness deviation. Major aberrations such as spherical aberration are included. However, the coma due to the disk tilt is an odd function with respect to the origin, and is canceled by the round-trip optical path and cannot be detected.

以上、実施形態においては、収差係数を演算により求めてから、それを収差補正素子の駆動信号とした。しかし、収差係数を求めるのは必ずしも必須ではない。たとえば図4、図5の回折素子131,153に示したような光束の分割領域に対応させて、液晶収差補正素子の独立に位相可変できる領域を分割しておけば、各検出領域における位相検出値を、そのまま液晶収差補正素子の分割領域の駆動信号として用いることもできる。この場合には収差係数の演算回路が不要となり、本発明を用いる光ディスク装置のコスト低減を図ることが可能となる。   As described above, in the embodiment, the aberration coefficient is obtained by calculation and then used as a drive signal for the aberration correction element. However, it is not always essential to obtain the aberration coefficient. For example, if a region where the phase of the liquid crystal aberration correction element can be varied independently is divided so as to correspond to the divided region of the light flux as shown in the diffraction elements 131 and 153 in FIGS. The value can be used as it is as a drive signal for the divided region of the liquid crystal aberration correction element. In this case, an arithmetic circuit for the aberration coefficient is not necessary, and the cost of the optical disk apparatus using the present invention can be reduced.

フォーカスエラー信号やトラッキングエラー信号によりデフォーカスやコマ収差も検出可能であるが、収差計算機127からの結果と合わせて2次元アクチュエータ106を制御することでデフォーカスやコマ収差の補正を行うことも可能である。収差補正を行う際、収差計算機127から得られる生の収差の値を用いて補正を行う方法もあるが、その他に従来の収差補正方法のように再生信号やジッタなどを用いた方法と合わせて補正を行っても良い。   Although defocus and coma aberration can be detected by the focus error signal and tracking error signal, it is possible to correct defocus and coma aberration by controlling the two-dimensional actuator 106 in accordance with the result from the aberration calculator 127. It is. When performing aberration correction, there is a method in which correction is performed using the raw aberration value obtained from the aberration calculator 127, but in addition to a method using a reproduction signal, jitter, or the like as in the conventional aberration correction method. Correction may be performed.

次に、フォーカスエラー信号とトラッキングエラー信号の算出について説明する。図1に戻り、偏光プリズム125を透過した光は、集光レンズ133により集光され、シリンドリカルレンズ119により非点収差を与えられて4分割光検出器128に入射し、その出力信号から信号演算回路129によりフォーカスエラー信号(FES)とトラッキングエラー信号(TES)が出力される。この演算過程を図8に簡単に示す。図1において4分割光検出器128の詳細は割愛したが、フォーカスエラー信号FES、トラッキングエラー信号TESの算出方法は先で説明した再生信号の算出方法と類似している。つまり、4分割光検出器(PD(N=1)(0°))、4分割光検出器(PD(N=2)(180°))、4分割光検出器(PD(N=3)(90°))、4分割光検出器(PD(N=4)(270°))で受光された光は、始めに各4分割光検出器からの4つの信号に対し、図8の左の図のような加算、減算を行いフォーカスエラー信号FES、トラッキングエラー信号TESをそれぞれ算出する。   Next, calculation of the focus error signal and the tracking error signal will be described. Returning to FIG. 1, the light transmitted through the polarizing prism 125 is condensed by the condenser lens 133, is given astigmatism by the cylindrical lens 119, enters the quadrant photodetector 128, and is signal-calculated from the output signal. The circuit 129 outputs a focus error signal (FES) and a tracking error signal (TES). This calculation process is simply shown in FIG. Although details of the quadrant photodetector 128 are omitted in FIG. 1, the calculation method of the focus error signal FES and the tracking error signal TES is similar to the reproduction signal calculation method described above. In other words, quadrant photodetector (PD (N = 1) (0 °)), quadrant photodetector (PD (N = 2) (180 °)), quadrant photodetector (PD (N = 3)) (90 °)) The light received by the quadrant photodetector (PD (N = 4) (270 °)) is initially left of FIG. 8 with respect to the four signals from each quadrant photodetector. The focus error signal FES and the tracking error signal TES are calculated by adding and subtracting as shown in FIG.

その後、FES1とFES2の信号を差動増幅器134へ、FES3とFES4の信号を差動増幅器123へ、TES1とTES2の信号を差動増幅器124へ、TES3とTES4の信号を差動増幅器126へ入力し、そこで差動増幅演算を行い、差動増幅器134からSig1_FESを、差動増幅器123からSig2_FESを、差動増幅器124からSig1_TESを、差動増幅器126からSig2_TESを得る。その後、Sig1_FESとSig2_FESを信号演算回路145に、Sig1_TESとSig2_TESを信号演算回路146に入力し、信号演算回路145ではSig1_FESの2乗とSig2_FESの2乗を計算し、それらの和をとった後、平方根をとることでフォーカスエラー信号FESを、信号演算回路146ではSig1_TESの2乗とSig2_TESの2乗を計算し、それらの和をとった後、平方根をとることでトラッキングエラー信号TESを得る。   Thereafter, the FES1 and FES2 signals are input to the differential amplifier 134, the FES3 and FES4 signals are input to the differential amplifier 123, the TES1 and TES2 signals are input to the differential amplifier 124, and the TES3 and TES4 signals are input to the differential amplifier 126. Then, differential amplification operation is performed to obtain Sig1_FES from the differential amplifier 134, Sig2_FES from the differential amplifier 123, Sig1_TES from the differential amplifier 124, and Sig2_TES from the differential amplifier 126. After that, Sig1_FES and Sig2_FES are input to the signal arithmetic circuit 145, and Sig1_TES and Sig2_TES are input to the signal arithmetic circuit 146. The signal arithmetic circuit 145 calculates the square of Sig1_FES and the square of Sig2_FES, and then sums them. By taking the square root, the focus error signal FES is calculated, and the signal calculation circuit 146 calculates the square of Sig1_TES and the square of Sig2_TES, and after taking the sum thereof, the tracking error signal TES is obtained by taking the square root.

フォーカスエラー信号FESは、対物レンズ107を搭載した2次元アクチュエータ106のフォーカス駆動端子にフィードバックされ、焦点位置が閉ループ制御される。さらに同じ信号がコーナーキューブプリズム112を搭載した1次元アクチュエータ111にもフィードバックされ、対物レンズ107と連動してコーナーキューブプリズム112も駆動される。これにより光ディスク108を反射した信号光と、コーナーキューブプリズム112を反射した参照光との光路差をほぼ0に保つことができる。通常の半導体レーザのコヒーレンス長は数10μmであるため、光路差の調整精度はこの範囲以下になっていればよい。トラッキングエラー信号TESは、対物レンズ107を搭載した2次元アクチュエータのトラッキング駆動端子にフィードバックされ、閉ループ制御される。   The focus error signal FES is fed back to the focus drive terminal of the two-dimensional actuator 106 on which the objective lens 107 is mounted, and the focus position is controlled in a closed loop. Further, the same signal is fed back to the one-dimensional actuator 111 on which the corner cube prism 112 is mounted, and the corner cube prism 112 is also driven in conjunction with the objective lens 107. Thereby, the optical path difference between the signal light reflected from the optical disk 108 and the reference light reflected from the corner cube prism 112 can be kept substantially zero. Since the coherence length of a normal semiconductor laser is several tens of μm, the adjustment accuracy of the optical path difference only needs to be within this range. The tracking error signal TES is fed back to the tracking drive terminal of the two-dimensional actuator equipped with the objective lens 107, and is subjected to closed loop control.

本発明により、光記録技術分野のみならず光学素子を利用する幅広い産業における応用が期待できる。   The present invention can be expected to be applied not only in the field of optical recording technology but also in a wide range of industries using optical elements.

本発明による光ディスク装置の一例を示す概略図。1 is a schematic diagram showing an example of an optical disc apparatus according to the present invention. 偏光位相変換分離素子の説明図。Explanatory drawing of a polarization phase conversion separation element. 位相差の説明図。Explanatory drawing of a phase difference. 収差検出に用いる回折格子と光検出器の説明図。Explanatory drawing of the diffraction grating and photodetector used for an aberration detection. 収差検出に用いる回折格子と光検出器の説明図。Explanatory drawing of the diffraction grating and photodetector used for an aberration detection. 収差検出に用いる回折格子のz方向の構造図。FIG. 3 is a structural diagram of a diffraction grating used for aberration detection in the z direction. 光検出器と演算回路系の説明図。Explanatory drawing of a photodetector and an arithmetic circuit system. 光検出器と演算回路系の説明図。Explanatory drawing of a photodetector and an arithmetic circuit system.

符号の説明Explanation of symbols

101:半導体レーザ、102:コリメートレンズ、103:λ/2板、104:偏光プリズム、105:λ/4板、106:2次元アクチュエータ、107:対物レンズ、108:光ディスク、109:スピンドルモータ、110:λ/4板、111:1次元アクチュエータ、112:コーナープリズム、113:ビームエキスパンダ、114:偏光位相変換分離素子、115:光検出器、116:回折格子、117:液晶素子、118:集光レンズ、119:シリンドリカルレンズ、 120:位相差演算回路、121〜124:差動増幅器、125:偏光プリズム(S偏光反射率100%)、126:差動増幅器、127:収差計算機、128:光検出器、129:信号演算回路、130:補償素子、131:回折格子、132:光検出器、133:集光レンズ、134:差動増幅器、135〜143:光検出器、144:再生信号演算回路、145:信号演算回路、146:信号演算回路、147〜150:加算器、151,152:演算器、153:回折格子、154:光検出器、201:信号光偏光方向、202:参照光偏光方向、203:無偏光回折格子、204:角度選択性偏光変換素子、205:偏光分離回折格子、206,207:光学軸 101: Semiconductor laser, 102: Collimating lens, 103: λ / 2 plate, 104: Polarizing prism, 105: λ / 4 plate, 106: Two-dimensional actuator, 107: Objective lens, 108: Optical disk, 109: Spindle motor, 110 : Λ / 4 plate, 111: one-dimensional actuator, 112: corner prism, 113: beam expander, 114: polarization phase conversion / separation element, 115: photodetector, 116: diffraction grating, 117: liquid crystal element, 118: collection Optical lens, 119: Cylindrical lens, 120: Phase difference calculation circuit, 121-124: Differential amplifier, 125: Polarizing prism (S-polarized reflectance 100%), 126: Differential amplifier, 127: Aberration calculator, 128: Light Detector: 129: signal operation circuit, 130: compensation element, 131: diffraction grating, 132: light detection 133: Condensing lens 134: Differential amplifier 135-143: Photo detector 144: Reproduction signal arithmetic circuit 145: Signal arithmetic circuit 146: Signal arithmetic circuit 147-150: Adder 151, 152 : Calculator, 153: diffraction grating, 154: photodetector, 201: polarization direction of signal light, 202: polarization direction of reference light, 203: non-polarization diffraction grating, 204: angle selective polarization conversion element, 205: polarization separation diffraction Grating, 206, 207: Optical axis

Claims (4)

光源と、
前記光源から出射した光を第1と第2の光束に分割する第1の分割手段と、
前記第1の光束を光情報記録媒体上に集光して照射する手段と、
前記第1の光束の収差を補正する収差補正手段と、
前記第2の光束を参照光として反射させる手段と、
光情報記録媒体から反射した信号光と前記参照光を再び前記第1の分割手段に導いて重ね合わせて干渉させた第3の光束を分割するとともに、分割されたそれぞれの光に含まれる前記信号光と前記参照光の位相関係を互いに異ならしめる第2の分割手段と、
前記第2の分割手段により分割されたそれぞれの第4の光束をそれぞれ相互に対応する複数の領域に分割して各領域ごとに光強度を電気信号として検出する検出手段と、
すべての前記第4の光束の対応する各領域の電気信号を用いて前記第3の光束の対応する各領域における信号光と参照光の位相差を求める演算手段と、
前記演算手段の演算結果を用いて前記収差補正手段を制御する制御手段と
を有することを特徴とする光ディスク装置。
A light source;
First splitting means for splitting the light emitted from the light source into first and second light fluxes;
Means for condensing and irradiating the first light flux on an optical information recording medium;
Aberration correcting means for correcting the aberration of the first luminous flux;
Means for reflecting the second light flux as reference light;
The signal light reflected from the optical information recording medium and the reference light are again guided to the first splitting unit to superimpose and interfere with the third light flux, and the signal included in each split light Second splitting means for making the phase relationship between the light and the reference light different from each other;
Detecting means for dividing each fourth light beam divided by the second dividing means into a plurality of mutually corresponding areas and detecting the light intensity as an electric signal for each area;
Calculating means for obtaining a phase difference between the signal light and the reference light in each corresponding region of the third light beam by using an electrical signal of each corresponding region of all the fourth light beams;
An optical disc apparatus comprising: a control unit that controls the aberration correction unit using a calculation result of the calculation unit.
請求項1に記載の光ディスク装置において、前記収差補正手段は、前記第4の光束の分割された各領域に対応する前記第3の光束の位相差の演算結果を用いて、前記第1の光束の対応する領域の収差を補正することを特徴とする光ディスク装置。   2. The optical disc apparatus according to claim 1, wherein the aberration correction unit uses the calculation result of the phase difference of the third light beam corresponding to each divided region of the fourth light beam. An optical disc apparatus that corrects aberrations in a corresponding area. 請求項1に記載の光ディスク装置において、前記演算手段において前記第3の光束の位相差の演算を行うとともに、球面収差と、2方向のコマ収差と、2方向の非点収差を独立に求め、この値に応じて前記制御手段を制御することを特徴とする光ディスク装置。   The optical disk device according to claim 1, wherein the arithmetic means calculates the phase difference of the third light flux, and independently obtains spherical aberration, coma in two directions, and astigmatism in two directions, An optical disc apparatus characterized by controlling the control means in accordance with this value. 請求項1に記載の光ディスク装置において、前記第4の光束を領域に分割して検出する分割数は9以上であることを特徴とする光ディスク装置。   2. The optical disc apparatus according to claim 1, wherein the number of divisions detected by dividing the fourth light flux into regions is 9 or more.
JP2007174988A 2007-07-03 2007-07-03 Optical disk device Pending JP2009015944A (en)

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